Actuator and display comprising the same

Abstract

To provide an actuator that facilitates miniaturization.SOLUTION: An elastic support 16 comprised in an actuator S1 includes: an attachment member side fixed part to be fixed to an attachment member 12; a movable element side fixed part to be fixed to a movable element 14; and a deformation part 80 positioned between the attachment member side fixed part and the movable element side fixed part. An end edge (an end on a side of the attachment member side fixed part in the deformation part) of the deformation part is positioned only in a region on an X-direction one side relative to the movable element side fixed part and in a region on an X-direction other side relative to the movable element side fixed part ("X-direction outside regions").SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The present disclosure relates to actuators. [Background technology]

[0002] 2. Description of the Related Art Conventionally, an actuator such as that described in Patent Document 1 is known.

[0003] This actuator includes a mounting member (yoke 1, case 8, etc.) including a coil (cylindrical electromagnetic coils 2, 2'), a mover (mover 5) including a magnet (permanent magnet 3), and an elastic support (support members 7, 7') fixed to the mounting member and to the mover. When the elastic support (support members 7, 7') deforms, the mover (mover 5) is displaced relative to the mounting member in a predetermined displacement direction (x direction, y direction).

[0004] In this actuator, the periphery of a disk-shaped elastic support (support members 7, 7') is fixed to a cylindrical member (yoke 1) over its entire circumference. [Prior art documents] [Patent documents]

[0005] [Patent Document 1] Jpn. Jpn. Published No. 61-45745 Summary of the Invention [Problem to be solved by the invention]

[0006] However, the above-mentioned actuators are usually installed inside an apparatus, and in consideration of the installation space for the actuator inside the apparatus, the actuator is required to be compact.

[0007] An object of the present disclosure is to provide an actuator that can be easily miniaturized. [Means for solving the problem]

[0008] The actuator according to a first aspect is an actuator comprising: a mounting member including a coil; a movable member including a magnet and displaceable relative to the mounting member in a predetermined displacement direction; a mounting member side fixed part fixed to the mounting member, a movable member side fixed part fixed to the movable member, and an elastic support having a deformation part located between the mounting member side fixed part and the movable member side fixed part, wherein when the displacement direction is defined as the ±Z direction, the directions perpendicular to each other among the directions in a plane perpendicular to the ±Z directions are defined as the X direction and the Y direction, and the end of the deformation part on the movable member side fixed part side is defined as the starting end and the end of the deformation part on the mounting member side fixed part side is defined as the terminal end, the terminal end of the deformation part is located only in an area on one side of the movable member side fixed part in the X direction and in an area on the other side of the X direction with respect to the movable member side fixed part.

[0009] In this aspect, the actuator includes a mounting member including a coil, and a mover including a magnet. The actuator also includes an elastic support. The elastic support has a mounting member-side fixed part that is fixed to the mounting member, a mover-side fixed part that is fixed to the mover, and a deformation part that is located between the mounting member-side fixed part and the mover-side fixed part. When the deformation part of the elastic support deforms, the mover is displaced relative to the mounting member in a predetermined displacement direction (±Z direction).

[0010] Furthermore, in this embodiment, the terminal end of the deformation portion (the end of the deformation portion on the mounting member side fixed portion side) is located only in the region on one side in the X direction with respect to the movable member side fixed portion and in the region on the other side in the X direction with respect to the movable member side fixed portion (hereinafter referred to as the "X-direction outer region"), and is not located in the region overlapping with the movable member side fixed portion in the X direction (hereinafter referred to as the "X-direction inner region"). Therefore, compared to a mode in which the end of the deformation portion is also located in the inner region in the X direction, it is possible to reduce the size of the actuator.

[0011] More specifically, in an embodiment in which the end of the deformation portion is located in the X-direction inner region as well as the X-direction outer region, a structure for fixing the elastic support in the X-direction inner region is required as part of the configuration of the actuator. Since the elastic support is a member that supports a movable element that is displaced (for example, displaced due to vibration), the structure for fixing the elastic support needs to have a certain strength, and a certain amount of space is required in the X-direction inner region to arrange the structure. In contrast, in this embodiment, the end of the deformation portion is located in the outer region in the X direction, and not in the inner region in the X direction, so that a structure for fixing the elastic support is not required in the inner region in the X direction, which makes it easier to miniaturize the actuator.

[0012] In the actuator of the first aspect, the deformation portion includes: one Y-direction side portion having the starting end and formed on one side in the Y direction with respect to the movable member side fixed portion; another Y-direction side portion having the starting end and formed on the other side in the Y direction with respect to the movable member side fixed portion; one X-direction side portion having the ending end and formed on one side in the X direction with respect to the movable member side fixed portion; another X-direction side portion having the ending end and formed on the other side in the X direction with respect to the movable member side fixed portion; a first arm portion connecting the one Y-direction side portion and the one X-direction side portion; a second arm portion connecting the one Y-direction side portion and the other X-direction side portion; a third arm portion connecting the other Y-direction side portion and the one X-direction side portion; and a fourth arm portion connecting the other Y-direction side portion and the other X-direction side portion.

[0013] In this embodiment, the deformation section includes one side in the Y direction and the other side in the Y direction, each having a starting end, and one side in the X direction and the other side in the X direction, each having an end. These parts are connected by four arms. This makes it possible to ensure that the length of the arms in the deformation section is relatively long, and it is easy to make the deformation section symmetrical in the X direction and the Y direction. Rotation around the axes in the X direction and the Y direction can be suppressed, so that support in the displacement directions (±Z directions) of the mover by the elastic support body is stable.

[0014] Each arm may be composed of one arm or two or more arms. Furthermore, each of the Y-direction one side, the Y-direction other side, the X-direction one side and the X-direction other side of the deformation part may be formed integrally with the sides of adjacent arm parts (see FIG. 9), or may be separated for each arm part (see, for example, FIGS. 17 and 18).

[0015] The actuator of the third aspect is the same as that of the second aspect, wherein the Y-direction one side portion is a Y-direction one side connection portion having one starting end and connected to both the first arm portion and the second arm portion, and the Y-direction other side portion is a Y-direction other side connection portion having one starting end and connected to both the third arm portion and the fourth arm portion.

[0016] In this embodiment, the one side portion in the Y direction is a one side Y direction connection portion having one starting end and connected to both the first arm portion and the second arm portion, and the other side portion in the Y direction is a other side Y direction connection portion having one starting end and connected to both the third arm portion and the fourth arm portion. This makes it possible to suppress an increase in the amount of deformation of the one side portion in the Y direction having the starting end and the other side portion in the Y direction. That is, since the one side in the Y direction and the other side in the Y direction have starting ends, the deformation amount is likely to be large. However, in this embodiment, the rigidity of the one side in the Y direction and the other side in the Y direction is ensured. Therefore, it is possible to suppress an increase in the amount of deformation at one side portion in the Y direction and the other side portion in the Y direction. Furthermore, since symmetry in the Y direction can be ensured, stable vibration can be obtained.

[0017] The actuator according to a fourth aspect is the actuator of the second aspect, wherein the one side portion in the X direction is an X-direction one side connection portion having the one terminal end and connected to both the first arm portion and the third arm portion, and the other side portion in the X direction is an X-direction other side connection portion having the one terminal end and connected to both the second arm portion and the fourth arm portion.

[0018] In this embodiment, the one side in the X direction is an X-direction one-side connection part having one end and connected to both the first arm part and the third arm part, and the other side in the X direction is an X-direction other-side connection part having one end and connected to both the second arm part and the fourth arm part, so that an increase in the amount of deformation of the one side in the X direction and the other side in the X direction having the end can be suppressed. Furthermore, since symmetry in the X direction can be ensured, stable vibration can be obtained.

[0019] The actuator of the fifth aspect is such that, in the second aspect, the one side portion in the Y direction is a one side Y direction connection portion having the one starting end and connected to both the first arm portion and the second arm portion, the other side portion in the Y direction is a other side Y direction connection portion having the one starting end and connected to both the third arm portion and the fourth arm portion, the one side portion in the X direction is a one side X direction connection portion having the one ending end and connected to both the first arm portion and the third arm portion, and the other side portion in the X direction is a other side X direction connection portion having the one ending end and connected to both the second arm portion and the fourth arm portion.

