Test device

Abstract

To provide a test device capable of accurately acquiring test data for an appropriate period of a test object even under a harsh test environment.SOLUTION: A test device includes: a placement table which is installed inside a housing, holds a test object and is capable of vibrating; an imaging device which images the upper surface of the test object through a hollow structure that extends to the upper side of the test object fixed to the placement table from outside the housing; and a data processing device which stores image data for a certain period before timing at which a change occurs in the image being a period between the first time and the second time when a change occurs in the image between the first image data of the test object captured at the first time by the imaging device and the second image data of the test object captured at the second time being the time later than the first time after the placement table begins vibrating.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] SUMMARY OF THE DISCLOSURE The present invention relates to a test apparatus. [Background technology]

[0002] Techniques are known that enable highly accurate determination of the presence or absence of damage caused by vibration testing. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] JP 2018-100948 A Summary of the Invention [Problem to be solved by the invention]

[0004] When testing the durability of a test object, the test object is placed inside a test device. During testing, the test device creates a harsh environment where hot and cold air of, for example, -100°C and 100°C are alternated in short cycles and random vibration is applied, and this environment continues for a long time. For this reason, if a sensor or the like is attached inside the test device, it is highly likely that the sensor or the like will be damaged by the hot and cold air. In addition, the mounting table on which the test object is placed operates with random vibration of up to about 60G, making it difficult to attach a sensor or the like to this mounting table.

[0005] In addition, because the inside of the test equipment is subject to temperature differences caused by hot and cold winds, fog, mist, and heat haze can appear even if the equipment is filled with inert gas, which can scatter laser and visible light and reduce its directional ability. For this reason, even if measuring and photographing equipment were installed, it was not possible to measure or photograph the test subject.

[0006] In addition, when testing the durability of a test object, the test period is long, but the time it takes for the test object to deteriorate, such as breakage, is very short. In order to obtain data on this deterioration, it is necessary to obtain a huge amount of data over a long period of time. Furthermore, even if the test object is removed after the test and checked to see which part of the test object is broken, multiple parts of the test object are often broken, and details such as which part broke first and how it broke cannot be determined. This tendency becomes more pronounced as the test object becomes smaller.

[0007] The embodiments of the present invention provide a test apparatus capable of accurately acquiring test data for an appropriate period of time of a test subject under harsh test environments. [Means for solving the problem]

[0008] According to an embodiment, a test apparatus includes a mounting stage installed within a housing, which fixes a test object and can be vibrated; an imaging device which images the top surface of the test object through a hollow structure extending from outside the housing to the upper side of the test object fixed to the mounting stage; and a data processing device which, if a change occurs in an image between first image data of the test object captured by the imaging device at a first time after the mounting stage begins to vibrate and second image data of the test object captured at a second time that is later than the first time, stores image data for a certain period of time from before the change occurs in the image, which is between the first time and the second time. [Brief description of the drawings]

[0009] [Figure 1] FIG. 1 is a diagram illustrating an example of the configuration of a test apparatus according to a first embodiment. [Diagram 2] FIG. 2 is a diagram showing an example of an internal arrangement of the test device according to the embodiment as viewed from above. [Diagram 3] FIG. 2 is a diagram showing an example of the configuration of a data processing device according to the embodiment. [Figure 4] 11 is a flowchart showing an example of a data storage process. [Diagram 5]11 is a flowchart showing an example of a synchronous data generation process. [Figure 6] FIG. 13 is a diagram showing an example of an initial image of an electronic component. [Figure 7] 11 is a diagram showing an example of an image of an electronic component at a timing when it is determined that deterioration has occurred in the electronic component; [Figure 8] FIG. 11 is a diagram showing an example of differential image data. [Figure 9] FIG. 13 is a diagram showing an example of an image of an electronic component. [Figure 10] FIG. 11 is a diagram showing an example of displacement data. [Figure 11] FIG. 4 is a diagram showing an example of acceleration data. [Figure 12] FIG. 11 is a diagram illustrating an example of the configuration of a test apparatus according to a second embodiment. [Figure 13] FIG. 13 is a diagram illustrating an example of the configuration of a test apparatus according to a third embodiment. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0010] Hereinafter, an embodiment of the present invention will be described with reference to the drawings. The drawings are schematic or conceptual, and the relationship between the thickness and width of each part, the size ratio between parts, etc. are not necessarily the same as those in reality. Even when the same part is shown, the dimensions and ratios of each part may be different depending on the drawing. In this specification and each drawing, elements similar to those described above with reference to the previous drawings are given the same reference numerals and detailed descriptions thereof will be omitted as appropriate.

