Sheet adhesion device and sheet adhesion method

Abstract

To provide a sheet adhesion device and a sheet adhesion method, capable of preventing the generation of a protection failure of a protection surface.SOLUTION: A sheet adhesion device EA has sheet adhesion means 20 of bonding an adhesion sheet AS to a protection surface WK3 of an adhered body WK so that an overlapping part ASP where both predetermined parts ASF and ASR of the adhesion sheet AS are overlapped is formed, and further comprises arrangement means 30 of arranging an immersion prevention agent HM to an overlapping part adjacent region DA surrounded by an approach part ASA of the adhesion sheet AS positioned at a position from the overlapping part ASP to the protection surface WK3, an end edge AST of the adhesion sheet AS connected to the approach part ASA, and the protection surface WK3.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The present invention relates to a sheet sticking device and a sheet sticking method. [Background technology]

[0002] 2. Description of the Related Art There is known a sheet application device that applies an adhesive sheet to a protective surface of an adherend in such a manner that predetermined portions of the adhesive sheet overlap each other to form overlapping portions (see, for example, Patent Document 1). [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Patent Publication No. 2022-30877 Summary of the Invention [Problem to be solved by the invention]

[0004] A wafer W (adherend) with a protective tape 27 (adhesive sheet) applied to its peripheral portion (protective surface) by the tape application system (sheet application device) described in Patent Document 1 is prone to forming cavities in the overlapping adjacent region surrounded by the approach portion of the adhesive sheet located between the overlapping portion where predetermined portions of the adhesive sheet overlap and the protective surface, the edge of the adhesive sheet connected to the approach portion, and the protective surface of the adherend. Therefore, if an adherend with such a cavity formed therein is immersed in liquid or exposed to gas for a predetermined treatment, foreign matter such as liquid or gas will enter through the cavity, causing the foreign matter to adhere to or come into contact with the protective surface, resulting in poor protection of the protective surface.

[0005] An object of the present invention is to provide a sheet sticking device and a sheet sticking method that can prevent insufficient protection of a protective surface. [Means for solving the problem]

[0006] The present invention employs the configurations set forth in the claims. Effect of the Invention

[0007] According to the present invention, since the penetration prevention agent is disposed in the area adjacent to the overlapping portion, it is possible to prevent the occurrence of insufficient protection of the protective surface. [Brief description of the drawings]

[0008] [Figure 1] 1A to 1G are explanatory views of a sheet sticking device according to one embodiment of the present invention and explanatory views of the operation of the device, and FIG. 1H to 1J are explanatory views of a modified example of the sheet sticking device of the present invention. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0009] Hereinafter, an embodiment of the present invention will be described with reference to the drawings. In this embodiment, the X-axis, Y-axis, and Z-axis are mutually orthogonal, the X-axis and Y-axis are axes in a predetermined plane, and the Z-axis is an axis perpendicular to the predetermined plane. Furthermore, in this embodiment, the view from the direction of the arrow DR parallel to the Y-axis is used as a reference, and when directions are indicated without specifying the figure, "up" is the direction of the Z-axis arrow, "down" is the opposite direction, "left" is the direction of the X-axis arrow, "right" is the opposite direction, "front" is the direction of the Y-axis arrow, and "rear" is the opposite direction. Note that FIG. 1(C) is a view seen from the arrow AA in FIG. 1(A). The solid line in FIG. 1(D) is a view seen from the arrow BB in FIG. 1(A). The two-dot chain line in FIG. 1(D) is a view seen from the arrow DR in FIG. 1(A).

[0010] The sheet application apparatus EA for carrying out the sheet application method of the present invention comprises: supply means 10 for carrying out a supply step of supplying an adhesive sheet AS; sheet application means 20 for carrying out a sheet application step of applying the adhesive sheet AS to an outer peripheral surface WK3 serving as a protective surface of an adherend WK so as to form an overlapping portion ASP (see FIG. 1(F)) where a leading end portion ASF in the feed direction and a trailing end portion ASR in the feed direction overlap each other as predetermined portions of the adhesive sheet AS; and placement means 30 for carrying out a placement step of placing a hot melt agent HM (see FIG. 1(E)) as an anti-intrusion agent in an overlapping portion adjacent area DA surrounded by an approach portion ASA (see FIG. 1(F)) of the adhesive sheet AS located between the overlapping portion ASP and the outer peripheral surface WK3, a leading edge in the feed direction AST serving as an edge of the adhesive sheet AS connected to the approach portion ASA, and the outer peripheral surface WK3, and is disposed in the vicinity of adherend transport means 40 for carrying out an adherend transport step of transporting the adherend WK. As shown in FIG. 1(A), the adherend WK of this embodiment has a circular shape in plan view (shape viewed from above) centered on the adherend center WKC.

