Movable device, projection device, head-up display, laser head lamp, head-mount display, object recognition device, mobile body, and eye tracking device

Abstract

To provide a movable device in which the deflection angle of a mobile part is increased.SOLUTION: The movable device includes: a mobile part; a driving part with a piezoelectric part, the driving part driving the mobile part; and a supporting part for supporting the mobile part by the driving part. The driving part has a film thickness amplification part for amplifying the film thickness of the driving unit, in a region which overlaps with at least a part of the piezoelectric part in plane view. The film thickness amplification part is continuous with the supporting part.SELECTED DRAWING: Figure 9

Description

[Technical field]

[0001] The present invention relates to a movable device, a projection device, a head-up display, a laser headlamp, a head-mounted display, an object recognition device and a moving object, and an eye-tracking device. [Background technology]

[0002] Patent Document 1 discloses an optical deflector in which the shape of the dispersion surface in wavenumber space has an aspect ratio of 4 or more, thereby enabling the magnification rate (ratio of exit angle / incident angle) of the deflection angle (optical deflection angle) to be increased, for example, by 4 times or more. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] JP 2011-002490 A Summary of the Invention [Problem to be solved by the invention]

[0004] The objective is to provide a movable device having an increased swing angle of a movable part. [Means for solving the problem]

[0005] The movable device of the present invention comprises a movable part, a driving part having a piezoelectric part and driving the movable part, and a support part supporting the movable part via the driving part, wherein the driving part has a film thickness amplification part that amplifies a film thickness of the driving part in an area overlapping at least a portion of the piezoelectric part in a planar view, and the film thickness amplification part is continuous with the support part. Effect of the Invention

[0006] It is possible to provide a movable device having an increased deflection angle of the movable part. [Brief description of the drawings]

[0007] [Figure 1] FIG. 1 is a plan view showing a configuration of a conventional movable device. [Diagram 2] FIG. 2 is a cross-sectional view of the movable device shown in FIG. [Diagram 3] FIG. 13 is a plan view of a modified example showing the configuration of a conventional movable device. [Figure 4A] 2 is a diagram showing an example of an applied voltage waveform (first rotating shaft) on which the present invention is based. [Figure 4B] 2 is a diagram showing an example of an applied voltage waveform (second rotating shaft) on which the present invention is based. [Diagram 5] 2 is an example of an applied voltage waveform (circular orbit) that is a premise of the present invention. [Figure 6] FIG. 1 is a plan view according to a first embodiment. [Figure 7] FIG. 13 is a diagram illustrating the phenomenon in which a driving force is amplified. [Figure 8] FIG. 13 is a diagram illustrating the phenomenon in which a driving force is amplified. [Figure 9] 1A and 1B are schematic diagrams ((a) plan view, (b) cross-sectional view) relating to a first embodiment. [Figure 10] 1 is a schematic diagram (back surface plan view) according to a first embodiment. [Figure 11] FIG. 11 is an overall view of a movable device according to a second embodiment. [Figure 12] This is a simulation result. [Figure 13] FIG. 11 is a schematic diagram illustrating a second embodiment. [Figure 14] 1A and 1B are schematic diagrams of a second embodiment ((a) plan view, (b) cross section). [Figure 15] FIG. 4 is a schematic diagram of a second embodiment. [Figure 16] FIG. 11 is a schematic diagram of a first modified example. [Figure 17] FIG. 11 is a schematic diagram of a second modified example. [Figure 18] FIG. 11 is a schematic diagram of a third modified example. [Figure 19] FIG. 13 is a schematic diagram of a fourth modified example. [Figure 20] FIG. 13 is a schematic diagram of a fifth modified example. [Figure 21]FIG. 13 is a schematic diagram (cross-sectional view) of a fifth modified example. [Figure 22] 1 is a schematic diagram of an example optical scanning system. [Diagram 23] FIG. 2 is a schematic diagram of another example of an optical scanning system. [Figure 24] FIG. 2 is a diagram illustrating a hardware configuration of an example of an optical scanning system. [Diagram 25] FIG. 2 is a functional block diagram of an example of a control device. [Figure 26] 13 is a flowchart of an example of a process related to the optical scanning system. [Figure 27] 1 is a schematic diagram of an example of an automobile equipped with a head-up display device. [Figure 28] 1 is a schematic diagram of an example of a head-up display device. [Figure 29] 1 is a schematic diagram of an example of an image forming apparatus equipped with an optical writing device. [Diagram 30] FIG. 1 is a schematic diagram of an example of an optical writing device. [Diagram 31] FIG. 1 is a schematic diagram of an example of an automobile equipped with a lidar device. [Diagram 32] FIG. 1 is a schematic diagram of an example of a lidar device. [Diagram 33] FIG. 1 is a schematic diagram illustrating an example of the configuration of a laser headlamp. [Diagram 34] FIG. 1 is a schematic perspective view showing an example of the configuration of a head mounted display. [Diagram 35] FIG. 2 is a diagram illustrating an example of a portion of the configuration of a head mounted display. [Diagram 36] FIG. 2 is a diagram showing an example of a portion of the configuration of a pupil or cornea position detection device. [Figure 37] FIG. 2 is a diagram showing an example of a portion of the configuration of a pupil or cornea position detection device. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0008] Hereinafter, an embodiment of the present invention will be described with reference to the drawings. In the description of the drawings, the same elements are given the same reference numerals, and duplicated description will be omitted.

[0009] <Configuration of movable device>

[0010] First, the configuration of a conventional movable device will be described with reference to Figures 1 to 3. Note that the configuration of the movable device and the materials forming each member described below are also applicable to the embodiments of the present invention described later.

[0011] FIG. 1 is a plan view showing an example (conventional example) of the configuration of a conventional movable device. As shown in FIG. 1, the movable device 13 has a movable part (mirror part) 101 that reflects incident light, first to fourth members (110a, 110b, 110c, 110d) that are connected to the movable part from four directions and drive the movable part, a support part 120 that fixes the first to fourth members, and an electrode connection part 150 that is electrically connected to the first to fourth members and the control device. The first member 110a also has a connection part 111a and a drive part 112a. Although not shown in the drawing, the connection part 111a and the drive part 112b are configured in the same way in the first to fourth members (110a to 110d).

[0012] Here, the first member 110a will be described as a representative, but the same applies to the second member 110b, the third member 110c, and the fourth member 110d. Hereinafter, when describing the mechanisms of the conventional movable device and the movable device of the present invention, the first member 110a may be described as a representative example, and this mechanism is similarly applied to the second member 110b to the fourth member 110d. Also, as a method of notation, the member 110a may be written as 110. The same applies to the connection part 111, the drive part 112, etc.

[0013] The movable device 13 is formed, for example, by forming a single SOI (Silicon On Insulator) substrate by etching or the like, and forming the movable part 101, the first to fourth members (110a to 110d), the electrode connection part 150, etc., on the formed substrate, so that each component is integrally formed. Note that the formation of each of the above components may be performed after or during the formation of the SOI substrate.

[0014] Fig. 2 is a cross-sectional view of the movable device shown in Fig. 1 along line A-A'. The SOI substrate is a substrate in which a silicon oxide layer 162 is provided on a first silicon layer 161 made of single crystal silicon (Si), and a second silicon layer made of single crystal silicon is further provided on the silicon oxide layer. Hereinafter, the first silicon layer is referred to as the silicon support layer 161, and the second silicon layer is referred to as the silicon active layer 163.

[0015] Since the silicon active layer 163 has a smaller thickness in the Z-axis direction than in the X-axis direction or the Y-axis direction, a member constituted only by the silicon active layer 163 functions as an elastic part having elasticity.

[0016] The SOI substrate does not necessarily have to be flat, and may have a curvature, etc. Also, the material used to form the movable device 13 is not limited to the SOI substrate, as long as it can be integrally molded by etching or the like and can be partially made elastic.

[0017] The movable part (mirror part) 101 is composed of, for example, a circular movable part base 102 and a reflecting surface 14 formed on the surface of the movable part base on the +Z side. The movable part base 102 is composed of, for example, a silicon active layer 163. The reflecting surface 14 is composed of, for example, a metal thin film containing aluminum, gold, silver, etc. The movable part 101 may also have a rib formed on the -Z side surface of the movable part base 102 for reinforcing the movable part. The rib is composed of, for example, a silicon support layer 161 and a silicon oxide layer 162, and can suppress distortion of the reflecting surface 14 caused by movement.

[0018] As shown in FIG. 2, the first member 110a and the third member 110c have one end connected to the movable part base 102 and the other end connected to the support part 120. The first member 110a is composed of a connection part 111a, a first driving part 112a, and a support 180a of the first driving part. Two torsion bars (connection parts) 111a and 111c that support the movable part 101 so that it can swing extend in the first axial direction and are connected to the support 180a of the first driving part 112a and the support 180c of the third driving part 112c, and the support (180a, 180c) of the driving part is connected to the support part 120. The driving part 112a swings the movable part 101 to a positive swing angle and a negative swing angle with respect to the Z direction via the connection part 111a.

