Work support method and work support system

Abstract

To provide a work support method and a work support system that allow a worker to recognize changes in the surrounding situation even in a dark environment.SOLUTION: A spatial mesh obtained by scanning the space including the target location in a normal state by a spatial recognition unit of smart glasses is preregistered as a reference spatial mesh. When the reference spatial mesh and the target spatial mesh obtained by scanning the space with the smart glasses at an appropriate timing are compared with each other and the difference between them is a predetermined threshold or larger, a warning is issued. The spatial recognition unit creates a spatial mesh by scanning the space using a depth sensor. When the difference between the reference spatial mesh and the target spatial mesh is the threshold or larger, some change has occurred in the target location from the normal state. In such a case, a warning is issued, so that a worker can recognize the change in the surrounding situation even in a dark situation.SELECTED DRAWING: Figure 9

Description

[Technical field]

[0001] The present invention relates to a method and system for supporting operations when performing predetermined operations such as maintenance operations on industrial equipment such as a substrate processing apparatus that performs predetermined processing on substrates. Substrates to be processed by the substrate processing apparatus include, for example, semiconductor substrates, substrates for liquid crystal display devices, substrates for flat panel displays (FPDs), substrates for optical disks, substrates for magnetic disks, and substrates for solar cells. [Background technology]

[0002] Conventionally, in the manufacturing process of semiconductor devices, substrate processing apparatuses are used that perform various processes on substrates such as semiconductor substrates. Examples of substrate processing apparatuses that are used include substrate cleaning apparatuses, heat treatment apparatuses, and inspection apparatuses. Typically, many substrate processing apparatuses are arranged in an orderly manner in a large clean room. Maintenance is performed on these substrate processing apparatuses at appropriate times. Patent Document 1 describes arranging many substrate processing apparatuses at a relatively high density in a clean room and performing maintenance on the substrate processing apparatuses. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] JP 2020-4866 A Summary of the Invention [Problem to be solved by the invention]

[0004] When performing maintenance on a substrate processing apparatus, workers may have to enter the inside of the apparatus to perform the work. Usually, there is almost no lighting inside the substrate processing apparatus, and the work is performed in a dark environment. In a dark environment, it is difficult to check the surroundings, and even if a foreign object is present, the worker may not notice it. It may be dangerous for the worker to perform the work without noticing the foreign object.

[0005] Typically, the floor of a clean room in which many substrate processing apparatuses are installed is covered with square punched plates called gratings. Pipes and wiring for the substrate processing apparatuses are installed under the floor of the clean room, and some of the gratings may be removed for maintenance. Usually, cones are placed around the area where the gratings have been removed to call attention, but this task is sometimes forgotten. In such cases, there is a risk that workers will not notice that the gratings have been removed and will fall under the floor. In particular, in an area of ​​the clean room where ultraviolet rays are blocked, known as a yellow room, the environment is dim, so there is a high possibility that workers will not notice that the gratings have been removed.

[0006] The present invention has been made in consideration of the above-mentioned problems, and aims to provide a work assistance method and a work assistance system that enable a worker to recognize changes in the surrounding situation even in a dark environment. [Means for solving the problem]

[0007] In order to solve the above problems, a first aspect of the present invention is a work support method for performing specified tasks on industrial equipment, comprising: a pre-registration process for registering a reference spatial mesh, which is mesh data obtained by scanning a space including a specified location in a normal state using a portable terminal equipped with a display unit, a communication unit, and a spatial recognition unit; a spatial recognition process for scanning a space including the specified location using the portable terminal at a specified timing to obtain a target spatial mesh; a comparison process for comparing the target spatial mesh with the reference spatial mesh; and an alert process for issuing an alert if the difference between the target spatial mesh and the reference spatial mesh is greater than or equal to a specified threshold value.

[0008] In addition, a second aspect is the work supporting method according to the first aspect, wherein the space recognition step is executed when the illuminance around the worker wearing the mobile terminal falls to a predetermined reference value or less.

[0009] In addition, according to a third aspect, in the work supporting method according to the first or second aspect, when a change occurs in the predetermined location, the reference space mesh is updated and re-registered.

[0010] In addition, a fourth aspect is a work support method according to any one of the first to third aspects, wherein the industrial equipment is a substrate processing apparatus that performs a predetermined process on a substrate, and the predetermined location is inside the substrate processing apparatus.

[0011] In addition, a fifth aspect is a work support method relating to any one of the first to third aspects, wherein the industrial equipment is a substrate processing apparatus that performs a predetermined processing on a substrate, and the predetermined location is inside a yellow room in which the substrate processing apparatus is located.

[0012] In addition, a sixth aspect is a work assistance method according to any one of the first to fifth aspects, wherein the mobile terminal is a pair of smart glasses.

[0013] In addition, a seventh aspect is a work support method for performing specified work on industrial equipment, comprising: a pre-registration step of registering a reference spatial mesh, which is mesh data obtained by scanning a space including a specified location in a normal state using a portable terminal equipped with a display unit, a communication unit, and a spatial recognition unit; a spatial recognition step of scanning a space including the specified location using the portable terminal at a specified timing to obtain a target spatial mesh; a comparison step of comparing the target spatial mesh with the reference spatial mesh; and a post-registration step of registering, when a difference between the target spatial mesh and the reference spatial mesh is equal to or greater than a specified threshold, a change in the target spatial mesh from the reference spatial mesh detected in the comparison step as a danger location.

[0014] In addition, an eighth aspect is a work support method according to the seventh aspect, in which the registration of the hazardous area registered in the post-registration process is a false positive is deleted in response to an input from a worker who confirms that the hazardous area registered in the post-registration process is a false positive.

[0015] In addition, a ninth aspect is a work support method according to the seventh or eighth aspect, further comprising a correction registration step of registering a dangerous spot in response to an input from a worker who has identified the dangerous spot when a difference between the target spatial mesh and the reference spatial mesh is less than a predetermined threshold value.

[0016] In addition, a tenth aspect is a work support method according to any one of the seventh to ninth aspects, further comprising an alert issuing step of issuing an alert when it is detected that a worker wearing the mobile device is approaching the dangerous location.

[0017] In addition, an eleventh aspect is a work support method according to any one of the seventh to tenth aspects, wherein the industrial equipment is a substrate processing apparatus that performs a predetermined process on a substrate, and the mobile terminal is a smart glass.

[0018] In addition, a twelfth aspect is a work support method when a plurality of workers work on industrial equipment in a predetermined work area, comprising: a registration step of registering a change that has occurred in the work area as a danger spot in a server in response to an input from any of a plurality of workers, each of whom is wearing a mobile terminal equipped with a display unit, a communication unit, and a spatial recognition unit; and an acquisition step of the mobile terminal worn by each of the plurality of workers acquiring information about the danger spot registered in the registration step from the server.

[0019] In addition, a thirteenth aspect is a work support method according to the twelfth aspect, further comprising an alert issuing step of issuing an alert when it is detected that any one of the plurality of workers has approached the dangerous location.

[0020] In addition, a fourteenth aspect is a work supporting method according to the twelfth or thirteenth aspect, in which the industrial equipment is a substrate processing apparatus that performs a predetermined process on a substrate, and the mobile terminal is a smart glass.

[0021] In addition, a fifteenth aspect is a work support system for performing specified tasks on industrial equipment using a mobile terminal, the system comprising: a mobile terminal having a display unit, a communication unit, and a spatial recognition unit; a memory unit that stores a reference spatial mesh, which is mesh data obtained by scanning a space including a specified location in a normal state by the mobile terminal; a comparison unit that compares a target spatial mesh obtained by scanning a space including the specified location by the mobile terminal at a specified timing with the reference spatial mesh; and an alarm issuing unit that issues an alarm if the difference between the target spatial mesh and the reference spatial mesh is greater than or equal to a specified threshold.

[0022] In addition, in a sixteenth aspect, in the work support system according to the fifteenth aspect, the target space mesh is acquired when the illuminance around the worker wearing the mobile terminal falls below a predetermined reference value.

[0023] According to a seventeenth aspect, in the task support system according to the fifteenth or sixteenth aspect, when a change occurs in the predetermined location, the reference space mesh is updated and re-stored in the storage unit.

[0024] In addition, an 18th aspect is a work support system relating to any one of the 15th to 17th aspects, wherein the industrial equipment is a substrate processing apparatus that performs a predetermined processing on a substrate, and the predetermined location is inside the substrate processing apparatus.