[0011] The supply means 10 includes a support member 11 that directly or indirectly supports each of the components that make up the supply means 10, a support roller 12 that supports the original roll RS on which the adhesive sheet AS is temporarily attached to a strip-shaped release sheet RL, a guide roller 13 that guides the original roll RS, a peeling plate 14 as a peeling means that folds back the release sheet RL at the peeling edge 14A and peels the adhesive sheet AS from the release sheet RL, a drive roller 15 that is supported by an output shaft (not shown) of a rotary motor 15A as a drive device and pinches the release sheet RL between itself and a pinch roller 15B, and a recovery roller 16 that is supported by an output shaft (not shown) of a drive device and always applies a predetermined tension to the release sheet RL present between it and the pinch roller 15B while the sheet application device EA is operating automatically, and serves as a recovery means that recovers the release sheet RL. The adhesive sheet AS used in this embodiment is one that is deformable by heat as the deformation energy.

[0012] The sheet attachment means 20 includes a first attachment means 21 that performs a first attachment step of attaching the adhesive sheet AS to the outer peripheral surface WK3 so as to form an overhanging area ASH (see Figure 1 (B)) in which a portion of the adhesive sheet AS overhangs the outer peripheral surface WK3, and a second attachment means 22 that performs a second attachment step of folding and attaching the overhanging area ASH in both directions to one surface WK1 and the other surface WK2, which are different surfaces of the adherend WK. The first joining means 21 includes a first pressing roller 21A as a pressing member rotatably supported by a bracket (not shown), and is adapted to join the adhesive sheet AS to the outer circumferential surface WK3 of the adherend WK. The second attachment means 22 includes a hot air blower 22A as a deformation energy imparting means that performs a deformation energy imparting process in which hot air HA, which is heat as deformation energy heated by a heating device not shown, such as a coil heater or the heating side of a heat pipe, is blown onto the adhesive sheet AS, thereby folding the protruding area ASH, and a second pressure roller 22B and a third pressure roller 22C as pressing members rotatably supported on a bracket not shown. In addition, as shown by the dotted line in Figure 1 (A), the first pressing roller 21A is positioned so that when the center WKC of the adherend WK is positioned at the reference position RP, the first pressing roller 21A can press the adhesive sheet AS supplied from the supply means 10 against the outer peripheral surface WK3 of the adherend WK. In addition, as shown by the dotted line in Figure 1 (A), the hot air blower 22A is positioned so that when the center WKC of the adherend WK is positioned at the reference position RP, hot air HA can be blown to the protruding area ASH of the adhesive sheet AS attached to the outer peripheral surface WK3 of the adherend WK. Furthermore, the second and third pressing rollers 22B, 22C are arranged in pairs, one above the other, as shown in Fig. 1(D), and are arranged in positions where, when the adherend center WKC of the adherend WK is placed at the reference position RP, the protruding region ASH of the adhesive sheet AS attached to the outer peripheral surface WK3 of the adherend WK can be folded in the direction of one surface WK1 and the direction of the other surface WK2, respectively, as shown by the two-dot chain line in Fig. 1(A). In this embodiment, the second and third pressing rollers 22B, 22C rotate around a rotation axis inclined at angles of 45 degrees (135 degrees) and 180 degrees (0 degrees) respectively to the XY plane toward the reference position RP.

[0013] The placement means 30 includes a tank 31 as a storage means for heating and melting the hot melt material HM using a heating means (not shown) such as a coil heater or the heating side of a heat pipe, and storing the same, a pressure pump 32 as a supply means for supplying the heated and melted hot melt material HM into a pipe 32A as an induction means, and an electromagnetic valve 33 as a discharge control means for discharging the hot melt material HM in the pipe 32A from a nozzle 33A as a discharge means. The hot melt agent HM has the property of existing in a solid state at the ambient temperature where the sheet application device EA of the present invention is installed, becoming molten when heated from the ambient temperature, beginning to solidify when the temperature drops from the molten state, and becoming solid again when the temperature reaches the ambient temperature. Examples of such hot melt agents HM include cooling-hardening materials based on EVA (ethylene vinyl acetate), olefin, rubber, polyamide (nylon), polyurethane, polyester, etc.

[0014] The adherend transport means 40 includes a linear motor 41 as a driving device, a rotary motor 42 as a driving device supported by a slider 41A of the linear motor 41, and a support table 43 supported by the output shaft 42A of the linear motor 41 and having a support surface 43A that can be adsorbed and held by a pressure reduction means (holding means) such as a pressure reduction pump or a vacuum ejector (not shown). In this embodiment, the support table 43 is configured to rotate around a table center 43C by a rotation motor .

