GUI for data configuration

JP1825350SActive Publication Date: 2026-04-24TOKYO ELECTRON LTD
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Patent Information

Authority / Receiving Office
JP · JP
Patent Type
Designs
Current Assignee / Owner
TOKYO ELECTRON LTD
Filing Date
2025-08-27
Publication Date
2026-04-24

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Abstract

This GUI is for a semiconductor device data analysis tool and is used to set the color and line type of sensor information displayed in charts (graphs). When the user clicks the "Change" icon in the upper left section of the display screen, selects a line on any chart that appears in the right-hand central section of the display screen, and right-clicks, a window for scale settings will pop up, allowing the user to change the color and line type of that chart. After selecting the chart color and line type in this window, the user can click the "Save" icon in the upper left section of the display screen to save the sensors and display settings displayed on the chart, and click the "Load" icon to display the chart reflecting the saved sensors and display content.
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