[0025] In addition, a 19th aspect is a work support system relating to any one of the 15th to 17th aspects, wherein the industrial equipment is a substrate processing apparatus that performs a predetermined processing on a substrate, and the predetermined location is inside a yellow room in which the substrate processing apparatus is located.

[0026] In addition, in a twentieth aspect, in the work support system according to any one of the fifteenth to nineteenth aspects, the mobile terminal is a pair of smart glasses.

[0027] In addition, a 21st aspect is a work support system for performing specified tasks on industrial equipment using a mobile terminal, the system comprising: a mobile terminal having a display unit, a communication unit, and a spatial recognition unit; a memory unit that stores a reference spatial mesh, which is mesh data obtained by scanning a space including a specified location in a normal state by the mobile terminal; a comparison unit that compares a target spatial mesh obtained by scanning a space including the specified location by the mobile terminal at a specified timing with the reference spatial mesh; and a server that registers, when a difference between the target spatial mesh and the reference spatial mesh is equal to or greater than a specified threshold, a change in the target spatial mesh from the reference spatial mesh detected by the comparison unit as a danger location.

[0028] In addition, in a 22nd aspect, in the work support system according to the 21st aspect, in response to an input from a worker who confirms that a danger spot registered in the server is a false positive, the false positive danger spot is deleted from the server.

[0029] In addition, in a 23rd aspect, in the work support system according to the 21st or 22nd aspect, when the difference between the target spatial mesh and the reference spatial mesh is less than a predetermined threshold, the dangerous spot is registered in the server in response to an input from a worker who has identified the dangerous spot.

[0030] In addition, a 24th aspect is a work support system relating to any one of the 21st to 23rd aspects, further comprising an alarm issuing unit that issues an alarm when it is detected that a worker wearing the mobile device is approaching the dangerous location.

[0031] In addition, a 25th aspect is a work support system relating to any one of the 21st to 24th aspects, wherein the industrial equipment is a substrate processing apparatus that performs a predetermined processing on a substrate, and the mobile terminal is smart glasses.

[0032] A 26th aspect is a work support system for use when a plurality of workers work on industrial equipment in a specified work area, comprising a server that registers changes that occur in the work area as dangerous areas in response to input from any of a plurality of workers, each of whom is wearing a mobile terminal equipped with a display unit, a communication unit, and a spatial recognition unit, and the mobile terminal worn by each of the plurality of workers acquires information about the dangerous areas registered in the server from the server.

[0033] In addition, according to a 27th aspect, in the work support system according to the 26th aspect, the system further includes a warning issuing unit that issues a warning when it is detected that any one of the plurality of workers has approached the dangerous location.

[0034] Also, a 28th aspect is a work support system according to the 26th or 27th aspect, wherein the industrial equipment is a substrate processing apparatus that performs a predetermined processing on a substrate, and the mobile terminal is a pair of smart glasses. Effect of the Invention

[0035] According to the work support methods of the first to sixth aspects, when the difference between a reference spatial mesh obtained by scanning a space including a specified location in a normal state and a target spatial mesh obtained by scanning a space including the specified location at a specified timing is equal to or greater than a specified threshold, an alert is issued when a change occurs in the specified location, allowing the worker to recognize changes in the surrounding situation even in a dark environment.

[0036] In particular, according to the work support method relating to the second aspect, a spatial recognition process is executed when the illuminance around the worker wearing the mobile device falls below a predetermined reference value, so that the worker can reliably check the surroundings when the environment is dark.

[0037] According to the work support method of the seventh to eleventh aspects, when the difference between a reference spatial mesh obtained by scanning a space including a specified location in a normal state and a target spatial mesh obtained by scanning a space including the specified location at a specified timing is equal to or greater than a specified threshold value, the changed portion of the target spatial mesh from the reference spatial mesh is registered as a dangerous portion. Therefore, when a change occurs around the worker, the changed portion is automatically registered as a dangerous portion, and the worker can recognize changes in the surrounding situation even in a dark environment.

[0038] In particular, according to the work support method of the ninth aspect, when the difference between the target spatial mesh and the reference spatial mesh is less than a predetermined threshold, the dangerous spot is registered in response to input from a worker who has identified the dangerous spot, thereby further improving the accuracy of registering the dangerous spots.

[0039] According to the work assistance methods of the twelfth to fourteenth aspects, a change that occurs in the work area in response to an input from any one of a plurality of workers is registered in a server as a dangerous spot, and the mobile devices worn by each of the plurality of workers obtain information about the registered dangerous spots from the server. This allows all of the plurality of workers to share the information about the dangerous spots, and enables the workers to recognize changes in the surrounding situation even in a dark environment.

[0040] According to the work support system of the 15th to 20th aspects, when the difference between a reference spatial mesh obtained by scanning a space including a specified location in a normal state and a target spatial mesh obtained by scanning a space including a specified location at a specified timing is equal to or greater than a specified threshold, an alert is issued when a change occurs in the specified location, and the worker can recognize changes in the surrounding situation even in a dark environment.

[0041] In particular, according to the work support system relating to the 16th aspect, a target space mesh is acquired when the illuminance around the worker wearing the mobile device falls below a predetermined reference value, so that the worker can reliably check the surroundings when the environment is dark.

[0042] According to the work support system of the 21st to 25th aspects, when the difference between a reference spatial mesh obtained by scanning a space including a specified location in a normal state and a target spatial mesh obtained by scanning a space including a specified location at a specified timing is equal to or greater than a specified threshold value, the changed portion of the target spatial mesh from the reference spatial mesh is registered as a dangerous portion. Therefore, when a change occurs around the worker, the changed portion is automatically registered as a dangerous portion, and the worker can recognize changes in the surrounding situation even in a dark environment.

[0043] In particular, according to the work support system of the 23rd aspect, when the difference between the target spatial mesh and the reference spatial mesh is less than a predetermined threshold, the dangerous spot is registered in response to input from a worker who has identified the dangerous spot, thereby further improving the accuracy of registering dangerous spots.

[0044] According to the work support system of the 26th to 28th aspects, a change that occurs in the work area in response to an input from any one of a plurality of workers is registered in the server as a dangerous spot, and the mobile device worn by each of the plurality of workers obtains information about the dangerous spots registered in the server from the server. This allows all of the plurality of workers to share the information about the dangerous spots, and enables the workers to recognize changes in the surrounding situation even in a dark environment. [Brief description of the drawings]

[0045] [Figure 1] 1 is a diagram illustrating a schematic configuration of a work support system according to the present invention; [Diagram 2] FIG. 2 is a plan view showing an example of a layout of a plurality of substrate processing apparatuses; [Diagram 3] FIG. 2 is a plan view showing an example of an arrangement of a substrate processing apparatus; [Figure 4] FIG. 2 is a side view showing a configuration of the substrate processing apparatus. [Diagram 5] FIG. 2 is a plan view of the substrate processing apparatus. [Figure 6]FIG. 2 is a diagram showing a schematic configuration of a processing unit. [Figure 7] FIG. 1 is a perspective view showing the appearance of smart glasses. [Figure 8] FIG. 2 is a block diagram showing functional configurations of a control unit of the smart glasses, a server, a work support terminal, and a substrate processing apparatus. [Figure 9] 3 is a flowchart showing the procedure of a task assistance method according to the present invention. [Figure 10] FIG. 13 is a diagram showing an example of a reference space mesh for a target location in a normal state. [Figure 11] FIG. 11 is a diagram showing an example of a spatial mesh created for the same target location as in FIG. 10. [Figure 12] 13 is a diagram showing an example of a warning message displayed by a warning issuing unit. FIG. [Figure 13] 13 is a flowchart showing the procedure of a work assistance method according to a third embodiment. [Figure 14] FIG. 13 is a diagram for explaining additional registration and deletion of dangerous spots in the third embodiment. [Figure 15] FIG. 13 is a diagram for explaining sharing of position information about dangerous spots in the fourth embodiment. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0046] Hereinafter, the embodiments of the present invention will be described in detail with reference to the drawings. In the following, expressions indicating relative or absolute positional relationships (e.g., "in one direction," "along one direction," "parallel," "orthogonal," "center," "concentric," "coaxial," etc.) not only strictly indicate the positional relationship, but also indicate a state in which the relative angle or distance is displaced within a range in which a tolerance or similar function is obtained, unless otherwise specified. Furthermore, expressions indicating an equal state (e.g., "same," "equal," "homogeneous," etc.) not only indicate a state in which the relative position is strictly equal quantitatively, but also indicate a state in which there is a difference in which a tolerance or similar function is obtained, unless otherwise specified. Furthermore, expressions indicating a shape (e.g., "circular," "square," "cylindrical," etc.) not only indicate a geometrically strict shape, but also indicate a shape within a range in which a similar effect is obtained, and may have, for example, unevenness or chamfering. Furthermore, each expression such as "comprises," "includes," "has," "includes," and "has" for a component is not an exclusive expression that excludes the presence of other components. In addition, the expression "at least one of A, B, and C" includes "A only," "B only," "C only," "any two of A, B, and C," and "all of A, B, and C."

