Resolution acquisition device, resolution acquisition method and resolution acquisition program

Abstract

To provide a resolution acquisition device, a resolution acquisition method and a resolution acquisition program capable of acquiring a correlation of resolution.SOLUTION: A resolution acquisition device comprises: a first acquisition part for sliding an X-ray source with respect to a reference object, in a direction crossing a depth direction of the reference object for radiating an X-ray, and acquiring transmission X-ray images obtained by detecting the transmission X-ray transmitted the reference object by a detection part; a second acquisition part for acquiring resolution according to the depth direction, on the basis of a plane size of reference openings which are arranged in the depth direction of the reference object and where a plane size in a plane direction crossing the depth direction is grasped in advance, and a pixel number of the images on the reference openings recorded in the transmission X-ray images acquired by the first acquisition part; and a third acquisition part for acquiring a correlation of the resolution, on the basis of positions for acquiring images on the multiple reference openings obtained on the basis of the transmission X-ray images of the reference object, and the resolution acquired by the second acquisition part.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The present disclosure relates to a resolution acquisition device, a resolution acquisition method, and a resolution acquisition program. [Background technology]

[0002] Conventionally, three-dimensional measurements are sometimes performed using X-ray CT scanners, and there is an instrument for evaluating the length measurement error to evaluate the measurement accuracy (see Patent Document 1). This instrument is made by attaching support rods of different lengths, each with a sphere fixed to its tip, to a base, and arranging 15 spheres in a three-dimensional space on the base. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] JP 2020-020799 A Summary of the Invention [Problem to be solved by the invention]

[0004] Incidentally, when an X-ray source irradiates an object with X-rays and a detection unit detects the transmitted X-rays that have passed through the object to obtain transmitted image information (two-dimensional transmitted X-ray image information), the resolution of the object is determined by the distance from the X-ray source to the detection unit (FDD: Focus Detector Distance) and the distance from the X-ray source to the object (FOD: Focus Object Distance). The applicant has developed a depth measurement technology that uses two-dimensional transmitted X-ray images by applying tomosynthesis technology, but in order to obtain the planar size of the object, it was necessary to obtain a resolution appropriate for this development. It should be noted that the technique described in Patent Document 1 is unable to obtain the resolution appropriately.

[0005] The present disclosure provides a resolution acquisition device, a resolution acquisition method, and a resolution acquisition program capable of acquiring the correlation of resolution. [Means for solving the problem]

[0006] One embodiment of the resolution acquisition device includes a first acquisition unit that acquires a transmitted X-ray image by sliding an X-ray source against a reference object in a direction intersecting the depth direction of the reference object to irradiate X-rays and detects the transmitted X-rays that have passed through the reference object with a detection unit, a second acquisition unit that acquires a resolution according to the depth direction based on the planar size of reference openings that are arranged in multiple depth directions of the reference object and whose planar size in a planar direction intersecting the depth direction is known in advance and the number of pixels of the image of the reference openings recorded in the transmitted X-ray image acquired by the first acquisition unit, and a third acquisition unit that acquires a correlation of resolution based on the positions at which images of each of the multiple reference openings are obtained based on the transmitted X-ray image of the reference object and the resolution acquired by the second acquisition unit. Effect of the Invention

[0007] The resolution acquisition device, the resolution acquisition method, and the resolution acquisition program of the present disclosure can acquire the correlation of resolution. [Brief description of the drawings]

[0008] [Figure 1] FIG. 1 is a diagram for explaining a resolution acquisition device according to an embodiment. [Diagram 2] FIG. 1 is a block diagram illustrating a resolution acquisition device according to an embodiment. [Diagram 3] FIG. 2 is a diagram for explaining an example of an X-ray source and a detection unit. [Figure 4] 1A is a diagram for explaining an example of a target, and FIG. 1B is a diagram for explaining an evaluation target. [Diagram 5] 1A is a diagram for explaining the contour of an opening related to image information, in which (A) is Fig. 1 when a plurality of openings are overlapped, (B) is Fig. 1 explaining the amount of transmission, (C) is Fig. 2 when a plurality of openings are overlapped, and (D) is Fig. 2 explaining the amount of transmission. [Figure 6]11 is a diagram for explaining an example of a correlation between the depth of a reference opening and the amount of deviation. FIG. [Figure 7] 11 is a diagram for explaining an example of a correlation between a deviation amount and resolution. FIG. [Figure 8] 1 is a flowchart illustrating a resolution acquisition method according to an embodiment. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0009] An embodiment will be described below.

[0010] [Overview of Resolution Acquisition Device 1] First, an overview of a resolution acquisition device 1 according to an embodiment will be described. FIG. 1 is a diagram for explaining a resolution acquisition device 1 according to an embodiment.

[0011] In the present disclosure, a technique for acquiring the correlation of resolution, which is used when acquiring the planar size of the object 20 (opening 230 (see FIG. 3)) by applying the tomosynthesis technique, is proposed. Note that the thing for acquiring the planar size is not limited to the opening 230 (evaluation opening 233 (see FIG. 4(B))), and various things may be used.

[0012] The resolution acquisition device 1 includes, for example, an X-ray source 2, an X-ray detection unit (detection unit) 3, and a processing unit 10.

[0013] The X-ray source 2 is an X-ray generating device that generates X-rays to be irradiated to the object 20. The X-ray source 2 includes, for example, a fixed anode X-ray tube. For example, a metal such as tungsten or molybdenum is used as a target for the anode of the X-ray tube. The X-ray source 2 sets the amount of X-rays (amount of energy) to be generated according to the thickness and material of the object 20 through which the X-rays pass, for example, based on the control of the processing unit 10 described later. For example, a known X-ray irradiation device may be used as the X-ray source 2. The target 20 may be, for example, a member made of various materials including a metal member.

