heater

JP1829780SActive Publication Date: 2026-06-22COORSTEK GK
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Patent Information

Authority / Receiving Office
JP · JP
Patent Type
Designs
Current Assignee / Owner
COORSTEK GK
Filing Date
2026-01-30
Publication Date
2026-06-22

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Abstract

This product is a heater used, for example, in the manufacturing process of semiconductor wafers. A heater element 3 is provided inside a glass pipe 1, and the heater element 3 is connected to a metal rod 2 to form a terminal portion 5. A reinforcing rod 4 made of glass is attached to reinforce the glass pipe 1. Furthermore, a reinforcing pipe 6 made of glass is attached to the glass pipe 1 between the terminal portions 5.
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