Modular-component system for gas delivery

Abstract

To provide at least one gas-primitive substrate for use in a gas-delivery box, the gas-primitive substrate being capable of quickly assembling a variety of gas stick types.SOLUTION: At least one facility-inlet primitive substrate 300 includes a gas-fitting component 302 and is configured at various locations to accept a two-port LOTO valve 301, a regulator 303, a transducer 305, a filter 307, a gas-splitting port 309, an additional two-port valve 311, a purge port 313, a three-port valve 315, and an outlet port 317.SELECTED DRAWING: Figure 3A

Description

[Technical field]

[0001] [Priority claim] This application claims the benefit of priority to U.S. patent application Ser. No. 62 / 834,241, entitled "MODULAR-COMPONENT SYSTEM FOR GAS DELIVERY," filed April 15, 2019, which is hereby incorporated by reference in its entirety. The subject matter disclosed herein relates to various types of equipment used in the semiconductor and related industries. More specifically, the subject matter disclosed relates to components used to manufacture or repair gas delivery boxes for delivering gases used in, for example, semiconductor process equipment, as well as other types of equipment that use various types of gases. [Background technology]

[0002] Gas panels or gas boxes are used in semiconductor manufacturing equipment to deliver multiple gases to a vacuum processing chamber to deposit or etch films on a substrate. These gas boxes contain multiple gas mass flow controllers (MFCs), one or more for each gas type. The MFCs, as well as components associated with the MFCs, such as valves, regulators, filters, and similar types of gas delivery components, are often mounted and bonded together on a "gas stick." Typically, many gas sticks (e.g., 3 to 30 or more) are used to provide the required gases to the processing chambers of a semiconductor processing tool. Each run on the process tool may require different gases, flow rates, and pressures.

[0003] Gas boxes are typically highly customized for each end user and process application, as end users have diverse needs for process type, gas type and flow rates, fab operational requirements, sensor data requirements, etc. At the same time, the most advanced high purity gas flow technology required can be an integrated gas system (IGS), which uses surface mount gas flow components. IGS devices use many small, highly modular parts to construct the gas stick. Gas sticks may have many small, highly modular parts with the same configuration repeated many times, with a limited set of configurations repeated between gas sticks. Current systems have excessive modularity, allowing for a vast number of configurations with only a small subset of configurations ever used. These systems take a long time to assemble, integrate, and test, and tend to be error prone. This means that rapid configuration of custom gas boxes is not possible. Many more inventory line items must also be tracked and stored. In addition, documenting the design takes an excessive amount of time. In state-of-the-art three-dimensional CAD modeling systems, each part must be modeled and then constrained into the gas box assembly. Designing a gas box is very time consuming, as there are many parts in current IGS systems. Excessive design and build time means that the costs of current systems are excessive in achieving highly customized gas boxes for semiconductor process tools.

[0004] Thus, in various embodiments described herein, the disclosed subject matter describes a limited number of primitive substrates that are used to rapidly assemble a variety of gas stick types.

[0005] The information described in this section is provided to provide one of ordinary skill in the art with background to the following disclosed subject matter and should not be construed as admitted prior art. Summary of the Invention

[0006] In one exemplary embodiment, the disclosed subject matter describes at least one gas primitive substrate for use in a gas delivery box, each of the at least one gas primitive substrate including at least one location at which a gas delivery component is attached, the at least one location comprising at least a gas delivery component inlet port and a gas delivery component outlet port formed within a body of the gas primitive substrate. The exemplary embodiment of the disclosed subject matter also includes at least a first pair of bore holes comprising gas flow paths formed on upstream and downstream sides, respectively, of the gas delivery component location.

[0007] In another exemplary embodiment, the disclosed subject matter describes a plurality of gas primitive substrates for use on a standard backplane in a gas delivery box, each of the plurality of gas primitive substrates including at least one location at which a gas delivery component is attached, the at least one location including at least a gas delivery component inlet port and a gas delivery component outlet port formed within a body of the gas primitive substrate, the gas primitive substrate including at least one location configured such that a gas delivery component is attached from only a top surface of the gas primitive substrate, and at least one first pair of bore holes with gas flow paths formed on upstream and downstream sides, respectively, of the gas delivery component location, the at least one pair of bore holes being at least partially located at a cross-section separate from cross-sections of other bore holes in at least some of the plurality of gas primitive substrates, both cross-sections being the at least one first pair of bore holes located within the body of the gas primitive substrate, and at least one port selected from ports including a purge port and a gas split port, on at least some of the plurality of gas primitive substrates.

[0008] In another exemplary embodiment, the disclosed subject matter describes a gas primitive substrate, the gas primitive substrate comprising a facility inlet having a gas fitting component. the gas primitive substrate includes a gas split port, a purge port, and an outlet port, each of the gas split port, purge port, and outlet port configured to be coupled to other gas primitive substrates or other locations by a top manifold interconnection scheme; the gas primitive substrate is configured to receive gas delivery components including a two-port lockout / tagout (LOTO) valve, a regulator, a transducer, a filter, an additional two-port valve, and a three-port valve; the gas primitive substrate further has at least a first pair of bore holes with gas flow paths formed respectively on upstream and downstream sides of each location of the gas delivery components; the gas primitive substrate has a width of about 28.6 mm, an overall height of about 33.8 mm, an overall length of about 239.5 mm, a center-to-center spacing between adjacent gas delivery components of about 30.5 mm, and is configured to have a pitch distance of about 30.5 mm when positioned with adjacent gas primitive substrates.

[0009] In another exemplary embodiment, the disclosed subject matter describes a gas primitive substrate, the gas primitive substrate including a facility inlet having gas fitting components, the gas primitive substrate having a gas split port, a purge port, and an outlet port, each of the gas split port, purge port, and outlet port configured to be coupled to other gas primitive substrates or other locations by a top manifold interconnection scheme, the gas primitive substrate configured to receive gas delivery components including a two-port lockout / tagout (LOTO) valve, an additional two-port valve, and a three-port valve, the gas primitive substrate further having at least a first pair of bore holes with gas flow paths formed on upstream and downstream sides, respectively, of each location of the gas delivery components, the gas primitive substrate having a width of about 28.6 mm, an overall height of about 33.8 mm, an overall length of about 148.0 mm, a center-to-center spacing between adjacent gas delivery components of about 30.5 mm, and configured to have a pitch distance of about 30.5 mm when aligned with adjacent gas primitive substrates.

[0010] In another exemplary embodiment, the disclosed subject matter describes a gas primitive substrate having an inlet port and an outlet port, each of the inlet port and outlet port configured to be coupled to other gas primitive substrates or other locations by a top manifold interconnection scheme, the gas primitive substrate configured to receive a gas delivery component including a first two-port valve and a second two-port valve, the gas primitive substrate further having at least a first pair of bore holes with gas flow paths formed on upstream and downstream sides, respectively, of each location of the gas delivery component, the gas primitive substrate having a width of about 28.6 mm, an overall height of about 33.8 mm, an overall length of about 99.5 mm, a center-to-center spacing between adjacent gas delivery components of about 30.5 mm, and configured to have a pitch distance of about 30.5 mm when aligned with an adjacent gas primitive substrate.

[0011] In another exemplary embodiment, the disclosed subject matter describes a gas primitive substrate having an inlet port and an outlet port, each of the inlet and outlet ports configured to be coupled to other gas primitive substrates or elsewhere by a top manifold interconnection scheme, the gas primitive substrate configured to receive a mass flow controller that can be mounted without the use of a separate outlet valve, the gas primitive substrate further having at least a first pair of bore holes with gas flow paths formed between the inlet and outlet ports, the gas primitive substrate having a width of about 28.6 mm, an overall height of about 33.8 mm, an overall length of about 44.5 mm, and configured to have a pitch distance of about 30.5 mm when positioned with an adjacent gas primitive substrate.

[0012] In another exemplary embodiment, the disclosed subject matter describes a gas primitive substrate having an inlet port, a purge port, and an outlet port, each of the inlet port, purge port, and outlet port configured to be coupled to other gas primitive substrates or other locations by a top manifold interconnection scheme, the gas primitive substrate comprising gas delivery components including a 2-port valve and a 3-port valve, the gas primitive substrate further comprising at least a first pair of bore holes with gas flow paths formed on upstream and downstream sides, respectively, of the respective locations of the 2-port valve and the 3-port valve, the gas primitive substrate having a width of about 28.6 mm, an overall height of about 33.8 mm, an overall length of about 118.0 mm, and configured to have a pitch distance of about 30.5 mm when aligned with an adjacent gas primitive substrate.

[0013] In another exemplary embodiment, the disclosed subject matter describes a gas primitive substrate having an inlet port, an additional gas port, and an outlet port, each of the inlet port, the additional gas port, and the outlet port configured to be coupled to other gas primitive substrates or other locations by a top manifold interconnection scheme, the gas primitive substrate comprising a gas delivery component including a first two-port valve and a second two-port valve, the gas primitive substrate configured to mount up to two mass flow controllers in opposite directions, the gas primitive substrate further comprising at least a first pair of bore holes with gas flow paths formed on upstream and downstream sides, respectively, of the respective locations of the first two-port valve and the second two-port valve, the gas primitive substrate having a width of about 28.6 mm, an overall height of about 33.8 mm, an overall length of about 118.0 mm, and configured to have a pitch distance of about 30.5 mm when arranged with an adjacent gas primitive substrate.

[0014] In another exemplary embodiment, the disclosed subject matter describes a gas primitive substrate having an inlet port and an outlet port, each of the inlet and outlet ports configured to be coupled to other gas primitive substrates or other locations by a top manifold interconnection scheme, the gas primitive substrate comprising a gas delivery component including a two-port valve, the gas primitive substrate further comprising at least a first pair of bore holes with gas flow paths formed on upstream and downstream sides, respectively, of each of the two-port valve locations, the gas primitive substrate having a width of about 28.6 mm, an overall height of about 33.8 mm, an overall length of about 118.0 mm, and configured to have a pitch distance of about 30.5 mm when aligned with an adjacent gas primitive substrate. [Brief description of the drawings]

[0015] [Figure 1] FIG. 1 is a three-dimensional view of an exemplary embodiment of a gas delivery box that utilizes various embodiments of the disclosed subject matter.