[0020] According to this aspect, it is possible to suppress an increase in the amount of deformation of one side portion in the Y direction having the starting end and the other side portion in the Y direction, and also to suppress an increase in the amount of deformation of one side portion in the X direction having the terminal end and the other side portion in the X direction.

[0021] The actuator according to the sixth aspect is any one of the second to fifth aspects, in which, when each of the four arm portions is understood as a portion extending from the starting end side toward the terminal end side, each of the four arm portions is configured to include a return portion whose extending direction faces inward in the Y direction and inward in the X direction.

[0022] Note that the inward side in the X direction means the direction approaching the central axis of the mover in the X direction, and the inward side in the Y direction means the direction approaching the central axis of the mover in the Y direction. Here, the central axis of the mover refers to an axis that is parallel to the Z direction and passes through the center of gravity of the mover.

[0023] In this embodiment, each of the four arms includes a return portion whose extension direction faces inward in the Y direction and inward in the X direction. Therefore, compared to an embodiment in which the arms do not include a return portion, the length of the arms can be increased without increasing the size of the actuator as a whole.

[0024] The actuator according to a seventh aspect is any one of the first to sixth aspects, wherein one end and the other end in the Y direction of the mounting member side fixed portion are positioned outside in the Y direction relative to the terminal end.

[0025] In this embodiment, the one end and the other end in the Y direction of the mounting member fixed part are positioned further outward in the Y direction than the terminal end. In other words, the length in the Y direction of the mounting member fixed part is extended on both sides in the Y direction further than the length in the Y direction of the terminal end. This makes it possible to stably fix the elastic support body to the mounting member. If the one Y-direction end and the other Y-direction end of the mounting member-side fixed portion are positioned further outward in the Y-direction than the mover-side fixed portion, the fixing of the elastic support to the mounting member becomes more stable.

[0026] The actuator according to the eighth aspect is any one of the first to seventh aspects, wherein the mounting member includes a coil fixing portion to which the coil is fixed and a support fixing portion to which the elastic support is fixed, the coil fixing portion being a flat portion whose thickness direction is in the ±Z direction, the coil is fixed to one side of the coil fixing portion in the Z direction, and the support fixing portion is provided on one side of the coil fixing portion in the Z direction, such that the elastic support is disposed on one side of the coil fixing portion in the Z direction, and the mover is disposed on one side of the coil fixing portion in the Z direction and fixed to the other side of the elastic support in the Z direction.

[0027] According to this aspect, each component of the actuator has an appropriate structure and arrangement, so that the actuator can be made small (particularly small in the Z direction).

[0028] The actuator according to a ninth aspect is the actuator of the eighth aspect, wherein the support fixing parts are provided in a pair on one side in the X direction and the other side in the X direction with respect to the mover, and the actuator further includes a collapse prevention part that prevents the pair of support fixing parts from collapsing inward in the X direction.

[0029] In this aspect, the actuator further includes a collapse prevention portion that prevents the pair of support fixing portions from collapsing inward in the X-direction, thereby improving the durability of the actuator.

[0030] The actuator according to a tenth aspect is any one of the first to ninth aspects, wherein the elastic support body has a structure in which a buffer material is disposed between a pair of leaf spring members.

[0031] In this embodiment, the elastic support has a structure in which a buffer material is disposed between a pair of leaf spring members, and therefore has high vibration damping performance.

[0032] A display according to an eleventh aspect is a display including the actuator according to any one of the first to tenth aspects.

[0033] In this embodiment, the display includes a miniaturized actuator. In other words, since the actuator included in the display is miniaturized, it is easy to arrange other configurations (devices, wiring, etc.) included in the display.

[0034] The actuator of the twelfth aspect is an actuator comprising a mounting member including a coil, a mover including a magnet and displaceable relative to the mounting member in a predetermined displacement direction, and an elastic support having a mounting member side fixed part fixed to the mounting member, a mover side fixed part fixed to the mover, and a deformation part located between the mounting member side fixed part and the mover side fixed part, wherein the elastic support has a structure in which a cushioning material is arranged between a pair of leaf spring materials.

[0035] In this embodiment, the elastic support has a structure in which a cushioning material is disposed between a pair of leaf spring materials, and therefore has high vibration-damping performance. In particular, by using a silicone-based member as the cushioning material, the elastic support can maintain its characteristics without being affected by the environmental temperature. As the silicone-based member, a double-sided tape with a three-layer structure having a silicone rubber layer and a silicone-based adhesive layer on both sides thereof is preferable. Effect of the Invention

[0036] According to the present disclosure, an actuator that can be easily miniaturized can be obtained. [Brief description of the drawings]

[0037] [Figure 1] FIG. 2 is a perspective view of the actuator of the first embodiment. [Diagram 2] 1 is a perspective view (obliquely viewed from below) of an actuator according to a first embodiment. [Diagram 3] 3 is a side view (viewed from the +Y direction) of the actuator of the first embodiment. FIG. [Figure 4] 2 is a plan view (viewed from the +Z direction) of the actuator of the first embodiment. FIG. [Diagram 5] 6 is a cross-sectional view (cross-sectional view taken along line 6-6 in FIG. 4) of the actuator of the first embodiment. [Figure 6] 7 is a cross-sectional view (cross-sectional view taken along line 7-7 in FIG. 4) of the actuator of the first embodiment. [Figure 7] FIG. 2 is a diagram showing an outer frame of the first embodiment. [Figure 8] FIG. 4 is a diagram showing a cover of the first embodiment. [Figure 9] FIG. 2 is a plan view showing the elastic support body of the first embodiment. [Figure 10] FIG. 2 is an exploded perspective view of the actuator of the first embodiment. [Figure 11] 1 is a perspective view (obliquely seen from behind) showing a display including an actuator according to a first embodiment. [Figure 12] FIG. 11 is a perspective view showing an actuator according to a second embodiment. [Figure 13] FIG. 11 is a plan view of an actuator according to a second embodiment. [Figure 14] 14 is a cross-sectional view (cross-sectional view taken along line 14-14 in FIG. 13) of the actuator of the second embodiment. [Figure 15] FIG. 11 is a plan view showing an additional elastic support according to the second embodiment. [Figure 16] FIG. 11 is an exploded perspective view of the actuator of the second embodiment. [Figure 17] 13 is a plan view showing a modified example of the elastic support member. FIG. [Figure 18] 13 is a plan view showing a modified example of the elastic support member. FIG. [Figure 19] 13 is a plan view showing a modified example of the elastic support member. FIG. [Figure 20] 13 is a plan view showing a modified example of the elastic support member. FIG. [Figure 21] 13 is a plan view showing a modified example of the elastic support member. FIG. [Figure 22] 11 is a graph showing simulation results for the case "without cushioning material" and the case "with cushioning material." [Figure 23] FIG. 13 is a graph showing the results of a simulation under different temperature conditions in the case of an elastic support having a structure in which a cushioning material is disposed between a pair of leaf spring materials, and shows the results when an acrylic adhesive double-sided tape is used as the adhesive tape used as the cushioning material. [Figure 24] FIG. 13 is a graph showing the results of a simulation under different temperature conditions in the case of an elastic support having a structure in which a cushioning material is disposed between a pair of leaf spring materials, and shows the results when a silicone-based adhesive double-sided tape is used as the adhesive tape used as the cushioning material. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0038] In the following description, the +Z direction shown in each figure may be referred to as the upward direction, and the -Z direction may be referred to as the downward direction. However, this does not limit the mounting direction of the actuator. In addition, when describing the positional relationship of each component, it means the positional relationship when the elastic support 16 is in a free state (the state shown in each figure). In addition, in the following description, an axis parallel to the Z direction and passing through the center of gravity of the mover 14 is referred to as the center of gravity axis AX of the mover 14. In addition, the direction approaching the center of gravity axis AX of the mover 14 in the X direction is referred to as the inner side in the X direction, and the direction moving away from it is referred to as the outer side in the X direction, and in the Y direction, the direction approaching the center of gravity axis AX of the mover 14 in the Y direction is referred to as the inner side in the Y direction, and the direction moving away from it is referred to as the outer side in the Y direction. In addition, the +X direction is referred to as one side in the X direction, the -X direction is referred to as the other side in the X direction, the +Y direction is referred to as one side in the Y direction, the -Y direction is referred to as the other side in the Y direction, the +Z direction is referred to as one side in the Z direction, and the -Z direction is referred to as the other side in the Z direction. In addition, in each figure, symbols may be omitted in order to make the drawings easier to read.

