Remote computer access lockout systems and methods for substrate processing systems

Abstract

To provide remote computer access lockout systems and methods for substrate processing systems.SOLUTION: A substrate processing system configured to supply electric power to a first network switch and / or a second network switch includes: the first network switch 210 including an input port and an output port; the second network switch 202 including an input / output port connected with the first switch output port; and a lockable key switch 224 that is provided in a power supply line 222 and is movable between OFF and ON positions. When the key switch is ON, remote computer control of the substrate processing system is enabled. When the key switch is OFF, the power supply to the first network switch and / or second network switch is interrupted and the remote computer control is disabled.SELECTED DRAWING: Figure 2

Description

[Technical field]

[0001] Field of Disclosure The present disclosure relates generally to systems and methods for controlling remote access to substrate processing systems. Some more specific aspects of the present technology relate to substrate processing systems and methods in which incoming remote computer signals may be enabled and disabled. Some aspects of the technology relate to substrate processing systems and methods in which incoming remote computer signals may be enabled and disabled using lock-out and / or tag-out (e.g., "LOTO") controls and / or features. [Background technology]

[0002] Background of the disclosure Material layers are commonly deposited onto substrates during the manufacture of semiconductor devices, such as during the manufacture of integrated circuits and electronic devices. Material layer deposition is generally accomplished by supporting the substrate in a substrate processing chamber arrangement, heating the substrate to a desired deposition temperature, and flowing one or more material layer precursors through the chamber arrangement and across the substrate. As the precursors flow across the substrate, a material layer typically grows gradually onto a surface of the substrate, depending on the temperature of the substrate and the environmental conditions within the chamber arrangement.

[0003] Existing substrate processing systems include "cluster-type" systems in which a single substrate handling chamber is operatively connected to two to four substrate processing chambers via gate valves. Each substrate processing chamber is equipped to receive a substrate on a substrate support that holds the substrate during processing (e.g., during material layer deposition as described above). The substrate handling chamber includes a robotic arm that is used to move the substrate in and out of the various substrate processing chambers through gate valves.

[0004] Substrate processing systems of this type often have remote access and operation capabilities, allowing the system to be controlled, at least in part, by parties located remotely from the location of the substrate processing system. However, such remote access and operation capabilities may increase the possibility of safety hazards. For example, at times, one or more of the substrate handling chamber, substrate processing chamber, and / or other equipment may not be powered down during service or repair, such as when service or repair is performed on other components. At such times, a technician may need access to the interior chambers of one or more of the substrate handling chamber, substrate processing chamber, and / or other equipment to complete the required work. For example, remote activation of a portion of the substrate processing system while repair or service is being performed by a party located in a remote location may pose a risk of injury to persons involved in the repair or service.

[0005] At some point, a service technician may need to calibrate sensors, such as sensors associated with one or more robotic arms (e.g., automatic wafer centering (or "AWC") sensors that include robots used in substrate handling chambers). If the remote operator starts the robotic arm before the calibration is complete and the data is saved, the unsaved data will be lost. This will require the calibration to be started anew (at least from the last saved point), increasing costs and wasting the service technician's time.

[0006] To avoid these types of problems, during repair or service, a technician may prevent unwanted remote activation of the substrate processing system, for example, by physically disconnecting the Ethernet connection of the remote computer from the input port of the processing computer of the substrate processing system. While generally acceptable and effective for the intended purpose of preventing unwanted activation of the substrate processing system by a remote user via an Ethernet connection, this arrangement has some drawbacks. For example, once completed, the technician may forget to reconnect the Ethernet cable and / or reconnect the cable to the wrong port, for example, resulting in a longer system "downtime" than intended and / or necessary. Additionally or alternatively, while the repair or service is ongoing, a "passer-by" may notice that the cable has been unplugged and plug it back in. Thus, there is room for improvement in remote control and access to such substrate processing systems. Summary of the Invention [Means for solving the problem]

[0007] Disclosure Summary Aspects of the present technology relate to systems and methods for controlling remote access to a substrate processing system. Some more specific aspects of the present technology relate to substrate processing systems and methods in which incoming remote computer control signals may be enabled and disabled. Additionally or alternatively, some aspects of the present technology relate to substrate processing systems and methods in which incoming remote computer control signals (to control any portion of the substrate processing system) may be enabled and disabled using lockout and / or tagout controls and / or features. The lockout controls and / or features may include a locking system movable between an "enabled" or "on" position and a "disabled" or "off" position to allow (a) control of power to one or more components in a remote data transmission system or method, and / or (b) control of one or more data transmission lines or systems in a remote data transmission system or method.

[0008] A substrate processing system according to at least some embodiments of the present technology includes one or more of: (a) a first switch including a first input port, a first power input, and a first output port; (b) a second switch including a first input / output port and a second power input; (c) a first electrical connector electrically connecting the first power input and the second power input; (d) a lockable key switch provided in the first electrical connector, the lockable key switch movable between an off position and an on position; (e) a power source connected to the first electrical connector; and / or (f) a key configured to be received by the lockable key switch and configured, when received by the lockable key switch, to move the lockable key switch between an on position and an off position. In the on position, the power source provides power to the first switch and the second switch. In the off position, no power is provided to at least the first switch.

[0009] In addition to or in the alternative to one or more of the above features, in at least some embodiments of the present technology, the key can only be removed from the lockable key switch when the lockable key switch is in the off position.

[0010] In addition to or in the alternative to one or more of the above-mentioned features, in at least some embodiments of the present technology, the first input port is configured to receive substrate processing commands from a remote computing system and / or the first output port is connected (directly or indirectly) to a first input / output port of the second switch to transmit substrate processing commands from the remote computing system, through the first switch, to the second switch only when the lockable key switch is in the on position.

[0011] In addition to or as an alternative to one or more of the above features, substrate processing systems according to some embodiments of the present technology may further include one or more substrate processing chambers in electronic communication with the second switch, where at least one of the one or more substrate processing chambers receives input data transmitted through the second switch based on substrate processing commands received from the remote computing system only when the lockable key switch is in the on position.

[0012] In addition to or in the alternative to one or more of the above-mentioned features, a substrate processing system according to some embodiments of the present technology may further include a substrate processing system host computer, wherein the first input port is configured to receive substrate processing commands from a remote computing system, and the first output port is connected to the substrate processing system host computer, and transmits substrate processing commands from the remote computing system to the substrate processing system host computer through the first switch only when the lockable key switch is in the on position, and the substrate processing system host computer transmits a signal to the first input / output port of the second switch based on the substrate processing command received from the remote computing system.

[0013] In addition to or as an alternative to one or more of the above features, substrate processing systems according to some embodiments of the present technology may further include one or more substrate processing chambers in electronic communication with the second switch, where at least one of the one or more substrate processing chambers receives input data transmitted through the second switch based on substrate processing commands received from the remote computing system only when the lockable key switch is in the on position.