[0016] [Figure 2A] FIG. 2A is a three-dimensional view of an exemplary embodiment of several gas component primitives coupled in series and fitted with gas delivery components in accordance with the disclosed subject matter.

[0017] [Figure 2B] FIG. 2B is a top view of an exemplary embodiment of a series of gas component primitive substrates having gas delivery components mounted thereon in accordance with the disclosed subject matter.

[0018] [Figure 3A] FIG. 3A illustrates an exemplary embodiment of gas-component-configurable primitive substrates of various types and sizes. [Figure 3B] FIG. 3B illustrates an exemplary embodiment of gas-component configurable primitive substrates of various types and sizes. [Figure 3C] FIG. 3C illustrates an exemplary embodiment of gas-component configurable primitive substrates of various types and sizes. [Figure 3D] FIG. 3D illustrates an exemplary embodiment of gas-component configurable primitive substrates of various types and sizes.

[0019] [Figure 3E] FIG. 3E illustrates an exemplary embodiment of various types and sizes of gas component primitive substrates with integrated valves. [Figure 3F] FIG. 3F illustrates an exemplary embodiment of various types and sizes of gas component primitive substrates with integrated valves. [Figure 3G] FIG. 3G illustrates an exemplary embodiment of various types and sizes of gas component primitive substrates with integrated valves.

[0020] [Figure 3H-A]3H-A illustrate certain exemplary embodiments of the gas component configurable primitive substrate of FIGS. 3A-3D in various dimensions and the gas component primitive substrate with integrated valve of FIGS. 3E-3G. [Figure 3H-B] 3H-B illustrate certain exemplary embodiments of the gas component configurable primitive substrate of FIGS. 3A-3D in various dimensions and the gas component primitive substrate with integrated valve of FIGS. 3E-3G.

[0021] [Figure 3I] FIG. 3I illustrates an exemplary embodiment for determining the substrate-to-substrate distance (pitch distance) of, for example, the primitive substrate of FIG. 3A.

[0022] [Figure 3J-A] 3J-A, for example, are diagrams illustrating an exemplary embodiment for determining the height of the primitive substrate of FIG. 3A. [Figure 3J-B] 3J-B are diagrams illustrating an exemplary embodiment for determining the height of the primitive substrate of FIG. 3A, for example.

[0023] [Figure 3K] FIG. 3K illustrates an exemplary embodiment for determining the length of the primitive substrate, for example, of FIG. 3A.

[0024] [Figure 3L] FIG. 3L is a top view of one example of an illustrative arrangement of gas delivery components mounted in series on a gas component primitive substrate in accordance with various embodiments of the disclosed subject matter.

[0025] [Figure 4A] FIG. 4A shows additional details of a facility inlet primitive substrate according to FIG. 3A, which may be used, for example, as a facility inlet for coupling a gas supply to the gas delivery box of FIG. [Figure 4B]FIG. 4B shows additional details of a facility inlet primitive substrate according to FIG. 3A, which may be used, for example, as a facility inlet for coupling a gas supply to the gas delivery box of FIG. [Figure 4C] FIG. 4C shows additional details of a facility inlet primitive substrate according to FIG. 3A, which may be used, for example, as a facility inlet for coupling a gas supply to the gas delivery box of FIG.

[0026] [Figure 5A] FIG. 5A shows additional details of a dual two-port valve primitive substrate according to FIG. 3C, used to mount, for example, a purge gas inlet valve and a purge gas transducer. [Figure 5B] FIG. 5B shows additional details of a dual two-port valve primitive substrate according to FIG. 3C, used to mount, for example, a purge gas inlet valve and a purge gas transducer.

[0027] [Figure 6A] FIG. 6A shows additional details of a dual valve substrate according to FIG. 3E, for example, for use with a combination shut-off valve and purge valve. [Figure 6B] FIG. 6B illustrates additional details of a dual valve substrate according to FIG. 3E, for example, for use with a combination shutoff valve and purge valve. [Figure 6C] FIG. 6C illustrates additional details of a dual valve substrate according to FIG. 3E, for example, for use with a combination shutoff and purge valve.

[0028] [Figure 7A] FIG. 7A shows additional details of a dual two-port valve substrate according to FIG. 3F, used, for example, to mount two mass flow controllers. [Figure 7B] FIG. 7B shows additional details of a dual two-port valve substrate according to FIG. 3F, used, for example, to mount two mass flow controllers.

[0029] [Figure 8A] FIG. 8A shows additional details of a single two-port valve substrate according to FIG. 3G, for example, used as a single shut-off valve. [Figure 8B] FIG. 8B shows additional details of a single two-port valve substrate according to FIG. 3G, for example, used as a single shut-off valve.

[0030] [Figure 9] FIG. 9 is a diagram of an exemplary two-port valve illustrating how the widths of various gas component primitive substrates are determined.

[0031] [Figure 10A] FIG. 10A is a diagram illustrating an example illustrating how to determine the height of various gas component primitive substrates. [Figure 10B] FIG. 10B is a diagram illustrating an example illustrating how to determine the height of various gas component primitive substrates.

[0032] [Figure 11] FIG. 11 shows a prior art bottom outlet manifold system.

[0033] [Figure 12] FIG. 12 illustrates an example of an upper manifold system according to various embodiments of the disclosed subject matter. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0034] The disclosed subject matter will now be described in detail with reference to several general and specific embodiments shown in various accompanying drawings. In the following description, numerous specific details are set forth to provide a thorough understanding of the disclosed subject matter. However, it will be apparent to one skilled in the art that the disclosed subject matter may be practiced without some or all of these specific details. In other instances, well-known process steps, construction techniques, or structures have not been described in detail in order not to obscure the disclosed subject matter.

[0035] One innovation of the disclosed subject matter is a unique minimum set of primitive substrates that can be used to form any known gas box or gas panel, for example, used with a semiconductor process tool, and a reduced or minimum size. Current systems have too many degrees of freedom (e.g., excessive modularity) to effectively design and build a gas box for integration-to-order (ITO) assembly scenarios. As disclosed herein, various embodiments of gas system designs using seven gas manifold substrate primitives can be configured such that any gas delivery system for any semiconductor process tool can be built. The seven substrate primitives are manufactured with dimensions that allow them to be retrofitted to existing gas delivery boxes and features that allow most or all possible component arrangements.

[0036] Once assembled, the substrate primitives are mounted onto a standard backplane that is generally generic for known gas stick configurations. The enclosure, system interfaces, and pneumatic banks that drive the process gas valves are also standardized and generic. Thus, the design of a gas box requires only a small number of standard components that are placed and constrained into a model to generate a new gas box assembly. This standardization of the hard structures and limited set of primitives to form the gas connections saves significant design time. For the construction of a gas box, all hard structure components, primitive substrates, and gas flow components can be sourced and held in stock. As a result, the lead time for manufacturing a gas box can be reduced from, for example, 8-12 weeks to 1-2 weeks.

[0037] Referring now to FIG. 1, a three-dimensional view of an exemplary embodiment of a gas delivery box 100 employing various embodiments of the disclosed subject matter is shown. As will be appreciated by those skilled in the art, gas delivery boxes 100 are available from a number of sources. Gas delivery box 100 can be configured to accommodate several gas delivery channels that deliver gas to one or more instrument gas inlet supply lines of various types of etching and deposition equipment (e.g., plasma-based etching and deposition equipment) used, for example, in the semiconductor and related industries. For example, in various embodiments, gas delivery box 100 can be configured with fewer than 10 channels, 10-20 channels, or more than 20 channels, each of which can be coupled to a different gas supply, such as a different precursor gas. Gas delivery box 100 includes a backplane 101 to which various components of the disclosed subject matter can be secured (e.g., screwed or otherwise physically or chemically attached or adhered), as described in more detail below. Gas delivery box 100 is shown to include a number of gas component primitives 103 mounted with gas delivery components (e.g., valves, mass flow controllers, pressure transducers, pressure regulators, etc.) The various gas component primitive substrates are described in detail below.

[0038] A standard gas delivery box, such as gas delivery box 100, may remain unmodified and thus may be directly populated with the gas component primitive substrates described herein. The backplane 101, enclosures, printed circuit boards, electrical cables, pneumatic banks, and other components (not all of which are necessarily shown) are each known in the art.

[0039] FIG. 2A shows a three-dimensional view 200 of an exemplary embodiment of several gas component primitive substrates coupled in series and fitted with gas delivery components according to the disclosed subject matter. As arranged in FIG. 2A, the gas component primitive substrates and gas delivery components comprise gas delivery channels for use in the gas delivery box 100 of FIG. 1. Thus, the three-dimensional view 200 of FIG. 2A is presented merely as an overview of one exemplary embodiment of the disclosed subject matter. Upon reading and understanding the disclosed subject matter, one skilled in the art will recognize that each portion of the gas delivery channel can be combined, in whole or in part, with other portions of other gas delivery channels (e.g., in series, parallel, or various series-parallel combinations). The various gas component primitive substrates of FIG. 2A are described in detail below.

[0040] In this exemplary embodiment, a three-dimensional view 200 is shown including a two-port valve primitive substrate 201 and a facility inlet primitive substrate 207. The two-port valve primitive substrate 201 is shown including a two-port valve 203 (e.g., an on-off pneumatic valve). A mass flow controller 205 bridges from the two-port valve primitive substrate 201 to the facility inlet primitive substrate 207. As a result, the mass flow controller 205 spans from an outlet port of the facility inlet primitive substrate 207 (not explicitly shown in FIG. 2A ) to an inlet port of the two-port valve primitive substrate 201 (also not explicitly shown in FIG. 2A ). Each of the facility inlet primitive substrate 207 and the two-port valve primitive substrate 201 are described in more detail below with reference to FIGS. 4A-4C and 8A-8B , respectively. The three-dimensional view 200 of FIG. 2A is also shown to include purge valve 209, purge port 211, mass flow controller inlet valve 213, gas split port 215, filter 217, transducer 219, regulator 221, lockout / tagout (LOTO) valve 223, and gas fitting components 225.

