Substrate transfer robot system

Abstract

To provide a substrate transport robot system that can suppress an increase in complexity of wiring and in size of an arm (increase in size of a substrate transport robot).SOLUTION: In a substrate transport robot system 100, a substrate transport robot 1 includes a hand sensor 22 provided on a substrate holding hand 20, and a hand circuit board 23 provided on the substrate holding hand 20 and connected to the hand sensor 22, and a robot control unit 2 and the hand circuit board 23 are serial communication connected via arm circuit boards 12, 13 in an arm 10.SELECTED DRAWING: Figure 2

Description

[Technical field]

[0001] The present invention relates to a substrate transport robot system, and more particularly to a substrate transport robot system including a hand sensor provided on a substrate holding hand. [Background technology]

[0002] 2. Description of the Related Art Conventionally, a substrate transport robot including a substrate transport hand has been known. Such a substrate transport robot is disclosed in, for example, Japanese Patent Application Laid-Open No. 2013-69914.

[0003] Japanese Patent Application Laid-Open Publication No. 2013-69914 discloses a substrate transport robot composed of a horizontal articulated robot. This substrate transport robot includes a base, an arm connected to the base and rotating in a horizontal plane, and a substrate transport hand connected to the arm and rotating in the horizontal plane. A control device is connected to the substrate transport robot. The control device controls the start and stop operations of the substrate transport robot. In this way, substrates are transported by the substrate transport robot.

[0004] Although not explicitly stated in JP 2013-69914 A, in conventional substrate transport robots such as those described in JP 2013-69914 A, a sensor for detecting the substrate held by the substrate transport hand may be provided on the substrate transport hand. In this case, a signal from the sensor is transmitted to a control device by wiring passing through the inside of the arm. [Prior art documents] [Patent documents]

[0005] [Patent Document 1] JP 2013-69914 A Summary of the Invention [Problem to be solved by the invention]

[0006] However, in a substrate transport robot provided with the above-mentioned sensors, when each sensor communicates with the robot control unit via the inside of the arm, wires for the number of sensors must be inserted from the substrate holding hand through the inside of the arm to the control device side, which results in complex wiring and the need to make the inside of the arm relatively large, resulting in problems of the substrate transport robot becoming larger.

[0007] The present invention has been made to solve the above-mentioned problems, and one object of the present invention is to provide a substrate transport robot system that can suppress the complexity of wiring and the increase in size of the arm (the increase in size of the substrate transport robot). [Means for solving the problem]

[0008] In order to achieve the above-mentioned object, a substrate transport robot system according to one aspect of the present invention comprises a substrate transport robot and a robot control unit that controls the substrate transport robot, the substrate transport robot including an arm, a substrate holding hand that is moved by the arm and rotatably connected to the arm and includes a blade that supports a substrate, a hand sensor provided on the substrate holding hand, and a hand circuit board that is provided on the substrate holding hand and connected to the hand sensor, and the robot control unit and the hand circuit board are serially connected via a cylindrical member provided inside the arm and in a movable part where the substrate holding hand and the arm move relatively to each other.

[0009] In the substrate transport robot system according to one aspect of the present invention, as described above, the robot control unit and the hand circuit board connected to the hand sensor are serially connected via the inside of the arm. This allows communication between the hand sensor and the robot control unit through a relatively small number of wires for serially connecting the robot control unit and the hand circuit board. Even when multiple hand sensors are provided, the multiple hand sensors and the hand circuit board are connected through multiple wires, while communication between the robot control unit and the hand circuit board is performed through a relatively small number of wires. As a result, the fewer wires required can prevent the wiring from becoming complicated and the arm from becoming larger (the substrate transport robot from becoming larger).