[0014] In addition to or in the alternative to one or more of the above features, in at least some embodiments of the present technology, the first input port comprises an Ethernet port.

[0015] In addition to or in the alternative to one or more of the above features, in at least some embodiments of the present technology, the power source is a DC power source.

[0016] A substrate processing system according to at least some embodiments of the present technology includes one or more of: (a) a first switch including a first input port, a first power input, and a first output port; (b) a second switch including a first input / output port and a second power input, the first output port being directly or indirectly connected to the first input / output port of the second switch; (c) a lockable key switch movable between an off position and an on position, the lockable key switch being provided on a power line connected to provide power to at least one of the first power input or the second power input; and / or (d) a key configured to be received by the lockable key switch, the key being configured to move the lockable key switch between an on position and an off position when received by the lockable key switch. In the on position, an electrical circuit including the power line for providing power to at least one of the first power input or the second power input is completed. In the off position, an electrical circuit including the power line for providing power to at least one of the first power input or the second power input is interrupted.

[0017] In addition to or in the alternative to one or more of the above features, in at least some embodiments of the present technology, the key can only be removed from the lockable key switch when the lockable key switch is in the off position.

[0018] In addition to or in the alternative to one or more of the above features, in at least some embodiments of the present technology, the first input port is configured to receive substrate processing commands from a remote computing system and / or the first output port is directly connected to a first input / output port of the second switch to transmit substrate processing commands from the remote computing system, through the first switch, to the second switch only when the lockable key switch is in the on position.

[0019] In addition to or as an alternative to one or more of the above features, substrate processing systems according to some embodiments of the present technology may further include one or more substrate processing chambers in electronic communication with the second switch, where at least one of the one or more substrate processing chambers receives input data transmitted through the second switch based on substrate processing commands received from the remote computing system only when the lockable key switch is in the on position.

[0020] In addition to or in the alternative to one or more of the above features, a substrate processing system according to some embodiments of the present technology may further comprise a substrate processing system host computer, wherein the first input port is configured to receive substrate processing commands from a remote computing system, and the first output port is connected to an input of the substrate processing system host computer, and transmits substrate processing commands from the remote computing system to the substrate processing system host computer through the first switch only when the lockable key switch is in the on position, and the substrate processing system host computer transmits a signal to the first input / output port of the second switch based on the substrate processing command received from the remote computing system.

[0021] In addition to or as an alternative to one or more of the above features, substrate processing systems according to some embodiments of the present technology may further include one or more substrate processing chambers in electronic communication with the second switch, where at least one of the one or more substrate processing chambers receives input data transmitted through the second switch based on substrate processing commands received from the remote computing system only when the lockable key switch is in the on position.

[0022] A method of connecting a substrate processing system to a remote computing system according to at least some embodiments of the present technology may include one or more of: (a) connecting the remote computing system to a first input port of a first switch, the first switch further comprising a first power input and a first output port, (b) directly or indirectly connecting a first output port of the first switch to a first input / output port of a second switch, the second switch further comprising a second power input, (c) electrically connecting the first power input and the second power input to an electrical connector including a lockable key switch, the lockable key switch being movable between an off position and an on position using a key, and / or (d) connecting a power source to the electrical connector. The lockable key switch is provided in the electrical connector such that (i) when the lockable key switch is in the on position, the power source provides power to the first switch and the second switch, and (ii) when the lockable key switch is in the off position, at least one of the first switch or the second switch is not provided with power by the power source.

[0023] In addition to or in the alternative to one or more of the above features, methods according to some embodiments of the present technology may further include disabling operation of the substrate processing system by rotating a lockable key switch from an on position to an off position using the key and / or by removing the key from the lockable key switch.

[0024] In addition to or in the alternative to one or more of the above features, methods according to some embodiments of the present technology may further include enabling operation of the substrate processing system by engaging a key with the lockable key switch while the lockable key switch is in the off position and / or by rotating the lockable key switch from the off position to the on position using the key.

[0025] In accordance with at least some embodiments of the present technology, a method of connecting a substrate processing system to a remote computing system may include one or more of: (a) connecting a first input port of a first switch, the first switch further comprising a first power input and a first output port; (b) directly or indirectly connecting a first output port of the first switch to a first input / output port of a second switch, the second switch further comprising a second power input; (c) electrically connecting at least one of the first power input or the second power input to an electrical connector including a lockable key switch, the lockable key switch being movable using a key between an off position and an on position; and / or (d) connecting a power source to the electrical connector. The lockable key switch is provided in the electrical connector such that (i) when the lockable key switch is in the on position, the power source provides power to at least one of the first switch or the second switch, and (ii) when the lockable key switch is in the off position, power is not provided to at least one of the first switch or the second switch by the power source.

[0026] In addition to or in the alternative to one or more of the above features, methods according to some embodiments of the present technology may further include disabling operation of the substrate processing system by rotating a lockable key switch from an on position to an off position using the key and / or by removing the key from the lockable key switch.

[0027] In addition to or in the alternative to one or more of the above features, methods according to some embodiments of the present technology may further include enabling operation of the substrate processing system by engaging a key with the lockable key switch while the lockable key switch is in the off position and / or by rotating the lockable key switch from the off position to the on position using the key.

[0028] This Summary is provided to introduce selected concepts related to the technology in a simplified form. These concepts are described in more detail below in the Detailed Description. This Summary is not intended to identify key features or essential features of the claimed subject matter, nor is it intended to be used to limit the scope of the claimed subject matter.

[0029] BRIEF DESCRIPTION OF THE DRAWINGS These and other features, aspects, and advantages of the inventions disclosed herein are described below with reference to drawings of certain specific embodiments, which are intended to illustrate but not to limit the invention. [Brief description of the drawings]

[0030] [Figure 1] FIG. 1 illustrates, in schematic form, an overhead view of a "cluster-type" substrate processing system, in accordance with some embodiments of the present technology. [Diagram 2] FIG. 2 illustrates a schematic diagram of a substrate processing system and a remote computer system in accordance with some embodiments of the present technique. [Diagram 3] FIG. 3 illustrates example features of a control panel with lockout capabilities for enabling and disabling remote computer operation of substrate processing systems and methods, according to some embodiments of the present technique. [Figure 4] FIG. 4 illustrates, in schematic form, an overhead view of another "cluster-type" substrate processing system, in accordance with some embodiments of the present technique. [Diagram 5] FIG. 5 illustrates a schematic diagram of another connection between a substrate processing system and a remote computer system, in accordance with some embodiments of the present technique. [Figure 6] FIG. 6 illustrates features and aspects of methods for remote access in substrate processing systems and methods, according to some embodiments of the present technique. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0031] It will be appreciated that elements in the figures are illustrated for simplicity and clarity and have not necessarily been drawn to scale and / or with complete detail, for example, the relative size of some of the elements in the figures may be exaggerated relative to other elements to help improve understanding of the illustrated embodiments of the present disclosure. Detailed Description

[0032] Reference is now made to the drawings in which like reference numbers identify analogous structural features or aspects of the present disclosure.