[0047] First Embodiment FIG. 1 is a diagram showing a schematic configuration of a work support system according to the present invention. The work support system according to the present invention includes a substrate processing apparatus 50, a substrate processing apparatus 90 of a different type, smart glasses 10, a server 70, and a work support terminal 80. The controllers of the smart glasses 10 and the substrate processing apparatuses 50 and 90 are connected to an information and communication network 5 (e.g., the Internet) by wireless communication. The work support terminal 80 and the server 70 are connected to the information and communication network 5 by wire. Information can be transmitted and received between devices connected to the information and communication network 5, for example, information can be exchanged between the smart glasses 10 and the work support terminal 80. Note that whether each device is connected to the information and communication network 5 wirelessly or wired is not limited to the above example, and can be an appropriate form (for example, the work support terminal 80 and the information and communication network 5 may be connected wirelessly).

[0048] FIG. 2 is a plan view showing an example of the layout of the substrate processing apparatuses 50 and the substrate processing apparatuses 90. As shown in FIG. 2, the substrate processing apparatuses 50 and the substrate processing apparatuses 90 are arranged in a clean room 40. The clean room 40 is provided, for example, in a semiconductor device manufacturing factory, and is a room in which a certain level of air cleanliness is ensured and temperature and humidity are controlled. A part of the clean room 40 is designated as a yellow room 49. The yellow room 49 is an area in which ultraviolet rays are cut off for a photolithography process, for example. The inside of the yellow room 49 is a yellowish and dim environment to the human eye. The normal area in the clean room 40 and the yellow room 49 are separated by a wall, and a door 44 is provided in the wall for movement between the two. The normal area in the clean room 40 is provided with general lighting equipment, such as fluorescent lights.

[0049] A plurality of substrate processing apparatuses 50 are arranged side by side in a normal area in the clean room 40. The substrate processing apparatuses 50 are apparatuses that perform processing that is not affected by light from the external environment, such as substrate cleaning apparatuses. Meanwhile, a plurality of substrate processing apparatuses 90 are arranged in the yellow room 49. The substrate processing apparatuses 90 are apparatuses that perform processing (such as photolithography processing) that handle photosensitive substances such as resist, such as coaters and developers. Since resist undergoes chemical reactions even with trace amounts of ultraviolet light contained in general fluorescent lamps, the substrate processing apparatuses 90 are arranged in the yellow room 49, which completely blocks ultraviolet light.

[0050] 3 is a plan view showing an example of the arrangement of substrate processing apparatus 90. A plurality of gratings 47 are regularly arranged and spread over the floor of clean room 40 including yellow room 49. Gratings 47 are rectangular punched plates. Each grating 47 is removable. Piping and wiring for substrate processing apparatus 50 or substrate processing apparatus 90 are provided under the floor of clean room 40.

[0051] Fig. 4 is a side view showing the configuration of the substrate processing apparatus 50. Fig. 5 is a plan view of the substrate processing apparatus 50. The substrate processing apparatus 50 is, for example, a single-wafer type substrate cleaning apparatus that cleans substrates one by one. The substrate processing apparatus 50 has an indexer 51, a plurality of processing units 52, a transfer robot 56, and a main transport robot 57.

[0052] A carrier C containing a plurality of substrates W is placed on the indexer 51. For example, three carriers C can be placed on the indexer 51. The transfer robot 56 is configured to be capable of sliding movement along the arrangement direction of the plurality of carriers C, lifting and lowering movement, turning movement, and hand advance and retreat movement. An unprocessed substrate W is removed from the carrier C placed on the indexer 51 by the transfer robot 56. In addition, a processed substrate W is stored in the carrier C placed on the indexer 51 by the transfer robot 56. The carrier C is, for example, a FOUP (front opening unified pod) that stores the substrate W in an enclosed space.

[0053] In the first embodiment, for example, three processing units 52 are stacked to form one stack. Then, for example, four stacks are arranged around the main transport robot 57 of the substrate processing apparatus 50. That is, one substrate processing apparatus 50 includes, for example, 12 processing units 52 (=3×4).

[0054] The main transport robot 57, which is disposed at the center of the four stacks, is configured to be capable of lifting and lowering, rotating, and moving the transport arm AM forward and backward. The main transport robot 57 can deliver the substrate W to and from all 12 processing units 52. The main transport robot 57 receives an unprocessed substrate W from the transfer robot 56 and transports it into one of the 12 processing units 52. The main transport robot 57 also removes a processed substrate W from the processing unit 52 and delivers it to the transfer robot 56.

[0055] The substrate processing apparatus 50 also includes a control unit 55. The control unit 55 is a general computer, and controls the operations of the transfer robot 56, the main transport robot 57, and each of the processing units 52 provided within the apparatus. The control unit 55 has a touch panel, which is an input / output interface provided on the wall of the apparatus, and a communication unit that communicates with the outside of the apparatus. Note that, for convenience of illustration, the control unit 55 is shown in the indexer 51 in FIGS. 4 and 5, but is not limited thereto, and the control unit 55 may be provided at an appropriate position within the substrate processing apparatus 50.

[0056] FIG. 6 is a diagram showing a schematic configuration of the processing unit 52. The processing unit 52 includes a processing chamber 60, a spin holder 61, and a discharge nozzle 65. The processing chamber 60 is a hollow housing. The spin holder 61, the discharge nozzle 65, and the like are provided inside the processing chamber 60. The processing chamber 60 is also provided with a transfer port (not shown). The transfer port is opened and closed by a shutter. With the transfer port open, the main transport robot 57 transfers the substrate W into and out of the processing chamber 60. The transfer port is closed during processing of the substrate W. The processing chamber 60 is also provided with an air supply mechanism and an exhaust mechanism (not shown).

[0057] The rotating holder 61 includes a spin chuck 62 and a spin motor 63. The spin chuck 62 is a substrate holder that holds the substrate W in a horizontal position (a position in which the normal to the main surface of the substrate W is aligned vertically). The spin chuck 62 is, for example, a vacuum suction type chuck. The spin chuck 62 has a disk shape with a diameter smaller than the diameter of the substrate W. The spin chuck 62 suction-holds the center of the lower surface of the substrate W. When the lower surface of the substrate W is suction-held by the spin chuck 62, the peripheral edge of the substrate W protrudes outward beyond the outer circumferential end of the spin chuck 62. The spin chuck 62 may be another type of chuck, such as a clamping type mechanical chuck.

[0058] The spin chuck 62 is connected to the spin motor 63 via a motor shaft. That is, an upper end of the motor shaft of the spin motor 63 is connected to the center of the lower surface of the spin chuck 62. When the spin motor 63 rotates the motor shaft while the substrate W is attracted and held by the spin chuck 62, the substrate W and the spin chuck 62 rotate in a horizontal plane around a rotation axis along the vertical direction.

[0059] A cup 64 is provided so as to surround the periphery of the spin chuck 62. The cup 64 can be raised and lowered by a lifting mechanism (not shown). The cup 64 has a cylindrical shape, and the upper part of the cup 64 is inclined so as to approach the spin chuck 62 as it goes upward. However, the inner diameter of the upper end part of the cup 64 is larger than the diameter of the substrate W. When the substrate W is processed, the upper end of the cup 64 is higher than the height position of the substrate W held by the spin chuck 62. Therefore, liquid scattered by centrifugal force from the substrate W rotated by the spin motor 63 is received and collected by the cup 64. The liquid collected by the cup 64 is discharged from a drainage pipe provided at the bottom of the cup 64. The cup 64 may have a multi-stage structure in which a plurality of collection ports are provided for different purposes.

