Substrate support and plasma processing device

Abstract

To provide a technique for mitigating the influence of a phase difference between the electric bias for a substrate and the electric bias for an edge ring on plasma processing.SOLUTION: A board support according to an embodiment includes a first region, a second region, a first electrode, and a second electrode. The first region is configured to hold the substrate mounted on the first region. The second region is provided so as to surround the first region and is configured to hold an edge ring mounted on the second region. The first electrode is provided in the first region to receive first electrical bias. The second electrode is provided at least in the second region to receive second electrical bias. The second electrode extends below the first electrode so as to face the first electrode in the first region.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] SUMMARY Exemplary embodiments of the present disclosure relate to a substrate support and a plasma processing apparatus. [Background technology]

[0002] A plasma processing apparatus is used in plasma processing of a substrate. The substrate is placed on a bias electrode and in a region surrounded by an edge ring in a chamber of the plasma processing apparatus. The edge ring is placed on the ring electrode. Patent Document 1 discloses such a plasma processing apparatus. The plasma processing apparatus disclosed in Patent Document 1 includes two bias power supplies. The two bias power supplies are connected to the bias electrode and the ring electrode, respectively, to form a flat plasma sheath on the substrate. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] US Patent Application Publication No. 2018 / 0082824 Summary of the Invention [Problem to be solved by the invention]

[0004] The present disclosure provides techniques for mitigating the effect of a phase difference between an electrical bias for a substrate and a second electrical bias for an edge ring on plasma processing. [Means for solving the problem]

[0005] In one exemplary embodiment, a substrate support is provided. The substrate support includes a first region, a second region, a first electrode, and a second electrode. The first region is configured to hold a substrate disposed thereon. The second region is configured to surround the first region and to hold an edge ring disposed thereon. The first electrode is disposed in the first region for receiving a first electrical bias. The second electrode is disposed in at least the second region for receiving a second electrical bias. The second electrode extends below the first electrode to face the first electrode in the first region. Effect of the Invention

[0006] According to one exemplary embodiment, the effect of a phase difference between an electrical bias for the substrate and an electrical bias for the edge ring on the plasma processing is mitigated. [Brief description of the drawings]

[0007] [Figure 1] 1 is a schematic diagram illustrating a plasma processing apparatus according to an exemplary embodiment; [Diagram 2] 1 is a diagram showing a configuration inside a chamber of a plasma processing apparatus according to an exemplary embodiment; [Diagram 3] 1 is a plan view that illustrates a schematic diagram of a first region, a second region, a first electrode, and a second electrode of a substrate support according to an exemplary embodiment; [Figure 4] 1 is a timing chart of an example of a first electrical bias, a second electrical bias, a potential of a first electrode, and a potential of a second electrode. [Diagram 5] 13 is a partial enlarged cross-sectional view of a substrate support according to another exemplary embodiment; [Figure 6] FIG. 13 is a schematic diagram of a plasma processing apparatus according to another exemplary embodiment. [Figure 7] FIG. 13 is a plan view that illustrates a first region, a second region, a first electrode, and a second electrode in a substrate support according to yet another exemplary embodiment. [Figure 8]FIG. 13 is a schematic diagram of a plasma processing apparatus according to yet another exemplary embodiment. [Figure 9] FIG. 13 is a schematic diagram of a plasma processing apparatus according to another exemplary embodiment. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0008] Various exemplary embodiments are described below.

[0009] In one exemplary embodiment, a substrate support is provided. The substrate support includes a first region, a second region, a first electrode, and a second electrode. The first region is configured to hold a substrate disposed thereon. The second region is configured to surround the first region and to hold an edge ring disposed thereon. The first electrode is disposed in the first region for receiving a first electrical bias. The second electrode is disposed in at least the second region for receiving a second electrical bias. The second electrode extends below the first electrode to face the first electrode in the first region.

[0010] In the substrate support of the above embodiment, the first electrode and the second electrode face each other in the first region, and are therefore capacitively coupled in the first region. Thus, a part of the second electric bias is applied to the first electrode, and a part of the first electric bias is applied to the second electrode. Thus, the potential difference between the first electrode and the second electrode caused by the phase difference between the first electric bias and the second electric bias is alleviated, and the potential difference between the substrate and the edge ring caused by the phase difference is alleviated. As a result, the effect of the phase difference between the first electric bias and the second electric bias on the plasma processing is alleviated.

[0011] In one exemplary embodiment, the first region may comprise a first electrostatic chuck configured to hold a substrate disposed thereon, and the second region may comprise a second electrostatic chuck configured to hold an edge ring disposed thereon.