[0010] Furthermore, since the length of the wiring between the hand sensor and the hand circuit board is relatively short, it is possible to suppress the influence of external noise from increasing due to longer wiring. Effect of the Invention

[0011] According to the present invention, as described above, it is possible to suppress the complexity of wiring and the increase in size of the arm (the increase in size of the substrate transport robot). [Brief description of the drawings]

[0012] [Figure 1] 1 is a diagram showing a configuration of a substrate transport robot according to an embodiment of the present invention; [Diagram 2] 1 is a schematic diagram of a substrate transport robot system according to an embodiment of the present invention; [Diagram 3] FIG. 1 is a schematic diagram of a substrate transport robot system according to a comparative example. [Figure 4] FIG. 13 is a schematic diagram of a substrate transport robot system according to a first modified example of the present invention. [Diagram 5] FIG. 11 is a schematic diagram of a substrate transport robot system according to a second modified example of the present invention. [Figure 6] FIG. 13 is a schematic diagram of a substrate transport robot system according to a third modified example of the present invention. [Figure 7] FIG. 13 is a schematic diagram of a substrate transport robot system according to a fourth modified example of the present invention. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0013] DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will now be described with reference to the drawings.

[0014] The configuration of a substrate transport robot system 100 according to the present embodiment will be described with reference to FIGS.

[0015] 1 and 2, a substrate transfer robot system 100 according to this embodiment includes a substrate transfer robot 1 and a robot controller 2 (see FIG. 2) that controls the substrate transfer robot 1. The substrate transfer robot 1 is configured to be elevated relative to a substantially columnar housing 50 by an arm elevation mechanism (not shown) that raises and lowers an arm 10.

[0016] The substrate transport robot 1 is composed of a horizontal articulated robot. Specifically, the substrate transport robot 1 includes an arm 10, a substrate holding hand 20 including a blade 21 that is moved by the arm 10 and rotatably connected to the arm 10 and supports a substrate (semiconductor wafer) W, a substrate detection sensor 22 provided on the substrate holding hand 20, and a digital input circuit board 23 provided on the substrate holding hand 20 and connected to the substrate detection sensor 22. The substrate detection sensor 22 and the digital input circuit board 23 are connected by a wiring 23a. The substrate holding hand 20 has an upper substrate holding hand 20a and a lower substrate holding hand 20b that is disposed below the upper substrate holding hand 20a and operates separately from the upper substrate holding hand 20a. The wiring 23a is a wiring separate from the wiring 30 described later.

[0017] In this embodiment, a plurality of blades 21 are provided, and a plurality of board detection sensors 22 are provided corresponding to the plurality of blades 21. Each of the plurality of board detection sensors 22 and the digital input circuit board 23 are connected by wiring 23a. The plurality of blades 21 are arranged in a vertical direction while being spaced apart from each other. The plurality of blades 21 include a plurality of blades 21a attached to the upper board holding hand 20a and a blade 21b attached to the lower board holding hand 20b.

[0018] In this embodiment, the robot control unit 2 and the digital input circuit board 23 are serially connected (see wiring 30 in FIG. 2) through the inside of the arm 10. The digital input circuit board 23 is an example of a "hand circuit board" in the claims.

[0019] In this embodiment, the substrate transfer robot system 100 further includes an analog sensor 11 provided on the arm 10, an analog input circuit board 12 provided on the arm 10 and connected to the analog sensor 11, and a digital input / output circuit board 13 connected to the substrate detection sensor 22. The robot control unit 2, the analog input circuit board 12, the digital input / output circuit board 13, and the digital input circuit board 23 are serially connected by a daisy chain connection through the inside of the arm 10. The analog sensor 11 and the substrate detection sensor 22 are examples of the "arm sensor" and the "hand sensor" in the claims, respectively. The analog input circuit board 12 is an example of the "arm circuit board" and the "first arm circuit board" in the claims. The digital input / output circuit board 13 is an example of the "arm circuit board" and the "second arm circuit board" in the claims.

[0020] In this embodiment, the robot control unit 2, the analog input circuit board 12, and the digital input circuit board 23 are serially connected by a daisy chain connection through the inside of the arm 10 and through a movable part P1 at which the substrate holding hand 20 and the arm 10 are relatively movable. Note that a movable part P2 at which the wiring 30 of the serial communication connection moves is also present inside the base 40 on which the arm 10 is relatively movably disposed. A cylindrical member (not shown) is provided in the movable part P1, and the wiring 30 is arranged to pass through the inside of the cylindrical member.