[0015] The operation of the sheet sticking apparatus EA will now be described. First, a user of the sheet application device EA (hereinafter simply referred to as "user") sets the original web RS on the sheet application device EA, in which each member is arranged in the initial position shown by the solid line in Fig. 1(A), and then inputs a signal to start automatic operation via an operation means (not shown) such as an operation panel or a personal computer. Then, the supply means 10 drives the rotary motor 15A to pay out the original web RS, and when the leading end portion ASF of the leading adhesive sheet AS in the supply direction is peeled off a predetermined length from the release sheet RL at the folded-back portion of the release sheet RL folded back by the peeling edge 14A of the peeling plate 14 as shown in Fig. 1(A), the drive of the rotary motor 15A is stopped. In addition, the placement means 30 drives the heating means and pressure pump 32 (not shown) to heat and melt the hot melt material HM in the tank 31, send the heated and melted hot melt material HM into the pipe 32A, and begin pressurizing the hot melt material HM in the pipe 32A.

[0016] Next, when a user or a conveying means (not shown) such as an articulated robot or a belt conveyor places the adherend WK on the supporting surface 43A with one surface WK1 facing the supporting surface 43A so that the adherend center WKC overlaps with the table center 43C as shown in Fig. 1(A), the adherend conveying means 40 drives a decompression means (not shown) to start suction and holding on the supporting surface 43A. Thereafter, the adherend conveying means 40 drives the linear motor 41 to move the support table 43 so that the table center 43C (adherend center WKC) coincides with the reference position RP as shown by the two-dot chain line in Fig. 1(A), and then stops driving the linear motor 41.

[0017] Next, the supply means 10 and the adherend transport means 40 drive the rotary motors 15A and 42 to rotate the adherend WK in the direction of the arrow RD while supplying the adhesive sheet AS. As a result, the adhesive sheet AS passes through the first pressing area, which is the pressing area of ​​the first pressing roller 21A, and is pressed by the first pressing roller 21A as shown by the two-dot chain line in Fig. 1(A) and Fig. 1(B), and is stuck to the outer peripheral surface WK3 in a state in which an overhanging area ASH is formed that overhangs the outer peripheral surface WK3. Then, when the leading edge AST in the supply direction of the adhesive sheet AS stuck to the outer peripheral surface WK3 reaches just before the hot air blowing area of ​​the hot air blower 22A, the sheet sticking means 20 drives the hot air blower 22A to blow hot air HA toward the adherend WK. Next, when the adhesive sheet AS attached to the outer peripheral surface WK3 passes through the hot air blowing area, the adhesive sheet AS is deformed by the hot air HA, and the protruding area ASH is bent toward one surface WK1 and toward the other surface WK2, as shown in Fig. 1(C). After that, the driving of the rotary motors 15A and 42 continues, and when the adhesive sheet AS passes through the second pressing area and the third pressing area, which are the pressing areas of the second and third pressing rollers 22B and 22C, the protruding area ASH is folded in stages, and the folded protruding area ASH is attached to one surface WK1 and the other surface WK2 of the adherend WK, as shown in Fig. 1(D).

[0018] Thereafter, as shown in Fig. 1(E), when the leading edge AST in the supply direction of the adhesive sheet AS attached to the outer peripheral surface WK3 reaches a predetermined position, the placement means 30 drives the solenoid valve 33 to discharge the heated and melted hot melt agent HM from the nozzle 33A, and applies a predetermined amount of the hot melt agent HM to the predetermined position. The predetermined position where the placement means 30 applies the hot melt agent HM is the adhesive surface side of the adhesive sheet AS at a position that is to become the approach portion ASA when the adhesive sheet AS is attached to the adherend WK. Next, when the leading edge ASF in the supply direction of the adhesive sheet AS passes through the first pressing area again, the trailing edge ASR in the supply direction of the adhesive sheet AS is pressed by the first pressing roller 21A, and an overlapping portion ASP is formed as shown in Fig. 1(F). When the overlapping portion ASP is formed in this manner, an overlapping adjacent area DA is formed in the area surrounded by the approach portion ASA, the feed direction leading edge AST, and the outer peripheral surface WK3. However, since the hot melt agent HM is applied to a predetermined position of the adhesive sheet AS, no cavity is formed in the overlapping adjacent area DA.

[0019] Then, when the leading end ASF of the next adhesive sheet AS following the leading adhesive sheet AS in the supply direction is peeled off from the peel-off sheet RL at the folded-back portion of the peel-off sheet RL by a predetermined length, the supply means 10 stops driving the rotary motor 15A to stop supplying the adhesive sheet AS. Next, when the trailing edge ASB in the supply direction of the adhesive sheet AS attached to the adherend WK passes through the first pressing region and then the hot air blowing region, the sheet attaching means 20 stops driving the hot air blower 22A. After that, when the trailing edge ASB in the supply direction of the adhesive sheet AS attached to the adherend WK passes through the second and third pressing regions, an integrated object UP is formed in which the adhesive sheet AS is attached to the outer peripheral surface WK3 of the adherend WK, as shown in FIG. 1(G).