[0012] In one exemplary embodiment, the first region may have a first dielectric portion and a second dielectric portion. The first dielectric portion extends around the first electrode. The second dielectric portion is formed from a dielectric material different from the dielectric material forming the first dielectric portion. The second dielectric portion is disposed between the first electrode and the second electrode.

[0013] In one exemplary embodiment, at least a portion of the second electrode may protrude from the second region into the first region.

[0014] In another exemplary embodiment, a plasma processing apparatus is provided, the plasma processing apparatus comprising a chamber and a substrate support, the substrate support being any of the substrate support of the various exemplary embodiments described above, the substrate support being configured to support a substrate and an edge ring within the chamber.

[0015] In one exemplary embodiment, the plasma processing apparatus may further include a first bias power supply and a second bias power supply, the first bias power supply configured to generate a first electrical bias and electrically connected to the first electrode, and the second bias power supply configured to generate a second electrical bias and electrically connected to the second electrode.

[0016] In one exemplary embodiment, each of the first and second electrical biases may be high frequency power. In one exemplary embodiment, each of the first and second electrical biases may be a periodically generated pulse wave including a pulse of a negative DC voltage.

[0017] In yet another exemplary embodiment, a plasma processing apparatus is provided. The plasma processing apparatus includes a chamber, a first bias power supply, a second bias power supply, a substrate support, a first electrical path, a second electrical path, and a capacitor. The first bias power supply is configured to generate a first electrical bias. The second bias power supply is configured to generate a second electrical bias. The substrate support is configured to support a substrate and an edge ring in the chamber. The substrate support has a first region, a second region, a first electrode, and a second electrode. The first region is configured to hold a substrate disposed thereon. The second region is configured to surround the first region and to hold an edge ring disposed thereon. The first electrode is disposed within the first region to receive the first electrical bias. The second electrode is disposed within the second region to receive the second electrical bias. The first electrical path is connected between the first bias power supply and the first electrode. A second electrical path is connected between a second bias power supply and the second electrode. A capacitor is connected between the first electrical path and the second electrical path.

[0018] In the plasma processing apparatus of the above embodiment, the first electrode and the second electrode are capacitively coupled by a capacitor. Therefore, a part of the second electric bias is applied to the first electrode, and a part of the first electric bias is applied to the second electrode. Therefore, the potential difference between the first electrode and the second electrode caused by the phase difference between the first electric bias and the second electric bias is alleviated, and the potential difference between the substrate and the edge ring caused by the phase difference is alleviated. As a result, the influence of the phase difference between the first electric bias and the second electric bias on the plasma processing is alleviated.

[0019] In one exemplary embodiment, each of the first and second electrical biases may be high frequency power. In one exemplary embodiment, each of the first and second electrical biases may be a periodically generated pulse wave including a pulse of a negative DC voltage.

[0020] In one exemplary embodiment, the capacitor may be a variable capacitor.

[0021] Various exemplary embodiments will now be described in detail with reference to the drawings, in which the same or corresponding parts are designated by the same reference numerals.

[0022] Fig. 1 is a diagram illustrating a schematic configuration of a plasma processing apparatus according to an exemplary embodiment. The plasma processing apparatus 1 illustrated in Fig. 1 includes a chamber 10. Fig. 2 is a diagram illustrating a configuration inside the chamber of the plasma processing apparatus according to an exemplary embodiment. As illustrated in Fig. 2, the plasma processing apparatus 1 may be a capacitively coupled plasma processing apparatus.

[0023] The chamber 10 provides an internal space 10s therein. The central axis of the internal space 10s is an axis AX extending in the vertical direction. In one embodiment, the chamber 10 includes a chamber body 12. The chamber body 12 has a substantially cylindrical shape. The internal space 10s is provided in the chamber body 12. The chamber body 12 is formed of, for example, aluminum. The chamber body 12 is electrically grounded. A plasma-resistant film is formed on the inner wall surface of the chamber body 12, i.e., the wall surface defining the internal space 10s. This film may be a ceramic film, such as a film formed by anodizing or a film formed of yttrium oxide.

[0024] A passage 12p is formed in the sidewall of the chamber body 12. The substrate W passes through the passage 12p when being transferred between the internal space 10s and the outside of the chamber 10. A gate valve 12g is provided along the sidewall of the chamber body 12 to open and close the passage 12p.