[0060] The discharge nozzle 65 discharges a processing liquid onto the substrate W held by the spin chuck 62. The processing liquid is a term that includes various chemical liquids and pure water. The chemical liquid includes, for example, a liquid for performing an etching process or a liquid for removing particles, and specifically, an SC-1 liquid (a mixed solution of ammonium hydroxide, hydrogen peroxide, and pure water), an SC-2 liquid (a mixed solution of hydrochloric acid, hydrogen peroxide, and pure water), or hydrofluoric acid is used. The discharge nozzle 65 is moved between a processing position above the spin chuck 62 and a waiting position outside the cup 64 by a driving mechanism (not shown). At the processing position, the discharge nozzle 65 discharges a chemical liquid onto the substrate W held by the spin chuck 62, thereby, for example, etching the substrate W. Also, the discharge nozzle 65 discharges pure water onto the substrate W, thereby performing a pure water rinse process on the substrate W.

[0061] An operator who performs operations such as operations on the substrate processing apparatus 50, 90 wears smart glasses 10. The smart glasses 10 are a type of wearable terminal using a head-mounted display (HMD). The smart glasses 10 are also devices for realizing AR (Augmented Reality) or MR (Mixed Reality). For example, Microsoft's "HoloLens" (registered trademark) can be used as the smart glasses 10.

[0062] 7 is a perspective view showing the appearance of the smart glasses 10. The smart glasses 10 include a visor 11 and a headband 12. A worker wears the smart glasses 10 by placing the headband 12 on the head. The worker can adjust the length of the headband 12 to fit the size of his or her head. The headband 12 is also provided with a power button, a brightness button, a volume button, and the like.

[0063] The visor 11 includes various sensors and a display. The display is a see-through holographic lens. That is, the display can display a three-dimensional image in the visual field of the worker by a hologram, and transmits light from a real object in the same way as a normal eyeglass lens. Therefore, a worker wearing the smart glasses 10 can view the displayed three-dimensional image while viewing a real object through the display.

[0064] The sensors of the visor 11 include, for example, multiple visible light cameras that mainly capture images in front of the visor 11, an infrared camera that tracks the line of sight of the worker, a depth sensor that measures the distance to an object, and an inertial measurement sensor. The infrared camera measures the movement of the eyeballs of the wearer of the smart glasses 10 to track the line of sight. The depth sensor measures the distance to an object by, for example, a ToF (Time of Flight) method. The inertial measurement sensor is composed of an accelerometer, a gyroscope, a magnetometer, and the like.

[0065] The smart glasses 10 also include a built-in computer equipped with a CPU, memory, etc. The smart glasses 10 also include a wireless communication mechanism, and the computer in the smart glasses 10 connects to the information and communication network 5 using the wireless communication mechanism. The smart glasses 10 also include a microphone, a speaker, a battery, etc.

[0066] 8 is a block diagram showing functional configurations of the smart glasses 10, the server 70, the work support terminal 80, and the control unit 55 of the substrate processing apparatus 50. The smart glasses 10 include an imaging unit 21, a communication unit 22, a display unit 23, a storage unit 24, and a spatial recognition unit 25. The imaging unit 21 includes a visible light camera provided on the visor 11 described above. The imaging unit 21 includes, for example, four visible light cameras that capture images of the front and diagonally forward, and can capture images of the visual field range of a worker wearing the smart glasses 10.

[0067] The communication unit 22 includes the wireless communication mechanism of the smart glasses 10 described above. The communication unit 22 transmits and receives data to and from the work supporting terminal 80 and the server 70 via the information and communication network 5. The communication unit 22 can also transmit and receive data directly to and from the control unit 55 of the substrate processing apparatus 50 if the distance is short. That is, the communication unit 22 can transmit data and commands to the control unit 55 of the substrate processing apparatus 50 directly or via the information and communication network 5.

[0068] The display unit 23 includes the display of the visor 11 described above. The display unit 23 has a holographic processing device and displays a stereoscopic image at a predetermined spatial position by hologram technology. Note that the stereoscopic image displayed by the display unit 23 is not limited to a three-dimensional shape, and may be a two-dimensional object such as a document.

[0069] The storage unit 24 includes a memory and storage mounted on the smart glasses 10. The memory and storage provided in the smart glasses 10 are, for example, a dynamic random access memory (DRAM) and a universal flash storage (UFS), respectively. The storage unit 24 stores applications and data used by the computer of the smart glasses 10.

[0070] The space recognition unit 25 includes the depth sensor of the smart glasses 10 described above. The depth sensor can measure the distance to an object. The space recognition unit 25 can perform space mapping by scanning the space with the depth sensor. Specifically, the space recognition unit 25 creates a space mesh, which is mesh data, by scanning the space.

[0071] The smart glasses 10 also include a comparison unit 31 and a warning issuance unit 36. The comparison unit 31 and the warning issuance unit 36 ​​are function processing units that are realized by the CPU of the smart glasses 10 executing a predetermined processing program. The processing contents of the comparison unit 31 and the warning issuance unit 36 ​​will be described further below.

[0072] The control unit 55 of the substrate processing apparatus 50 controls the operation of mechanisms provided in the processing unit 52, such as the discharge nozzle 65. The control unit 55 of the substrate processing apparatus 50 can communicate with the communication unit 22 of the smart glasses 10, and can also control the operation of various mechanisms provided in the processing unit 52 according to operation instruction commands transmitted from the smart glasses 10. Note that the substrate processing apparatus 90 is also provided with a control unit similar to the control unit 55.

[0073] The work support terminal 80 and the server 70 are installed, for example, in a factory of a vendor that manufactures and maintains the substrate processing apparatus 50 and / or the substrate processing apparatus 90. The work support terminal 80 and the server 70 are capable of communicating with the smart glasses 10 via the information and communication network 5. The work support terminal 80 and the server 70 are also capable of communicating with each other via the information and communication network 5.

[0074] The work support terminal 80 and the server 70 are general computer systems. That is, the work support terminal 80 and the server 70 are provided with a CPU which is a circuit for performing various arithmetic processing, a ROM which is a read-only memory for storing basic programs, a RAM which is a readable and writable memory for storing various information, a storage unit (e.g., a magnetic disk or SSD) for storing control software and data, and a communication unit for communicating with the information and communication network 5.

[0075] The work support terminal 80 is a computer for, for example, a work supporter on the vendor side to support the work of a worker in the clean room 40. The work supporter can transmit various information from the work support terminal 80 to the smart glasses 10 worn by the worker in the clean room 40.

[0076] The server 70 is a computer that executes predetermined processing in response to requests from the smart glasses 10 and the work support terminal 80 in the work support system according to the present invention. The server 70 includes a memory unit 74 with a relatively large capacity. Large-sized data created by the smart glasses 10 and the work support terminal 80 may be stored in the memory unit 74.

[0077] Next, a task support method using the task support system having the above-mentioned configuration will be described. FIG. 9 is a flowchart showing the procedure of the task support method according to the present invention. First, as a preliminary preparation process, a space mesh in a normal state for any location in the clean room 40 is created and registered using the smart glasses 10 (step S1). The locations to be registered are, for example, the outer wall and interior of the substrate processing apparatus 50, and the floor of the clean room 40. In the first embodiment, for example, the space recognition unit 25 of the smart glasses 10 scans a space including the interior of the substrate processing apparatus 50 to create a space mesh, which is mesh data.

[0078] To operate the smart glasses 10 to create a spatial mesh, the worker wearing the smart glasses 10 may simply turn on the scan mode. The worker selects the scan mode by a hand gesture from a menu screen displayed as a stereoscopic image by the display unit 23, for example. The hand gesture is captured and detected by the imaging unit 21, and the computer of the smart glasses 10 recognizes from the detection result that the scan mode has been selected and turns on the scan mode. Alternatively, the worker may turn on the scan mode by pressing a predetermined button provided on the smart glasses 10. When the scan mode is turned on, the space recognition unit 25 of the smart glasses 10 starts scanning the space.

[0079] In step S1, the space recognition unit 25 of the smart glasses 10 scans a space including a target location in a normal state to create a space mesh. The normal state is a safe and constant state in which no foreign objects or the like are present. The space mesh acquired by scanning the space including the target location in the normal state by the space recognition unit 25 is stored in the storage unit 24 as a reference space mesh. This results in the reference space mesh for the target location in the normal state being registered. Note that when the amount of data for the reference space mesh is large, it may be stored in the storage unit 74 of the server 70, for example.