[0041] Purge valve 209 and purge port 211 allow purge gas (e.g., nitrogen, oxygen, argon, various types of precursor gases, etc.) to purge mass flow controller 205. Gas split port 215 allows additional gas flow streams to and from fixture inlet primitive substrate 207 (between filter 217 and mass flow controller inlet valve 213). Each of purge valve 209, purge port 211, gas split port 215, and others, can be coupled to other primitive substrates or elsewhere by a top manifold interconnection scheme, which is described in detail with respect to FIG. 12 below.

[0042] Mass flow controller inlet valve 213 provides additional isolation means (e.g., an additional on-off valve) for mass flow controller 205. Filter 217 may comprise a point-of-use filter that removes most or all of the particulate contaminants larger than a particular cut size diameter released by one or more of the components (e.g., valves, regulators, etc.) upstream of filter 217. Transducer 219 may comprise a pressure transducer. In various embodiments, regulator 221 is a pressure regulator that provides a nearly constant pressure used for the gas channel.

[0043] Upon reading and understanding the disclosed subject matter, one of ordinary skill in the art will recognize that not all of these components (e.g., valves, MFCs, filters, etc.) will be used or required in all applications. One of ordinary skill in the art will further recognize that other applications of the gas component primitive substrates may include additional substrates, as well as other components attached to or included on the primitive substrate.

[0044] LOTO valves 223 are designed for applications where personnel and equipment safety is a consideration. For example, in the United States, the Occupational Safety and Health Administration (OSHA) maintains industry standards that include the ability to disable machinery or equipment to prevent the release of hazards (e.g., hazardous gases) during equipment maintenance. Similar government agencies exist in most countries or regions of the world.

[0045] For example, the LOTO valve 223 can be used to prevent the release of one or more gases that may be particularly detrimental to human safety or machine safety and operation during a maintenance procedure (e.g., replacing one or more components from one or more gas component primitive substrates). In one particular example, those skilled in the art know that silane (SiH4) gas is an inorganic, colorless, gaseous compound of silicon and hydrogen that has strong reducing properties and is spontaneously flammable in air. As a result, when mixed, oxygen and silane can explode or ignite. The LOTO valve 223 can prevent such inadvertent release of the gas.

[0046] In various embodiments, the gas fitting component 225 may comprise a tube fitting known in the art (e.g., tube fittings are available, for example, from Swagelok Corporation, Solon, Ohio, USA, or Parker Hannifin Corporation, Cleveland, Ohio, USA). In other embodiments, the gas fitting component 225 may be flared to a VCR® metal-to-metal seal feature or welded onto a male VCR® tube stub, for example, as known in the art. In other embodiments, the gas fitting component 225 may be formed, for example, as a VCO® O-ring face seal fitting (VCR® and VCO® seal fittings are registered trademarks of Swagelok Corporation, Solon, Ohio, USA). One skilled in the art will recognize that other types of fittings may be used as well.

[0047] 2B, there is shown a top view 230 of an exemplary embodiment of a series of gas component primitive substrates populated with gas delivery components in accordance with the disclosed subject matter. Top view 230 provides one embodiment of the order in which various components (e.g., valves, regulators, filters, etc.) may be placed on the various gas component primitive substrates described herein.

[0048] For example, a LOTO valve 223 is typically mounted upstream of all other components to protect personnel and equipment while the gas delivery box 100 (see FIG. 1) is being serviced or maintained. A regulator 221 is then mounted downstream of the LOTO valve 223. If the regulator 221 is a pressure regulator, the regulator 221 can be set to provide a nearly constant pressure of the gas used within the series connected gas component primitive substrates (gas channels) of FIG. 2B. A transducer 219 is located immediately downstream of the regulator 221, for example, to monitor the pressure within the gas channel. A filter 217 is mounted upstream of the gas split port 215, for example, to filter the gas flow shared with additional components, such as other gas component primitive substrates (not shown). A mass flow controller inlet valve 213 (comprising a two-port valve in this embodiment) is located downstream of the gas split port 215 and can shut off gas flow to the mass flow controller 205 while avoiding interruption of gas flow to other gas component primitive substrates. Purge valve 209 is downstream of mass flow controller inlet valve 213 and upstream of mass flow controller 205. Thus, purge valve 209 allows for purging of mass flow controller 205, which allows for purging of mass flow controller 205 (e.g., following a failure of mass flow controller 205) without having to shut off LOTO valve 223 (which would also shut off gas flowing through gas split port 215 to other components).

[0049] Upon reading and understanding the disclosed subject matter, one of ordinary skill in the art will readily recognize that the top view 230 of the exemplary embodiment of a series of gas component primitive substrates with gas delivery components mounted thereon of FIG. 2B may be configured with various gas flow components in positions other than those shown. Thus, the placement of gas delivery components may be arranged in any desired order that may be deemed suitable for a given application.

[0050] 3A-3D show exemplary embodiments of gas component configurable primitive substrates of various types and sizes. As shown in FIG. 3A, an example of a facility inlet primitive substrate 300 includes a gas fitting component 302 and is configured at various locations to receive a two-port LOTO valve 301, a regulator 303, a transducer 305, a filter 307, a gas split port 309, an additional two-port valve 311, a purge port 313, a three-port valve 315, and an outlet port 317. Thus, the facility inlet primitive substrate 300 may be the same as or similar to the facility inlet primitive substrate 207 of FIG. 2A and FIG. 2B. Those skilled in the art will recognize that the various arrangements shown above may be configured in other ways. For example, the locations for the regulator 303, the transducer 305, the filter 307, and the additional two-port valve 311 may all be interchanged depending on the particular application. Thus, the locations for the various gas delivery components in FIG. 3A-3D are merely provided to aid in understanding various embodiments of the disclosed subject matter.

[0051] As shown in FIG. 3B, an example of an additional facility inlet primitive substrate 320 includes gas fitting components 322 and is configured at various locations to accept a two-port LOTO valve 321, a gas split port 323, an additional two-port valve 325, a purge port 327, a three-port valve 329, and an outlet port 331.

[0052] As shown in FIG. 3C, an example of a dual two-port valve primitive substrate 340 (e.g., a 2-port / 2-port substrate) is shown that includes an inlet port 341, an outlet port 347, and is configured at various locations to receive a first two-port valve 343 and a second two-port valve 345.

[0053] 3D illustrates an example of a dual single port primitive substrate 350 (e.g., a 1-port / 1-port substrate) that includes an inlet port 351 and an outlet port 353. The dual single port primitive substrate 350 can be used, for example, with an MFC that can be attached without the use of a separate outlet valve for the outlet port 353 in the substrate.

[0054] 3E-3G show exemplary embodiments of various types and sizes of gas component primitive substrates with integrated valves. Those skilled in the art will recognize that each of the substrates with integrated valves can be readily constructed using the various substrates of FIGS. 3A-3D. However, having the valves already integrated as part of the substrate speeds up the creation of gas delivery channels, as discussed above.

[0055] For example, Figure 3E shows an example of a dual valve substrate 360 ​​(e.g., a 2-port / 3-port substrate) that includes an inlet port 361, an outlet port 369, a purge port 365, and further includes locations for a 2-port valve 363 and a 3-port valve 367. The 2-port valve 363 allows for a shutoff operation, and the 3-port valve 367, in combination with the purge port 365, allows for a purge operation, as will be appreciated by those skilled in the art.

[0056] 3F shows an example of a dual two-port valve substrate 370 (e.g., a 2-port / 2-port substrate) that includes an inlet port 371, an outlet port 379, an additional gas port 375, a first two-port valve 373, and a second two-port valve 377. The dual two-port valve substrate 370 accommodates, for example, two mass flow controllers (e.g., linked MFCs) mounted in opposite directions.

[0057] 3G shows an example of a single two-port valve substrate 380 (e.g., a two-port substrate) that includes an inlet port 381, an outlet port 385, and a two-port valve 383. The single two-port valve substrate 380 provides a single shut-off valve. Additionally, the single two-port valve substrate 380 can be the same as or similar to the two-port valve primitive substrate 201 of FIGS. 2A and 2B.

[0058] The various ports of the gas component configurable primitive substrates of Figures 3A-3D and 3E-3G can be coupled to other ports and / or substrates in a top manifold system, as described in more detail below with reference to Figure 12. For example, each of the inlet ports 341, 351, 361, 371, 381 of one substrate can be coupled to or from one (or more) of the various outlet ports 317, 331, 347, 353, 369, 379, 385 on the other substrate. The top manifold system allows each of these connections to be made from the top side of the primitive substrate, rather than from below (or the underside) as shown in prior art Figure 11.

[0059] Those skilled in the art will now recognize that each of the gas component primitive facility inlet substrates of FIGS. 3A and 3B can be combined with various gas component primitive substrates of FIGS. 3C-3G to rapidly prepare any number of gas delivery channels to be attached, for example, to the gas delivery box 100 (see FIG. 1). Additionally, the primitive substrates of FIGS. 3A-3G are also shown in more detail with reference to specific substrates of FIGS. 4A-8B. For example, FIGS. 4A-4C show additional details of the gas component configurable primitive substrate according to FIG. 3A, used, for example, as a facility inlet to the gas delivery box of FIG. 1. Additionally, several locations (not explicitly identified or numbered, but which will be understood by those skilled in the art) where various types of fasteners may be used to attach each of the various gas delivery components to the various substrates are also shown with reference to specific locations of FIGS. 4A-8B. For example, in various embodiments, the gas delivery components may be attached with metal "C" seals or "W" seals to seal the gas paths. The threads used in these fasteners are special low friction, high strength threads for crushing metal seals. Those skilled in the art are aware of these types of fasteners (available, for example, from American Seal and Engineering, Orange, Connecticut, USA, and Fujikin® of America, Inc., Fremont, Calif., USA). In other embodiments, fasteners such as machine screws can be used.

