Robot

Abstract

To provide a robot effective in an improvement in positional precision of a circuit board.SOLUTION: A robot 2 comprises: multi-joint arms 3 having a hand 20 which supports a circuit board W, a base 10, an arm 4 which couples the hand 20 to the base 10, and a plurality of joints J10 arranged along the arm 4 and each operating around a vertical axis to change the position and attitude of the hand 20 with respect to the base 10; and a plurality of motors driving the plurality of joints J10 respectively. Each of the plurality of motors is a direct drive motor and arranged at the driven joint J10.SELECTED DRAWING: Figure 4

Description

[Technical field]

[0001] The present disclosure relates to robots. [Background technology]

[0002] Patent Document 1 discloses a substrate transfer robot including a base, a first arm, a second arm, and a third arm. The first arm is driven by power transmitted from a first servo motor provided on the base by a first power transmission means. The second arm is driven by power transmitted from a second servo motor provided on the base by a second power transmission means. The third arm is interlocked with the second arm by power transmitted by an interlocking means. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] JP 2005-039047 A Summary of the Invention [Problem to be solved by the invention]

[0004] The present disclosure provides a robot that is effective in improving the positioning accuracy of a substrate. [Means for solving the problem]

[0005] A robot according to one aspect of the present disclosure comprises a multi-joint arm having a hand that supports a substrate, a base, an arm connecting the hand to the base, and a number of joints that are aligned along the arm and each move about a vertical axis to change the position and orientation of the hand relative to the base, and a number of motors that drive the multiple joints respectively, each of which is a direct drive motor and is disposed at the joint that it drives. Effect of the Invention

[0006] According to the present disclosure, it is possible to provide a robot that is effective in improving the positioning accuracy of a substrate. [Brief description of the drawings]

[0007] [Figure 1] FIG. 2 is a plan view illustrating the inside of the substrate transport apparatus. [Diagram 2] FIG. 2 is a cross-sectional view taken along line II-II in FIG. [Diagram 3] FIG. 3 is a bottom view of the robot in FIG. 2. [Figure 4] FIG. 2 is a cross-sectional view taken along line IV-IV in FIG. [Diagram 5] FIG. 5 is an enlarged view of the first arm motor in FIG. [Figure 6] FIG. 5 is an enlarged view of the second arm motor in FIG. [Figure 7] FIG. 5 is an enlarged view of the hand motor in FIG. [Figure 8] FIG. 13 is a diagram showing a modified example of the hand motor. [Figure 9] FIG. 13 is a diagram showing a modified example of the second arm motor. [Figure 10] FIG. 13 is a diagram showing another modified example of the hand motor. [Figure 11] FIG. 13 is a diagram showing yet another modified example of the hand motor. [Figure 12] FIG. 2 illustrates an example of a tube and an air cooling passage. [Figure 13] FIG. 2 is a diagram illustrating an example of cable wiring. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0008] Hereinafter, the embodiments will be described in detail with reference to the drawings. In the description, the same elements or elements having the same functions are denoted by the same reference numerals, and duplicated description will be omitted.

[0009] [Substrate transport device] 1 and 2 is an apparatus that transports a substrate W between one or more stations ST10 in which the substrate W is stored and a plurality of processing modules PU10. Examples of the substrate W include a semiconductor substrate, a glass substrate, a mask substrate, and an FPD (Flat Panel Display) substrate. The substrate transport apparatus 1 includes a chamber 90 and a robot 2. The chamber 90 has a longitudinal direction D11 and a lateral direction D12 perpendicular to the longitudinal direction D11. The longitudinal direction D11 and the lateral direction D12 are arranged along a horizontal plane.

[0010] The chamber 90 has a top plate 91 and a bottom plate 92 aligned vertically, and further has a peripheral wall 93 surrounding the space between the bottom plates 92. Hereinafter, the space surrounded by the peripheral wall 93 will be referred to as a transfer space S01.

[0011] The peripheral wall 93 has end walls 94, 95 that face each other in the longitudinal direction D11 and extend along the lateral direction D12, and side walls 96, 97 that face each other in the lateral direction D12 and extend along the longitudinal direction D11. A distance L11 between the end walls 94 and 95 is the length of the chamber 90 in the longitudinal direction D11, and a distance W11 between the side walls 96 and 97 is the width of the chamber 90 in the lateral direction D12. The distance L11 is greater than the distance W11.

[0012] The one or more stations ST10 and the multiple processing modules PU10 described above are arranged around the chamber 90. In the illustrated example, two stations ST10 are arranged along the end wall 95, three processing modules PU10 are arranged along the side wall 96, and three processing modules PU10 are arranged along the side wall 97, but the number and arrangement of the stations ST10 and the number and arrangement of the processing modules PU10 are not limited to this.

[0013] The robot 2 transports the substrate W between one or more stations ST10 and a plurality of processing modules PU10 in the transfer space S01. For example, the robot 2 unloads the substrate W from one of the one or more stations ST10 and loads it into one of the plurality of processing modules PU10. The robot 2 also unloads the substrate W from one of the plurality of processing modules PU10 and loads it into one of the one or more stations ST10.

[0014] As shown in FIG. 2, the robot 2 includes a multi-joint arm 3 and a plurality of actuators 40. The multi-joint arm 3 includes a hand 20, a base 10, an arm 4, and a plurality of joints J10. The base 10 is fixed to an environment in which the multi-joint arm 3 is installed. The hand 20 supports the substrate W horizontally. The arm 4 connects the base 10 to the hand 20. The multiple joints J10 are aligned along the arm 4, and each of them operates around a vertical axis to change the position and posture of the hand 20 relative to the base 10. The multiple actuators 40 drive each of the multiple joints J10.

[0015] For example, the arm 4 has a first link 50 and a second link 60. The multiple joints J10 include a first joint J11, a second joint J12, and a third joint J13. The first joint J11 connects the first link 50 to the base 10 so as to rotate around a vertical first axis Ax1. The second joint J12 connects the second link 60 to an end of the first link 50 so as to rotate around a vertical second axis Ax2. The third joint J13 connects the hand 20 to an end of the second link 60 so as to rotate around a vertical third axis Ax3. The base 10, the first link 50, the second link 60, and the hand 20 connected by the joints J11, J12, and J13 are all "links of the multi-joint arm 3."

[0016] The actuator 40 includes arm actuators 41 and 42 and a hand actuator 43. The arm actuator 41 (base actuator) drives the first joint J11 to rotate the first link 50 about the first axis Ax1 relative to the base 10. The arm actuator 42 drives the second joint J12 to rotate the second link 60 about the second axis Ax2 relative to the first link 50, independent of the rotation of the first link 50 by the arm actuator 41. The hand actuator 43 drives the third joint J13 to rotate the hand 20 about the third axis Ax3 relative to the second link 60, independent of the rotation of the first link 50 by the arm actuator 41 and the rotation of the second link 60 by the arm actuator 42.

[0017] Along the arm 4, arm actuator 41 is most proximal from the base 10, arm actuator 42 is second most proximal from the base 10, and hand actuator 43 is most distal from the base 10. Most proximal from the base 10 includes being within the base 10.

[0018] At least a part of the multi-joint arm 3 is disposed in the transfer space S01 so as to be able to transfer the substrate W. For example, at least a part of the multi-joint arm 3 is disposed in the transfer space S01 through an opening OP1 provided in the bottom plate 92. This can prevent dust from entering the chamber, as compared to providing the opening OP1 in the top plate 91 for loading the multi-joint arm 3 into the transfer space S01. The robot 2 may further include a flange 30. The flange 30 holds the base 10 and closes the opening OP1.

[0019] With the flange 30 closing the opening OP1, at least the arm 4 and the hand 20 are disposed within the transfer space S01. The base 10 may be disposed within the transfer space S01 or may be disposed outside the transfer space S01. For example, the base 10 is disposed outside the transfer space S01. By disposing the base 10 outside the transfer space S01, the transfer space S01 can be reduced in size, and the energy required to evacuate the transfer space S01 can be reduced.

[0020] The flange 30 extends to separate the base 10 from the arm 4 and the hand 20, and closes the opening OP1. The flange 30 has a longitudinal direction D1. For example, the flange 30 extends along a plane including the longitudinal direction D1 and a lateral direction D2 perpendicular to the longitudinal direction D1, and the length L1 of the flange 30 in the longitudinal direction D1 is greater than the width W1 of the flange 30 in the lateral direction D2.

[0021] Of the multiple joints J10, the first axis Ax1 of the first joint J11 which is the proximalmost from the base 10 is located between one end 31 of the flange 30 and a center 32 of the flange 30 and closer to the one end 31 in the longitudinal direction D1 of the flange 30. For example, the first axis Ax1 is located between the one end 31 and the center 32 of the flange 30, and the distance from the first axis Ax1 to the one end 31 is shorter than the distance from the first axis Ax1 to the center 32.

[0022] The shape and layout of the flange 30 can be matched to the opening OP1 that is necessary and sufficient from the standpoint of ease of installation of the robot 2 in the chamber 90. This is therefore effective in achieving both a reduction in the opening OP1 for installing the robot 2 in the chamber 90 and ease of installation of the robot 2 in the chamber 90.

[0023] The chamber 90 may further include a second opening OP2, smaller than the opening OP1, provided on the top plate 91, and a cover member 98 that closes the second opening OP2. By making the articulated arm 3 accessible from above into the transfer space S01 while preventing dust from entering the chamber 90, the maintainability of the robot 2 can be improved. When viewed from vertically above, at least a portion of the second opening OP2 may overlap with the articulated arm 3. The maintainability of the robot 2 can be further improved.

[0024] 1, the length L1 of the flange 30 in the longitudinal direction D1 may be greater than the length L2 of the first link 50. This allows the shape and layout of the flange 30 to be better matched to the opening OP1 of a necessary and sufficient size and shape. The width W1 of the flange 30 may be less than the length L2 of the first link 50. This allows the shape and layout of the flange 30 to be better matched to the opening OP1 of a necessary and sufficient size and shape.

[0025] The longitudinal direction D11 of the chamber 90 and the longitudinal direction D1 of the flange 30 may be aligned. This can prevent the chamber 90 from being enlarged in order to provide the opening OP1. Aligning includes being parallel to each other, for example.

[0026] The first axis Ax1 may be located closer to the side wall 96 (first side wall) between the side wall 96 (first side wall) and the side wall 97 (second side wall). The first axis Ax1 may be located closer to the side wall 97 (first side wall) between the side wall 97 (first side wall) and the side wall 96 (second side wall). This makes it possible to reduce the size of the chamber 90 while increasing the range of movement of the robot 2.

[0027] The length L2 of the first link 50 may be smaller than the distance W11 between the side walls 96 and 97, and may be larger than half the distance W11. This makes it possible to further reduce the size of the chamber 90 while increasing the range of motion of the robot 2.

[0028] 2 and 3, the robot 2 may further include a plurality of legs 5. The plurality of legs 5 protrude downward from a plurality of points on the flange 30 surrounding the base 10. In the illustrated example, the robot 2 includes four legs 5, but the number of legs 5 is not limited to this. As long as the plurality of legs 5 can stand on the floor surface and support the flange 30, the number and layout of the legs 5 can be changed as appropriate.

