Coating inspection system

Abstract

To provide a coating inspection system that is capable of accurately inspecting a state of coating a workpiece with a fluid, even in a case in which relative movement speed between an inspection device and the workpiece varies.SOLUTION: A coating inspection system S1 includes an image-capturing device 10, a moving device 30, and an inspection control device 40. The coating inspection system S1 executes: image-capturing processing of acquiring a plurality of images image-captured at different image-capturing timings by the image-capturing device 10, in a process of relatively moving the image-capturing device 10 and a workpiece W; feature point extraction processing of extracting feature points included in the images; movement amount derivation processing of deriving a relative movement amount between the image-capturing device 10 and the workpiece W among image-capturing timings; image formation processing of forming an inspection image by arranging and compositing, on the basis of the relative movement amount, original images that have been acquired in the image-capturing processing and have different image-capturing timings; and inspection processing of performing inspection regarding coating on the basis of the inspection image.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The present invention relates to a coating inspection system. [Background technology]

[0002] Conventionally, there has been provided a paste application device as disclosed in the following Patent Document 1. This paste application device applies linear paste to a substrate from an application nozzle while moving an XY table on which the substrate is placed, and has imaging cameras arranged on the left and right, front and rear of the application nozzle above the XY table, a slit light source that irradiates slit light perpendicular to the linear paste from an oblique direction at the intersection of the optical axis of each imaging camera and the XY table, and judges the quality of the paste application properties based on image data captured by the imaging cameras. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] JP 2000-15163 A Summary of the Invention [Problem to be solved by the invention]

[0004] Here, the inventors of the present invention have intensively studied whether sufficient inspection accuracy can be obtained when a fluid such as paste is applied to a workpiece using an application device equipped with an inspection device such as the above-mentioned conventional technology, even if the relative movement speed between the application device and the workpiece is changed during the application operation. As a result, it was found that when an inspection device equipped with an imaging camera or the like is moved relative to the workpiece together with the application device while changing the movement speed, the inspection accuracy is reduced if the imaging camera is used to capture images at regular time intervals. Specifically, when performing an inspection while moving relative to the workpiece, the moving device accelerates in a straight section and decelerates in a curved section, so that the change in the movement speed is large. Therefore, in a state in which the movement speed fluctuates as described above, the distance traveled by the inspection device between the imaging timings of the imaging camera at regular intervals fluctuates. Therefore, it was found that unless information on the relative movement speed and the relative movement amount between the inspection device and the workpiece is taken into account, the inspection images for each imaging timing cannot be synthesized at the correct position, and inspections such as determining the coating position and determining the coating amount based on the coating width and length cannot be performed accurately.

[0005] In addition, in consideration of the above-mentioned problems, the inventors have come to the knowledge that by acquiring position information from a moving device that moves the inspection device and the workpiece relatively, even if a change in the relative movement speed occurs, it may be possible to accurately perform inspections such as determining the coating position and the coating amount by taking into account the change. However, with such a configuration, it has been found that it is not possible to know information on the relative movement speed and the relative movement amount accurately and at an appropriate timing due to the balance between the output cycle of data such as position information output from the moving device and the interval between the image capture timings of the imaging camera, and therefore it is not possible to improve the accuracy of inspections such as determining the coating position and the coating amount.

[0006] Therefore, an object of the present invention is to provide a coating inspection system that can accurately inspect the state in which a fluid is applied to a workpiece even when there is a fluctuation in the relative moving speed between the inspection device and the workpiece. [Means for solving the problem]

[0007] (1) The coating inspection system of the present invention is for inspecting the coating state of a fluid on a workpiece, and includes an imaging device for acquiring an image of the workpiece, a moving device for relatively moving the imaging device and the workpiece, and an inspection control device for controlling the inspection of the coating of the fluid on the workpiece. In the process of relatively moving the imaging device and the workpiece, the system is capable of executing an imaging process for acquiring a plurality of images at different imaging timings by the imaging device, a feature point extraction process for extracting feature points contained in the images, a movement amount derivation process for deriving the amount of relative movement between the imaging device and the workpiece between imaging timings based on the difference between the position of the feature point in an image acquired by imaging at an earlier imaging timing and the position of the feature point in an image acquired by imaging at a later imaging timing, an image formation process for forming an inspection image by using the images acquired by the imaging process at different imaging timings or processed images processed based on the images as original images, and arranging and combining the original images based on the amount of relative movement, and an inspection process for inspecting the coating of the fluid on the workpiece based on the inspection images acquired by the image formation process.

[0008] By configuring the coating inspection system of the present invention as described above in (1), the feature points extracted by the feature point extraction process can be used as indicators to accurately grasp the relative movement amount between the workpiece and the imaging device between imaging timings in the movement amount derivation process. Furthermore, the coating inspection system of the present invention executes an image formation process, and based on the relative movement amount grasped as described above, synthesizes original images based on images obtained by the imaging process in an appropriate arrangement to obtain an inspection image. The coating inspection system of the present invention executes an inspection process based on the inspection image thus obtained. Therefore, the coating inspection system of the present invention can accurately inspect the coating state of the fluid on the workpiece even if there is a fluctuation in the relative movement speed between the inspection device and the workpiece.

[0009] (2) The coating inspection system of the present invention is preferably capable of executing a master definition process that defines master information that associates the relative movement amount derived by the movement amount derivation process and the imaging timing, and the inspection control device is preferably capable of executing a master creation flow that defines the master information through processes including the imaging process, the feature point extraction process, the movement amount derivation process, and the master definition process, and an inspection flow that obtains the inspection image by executing the image formation process based on the imaging timing of the original image obtained by the imaging process and the relative movement amount derived based on the master information defined by the master creation operation, and executes the inspection process based on the inspection image.

[0010] The coating inspection system of the present invention can specify master information in which the relative movement amount and the imaging timing are associated by executing a master creation flow as described above (2). The coating inspection system of the present invention can obtain an inspection image in which the original image is arranged with good positional accuracy by performing an image formation process based on the imaging timing of the original image obtained by the imaging process and the relative movement amount derived based on the master information specified by the master creation operation, taking the relative movement amount into account. The coating inspection system of the present invention performs an inspection process using the inspection image prepared in this way, so that the coating state of the fluid on the workpiece can be inspected with high accuracy. The coating inspection system of the present invention can execute an inspection flow by executing a master creation flow in advance to specify master information, utilizing this master information.

[0011] (3) The coating inspection system of the present invention may preferably execute the master creation flow each time before executing the inspection flow.

[0012] By configuring the coating inspection system of the present invention as described above in (3), the master creation flow can be executed in advance for each inspection flow to update the master information. This allows the coating inspection system of the present invention to perform inspection processing based on inspection images that have always been created based on the latest master information. Therefore, the coating inspection system of the present invention can further improve the inspection accuracy.

[0013] (4) In the coating inspection system of the present invention, it is preferable that the master information defined by the master creation flow is repeatedly used in a plurality of times in the inspection flow.

[0014] By configuring the coating inspection system of the present invention as described above in (4), the master information defined in advance by the master creation flow can be repeatedly used in multiple inspection flows to perform inspection processing. Therefore, the coating inspection system of the present invention can efficiently inspect the coating state when the same coating is repeatedly performed on multiple workpieces.

[0015] (5) The coating inspection system of the present invention is a coating inspection system for inspecting the application state of a fluid on a workpiece, and includes an imaging device for acquiring an image of the workpiece, and an inspection control device for controlling the inspection of the application of the fluid on the workpiece, wherein a plurality of the imaging devices are arranged to surround an area to be imaged, and the inspection control device is capable of executing an inspection process for inspecting the application of the fluid on the workpiece based on images obtained by imaging by the plurality of the imaging devices.

[0016] By configuring the coating inspection system of the present invention as described above in (5), the imaging target area can be imaged from different angles by multiple imaging devices, and the coating inspection can be performed based on the images obtained thereby. This allows the coating inspection system of the present invention to perform inspection with high accuracy.

[0017] (6) The coating inspection system of the present invention includes an irradiation device which irradiates a line-shaped irradiation light across the fluid applied to the workpiece, and the imaging device images an area including the irradiation area of ​​the irradiation light as an imaging target area, and the imaging process acquires images at multiple locations on the workpiece by imaging the imaging device while irradiating the irradiation light onto the imaging target area while varying the imaging target area by moving the imaging device and the workpiece relatively, and the inspection process inspects the coating condition of the fluid on the workpiece based on characteristics of the irradiation light that appear in the image.

[0018] By configuring the coating inspection system of the present invention as described above in (6), the characteristics of the irradiated light reflected in the image obtained by the imaging process can be utilized to inspect the coating condition of the fluid on the workpiece.

[0019] (7) In the coating inspection system of the present invention, the irradiation device may be capable of irradiating a plurality of the line-shaped irradiation light beams in a direction intersecting a direction in which the irradiation light beam extends.