[0060] Those skilled in the art will further recognize that each of the gas component primitive substrates can be machined or formed from a variety of materials. For example, for ultra-high purity (UHP) gas systems, semiconductor industry standards (e.g., those promulgated by Semiconductor Equipment and Materials International (SEMI), Milpitas, Calif., USA) include the "specification for 316L stainless steel...[for] ultra-high purity semiconductor-manufacturing applications" in accordance with SEMI standard F20, which uses double melting to improve purity. The SEMI "specification for the surface condition of the wetted surfaces of stainless steel components" uses electropolished inner surfaces in accordance with SEMI standard F19 for all gases and liquids. For example, for highly corrosive gases such as hydrogen chloride (HCl) or hydrogen bromide (HBr), corrosive materials with high corrosion resistance can be used, including various high performance alloys (also known as superalloys) known in the art. These high performance alloys include, for example, Inconel® (available from a variety of sources including Inconelloys International, Inc., Huntington, WV, USA), or Hastelloy® (available from a variety of sources including Haynes Stellite, Inc., Kokomo, IN, USA, and Union Carbide, New York, NY, USA). In other examples, such as non-UHP gas systems, the substrate may be formed from, for example, 316L grade stainless steel, which does not necessarily conform to SEMI standards. Still further, for applications that do not transport caustic or corrosive gases, another material may be used to form the substrate.For example, in these applications, the substrate may be formed from 304 grade stainless steel, 6061 aluminum or other aluminum alloys, copper or zinc alloys (e.g., brass), or various types of machinable and / or moldable polymers and high performance plastics (e.g., Delrin® or Kepital®, both known in the art).

[0061] Upon reading and understanding the disclosed subject matter, one of ordinary skill in the art will further appreciate that the various types of gas delivery components described herein can be attached to a variety of primitive substrates, for example, by machine screws (e.g., as described above) supplemented with metal seals. In these cases, each seal can have up to about 10 -9 It can be checked for helium leak rates in Torr liters / second. In another example, depending on the type of gas being transported, O-rings made from Kalrez® or other types of perfluorinated elastomeric or fluoroelastomer materials known in the art can be used to prevent gas from leaking between the gas delivery components and the primitive substrate.

[0062] Furthermore, upon reading and understanding the disclosed subject matter, one skilled in the art will recognize that a greater or lesser number of gas component primitive substrates may be utilized for various applications, and that the number may vary depending on the particular type of gas delivery box 100 (see FIG. 1) used for the various process tools or equipment used in various industries. For example, a process tool used to fabricate thin film heads in the data storage industry may require fewer gas component primitive substrates (e.g., fewer gas channels) than a process tool used to fabricate films made by atomic layer deposition (ALD) techniques. Also, one skilled in the art will recognize the arrangements in which the gas delivery components of each of the various gas component primitive substrates may vary depending on the particular use and application. Thus, each of these various arrangements must be considered within the scope of the appended claims.

[0063] 3H-A and 3H-B show certain exemplary embodiments of the gas component configurable primitive substrates of FIGS. 3A-3D and the gas component primitive substrates with integrated valves of FIGS. 3E-3G in various dimensions. As described in FIGS. 3H-A and 3H-B, these seven primitive substrates, four gas component configurable primitive substrates 382, ​​and three gas component primitive substrates 384, allow for the construction of all configurations of gas boxes. The various dimensions correspond to the mounting pattern of the backplane 101 (see FIG. 1), for example, to which the various primitive substrates of the disclosed subject matter can be secured. Furthermore, the dimensions are selected to fit standard components, such as two-port and three-port valves, along the length of the various primitive substrates, as well as across the primitive substrates, as described in more detail below with reference to FIGS. 3I-3K. Each of these dimensions is provided merely to aid one of ordinary skill in the art in better understanding the disclosed subject matter. However, upon reading and understanding the disclosed subject matter, one of ordinary skill in the art will recognize that dimensions other than those provided herein may be used in a given application.

[0064] 3H-A, in a particular exemplary embodiment, the facility inlet primitive substrate 300 is a facility inlet that allows, for example, 2-port LOTO valves, regulators, transducers, filters, 2-port valves, 3-port valves, gas sharing, and purging. The overall length d1 can be about 239.5 mm, the width d2 can be about 28.6 mm, the distance between ports d3 can be about 11.2 mm, and the distance d4 can be about 109.2 mm.

[0065] In another particular exemplary embodiment, the additional facility inlet primitive substrate 320 is a facility inlet that allows, for example, a 2-port LOTO valve, a 2-port valve, a 3-port valve, gas sharing, and purging. The overall length d5 ​​can be about 148.0 mm, the width d6 can be about 28.6 mm, the distance between ports d7 can be about 11.2 mm, and the distance d8 can be about 109.2 mm.

[0066] In another particular exemplary embodiment, the dual two-port valve primitive substrate 340 is a two-port / two-port valve substrate, which allows, for example, two components to be mounted in series. The overall length d9 is approximately 99.5 mm and the width d 10 is about 28.6 mm, the distance between the ports d 11 is about 11.2 mm, distance d 12 may be about 90.7 mm.

[0067] In another particular exemplary embodiment, the dual single port primitive board 350 is a 1 port / 1 port board, which allows, for example, mounting an MFC without an outlet valve and mounting components in series. 13 is about 44.5mm, width d 14 is about 28.6mm, the distance between ports d 15 is about 11.2 mm, distance d 16 may be about 35.7 mm.

[0068] In another example, and with continued reference now to Figures 3H-B, in certain exemplary embodiments, the dual valve substrate 360 ​​is a 2-port / 3-port valve, which allows for, for example, a shutoff valve and a purge valve. 17 is about 118.0mm, width d 18 is about 28.6 mm, distance d 19 is about 73.0 mm, distance d 20 may be about 21.6 mm.

[0069] In another particular exemplary embodiment, the dual 2-port valve substrate 370 is a 2-port / 2-port valve, which allows, for example, two MFCs to be mounted in opposite directions (e.g., coupled mass flow controllers). 21 is about 118.0mm, width d 22 is about 28.6 mm, distance d 23 is about 73.0 mm, distance d 24 may be about 21.6 mm.

[0070] In another particular exemplary embodiment, the single two-port valve substrate 380 is a two-port valve, which allows for, for example, a single shutoff valve. 25 is about 118.0mm, width d 26 is about 28.6 mm, distance d 27 is about 24.0 mm, distance d 28 may be about 21.6 mm.

[0071] FIG. 3I illustrates an exemplary embodiment for determining the substrate-to-substrate distance (pitch distance) of the primitive substrates of FIG. 3A, for example. FIG. 3I considers the spacing (pitch spacing) of the primitive substrates. Minimizing the width spacing between the sticks helps to increase or maximize the available space in the completed assembly. Due to the size and tolerances of the mounting flanges of the components (see, for example, the exemplary valve 901 shown in FIG. 9 below), the minimum spacing that can be obtained is approximately 29 mm. A pair of frame impingement panels 386 used in many gas boxes are installed between the gas sticks (e.g., one of the pair is on either side of the gas stick). In various embodiments, the thickness of the flanges that comprise the FIP panels 386 is 0.8 mm. As a result, due to the width of the mounting flanges and the thickness of the FIP panels 386, the minimum spacing between adjacent gas sticks is approximately 29.8 mm. In various specific exemplary embodiments, approximately 0.7 mm is added for tolerance stack-up, resulting in a pitch distance d of approximately 30.5 mm pitch, as shown in FIG. 3I. 29 For comparison, simultaneous gas delivery boards available on the market only allow a minimum spacing of 35.6 mm.

[0072] 3J-A and 3J-B show exemplary embodiments for determining the height of the primitive substrate of FIG. 3A, for example. In various embodiments, the gas substrate height consideration seeks to minimize the height of the substrate block to increase or maximize the available space of the completed assembly. To purge upstream of the MFC, referring to the facility inlet primitive substrate 300 of FIG. 3J-A and 3J-B, the location of the three-port valve 315 may be implemented downstream of the two-port shutoff valve at the outlet location at the purge port 313 and at the location of an additional two-port valve 311 with a connecting angled-bore 319. The connecting angled-bore 319 connects the location of the two-port valve 311 and the location of the three-port valve 315, thereby forming a gas path between the two valves, between the outlet of the two-port valve and the inlet of the three-port valve. The connecting angled-bore 319 connecting the two ports determines the minimum height of the block based on the selection of the angle and bore diameter. In certain exemplary embodiments, the minimum height distance d 30 is 33.8 mm. Determining the height of the primitive substrate is discussed in more detail with reference to Figures 10A and 10B below.

[0073] FIG. 3K illustrates an exemplary embodiment for determining the length of the primitive substrate of FIG. 3A, for example. The facility inlet primitive substrate 300 of FIG. 3K helps minimize the length of the substrate block and increase or maximize the available space of the completed assembly. In this example, due to the size of the mounting considerations of about 30.5 mm as discussed above with reference to FIG. 3I, in various embodiments, a horizontal spacing of 30.5 mm (e.g., a distance d of about 30.5 mm) is determined. 32 , which may be repeated three times) may be repeated vertically. For example, having the same distance in both the horizontal and vertical directions allows for the use of bridging components in either the horizontal or vertical directions between component locations. As will be appreciated by one of ordinary skill in the art upon reading and comprehending the disclosed subject matter, another distance d of about 24.5 mm may be used. 33 can be repeated three times.

[0074] 3L shows a top view of one example of an exemplary arrangement of gas delivery components mounted in series on a gas component primitive substrate in accordance with various embodiments of the disclosed subject matter. Gas component primitives with serially coupled gas delivery components mounted thereon in accordance with the disclosed subject matter were also discussed with reference to FIGS. 2A and 2B above.