[0014] The detection unit 3 detects, for example, X-rays that have been irradiated from the X-ray source 2 and then transmitted through the object 20. The detection unit 3 detects, for example, the intensity (e.g., dose and exposure dose) of the transmitted X-rays that have transmitted through the object 20. For example, a known X-ray detection device may be used as the detection unit 3. Furthermore, the detection unit 3 may generate image information (transmitted X-ray image information) based on, for example, the detection of the transmitted X-rays.

[0015] The processing unit 10 may, for example, transmit and receive information between the X-ray source 2 and the X-ray detection unit 3. The processing unit 10 may, for example, be a computer (information processing device) such as a server, a desktop computer, or a laptop computer.

[0016] The processing unit 10 irradiates the object 20 (e.g., the reference object 210 and the evaluation object 220, etc.) with X-rays from the X-ray source 2. The reference object 210 may be an object in which a plurality of openings 230 (reference openings 232) with different (known) depths are formed (see FIG. 4(A)). The planar size (e.g., width W, etc.) of each of the openings 230 (reference openings 232) formed in the reference object 210 may be known. The evaluation object 220 may be an object in which an opening 230 (evaluation opening 233) whose planar size is to be measured is formed (see FIG. 4(B)). In this case, the processing unit 10 slides and moves the X-ray source 2 in a direction (crossing direction X) that intersects with the depth direction Y (direction from the X-ray source 2 side to the detection unit 3 side) in which the openings 230 are formed (see FIG. 3). Furthermore, the processing unit 10 irradiates the object 20 with X-rays multiple times while moving the X-ray source 2 in multiple steps or continuously in the crossing direction X. When the detection unit 3 detects transmitted X-rays that have passed through the object 20 in response to irradiation of X-rays from the X-ray source 2, the processing unit 10 acquires a transmitted X-ray image obtained by the detection unit 3. That is, the processing unit 10 acquires information related to the transmitted X-ray image (transmitted X-ray image information).

[0017] The processing unit 10, for example, acquires a resolution according to the depth of the reference opening 232 since the depths A, B, and C (see FIG. 4(A)) of each of the multiple openings 230 (reference openings 232) formed in the reference object 210 are known. Here, the processing unit 10 acquires a resolution based on the planar size (e.g., width W, etc.) of the reference opening 232 since the planar size is known, and the number of pixels of the image of the reference opening 232 recorded in the transmitted X-ray image. The resolution may be a value obtained by dividing the planar size (width W) of the reference opening 232 by the number of pixels of the image of the reference opening 232. Conversely, the resolution may be a value obtained by dividing the number of pixels of the image of the reference opening 232 by the planar size (width W) of the reference opening 232.

[0018] The resolution is a value determined by the FDD and FOD. Since the depths of the multiple reference openings 232 are different, the resolution obtained at each reference opening 232 can be said to be a resolution according to the depth direction.

[0019] To apply the tomosynthesis technology, the processing unit 10 irradiates the reference object 210 with X-rays while sliding the X-ray source 2. Therefore, when an image of the reference opening 232 is obtained in the detection unit 3, the distance from the reference position L1 corresponding to the position where the reference object 210 is disposed to the position L2 where the image of the reference opening 232 is obtained in the detection unit 3 changes (moves) according to the sliding movement of the X-ray source 2. The amount of deviation L from the reference position L1 to the position L2 where the image of the reference opening 232 is obtained in the detection unit 3 is 12 , i.e., the sliding distance d of the X-ray source 2 12 varies depending on the depth of the reference opening 232. Therefore, the processing unit 10 acquires the correlation of resolution based on the position L2 where an image of the reference opening 232 is obtained in the detection unit 3, i.e., the position L2 where the image of the reference opening 232 is obtained and recorded in the transmitted X-ray image, and the above-mentioned resolution (resolution according to the depth direction) (see Figure 7).

[0020] [Details of resolution acquisition device 1] Next, the resolution acquisition device 1 according to an embodiment will be described in detail. In particular, the processing unit 10 will be described in detail. FIG. 2 is a block diagram illustrating the resolution acquisition device 1 according to an embodiment. FIG. 3 is a diagram for explaining an example of the X-ray source 2 and the detection unit 3. As shown in FIG. Fig. 4 is a diagram for explaining an example of the object 20. Fig. 4(A) is a diagram for explaining a reference object 210, and Fig. 4(B) is a diagram for explaining an evaluation object 220. Fig. 5 is a diagram for explaining the contour of the opening 230 related to image information. Fig. 5(A) is a first diagram when a plurality of openings 230 are overlapped, Fig. 5(B) is a first diagram for explaining the amount of transmission, Fig. 5(C) is a second diagram when a plurality of openings 230 are overlapped, and Fig. 5(D) is a second diagram for explaining the amount of transmission. FIG. 6 is a diagram for explaining an example of the correlation between the depth of the reference opening 232 and the amount of deviation.

[0021] 2, the resolution acquisition device 1 (processing unit 10) includes, for example, a communication unit 121, a storage unit 122, a display unit 123, and a control unit 110. The communication unit 121, the storage unit 122, and the display unit 123 may be an embodiment of an output unit. The control unit 110 includes, for example, an X-ray source control unit 111, a first acquisition unit 112, a second acquisition unit 113, a third acquisition unit 114, a fourth acquisition unit 115, a fifth acquisition unit 116, and an output control unit 117. The control unit 110 may be configured by, for example, an arithmetic processing unit of the resolution acquisition device 1. The control unit 110 (e.g., a calculation processing unit, etc.) may realize the functions of each unit (e.g., the X-ray source control unit 111, the first acquisition unit 112, the second acquisition unit 113, the third acquisition unit 114, the fourth acquisition unit 115, the fifth acquisition unit 116, and the output control unit 117, etc.) by, for example, appropriately reading and executing various programs, etc. stored in the memory unit 122, etc.