[0020] By configuring as described above in (7), the coating inspection system of the present invention can reduce the number of images taken in the imaging process and can reduce the time required for image processing in processes such as feature point extraction processing, movement amount derivation processing, and image formation processing. Furthermore, by configuring as described above, the coating inspection system of the present invention can improve the inspection accuracy compared to the case of inspecting by irradiating a single line of irradiation light, since the interval between the linear irradiation light does not vary regardless of the relative movement speed.

[0021] (8) The coating inspection system of the present invention may be configured to image the same imaging target area using a plurality of imaging devices and use the images obtained from each of the imaging devices to inspect the coating condition of the fluid on the workpiece.

[0022] By configuring the coating inspection system of the present invention as described above in (8), it is possible to prevent blind spots from occurring during inspection and improve the inspection accuracy.

[0023] (9) The coating inspection system of the present invention includes an irradiation device that irradiates a line of irradiation light across the fluid applied to the workpiece, and the irradiation device is provided in plurality corresponding to the imaging devices, and irradiates the irradiation light in synchronization with imaging by the associated imaging device. When imaging the same imaging target area by the plurality of imaging devices, the imaging timing by each imaging device is staggered.

[0024] By configuring the coating inspection system of the present invention as described above in (9), when imaging is performed by the multiple imaging devices, irradiation by an illumination device associated with the imaging device performing imaging can be performed while suppressing illumination light from illumination devices associated with other imaging devices from appearing in the image. This allows the coating inspection system of the present invention to further improve inspection accuracy.

[0025] (10) The coating inspection system of the present invention includes an irradiation device that irradiates a line of irradiation light across the fluid applied to the workpiece, and a plurality of the irradiation devices are provided corresponding to the imaging devices, and irradiate the irradiation light in synchronization with imaging by the corresponding imaging device, and the plurality of irradiation devices each emit irradiation light of a different wavelength, and the plurality of imaging devices are capable of imaging the irradiation light emitted from the irradiation device provided corresponding thereto, but are unable to image the irradiation light emitted from the other irradiation devices that are not associated with them.

[0026] By configuring the coating inspection system of the present invention as described above in (10), when imaging is performed by the multiple imaging devices, it is possible to suppress the illumination light from the illumination device associated with the imaging device performing the imaging from appearing in the image, while suppressing the illumination light from the illumination device associated with the other imaging devices from appearing in the image, thereby enabling the coating inspection system of the present invention to further improve the inspection accuracy.

[0027] (11) The coating inspection system of the present invention has a coating device capable of discharging the fluid toward the workpiece to coat it, and the coating device is preferably installed so as to be movably connected to the imaging device, and the discharging of the fluid can be performed simultaneously with imaging by the imaging device.

[0028] The coating inspection system of the present invention, as described above in (11), can simultaneously apply the fluid to the workpiece and inspect the state of the application, thereby enabling the coating inspection system of the present invention to apply and inspect the fluid more efficiently than when the application of the fluid and the inspection of the state of the application are performed separately. Effect of the Invention

[0029] According to the present invention, it is possible to provide a coating inspection system that can solve the above-mentioned problems. [Brief description of the drawings]

[0030] [Figure 1] 1 is a system configuration diagram showing a configuration of a coating inspection system according to an embodiment of the present invention. [Diagram 2] 2 is a perspective view showing a state in which an imaging device, an irradiation device, and an inspection control device are attached to a coating device in the coating inspection system shown in FIG. 1, as viewed from the discharge port side. [Diagram 3] 2 is a side view showing a state in which an imaging device, an irradiation device, and an inspection control device are attached to a coating device in the coating inspection system shown in FIG. 1, as viewed from the side. [Figure 4]2 is a bottom view showing a state in which an imaging device, an irradiation device, and an inspection control device are attached to a coating device in the coating inspection system shown in FIG. 1, as viewed from the discharge port side. [Diagram 5] 2 is a cross-sectional view showing the structure of a coating device provided in the coating inspection system shown in FIG. [Figure 6] 2A and 2B are explanatory diagrams each showing a state in which a workpiece coated with a fluid is irradiated with irradiation light in the coating inspection system shown in FIG. 1. [Figure 7] 2 is an explanatory diagram for explaining a feature point extraction process and a movement amount derivation process executed in the application inspection system shown in FIG. 1. [Figure 8] 2 is an explanatory diagram for explaining an image forming process executed in the coating inspection system shown in FIG. 1. [Figure 9] 4 is a flowchart showing a flow of a master creation flow executed in the coating inspection system shown in FIG. [Figure 10] 2 is a flowchart showing a procedure of an inspection flow executed in the coating inspection system shown in FIG. 1. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0031] Hereinafter, a coating inspection system S1 according to one embodiment of the present invention will be described in detail with reference to the drawings. In the following description, the configuration of the coating inspection system S1 will be described first, and then the processing and flow performed in the coating inspection system S1 will be described.

[0032] <Configuration of the coating inspection system S1> The coating inspection system S1 inspects the coating state of the fluid F on the workpiece W. The coating inspection system S1 can simultaneously apply the fluid F to the workpiece W and inspect the coating state of the fluid F. As shown in FIG. 1, the coating inspection system S1 includes an imaging device 10, an irradiation device 20, a moving device 30, an inspection control device 40, and a coating device 50.

[0033] The imaging device 10 is a device for capturing an image of the workpiece W. As shown in FIG. 2 to FIG. 4, the imaging device 10 is attached to the moving device 30 via an installation member 35 attached to the moving device 30. The imaging device 10 can be a digital camera, a CCD camera, a high-speed camera, a spectroscopic camera, or a variety of other cameras, a 3D scanner, or other various optical devices and sensors. As shown in FIG. 3 and other figures, the imaging device 10 is set in a direction in which the imaging target area A is the surface of the workpiece W installed at a predetermined installation position, and the imaging device 10 can capture the imaging target area A. The imaging device 10 can be configured to be provided separately from any one or all of the irradiation device 20, the moving device 30, and the coating device 50. In this embodiment, the imaging device 10 is attached to the moving device 30 together with the irradiation device 20 and the coating device 50.

[0034] The coating inspection system S1 can be equipped with a single imaging device 10, but can also be equipped with multiple imaging devices 10. When there is a single imaging device 10, the coating inspection system S1 has a simple device configuration. When there are multiple imaging devices 10, the imaging target area A can be imaged from multiple directions depending on the arrangement, etc. The coating inspection system S1 of this embodiment is equipped with three imaging devices 10.

[0035] As shown in Figures 3 and 4, in the coating inspection system S1, multiple imaging devices 10 are arranged to surround the periphery of the imaging target area A. The imaging devices 10 can also be arranged at uneven intervals in the circumferential direction around the imaging target area A, but in this embodiment, they are arranged at approximately equal intervals in the circumferential direction. Therefore, the coating inspection system S1 can capture images from multiple angles using multiple (three in this embodiment) imaging devices 10 (imaging devices 10A, 10B, 10C). This allows the coating inspection system S1 to prevent blind spots from occurring when the imaging device 10 captures the imaging target area A.

[0036] As shown in Figs. 2 to 4, the irradiation device 20 is for irradiating a line-shaped irradiation light L across the fluid F applied to the workpiece W (see Fig. 6). The irradiation device 20 may be capable of irradiating a single line-shaped irradiation light L, or may be capable of irradiating a plurality of irradiation lights L arranged in a direction intersecting the direction in which the irradiation light L extends. The coating inspection system S1 can simplify the configuration of the irradiation device 20 by using the irradiation device 20 capable of irradiating a single irradiation light L. In addition, the coating inspection system S1 can reduce the number of times images are taken in the imaging process described in detail below, and can reduce the time required for image processing in processes such as feature point extraction processing, movement amount derivation processing, and image formation processing.

[0037] The irradiation device 20 is provided in correspondence with the imaging device 10 described above. In this embodiment, since a plurality of imaging devices 10 (three in this embodiment) are provided, the same number of irradiation devices 20 as the number of imaging devices 10 (three in this embodiment) are provided. The irradiation device 20 is attached to the moving device 30 via an installation member 35 attached to the moving device 30, similar to the imaging device 10. The plurality of irradiation devices 20 are provided in correspondence with the plurality of imaging devices 10 described above. Specifically, in this embodiment, irradiation devices 20A, 20B, and 20C corresponding to the imaging devices 10A, 10B, and 10C are provided as the irradiation device 20. The irradiation devices 20A, 20B, and 20C can irradiate the irradiation light L in synchronization with the imaging by the imaging devices 10A, 10B, and 10C, respectively.

[0038] The moving device 30 is a device for moving the imaging device 10, the irradiation device 20, and the coating device 50 relative to the workpiece W. The moving device 30 can be configured, for example, by an industrial robot, an XY table, or the like. As shown in FIG. 1, in this embodiment, an industrial robot equipped with a robot arm 32 is used as the moving device 30. The moving device 30 can operate the robot arm 32 based on a command signal from a movement control unit 36 ​​of a movement control device 34.