[0020] Next, when the trailing edge ASB in the supply direction of the adhesive sheet AS attached to the adherend WK reaches a predetermined position, the adherend transport means 40 stops driving the rotary motor 42, and then drives the linear motor 41 to return the support table 43 to its initial position. Next, the adherend transport means 40 stops driving the pressure reducing means (not shown) and releases the suction and holding on the support surface 43A, and then the user or the transport means (not shown) removes the integrated object UP from the support surface 43A and transports the integrated object UP to the next process such as a plating process or an etching process, and the same operations as above are repeated thereafter.

[0021] According to the embodiment described above, since the hot melt material HM is disposed in the overlap adjacent area DA, it is possible to prevent insufficient protection of the outer circumferential surface WK3.

[0022] The means and steps in the present invention are not limited in any way as long as they can perform the operations, functions, or steps described for those means and steps, and are not limited at all to the components and steps of a mere embodiment shown in the above embodiment. For example, the sheet attachment means may be anything that can attach the adhesive sheet to the protective surface of the adherend so that an overlapping portion is formed where predetermined portions of the adhesive sheet overlap each other, and is not limited in any way as long as it is within the technical scope in light of the common general technical knowledge at the time of filing (the same applies to other means and steps).

[0023] The supply means 10 may form a closed-loop slit or a slit extending over the entire short width direction in a strip-shaped adhesive sheet base material temporarily attached to a strip-shaped release sheet RL, and peel off and supply the adhesive sheet AS from the original roll RS in which a predetermined area partitioned by the slit is made into the adhesive sheet AS, or may employ a strip-shaped adhesive sheet original roll in which a strip-shaped adhesive sheet base material is temporarily attached to a strip-shaped release sheet RL, and while the strip-shaped adhesive sheet original roll is being unwound, form a closed-loop slit or a slit extending over the entire short width direction in the adhesive sheet base material with a cutting blade as cutting means, and peel off and supply the adhesive sheet AS from the original roll RS in which a predetermined area partitioned by the slit is made into the adhesive sheet AS, or may employ a strip-shaped adhesive sheet original roll in which a strip-shaped adhesive sheet AS is temporarily attached to a strip-shaped release sheet RL, and form a closed-loop slit or a slit extending over the entire short width direction in the adhesive sheet base material with a cutting blade as cutting means, and supply the adhesive sheet AS from the original roll RS in which a predetermined area partitioned by the slit is made into the adhesive sheet AS. The strip-shaped adhesive sheet AS may be peeled off from the roll RS and supplied, or the adhesive sheet AS may be peeled off from the original roll RS that is not rolled up and is, for example, fanfold folded and supplied, or a recovery means may be used to recover the release sheet RL without rolling it up, for example by fanfold folding, shredding with a shredder or the like, or simply piling up, or no recovery means may be used, or the adhesive sheet AS that is not temporarily attached to the release sheet RL may be unwound and supplied, which may or may not be provided in the sheet application apparatus EA of the present invention, and if it is not provided in the sheet application apparatus EA of the present invention, the adhesive sheet AS may be supplied by another device or a user, for example.

[0024] In the sheet sticking means 20, the predetermined portions of the adhesive sheet AS that form the overlapping portion ASP may be, for example, the leading edge ASF in the feed direction and the central portion in the feed direction of the adhesive sheet AS, or the central portion in the feed direction and the rear end portion ASR in the feed direction of the adhesive sheet AS, or any other portions may be used; and when the adhesive sheet AS that forms the overlapping portion ASP is a plurality of adhesive sheets AS as shown in FIG. (H), for example, the predetermined portions of the adhesive sheet AS that form the overlapping portion ASP may be, for example, the leading edge ASF in the feed direction of one adhesive sheet AS and the leading edge ASF in the feed direction or the central portion in the feed direction or the rear end portion ASR in the feed direction of another adhesive sheet AS, or the central portion in the feed direction of one adhesive sheet AS and the leading edge ASF in the feed direction or the central portion in the feed direction or the rear end portion ASR in the feed direction of another adhesive sheet AS, or the rear end portion ASR in the feed direction of one adhesive sheet AS and the leading edge ASF in the feed direction or the central portion in the feed direction or the rear end portion ASR in the feed direction of another adhesive sheet AS, or any other portions may be used.

