Sheet adhesion device and sheet adhering method

Abstract

To provide a sheet adhesion device and a sheet adhering method, capable of preventing winkle from occurring in an adhesive sheet and from being adhered to an adherend.SOLUTION: A sheet adhesion device EA comprises: first energy application means 10 of applying a first energy for suppressing softening of an adhesive sheet AS to the adhesive sheet AS; and second energy application means 20 of applying a second energy for softening the adhesive sheet AS to an adherend WK, and comprises depression means 30 of pressing the adhesive sheet AS to which the first energy is applied to the adherend WK, and of being adhered to the adherend WK while softening the adhesive sheet AS by the second energy transferred from the adherend WK.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The present invention relates to a sheet sticking device and a sheet sticking method. [Background technology]

[0002] 2. Description of the Related Art A sheet application device is known that applies an adhesive sheet to an adherend by pressing the sheet against the adherend (see, for example, Patent Document 1). [Prior art documents] [Patent documents]

[0003] [Patent Document 1] JP 2001-68394 A Summary of the Invention [Problem to be solved by the invention]

[0004] In the resist removal apparatus (sheet application apparatus) described in Patent Document 1, a heater 28 (second energy application means) heats a substrate W (adherend) while an adhesive tape T (adhesive sheet) is brought close to the adherend. This causes the adhesive sheet to soften and slacken due to the heat before being applied to the adherend, resulting in wrinkles in the adhesive sheet when it is applied to the adherend.

[0005] An object of the present invention is to provide a sheet application device and a sheet application method that can prevent wrinkles from occurring in the adhesive sheet when it is applied to an adherend. [Means for solving the problem]

[0006] The present invention employs the configurations set forth in the claims. Effect of the Invention

[0007] According to the present invention, an adhesive sheet to which a first energy has been applied that suppresses softening of the adhesive sheet is pressed against an adherend, and the adhesive sheet is affixed to the adherend while being softened by a second energy transmitted from the adherend. This suppresses the adhesive sheet from softening and becoming loose due to the second energy before the adhesive sheet is affixed to the adherend, and prevents the adhesive sheet from wrinkling when affixed to the adherend. [Brief description of the drawings]

[0008] [Figure 1] 1A and 1B are explanatory views of a sheet sticking device according to one embodiment of the present invention. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0009] Hereinafter, an embodiment of the present invention will be described with reference to the drawings. In this embodiment, the X-axis, Y-axis, and Z-axis are mutually orthogonal, the X-axis and Y-axis are axes within a specified plane, and the Z-axis is an axis orthogonal to the specified plane. Furthermore, in this embodiment, the view from the front direction of Fig. 1(A) parallel to the Y-axis is used as a reference, and when indicating directions, "up" is the direction of the Z-axis arrow, "down" is the opposite direction, "left" is the direction of the X-axis arrow, "right" is the opposite direction, "front" is the direction toward the front of Fig. 1(A) parallel to the Y-axis, and "rear" is the opposite direction.

[0010] The sheet application apparatus EA is equipped with a first energy application means 10 that performs a first energy application step of applying cooling energy to the adhesive sheet AS as a first energy that suppresses softening of the adhesive sheet AS, a second energy application means 20 that performs a second energy application step of applying heating energy to the adherend WK as a second energy that softens the adhesive sheet AS, and a pressing means 30 that performs a pressing step of pressing the adhesive sheet AS to which cooling energy has been applied against the adherend WK, and applying the adhesive sheet AS to the adherend WK while softening it with heating energy transmitted from the adherend WK. The adhesive sheet AS of this embodiment is attached to a ring frame RF as a frame member to form an attachment body UP.

[0011] The first energy application means 10 comprises an upper case 11 having a contact surface 11A that contacts the adhesive sheet AS, and a cooling means 12 such as a Peltier element or the cooling side of a heat pipe provided inside the upper case 11, and is configured to apply cooling energy by contacting the adhesive sheet AS against the contact surface 11A. The upper case 11 and the adhesive sheet AS form a first sealed space SP1 (see FIG. 1(B)).