[0039] [First embodiment] The actuator S1 according to the first embodiment of the present disclosure will be described below.

[0040] FIG. 1 is a perspective view of the actuator S1 of the first embodiment, and FIG. 10 is an exploded perspective view. The actuator S1 includes a mounting member 12 as a "mounting member" that is mounted on the display unit 102 (see FIG. 11) of the display 100. As shown in FIG. 10, the mounting member 12 includes a cover 50, an inner frame 40, a terminal 62, a coil 30, a cushion member 64, an outer frame 20, and an adhesive sheet 66.

[0041] The actuator S1 also includes a mover 14 that is displaceable in a predetermined displacement direction (±Z direction) relative to the mounting member 12. The mover 14 is composed of a yoke 72, a magnet 74, and a pole piece 76.

[0042] The actuator S1 also includes an elastic support 16 that elastically supports the mover 14 relative to the mounting member 12. The elastic support 16 is composed of two leaf spring materials 16S and a buffer material 16L. The elastic support 16 is structured such that the buffer material 16L is sandwiched between the two leaf spring materials 16S. The leaf spring material 16S is made of metal, for example, stainless steel. The buffer material 16L is a member having a lower elastic modulus than the leaf spring materials 16S, and is, for example, a double-sided tape disposed between the pair of leaf spring materials 16S. This double-sided tape may be a three-layer double-sided tape having a layer of silicone-based adhesive on both sides of a layer of silicone rubber. The buffer material 16L deforms in accordance with the deformation of each leaf spring material 16S, and absorbs vibration of the mover 14 via the leaf spring materials 16S. In the elastic support 16, the cushioning material 16L is disposed between the pair of leaf spring materials 16S, so that the cushioning material 16L does not peel off from each leaf spring material 16S even when the mover 14 vibrates. Therefore, the vibration damping performance of the cushioning material 16L can be stably maintained, and the drive of the mover 14 can be made to smoothly follow the input signal.

[0043] 7 shows the outer frame 20. The outer frame 20 includes a bottom plate portion 21, a pair of first vertical plate portions 22 formed on both sides of the bottom plate portion 21 in the X direction, a pair of second vertical plate portions 23 formed on both sides of the bottom plate portion 21 in the Y direction, and a pair of mounting portions 24 formed on the upper sides of the pair of first vertical plate portions 22.

[0044] The bottom plate portion 21 is flat with the Z direction as its thickness direction, and rectangular with the X direction as its longitudinal direction. A circular through hole 21A is formed through the center of the bottom plate portion 21. The first vertical plate portion 22 is flat with the X direction as its thickness direction, and rectangular with the Y direction as its longitudinal direction. A rectangular through hole 22A is formed through the center lower portion of the first vertical plate portion 22. The second vertical plate portion 23 is flat with the Y direction as its thickness direction, and rectangular with the X direction as its longitudinal direction. The Z direction dimension of the second vertical plate portion 23 is smaller than the Z direction dimension of the first vertical plate portion 22, specifically, 1 / 2 or less. The attached portion 24 is flat with the Z direction as its thickness direction, and rectangular with the Y direction as its longitudinal direction. The attached portion 24 is formed on the outer side in the X direction with respect to the first vertical plate portion 22. A rectangular mounting hole 24A is formed through the mounting portion 24. By using the mounting hole 24A, it is possible to mount the mounting portion 24 to another member without using an adhesive sheet 66.

[0045] The outer frame 20 is manufactured from a single metal plate material. Therefore, bent portions (reference numbers omitted) bent in the plate thickness direction are formed between the bottom plate portion 21 and the first vertical plate portion 22, between the bottom plate portion 21 and the second vertical plate portion 23, and between the first vertical plate portion 22 and the mounting portion 24.

[0046] 5, the coil 30 is made of a wound electric wire and is formed on the outer periphery of a bobbin 31. The coil 30 is fixed to the upper surface of the bottom plate portion 21 of the outer frame 20 via the bobbin 31. The bottom plate portion 21 of the outer frame 20 corresponds to the "coil fixing portion" of the present disclosure.

[0047] The bobbin 31 has a cylindrical shape with its axial direction extending in the vertical direction. As shown in FIG. Additionally, a vertical gap is formed between the coil 30 and the bottom plate portion 21 of the outer frame 20. This gap is larger than the thickness of a cushion member 64, which will be described later. Furthermore, a pole piece 76 of the mover 14 is disposed in the space on the inner periphery side of the coil 30, and a lower portion of the yoke 72 is disposed on the outer periphery side of the coil 30.

[0048] Cushion member 64 is made of an elastic material such as rubber. Cushion member 64 is fixed to the upper surface side of bottom plate portion 21 of outer frame 20 by adhesive or the like. Cushion member 64 is disposed in a position where it can come into contact with mover 14 that is displaced excessively downward, such as when mover 14 vibrates excessively. Specifically, cushion member 64 is disposed below hanging portion 72S of yoke 72. Similar to hanging portion 72S of yoke 72, cushion member 64 is circular in plan view.

[0049] The adhesive sheet 66 is a member for attaching the actuator S1 to another member. Both sides of the adhesive sheet 66 are adhesive surfaces. As shown in FIG. 2, the adhesive sheet 66 is adhered to the lower surface side of the bottom plate portion 21 of the outer frame 20. The adhesive sheet 66 is formed with a through hole 66A corresponding to the through hole 21A of the bottom plate portion 21 of the outer frame 20. The through hole 66A of the adhesive sheet 66 is a circular hole that is slightly larger than the through hole 21A of the bottom plate portion 21 of the outer frame 20. As shown in FIG. 5, the adhesive sheet 66 is arranged so as to cover almost the entire lower surface of the bottom plate portion 21 of the outer frame 20 (specifically, 90% or more of the area).

[0050] The inner frame 40 is fixed to the upper surface side of the bottom plate portion 21 of the outer frame 20. The inner frame 40 is composed of a one-side inner frame 40 arranged on one side in the X direction, and an other-side inner frame 40 arranged on the other side in the X direction. The one-side inner frame 40 and the other-side inner frame 40 are separate bodies and have approximately the same structure. Hereinafter, when the inner frame 40 is simply referred to, it refers to both the one-side inner frame 40 and the other-side inner frame 40.

[0051] As shown in Figures 4 and 5, the inner frame 40 has a vertical wall portion 41 ("support fixing portion") extending in the Y direction with its wall thickness direction facing the X direction, and a pair of bottom wall portions 42 ("anti-collapse portions") connected to both ends of the vertical wall portion 41 in the Y direction.

[0052] An upper surface 41U of the vertical wall portion 41 (see FIGS. 5 and 10) is a flat surface with a normal direction facing upward. A plurality of (three in this embodiment) cylindrical pins 43 protrude upward from the upper surface 41U of the vertical wall portion 41. The multiple pins 43 are arranged side by side in the Y direction.

[0053] As shown in FIGS. 5 and 6, the upper surface 41U of the standing wall portion 41 contacts the lower surface of the elastic support 16, and the multiple pins 43 are inserted into the multiple through holes 92A of the elastic support 16 (see FIG. 9).

[0054] The bottom wall portion 42 is formed to have a lower height in the up-down direction than the standing wall portion 41. Therefore, an upper surface 42U of the bottom wall portion 42 is located at a lower position than an upper surface 41U of the standing wall portion 41, as shown in FIG.

[0055] 4, a pair of bottom wall portions 42 are formed on both ends in the Y direction of one standing wall portion 41 extending in the Y direction. The bottom wall portions 42 are located on the inside in the X direction of the standing wall portion 41. Since the standing wall portion 41 supports the elastic support 16 at its upper portion, a force (force from the elastic support 16) is applied to the upper portion of the standing wall portion 41 in the X direction, but since the bottom wall portion 42 is located on the inside in the X direction of the standing wall portion 41, it functions as a "collapse prevention portion" that prevents the standing wall portion 41 ("support fixing portion") from collapsing inward in the X direction.