[0019] 2, the torsion bars (connecting parts) 111a and 111c are made of a silicon active layer 163. The first driving part 112a and the third driving part 112c are formed in this order on the +Z side surface of the silicon active layer 163, which is an elastic part, of a lower electrode 201, a piezoelectric part 202, and an upper electrode 203. The upper electrode 203 and the lower electrode 201 include, for example, gold (Au) or platinum (Pt). The piezoelectric part 202 includes, for example, PZT (lead zirconate titanate), which is a piezoelectric material.

[0020] The support section 120 is a rectangular support body that is constituted by, for example, a silicon support layer 161, a silicon oxide layer 162, and a silicon active layer 163, and is formed so as to surround the movable section 101 and the first to fourth members (110a to 110d).

[0021] The electrode connection part 150 is formed, for example, on the surface on the +Z side of the support part 120, and is electrically connected to the upper electrodes 203 and lower electrodes 201 of the first to fourth driving parts (112a to 112d) and the control device 11 via electrode wiring such as aluminum (Al). Note that the upper electrodes 203 and the lower electrodes 201 may each be directly connected to the electrode connection part, or may be indirectly connected by connecting the electrodes to each other, for example.

[0022] In the conventional embodiment, an example has been described in which the piezoelectric portion 202 is formed only on one surface (the +Z side surface) of the silicon active layer 163, which is the elastic portion. However, the piezoelectric portion 202 may be provided on another surface (for example, the -Z side surface) of the elastic portion, or may be provided on both one surface and the other surface of the elastic portion.

[0023] In addition, as long as the movable portion can be driven around the first axis or the second axis, the shape of each component is not limited to a conventional shape. For example, the first to fourth connection portions (111a to 111d) and the first to fourth drive portions (112a to 112d) may have a shape with a curvature.

[0024] Furthermore, an insulating layer including a silicon oxide film may be formed on at least one of the +Z side surface of the upper electrode 203 of the first to fourth members (110a to 110d) and the +Z side surface of the support part 120. In this case, an electrode wiring is provided on the insulating layer, and the insulating layer is partially removed or not formed as an opening only at a connection spot where the upper electrode 203 or the lower electrode 201 is connected to the electrode wiring, thereby increasing the degree of freedom in designing the first to fourth members (110a to 110d) and the electrode wiring, and further suppressing short circuits due to contact between the electrodes. The silicon oxide film also functions as an anti-reflection material.

[0025] Fig. 3 is a plan view showing a modified example of a conventional movable device. The position of the connection part 111a with respect to the movable part 101 is different from that of the conventional movable device shown in Fig. 1. The shape of each component is not limited to that of this modified example. In addition, the material, manufacturing process, electrical connection and control method are not particularly limited, and the same configuration as that of Figs. 1 and 2 can be applied. In addition, the driving method of the driver is not limited to piezoelectric driving. For example, electrostatic driving, electromagnetic driving, and thermoelectric driving may be used.

[0026] [Controller control details] Next, details of the control by the control device that drives the first to fourth members (110a to 110d) of the conventional movable device will be described. Note that the control method of the movable device described below can also be applied to the embodiments of the present invention.

[0027] When a positive or negative voltage is applied in the polarization direction, the piezoelectric portions 202 included in the first to fourth members (110a to 110d) are deformed (e.g., expanded or contracted) in proportion to the potential of the applied voltage, thereby exerting the so-called inverse piezoelectric effect. The first to fourth members (110a to 110d) move the movable portion 101 by utilizing the inverse piezoelectric effect.

[0028] In this case, the angle formed by the XY plane and the reflecting surface 14 when the reflecting surface 14 of the movable part 101 is tilted in the +Z direction or the -Z direction with respect to the XY plane is called the deflection angle. In this case, the +Z direction is the positive deflection angle, and the -Z direction is the negative deflection angle.

[0029] In the first member 110a and the third member 110c in the cross section of FIG. 2, when a driving voltage is applied in parallel to the piezoelectric parts 202 of the first driving part 112a and the third driving part 112c via the upper electrode 203 and the lower electrode 201, the piezoelectric parts 202 are deformed. The first driving part 112a and the third driving part 112c are bent and deformed by the action of the deformation of the piezoelectric parts 202. For example, reverse voltages are applied to the respective electrodes so that the first member is bent in the +Z direction and the third member is bent in the -Z direction. As a result, the movable part 101 swings so that a positive or negative deflection angle is generated via the two torsion bars (connecting parts) 111a and 111c.

[0030] Next, a driving method for realizing two-dimensional deflection will be described. Figures 4A, 4B, and 5 are schematic diagrams of the driving method. Figures 4A and 4B show examples of driving signal waveforms for the first to fourth driving sections (112a to 112d). The signal waveforms have periodicity with a frequency f.

[0031] Fig. 4A is an example of a drive signal waveform in which the first drive unit 112a and the second drive unit 112b are in phase, and the third drive unit 112c and the fourth drive unit 112d are in phase, and at this time, the movable unit 101 rotates on the first rotation shaft 1. Fig. 4B is an example of a drive signal waveform in which the first drive unit 112a and the fourth drive unit 112d are in phase, and the second drive unit 112b and the third drive unit 112c are in phase, and at this time, the movable unit 101 oscillates on the second rotation shaft 2.

[0032] FIG. 5 shows a state in which the drive signal waveforms of the first drive unit 112a, the second drive unit 112b, the third drive unit 112c, and the fourth drive unit 112d are shifted by 90 degrees each, and at this time, the optical scanning trajectory of the movable unit draws a two-dimensional circle. Although all the drive waveforms have the same frequency in the embodiment example, the embodiment is not limited to this, and the frequency, amplitude, and phase of each input waveform may be freely changed. This makes it possible to draw a two-dimensional trajectory. In FIG. 4A, FIG. 4B, and FIG. 5, the offset amount of the applied voltage is based on a constant value, but the embodiment is not limited to this, and different values ​​may be given.

[0033] This enables complex swing angle control. Also, when the driving unit 112a has one or more beams (connecting unit 111a), the reference voltage of the applied voltage signal that swings the first driving unit 112a and the second driving unit 112b, that is, the applied voltage when the swing angle is 0 degrees, is set to the center of the maximum applied voltage, thereby enabling swing angle control to the positive and negative sides.

[0034] The reference voltage may be 0V or any voltage within the maximum amplitude of the voltage that can be applied. The signal waveform of the applied voltage is not limited to this embodiment, and may be a periodic waveform such as a sine wave, a square wave, or a sawtooth wave, or may be a more complicated periodic waveform. It may be DC driven. It may be vector scanning driven at a non-resonant frequency, or it may be Lissajous scanning by bringing the frequency of the driving waveform close to the resonant frequency inherent to the structure.

[0035] In addition, the driving unit in each member may be divided into multiple regions, and complex control may be performed by inputting separate signals to each driving unit. In addition, although the driving unit is a piezoelectric driving body, the driving body method is not limited to piezoelectric driving. It may be electrostatic driving, electromagnetic driving, or thermoelectric driving.

[0036] <First embodiment> FIG. 6 shows a configuration diagram of the first embodiment. This embodiment is a movable device having four driving units (112a, 112b, 112c, 112d). The driving units (112a, 112b, 112c, 112d) have a function of bending in the thickness direction of the substrate, and swing the movable unit 101 via the connecting units (111a, 111b, 111c, 111d). The driving units (112a, 112b, 112c, 112d) are supported by a support unit 120. By combining and controlling the swinging of each driving unit, the movable unit 101 can be swung in a desired direction, making it possible to perform a Lissajous scan or vector scan in the drawing area. In this embodiment, the first rotation axis 1 and the second rotation axis 2 are perpendicular to each other.

[0037] Fig. 7 illustrates a method of swinging the movable part 101. Fig. 7(a) shows a schematic cross section taken along line B-B' when the present embodiment is not driven. Fig. 7(b) shows a schematic cross section taken along line B-B' when the present embodiment is driven. In this cross section, the connection parts (111a, 111c) are on the same straight line as the movable part 101, connecting the movable part 101 from two directions.

[0038] 7(b), a displacement 324 of the driving part 112a occurs. As a result, a force 320 applied to the movable part 101 and a reaction force 322 applied from the driving part 112c and the connection part 111c on the opposite side act on the movable part 101.

[0039] When it is desired to increase the deflection angle of the movable part 101 of the optical deflector, it is only necessary to increase the displacement 324 of the driving part and the force 320 applied to the movable part when the driving part performs a bending operation.

[0040] Naturally, it is possible to increase both the displacement and the force by driving the actuator with a high voltage, but this results in a high-cost system. Therefore, in order to realize a low-cost system, it is necessary to increase the deflection angle of the movable part by devising a structure for the actuator.

[0041] 8 illustrates the deformation of member 110 when driving section 112, as if it were a cantilever beam. Consider that a moment M0 is applied to the center of the beam (member 110). At this time, the angle θ of the tip of the beam is expressed by the following equation.

[0042]

number

[0043] Moreover, the resistance force R acting on the beam is expressed by the following equation.