[0012] The second energy applying means 20 includes heating means 21 such as a coil heater or the heating side of a heat pipe.

[0013] The pressing means 30 comprises a linear motor 31 as a driving device supporting the upper case 11 with an output shaft 31A, a first pressure control means 32 such as a pressurizing / depressurizing pump, vacuum ejector, turbine or the like capable of pressurizing or depressurizing the pressure in the first sealed space SP1 via piping 32A, a lower case 33 which is box-shaped with an open top and capable of forming a second sealed space SP2 together with the attachment body UP, a second pressure control means 34 such as a pressurizing / depressurizing pump, vacuum ejector, turbine or the like capable of pressurizing or depressurizing the pressure in the second sealed space SP2 via piping 34A, and a support table 36 as a supporting means which is supported by the output shaft 35A of the linear motor 35 as a driving device and supports the adherend WK on a support surface 36A, and is configured to press and attach the adhesive sheet AS to the adherend WK in a reduced pressure atmosphere. The first pressure control means 32 and the second pressure control means 34 are capable of controlling the pressures in the first sealed space SP1 and the second sealed space SP2 to predetermined pressures based on the detection results of the first pressure detection means and the second pressure detection means (not shown) such as a pressure sensor, a load cell, etc. A heating means 21 is provided inside the support table 36.

[0014] The operation of the sheet sticking apparatus EA will now be described. First, a user of the sheet sticking apparatus EA (hereinafter, simply referred to as "user") inputs a signal to start automatic operation via an operation means such as an operation panel or a personal computer (not shown) to the sheet sticking apparatus EA, in which each member is arranged at the initial position shown by the solid line in Fig. 1 (A). Next, the first and second energy applying means 10, 20 drive the cooling means 12 and the heating means 21, and while the sheet sticking apparatus EA is in automatic operation, the contact surface 11A is cooled to a predetermined temperature, and the support surface 36A is heated to a predetermined temperature and maintained at those temperatures. After that, the user or a conveying means (not shown), such as an articulated robot or a belt conveyor, places the adherend WK at a predetermined position on the support surface 36A. As a result, the adherend WK is heated by the heating means 21, and heat energy is applied to the adherend WK.

[0015] Next, when the user or a conveying means (not shown) places the adhesive item UP at a predetermined position on the lower case 33, the pressing means 30 drives the linear motor 31, and as shown by the two-dot chain line in Fig. 1 (A), the upper case 11 is lowered to sandwich the adhesive item UP between the lower case 33. As a result, the adhesive sheet AS comes into contact with the contact surface 11A and is cooled, and cooling energy is imparted to the adhesive sheet AS. Then, the pressing means 30 drives the first and second pressure control means 32, 34, and reduces the pressure in the first and second sealed spaces SP1, SP2 while keeping the pressures in the first and second sealed spaces SP1, SP2 the same based on the detection results of the first and second pressure detection means (not shown). Next, when the pressure in the first sealed space SP1 and the second sealed space SP2 is reduced to a predetermined pressure, the pressing means 30 stops driving the first and second pressure control means 32, 34, and then drives the first pressure control means 32 to increase the pressure in the first sealed space SP1 relative to the pressure in the second sealed space SP2, making the adhesive sheet AS convex downward. After that, the pressing means 30 drives the linear motor 35, and as shown in FIG. 1(B), the support table 36 is raised, and the adherend WK is pressed against the adhesive sheet AS to which cooling energy has been applied. As a result, the adhesive sheet AS is pressed against the adherend WK from its center toward its outer edge while the adhesive surface is softened by the heating energy transmitted from the adherend WK, and is attached to the adherend WK.