[0029] Before being installed in the chamber 90, the robot 2 can be supported by the legs 5 so that the base 10 does not touch the ground. Therefore, the maintainability of the robot 2 can be improved.

[0030] 4, each of the multiple actuators 40 may be disposed at a joint J10 to be driven. Disposed at the joint J10 means disposed at a position through which an axis that is the center of motion of the joint J10 passes. For example, the arm actuator 41 is disposed at a position through which the first axis Ax1 of the first joint J11 passes, the arm actuator 42 is disposed at a position through which the second axis Ax2 of the second joint J12 passes, and the hand actuator 43 is disposed at a position through which the third axis Ax3 of the third joint J13 passes.

[0031] Each of the actuators 40 may include a motor such as an electric servo motor. The motor included in each of the actuators 40 may be a direct drive motor.

[0032] The "direct drive motor" in the robot 2 is a motor in which a rotor, which rotates by being directly affected by a rotating magnetic field, is fixed to the link of the articulated arm 3, which is the object to be driven. The rotor is not limited to being fixed directly to the link, and may be fixed via another member. At the very least, it is sufficient that the link and the rotor are fixed to each other so that they do not move relative to each other.

[0033] According to a configuration in which the motors included in each of the multiple actuators 40 are direct drive motors, each joint J10 is driven without the intervention of a movable transmission element such as a gear or a belt, which is effective in improving the positioning accuracy of the substrate W.

[0034] For example, the arm actuator 41 includes an arm motor 101 (base motor, first arm motor) which is a direct drive motor, the arm actuator 42 includes an arm motor 201 (second arm motor) which is a direct drive motor, and the hand actuator 43 includes a hand motor 301 which is a direct drive motor.

[0035] The robot 2 may further include a wiring space S10 and a cable C10. The wiring space S10 is sealed inside the chamber 90 (inside the transfer space S01) and is formed inside the articulated arm 3 so as to communicate with the outside of the chamber 90. The cable C10 is wired from outside the transfer space S01 to an actuator 40 located inside the transfer space S01 among the multiple actuators 40 through the wiring space S10. Even when the transfer space S01 is evacuated, the wiring space S10 is kept at the same air pressure as outside the transfer space S01, so that gas generation from the cable C10 into the transfer space S01 is suppressed.

[0036] The wiring space S10 being sealed in the transport space S01 means that the wiring space S10 is airtightly isolated from the outside of the wiring space S10 in the transport space S01. For example, the wiring space S10 includes an internal space 11 of the base 10, an internal space 52 of the first link 50, and an internal space 62 of the second link 60. The internal space 11, the internal space 52, and the internal space 62 are in communication with each other, and the internal space 11 is in communication with the outside of the transport space S01. The robot 2 may include a plurality of cables C10 that are wired from a controller outside the transport space S01 to the plurality of actuators 40 via the wiring space S10.

[0037] Each of the multiple joints J10 connects a base side link connected to the base 10 and a hand side link connected to the hand 20 in the multi-joint arm 3. Connecting to the base 10 includes connecting to the base 10 via another link. Connecting to the hand 20 includes connecting to the hand 20 via another link. The base side link connected to the base 10 includes the base 10 itself. The hand side link connected to the hand 20 includes the hand 20 itself.

[0038] For example, the first joint J11 connects the base 10 (base side link) and the first link 50 (hand side link). The second joint J12 connects the first link 50 (base side link) and the second link 60 (hand side link). The third joint J13 connects the second link 60 (base side link) and the hand 20 (hand side link).

[0039] The motor included in each of the multiple actuators 40 has a stator fixed to the base side link and an output shaft fixed to the hand side link and rotates around the axis of the joint J10 by a rotating magnetic field generated by the stator.

[0040] For example, the arm motor 101 has a stator 115 fixed to the base 10 and an output shaft 120 fixed to the first link 50 and rotated around the first axis Ax1 of the first joint J11 by the rotating magnetic field generated by the stator 115. The arm motor 201 has a stator 215 fixed to the first link 50 and an output shaft 220 fixed to the second link 60 and rotated around the second axis Ax2 of the second joint J12 by the rotating magnetic field generated by the stator 215. The hand motor 301 has a stator 342 fixed to the second link 60 and an output shaft 350 fixed to the hand 20 and rotated around the third axis Ax3 of the third joint J13 by the rotating magnetic field generated by the stator 342. By fixing the stator of each motor to the hand-side link, the wiring path to each motor can be shortened. Shortening the wiring path to each motor also contributes to further suppression of gas generation from each cable C10.

[0041] The arm motor 101 may further have a through hole 123 that penetrates the output shaft 120 and becomes part of the wiring space S10. The arm motor 201 may further have a through hole 223 that penetrates the output shaft 220 and becomes part of the wiring space S10. By using the through holes 123 and 223 as part of the wiring space S10, it is possible to form the wiring space S10 while preventing the multi-joint arm 3 from becoming large.

[0042] The articulated arm 3 may further have a second hand 70 that rotates about a third axis Ax3 (hand axis) common to the hand 20. The second hand 70, like the hand 20, supports the substrate W horizontally.

[0043] The hand motor 301 may be a two-axis direct drive motor that independently rotates the hand 20 and the second hand 70. This makes it possible to achieve both high positioning accuracy and compact size.

[0044] Further examples of configurations of the arm motor 101 (first arm motor) and its periphery, the arm motor 201 (second arm motor) and its periphery, and the hand motor 301 and its periphery will be described below.

[0045] [First arm motor] As shown in FIG. 5, the base 10 has a base housing 12 including an internal space 11 that opens upward. The flange 30 is attached to the base housing 12 so as to close the opening of the internal space 11 upward, and protrudes outward from the base housing 12 over the entire circumference. The arm motor 101 is provided in the internal space 11 of the base 10 below the flange 30. The arm motor 101 is provided in the internal space 11 below the flange 30. The arm motor 101 is a radial gap motor, and has a main body 110, an output shaft 120, bearings 124 and 125, a motor cover 116, and a rotation sensor 150. The output shaft 120 protrudes upward from within the internal space 11, penetrates the flange 30, and is fixed to the first link 50. For example, the flange 30 includes an opening 33 that opens upward and downward, and the output shaft 120 protrudes outside the internal space 11 through the opening 33 and is fixed to the first link 50. The main body 110 is fixed to the base 10 within the internal space 11, and rotates the output shaft 120 about the first axis line Ax1 by a rotating magnetic field about the first axis line Ax1.

[0046] The main body 110 has a motor housing 111, a fixed shaft 112, a through hole 114, and a stator 115. The motor housing 111 opens upward and downward, houses other components of the main body 110, and is fixed to the base 10. The fixed shaft 112 is disposed in the motor housing 111 and is fixed to the motor housing 111 so as to extend along a first axis Ax1. For example, the fixed shaft 112 includes a flange 113 that extends outward beyond the inner circumference of the motor housing 111 around its entire circumference below the motor housing 111, and the flange 113 is fixed to the motor housing 111 by bolting or the like.

[0047] The fixed shaft 112 may include a through hole 114 that opens upward and downward along the first axis Ax1. The stator 115 is cylindrical and is housed in the motor housing 111 so as to surround the fixed shaft 112. The stator 115 includes a yoke fixed to the inner circumferential surface of the motor housing 111 by, for example, shrink fitting, and a plurality of coils that are provided on the yoke so as to surround the fixed shaft 112 and generate a rotating magnetic field in response to the supply of electric power.

[0048] The output shaft 120 has a rotor 121 and a protruding shaft 122. The rotor 121 is cylindrical and is accommodated in the motor housing 111 so as to surround the fixed shaft 112 on the inner side of the stator 115. The rotor 121 includes, for example, a core and a plurality of permanent magnets provided in the core so as to surround the fixed shaft 112. The rotor 121 and the stator 115 face each other in a radial direction perpendicular to the first axis Ax1 and are directly affected by the rotating magnetic field generated by the stator 115.

[0049] The protruding shaft 122 is fixed to the upper end of the rotor 121, protrudes upward, and penetrates the flange 30 to be fixed to the first link 50. The arm motor 101 may have a through hole 123 that penetrates the protruding shaft 122 along the first axis Ax1 and communicates between the internal space 11 of the base 10 and the internal space 52 of the first link 50.

[0050] For example, the first link 50 has an opening 53 that connects the through hole 123 to the internal space 52. The through hole 123 also connects to the internal space 11 of the base 10 via the through hole 114. As a result, the through hole 123 and the through hole 114 become part of the wiring space S10, and the internal space 52 of the first link 50 and the internal space 11 of the base 10 communicate with each other.

[0051] The bearings 124, 125 are, for example, ball-type radial bearings, and are arranged vertically between the outer circumferential surface of the fixed shaft 112 and the inner circumferential surface of the rotor 121. Each of the bearings 124, 125 is held by the fixed shaft 112 and holds the rotor 121 so as to rotate about the first axis Ax1.

[0052] The motor cover 116 closes the upward opening of the motor housing 111 at the outer periphery of the protruding shaft 122. The motor cover 116 extends from the protruding shaft 122 to outside the inner periphery of the motor housing 111 all around on the motor housing 111, and is fixed to the motor housing 111 from above by bolts or the like.

[0053] The rotation sensor 150 detects the rotation of the output shaft 120. For example, the rotation sensor 150 is a rotary encoder, and has a disk 151 and a sensor head 152 provided in the motor housing 111. The disk 151 holds a pulse pattern arranged in a circumferential direction around the first axis Ax1, and is attached under the rotor 121. The sensor head 152 is an optical sensor that reads the pulse pattern of the disk 151 at a fixed position in the motor housing 111. The sensor head 152 generates a pulse signal according to the read pulse pattern. The sensor head 152 is attached to, for example, a flange 113 of the fixed shaft 112. For example, the rotation sensor 150 outputs detection data representing the rotation position (rotation angle) of the output shaft 120 as a detection result of the rotation of the output shaft 120 based on a count result of the pulse signal generated by the sensor head 152.

[0054] The robot 2 may further include a hand-side seal member 130 for sealing between the first link 50 (hand-side link) and the protruding shaft 122, and a base-side seal member 140 for sealing between the base 10 (base-side link) and the protruding shaft 122, corresponding to the arm motor 101. The wiring space S10 can be easily sealed.

[0055] Sealing the gap between the first link 50 and the protruding shaft 122 means substantially preventing communication between the transport space S01 and the wiring space S10 via the gap between the first link 50 and the protruding shaft 122. Sealing the gap between the base 10 and the protruding shaft 122 means substantially preventing communication between the transport space S01 and the wiring space S10 via the gap between the base 10 and the protruding shaft 122. Communication between the transport space S01 and the wiring space S10 includes communication between the transport space S01 and the wiring space S10 via the outside of the transport space S01.

[0056] The hand side seal member 130 has a flange 131, an inner seal 132, and an outer seal 133. The flange 131 is attached to the end of the protruding shaft 122 by bolting or the like, extends beyond the inner circumference of the opening 53 of the first link 50 over its entire circumference, and is fixed to the first link 50 by bolting or the like. The flange 131 includes a through hole 134 that communicates between the opening 53 of the first link 50 and the through hole 123 of the protruding shaft 122.

