Support structure and inspection facility of them, and calibration tool of the inspection facility

Abstract

To provide a support structure, an inspection facility of them, and a calibration tool of the inspection facility.SOLUTION: A plurality of support parts is provided to a carina of a support structure in an equivalent interval, a housing groove is defined to between the adjacent support parts, and is used for housing a support material, and a first stopper part is provided to each support part, and a second stopper part is provided to the support material so as to be corresponded. A parallel key of the support structure is installed between the first and second stopper parts, and is used for limiting a relative deformation of the support part and the support material. The inspection facility is used for detecting the support structure, and here, an inspection device contains a plurality of inspection regions. On the basis of a movement level that a movable door panel is transferred so as to be approached to a substrate carrier, it can be used for detecting an offset at a various level of the support material. The calibration tool is used for correcting the inspection facility, the inspection device is used for detecting whether an inspection surface is matched to a calibration condition on the basis of a movement level so that the movable door panel is transferred so as ot be approached to the calibration tool.SELECTED DRAWING: Figure 7

Description

[Technical field]

[0001] The present invention relates to a support structure, an inspection facility thereof, and a calibration tool for the inspection facility, and more particularly to a support structure, an inspection facility thereof, and a calibration tool for the inspection facility, which are capable of fine-tuning and calibrating an offset. [Background technology]

[0002] In the current semiconductor industry, the storage and transportation of semiconductor-related devices such as wafers, photomasks or substrates plays an important role. As the size of semiconductor substrates gradually increases, it is necessary to have a good support mechanism during storage or transportation to avoid collision damage situations.

[0003] Current substrate carriers use a central support mechanism to support semiconductor substrates, but the central support is always assembled in a manner that can cause assembly errors, and can even cause the central support to shift or warp. In addition, vibrations are likely to occur during the process of transporting semiconductor substrates, and after repeated use for a certain period of time, the central support is likely to shift or tilt when the semiconductor substrate is placed on it, causing a collision between the central support and the substrate, resulting in damage to the substrate. Currently, there is no good mechanism for preventing the central support from shifting or warping, and no good way to know the offset of the central support.

[0004] Therefore, how to check for and prevent the occurrence of center support offset is currently a problem that the industry is urgently trying to solve. Summary of the Invention [Problem to be solved by the invention]

[0005] In view of this, the present invention provides a support structure and a testing equipment for testing the same, and a calibration tool for the testing equipment, which can use different elements to connect the support to the keel and fix the support, and can not only avoid the problem of the support being tilted and shifted, but also fine-tune the offset of the support. Before actually placing the substrate, the support structure can first be detected by the testing equipment to determine whether its offset range meets the standard. On the other hand, the testing equipment can be standardized and calibrated using the calibration tool to ensure that the specifications and dimensions of the testing equipment are accurate. [Means for solving the problem]

[0006] According to one aspect of the present invention, a support structure applicable to a substrate carrier is provided, the support structure including a keel and a plurality of parallel keys, the keel is installed vertically within the substrate carrier, and a plurality of support portions are provided at equal intervals, an accommodating groove is defined between adjacent support portions, the accommodating groove is used to accommodate the support material, each support portion is provided with a first stopper portion, and a second stopper portion is provided at a location corresponding to the first stopper portion of the support material, each parallel key is installed between the first stopper portion and the second stopper portion, and is used to limit relative displacement of the support material and the support material in the accommodating groove.

[0007] In one embodiment, the first stopper portion and the second stopper portion are fitted together to form a key groove, the parallel key structure is fitted into the key groove, and each parallel key is disposed within the key groove.

[0008] In one embodiment, the support structure further includes a plurality of fasteners disposed between each of the receiving grooves and the support, each fastener being used to adjust a first displacement amount of each of the supports in the receiving groove.

[0009] In one embodiment, each fastener includes a wedge-shaped body and a flange, the wedge-shaped body has a clamping interface, the clamping interface is used to clamp onto the slope of the support, and the flange is located at the edge of the clamping interface, and each fastener fixes the support via the clamping interface and the flange.

[0010] In one embodiment, the connection between the clamping interface and the flange has a lead angle that mates with the contour of the corner of the support, thereby tightly bonding the fastener to the support.

[0011] In one embodiment, the support structure further includes a first locking assembly, which penetrates the keel and is lockingly connected to the fastener, and adjusts a first displacement amount of the fastener in a first horizontal direction of the keel based on the locking degree of the first locking assembly.

[0012] In one embodiment, the support structure further includes a plurality of adjustment blocks, each of the adjustment blocks including a trapezoidal body having an upper inclined surface adapted to abut against each support.

[0013] In one embodiment, the adjustment blocks are disposed on the sides of the supports, and each adjustment block is adapted to abut against each support and to adjust the second displacement of each support.

[0014] In one embodiment, the support structure further includes a second locking assembly, which penetrates the keel and is lockingly connected to the adjusting block, and adjusts a second displacement amount of the adjusting block in a second horizontal direction of the keel based on the locking degree of the second locking assembly.

[0015] In one embodiment, the top and bottom ends of the keel have upper and lower grooves respectively, and the support structure further includes an upper fixing block and a lower fixing block, the upper fixing block is located at the top end and is used to abut against the upper groove, the keel is connected to the top of the substrate carrier via the top end and the upper fixing block, the lower fixing block is located at the bottom end and is used to abut against the lower groove, and the keel is connected to the bottom of the substrate carrier via the bottom end and the lower fixing block.