[0075] In certain exemplary embodiments, the LOTO valve 223 is the first component installed and helps protect personnel while servicing the gas delivery box 100 (see FIG. 1). The regulator 221 is upstream of the transducer 219, which allows the transducer 219 to indicate the setting of the regulator 221. The filter 217 is downstream of the regulator 219 and captures most or all particles generated by the regulator 221. The filter 217 is also upstream of the gas split port 215, which allows multiple gas sticks to be filtered when sharing gas. A two-port valve (e.g., mass flow controller inlet valve 213) is downstream of the gas split port 215, which allows other lines to not be turned off when the two-port valve is actuated. A three-port valve (e.g., purge valve 209) is downstream of the two-port valve and allows purging to occur through the purge port 211 without having to manually turn off the LOTO valve 223. A three-port valve is also upstream of the MFC 205 to allow purging upstream of the MFC 205 following a failure of the MFC (eg, in a closed position).

[0076] 4A-4C, there is shown additional detail of a facility inlet primitive substrate 300 according to FIG. 3A, for example, to be used as a facility inlet to the gas delivery box of FIG. 1. The facility inlet primitive substrate 300 is shown to include a LOTO valve 223, a mass flow controller inlet valve 213, and a purge valve 209, each already attached. However, these valves are shown only to more fully illustrate the overall concept of the additional details to those skilled in the art. Thus, many other configurations of valves or other gas delivery components are possible.

[0077] 4A is a three-dimensional view 400 of a facility inlet primitive substrate 300, shown to include one of a number of substrate mounting holes 401, and several gas delivery component mounting holes 403. Substrate mounting hole 401 may be, for example, a through hole that allows facility inlet primitive substrate 300 to be physically attached to gas delivery box 100 of FIG. 1, for example, by machine screws or other fastening devices known in the art. Gas delivery component mounting hole 403 may be, for example, a threaded hole that allows various gas delivery components to be attached to facility inlet primitive substrate 300 by machine screws or other fastening devices known in the art, along with metal seals (e.g., C-seals or W-seals as described above) or O-rings, also described above.

[0078] 4B illustrates an example cross-sectional view 410 at section AA of FIG. Cross-sectional view 410 illustrates a number of bore holes 405 connecting various port locations used to connect various gas delivery components to gas flowing within fixture inlet primitive substrate 300. For example, bore holes 405 connect the location of regulator 303 to the location of LOTO valve 223. Bore holes 405 can be formed by various machining, etching, and other methods known in the art, such as, for example, mechanical drilling or laser drilling.

[0079] FIG. 4C illustrates an exemplary cross-sectional view 420 at section BB of FIG. 4A. The cross-sectional view 420 illustrates additional bore holes connecting various port locations used to connect various gas delivery components to gas flowing within the facility inlet primitive substrate 300. Thus, each of the bore holes of section AA and section BB can be located at least partially at separate cross sections within the body of the facility inlet primitive substrate 300. Those skilled in the art will recognize that some or all of the gas primitive substrates described herein may be similarly constructed to have bore holes at one or more cross sections within the body of each of the gas primitive substrates described herein. In this exemplary embodiment of FIG. 4C, the horizontal section of the bore hole 407 may be drilled or machined or etched from one end of the facility inlet primitive substrate 300. In this embodiment, the horizontal section of the bore hole 407 has a capping material 409 welded, formed, placed, or inserted after the bore hole 407 is formed. In certain exemplary embodiments, the capping material 409 is welded in place after the internal passages are electropolished as described above. In another particular exemplary embodiment, the capping material 409 is a machine screw that is threaded into the open end of the facility inlet primitive substrate 300. In this example, an O-ring material (e.g., Kalrez® or other types of perfluorinated elastomer or fluoroelastomer materials known in the art, depending on the type of gas being transported) may be used to prevent gas from leaking around the capping material 409.

[0080] 5A and 5B show additional details of a dual two-port valve primitive substrate 340 according to FIG. 3C, which is used to mount, for example, a purge gas inlet valve and a purge gas transducer. However, these valves are described only to more fully explain the overall concept of the additional details to those skilled in the art. Thus, many other configurations of valves or other gas delivery components are possible.

[0081] 5A is a three-dimensional view 500 of a dual two-port valve primitive substrate 340, shown to include one of a number of substrate mounting holes 501, and several gas delivery component mounting holes 503. Substrate mounting hole 501 may be, for example, a through hole that allows dual two-port valve primitive substrate 340 to be physically attached to gas delivery box 100 of FIG. 1, for example, by machine screws or other fastening devices known in the art. Gas delivery component mounting hole 503 may be, for example, a threaded hole that allows various gas delivery components to be attached to dual two-port valve primitive substrate 340, for example, by machine screws or other fastening devices known in the art.

[0082] 5B illustrates an exemplary cross-sectional view 510 at section CC of FIG. 5A. Cross-sectional view 510 illustrates a number of bore holes 505 connecting various port locations used to connect various gas delivery components to gas flowing within dual two-port valve primitive substrate 340. For example, bore holes 505 connect inlet port 341 to the location of first two-port valve 343. The location of first two-port valve 343 is then connected to the location of second two-port valve 345, which is then connected to outlet port 347. As with FIG. 4B, bore holes 505 can be formed by various machining, etching, and other methods known in the art, such as, for example, mechanical drilling or laser drilling.

[0083] 6A-6C show additional details of a dual valve substrate 360 ​​according to FIG. 3E, for use with, for example, a combination shutoff valve and purge valve. Dual valve substrate 360 ​​is shown to include a two-port valve 363 and a three-port valve 367, both of which are already attached to dual valve substrate 360. However, these valves are shown only to more fully explain the overall concept of the additional details to those skilled in the art. Thus, many other configurations of valves or other gas delivery components are possible.

[0084] 6A is a three-dimensional view 600 of dual valve substrate 360, shown to include one of a number of substrate mounting holes 601, and several gas delivery component mounting holes 603. Similar to the exemplary embodiment shown in FIGS. 4A-5B, substrate mounting hole 601 may be, for example, a through hole that allows dual valve substrate 360 ​​to be physically attached to gas delivery box 100 of FIG. 1, for example, by machine screws or other fastening devices known in the art. Gas delivery component mounting hole 503 may be, for example, a threaded hole that allows various gas delivery components to be attached to dual valve substrate 360, for example, by machine screws or other fastening devices known in the art.

[0085] Figure 6B illustrates an example cross-sectional view 610 at section DD of Figure 6A. Cross-sectional view 610 shows a plurality of bore holes 605 connecting various inlet ports 361 to two-port valves 363 and purge ports 365 to three-port valves 367. As noted above, the bore holes 605 can be formed by various machining, etching, and other methods known in the art, such as, for example, mechanical drilling or laser drilling.

[0086] FIG. 6C illustrates an exemplary cross-sectional view 620 at section EE of FIG. 6A. Cross-sectional view 620 illustrates additional bore holes 607, for example, connecting 2-port valve 363 and 3-port valve 367 to one another and to connect outlet port 369 (not shown in FIG. 6C). In this exemplary embodiment, the horizontal section of bore hole 607 may be drilled or machined or etched from one end of dual valve substrate 360. Also, as shown in this embodiment, the horizontal section of bore hole 607 has capping material 609 welded, formed, placed, or inserted after bore hole 607 is formed. In certain exemplary embodiments, capping material 609 is welded in place after the internal passages are electropolished as described above. In another specific exemplary embodiment, capping material 609 is a machine screw threaded into the open end of dual valve substrate 360. In this example, an O-ring material (e.g., Kalrez® or other types of perfluorinated elastomer or fluoroelastomer materials known in the art, depending on the type of gas being transported) can be used to prevent gas from leaking around the capping material 609.

[0087] 7A and 7B show additional details of a dual two-port valve substrate 370 according to FIG. 3F, which may be used, for example, to mount two mass flow controllers. The dual two-port valve substrate 370 is shown to include a first two-port valve 373 and a second two-port valve, both of which are shown already mounted. However, these valves are shown only to more fully illustrate the overall concept of the additional details to those skilled in the art. Thus, many other configurations of valves or other gas delivery components are possible.

[0088] 7A is a three-dimensional view 700 of dual two-port valve substrate 370, shown to include one of a number of substrate mounting holes 701, and several gas delivery component mounting holes 703. Substrate mounting hole 701 may be, for example, a through hole that allows dual two-port valve substrate 370 to be physically attached to gas delivery box 100 of FIG. 1, for example, by machine screws or other fastening devices known in the art. Gas delivery component mounting hole 703 may be, for example, a threaded hole that allows various gas delivery components to be attached to dual two-port valve substrate 370, for example, by machine screws or other fastening devices known in the art.

[0089] 7B illustrates an exemplary cross-sectional view 710 at section FF of FIG. 7A. Cross-sectional view 710 illustrates a number of bore holes 705 connecting various port locations used to connect various gas delivery components to gas flowing within the dual two-port valve substrate 370. For example, a first bore hole 705 connects an inlet port 371 to a first two-port valve 373, which in turn connects the first two-port valve 373 to an additional gas port 375 through a second bore hole 705. The additional gas port 375 is also connected to a second two-port valve 377 through the bore hole 705, which in turn connects to an outlet port 379 through the bore hole 705. The bore holes 705 can be formed by various machining, etching, and other methods known in the art, such as, for example, mechanical drilling or laser drilling.

[0090] 8A and 8B show additional details of a single two-port valve substrate 380 according to FIG. 3G, for example, used as a single shutoff valve. The single two-port valve substrate 380 is shown to include a two-port valve 383. However, this valve is shown only to more fully explain the overall concept of the additional details to those skilled in the art. Thus, many other configurations of valves or other gas delivery components are possible.