[0011] (First embodiment) FIG. 1 is a diagram showing a schematic example of a configuration of a test device 1. FIG. 2 is a diagram showing a schematic top view of an example of an internal arrangement of the test device 1. The test device 1 is a device that performs a HALT (Highly Accelerated Limit Test) test on a test object 100. The HALT test is a test that continues to apply strong stress to the test object 100 in a harsh environment for a predetermined period of time. The predetermined period for performing the test can be set arbitrarily depending on the type and size of the test object 100. For example, the period can be one day, one week, one month, etc.

[0012] As shown in FIG. 1, the test apparatus 1 includes a housing 10, a stage (mounting table) 20, a jacket (structure) 30, an image capture device 40, a data processing device 50, a fixing arm 60, a heating / cooling device 70, a first measuring device 81, and a second measuring device 82. Gas supply devices 91 and 92 are provided so that an inert gas can be supplied to the test apparatus 1. The inert gas is, for example, dry nitrogen, but is not limited thereto. The gas supply devices 91 and 92 may be one gas supply device. The data processing device 50 is connected to the image capture device 40, the first measuring device 81, and the second measuring device 82 so as to be able to communicate with each other by wire or wirelessly. The test apparatus 1 will be described in the case where the first measuring device 81 and the second measuring device 82 are provided, but the test apparatus 1 may be configured to include any one of the measuring devices.

[0013] The housing 10 is box-shaped and includes a stage 20, a fixed arm 60, and the like. The stage 20 is disposed at the bottom of the housing 10. The stage 20 is rectangular in top view and has a predetermined thickness. The test object 100 is fixed to the center of the upper surface of the stage 20. In this embodiment, the test object 100 is an electronic board on which an electronic component 101 and a capacitor 102 are provided. Between the periphery of the stage 20 and the inner wall of the housing 10, a rubber 11 is provided to isolate the inside of the housing 10 from the outside air and suppress temperature changes. This results in a sealed state inside the housing 10. The rubber 11 is preferably made of a material that has high air-blocking properties and high heat-shielding properties, for example, made of a material having elasticity. The sealed housing 10 may be filled with an inert gas. As shown in FIG. 2, a door 12 is attached to the housing 10 so as to be able to be opened and closed. By opening the door 12, the test object 100 can be fixed to the stage 20 inside the housing 10. Moreover, by closing the opened door 12, the inside of the housing 10 can be sealed.

[0014] The stage 20 can be subjected to six-axis random vibration by the vibration device 25. The vibration device 25 may have the same configuration as the test device 1. The maximum value of acceleration during this vibration is, for example, 50 to 60 G.

[0015] A heating / cooling device 70 is disposed outside the housing 10. As shown in FIG. 2, the heating / cooling device 70 includes a cold air layer 71 storing cold air at −100° C. and a hot air layer 72 storing hot air at +100° C. The cold air layer 71 is connected to the inside of the housing 10 through a pipe 71A. An electromagnetic valve 71B is provided in the pipe 71A, and the electromagnetic valve 71B is controlled to open and close by a motor 71C. When the electromagnetic valve 71B is opened under the control of the motor 71C, cold air at −100° C. flows into the housing 10. Similarly, the hot air layer 72 is connected to the inside of the housing 10 through a pipe 72A. An electromagnetic valve 72B is provided in the pipe 72A, and the electromagnetic valve 72B is controlled to open and close by a motor 72C. When the electromagnetic valve 72B is opened under the control of the motor 72C, cold air at +100° C. flows into the housing 10. In this way, the heating / cooling device 70 can blow cold air of -100°C or hot air of +100°C toward the test subject 100 in the housing 10. Therefore, the temperature inside the housing 10 is configured to change continuously and in one go from -100°C to +100°C or from +100°C to -100°C.

[0016] In this way, a harsh test environment can be realized inside the housing 10, in which the temperature difference changes greatly at regular time intervals, for example, and the test subject 100 is subjected to six-axis random vibration with large acceleration. Note that the test device 1 may perform a vibration test in which the operation of the heating and cooling device 70 is stopped during testing, and the vibration device 25 applies random vibration to the test subject 100.

