Processing data display image
JP1815438SActive Publication Date: 2025-12-23APPLIED MATERIALS INC
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Patent Information
- Application Number
- JP2025012015D
- Authority / Receiving Office
- JP · JP
- Patent Type
- Designs
- Current Assignee / Owner
- Priority Date
- 2024-12-23
- Filing Date
- 2025-06-18
- Publication Date
- 2025-12-23
- Estimated Expiration
- 2050-06-18
Smart Images
Figure 0001815438000001 
Figure 0001815438000002 
Figure 0001815438000003
Abstract
As shown in Reference Image Figure 2, the search condition setting window (10) is opened to set search conditions for the search items, and the processing performed on the wafer etc. in the past is searched for, and any multiple data of the searched processing is displayed in area (5). Area (5) shows, for example, a wafer map (9) that displays data of each part on the wafer in different colors.
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