[0025] The plasma processing apparatus 1 further includes a substrate support 16. The substrate support 16 is configured to support a substrate W placed thereon in the chamber 10. The substrate W has a substantially disk shape. The substrate support 16 is supported by a support portion 17. The support portion 17 extends upward from the bottom of the chamber body 12. The support portion 17 has a substantially cylindrical shape. The support portion 17 is made of an insulating material such as quartz.

[0026] The substrate support 16 has a lower electrode 18 and an electrostatic chuck 20. The lower electrode 18 and the electrostatic chuck 20 are provided in the chamber 10. The lower electrode 18 is made of a conductive material such as aluminum, and has a substantially disk shape.

[0027] A flow path 18f is formed in the lower electrode 18. The flow path 18f is a flow path for a heat exchange medium. For example, a liquid refrigerant is used as the heat exchange medium. A supply device (for example, a chiller unit) for the heat exchange medium is connected to the flow path 18f. This supply device is provided outside the chamber 10. The heat exchange medium is supplied from the supply device through a pipe 23a to the flow path 18f. The heat exchange medium supplied to the flow path 18f is returned to the supply device through a pipe 23b.

[0028] The electrostatic chuck 20 is provided on the lower electrode 18. As shown in FIG. 1, the electrostatic chuck 20 has a dielectric portion 20d and an electrode 21a. The dielectric portion 20d is made of a dielectric material. The dielectric portion 20d is made of, for example, aluminum nitride or aluminum oxide. The electrostatic chuck 20 further has an electrode 22a and an electrode 22b. When the substrate W is processed in the internal space 10s, the substrate W is placed on the electrostatic chuck 20 and held by the electrostatic chuck 20. An edge ring ER is mounted on the substrate support 16. The edge ring ER is a plate having a substantially ring shape. The edge ring ER is made of, for example, silicon, silicon carbide, or quartz. As shown in FIG. 2, the edge ring ER is mounted on the substrate support 16 so that its central axis coincides with the axis AX. The substrate W accommodated in the chamber 10 is disposed on the electrostatic chuck 20 and in a region surrounded by the edge ring ER.

[0029] The plasma processing apparatus 1 may further include a gas line 25. The gas line 25 supplies a heat transfer gas, for example, He gas, from a gas supply mechanism to a gap between an upper surface of the electrostatic chuck 20 (a first region described later) and a rear surface (lower surface) of the substrate W.

[0030] The plasma processing apparatus 1 may further include an outer circumferential portion 28 and an outer circumferential portion 29. The outer circumferential portion 28 extends upward from the bottom of the chamber body 12. The outer circumferential portion 28 has a substantially cylindrical shape and extends along the outer periphery of the support portion 17. The outer circumferential portion 28 is formed of a conductive material and has a substantially cylindrical shape. The outer circumferential portion 28 is electrically grounded. A plasma-resistant film is formed on the surface of the outer circumferential portion 28. This film may be a ceramic film, such as a film formed by anodization or a film formed from yttrium oxide.

[0031] The outer peripheral portion 29 is provided on the outer peripheral portion 28. The outer peripheral portion 29 is made of an insulating material. The outer peripheral portion 29 is made of a ceramic such as quartz. The outer peripheral portion 29 has a substantially cylindrical shape. The outer peripheral portion 29 extends along the outer periphery of the lower electrode 18 and the electrostatic chuck 20.

[0032] The plasma processing apparatus 1 further includes an upper electrode 30. The upper electrode 30 is provided above the substrate support 16. The upper electrode 30 closes the upper opening of the chamber body 12 together with a member 32. The member 32 has insulating properties. The upper electrode 30 is supported by the upper part of the chamber body 12 via the member 32.

[0033] The upper electrode 30 includes a top plate 34 and a support 36. The lower surface of the top plate 34 defines an internal space 10s. A plurality of gas discharge holes 34a are formed in the top plate 34. Each of the plurality of gas discharge holes 34a penetrates the top plate 34 in the plate thickness direction (vertical direction). The top plate 34 is made of, for example, silicon. Alternatively, the top plate 34 may have a structure in which a plasma-resistant film is provided on the surface of an aluminum member. This film may be a ceramic film, such as a film formed by anodizing or a film formed of yttrium oxide.

[0034] The support 36 detachably supports the top plate 34. The support 36 is made of a conductive material such as aluminum. A gas diffusion chamber 36a is provided inside the support 36. A plurality of gas holes 36b extend downward from the gas diffusion chamber 36a. The plurality of gas holes 36b are connected to the plurality of gas discharge holes 34a, respectively. A gas introduction port 36c is formed in the support 36. The gas introduction port 36c is connected to the gas diffusion chamber 36a. A gas supply pipe 38 is connected to the gas introduction port 36c.