[0039] As shown in FIG. 1, the moving device 30 is configured to have the coating device 50 attached to the tip of the robot arm 32. Therefore, the moving device 30 can move the coating device 50 attached to the tip of the robot arm 32 along a predefined trajectory by the operation control of the movement control unit 36. As a result, the coating inspection system S1 can discharge the fluid F from the coating device 50 while moving the coating device 50 relative to the workpiece W installed at a predetermined position, and apply the fluid F to the workpiece W along a predetermined trajectory. Furthermore, the moving device 30 is configured to have the imaging device 10 and the irradiation device 20 attached to the tip of the robot arm 32 in addition to the coating device 50. Therefore, the moving device 30 can move the imaging device 10 and the irradiation device 20 together with the coating device 50 along the same trajectory as the application trajectory of the fluid F.

[0040] The inspection control device 40 controls the inspection of the application of the fluid F to the workpiece W. The inspection control device 40 executes an inspection process described in detail later, and thereby performs inspection of the application of the fluid F to the workpiece W based on images obtained by capturing images using the multiple imaging devices 10.

[0041] The coating device 50 is a device for discharging and coating the fluid F toward the workpiece W. As described above, the coating device 50 is attached to the moving device 30 together with the imaging device 10. Specifically, the coating device 50 is installed at the tip of the robot arm 32 constituting the moving device 30. The coating device 50 is installed at the tip of the robot arm 32 in a state where it is surrounded by a plurality of imaging devices 10 and a plurality of irradiation devices 20.

[0042] The coating device 50 is for discharging and coating a fluid F (coating material) onto a workpiece W (coating target). The coating device 50 controls the discharge of the fluid F under the control of a coating control device 55, thereby coating the workpiece W with the fluid F. The coating device 50 is connected to a supply unit 80 for supplying the fluid F. The supply unit 80 may include, for example, a storage unit 82 for storing the fluid F, and a pump 84 for pumping the fluid F from the storage unit 82 toward the coating device 50. The coating device 50 applies the fluid F to the workpiece W by pumping and discharging the fluid F supplied from the supply unit 80 toward the workpiece W. The coating device 50 may be of a type (hoseless type) that is connected to the supply unit 80 to replenish the fluid F and then disconnected from the supply unit 80 to independently discharge the fluid F, or may be of a type that is constantly connected to the supply unit 80 via a connecting pipe 86 made of a hose or the like, so that the fluid F can be supplied from the supply unit 80 at any time. As shown in Fig. 1, in this embodiment, the coating device 50 is constantly connected to the supply unit 80 via the connecting pipe 86.

[0043] The coating device 50 is equipped with a pressure-feeding mechanism for pressure-feeding the fluid F. In this embodiment, the coating device 50 is equipped with a uniaxial eccentric screw pump 60 as the pressure-feeding mechanism. The coating device 50 operates in accordance with an operation command from a coating control device 55, drives a pump mechanism 62, and discharges the fluid F from a discharge port 52 provided at the tip, thereby coating the workpiece W with the fluid F in a form such as point coating or line coating. In this embodiment, a nozzle 53 is attached to the discharge port 52, and the fluid F discharged from the discharge port 52 is discharged and coated on the workpiece W through the nozzle 53.

[0044] The uniaxial eccentric screw pump 60 is a rotary positive displacement pump. As shown in Fig. 5, the uniaxial eccentric screw pump 60 includes a male-threaded rotor 64 that receives power and rotates eccentrically, a stator 66 whose inner peripheral surface 66a is formed into a female-threaded shape, a drive unit 68 that generates a driving force, and a power transmission section 70 that transmits the power from the drive unit 68 to the rotor 64.

[0045] The rotor 64 is a shaft made of metal or the like and formed into an n-thread (n=1 in this embodiment) male screw shape. The stator 66 is a substantially cylindrical member having a through hole 66b whose inner circumferential surface 66a is formed into an n+1-thread (n=1 in this embodiment) female screw shape. The uniaxial eccentric screw pump 60 is configured such that a pump mechanism 62, the main part of which is formed by inserting the rotor 64 into the through hole 66b of the stator 66, is built into the pump casing 54. The pump mechanism 62 has a function of moving the fluid F toward the discharge port 52.

[0046] The drive device 68 serves as a drive source for the uniaxial eccentric screw pump 60. The drive device 68 is configured with a motor, a speed change mechanism, and the like, and outputs rotational power. The drive device 68 is connected to the base end of the rotor 64 via a power transmission unit 70. Therefore, the uniaxial eccentric screw pump 60 can transmit the output rotational power to the rotor 64 by operating the drive device 68, and can freely rotate the rotor 64 eccentrically inside the through hole 66b.

[0047] The power transmission unit 70 connects the rotor 64 and the driving device 68 in a manner capable of transmitting power while allowing eccentric rotation of the rotor 64. The power transmission unit 70 may include, for example, a joint such as a universal joint or an Oldham joint, a coupling rod, or the like.

[0048] The uniaxial eccentric screw pump 60 can advance the fluid F in the longitudinal direction of the rotor 64 and the stator 66 in the fluid transport path 72 formed between the rotor 64 and the stator 66 by rotating the rotor 64 in the forward direction within the through hole 66b of the stator 66. Therefore, by rotating the rotor 64, the fluid F can be sucked from one end side of the stator 66 into the fluid transport path 72, transported toward the other end side of the stator 66, and discharged. In addition, the transport amount (discharge amount) of the fluid F can be controlled according to the rotation amount of the rotor 64 (drive device 68). Furthermore, the traveling direction of the fluid F in the fluid transport path 72 can be switched by switching the rotation direction of the rotor 64 to the reverse direction.

[0049] The coating device 50 can perform a discharge operation in which the pump mechanism unit 62 is operated (forward rotation) so that the fluid F moves from the pump mechanism unit 62 toward the discharge port 52, and a suck-back operation in which the pump mechanism unit 62 is operated (reverse rotation) so that the fluid F moves from the discharge port 52 toward the pump mechanism unit 62. The coating device 50 can perform a discharge operation in which the fluid F is discharged from the discharge port 52 by operating the pump mechanism unit 62 in the forward direction (forward rotation). Furthermore, the coating device 50 can perform a suck-back operation in which the fluid F is sucked in by operating the pump mechanism unit 62 in the reverse direction (reverse rotation). Furthermore, when the coating device 50 finishes discharging the fluid F onto the workpiece W by the discharge operation, it can perform a suck-back operation to prevent the fluid F from being excessively discharged and prevent the fluid F from dripping onto the workpiece W.

[0050] The coating inspection system S1 can execute various processes required for inspecting the coating state of the fluid F on the workpiece W by operating the imaging device 10, the irradiation device 20, and the moving device 30 under the control of the above-mentioned inspection control device 40. In this embodiment, the coating inspection system S1 is capable of executing an imaging process, a feature point extraction process, a movement amount derivation process, a master definition process, an image formation process, and an inspection process. Each process will be specifically described below.

[0051] <Image capture processing> The imaging process is a process of acquiring a plurality of images with different imaging timings by imaging with the imaging device 10 during the process of moving the imaging device 10 and the workpiece W relative to each other. In the imaging process, the imaging device 10 performs imaging while varying the imaging target area A by moving the imaging device 10 and the workpiece W relative to each other. Therefore, by executing the imaging process, images are acquired at a plurality of locations on the workpiece W. In the imaging process, the imaging target area A can be imaged by only a portion of the imaging devices 10 provided in the plurality of imaging devices, or the same imaging target area A can be imaged from different angles by the plurality of imaging devices 10. It is preferable that the user can select whether to image only a portion of the plurality of imaging devices 10 (imaging devices 10A, 10B, 10C) or to image by all of the imaging devices 10 based on the position on the workpiece W, the characteristics such as the type and shape of the workpiece W, the processing speed of the inspection control device 40, the required inspection accuracy, etc., or that the inspection control device 40 automatically selects the imaging method.

[0052] The imaging process can be performed by a method of imaging the imaging device 10 with the imaging target area A irradiated by the irradiation device 20 (illumination imaging), or a method of imaging the imaging device 10 without irradiation by the irradiation device 20 (non-irradiation imaging). Whether to perform illumination imaging or non-irradiation imaging in the imaging process can be selected by the user or automatically selected by the inspection control device 40 based on the position of the workpiece W, characteristics of the workpiece W such as the type and shape, the processing speed of the inspection control device 40, the required inspection accuracy, etc.