[0022] The communication unit 121 is, for example, a communication interface capable of transmitting and receiving various information to and from a device (external device) outside the resolution acquisition device 1. The communication unit 121 may communicate with, for example, the X-ray source 2 and the detection unit 3. The communication unit 121 may also communicate with, for example, a server and a user terminal (not shown). The user terminal may be, for example, a terminal used by a user of the resolution acquisition device 1, and may be a desktop, a laptop, a tablet, a smartphone, or the like.

[0023] The storage unit 122 may store, for example, various information and programs. Examples of the storage unit 122 may be a memory, a solid state drive, a hard disk drive, etc. Note that the storage unit 122 may be, for example, a storage area and a server on a cloud.

[0024] The display unit 123 is, for example, a display capable of displaying various characters, symbols, images, and the like.

[0025] The X-ray source control unit 111 controls the X-ray source 2 via the communication unit 121. As an example, the X-ray source control unit 111 controls the X-ray source 2 to slide. As illustrated in FIG. 3, the direction of the slide may be, for example, a direction intersecting (intersecting direction X) with respect to the depth direction Y of the opening 230 formed in the target 20, particularly a direction perpendicular thereto. As a result, the X-ray source control unit 111 causes the X-ray source 2 to irradiate the target 20 with X-rays multiple times while sliding the X-ray source 2, that is, while moving the X-ray source 2 in multiple steps or continuously in the intersecting direction X. The target 20 may be a reference target 210 and an evaluation target 220, for example. The reference target 210 may be, for example, a target in which openings 230 (reference openings 232) are formed at different known depths. The planar size (for example, width W, etc.) of each of the openings 230 (reference openings 232) formed in the reference target 210 may be known. The evaluation target 220 may be an object in which an opening 230 (evaluation opening 233) is formed, the planar size of which (such as width W) is to be measured. The opening 230 may be, for example, a through hole, a hole having a bottom, or a void that serves as a space.

[0026] The reference object 210 and the evaluation object 220 may be imaged at the same timing or at different timings to generate respective transmitted X-ray images. Furthermore, the reference surfaces 213, 221 of the reference object 210 and the evaluation object 220 may be disposed at the same (or approximately the same, etc.) distance from the X-ray source 2. The reference surface 213 of the reference object 210 may be the surface of the reference plate 211 closest to the X-ray source 2 in the reference object 210 as shown in FIG. 4(A). Furthermore, the reference surface 221 of the evaluation object 220 may be, for example, the surface closest to the X-ray source 2 in the evaluation object 220 as shown in FIG. 4(B).

[0027] 4(A) has, for example, a plurality of openings 230 (reference openings 232) having different depths (distances) A, B, and C from a reference plate 211. In the case illustrated in FIG. 4(A), the reference object 210 includes a reference plate 211 and a plurality of plates 212 including one (or a plurality) of reference openings 232. In the reference object 210, the positions of the multiple reference openings 232 may be different when viewed in the depth direction Y (see FIG. 4(A)). In addition, the opening widths (width W) (known) of the multiple reference openings 232 (for example, diameters when the reference openings 232 are circular) may be different from each other. In addition, the opening shapes of the multiple openings 230 may be different from each other. In this way, when the multiple reference openings 232 are projected onto the detection unit 3 by the X-rays irradiated to the reference object 210, it becomes possible to identify the multiple reference openings 232, that is, to specify the opening widths (width W) (and depths, etc.) according to the differences between the multiple reference openings 232. It should be noted that the reference plate 211 may or may not have the reference opening 232 .

[0028] 4B may be a member made of various materials including metal, etc. The evaluation object 220 may have an evaluation opening 233 (for example, a void) therein.

[0029] The first acquisition unit 112 acquires a transmitted X-ray image generated in the detection unit 3. Specifically, the first acquisition unit 112 acquires a transmitted X-ray image generated in response to detection of X-rays (transmitted X-rays) transmitted through the reference object 210 in the detection unit 3, for example, via the communication unit 121. That is, the first acquisition unit 112 slides the X-ray source 2 in a direction X intersecting a depth direction Y of the reference object 210 to irradiate X-rays, and acquires a transmitted X-ray image obtained by detecting the transmitted X-rays transmitted through the reference object 210 with the detection unit 3.

[0030] Since the depth of each of the multiple openings 230 (reference openings 232) formed in the reference object 210 is known, for example, the second acquisition unit 113 acquires a resolution corresponding to the depth of the reference opening 232. That is, the second acquisition unit 113 acquires a resolution corresponding to the depth direction Y based on the planar size (width W) of the reference openings 232 arranged in the depth direction Y of the reference object 210 and known in advance in a planar direction (e.g., intersecting direction X) intersecting the depth direction Y, and the number of pixels of the image of the reference opening 232 recorded in the transmitted X-ray image acquired by the first acquisition unit 112 (the number of pixels (at position L2) when the image of each of the multiple detection objects is obtained by the detection unit 3). The planar direction may be, for example, the X direction in which the X-ray source 2 slides, that is, the direction along the detection surface of the detection unit 3. The planar size (width W) may be at least one of the lengths of the width and height in a plane along the planar direction, or may be various lengths other than the width and height (for example, the length in a diagonal direction in the plane). The planar size (width W) of the actual reference opening 232 is known. Moreover, the transmitted X-ray image is composed of a plurality of pixels, etc. Since the image of the reference opening 232 is recorded in the transmitted X-ray image, the second acquisition unit 113 can acquire the planar size based on the number of pixels of the image of the reference opening 232. Therefore, the second acquisition section 113 can acquire the resolution based on the planar size (width W) of the actual reference opening 232 and the number of pixels of the image of the reference opening 232 (planar size (width) of the image). The second acquisition section 113 acquires the resolution according to the depth direction Y based on the planar size (width W) of each of the multiple reference openings 232 arranged in the depth direction Y and the number of pixels of the image of each reference opening 232 (planar size (width) of each of the multiple images). The resolution may be a value obtained by dividing the planar size (width W) of the reference opening 232 by the number of pixels of the image corresponding to that reference opening 232.