[0035] The gas source group 40 is connected to the gas supply pipe 38 via the valve group 41, the flow rate controller group 42, and the valve group 43. The gas source group 40, the valve group 41, the flow rate controller group 42, and the valve group 43 constitute a gas supply unit. The gas source group 40 includes a plurality of gas sources. Each of the valve group 41 and the valve group 43 includes a plurality of valves (e.g., on-off valves). The flow rate controller group 42 includes a plurality of flow rate controllers. Each of the plurality of flow rate controllers of the flow rate controller group 42 is a mass flow controller or a pressure control type flow rate controller. Each of the plurality of gas sources of the gas source group 40 is connected to the gas supply pipe 38 via a corresponding valve of the valve group 41, a corresponding flow rate controller of the flow rate controller group 42, and a corresponding valve of the valve group 43. The plasma processing apparatus 1 can supply gas from one or more gas sources selected from the plurality of gas sources of the gas source group 40 to the internal space 10s at individually adjusted flow rates.

[0036] A baffle plate 48 is provided between the outer periphery 28 and the side wall of the chamber body 12. The baffle plate 48 can be formed, for example, by coating an aluminum member with a ceramic such as yttrium oxide. A large number of through holes are formed in the baffle plate 48. Below the baffle plate 48, an exhaust pipe 52 is connected to the bottom of the chamber body 12. An exhaust device 50 is connected to the exhaust pipe 52. The exhaust device 50 has a pressure controller such as an automatic pressure control valve and a vacuum pump such as a turbo molecular pump, and can reduce the pressure in the internal space 10s.

[0037] The substrate support 16 will be described in detail below. As described above, the substrate support 16 has the lower electrode 18 and the electrostatic chuck 20. As shown in FIG. 1, the plasma processing apparatus 1 has a high-frequency power supply 57. The high-frequency power supply 57 is connected to the lower electrode 18 via a matching device 58. The high-frequency power supply 57 is a power supply that generates high-frequency power for generating plasma. The high-frequency power generated by the high-frequency power supply 57 has a first frequency. The first frequency can be a frequency in the range of 27 to 100 MHz. The first frequency is, for example, a frequency of 40 MHz or 60 MHz. The matching device 58 has a matching circuit for matching the impedance of the load side (lower electrode 18 side) of the high-frequency power supply 57 to the output impedance of the high-frequency power supply 57. Note that the high-frequency power supply 57 does not need to be electrically connected to the lower electrode 18, and may be connected to the upper electrode 30 via the matching device 58.

[0038] In the plasma processing apparatus 1, a high frequency electric field is generated in the chamber 10 by high frequency power from the high frequency power supply 57. The gas in the chamber 10 is excited by the generated high frequency electric field. As a result, plasma is generated in the chamber 10. The substrate W is processed by chemical species such as ions and / or radicals from the generated plasma. The processing of the substrate W by the chemical species from the plasma is, for example, etching.

[0039] The substrate support 16 has a first region 21 and a second region 22. FIG. 3 is a plan view that shows a first region, a second region, a first electrode, and a second electrode in a substrate support according to an exemplary embodiment. Hereinafter, FIG. 3 will be referred to together with FIG. 1 and FIG. 2. The first region 21 is a central region of the substrate support 16. The first region 21 includes a central region of the electrostatic chuck 20. The second region 22 extends in a circumferential direction radially outward from the first region 21. The second region 22 includes a peripheral region of the electrostatic chuck 20. In the plasma processing apparatus 1, the first region 21 and the second region 22 are formed of a single electrostatic chuck 20 and are integrated with each other. In FIG. 1, the boundary between the first region 21 and the second region 22 is indicated by a dashed line. In FIG. 3, the boundary between the first region 21 and the second region 22 is indicated by a dashed line.

[0040] The first region 21 is configured to support the substrate W placed thereon (i.e., on its upper surface). The first region 21 is a region having a disk shape. The central axis of the first region 21 approximately coincides with the axis AX. The first region 21 shares the dielectric portion 20d with the second region 22. The dielectric portion 20d has an approximately disk shape. In one embodiment, the thickness of the dielectric portion 20d in the second region 22 is smaller than the thickness of the dielectric portion 20d in the first region 21. The vertical position of the upper surface of the dielectric portion 20d in the second region 22 may be lower than the vertical position of the upper surface of the dielectric portion 20d in the first region 21.