[0025] The sheet sticking means 20 may employ a first sticking means 21 for sticking the adhesive sheet AS to the outer peripheral surface WK3 of the adherend WK so that a protruding region ASH is formed in which a part of the adhesive sheet AS protrudes from the outer peripheral surface WK3 of the adherend WK only in the direction of one surface WK1 or only in the direction of the other surface WK2, or may employ a first sticking means 21 for sticking the adhesive sheet AS to the outer peripheral surface WK3 of the adherend WK so that a protruding region ASH is formed in which a part of the adhesive sheet AS protrudes from the outer peripheral surface WK3 of the adherend WK only in the direction of one surface WK1 or only in the direction of the other surface WK2 of the adherend WK. Alternatively, the second attachment means 22 may be provided which folds and attaches the protruding area ASH only in the direction of the outer peripheral surface WK3 as the other surface of the adherend WK, or in the direction of the outer peripheral surface WK3 as the other surface of the adherend WK and the other surface WK2, or in the direction of the outer peripheral surface WK3 as the other surface of the adherend WK and the one surface WK1, or when attaching the adhesive sheet AS to the adherend WK, the adherend WK is sandwiched between the adherend WK and the support table 43. Alternatively, the adhesive sheet AS may be attached to the adherend WK not by relative movement with respect to the adherend WK by the adherend transport means 40, but by relative movement with respect to the adherend WK by, for example, another device or a driving device not shown, or the adhesive sheet AS may be attached to the protective surface of the adherend WK so that no protruding area ASH is formed, as shown in FIG. 1(H), or multiple adhesive sheets AS may be attached to one adherend WK, as shown in FIG. 1(H), or the adhesive sheet AS may be attached to a protective surface other than the outer peripheral surface WK3 of the adherend WK, for example, the central portion, and the adhesive sheet AS may be attached to that protective surface, as shown in FIG. 1(H), or the adhesive sheet AS may be constituted, for example, by at least one of the first adhering means 21 and the second adhering means 22, or may be constituted, for example, by at least one of the first pressure roller 21A, the hot air blower 22A, the second pressure roller 22B and the third pressure roller 22C.

[0026] The first attachment means 21 may employ as a pressing member a guide plate, a round bar, a blade material, a brush-like member, a rotating belt, a blower of air or gas, a chuck cylinder, or an articulated robot, or a member such as a first pressing roller 21A may move away from or approach the adherend WK whose center WKC is positioned at the reference position RP.

[0027] The second bonding means 22 may fold and bond the protruding region ASH to another surface, which may be the outer peripheral surface WK3, or only one surface WK1, or only the other surface WK2, or any surface. As the pressing member, a guide plate, a round bar, a blade material, a brush-like member, a rotating belt, a blower of air or gas, a chuck cylinder, an articulated robot, or the like may be used. The center WKC of the adherend is placed at the reference position RP, and hot air is blown onto the adherend WK. The members such as the blower 22A, the second pressure roller 22B or the third pressure roller 22C may be separated or approach each other, the second and third pressure rollers 22B and 22C may not be a pair of upper and lower rollers, but may be provided only on one surface WK1 side of the adherend WK or only on the other surface WK2 side of the adherend WK, and the second and third pressure rollers 22B and 22C may rotate around a rotation axis inclined toward the reference position RP at angles of 30 degrees (150 degrees) and 179 degrees (1 degree) with respect to the XY plane, respectively. In the above embodiment, two sets of pressing members, the second and third pressing rollers 22B and 22C, are used to attach the protruding area ASH to one surface WK1 and the other surface WK2 in two stages, but three or more sets of pressing members may be used to attach the protruding area ASH to one surface WK1 and the other surface WK2 in three or more stages, or one or one set of pressing members may be used to attach the protruding area ASH to one surface WK1 and the other surface WK2 in one stage. The protruding region ASH may be attached by folding it all at once toward one surface WK1 or the other surface WK2, or the protruding region ASH may be attached by folding it all at once toward one surface WK1 or the other surface WK2 using only a pressing member without using a deformation energy application means, or the protruding region ASH may be attached by folding it all at once toward one surface WK1 or the other surface WK2 using only a deformation energy application means without using a pressing member.

[0028] The deformation energy imparting means may be any type of means that imparts, as deformation energy, electromagnetic waves such as ultraviolet rays, infrared rays, visible light, sound waves, X-rays or gamma rays, a heating medium such as hot water or hot air, or a cooling medium such as cold water or cold air, and may impart any type of deformation energy as long as it is capable of deforming the adhesive sheet AS taking into account the characteristics, properties, properties, material, composition and configuration of the adhesive sheet AS, and may be provided in a position other than that shown in the above embodiment, and may be provided anywhere as long as it is a position where deformation energy can be imparted to the protruding region ASH of the adhesive sheet AS attached to the outer peripheral surface WK3, and deformation energy may be imparted to the protruding region ASH all at once, thereby bending the protruding region ASH all at once toward one surface WK1 or the other surface WK2.

[0029] Instead of the first and second attaching means 21 and 22, the sheet attaching means 20 may employ a pressing member that is supported by the output shaft of a linear motor as a driving device and pressing means, and has a holding member that can be adsorbed and held by a pressure reduction means (holding means) not shown, such as a pressure reduction pump or a vacuum ejector. In the case of such a sheet application means 20, for example, one adhesive sheet AS having an overlapping portion ASP formed by overlapping a leading end ASF of the adhesive sheet AS in the supply direction with a trailing end ASR of the adhesive sheet AS in the supply direction may be held by a holding member, and a hot melt agent HM may be applied by the arrangement means 30 to a position that will become an approach portion ASA, and then this adhesive sheet AS may be applied to an adherend WK; alternatively, one adhesive sheet AS held by a holding member may be applied to an adherend WK, and then a hot melt agent HM may be applied by the arrangement means 30 to a position that will become an approach portion ASA of another adhesive sheet AS held by the holding member, and then another adhesive sheet AS may be applied to the adherend WK so that an overlapping portion ASP is formed with the one adhesive sheet AS previously applied to the adherend WK; or multiple adhesive sheets AS may be held by a holding member such that an overlapping portion ASP is formed between one adhesive sheet AS and the other adhesive sheets AS, and a hot melt agent HM may be applied by the arrangement means 30 to a position that will become an approach portion ASA, and then those adhesive sheets AS may be applied to the adherend WK.