[0031] Here, in order to apply the tomosynthesis technology, the resolution acquisition device 1 irradiates X-rays toward the reference object 210 while sliding the X-ray source 2. Therefore, when an image of the reference opening 232 is obtained in the detection unit 3, the distance from the reference position L1 corresponding to the position where the reference object 210 is disposed to the position L2 where the image of the reference opening 232 is obtained in the detection unit 3 changes (moves) according to the sliding movement of the X-ray source 2.

[0032] The second acquisition unit 113 identifies a position (predetermined position) L2 where the change in the amount of transmitted X-rays at the contour of the reference opening 232 based on a plurality of transmitted X-ray images acquired in response to moving the X-ray source 2 in multiple steps or continuously for the reference object 210 is equal to or greater than a predetermined value, and calculates a deviation amount L based on the identified position L2 and the reference position L1. 12 It is also possible to obtain the following.

[0033] When multiple transmission X-ray images in which an image of the reference object 210 (reference opening 232) is recorded are superimposed while sliding the X-ray source 2, it is considered that the contour of the reference opening 232 in which the multiple images are superimposed becomes clearer when the apparent movement amount of the X-ray source 2 with respect to the reference opening 232 is small. Similarly, when the apparent movement amount of the X-ray source 2 with respect to the reference opening 232 is large, it is considered that the contour of the reference opening 232 in which the images are superimposed becomes less clear.

[0034] When the reference opening 232 is located at a shallower position in the depth direction Y (closer to the X-ray source 2), when the X-ray source 2 moves to a position closer to the reference opening 232 (the movement amount d shown in FIG. 3), 12 is small), the apparent movement amount of the X-ray source 2 with respect to the reference opening 232 (for example, the movement amount in the -X direction of the image of the reference opening 232 projected onto the detection unit 3) is considered to be larger. That is, in this case, the outline of the reference opening 232 in which multiple images are superimposed is considered to be less clear. Similarly, when the reference opening 232 is located at a shallower position in the depth direction Y (closer to the X-ray source 2), when the X-ray source 2 moves to a position farther from the reference opening 232 (the movement amount d exemplified in FIG. 3 ), 12is large), the apparent movement amount of the X-ray source 2 with respect to the reference opening 232 (for example, the movement amount in the -X direction of the image of the reference opening 232 projected onto the detection unit 3) is considered to be smaller. That is, in this case, the outline of the reference opening 232 in which multiple images are superimposed is considered to be clearer.

[0035] In addition, when the reference opening 232 is located at a deeper position in the depth direction Y (closer to the detection unit 3), when the X-ray source 2 moves to a position closer to the reference opening 232 (the movement amount d 12 is small), the apparent movement amount of the X-ray source 2 with respect to the reference opening 232 (for example, the movement amount in the -X direction of the image of the reference opening 232 projected onto the detection unit 3) is considered to be smaller. That is, in this case, the outline of the reference opening 232 with the image superimposed is considered to be clearer. Similarly, when the reference opening 232 is located at a deeper position in the depth direction Y (closer to the detection unit 3), when the X-ray source 2 moves to a position farther from the reference opening 232 (the movement amount d 12 is large), the apparent movement amount of the X-ray source 2 with respect to the reference opening 232 (for example, the movement amount in the -X direction of the image of the reference opening 232 projected onto the detection unit 3) is considered to be larger. That is, in this case, the outline of the reference opening 232 with the image superimposed is considered to be less clear.

[0036] The outline of the reference opening 232 is determined, for example, according to the amount of X-ray transmission. If the amount of X-ray transmission is greater, it can be estimated that the reference opening 232 is present, and if the amount of X-ray transmission is smaller, it can be estimated that the reference opening 232 is not present. Therefore, when multiple transmitted X-ray images are superimposed, the greater the movement of the opening 230 (reference opening 232), the greater the shift in the images of the multiple openings 230 (reference opening 232) (see FIG. 5(A)), the more unclear the contour portion 231 of the opening 230 (reference opening 232) becomes, and the difference in the amount of X-ray transmission T of the contour portion 231 (the boundary between the inside and outside of the opening) of the opening 230 (reference opening 232) fluctuates more gradually (see FIG. 5(B)). Similarly, when multiple transmitted X-ray images are superimposed, the smaller the movement of the opening 230 (reference opening 232), the smaller the shift in the images of the multiple openings 230 (reference opening 232) (see FIG. 5(C)), the clearer the contour portion 231 of the opening 230 (reference opening 232), and the more abrupt the difference in the amount of X-ray transmission T of the contour portion 231 (the boundary between the inside and outside of the opening) of the opening 230 (reference opening 232) (see FIG. 5(D)).