[0044]

number

[0045] Here, L is the beam length, M0 is the moment, R is the reaction force, E is Young's modulus, and I is the second moment of area.

[0046] The reaction force R is the maximum force that can be expended on the force 320 applied to the movable part. According to the formula for the reaction force R, the shorter the cantilever length L, the greater the force that can be generated. However, since the displacement amount θ is proportional to L, simply shortening the beam length of the driving part may have a small effect on the oscillation of the movable part, or may even have the opposite effect. In the case of this embodiment, the reaction force 322 shown in FIG. 7 acts. Unlike a general cantilever, a sufficiently large force 320 is required.

[0047] In the following, we consider increasing the resistance R by shortening the beam length L, following the basic principle of the formula for the resistance R (Equation 2).

[0048] 9 and 10 are diagrams for explaining the film thickness amplifying section 40. FIG. 9(a) shows a part of the first embodiment shown in FIG. 6, and only one of the first to fourth members (110a, 110b, 110c, 110d) shown in FIG. 6 is extracted and shown. The driving section 112 includes a piezoelectric section 32 and a driving section substrate 34. FIG. 9 shows the boundary 48 between the driving section 112 and the support section 120, and the boundary 350 between the driving section 112 and the connection section 111. FIG. 9(b) shows a cross section taken along the line CC'.

[0049] FIG. 9(b) shows the film thickness amplifying section 40 and the support section substrate (support section 120). The film thickness amplifying section 40 is formed on the surface of the driving section substrate 34 opposite to the surface on which the piezoelectric section 32 is formed. The film thickness amplifying section 40 extends from the support section substrate (support section 120) side to the movable section 101 side (-X direction) in a plan view. The film thickness amplifying section 40 has a shape extending from the support section substrate (support section 120) to the movable section 101 side, and is continuous with the support section substrate (support section 120). Here, the film thickness amplifying section 40 and the support section 120 being "continuous" includes a state in which at least a part of the film thickness amplifying section 40 and the support section 120 are "in contact," "formed from the same substrate," or "opposing surfaces are bonded," etc. The plan view refers to a state in which the XY plane in FIG. 9(a) is viewed from the +Z direction. In other words, the plan view refers to the reflection surface of the movable part 101 when the piezoelectric part 32 is not driven being viewed from the normal direction. In addition, the XY plane in FIG. 9(a) viewed from the -Z direction is also referred to as the plan view, but may also be referred to as the "plan view seen from the -Z direction."

[0050] The support substrate (support 120) and the film thickness amplification portion 40 are formed from the same silicon substrate. Therefore, the thickness (width in the Z direction) of the film thickness amplification portion 40 is the same as the thickness of the support substrate (support 120), and the boundary surface is integrated. This makes it possible to suppress damage due to deformation when the piezoelectric portion 32 is driven, compared to a configuration in which the support 120 and the film thickness amplification portion 40 are separated or formed from different substrates.

[0051] In FIG. 9(b), the thickness of the film thickness amplification part 40 in the height direction is the same as that of the support part substrate (support part 120). This is the simplest method in terms of the manufacturing process, and is a form in which the support part substrate (support part 120) and the film thickness amplification part 40 can be manufactured as a single unit. Specifically, it can be processed and formed by photolithography and dry etching processes in the semiconductor process. However, as long as it conforms to the principle by which the film thickness amplification part 40 functions, the same effect can be obtained even if it is manufactured from a different material and to a different thickness than the support part 120 (support part substrate). Therefore, the thickness of the film thickness amplification part 40 is not limited to being the same as that of the support part 120 (support part substrate).

[0052] Fig. 10 is a plan view seen from the -Z direction, showing the back side of Fig. 9(a). By forming the film thickness amplifying section 40 from the support section 120 toward the movable section 101 and reducing the length from the fixed end of the driving section 112 to the connection section 111, the oscillation efficiency of the movable section 101 can be improved.

[0053] <Second embodiment> 11 shows a configuration diagram of the second embodiment. This embodiment is a movable device having four drive units. In this embodiment, the drive units 112 are arranged at the four corners of the square support unit 120. This makes it possible to increase the area of ​​the drive units 112, and therefore the moment M0 that serves as the driving force.

[0054] In this embodiment, an additional effect can be expected by changing the shape of the film thickness amplifying portion 40. In particular, this embodiment describes a method for reducing the drive energy that is wasted and improving the drive efficiency as the drive energy relative to the input power.

[0055] 12 shows the results of a simulation performed when the conventional example was driven. The conventional example does not have the film thickness amplification section described in the first embodiment. Observing this result, it can be seen that the fluctuation of the area 28-1 (28-2) indicated by the dashed line is large. This area 28-1 (28-2) at the end of the driving part 112 is located at the end of the driving part 112 on the connection part 111 side, and is a part that does not directly contribute to the oscillation of the movable part 101. If this area 28-1 (28-2) vibrates, the input energy is consumed and the driving efficiency decreases.

[0056] In the conventional example, the parts that do not contribute to the oscillation of the movable part consume the input energy, reducing the drive efficiency of the movable part 101. Below, we have considered a method for reducing the drive energy supplied to the region 28-1 (28-2) at the end of the drive part 112 and improving the drive energy that contributes to the oscillation.

[0057] The displacement angle θ of the tip of the beam shown in FIG.

[0058]

number

[0059] As described above, according to the formula for the reaction force R, the shorter the cantilever length L, the greater the force that can be generated, but simply shortening the beam length of the drive unit has little effect on the oscillation of the movable unit because the displacement θ is proportional to L. Therefore, if a structure is used in which L is particularly short in the region 28-1 (28-2) where θ can be reduced, the force applied to the movable unit can be increased while maintaining the displacement that contributes to the oscillation.

[0060] FIG. 13 shows the concept of the second embodiment according to the above principle. The movable part 101 is connected to the connection part 111, the driving part 112, and the support part 120. FIG. 13 corresponds to a plan view of the movable device seen from the -Z direction. The film thickness amplifying part 40 is triangular and arranged in two places (40-1 and 40-2). The film thickness amplifying part 40 is provided to control the driving state of the driving part 112. Also, in FIG. 13, the length from the support part 120 (the length from the fixed end to the free end of the driving part 112 along the Y axis) is indicated by La42 and Lb44. This length has a physical meaning almost equivalent to the length L of the cantilever beam.

[0061] In the first embodiment and the second embodiment, the definition of the boundary 48 between the support section 120 and the driving section 112 is different. In the first embodiment (FIG. 9), the driving section 112 is a member located between the support section 120 and the movable section 101 in a plan view, and has a width in a direction (Y-axis direction) perpendicular to the direction from the support section 120 toward the movable section 101 (−X direction in FIG. 9) narrower than that of the support section 120. That is, the boundary 48 in the first embodiment (FIG. 9) is a straight line connecting the inner edges of the support section 120 at both ends where the driving section 112 is connected to the support section 120. In the second embodiment (FIG. 13), the boundary 48 is a straight line that passes through the position where the width of the film thickness amplification section 40 is narrowest in the direction from the support section 120 toward the movable section 101 (−X direction in FIG. 13) and is parallel to the direction perpendicular to the direction (Y-axis direction).

[0062] The length Lb44 from the fixed end to the free end of the driving part 112 shown at the center of the driving part 112 in the X-axis direction is the length in the Y-axis direction from the boundary 48 between the support part 120 and the driving part 112 to the boundary 350 between the connection part 111 and the driving part 112. The boundary 350 is a straight line drawn perpendicular to the extension direction (direction from the fixed end toward the movable part) of the driving part at a position where the width (in the X-axis direction) of the driving part is different. The length La42 from the fixed end to the free end of the driving part 112 near the end of the driving part 112 in the X-axis direction (direction perpendicular to the direction from the support part 120 to the movable part 101) is the length in the Y-axis direction from the boundary with the film thickness amplifying part 40-2 to the boundary 350 with the connection part 111.

[0063] In the region of the driving unit 112 that includes the film thickness amplification unit 40, deformation is suppressed by the film thickness amplification unit 40, so it does not deform in the same way as other regions of the driving unit 112. That is, the region of the driving unit 112 that includes the film thickness amplification unit 40 is, ostensibly, configured such that a part of the support unit 120 extends toward the driving unit 112 side, and the end on the movable part side of the film thickness amplification unit 40 becomes a fixed end.

[0064] As a result, the length L of the cantilever beam near the end of the driving unit 112 in the X-axis direction corresponds to the length La42 from the support unit 120. When comparing this La42 with the length Lb44 from the support unit 120 near the center of the driving unit 112 in the X-axis direction, La42 is shorter.

[0065] If such a form can be realized, from the previously shown formula 1, La < Lb, so the displacement amount (angle θ) of the beam tip is smaller for La. That is, the displacements in regions 28-1 and 28-2 where there were useless displacements in the simulation shown in FIG. 9 become smaller. As a result, the useless displacement becomes smaller, and while reducing the loss of the energy input to drive the movable part 101, the effect of increasing the resistance force R due to shortening L in formula 2 can be exerted. Thus, even with the same input power, a large amplitude and a large swing angle of the movable part can be obtained.