[0016] Next, when the entire adhesive sheet AS is attached to the adherend WK and the adherend WK and the ring frame RF are integrated to form an integrated body, the pressing means 30 drives the second pressure control means 34, and based on the detection result of the second pressure detection means (not shown), the pressure in the second sealed space SP2 is increased until it becomes the same as the pressure in the first sealed space SP1. Then, the pressing means 30 drives the first and second pressure control means 32, 34, and based on the detection result of the first and second pressure detection means (not shown), the pressure in the first and second sealed spaces SP1, SP2 is increased to atmospheric pressure while maintaining the pressure difference between the first and second sealed spaces SP1, SP2. Next, the pressing means 30 drives the linear motors 31, 35 to return the upper case 11 and the support table 36 to their initial positions, and the user or the transport means (not shown) transports the integrated body to the next process, and the same operations as above are repeated thereafter.

[0017] According to the above-described embodiment, the adhesive sheet AS, to which cooling energy has been applied which suppresses softening of the adhesive sheet AS, is pressed against the adherend WK, and the adhesive sheet AS is attached to the adherend WK while being softened by heating energy transmitted from the adherend WK. This suppresses the adhesive sheet AS from softening and becoming loose due to the heating energy before the adhesive sheet AS is attached to the adherend WK, and prevents the adhesive sheet AS from wrinkling and being attached to the adherend WK.

[0018] As described above, the best configuration, method, etc. for carrying out the present invention are disclosed in the above description, but the present invention is not limited thereto. That is, the present invention is mainly illustrated and described with respect to a specific embodiment, but a person skilled in the art can make various modifications to the above-described embodiment in terms of shape, material, quantity, and other detailed configurations without departing from the scope of the technical idea and purpose of the present invention. In addition, the description of the shape, material, etc. disclosed above, which is limited, is illustratively described to facilitate understanding of the present invention, and does not limit the present invention, so that the description of the names of the members from which some or all of the limitations of the shape, material, etc. are removed is included in the present invention. Furthermore, the means and steps in the present invention are not limited in any way as long as they can perform the operations, functions, or steps described for those means and steps, and are not limited at all to the components and steps of a mere embodiment shown in the above embodiment. For example, the first energy applying means may be anything that can apply a first energy to the adhesive sheet that suppresses softening of the adhesive sheet, and is not limited in any way as long as it is within the technical scope in light of the common general technical knowledge at the time of filing (the same applies to other means and steps).

[0019] The first energy applying means 10 may be provided with a cooling gas supplying means such as a pressure pump turbine that supplies cooling gas cooled by a cooling device such as a Peltier element or the cooling side of a heat pipe into the first sealed space SP1, instead of or in combination with the cooling means 12, or the first pressure control means 32 may be configured to be capable of supplying cooling gas cooled by a cooling device such as a Peltier element or the cooling side of a heat pipe into the first sealed space SP1, so that when the pressure of the first sealed space SP1 is increased, the cooling gas is supplied into the first sealed space SP1 and brought into contact with the adhesive sheet AS, and cooling energy is applied to the adhesive sheet AS by the cooling gas. Note that when the first energy applying means 10 is provided with a cooling gas supplying means, the first and second pressure control means 32, 34 may or may not be present. The first energy applying means 10 may include an elastic member such as rubber or resin whose outer edge is supported by the upper case 11, and may apply cooling energy to the adhesive sheet AS by deforming the cooled elastic member and bringing its lower surface into contact with the adhesive sheet AS as the contact surface. In this case, the first energy applying means 10 may apply cooling energy to the adhesive sheet AS by bringing the elastic member into contact with the contact surface 11A and cooling it with the cooling means 12, by providing the cooling means 12 inside the elastic member and cooling the elastic member, or by supplying cooling gas into the first sealed space SP1 formed by the elastic member and the upper case 11 to cool the elastic member. The first energy application means 10 may apply the first energy to the adhesive sheet AS by irradiating the adhesive sheet AS with the first energy, or, if the adhesive sheet AS is one whose softening is suppressed by heating, may be provided with a heating means such as a coil heater or the heating side of a heat pipe instead of the cooling means 12, and may heat the adhesive sheet AS to apply heating energy as the first energy. The first energy application means 10 may be any type of first energy application means, such as one that applies electromagnetic waves such as ultraviolet rays, infrared rays, visible light, sound waves, X-rays or gamma rays, one that applies a heating medium such as hot water or hot air, or one that applies a cooling medium such as cold water or cold air, and any configuration may be adopted taking into consideration the characteristics, properties, properties, material, composition and configuration of the adhesive sheet AS.