[0080] FIG. 10 is a diagram showing an example of a reference space mesh for a target location in a normal state. As shown in the figure, the space mesh created by the space recognition unit 25 of the smart glasses 10 is represented by a large number of triangular meshes. Various shapes including curved and flat surfaces are represented by a set of many connected triangles. Complex shapes including uneven surfaces are represented by a high density of triangles, and conversely, flat shapes are represented by a relatively low density of triangles.

[0081] The timing for creating and registering the reference space mesh by scanning the space including the target location in the normal state is, for example, when the substrate processing apparatus 50 is introduced into the clean room 40. In addition, whenever there is a change in the registered target location, it is preferable to scan the space using the smart glasses 10 and update and re-register the reference space mesh each time. For example, when a new shelf is installed inside the substrate processing apparatus 50, the state in which the shelf exists is the new normal state, so the space including the interior of the substrate processing apparatus 50 in which the shelf is installed is scanned by the space recognition unit 25 to update the reference space mesh.

[0082] Next, when an operator wearing the smart glasses 10 performs maintenance work on the substrate processing apparatus 50, for example, the smart glasses 10 scan the space at an appropriate timing to create a spatial mesh (step S2). The target for creating the spatial mesh is a space including an area where the operator plans to work. For example, in the first embodiment, the operator enters the inside of the substrate processing apparatus 50 to perform work, so the spatial recognition unit 25 of the smart glasses 10 scans the space including the inside of the substrate processing apparatus 50 to create a spatial mesh. Also, for example, when the operator works outside but in the vicinity of the substrate processing apparatus 50, the spatial recognition unit 25 scans the space including the outer wall of the substrate processing apparatus 50 and the floor of the clean room 40 to create a spatial mesh. FIG. 11 is a diagram showing an example of a spatial mesh created for the same target location as FIG. 10.

[0083] The timing for creating the spatial mesh in step S2 may be, for example, when a worker is about to perform a safety check while working, by manually turning on the scan mode. Alternatively, the smart glasses 10 may automatically create a spatial mesh when they recognize that the surroundings of the worker wearing the smart glasses 10 have become dark. Specifically, when the luminance of an image captured by the imaging unit 21 of the smart glasses 10 is equal to or lower than a predetermined value, the smart glasses 10 determine that the illuminance around the worker has become dark and is equal to or lower than a reference value. Then, the smart glasses 10 use this as a trigger to create a spatial mesh.

[0084] After that, the comparison unit 31 of the smart glasses 10 compares the spatial mesh (target spatial mesh) created in step S2 with the reference spatial mesh registered in step S1 (step S3). The comparison unit 31 compares the target spatial mesh with the reference spatial mesh to extract the difference between them. In the above example, the triangular mesh of area D1 in the target spatial mesh shown in FIG. 11 differs from the reference spatial mesh in FIG. 10. The comparison unit 31 extracts area D1 as the difference between the target spatial mesh and the reference spatial mesh.

[0085] Next, the comparison unit 31 judges whether or not the difference between the target spatial mesh and the reference spatial mesh is equal to or greater than a predetermined threshold (step S4). In the above example, the comparison unit 31 judges whether or not the difference value obtained by quantifying the area D1, which is the difference between the target spatial mesh in FIG. 11 and the reference spatial mesh in FIG. 10, is equal to or greater than a threshold.

[0086] As a result of the determination, if the difference between the target space mesh and the reference space mesh is equal to or greater than the threshold value, it means that some change such as a foreign object has occurred in the target location when the target space mesh was created compared to the normal state when the reference space mesh was registered (for example, a new device has been installed inside the substrate processing apparatus 50). In this case, the process proceeds from step S4 to step S5, and the warning issuing unit 36 ​​issues a warning. Specifically, for example, the warning issuing unit 36 ​​displays a warning message as a stereoscopic image on the display unit 23. FIG. 12 is a diagram showing an example of a warning message displayed by the warning issuing unit 36. By displaying the warning message, the worker can recognize a change in the surrounding situation and pay attention to the change, thereby ensuring the safety of the worker. In the example of the first embodiment, the worker can recognize the newly installed device inside the substrate processing apparatus 50 and pay attention to it, and can safely work inside the substrate processing apparatus 50.

[0087] On the other hand, if the difference between the target spatial mesh and the reference spatial mesh is less than the threshold value, there is no significant change in the target location when the target spatial mesh is created compared to the normal state when the reference spatial mesh was registered. In this case, the process proceeds from step S4 to step S6, and the worker continues the desired work. Since there is no significant change from the normal state in the environment around the worker, the worker can work safely.

[0088] In the first embodiment, a spatial mesh obtained by scanning a space including a target location in a normal state by the spatial recognition unit 25 of the smart glasses 10 is registered in advance as a reference spatial mesh. Then, the spatial mesh (target spatial mesh) obtained by scanning the space by the smart glasses 10 at an appropriate timing is compared with the reference spatial mesh, and if the difference between the two is equal to or greater than a predetermined threshold, a warning is issued. If the difference between the target spatial mesh and the reference spatial mesh is equal to or greater than the threshold, some change has occurred in the target location from the normal state. In such a case, a warning is issued, so that the worker can recognize that a change has occurred in the surrounding situation from the normal state, and the safety of the worker can be ensured.

[0089] Here, it is possible to detect the difference between an image of the target location in a normal state captured in advance by a typical known camera and an image of the target location captured by the camera at an appropriate timing thereafter by using an image processing technique, and to issue a warning. However, in a dark environment such as the inside of the substrate processing apparatus 50, a typical camera cannot capture a clear image. Therefore, even if some change from the normal state occurs in the target location, the change may not be detected as a difference.

[0090] In the first embodiment, the space recognition unit 25 of the smart glasses 10 creates a space mesh by scanning the space using a depth sensor. The depth sensor can capture the shape of the target location and create a space mesh even in a dark environment such as the inside of the substrate processing apparatus 50. Therefore, the smart glasses 10 can accurately extract the difference between the target space mesh and the reference space mesh, and can correctly issue a warning based on the magnitude of the difference. In other words, by following the first embodiment, the worker can correctly recognize changes in the surrounding situation even in a dark environment such as the inside of the substrate processing apparatus 50.

[0091] <Second embodiment> Next, a second embodiment of the present invention will be described. The configuration of the work support system in the second embodiment is the same as that in the first embodiment. The procedure of the work support method in the second embodiment is also generally the same as that in the first embodiment. In the second embodiment, a worker performs work in a yellow room 49.

[0092] In the second embodiment as well, a spatial mesh acquired by scanning the space in the yellow room 49 in a normal state using the spatial recognition unit 25 of the smart glasses 10 is registered in advance as a reference spatial mesh. Although the yellow room 49 is also a dark environment, the spatial recognition unit 25 scans the space using a depth sensor, and therefore can accurately create a spatial mesh in the yellow room 49. In the second embodiment, for example, the space including the floor of the yellow room 49 is scanned by the spatial recognition unit 25 to create and register a reference spatial mesh.

[0093] Next, the smart glasses 10 scan the space in the yellow room 49 at an appropriate timing to create a target space mesh. Then, similar to the first embodiment, the comparison unit 31 compares the target space mesh with the reference space mesh to extract the difference between them and determines whether the difference is equal to or greater than a predetermined threshold. If the result of the determination is that the difference between the target space mesh and the reference space mesh is equal to or greater than the predetermined threshold, the warning unit 36 ​​issues a warning.

[0094] In the example of the second embodiment, it is assumed that a part of the grating 47 is removed for maintenance of piping etc. installed under the floor of the yellow room 49. Even in such a case, since the difference between the target space mesh and the reference space mesh is equal to or greater than the threshold, a warning is issued and the worker can recognize that the grating 47 has been removed, preventing the worker from falling and ensuring safety.

[0095] In the second embodiment, the space recognition unit 25 of the smart glasses 10 also creates a space mesh by scanning the space using a depth sensor. The depth sensor can capture the shape of the target location and create a space mesh even in a dark environment such as the Yellow Room 49. Therefore, the smart glasses 10 can accurately extract the difference between the target space mesh and the reference space mesh, and can correctly issue a warning based on the magnitude of the difference. In other words, by following the second embodiment, the worker can correctly recognize changes in the surrounding situation even in a dark environment such as the Yellow Room 49.

[0096] <Third embodiment> Next, a third embodiment of the present invention will be described. The configuration of the work support system in the third embodiment is the same as that in the first embodiment. In the third embodiment, the difference detection of the spatial mesh by the smart glasses 10 is further corrected, so that dangerous places such as foreign objects and openings can be recognized more accurately.