[0066] In this way, in the form of FIG. 13, the energy loss in the region 28-1 (28-2) at the end of the driving unit 112 can be suppressed, and the driving energy of the region contributing to the swing can be improved. However, it is assumed that the width of the driving unit is larger than that of the connection part (L1 > L2).

[0067] The film thickness amplification unit 40 forms a structure that amplifies the driving force applied to the movable part 101 in a form that extends the support unit 120. Since it can reduce the loss of the displacement amount of the driving unit and increase the force generated by the driving unit 112, the force generated by the driving unit 112 can be increased, and the movable part 101 can be efficiently swung. When the optical deflection device of the present invention is applied to an image projection device, a large viewing angle can be obtained. The cost of the system can be reduced. Low power consumption can be realized by low voltage driving.

[0068] FIG. 14 is a diagram for explaining the film thickness amplification portion. FIG. 14(a) is a top view as in FIG. 11, viewed from the +Z direction. Also, in the drive unit 112, the piezoelectric unit 32 and the drive unit substrate 34 are shown as the drive unit 112. FIG. 14(b) shows a cross-section along the straight line E-E'.

[0069] In FIG. 14(a), as the straight line F-F', a portion located at the end of the drive unit 112 deviated from the center of the movable unit 101 is shown. FIG. 14(c) shows a cross-section along the straight line F-F'.

[0070] In FIG. 14(c), a film thickness amplification portion 40 not shown in FIG. 14(b) is shown. That is, the film thickness amplification portion 40 is formed only at the end of the drive unit 112 indicated by the straight line F-F'. The film thickness amplification portion 40 is triangular as in the bottom view shown in FIG. 10.

[0071] The film thickness amplification portion 40 has the same thickness as the support portion substrate (support portion 120) of the support portion 120, and their boundary surfaces are integrated. The support portion substrate (support portion 120) and the film thickness amplification portion 40 are made of the same silicon substrate and are firmly bonded. Also, the film thickness amplification portion 40 and the drive unit substrate 34 are made of the same silicon substrate and are firmly bonded. That is, the support portion substrate (support portion 120) extends and is bonded to the drive unit substrate.

[0072] On the straight line F-F', the support portion extends, and the length L of the cantilever shown in FIG. 8 can be shortened. As a result, it is possible to realize La < Lb shown above. By suppressing the unnecessary displacement in the region 28 and driving the movable unit efficiently, the swing angle of the movable unit can be increased.

[0073] In both this embodiment and the modified example, the film thickness amplification portion 40 is arranged so as to extend in the direction 56 in which the movable unit 101 is located with respect to the boundary line 48. Thereby, the effects of the present invention can be obtained.

[0074] A simulation was performed for the conventional structure and this embodiment. The results are shown in Table 1. As a result of the comparison at the same voltage value of 30 V, it was found that the deflection angle increased from 4.17° to 5.01°.

[0075] [Table 1]

[0076] Next, a modified example of the film thickness amplifying section 40 will be described. FIG. 15 is a re-presentation of the second embodiment. The film thickness amplifying section 40 has a structure in which the width in the Y-axis direction (from the support section 120 to the movable section 101) is reduced from both ends (ends in the +X direction and -X direction) of the driving section 112 toward a dashed line 351 (the center of the driving section 112 in the X-axis direction) drawn from the center of the movable section 101 toward the driving section 112, which is parallel to the Y-axis. By adopting this form, it is possible to reduce the displacement loss at the end of the driving section 112 shown in the region 28-1 (28-2) in FIG. 12. The following modified examples are shown to make it easier to compare this figure.

[0077] A first modified example is shown in Fig. 16. In this modified example, the shape of the film thickness amplifying portion 40 in plan view from the -Z direction has a curve. In the second embodiment, the width of the film thickness amplifying portion 40 is reduced linearly, but this is not limited to linearity. As shown in Fig. 16, the effect can be obtained even if the width of the film thickness amplifying portion 40 is reduced nonlinearly.

[0078] 17 shows a second modified example. In the second modified example, the driving unit 112 is disposed at a position where a straight line passing through the center of the movable unit 101, which is parallel to the Y axis, does not overlap with a line passing through the center of the driving unit 112. As in this modified example, if the width of the film thickness amplifying unit 40 is reduced toward a dashed line 351 drawn from the center of the movable unit 101 toward the driving unit 112, which is parallel to the Y axis, the effect of the present invention can be achieved even if the driving unit 112 or the film thickness amplifying unit 40 is asymmetric with respect to the line.

[0079] Next, a third modified example is shown in Fig. 18. In the third modified example, the driving unit 112 is connected to a corner of the support unit 120. Moreover, the vertex of the driving unit 112 on the support unit 120 side of the present modified example is on a dashed line 351 that is parallel to the Y axis and drawn from the center of the movable unit 101 toward the driving unit 112. Therefore, a corner is formed at the boundary line 48 between the support unit 120 and the driving unit 112. Even in this case, the structure of the present invention can be applied to achieve its effects.

[0080] 19 shows a fourth modified example. In the fourth modified example, the width of the film thickness amplifying section 40 in the direction parallel to the X-axis is larger than the width of the driving section 112 in the direction parallel to the X-axis. By making the angular convex portion of the film thickness amplifying section 40 have a shape that does not overlap with the driving section 112, it is possible to suppress the concentration of stress at the position where the convex portion of the driving section 112 overlaps, and to prevent damage to the driving section 112.

[0081] FIG. 20 shows a plan view of the fifth modified example. FIG. 21 shows a cross-sectional view along line G-G' shown in FIG. 20. This modified example has a movable part base 3 supported by the first to fourth members (110a to 110d). The movable part base 3 supports the movable part 101 via a connecting part 124 extending in the Z direction. This allows the movable part base 3 to swing the movable part 101 two-dimensionally. This modified example is configured such that the movable part 101 is formed on a plane different from the plane on which the first to fourth members (110a to 110d) are located by using two SOI substrates. This allows the swing angle of the movable part 101 to be further increased.

[0082] As shown in FIG. 21, the movable part pedestal 3 is composed of two layers, a silicon active layer 128 and a silicon oxide layer 126. These layers are formed of a first SOI substrate, and are composed of a silicon active layer 163 and a silicon oxide layer 162. A connecting portion 124 is formed on the movable part pedestal 3. The connecting portion 124 is also formed of a first SOI substrate, and is composed of a silicon support layer 161. The connecting portion 124 is integrally formed into an arbitrary shape by selective dry etching, and protrudes downward (in the -Z direction) from the planar movable part pedestal 3. The connecting portion 124 is firmly connected to the movable part pedestal 3.

[0083] Similarly, the second SOI substrate is composed of a silicon active layer 303, a silicon oxide layer 302, and a silicon support layer 301. In the second SOI substrate, the movable part 101 is formed, and the pillars 122 and ribs 141 are formed by dry etching from the silicon support layer 301. The movable part base 102 is composed of the silicon active layer 303, and a mirror surface is formed on the lower surface thereof. The pillars 122 and ribs 141 have the function of reinforcing the connecting part 124.

[0084] By forming the ribs 141 on the second SOI substrate, the durability of the movable part 101 can be strengthened. Therefore, the movable part base 102, which occupies most of the movable part 101, can be constructed from a thin layer of silicon active layer 303, resulting in a reduction in weight. By maintaining mechanical strength through the rib function, the mirror can be made lighter, reducing the moment of inertia and achieving higher speed and a wider angle of view. This allows a larger angle of view to be obtained for the same driving force.

[0085] The lower surface of the connecting portion 124 is joined to the movable portion base 102 via adhesive resin 123 that strengthens the bond with the movable portion base 102. The adhesive resin 123 is configured so that the diameter of the connecting portion 124 is larger than the diameter of the connecting portion 124. The periphery of the connecting portion 124 is surrounded by pillars 122. The pillars 122 are formed by a second SOI substrate provided on the movable portion base 102.

[0086] The first SOI substrate surrounds the movable part 101 with a support part 120. The support part 120 is composed of three layers: a silicon active layer 163, a silicon oxide layer 162, and a silicon support layer 161. A driving part 112 is formed on the first SOI substrate, and a piezoelectric part 202 is formed so as to be sandwiched between an upper electrode 203 and a lower electrode 201. The driving part is driven by distortion of the piezoelectric part 202, and the movable part base 3 is oscillated by the connection part 111.

[0087] The film thickness amplifying section 40 is formed by extending the supporting section 120. The part of the silicon supporting layer 161 of the supporting section 120 that is integrated with the film thickness amplifying section is shown as the supporting section substrate (supporting section 120). Since the supporting section substrate (supporting section 120) and the film thickness amplifying section 40 have no interface and are an integrated silicon crystal, they have high mechanical strength and have the function of suppressing the displacement of the driving section 112.

[0088] Hereinafter, an embodiment to which the movable device of the present invention is applied will be described in detail.

[0089] [Optical scanning system] First, an optical scanning system to which the movable device of this embodiment is applied will be described in detail with reference to FIGS.