[0021] In this embodiment, the arm 10 includes a first arm 10a configured to be rotatable around one end thereof as a rotation center, and a second arm 10b having one end rotatably connected to the other end of the first arm 10a, configured to be rotatable relative to the first arm 10a, and connected to the substrate holding hand 20. The analog input circuit board 12 and the digital input circuit board 23 are provided on at least one of the first arm 10a and the second arm 10b.

[0022] 2, both the first arm 10a and the second arm 10b rotate along a horizontal plane. The first arm 10a and the second arm 10b each have a space therein, through which the wiring 30 passes.

[0023] In this embodiment, the analog input circuit board 12 is provided on the first arm 10a, and the digital input circuit board 23 is provided on the second arm 10b. The analog input circuit board 12 is disposed in the space inside the first arm 10a, and the digital input circuit board 23 is disposed in the space inside the second arm 10b.

[0024] In this embodiment, a signal is input from the analog sensor 11 to the analog input circuit board 12. The analog sensor 11 and the analog input circuit board 12 are connected by a wiring 12a. The wiring 12a is a wiring separate from the wiring 30a.

[0025] In this embodiment, the analog sensor 11 is a sensor that detects things other than the rotation of the motor provided at the joint of the arm 10. Specifically, the analog sensor 11 includes at least one of a temperature sensor 11a, an acceleration sensor 11b, and a pressure sensor 11c. In this embodiment, all of the temperature sensor 11a, the acceleration sensor 11b, and the pressure sensor 11c are provided.

[0026] In this embodiment, the digital input / output circuit board 13 is connected to the board detection sensor 22 and transmits / receives signals to / from the board detection sensor 22. The digital input / output circuit board 13 and the board detection sensor 22 are connected to each other by a wiring 13a. The wiring 13a is a wiring separate from the wiring 30.

[0027] In this embodiment, the substrate transport robot system 100 further includes an electromagnetic valve 14 provided on the second arm 10b, which transmits and receives signals between the digital input / output circuit board 13 and adjusts the air sent to a cylinder 24 provided on the substrate holding hand 20. The electromagnetic valve 14 is used to control the opening and closing of a tube through which a fluid (such as air) passes. The digital input / output circuit board 13 and the electromagnetic valve 14 are connected by a wire 13a.

[0028] In this embodiment, the board detection sensor 22 is a sensor that detects things other than the rotation of the motor. Specifically, the board detection sensor 22 detects the presence of the board W supported by the blade 21. The digital input circuit board 23 receives a signal from the board detection sensor 22. The board detection sensor 22 is any one of a reflective optical sensor, a transmissive optical sensor, a capacitance sensor, a distance sensor, and a touch sensor designed on the assumption that it will come into contact with the board W. In this embodiment, the board detection sensor 22 is a reflective optical sensor.

[0029] In this embodiment, the robot control unit 2 and the digital input circuit board 23 are serially connected to each other by a communication network that allows the robot control unit 2 and the digital input circuit board 23 to share information with each other. Specifically, the robot control unit 2 and the analog input circuit board 12 are connected to each other by wiring 30 for serial communication connection. The analog input circuit board 12 and the digital input / output circuit board 13 are connected to each other by wiring 30 for serial communication connection. The digital input / output circuit board 13 and the digital input circuit board 23 are connected to each other by wiring 30 for serial communication connection. The analog input circuit board 12, the digital input / output circuit board 13, and the digital input circuit board 23 are provided with ICs for constructing a communication network that allows the robot control unit 2 and the digital input circuit board 23 to share information with each other.

[0030] Inside the base 40, a power supply board 41 for the encoder and an ID (identification) board 42 (not shown) are provided.

[0031] Next, a substrate transport robot system 600 according to a comparative example shown in FIG. 3 will be described.