[0041] The first region 21 has an electrode 21a (chuck electrode). The electrode 21a is a film-like electrode and is provided in the dielectric portion 20d in the first region 21. The planar shape of the electrode 21a may be circular. The central axis of the electrode 21a approximately coincides with the axis AX. A DC power supply 55 is connected to the electrode 21a via a switch 56. When a DC voltage from the DC power supply 55 is applied to the electrode 21a, an electrostatic attraction is generated between the first region 21 and the substrate W. The generated electrostatic attraction attracts the substrate W to the first region 21 and the substrate W is held by the first region 21. That is, the first region 21 constitutes a first electrostatic chuck configured to hold the substrate W placed thereon.

[0042] The substrate support 16 further includes a first electrode 211. The first electrode 211 is a film-like electrode and is provided in the dielectric portion 20d in the first region 21. The planar shape of the first electrode 211 may be circular. The central axis of the first electrode 211 approximately coincides with the axis AX. Note that the electrode 21a may extend closer to the top surface of the first region 21 than the first electrode 211 in the vertical direction.

[0043] The plasma processing apparatus 1 further includes a first bias power supply 61. The first bias power supply 61 is electrically connected to the first electrode 211 via a circuit 62. The first bias power supply 61 generates a first electric bias. The first electric bias is applied to the first electrode 211.

[0044] In one embodiment, the first electrical bias is a radio frequency bias power. The radio frequency bias power has a second frequency. The second frequency may be lower than the first frequency. The second frequency may be a frequency in the range of 100 kHz to 13.56 MHz. The second frequency is, for example, 400 kHz. When the first electrical bias is a radio frequency bias power, the circuit 62 is a matching circuit. The circuit 62 is configured to match the impedance of the load side of the first bias power supply 61 to the output impedance of the first bias power supply 61.

[0045] In another embodiment, the first electrical bias is a pulse wave periodically generated at the second frequency described above. In each period, the pulse wave includes a pulse of negative DC voltage. The voltage level of the pulse wave may be 0V in a period other than the period during which the pulse of negative DC voltage lasts in the period. Alternatively, the voltage of the pulse wave may have an absolute value lower than the absolute value of the voltage of the pulse in a period other than the period during which the pulse of negative DC voltage lasts in the period. Note that the voltage level of the pulse may vary over time in the period. When the first electrical bias is a pulse wave periodically generated, the circuit 62 may be an electrical filter configured to block or attenuate high frequency power from the high frequency power supply 57.

[0046] The second region 22 extends to surround the first region 21. The second region 22 is a substantially annular region. The central axis of the second region 22 substantially coincides with the axis AX. The second region 22 is configured to support an edge ring ER placed thereon (i.e., on its upper surface). The second region 22 shares the dielectric portion 20d with the first region 21.

[0047] In one embodiment, the second region 22 may hold the edge ring ER by electrostatic attraction. That is, the second region 22 may constitute a second electrostatic chuck configured to hold the edge ring ER placed thereon. In this embodiment, the second region 22 may have one or more electrodes (chuck electrodes). In one embodiment, the second region 22 has a pair of electrodes, namely, the electrode 22a and the electrode 22b. The electrode 22a and the electrode 22b are provided in the dielectric portion 20d in the second region 22. The electrode 22a and the electrode 22b constitute a bipolar electrode. That is, in one embodiment, the second region 22 constitutes a bipolar electrostatic chuck. Each of the electrode 22a and the electrode 22b is a film-like electrode. The planar shape of each of the electrode 22a and the electrode 22b is, for example, a ring shape. The electrode 22a may extend inside the electrode 22b. The electrodes 22a and 22b may extend at substantially the same height in the vertical direction. The electrodes 22a and 22b may extend closer to the top surface of the second region 22 in the vertical direction than a second electrode 222 described later.

[0048] A DC power supply 71 is connected to the electrode 22a via a switch 72 and a filter 73. The filter 73 is an electric filter configured to block or attenuate the high frequency power and the first and second electric biases. A DC power supply 74 is connected to the electrode 22b via a switch 75 and a filter 76. The filter 76 is an electric filter configured to block or attenuate the high frequency power and the first and second electric biases.