[0090] A schematic diagram of an example of an optical scanning system is shown in Fig. 22. As shown in Fig. 22, an optical scanning system 10 is a system that optically scans a scanned surface 15 by deflecting light irradiated from a light source device 12 by a reflecting surface 14 of a movable device 13 under the control of a control device 11.

[0091] The optical scanning system 10 comprises a control device 11, a light source device 12, and a movable device 13 having a reflective surface 14.

[0092] The control device 11 is, for example, an electronic circuit unit including a CPU (Central Processing Unit) and an FPGA (Field-Programmable Gate Array). The movable device 13 is, for example, a MEMS (Micro Electromechanical Systems) device having a reflective surface 14 and capable of moving the reflective surface 14. The light source device 12 is, for example, a laser device that irradiates a laser. The scanned surface 15 is, for example, a screen.

[0093] The control device 11 generates control commands for the light source device 12 and the movable device 13 based on the acquired optical scanning information, and outputs drive signals to the light source device 12 and the movable device 13 based on the control commands.

[0094] The light source device 12 emits light based on the input drive signal. The movable device 13 moves the reflecting surface 14 in at least one axial direction or two axial directions based on the input drive signal.

[0095] As a result, for example, by controlling the control device 11 based on image information, which is an example of optical scanning information, the reflection surface 14 of the movable device 13 is moved back and forth in two axial directions within a predetermined range, and the irradiation light from the light source device 12 incident on the reflection surface 14 is deflected around a certain axis to perform optical scanning, so that an arbitrary image can be projected onto the scanned surface 15. Details of the movable device of this embodiment and details of the control by the control device will be described later.

[0096] Fig. 22 shows a schematic diagram of projecting an image by raster scanning, but as in Fig. 1, a movable device having four drive parts is suitable for vector scanning and Lissajous scanning. Raster scanning is suitable for displaying an image uniformly on a screen, as shown in Fig. 22. Vector scanning as in Fig. 23 makes it possible to efficiently display figures and the like with short scanning. It is particularly efficient when displaying figures and the like in one stroke from the start point and end point 4 as shown in Fig. 23.

[0097] Next, a hardware configuration of an example of the optical scanning system 10 will be described with reference to Fig. 24. As shown in Fig. 24, the optical scanning system 10 includes a control device 11, a light source device 12, and a movable device 13, which are electrically connected to each other. Among these, the control device 11 includes a CPU 20, a RAM 21 (Random Access Memory), a ROM 22 (Read Only Memory), an FPGA 23, an external I / F 24, a light source device driver 25, and a movable device driver 26.

[0098] The CPU 20 is a calculation device that reads out programs and data from a storage device such as a ROM 22 onto a RAM 21 and executes processing to realize the overall control and functions of the control device 11.

[0099] The RAM 21 is a volatile storage device that temporarily stores programs and data.

[0100] The ROM 22 is a non-volatile storage device that can retain programs and data even when the power is turned off, and stores processing programs and data that the CPU 20 executes to control each function of the optical scanning system 10.

[0101] The FPGA 23 is a circuit that outputs control signals suitable for the light source device driver 25 and the movable device driver 26 in accordance with the processing of the CPU 20 .

[0102] The external I / F 24 is, for example, an interface with an external device, a network, etc. The external device includes, for example, a higher-level device such as a PC (Personal Computer), and a storage device such as a USB memory, an SD card, a CD, a DVD, a HDD, and an SSD. The network is, for example, a CAN (Controller Area Network) or a LAN (Local Area Network) of an automobile, the Internet, etc. The external I / F 24 may have a configuration that enables connection or communication with an external device, and an external I / F 24 may be provided for each external device.

[0103] The light source device driver is an electric circuit that outputs a drive signal, such as a drive voltage, to the light source device 12 in accordance with an input control signal.

[0104] The movable device driver 26 is an electric circuit that outputs a drive signal, such as a drive voltage, to the movable device 13 in accordance with the input control signal.

[0105] In the control device 11, the CPU 20 acquires optical scanning information from an external device or a network via the external I / F 24. Note that any configuration may be used as long as the CPU 20 can acquire the optical scanning information, and the optical scanning information may be stored in the ROM 22 or FPGA 23 in the control device 11, or a storage device such as an SSD may be newly provided in the control device 11 to store the optical scanning information in the storage device.

[0106] Here, the optical scanning information is information indicating how to optically scan the scanned surface 15. For example, when an image is displayed by optical scanning, the optical scanning information is image data. For example, when optical writing is performed by optical scanning, the optical scanning information is writing data indicating the writing order and writing locations. For example, when object recognition is performed by optical scanning, the optical scanning information is irradiation data indicating the timing and irradiation range of irradiating light for object recognition.

[0107] The control device 11 can realize the following functional configuration by instructions from the CPU 20 and the hardware configuration shown in FIG.

[0108] Next, a functional configuration of the control device 11 of the optical scanning system 10 will be described with reference to Fig. 25. Fig. 25 is a functional block diagram of an example of a control device of the optical scanning system.

[0109] As shown in FIG. 25, the control device 11 has a control section 30 and a drive signal output section 31 as functions.

[0110] The control unit 30 is realized by, for example, the CPU 20, the FPGA 23, etc., and acquires optical scanning information from an external device, converts the optical scanning information into a control signal, and outputs it to the drive signal output unit 31. For example, the control unit 30 acquires image data from an external device, etc. as optical scanning information, generates a control signal from the image data by performing a predetermined process, and outputs it to the drive signal output unit 31. The drive signal output unit 31 is realized by the light source device driver 25, the movable device driver 26, etc., and outputs a drive signal to the light source device 12 or the movable device 13 based on the input control signal.

[0111] The drive signal is a signal for controlling the drive of the light source device 12 or the movable device 13. For example, in the light source device 12, the drive signal is a drive voltage for controlling the timing and intensity of irradiation of the light source. Also, in the movable device 13, the drive signal is a drive voltage for controlling the timing and range of movement of the reflective surface 14 of the movable device 13.

[0112] Next, a process of optically scanning the surface 15 to be scanned by the optical scanning system 10 will be described with reference to Fig. 26. Fig. 26 is a flowchart of an example of a process performed by the optical scanning system.

[0113] In step S11, the control unit 30 acquires optical scanning information from an external device or the like.

[0114] In step S12, the control unit 30 generates a control signal from the acquired optical scanning information and outputs the control signal to the drive signal output unit 31.

[0115] In step S13, the drive signal output unit 31 outputs drive signals to the light source device 12 and the movable device 13 based on the input control signal.

[0116] In step 14, the light source device 12 emits light based on the input drive signal. The movable device 13 moves the reflecting surface 14 based on the input drive signal. By driving the light source device 12 and the movable device 13, the light is deflected in an arbitrary direction and optical scanning is performed.

[0117] In the above-described optical scanning system 10, one control device 11 has devices and functions for controlling the light source device 12 and the movable device 13, but the control device for the light source device and the control device for the movable device may be provided separately.

[0118] In the optical scanning system 10, the single control device 11 is provided with the functions of the control unit 30 for the light source device 12 and the movable device 13 and the function of the drive signal output unit 31, but these functions may exist separately, for example, a drive signal output device having the drive signal output unit 31 may be provided separately from the control device 11 having the control unit 30. Note that, in the optical scanning system 10, the movable device 13 having the reflective surface 14 and the control device 11 may constitute an optical deflection system that performs optical deflection.

[0119] [Image projection device] Next, an image projection device to which the movable device of this embodiment is applied will be described in detail with reference to FIGS.

[0120] Fig. 27 is a schematic diagram of an embodiment of an automobile 400 equipped with a head-up display device 500, which is an example of an image projection device. Fig. 28 is a schematic diagram of an example of the head-up display device 500.

[0121] The image projection device is a device that projects an image by optical scanning, and is, for example, a head-up display device.

[0122] 27, the head-up display device 500 is installed, for example, near the windshield (windshield 401, etc.) of an automobile 400. Projection light L emitted from the head-up display device 500 is reflected by the windshield 401 and directed toward an observer (driver 402) who is a user. This allows the driver 402 to visually recognize an image projected by the head-up display device 500 as a virtual image. Note that a combiner may be installed on the inner wall surface of the windshield, and the user may visually recognize a virtual image by the projection light reflected by the combiner.

[0123] As shown in FIG. 28, in the head-up display device 500, laser light is emitted from red, green, and blue laser light sources 501R, 501G, and 501B. The emitted laser light passes through an incidence optical system including collimator lenses 502, 503, and 504 provided for each laser light source, two dichroic mirrors 505 and 506, and a light amount adjustment unit 507, and is then deflected by a movable device 13 having a reflecting surface 14. The deflected laser light passes through a projection optical system including a free-form surface mirror 509, an intermediate screen 510, and a projection mirror 511, and is projected onto a screen. In the head-up display device 500, the laser light sources 501R, 501G, and 501B, the collimator lenses 502, 503, and 504, and the dichroic mirrors 505 and 506 are unitized as a light source unit 530 by an optical housing.

[0124] The head-up display device 500 projects an intermediate image displayed on an intermediate screen 510 onto a windshield 401 of an automobile 400, thereby allowing a driver 402 to visually recognize the intermediate image as a virtual image.