[0032] 3, when each of the multiple substrate detection sensors 22 and other sensors (such as the analog sensor 11 and the electromagnetic valve 14) communicates with the robot control unit 2 via the inside of the arm 10, wiring 30 corresponding to the number of the substrate detection sensors 22 and other sensors is inserted into the robot control unit 2 via the inside of the arm 10. For this reason, it is necessary to make the inside of the arm 10 relatively large, and the substrate transfer robot 1 becomes large. Note that in FIG. 3, the wiring 30 extending from the multiple substrate detection sensors 22 is grouped together in the substrate holding hand 20, but in reality, the multiple wiring 30 extending from each of the multiple substrate detection sensors 22 is connected to the robot control unit 2 via the inside of the arm 10.

[0033] [Effects of this embodiment] In this embodiment, the following effects can be obtained.

[0034] In this embodiment, as described above, the robot control unit 2 and the digital input circuit board 23 connected to the substrate detection sensor 22 are serially connected through the inside of the arm 10, so that communication between the substrate detection sensor 22 and the robot control unit 2 can be performed by a relatively small number of wires 30 for serially connecting the robot control unit 2 and the digital input circuit board 23. Even if a plurality of substrate detection sensors 22 are provided, the plurality of substrate detection sensors 22 and the digital input circuit board 23 are connected by a plurality of wires 30, while communication between the robot control unit 2 and the digital input circuit board 23 is performed by a relatively small number of wires 30. As a result, since the number of wires 30 is reduced, it is possible to suppress the complication of the wires 30 and the increase in size of the arm 10 (the increase in size of the substrate transport robot 1).

[0035] Furthermore, since the length of the wiring 30 between the board detection sensor 22 and the digital input circuit board 23 is relatively short, the influence of external noise caused by the wiring 30 being longer can be suppressed.

[0036] In this embodiment, as described above, the analog sensor 11 is provided on the arm 10, the analog input circuit board 12 is provided on the arm 10 and connected to the analog sensor 11, and the digital input / output circuit board 13 is connected to the board detection sensor 22. The robot control unit 2, the analog input circuit board 12, the digital input / output circuit board 13, and the digital input circuit board 23 are serially connected by a daisy chain connection through the inside of the arm 10. As a result, unlike the case where each of the board detection sensor 22 and the analog sensor 11 is connected to the robot control unit 2 by the wiring 30, the robot control unit 2 can communicate with each of the board detection sensor 22 and the analog sensor 11 by a relatively small number of wirings 30 for serially connecting the robot control unit 2, the analog input circuit board 12, the digital input / output circuit board 13, and the digital input circuit board 23. As a result, in the configuration in which the analog input circuit board 12 and the digital input / output circuit board 13 are provided, the complexity of the wiring 30 and the size of the arm 10 (size of the board transport robot 1) can be suppressed.

[0037] In this embodiment, as described above, the robot control unit 2, the analog input circuit board 12, the digital input / output circuit board 13, and the digital input circuit board 23 are serially connected by a daisy chain connection through the inside of the arm 10 and the movable part P1 where the substrate holding hand 20 and the arm 10 move relatively. As a result, the robot control unit 2, the analog input circuit board 12, the digital input / output circuit board 13, and the digital input circuit board 23 are connected in series by a daisy chain connection, so that the number of wires 30 passing through the movable part P1 is relatively small. As a result, unlike the case where a relatively large number of wires 30 pass through the movable part P1, the movable part P1 can be easily moved.

[0038] In this embodiment, as described above, the arm 10 includes the first arm 10a configured to be rotatable around one end thereof as a rotation center, and the second arm 10b configured to be rotatable with respect to the first arm 10a and to which the substrate holding hand 20 is connected, one end of which is rotatably connected to the other end of the first arm 10a, and the analog input circuit board 12 and the digital input / output circuit board 13 are provided on at least one of the first arm 10a and the second arm 10b. This makes it possible to prevent the wiring 30 from becoming complicated and the arm 10 from becoming large (the substrate transport robot 1 from becoming large) in the substrate transport robot system 100 in which the analog input circuit board 12 and the digital input / output circuit board 13 are provided on at least one of the first arm 10a and the second arm 10b.