[0091] 8A is a three-dimensional view 800 of a single two-port valve substrate 380, shown to include one of a number of substrate mounting holes 801, and several gas delivery component mounting holes 803. Substrate mounting hole 801 may be, for example, a through hole that allows the single two-port valve substrate 380 to be physically attached to the gas delivery box 100 of FIG. 1, for example, by machine screws or other fastening devices known in the art. Gas delivery component mounting hole 803 may be, for example, a threaded hole that allows various gas delivery components to be attached to the single two-port valve substrate 380, for example, by machine screws or other fastening devices known in the art.

[0092] 8B illustrates an exemplary cross-sectional view 810 at section GG of FIG. 8A. Cross-sectional view 810 illustrates a number of bore holes 805 connecting various port locations used to connect various gas delivery components to gas flowing within a single two-port valve substrate 380. For example, a first bore hole 805 connects an inlet port 381 to a two-port valve 383, which in turn connects the two-port valve 383 to an outlet port 385 via a second bore hole 805. As noted above, the bore holes 805 can be formed by various machining, etching, and other methods known in the art, such as, for example, mechanical drilling or laser drilling.

[0093] 9 shows an example of an exemplary valve 901 (or any other gas delivery component) illustrating how to determine the width of various gas component primitive substrates as shown in FIGS. 3A-3G. The exemplary valve 901 may comprise, for example, a LOTO valve 223 or a two-port valve 203 (see FIG. 2A), or a three-port valve 315 (see FIG. 3A). The width d of the exemplary valve 901 is 33 determines, at least in part, the minimum widths of the various gas component primitive substrates to maximize or increase the available space in the completed gas stick assembly.

[0094] In certain exemplary embodiments, the minimum spacing that can be achieved is the width d of a typical valve 901 mounting flange size (approximately 28.6 mm in this example). 33 29 mm, due to the width of the mounting flange plus the flange tolerances. In semiconductor fabrication facilities, some equipment manufacturers also use additional space for, for example, frame impingement panels (FIPs) that are installed between adjacent gas sticks. In this particular exemplary embodiment, an FIP thickness of about 0.8 mm was selected. As a result, the minimum spacing between adjacent gas sticks is about 29.8 mm, due to the width of the mounting flange and the thickness of the FIP. Then, in this embodiment, an additional amount of about 0.7 mm is added for tolerance stack-up, resulting in a minimum width of about 30.5 mm. In contrast to the disclosed subject matter, simultaneous gas delivery sticks only allow for a minimum spacing of 35.6 mm. Thus, a gas delivery box with 24 gas delivery substrates would have an overall width savings of more than about 122 mm (about 4.8 inches). Considered another way, the width savings of more than about 122 mm would allow for the addition of another four gas delivery substrates to the gas delivery box 100 of FIG. 1 in accordance with an embodiment of the disclosed subject matter.

[0095] However, upon reading and understanding the disclosed subject matter, one of ordinary skill in the art will recognize that this minimum width embodiment is provided merely to illustrate an example, and that various other minimum widths may be found and utilized depending on at least some of the considerations presented in this particular exemplary embodiment.

[0096] 10A and 10B show examples illustrating how the height of various gas component primitive substrates may be determined. For example, in various embodiments, the height of the substrate may be reduced or minimized to increase or maximize the available space of the completed substrate assembly.

[0097] FIG. 10A is a three-dimensional view 1000 of the fixture inlet primitive substrate 300, highlighting the locations of the two-port valve 311, the purge port 313, and the three-port valve 315, as described above with reference to FIGS. 3A and 4A-4C. Also, as described above, in one embodiment, the mass flow controller (not shown in FIG. 10A) can be purged using a three-port valve 315 upstream of the mass flow controller, and a two-port valve 311 upstream of the three-port valve 315 (with the purge port 313 located between the two valves 311, 315). To connect the gas transport path between the outlet of the two-port valve 311 and the inlet of the three-port valve 315, an angled bore hole is incorporated, as described below with reference to FIG. 10B. The bore hole connecting the two ports represents a minimum height of the substrate due to the angle of the bore hole (determined by the spacing between the valves) and the diameter of the bore hole.

[0098] 10B illustrates an exemplary cross-section 1010 at section HH of FIG. 10A. Cross-section 1010 illustrates a bore hole 1001 in the facility inlet primitive substrate 300 that connects an outlet at the location of the two-port valve 311 to an inlet at the location of the three-port valve 315. As will be appreciated by those skilled in the art, the angle of the bore hole 1001, combined with the diameter of the bore hole 1001, determines the overall minimum height d of the facility inlet primitive substrate 300. 34 The "steepness" of the angle can be reduced, but the distance d between the outlet of the two-port valve 311 and the inlet of the three-port valve 315 location can be reduced. 35 Therefore, based on reading and understanding the disclosed subject matter, one of ordinary skill in the art would be able to determine the overall minimum height d 34 Or distance d 35 It can then be determined whether to choose to minimize , or to consider a compromise between the two distances for a given application.

[0099] 11, a prior art bottom outlet manifold system 1100 is shown. In the bottom outlet manifold system 1100, gas coupling points 1101 (e.g., gas connections) are attached (connected) to the underside of gas delivery components 1105 (e.g., gas valves). The gas coupling points 1101 then allow for the transport of gas between the gas delivery components 1105 through tubing 1103. As will be appreciated by those skilled in the art, it can be quite difficult to access the gas coupling points 1101 and tubing 1103. All connections or disconnections are made from underneath the gas delivery components 1105, which may require removal of a significant portion of the components within the gas box to access even a single connection.

[0100] FIG. 12 illustrates an example of an upper manifold system 1210 according to various embodiments of the disclosed subject matter. In the upper manifold system 1210, various connections are made to and from gas delivery components 1215 (e.g., gas valves) through gas coupling points 1211. The gas coupling points 1211 are attached, for example, using various types of C-seals, W-seals, O-rings, or other techniques and components as described above. The gas coupling points 1211 allow gas transport between each of the interconnected gas delivery components 1215 through tubes 1213. The tubes 1213 can be connected to the gas coupling points 1211 by various techniques known in the art (e.g., welding). In various embodiments, the gas coupling points 1211 and tubes 1213 can be formed from various materials and prepared (e.g., electropolished) according to the SEMI standards described above. In other embodiments, other materials as described above can be used to form the gas coupling points 1211 and tubes 1213.

[0101] As will be readily appreciated by those skilled in the art, the top manifold system 1210 allows all connections (e.g., gas coupling points 1211 connections to the substrate) to be made from the top side of the various gas component primitive substrates described above. Thus, the top manifold system 1210 allows for great ease and access to the substrates and associated gas delivery components.

[0102] Additionally, the top manifold system 1210 allows for much faster assembly or reassembly than the bottom outlet manifold system 1100 of FIG. 11. Using the top manifold system 1210, all of the substrates can be mounted on the backplane 101 of the gas delivery box 100 (see FIG. 1). The gas coupling points 1211 and tubes 1213 are then attached from the top of the substrates, thereby allowing for rapid configuration of all of the components in the gas delivery system. Additionally, using the top manifold system 1210 to modify various aspects of the gas delivery system does not require disassembly of the entire gas system to pull out the manifolds, as would be required under the prior art system shown in FIG. 11.

[0103] In general, the disclosed subject matter contained herein generally describes or relates to gas component primitive substrates that can be configured to rapidly assemble gas delivery boxes for use with tool operations in semiconductor fabrication environments (fabs). Such tools can include various types of deposition (including plasma-based tools such as atomic layer deposition (ALD), chemical vapor deposition (CVD), plasma enhanced CVD (PECVD) and the like) and etching tools (e.g., reactive ion etching (RIE) tools), as well as various types of thermal furnaces (e.g., rapid thermal annealing and oxidation, etc.), ion implantation, and various other process and metrology tools found in various fabs and known to those skilled in the art. However, the disclosed subject matter is not limited to semiconductor environments, but can be used in numerous machine tool environments, such as robotic assembly, manufacturing, and gas control operations in machining environments (including, for example, operations using physical vapor deposition (PVD) tools), as well as a variety of other environments. Upon reading and understanding the disclosure provided herein, those skilled in the art will recognize that various embodiments of the disclosed subject matter can be used with other types of process tools and a wide variety of other tools, equipment, and components.

[0104] As used herein, the term "or" may be interpreted in an inclusive or exclusive sense. Additionally, other embodiments will be understood by those of ordinary skill in the art upon reading and understanding the present disclosure provided. Additionally, upon reading and understanding the present disclosure provided herein, those of ordinary skill in the art will readily appreciate that various combinations of the techniques and examples provided herein may all be applied in a variety of configurations.

[0105] Although various embodiments are discussed separately, these separate embodiments are not intended to be considered as independent techniques or designs. As indicated above, each of the various parts may be related to each other, and each may be used separately or in combination with other embodiments discussed herein. For example, although various embodiments of methods, operations, and processes have been described, these methods, operations, and processes may be used separately or in various combinations.

[0106] As a result, many modifications and variations can be made, as will be apparent to those skilled in the art upon reading and understanding the disclosure provided herein. Moreover, functionally equivalent methods and devices within the scope of the present disclosure, in addition to those enumerated herein, will be apparent to those skilled in the art from the foregoing description. Portions and features of some embodiments, materials, and construction techniques may be included or substituted for those of other embodiments. Such modifications and variations are intended to be included within the scope of the appended claims. Accordingly, the present disclosure is to be limited only by the terms of the appended claims, along with the full scope of equivalents to which the claims are entitled. It is also to be understood that the terminology used herein is for the purpose of describing particular embodiments only, and is not intended to be limiting.

[0107] The Abstract of the present disclosure is provided to allow the reader to quickly ascertain the nature of the technical disclosure. The Abstract is submitted with the understanding that it will not be used to interpret or limit the scope of the claims. In addition, in the foregoing Detailed Description, it can be understood that various features may be grouped together in a single embodiment for the purpose of streamlining the disclosure. The method of the disclosure should not be construed as limiting the scope of the claims. Accordingly, the following claims are hereby incorporated into the Detailed Description, with each claim standing on its own as a separate embodiment.