[0053] In the imaging process, the timing of each image capture may be, for example, at a fixed time interval from the start of the process. This allows the image to be captured at the same position each time in mass production, as long as the same type of workpiece is imaged while moving at the same speed and trajectory. In addition, the imaging process may be performed simultaneously with the application of the fluid by the application device 50, and the time required for application and inspection may be shortened by capturing an image of the fluid F immediately after application.

[0054] As described above, when a plurality of imaging devices 10 are provided, when imaging the same imaging target area A, it is preferable to image the same area by all of the imaging devices 10 at the same imaging timing, or to stagger the imaging timing for some or all of the imaging devices 10. In this embodiment, imaging processing is performed by staggering the timing for imaging the imaging target area A for all of the imaging devices 10A, 10B, and 10C.

[0055] <Feature point extraction process> The feature point extraction process is a process for extracting feature points contained in an image obtained by the above-mentioned imaging process. The feature point extraction process can be performed using the image obtained by the imaging process itself, or can be performed using an image obtained by the imaging process that has been processed. The feature point extraction process is a process for extracting characteristic parts in an image as feature points. The parts extracted as feature points by the feature point extraction process can be characteristic parts of the workpiece W such as edges, holes, and bent parts of the workpiece W that are reflected in the image, or parts prepared for the feature point extraction process by attaching a sticker or marking to the workpiece W. Specifically, in the example shown in FIG. 7, as shown in FIG. 7(a), in addition to the fluid F applied to the workpiece W in the image (1), the edge of the workpiece W is reflected to the left of the fluid F, and a hole formed in the workpiece W is reflected to the right of the fluid F. By performing a feature point extraction process on this image (1), for example, as shown in FIG. 7(b), the bent portions of the fluid F are detected as feature points (1) and (2), the holes are detected as feature points (3), and the bent portions of the edge of the workpiece W are detected as feature points (4). Similarly, for the image (2) captured at the next capture timing of the image (1), feature points (1) to (3) can be extracted as shown in FIG. 7(c). In the image (2), the feature point (4) extracted in the image (1) has moved outside the range of the angle of view, so the feature point (4) is not extracted. Note that in FIG. 7(c), the edge, holes, and fluid F of the workpiece W in the image (1) are illustrated with two-dot chain lines for comparison with FIG. 1 (image (1)), but these do not exist in the actual image (2).

[0056] The feature point extraction process can be performed by any suitable method as long as it is a process for extracting characteristic parts of the workpiece W, etc. For example, the feature point extraction process can be performed by a method in which the image obtained by the imaging process is subjected to preprocessing such as filtering for noise removal, and then the feature points are detected based on the preprocessed image by a method such as edge detection.

[0057] <<Movement amount derivation process>> The movement amount derivation process is a process for deriving the amount of relative movement between the imaging device 10 and the workpiece W between the previous and subsequent imaging timings based on the difference between the position imaged at the previous imaging timing and the position imaged at the subsequent imaging timing during the process of sequentially imaging the imaging device 10 and the workpiece W while moving them relative to each other. The movement amount derivation process is performed by utilizing the position information of the feature points extracted by the above-mentioned feature point extraction process. Specifically, the position information of the feature points in the image obtained by imaging at the previous imaging timing and the position information of the feature points in the image obtained by imaging at the subsequent imaging timing are derived, and a calculation process is performed to derive the amount of relative movement between the imaging device 10 and the workpiece W between the previous and subsequent imaging timings based on the difference in the position information.

[0058] More specifically, in the example shown in FIG. 7, the positions of the feature points (1) to (3) in the image (1) derived in FIG. 7(b) and the feature points (1) to (3) in the image (2) are derived. Based on this result, the relative movement amount of the feature points (1) to (3) is derived as shown in FIG. 7(d). Based on this result, the relative movement amount between the workpiece W and the imaging device 10 is derived, for example, by deriving the average value of the relative movement amounts of the feature points (1) to (3). Note that in the example shown in FIG. 7, the feature point (4) extracted in the image (1) is not detected in the image (2) due to the relative movement between the workpiece W and the imaging device 10. Therefore, the feature point (4) is treated as an outlier and is not used to derive the relative movement amount.

[0059] Master Regulations Processing The master definition process is a process for defining master information that associates the relative movement amount derived by the above-mentioned movement amount derivation process with the imaging timing. That is, the master information is a series of information that records the relative movement amount from the first imaging timing to the second imaging timing, the relative movement amount from the second imaging timing to the third imaging timing, the relative movement amount from the n-1th imaging timing to the nth imaging timing (n=natural number), and the relative movement amount between each imaging timing. The master information defined by the master definition process is stored in the inspection control device 40 or the storage unit 42 provided outside the inspection control device 40.

[0060] Image formation process The image forming process is a process for forming an inspection image by synthesizing images acquired by the above-mentioned imaging process with different imaging timings or processed images processed based on images as an original image. In the image forming process, the original images are arranged and synthesized based on the relative movement amount. Specifically, as shown in FIG. 8, when images (1) to (n) with different imaging timings are prepared as original images, the images (1) to (n) are arranged and synthesized based on the relative movement amount between the imaging timings of the respective original images derived by the movement amount derivation process. As a result, even if the relative movement amount between the imaging timings varies due to the movement speed fluctuating when moving relative to the workpiece W together with the application device 50 in the application path of the fluid F, an inspection image that allows accurate grasping of the application state of the fluid F on the workpiece W can be formed.

[0061] The inspection image obtained by the image formation process can be, for example, two-dimensional data (two-dimensional image) viewed from a plane from the side where the fluid F is applied to the workpiece W, or can be three-dimensional data (three-dimensional image) that allows the application state of the fluid F to the workpiece W to be grasped in a three-dimensional manner by using images obtained from each imaging device 10. When the inspection image obtained by the image formation process is two-dimensional data, the load and data capacity required for the image formation process can be reduced. Also, when the inspection image obtained by the image formation process is three-dimensional data, the application state of the fluid F to the workpiece W can be easily grasped.

[0062] <Inspection processing> The inspection process is a process for inspecting the application of the fluid F on the workpiece based on the inspection image acquired by the image formation process described above. The inspection process can be performed by various methods, but for example, a method can be adopted in which the application pattern of the fluid F shown in the inspection image is compared with reference data by a method such as pattern matching to inspect whether the fluid F is applied according to a specified application pattern, whether a break (a break in the application line) occurs in the application pattern, etc. In addition, as a method for executing the inspection process, a method can be adopted in which irradiation light is applied by the irradiation device 20 when imaging is performed by the imaging device 10, and the application state is inspected based on the characteristics of the irradiation light (irradiation light image Li) shown in the inspection image.

[0063] When inspecting the coating state based on the characteristics of the irradiated light image Li, the inspection process can be performed by executing, for example, the following processing method (irradiated light image analysis process). Specifically, when performing the irradiated light image analysis process, the inspection control device 40 identifies the irradiated light image Li captured in the inspection image and stores it as feature data in the storage unit 42. The inspection control device 40 also compares the feature data of the irradiated light image Li stored in the storage unit 42 with reference data registered in advance in the storage unit 42 to determine whether the coating state is good or bad.

[0064] The quality of the applied state can be judged as follows, for example. That is, as shown in FIG. 6(a), when the irradiated light L is irradiated across the fluid F at a portion of the workpiece W where the fluid F is applied, the irradiated light image Li is formed in a shape in which a portion (straight portion) formed to extend in a straight line at a portion where the fluid F is not applied and a portion (curved portion) deformed into a bent or curved shape at a portion where the fluid F is applied are continuous. On the other hand, as shown in FIG. 6(b), when the irradiated light L is irradiated across the fluid F at a portion where the application of the fluid F has been cut off at a portion of the workpiece W, the irradiated light image Li is formed as a straight portion formed to extend in a straight line as a whole without a curved portion formed even at a portion where the fluid F should have been applied. Therefore, the inspection control device 40 judges that the fluid F is applied when a curved portion is formed as shown in FIG. 6(a) at a portion where the fluid F should have been applied in the inspection image, and judges that a defective application of the fluid F has occurred when a curved portion is formed as shown in FIG. 6(b).

[0065] In addition to judging whether the fluid F is applied as described above, the inspection control device 40 can also judge whether the amount and shape of the fluid F are appropriate based on the characteristics of the irradiated light image Li. For example, even if the fluid F is applied to the part of the workpiece W where it should be applied, if the amount of fluid F is insufficient and the fluid F is smudged, if the amount of fluid F applied is too large or small and the width is wide or narrow, or if the shape of the fluid F applied is different from the specified one, the application state can be said to be poor. In such a case, even if a curved portion is formed in the irradiated light image Li, the shape and degree of bending of the curved portion are different from those in a good application state. Therefore, parameters for determining the shape and degree of bending of the curved portion are predefined and registered as reference data for the irradiated light image Li, and the characteristic data of the irradiated light image Li is compared with the reference data registered in the storage unit 42, so that the application state can be judged to be good or bad, taking into consideration whether the amount and shape of the fluid F applied are appropriate.