[0033] When used herein to denote ports for receiving and / or transmitting data, the terms "input port" and "output port" include within their scope data and / or communication ports that are used both to receive input and to transmit output (e.g., "input / output port"). Thus, the term "input port" may be used herein to describe a particular portion of a component, the hardware that provides that "port" is in fact configured to and capable of receiving input from one or more other components and transmitting output to one or more other components. Similarly, thus, the term "output port" may be used herein to describe a particular portion of a component, the hardware that provides that "port" is in fact configured to and capable of receiving input from one or more other components and transmitting output to one or more other components.

[0034] As mentioned above, material layers are typically deposited onto a substrate during the manufacture of semiconductor devices, such as during the manufacture of integrated circuits and electronic devices. FIG. 1 illustrates a "cluster-type" substrate processing system 100 according to some embodiments of the present technique. This exemplary substrate processing system 100 includes a substrate handling chamber 102 that operably connects with one to four substrate processing chambers 104 via a gate valve 106. Each substrate processing chamber 104 includes one or more substrate supports and is equipped to receive a substrate on the substrate supports 108 and hold the substrate during processing (e.g., during material layer deposition, etching process, etc., as described above). FIG. 1 illustrates each substrate processing chamber 104 including four substrate supports 108 onto which a substrate can be placed during processing. More or fewer substrate supports 108 may be provided within each substrate processing chamber 104 (e.g., the substrate processing chamber 104 may be a dual chamber module (DCM) or a quad chamber module (QCM)). A substrate processing chamber 104 according to some embodiments of the present technology may include four substrate supports 108 positioned vertically below the four substrate supports 108 shown in the top view of Figure 1. Each of the substrate processing chambers 104 may have the same structure, or one or more of the substrate processing chambers 104 may have a different structure than the other substrate processing chambers 104 present.

[0035] The substrate handling chamber 102 includes a robot arm 110 that is used to move substrates in and out of the various substrate processing chambers 104 through a gate valve 106. In use, the gate valve 106 is opened and an end effector 110A of the robot arm 110 extends through the open gate valve 106 to insert a substrate into or remove a substrate from the internal chamber of the substrate processing chamber 104 (e.g., to place a substrate on or remove a substrate from a substrate support 108 in the substrate processing chamber 104). When the robot arm 110 is retracted from the substrate processing chamber 104, the gate valve 106 is closed, thereby sealing the substrate processing chamber 104 from the substrate handling chamber 102. Other desired actions can then be performed within the substrate processing chamber 104 (e.g., material layer deposition, etching, etc.) and / or the substrate handling chamber 102.

[0036] 1 further shows that this exemplary substrate processing system 100 includes a load lock module 112. The load lock module 112 is connected to the substrate handling chamber 102 by one or more gate valves 116. The load lock module 112 includes a substrate holding component 114 to hold the substrate on its way into the substrate handling chamber 102 for further processing and on its way out of the substrate handling chamber 102 (after processing is completed). An end effector 110A of the robot arm 110 moves through the gate valve 116 (when open) to move the substrate from the load lock module 112 into the substrate handling chamber 102 (for layer deposition, etching, and / or other processing) and from the substrate handling chamber 102 into the load lock module 112 (after processing is completed). The load lock module 112 and gate valves 116 keep the substrate isolated from the environment of the substrate handling chamber 102 until the conditions (e.g., temperature, pressure, atmospheric content, etc.) within the substrate handling chamber 102 are ready to insert the substrate, e.g., while waiting for all gate valves 106 to be closed.

[0037] The load lock module 112 is further coupled to an equipment front end module 120 via one or more additional gate valves 118. The equipment front end module 120 includes a robot arm 122. An end effector 122A of the robot arm 122 moves through the gate valve 118 (when open) to move substrates from the equipment front end module 120 into the load lock module 112 (for layer deposition, etching, and / or other processing) and from the load lock module 112 back into the equipment front end module 120 (after processing is completed). The robot arm 122 of the equipment front end module 120 also picks up new substrates for processing from one of the load ports 124A-124D and returns processed substrates to one of the load ports 124A-124D, e.g., to be transported elsewhere for further processing or other actions.

[0038] FIG. 1 further illustrates a universal processing computer 130 (also referred to herein as a "substrate processing system host computer"). The universal processing computer 130 may be used to control and coordinate the operation (e.g., "scheduling" various functions and operations) of the substrate handling chamber 102, the substrate processing chamber 104, the load lock module 112, the equipment front end module 120, the load ports 124A-124D, the robotic arms 110, 122, the gate valves 106, 116, 118, and any equipment contained within any of these components. The universal processing computer 130 may also have data logging capabilities (e.g., performing equipment data acquisition ("EDA") functions). Although FIG. 1 illustrates the universal processing computer 130 housing the equipment front end module 120, it may be provided as part of any of the other component parts (e.g., the substrate handling chamber 102, one or more of the substrate processing chambers 104, the load lock module 112, etc.) and / or may be provided as a separate stand-alone component or in a separate workstation. 1 further illustrates a remote computer 140 connected to the universal processing computer 130 via an input port 142, which may include at least in part an Ethernet port and Ethernet cable 142C connection, although any other desired type of wired and / or wireless connection and / or communication may be used in other embodiments of the present technology. The remote computer 140 may be provided at any desired location and may be connected to the substrate processing system 100 via the Internet and / or other desired network connection (represented by the "cloud" 150 in FIG. 1). While FIG. 1 illustrates an input port 142 provided on a control panel 300 (example features of which are described in more detail below), the input port 142 may be directly connected to the universal processing computer 130 and / or otherwise connected to communicate with and provide data for operating the substrate processing system 100.Although FIG. 1 illustrates the control panel 300 located on the equipment front end module 120, the location of the control panel 300 may vary in other particular embodiments of the present technology, including on the load lock module 112, on one of the substrate processing chambers 104, on a stand-alone or separate work station, and / or another desired location.