[0049] The DC power supplies 71 and 74 apply DC voltages to the electrodes 22a and 22b, respectively, so that a potential difference is generated between the electrodes 22a and 22b. The set potentials of the electrodes 22a and 22b may be any of a positive potential, a negative potential, and 0V. For example, the potential of the electrode 22a may be set to a positive potential, and the potential of the electrode 22b may be set to a negative potential. The potential difference between the electrodes 22a and 22b may be formed using a single DC power supply instead of two DC power supplies.

[0050] When a potential difference occurs between the electrodes 22a and 22b, an electrostatic attractive force is generated between the second region 22 and the edge ring ER. The edge ring ER is attracted to the second region 22 by the generated electrostatic attractive force and is held by the second region 22. The second region 22 may constitute a monopolar electrostatic chuck. When the second region 22 is a monopolar electrostatic chuck, a DC voltage is applied to one or more chuck electrodes in the second region 22.

[0051] The substrate support 16 further includes a second electrode 222. The second electrode 222 is a film-like electrode. The second electrode 222 is provided in the dielectric portion 20d. The second electrode 222 is provided at least in the second region 22. The second electrode 222 is separated from the first electrode 211. The second electrode 222 extends below the first electrode 211 so as to face the first electrode 211 in the first region 21. In one embodiment, the planar shape of the second electrode 222 may be annular. In this embodiment, the central axis of the second electrode 222 approximately coincides with the axis AX. In this embodiment, the radius of the inner edge 222i of the second electrode 222 is smaller than the radius of the outer edge 211e of the first electrode 211, and the radius of the outer edge 222o of the second electrode 222 is larger than the radius of the outer edge 211e of the first electrode 211.

[0052] The plasma processing apparatus 1 further includes a second bias power supply 81. The second bias power supply 81 is electrically connected to the second electrode 222 via a circuit 82. The second bias power supply 81 generates a second electric bias. The second electric bias is applied to the second electrode 222.

[0053] In one embodiment, the second electrical bias is a radio frequency bias power. The radio frequency bias power has the second frequency described above. When the second electrical bias is a radio frequency bias power, the circuit 82 is a matching circuit. The circuit 82 is configured to match the impedance of the load side of the second bias power supply 81 to the output impedance of the second bias power supply 81.

[0054] In another embodiment, the second electrical bias is a pulse wave periodically generated at the above-mentioned second frequency. In each period, the pulse wave includes a pulse of negative DC voltage. The voltage level of the pulse wave may be 0V in a period other than the period during which the pulse of negative DC voltage lasts in the period. Alternatively, the voltage of the pulse wave may have an absolute value lower than the absolute value of the voltage of the pulse in a period other than the period during which the pulse of negative DC voltage lasts in the period. Note that the voltage level of the pulse may vary over time in the period. When the second electrical bias is a pulse wave periodically generated, the circuit 82 may be an electrical filter configured to block or attenuate high frequency power from the high frequency power supply 57.

[0055] The second region 22 may further include a gas line 22g. The gas line 22g is provided to supply a heat transfer gas, for example, He gas, to the gap between the second region 22 and the edge ring ER. The gas line 22g is connected to a gas supply mechanism 86 that is a source of the heat transfer gas.

[0056] 2, the plasma processing apparatus 1 may further include a control unit MC. The control unit MC is a computer including a processor, a storage device, an input device, a display device, etc., and controls each part of the plasma processing apparatus 1. Specifically, the control unit MC executes a control program stored in the storage device, and controls each part of the plasma processing apparatus 1 based on recipe data stored in the storage device. Under the control of the control unit MC, a process specified by the recipe data is executed in the plasma processing apparatus 1.

[0057] As described above, in the substrate support 16, the first electrode 211 and the second electrode 222 face each other in the first region 21, and are therefore capacitively coupled in the first region 21. Thus, a part of the second electric bias is applied to the first electrode 211, and a part of the first electric bias is applied to the second electrode 222. Thus, the potential difference between the first electrode 211 and the second electrode 222 caused by the phase difference between the first electric bias and the second electric bias is alleviated, and the potential difference between the substrate W and the edge ring ER is alleviated. As a result, the effect of the phase difference between the first electric bias and the second electric bias on the plasma processing is alleviated.

[0058] Please refer to FIG. 4. FIG. 4 is a timing chart of an example of the first electric bias, the second electric bias, the potential of the first electrode, and the potential of the second electrode. In the example shown in FIG. 4, each of the first electric bias and the second electric bias is a pulse wave. In the example shown in FIG. 4, the phase of the second electric bias is delayed with respect to the phase of the first electric bias, but even during a period when the second electric bias is not applied to the second electrode 222, a part of the first electric bias is applied to the second electrode 222. Also, even during a period when the first electric bias is not applied to the first electrode 211, a part of the second electric bias is applied to the first electrode 211. Therefore, the potential difference between the first electrode 211 and the second electrode 222 caused by the phase difference between the first electric bias and the second electric bias is alleviated, and the potential difference between the substrate W and the edge ring ER is alleviated.