[0056] As shown in FIGS. 4 and 5, the upper surface 42U of the bottom wall portion 42 is made up of a flat portion 42U1 and an inclined portion 42U 2. The flat portion 42U1 of the upper surface 42U of the low wall portion 42 is a flat surface with a normal direction facing upward. The inclined portion 42U2 of the upper surface 42U of the low wall portion 42 is located on the vertical wall portion 41 side with respect to the flat portion 42U1, and is inclined so that its height position becomes higher toward the vertical wall portion 41 side. As shown in Figs. 5 and 6, the height position of the inclined portion 42U2 of the upper surface 42U of the low wall portion 42 closest to the vertical wall portion 41 is lower than the upper surface 41U of the vertical wall portion 41. As shown in Fig. 5, the inclined portion 42U2 of the upper surface 42U of the low wall portion 42 is curved so as to be convex downward in side view (in other words, when viewed from the Y direction).

[0057] As shown in Fig. 4, the dimension in the Y direction of the bottom wall portion 42 is large on the outer side in the X direction, which is the side of the standing wall portion 41, and is smaller toward the inner side in the X direction, which is the direction away from the standing wall portion 41. The Y direction outer surface (reference numeral omitted) of the bottom wall portion 42 is substantially flush with the Y direction outer surface (reference numeral omitted) of the standing wall portion 41 (specifically, a plane whose normal direction faces outward in the Y direction). On the other hand, the Y direction inner surface 42Y of the bottom wall portion 42 (reference numeral is given only to the bottom wall portion 42 in the upper right of Fig. 4) is gradually displaced outward in the Y direction as it moves inward in the X direction, as shown in Fig. 4, and specifically, is curved so as to be convex outward in the Y direction in plan view.

[0058] As shown in FIG. 6, a groove 44 with its depth direction directed downward is formed on the upper surface 41U of the vertical wall portion 41 of the inner frame 40. A part of the cover 50 (second insertion portion 53) is inserted into the groove 44. The groove 44 is open to the upper side in the vertical direction, and also opens to the inside in the X direction. On the other hand, the groove 44 is not open to the outside in the X direction. The position of the groove 44 is on both sides in the Y direction of the inner frame 40. As shown in FIG. 6, the position of the groove 44 in the Y direction overlaps with the position where the bottom wall portion 42 is formed. The depth (Z direction dimension) of the groove 44 and the second insertion portion 53 of the cover 50 reach a part of the bottom wall portion 42.

[0059] As shown in Fig. 10, a first recess 48 recessed inward in the X direction is formed on the outer side surface 40X in the X direction of the inner frame 40. The first recess 48 is formed below a second recess 47 described later. As shown in Figs. 1 and 5, a terminal 62 is disposed in the first recess 48.

[0060] Further, a wire passing portion 49 (FIGS. 5 and 10) for drawing out the wiring (not shown) of the coil 30 to the outside is formed in the inner frame 40. The wire passing portion 49 is a groove formed in the lower surface of the inner frame 40 at the center position in the Y direction.

[0061] A cover 50 is shown in Fig. 8. The cover 50 functions to fix the elastic support 16 to the inner frame 40. A pair of covers 50 is provided, and the pair of covers 50 have the same structure. Note that each arrow in Fig. 8 is indicated based on the cover 50 on one side in the X direction (the left cover 50 in Fig. 4).

[0062] The cover 50 has a clamping portion 51 that clamps the elastic support 16 between itself and the inner frame 40, a first insertion portion 52 that is inserted between the inner frame 40 and the outer frame 20, and a second insertion portion 53 that is inserted into the groove 44 of the inner frame 40.

[0063] The first insertion portion 52 will be described in detail. As shown in Fig. 10, a second recess 47 recessed inward in the X direction is formed on the X direction outer side surface 40X of the inner frame 40. The second recess 47 is also open upward. As shown in Fig. 5, the X direction outer side surface 40X of the inner frame 40 and the first vertical plate portion 22 of the outer frame 20 are in contact with each other, but a space is formed between the second recess 47 on the X direction outer side surface 40X of the inner frame 40 and the first vertical plate portion 22 of the outer frame 20. The first insertion portion 52 of the cover 50 is inserted into this space.

[0064] The cover 50 is manufactured from a single plate material. Therefore, between the clamping portion 51 and the first insertion portion 52, and between the clamping portion 51 and the second insertion portion 53, there are bent portions bent in the plate thickness direction. A part (symbol omitted) is formed.

[0065] The clamping portion 51 is in the form of a flat plate with its thickness direction facing the up-down direction, and is in the form of a rectangle with its longitudinal direction aligned in the Y direction.

[0066] The clamping portion 51 has a plurality of (three in this embodiment) through holes 51A formed side by side in the Y direction. A plurality of pins 43 of the standing wall portion 41 of the inner frame 40 are inserted into the plurality of through holes 51A, respectively. The plurality of through holes 51A is composed of a through hole 51A located at the center of the clamping portion 51 in the Y direction, and a plurality of (two in this embodiment) through holes 51A, 51A formed at positions symmetrical in the Y direction with respect to the through hole 51A. The shape of the through hole 51A is circular.

[0067] The first insertion portion 52 is formed on the outer side in the X direction relative to the clamping portion 51, and has a flat plate shape with its plate thickness direction facing the X direction. The first insertion portion 52 is formed by bending a portion outer in the X direction than the clamping portion 51 downward. An end on one side in the Y direction of the first insertion portion 52 is located on one side in the Y direction of the through hole 51A furthest on one side in the Y direction among the multiple through holes 51A of the clamping portion 51, and an end on the other side in the Y direction of the first insertion portion 52 is located on the other side in the Y direction of the through hole 51A furthest on the other side in the Y direction among the multiple through holes 51A of the clamping portion 51.

[0068] The second insertion portion 53 is formed as a pair on the outer side in the Y direction relative to the clamping portion 51, and has a flat plate shape with its plate thickness direction facing the Y direction. The second insertion portion 53 is formed by bending a portion on the outer side in the Y direction relative to the clamping portion 51 downward.

[0069] The elastic support 16 is entirely formed in a flat plate shape with its thickness direction oriented in the vertical direction.

[0070] A part of the elastic support 16 is fixed to the mounting member 12, and another part is fixed to the mover 14. The part between the part fixed to the mounting member 12 and the part fixed to the mover 14 becomes the part that deforms when the mover 14 is displaced (vibrates). That is, as shown in FIG. 9, the elastic support 16 is composed of a mounting member side fixed part 92 fixed to the mounting member 12, a mover side fixed part 94 fixed to the mover 14, and a deformation part 80 between the mounting member side fixed part 92 and the mover side fixed part 94.

[0071] A plurality of through holes 92A (three in this embodiment) are formed in the mounting member side fixed part 92. A plurality of pins 43 of the standing wall part 41 of the inner frame 40 are inserted into the through holes 92A of the mounting member side fixed part 92. The shape of the through holes 92A is circular, and the size of the through holes 92A is set to a size that allows the pins 43 to just fit therein.

[0072] The mounting member side fixed portion 92 has a boundary portion 80E which is a boundary portion with the deformation portion 80. The boundary portion 80E refers to the boundary portion between the portion of the elastic support 16 which is fixed to the mounting member 12 (in this embodiment, the portion sandwiched between the inner frame 40 and the cover 50) and the portion which is not fixed. The boundary portion 80E is a portion which extends linearly in the Y direction. The boundary portion 80E coincides with an end 80E of the deformation portion 80 which will be described later.

[0073] 9, the mounting member side fixed part 92 is composed of a main body 92H whose position in the Y direction coincides with the boundary part 80E (terminal end 80E), and an extension part 92E located on the outer side in the Y direction with respect to the main body 92H. The extension parts 92E are formed on both one side and the other side in the Y direction with respect to the main body 92H. As a result, the mounting member side fixed part 92 is formed in an elongated shape with the Y direction as the longitudinal direction by combining the main body 92H and the pair of extension parts 92E. A plurality of through holes 92A are formed in each of the main body 92H, one extension part 92E, and the other extension part 92E of the mounting member side fixed part 92.