[0016] According to another aspect of the present invention, there is provided an inspection equipment for inspecting the support structure, the inspection equipment is applied to a substrate carrier and includes a stage, a movable door panel and an inspection device, the stage is used for supporting the substrate carrier, the movable door panel is movably mounted on the stage and used for moving towards or away from the substrate carrier, the inspection device is mounted on the movable door panel, the inspection device includes an inspection surface and a plurality of inspection areas, the inspection surface is used for abutting against the support, and each inspection area is used for detecting different degrees of offset of the support according to the degree of movement of the movable door panel moving towards the substrate carrier.

[0017] In one embodiment, the offset includes a multi-axial offset of the support received in the receiving groove.

[0018] In one embodiment, the inspection area includes a first inspection area and a second inspection area located inside the first inspection area, and when the movable door panel is stopped on the stage in a first inspection position, the support has a first offset that exceeds an inspection range, and when the movable door panel is stopped on the stage in a second inspection position, the support has a second offset that is less than the inspection range.

[0019] In one embodiment, the inspection area further includes a third inspection area located inside the second inspection area, the movable door panel is parked on the stage at a third inspection position, and the support has a third offset that meets the calibration condition, wherein the third offset is less than the second offset.

[0020] In one embodiment, the inspection equipment further includes a transition depth inspection block, which is installed on the movable door panel, and the transition depth inspection block matches the inspection results of the inspection device, and the transition depth inspection block provides for inspecting different degrees of offset of the support based on the degree of movement of the movable door panel sliding closer to the substrate carrier.

[0021] In one embodiment, the inspection equipment further includes a gap inspection material, which is installed on the movable door panel and is used to inspect the inclination state of the exterior of the substrate carrier.

[0022] According to another aspect of the present invention, a calibration tool is provided that is applied to calibrating the inspection equipment, the calibration tool including a base and a support, the base is used to be placed on a stage, the support is installed vertically on the base, the support includes a plurality of calibration materials installed at equal intervals, and is used to abut against the inspection surface of the inspection device, the calibration materials have the same structure as the support material, the support materials are installed at equal intervals by being accommodated in the accommodation groove, and the inspection area of ​​the inspection device is used to detect whether the inspection surface meets the calibration conditions of the calibration materials based on the degree of movement of the movable door panel as it approaches the calibration tool.

[0023] In one embodiment, the inspection area includes a first inspection area, a second inspection area, and a third inspection area, the first inspection area defining a first offset greater than a calibration range, the second inspection area being located inside the first inspection area, the second inspection area defining a second offset greater than the calibration range, the third inspection area being located inside the second inspection area, the third inspection area defining a third offset equal to or less than the calibration range, the third offset being smaller than the second offset, and the second offset being smaller than the first offset, wherein when the movable door panel stops on the stage at the first inspection position, a deviation of the inspection surface exceeds the calibration range and a calibration condition is not met, when the movable door panel stops on the stage at the second inspection position, a deviation of the inspection surface exceeds the calibration range and a calibration condition is not met, and when the movable door panel stops on the stage at the third inspection position, a deviation of the inspection surface is equal to or less than the calibration range and the inspection surface meets the calibration condition.

[0024] In one embodiment, the calibration tool further includes a handle, the handle being mounted on the base and adapted for use by an external device to lift the calibration tool.

[0025] In one embodiment, the calibration tool further includes a support base, which is mounted on the base and abuts opposite sides of the support column, and is used to support and fix the support column. Effect of the Invention

[0026] In the embodiments of the present invention, the parallel key is used to limit the relative displacement of the support in the receiving groove, and in some embodiments, the fastener and the adjustment block are used to fix the support and fine-tune the offset of the support to solve the problem of the tilt offset of the support. In addition, before the support structure actually supports the substrate, it can be first tested by the testing equipment to determine whether its offset range is consistent with the standard, and when the offset of the support is detected, the offset of the support can be fine-tuned to achieve the calibration function. In addition, before the testing, the testing equipment can use a calibration tool to perform standardization calibration to ensure that the specifications and dimensions of the testing equipment are accurate. [Brief description of the drawings]

[0027] For a clearer understanding of the above and other features, advantages and embodiments of the present invention, reference is made to the accompanying drawings, in which: [Figure 1] 2 illustrates a three-dimensional view of a support structure mounted within a substrate carrier, according to one embodiment of the present invention. [Diagram 2] FIG. 2 is a three-dimensional view of a support structure according to one embodiment of the present invention. [Diagram 3] FIG. 4 is a three-dimensional view of the support structure from another angle. [Figure 4] FIG. [Figure 5A] FIG. 1 is an exploded view of the keel, fasteners and first locking assembly. [Figure 5B] A partial side cross-sectional view of the keel, fasteners and supports. [Figure 6A] FIG. 13 is an exploded view of the keel, adjustment block, and second locking assembly. [Figure 6B] A side cross-sectional view of the keel, adjustment block and support material. [Figure 7]FIG. 1 is a schematic diagram of the support and keel. [Figure 8] FIG. 1 is a schematic diagram of the keel top end and upper fixing block before assembly. [Figure 9] FIG. 13 is a schematic diagram of the keel top end and upper fixing block after assembly. [Figure 10] FIG. 1 is a schematic diagram of the bottom end of the keel and the lower fixing block before assembly. [Figure 11] FIG. 13 is a schematic diagram of the bottom end of the keel and the lower fixing block after assembly. [Figure 12] 1 is a three-dimensional view of an inspection fixture according to one embodiment of the present invention. [Figure 13] FIG. 13 is a three-dimensional view of the inspection equipment in another state. [Figure 14] 1 is a cross-sectional side view of a substrate carrier and testing fixture; [Figure 15] FIG. 1 is a schematic diagram of an inspection device. [Figure 16] FIG. 2 is a schematic diagram of the movable door panel in a first inspection position. [Figure 17] FIG. 11 is a schematic diagram showing a state in which the support material is in contact with a first inspection area. [Figure 18] FIG. 13 is a schematic diagram of the movable door panel in a second inspection position. [Figure 19] 13 is a schematic diagram of the support material entering a second inspection area; FIG. [Figure 20] FIG. 13 is a schematic diagram of the movable door panel in a third inspection position. [Figure 21] FIG. 13 is a schematic diagram of the support material entering a third inspection area. [Figure 22] FIG. 14 is a three-dimensional view of the inspection equipment of FIG. 13 from another angle. [Diagram 23] 1 is a three-dimensional view of a calibration fixture installed in a test fixture, according to one embodiment of the present invention. [Figure 24] FIG. 2 is a three-dimensional view of the calibration tool. [Diagram 25] FIG. 1 is a partial cross-sectional view of the calibration tool when it is on the stage. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0028] The present invention is a related art application entitled "The Adjustment Mechanism of The Central Beam in The Substrate Carrier and The Inspection Device Thereof" filed on June 12, 2023. [Patent Document 1] This patent application claims international priority from U.S. Provisional Patent Application No. 63 / 472,429, the contents of which are incorporated herein by reference and form a part of this specification.