[0057] The inner seal 132 seals between the protruding shaft 122 and the flange 131. The inner seal 132 is, for example, an O-ring, and is disposed between the protruding shaft 122 and the flange 131 so as to surround the through holes 123 and 134, and is in close contact with the protruding shaft 122 and the flange 131 over the entire circumference.

[0058] The outer seal 133 provides a seal between the first link 50 and the flange 131. The outer seal 133 is, for example, an O-ring, and is disposed between the flange 131 and the first link 50 so as to surround the opening 53 and the through-hole 134, and is in close contact with the flange 131 and the first link 50 over the entire circumference.

[0059] The base-side seal member 140 seals the gap between the flange 30 and the protruding shaft 122. Sealing the gap between the flange 30 and the protruding shaft 122 means that communication between the inside of the transfer space S01 and the inside of the wiring space S10 via the gap between the flange 30 and the protruding shaft 122 is substantially prevented.

[0060] The base side seal member 140 may include a mechanical seal that comes into close contact with the protruding shaft 122 while allowing rotation of the protruding shaft 122 relative to the base 10. The mechanical seal is a seal that seals between two members that rotate relative to each other. The mechanical seal has a fixed ring fixed to one member and a rotating ring fixed to the other member, and the contact surface between the fixed ring and the rotating ring seals between the one member and the other member while allowing the other member to rotate relative to the one member.

[0061] By employing a mechanical seal, the wiring space S10 can be sealed with small driving resistance, and therefore it is possible to achieve both high positioning accuracy and sealing of the wiring space S10.

[0062] The base side seal member 140 may be attached to the base 10 in a removable state separate from the main body 110. The base side seal member 140 may be worn due to friction with the protruding shaft 122, but the worn base side seal member 140 can be removed separately from the main body 110 and easily replaced. Therefore, the robot 2 is effective in suppressing gas generation in the chamber 90 while also being easy to maintain. A removable state means that it can be removed non-destructively by releasing the bolt fastening, for example.

[0063] For example, the base side seal member 140 has a cover 141, an outer seal 147, and an inner seal 148. The cover 141 is attached to the base 10 from the outside. For example, the cover 141 is attached to the flange 30. The outer seal 147 seals between the cover 141 and the base 10. The outer seal 147 seals between the cover 141 and the flange 30. The inner seal 148 seals between the cover 141 and the protruding shaft 122 while allowing the protruding shaft 122 to rotate relative to the cover 141. The inner seal 148 may be the above-mentioned mechanical seal. According to the configuration in which the base side seal member 140 has the cover 141, the outer seal 147, and the inner seal 148, it is possible to achieve both reliability of sealing and maintainability of the base side seal member 140.

[0064] Sealing between the cover 141 and the flange 30 with the outer seal 147 is not necessarily limited to closely contacting both the cover 141 and the flange 30. For example, sealing between the cover 141 and the flange 30 includes closely contacting the outer seal 147 with a separate member airtightly connected to the cover 141 and the flange 30. Sealing between the cover 141 and the protruding shaft 122 with the inner seal 148 is not necessarily limited to closely contacting both the cover 141 and the protruding shaft 122. For example, sealing between the cover 141 and the protruding shaft 122 includes closely contacting the inner seal 148 with a separate member airtightly connected to the cover 141 and the protruding shaft 122.

[0065] As an example, the cover 141 may be connected to the motor cover 116 in an airtight state, and the inner seal 148 may be in close contact with the motor cover 116 and the protruding shaft 122, thereby sealing the gap between the cover 141 and the protruding shaft 122. For example, when the inner seal 148 is the above-mentioned mechanical seal, the fixed ring of the inner seal 148 may be held in close contact with the inner periphery of the motor cover 116, and the rotating ring of the inner seal 148 may be held in close contact with the outer periphery of the protruding shaft 122.

[0066] The base 10 may have a motor holder 13 and a lifting actuator 14. A main body 110 is fixed to the motor holder 13. For example, a motor housing 111 is fixed to the motor holder 13. The lifting actuator 14 is fixed to the flange 30 in the internal space 11, and lifts and lowers the motor holder 13. This causes the main body 110 including the stator 115 to lift and lower. An example of the lifting actuator 14 is a ball screw type linear actuator.

[0067] The lifting actuator 14 lifts and lowers the main body 110, thereby lifting and lowering the arm 4 and the hand 20 in the transfer space S01. This makes it possible to transfer the substrate W between a source and a destination that are at different heights.

[0068] In the case where the base 10 has the lifting actuator 14, the cover 141 may be configured to expand and contract in response to the lifting and lowering of the main body 110 by the lifting actuator 14. It is possible to achieve both the mobility of the protruding shaft 122 in both the lifting and lowering directions and the rotational direction, and the sealing of the transfer space S01.

[0069] When the inner seal 148 is a mechanical seal, the cover 141 seals between the mechanical seal and the flange 30, and functions as a telescopic seal that expands and contracts as the main body 110 rises and falls together with the mechanical seal. As described above, the mechanical seal has a fixed ring and a rotating ring, the fixed ring is fixed to the cover 141, and the rotating ring is fixed to the protruding shaft 122. Since the fixed ring and the rotating ring need to be kept in contact with each other, the rotating ring in close contact with the protruding shaft 122 cannot be raised and lowered relative to the fixed ring in close contact with the cover 141. When the cover 141 functions as a telescopic seal, the fixed ring in close contact with the cover 141 and the rotating ring in close contact with the protruding shaft 122 can be raised and lowered together by the expansion and contraction of the cover 141.

[0070] In this way, by combining a mechanical seal and an expandable seal, it is possible to seal the wiring space S10 while keeping the drive resistance in both the lifting and rotating directions small, thereby achieving both high positioning accuracy and sealing the wiring space S10.

[0071] For example, the cover 141 includes a first cover 142, a second cover 144, a middle seal 149, and an expandable portion 146. The first cover 142 surrounds the protruding shaft 122, extends from the protruding shaft 122 to outside the inner circumference of the opening 33 over the entire circumference, and is attached to the flange 30 from above by bolt fastening or the like. Attaching to the flange 30 from above includes attaching to the base 10 from the outside of the base 10 (base-side link).

[0072] The second cover 144 surrounds the protruding shaft 122 below the first cover 142, extends from the protruding shaft 122 to the outside of the inner circumference of the motor cover 116 over the entire circumference, and is attached to the motor cover 116 from above by fastening with bolts or the like. The outer diameter of the second cover 144 may be smaller than the inner diameter of the opening 33. This makes it possible to attach the entire cover 141 from above the flange 30 through the opening 33.

[0073] The outer seal 147 described above provides a seal between the first cover 142 and the flange 30. For example, the outer seal 147 is an O-ring, which is disposed between the first cover 142 and the flange 30 so as to surround the protruding shaft 122, and is in close contact with the first cover 142 over the entire circumference. The middle seal 149 provides a seal between the second cover 144 and the motor cover 116. For example, the middle seal 149 is an O-ring, which is disposed between the second cover 144 and the motor cover 116 so as to surround the protruding shaft 122, and is in close contact with the second cover 144 and the motor cover 116 over the entire circumference.

[0074] The expandable portion 146 is a bellows-shaped hose that surrounds the protruding shaft 122 between the first cover 142 and the second cover 144, and expands and contracts in response to the elevation of the main body 110 by the elevation actuator. The upper end of the expandable portion 146 is connected to the first cover 142 in an airtight state all around, and the lower end of the expandable portion 146 is connected to the second cover 144 in an airtight state all around.

[0075] The flange 30 may include a first flange 35, a second flange 36, an adjustment plate 37, and a plurality of fastening members 38. The first flange 35 faces the inside of the chamber 90 (transfer space S01). For example, the first flange 35 faces upward. The second flange 36 overlaps below the first flange 35 and faces outside the chamber 90. For example, the second flange 36 faces downward. The adjustment plate 37 is inserted between the first flange 35 and the second flange 36, and adjusts the inclination of the second flange 36 relative to the first flange 35. The plurality of fastening members 38 fasten the second flange 36 to the first flange 35.

[0076] The lift actuator 14 may be fixed to the second flange 36. The opening 33 may be formed to pass through both the first flange 35 and the second flange 36, and the protruding shaft 122 may pass through the second flange 36 and the first flange 35 and be fixed to the first link 50.

[0077] According to the configuration in which the second flange 36 is fastened to the first flange 35 via the adjustment plate 37, the adjustment plate 37 is partially disposed between the second flange 36 and the first flange 35, and the inclination of the second flange 36 relative to the first flange 35 can be adjusted by changing the position, shape, size, etc. of the adjustment plate 37. Since the lifting actuator 14 is fixed to the second flange 36, the installation posture of the robot 2 in the transfer space S01 can be adjusted by adjusting the inclination of the second flange 36 relative to the first flange 35. In this way, the flange 30 can be used to adjust the installation posture of the robot 2.

[0078] The base side seal member 140 may seal between the inner seal 148 and the first flange 35. For example, the first cover 142 is attached to the first flange 35 from above. The outer seal 147 is disposed between the first cover 142 and the first flange 35 so as to surround the protruding shaft 122, and is in close contact with the first cover 142 and the first flange 35 over the entire circumference.

[0079] Any change in the inclination of the second flange 36 relative to the first flange 35 can be easily absorbed by the expandable seal, and the sealability between the inside and outside of the transfer space S01 can be maintained.

[0080] The first flange 35 and the second flange 36 may each partition the base 10 from the arm 4 and the hand 20, and the first flange 35 may extend over the entire circumference from the periphery of the second flange 36. By providing each of the first flange 35 and the second flange 36 with an area that partitions the base 10 from the arm 4 and the base 10, it is possible to ensure a space for arranging the adjustment plate 37. Also, by not placing the second flange 36 inside the transfer space S01, it is possible to easily maintain the seal between the inside of the transfer space S01 and the outside of the transfer space S01.

[0081] [Second arm motor] 6, the second link 60 is located above the first link 50. The first link 50 includes an opening 54 that opens upward. At least a portion of the arm motor 201 is accommodated in the internal space 52 from above through the opening 54.

[0082] The arm motor 201 is a radial gap motor, and includes a main body 210, an output shaft 220, bearings 224, 225, and a rotation sensor 260. The output shaft 220 protrudes upward from the internal space 52 and is fixed to the second link 60. The main body 210 is fixed to the first link 50, and the output shaft 220 is rotated about the second axis Ax2 by a rotating magnetic field about the second axis Ax2.

[0083] The main body 210 has a motor housing 211, a fixed shaft 212, a through hole 214, a stator 215, and a motor seal 216. The motor housing 211 opens upward and downward, houses other components of the main body 210, and is fixed to the first link 50. For example, the motor housing 211 is attached to the first link 50 from above around the opening 54 by bolt fastening or the like. The fixed shaft 212 is disposed in the motor housing 211 and is fixed to the motor housing 211 so as to extend along the second axis Ax2. For example, the fixed shaft 212 includes a flange 213 that extends beyond the inner circumference of the motor housing 211 around the entire circumference under the motor housing 211, and the flange 213 is fixed to the motor housing 211 by bolt fastening or the like. The fixed shaft 212 may include a through hole 214 that opens upward and downward along the second axis Ax2.

[0084] Stator 215 is cylindrical and is housed in motor housing 211 so as to surround fixed shaft 212. Stator 215 includes a yoke fixed to the inner circumferential surface of motor housing 211 by, for example, shrink fitting, and a plurality of coils provided on the yoke so as to surround fixed shaft 212 and generate a rotating magnetic field in response to the supply of electric power.