[0059] Please refer to FIG. 5. FIG. 5 is a partially enlarged cross-sectional view of a substrate support according to another exemplary embodiment. The substrate support 16B shown in FIG. 5 can be adopted in the plasma processing apparatus 1 in place of the substrate support 16. The substrate support 16B has a dielectric portion 20m, i.e., a second dielectric portion, in addition to the dielectric portion 20d, i.e., the first dielectric portion. Other configurations of the substrate support 16B can be the same as the corresponding configurations of the substrate support 16. The dielectric portion 20d extends around the first electrode 211. The dielectric portion 20m is formed from a dielectric different from the dielectric that forms the dielectric portion 20d. The dielectric portion 20m is provided between the first electrode 211 and the second electrode 222. According to this embodiment, by appropriately selecting the dielectric that forms the dielectric portion 20m, it is possible to set the electrostatic capacitance of the capacitor formed between the first electrode 211 and the second electrode 222. In one embodiment, the dielectric portion 20m may be formed of a dielectric having a higher dielectric constant and higher dielectric strength than the dielectric constant of the dielectric portion 20d. The dielectric portion 20m is formed of, for example, zirconia (ZrO2).

[0060] Please refer to FIG. 6. FIG. 6 is a diagram that shows a schematic diagram of a plasma processing apparatus according to another exemplary embodiment. The plasma processing apparatus 1C shown in FIG. 6 includes a substrate support 16C. The substrate support 16C is different from the substrate support 16 in that the electrode 21a also serves as the first electrode 211. The other configurations of the substrate support 16C may be the same as the corresponding configurations of the substrate support 16. The other configurations of the plasma processing apparatus 1C may be the same as the corresponding configurations of the plasma processing apparatus 1. Note that, in the substrate support 16C, a dielectric portion 20m different from the dielectric portion 20d may be provided between the first electrode 211 and the second electrode 222, similar to the substrate support 16B.

[0061] Please refer to FIG. 7. FIG. 7 is a plan view that shows a first region, a second region, a first electrode, and a second electrode in a substrate support according to yet another exemplary embodiment. The substrate support 16D shown in FIG. 7 can be adopted in the plasma processing apparatus 1 or 1C instead of the substrate support 16. The substrate support 16D has a second electrode 222D instead of the second electrode 222. The second electrode 222D is different from the second electrode 222 in that a plurality of portions of its inner edge side protrude from the second region 22 into the first region 21. The other configurations of the substrate support 16D may be the same as the corresponding configurations of the substrate support 16. Like the second electrode 222D in the substrate support 16, one or more portions of the inner edge side of the second electrode of the substrate support may protrude into the first region and extend below the first electrode.

[0062] In the substrate support 16D, similarly to the substrate support 16B, a dielectric portion 20m different from the dielectric portion 20d may be provided between the first electrode 211 and the second electrode 222D. Also in the substrate support 16D, the electrode 21a may also serve as the first electrode 211.

[0063] Please refer to FIG. 8. FIG. 8 is a schematic diagram of a plasma processing apparatus according to yet another exemplary embodiment. The plasma processing apparatus 1E shown in FIG. 8 includes a substrate support 16E. The substrate support 16E is different from the substrate support 16 in that the second electrode 222 extends in the second region 22 and does not extend into the first region 21. The other configurations of the substrate support 16E may be the same as the corresponding configurations of the substrate support 16. In the plasma processing apparatus 1E, a capacitor 90 is connected between the first electrical path 63 and the second electrical path 83. The first electrical path 63 is connected between the first bias power supply 61 and the first electrode 211. The second electrical path 83 is connected between the second bias power supply 81 and the second electrode 222. The capacitor 90 may be a fixed capacitance capacitor or a variable capacitor. It is to be noted that the other configurations of the plasma processing apparatus 1E may be the same as the corresponding configurations of the plasma processing apparatus 1.

[0064] In the plasma processing apparatus 1E, the first electrode 211 and the second electrode 222 are capacitively coupled by the capacitor 90. Therefore, a part of the second electric bias is applied to the first electrode 211, and a part of the first electric bias is applied to the second electrode 222. Therefore, the potential difference between the first electrode 211 and the second electrode 222 caused by the phase difference between the first electric bias and the second electric bias is alleviated, and the potential difference between the substrate W and the edge ring ER is alleviated. As a result, the influence of the phase difference between the first electric bias and the second electric bias on the plasma processing is alleviated.

