Processing system

Abstract

To provide a processing system which can properly measure a position of at least one of a radiation device which radiates processing light to an object (i.e, a processing device which processes the object) and the object.MEANS: A processing system radiates processing light to an object through a radiation optical system to process the object and includes: a radiation device having at least a final optical element of the radiation optical system; a moving device which moves the radiation device; a first measurement device which is disposed in the radiation device and measures a position of the object; a second measurement device which measures the position of the object through the final optical element; and a third measurement device which radiates measurement light from a position away from the radiation device to the radiation device and detects the measurement light to measure the position of the radiation device.SELECTED DRAWING: Figure 1

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