[0066] In addition, when inspecting the amount of fluid F applied to the entire workpiece W (total amount applied), the cross-sectional area of ​​the fluid F applied at each inspection point (imaging timing, imaging position) is derived from the shape of the curved portion, etc., and the total amount of fluid F applied can be derived by multiplying the cross-sectional area by the length of the interval between multiple irradiation lights L and integrating the result, thereby making it possible to determine whether the application condition is good or bad.

[0067] The application inspection system S1 executes a combination of the above-mentioned various processes to execute a control flow (master creation flow) that defines master information and a control flow (inspection flow) that inspects the application state of the fluid F on the workpiece W. The control flow will be specifically described below.

[0068] <Master creation flow> The master creation flow is performed according to the flowchart shown in Fig. 9. The master creation flow is executed by performing a plurality of processes including an imaging process, a feature point extraction process, a movement amount derivation process, and a master definition process on a workpiece W prepared for master creation. The master creation flow will be described below in order according to Fig. 9.

[0069] (Step 1-1) When the master creation flow starts, first, in step 1-1, an image is captured and an original image is prepared based on the image obtained by the image capture process. The original image is recorded in association with the capture timing, for example by assigning a serial number for each capture timing in chronological order. Once the original image is prepared in this way, the control flow proceeds to step 1-2.

[0070] (Step 1-2) When the control flow proceeds to step 1-2, a feature point extraction process is performed to extract feature points contained in the original image. In the feature point extraction process, the feature points are extracted and outliers are removed. After that, the control flow proceeds to step 1-3.

[0071] (Step 1-3) When the control flow proceeds to step 1-3, a movement amount deriving process is performed. Specifically, a process is performed to derive a relative movement amount between the workpiece W and the imaging device 10 between the earlier and later imaging timings by deriving the movement amount of the feature points extracted in the original images whose imaging timings are different in time series. When there are multiple feature points, for example, the movement amount for each feature point is derived, and the value obtained by deriving the average value is derived as the relative movement amount between the workpiece W and the imaging device 10. After that, the control flow proceeds to step 1-4.

[0072] (Step 1-4) When the process proceeds to step 1-4, a master definition process is performed. That is, in step 1-4, a process is performed in which master information that associates the relative movement amount derived by the movement amount derivation process in step 1-3 with the imaging timing is defined and stored in the storage unit 42.

[0073] The master creation flow is executed through the processes related to steps 1-1 to 1-4 described above. The master creation flow may be configured to execute the above-described series of control flows each time an image is acquired by the imaging process, or to start each of the above-described processes when the imaging process is completed for a part or all of the area to be inspected.

[0074] <Test flow> The inspection flow is performed according to the flowchart shown in Fig. 10. The inspection flow is executed by performing a plurality of processes, including an image capturing process, an image forming process, and an inspection process, on the workpiece W to be inspected, while utilizing the master information prepared in the above-mentioned master creation flow. The inspection flow will be described below in order according to Fig. 10.

[0075] (Step 2-1) In the coating inspection system S1 of this embodiment, when inspecting the workpiece W according to the inspection flow, the master information is defined in advance in the above-mentioned master creation flow, and this master information is used in the inspection of the workpiece W multiple times. Each imaging timing is determined to be the same timing every time, for example, by setting it to a specific timing defined based on the time from the start of the imaging process. Therefore, once the master information is defined in the coating inspection system S1, the master information can be used in the inspection of the workpiece W multiple times without changing it, as long as the coating and inspection are performed while moving at the same speed and trajectory for the same type of workpiece. Therefore, at the start of the inspection flow, first, in step 2-1, the master information defined in the master creation flow performed in advance is read out, etc., so that the master information can be used in the inspection of the workpiece W. Then, the control flow proceeds to step 2-2.

[0076] (Step 2-2) In step 2-2, the inspection control device 40 performs imaging processing on the workpiece W to be inspected, and prepares an original image based on the image obtained by this imaging processing. The original image is recorded in association with the imaging timing, for example by assigning a serial number to each imaging timing in chronological order. When the original image of the workpiece W to be inspected is prepared in this manner, the control flow proceeds to step 2-3.

[0077] (Step 2-3) When the control flow proceeds to step 2-3, an image formation process is performed. As a result, an inspection image for the workpiece W to be inspected is prepared. Specifically, the inspection image is formed by synthesizing a plurality of original images with different imaging timings recorded in a state associated with the imaging timings in the imaging process of step 2-2. Here, in forming the inspection image, the relative movement amount between the imaging timings is grasped based on the master information prepared in the master creation flow performed in advance, and the plurality of original images acquired in step 2-2 are arranged and synthesized according to the relative movement amount. As a result, the original image is arranged at an appropriate position taking into account the relative movement amount, and an inspection image for the workpiece W to be inspected can be formed without performing a feature point extraction process and a movement amount derivation process on the original image acquired in step 2-2.

[0078] In addition, in forming the inspection image in step 2-3, the images obtained from the multiple imaging devices 10 are combined to form the inspection image in the form of three-dimensional data (three-dimensional image) that allows a stereoscopic understanding of the application state of the fluid F on the workpiece W. Thereafter, the control flow proceeds to step 2-4.

[0079] (Step 2-4) When the control flow proceeds to step 2-4, an inspection process is performed on the workpiece W to be inspected. In this embodiment, as described above, a method for inspecting the application state based on the characteristics of the irradiated light image Li captured in the inspection image and the three-dimensional shape of the fluid F on the entire workpiece W based on three-dimensional data is used to determine whether there is a defective application of the fluid F in places where the fluid F should be applied, and whether the total volume (application amount) and application shape of the fluid F on the workpiece W are appropriate. Thereafter, the control flow proceeds to step 2-5.

[0080] (Step 2-5) When the control flow proceeds to step 2-5, it is confirmed whether or not the inspection of the application state of the fluid F has been completed for all of the workpieces W to be inspected. If there is any workpiece W for which inspection has not been completed, the control flow returns to step 2-2. This allows the master information prepared in step 2-1 to be used in the next inspection of the workpiece W. On the other hand, if it is confirmed in step 2-5 that the inspection of all of the workpieces W has been completed, the moving device 30 completes the series of control flows.

[0081] As described above, the configuration of the coating inspection system S1 of this embodiment merely illustrates one embodiment of the present invention, and various modified examples are possible. Below, a coating inspection system S2 having a modified configuration will be described. Note that the coating inspection system S2 has most of the same configuration, control, etc. as the above-mentioned coating inspection system S1. Therefore, in the following description of the coating inspection system S2, the same reference numerals will be used to omit or simplify the description of the configuration, control, etc. that are common to the coating inspection system S1.

[0082] <Modification of Device Configuration> Similar to the above-described coating inspection system S1, the coating inspection system S2 according to this modified example includes an imaging device 110, an irradiation device 120, a moving device 30, and an inspection control device 40. The imaging device 110 and the irradiation device 120 of the coating inspection system S2 are partially different from those of the above-described coating inspection system S1, but the moving device 30 and the inspection control device 40 are similar.

[0083] The imaging device 110 is a device for capturing an image of the workpiece W, similar to the imaging device 10 described above. The imaging device 110 can use various optical devices such as cameras and sensors, similar to the imaging device 10. The imaging device 110 is attached to the moving device 30 together with the irradiation device 120 and the coating device 50 so as to be oriented so as to capture an image of the imaging target area A. Although the imaging device 110 may be a single one in the coating inspection system S2, a plurality of imaging devices 110 (three in this embodiment) are provided in this embodiment. A plurality of imaging devices 110 (three) are provided so as to be approximately equally spaced in the circumferential direction of the imaging target area A.

[0084] The imaging device 110 has the same configuration and function as the imaging device 10 of the above embodiment, and is installed in the same arrangement. In addition, the imaging device 110 is capable of capturing an image of irradiated light L in a specific wavelength range defined in advance, but is unable to capture an image of irradiated light L outside the defined wavelength range. In this embodiment, the wavelength range of the irradiated light L that can be captured by each of the multiple imaging devices 110 (imaging devices 110A, 110B, and 110C in this embodiment) provided is different.

[0085] The irradiation device 120 is provided in correspondence with the above-mentioned imaging device 110, similarly to the irradiation device 20. In this embodiment, since a plurality of imaging devices 110 (three in this embodiment) are provided, the same number of irradiation devices 120 as the number of imaging devices 10 (three in this embodiment) are provided in correspondence with the imaging devices 110, respectively. Specifically, in this embodiment, irradiation devices 120A, 120B, and 120C are provided as the irradiation devices 120, which are associated with the imaging devices 110A, 110B, and 110C.