[0029] The support structure of the embodiment of the present invention and the testing equipment and calibration tool for the testing equipment use elements such as parallel keys, fixed fasteners and adjustment blocks to position and fix the support. Before the substrate is actually placed on it, the support structure can first be tested by the testing equipment to determine whether its offset range conforms to the standard. The testing equipment can also be standardized and calibrated using the calibration tool to confirm that the specifications and dimensions of the testing equipment are accurate and the offset is within the calibration range. EXAMPLES

[0030] Please refer to Figures 1 to 3. Figure 1 is a three-dimensional view of a support structure mounted in a substrate carrier according to an embodiment of the present invention. Figure 2 is a three-dimensional view of the support structure according to an embodiment of the present invention. Figure 3 is a three-dimensional view of the support structure from another angle. The support structure 100 of this embodiment is applied to a substrate carrier 200, which is used to support multiple substrates in the substrate carrier 200 and prevent the substrates from colliding with each other. The substrate carrier 200 is used to mount multiple large wafers or PCBs, for example, and therefore has stricter requirements for the offset of the support structure 100 in the substrate carrier 200.

[0031] Please refer to FIG. 3 and FIG. 4 to FIG. 7. FIG. 4 is a partial three-dimensional view of the support structure. FIG. 5A is an exploded view of the keel, fasteners and first lock assembly. FIG. 5B is a partial side cross-sectional view of the keel, fasteners and support. FIG. 6A is an exploded view of the keel, adjustment block and second lock assembly. FIG. 6B is a partial side cross-sectional view of the keel, adjustment block and support. FIG. 7 is a schematic view of the support and the keel. The support structure 100 includes a keel 110 and a number of parallel keys 130, and a number of supports 120 are connected to the keel 110, and the parallel keys 130 are used to fix the supports 120. The support structure 100 of this embodiment further includes a number of fasteners 140 and a number of adjustment blocks 150. The keel 110 is installed at a central support position in the vertical internal space of the substrate carrier 200, and the keel 110 provides for a number of supports 120 to be installed at intervals, and can perform offset fine adjustment for each support 120. Since the same elements have the same features and structures, in order to more clearly illustrate the features of the present invention, each support 120 will be described below as a combination of one parallel key 130, one fastening material 140, and one adjustment block 150.

[0032] The keel 110 is installed vertically in the substrate carrier 200, and a plurality of supports 113 are provided at equal intervals. A receiving groove 116 is defined between adjacent supports 113, and the receiving groove 116 is used to receive the supports 120, as shown in FIG. 5A. A first stopper portion 115 is provided on each support 113, and a second stopper portion 121 (shown in FIG. 7) is provided at a position corresponding to the first stopper portion 115 of the support 120. The first stopper portion 115 is located on the top surface 114 of the support 113, and is, for example, recessed downward from the top surface 114 to form the first stopper portion 115, or a notch groove is opened in the top surface 114 to communicate both sides of the support 113. The second stopper portion 121 is located on the lower surface 123 of the support material 120, and the parallel key 130 is installed between the first stopper portion 115 and the second stopper portion 121 and is used to limit the relative displacement between the support portion 113 and the support material 120 in the accommodating groove 116.

[0033] 7, the parallel key 130 can be fixed in the second stopper portion 121 of the support 120, and when the support 120 is placed in the receiving groove 116, the parallel key 130 is inserted into the first stopper portion 115 to fix the support 120. In one embodiment, the parallel key 130 is fixed in the second stopper portion 121 by gluing or other fixing means. The parallel key 130 is only partially located in the second stopper portion 121, i.e., a part of the parallel key 130 protrudes outside the second stopper portion 121, and when the support 120 and the parallel key 130 fixed thereto are installed in the receiving groove 116 of the keel 110, the lower surface 123 of the support 120 contacts the top surface 114 of the support portion 113, and the part of the parallel key 130 protruding outside the second stopper portion 121 is inserted into the first stopper portion 115. At this time, the first stopper portion 115 and the second stopper portion 121 form a key groove 130a, the structure of the parallel key 130 fits into the key groove 130a, and the parallel key 130 is installed in the key groove 130a, which is used to fix the support material 120 and prevent it from shifting.