[0125] The laser beams of each color emitted from the laser light sources 501R, 501G, and 501B are converted into approximately parallel beams by collimator lenses 502, 503, and 504, respectively, and are combined by two dichroic mirrors 505 and 506. The combined laser beams are adjusted in amount by a light amount adjustment unit 507, and then two-dimensionally scanned by a movable device 13 having a reflecting surface 14. The projection light L two-dimensionally scanned by the movable device 13 is reflected by a free-form surface mirror 509, where distortion is corrected, and then the light is focused on an intermediate screen 510 to display an intermediate image. The intermediate screen 510 is composed of a microlens array in which microlenses are arranged two-dimensionally, and the projection light L incident on the intermediate screen 510 is magnified in units of the microlens.

[0126] The movable device 13 reciprocates the reflective surface 14 in two axial directions, thereby two-dimensionally scanning the projection light L incident on the reflective surface 14. The drive control of this movable device 13 is performed in synchronization with the emission timing of the laser light sources 501R, 501G, and 501B.

[0127] The above describes the head-up display device 500 as an example of an image projection device, but the image projection device may be any device that projects an image by performing optical scanning with the movable device 13 having the reflective surface 14. For example, the present invention can be similarly applied to a projector that is placed on a desk or the like and projects an image onto a display screen, or a head-mounted display device that is mounted on a mounting member that is mounted on the observer's head or the like and projects an image onto a reflective / transmissive screen of the mounting member or projects an image using the observer's eye as a screen.

[0128] In addition, the image projection device may be mounted not only on a vehicle or a mounting member, but also on a moving body such as an aircraft, a ship, or a mobile robot, or on a non-moving body such as a work robot that operates a drive object such as a manipulator without moving from its location.

[0129] The head-up display device 500 is an example of a "head-up display" as recited in the claims. The automobile 400 is an example of a "vehicle" as recited in the claims.

[0130] [Optical writing device] Next, an optical writing device to which the movable device 13 of this embodiment is applied will be described in detail with reference to FIGS.

[0131] Fig. 29 shows an example of an image forming apparatus incorporating an optical writing device 600. Also, Fig. 30 is a schematic diagram of an example of an optical writing device.

[0132] 29, the optical writing device 600 is used as a component of an image forming apparatus represented by a laser printer 650 having a printer function using laser light. In the image forming apparatus, the optical writing device 600 optically writes on a photosensitive drum, which is a scanned surface 15, by optically scanning the photosensitive drum with one or more laser beams.

[0133] As shown in FIG. 30, in an optical writing device 600, a laser beam from a light source device 12 such as a laser element passes through an imaging optical system 601 such as a collimator lens, and is then deflected in one or two axial directions by a movable device 13 having a reflecting surface 14. The laser beam deflected by the movable device 13 then passes through a scanning optical system 602 consisting of a first lens 602a, a second lens 602b, and a reflecting mirror section (movable section) 602c, and is irradiated onto a surface 15 to be scanned (e.g., a photosensitive drum or photosensitive paper), thereby performing optical writing. The scanning optical system 602 forms an image of the light beam in a spot shape on the surface 15 to be scanned. The light source device 12 and the movable device 13 having the reflecting surface 14 are driven under the control of the control device 11.

[0134] In this way, the optical writing device 600 can be used as a component of an image forming device having a printer function using laser light. In addition, by changing the scanning optical system to enable optical scanning not only in one axis direction but also in two axes directions, the optical writing device 600 can be used as a component of an image forming device such as a laser label device that deflects a laser light onto a thermal medium, optically scans the medium, and prints by heating the medium.

[0135] The movable device 13 having the reflecting surface 14 applied to the optical writing device consumes less power to drive than a rotating polygon mirror using a polygon mirror or the like, which is advantageous for saving power in the optical writing device. Also, the wind noise generated by the movable device 13 when vibrating is smaller than that of a rotating polygon mirror, which is advantageous for improving the quietness of the optical writing device. The optical writing device requires an overwhelmingly smaller installation space than a rotating polygon mirror, and the amount of heat generated by the movable device 13 is small, making it easy to reduce the size, which is advantageous for reducing the size of the image forming device.

[0136] [Object recognition device] Next, an object recognition device to which the movable device of the above embodiment is applied will be described in detail with reference to FIGS.

[0137] Fig. 31 is a schematic diagram of an automobile equipped with a LiDAR (Laser Imaging Detection and Ranging) device, which is an example of an object recognition device. It is a schematic diagram of an automobile equipped with a LiDAR device in a lamp unit that mounts a headlamp of the automobile. Fig. 32 is a schematic diagram of an example of the LiDAR device.

[0138] The object recognition device is a device that recognizes objects in a target direction, such as a lidar device.

[0139] As shown in FIG. 31, a lidar device 700 is mounted on, for example, an automobile 701, and recognizes an object 702 by optically scanning the object in the target direction and receiving reflected light from the object 702 present in the target direction.

[0140] As shown in FIG. 32, the laser light emitted from the light source device 12 passes through an incident optical system consisting of a collimator lens 703, which is an optical system that converts divergent light into approximately parallel light, and a plane mirror 704, and is scanned in one or two axial directions by a movable device 13 having a reflecting surface 14. Then, the laser light passes through a projection lens 705, which is a projection optical system, and is irradiated onto an object 702 in front of the device. The light source device 12 and the movable device 13 are controlled by the control device 11. The reflected light reflected by the object 702 is optically detected by a photodetector 709. That is, the reflected light passes through a condenser lens 706, which is an incident light detection and light receiving optical system, and is received by an image sensor 707, which outputs a detection signal to a signal processing circuit 708. The signal processing circuit 708 performs predetermined processing such as binarization and noise processing on the input detection signal, and outputs the result to a distance measurement circuit 710.

[0141] The distance measurement circuit 710 recognizes the presence or absence of the target object 702 based on the time difference between when the light source device 12 emits laser light and when the laser light is received by the photodetector 709, or the phase difference between each pixel of the image sensor 707 that receives the light, and further calculates distance information to the target object 702.

[0142] The movable device 13 having the reflective surface 14 is less likely to break than a polygonal mirror and is small, making it possible to provide a small, highly durable radar device. Such a lidar device can be attached to, for example, a vehicle, an aircraft, a ship, a robot, etc., and can optically scan a predetermined range to determine the presence or absence of an obstacle and the distance to the obstacle.

[0143] In the above object recognition device, the lidar device 700 has been described as an example, but the object recognition device may be a device that performs optical scanning by controlling a movable device 13 having a reflective surface 14 with a control device 11, and recognizes the target object 702 by receiving reflected light with a photodetector, and is not limited to the above-mentioned embodiment.

[0144] For example, the technology can be applied to biometric authentication, which calculates object information such as shape from distance information obtained by optically scanning a hand or face, and recognizes the target object by referring to a record; security sensors which recognize intruding objects by optically scanning a target range; and components of 3D scanners which calculate and recognize object information such as shape from distance information obtained by optical scanning, and output it as 3D data.

[0145] [Laser headlamp] Next, a laser headlamp 50 in which the movable device of the above embodiment is applied to an automobile headlight will be described with reference to Fig. 33. Fig. 33 is a schematic diagram for explaining an example of the configuration of the laser headlamp 50.

[0146] The laser headlamp 50 includes a control device 11, a light source device 12b, a movable device 13 having a reflective surface 14, a mirror 51, and a transparent plate 52.

[0147] Light source device 12b is a light source that emits blue laser light. The light emitted from light source device 12b is incident on movable device 13 and reflected by reflection surface 14. Movable device 13 moves the reflection surface in the XY directions based on a signal from control device 11, and performs two-dimensional scanning in the XY directions with the blue laser light from light source device 12b.

[0148] The scanning light from the movable device 13 is reflected by the mirror 51 and enters the transparent plate 52. The front or back surface of the transparent plate 52 is covered with a yellow phosphor. When the blue laser light from the mirror 51 passes through the yellow phosphor coating on the transparent plate 52, it changes to white within the legally defined color range for headlights. As a result, the front of the car is illuminated with white light from the transparent plate 52.

[0149] The scanning light from the movable device 13 is scattered in a predetermined manner when passing through the phosphor of the transparent plate 52. This reduces glare on the illumination target in front of the automobile.

[0150] When the movable device 13 is applied to a headlight of an automobile, the colors of the light source device 12b and the phosphor are not limited to blue and yellow, respectively. For example, the light source device 12b may be near ultraviolet light, and the transparent plate 52 may be covered with a uniform mixture of phosphors of blue, green, and red, which are the three primary colors of light. Even in this case, the light passing through the transparent plate 52 can be converted to white light, and the front of the automobile can be illuminated with white light.

[0151] [Head-mounted display] Next, a head mounted display 60 to which the movable device of the above embodiment is applied will be described with reference to Figs. 34 to 33. Here, the head mounted display 60 is a head mounted display that can be mounted on a human head, and can be shaped like glasses, for example. The head mounted display will be abbreviated to HMD hereinafter.