[0065] Please refer to FIG. 9. FIG. 9 is a diagram that shows a schematic diagram of a plasma processing apparatus according to yet another exemplary embodiment. The plasma processing apparatus 1F shown in FIG. 9 includes a substrate support 16F. The substrate support 16F is different from the substrate support 16E in that the electrode 21a also serves as the first electrode 211, and the electrodes 22a and 22b also serve as the second electrode 222. The other configurations of the substrate support 16F may be the same as the corresponding configurations of the substrate support 16E. Also, the other configurations of the plasma processing apparatus 1F may be the same as the corresponding configurations of the plasma processing apparatus 1E. Note that, in the substrate support 16F, the first electrode 211 may be an electrode different from the electrode 21a. Alternatively, the second electrode 222 may be an electrode different from the electrodes 22a and 22b.

[0066] Although various exemplary embodiments have been described above, the present invention is not limited to the above-described exemplary embodiments, and various additions, omissions, substitutions, and modifications may be made. In addition, elements in different embodiments can be combined to form other embodiments.

[0067] In another embodiment, the plasma processing apparatus may be another type of plasma processing apparatus, such as an inductively coupled plasma processing apparatus, an electron cyclotron resonance (ECR) plasma processing apparatus, or a plasma processing apparatus that generates plasma using surface waves such as microwaves.

[0068] From the foregoing, it will be understood that various embodiments of the present disclosure have been described herein for purposes of illustration, and that various modifications may be made without departing from the scope and spirit of the present disclosure. Accordingly, the various embodiments disclosed herein are not intended to be limiting, with the true scope and spirit being indicated by the appended claims. [Explanation of symbols]

[0069] 1: plasma processing apparatus, 10: chamber, 16: substrate support, 21: first region, 22: second region, 211: first electrode, 222: second electrode.

Claims

1. A single dielectric part, a first region configured to hold a substrate; a second region surrounding the first region and configured to hold an edge ring; the single dielectric portion including a first electrode disposed within the first region and receiving a first electrical bias; a second electrode disposed within at least the second region and receiving a second electrical bias; Equipped with the first electrode and the second electrode are provided within the single dielectric portion, the second electrode extends below the first electrode so as to face the first electrode in the first region; Electrostatic chuck.

2. the first region defining a first electrostatic chuck configured to hold the substrate disposed thereon; the second region defining a second electrostatic chuck configured to hold the edge ring disposed thereon; 2. The electrostatic chuck of claim 1.

3. An electrostatic chuck as described in claim 1 or 2, wherein each of the first electrical bias and the second electrical bias is a pulse wave including a voltage pulse and generated periodically.

4. An electrostatic chuck as described in claim 1 or 2, wherein each of the first electrical bias and the second electrical bias is high frequency power.

5. 3. The electrostatic chuck of claim 1, wherein at least a portion of the second electrode protrudes from the second region into the first region.

6. An electrostatic chuck as described in claim 1, further comprising a chuck electrode extending within the first region closer to an upper surface of the first region than the first electrode.

7. An electrostatic chuck as described in claim 1, wherein the second electrode has a ring shape.

8. An electrostatic chuck as claimed in any one of claims 1 to 7, the electrostatic chuck being configured to support a substrate and an edge ring in a chamber; a lower electrode made of a conductive material and disposed below the electrostatic chuck; A substrate support comprising:

9. A chamber; A substrate support according to claim 8; A plasma processing apparatus comprising:

10. a first bias power supply configured to generate the first electrical bias and electrically connected to the first electrode; a second bias power supply configured to generate the second electrical bias and electrically connected to the second electrode; The plasma processing apparatus of claim 9 , further comprising:

11. The plasma processing apparatus of claim 10 , wherein each of the first electrical bias and the second electrical bias is a radio frequency power.

12. The plasma processing apparatus of claim 10 , wherein each of the first electric bias and the second electric bias is a pulse wave including a voltage pulse and generated periodically.

13. A plasma processing apparatus as described in claim 10, wherein a filter is provided between the first bias power supply and the first electrode, and a filter is provided between the second bias power supply and the second electrode.

14. The plasma processing apparatus of claim 9, further comprising a high frequency power source configured to generate high frequency power for plasma generation and electrically connected to the lower electrode.

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