[0037] When a change in the amount of transmission T of the contour portion 231 of the reference opening 232 when multiple transmitted X-ray images corresponding to the sliding movement of the X-ray source 2 are superimposed is equal to or greater than a preset predetermined value (for example, when the rate of change in the amount of transmission T is equal to or greater than a threshold), the second acquisition unit 113 specifies the position where the movement of the reference opening 232 projected on the detection unit 3 side is the smallest, that is, the position (predetermined position) L2 where the transmitted X-ray image was acquired by moving the X-ray source 2. The second acquisition unit 113 acquires the number of pixels of the image of the reference opening 232 recorded in the transmitted X-ray image at the position (predetermined position) L2. The second obtaining unit 113 may use, for example, the intensity or brightness of the transmitted X-rays as the transmission amount T.

[0038] The amount of deviation L from the reference position L1 corresponding to the position where the reference object 210 is disposed to the position L2 where the X-ray source 2 is moved to acquire the transmitted X-ray image (the image of the reference opening 232) is 12 is correlated with the depths A, B, and C of each of the multiple reference openings 232. That is, based on the transmitted X-ray image of the reference object 210, the second acquisition unit 113 calculates a displacement amount L from a reference position L1 corresponding to the position where the reference object 210 is disposed to a position L2 where the transmitted X-ray image (the image of the reference opening 232) is acquired by moving the X-ray source 2, as shown in FIG. 12 It is possible to obtain a correlation between the depths A, B, and C of each of the multiple reference openings 232 (see FIG. 6).

[0039] The third acquisition unit 114 acquires the correlation of resolution based on the position L2 at which images of each of the multiple reference openings 232 are obtained, which is acquired based on the transmitted X-ray image of the reference object 210 acquired by the second acquisition unit 113, and the resolution. As an example, the third acquisition unit 114 acquires an image shift amount L from a reference position L1 corresponding to the position where the reference target 210 is placed according to the plurality of reference openings 232 acquired by the second acquisition unit 113 to a position L2 where an image of each of the plurality of reference openings 232 is acquired. 12 and the deviation amount L 12 A correlation of the resolution may be obtained based on the resolution according to the.

[0040] FIG. 7 is a diagram for explaining an example of the correlation between the amount of deviation and the resolution.

[0041] In Fig. 7, the horizontal axis deviation L 12 The vertical axis indicates the resolution. The shape in the plane direction (planar shape) of the reference opening 232 is circular, with a diameter of 5.2 mm. The reference object 210 has four such reference openings 232, each with a different depth. The correlation of the resolution obtained using such a reference object 210 is shown in FIG. 7. In FIG. 7, the dots indicate the actually obtained deviation amount L 12 The third acquisition unit 114 acquires the correlation of the resolution, and calculates an approximation equation (deviation amount L 12 and the resolution) may be obtained.

[0042] As another example, the third acquisition unit 114 corresponds to a position L2 at which an image of each of the multiple reference openings 232 is obtained, and calculates a sliding movement amount d of the X-ray source 2 based on a position d2 of the X-ray source 2 when the transmitted X-ray image of the position L2 is acquired and a reference position d1 corresponding to a position at which the reference object 210 is disposed. 12A correlation between the amount of deviation L on the detection unit 3 side and the resolution acquired by the second acquisition unit 113 may be acquired. Here, a triangle OL1L2 formed by the reference position L1, position L2, and position O of the opening 230 (reference opening 232) (see FIG. 3) on the detection unit 3 side, and a triangle Od1d2 formed by the reference position d1, position d2, and position O of the opening 230 (reference opening 232) (see FIG. 3) on the X-ray source 2 side are in a similar relationship. 12 and the relationship between the resolution and the slide movement amount d on the X-ray source 2 side 12 The relationship between the amount of deviation L and the resolution is in a corresponding relationship. 12 and the deviation amount L 12 When the correlation of the resolution can be obtained based on the resolution according to 12 and the slide movement amount d 12 A correlation between the resolution as a function of the resolution based on the

[0043] The fourth acquisition unit 115 may have the same function as the first acquisition unit 112 described above, or may have a different function from the first acquisition unit 112. The fourth acquisition unit 115 acquires a transmitted X-ray image (transmitted X-ray image information) generated in the detection unit 3. Specifically, the fourth acquisition unit 115 acquires a transmitted X-ray image generated in response to detection of X-rays (transmitted X-rays) transmitted through the evaluation object 220 in the detection unit 3, for example, via the communication unit 121. That is, similar to the first acquisition unit 112, the fourth acquisition unit 115 acquires a transmitted X-ray image obtained in the detection unit 3 by irradiating the evaluation object 220 having the evaluation opening 233 with X-rays by sliding the X-ray source 2 in a direction X intersecting with the depth direction Y.

[0044] The fifth acquisition unit 116 acquires the planar size of the evaluation opening 233 based on the position L2 at which an image of the evaluation opening 233 is recorded in the transmitted X-ray image of the evaluation object 220 acquired by the fourth acquisition unit 115 and the correlation acquired by the third acquisition unit 114. The fifth acquisition unit 116 acquires the position L2 for acquiring the image of the evaluation opening 233 in the same manner as when the second acquisition unit 113 acquires the position L2 for acquiring the image of the reference opening 232 as described above. The fifth acquisition unit 116 acquires the amount of shift L of the image of the evaluation opening 233 based on the position L2 for acquiring the image of the evaluation opening 233 and the reference position L1 corresponding to the position where the evaluation target 220 is placed. 12 Here, as an example, the fifth acquisition unit 116 may acquire the shift amount L of the image of the evaluation opening 233 in the correlation of the resolution (for example, a relational expression (approximation expression) or the like) illustrated in FIG. 12 (For example, the deviation amount L 12 ) to obtain the resolution of the evaluation aperture 233. Furthermore, the fifth acquisition unit 116 acquires the number of pixels of the image (the number of pixels in a desired direction within a plane) based on the image of the evaluation opening 233 (the image at the position L2) recorded in the transmitted X-ray image. The fifth acquisition section 116 acquires the planar size of the evaluation opening 233, for example, by performing multiplication or the like based on the resolution of the evaluation opening 233 and the number of pixels of the image of the evaluation opening 233.