[0152] Fig. 34 is a perspective view illustrating an example of the appearance of the HMD 60. In Fig. 34, the HMD 60 is composed of a front 60a and a temple 60b, which are provided approximately symmetrically on the left and right sides. The front 60a can be composed of, for example, a light guide plate 61, and the optical system, control device, etc. can be built into the temple 60b.

[0153] Fig. 35 is a diagram illustrating a portion of the configuration of the HMD 60. Note that, although Fig. 35 illustrates the configuration for the left eye, the HMD 60 has a similar configuration for the right eye.

[0154] The HMD 60 includes a control device 11 , a light source unit 530 , a light amount adjustment section 507 , a movable device 13 having a reflecting surface 14 , a light guide plate 61 , and a half mirror 62 .

[0155] As described above, the light source unit 530 is a unit formed by unitizing the laser light sources 501R, 501G, and 501B, the collimator lenses 502, 503, and 504, and the dichroic mirrors 505 and 506 using an optical housing. In the light source unit 530, the three color laser beams from the laser light sources 501R, 501G, and 501B are combined by the dichroic mirrors 505 and 506. The light source unit 530 emits a combined parallel light.

[0156] The light from the light source unit 530 is adjusted in amount by the light amount adjustment section 507 and then enters the movable device 13. The movable device 13 moves the reflection surface 14 in the XY directions based on a signal from the control device 11, and performs two-dimensional scanning with the light from the light source unit 530. The drive control of this movable device 13 is performed in synchronization with the emission timing of the laser light sources 501R, 501G, and 501B, and a color image is formed by the scanning light.

[0157] The scanning light from the movable device 13 is incident on a light guide plate 61. The light guide plate 61 reflects the scanning light on its inner wall surface and guides the light to a half mirror 62. The light guide plate 61 is made of a resin or the like that is transparent to the wavelength of the scanning light.

[0158] The half mirror 62 reflects the light from the light guide plate 61 to the rear side of the HMD 60 and emits it in the direction of the eyes of a wearer 63 of the HMD 60. The half mirror 62 has, for example, a free curved surface shape. An image formed by the scanning light is formed on the retina of the wearer 63 by reflection from the half mirror 62. Alternatively, an image is formed on the retina of the wearer 63 by reflection from the half mirror 62 and the lens effect of the crystalline lens in the eyeball. Furthermore, spatial distortion of the image is corrected by reflection from the half mirror 62. The wearer 63 can observe the image formed by the light scanned in the XY directions.

[0159] Since 62 is a half mirror, an image based on light from the outside world and an image based on the scanning light are superimposed and observed by the wearer 63. By providing a mirror instead of the half mirror 62, it is possible to eliminate light from the outside world and to configure so that only the image based on the scanning light can be observed.

[0160] [Eyeball tilt position detection device (pupil or cornea position detection device)] Next, a case where the above-mentioned movable device is applied as an eyeball tilt position detection device will be described. In this embodiment, the "eyeball tilt position" is the position of the pupil or cornea of ​​the eyeball, or the direction of the user's gaze. In the following, the "eyeball tilt position" is the position of the pupil or cornea, and the "eyeball tilt position detection device" is described as a "pupil or cornea position detection device." In addition, the pupil or cornea position detection device described below is synonymous with a gaze direction tracking device (eye tracking device) that detects or tracks the gaze direction of a user continuously or at time intervals.

[0161] Fig. 36 is a schematic diagram showing a pupil or cornea position detection device 80 equipped with an image display function. The arrows shown in the figure indicate the X, Y, and Z directions, and this figure shows the main parts as seen from above (+Y direction). The pupil or cornea position detection device 80 shown in Fig. 36 has a light source 82, a first light deflection unit 83, a light scanning unit 84, a second light deflection unit 85, and a light receiving unit 86.

[0162] The light source 82 includes, for example, laser light sources (82r, 82g, 82b) that emit red, green, and blue laser light, and an infrared laser light source 82ir that emits infrared laser light. The laser light sources 82r, 82g, and 82b may be any one or a combination of two, and emit light for drawing an image by the movable device 13.

[0163] The infrared laser light source 82ir emits light for detecting the pupil or cornea position. The light for detecting the pupil or cornea position is not limited to infrared light, and may be visible light. However, from the viewpoint of improving the visibility of the drawn image, invisible light is preferable.

[0164] The first optical deflection unit 83 is, for example, a dichroic mirror, and deflects the light emitted from the light source 82 toward the reflection surface 14 of the movable device 13 while synthesizing the light. The first optical deflection unit 83 may be provided in plurality according to the number of the laser light sources (82r, 82g, 82b) and the infrared laser light source 82ir included in the light source 82. In the embodiment shown in Fig. 36, the first optical deflection unit 83 deflects the light while synthesizing the respective lights using the first optical deflection units 83-1, 83-2, 83-3, 83-4, and 83-5.

[0165] The movable device 13 is any one of the movable devices described as the first or second embodiment. The movable device 13 includes a reflecting surface 14, and scans the light deflected by the first light deflection unit 83 in a two-dimensional direction toward the second light deflection unit 5. At this time, the movable device 13 scans the light deflected by the first light deflection unit 83 by, for example, raster scanning, to form an image.

[0166] The second light deflection unit 85 is, for example, a holographic optical element, and deflects the light L1 scanned by the movable device 13 toward the user's eyeball 87. At least a part of the light L2 deflected by the second light deflection unit 85 is incident on the user's eyeball 87 as display image light. The second light deflection unit 85 may also be configured to include a plurality of light deflection members. For example, a configuration may be used in which a plurality of types of light deflection members that reflect specific light among the light emitted from the light source 82 are used, and the reflection surface is different for each light emitted from the light source 82. As a specific example, a configuration in which a light deflection member that reflects light emitted from the laser light sources (82r, 82g, 82b) and a light deflection member that reflects light emitted from the infrared laser light source 82ir are stacked in order of proximity to the eyeball 87 may be mentioned.

[0167] The light receiving unit 86 receives light L3 reflected by the user's eyeball 87 out of the light L2 deflected by the second light deflection unit 85, and outputs a detection signal S D(see FIG. 37). The light receiving unit 86 is, for example, an imaging element capable of detecting infrared rays. A plurality of light receiving units 86 may be provided at positions capable of receiving light L3 reflected by the user's eyeball 87. The light intensity of the light received by the light receiving unit 86 changes depending on the change in position of the eyeball (pupil, cornea, etc.), i.e., the change in the line of sight. Therefore, the pupil or cornea position detection device 80 in this embodiment detects or estimates the pupil or cornea position based on the intensity of the light received by the light receiving unit 86. The light receiving unit 86 may also be configured to image the eyeball 87 illuminated with light L2 deflected by the second light deflection unit 85. In this case, the pupil or cornea position detection device 80 outputs the captured image (detection signal S D The tilt position of the eyeball is detected or estimated based on the position of the pupil or cornea included in the position (a) of the eye (87) and the position at which the light L2 deflected by the second light deflection unit 85 is reflected on the eyeball (87).

[0168] As described above, the pupil or cornea position detection device 80 according to this embodiment can detect the position of the pupil or cornea while forming an image with the movable device 13. Furthermore, since the movable device 13 is configured to scan light more efficiently, it is possible to realize image formation and pupil or cornea position detection with lower power. Furthermore, compared to the configuration of the conventional technology, the movable device 13 can obtain the above-mentioned effects without changing the area required for mounting on the pupil or cornea position detection device 80. This allows the pupil or cornea position detection device 80 to be configured not to become large.

[0169] Furthermore, the pupil or cornea position detection device 80 can be mounted on a head mounted display as, for example, an eye tracking device to detect or track the user's gaze direction. In this case, for example, by lowering the resolution of the image displayed in the area near the user's gaze direction compared to the image displayed in the other area (foveal rendering), image processing can be speeded up compared to when a high-resolution image is displayed over the entire area.

[0170] FIG. 37 is a diagram showing a configuration when the pupil or cornea position detection device described in FIG. 36 is mounted on a head mounted display. The pupil or cornea position detection device 80 shown in FIG. 37 includes a light source 82, first light deflection units 83-1 to 83-4, a lens 92, a lens 93, a scanning mirror 94, a deflection mirror 95, a second light deflection unit 85, a light receiving unit 86, and a control unit 96. The light source 82, the first light deflection units 83-1 to 83-4, the second light deflection unit 85, and the light receiving unit 86 are similar to the configuration described in FIG. 36, so that overlapping features may be omitted. The lens 92 is an optical system that converts the light emitted by the light source 82 into approximately parallel light. The lens 93 is an optical system that shapes the light converted into approximately parallel light by the lens 92 into a desired laser beam state. In this embodiment, a configuration having the lens 92 and the lens 93 is shown, but the lens 92 and the lens 93 are not necessarily provided.

[0171] The light formed by the lenses 92 and 93 is incident on the scanning mirror 94 (movable device 13). The scanning mirror 94 scans the incident light to form image light. The formed image light is incident on the deflection mirror 95 and is reflected in a direction toward the second optical deflection unit 85. The deflection mirror 95 corresponds to the first optical deflection unit 83-5 described in FIG. 36, and is preferably configured to be capable of scanning light having the movable device 13. By configuring the deflection mirror 95 to be capable of optical scanning, it is possible to project an image over a wider range.