[0074] As shown in FIG. 9, the movable member-side fixed portion 94 has a circular outer shape, and a circular reference hole 94K is formed through the center of the movable member-side fixed portion 94. As described later, a through hole having the same shape as the reference hole 94K of the movable member-side fixed portion 94 is also formed in the movable member 14 (i.e., the yoke 72, the magnet 74, and the pole piece 76). In order to make the drawings easier to understand, the through hole of the movable member 14 is also given the same reference number 94K as the reference hole 94K of the movable member-side fixed portion 94. As shown in FIG. 5 and FIG. 6, the entire lower surface of the movable member-side fixed portion 94 is fixed to the yoke 72 of the movable member 14 by adhesive or the like. Specifically, the entire portion from the edge (inner edge) of the reference hole 94K to the outer edge (outer edge) forming the circular outer shape is fixed to the yoke 72 of the movable member 14.

[0075] Yoke 72 is made of a soft magnetic material and has a cylindrical structure with a bottom. Specifically, as shown in Fig. 5, yoke 72 is composed of top wall portion 72T whose wall thickness direction faces the up-down direction, and hanging portion 72S extending downward from the entire outer periphery of top wall portion 72T. Top wall portion 72T is circular in a plan view, and the wall thickness direction of hanging portion 72S is perpendicular to the central axis of top wall portion 72T (which coincides with center axis AX of mover 14; see Fig. 10).

[0076] A magnet 74 is fixed to the lower surface of the top wall portion 72T of the yoke 72. A pole piece 76, which is a soft magnetic material, is fixed to the lower surface of the magnet 74. The magnet 74 and the pole piece 76 have approximately similar shapes in a plan view, specifically, circular shapes. However, the pole piece 76 has an outer shape that is slightly larger than that of the magnet 74. In other words, the diameter of the pole piece 76 is slightly larger than the diameter of the magnet 74.

[0077] 5 and 6, hanging portion 72S of yoke 72 is disposed with a certain space therebetween on the outer circumferential side of magnet 74 and pole piece 76. The lower end of hanging portion 72S of yoke 72 is flush with the lower end of pole piece 76. Coil 30 is disposed in the space between magnet 74 / pole piece 76 and hanging portion 72S of yoke 72.

[0078] 10, on the outer surface of yoke 72 having a bottomed cylindrical structure, a curved surface 72W (see FIGS. 5 and 6) is formed at the boundary between top wall portion 72T and hanging portion 72S, connecting upper flat surface 72T1, whose normal direction is the upward direction, and outer side surface 72S1, whose normal direction is the horizontal direction. Of upper flat surface 72T1, curved surface 72W, and outer side surface 72S1 constituting the outer surface of yoke 72, upper flat surface 72T1, whose normal direction is the upward direction, is bonded to elastic support 16. Specifically, the entire upper flat surface 72T1 is bonded to elastic support 16.

[0079] A reference hole 94K for positioning the elastic support 16 and the mover 14 is formed in each of them. Specifically, the reference hole 94K is formed in the elastic support 16, the yoke 72, the magnet 74, and the pole piece 76. The size and shape of the reference holes 94K formed in each of them are the same.

[0080] As shown in FIG. 9, from a starting end 80S to a terminal end 80E, the deformation portion 80 has one Y-direction side portion 81P and the other Y-direction side portion 81M, arm portions 82A, 82B, 82C, and 82D, and one X-direction side portion 83P and the other X-direction side portion 83M. Here, the starting end 80S refers to the beginning of the deforming portion 80 when the deforming portion 80 is understood as a portion extending from the mover-side fixed portion 94 side toward the mounting member-side fixed portion 92 side, and specifically, coincides with the boundary between the mover-side fixed portion 94 and the deforming portion 80. There are two starting ends 80S, one on one side in the Y direction and the other on the other side in the Y direction.

[0081] The Y-direction one side portion 81P and the Y-direction other side portion 81M are both adjacent to the movable member side fixed portion 94 in the Y direction. The Y direction one side portion 81P has a starting end 80S on one side in the Y direction, and the Y direction other side portion 81M is located on the other side in the Y direction of the mover side fixed portion 94. The Y direction one side portion 81P has a starting end 80S on one side in the Y direction, and the Y direction other side portion 81M has a starting end 80S on the other side in the Y direction.

[0082] The deformation portion 80 branches from one side portion 81P in the Y direction toward one side and the other side in the X direction, and is connected to a first arm portion 82A and a second arm portion 82B, respectively. Branches also branch out from the other side portion 81M in the Y direction toward one side and the other side in the X direction, and are connected to the third arm portion 82C and the fourth arm portion 82D, respectively. In this manner, the one side portion 81P in the Y direction is a Y direction one side connection portion 81P connected to both the first arm portion 82A and the second arm portion 82B, and the other side portion 81M in the Y direction is a Y direction other side connection portion 81M connected to both the third arm portion 82C and the fourth arm portion 82D.

[0083] At one side 83P in the X direction, a first arm portion 82A on one side in the X direction of two arm portions 82A, 82B branching off from a connection portion 81P on one side in the Y direction and a third arm portion 82C on one side in the X direction of two arm portions 82C, 82D branching off from a connection portion 81M on the other side in the Y direction join together. At the other side 83M in the X direction, a second arm portion 82B on the other side in the X direction of two arm portions 82A, 82B branching off from the connection portion 81P on one side in the Y direction and a fourth arm portion 82D on the other side in the X direction of two arm portions 82C, 82D branching off from the connection portion 81M on the other side in the Y direction join together. In this way, the X-direction one side portion 83P is an X-direction one side connection portion 83P connected to both the first arm portion 82A and the third arm portion 82C, and the X-direction other side portion 83M is an X-direction other side connection portion 83M connected to both the second arm portion 82B and the fourth arm portion 82D.

[0084] <Operation> In the actuator S1 configured as described above, the mover 14 is supported by the elastic support 16, and is in the origin position shown in Fig. 5 when no current is applied to the coil 30. The thrust generated in the mover 14 basically conforms to the thrust given based on Fleming's left-hand rule. In the actuator S1, the coil 30 is fixed to the plate 20, and the mover 14 is composed of the magnet 74 and the like. Therefore, when current is applied to the coil 30, a thrust is generated in the mover 14 as a reaction force to the force generated from the coil 30. Then, when an alternating current is applied to the coil 30, the mover 14 oscillates and vibrates in the vertical direction along the central axis AX.

[0085] <Action and effect> Next, the effects of this embodiment will be described.

[0086] In this embodiment, the actuator S1 includes a mounting member 12 including a coil 30, and a mover 14 including a magnet 74. The actuator S1 also includes an elastic support 16. The elastic support 16 has a mounting member-side fixed part 92 fixed to the mounting member 12, a mover-side fixed part 94 fixed to the mover 14, and a deformation part 80 located between the mounting member-side fixed part 92 and the mover-side fixed part 94. When the deformation part 80 of the elastic support 16 elastically deforms, the mover 14 is displaced relative to the mounting member 12 in a predetermined displacement direction (±Z direction).

[0087] Furthermore, in this embodiment, as shown in FIG. 9, the end 80E of the deformation portion 80 (the end of the deformation portion 80 on the mounting member side fixed portion 92 side) is located in an area on one side in the X direction with respect to the mover side fixed portion 94 and an area on the other side in the X direction with respect to the mover side fixed portion 94 (hereinafter referred to as the "outer area in the X direction"), and is located in an area overlapping with the mover side fixed portion 94 in the X direction (hereinafter referred to as the "inner area in the X direction"). Not located. Therefore, compared to a case where the end 80E of the deformation portion 80 is also located in the inner region in the X direction, the actuator S1 can be made more compact.

[0088] More specifically, in an embodiment in which the end 80E of the deformation portion 80 is located in the X-direction inner region as well as in the X-direction outer region, a structure for fixing the elastic support 16 in the X-direction inner region is required as part of the configuration of the actuator S1. Since the elastic support 16 is a member that supports the mover 14 that is displaced (for example, displaced due to vibration), the structure for fixing the elastic support 16 needs to have a certain strength, and a certain amount of space is required in the X-direction inner region to arrange the structure. In contrast, in this embodiment, the end 80E of the deformation portion 80 is located in the outer region in the X direction, and not in the inner region in the X direction. Therefore, a structure for fixing the elastic support 16 is not required in the inner region in the X direction, and as a result, it is easy to reduce the size of the actuator S1.

