Detection system, lithography device, and article producing method

Abstract

To provide a detection system advantageous for detecting leakage.SOLUTION: A detection system for detecting leakage at connection points of piping through which fluid flows, includes: a first sound generation unit that is provided at a first connection point of the piping through which fluid flows, and generates a first sound when a leakage occurs from the first connection point; a second sound generation unit that is provided at a second connection point of the piping through which fluid flows, and generates a second sound when a leakage occurs from the second connection point; and a control unit that discriminates the first sound from the second sound. The first sound is different in characteristics from the second sound.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The present invention relates to a detection system, a lithographic apparatus, and a method for manufacturing an article. [Background technology]

[0002] In the manufacture of liquid crystal panels, organic electroluminescence displays, semiconductor devices, etc., exposure equipment is used to expose a pattern of an original onto a substrate coated with a photosensitive material. Industrial equipment such as exposure equipment is equipped with many pipes to supply gas for temperature control and liquid for cooling.

[0003] In pipe joints, leaks can occur due to deterioration of the joints over time or poor pipe connections. When such a leak occurs, the location of the leak must be identified immediately and measures taken to address it. If such measures are not taken quickly, it can lead to a decline in the quality of the product or a long stoppage in the production of the product.

[0004] Patent Document 1 discloses that a sound generating unit is provided at the connection of a pipe through which a refrigerant flows, and when the connection becomes loose for some reason, a leak can be detected by the sound generated from the sound generating unit. Using the mechanism disclosed in Patent Document 1, leak detection can be performed. [Prior art documents] [Patent documents]

[0005] [Patent Document 1] JP 2016-65614 A Summary of the Invention [Problem to be solved by the invention]

[0006] However, if there is sound occurring in the surrounding environment, there is a risk that the sound will be drowned out and the detection of the leak will be delayed, or that it will be difficult to identify the location of the leak. Furthermore, although Patent Document 1 describes that the sound will enable people in the vicinity to notice the leak, the method of Patent Document 1 may not be able to detect the leak if there is no person nearby, and there is a risk that the response to the leak will be delayed.

[0007] SUMMARY OF THE PRESENT EMBODIMENTS Accordingly, an object of the present invention is to provide a detection system that is advantageous in detecting leaks. [Means for solving the problem]

[0008] In order to achieve the above-mentioned object, a detection system as one aspect of the present invention is a detection system that detects a leak at a connection point of a pipe through which a fluid flows, and includes a first sound generating unit provided at a first connection point of the pipe through which the fluid flows and generating a first sound when a leak occurs from the first connection point, a second sound generating unit provided at a second connection point of the pipe through which the fluid flows and generating a second sound when a leak occurs from the second connection point, and a control unit that distinguishes between the first sound and the second sound, and the first sound has different characteristics from the second sound. Effect of the Invention

[0009] According to the present invention, it is possible to provide a detection system that is advantageous in detecting a leak. [Brief description of the drawings]

[0010] [Figure 1] FIG. 1 is a schematic diagram showing a configuration of a detection system. [Diagram 2] FIG. 2 is a schematic diagram showing the configuration of a joint. [Diagram 3] FIG. 2 is a schematic diagram showing a configuration of a sound generating unit. [Figure 4] 1 is a flow chart of a method for detecting a leak. [Diagram 5] FIG. 4 is a schematic diagram showing the configuration of a joint in Modification 1. [Figure 6] 11 is a schematic diagram showing the configuration of a joint in Modification 2. FIG. [Figure 7] FIG. 11 is a schematic diagram showing the configuration of a joint in Modification 3. [Figure 8] FIG. 1 is a schematic diagram showing a configuration of an exposure apparatus. [Figure 9] 1 is a flowchart of a method for manufacturing an article. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0011] DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Preferred embodiments of the present invention will now be described in detail with reference to the accompanying drawings. In the drawings, the same reference numerals are used to refer to the same components, and duplicated explanations will be omitted.

[0012] <Embodiments of the detection system> FIG. 1 is a diagram showing a detection system for detecting leaks (leakage, leakage) of a fluid (gas, liquid). The detection system 101 has joints 4, 5, 6, and 7, and each joint is provided with a sound generating unit that generates a sound with a different characteristic when a leak occurs. For example, a joint 4 (first joint) provided at a first connection point of the pipe generates a first sound (first scale) when a leak occurs, and a joint 5 (second joint) provided at a second connection point of the pipe generates a second sound (second scale) when a leak occurs. Note that the sound generating unit that generates the sound will be described below, and the sound generating unit that generates the first sound is also called the first sound generating unit, and the sound generating unit that generates the second sound is also called the second sound generating unit. In this embodiment, the number of joints may be two or more.