[0085] The motor seal 216 provides a seal between the motor housing 211 and the first link 50. For example, the motor seal 216 is an O-ring that is disposed between the outer circumferential surface of the motor housing 211 and the inner circumferential surface of the opening 54 and is in close contact with the outer circumferential surface of the motor housing 211 and the inner circumferential surface of the opening 54 over the entire circumference.

[0086] The output shaft 220 has a rotor 221 and a protruding shaft 222. The rotor 221 is cylindrical and is accommodated in the motor housing 211 so as to surround the fixed shaft 212 on the inner side of the stator 215. The rotor 221 includes, for example, a core and a plurality of permanent magnets provided in the core so as to surround the fixed shaft 212. The rotor 221 faces the stator 215 in a radial direction perpendicular to the second axis Ax2, and is directly affected by the rotating magnetic field generated by the stator 215.

[0087] The protruding shaft 222 is fixed to an upper end of the rotor 221, protrudes upward, and is fixed to the second link 60. The arm motor 201 may have a through hole 223 that passes through the protruding shaft 222 along the second axis Ax2 and communicates between the internal space 52 of the first link 50 and the internal space 62 of the second link 60.

[0088] For example, the second link 60 has an opening 63 that connects the through hole 223 to the internal space 62. The through hole 223 also connects to the internal space 11 of the base 10 via the through hole 214. As a result, the through hole 223 and the through hole 214 become part of the wiring space S10, and the internal space 62 of the second link 60 and the internal space 52 of the first link 50 communicate with each other.

[0089] The bearings 224, 225 are, for example, ball-type radial bearings, and are arranged vertically between the outer circumferential surface of the fixed shaft 212 and the inner circumferential surface of the rotor 221. Each of the bearings 224, 225 is held by the fixed shaft 212 and holds the rotor 221 so as to rotate about the second axis Ax2.

[0090] The rotation sensor 260 detects the rotation of the output shaft 220. For example, the rotation sensor 260 has a disk 261 and a sensor head 262 provided in the motor housing 211. The disk 261 holds a pulse pattern arranged in the circumferential direction around the second axis Ax2, and is attached under the rotor 221. The sensor head 262 is an optical sensor that reads the pulse pattern of the disk 261 at a fixed position in the motor housing 211. The sensor head 262 generates a pulse signal according to the read pulse pattern. The sensor head 262 is attached to, for example, the flange 213 of the fixed shaft 212. For example, the rotation sensor 260 outputs detection data indicating the rotation position (rotation angle) of the output shaft 220 as a detection result of the rotation of the output shaft 220 based on a count result of the pulse signal generated by the sensor head 262.

[0091] The robot 2 may further include a hand-side seal member 230 for sealing between the second link 60 (hand-side link) and the protruding shaft 222, and a base-side seal member 240 for sealing between the first link 50 (base-side link) and the protruding shaft 222, corresponding to the arm motor 201. The wiring space S10 can be easily sealed.

[0092] Sealing the gap between the second link 60 and the protruding shaft 222 means substantially preventing communication between the transport space S01 and the wiring space S10 via the gap between the second link 60 and the protruding shaft 222. Sealing the gap between the first link 50 and the protruding shaft 222 means substantially preventing communication between the transport space S01 and the wiring space S10 via the gap between the first link 50 and the protruding shaft 222.

[0093] The hand side seal member 230 has an edge seal 231. The edge seal 231 is, for example, an O-ring, and is disposed between the protruding shaft 222 and the second link 60 so as to surround the through hole 223 and the opening 63, and is in close contact with the protruding shaft 222 and the second link 60 over the entire circumference.

[0094] The base side seal member 240 seals between the first link 50 and the protruding shaft 222. Sealing between the first link 50 and the protruding shaft 222 means that communication between the inside of the conveying space S01 and the inside of the conveying space S01 via the gap between the first link 50 and the protruding shaft 222 is substantially prevented.

[0095] The base side seal member 240 may include a mechanical seal that adheres closely to the protruding shaft 222 while allowing the protruding shaft 222 to rotate relative to the first link 50. By employing a mechanical seal, the wiring space S10 can be sealed with a small driving resistance. Therefore, it is possible to achieve both high positioning accuracy and sealing of the wiring space S10. Sealing between the first link 50 and the protruding shaft 222 is not necessarily limited to adhering the base side seal member 240 to both the first link 50 and the protruding shaft 222. For example, sealing between the first link 50 and the protruding shaft 222 includes adhering the base side seal member 240 to a separate member connected to the first link 50 in an airtight state and to the protruding shaft 222.

[0096] As described above, the motor housing 211 is airtightly connected to the first link 50 by the motor seal 216. Therefore, the base side seal member 240 may seal the gap between the first link 50 and the protruding shaft 222 by being in close contact with the motor housing 211 and the protruding shaft 222.

[0097] The base side seal member 240 may be attached to the first link 50 in a removable state separately from the main body 210. The base side seal member 240 may be worn down due to friction with the protruding shaft 122, but the worn base side seal member 240 can be easily removed separately from the main body 210 and replaced. Therefore, the robot 2 is effective in suppressing gas generation in the chamber 90 while also being easy to maintain.

[0098] For example, the base side seal member 240 has a cover 241, an outer seal 243, and an inner seal 244. The cover 241 is attached to the first link 50 from the outside.

[0099] The outer seal 243 provides a seal between the cover 241 and the first link 50. The inner seal 244 provides a seal between the cover 241 and the protruding shaft 222 while allowing rotation of the protruding shaft 222 relative to the cover 241. By configuring the base-side seal member 240 to include the cover 241, the outer seal 243, and the inner seal 244, it is possible to achieve both reliable sealing and ease of maintenance of the base-side seal member 240.

[0100] Attaching the cover 241 to the first link 50 is not necessarily limited to attaching the cover 241 directly to the first link 50. For example, attaching the cover 241 to the first link 50 includes attaching the cover 241 to a separate member fixed to the first link 50. For example, the cover 241 surrounds the protruding shaft 222, extends outside the inner circumference of the motor housing 211 over the entire circumference, and is attached to the motor housing 211 from above by bolting or the like.

[0101] Sealing the gap between the cover 241 and the first link 50 with the outer seal 243 is not necessarily limited to tightly contacting the outer seal 243 with both the cover 241 and the first link 50. For example, sealing the gap between the cover 241 and the first link 50 includes tightly contacting the outer seal 243 with a separate member airtightly connected to the first link 50 and the cover 241. For example, the outer seal 243 is an O-ring, and is disposed between the motor housing 211 and the cover 241 so as to surround the protruding shaft 222, and is tightly contacted with the motor housing 211 and the cover 241 around the entire circumference.

[0102] The inner seal 244 is disposed between the outer circumferential surface and the inner circumferential surface of the protruding shaft 222, and is in close contact with the cover 241 and the protruding shaft 222 over the entire circumference. For example, the inner seal 244 is the above-mentioned mechanical seal, and the fixed ring of the inner seal 244 is held so as to be in close contact with the inner circumferential surface of the cover 241, and the rotating ring of the inner seal 244 is held so as to be in close contact with the outer circumferential surface of the protruding shaft 222.

[0103] The sealing between the cover 241 and the protruding shaft 222 by the inner seal 244 is not necessarily limited to the inner seal 244 being tightly attached to both the cover 241 and the protruding shaft 222. For example, the sealing between the cover 241 and the protruding shaft 222 includes the inner seal 244 being tightly attached to a separate member connected to the cover 241 in an airtight state and the protruding shaft 222.

[0104] The cover 241 bulges out from the first link 50 (first link) toward the second link 60 (second link), and the position of the outer seal 243 may be farther from the first link 50 than the position of the inner seal 244 in the direction along the second axis Ax2. The sealing margin by the outer seal 243 and the sealing margin by the inner seal 244 can be ensured independently of each other. Therefore, it is possible to further achieve both the reliability of the sealing and the maintainability of the base side seal member 240.

[0105] The second link 60 may further include a recess 65. The recess 65 opens toward the first link 50 and receives the cover 241 protruding from the first link 50. This makes it possible to prevent the robot 2 from becoming large due to the sealing member.

[0106] The first link 50 may further have an opening 56. The opening 56 exposes the through hole 223 to the outside in the opposite direction (downward) from the side where the second link 60 is located. The articulated arm 3 may further have a back cover 251 that closes the opening 56. The articulated arm 3 may further have a back seal member 250 that closes the opening 56 so as to seal the through hole 223 within the internal space 52. By removing the back seal member 250, cables and the like can be easily wired from the through hole 223 into the first link 50.

[0107] The back seal member 250 has a back cover 251 and a cover seal 253. The back cover 251 extends outward beyond the inner periphery of the opening 56 over the entire circumference to close the opening 56 from below, and is attached to the first link 50 by bolt fastening or the like. The cover seal 253 seals between the back cover 251 and the first link 50. The cover seal 253 is, for example, an O-ring, and is disposed between the first link 50 and the back cover 251 so as to surround the opening 56, and is in close contact with the first link 50 and the back cover 251 over the entire circumference.

[0108] The back cover 251 may have a recess 252 facing toward the inside of the first link 50. The recess 252 communicates between the through hole 223 and the internal space 52 of the first link 50. By forming a part of the wiring space S10 in the back cover 251 as well, it is possible to further reduce the space required for the arm 4.

[0109] [Hand motor] 7, the hand 20 is disposed above the second link 60, and the second hand 70 is disposed above the hand 20. The hand motor 301 may have an output shaft 350 (first output shaft), a stator 342 (first stator) that rotates the hand 20 about a third axis Ax3 (hand axis) by applying a rotating magnetic field to the output shaft 350, an output shaft 320 (second output shaft) that penetrates the output shaft 350 along the third axis Ax3, and a stator 315 (second stator) that rotates the second hand 70 about the third axis Ax3 by applying a rotating magnetic field to the output shaft 320.

[0110] By utilizing the inside of output shaft 350 as a space for arranging output shaft 320, hand motor 301 can be further reduced in size.

[0111] The stator 342 and the stator 315 may be fixed to the second link 60 (base side link), the output shaft 350 may be fixed to the hand 20, the output shaft 320 may pass through the output shaft 350 and the hand 20 and be fixed to the second hand 70, and the stator 342 may be located between the hand 20 and the stator 315. This allows the hand motor 301 to be further miniaturized.

[0112] The hand motor 301 may have a first bearing that is held by the second link 60 and holds the output shaft 320 or the output shaft 350 so as to rotate about the third axis Ax3, and a second bearing that is held by the output shaft 320 between the outer periphery of the output shaft 320 and the inner periphery of the output shaft 350 and holds the output shaft 350 so as to rotate about the third axis Ax3.

[0113] For example, the hand motor 301 has bearings 323, 324 (first bearings) that are held by the second link 60 and hold the output shaft 320 so that it rotates around the third axis Ax3, and bearings 355, 356 (second bearings) that are held by the output shaft 320 and hold the output shaft 350 so that it rotates around the third axis Ax3.

[0114] By utilizing the space between the output shaft 350 and the output shaft 320 as a bearing arrangement space and holding the output shaft 350 and the output shaft 320 together, it is possible to achieve both compactness and rigidity in the drive system of the multiple stages of hands 20 and the second hand 70.