[0034] The support 120 is, for example, a carbon rod, and its material has micro-spring characteristics, so that it can generate micro-strain and achieve the effect of offset correction. In this embodiment, the support 120 is a long rod-like structure, and its top surface is a slope 124, which is used to abut the fastener 140, and the bottom surface 123 of the support 120 contacts the support 113, so that the support 120 is placed on the top surface 114 of the support 113, as shown in FIG. 5A. The far end of the support 120 is suspended in the substrate carrier 200 and used to support the semiconductor substrate. In practical application, both sides of the semiconductor substrate are placed in the grooves on the left and right inner walls of the substrate carrier 200, and the support 120 is supported at the center of the semiconductor substrate, thereby providing sufficient support force for the substrate and avoiding the phenomenon of the substrate being curved.

[0035] 5A and 5B, the fastener 140 is disposed between the receiving groove 116 and the support 120, and is used to fix the support 120 and adjust the first displacement m1 of the support 120 in the receiving groove 116. In this embodiment, the fastener 140 includes a wedge-shaped body 141 and a flange 142, and the wedge-shaped body 141 has a clamping joint surface 144, which is used to abut against the inclined surface 124 of the support 120, and the inclined surface 124 is located opposite to the lower surface 123. In the wedge-shaped body 141, the opposite surface of the clamping joint surface 144 is the upper contact surface 148, which is used to abut against the bottom surface of the support 113, so that the fastener 140 is located in the receiving groove 116 and is clamped between the support 120 and the support 113. That is, one end of the support 120 and the fastener 140 are simultaneously located in the receiving groove 116 defined between the adjacent supports 113. The flange 142 is located at one edge 145 of the clamping interface 144, and the fastener 140 fixes the support 120 through the clamping interface 144 and the flange 142. In one embodiment, the connection between the clamping interface 144 and the flange 142 has a lead angle 147, which engages with the contour of one corner 127 of the support 120. In one embodiment, the arc of the lead angle 147 is consistent with the arc of the corner 127 of the support 120, so that the fastener 140 is tightly connected to the support 120 through the lead angle 147 and can provide a good clamping force. In one embodiment, the clamping force of the fastener 140 can reach 3.5 kg for the support 120, and has a good fixing effect. In this way, the fastener 140 fixes the support 120 in multiple directions, for example, restricting the support 120 in the X-axis, Y-axis, and Z-axis to avoid displacement. Furthermore, by providing the flange 142, it is possible to further prevent displacement in the X-axis and Y-axis (that is, in the horizontal direction).

[0036] In one embodiment, the support structure 100 further includes a first locking assembly 161, which penetrates the keel 110 and is lockingly connected to the fastener 140, and adjusts a first displacement m1 of the fastener 140 in a first horizontal direction D1 according to the locking degree of the first locking assembly 161. The first horizontal direction D1 is parallel to the short axis direction S1 of the support 120. When the first locking assembly 161 is locked along the locking direction (e.g., clockwise), the first locking assembly 161 pulls the fastener 140 along the direction of the keel 110, and at this time, the horizontal displacement of the support 120 can be adjusted to the right in FIG. 5B. On the other hand, when the first locking assembly 161 is locked counterclockwise, the first locking assembly 161 pushes the fastener 140 away from the keel 110, and at this time, the horizontal displacement of the support 120 can be adjusted to the left in FIG. 5B.

[0037] 6A and 6B, the adjusting block 150 is installed on the side 117 of the support 113, and is used to abut against the support 120 and adjust the second displacement m2 of the support 120. In this embodiment, the adjusting block 150 includes a trapezoidal body 151, which has an upper inclined surface 154 and is used to abut against the support 120, more specifically, abut against the lower surface 123 of the support 120. When the adjusting block 150 moves in the second horizontal direction D2, the upper inclined surface 154 can lift the support 120, thereby achieving the effect of adjusting the second displacement m2.

[0038] The support structure 100 further includes a second locking assembly 162, which penetrates the support portion 113 of the keel 110 and is lockingly connected to the adjustment block 150, and adjusts the second displacement amount m2 of the adjustment block 150 in the second horizontal direction D2 of the keel 110 according to the locking degree of the second locking assembly 162. The second horizontal direction D2 is perpendicular to the first horizontal direction D1, and the second horizontal direction D2 is parallel to the longitudinal axis direction S2 of the support 120. When the second locking assembly 162 locks along the locking direction (e.g., clockwise), the second locking assembly 162 pulls the adjustment block 150 toward the support portion 113 of the keel 110, and at this time, the warping deformation amount of the support 120 in the vertical direction can be adjusted toward the upward direction in FIG. 6B. On the other hand, when the second locking assembly 162 locks along the counterclockwise direction, the warping deformation amount of the support 120 in the vertical direction can be adjusted toward the downward direction in FIG. 6B.

[0039] Please refer to Figures 1 and 8 to 11. Figure 8 is a schematic diagram of the top end of the keel and the upper fixing block before assembly. Figure 9 is a schematic diagram of the top end of the keel and the upper fixing block after assembly. Figure 10 is a schematic diagram of the bottom end of the keel and the lower fixing block before assembly. Figure 11 is a schematic diagram of the bottom end of the keel and the lower fixing block after assembly. The keel 110 has opposing top and bottom ends 111 and 112, each of which has an upper groove 118 and a lower groove 119. The support structure 100 further comprises: The upper fixed block 180 and the lower fixed block 190 are included. The upper fixed block 180 is located at the top end 111 and is used to abut against the upper groove 118, and the keel 110 is connected to the top 210 of the substrate carrier 200 through the top end 111 and the lower fixed block 180. The lower fixed block 190 is located at the bottom end 112 and is used to abut against the lower groove 119, and the keel 110 is connected to the bottom 220 of the substrate carrier 200 through the bottom end 112 and the lower fixed block 190. The lower groove 118 has a contour corresponding to the upper fixed block 180, so that the upper fixed block 180 can be positioned when abutting against the upper groove 118, and the phenomenon of rotation or displacement does not occur. Similarly, the lower groove 118 and the lower fixed block 190 have the same mechanism, and the phenomenon of rotation or displacement does not occur when the two abut. The upper fixing block 180 and the lower fixing block 190 can increase the number of locking points, and the top end 111 and the bottom end 112 each have three locking points, as shown in Figures 9 and 11. In this way, the locking strength when the support structure 100 is locked to the substrate container 200 can be improved, and the problem of the support structure 100 being displaced can be avoided.