[0039] At least some aspects of the present technology relate to how the remote computer 140 is connected to the substrate processing system 100 and / or how this connection operates, for example, to provide data and information to the universal processing computer 130 for remotely controlling and operating the substrate processing system 100. FIG. 2 illustrates generally at least a portion of a connection system 200 according to one embodiment of the present technology. As shown in FIG. 2, the connection system 200 includes a network switching system 202 (e.g., in this embodiment, an 8-port Ethernet switch). One input / output port of the network switching system 202 (labeled "port-5" in FIG. 2) is connected to the universal processing computer 130. Four of the other input / output ports of the network switching system 202 (labeled port-2, port-3, port-4, and port-8 in FIG. 2) are connected to the various substrate processing chambers 104 for transmitting data between the universal processing computer 130 and the substrate processing chambers 104 (e.g., signals controlling heaters, pumps, gate valves, processing conditions, etc.). Other input / output ports are provided in communication with a transport module computer 204 (via port-6), for controlling the transport of substrates through the various components of the substrate processing system 100, including, for example, scheduling substrate movement, and with an equipment data acquisition ("EDA") computer system 206 (via port-7), for example, a software tool that assists in data logging. The local area network input port of the network switching system 202 in this illustrated embodiment is connected to a host computer 230, controlled, for example, by the manufacturer of the facility in which the substrate processing system 100 is located.

[0040] The connection system 200 of Fig. 2 further includes another network switching system 210, which in this specifically illustrated embodiment includes a two-port Ethernet port. This additional network switching system 210 includes the input port 142 described above for receiving incoming data from the remote computer 140 via a network connection (e.g., substrate processing commands to be performed in one or more of the substrate processing chambers 104 and / or other commands for controlling portions of the substrate processing system 100). An output port 212 of the network switching system 210 is connected to an input / output port ("port-1") of the network switching system 202 (e.g., via communication line 214) for transmitting data from the remote computer 140 to the network switching system 202 (which may then transmit data via the network switching system 202 to the universal processing computer 130). Alternatively, if desired, the remote computer 140's data may be transmitted from the output port 212 to another input location, such as an input port provided directly on the universal processing computer 130. Network switching system 210 is also referred to herein as the "first switch" or "first switching system," and switching system 202 is also referred to herein as the "second switch" or "second switching system."

[0041] The power control features of the connection system 200 will now be described in conjunction with Figures 2 and 3. As shown in Figure 2, the connection system 200 of this example further includes a DC power supply 220 for supplying power to each of the network switching system 202 and the network switching system 210 via a power line 222. The power line 222 of this example includes an electrical connector that electrically connects with a power input (e.g., a 24 volt DC power input port) of the network switching system 202 and a power input (e.g., a 24 volt DC power input port) of the network switching system 210. The power line 222 of this example further includes a key switch 224. The key switch 224 at least turns the network switching system 210 on and off. When the key switch 224 is closed ("on"), power from the power supply 220 enables the network switching system 210 to operate such that data can travel from the remote computer 140, through the network switching system 210, through the output port 212, and from the network switching system 202 (or otherwise routed) to the universal processing computer 130. When the key switch 224 is open ("off"), no power from the power source 220 reaches the network switching system 210 such that the network switching system 210 is inoperable and does not move data from the remote computer 140 through the network switching system 210. In this manner, the key switch 224 can be used to control whether the remote computer 140 can operate the substrate processing system 100.

[0042] 3 illustrates a portion of a control panel 300 including a portion of the key switch 224 with which a user may interact. As shown on the left side of FIG. 3, a key 302 may be inserted into a key slot 306 of a lock system 304. See arrow 308. In this exemplary lock system 304, the key 302 may only be inserted into and removed from the key slot 306 when the lock system 304 is in an OFF position. Once the key 302 is inserted into the key slot 306 (e.g., as shown in the center of FIG. 3), the key 302 may be rotated to an ON position (which activates the network switching system 210 and enables access and control of the remote computer 140 of the substrate processing system 100). See the right side of FIG. 3. Rotating the lock system 304 with the key 302 may physically move the switch member 224A (see arrow 224B in FIG. 2) between an open or off position (shown in the center of FIGS. 2 and 3) and a closed or on position (shown on the right side of FIG. 3). When off, the movable switch member 224A opens the circuit of the power line 222 so that no power reaches the network switching system 210 (i.e., the network switching system 210 is in an "unpowered" state). This disables remote computer 140 access and control of the substrate processing system 100. When "on," the movable switch member 224A closes the circuit of the power line 222, providing power to operate the network switching system 210.

[0043] The locking system 304 shown in Figure 3 may include the moveable switch member 224A shown in Figure 2 or may be directly connected to the moveable switch member 224A to physically and directly move the switch member 224A between the open and closed positions. Alternatively, if desired, some mechanical connector and / or link may be provided to physically move the switch member 224A in response to movement of the keyed locking system 304. Other types of physical arrangements, links, connections, and / or components (including electronic, wired, and / or wireless connections) may be used to change the key switch 224 between the open and closed positions in response to the locking system 304 moving between its on and off positions.

[0044] As shown and described above in conjunction with FIG. 3, the key switch 224 and locking system 304 may have various features or characteristics. For example, the key switch 224 may be lockable, such as by engaging the key 302 with the locking system 304. Additionally, the key 302 may be removable from the locking system 304 only when the key switch 224 and locking system 304 are in the OFF position. Additionally, when the key switch 224 and locking system 304 are in the OFF position, the network switching system 210 is in an “unpowered” state. Thus, if a user turns the locking system 304 to the OFF position and removes the key 302, the network switching system 210 will not receive power and therefore the remote computer 140 will not be able to control the substrate processing system 100 unless and until the appropriate key 302 is used to move the locking system 304 to the ON position. Thus, the substrate processing chamber 104 and / or other components of the substrate processing system 100 can only receive commands from the remote computer 140 when the lockable key switch 224 is in the ON position. In this manner, a technician can disable remote access (by turning the lock system 304 to the OFF position and removing the key 302) and then perform repairs or service on portions of the substrate processing system 100 with less concern that the substrate processing system 100 may be activated by the remote computer 140.

[0045] 3 further illustrates that the control panel 300 may have additional features, although this is not a requirement in all embodiments of the present technology. As some more specific examples, the control panel 300 may include an input port 142 (e.g., an Ethernet port) for a remote computer 140 on the network switching system 210, an output port 212 from the network switching system 210, one or more ports 202P for the network switching system 202, one or more USB or other input ports (e.g., port 312), and / or one or more power outlets 314. Although not shown in FIG. 3, the control panel may also include one or more interfaces for user input devices, such as a touch screen, a computer pointing device (mouse, joystick, erase head, etc.), a keyboard (hard or soft), etc.

[0046] In at least some implementations of this technology, the overall locking system 304 may include some method of advising other users as to who locked the locking system 304 when the key 302 is removed. As some more specific examples, when the key 302 is removed, the party removing the key 302 may place (and be required to place) some sort of removable "tag" 320 on or near the substrate processing system 100. Additionally or alternatively, the tag 320 may be provided on the control panel 300 (e.g., clipped on, attached by a magnet, attached by hook-and-loop fastener, snap-on, bonded, etc.), within the key slot 306 (e.g., a "disabled" key 322 that can fit into the key slot 306 and does not move the switch member 224A of the key switch 224 and includes user identification information on the tag 320), on a board or sheet located near the substrate processing system 100, etc. In this manner, the lockable key switch 224 and locking system 304 may have and / or provide a "lock out / tag out" or LOTO feature. Additionally or alternatively, other types of "lock out / tag out" or "LOTO" features, systems, and / or components may be provided for the locking system 304 for use with other specific instances of the present technology (such as a locking component used to physically lock the locking system 304 in the off position).