[0115] The stator 342 may be attached to the second link 60 from the side where the hand 20 and the second hand 70 are arranged (e.g., above), and the stator 315 may be attached to the second link 60 from the side opposite to the side where the hand 20 and the second hand 70 are arranged (e.g., below). By making it possible to attach the stator 315 and the stator 342 from different directions, the ease of assembly of the robot 2 can be improved.

[0116] The hand motor 301 may further have a fixed shaft 312 fixed to the second link 60 and inserted into the output shaft 320 along the third axis Ax3, and the bearings 323, 324 may be held by the fixed shaft 312 between the outer periphery of the fixed shaft 312 and the inner periphery of the output shaft 320 to hold the output shaft 320.

[0117] Hand motor 301 may be a radial gap motor. For example, output shaft 320 may face stator 315 in a radial direction perpendicular to third axis Ax3 and receive a rotating magnetic field from stator 315. Output shaft 350 may face stator 342 in the radial direction and receive a rotating magnetic field from stator 342.

[0118] As an example, hand motor 301 has a body 310, an output shaft 320, bearings 323 and 324, a rotation sensor 330, a body 340, an output shaft 350, bearings 355 and 356, and a rotation sensor 360. Second link 60 includes an opening 68 that opens downward. At least a portion of body 310 is accommodated in internal space 62 from below through opening 68.

[0119] The main body 310 has a motor housing 311, a fixed shaft 312, a stator 315, a motor seal 316, and a motor seal 317. The motor housing 311 opens upward and downward, houses other components of the main body 310, and is fixed to the second link 60. For example, the motor housing 311 is attached to the second link 60 from below around the opening 68 by bolt fastening or the like. The fixed shaft 312 is disposed in the motor housing 311 and is fixed to the motor housing 311 so as to extend along the third axis Ax3. For example, the fixed shaft 312 includes a flange 313 that extends beyond the inner circumference of the motor housing 311 around the entire circumference under the motor housing 311, and the flange 313 is fixed to the motor housing 311 by bolt fastening or the like.

[0120] Stator 315 is cylindrical and is housed in motor housing 311 so as to surround fixed shaft 312. Stator 315 includes a yoke fixed to the inner circumferential surface of motor housing 311 by, for example, shrink fitting, and a plurality of coils provided on the yoke so as to surround fixed shaft 312 and generate a rotating magnetic field in response to the supply of electric power.

[0121] The motor seal 316 provides a seal between the motor housing 311 and the second link 60. For example, the motor seal 316 is an O-ring, and is disposed between the second link 60 and the motor housing 311 so as to surround the opening 68, and is in close contact with the second link 60 and the motor housing 311 over the entire circumference. The motor seal 317 provides a seal between the motor housing 311 and the flange 313. For example, the motor seal 317 is an O-ring, and is disposed between the motor housing 311 and the flange 313 so as to surround the fixed shaft 312, and is in close contact with the motor housing 311 and the flange 313 over the entire circumference.

[0122] The output shaft 320 has a rotor 321 and a protruding shaft 322. The rotor 321 is cylindrical and is accommodated in the motor housing 311 so as to surround the fixed shaft 312 on the inner side of the stator 315. The rotor 321 includes, for example, a core and a plurality of permanent magnets provided in the core so as to surround the fixed shaft 312. The rotor 321 faces the stator 315 in a radial direction perpendicular to the third axis Ax3, and is directly affected by the rotating magnetic field generated by the stator 315. The protruding shaft 322 is fixed to an upper end of the rotor 321, protrudes upward, and is fixed to the second hand 70.

[0123] The bearings 323, 324 are, for example, ball-type radial bearings, and are arranged vertically between the outer circumferential surface of the fixed shaft 312 and the inner circumferential surface of the rotor 321. Each of the bearings 323, 324 is held by the fixed shaft 312 and holds the rotor 321 so as to rotate about the third axis Ax3.

[0124] The rotation sensor 330 detects the rotation of the output shaft 320. For example, the rotation sensor 330 is a rotary encoder, and has a disk 331 and a sensor head 332 provided in the motor housing 311. The disk 331 holds a pulse pattern arranged in the circumferential direction around the third axis Ax3, and is attached under the rotor 321. The sensor head 332 is an optical sensor that reads the pulse pattern of the disk 331 at a fixed position in the motor housing 311. The sensor head 332 generates a pulse signal according to the read pulse pattern. The sensor head 332 is attached to, for example, a flange 313 of the fixed shaft 312. For example, the rotation sensor 330 outputs detection data representing the rotation position (rotation angle) of the output shaft 320 as a detection result of the rotation of the output shaft 320 based on a count result of the pulse signal generated by the sensor head 332.

[0125] The second link 60 further includes an opening 69 that opens upward. At least a portion of the main body 340 is accommodated in the internal space 62 from above through the opening 69.

[0126] The main body 340 has a motor housing 341, a stator 342, and a motor seal 343. The motor housing 341 opens upward and downward, accommodates other components of the main body 310 and the protruding shaft 322 of the output shaft 320, and is fixed to the second link 60. For example, the motor housing 341 is attached to the second link 60 from above around the opening 69 by bolting or the like.

[0127] The stator 342 is cylindrical and is housed in the motor housing 341 so as to surround the protruding shaft 322. The stator 342 includes a yoke fixed to the inner circumferential surface of the motor housing 341 by, for example, shrink fitting, and a plurality of coils provided on the yoke so as to surround the protruding shaft 322 and generate a rotating magnetic field in response to the supply of electric power.

[0128] The motor seal 343 provides a seal between the motor housing 341 and the second link 60. For example, the motor seal 343 is an O-ring, which is disposed between the second link 60 and the motor housing 341 so as to surround the opening 69, and is in close contact with the second link 60 and the motor housing 341 over the entire circumference.

[0129] The output shaft 350 has a rotor 351 and a protruding shaft 352. The rotor 351 is cylindrical and is accommodated in the motor housing 341 so as to surround the protruding shaft 322 on the inner side of the stator 342. The rotor 351 includes, for example, a core and a plurality of permanent magnets provided in the core so as to surround the protruding shaft 322. The rotor 351 faces the stator 342 in a radial direction perpendicular to the third axis Ax3 and is directly affected by the rotating magnetic field generated by the stator 342.

[0130] The protruding shaft 352 is cylindrical and surrounds the protruding shaft 322 between the hand 20 and the rotor 351. The protruding shaft 352 is fixed to the upper end of the rotor 351, protrudes upward, and is fixed to the hand 20.

[0131] The bearings 355, 356 are, for example, ball-type radial bearings, and are arranged vertically between the inner circumferential surface of the protruding shaft 352 and the outer circumferential surface of the protruding shaft 322. Each of the bearings 355, 356 is held by the protruding shaft 322 and holds the rotor 351 so as to rotate about the third axis Ax3.

[0132] The rotation sensor 360 detects the rotation of the output shaft 350. For example, the rotation sensor 360 is a rotary encoder and has a disk 361 and a sensor head 362. The disk 361 holds a pulse pattern arranged in a circumferential direction around the third axis Ax3, and is attached below the rotor 351. The sensor head 362 is an optical sensor that reads the pulse pattern of the disk 361 at a fixed position in the main body 340. The sensor head 362 generates a pulse signal corresponding to the read pulse pattern. The sensor head 362 is attached to, for example, the motor housing 311 of the main body 310. For example, the rotation sensor 360 outputs detection data indicating the rotation position (rotation angle) of the output shaft 350 as a detection result of the rotation of the output shaft 350 based on a count result of the pulse signal generated by the sensor head 362.

[0133] Robot 2 may further include a first hand seal member 370 and a second hand seal member 380 corresponding to hand motor 301.

[0134] The first hand seal member 370 seals between the second link 60 and the protruding shaft 352 so as to seal the wiring space S10 in the transfer space S01. The first hand seal member 370 may be attached to the second link 60 in a removable state separately from the main body 340. The first hand seal member 370 may be worn due to friction between the first hand seal member 370 and the protruding shaft 352, but the worn first hand seal member 370 can be removed separately from the main body 340 and easily replaced. Therefore, the robot 2 is effective in suppressing gas generation in the chamber 90 and maintaining the robot 2. Attaching the first hand seal member 370 to the second link 60 is not necessarily limited to attaching the first hand seal member 370 directly to the second link 60. For example, attaching the first hand seal member 370 to the second link 60 includes attaching the first hand seal member 370 to a separate member fixed to the second link 60. For example, the first hand seal member 370 is attached to the motor housing 341 from above.

[0135] For example, the first hand seal member 370 has an inner seal 371 and a seal cover 372. The inner seal 371 seals between the second link 60 and the protruding shaft 352. Sealing between the second link 60 and the protruding shaft 352 with the inner seal 371 is not necessarily limited to tightly contacting both the second link 60 and the protruding shaft 352. For example, sealing between the second link 60 and the protruding shaft 352 includes tightly contacting the inner seal 371 with a separate member connected in an airtight state to the second link 60 and the protruding shaft 352.

[0136] For example, the inner seal 371 is a mechanical seal, and a fixed ring of the inner seal 371 closely contacts the inner circumferential surface of the motor housing 341 that is airtightly connected to the second link 60, and a rotating ring of the inner seal 371 closely contacts the outer circumferential surface of the protruding shaft 352. The seal cover 372 covers the inner seal 371 from above around the protruding shaft 352, and is attached to the motor housing 341 by bolting or the like.

[0137] Second hand seal member 380 seals between protruding shaft 352 and protruding shaft 322 so as to seal wiring space S10 in transfer space S01. Second hand seal member 380 may be attached to protruding shaft 352 in a removable state separately from main body 310 and main body 340. This makes it possible to achieve both reliable sealing and ease of maintenance of second hand seal member 380.

[0138] For example, second hand seal member 380 may have second cover 381, second outer seal 386, and second inner seal 387. Second cover 381 is attached to rotor 321 while surrounding protruding shaft 322. Second outer seal 386 provides a seal between second cover 381 and protruding shaft 352. Second inner seal 387 provides a seal between second cover 381 and protruding shaft 322 while allowing rotation of protruding shaft 322 relative to second cover 381. This further improves both sealing reliability and maintainability of second hand seal member 380.

[0139] The second cover 381 may hold the hand 20. By using the second cover 381 as a holding member for the hand, the number of parts can be reduced.

[0140] For example, second cover 381 has fitting portion 382, ​​flange 383, and fitting portion 384. Fitting portion 382 fits into protruding shaft 352 from above. Flange 383 protrudes outward from the outer circumferential surface of fitting portion 382 over the entire circumference above fitting portion 382. Fitting portion 384 has an outer diameter smaller than flange 383 and protrudes further upward from flange 383.

[0141] The flange 383 is attached to the protruding shaft 352 by fastening with bolts or the like on the inside of the outer periphery of the fitting portion 384. The hand 20 has an opening 21 corresponding to the fitting portion 384. The fitting portion 384 fits into the opening 21 from below. The flange 383 is attached to the hand 20 by fastening with bolts or the like on the outside of the outer periphery of the fitting portion 384.