[0108] The following numbered examples are specific embodiments of the disclosed subject matter. Example 1: At least one gas primitive substrate for use in a gas delivery box. Each of the at least one gas primitive substrate has at least one location to which a gas delivery component is attached. The at least one location has at least a gas delivery component inlet port and a gas delivery component outlet port formed in the body of the gas primitive substrate. At least one first pair of bore holes with gas flow paths are formed on the upstream and downstream sides, respectively, of the gas delivery component location.

[0109] Example 2: The gas primitive substrate of Example 1, further comprising at least one gas primitive substrate inlet port configured to couple the gas primitive substrate to a gas supply line, and at least one gas primitive substrate outlet port coupling the gas primitive substrate to at least one subsequent component selected from components including an instrument gas inlet supply line and a subsequent gas primitive substrate.

[0110] Example 3: The gas primitive substrate of any one of the preceding examples, wherein each of the at least one first pair of bore holes is formed in the gas primitive substrate at an angle.

[0111] Example 4: The gas primitive substrate of any one of the preceding examples, wherein the plurality of gas primitive substrates are configured to be at least partially coupled to one another in series within a gas delivery box.

[0112] Example 5: A gas primitive substrate according to any one of the preceding examples, wherein at least one of the first pair of bore holes is at least partially located at a cross section separate from the cross sections of the other bore holes, both cross sections being located within the body of the gas primitive substrate.

[0113] Example 6: The gas primitive substrate of any one of the preceding examples, wherein the at least one gas primitive substrate comprises a total of seven gas primitive substrates from which any standard gas delivery box can be assembled.

[0114] Example 7: The gas primitive substrate of Example 6, wherein at least some of the seven gas primitive substrates include a gas primitive substrate having an integrated valve.

[0115] Example 8: The gas primitive substrate of any one of the preceding examples, wherein the plurality of at least one gas primitive substrate is capable of being configured to assemble a gas delivery box for use in conjunction with operation of a tool in a semiconductor fabrication environment.

[0116] Example 9: The gas primitive substrate of any one of the preceding examples, wherein each of the plurality of gas delivery components is configured to be attached from only a top surface of the gas primitive substrate.

[0117] Example 10: The gas primitive substrate of any one of the preceding examples, wherein the gas delivery box is a standard gas delivery box used in a semiconductor fabrication environment.

[0118] Example 11: A gas primitive substrate according to any one of the preceding examples, wherein the gas delivery component comprises at least one component selected from components comprising a two-port gas valve, a three-port gas valve, a mass flow controller, a mass flow meter, a regulator, a transducer, and a filter.

[0119] Example 12: A gas primitive substrate according to any one of the preceding examples, further comprising at least one port selected from ports including a purge port and a gas split port.

[0120] Example 13: A gas primitive substrate as described in Example 12, wherein each of the at least one port is coupled to at least one of the remaining ports and one or more of the gas delivery components through at least one second pair of bore holes with gas flow paths formed on upstream and downstream sides, respectively, of the location of the at least one port.

[0121] Example 14: A gas primitive substrate as described in either Example 12 or Example 13, wherein each of the at least one port is a gas connection point comprising a portion of an upper manifold system, whereby connections are configured to be made only from a top portion of the gas primitive substrate in which the at least one port is located, to other gas delivery components, including other gas primitive substrates.

[0122] Example 15: A plurality of gas primitive substrates for use on a standard backplane in a gas delivery box. Each of the plurality of gas primitive substrates includes at least one location where a gas delivery component is attached, the at least one location includes at least a gas delivery component inlet port and a gas delivery component outlet port formed in the body of the gas primitive substrate, and the gas primitive substrate is configured such that the gas delivery component is attached from only a top surface of the gas primitive substrate. At least one first pair of bore holes with a gas flow path are formed on the upstream and downstream sides, respectively, of the gas delivery component location, and the at least one pair of bore holes is at least partially located at a cross section separate from the cross sections of other bore holes in at least some of the plurality of gas primitive substrates, both cross sections being located within the body of the gas primitive substrate. At least one port selected from ports including a purge port and a gas split port is formed in at least some of the plurality of gas primitive substrates.

[0123] Example 16: A gas primitive substrate as described in Example 15, wherein each of the at least one port is coupled to at least one of the remaining ports and one or more of the gas delivery components through at least one second pair of bore holes having gas flow paths formed on upstream and downstream sides, respectively, of the location of the at least one port.

[0124] Example 17: A gas primitive substrate as described in either Example 15 or Example 16, wherein each of the at least one port is a gas connection point comprising a portion of an upper manifold system, whereby connections are configured to be made only from a top portion of the gas primitive substrate in which the at least one port is located, to other gas delivery components including other gas primitive substrates.

[0125] Example 18: A gas primitive substrate including a facility inlet with gas fitting components, a gas split port, a purge port, and an outlet port. Each of the gas split port, the purge port, and the outlet port is configured to be coupled to other gas primitive substrates or other locations by a top manifold interconnection scheme. The gas primitive substrate is arranged to receive gas delivery components including a two-port lockout / tagout (LOTO) valve, a regulator, a transducer, a filter, an additional two-port valve, and a three-port valve. The gas primitive substrate further has at least a first pair of bore holes with gas flow paths formed on the upstream and downstream sides, respectively, of each location of the gas delivery components. The gas primitive substrate is configured to have a width of about 28.6 mm, an overall height of about 33.8 mm, an overall length of about 239.5 mm, a center-to-center spacing between adjacent gas delivery components of about 30.5 mm, and a pitch distance of about 30.5 mm when aligned with adjacent gas primitive substrates.

[0126] Example 19: A gas primitive substrate including a facility inlet with gas fitting components, a gas split port, a purge port, and an outlet port. Each of the gas split port, the purge port, and the outlet port is configured to be coupled to other gas primitive substrates or other locations by a top manifold interconnection scheme. The gas primitive substrate is arranged to receive gas delivery components including a two-port lockout / tagout (LOTO) valve, an additional two-port valve, and a three-port valve. The gas primitive substrate further includes at least a first pair of bore holes with gas flow paths formed on the upstream and downstream sides, respectively, of each location of the gas delivery components. The gas primitive substrate is configured to have a width of about 28.6 mm, an overall height of about 33.8 mm, an overall length of about 148.0 mm, a center-to-center spacing between adjacent gas delivery components of about 30.5 mm, and a pitch distance of about 30.5 mm when aligned with adjacent gas primitive substrates.

[0127] Example 20: A gas primitive substrate including an inlet port and an outlet port. Each of the inlet and outlet ports is configured to be coupled to other gas primitive substrates or other locations by a top manifold interconnection scheme. The gas primitive substrate is for receiving a gas delivery component including a first two-port valve and a second two-port valve. The gas primitive substrate further has at least a first pair of bore holes with gas flow paths formed on the upstream and downstream sides, respectively, of each location of the gas delivery component. The gas primitive substrate is configured to have a width of about 28.6 mm, an overall height of about 33.8 mm, an overall length of about 99.5 mm, a center-to-center spacing between adjacent gas delivery components of about 30.5 mm, and a pitch distance of about 30.5 mm when aligned with an adjacent gas primitive substrate.

[0128] Example 21: A gas primitive substrate including an inlet port and an outlet port. Each of the inlet and outlet ports is configured to be coupled to other gas primitive substrates or elsewhere by a top manifold interconnection scheme. The gas primitive substrate is configured to receive a mass flow controller that can be mounted without the use of a separate outlet valve. The gas primitive substrate further includes at least a first pair of bore holes with gas flow paths formed between the inlet and outlet ports. The gas primitive substrate is configured to have a width of about 28.6 mm, a total height of about 33.8 mm, an overall length of about 44.5 mm, and a pitch distance of about 30.5 mm when aligned with an adjacent gas primitive substrate.

[0129] Example 22: A gas primitive substrate including an inlet port, a purge port, and an outlet port, each of which is configured to be coupled to other gas primitive substrates or other locations by a top manifold interconnection scheme. The gas primitive substrate further includes a gas delivery component including a 2-port valve and a 3-port valve. The gas primitive substrate further includes at least a first pair of bore holes with gas flow paths formed on the upstream and downstream sides of each of the 2-port valve and 3-port valve locations, respectively. The gas primitive substrate is configured to have a width of about 28.6 mm, a total height of about 33.8 mm, an overall length of about 118.0 mm, and a pitch distance of about 30.5 mm when aligned with an adjacent gas primitive substrate.

[0130] Example 23: A gas primitive substrate including an inlet port, an additional gas port, and an outlet port. Each of the inlet port, the additional gas port, and the outlet port is configured to be coupled to other gas primitive substrates or other locations by a top manifold interconnection scheme. The gas primitive substrate further includes a gas delivery component including a first two-port valve and a second two-port valve, and the gas primitive substrate is configured to mount up to two mass flow controllers in opposite directions. The gas primitive substrate further includes at least a first pair of bore holes with gas flow paths formed on the upstream and downstream sides, respectively, of the respective locations of the first two-port valve and the second two-port valve. The gas primitive substrate is configured to have a width of about 28.6 mm, a total height of about 33.8 mm, an overall length of about 118.0 mm, and a pitch distance of about 30.5 mm when aligned with an adjacent gas primitive substrate.

[0131] Example 24: A gas primitive substrate including an inlet port and an outlet port. Each of the inlet and outlet ports is configured to be coupled to other gas primitive substrates or other locations by a top manifold interconnection scheme. The gas primitive substrate further includes a gas delivery component including a two-port valve. The gas primitive substrate further includes at least a first pair of bore holes with gas flow paths formed on the upstream and downstream sides, respectively, of each location of the two-port valve. The gas primitive substrate is configured to have a width of about 28.6 mm, a total height of about 33.8 mm, an overall length of about 118.0 mm, and a pitch distance of about 30.5 mm when aligned with an adjacent gas primitive substrate.