[0040] Next, the inspection facility will be described. Please refer to Fig. 12 to Fig. 14. Fig. 12 is a three-dimensional view of the inspection facility according to one embodiment of the present invention. Fig. 13 is a three-dimensional view of the inspection facility in another state. Fig. 14 is a side cross-sectional view of the substrate carrier and the inspection facility.

[0041] The inspection device 400 is used to inspect the support structure 100, and the present embodiment takes the inspection of the support structure 100 of the above embodiment as an example, and the names and symbols of the components are used according to the present embodiment. The inspection device 400 includes a stage 410, a movable door panel 420, and an inspection device 430. The stage 410 is used to support the substrate carrier 200, and the movable door panel 420 is movably installed on the stage 410 and is used to move toward or away from the substrate carrier 200. The inspection device 430 is installed on the movable door panel 420, and the inspection device 430 includes an inspection surface 434 and a number of inspection areas (for example, in this embodiment, including a first inspection area 431, a second inspection area 432, and a third inspection area 433), the inspection surface 434 is used to abut against the support 120, and each of the inspection areas 431, 432, or 433 is used to inspect different degrees of offset of the support 120 according to the degree of movement of the movable door panel 420 to move toward the substrate carrier 200.

[0042] The inspection device 430 moves toward or away from the substrate carrier 200 together with the movable door panel 420. After the movable door panel 420 moves along the moving direction Dm, it moves, for example, from the position in FIG. 12 to the position in FIG. 13, at which time the movable door panel 420 moves together with the substrate carrier 200. More specifically, the inspection device 430 on the movable door panel 420 moves toward the support structure 100 on the substrate carrier, thereby inspecting the offset of the support 120. The stage 410 has a first inspection position 421, a second inspection position 422, and a third inspection position 423 arranged in sequence along the moving direction Dm, which are used to indicate the stop positions of the moving of the movable door panel 420, and respectively indicate different inspection results. The first inspection position 421 corresponds to the first inspection area 431, the second inspection position 422 corresponds to the second inspection area 432, and the third inspection position 423 corresponds to the three inspection areas 433, and by moving the movable door panel 420 to one of the above inspection positions, the position where the support 120 is located in the inspection area can be obtained correspondingly. In practical application, the offset of the support 120 that can be inspected includes the axial offset of the support 120 accommodated in the accommodation groove 116 of the keel 110, as well as the left-right offset and the up-down warp.

[0043] Please refer to Figures 14 and 15. Figure 15 is a schematic diagram of the inspection device. In this embodiment, the inspection area includes a first inspection area 431 and a second inspection area 432 located inside the first inspection area 431. In addition, a third inspection area 433 is further included, which is located inside the second inspection area 432. The second inspection area 432 is recessed from the inspection surface 434, and the second inspection area 432 is lower than the first inspection area 431, so that when the support 120 falls into the first inspection area 431 and the second inspection area 432, the movable door panel 420 has different moving degrees (which can also be regarded as moving distances). Next, different inspection results will be described.

[0044] First, the first type of inspection result will be described. Please refer to FIG. 16 and FIG. 17. FIG. 16 is a schematic diagram of the movable door panel in the first inspection position. FIG. 17 is a schematic diagram of the support contacting the first inspection area. When the movable door panel 420 moves toward the substrate carrier 200, when the support 120 contacts the first inspection area 431, the movable door panel 420 stops at the first inspection position 421 on the stage 410, and the support 120 has a first offset beyond the inspection range. In one embodiment, the inspection range includes a left-right offset within ±2 mm, and a vertical camber within ±1.5 mm. Therefore, when any support 120 is offset to the left or right by more than 2 mm, the support 120 contacts the first inspection area 431 of the inspection surface 434, and the movable door panel 120 stops at the first inspection position 421 and cannot be pushed further. Similarly, when any of the supports 120 are deflected upwards or downwards by more than 1.5 mm, the support 120 contacts the first inspection area 431, and the movable door panel 420 cannot be pushed in any further. Such an inspection result indicates that the offset of the support 120 exceeds the inspection range, and an adjustment needs to be made, for example, by using the fasteners 140 and the adjustment block 150 to adjust the offset of the support 120.

[0045] Next, the second type of inspection result will be described. Please refer to FIG. 18 and FIG. 19. FIG. 18 is a schematic diagram of the movable door panel in the second inspection position. FIG. 19 is a schematic diagram of the support entering the second inspection area. When the movable door panel 420 moves toward the substrate carrier 200, the support 120 contacts the second inspection area 432, the movable door panel 420 stops at the second inspection position 422 on the stage 410, and the support 120 has a second offset below the inspection range. When any of the supports 120 are offset to the left or right within 2 mm, the support 120 falls into the second inspection area 432, and at this time, the movable door panel 420 is pushed to the second inspection position 422 and cannot be pushed further. Similarly, when any of the supports 120 bend up or down within 1.5 mm, the support 120 falls into the second inspection area 432. Such an inspection result indicates that the offset of the support 120 is within the inspection range, and no adjustment is required, and it can be used to place the semiconductor substrate.