[0045] The output control unit 117 may control the output unit to output at least one of the correlation of resolution acquired by the third acquisition unit 114 and the planar size of the evaluation opening 233 acquired by the fifth acquisition unit 116. The output unit may be, for example, the communication unit 121, the storage unit 122, the display unit 123, etc. That is, the output control unit 117 may control the communication unit 121 to transmit, for example, at least one of information on the correlation of resolution and the planar size of the evaluation opening 233 to an external device (not shown). The external device here may be, for example, a server, a user terminal, or the like. The output control unit 117 may control the storage unit 122 to store, for example, information on at least one of the correlation of resolution and the planar size of the evaluation opening 233. The output control unit 117 may control the display unit 123 to display at least one of the correlation of the resolution and the planar size of the evaluation opening 233, for example.

[0046] [Resolution acquisition method] Next, a resolution acquisition method according to an embodiment will be described. FIG. 8 is a flowchart illustrating a resolution acquisition method according to an embodiment.

[0047] In step ST101, the first acquisition unit 112 slides the X-ray source 2 in a direction X intersecting the depth direction Y of the reference object 210 to irradiate X-rays onto the reference object 210, and acquires a transmitted X-ray image by detecting the transmitted X-rays that have passed through the reference object 210 with the detection unit 3.

[0048] In step ST102, the second acquisition unit 113 acquires a resolution according to the depth direction Y based on the planar size of the reference openings 232, which are arranged in multiple locations in the depth direction Y of the reference object 210 and whose planar size in a planar direction (intersecting direction X) intersecting the depth direction Y is known in advance, and the number of pixels of the image of the reference openings 232 recorded in the transmitted X-ray image acquired in step ST101 (the number of pixels when the image of each of the multiple detection objects is obtained by the detection unit 3).

[0049] In step ST103, the third acquisition section 114 acquires the correlation of resolution based on the position L2 at which images of each of the multiple reference openings 232 are obtained based on the transmitted X-ray image of the reference object 210, and the resolution acquired in step ST102. As an example, the third acquisition unit 114 may calculate a shift amount L of an image from a reference position L1 corresponding to the position where the reference target 210 is disposed to a position L2 where an image of each of the multiple reference openings 232 is obtained. 12 A correlation between the resolution acquired in step ST102 and the resolution may be acquired. As another example, the third acquisition unit 114 corresponds to a position L2 at which an image of each of the multiple reference openings 232 is obtained, and calculates a sliding movement amount d of the X-ray source 2 based on a position d2 of the X-ray source 2 when the transmitted X-ray image of the position L2 is acquired and a reference position d1 corresponding to a position at which the reference object 210 is disposed. 12 A correlation between the resolution acquired in step ST102 and the resolution may be acquired.

[0050] In step ST104, the fourth acquisition unit 115 acquires a transmitted X-ray image obtained by the detection unit 3 by sliding the X-ray source 2 in a direction X intersecting the depth direction Y to irradiate X-rays onto the evaluation object 220 having the evaluation opening 233.

[0051] In step ST105, the fifth acquisition unit 116 acquires the planar size of the evaluation opening 233 based on the correlation between the position L2 at which the image of the evaluation opening 233 is recorded in the transmitted X-ray image of the evaluation object 220 acquired in step ST104 and the resolution acquired in step ST103.

[0052] [Functions and circuits] Next, the functions and circuits of the above-mentioned resolution acquisition device 1 will be described. Each unit of the resolution acquisition device 1 may be realized as a function of a computer arithmetic processing unit or the like. That is, the X-ray source control unit 111, the first acquisition unit 112, the second acquisition unit 113, the third acquisition unit 114, the fourth acquisition unit 115, the fifth acquisition unit 116, and the output control unit 117 (control unit 110) of the resolution acquisition device 1 may be realized as an X-ray source control function, a first acquisition function, a second acquisition function, a third acquisition function, a fourth acquisition function, a fifth acquisition function, and an output control function (control function) by a computer arithmetic processing unit or the like, respectively. The resolution acquisition program can cause a computer to realize each of the above-mentioned functions. The resolution acquisition program may be recorded in a non-transitory computer-readable recording medium, such as a memory, a solid-state drive, a hard disk drive, or an optical disk. The recording medium may be rephrased as a non-transitory computer-readable medium, for example. As described above, each unit of the resolution acquisition device 1 may be realized by a processing unit of a computer or the like. The processing unit or the like is constituted by, for example, an integrated circuit or the like. Therefore, each unit of the resolution acquisition device 1 may be realized as a circuit constituting the processing unit or the like. That is, the X-ray source control unit 111, the first acquisition unit 112, the second acquisition unit 113, the third acquisition unit 114, the fourth acquisition unit 115, the fifth acquisition unit 116, and the output control unit 117 (control unit 110) of the resolution acquisition device 1 may be realized as an X-ray source control circuit, a first acquisition circuit, a second acquisition circuit, a third acquisition circuit, a fourth acquisition circuit, a fifth acquisition circuit, and an output control circuit (control circuit) constituting the processing unit or the like of a computer. The communication unit 121, the storage unit 122, and the display unit 123 (output unit) of the resolution acquisition device 1 may be realized as a communication function, a storage function, and a display function (output function) including the functions of an arithmetic processing device, etc. The communication unit 121, the storage unit 122, and the display unit 123 (output unit) of the resolution acquisition device 1 may be realized as a communication circuit, a storage circuit, and a display circuit (output circuit) by being configured, for example, by an integrated circuit, etc. The communication unit 121, the storage unit 122, and the display unit 123 (output unit) of the resolution acquisition device 1 may be realized as a communication device, a storage device, and a display device (output device) by being configured, for example, by being configured by a plurality of devices.