[0097] Fig. 13 is a flowchart showing the procedure of the work support method of the third embodiment. The process from step S11 to step S14 in Fig. 13 is generally similar to the process from step S1 to step S4 in Fig. 9. That is, first, a spatial mesh in a normal state (safe state) for the work area around the substrate processing apparatus 50 (or the substrate processing apparatus 90) is created and registered (step S11). As in the first embodiment, when the worker wearing the smart glasses 10 turns on the scan mode, the space recognition unit 25 of the smart glasses 10 scans the work area. The spatial mesh in the normal state created by the scan is registered in the storage unit 24 as a reference spatial mesh.

[0098] Next, the worker wearing the smart glasses 10 scans the work area with the smart glasses 10 at an appropriate timing to create a spatial mesh (step S12). An appropriate timing is, for example, a pre-inspection before work. Then, the comparison unit 31 of the smart glasses 10 compares the spatial mesh (target spatial mesh) created in step S12 with the reference spatial mesh registered in step S11 (step S13). The comparison unit 31 compares the target spatial mesh with the reference spatial mesh to extract the difference between them. Next, the comparison unit 31 determines whether the difference between the target spatial mesh and the reference spatial mesh is equal to or greater than a predetermined threshold (step S14). Specifically, the comparison unit 31 determines whether the difference value obtained by quantifying the difference is equal to or greater than a threshold.

[0099] In the third embodiment, when the difference between the target space mesh and the reference space mesh is equal to or greater than a threshold value, the process proceeds from step S14 to step S15, and the smart glasses 10 register the difference as a dangerous area. The fact that the difference between the target space mesh and the reference space mesh is equal to or greater than a threshold value indicates the possibility that a new dangerous area such as a foreign object or an opening has occurred since the reference space mesh was created. Examples of the foreign object include tools and parts. The opening is, for example, a hole that is created when the grating 47 is removed. Both of these are dangerous areas if a worker touches them unaware. When the difference between the target space mesh and the reference space mesh (for example, the area D1 in FIG. 11) is equal to or greater than a threshold value, the smart glasses 10 judges the changed area of ​​the target space mesh from the reference space mesh as a dangerous area, and registers the position information of the dangerous area in, for example, the storage unit 74 of the server 70.

[0100] Next, the worker deletes the dangerous spot erroneously detected by the smart glasses 10 (step S16). The smart glasses 10 may erroneously detect a changed part of the target spatial mesh from the reference spatial mesh as a dangerous spot. It is considered that the erroneous detection by the smart glasses 10 occurs due to the following circumstances. When creating a spatial mesh in step S12, a worker wearing the smart glasses 10 walks around the work area including the periphery of the substrate processing apparatus 50 with the scan mode turned on. At this time, the spatial mesh created may differ depending on the way the worker walks. For example, when the worker walks quickly, the smart glasses 10 scans at high speed, and a spatial mesh is formed by a collection of triangles with a relatively low density. Conversely, when the worker walks slowly, the smart glasses 10 scans at a low speed, and a spatial mesh is created by a collection of triangles with a relatively high density. In this way, even if the spatial mesh is created for the same area, there may be variation depending on the way the worker walks, and an error occurs in the calculation of the difference due to the variation, and as a result, a space without foreign objects or the like may be erroneously detected as a dangerous spot.

[0101] When the worker visually confirms that the dangerous spot registered in the server 70 by the smart glasses 10 in step S15 is a false positive, the worker manually deletes the false positive. For example, when the worker visually confirms that the position of the dangerous spot registered in the server 70 by the smart glasses 10 is safe without any foreign object, the worker manually deletes the dangerous spot from the server 70. Specifically, the worker performs an operation to delete the false positive by using a hand gesture on the operation screen displayed as a stereoscopic image by the display unit 23 of the smart glasses 10, for example, and the smart glasses 10 delete the dangerous spot from the server 70 in response to the input operation. In addition, when the worker confirms that the foreign object detected as a dangerous spot by the smart glasses 10 is not dangerous, even though it is not a false positive, the dangerous spot may be deleted in the same manner as described above.

[0102] Next, the operator registers dangerous places that were not detected by the smart glasses 10 but were found by the operator's visual inspection (step S17). The resolution of the depth sensor provided in the space recognition unit 25 of the smart glasses 10 may not be sufficient to detect foreign objects with a small area (for example, foreign objects with a side length of 50 cm or less). In addition, when creating the space mesh in step S12, a new dangerous place such as a foreign object or an opening may be added outside the field of view of the smart glasses 10. In these cases, a dangerous place that the smart glasses 10 cannot detect exists. When the operator visually confirms a dangerous place such as a foreign object or an opening that the smart glasses 10 could not detect, the operator manually registers the dangerous place in the server 70. Specifically, the operator performs an operation of adding a dangerous place found by the operator's visual inspection using a hand gesture on an operation screen displayed as a stereoscopic image by the display unit 23 of the smart glasses 10, for example. At this time, for example, a virtual object indicating a dangerous place may be placed at the position of the dangerous place found by the operator's visual inspection using a hand gesture. Then, in response to the input operation, the smart glasses 10 register the location information of the added dangerous spot in the server 70.

[0103] After the registration of the newly found dangerous places and the deletion of the erroneously detected dangerous places are completed, the warning issuing unit 36 ​​issues a warning when the worker wearing the smart glasses 10 approaches a dangerous place in the work area (step S18). Specifically, when the worker wearing the smart glasses 10 turns on the scan mode in the work area, the smart glasses 10 scan the work area to create a spatial mesh, and the position of the worker is identified by comparing the spatial mesh with a spatial mesh created in the past. When the smart glasses 10 detect that the identified position of the worker and the position of the dangerous place registered in the server 70 are close to each other within a predetermined distance (for example, 1 m or less), the warning issuing unit 36 ​​issues a warning. The warning issuing unit 36 ​​displays a warning message, for example, as shown in FIG. 12, on the display unit 23 as a stereoscopic image. By displaying the warning message, the worker can recognize that a dangerous place such as a foreign object or an opening exists nearby and pay attention to it, thereby ensuring the safety of the worker.

[0104] 14 is a diagram for explaining additional registration and deletion of dangerous spots in the third embodiment. The substrate processing apparatus 50 is arranged in the work area 101. A worker who performs a pre-inspection before work in step S12 wears the smart glasses 10 and walks around the work area 101 with the scan mode turned on. The worker walks around the substrate processing apparatus 50 along a route shown by the arrow AR14, for example. As a result, a spatial mesh (target spatial mesh) for the work area 101 including the periphery of the substrate processing apparatus 50 is created. Note that a spatial mesh (reference spatial mesh) for the work area 101 in a normal state is created in advance and registered in the storage unit 24.

[0105] The opening 105 is a hole created, for example, by removing the grating 47 after the reference spatial mesh is created when the work area 101 is in a normal state. When a worker performing a pre-inspection before work approaches the opening 105, the difference between the created target spatial mesh and the reference spatial mesh may exceed a predetermined threshold. This means that the smart glasses 10 have detected the opening 105, which is a newly occurring change. Then, the smart glasses 10 determine that the opening 105, which is a change in the target spatial mesh from the reference spatial mesh, is a dangerous location, and registers the location information of the dangerous location (i.e., the location information of the opening 105) in the server 70.

[0106] Moreover, the foreign object 106 is, for example, a tool placed in the work area 101 after the reference spatial mesh is created. When a worker approaches the foreign object 106, the difference between the created target spatial mesh and the reference spatial mesh may become equal to or greater than a predetermined threshold. This means that the smart glasses 10 have detected the foreign object 106, which is a newly occurring change. Then, the smart glasses 10 determine that the foreign object 106, which is a change in the target spatial mesh from the reference spatial mesh, is a dangerous area, and registers the position information of the dangerous area (i.e., the position information of the foreign object 106) in the server 70.

[0107] On the other hand, the area 107 is a safe area where no foreign objects or the like exist. When a worker who is performing a pre-inspection before work approaches the safe area 107, the difference between the created target space mesh and the reference space mesh may be equal to or greater than a predetermined threshold. In this case, as in the above case, the smart glasses 10 determine that the area 107, which is a change in the target space mesh from the reference space mesh, is a dangerous area, and registers the position information of the area 107 in the server 70. However, this is a false detection of the smart glasses 10. The reason for such a false detection is as described above. When the worker visually confirms that the area 107, which is a dangerous area registered in the server 70, is safe and a false detection has occurred, the worker manually deletes the registration of the falsely detected dangerous area from the server 70. The worker deletes the registration of the falsely detected dangerous area using the smart glasses 10 that he is wearing.