[0046] A third type of inspection result will be further described. Please refer to FIG. 20 and FIG. 21. FIG. 20 is a schematic diagram of the movable door panel at the third inspection position. FIG. 21 is a schematic diagram of the support entering the third inspection area. When the movable door panel 420 moves toward the substrate carrier 200, the support 120 falls into the third inspection area 433, and when the movable door panel 420 stops at the third inspection position 423, the support 120 has a third offset that meets the calibration condition, and the third offset is smaller than the second offset. When any of the supports 120 are offset to the left or right within 0.1 mm, the support 120 falls into the third inspection area 433. When any of the supports 120 are bowed upward or downward within 0.1 mm, the support 120 falls into the third inspection area 433, and at this time the movable door panel 420 can advance to the third inspection position 423. Such an inspection result also indicates that the offset is within the inspection range, and that support 120 has a third offset that is smaller and does not need to be adjusted and can be used to support a substrate. In fact, the third inspection result indicates that support 120 has a very small offset range, which meets the calibration conditions for calibration using a calibration tool. The calibration tool will be described in detail later.

[0047] The indication manner for the inspection position may be a first inspection line 411, a second inspection line 412 or a third inspection line 413 which are parallel to each other at a distance. Please refer to FIG. 22. FIG. 22 is a three-dimensional view of the inspection equipment of FIG. 13 from another angle. The inspection equipment 400 of this embodiment further includes a transition depth inspection block 440, which is installed on the movable door panel 420, and the transition depth inspection block 440 matches the inspection result of the inspection device 430. The transition depth inspection block 440 provides a function of inspecting different degrees of offset of the support 120 according to the moving degree (which can also be regarded as the moving distance) of the movable door panel 420 moving toward the substrate carrier 200. When the movable door panel 420 stops at the first inspection position 421, the second inspection position 422 or the third inspection position 423, the transition depth inspection block 440 can indicate the first inspection line 411, the second inspection line 412 or the third inspection line 413 on the stage 410, and clearly display the inspection result.

[0048] 13, the inspection equipment 400 of this embodiment further includes a gap inspection member 450 and a plurality of positioning pins 460. The gap inspection member 450 is installed on the movable door panel 420 and used to inspect the tilted state of the appearance of the substrate carrier 200. The gap inspection members 450 are installed, for example, on both sides of the movable door panel 420. After the substrate carrier 200 is placed on the stage 410, when the substrate carrier 200 contacts the gap inspection members 450, it indicates that the substrate carrier 200 is not positioned normally, is in a tilted state, and needs to be repositioned. In addition, the inspection equipment 400 of this embodiment further includes a plurality of positioning pins 460, which are installed on the surface 414 of the stage 410, and the positioning pins 460 match with a plurality of positioning grooves 221 (shown in FIG. 1) of the substrate carrier 200, the positioning grooves 221 are installed on the outer surface of the bottom 220 of the substrate carrier 200, and the positioning pins 460 abut against the positioning grooves 221, used to position the substrate carrier 200 on the stage 410.

[0049] Next, an embodiment of the calibration tool will be described. Please refer to Figures 23 and 24. Figure 23 is a three-dimensional view of the calibration tool installed in the test equipment according to one embodiment of the present invention. Figure 24 is a three-dimensional view of the calibration tool.

[0050] The calibration tool 500 is suitable for calibrating the inspection equipment 400, and the calibration of the inspection equipment 400 in the above embodiment is taken as an example in this embodiment, and the names and symbols of the components are used in this embodiment. The calibration tool 500 includes a base 510 and a support 520, the base 510 is used for mounting on the stage 410 of the inspection equipment 400, the support 520 is vertically mounted on the base 510, the support 520 includes a number of calibration pieces 525 arranged at equal intervals, and is used for contacting the inspection surface 434 of the inspection device 430 of the inspection equipment 400. The calibration pieces 525 have the same structure as the support 120, for example, the same inclined surface and lower surface as the support 120, thereby calibrating the inspection device 430. The support 120 is arranged at equal intervals by being accommodated in the receiving groove 116, and the calibration pieces 525 in this embodiment are also arranged at equal intervals and have the same intervals as the support 120. In this embodiment, the calibration fixture 500 is a one-piece aluminum standard member, which simulates the standard height of the support 120 after assembly, and the interval between each layer is 27 mm±0.05 mm. The first, second and third inspection areas 431, 432 and 433 of the inspection device 430 are used to inspect whether the inspection surface 434 meets the calibration condition of the calibration member 525 according to the degree of movement of the movable door panel 420 moving closer to the calibration fixture 500.

[0051] In this embodiment, the first inspection area 431 defines a first offset that is greater than the calibration range. The second inspection area 432 is located inside the first inspection area 431, and the second inspection area 432 defines a second offset that is greater than the calibration range. The third inspection area 433 is located inside the second inspection area 432, and the third inspection area 433 defines a third offset that is less than the calibration range, and the third offset is less than the second offset, and the second offset is less than the first offset.