[0047] 4 illustrates a schematic overhead view of another exemplary substrate processing system 400 (another "cluster-type" semiconductor processing system) in accordance with some embodiments of the present technology. The substrate processing system 400 may be of the type described in U.S. Provisional Patent Application No. 63 / 524,272, filed June 30, 2023, and entitled "Extended Substrate Processing Systems and Methods with Additional Processing Chamber Connectability." U.S. Provisional Patent Application No. 63 / 524,272 is incorporated herein by reference in its entirety.

[0048] 4 includes (a) a first substrate handling chamber 402 (the "near" substrate handling chamber) including a first robotic arm 404 having an end effector 404A, (b) a first load lock module 410 (the "near" load lock module) connected to one edge or face of the first substrate handling chamber 402, (c) a second load lock module 420 (the "rear" load lock module) connected to an opposing edge or face of the first substrate handling chamber 402, and (d) a second substrate handling chamber 430 (the "rear" substrate handling chamber) including a second robotic arm 432 having an end effector 432A. The second load lock module 420 extends between and connects the first substrate handling chamber 402 and the second substrate handling chamber 430. The first load lock module 410 in this embodiment is also connected to an equipment front end module 440 that includes a third robot arm 442 having an end effector 442A. The equipment front end module 440 may include or be connected to a nitrogen gas source for providing a nitrogen gas atmosphere within the equipment front end module 440. The equipment front end module 440 receives new substrates for processing into the substrate processing system 400 and also ejects processed substrates from the substrate processing system 400 via one or more loading ports 450A-450D (using the robot arm 442 to move substrates between the loading ports 450A-450D and the first load lock module 410). Although four loading ports 450A-450D are shown in the embodiment of FIG. 4, more or fewer loading ports may be provided in other embodiments of the technology.

[0049] Each of the first substrate handling chamber 402 and the second substrate handling chamber 430 is connected (or connectable) to a plurality of substrate processing chambers 460. The substrate is transferred into the substrate processing chambers 460 where one or more layers of material are deposited onto the surface of the substrate and / or other desired substrate processing is performed. FIG. 4 shows each substrate processing chamber 460 including four substrate supports 462 onto which the substrate can be placed during processing. More or fewer substrate supports 462 may be provided in each substrate processing chamber 460 (e.g., the substrate processing chamber 460 may be a dual chamber module (DCM) or a quad chamber module (QCM)). The substrate processing chamber 460 according to some embodiments of the present technology may include another four substrate supports 462 located vertically below the four substrate supports 462 shown in the top view of FIG. 4. Each of the substrate processing chambers 460 may have the same structure, or one or more of the substrate processing chambers 460 may have a different structure from the other substrate processing chambers 460 present.

[0050] Each of the first substrate handling chamber 402 and the second substrate handling chamber 430 is connected to its respective substrate processing chamber 460 via one or more gate valves 470. Although two gate valves 470 are shown connecting the substrate handling chambers 402, 430 to each of their respective substrate processing chambers 460, in other embodiments of the present technology, more or fewer gate valves 470 may be provided for each substrate processing chamber 460. The substrate processing chambers 460 according to some embodiments of the present technology may be connected to their respective substrate handling chambers 402, 430 by another two gate valves 470, for example, located vertically below the two gate valves 470 shown in the top view of FIG. 4. When closed, the gate valves 470 sealingly separate the substrate handling chambers 402, 430 from their respective substrate processing chambers 460 (so that independent atmospheric conditions may be maintained within each chamber). When open, the gate valve 470 provides an opening (e.g., a substrate transport slot) through which the end effectors 404A, 432A of the robot arms 404, 432 can extend to move substrates into and out of the substrate processing chamber 460. The openings through the gate valve 470 align with substrate transport slots provided in the substrate processing chamber 460 and the substrate handling chambers 402, 430 to allow substrates to be moved between the substrate processing chamber 460 and the substrate handling chambers 402, 430 through the gate valve 470. Each of the gate valves 470 may have the same structure, or one or more of the gate valves 470 may have a different structure than the other gate valves 470 present.

[0051] One side of the first load lock module 410 connects to the equipment front end module 440 by one or more gate valves 480A (two are shown in FIG. 4 ) and the opposite side of the first load lock module 410 connects to the first substrate handling chamber 402 by one or more gate valves 480B (two are shown in FIG. 4 ). The first load lock module 410 further includes one or more substrate supports 412 (two are shown in FIG. 4 ) for holding a substrate while waiting to be moved into the equipment front end module 440 or the first substrate handling chamber 402. When closed, the gate valves 480A, 480B sealingly isolate the load lock module 410 from the equipment front end module 440 and the substrate handling chamber 402 (so that independent atmospheric conditions may be maintained in each chamber). When open, the gate valve 480A provides an opening (e.g., a substrate transport slot) through which the end effector 442A of the robot arm 442 can extend to move substrates into and out of the instrument front end module 440. The openings through the gate valve 480A align with substrate transport slots provided in the instrument front end module 440 and the first load lock module 410 to enable substrates to be moved between the instrument front end module 440 and the first load lock module 410 through the gate valve 480A. When open, the gate valve 480B provides an opening (e.g., a substrate transport slot) through which the end effector 404A of the robot arm 404 can extend to move substrates into and out of the substrate handling chamber 402. An opening through gate valve 480B aligns with a substrate transport slot provided in the substrate handling chamber 402 and the first load lock module 410 to enable movement of substrates between the substrate handling chamber 402 and the first load lock module 410 through gate valve 480B.Each of the gate valves 480A, 480B may have the same structure, or one or more of the gate valves 480A, 480B may have a different structure than the other gate valves 470, 480A, 480B that are present.