[0013] Hereinafter, the area in which the joints 4, 5, 6, and 7 are provided will be referred to as the first area 2. In this embodiment, joints 4', 5', 6', and 7' having the same configuration as the first area 2 may be provided. The area in which the joints 4', 5', 6', and 7' are provided will be referred to as the second area 3.

[0014] The detection system 101 may further include a detection unit 8. The detection system 101 may further include a processing terminal 1 (control unit). The detection units 8, 8' are configured in each area, and the detection units 8, 8' are connected to the processing terminal 1. The processing terminal 1 receives detection data detected by each detection unit.

[0015] Fig. 2 is a schematic diagram showing the configuration of joint 4. Note that joints 5-7 and 4'-7' have the same basic configuration, so their explanation will be omitted. Joint 4 has a main body 9, a seal portion 10, a pipe 11, and a sound-producing portion 12. As shown in Fig. 2, a passage 13 leading from the joint to the outside of the joint is provided at a position moved from seal portion 10 towards the pipe connection port, and sound-producing portion 12 is disposed in passage 13.

[0016] 3 is a schematic diagram showing the configuration of sound producing unit 12. Sound producing unit 12 has a conventionally known structure known as a harmonica, and has reeds 14 provided inside sound producing unit 12. Sound producing unit 12 can generate sound by vibrating reeds 14, and the characteristics of the generated sound can be changed by changing the material and shape of reed 14.

[0017] For example, by changing the length of the reed 14, the frequency of the sound generated from the sound generating unit 12 can be changed. It is possible to generate a constant frequency regardless of the amount of leakage. Also, by setting the length of the reed 14 of the sound generating unit for each of the joints 4, 5, 6, and 7 to be different, it is possible to generate sounds of different frequencies from each sound generating unit. It is also preferable that each sound generating unit is tuned to a different scale.

[0018] Although the characteristics of the generated sound have been described above, the characteristics may be other than frequency, for example, the characteristics may be volume, or other characteristics that allow the difference between sounds to be recognized.

[0019] A leak in a joint can occur due to deterioration of the seal portion 10 in the joint 4 over time or a faulty connection to the seal portion 10 of the pipe 11. When such a fault occurs, a so-called leak occurs in which the fluid flows into the passage 13 and leaks to the outside. In this embodiment, however, since the sound generating portion 12 is provided in the passage 13, a sound is generated when a leak occurs.

[0020] A method for detecting a leak in this embodiment will be described with reference to Fig. 4. Fig. 4 is a flowchart showing a series of steps for detecting a leak. As described above, a case is assumed in which a leak occurs in a joint (for example, joint 4).

[0021] In step S1, a sound generated by the sound generating unit 12 of the joint 4 is detected by the detection unit 8 disposed near the joint. In step S2, detection data relating to the leak detected by the detection unit 8 is transferred (transmitted) to the processing terminal 1.

[0022] In step S3, the processing terminal 1 performs a sound identification process based on the detection data transferred to the processing terminal 1. As an example, a process of identifying the frequency (more specifically, the scale) and volume of the sound based on the detection data is performed. In step S4, the processing terminal 1 detects a leak based on the sound identified in S3. As an example, if the volume exceeds a threshold, it is determined that there is a leak.

[0023] In step S5, the processing terminal 1 identifies the location where the sound is occurring based on the detection data. As an example, the location where the leak is occurring is identified by comparing the detection data detected by the detection unit 8 with advance data that is stored in advance in the processing terminal 1 and indicates the relationship between the connection location where the leak may occur and the musical scale.

[0024] In addition, when a leak is detected, for example after S5, it is preferable that the processing terminal 1 notifies the user of information related to the leak. The processing terminal 1 further has a notification means for notifying the user of information related to the leak. The notification means may notify the user of the information by voice (such as a warning sound). The notification means may also notify the user of the information by a screen display (such as a PC monitor). This allows the user to obtain information related to the leak without having to directly hear the sound and determine whether there is a leak. In addition, since information about the location of the leak can be easily obtained, it becomes possible to quickly arrange for repairs and take measures against the leak.

[0025] Next, another embodiment of the joint 4 different from the above will be described.

[0026] 5 is a schematic diagram showing the configuration of a joint 4 as Modification 1. Although the above describes the arrangement of the seal portion 10 (first seal portion), a separate seal portion 15 (second seal portion) may be arranged around the sound generating portion 12. The seal portion 15 prevents the fluid flowing due to a leak from flowing to any place other than the sound generating portion 12, and can efficiently generate sound when a leak occurs.