Claims

1. 1. At least one gas primitive substrate for use in a gas delivery box, each of said at least one gas primitive substrate comprising: at least one location at which a gas delivery component is attached, said at least one location comprising at least a gas delivery component inlet port and a gas delivery component outlet port formed within a body of said gas primitive substrate; at least one first pair of boreholes with gas flow passages formed on upstream and downstream sides, respectively, of the location of the gas delivery component; A gas primitive substrate comprising:

2. 2. The gas primitive substrate of claim 1, at least one gas primitive substrate inlet port configured to couple the gas primitive substrate to a gas supply line; at least one gas primitive substrate outlet port for coupling said gas primitive substrate to at least one subsequent component selected from components including an instrument gas inlet supply line and a subsequent gas primitive substrate; The gas primitive substrate further comprises:

3. 2. The gas primitive substrate of claim 1, Each of the at least a first pair of bore holes is formed in the gas primitive substrate at an angle.

4. 2. The gas primitive substrate of claim 1, A plurality of gas primitive substrates are configured to be at least partially coupled to one another in series within the gas delivery box.

5. 2. The gas primitive substrate of claim 1, A gas primitive substrate, wherein the at least one first pair of bore holes are at least partially located at a cross-section that is separate from a cross-section of other bore holes, both cross-sections being located within the body of the gas primitive substrate.

6. 2. The gas primitive substrate of claim 1, The at least one gas primitive substrate comprises a total of seven gas primitive substrates that can be assembled into any standard gas delivery box.

7. 7. The gas primitive substrate of claim 6, At least some of the seven gas primitive substrates include a gas primitive substrate having an integral valve.

8. 2. The gas primitive substrate of claim 1, A plurality of the at least one gas primitive substrates can be configured to assemble a gas delivery box for use with operation of a tool in a semiconductor fabrication environment.

9. 2. The gas primitive substrate of claim 1, Each of the gas primitive substrates is configured such that the gas delivery components are attached only from a top surface of the respective gas primitive substrate.

10. 2. The gas primitive substrate of claim 1, The gas delivery box is a standard gas delivery box used in semiconductor fabrication environments. Gas Primitive Substrate.

11. 2. The gas primitive substrate of claim 1, The gas primitive substrate, wherein the gas delivery component comprises at least one component selected from components including a two-port gas valve, a three-port gas valve, a mass flow controller, a mass flow meter, a regulator, a transducer, and a filter.

12. 2. The gas primitive substrate of claim 1, The gas primitive substrate further comprising at least one port selected from ports including a purge port and a gas split port.

13. 13. The gas primitive substrate of claim 12, a gas-primitive substrate, wherein each of the at least one port is coupled to at least one of the remaining ports and to one or more of the gas delivery components through at least one second pair of bore holes with gas flow paths formed on upstream and downstream sides, respectively, of the location of the at least one port;

14. 13. The gas primitive substrate of claim 12, A gas primitive substrate, wherein each of the at least one port is a gas connection point that comprises a portion of an upper manifold system, such that connections are made only from a top portion of the gas primitive substrate where the at least one port is located, to other gas delivery components, including other gas primitive substrates.

15. 1. A plurality of gas primitive substrates for use on a standard backplane in a gas delivery box, each of said plurality of gas primitive substrates comprising: at least one location at which a gas delivery component is attached, the at least one location including at least a gas delivery component inlet port and a gas delivery component outlet port formed within a body of the gas primitive substrate, the gas primitive substrate being configured such that the gas delivery component is attached from only a top surface of the gas primitive substrate; at least one first pair of bore holes with gas flow paths formed on upstream and downstream sides, respectively, of the location of the gas delivery component, the at least one pair of bore holes being at least partially located at a cross-section that is separate from cross-sections of other bore holes in at least some of the plurality of gas primitive substrates, both cross-sections being located within the body of the gas primitive substrate; at least one port selected from ports including purge ports and gas split ports on at least some of the plurality of gas primitive substrates; A gas primitive substrate comprising:

16. 16. The gas primitive substrate of claim 15, a gas primitive substrate, each of said at least one port being coupled to at least one of the remaining ports and one or more of said gas delivery components through at least one second pair of bore holes with gas flow paths formed on upstream and downstream sides, respectively, of said location of said at least one port.

17. 16. The gas primitive substrate of claim 15, A gas primitive substrate, wherein each of the at least one port is a gas connection point that comprises a portion of an upper manifold system, such that connections are made only from a top portion of the gas primitive substrate where the at least one port is located, to other gas delivery components, including other gas primitive substrates.

18. A gas primitive substrate, comprising: Facility inlet having gas fitting components Equipped with the gas primitive substrate has a gas division port, a purge port, and an outlet port, each of the gas division port, the purge port, and the outlet port configured to be coupled to other gas primitive substrates or elsewhere by an upper manifold interconnection scheme; the gas primitive substrate is configured to receive gas delivery components including a two-port lockout / tagout (LOTO) valve, a regulator, a transducer, a filter, an additional two-port valve, and a three-port valve; the gas primitive substrate further having at least a first pair of bore holes with gas flow passages formed on upstream and downstream sides, respectively, of each location of the gas delivery component; The gas primitive substrate has a width of about 28.6 mm, an overall height of about 33.8 mm, an overall length of about 239.5 mm, and a center-to-center spacing between adjacent gas delivery components of about 30.5 mm, configured to have a pitch distance of about 30.5 mm when aligned with adjacent gas primitive substrates. Gas primitive substrate.

19. A gas primitive substrate, comprising: Facility inlet having gas fitting components Equipped with the gas primitive substrate has a gas division port, a purge port, and an outlet port, each of the gas division port, the purge port, and the outlet port configured to be coupled to other gas primitive substrates or elsewhere by an upper manifold interconnection scheme; the gas primitive substrate is configured to receive gas delivery components including a two-port lockout / tagout (LOTO) valve, an additional two-port valve, and a three-port valve; the gas primitive substrate further having at least a first pair of bore holes with gas flow passages formed on upstream and downstream sides, respectively, of each location of the gas delivery component; The gas primitive substrate has a width of about 28.6 mm, an overall height of about 33.8 mm, an overall length of about 148.0 mm, and a center-to-center spacing between adjacent gas delivery components of about 30.5 mm, configured to have a pitch distance of about 30.5 mm when aligned with adjacent gas primitive substrates. Gas primitive substrate.

20. A gas primitive substrate, comprising: the gas primitive substrate has an inlet port and an outlet port, each of the inlet port and the outlet port configured to be coupled to other gas primitive substrates or elsewhere by an upper manifold interconnection scheme; the gas primitive substrate is configured to receive a gas delivery component including a first two-port valve and a second two-port valve; the gas primitive substrate further having at least a first pair of bore holes with gas flow passages formed on upstream and downstream sides, respectively, of each location of the gas delivery component; The gas primitive substrate has a width of about 28.6 mm, an overall height of about 33.8 mm, an overall length of about 99.5 mm, and a center-to-center spacing between adjacent gas delivery components of about 30.5 mm, configured to have a pitch distance of about 30.5 mm when aligned with adjacent gas primitive substrates. Gas primitive substrate.

21. A gas primitive substrate, comprising: the gas primitive substrate has an inlet port and an outlet port, each of the inlet port and the outlet port configured to be coupled to other gas primitive substrates or elsewhere by an upper manifold interconnection scheme; the gas primitive substrate is configured to receive a mass flow controller that can be mounted without a separate outlet valve; the gas primitive substrate further comprises at least a first pair of bore holes with a gas flow passage formed between the inlet port and the outlet port; The gas primitive substrate has a width of about 28.6 mm, a total height of about 33.8 mm, a total length of about 44.5 mm, and is configured to have a pitch distance of about 30.5 mm when aligned with an adjacent gas primitive substrate. Gas primitive substrate.

22. A gas primitive substrate, comprising: the gas primitive substrate having an inlet port, a purge port, and an outlet port, each of the inlet port, the purge port, and the outlet port configured to be coupled to other gas primitive substrates or elsewhere by an upper manifold interconnection scheme; the gas primitive substrate comprises gas delivery components including two-port and three-port valves; the gas primitive substrate further includes at least a first pair of bore holes with gas flow passages formed on upstream and downstream sides of respective locations of the two-port valve and the three-port valve, respectively; The gas primitive substrate has a width of about 28.6 mm, a total height of about 33.8 mm, a total length of about 118.0 mm, and is configured to have a pitch distance of about 30.5 mm when aligned with an adjacent gas primitive substrate. Gas primitive substrate.

23. A gas primitive substrate, comprising: the gas primitive substrate having an inlet port, an additional gas port, and an outlet port, each of the inlet port, the additional gas port, and the outlet port configured to be coupled to other gas primitive substrates or elsewhere by an upper manifold interconnection scheme; the gas primitive substrate comprises a gas delivery component including a first two-port valve and a second two-port valve, the gas primitive substrate being configured to mount up to two mass flow controllers in opposing directions; the gas primitive substrate further having at least a first pair of bore holes with gas flow passages formed on upstream and downstream sides of respective locations of the first two-port valve and the second two-port valve, respectively; The gas primitive substrate has a width of about 28.6 mm, a total height of about 33.8 mm, a total length of about 118.0 mm, and is configured to have a pitch distance of about 30.5 mm when aligned with an adjacent gas primitive substrate. Gas primitive substrate.

24. A gas primitive substrate, comprising: the gas primitive substrate has an inlet port and an outlet port, each of the inlet port and the outlet port configured to be coupled to other gas primitive substrates or elsewhere by an upper manifold interconnection scheme; the gas primitive substrate comprises a gas delivery component including a two-port valve; the gas primitive substrate further having at least a first pair of bore holes with gas flow passages formed on upstream and downstream sides, respectively, of each of the two-port valve locations; The gas primitive substrate has a width of about 28.6 mm, a total height of about 33.8 mm, a total length of about 118.0 mm, and is configured to have a pitch distance of about 30.5 mm when aligned with an adjacent gas primitive substrate. Gas primitive substrate.

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