[0089] In this embodiment, the deformation section 80 includes a Y-direction one side portion 81P and a Y-direction other side portion 81M each having a starting end 80S, and an X-direction one side portion 83P and an X-direction other side portion 83M each having an end 80E. These portions are connected by four arm portions 82A, 82B, 82C, and 82D. This allows the arm portions 82A, 82B, 82C, and 82D in the deformation section 80 to have a relatively long length, and the deformation section 80 is easily structured symmetrically in the X and Y directions. Rotation around the axes in the X and Y directions can be suppressed, so that the support of the movable element 14 in the displacement direction (±Z direction) by the elastic support 16 is stable.

[0090] In this embodiment, the one Y-direction side portion 81P is a Y-direction one-side connection portion 81P that has one starting end 80S and is connected to both the first arm portion 82A and the second arm portion 82B, and the other Y-direction side portion 81M is a Y-direction other-side connection portion 81M that has one starting end 80S and is connected to both the third arm portion 82C and the fourth arm portion 82D. This makes it possible to suppress an increase in the amount of deformation of the one Y-direction side portion 81P and the other Y-direction side portion 81M, each of which has a starting end 80S. In other words, since one side portion 81P in the Y direction and the other side portion 81M in the Y direction have starting ends, the amount of deformation thereof is likely to become large. However, in this embodiment, since it is easy to ensure the rigidity of one side portion 81P in the Y direction and the other side portion 81M in the Y direction, it is possible to suppress an increase in the amount of deformation in one side portion 81P in the Y direction and the other side portion 81M in the Y direction, compared to the embodiment shown in Figure 17, for example. In particular, in this embodiment, as shown in FIG. 9, the width W1 (X-direction dimension) of the starting end 80S of the Y-direction one side connection portion 81P and the Y-direction other side connection portion 81M is formed to be more than twice (more specifically, more than 2.5 times) the minimum width W2 of the arm portions 82A, 82B, 82C, and 82D, thereby effectively suppressing the amount of deformation near the starting end 80S. In this embodiment, the width W1 (X-direction dimension) of the start end 80S of the connection portion 81P on one side of the Y direction and the connection portion 81M on the other side of the Y direction is made larger than the minimum value W4 (minimum width) of the X-direction dimension of the connection portion 81P on one side of the Y direction and the connection portion 81M on the other side of the Y direction. Therefore, stress is prevented from concentrating at the start end 80S, compared to a mode (see FIG. 21) in which the width W1 (X-direction dimension) of the start end 80S of the connection portion 81P on one side of the Y direction and the connection portion 81M on the other side of the Y direction coincides with the minimum value W4 (minimum width) of the X-direction dimension of the connection portion 81P on one side of the Y direction and the connection portion 81M on the other side of the Y direction. In particular, in this embodiment, as shown in FIG. 9, the width W1 (X-direction dimension) of the starting end 80S of the Y-direction one side connection portion 81P and the Y-direction other side connection portion 81M is formed to be 1.5 times or more (more specifically, 2.5 times or more) the minimum width W2 of the arm portions 82A, 82B, 82C, and 82D, thereby effectively suppressing the amount of deformation near the starting end 80S.

[0091] In this embodiment, the one side portion 83P in the X direction is an X-direction one side connection portion 83P having one terminal end 80E and connected to both the first arm portion 82A and the third arm portion 82C, and the other side portion 83M in the X direction is an X-direction other side connection portion 83M having one terminal end 80E and connected to both the second arm portion 82B and the fourth arm portion 82D. Therefore, compared to the embodiment shown in Fig. 18, for example, it is possible to suppress an increase in the amount of deformation of the one side portion 83P in the X direction and the other side portion 83M in the X direction, each of which has the terminal end 80E. In particular, in this embodiment, as shown in FIG. 9, the width W3 (Y-direction dimension) of the terminal end 80E of the X-direction one side connection portion 83P and the X-direction other side connection portion 83M is formed to be two or more times (furthermore, three or more times) the minimum width W2 of the arm portions 82A, 82B, 82C, 82D, so that the amount of deformation near the terminal end 80E is effectively suppressed.

[0092] 9, in this embodiment, the position of the terminal end 80E in the Y direction falls within the range in the Y direction in which the mover side fixed part 94 is formed (the range of the diameter D1 of the mover side fixed part 94 in this embodiment). Therefore, it is easy to ensure that the length of the arm part from the starting end 80S on both sides in the Y direction is long.

[0093] In this embodiment, the inner ends in the X direction of both the X direction one side connection portion 83P and the X direction other side connection portion 83M are straight edge portions 83X1, 83X2 extending linearly in the Y direction. The straight edge portions 83X1, 83X2 are located in the Y direction center of the deformation portion 80, and the Y direction dimension is 90% or more of the dimension of the terminal end 80E. Therefore, the X direction one side connection portion 83P and the X direction other side connection portion 83M can be formed large in a balanced manner, so that the support of the mover 14 is stable.

[0094] 9, each of the four arm portions 82A, 82B, 82C, and 82D includes a return portion 84 whose extending direction faces inward in the Y direction and inward in the X direction. Therefore, compared to a configuration in which the arm portions 82A, 82B, 82C, and 82D do not include the return portion 84 (see FIG. 20), the length of the arm portions 82A, 82B, 82C, and 82D can be increased without increasing the size of the actuator S1 as a whole.

[0095] In this embodiment, the deformation portion 80 is not separated. In other words, all of the portions of the deformation portion 80 are connected to each other. For example, the Y-direction one side portion 81P and the Y-direction other side portion 81M are connected via the arm portions 82A, 82B, 82C, and 82D, the X-direction one side portion 83P, and the X-direction other side portion 83M. This provides an elastic support 16 with high durability. In this embodiment, the elastic support 16 is formed integrally with not only the deformation portion 80 but also the attachment member side fixed portion 92 and the mover side fixed portion 94 .

[0096] In this embodiment, one end and the other end in the Y direction of the mounting member side fixed portion 92 are located outside in the Y direction from the terminal end 80E. In other words, the length in the Y direction of the mounting member side fixed portion 92 is longer than the length in the Y direction of the terminal end 80E, and extends on both sides in the Y direction. This makes it possible to increase the fixing area of ​​the elastic support 16 relative to the mounting member 12, and the fixing of the elastic support 16 is stable.

[0097] In this embodiment, the actuator S1 includes a bottom wall portion 42 ("fall prevention portion") that prevents the pair of vertical wall portions 41 ("support fixing portion") from falling inward in the X direction. This improves the durability of the actuator S1. In particular, in this embodiment, as shown in Fig. 4, the bottom wall portion 42 of the inner frame 40 is disposed on the inside in the X direction with respect to the standing wall portion 41 ("support fixing portion"), and is formed to a position where it partially overlaps with the deformation portion 80 of the elastic support 16 in a plan view, but is formed lower than the standing wall portion 41. This improves the durability of the actuator S1 and also improves the relationship between the bottom wall portion 42 and the elastic support. Interference with the holder 16 is prevented.

[0098] In this embodiment, as shown in FIG. 9, both the Y-direction one side end and the Y-direction other side end of the deformation portion 80 are linear edges 80Y1, 80Y2 extending linearly in the X-direction. The linear edges 80Y1, 80Y2 constitute a part of the Y-direction connection portion 81 (the Y-direction one side connection portion 81P and the Y-direction other side connection portion 81M may be simply referred to as the Y-direction connection portion 81, respectively) and two arm portions 82A, 82B (or 82C, 82D) branching off from the Y-direction connection portion 81. In other words, the linear edges 80Y1, 80Y2 extend in the X-direction from the arm portion 82A (or 82C) on one side in the X-direction to the arm portion 82B (or 82D) on the other side in the X-direction across the Y-direction connection portion 81. For this reason, the elastic support 16 can be efficiently arranged in the space of the entire actuator, and the actuator S1 can be made to have excellent durability despite its small size.