[0027] 6 is a schematic diagram showing the configuration of the joint 4 as Modification 2. In the above, it has been described that the sound producing part 12 is provided inside the passage 13, but the sound producing part 12 may be provided outside the passage 13 (i.e., outside the main body part 9). In addition, the configuration as in Modification 2 has the advantage that the sound producing part 12 can be easily attached and replaced.

[0028] Fig. 7 is a schematic diagram showing the configuration of a joint 4 as a modified example 3. Fig. 7 is a diagram showing two pipes connected to a main body portion from both sides. When the pipe connection ports are divided into a first space 16 and a second space 17 with the center of the joint as a boundary, it is also possible to set a sound generating unit 12 for each pipe connection port of one joint.

[0029] The detection system 101 described above can exclude from monitoring in advance any noise constantly occurring within the device that has characteristics similar to those of the sound generated by the sound generator 12. Furthermore, by using only a microphone as the detection unit 8, all subsequent processing can be performed by the processing terminal 1. Furthermore, instead of deploying the system at all piping connections within the device, the system can be applied only to those parts that require particularly strict monitoring in terms of device operation.

[0030] By using the detection system 101 in this embodiment, it becomes possible to quickly detect the occurrence and location of a fluid leak. This is expected to improve productivity, etc. In addition, since there is no need for a person to constantly monitor for leaks, it is advantageous in that leaks can be detected.

[0031] <Embodiments of Exposure Apparatus> In this embodiment, an example in which the above-described detection system 101 is mounted on an exposure apparatus will be described. The exposure apparatus is an apparatus used in a lithography process when manufacturing devices such as semiconductor devices and flat panel displays (FPDs), and forms a latent image pattern on a substrate by transferring a pattern of a mask (original) onto a substrate coated with resist. In this embodiment, a step-and-scan type exposure apparatus will be described, but the present invention is not limited to this, and other exposure methods such as a step-and-repeat type may also be used.

[0032] 8 is a schematic diagram showing the configuration of an exposure apparatus 20 in this embodiment. The exposure apparatus 20 has a light source 21, an illumination optical system 22, a mask stage 23, a projection optical system 24, a substrate stage 25, and a detection system 101. The illumination optical system 22 illuminates the mask M with light from the light source 21. The projection optical system 24 projects an image of the pattern formed on the mask M onto the substrate W. Each part of the exposure apparatus 20 is controlled by a main controller (not shown).

[0033] The mask stage 23 is a movable stage that holds a mask M. The substrate stage 25 is a movable stage that holds a substrate W. The mask M and the substrate W are disposed at optically conjugate positions via a projection optical system 24.

[0034] When the exposure apparatus 20 performs an exposure process, heat is generated in each part of the exposure apparatus 20. For example, when the exposure light is irradiated onto optical members configured in the illumination optical system 22 or the projection optical system 24, some of the energy of the exposure light is absorbed, and heat may be generated within the optical system. In order to keep the temperature within the optical system constant, piping is connected to the illumination optical system 22 and the projection optical system 24 to supply a temperature control gas. The detection system 101 can detect leaks in piping connected to the illumination optical system 22, the projection optical system 24, or other parts of the exposure apparatus 20.

[0035] <Embodiments of the method for manufacturing an article> The method for manufacturing an article according to an embodiment of the present invention is suitable for manufacturing articles such as flat panel displays (FPDs), semiconductor devices, sensors, and optical elements. FIG. 9 is a flow chart of the method for manufacturing an article according to this embodiment. The method for manufacturing an article according to this embodiment includes a step of forming a latent image pattern on a photosensitive material applied on a substrate by exposure using the exposure apparatus 20 described above to obtain an exposed substrate (exposure step, step S11). The method also includes a step of developing the substrate exposed in this step to obtain a developed substrate (development step, step S12). Furthermore, the manufacturing method includes other well-known steps (oxidation, film formation, deposition, doping, planarization, etching, resist peeling, dicing, bonding, packaging, etc.) (processing step, step S13). The method for manufacturing an article according to this embodiment is advantageous in at least one of the performance, quality, productivity, and production cost of the article compared to conventional methods.

[0036] Although the preferred embodiments of the present invention have been described above, it goes without saying that the present invention is not limited to these embodiments, and various modifications and changes are possible within the scope of the gist of the present invention. The scope of application of the present invention may be, for example, a detection system applied to a substrate processing apparatus or lithography apparatus, such as a semiconductor manufacturing apparatus (film forming apparatus, sputtering apparatus, annealing apparatus, inspection apparatus, etc.), an organic electroluminescence deposition apparatus, an imprint apparatus, or a planarization apparatus. The present invention may also be applied to other industrial equipment.

