Processing data display image

Abstract

As shown in Reference Image Figure 2, the search condition setting window (10) is opened to set search conditions for the search items, and past processing performed on wafers, etc. is searched for, and a search result summary (3) and search result list chart (4) are displayed in area (2) (for example, a time axis trend plot display). The desired processing is selected from the search result list chart (4), and the data for the selected processing is displayed in area (5). Area (5) shows, for example, a wafer map (9) that displays data for each part on the wafer in different colors.

Images