Processing data display image

Abstract

As shown in the reference image Fig. 2, search conditions for search items (12) are set in the search condition setting window (10), and past processing performed on wafers, etc. is searched for, and a search result summary (3) and search result list chart (4) are displayed in area (2) (for example, a time series graphic display or a time axis trend plot display). Multiple desired processing operations are selected from the search result list chart (4), and the data for the selected multiple processing operations is displayed in area (5). Area (5) shows, for example, a wafer map (9) that displays data for each part on the wafer in different colors.

Images