[0037] The disclosure herein includes at least the following detection system, lithographic apparatus, and article manufacturing method.

[0038] (Item 1) A detection system for detecting a leak at a connection point of a pipe through which a fluid flows, comprising: a first sound generating unit that is provided at a first connection point of a pipe through which a fluid flows and generates a first sound when a leak occurs from the first connection point; a second sound generating unit provided at a second connection point of the pipe through which the fluid flows and configured to generate a second sound when a leak occurs from the second connection point; A control unit that distinguishes between the first sound and the second sound; having A detection system, wherein the first sound has different characteristics than the second sound.

[0039] (Item 2) 2. The detection system according to claim 1, wherein the characteristic is a frequency.

[0040] (Item 3) 3. The detection system of item 2, wherein the first sound is a first scale and the second sound is a second scale different from the first scale.

[0041] (Item 4) 2. The detection system of claim 1, wherein the characteristic is volume.

[0042] (Item 5) 5. The detection system according to any one of items 1 to 4, further comprising a detection unit that detects the first sound and the second sound.

[0043] (Item 6) 6. The detection system according to any one of items 1 to 5, wherein the first sound producing unit and the second sound producing unit are provided in different pipes.

[0044] (Item 7) 6. The detection system according to any one of items 1 to 5, wherein the first sound producing unit and the second sound producing unit are provided in the same pipe.

[0045] (Item 8) 8. The detection system according to claim 1, further comprising a notification unit that notifies a user of information related to a leak when the leak is detected.

[0046] (Item 9) 9. The detection system according to item 8, wherein the notification means notifies the user of the information by voice.

[0047] (Item 10) 9. The detection system according to item 8, wherein the notification means notifies the user of the information by displaying the information on a screen.

[0048] (Item 11) 11. The detection system according to any one of items 8 to 10, wherein the notification means notifies a user of a location where a leak has occurred.

[0049] (Item 12) 1. A lithography apparatus for forming a pattern on a substrate using light from a light source, comprising: A pipe through which a fluid flows; A detection system according to any one of items 1 to 11, having The lithography apparatus according to claim 1, wherein the detection system detects a leak at a connection point of the piping.

[0050] (Item 13) An exposure step of exposing a substrate using the lithography apparatus according to item 12 to obtain an exposed substrate; a developing step of developing the exposed substrate to obtain a developed substrate, A method for manufacturing an article, comprising the steps of: manufacturing an article from the developed substrate. [Explanation of symbols]

[0051] 1 Processing terminal (control unit) 11 Piping 12 Pronunciation section (first pronunciation section, second pronunciation section) 101 Detection System

Claims

1. A detection system for detecting a leak at a connection point of a pipe through which a fluid flows, comprising: a first sound generating unit provided at a first connection point of a pipe through which a fluid flows and configured to generate a first sound when a leak occurs from the first connection point; a second sound generating unit provided at a second connection point of the pipe through which the fluid flows and configured to generate a second sound when a leak occurs from the second connection point; A control unit that distinguishes between the first sound and the second sound; having The detection system according to claim 1, wherein the first sound has a different characteristic than the second sound.

2. The detection system of claim 1 , wherein the characteristic is a frequency.

3. 3. The detection system of claim 2, wherein the first sound is a first scale and the second sound is a second scale different from the first scale.

4. The detection system of claim 1 , wherein the characteristic is a volume.

5. The detection system according to claim 1 , further comprising a detection unit that detects the first sound and the second sound.

6. The detection system according to claim 1 , wherein the first sound producing unit and the second sound producing unit are provided in different pipes.

7. The detection system according to claim 1 , wherein the first sound producing unit and the second sound producing unit are provided in the same pipe.

8. 2. The detection system according to claim 1, further comprising a notification means for notifying a user of information relating to a leak when a leak is detected.

9. 9. The detection system according to claim 8, wherein the notification means notifies the user of the information by voice.

10. 9. The detection system according to claim 8, wherein the notification means notifies the user of the information by displaying the information on a screen.

11. 9. The detection system according to claim 8, wherein the notification means notifies a user of a location where a leak has occurred.

12. 1. A lithography apparatus for forming a pattern on a substrate using light from a light source, comprising: A pipe through which a fluid flows; A detection system according to any one of claims 1 to 11; having The lithography apparatus according to claim 1, wherein the detection system detects a leak at a connection point of the piping.

13. an exposure step of exposing a substrate using the lithography apparatus according to claim 12 to obtain an exposed substrate; a developing step of developing the exposed substrate to obtain a developed substrate, A method for manufacturing an article, comprising the steps of: manufacturing an article from the developed substrate.

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