[0053] The resolution acquisition device 1 can be configured by combining one or any two or more of the above-mentioned units. In this disclosure, the term "information" is used, but the term "information" can be replaced with "data" and the term "data" can be replaced with "information."

[0054] [Variations] In the above-described embodiment, the device using X-rays has been described. However, the device and the like of the present disclosure may use not only X-rays but also light and radiation (electromagnetic waves) of various wavelengths (wavelength ranges). In this case, the device and the like may use, for example, infrared light, visible light, ultraviolet light, and electromagnetic waves such as radiation to obtain a transmission image and measure the resolution (correlation of resolution) and planar size. An example of a member that obtains a transmission image using various wavelengths (wavelength ranges) and measures the resolution (correlation of resolution) and planar size may be a member made of various materials including semiconductors.

[0055] [Aspects and Effects of the Present Embodiment] Next, one aspect of this embodiment and the effects of each aspect will be described. Note that each aspect described below is an example at the time of filing, and this embodiment is not limited to the aspects described below. In other words, this embodiment is not limited to each aspect described below, and may be realized by appropriately combining each of the above-mentioned parts. In addition, a lower aspect may be able to cite any of the higher aspects. The effects described below are merely examples, and the effects of each aspect are not limited to those described below. Each aspect may, for example, have at least one of the effects described below.

[0056] (Aspect 1) One embodiment of the resolution acquisition device includes a first acquisition unit that acquires a transmitted X-ray image by sliding an X-ray source against a reference object in a direction intersecting the depth direction of the reference object to irradiate X-rays and detects the transmitted X-rays that have passed through the reference object with a detection unit, a second acquisition unit that acquires a resolution according to the depth direction based on the planar size of reference openings that are arranged in multiple depth directions of the reference object and whose planar size in a planar direction intersecting the depth direction is known in advance and the number of pixels of the image of the reference openings recorded in the transmitted X-ray image acquired by the first acquisition unit, and a third acquisition unit that acquires a correlation of resolution based on the positions at which images of each of the multiple reference openings are obtained based on the transmitted X-ray image of the reference object and the resolution acquired by the second acquisition unit. This allows the resolution acquisition device to acquire the correlation of the resolution.

[0057] (Aspect 2) In one embodiment of the resolution acquisition device, the third acquisition unit may acquire a correlation between the amount of image shift from a reference position corresponding to the position where the reference object is placed to a position where an image of each of the multiple reference openings is obtained, and the resolution acquired by the second acquisition unit. That is, the resolution acquisition device is a device that acquires a shift amount L from a reference position L1 to a position L2 where an image of the reference aperture is obtained by applying a tomosynthesis technique. 12 and the correlation with the resolution (resolution correlation) can be obtained.

[0058] (Aspect 3) In one embodiment of the resolution acquisition device, the third acquisition unit corresponds to a position where an image of each of the multiple reference openings is obtained, and may acquire a correlation between the sliding movement amount of the X-ray source based on the position of the X-ray source when the transmitted X-ray image of that position is acquired and a reference position corresponding to the position where the reference object is placed, and the resolution acquired by the second acquisition unit. In order to apply the tomosynthesis technique, the amount of deviation L from the reference position L1 to the position L2 where the image of the reference aperture is obtained is 12 and the slide movement distance d from the reference position d1 of the X-ray source to the position d2 where the image of the reference aperture is obtained. 12 Therefore, the resolution acquisition device is a device that can obtain an image of the reference aperture by a sliding distance d from the reference position d1 of the X-ray source to a position d2 where the image of the reference aperture is obtained. 12 and the correlation with the resolution (resolution correlation) can be obtained.

[0059] (Aspect 4) One embodiment of the resolution acquisition device may include a fourth acquisition unit that acquires a transmitted X-ray image obtained by the detection unit by sliding an X-ray source in a direction intersecting the depth direction to irradiate X-rays onto an evaluation object having an evaluation opening, and a fifth acquisition unit that acquires a planar size of the evaluation opening based on the position at which an image of the evaluation opening recorded in the transmitted X-ray image of the evaluation object acquired by the fourth acquisition unit is obtained and the correlation acquired by the third acquisition unit. This allows the resolution acquisition device to acquire the planar size of the evaluation opening in the evaluation object by utilizing the resolution (resolution correlation) acquired as described above. In addition, even if the distance in the depth direction Y between the X-ray source and the detection unit is unknown, the resolution acquisition device can obtain the planar size of the evaluation opening because the resolution at the depth of the evaluation object (evaluation opening) can be determined based on the correlation.

[0060] (Aspect 5) In one embodiment of the resolution acquisition method, a computer executes a first acquisition step in which an X-ray source is slid relative to a reference object in a direction intersecting the depth direction of the reference object to irradiate X-rays and acquire a transmitted X-ray image obtained by detecting the transmitted X-rays that have passed through the reference object with a detection unit; a second acquisition step in which a resolution according to the depth direction is acquired based on the planar size of reference openings that are arranged in multiple depth directions of the reference object and whose planar size in a planar direction intersecting the depth direction is known in advance and the number of pixels of the image of the reference openings recorded in the transmitted X-ray image acquired in the first acquisition step; and a third acquisition step in which a correlation of the resolution is acquired based on the positions at which the images of each of the multiple reference openings are obtained based on the transmitted X-ray image of the reference object and the resolution acquired in the second acquisition step. The resolution acquisition method according to one aspect can achieve the same effects as the resolution acquisition device according to the above aspect.