[0142] The second outer seal 386 provides a seal between the fitting portion 382 and the protruding shaft 352. The second outer seal 386 is, for example, an O-ring, and is disposed between the outer circumferential surface of the fitting portion 382 and the inner circumferential surface of the protruding shaft 352 over the entire circumference.

[0143] The second inner seal 387 is, for example, a mechanical seal, and the fixed ring of the second inner seal 387 is held so as to be in close contact with the inner surface of the second cover 381, and the rotating ring of the second inner seal 387 is held so as to be in close contact with the outer surface of the protruding shaft 322.

[0144] As illustrated above, by combining the first hand seal member 370 that seals between the second link 60 and the protruding shaft 352 and the second hand seal member 380 that seals between the protruding shaft 352 and the protruding shaft 322, it is possible to achieve both miniaturization of the drive system of the hand 20 and the second hand 70 and sealing of the wiring space S10.

[0145] [Modifications] 7 shows an example in which motor housing 341 of main body 340 is attached to second link 60 from above together with stator 342, and motor housing 311 of main body 310 is attached to second link 60 from below together with stator 315, but main body 310 and main body 340 may be integrated and attached to second link 60 from the same side. For example, 301 shown in FIG. 8 has motor housing 302 and motor seal 306 instead of motor housings 341, 311 and motor seal 343.

[0146] The motor housing 302 houses the stators 342, 315, the output shafts 350, 320, and the fixed shaft 312 to form a unit. The motor housing 302 is attached to the second link 60 from the side where the hand 20 and the second hand 70 are arranged. The motor housing 302 allows the drive system of the hand 20 and the drive system of the second hand 70 to be integrated and assembled to the second link 60, improving the ease of assembly.

[0147] The motor seal 306 provides a seal between the motor housing 302 and the second link 60. For example, the motor seal 306 is an O-ring, and is disposed between the second link 60 and the motor housing 302 so as to surround the opening 69, and is in close contact with the second link 60 and the motor housing 302 over the entire circumference.

[0148] Motor housing 302 may have a first housing 303, a second housing 305, and a plurality of fastening members 304. First housing 303 accommodates stator 342. Second housing 305 accommodates stator 315. The plurality of fastening members 304 are, for example, bolts, and fasten second housing 305 to first housing 303. Since second housing 305 can be attached to first housing 303 after assembling stator 342, etc. to first housing 303 and stator 315, etc. to second housing 305 separately, ease of assembly is further improved.

[0149] In at least one of the multiple actuators 40 that are direct drive motors, the stator may be embedded directly in the base side link or the hand side link. Fig. 9 illustrates a configuration in which the stator 215 is embedded directly in the first link 50 in an arm motor 201.

[0150] In the first link 50, an accommodation hole 57 that opens upward and downward is formed in place of the opening 54. In addition, next to the accommodation hole 57, an opening 58 that communicates with the internal space 52 downward is formed.

[0151] The stator 215 is accommodated in the accommodation hole 57 from above, and is fixed to the inner circumferential surface of the accommodation hole 57 by, for example, shrink fitting. The flange 213 of the fixed shaft 212 is attached to the first link 50 around the accommodation hole 57 by bolt fastening or the like.

[0152] The cover 241 of the base side seal member 240 is attached to the motor housing 211 by bolting or the like around the periphery of the accommodating hole 57. The outer seal 243 is in close contact with the first link 50 and the cover 241 around the entire circumference of the accommodating hole 57.

[0153] The back seal member 250 seals the entire periphery of the receiving hole 57 and the opening 58. When the back seal member 250 is attached to the first link 50, the recess 252 of the back cover 251 allows the protruding shaft 222 and the internal space 52 to communicate with each other.

[0154] If the stator were directly embedded in the link, it would be difficult to replace the motor itself, so it would be even more beneficial to be able to remove and replace the base side seal member 240 separately from the main body 210.

[0155] 9, the fixed shaft 212 is attached to the first link 50 in a removable state. The fixed shaft 212 stabilizes the posture of the protruding shaft 222, thereby improving the reliability of the sealing provided by the base side seal member 240. In addition, because the fixed shaft 212 is removable, the maintainability of the arm motor 201 is improved.

[0156] The fixed shaft 212 is attached to the first link 50 from the side opposite to where the second link 60 is located, and the back seal member 250 is attached to the first link 50 so as to seal the gap between the fixed shaft 212 and the protruding shaft 222 within the first link 50. This makes it possible to achieve both ease of attachment and detachment of the fixed shaft 212 and a sealable gap between the fixed shaft 212 and the protruding shaft 222.

[0157] 10 illustrates a configuration in which the stator 315 and the stator 342 are directly embedded in the second link 60 in the hand motor 301. The second link 60 has a first accommodating hole 611 and a second accommodating hole 612 instead of the openings 68 and 69. The first accommodating hole 611 opens toward the side where the hand 20 and the second hand 70 are arranged (upward) and receives the stator 342. The second accommodating hole 612 opens toward the side opposite to the side where the hand 20 and the second hand 70 are arranged (downward) and receives the stator 315. The second link 60 may further have an inward flange 613 that partitions the first accommodating hole 611 and the second accommodating hole 612 and surrounds the protruding shaft 322.

[0158] An opening 614 that communicates with the internal space 62 downward is formed next to the second accommodating hole 612. The opening 614 and the second accommodating hole 612 may be connected to each other.

[0159] The stator 342 is accommodated in the first accommodating hole 611 from above and is directly fixed to the inner surface of the first accommodating hole 611 by, for example, shrink fitting. The stator 315 is accommodated in the second accommodating hole 612 from below and is directly fixed to the inner surface of the second accommodating hole 612 by, for example, shrink fitting. By eliminating the motor housing 311 and the motor housing 341, the periphery of the hand motor 301 can be further reduced in size.

[0160] The flange 313 of the fixed shaft 312 is attached to the second link 60 around the second accommodating hole 612 by bolting or the like.

[0161] The first hand seal member 370 further includes a cover 373 and an outer seal 374. The cover 373 is attached to the second link 60 from the outside. The cover 373 surrounds the protruding shaft 322 and extends outward beyond the inner circumference of the first accommodating hole 611 over its entire circumference, and is attached to the second link 60 from above by bolting or the like.

[0162] The outer seal 374 seals between the cover 373 and the second link 60. For example, the outer seal 374 is an O-ring, and is disposed between the cover 373 and the second link 60 so as to surround the protruding shaft 352, and is in close contact with the cover 373 and the second link 60 over the entire circumference. The inner seal 371 seals between the cover 373 and the protruding shaft 352 while allowing the protruding shaft 352 to rotate relative to the cover 373. The seal cover 372 is attached to the cover 373 by bolting or the like.

[0163] The articulated arm 3 may further have a back seal member 390 that seals the second accommodating hole 612 and the opening 614. The back seal member 390 can easily seal the drive systems of the hand 20 and the second hand 70, which do not have the motor housings 311, 341. By removing the back seal member 390, it is possible to easily attach and detach the fixed shaft 312, wire the stators 315, 342, and wire the rotation sensors 330, 360, etc.

[0164] The back seal member 390 has a back cover 391 and a cover seal 393. The back cover 391 extends outward beyond the inner circumference of the second accommodating hole 612 and the opening 614 over the entire circumference to close the second accommodating hole 612 and the opening 614 from below, and is attached to the second link 60 by bolt fastening or the like. The cover seal 393 seals between the back cover 391 and the second link 60. The cover seal 393 is, for example, an O-ring, and is disposed between the second link 60 and the back cover 391 around the second accommodating hole 612 and the opening 614, and is in close contact with the second link 60 and the back cover 391 over the entire circumference.

[0165] The back cover 391 may have a recess 392 facing the inside of the second link 60. The recess 392 communicates between the bearing 323 and the internal space 62 of the second link 60. By forming a part of the wiring space S10 in the back cover 391 as well, it is possible to further reduce the space required for the arm 4.

[0166] Stator 342 (first stator) and stator 315 (second stator) may be disposed between rotation sensor 360 (first rotation sensor) and rotation sensor 330 (second rotation sensor). For example, rotation sensor 330 is provided below stator 315, and rotation sensor 360 is provided above stator 342. With stator 342 fixed to the inner surface of first accommodating hole 611 and stator 315 fixed to the inner surface of second accommodating hole 612, rotation sensor 360 and rotation sensor 330 can be easily assembled. This improves ease of assembly.

[0167] For example, disk 361 of rotation sensor 360 is attached to protruding shaft 352 above rotor 351, and is located inside cover 373. Sensor head 362 is attached to cover 373. Disk 331 of rotation sensor 330 is attached below rotor 321. Sensor head 332 is attached to flange 313. Ease of assembly can be further improved.

[0168] A first recess 621 that is partially separated from the stator 342 may be formed on the inner surface of the first accommodating hole 611, and a second recess 622 that is partially separated from the stator 315 may be formed on the inner surface of the second accommodating hole 612. A first sensor cable C21 may be wired to the rotation sensor 360 through the first recess 621. A second sensor cable C22 may be wired to the rotation sensor 330 through the second recess 622. It is possible to ensure wiring paths for the first sensor cable C21 and the second sensor cable C22 while preventing the second link 60 from becoming large.

[0169] 11, the robot 2 may have an axial gap type hand motor 701 instead of the radial gap type hand motor 301. By making the arm motors 101 and 201, which are subjected to a larger moment than the hand motor 701, the radial gap type, and making the hand motor 701, which is not subjected to a larger moment than the arm motors 101 and 201, the axial gap type, it is possible to achieve both high positioning accuracy and compact size.

[0170] The hand motor 701 has an output shaft 740 (first output shaft), a stator 731 (first stator) that rotates the hand 20 around a third axis Ax3 (hand axis) by applying a rotating magnetic field to the output shaft 740, an output shaft 720 (second output shaft) that passes through the output shaft 740 along the third axis Ax3, and a stator 711 (second stator) that rotates the second hand 70 around the third axis Ax3 by applying a rotating magnetic field to the output shaft 720.

[0171] The output shaft 740 faces the stator 731 along the third axis Ax3 (axial direction) and has a rotor 742 (first rotor) that receives a rotating magnetic field from the stator 731, and the output shaft 720 faces the stator 711 along the third axis Ax3 (axial direction) and has a rotor 722 (second rotor) that receives a rotating magnetic field from the stator 711. The drive system of the multiple stages of hands 20 and the second hand 70 can be made even lower in height.

[0172] The stator 731 and the stator 711 may be fixed to the second link 60 (base side link), the output shaft 740 may be fixed to the hand 20, the output shaft 720 may pass through the output shaft 740 and the hand 20 and be fixed to the second hand 70, and the stator 731 may be located between the hand 20 and the stator 711.

[0173] The hand motor 701 may have a first bearing that is held by the second link 60 and holds the output shaft 720 or the output shaft 740 so that it rotates around the third axis Ax3, and a second bearing that is held by the output shaft 720 between the outer periphery of the output shaft 720 and the inner periphery of the output shaft 740 and holds the output shaft 740 so that it rotates around the third axis Ax3.

[0174] For example, the hand motor 701 has a bearing 723 (first bearing) that is held by the second link 60 and holds the output shaft 720 so that it rotates around the third axis Ax3, and bearings 743, 744 (second bearings) that are held by the output shaft 720 and hold the output shaft 740 so that it rotates around the third axis Ax3.