[0086] The irradiation devices 120A, 120B, and 120C can irradiate the irradiation light L in synchronization with the imaging by the imaging devices 10A, 10B, and 10C, respectively, similar to the irradiation devices 20A, 20B, and 20C. Furthermore, the irradiation devices 120A, 120B, and 120C are configured to emit irradiation light L of different wavelengths. The wavelengths of the irradiation light L emitted by the irradiation devices 120A, 120B, and 120C are set to match the wavelength ranges that the imaging devices 110 corresponding to each other can capture, and are set to wavelengths that are outside the wavelength ranges that the imaging devices 110 not corresponding to each other can capture.

[0087] The coating inspection system S2 can perform imaging processing, feature point extraction processing, movement amount derivation processing, master definition processing, image formation processing, and inspection processing by performing the same control as the coating inspection system S1. In the coating inspection system S2, the multiple imaging devices 110 are capable of imaging irradiation light L of different wavelength ranges, and the multiple irradiation devices 120 provided corresponding to each imaging device 110 are capable of irradiating irradiation light L of a wavelength range that can be imaged by the corresponding imaging device 110. Therefore, even if the same imaging target area A is simultaneously irradiated by the multiple irradiation devices 120 in the imaging processing and the imaging target area A is simultaneously imaged, the irradiation light L irradiated by the multiple irradiation devices 120 can be imaged by each imaging device 110 without overlapping with each other.

[0088] As in the first embodiment, the coating inspection system S2 can execute a master creation flow and define master information in accordance with the flowchart shown in Fig. 9. Moreover, the coating inspection system S2 can execute an inspection flow and inspect the coating state of the fluid F on the workpiece W in accordance with the flowchart shown in Fig. 10.

[0089] <Modification of Control> The above-mentioned coating inspection systems S1 and S2 have been illustrated as executing the master creation flow as described above, and then utilizing the master information defined thereby in an inspection flow that is performed multiple times, but the present invention is not limited to this. For example, the coating inspection systems S1 and S2 may be configured to execute the master creation flow each time before executing an inspection flow.

[0090] In addition, the above-mentioned coating inspection systems S1 and S2 perform imaging processing (step 1-1) in the master creation flow for defining the master information to obtain an original image, and perform imaging processing (step 2-2) again in the inspection flow, but the present invention is not limited to this. In the master creation flow, the original image used to derive the relative movement amount can be used to create an inspection image used for the inspection process in the inspection flow. For example, while both the master flow and the inspection flow are executed in a series of flows each time for the workpiece W to be inspected, steps 2-1 and 2-2 can be omitted. As a result, the original image obtained in the imaging processing in step 1-1 can be used as the original image used to derive the relative movement amount in step 1-3 in the master creation flow, and an inspection image can be prepared in the image formation processing in step 2-3 to perform the inspection processing in step 2-4.

[0091] The above-mentioned coating inspection systems S1 and S2 are exemplified as inspection systems for inspecting the coating state of a workpiece W on which the fluid F is applied in a line shape, but the present invention is not limited thereto. For example, the coating inspection systems S1 and S2 can also inspect a workpiece W on which the fluid F is applied in dots (point application). When the workpiece W on which the fluid F is applied in dots is the inspection object, if the size of the fluid F applied in dots exceeds the size of the imaging target area A or if there are many dots of the fluid F applied on the workpiece W, it is preferable to perform imaging processing while moving the imaging device 10 relative to the workpiece W. In addition, in cases where the fluid F applied in dots can be imaged by the imaging device 10 without moving the workpiece W and the imaging device 10 relative to each other, it is preferable to image the fluid F without moving the fluid F and the imaging device 10 relative to each other in the imaging processing.

[0092] In addition, in the step 2-3 of the inspection flow, the image for inspection is formed by combining the images obtained from the imaging devices 10 provided in multiple locations, but the present invention is not limited to this. For example, based on the relative movement direction between the workpiece W and the imaging devices 10a, 10b, 10c and the irradiation devices 20a, 20b, 20c, and the shape of the fluid F relative to the imaging devices 10a, 10b, 10c, it is also possible to select only the images obtained from the imaging devices 10a, 10b, 10c located in the direction in which the most appropriate irradiation light image Li is obtained at each imaging position 10a, 10b, 10c and use them to create the image for inspection. As a method for adopting the most appropriate image from the images obtained by the imaging devices 10a, 10b, 10c in this way, for example, it is good to adopt a method of selecting only the images obtained by the imaging devices 10a, 10b, 10c located in the direction in which the irradiation light image Li is not hidden by the fluid F and is captured as a bright line.

[0093] <Effects obtained by the coating inspection systems S1 and S2> The coating inspection systems S1 and S2 exemplified as the above-mentioned embodiment and modified examples have the following characteristic configurations (a) to (m), which enable the coating inspection systems S1 and S2 to achieve the following unique effects.

[0094] (a) The above-mentioned application inspection systems S1, S2 are intended to inspect the application condition of fluid F on a workpiece W, and include an imaging device 10, 110 that acquires an image of the workpiece W, a moving device 30 that moves the imaging device 10, 110 and the workpiece W relative to one another, and an inspection control device 40 that performs control for the inspection of the application of fluid F on the workpiece W. The application inspection systems S1, S2 are capable of executing an imaging process for acquiring multiple images at different imaging timings by the imaging device 10, 110 during the process of moving the imaging device 10, 110 and the workpiece W relative to one another, a feature point extraction process for extracting feature points contained in the images, a movement amount derivation process for deriving the amount of relative movement between the imaging device 10, 110 and the workpiece W between imaging timings based on the difference between the positions of feature points in an image acquired by imaging at an earlier imaging timing and the positions of feature points in an image acquired by imaging at a later imaging timing, an image formation process for forming an inspection image by using images acquired by the imaging process at different imaging timings or processed images processed based on the images as original images, and arranging and combining the original images based on the relative movement amount, and an inspection process for inspecting the application of fluid F on the workpiece W based on the inspection images acquired by the image formation process.

[0095] The above-mentioned coating inspection systems S1 and S2 are configured as described above in (a), and can accurately grasp the relative movement amount between the workpiece W and the imaging device 10 and 110 between the imaging timings in the movement amount derivation process using the feature points extracted by the feature point extraction process as an index. In addition, the above-mentioned coating inspection systems S1 and S2 can perform an image formation process to appropriately combine original images based on images obtained by the imaging process based on the relative movement amount grasped as described above, thereby obtaining an inspection image. The above-mentioned coating inspection systems S1 and S2 perform an inspection process based on the inspection image obtained in this manner. Therefore, the above-mentioned coating inspection systems S1 and S2 can accurately inspect the coating state of the fluid F on the workpiece W even if the relative movement speed between the inspection device and the workpiece W varies.

[0096] (b) The above-mentioned coating inspection systems S1, S2 are capable of executing a master definition process that defines master information that associates the relative movement amount derived by the movement amount derivation process and the imaging timing, and the inspection control device 40 is capable of executing a master creation flow that defines master information through processes including imaging processing, feature point extraction processing, movement amount derivation processing, and master definition processing, and an inspection flow that obtains an inspection image by executing an image formation process based on the imaging timing of the original image obtained by the imaging processing and the relative movement amount derived based on the master information defined by the master creation operation, and executes inspection processing based on the inspection image.

[0097] The above-mentioned coating inspection systems S1 and S2 can specify master information in which the relative movement amount and the imaging timing are associated by executing a master creation flow as described above (b). In addition, the above-mentioned coating inspection systems S1 and S2 can obtain an inspection image in which the original image is arranged with good positional accuracy by executing an image formation process based on the imaging timing of the original image obtained by the imaging process and the relative movement amount derived based on the master information specified by the master creation operation, taking into account the relative movement amount. The above-mentioned coating inspection systems S1 and S2 perform an inspection process using the inspection image prepared in this way, so that the coating state of the fluid F on the workpiece W can be inspected with high accuracy. In addition, the above-mentioned coating inspection systems S1 and S2 can execute an inspection flow by executing a master creation flow in advance to specify master information, utilizing this master information.

[0098] (c) The above-described coating inspection systems S1 and S2 execute a master creation flow each time before executing an inspection flow.

[0099] By configuring the above-mentioned coating inspection systems S1 and S2 as described above in (c), the master creation flow can be executed in advance for each inspection flow to update the master information. This allows the above-mentioned coating inspection systems S1 and S2 to always perform inspection processing based on inspection images created based on the latest master information. Therefore, the above-mentioned coating inspection systems S1 and S2 can further improve the inspection accuracy.

[0100] (d) The above-described coating inspection systems S1 and S2 repeatedly use the master information defined by the master creation flow in a plurality of inspection flows.

[0101] By configuring the above-mentioned coating inspection systems S1 and S2 as described above in (d), the master information defined in advance by the master creation flow can be repeatedly used in multiple inspection flows to perform the inspection process. Therefore, the above-mentioned coating inspection systems S1 and S2 can efficiently inspect the coating state of multiple workpieces W.