[0039] In this embodiment, as described above, the first arm 10a is provided with the analog input circuit board 12, and the second arm 10b is provided with the digital input / output circuit board 13. This makes it possible to prevent the wiring 30 from becoming complicated and the arm 10 from becoming large (the substrate transport robot 1) in the substrate transport robot system 100 in which both the analog input circuit board 12 and the digital input / output circuit board 13 are provided.

[0040] In addition, in this embodiment, as described above, an analog input circuit board 12 is provided to which a signal from the analog sensor 11 is input. This makes it possible to communicate between the robot control unit 2 and each of the board detection sensor 22 and analog sensor 11 while preventing the wiring 30 from becoming complicated, unlike the case where each of the board detection sensor 22 and analog sensor 11 is connected to the robot control unit 2 by wiring 30.

[0041] In this embodiment, as described above, the analog sensor 11 is a sensor that detects things other than the rotation of the motor provided at the joint of the arm 10. As a result, even if the analog sensor 11 is provided separately from the sensor that detects the rotation of the motor, the analog sensor 11 is connected for serial communication with the robot control unit 2 via the analog input circuit board 12, so that it is possible to suppress the complexity of the wiring 30 and the increase in size of the arm 10 (the increase in size of the substrate transport robot 1).

[0042] In this embodiment, as described above, the analog sensor 11 includes at least one of the temperature sensor 11a, the acceleration sensor 11b, and the pressure sensor 11c. As a result, even if at least one of the temperature sensor 11a, the acceleration sensor 11b, and the pressure sensor 11c is provided, at least one of the temperature sensor 11a, the acceleration sensor 11b, and the pressure sensor 11c is serially connected to the robot control unit 2 via the analog input circuit board 12, so that it is possible to suppress the complexity of the wiring 30 and the increase in size of the arm 10 (the increase in size of the substrate transport robot 1).

[0043] Furthermore, in this embodiment, as described above, there is provided a digital input / output circuit board 13 that is connected to the substrate detection sensor 22 and transmits / receives signals to / from the substrate detection sensor 22. As a result, even when the substrate detection sensor 22 is provided, the substrate detection sensor 22 is serially connected to the robot control unit 2 via the digital input / output circuit board 13, so that it is possible to prevent the wiring 30 from becoming complicated and the arm 10 from becoming larger (the substrate transport robot 1 from becoming larger).

[0044] Furthermore, in this embodiment, as described above, the electromagnetic valve 14 is provided on the second arm 10b, transmits and receives signals between the digital input / output circuit board 13, and adjusts the air sent to the cylinder 24 provided on the substrate holding hand 20. As a result, even when the electromagnetic valve 14 is provided on the second arm 10b, the electromagnetic valve 14 is serially connected to the robot control unit 2 via the digital input / output circuit board 13 of the second arm 10b, so that it is possible to prevent the wiring 30 from becoming complicated and the arm 10 from becoming large (the substrate transport robot 1 from becoming large).

[0045] In this embodiment, as described above, the substrate detection sensor 22 is a sensor that detects things other than the rotation of the motor. As a result, even if the substrate detection sensor 22 is provided separately from the sensor that detects the rotation of the motor, the substrate detection sensor 22 is serially connected to the robot control unit 2 via the digital input circuit board 23, so that it is possible to prevent the wiring 30 from becoming complicated and the arm 10 from becoming large (the substrate transport robot 1 from becoming large).

[0046] Furthermore, in this embodiment, as described above, a substrate detection sensor 22 is provided that detects the presence of the substrate W supported by the blade 21, and the digital input circuit board 23 receives a signal from the substrate detection sensor 22. As a result, even if the substrate detection sensor 22 is provided separately from a sensor that detects the rotation of the motor, the substrate detection sensor 22 is serially connected to the robot control unit 2 via the digital input circuit board 23, so that it is possible to prevent the wiring 30 from becoming complicated and the arm 10 from becoming larger (the substrate transport robot 1 from becoming larger).