[0175] By utilizing the space between the output shaft 740 and the output shaft 720 as a bearing arrangement space and holding the output shaft 740 and the output shaft 720 together, it is possible to achieve both compactness and rigidity in the drive system of the multiple stages of hands 20 and the second hand 70.

[0176] The hand motor 701 may further include a bearing 745 (third bearing) that is held by the second link 60 and holds the output shaft 740 so as to rotate about the third axis Ax3. This can further increase the rigidity.

[0177] In the direction along the third axis Ax3, the stator 731 may be located between the stator 711 and the hand 20, the rotor 742 and the rotor 722 may be located between the bearing 723 and the bearing 745, and the bearing 745 may be located between the bearing 723 and the bearings 743 and 744. This makes it possible to further achieve both compactness and rigidity.

[0178] The articulated arm 3 further includes a frame 750 located between the second link 60 and the hand 20 and second hand 70 and removably attached to the second link 60, and the stator 731 may be fixed to the second link 60 via the frame 750, and the stator 711 may be fixed directly to the second link 60. This makes it possible to further achieve both compactness and ease of assembly.

[0179] The bearings 723 and 745 may be cross roller bearings, and the bearings 743 and 744 may be radial bearings. This makes it possible to achieve both compactness and rigidity.

[0180] As an example, hand motor 701 has a main body 710, an output shaft 720, a bearing 723, a main body 730, an output shaft 740, bearings 743, 744, and a bearing 745. Main body 710 has a stator 711. Stator 711 has a yoke 712 and a plurality of coils 713. Yoke 712 is disk-shaped with an opening at the center, and is directly fixed to second link 60 by, for example, shrink fitting so as to surround third axis line Ax3. The plurality of coils 713 are arranged so as to surround third axis line Ax3, and are fixed onto yoke 712.

[0181] The output shaft 720 has a main shaft 721 and a rotor 722. The main shaft 721 protrudes upward along the third axis Ax3 and is fixed to the second hand 70 via the frame 750 and the hand 20. The rotor 722 has a core 724 and a plurality of permanent magnets 725. The core 724 protrudes in a flange shape from the main shaft 721 over the entire circumference on the stator 711. The plurality of permanent magnets 725 are disposed so as to surround the third axis Ax3 and are fixed below the core 724. The plurality of permanent magnets 725 face the plurality of coils 713 from above.

[0182] The bearing 723 is held by the second link 60 and holds the main shaft 721 so as to rotate about the third axis Ax3. The bearing 723 is, for example, a cross roller bearing. The cross roller bearing incorporates a roller that receives a radial load perpendicular to the third axis Ax3, and a roller that receives an axial load along the third axis Ax3. The bearing 723 may be disposed at a height surrounded by the rotor 722.

[0183] The main body 730 has a stator 731. The stator 731 has a yoke 732 and a plurality of coils 733. The yoke 732 is disk-shaped with an opening at the center, and is fixed to the first link 50 by, for example, shrink fitting so as to surround the third axis line Ax3. The plurality of coils 733 are disposed so as to surround the third axis line Ax3, and are fixed below the yoke 732. The stator 731 is located above the stator 711 and the rotor 722, and surrounds the main shaft 721.

[0184] The output shaft 740 has a main shaft 741 and a rotor 742. The main shaft 741 surrounds the main shaft 721 above the rotor 722. The rotor 742 has a core 746 and a plurality of permanent magnets 747. The core 746 protrudes in a flange shape from the main shaft 741 around the entire circumference between the stator 731 and the rotor 722. The plurality of permanent magnets 747 are disposed so as to surround the third axis Ax3 and are fixed onto the core 746. The plurality of permanent magnets 747 face the plurality of coils 733 from below.

[0185] The bearings 743, 744 are, for example, ball-type radial bearings, and are arranged vertically between the inner circumferential surface of the main shaft 741 and the outer circumferential surface of the main shaft 721. Each of the bearings 743, 744 is held by the main shaft 721 and holds the main shaft 741 so as to rotate about the third axis Ax3.

[0186] The bearing 745 is held by the frame 750 and holds the main shaft 741 so as to rotate about the third axis Ax3. Being held by the frame 750 is included in being held by the second link 60. The bearing 745 is, for example, a cross roller bearing.

[0187] The rotor 742 and the rotor 722 may be located between the bearing 723 and the bearing 745, and the bearing 745 may be located between the bearing 723 and the bearings 743 and 744. This makes it possible to further achieve both miniaturization and rigidity.

[0188] 11 illustrates a configuration in which a third bearing is provided in addition to the first and second bearings in an axial gap type hand motor 701. A radial gap type hand motor 301 may be provided with a third bearing that is held by the second link 60 and holds the main shaft 741 so as to rotate about the third axis Ax3.

[0189] As shown in FIG. 12, the articulated arm 3 may further include a tube T10 and an air-cooling passage CR10 corresponding to a motor (for example, at least one of the arm motor 201 and the hand motor 301) located inside the chamber 90. The tube T10 is piped inside the wiring space S10 and guides air-cooling gas from the outside of the chamber 90. The air-cooling passage CR10 receives the gas guided by the tube T10 and sends it out to the inside of the wiring space S10 through the periphery of the motor. For example, the air-cooling passage CR10 for the arm motor 201 is formed in the first link 50, and the air-cooling passage CR10 for the hand motor 301 is formed in the second link 60. By effectively utilizing the wiring space S10 as an exhaust path for the air-cooling gas, the motors can be cooled with a small number of tubes T10.

[0190] 13, the robot 2 may further include environmental sensors 810, 820 that detect the environment in the wiring space S10. The environmental sensor 810 detects the environment of the internal space 52. The environmental sensor 820 detects the environment of the internal space 62. Examples of the environmental sensors 810, 820 include a temperature sensor, a humidity sensor, etc.

[0191] Each of the multiple sensors including the rotation sensors 150, 260, 330, and 360 and the environmental sensors 810 and 820 may have an upper port UP and a lower port LP, and may be configured to transmit the detection results by the sensor itself and information received at the lower port LP from the upper port UP. With this configuration, the rotation sensors 150, 260, 330, and 360 and the environmental sensors 810 and 820 may be daisy-chained by a series of cables C10 and connected to a robot controller 900 or the like disposed outside the chamber 90.

[0192] For example, the cable C10 includes a cable C11, a cable C12, a cable C13, a cable C14, a cable C15, and a cable C16. The cable C11 connects the upper port UP of the environment sensor 820 to the lower port LP of the rotation sensor 360. The cable C12 connects the upper port UP of the rotation sensor 360 to the lower port LP of the rotation sensor 330. The cable C13 connects the upper port UP of the rotation sensor 330 to the lower port LP of the environment sensor 810. The cable C14 connects the upper port UP of the environment sensor 810 to the lower port LP of the rotation sensor 260. The cable C15 connects the upper port UP of the rotation sensor 260 to the lower port LP of the rotation sensor 150. The cable C16 connects the upper port UP of the rotation sensor 150 to the robot controller 900. The above connection order is merely an example and can be changed in any way.

[0193] The environment sensor 820 transmits the detection result of the environment of the internal space 62 from the upper port UP. The rotation sensor 360 receives the detection result of the environment by the environment sensor 820 at the lower port LP via the cable C11, and transmits the detection result of the rotation of the output shaft 350 and the information received at the lower port LP from the upper port UP. The rotation sensor 330 receives the information transmitted from the rotation sensor 360 at the lower port LP via the cable C12, and transmits the detection result of the rotation of the output shaft 320 and the information received at the lower port LP from the upper port UP. The environment sensor 810 receives the information transmitted from the rotation sensor 330 at the lower port LP via the cable C13, and transmits the detection result of the environment of the internal space 52 and the information received at the lower port LP from the upper port UP. The rotation sensor 260 receives the information transmitted from the environment sensor 810 at the lower port LP via the cable C14, and transmits the detection result of the rotation of the output shaft 220 and the information received at the lower port LP from the upper port UP. The rotation sensor 150 receives information transmitted from the rotation sensor 260 at the lower port LP via the cable C15, and transmits the detection result of the rotation of the output shaft 120 and the information received at the lower port LP from the upper port UP. The robot controller 900 receives the information transmitted from the rotation sensor 150 via the cable C16.

[0194] In the above configuration, the environment sensor 820 is connected to the rotation sensor 360 via the cable C11 (sensor cable), and the rotation sensor 360 receives the detection result of the environment via the cable C11, and transmits both the detection result of the rotation and the detection result of the environment to the outside of the chamber 90 via the cables C12, C13, C14, C15, and C16. The environment sensor 810 is connected to the rotation sensor 260 via the cable C14 (sensor cable), and the rotation sensor 260 receives the detection result of the environment via the cable C14, and transmits both the detection result of the rotation and the detection result of the environment to the outside of the chamber 90 via the cables C15 and C16. The number of cables can be reduced, and gas generation from the cables can be further suppressed.

[0195] 〔summary〕 The above disclosure includes the following configurations. (1) A robot 2 comprising: a hand 20 supporting a substrate W, a base 10, an arm 4 connecting the hand 20 to the base 10, a multi-joint arm 3 having a plurality of joints J10 arranged along the arm 4 and each of which moves about a vertical axis to change the position and posture of the hand 20 relative to the base 10, and a plurality of motors 101, 201, 301 driving the plurality of joints J10, each of the plurality of motors 101, 201, 301 being a direct drive motor and disposed at the joint J10 it drives. Since each joint J10 is driven without the intervention of a movable transmission element such as a gear or a belt, this is effective in improving the positioning accuracy of the substrate W.

[0196] (2) The robot 2 described in (1) further comprises a wiring space S10 that is sealed inside a chamber 90 in which at least a portion of the multi-joint arm 3 is housed and formed inside the multi-joint arm 3 so as to communicate with the outside of the chamber 90, and a cable C10 that passes through the wiring space S10 and is wired to motors 201, 301 located inside the chamber 90 among the multiple motors 101, 201, 301. Even when the inside of the chamber 90 is evacuated, the wiring space S10 is maintained at the same pressure as outside the chamber 90, so that gas generation from the cable C10 into the chamber 90 is suppressed.

[0197] (3) A robot 2 described in (2), in which each of the multiple joints J10 connects a base side link 10, 50, 60 connected to the base 10 and a hand side link 50, 60, 20 connected to the hand 20 in the multi-joint arm 3, and each of the multiple motors 101, 201, 301 has a stator 115, 215, 342 fixed to the base side link 10, 50, 60, and an output shaft 120, 220, 350 fixed to the hand side link 50, 60, 20 and rotates about an axis by a rotating magnetic field generated by the stator 115, 215, 342. The wiring paths to the motors 101, 201, and 301 can be shortened.

[0198] (4) A robot 22 described in (2) or (3), in which the multiple motors 101, 201, 301 include a hand motor 301 that rotates the hand 20 around a vertical hand 20 axis at the joint J10 that is the most distal from the base 10, and two or more arm motors 101, 102 that respectively drive two or more joints J10 to change the position of the hand motor 301, and each of the two or more arm motors 101, 102 has an output shaft 120, 220, a stator 115, 215 that drives the joint J10 by applying a rotating magnetic field to the output shaft 120, 220, and a through hole 123, 223 that penetrates the output shaft 120, 220 and becomes part of the wiring space S10. The wiring space S10 can be formed while preventing the articulated arm 3 from becoming large.