[0030] The arrangement means 30 may employ any of the following as storage means: a cassette container, a funnel, etc.; the tank 11, the funnel, etc. may have a cover at the top thereof that can be opened or closed, or that can be detached, etc., for closing the opening; a turbine, a syringe, etc. may be employed as supply means; a hose, a groove passage, etc. may be employed as induction means; a motor, a butterfly valve, etc. may be employed as discharge control means; a pipe, a hose, etc. may be employed as discharge means; the supply means may be driven to discharge the hot melt agent HM from the induction means or discharge means without employing a discharge control means; or, for example, the hot melt agent HM may be dripped from a component such as the storage means, supply means, induction means, discharge control means, or discharge means, and a predetermined amount of the hot melt agent HM may be applied to a predetermined position. Alternatively, a bristle-like member such as a brush or a hair brush may be attached to a component such as the storage means, supply means, guiding means, discharge control means or discharge means, and a predetermined amount of hot melt agent HM may be applied to a predetermined position, or a transfer member such as a sponge or roller may be attached to a component such as the storage means, supply means, guiding means, discharge control means or discharge means, and a predetermined amount of hot melt agent HM may be transferred to a predetermined position, or an airbrush may be attached to a component such as the storage means, supply means, guiding means, discharge control means or discharge means, and a predetermined amount of hot melt agent HM may be sprayed to a predetermined position, or the shapes and numbers of the components of the arrangement means 30 such as the storage means, supply means, guiding means, discharge control means or discharge means may be different from those exemplified in the embodiment, and a thickness adjustment means such as a scraper, spatula, roller, etc. may be used to adjust the thickness of the applied hot melt agent HM to a predetermined thickness. The disposing means 30 may be configured to dispose the hot melt agent HM in a solid state at a predetermined position on the adhesive sheet AS, and may employ hot air HA from a hot air blower 22A or other heating equipment as a melting means to heat and melt the hot melt agent HM in a solid state and dispose the hot melt agent HM in the overlap adjacent area DA. Alternatively, for example, as shown in FIG. 1(I), a guide roller 13 may be added to form a state in which a release sheet RL is temporarily peeled off from the adhesive sheet AS, and the hot melt agent HM may be applied or affixed to a position that is to become an approach section ASA. Alternatively, as shown in FIG. 1(J), the predetermined position for applying the hot melt agent HM may be a forward portion in the supply direction of the leading edge AST in the supply direction of the adhesive sheet AS affixed to the outer peripheral surface WK3. Alternatively, the predetermined position for applying the hot melt agent HM may be both the position shown in FIG. 1(E) and the position shown in FIG. 1(J). Alternatively, a nozzle 33A may be disposed in the extension direction of the edge of the adhesive sheet AS (in the vertical axial direction in the above embodiment). or if a cavity is formed in the overlapping adjacent region DA, the intrusion prevention agent may be injected into the cavity using a thin tube such as a syringe needle; the intrusion prevention agent may be disposed in the entire overlapping adjacent region DA; or the intrusion prevention agent may be disposed in a part of the overlapping adjacent region DA so as to block the entrance of the cavity formed in the overlapping adjacent region DA; or, for example, the intrusion prevention agent may be disposed in the overlapping adjacent region DA surrounded by the approach portion ASA, the supply direction rear edge ASB, and the outer peripheral surface WK3; or, as shown in FIG. 1(H), the intrusion prevention agent may be disposed in the overlapping adjacent region DA surrounded by the approach portion ASA, the side edge ASC of the adhesive sheet AS, and one surface WK1 of the adherend WK as a protective surface; and the intrusion prevention agent may be disposed wherever the overlapping adjacent region DA is formed as long as it is surrounded by the approach portion ASA of the adhesive sheet AS, the edge of the adhesive sheet AS, and the protective surface; or the intrusion prevention agent may be disposed at any position in the overlapping adjacent region DA.

[0031] The adherend transport means 40 may employ a support table 43 that cannot be adsorbed and held on the support surface 43A, or instead of the linear motor 41, rotary motor 42 and support table 43, a driving device such as an articulated robot may be used to move the adherend WK relative to the supply means 10 or the sheet application means 20 and apply the adhesive sheet AS to the adherend WK, or instead of or in combination with the linear motor 41, rotary motor 42 and support table 43, the adherend WK may be transported by, for example, another device or a driving device not shown, which may or may not be provided in the sheet application apparatus EA of the present invention.