[0047] In this embodiment, as described above, the robot control unit 2 and the digital input circuit board 23 are serially connected via a communication network that allows the robot control unit 2 and the digital input circuit board 23 to share information with each other. This allows the robot control unit 2 and the digital input circuit board 23 to share information with each other, making it easy to control the substrate transport robot system 100.

[0048] In this embodiment, as described above, a plurality of blades 21 are provided, and a plurality of substrate detection sensors 22 are provided corresponding to the plurality of blades 21. Here, when a plurality of substrate detection sensors 22 are provided, the number of wirings 30 extending from the substrate detection sensors 22 increases. Therefore, by connecting the plurality of wirings 30 extending from the plurality of substrate detection sensors 22 to the digital input circuit board 23 and connecting the digital input circuit board 23 to the robot control unit 2 by serial communication via the inside of the arm 10, it is possible to suppress the complication of the wirings 30 and the increase in size of the arm 10 (the increase in size of the substrate transport robot 1) even when a plurality of substrate detection sensors 22 are provided.

[0049] [Variations] The embodiments disclosed herein should be considered to be illustrative and not restrictive in all respects. The scope of the present invention is indicated by the claims, not by the description of the embodiments above, and further includes all modifications (variations) within the meaning and scope of the claims.

[0050] For example, in the above embodiment, an example has been shown in which the analog input circuit board 12 is provided on the first arm 10a and the digital input / output circuit board 13 is provided on the second arm 10b, but the present invention is not limited to this. For example, as in a substrate transport robot system 200 according to a first modified example shown in Fig. 4, the analog input circuit board 12 and the digital input / output circuit board 13 do not have to be provided on the arm 10. In this case, the digital input circuit board 23 and the robot control unit 2 are connected via serial communication.

[0051] In the above embodiment, an example has been shown in which the analog input circuit board 12 is provided on the first arm 10a and the digital input / output circuit board 13 is provided on the second arm 10b, but the present invention is not limited to this. For example, as in a substrate transport robot system 300 according to a second modified example shown in Fig. 5, the arm 10 may be provided with the digital input / output circuit board 13 but may not be provided with the analog input circuit board 12. In this case, the digital input circuit board 23, the digital input / output circuit board 13, and the robot control unit 2 are connected via serial communication.

[0052] In the above embodiment, an example has been shown in which the analog input circuit board 12 is provided on the first arm 10a and the digital input / output circuit board 13 is provided on the second arm 10b, but the present invention is not limited to this. For example, as in a substrate transport robot system 400 according to a third modified example shown in Fig. 6, the arm 10 may be provided with the analog input circuit board 12 but not with the digital input / output circuit board 13. In this case, the digital input circuit board 23, the analog input circuit board 12, and the robot control unit 2 are connected via serial communication.

[0053] In the above embodiment, an example has been shown in which the analog input circuit board 12 is provided on the first arm 10a and the digital input / output circuit board 13 is provided on the second arm 10b, but the present invention is not limited to this. For example, as in a substrate transfer robot system 500 according to a fourth modified example shown in Fig. 7, both the analog input circuit board 12 and the digital input / output circuit board 13 may be provided on the second arm 10b. Also, both the analog input circuit board 12 and the digital input / output circuit board 13 may be provided on the first arm 10a.

[0054] In the above embodiment, an example was shown in which a plurality of blades 21 and a plurality of substrate detection sensors 22 are provided, but the present invention is not limited to this. For example, the present invention may be applied to a substrate transport robot system in which one blade 21 and one substrate detection sensor 22 are provided.

[0055] In the above embodiment, the arm 10 has two arm portions, the first arm 10a and the second arm 10b, but the present invention is not limited to this. For example, the number of arm portions that the arm has may be a number other than two.

[0056] In the above embodiment, the analog sensor 11 includes the temperature sensor 11a, the acceleration sensor 11b, and the pressure sensor 11c, but the present invention is not limited to this. In the present invention, the analog sensor 11 may include sensors other than these sensors.