[0102] (e) The above-mentioned application inspection systems S1, S2 are application inspection systems S1, S2 for inspecting the application state of fluid F on a workpiece W, and include an imaging device 10, 110 for acquiring an image of the workpiece W, a moving device 30 for relatively moving the imaging device 10, 110 and the workpiece W, and an inspection control device 40 for controlling the inspection of the application of fluid F on the workpiece W, wherein the multiple imaging devices 10, 110 are arranged to surround the imaging target area A, and the inspection control device 40 is capable of executing an inspection process for inspecting the application of fluid F on the workpiece W based on images obtained by imaging by the multiple imaging devices 10, 110.

[0103] The above-mentioned coating inspection systems S1, S2, configured as described above in (e), can capture images of the imaging target area from different angles using the multiple imaging devices 10, 110, and can perform coating inspection based on the images thus obtained. This allows the above-mentioned coating inspection systems S1, S2 to perform inspection with high accuracy.

[0104] (f) The above-mentioned application inspection systems S1, S2 are equipped with an irradiation device 20, 120 that irradiates a line-shaped irradiation light L across the fluid F applied to the workpiece W, and an imaging device 10, 110 that images an area including the irradiation area of ​​the irradiation light L as an imaging target area A, and the imaging process involves moving the imaging device 10, 110 and the workpiece W relatively to one another to vary the imaging target area A, while imaging the imaging device 10, 110 while irradiating the imaging target area A with the irradiation light L, thereby obtaining images at multiple locations on the workpiece W, and the inspection process involves inspecting the application state of the fluid F on the workpiece W based on the characteristics of the irradiation light L captured in the image.

[0105] By configuring the above-mentioned coating inspection systems S1 and S2 as described above (f), the characteristics of the irradiated light L that appear in the image obtained by the imaging process can be utilized to inspect the coating condition of the fluid F on the workpiece W.

[0106] (g) In the above-described coating inspection systems S1, S2, the irradiation devices 20, 120 can irradiate a plurality of line-shaped irradiation light L arranged in a direction intersecting the direction in which the irradiation light L extends.

[0107] By configuring the above-mentioned coating inspection systems S1 and S2 as described above in (g), it is possible to reduce the number of times images are captured in the imaging process and reduce the time required for image processing in processes such as feature point extraction processing, movement amount derivation processing, and image formation processing. Furthermore, by configuring the above-mentioned coating inspection systems S1 and S2, the interval between the linear irradiation light L does not vary regardless of the relative movement speed, so that it is possible to improve the inspection accuracy compared to the case of irradiating a single linear irradiation light L to perform inspection.

[0108] (h) The above-mentioned application inspection systems S1, S2 capture images of the same imaging target area A using multiple imaging devices 10, 110, and form three-dimensional data regarding the application state of the fluid F on the workpiece W by using the images obtained from each imaging device 10, 110.

[0109] By configuring the above-mentioned coating inspection systems S1, S2 as described above in (h), it is possible to prevent blind spots from occurring during inspection and improve the inspection accuracy.

[0110] (i) The above-mentioned coating inspection systems S1, S2 are equipped with irradiation devices 20, 120 that irradiate a line-shaped irradiation light L across the fluid F applied to the workpiece W, and the irradiation devices 20, 120 are provided in multiple numbers corresponding to the imaging devices 10, 110, and irradiate the irradiation light L in synchronization with imaging by the associated imaging device 10, 110.When imaging the same imaging target area A by the multiple imaging devices 10, 110, the imaging timing by each imaging device 10, 110 is staggered.

[0111] By configuring the above-mentioned coating inspection systems S1, S2 as described above in (i), when imaging is performed by a plurality of imaging devices 10, 110, irradiation is performed by the irradiation device 20, 120 associated with the imaging device 10, 110 that is performing the imaging, while preventing the irradiation light L from the irradiation device 20, 120 associated with the other imaging devices 10, 110 from appearing in the image. This allows the above-mentioned coating inspection systems S1, S2 to further improve the inspection accuracy.

[0112] (j) The above-mentioned coating inspection systems S1, S2 are equipped with irradiation devices 20, 120 that irradiate a line-shaped irradiation light L across the fluid F applied to the workpiece W, and a plurality of the irradiation devices 20, 120 are provided corresponding to the imaging devices 10, 110, and irradiate the irradiation light L in synchronization with imaging by the associated imaging device 10, 110, and the plurality of irradiation devices 20, 120 each emit irradiation light L of a different wavelength, and the plurality of imaging devices 10, 110 are capable of imaging the irradiation light L emitted from the irradiation devices 20, 120 respectively associated therewith, but are unable to image the irradiation light L emitted from other irradiation devices 20, 120 that are not associated therewith.

[0113] By configuring the above-mentioned coating inspection systems S1, S2 as in (j) above, when imaging is performed by a plurality of imaging devices 10, 110, it is possible to suppress the illumination light L from the illumination devices 20, 120 associated with the imaging device 10, 110 performing the imaging from appearing in the image while the illumination light L from the illumination devices 20, 120 associated with the other imaging devices 10, 110 from appearing in the image. This allows the above-mentioned coating inspection systems S1, S2 to further improve the inspection accuracy.

[0114] (k) The above-mentioned coating inspection systems S1, S2 have a coating device 50 capable of discharging and coating a fluid F toward a workpiece W, and the coating device 50 is movably installed together with the imaging device 10, 110, so that the discharging of the fluid F can be performed simultaneously with imaging by the imaging device 10, 110.

[0115] By configuring the above-mentioned coating inspection systems S1 and S2 as described above in (k), the coating of the fluid F on the workpiece W and the inspection of the coating state can be performed simultaneously. As a result, the above-mentioned coating inspection systems S1 and S2 can apply and inspect the fluid F more efficiently than when the application of the fluid F and the inspection of the coating state are performed separately.

[0116] Other Modifications The above-described coating inspection systems S1, S2 are not limited to those exemplified in the above-described embodiments and modified examples, and may have different configurations and controls without departing from the spirit of the present invention.

[0117] Specifically, the coating inspection systems S1 and S2 include the imaging devices 10 and 110, the irradiation devices 20 and 120, the moving device 30, the inspection control device 40, and the coating device 50, but the present invention is not limited thereto. In addition to these configurations, other configurations may be included, or as described above in (a), the configuration may be one not including the irradiation devices 20 and 120 and the coating device 50. In the case of a configuration not including the irradiation devices 20 and 120, the coating inspection systems S1 and S2 may be configured to inspect the coating state of the fluid F by a method other than the method of inspecting the coating state of the fluid F based on the characteristics of the irradiation light image Li as in the inspection process described above.

[0118] Specifically, for example, the application state of the fluid F may be inspected by a method such as the ToF (Time of Flight) method, in which light is irradiated onto the object to be measured, and the time and phase change until the reflected light returns to the detector are measured to determine the distance. In this case, it is preferable to use a so-called ToF camera as the imaging device 10, 110, in which an infrared pulse emitting unit and an infrared image sensor are time-synchronized, and distance information is obtained for each pixel from the time difference and phase difference of the light receiving timing for each pixel, and 3D information of the entire angle of view is created by combining the distance information. In addition, for example, it is also possible to inspect the application state of the fluid F by a method such as the stereo method, in which two or more imaging devices 10, 110 with different viewpoints are used to determine the distance by the principle of triangulation.

[0119] In addition, in the above-described coating inspection systems S1 and S2, the movement control unit 36 ​​of the movement control device 34 and the coating control device 55 are separate entities, but the present invention is not limited to this. For example, the coating inspection systems S1 and S2 can be provided with a coating control unit in the movement control device 34 that performs coating control in the same manner as the above-described coating control device 55.

[0120] The coating inspection systems S1 and S2 inspect the coating state of the fluid F by executing the master creation flow and the inspection flow as described above in (b), but the present invention is not limited thereto. For example, the coating inspection systems S1 and S2 can be made to operate by a flow that integrates both flows by omitting some steps of the master creation flow and the inspection flow as described above, or by adding other steps, or one or both of the master creation flow and the inspection flow can be made to be flows different from those described above. In addition, the coating inspection systems S1 and S2 can also inspect the coating state of the fluid F by other processes or flows without performing the master creation flow and the inspection flow.

[0121] The above-mentioned coating inspection systems S1 and S2 can execute a master creation flow each time before executing an inspection flow as in (c) above, or can repeatedly use master information defined by a master creation flow executed in advance in multiple inspection flows as in (d) above. In either case, the coating inspection systems S1 and S2 can also add and execute other flows or processes, or change some of the processes or flows to other ones and execute them.