[0052] When the movable door panel 420 moves toward the calibration tool 500, the movable door panel 420 stops at the third inspection position 423, indicating that the offset of the inspection surface 434 is below the calibration range, the inspection surface 434 meets the calibration conditions, the size of the inspection device 430 is accurate and the offset is within the calibration range, at this time the inspection device 430 is in a calibration completed state, no calibration is required, and can be used to inspect the support structure 100 of the substrate carrier 200. On the other hand, when the calibration material 525 contacts the second inspection area 432, the movable door panel 420 stops at the second inspection position 422, the offset of the inspection surface 434 exceeds the calibration range, does not meet the calibration conditions, the size of the inspection device 430 is not accurate or the installation is misaligned, the inspection device 430 is in a calibration target state, and needs to be adjusted or replaced. Similarly, when the calibration material 525 contacts the first inspection area 431, the movable door panel 420 stops at the first inspection position 421, the offset of the inspection surface 434 exceeds the calibration range and does not meet the calibration conditions, the size of the inspection device 430 is inaccurate or the installation is misaligned, the inspection equipment is in a state of calibration and needs to be adjusted or replaced.

[0053] Please refer to Figures 24 and 25. Figure 25 is a partial cross-sectional view of the calibration tool when it is on the stage. The calibration tool 500 of this embodiment further includes a handle 530, a support base 540, and a number of positioning grooves 550. The handle 530 is installed on the base 510 and is used for an external device to lift the calibration tool 500 and to avoid distortion caused by holding and touching the support 520. The support base 540 is installed on the base 510 and abuts on both opposite sides of the support 520 and is used for supporting and fixing the support 520, so as to maintain the verticality of the support 520 and prevent distortion of the support 520. The positioning groove 550 is provided on the base 510 and faces the stage 410, and has the same structure as the positioning groove 221 on the bottom 220 of the substrate carrier 200, and is engaged with the positioning pin 460 on the stage 410 and is used for positioning the calibration tool 500. The positioning groove 550 has a pair of positioning inclined surfaces 551, and the positioning pin 460 protrudes from the surface 414 of the stage 410. When the calibration instrument 500 is installed on the stage 410, the positioning pin 460 slides into the positioning inclined surfaces 551 to position the calibration instrument 500.

[0054] As described above, the support structure of the embodiment of the present invention, the testing equipment for testing the support structure, and the calibration tool of the testing equipment use parallel keys to limit the relative displacement between the support and the support, and avoid the situation where the support is distorted. In some embodiments, the support structure is further positioned and the support is fixed using elements such as fixed fasteners and adjustment blocks. In addition, before the substrate is actually placed on the support structure, the support structure can be first detected by the testing equipment to determine whether its offset range is consistent with the standard. When testing the offset of the support, the offset of the support can be fine-tuned by elements such as fasteners and adjustment blocks to achieve the function of calibration. On the other hand, the testing equipment uses the calibration tool to perform standardization calibration and ensure that the specifications and dimensions of the testing equipment are accurate.

[0055] The present invention has been disclosed above with a number of embodiments, but the embodiments are not intended to limit the present invention. Those skilled in the art can make various changes and modifications without departing from the spirit and scope of the present invention, and therefore the scope of protection of the present invention is based on the definition of the appended claims. [Explanation of symbols]

[0056] 100 Support structure 110 Keel 111 Apex 112 Bottom end 113 Support part 114 Top surface 115 First stopper part 116 Storage Groove 117 Side 118 Upper Groove 119 Lower Groove 120 Support material 121 Second stopper part 123 Lower surface 124 Slope 127 Corner 130 Parallel Key 140 Fastening materials 141 Wedge-shaped body 142 Flange 144 Clamping joint surface 145 Edge 147 Lead angle 148 Upper surface 150 Adjustment Block 151 Trapezoidal body 154 Upper slope 161 First Lock Assembly 162 Second Lock Assembly 180 Upper fixed block 190 Lower Fixed Block 200 PCB Carrier 210 Top 220 Bottom 221 Stereotactic groove 400 Inspection Equipment 410 Stage 411 First Inspection Line 412 Second Inspection Line 413 3rd Inspection Line 414 Surface 420 Movable Door Panel 421 First Inspection Position 422 Second Inspection Position 423 Third Inspection Position 430 Inspection Equipment 434 Inspection surface 431 First Inspection Area 432 Second Inspection Area 433 Third Inspection Area 440 Transition Depth Inspection Block 450 Gap inspection material 460 Positioning pin 500 Calibration Instruments 510 Pedestal 520 Post 525 Calibration material 530 Handle 540 Support Base 550 stereotactic groove 551 Stereotactic slope D1 First horizontal direction D2 Second horizontal direction Dm Moving direction m1 First displacement m2 Second displacement amount S1 Short axis direction S2 Long axis direction X-axis direction Y-axis direction Z axis direction

Claims

1. A support structure for application to a substrate carrier, the support structure including a keel and a plurality of parallel keys; The keel is installed vertically in the substrate carrier, and a plurality of support parts are provided at equal intervals, and a receiving groove is defined between adjacent support parts, and the receiving groove is used to receive a support material, and a first stopper part is provided on each support part, and a second stopper part is provided at a position of the support material corresponding to the first stopper part; A support structure characterized in that each of the parallel keys is installed between the first stopper portion and the second stopper portion and is used to limit relative displacement of the support portion and the support material in the accommodating groove.

2. Of the support structures, The support structure according to claim 1, characterized in that the first stopper portion and the second stopper portion are fitted together to form a key groove, the parallel key structure is fitted into the key groove, and each of the parallel keys is installed within the key groove.

3. The support structure, The support structure of claim 1, further comprising a plurality of fastening members installed between each of the accommodating grooves and the support material, each of the fastening members being used to adjust a first displacement amount of each of the support materials positioned in the accommodating groove.