[0099] In this embodiment, the ratio (X1 / Y1) of the X-direction dimension X1 of the deformation section 80 (i.e., the dimension from the end 80E on one side in the X-direction to the end 80E on the other side in the X-direction) to the Y-direction dimension Y1 of the deformation section 80 is 1.0 to 1.5 times (more specifically, 1.1 to 1.3 times). The elastic support 16 is fixed to the mounting member 12 on the outer side in the X-direction with respect to the deformation section 80. As a result, the actuator S1 is elongated in the X-direction in a plan view. Furthermore, the actuator S1 of this embodiment has an overall rectangular parallelepiped shape due to the shapes of the outer frame 20 and the inner frame 40. The rectangular parallelepiped actuator S1 is less likely to waste installation space compared to, for example, a cylindrical actuator, and the actuator S1 and other components can be arranged more efficiently.

[0100] Next, the structure and effect of the elastic support 16 will be described.

[0101] FIG. 22 shows the relationship between the frequency of vibration applied to actuator S1 and the vibration of actuator S1 on the mounting object when "without cushioning material" and when "with cushioning material" is used. 1 is a graph showing the results of a simulation of the relationship between the acceleration (Acceleration) generated at the elastic support and the elastic constant of the elastic support 16L. Here, the case "with cushioning material" refers to the case where the cushioning material 16L (specifically, adhesive tape) is sandwiched between two leaf spring materials 16S ("with cushioning material") as in the above embodiment, and "without cushioning material" refers to the case where the elastic support 16S is made only of a metal (e.g., stainless steel) leaf spring material 16S. However, to be precise, "without cushioning material" refers to the case where the elastic support 16S is made only of one leaf spring material 16S whose thickness is adjusted so as to have the same spring constant as that of the combination of two leaf spring materials 16S in the case "with cushioning material".

[0102] As shown in FIG. 22, it is understood that the acceleration level during resonance can be suppressed by configuring the elastic support in such a manner that a buffer material 16L is disposed between a pair of leaf spring materials 16S.

[0103] Fig. 23 and Fig. 24 are graphs showing the results of simulations performed under different temperature conditions for an elastic support having a structure in which a cushioning material 16L is disposed between a pair of leaf spring materials 16S. Fig. 23 shows the results when an acrylic adhesive double-sided tape (specifically, a three-layer double-sided tape having an acrylic adhesive layer on both sides of a polyolefin foam layer) is used as the adhesive tape for the cushioning material 16L, and Fig. 24 shows the results when a silicone adhesive double-sided tape (specifically, a three-layer double-sided tape having a silicone adhesive layer on both sides of a silicone rubber layer) is used as the adhesive tape for the cushioning material 16L.

[0104] As shown in these figures, when an acrylic adhesive double-sided tape is used, the temperature dependency is high, and therefore the vibration characteristics of the elastic support are also significantly temperature dependent. On the other hand, when a silicone adhesive double-sided tape is used, the temperature dependency is low, and therefore the vibration characteristics of the elastic support are not temperature dependent. From this, it can be said that by using a silicone-based material for the cushioning material 16L, it is possible to obtain an elastic support 16 that can maintain its characteristics without being affected by the environmental temperature.

[0105] (Display 100) FIG. 11 shows a display 100 equipped with an actuator S1 of the first embodiment.

[0106] The display 100 includes a display unit 102 such as a liquid crystal panel. The display unit 102 is configured as a touch panel. An actuator S1 is fixed to a rear surface 102B of the display unit 102. Specifically, a mounting member 12 of the actuator S1 is attached to the rear surface 102B of the display unit 102 by an adhesive sheet 66 of the actuator S1. Note that, as shown in FIG. 11, a plurality of actuators S1 (two in the figure) may be attached to the display unit 102.

[0107] In such a display 100, various tactile sensations can be given by controlling the actuator S1 to the finger of a user touching the surface 102A of the display unit 102, which is a touch panel. In particular, in this embodiment, the actuator S1 included in the display 100 is miniaturized, so that other configurations (other devices, wiring, etc.) included in the display 100 can be easily arranged.

[0108] Second Embodiment Next, an actuator S2 according to a second embodiment of the present disclosure will be described with reference to FIGS.

[0109] The actuator S2 of the second embodiment differs from the actuator S1 of the first embodiment mainly in that it further includes an additional elastic support 18 in addition to the elastic support 16. Configurations having the same structure and function as those of the other embodiments are given the same reference numerals in the drawings and descriptions thereof will be omitted.

[0110] The actuator S2 includes an additional elastic support 18. The additional elastic support 18 is a flat elastic body with its plate thickness oriented in the up-down direction. The additional elastic support 18 is provided below the elastic support 16. As shown in FIG. 14, the mover side fixed part 194 (see FIG. 15) of the additional elastic support 18 is fixed to the lower end of the hanging part 72S of the yoke 72, and the mounting member side fixed part 92 of the additional elastic support 18 is fixed at a vertically intermediate position of the standing wall part 141.

[0111] A plan view of the additional elastic support 18 is shown in FIG. The planar shape of the additional elastic support 18 is generally the same as the planar shape of the elastic support 16 (see FIG. 9), but is significantly different in the mover-side fixed part 194. Specifically, the mover-side fixed part 194 of the additional elastic support 18 has a through hole 194A formed therein that is larger than the reference hole 94K formed in the mover-side fixed part 94 of the elastic support 16. As shown in FIG. 14, the coil 30 is disposed inside this through hole 194A.

[0112] The standing wall portion 41 of the inner frame 140 in the second embodiment has an additional fixing portion 41K for fixing the additional elastic support 18 at its vertical intermediate position. Specifically, unlike the first embodiment, the inner frame 140 is composed of an upper member 40U and a lower member 40L. The additional elastic support 18 is fixed in a state of being sandwiched between the upper member 40U and the lower member 40L. As shown in FIG. 16, a plurality of pins 45 (three in this embodiment) are provided on the upper surface 40L1 of the lower member 40L, lined up in the Y direction. As shown in FIG. 14, a recess 46 corresponding to the plurality of pins 45 is formed on the lower surface of the upper member 40U. The plurality of pins 45 are arranged so as to be fixed to the additional elastic support 18. It is inserted into the through hole 92A of the attachment member side fixed portion 92 and also into the recess 46 of the upper member 40U.

[0113] The lower member 40L includes a portion that constitutes a part of the standing wall portion 41 and a portion that constitutes a part of the bottom wall portion 42. The upper member 40U also includes a portion that constitutes a part of the standing wall portion 41 and a portion that constitutes a part of the bottom wall portion 42.

[0114] 13, the bottom wall portion 42 of the inner frame 140 is disposed on the inside in the X direction with respect to the standing wall portion 41 ("support fixing portion"), but unlike the first embodiment (see FIG. 4), it is not formed to a position where it overlaps with the deformation portion 80 of the elastic support 16 in a plan view. This is to prevent the arm portions 82A, 82B, 82C, 82D of the additional elastic support 18 from interfering with the bottom wall portion 42.

[0115] The additional elastic support 18 is different from the elastic support 16 in that it does not include a cushioning material 16L. Specifically, the additional elastic support 18 has a single-layer structure made of only a leaf spring material 18S.

[0116] <Action and effect> Next, the effects of the second embodiment will be described.

[0117] In this embodiment, the deformation portion 80 of the elastic support (the elastic support 16 and the additional elastic support 18) is deformed, whereby the mover 14 is displaced relative to the mounting member 12 in a predetermined displacement direction (±Z direction). Furthermore, the terminal end 80E of the deformation portion 80 (the end of the deformation portion 80 on the mounting member side fixed portion 92 side) is located in an area on one side in the X direction relative to the mover side fixed portions 94, 194 and in an area on the other side in the X direction relative to the mover side fixed portions (hereinafter referred to as the "X direction outer area"), but is not located in an area overlapping with the mover side fixed portion 94 in the X direction (hereinafter referred to as the "X direction inner area"). Therefore, in this embodiment as well, the actuator S2 can be made smaller.

[0118] Furthermore, in this embodiment, since the actuator S2 includes the additional elastic support 18, the displacement (vibration, etc.) of the mover 14 becomes even more stable.