[0172] 37 illustrates a configuration in which the deflection mirror 95 is disposed between the scanning mirror 94 and the second optical deflection unit 85, but the present invention is not limited to this. The scanning mirror 94 may be disposed between the deflection mirror 95 and the second optical deflection unit 85, and the light reflected by the deflection mirror 95 may be scanned in two axial directions by the scanning mirror 94 and made to enter the second optical deflection unit 85.

[0173] The control unit 96 detects the detection signal S D The control unit 96 detects the position of the user's pupil or cornea based on the signal S, and obtains information indicating the line of sight. The control unit 96 also outputs a formation drive signal S to the light source 82 to form an image to be projected onto the retina. L1to control the emission and light intensity of the light source 82, and to provide a scan drive signal S to the scan mirror 94. S In addition, when the deflection mirror 95 is configured to be capable of optical scanning, the control unit 96 controls the projection position of the image according to the acquired line-of-sight information by applying a deflection drive signal S T to drive the deflection mirror 95.

[0174] As described above, one embodiment of the present invention is as follows.

[0175] <1> The movable device according to this embodiment has a movable part 101, a driving part 112 having a piezoelectric part 32 and driving the movable part, and a support part 120 supporting the movable part via the driving part 112, the driving part 112 having a film thickness amplifying part 40 amplifying the film thickness of the driving part, the film thickness amplifying part being continuous with the support part, and this makes it possible to increase the deflection angle of the movable part.

[0176] <2> The movable device according to the present embodiment is characterized in that the width of the driving part in a direction perpendicular to the direction in which the driving part extends from the support part is narrower than the width of the film thickness amplifying part in the perpendicular direction. <1> This makes it possible to increase the deflection angle of the movable part.

[0177] <3> The movable device according to the present embodiment is characterized in that the width of the driving part in a direction perpendicular to the direction in which the driving part extends from the support part is narrower than the width of the support part in the perpendicular direction. <1> ~ <2> This makes it possible to increase the deflection angle of the movable part.

[0178] <4> The movable device according to the present embodiment is characterized in that at least a part of the film thickness amplifying portion has an area overlapping the piezoelectric portion in a plan view. <1> ~ <3> This makes it possible to increase the deflection angle of the movable part.

[0179] <5> The movable device according to the present embodiment is characterized in that the driving section has a driving section substrate, the driving section substrate has the piezoelectric section on a first surface, and has a film thickness amplifying section on a second surface that is a reverse surface of the first surface. <1> ~ <4> This makes it possible to increase the deflection angle of the movable part.

[0180] <6> The movable device according to the present embodiment is characterized in that the film thickness increasing portion is formed of at least one of the substrates forming the support portion. <1> ~ <5> This makes it possible to increase the deflection angle of the movable part.

[0181] <7> The movable device according to this embodiment is characterized in that the film thickness amplifying portion has a shape that is symmetrical with respect to a straight line passing through the center of the movable portion and the center of the driving portion in a plan view. <1> ~ <6> This makes it possible to increase the deflection angle of the movable part.

[0182] <8> In the movable device according to the present embodiment, the film thickness amplifying portion has a first width parallel to a direction in which the driving portion extends from the support portion, and a second width parallel to the direction and narrower than the first width. <1> ~ <7> This makes it possible to increase the deflection angle of the movable part.

[0183] <9> In the movable device according to the present embodiment, each of the first and second widths is located at an end of the thickness increasing portion in a direction perpendicular to the direction, and the width of the thickness increasing portion continuously narrows from the first width to the second width. <8> This makes it possible to increase the deflection angle of the movable part.

[0184] <10> In the movable device according to the present embodiment, the film thickness amplifying portion has a plurality of the first widths, and the first widths are positioned symmetrically with respect to the second width in a direction perpendicular to the direction. <8> ~ <9> This makes it possible to increase the deflection angle of the movable part.

[0185] <11> The movable device according to the present embodiment is characterized in that the second width is located at the center of the thickness increasing portion in a direction perpendicular to the direction. <10> This makes it possible to increase the deflection angle of the movable part.

[0186] <12> In the movable device according to the present embodiment, the film thickness increasing portion has a concave shape on the movable portion side in a plan view. <10> ~ <11> This makes it possible to increase the deflection angle of the movable part.

[0187] <13> The projection device according to this embodiment includes: <1> ~ <12> In accordance with the present invention, there is provided a projection device having an optical scanning system including the movable device according to the first embodiment. This makes it possible to provide a projection device having an increased deflection angle of the movable part.

[0188] <14> The head-up display according to this embodiment is <1> ~ <12> A head-up display including the movable device according to claim 1. This makes it possible to provide a head-up display having an increased swing angle of the movable part.

[0189] <15> The laser headlamp according to this embodiment is <1> ~ <12> A laser headlamp including the movable device according to claim 1. This makes it possible to provide a laser headlamp with an increased deflection angle of the movable part.

[0190] <16> The head mounted display according to this embodiment includes: <1> ~ <12> A head mounted display including the movable device according to claim 1. This makes it possible to provide a head mounted display having an increased deflection angle of the movable part.

[0191] <17> The object recognition device according to this embodiment includes: <1> ~ <12> In this way, it is possible to provide an object recognition device having an increased swing angle of the movable part.

[0192] <18> The moving body according to this embodiment is <17> In this way, it is possible to provide a moving body including an object recognition device with an increased swing angle of a movable part.

[0193] <19> The pupil or cornea position detection device according to this embodiment has the following features: <1> ~ <12> In this way, it is possible to provide a pupil or cornea position detection device having an increased deflection angle of the movable part. [Explanation of symbols]

[0194] 13 Mobile Devices 32(202) Piezoelectric part 34 Drive circuit board 40 Film thickness amplification section 101 Moving parts 110a First member 110b Second member 110c Third member 110d Fourth member 111a First connection part 111b Second connection part 111c 3rd connection 111d 4th connection part 112a First drive unit (an example of a drive unit) 112b Second driving unit (an example of a driving unit) 112c Third drive unit (an example of a drive unit) 112d Fourth drive unit (an example of a drive unit) 120 Support part

Claims

1. A movable part; A drive unit including a piezoelectric portion and configured to drive the movable portion; a support portion that supports the movable portion via the drive portion, the driving unit includes a film thickness amplifying unit that amplifies a film thickness of the driving unit, The movable device, wherein the film thickness amplifying portion is continuous with the supporting portion.

2. 2. The movable device according to claim 1, wherein a width of the driving portion in a direction perpendicular to a direction in which the driving portion extends from the supporting portion is narrower than a width of the film thickness amplifying portion in the perpendicular direction.

3. 2 . The movable device according to claim 1 , wherein a width of the driving portion in a direction perpendicular to a direction in which the driving portion extends from the supporting portion is narrower than a width of the supporting portion in the perpendicular direction.

4. 2. The movable device according to claim 1, wherein at least a part of the film thickness amplifying portion has an area overlapping with the piezoelectric portion in a plan view.

5. The drive unit has a drive unit substrate, the drive unit substrate has the piezoelectric unit on a first surface, 2. The movable device according to claim 1, further comprising a film thickness increasing portion on a second surface which is a surface opposite to the first surface.

6. 2. The movable device according to claim 1, wherein the film thickness increasing portion is formed of the same substrate as at least one of the substrates forming the supporting portion.

7. 2. The movable device according to claim 1, wherein the film thickness amplifying portion has a shape that is line-symmetrical with respect to a straight line passing through a center of the movable portion and a center of the driving portion in a plan view.

8. 2. The movable device according to claim 1, wherein the film thickness amplifying portion has a first width parallel to a direction in which the driving portion extends from the support portion, and a second width parallel to the direction and narrower than the first width.

9. 9. The movable device according to claim 8, wherein each of the first and second widths is located at an end of the thickness increasing portion in a direction perpendicular to the direction, and the width of the thickness increasing portion narrows continuously from the first width to the second width.

10. 9. The movable device according to claim 8, wherein the film thickness increasing portion has a plurality of the first widths, the first widths being positioned symmetrically with respect to the second width in a direction perpendicular to the direction.

11. 11. The movable device according to claim 10, wherein the second width is located at the center of the thickness amplification portion in a direction perpendicular to the direction.

12. The movable device according to claim 10 , wherein the film thickness increasing portion has a concave shape on the movable portion side in a plan view.

13. 13. A projection device comprising an optical scanning system comprising a movable device according to any one of the preceding claims.

14. A head-up display comprising a movable device according to any one of claims 1 to 12.

15. A laser headlamp comprising a movable device according to any one of claims 1 to 12.

16. A head mounted display comprising a movable device according to any one of claims 1 to 12.

17. An object recognition device comprising a movable device according to any one of claims 1 to 12.

18. A moving body comprising the object recognition device according to claim 17.

19. A pupil or cornea position detection device comprising a movable device according to any one of claims 1 to 12.

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