4. Of the support structures, The support structure according to claim 3, characterized in that each of the fastening members includes a wedge-shaped body and a flange, the wedge-shaped body has a clamping joint surface, the clamping joint surface is used to clamp on the inclined surface of the support, and the flange is located at an edge of the clamping joint surface, and each of the fastening members fixes the support via the clamping joint surface and the flange.

5. Of the support structures, 5. The support structure of claim 4, wherein the connection between the clamping joint surface and the flange has a lead angle that fits into the corner profile of the support, thereby tightly joining the fastener to the support.

6. The support structure, The support structure of claim 3, further comprising a first locking assembly, penetrating the keel and lockingly connected to the fastener, and adjusting the first displacement amount of the fastener in a first horizontal direction of the keel based on the locking degree of the first locking assembly.

7. The support structure, 2. The support structure of claim 1, further comprising a plurality of adjustment blocks, each of the adjustment blocks including a trapezoidal body, the trapezoidal body having an upper inclined surface, adapted to abut against each of the supports.

8. Of the support structures, The support structure according to claim 7, characterized in that the adjustment block is installed on a side of the support portion, and each adjustment block is used to abut against each support material and to adjust the second displacement amount of each support material.

9. The support structure, The support structure of claim 3, further comprising a second locking assembly, penetrating the keel and lockingly connected to the adjustment block, and adjusting the second displacement amount of the adjustment block in a second horizontal direction of the keel based on the locking degree of the second locking assembly.

10. Of the support structures, The top and bottom ends of the keel have upper and lower grooves, respectively, and the support structure further includes an upper fixing block and a lower fixing block; the upper fixing block is located at the top end and is used to abut against the upper groove, and the keel is connected to the top of the substrate carrier through the top end and the upper fixing block; The support structure of claim 1, wherein the lower fixed block is located at the bottom end and is used to abut against the lower groove, and the keel is connected to the bottom of the substrate carrier through the bottom end and the lower fixed block.

11. 13. An inspection fixture for use in inspecting the support structure of claim 1 and applied to a substrate carrier, the inspection fixture including a stage, a movable door panel, and an inspection device; the stage is adapted to support the substrate carrier; and the movable door panel is movably mounted on the stage and adapted to move toward or away from the substrate carrier; the inspection device is mounted on the movable door panel, the inspection device includes an inspection surface and a plurality of inspection areas, the inspection surface is adapted to abut against the support, and each of the inspection areas is adapted to detect a different degree of offset of the support according to a degree of movement of the movable door panel toward the substrate carrier.

12. Among the above-mentioned inspection equipment, 12. The inspection equipment of claim 11, wherein the offset includes a multi-axial offset of the support received in the receiving groove.

13. Among the above-mentioned inspection equipment, the inspection area includes a first inspection area and a second inspection area located inside the first inspection area, and the support has a first offset beyond an inspection range when the movable door panel stops on the stage at a first inspection position; 12. The inspection facility of claim 11, wherein the support has a second offset that is less than the inspection range when the moveable door panel is parked on the stage in a second inspection position.

14. The inspection area, 14. The inspection facility of claim 13, further comprising a third inspection area located inside the second inspection area, the movable door panel resting on the stage at a third inspection position, and the support having a third offset that meets a calibration condition, wherein the third offset is less than the second offset.

15. The inspection equipment, Further comprising a transition depth inspection block; 12. The inspection equipment of claim 11, wherein the transition depth inspection block is installed on the movable door panel, the transition depth inspection block matches the inspection results of the inspection device, and the transition depth inspection block provides for inspecting different degrees of offset of the support based on the degree of movement of the movable door panel sliding to approach the substrate carrier.

16. The inspection equipment, It also includes gap inspection materials, 12. The inspection equipment according to claim 11, wherein the gap inspection material is installed on the movable door panel and is used to inspect the inclination state of the exterior of the substrate carrier.

17. A calibration tool adapted to calibrate a test equipment according to claim 11, the calibration tool including a base and a support, the base is used to be placed on the stage; The support is installed vertically on the base, the support includes a plurality of calibration members installed at equal intervals, and is used to abut against the inspection surface of the inspection device, the calibration members have the same structure as the support member described in claim 1, and the support members are installed at equal intervals by being accommodated in the accommodation groove; Here, the calibration tool is characterized in that the inspection area of ​​the inspection device is used to detect whether the inspection surface meets the calibration conditions of the calibration material based on the degree of movement of the movable door panel as it approaches the calibration tool.

18. The calibration tool, the inspection area includes a first inspection area, a second inspection area, and a third inspection area; the first test area defines a first offset greater than a calibration range; the second inspection area is located inside the first inspection area, the second inspection area defining a second offset greater than the calibration range; the third inspection area is located inside the second inspection area, the third inspection area defines a third offset less than the calibration range, the third offset being less than the second offset, and the second offset being less than the first offset; When the movable door panel stops at a first inspection position on the stage, the deviation of the inspection surface exceeds the calibration range and does not meet the calibration condition; When the movable door panel stops at a second inspection position on the stage, the deviation of the inspection surface exceeds the calibration range and does not meet the calibration condition; 18. The calibration tool of claim 17, wherein when the movable door panel stops on the stage at a third inspection position, a deviation of the inspection surface is within the calibration range and the inspection surface meets the calibration condition.

19. The calibration tool, It also includes a handle, 18. The calibration tool of claim 17, wherein the handle is mounted on the base and is used by an external device to lift the calibration tool.

20. The calibration tool, Further comprising a support base; 18. The calibration tool according to claim 17, wherein the support base is mounted on the base and abuts on opposite sides of the support column, and is used to support and fix the support column.

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