[0020] The second energy application means 20 may apply the second energy to the adherend WK by irradiating the adherend with the second energy, or may be equipped with vibration means such as an ultrasonic transducer or vibrator in place of or in combination with the heating means 21, and apply vibration energy as the second energy that softens the adhesive sheet AS to the adherend WK, or, if the adhesive sheet AS is softened by cooling, may be equipped with cooling means such as a Peltier element or the cooling side of a heat pipe in place of the heating means 21, and cool the adherend WK to apply cooling energy as the second energy. The second energy application means 20 may be any type of second energy, such as one that applies electromagnetic waves such as ultraviolet rays, infrared rays, visible light, sound waves, X-rays or gamma rays, one that applies a heating medium such as hot water or hot air, or one that applies a cooling medium such as cold water or cold air, and any configuration may be adopted taking into consideration the characteristics, properties, qualities, material, composition and configuration of the adherend WK and the adhesive sheet AS.

[0021] The pressing means 30 may form a first sealed space SP1 by an elastic member whose outer edge is supported by the upper case 11 and the upper case 11, and may press and attach the adhesive sheet AS to the adherend WK with the elastic member deformed by increasing the pressure in the first sealed space SP1, or may press and attach the adhesive sheet AS to the adherend WK by lowering the pressure in the second sealed space SP2 relative to the pressure in the first sealed space SP1, or may not be configured to press and attach the adhesive sheet AS to the adherend WK by the pressure difference between the first sealed space SP1 and the second sealed space SP2, or may press and attach the adhesive sheet AS to the adherend WK in an atmospheric pressure atmosphere or a pressurized atmosphere, or it may not be necessary to form the first sealed space SP1 or the second sealed space SP2, and may be configured to press and attach the adhesive sheet AS to the adherend WK by using a first pressure detection means or a second pressure detection means (not shown). There may be no force detection means, the top of the lower case 33 may not be open, the lower case 33 may not be present, the linear motor 35 may not be present, the lower case 33 or the support table 36 may be provided with a holding device that adsorbs and holds or electrostatically holds an object placed on it, a strip-shaped adhesive sheet may be sandwiched between the upper case 11 and the lower case 33 and the strip-shaped adhesive sheet may be pressed against the adherend WK to be affixed, an adhesive sheet AS that is not affixed to the ring frame RF may be pressed against the adherend WK to be affixed, or a pressing member such as a cooled pressing roller or pressing plate may be brought into contact with the adhesive sheet AS as a first energy application means, and the adhesive sheet AS may be pressed against the adherend WK while being cooled by the pressing member to be affixed.

[0022] The adhesive sheet AS does not have to be attached to the ring frame RF. The frame member may be a ring frame or may be a non-annular frame (not connected at the outer periphery) or may be a circular, elliptical, polygonal, or other shape.

[0023] The material, type, shape, etc. of the adhesive sheet AS, the adherend WK, and the frame member in the present invention are not particularly limited. For example, the adhesive sheet AS and the adherend WK may be circular, elliptical, polygonal such as a triangle or a rectangle, or other shapes, and the adhesive sheet AS may be pressure-sensitive, heat-sensitive, or other adhesive forms. When a heat-sensitive adhesive sheet AS is used, the adhesive sheet AS may be adhered by an appropriate method such as providing a heating means such as a suitable coil heater or the heating side of a heat pipe for heating the adhesive sheet AS. In addition, such an adhesive sheet AS may be, for example, a single layer of only an adhesive layer, a two-layered one in which a substrate and an adhesive layer are laminated, a three-layered one or more layers in which one or more intermediate layers are laminated between the substrate and the adhesive layer, a three-layered one or more layers in which one or more cover layers are laminated on the upper surface of the substrate, a substrate, an intermediate layer, or a cover layer is provided in a peelable manner, a double-sided adhesive sheet of a single layer consisting of only an adhesive layer, a double-sided adhesive sheet in which an adhesive layer is laminated on both outermost surfaces of one or more intermediate layers, etc. Furthermore, the adherend WK may be, for example, a single object such as food, a resin container, a semiconductor wafer such as a silicon semiconductor wafer or a compound semiconductor wafer, a circuit board, an information recording substrate such as an optical disk, a glass plate, a steel plate, a ceramic plate, a wooden board, or a resin, or may be a composite formed of two or more of these, and may be any type of member or article, etc. The adhesive sheet AS may be, for example, any sheet, film, tape, etc., such as an information label, a decorative label, a protective sheet, a dicing tape, a die attach film, a die bonding tape, a recording layer-forming resin sheet, etc.