[0032] The sheet application apparatus EA may apply one or more adhesive sheets AS to multiple stacked substrates WK and integrate the substrates WK, or it may superimpose an accessory component such as metal, glass, resin, or other adhesive sheet on at least one of the surfaces WK1 and WK2 of the substrate WK, and apply one or more adhesive sheets AS to the substrate WK and integrate them.

[0033] The length of the adhesive sheet AS in the supply direction may be longer or shorter than the circumference of the adherend WK, or it may be the same length as the circumference of the adherend WK, and when it is deformed by deformation energy, it may deform with contraction, with expansion, or without contraction or expansion, and the adhesive strength may be increased, decreased, or neither increased nor decreased by the deformation energy. The adhesive sheet AS may be one that is deformed by any type of deformation energy, such as electromagnetic waves such as ultraviolet rays, infrared rays, visible light, sound waves, X-rays, or gamma rays, a heating medium such as hot water or hot air, or a cooling medium such as cold water or cold air, or it may be one that is not deformed by deformation energy, and its planar shape may be any shape, such as a straight shape, a curved shape, or a bent shape. The adherend WK may have an accessory member such as metal, glass, resin, or another adhesive sheet attached to, for example, one surface WK1 or the other surface WK2. The protective surface may be one side WK1 of the adherend WK, the other side WK2 of the adherend WK, or another side of the adherend WK, or at least one of one side WK1, the other side WK2, the outer peripheral surface WK3, and other sides of the adherend WK, or any side of the adherend WK, or the entirety of one side WK1, the other side WK2, the outer peripheral surface WK3, and other sides of the adherend WK, or a portion of each of these sides. The intrusion prevention agent may be a cooling-hardening type material, for example, metals such as solder or aluminum, waxes such as rice bran wax or beeswax, resins, adhesives, etc., or a dry-hardening type material such as adhesives, glue, paint, varnish, lacquer, clay, etc., or an energy ray-hardening type resin, adhesive, paint, clay, rubber, etc. that is hardened by energy rays such as ultraviolet rays, infrared rays, visible light, sound waves, X-rays, or gamma rays. If a cooling-hardening type material is used, the sheet application device EA may employ a cooling means such as a blower or chiller that hardens the intrusion prevention agent placed in the overlapping portion adjacent area DA. If a dry-hardening type material is used, the sheet application device EA may employ a drying means such as a heater or blower that hardens the intrusion prevention agent placed in the overlapping portion adjacent area DA. If an energy ray-hardening type material is used, the sheet application device EA may employ an energy application means such as an ultraviolet ray irradiator or infrared ray irradiator that hardens the intrusion prevention agent placed in the overlapping portion adjacent area DA. The next process may be any process, such as a plating process, a cleaning process, an etching process, a dipping process, a cutting process, an oxide film formation process, a nitriding process, a grinding process, a sandblasting process, a polishing process, a painting process, a lamination process, a sheet bonding process, a surface treatment process, a drilling process, a bending process, an inspection process, a verification process, an irradiation process, etc. The foreign matter that adheres to or comes into contact with the protective surface may be any type depending on the next process, such as liquids such as plating solutions used in plating processes and alcohol used in cleaning, gases such as oxygen gas used in oxide film formation and ammonia gas used in nitriding processes, and solids such as projectiles used in sandblasting and abrasives used in polishing.

[0034] The material, type, shape, etc. of the adhesive sheet AS, the adherend WK, and the accessory member in the present invention are not particularly limited. For example, the adhesive sheet AS, the adherend WK, and the accessory member may be circular, elliptical, polygonal such as a triangle or a rectangle, or other shape, and the adhesive sheet AS may be pressure-sensitive, heat-sensitive, or other adhesive form. When a heat-sensitive adhesive sheet AS is used, the adhesive sheet AS may be adhered by an appropriate method such as providing a heating means such as a suitable coil heater or the heating side of a heat pipe for heating the adhesive sheet AS. In addition, such an adhesive sheet AS may be, for example, a single layer of only an adhesive layer, a two-layered one in which a substrate and an adhesive layer are laminated, a three-layered one or more layers in which one or more intermediate layers are laminated between the substrate and the adhesive layer, a three-layered one or more layers in which one or more cover layers are laminated on the upper surface of the substrate, a substrate, an intermediate layer, or a cover layer is provided in a peelable manner, a double-sided adhesive sheet of a single layer consisting of only an adhesive layer, a double-sided adhesive sheet in which an adhesive layer is laminated on both outermost surfaces of one or more intermediate layers, etc. Furthermore, the adherend WK and accessory members may be, for example, a single object such as food, a resin container, a semiconductor wafer such as a silicon semiconductor wafer or a compound semiconductor wafer, a circuit board, an information recording substrate such as an optical disk, a glass plate, a steel plate, a ceramic plate, a wooden board, or a resin, or may be a composite formed of two or more of these, and may be members or articles of any shape. The adhesive sheet AS may be, for example, any sheet, film, tape, etc., such as an information label, a decorative label, a protective sheet, a dicing tape, a die attach film, a die bonding tape, a recording layer-forming resin sheet, etc.