[0199] (5) A robot 2 described in (4), wherein each of the multiple joints J10 connects a base side link 10, 50, 60 connected to the base 10 and a hand side link 50, 60, 20 connected to the hand 20 in the multi-joint arm 3, and the robot 2 further includes base side sealing members 140, 240 that seal between the output shafts 120, 220 and the base side links 10, 50, and hand side sealing members 130, 230 that seal between the output shafts 120, 220 and the hand side links 50, 60, corresponding to each of the two or more arm motors 101, 102. The wiring space S10 can be easily sealed.

[0200] (6) A robot 2 described in (5), wherein in each of two or more arm motors 101, 102, the stator 115, 215 is fixed to the base side link 10, 50, the output shaft 120, 220 is fixed to the hand side link 50, 60, and the base side seal member 140, 240 includes a mechanical seal 148, 244 that fits tightly against the output shaft 120, 220 while allowing rotation of the output shaft 120, 220 relative to the base side link 10, 50. The wiring space S10 can be sealed with small driving resistance by employing the mechanical seals 148 and 244. Therefore, it is possible to achieve both high positioning accuracy and sealing of the wiring space S10.

[0201] (7) A robot 2 described in (6), further comprising a flange 30 that extends to separate the base 10 from the arm 4 and the hand 20 and separates the inside and outside of the chamber 90, wherein the two or more arm motors 101, 102 include a base motor 101 that is closest to the base 10, a stator 115 of the base motor 101 is located outside the chamber 90, an output shaft 120 of the base motor 101 passes through the flange 30 and is fixed to the hand side link 50 inside the chamber 90, and a base side seal member 140 for the base motor 101 seals between the output shaft 120 and the flange 30. The space required for the robot 2 within the chamber 90 can be saved.

[0202] (8) A robot 2 described in (7), wherein the base 10 is fixed to the flange 30 and has a lifting actuator for lifting and lowering the stator 115 of the base motor 101, and the base side sealing member 140 for the base motor 101 includes a mechanical seal 148 that fits tightly against the output shaft 120 while allowing rotation of the output shaft 120 relative to the flange 30, and an expandable seal 141 that seals between the mechanical seal 148 and the flange 30 and expands and contracts in response to the lifting and lowering of the stator 115 of the base motor 101. The wiring space S10 can be sealed while suppressing the drive resistance in both the lifting and rotating directions to a small value, so that both high positioning accuracy and sealing of the wiring space S10 can be achieved.

[0203] (9) The robot 2 according to any one of (4) to (8), wherein the two or more arm motors 101, 102 are radial gap motors, and the hand motor 301 is an axial gap motor. It is possible to achieve both high positioning accuracy and compactness.

[0204] (10) A robot 2 described in any one of (4) to (9), wherein the articulated arm 3 further has a second hand 70 that rotates around a common hand 20 axis with the hand 20, and the hand motor 301 is a two-axis direct drive motor that rotates the hand 20 and the second hand 70 independently. It is possible to achieve both high positioning accuracy and compactness.

[0205] (11) The hand motor 301 of the robot 2 described in (10) has a first output shaft 350, a first stator 342 that rotates the hand 20 around the hand 20 axis by applying a rotating magnetic field to the first output shaft 350, a second output shaft 320 that passes through the first output shaft 350 along the hand 20 axis, and a second stator 315 that rotates the second hand 70 around the hand 20 axis by applying a rotating magnetic field to the second output shaft 320. The hand motor 301 can be further reduced in size.

[0206] (12) A robot 2 described in (11), in which the first stator 342 and the second stator 315 are fixed to a base side link 60 connected to the base 10, the first output shaft 350 is fixed to the hand 20, the second output shaft 320 passes through the first output shaft 350 and the hand 20 and is fixed to the second hand 70, and the first stator 342 is located between the hand 20 and the second stator 315. The hand motor 301 can be further reduced in size.

[0207] (13) The robot 2 described in (12) further includes a first hand seal member 370 that seals between the base side link 60 and the first output shaft 350, and a second hand seal member 380 that seals between the first output shaft 350 and the second output shaft 320, so as to seal the wiring space S10 inside the chamber 90. This makes it possible to achieve both a compact drive system for the hand 20 and a sealed wiring space S10.

[0208] (14) A robot 2 described in any one of (4) to (13), wherein the arm 4 includes a first link 50 connected to the base 10 and a second link 60 connected to the first link 50 and the hand 20, and the two or more arm motors 101, 102 include a first arm motor 101 that rotates the first link 50 around a vertical first axis at a first joint J11 connecting the base 10 and the first link 50, and a second arm motor 201 that rotates the second link 60 around a vertical second axis at a second joint J12 connecting the first link 50 and the second link 60. The position and posture of the hand 20 can be freely changed.

[0209] (15) A robot 2 described in any one of (2) to (14), comprising a rotation sensor 360 that detects the rotation of a motor 301 located inside the chamber 90 and an environmental sensor 820 that detects the environment inside the wiring space S10, wherein the environmental sensor 820 is connected to the rotation sensor 360 via a sensor cable C11, and the rotation sensor 360 receives the environmental detection results via the sensor cable C11 and transmits both the rotation detection results and the environmental detection results to the outside of the chamber 90 via the cable C10. By reducing the number of cables C10, gas generation from the cables C10 can be further suppressed.

[0210] (16) The robot 2 described in any one of (2) to (15) further comprises a tube T10 that is piped inside the wiring space S10 and guides gas from the outside of the chamber 90, and an air-cooled flow path CR10 that receives the gas guided by the tube T10 and sends it out to the inside of the wiring space S10 through the periphery of the motors 201, 301 located inside the chamber 90. [Explanation of symbols]

[0211] W...substrate, 90...chamber, 2...robot, 3...articulated arm, 20...hand, 10...base, 4...arm, J10...joint, 50...first link, 60...second link, 30...flange, 101...first arm motor, 101...base motor, 201...second arm motor, 301...hand motor, 101, 102...arm motor, S10...wiring space, C10...cable, 101, 201, 301...motor, 115, 215, 342...stator, 120, 220, 350...output shaft, 123, 223...through hole, 140, 240...base side seal Components, 130, 230...hand side seal components, 10, 50, 60...base side links, 50, 60, 20...hand side links, 148, 244...mechanical seal, 141...expandable seal, 315...second stator, 320...second output shaft, 342...first stator, 350...first output shaft, 370...first hand seal components, 380...second hand seal components, 70...second hand, T10...tube, CR10...air cooling flow path, C12, C13, C14, C15, C16...cable, C11...sensor cable, 360...rotation sensor, 820...environmental sensor.

Claims

1. A hand for supporting the substrate; With the base, an arm connecting the hand to the base; a plurality of joints arranged along the arm, each of which moves around a vertical axis to change a position and orientation of the hand relative to the base; A multi-joint arm having A plurality of motors each driving the plurality of joints; Equipped with The robot, wherein each of the plurality of motors is a direct drive motor and is disposed at a joint to be driven.

2. a wiring space formed inside the multi-joint arm so as to be sealed inside a chamber in which at least a portion of the multi-joint arm is housed and to communicate with the outside of the chamber; a cable that is wired through the wiring space to a motor that is located inside the chamber among the plurality of motors; Further comprising: The robot according to claim 1.

3. Each of the plurality of joints connects a base side link connected to the base and a hand side link connected to the hand in the multi-joint arm, Each of the plurality of motors is a stator fixed to the base side link; an output shaft fixed to the hand-side link and rotated about the axis by a rotating magnetic field generated by the stator; having The robot according to claim 2.

4. The plurality of motors include a hand motor that rotates the hand about a vertical hand axis at a joint that is most distal from the base; two or more arm motors each driving two or more joints so as to change a position of the hand motor; Including, Each of the two or more arm motors An output shaft; a stator that drives a joint by applying a rotating magnetic field to the output shaft; a through hole that passes through the output shaft and becomes a part of the wiring space; having The robot according to claim 2.

5. Each of the plurality of joints connects a base side link connected to the base and a hand side link connected to the hand in the multi-joint arm, The robot includes: a base side seal member that seals between the output shaft and the base side link; a hand-side seal member that seals between the output shaft and the hand-side link; Further comprising: The robot according to claim 4.

6. In each of the two or more arm motors, The stator is fixed to the base side link, The output shaft is fixed to the hand-side link, the base side seal member includes a mechanical seal that is in close contact with the output shaft while allowing rotation of the output shaft relative to the base side link; The robot according to claim 5.

7. a flange extending between the base and the arm and hand to separate the inside and outside of the chamber; the two or more arm motors include a base motor that is most proximal to the base; the stator of the base motor is located outside the chamber; The output shaft of the base motor passes through the flange and is fixed to the hand-side link inside the chamber, The base side seal member for the base motor seals between the output shaft and the flange. The robot according to claim 6.

8. the base has a lifting actuator fixed to the flange for lifting and lowering the stator of the base motor; The base side seal member for the base motor is a mechanical seal that is in close contact with the output shaft while allowing rotation of the output shaft relative to the flange; an expandable seal that seals between the mechanical seal and the flange and expands and contracts in response to the elevation and lowering of the stator of the base motor; Including, The robot according to claim 7.

9. the two or more arm motors are radial gap motors, The hand motor is an axial gap motor. The robot according to any one of claims 4 to 8.

10. the articulated arm further includes a second hand that rotates around the hand axis that is common to the hand, The hand motor is a two-axis direct drive motor that rotates the hand and the second hand independently. The robot according to any one of claims 4 to 8.

11. The hand motor is A first output shaft; a first stator that rotates the hand around the hand axis by applying a rotating magnetic field to the first output shaft; a second output shaft passing through the first output shaft along the hand axis; a second stator that rotates the second hand around the hand axis by applying a rotating magnetic field to the second output shaft; having The robot according to claim 10.

12. the first stator and the second stator are fixed to a base-side link connected to the base, The first output shaft is fixed to the hand, the second output shaft passes through the first output shaft and the hand and is fixed to the second hand, The first stator is located between the hand and the second stator. The robot according to claim 11.

13. to seal the wiring space within the chamber, a first hand seal member that seals between the base side link and the first output shaft; a second hand seal member that seals between the first output shaft and the second output shaft; and Further comprising: The robot according to claim 12.

14. The arm is A first link connected to the base; a second link connected to the first link and the hand; Including, The two or more arm motors include a first arm motor configured to rotate the first link about a first vertical axis at a first joint connecting the base and the first link; a second arm motor configured to rotate the second link about a vertical second axis at a second joint connecting the first link and the second link; Including, The robot according to any one of claims 4 to 6.

15. a rotation sensor located inside the chamber for detecting rotation of the motor; an environmental sensor for detecting an environment inside the wiring space; Equipped with The environmental sensor is connected to the rotation sensor via a sensor cable; the rotation sensor receives an environmental detection result via the sensor cable, and transmits both the rotation detection result and the environmental detection result to an exterior of the chamber via the cable; The robot according to any one of claims 2 to 8.

16. a tube that is arranged inside the wiring space and introduces a gas from the outside of the chamber; an air-cooling flow path that receives the gas guided by the tube and sends it to the inside of the wiring space through the periphery of the motor located inside the chamber; Further comprising: The robot according to any one of claims 2 to 8.

Images