[0052] In the substrate processing system 400 of Figure 4, one side of the second load lock module 420 is connected to the first substrate handling chamber 402 by one or more gate valves 490A (two are shown in Figure 4), and the opposite side of the second load lock module 420 is connected to the second substrate handling chamber 430 by one or more gate valves 490B (two are shown in Figure 4). The second load lock module 420 further includes one or more substrate supports 422 (two are shown in Figure 2) for holding a substrate while it waits to be transferred between the two substrate handling chambers 402, 430. When closed, the gate valves 490A, 490B sealingly isolate the second load lock module 420 from the two substrate handling chambers 402, 430 (so that independent atmospheric conditions may be maintained in each chamber). When open, the gate valve 490A provides an opening (e.g., a substrate transfer slot) through which the end effector 404A of the robot arm 404 can extend to move a substrate into and out of the first substrate handling chamber 402. The openings through the gate valve 490A align with substrate transfer slots provided in the first substrate handling chamber 402 and the second load lock module 420 to enable moving substrates between the substrate handling chamber 402 and the second load lock module 420 through the gate valve 490A. When open, the gate valve 490B provides an opening (e.g., a substrate transfer slot) through which the end effector 432A of the robot arm 432 can extend to move a substrate into and out of the second substrate handling chamber 430. An opening through gate valve 490B aligns with a substrate transport slot provided in the second substrate handling chamber 430 and the second load lock module 420 to enable substrates to be moved between the second substrate handling chamber 430 and the second load lock module 420 through gate valve 490B.Each of the gate valves 490A, 490B may have the same structure, or one or more of the gate valves 490A, 490B may have a different structure than the other gate valves 490A, 490B present. The gate valves 490A and / or 490B may also have the same structure as the gate valves 470, 480A, and / or 480B, or may have a different structure.

[0053] The first load lock module 410 may have the same structure as the second load lock module 420, and / or the first load lock module 410 and the second load lock module 420 may be interchangeable (e.g., the load lock modules 410, 420 may be swapped in position and / or may have a modular structure). In other examples, the first load lock module 410 and the second load lock module 420 may have a different structure and / or may not be interchangeable (e.g., the load lock modules 410, 420 may not be swapped in position within the substrate processing system 400). Either or both of the load lock modules 410, 420 may have multi-station cooling capabilities and / or may be of the pass-through type.

[0054] As shown by the dashed lines in Fig. 4, the two smaller sides of the first substrate handling chamber 402 may comprise at least one substrate transfer slot 252. The substrate transfer slot 252, when present, may be sealed (e.g. by a removable seal plate) in a substrate processing system 400 arrangement of the type shown in Fig. 4 if no substrate processing chamber 460 is attached to these sides. The substrate transfer slots 252 in these sides may also be smaller than the corresponding slots in the other sides of the first substrate handling chamber 402 and / or the second substrate handling chamber 430 (however, the transfer slots 252 need not be smaller in all embodiments of the present technology). These smaller sides may therefore be connected to substrate processing chambers via additional gate valves (optionally to smaller substrate processing chambers) as required.

[0055] 4 further illustrates that this exemplary substrate processing system 400 includes a universal processing computer 130 and a control panel 300 connected to a remote computer 140 via appropriate communication connections (e.g., connecting cable 142C, input port 142, and network connection). These components of the substrate processing system 400 of FIG. 4 may have any of the structures, functions, options, and / or alternatives described for these components above in conjunction with FIGs. 1-3. In some embodiments of the present technology, the substrate processing system 400 of FIG. 4 may also include a connection system 200 for the remote computer 140 of the type described above in conjunction with FIGs. 1-3.

[0056] In other embodiments of the present technology, the substrate processing system 400 of FIG. 4 may include a different type of connection system for the remote computer 140, such as the connection system 500 shown in FIG. 5. When the same reference numbers are used in FIG. 5 as are used in any of FIGS. 1-4, the same or similar parts (having any of the options, alternatives, or features of that part described above) are referenced, and most of the duplicated description may be omitted. The following discussion will focus primarily on the differences between the connection system 500 of FIG. 5 and the connection system 200 described above. The connection system 500 of FIG. 5 may also be used in the substrate processing system 100 of FIG. 1, at least in some embodiments of the present technology.

[0057] As shown in FIG. 5, the network switching system 202 (e.g., an 8-port Ethernet switch) of this example has six of its ports (labeled port-3 through port-8) connected to provide data and communication with the six substrate processing chambers 460 shown in FIG. 4. Additionally, an input / output port is provided to communicate with the transfer module computer 204 (via port-2), for example, to control transport of substrates through the various components of the substrate processing system 400. Any type of connection may be provided, such as a connection using an Ethernet cable extending between the network switching system 202 and the input / output ports of the substrate processing chambers 460 and / or the transfer module computer 204. The connection system 500 of FIG. 5 further includes a DC power supply 220 connected to the network switching system 202 and the DC input port of the network switching system 210, for example, via power line 222 in the same manner as described above for the systems of FIGS. 1-3. The connection system 500 of FIG. 5 may be used with the control panel 300 and / or lockout / tagout features described above in conjunction with FIGS. 1-3.

[0058] In the connection system 500 of FIG. 5, the remote computer 140 is connected to the input port 142 of the network switching system 210, for example, via an Ethernet cable 142C and / or other suitable connection system (using any desired network communication protocol). The output port 212 of the network switching system 210 in this example is connected to the input / output port 130A of the universal processing computer 130. In this manner, when the key switch 224 is closed, signals are transferred between the remote computer 140 and the universal processing computer 130 through the network switching system 210. When the key switch 224 is open, power to the network switching system 210 is cut off, and therefore no signals are communicated between the remote computer 140 and the universal processing computer 130 through the network switching system 210. In the embodiment of FIG. 5, the universal processing computer 130 is configured to perform EDA functions (rather than including a separate EDA computer connected to the network switching system 202 in this arrangement). However, if desired, a separate EDA computer can be provided in the arrangement shown in FIG. 5.

[0059] The input / output port 130B of the universal processing computer 130 in this example connection system 500 is connected, for example, via a communication cable 132 (e.g., an Ethernet cable and / or other suitable connection system (using any desired communication protocol)) to an input / output port 202A (labeled “Port-1” in FIG. 5 ) of the network switching system 202. Thus, the remote computer 140 may be used to control one or more of the substrate processing chambers 460, the substrate handling chambers 402, 430, the load lock modules 410, 420, the equipment front end module 440, and / or any other component parts of the substrate processing system 400 via communications transmitted through the network switching system 210, the universal processing computer 130, and the network switching system 202.

[0060] Other connection system arrangements are possible in other embodiments of the technology. For example, connection systems 200 and 500 described above show network switching system 202 and the DC input port of network switching system 210 connected by power line 222, with key switch 224 provided in that power line 222 (between DC power source 220 and the DC input port of network switching system 210). In this manner, power to network switching system 210 can be controlled based on the position of key switch 224, as described above. Other configurations and options are possible. For example, if desired, separate power lines can be provided, (i) one between DC power source 220 and network switching system 202, and (ii) another between DC power source 220 (or another DC power source) and network switching system 210, with key switch 224 provided on either or both of these separate power lines to control power to network switching system 202 and / or network switching system 210. As another example, the key switch 224 shown in Figures 2 and 5 may be provided at a location on the power line 222 to control power provided to the network switching system 202 (rather than the network switching system 210). Note, for example, the location indicated by arrow A in Figures 2 and 5. As yet another example, the key switch 224 shown in Figures 2 and 5 may be provided at a location in front of the power line 222 to control power provided to both the network switching system 202 and the network switching system 210. Note, for example, the location indicated by arrow B in Figures 2 and 5. Thus, various different arrangements of the key switch 224 in the connection system 200, 500 are possible in accordance with aspects of the present technology.