[0122] The above-mentioned coating inspection system S1, S2 has the imaging device 10, 110 and the inspection control device 40, and is arranged so that the imaging target area A is surrounded by the imaging device 10, 110 as described above (e). It is sufficient that the inspection control device 40 can execute the inspection process related to the application of the fluid F, and is not limited to the one exemplified in the above-mentioned embodiment. Specifically, the coating inspection system S1, S2 does not necessarily have to include the irradiation device 20, 120 and the moving device 30. Therefore, the coating inspection system S1, S2 can be configured to perform imaging without irradiating the irradiation light image Li by the irradiation device 20, 120, or to perform imaging without relatively moving the work W and the imaging device 10, 110 by the moving device 30.

[0123] The above-mentioned inspection control device 40 is installed on the installation member 35 together with the imaging devices 10, 110 and the irradiation devices 20, 120, but it can also be configured by an external information processing device such as a personal computer.

[0124] The above-mentioned coating inspection systems S1 and S2 inspect the coating state of the fluid F on the workpiece W based on the characteristics of the irradiated light L captured in the image obtained by the imaging device 10 and 110 as described above (f), but the present invention is not limited thereto. As described above, the coating inspection systems S1 and S2 can inspect the coating state of the fluid F by a method other than the inspection based on the characteristics of the irradiated light image Li, such as the ToF method or the stereo method.

[0125] The above-mentioned coating inspection systems S1, S2 are not limited to a configuration in which the irradiation device 20, 120 is capable of irradiating multiple line-shaped irradiation light L in a direction intersecting the extension direction of the irradiation light L, as in (g) above, but it is also possible to adopt a configuration in which the irradiation device 20, 120 is capable of irradiating a single irradiation light L, for example.

[0126] The above-mentioned coating inspection systems S1, S2, as described in (h) above, form three-dimensional data that allows a three-dimensional understanding of the coating state of the fluid F by capturing images of the same imaging target area A using the multiple imaging devices 10, 110, but the present invention is not limited to this. The coating inspection systems S1, S2 can use one or more selected from multiple original images obtained by capturing images using the multiple imaging devices 10, 110, or can be configured with only one imaging device 10, 110 and form two-dimensional data for understanding the coating state of the fluid F from the original image captured by this.

[0127] The above-mentioned coating inspection system S1, S2, as described above in (i), shifts the imaging timing of each imaging device 10, 110 when imaging the same imaging target area A by the imaging devices 10, 110, or as described above in (j), the imaging devices 10, 110 can image the irradiation light L emitted from the corresponding irradiation devices 20, 120, respectively, and cannot image the irradiation light L emitted from other irradiation devices 20, 120 that are not associated with the imaging devices 10, 110, but the present invention is not limited thereto. For example, in cases where the accuracy of the inspection process is not significantly affected even if the irradiation light image Li by the irradiation device 20, 120 different from the one associated with the imaging device 10, 110 that performs the imaging is included in the image, it is preferable to perform imaging at the same imaging timing while irradiating the irradiation light L in the same wavelength range without shifting the imaging timing of each imaging device 10, 110 or shifting the wavelength of the irradiation light image Li as described above.

[0128] The above-mentioned coating inspection systems S1, S2 are equipped with a coating device 50 as described above (k), and can discharge the fluid F simultaneously with imaging by the imaging devices 10, 110, but the present invention is not limited to this. For example, the above-mentioned coating inspection systems S1, S2 may not be equipped with a coating device 50, and after the fluid F is applied to the workpiece W by a separately provided coating device 50, the coating inspection systems S1, S2 may inspect the coating state of the fluid F.

[0129] The present invention is not limited to the configurations described in the above-mentioned embodiments, and appropriate design modifications and the like are possible within the scope of the technical idea of ​​the present invention. The components of the above-mentioned embodiments and modifications may be arbitrarily selected and combined. Any component of each embodiment or modification may be arbitrarily combined with any component described in the means for solving the problems, the mode for carrying out the invention, etc., or any component that embodies any component described in the means for solving the problems, the mode for carrying out the invention, etc. The present invention also intends to obtain rights to these in this application or a divisional application based on this application, etc. [Industrial Applicability]

[0130] The stator handling device and single-shaft eccentric screw pump system of the present invention can be suitably used in all single-shaft eccentric screw pumps that require stator assembly and removal operations, and in all single-shaft eccentric screw pump systems equipped with such pumps. [Explanation of symbols]

[0131] 10: Imaging device 20: Irradiation device 30: Mobile device 40: Inspection control device 50: Coating device 110: Imaging device 120: Irradiation device A: Imaging target area F: Fluid L: Irradiation light S1: Coating inspection system S2: Coating inspection system W: Work

Claims

1. A coating inspection system for inspecting a coating state of a fluid on a workpiece, comprising: An imaging device for acquiring an image of the workpiece; A moving device that moves the imaging device and the workpiece relatively; An inspection control device that controls an inspection of the application of the fluid on the workpiece; having An imaging process for acquiring a plurality of images with different imaging timings by the imaging device during a process of moving the imaging device and the workpiece relative to each other; A feature point extraction process for extracting feature points included in the image; a movement amount derivation process for deriving a relative movement amount between the imaging device and the workpiece between imaging timings based on a difference between a position of the feature point in an image obtained by imaging at a previous imaging timing and a position of the feature point in an image obtained by imaging at a later imaging timing; an image forming process in which the images captured by the imaging process at different imaging timings or processed images processed based on the images are used as original images, and the original images are arranged based on the amount of relative movement and synthesized to form an image for inspection; A coating inspection system characterized by being capable of executing an inspection process for inspecting the application of the fluid on the workpiece based on the inspection image acquired by the image formation process.

2. a master definition process is executed to define master information in which the relative movement amount derived by the movement amount derivation process and the imaging timing are associated with each other; The inspection control device, a master creation flow for defining the master information through processes including the imaging process, the feature point extraction process, the movement amount derivation process, and the master definition process; an inspection flow in which the inspection image is obtained by performing the image forming process based on the imaging timing of the original image obtained by the imaging process and the relative movement amount derived based on the master information defined by the master creating operation, and the inspection process is performed based on the inspection image; The coating inspection system according to claim 1 , further comprising:

3. 3. The coating inspection system according to claim 2, wherein the master creation flow is executed each time before the inspection flow is executed.

4. 3. The coating inspection system according to claim 2, wherein the master information defined by the master creation flow is repeatedly used in a plurality of the inspection flows.

5. A coating inspection system for inspecting a coating state of a fluid on a workpiece, comprising: An imaging device for acquiring an image of the workpiece; An inspection control device that controls an inspection of the application of the fluid on the workpiece; having A plurality of the imaging devices are arranged to surround an imaging target area, A coating inspection system characterized in that the inspection control device is capable of executing an inspection process to inspect the coating of the fluid on the work based on images obtained by imaging using a plurality of the imaging devices.

6. An irradiation device that irradiates a line-shaped irradiation light so as to cross the fluid applied to the workpiece, the imaging device captures an image of an area including an illumination area of ​​the illumination light as an imaging target area, The imaging process involves moving the imaging device and the workpiece relative to one another to vary the imaging target area, while the imaging device captures images in a state in which the irradiation light is irradiated onto the imaging target area, thereby acquiring the images at a plurality of locations on the workpiece, A coating inspection system as described in any one of claims 1 to 5, characterized in that the inspection process inspects the coating condition of the fluid on the workpiece based on the characteristics of the irradiated light captured in the image.

7. 7. The coating inspection system according to claim 6, wherein the irradiation device is capable of irradiating a plurality of the line-shaped irradiation light beams in a direction intersecting a direction in which the irradiation light beam extends and arranged in a plurality of lines.

8. The same imaging target area is imaged by a plurality of the imaging devices; 6. The coating inspection system according to claim 5, wherein an inspection is performed regarding a coating state of the fluid on the workpiece by using the images obtained from each of the imaging devices.

9. An irradiation device that irradiates a line-shaped irradiation light so as to cross the fluid applied to the workpiece, a plurality of the irradiation devices are provided corresponding to the imaging devices, and the irradiation light is irradiated in synchronization with imaging by the associated imaging device; 6. The coating inspection system according to claim 5, wherein when the plurality of imaging devices capture images of the same imaging target area, imaging timings of the imaging devices are staggered.

10. An irradiation device that irradiates a line-shaped irradiation light so as to cross the fluid applied to the workpiece, a plurality of the irradiation devices are provided corresponding to the imaging devices, and the irradiation light is irradiated in synchronization with imaging by the corresponding imaging device; The plurality of irradiation devices each emit irradiation light of a different wavelength, 6. The coating inspection system according to claim 5, wherein the plurality of imaging devices are capable of imaging the irradiation light emitted from the irradiation device corresponding thereto, and are unable to image the irradiation light emitted from the other irradiation devices not corresponding thereto.

11. a coating device capable of discharging the fluid toward the workpiece to coat it, 6. The coating inspection system according to claim 1, wherein the coating device is movably installed together with the imaging device, and the fluid can be discharged simultaneously with imaging by the imaging device.

Images