[0061] (Aspect 6) In one embodiment, the resolution acquisition program causes a computer to realize a first acquisition function that acquires a transmitted X-ray image by sliding an X-ray source relative to a reference object in a direction intersecting the depth direction of the reference object to irradiate X-rays and detect the transmitted X-rays that have passed through the reference object with a detection unit; a second acquisition function that acquires a resolution according to the depth direction based on the planar size of reference openings that are arranged in multiple depth directions of the reference object and whose planar size in a planar direction intersecting the depth direction is known in advance and the number of pixels of the image of the reference openings recorded in the transmitted X-ray image acquired by the first acquisition function; and a third acquisition function that acquires the correlation of resolution based on the positions at which the images of each of the multiple reference openings are obtained based on the transmitted X-ray image of the reference object and the resolution acquired by the second acquisition function. The resolution acquisition program according to one aspect can achieve the same effects as the resolution acquisition device according to the above aspect. [Explanation of symbols]

[0062] 1 Resolution acquisition device 2 X-ray source 3 X-ray detection unit (detection unit) 10 Processing section 110 Control section 111 X-ray source control unit 112 First acquisition part 113 Second Acquisition Department 114 Third Acquisition Department 115 4th acquisition part 116 Fifth Acquisition Department 117 Output control section 121 Communications Department 122 Storage section 123 Display section 20 Target 210 Standards 211 Reference Plate 212 Plate 213 Reference plane 220 Evaluation targets 230 Opening 232 Reference opening 233 Evaluation opening

Claims

1. a first acquisition unit that irradiates a reference object with X-rays by sliding an X-ray source in a direction intersecting a depth direction of the reference object, and acquires a transmitted X-ray image by detecting the transmitted X-rays transmitted through the reference object with a detection unit; a second acquisition unit that acquires a resolution according to the depth direction based on a planar size of a reference opening portion that is arranged in a plurality of reference object in the depth direction and whose planar size in a planar direction intersecting the depth direction is known in advance and a pixel count of an image of the reference opening portion recorded in a transmitted X-ray image acquired by the first acquisition unit; a third acquisition unit that acquires a correlation of resolution based on a position at which an image of each of a plurality of reference openings is obtained, the image being acquired based on the transmitted X-ray image of the reference object, and a resolution acquired by the second acquisition unit; A resolution acquisition device comprising:

2. The third acquisition unit acquires a correlation between an amount of shift of an image from a reference position corresponding to a position where the reference target is disposed to a position where an image of each of a plurality of reference openings is acquired, and a resolution acquired by the second acquisition unit. The resolution acquisition device according to claim 1 .

3. The third acquisition unit corresponds to a position where each image of a plurality of reference openings is obtained, and acquires a correlation between a sliding movement amount of the X-ray source based on a position of the X-ray source when the transmitted X-ray image of the corresponding position is acquired and a reference position corresponding to a position where the reference object is disposed, and a resolution acquired by the second acquisition unit. The resolution acquisition device according to claim 1 .

4. a fourth acquisition unit that acquires a transmission X-ray image obtained by the detection unit by irradiating an evaluation object having an evaluation opening with X-rays by sliding the X-ray source in a direction intersecting the depth direction; a fifth acquisition unit that acquires a planar size of the evaluation opening based on a position at which an image of the evaluation opening recorded in the transmitted X-ray image of the evaluation object acquired by the fourth acquisition unit is obtained and the correlation acquired by the third acquisition unit; The resolution acquisition device according to any one of claims 1 to 3, comprising:

5. The computer a first acquisition step of irradiating a reference object with X-rays by sliding an X-ray source in a direction intersecting a depth direction of the reference object, and acquiring a transmitted X-ray image obtained by detecting the transmitted X-rays transmitted through the reference object with a detection unit; a second acquisition step of acquiring a resolution according to the depth direction based on a planar size of a reference opening portion, the planar size of which is known in advance and a pixel count of an image of the reference opening portion recorded in the transmitted X-ray image acquired in the first acquisition step, the second acquisition step being arranged in the depth direction of the reference object and the planar size of which is known in advance and a pixel count of an image of the reference opening portion recorded in the transmitted X-ray image acquired in the first acquisition step; a third acquisition step of acquiring a correlation of resolution based on positions at which images of a plurality of reference openings are acquired based on the transmitted X-ray image of the reference object and the resolution acquired in the second acquisition step; A resolution acquisition method to perform.

6. On the computer, a first acquisition function of irradiating a reference object with X-rays by sliding an X-ray source in a direction intersecting a depth direction of the reference object, and acquiring a transmitted X-ray image obtained by detecting the transmitted X-rays transmitted through the reference object with a detection unit; a second acquisition function that acquires a resolution according to the depth direction based on a planar size of a reference opening portion that is arranged in a plurality of reference object in the depth direction and whose planar size in a planar direction intersecting the depth direction is known in advance and the number of pixels of an image of the reference opening portion recorded in a transmitted X-ray image acquired by the first acquisition function; a third acquisition function that acquires a correlation of resolution based on a position at which an image of each of a plurality of reference openings is obtained, the image being acquired based on a transmitted X-ray image of the reference object, and a resolution acquired by the second acquisition function; A resolution acquisition program that achieves this.

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