[0061] 6 provides a flow chart generally illustrating a process 600 for setting up and / or using a connection system 200, 500 of the type described above (with additional references to components shown in FIGS. 1-5). In such process 600, a remote computer 140 is connected to an input port 142 of a first switching system 210, for example, by an Ethernet cable 142C and / or other suitable network connection and / or communication protocol. Note step S602. In step S604, an output port 212 of the first switching system 210 is connected to an input port of a second switching system 202. In the connection system 200 of FIG. 2, this is a direct connection between the output port 212 of the first switching system 210 and port-1 of the second switching system 202. 5, this is an indirect connection, with the output port 212 of the first switching system 210 connected to the input / output port 130A of the universal processing computer 130, and the input / output port 130B of the universal processing computer 130 connected to port-1 of the second switching system 202. These connections may be made using an Ethernet connection and / or any other desired type of connector and / or communication protocol. In these methods, the remote computer 140 is connectable to control the substrate processing systems 100, 400 through both the first switching system 210 and the second switching system 202.

[0062] In step S606, the process 600 further includes providing a lockable key switch 224 on the power line 222 to supply power to at least one of the first switching system 210 and / or the second switching system 202. In the particular embodiment of Figures 1-5, the lockable key switch 224 is provided on a portion of the power line 222 that supplies power to the first switching system 210. However, as discussed above with respect to arrows A and B in Figures 2 and 5, other locations of the lockable key switch 224 are possible in other particular embodiments of the present technology.

[0063] The power line 222 to the first switching system 210 and / or second switching system 202 is connected to a power source 220 (e.g., a DC power source) in step S608. The operation of the process 600 depends on the position of the lockable key switch 224. In the particular embodiment shown in Figures 2 and 5, a single power line 222 extends between a DC input of the first switching system 210 and the second switching system 202, and the output of the power source 220 is connected to this power line 222 in step S608. When the lockable key switch 224 is in the “on” position (see step S610), power is provided to the first switching system 210 (and / or the second switching system 202), thereby enabling the remote computer 140 to control the substrate processing system 100, 400 (e.g., control one or more of the substrate processing chambers 104, 460, control one or more of the substrate handling chambers 102, 402, 430, and / or control other equipment of the substrate processing system 100, 400). When the lockable key switch 224 is in the “off” position (see step S612), power is disconnected from at least one of the first switching system 210 and / or the second switching system 202, which disables control of the substrate processing system 100, 400 and / or its components by the remote computer 140. 2 and 5, (a) when the lockable key switch 224 is in the “on” position (see step S610), power is provided to the first switching system 210 and the second switching system 202 via the power line 222, and (b) when the lockable key switch 224 is in the “off” position (see step S612), power is disconnected from the first switching system 210. The second switching system 202 receives power from the DC power source 220 even when the key switch 224 is in the off position in these specifically illustrated examples (although as noted above, other arrangements are possible).

[0064] Other types of systems and / or methods for controlling remote access to operate the substrate processing system may be provided in accordance with other specific embodiments of the present technology. For example, if desired, a key switch of the type described above (e.g., having a physical key 302 and a lock) may be provided to control the operation of (e.g., transmission of signals therethrough) the cable 142C (and optionally, the network switching system 210 may be omitted). Other types of locking hardware and / or software (e.g., to lock the key switch 224 in the off position) may be provided to disable signals from the remote computer 140 from reaching the network switching system 202 and / or the universal processing computer 130. Additionally or alternatively, other types of lockout and / or tagout hardware and / or software may be provided to disable signals from the remote computer 140 from reaching the network switching system 202 and / or the universal processing computer 130 and to advise others who created the lockout condition.

[0065] Substrate processing systems and methods according to some embodiments of the present technology may include other types of selectively activatable remote computer access, for example using lockout and / or tagout controls and / or features. Such substrate processing systems may include a lockable key switch (e.g., 224) of the type described above provided on the power lines to any components necessary to transmit data from the remote computer 140 to the substrate processing system equipment. Additionally or alternatively, a lockable key switch (e.g., 224) of the type described above may be provided on the data transmission lines or connections for any components necessary to transmit data from the remote computer 140 to the substrate processing system equipment (e.g., operably connected to an Ethernet cable such as cable 142C, to a wireless data transmission system, etc.). In such systems and methods, the lockable key switch (e.g., 224) may be movable between an "enabled" or on position and a "disabled" or off position using a key (e.g., 302). When enabled or on, (a) one or more electrical circuits are completed, including a power source for providing power to all components necessary for the control of the remote computer 140, and / or (b) a data transmission line providing data to all components necessary for the control of the remote computer 140, are completed, thereby enabling control of the remote computer 140 of the substrate processing system 100, 400. When disabled or off, (a) at least one electrical circuit is interrupted, including a power source for providing power to at least one component necessary for the control of the remote computer 140, and / or (b) a data transmission line providing data to at least one component for the control of the remote computer 140, is interrupted, thereby disabling control of the remote computer 140 of the substrate processing system 100, 400.

[0066] Thus, substrate processing systems and methods according to some embodiments of the present technology need not include the particular two network switching system 202 and 210 configuration described herein (e.g., the network switching system 210 may be omitted if the key switch 224 is located in a different position to interrupt power to different components), but the two network switching system 202 and 210 configuration described herein may be advantageous in some embodiments of the present technology because it may disable access to the remote computer 140 while still allowing power and / or communication between local components (e.g., between the universal processing computer 130 and the substrate processing chambers 104, 460 and / or other computers) that may be necessary and / or useful to complete a desired repair or service task.

[0067] Although the present disclosure has been provided in the context of certain embodiments and examples, those skilled in the art will understand that the present disclosure extends beyond the specifically described embodiments to other alternative embodiments and / or uses of the present embodiments and obvious modifications and their equivalents. In addition, while several variations of the embodiments of the present disclosure have been shown and described in detail, other modifications that are within the scope of the present disclosure will be readily apparent to those skilled in the art based on the present disclosure. It is also contemplated that various combinations or subcombinations of the specific features and aspects of the embodiments may be made and still fall within the scope of the present disclosure. It should be understood that various features and aspects of the disclosed embodiments can be combined with or substituted for one another to form varying modes of the embodiments of the present disclosure. It is therefore intended that the scope of the present disclosure should not be limited by the specific embodiments described above.