[0024] The driving equipment in the above-described embodiments may be electric equipment such as rotary motors, linear motors, single-axis robots, so-called multi-joint robots having joints on two or three or more axes, actuators such as air cylinders, hydraulic cylinders, rodless cylinders, and rotary cylinders, which may be used alone, or a direct or indirect combination of such electric equipment and actuators may be used, and electric equipment, actuators, etc. may or may not be capable of torque control or speed control for the output parts of such electric equipment, actuators, etc. may be used.

[0025] In the above embodiment, there is a certain object (hereinafter referred to as "object A") and an object (hereinafter referred to as "object B") that moves relative to object A. In other words, object A and object B that move relatively may be object B moving relative to object A that does not move, object A may move relative to object B that does not move, or both objects A and B may move. As long as the result achieved by the movement is the same, either object A or object B may move. When a rotating member such as a roller is used, a driving device that rotates the rotating member may be provided. The surface of the rotating member or the rotating member itself may be made of a deformable material such as rubber or resin, or the surface of the rotating member or the rotating member itself may be made of a non-deformable material. Alternatively, instead of the roller, a rotating or non-rotating shaft, blade, or other device may be used. In the case where a pressing means or pressing member such as a pressing roller or a pressing head is used to press the object to be pressed, a roller, a round bar, a blade material, a brush-like member, or a member that sprays air or gas may be used instead of or in combination with the above examples. The pressing means may be made of a deformable material such as rubber, resin, sponge, or may be made of an indeformable material such as metal or glass. In the case where a supporting (holding) means or a supporting (holding) member that supports (holds) a supported member (held member), a gripping means such as a mechanical chuck or a chuck cylinder, Coulomb force, adhesive (adhesive sheet, adhesive tape), pressure sensitive adhesive (adhesive sheet, adhesive tape), magnetic force, Bernoulli adsorption, suction adsorption, driving equipment, or the like may be used to support (hold) the supported member. [Explanation of symbols]

[0026] EA…Sheet attachment device 10...First energy applying means 11A…Abutting surface 20...Second energy imparting means 30...Pressing means AS…adhesive sheet WK...Adherent

Claims

1. a first energy applying means for applying a first energy to the adhesive sheet to suppress softening of the adhesive sheet; and a second energy applying means for applying a second energy to an adherend so as to soften the adhesive sheet, A sheet application device characterized by comprising a pressing means for pressing the adhesive sheet to which the first energy has been applied against the adherend, and applying the adhesive sheet to the adherend while softening it with the second energy transmitted from the adherend.

2. 2. The sheet sticking device according to claim 1, wherein the first energy applying means has a contact surface that contacts the adhesive sheet, and applies the first energy by bringing the adhesive sheet into contact with the contact surface.

3. a first energy application step of applying a first energy to the adhesive sheet to suppress softening of the adhesive sheet; A second energy application step is carried out in which a second energy that softens the adhesive sheet is applied to the adherend, A sheet attachment method, comprising carrying out a pressing step of pressing the adhesive sheet to which the first energy has been applied against the adherend, and attaching the adhesive sheet to the adherend while softening it with the second energy transmitted from the adherend.

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