Processing data display image

Abstract

As shown in Reference Image Figure 2, search conditions for search items (12) are set in the search condition setting window (10), search conditions for additional search items (15), search for processing performed on wafers or the like in the past, and a search result summary (3) and search result list chart (4) are displayed in area (2) (for example, a time series graphic display or a time axis trend plot display). The desired processing is selected from the search result list chart (4), and the data for the selected processing is displayed in area (5). Area (5) shows, for example, a wafer map (9) that displays data for each part on the wafer in different colors.

Images