[0068] Any headings provided herein, if any, are for convenience only and do not necessarily affect the scope or meaning of the devices and methods disclosed herein. [Explanation of symbols]

[0069] 100 Substrate Processing System 104 Substrate treatment chamber 130 Universal Processing Computer, Substrate Processing System Host Computer 140 Remote Computing Systems 142 input ports 202 Network switching system, second switch 210 Network switching system, first switch 212 output ports 220 Power supply 222 Power Lines 224 Key Switch 302 Key 304 Locking System 306 Key Slot

Claims

1. 1. A substrate processing system comprising: a first switch including a first input port, a first power input, and a first output port; a second switch including a first input / output port and a second power input; a first electrical connector electrically connecting the first power input and the second power input; a lockable key switch provided in the first electrical connector, the lockable key switch being movable between an off position and an on position; a power source connected to the first electrical connector; and a key configured to be received by the lockable key switch and configured, when received by the lockable key switch, to move the lockable key switch between the on position and the off position, where (i) in the on position, the power source provides power to the first switch and the second switch, and (ii) in the off position, power is not provided to at least the first switch.

2. The substrate processing system of claim 1 , wherein the key is removable from the lockable key switch only when the lockable key switch is in the off position.

3. 2. The substrate processing system of claim 1, wherein the first input port is configured to receive substrate processing commands from a remote computing system, and the first output port is connected to the first input / output port of the second switch to transmit the substrate processing commands from the remote computing system through the first switch to the second switch only when the lockable key switch is in the on position.

4. 4. The substrate processing system of claim 3, further comprising one or more substrate processing chambers in electronic communication with the second switch, at least one of the one or more substrate processing chambers receiving input data transmitted through the second switch based on the substrate processing command received from the remote computing system only when the lockable key switch is in the on position.

5. 2. The substrate processing system of claim 1, further comprising a substrate processing system host computer, wherein the first input port is configured to receive substrate processing commands from a remote computing system, the first output port is connected to the substrate processing system host computer, and transmits the substrate processing commands from the remote computing system to the substrate processing system host computer through the first switch only when the lockable key switch is in the on position, and the substrate processing system host computer transmits a signal to the first input / output port of the second switch based on the substrate processing command received from the remote computing system.

6. one or more substrate processing chambers in electronic communication with the second switch, where at least one of the one or more substrate processing chambers receives input data transmitted through the second switch based on the substrate processing command received from the remote computing system only when the lockable key switch is in the on position. The substrate processing system of claim 5 .

7. The substrate processing system of claim 1 , wherein the first input port comprises an Ethernet port.

8. The substrate processing system of claim 1 , wherein the power supply is a DC power supply.

9. 1. A substrate processing system comprising: a first switch including a first input port, a first power input, and a first output port; a second switch including a first input / output port and a second power input, the first output port being directly or indirectly connected to the first input / output port of the second switch; a lockable key switch movable between an off position and an on position, the lockable key switch being provided in a power line connected to supply power to at least one of the first power input or the second power input; and a key configured to be received by the lockable key switch, the key being configured, when received by the lockable key switch, to move the lockable key switch between the on position and the off position, wherein (i) in the on position, an electrical circuit including the power line for supplying power to at least one of the first power input or the second power input is completed, and (ii) in the off position, the electrical circuit including the power line for supplying power to at least one of the first power input or the second power input is interrupted.

10. 10. The substrate processing system of claim 9, wherein the key is removable from the lockable key switch only when the lockable key switch is in the off position.

11. 10. The substrate processing system of claim 9, wherein the first input port is configured to receive substrate processing commands from a remote computing system, and the first output port is directly connected to the first input / output port of the second switch to transmit the substrate processing commands from the remote computing system, through the first switch, to the second switch only when the lockable key switch is in the on position.

12. 12. The substrate processing system of claim 11, further comprising one or more substrate processing chambers in electronic communication with the second switch, at least one of the one or more substrate processing chambers receiving input data transmitted through the second switch based on the substrate processing command received from the remote computing system only when the lockable key switch is in the on position.

13. 10. The substrate processing system of claim 9, further comprising a substrate processing system host computer, wherein the first input port is configured to receive substrate processing commands from a remote computing system, the first output port is connected to an input of the substrate processing system host computer, the substrate processing commands are transmitted from the remote computing system to the substrate processing system host computer through the first switch only when the lockable key switch is in the on position, and the substrate processing system host computer transmits a signal to the first input / output port of the second switch based on the substrate processing command received from the remote computing system.

14. 14. The substrate processing system of claim 13, further comprising one or more substrate processing chambers in electronic communication with the second switch, at least one of the one or more substrate processing chambers receiving input data transmitted through the second switch based on the substrate processing command received from the remote computing system only when the lockable key switch is in the on position.

15. 1. A method for connecting a substrate processing system to a remote computing system, comprising: connecting a remote computing system to a first input port of a first switch, the first switch further including a first power input and a first output port; connecting, directly or indirectly, the first output port of the first switch with a first input / output port of a second switch, the second switch further including a second power input; electrically connecting the first power input and the second power input with an electrical connector including a lockable key switch, the lockable key switch being movable using a key between an off position and an on position; connecting a power source with the electrical connector, wherein the lockable key switch is provided in the electrical connector such that (i) when the lockable key switch is in the on position, the power source provides power to the first switch and the second switch, and (ii) when the lockable key switch is in the off position, at least one of the first switch or the second switch is not provided with power by the power source.

16. disabling operation of the substrate processing system by rotating the lockable key switch from the on position to the off position using the key; Removing the key from the lockable key switch; The method of claim 15 further comprising:

17. enabling operation of the substrate processing system by engaging the key with the lockable key switch while the lockable key switch is in the off position; using the key to rotate the lockable key switch from the off position to the on position; The method of claim 15 further comprising:

18. 1. A method for connecting a substrate processing system to a remote computing system, comprising: connecting a remote computing system to a first input port of a first switch, the first switch further including a first power input and a first output port; connecting, directly or indirectly, the first output port of the first switch with a first input / output port of a second switch, the second switch further including a second power input; electrically connecting at least one of the first power input or the second power input with an electrical connector including a lockable key switch, the lockable key switch being movable using a key between an off position and an on position; connecting a power source with the electrical connector, wherein the lockable key switch is provided in the electrical connector such that (i) when the lockable key switch is in the on position, the power source provides power to at least one of the first switch or the second switch, and (ii) when the lockable key switch is in the off position, power is not provided by the power source to at least one of the first switch or the second switch.

19. disabling operation of the substrate processing system by rotating the lockable key switch from the on position to the off position using the key; Removing the key from the lockable key switch; 20. The method of claim 18, further comprising:

20. enabling operation of the substrate processing system by engaging the key with the lockable key switch while the lockable key switch is in the off position; using the key to rotate the lockable key switch from the off position to the on position; 20. The method of claim 18, further comprising:

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