[0108] Similarly to the foreign object 106, the foreign object 108 is a tool placed in the work area 101 after the reference space mesh is created. However, when the foreign object 108 is small, the difference between the created target space mesh and the reference space mesh may be less than a predetermined threshold even if the worker approaches the foreign object 108. In this case, the smart glasses 10 cannot detect the foreign object 108 as a dangerous area. Even in such a case, when the worker confirms the foreign object 108 visually or otherwise, the worker manually registers the foreign object 108 as a dangerous area in the server 70. The worker registers the position information of the foreign object 108 in the server 70 using the smart glasses 10 that the worker is wearing. The smart glasses 10 detect and automatically register relatively large dangerous areas, and the worker manually registers relatively small dangerous areas that the smart glasses 10 cannot detect.

[0109] In this way, dangerous locations such as foreign objects or openings present in the work area 101 are registered in the server 70 without excess or deficiency. After that, when a worker wearing the smart glasses 10 enters the work area 101 and approaches within a certain distance of a dangerous location (opening 105, foreign object 106, foreign object 108 in the example of FIG. 14), the warning issuing unit 36 ​​issues a warning. The worker who recognizes the warning knows that a dangerous location such as a foreign object or opening is nearby and takes caution. As a result, the safety of the worker can be ensured.

[0110] In the third embodiment, the smart glasses 10 register the location information of a change in the target space mesh from the reference space mesh as a dangerous spot in the server 70. If the dangerous spot registered by the smart glasses 10 is a false positive, the worker deletes the registration of the dangerous spot. On the other hand, when the worker visually or otherwise confirms a dangerous spot that the smart glasses 10 could not detect, the worker manually registers the dangerous spot. In other words, the worker makes corrections (deletion and addition of registrations) based on visual or other confirmation by the worker to the automatic registration of dangerous spots by the smart glasses 10. This improves the accuracy of registration of dangerous spots, and the worker wearing the smart glasses 10 can reliably recognize dangerous spots.

[0111] <Fourth embodiment> Next, a fourth embodiment of the present invention will be described. The configuration of the work support system in the fourth embodiment is the same as that in the first embodiment. In the fourth embodiment, when multiple workers are working in the same work area, they share information about dangerous spots.

[0112] 15 is a diagram for explaining sharing of position information about dangerous spots in the fourth embodiment. A substrate processing apparatus 50 is arranged in a work area 111. Three workers are working in the work area 111. All three workers are wearing smart glasses 10 while working. Each of the three workers may be working directly on the substrate processing apparatus 50, or may be working not directly related to the substrate processing apparatus 50.

[0113] Of the three workers, worker P1 removes one grating 47 to form an opening 115. After forming the opening 115, worker P1 registers the opening 115 as a dangerous location in the server 70 using the smart glasses 10. Specifically, the worker P1 performs an operation to input position information of the opening 115 by hand gestures on an operation screen displayed as a stereoscopic image by the display unit 23 of the smart glasses 10, for example. The smart glasses 10 worn by the worker P1 register the position information of the opening 115 in the server 70 in response to the input operation.

[0114] Next, the server 70 that has received the registration of the position information of the new dangerous spot distributes the newly registered position information of the dangerous spot to the smart glasses 10 worn by the remaining workers P2 and P3 of the three workers. As a result, the smart glasses 10 worn by each of the workers P2 and P3 acquire the position information of the dangerous spot newly registered in the server 70. In other words, the position information of the dangerous spot registered by the smart glasses 10 worn by the worker P1 who formed the opening 115 is shared by the smart glasses 10 worn by the other workers P2 and P3.

[0115] When any worker wearing the smart glasses 10 approaches the opening 115, which is a dangerous location, in the work area 111, the warning issuing unit 36 ​​issues a warning. Specifically, when a worker wearing the smart glasses 10 turns on the scan mode in the work area 111, the smart glasses 10 scan the work area 111 to create a spatial mesh, and the position of the worker is identified by comparing the spatial mesh with a spatial mesh created in the past. When the smart glasses 10 detect that the identified position of the worker and the position of the opening 115, which is a dangerous location, are within a predetermined distance (for example, 1 m or less), the warning issuing unit 36 ​​issues a warning. The warning issuing unit 36 ​​displays a warning message, for example, as shown in FIG. 12, on the display unit 23 as a stereoscopic image. By displaying the warning message, the worker can recognize that a dangerous location such as a foreign object or an opening is nearby and pay attention to it, thereby ensuring the safety of the worker.

[0116] In the fourth embodiment, multiple workers wear smart glasses 10 and work in the work area 111, and one of the workers registers a change that has occurred in the work area 111 as a dangerous spot in the server 70 using the smart glasses 10. When a new dangerous spot is registered in the server 70, the smart glasses 10 worn by the other workers acquires the position information of the newly registered dangerous spot from the server 70. This allows all of the multiple workers working in the work area 111 to share the position information of the dangerous spot that has occurred in the work area 111, and each worker can reliably recognize the dangerous spot.

[0117] <Modification> Although the embodiment of the present invention has been described above, this invention can be modified in various ways without departing from the spirit thereof. For example, in the first and second embodiments, in addition to issuing a warning when the difference between the target space mesh and the reference space mesh is equal to or greater than a threshold, the worker may be allowed to select whether or not to register the target space mesh as a new reference space mesh. Specifically, the display unit 23 of the smart glasses 10 displays a selection button for whether or not to update the registration or a pull-down for selection as a three-dimensional image together with a warning message. The worker can select whether or not to register the target space mesh as a new reference space mesh by a hand gesture. The hand gesture is captured and detected by the imaging unit 21, and the computer of the smart glasses 10 executes the worker's selection based on the detection result. Although the smart glasses 10 issue a warning when the difference between the target space mesh and the reference space mesh is equal to or greater than a threshold, they cannot even determine whether the state of the target space mesh is safe or dangerous. If the state of the target space mesh is safe and constant, the worker may select to register the target space mesh as a new reference space mesh.

[0118] In the first embodiment, the spatial mesh is automatically created when the illuminance around the worker becomes equal to or lower than the reference value. Alternatively, the smart glasses 10 may automatically create a spatial mesh when the worker tries to move on the floor of the clean room 40. Specifically, the smart glasses 10 may automatically create a spatial mesh when the floor is exposed in an image captured by the imaging unit 21 of the smart glasses 10 worn by the worker. In this way, even if the grating 47 is removed in a normal area in the clean room 40, a target spatial mesh is automatically created, and a warning is issued when the difference between the target spatial mesh and the reference spatial mesh is equal to or higher than the threshold value, so that the worker can recognize that the grating 47 is removed.

[0119] In addition to or instead of displaying a warning message on the display unit 23, the warning unit 36 ​​may emit a warning sound from the speaker of the smart glasses 10.

[0120] In addition, in each of the above embodiments, the comparison unit 31 and the warning issuance unit 36 ​​are provided in the smart glasses 10, but this is not limited to this, and the comparison unit 31 and the warning issuance unit 36 ​​may be provided in the work support terminal 80, the server 70, or the control unit 55 of the substrate processing apparatus 50.

[0121] In the fourth embodiment, the worker who removed the grating 47 to form the opening 115 registered the opening 115 as a dangerous location, but the worker who placed a foreign object such as a tool may register the foreign object as a dangerous location. Alternatively, a worker who did not form a dangerous location himself but noticed a new dangerous location may register the dangerous location in the server 70. In other words, any mode may be used as long as the worker registers a change that has occurred in the work area as a dangerous location.

[0122] In the third and fourth embodiments, when a worker wearing the smart glasses 10 enters a work area, the display unit 23 of the smart glasses 10 may display dangerous locations registered in the server 70 in a list format. In this way, a worker entering a work area can check dangerous locations in the area in advance.

[0123] In addition, in each of the above embodiments, the worker uses the smart glasses 10, but this is not limited thereto, and a portable terminal such as a tablet terminal or a smartphone may be used instead of the smart glasses 10. In other words, any portable terminal equipped with an imaging unit and a communication unit may be used. However, since using a tablet terminal or the like occupies the worker's hands when holding it, it is preferable to use a wearable terminal such as the smart glasses 10.