[0057] In the above embodiment, the "hand sensor" of the present invention is the board detection sensor 22, but the present invention is not limited to this. A sensor other than the board detection sensor 22 may be used as the "hand sensor" of the present invention. [Explanation of symbols]

[0058] 1. Substrate transport robot 2 Robot control unit 10 Arm 10a First Arm 10b Second Arm 11 Analog sensor (sensor for arm) 11a Temperature Sensor 11b Acceleration sensor 11c Pressure Sensor 12 Analog input circuit board (arm circuit board, first arm circuit board) 13 Digital input / output circuit board (arm circuit board, second arm circuit board) 14 Solenoid valve 20 Substrate holding hand 21 Blade 22 Board detection sensor (hand sensor) 23 Digital input circuit board (hand circuit board) 24 cylinders P1 moving part W substrate

Claims

1. A substrate transport robot; a robot control unit for controlling the substrate transport robot, The substrate transport robot includes: An arm, a substrate holding hand including a blade moved by the arm and pivotally connected to the arm, the substrate holding hand supporting a substrate; a hand sensor provided on the substrate holding hand; a hand circuit board provided in the board holding hand and connected to the hand sensor; A substrate transport robot system in which the robot control unit and the hand circuit board are serially connected via a cylindrical member provided inside the arm and in a movable part where the substrate holding hand and the arm move relatively to each other.

2. an arm sensor provided on the arm; an arm circuit board provided on the arm and connected to at least one of the arm sensor and the hand sensor, 2. The substrate transport robot system according to claim 1, wherein the robot control unit, the arm circuit board, and the hand circuit board are serially connected via a daisy chain connection through the inside of the arm.

3. 3. The substrate transport robot system of claim 2, wherein the robot control unit, the arm circuit board, and the hand circuit board are serially communication connected by the daisy chain connection through the inside of the arm and the movable part by which the substrate holding hand and the arm move relatively to each other.

4. the arm includes a first arm configured to be rotatable around one end thereof as a rotation center, and a second arm having one end rotatably connected to the other end of the first arm, configured to be rotatable with respect to the first arm, and to which the substrate holding hand is connected; The substrate transfer robot system according to claim 2 , wherein the arm circuit board is provided on at least one of the first arm and the second arm.

5. 5. The substrate transfer robot system according to claim 4, wherein the arm circuit board includes a first arm circuit board provided on the first arm, and a second arm circuit board provided on the second arm.

6. the arm sensor includes an analog sensor, 6. The substrate transfer robot system according to claim 5, wherein at least one of the first arm circuit board and the second arm circuit board includes an analog input circuit board to which a signal from the analog sensor is input.

7. 7. The substrate transport robot system according to claim 6, wherein the analog sensor is a sensor for detecting something other than rotation of a motor provided at a joint of the arm.

8. The substrate transfer robot system according to claim 7 , wherein the analog sensor includes at least one of a temperature sensor, an acceleration sensor, and a pressure sensor.

9. 6. The substrate transfer robot system according to claim 5, wherein the second arm circuit board includes a digital input / output circuit board connected to the hand sensor for transmitting and receiving signals to and from the hand sensor.

10. 10. The substrate transport robot system according to claim 9, further comprising an electromagnetic valve provided on the second arm for transmitting and receiving signals between the digital input / output circuit board and adjusting air sent to a cylinder provided on the substrate holding hand.

11. 2. The substrate transport robot system according to claim 1, wherein the hand sensor is a sensor that detects something other than the rotation of a motor.

12. the hand sensor includes a substrate detection sensor that detects the presence of the substrate supported by the blade, The substrate transport robot system of claim 11 , wherein the hand circuit board includes a digital input circuit board that receives signals from the substrate detection sensor.

13. 2. The substrate transport robot system according to claim 1, wherein the robot control unit and the hand circuit board are serially connected via a communication network that enables the robot control unit and the hand circuit board to share information with each other.

14. The blade is provided in plurality, The substrate transport robot system according to claim 1 , wherein the hand sensor is provided in a plurality of sensors corresponding to the plurality of blades.

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