[0035] The driving equipment in the above-described embodiments may be electric equipment such as rotary motors, linear motors, single-axis robots, so-called multi-joint robots having joints on two or three or more axes, actuators such as air cylinders, hydraulic cylinders, rodless cylinders, and rotary cylinders, which may be used alone, or a direct or indirect combination of such electric equipment and actuators may be used, and electric equipment, actuators, etc. may or may not be capable of torque control or speed control for the output parts of such electric equipment, actuators, etc. may be used.

[0036] In the above embodiment, some object (hereinafter referred to as "object A") and an object (hereinafter referred to as "object B") that moves relative to object A, that is, object A and object B that move relatively may be object B moving relative to object A that does not move, object A may move relative to object B that does not move, or both objects A and B may move. If the result achieved by the movement is the same, either object A or object B may move. When a rotating member such as a roller is used, a driving device that rotates the rotating member may be provided. The surface of the rotating member or the rotating member itself may be made of a deformable member such as rubber or resin. The surface of the rotating member or the rotating member itself may be made of a non-deformable member. Other members such as a rotating or non-rotating shaft or blade may be used instead of the roller. When a pressing means or pressing member such as a pressing roller or a pressing head that presses an object to be pressed is used, a roller, a round bar, a blade material, a brush-like member, or a member that blows air or gas may be used instead of or in combination with the above-mentioned examples. The peeling means may be made of a deformable material such as rubber, resin, sponge, etc., or may be made of a non-deformable material such as metal or glass. When peeling means or peeling members such as peeling plates or peeling rollers that peel off the object to be peeled are used, members such as plate-shaped members, round bars, rollers, etc. may be used instead of or in combination with the above-mentioned examples. The peeling means may be made of a deformable material such as rubber, resin, sponge, etc., or may be made of a non-deformable material. When supporting (holding) means or supporting (holding) members that support (hold) the supported member (held member), etc. are used. In the case where a cutting means or cutting member is used, a configuration may be adopted in which the supported member is supported (held) by a gripping means such as a mechanical chuck or chuck cylinder, Coulomb force, adhesive (adhesive sheet, adhesive tape), pressure sensitive adhesive (adhesive sheet, adhesive tape), magnetic force, Bernoulli adsorption, suction adsorption, driving equipment, etc., or in the case where a cutting means or cutting member that cuts the member to be cut or forms an incision or cutting line in the member to be cut is used, cutting means that use a cutter blade, laser cutter, ion beam, fire, heat, water pressure, electric heating wire, spraying of gas or liquid, etc., instead of or in combination with the above examples, may be used to cut.It is also possible to move the cutting object by combining appropriate driving devices. [Explanation of symbols]

[0037] EA…Sheet attachment device 20...Sheet attachment means 21...First attachment means 22...Second attachment means 30…Arrangement means AS…adhesive sheet ASA…Approach section ASF: Feed direction tip (specified part) ASH...Extension area ASP…duplicate part ASR: Rear end in the supply direction (specified part) AST…Feed direction leading edge (edge) DA: overlapping adjacent region HM: Hot melt agent (penetration prevention agent) WK...Adherent WK1...One side (another side) WK2: The other side WK3…Outer surface (protective surface)

Claims

1. 1. A sheet sticking device comprising a sheet sticking means for sticking an adhesive sheet to a protective surface of an adherend such that predetermined portions of the adhesive sheet overlap each other to form overlapping portions, A sheet application device characterized in that it further comprises a placement means for placing an anti-penetration agent in the area adjacent to the overlapping portion that is surrounded by an approach portion of the adhesive sheet located between the overlapping portion and the protective surface, an edge of the adhesive sheet connected to the approach portion, and the protective surface.

2. The sheet application device described in claim 1, characterized in that the sheet application means includes a first application means for applying the adhesive sheet to the protective surface so as to form an overhanging area in which a portion of the adhesive sheet overhangs the protective surface, and a second application means for folding and applying the overhanging area in the direction of another surface of the adherend.

3. A sheet sticking method comprising a sheet sticking step of sticking an adhesive sheet to a protective surface of an adherend such that predetermined portions of the adhesive sheet overlap each other to form overlapping portions, A sheet application method characterized by further carrying out a placement step of placing an anti-penetration agent in the area adjacent to the overlapping portion that is surrounded by an approach portion of the adhesive sheet located between the overlapping portion and the protective surface, an edge of the adhesive sheet connected to the approach portion, and the protective surface.

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