[0124] Furthermore, the substrate processing apparatus 50 installed in the normal area of ​​the clean room 40 is not limited to a substrate cleaning apparatus, but may be any apparatus that performs a predetermined process on a substrate, such as a heat treatment apparatus, an exposure apparatus, a coating and developing apparatus, a measuring apparatus, or an inspection apparatus. When the substrate processing apparatus 50 is a substrate cleaning apparatus, it may be a single-wafer type cleaning apparatus that cleans substrates one by one, or a batch type cleaning apparatus that cleans multiple substrates at once.

[0125] Furthermore, the subject of the work support technology according to the present invention is not limited to substrate processing equipment, but may be any industrial equipment that performs some kind of processing, such as a print processing equipment, a film forming equipment, a medical equipment, and an appearance inspection equipment. [Explanation of symbols]

[0126] 5. Information and Communications Network 10. Smart Glasses 21 Imaging unit 22 Communications Department 23 Display section 24 Memory section 25 Spatial recognition section 31 Comparison section 36 Warning and Reporting Department 40 Clean Room 47 Grating 49 Yellow Room 50,90 Substrate processing equipment 52 Processing Unit 56 Transfer robot 57 Main transport robot 60 Processing Chambers 61 Rotational support part 65 Discharge Nozzle 70 Servers 80 Work support terminal 101,111 Working Area 105,115 Opening 106,108 Foreign matter W substrate

Claims

1. A work support method for performing a predetermined work on industrial equipment, comprising: a pre-registration step of registering a reference space mesh, which is mesh data acquired by scanning a space including a predetermined location in a normal state using a mobile terminal equipped with a display unit, a communication unit, and a space recognition unit; a space recognition step of scanning a space including the predetermined location with the mobile terminal at a predetermined timing to obtain a target space mesh; a comparison step of comparing the target spatial mesh with the reference spatial mesh; a step of issuing a warning when a difference between the target spatial mesh and the reference spatial mesh is equal to or greater than a predetermined threshold; A work support method comprising:

2. 2. The work support method according to claim 1, The work support method includes executing the space recognition step when the illuminance around the worker wearing the mobile device falls below a predetermined reference value.

3. 2. The work support method according to claim 1, When a change occurs in the predetermined location, the reference space mesh is updated and re-registered.

4. 2. The work support method according to claim 1, the industrial equipment is a substrate processing apparatus that performs a predetermined process on a substrate, The predetermined location is inside the substrate processing apparatus.

5. 2. The work support method according to claim 1, the industrial equipment is a substrate processing apparatus that performs a predetermined process on a substrate, The predetermined location is inside a yellow room in which the substrate processing apparatus is arranged.

6. 6. The work support method according to claim 1, The work assistance method, wherein the mobile terminal is a smart glass.

7. A work support method for performing a predetermined work on industrial equipment, comprising: a pre-registration step of registering a reference space mesh, which is mesh data acquired by scanning a space including a predetermined location in a normal state using a mobile terminal equipped with a display unit, a communication unit, and a space recognition unit; a space recognition step of scanning a space including the predetermined location with the mobile terminal at a predetermined timing to obtain a target space mesh; a comparison step of comparing the target spatial mesh with the reference spatial mesh; a post-registration step of registering a change in the target spatial mesh from the reference spatial mesh detected in the comparison step as a dangerous area when a difference between the target spatial mesh and the reference spatial mesh is equal to or greater than a predetermined threshold value; A work support method comprising:

8. The work support method according to claim 7, A work support method for deleting the registration of a dangerous spot that is a false positive in response to an input from a worker who has confirmed that the dangerous spot registered in the post-registration step is a false positive.

9. The work support method according to claim 7, The work support method further comprises a correction registration step of registering a dangerous spot in response to an input from a worker who has identified the dangerous spot when the difference between the target spatial mesh and the reference spatial mesh is less than a predetermined threshold value.

10. The work support method according to any one of claims 7 to 9, The work support method further includes a warning step of issuing a warning when it is detected that the worker wearing the mobile terminal is approaching the dangerous location.

11. The work support method according to claim 10, the industrial equipment is a substrate processing apparatus that performs a predetermined process on a substrate, The work assistance method, wherein the mobile terminal is a smart glass.

12. A work support method for a plurality of workers performing work on industrial equipment in a predetermined work area, comprising: a registration process for registering a location of a change that has occurred in the work area as a dangerous location in a server in response to an input from any one of a plurality of workers, each of whom is equipped with a mobile terminal having a display unit, a communication unit, and a space recognition unit; an acquisition step in which the portable terminals worn by the respective workers acquire information on the dangerous spots registered in the registration step from the server; A work support method comprising:

13. The work support method according to claim 12, The work support method further comprises a warning step of issuing a warning when it is detected that any one of the plurality of workers has approached the dangerous location.

14. The work support method according to claim 12 or 13, the industrial equipment is a substrate processing apparatus that performs a predetermined process on a substrate, The work assistance method, wherein the mobile terminal is a smart glass.

15. A work support system for performing a predetermined work on industrial equipment using a mobile terminal, A mobile terminal including a display unit, a communication unit, and a spatial recognition unit; A storage unit that stores a reference space mesh, which is mesh data acquired by scanning a space including a predetermined location in a normal state by the mobile terminal; a comparison unit that compares a target space mesh acquired by scanning a space including the predetermined location with the mobile terminal at a predetermined timing with the reference space mesh; a warning issuing unit that issues a warning when a difference between the target spatial mesh and the reference spatial mesh is equal to or greater than a predetermined threshold; A work support system comprising:

16. The work support system according to claim 15, A work support system that acquires the target space mesh when the illuminance around the worker wearing the mobile device falls below a predetermined reference value.

17. The work support system according to claim 15, When a change occurs in the predetermined location, the work support system updates the reference space mesh and re-stores it in the storage unit.

18. The work support system according to claim 15, the industrial equipment is a substrate processing apparatus that performs a predetermined process on a substrate, The predetermined location is an inside of the substrate processing apparatus.

19. The work support system according to claim 15, the industrial equipment is a substrate processing apparatus that performs a predetermined process on a substrate, The predetermined location is an inside of a yellow room in which the substrate processing apparatus is arranged.

20. 20. The work support system according to claim 15, The work support system, wherein the mobile terminal is a smart glass.

21. A work support system for performing a predetermined work on industrial equipment using a mobile terminal, A mobile terminal including a display unit, a communication unit, and a spatial recognition unit; A storage unit that stores a reference space mesh, which is mesh data acquired by scanning a space including a predetermined location in a normal state by the mobile terminal; a comparison unit that compares a target space mesh acquired by scanning a space including the predetermined location with the mobile terminal at a predetermined timing with the reference space mesh; a server that registers a change in the target spatial mesh from the reference spatial mesh detected by the comparison unit as a dangerous area when a difference between the target spatial mesh and the reference spatial mesh is equal to or greater than a predetermined threshold; A work support system comprising:

22. 22. The work support system according to claim 21, The work support system deletes the erroneously detected dangerous spot from the server in response to an input from a worker who confirms that the erroneously detected dangerous spot is a dangerous spot registered in the server.

23. 22. The work support system according to claim 21, If the difference between the target spatial mesh and the reference spatial mesh is less than a predetermined threshold, the work support system registers the dangerous spot in the server in response to an input from a worker who has identified the dangerous spot.

24. The work support system according to any one of claims 21 to 23, The work support system further includes a warning issuing unit that issues a warning when it detects that a worker wearing the mobile terminal approaches the dangerous location.

25. 25. The work support system according to claim 24, the industrial equipment is a substrate processing apparatus that performs a predetermined process on a substrate, The work support system, wherein the mobile terminal is a smart glass.

26. A work support system for a plurality of workers performing work on industrial equipment in a predetermined work area, comprising: a server that registers a location of a change that has occurred in the work area as a dangerous location in response to an input from any one of a plurality of workers, each of whom is equipped with a mobile terminal having a display unit, a communication unit, and a space recognition unit; A work support system in which the mobile terminals worn by the respective workers acquire, from the server, information on the dangerous spots registered in the server.

27. 27. The work support system according to claim 26, The work support system further includes a warning issuing unit that issues a warning when it detects that any one of the plurality of workers has approached the dangerous location.

28. 28. The work support system according to claim 26 or 27, the industrial equipment is a substrate processing apparatus that performs a predetermined process on a substrate, The work support system, wherein the mobile terminal is a smart glass.

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