[0119] In this embodiment, the elastic support 16 includes the cushioning material 16L, and the additional elastic support 18 does not include the cushioning material 16L. Therefore, the elastic support 16 including the cushioning material 16L provides good vibration characteristics. In addition, compared to an embodiment in which the additional elastic support 18 also includes the cushioning material 16L, the position and posture of the upper member 40U of the inner frame 140 to which the elastic support 16 is fixed are more stable, and as a result, the displacement (vibration) of the mover 14 is more stable. However, by changing the structure of the additional elastic support 18 to one in which the buffer material 16L is sandwiched, similar to the elastic support 16, it is possible to improve the vibration damping performance.

[0120] (Modification of Elastic Support) In the above embodiment, the elastic support 16 shown in Fig. 9 has been described as an "elastic support", but the "elastic support" of the present disclosure is not limited to this. Specific details will be described below.

[0121] In the above embodiment, as shown in Fig. 9, an example has been described in which the one side portion 81P in the Y direction is a one side connection portion 81P in the Y direction that has one starting end 80S and is connected to both the first arm portion 82A and the second arm portion 82B, and the other side portion 81M in the Y direction is a other side connection portion 81M in the Y direction that has one starting end 80S and is connected to both the third arm portion 82C and the fourth arm portion 82D, but the "elastic support" of the present disclosure is not limited to this. For example, it may be an elastic support 116 shown in Fig. 17. In the deformation portion 180 of the elastic support 116, the one Y-direction side portion 81P is separated into two, and as a result, the one Y-direction side portion 81P has two starting ends 80S. The other Y-direction side portion 81M is also separated into two, and as a result, the other Y-direction side portion 81M also has two starting ends 80S. Therefore, the one Y-direction side portion 81P does not become the one Y-direction side connecting portion 81P (see FIG. 9), and the other Y-direction side portion 81M does not become the other Y-direction side connecting portion 81M (see FIG. 9).

[0122] In the above embodiment, as shown in Fig. 9, an example has been described in which the one side portion 83P in the X direction is an X direction one side connection portion 83P having one end 80E and connected to both the first arm portion 82A and the third arm portion 82C, and the other side portion 83M in the X direction is an X direction other side connection portion 83M having one end 80E and connected to both the second arm portion 82B and the fourth arm portion 82D, but the "elastic support" of the present disclosure is not limited to this. For example, it may be an elastic support 216 shown in Fig. 18. In the deformation portion 280 of this elastic support 216, one X-direction side portion 83P is separated into two, and as a result, one X-direction side portion 83P has two terminal ends 80E. In addition, the other X-direction side portion 83M is also separated into two, and as a result, the other X-direction side portion 83M also has two terminal ends 80E. Therefore, one X-direction side portion 83P does not serve as an X-direction one-side connecting portion 83P (see FIG. 9), and the other Y-direction side portion 83M does not serve as a Y-direction other-side connecting portion 83M (see FIG. 9).

[0123] In the above embodiment, as shown in Fig. 9, an example has been described in which the length in the Y direction of the mounting member-side fixed portion 92 is extended on both sides in the Y direction beyond the length in the Y direction of the end 80E, but the "mounting member-side fixed portion" of the present disclosure is not limited to this. For example, it may be the mounting member-side fixed portion 192 of the elastic support 316 shown in Fig. 19. The mounting member side fixed portion 192 of this elastic support 316 is composed only of a main body portion 92H whose position in the Y direction coincides with the boundary portion 80E, and does not have an extension portion 92E (see Figure 9) located outside the main body portion 92H in the Y direction.

[0124] In the above embodiment, as shown in Fig. 9, an example has been described in which each of the four arm portions 82A, 82B, 82C, and 82D includes the return portion 84 whose extending direction faces inward in the Y direction and inward in the X direction, but the "arm portion" of the present disclosure is not limited to this. For example, the arm portions may be arm portions 482A, 482B, 482C, and 482D of the elastic support 416 shown in Fig. 20. The arm portions 482A, 482B, 482C, 482D of the deformation portion 480 of the elastic support 416 are not provided with the return portion 84 whose extending direction faces inward in the Y direction and inward in the X direction.

[0125] Although an example in which each of the arm sections 82A, 82B, 82C, and 82D is composed of one arm has been described above, the "arm section" of the present disclosure is not limited to this. For example, although not shown in the drawings, each of the arm sections 82A, 82B, 82C, and 82D may be composed of two or more arms.

[0126] 〔supplementary explanation〕 In the above embodiment, an example was described in which the "coil" is a coil 30 that is circular when viewed in a plane, but the "coil" of the present disclosure is not limited to this and may be rectangular or another polygonal shape when viewed in a plane, or may have other shapes.

[0127] In the above embodiment, the one-side inner frame 40 and the other-side inner frame 40 are separate bodies, but the one-side inner frame 40 and the other-side inner frame 40 may be integrated. Specifically, the bottom wall portion 42 of the one-side inner frame 40 and the bottom wall portion 42 of the other-side inner frame 40 may be connected by extending inward in the X direction. By connecting the bottom wall portions 42 and integrating the inner frames 40 together, the handling of the frame during assembly is improved, and the ability to prevent the frame from falling over is also improved.

[0128] In the above embodiment, an example has been described in which the outer frame 20 is manufactured from a metal plate material and formed separately from the resin inner frame 40, but the present disclosure is not limited to this. For example, the outer frame 20 may be made of resin. Furthermore, in this case, the outer frame 20 and the inner frame 40 may be integrally formed by resin molding.

[0129] In the above embodiment, the actuator S1 is attached to the display unit 102 of the display 100, but the part or device to which the actuator S1 is attached is not particularly limited.

[0130] The disclosure of Japanese Patent Application No. 2019-047331 is incorporated herein by reference in its entirety. [Explanation of symbols]

[0131] S1, S2 actuator 12 Mounting material 14 Mover 16,116,216,316,416 Elastic support 20 Outer Frame 21 Bottom plate (coil fixing part) 30 Coil 40 Inner Frame 41 Standing wall part (support fixing part) 42 Low wall section (anti-collapse section) 74 Magnet 80,180,280,480 Deformation part 80S Beginning 80E termination 81P Y-direction one side connection part (Y-direction one side part) 81M Y-direction other side connection part (Y-direction other side part) 82A, 482A First arm 82B, 482B Second arm section 82C, 482C 3rd arm section 82D, 482D 4th arm section 83P X-direction one side connection part (X-direction one side part) 83M X-direction other side connection part (X-direction other side part) 84 Return part 92,192 Mounting member side fixed part 92H Main body 92E Extension 94,194 Mover side fixed part 100 Display

Claims

1. A mounting member including a coil; a mover including a magnet and displaceable relative to the mounting member in a predetermined displacement direction; an elastic support having a mounting member-side fixed portion fixed to the mounting member, a mover-side fixed portion fixed to the mover, and a deformation portion located between the mounting member-side fixed portion and the mover-side fixed portion; An actuator comprising: The displacement direction is defined as the ±Z direction, and among directions in a plane perpendicular to the ±Z direction, directions perpendicular to each other are defined as the X direction and the Y direction, When an end of the deformation portion on the side of the movable member fixed portion is defined as a start end and an end of the deformation portion on the side of the mounting member fixed portion is defined as a termination end, the end of the deformation portion is located only in an area on one side in the X direction with respect to the movable member fixed portion and in an area on the other side in the X direction with respect to the movable member fixed portion, The deformation portion is one side in the X direction and another side in the X direction, which are portions extending in the X direction from a terminal end of the deformation portion toward the mover; four arm portions each continuing from the one side portion in the X direction and the other side portion in the X direction, the arm portions having portions extending to both sides in the Y direction and a portion extending in the X direction; one side portion in the Y direction and another side portion in the Y direction, which are portions of the four arm portions extending in the X direction from the portion extending in the Y direction and connected to a start end of the deformation portion; Equipped with Actuator.

2. When each of the four arm portions is understood as a portion extending from the starting end side to the terminal end side, Each of the four arm portions includes a return portion whose extending direction faces inward in the Y direction and inward in the X direction. The actuator of claim 1 .

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