[0017] The stage 20 is formed with a first spatial portion 21 extending from the side to the center, and a second spatial portion 22 extending from the first spatial portion 21 to the underside of the test object 100. The first spatial portion 21 extends horizontally with respect to the installation surface of the housing 10, and the second spatial portion 22 extends vertically with respect to the installation surface. A first reflecting material 23 and a second reflecting material 24 that reflect the laser are arranged on the back side of the first spatial portion 21. The reflecting surface of the first reflecting material 23 is arranged so as to be perpendicular to the extending direction of the first spatial portion 21. The second reflecting material 24 is arranged on the upper side of the first reflecting material 23, and the reflecting surface of the second reflecting material 24 is arranged so as to be 45 degrees with respect to the extending direction of the first spatial portion 21.

[0018] The jacket 30 is a hollow structure extending from outside the housing 10 to the upper side of the test object 100 fixed to the stage 20. More specifically, the jacket 30 is formed by a first portion 31 penetrating the housing 10 from the side thereof and extending into the housing 10, and a second portion 32 extending from the first portion 31 to the upper side of the test object 100. The material of the jacket 30 is a material that can withstand the harsh test environment inside the housing 10. A reflector 33 that reflects the laser is disposed on the rear side of the first portion 31. The reflector 33 is disposed so that the reflecting surface is at an angle of 45 degrees to the installation surface of the housing 10, in other words, at an angle of 45 degrees to the upper surface of the stage 20.

[0019] The photographing device 40 includes a photographing section 41 and a camera body 42. The photographing section 41 is, for example, an optical fiber. The photographing section 41 is arranged to pass through the first part 31 and the second part 32, and is positioned so that its tip can photograph the upper side of the test object 100. In this embodiment, the photographing section 41 is positioned so that it can photograph the electronic component 101 provided on the test object 100. The camera body 42 transmits image data based on the image photographed by the photographing section 41 to the data processing device 50. In this embodiment, the photographing device 40 acquires image data at a predetermined interval during the test, and transmits the acquired image data to the data processing device 50. This predetermined interval varies depending on the life and durability of the test object 100, and is, for example, femtoseconds, microseconds, seconds, minutes, etc. In this embodiment, the photographing device 40 acquires image data in microseconds.

[0020] The fixed arm 60 is fixed to the stage 20 and fixes the tip of the photographing unit 41 of the photographing device 40. More specifically, one end of the fixed arm 60 is fixed on the stage 20 near the test object 100. The other end of the fixed arm 60 is fixed to the tip of the photographing unit 41 so that the photographing unit 41 can photograph the electronic component 101 from above. By providing the fixed arm 60 in this manner, even if the stage 20 randomly vibrates during testing, the tip of the photographing unit 41 can be moved in accordance with the vibration. Therefore, it is possible to prevent the photographing range of the photographing unit 41 from shifting from the upper surface of the electronic component 101 during testing, making it impossible to photograph the electronic component 101.

[0021] The first measuring device 81 measures the displacement of the surface of the test object 100 by using the reflection of the laser by the reflecting material 33. The first measuring device 81 irradiates the inside of the first portion 31 of the jacket 30 with a laser. The direction of travel of this laser is changed by 45 degrees by the reflecting material 33, and the laser is irradiated to the surface of the test object 100. The direction of travel of the laser reflected by the surface of the test object 100 is changed by 45 degrees again by the reflecting material 33, and the laser is irradiated to the first measuring device 81. The first measuring device 81 can measure the displacement of the test object 100, more specifically, the positional displacement in the X-axis, Y-axis, and Z-axis directions, by receiving the laser reflected by the reflecting material 33. In this way, the first measuring device 81 measures the positional displacement of the front surface of the test object 100 during the test, and outputs the measured displacement data to the data processing device 50. In the following, the displacement data transmitted from the first measuring device 81 to the data processing device 50 will be referred to as the first displacement data.

[0022] The second measuring device 82 measures the displacement of the rear surface of the test object 100 by using the reflection of the first laser by the first reflecting material 23 and the reflection of the second laser by the second reflecting material 24. The second measuring device 82 irradiates the first laser and the second laser to the first portion 31, respectively. The first laser is irradiated to the first reflecting material 23, and the direction of the first laser is reversed by the reflecting surface of the first reflecting material 23, and is irradiated to the second measuring device 82. By receiving the reflected first laser, the second measuring device 82 can obtain displacement data of the stage 20 in the X-axis, Y-axis, and Z-axis directions. In addition, the second laser is irradiated to the second reflecting material 24, and the traveling direction is changed by 45 degrees by the second reflecting material 24, and is irradiated to the rear surface of the test object 100. The second laser reflected by the rear surface of the test object 100 is again changed by 45 degrees by the second reflecting material 24, and is irradiated to the second measuring device 82. By receiving the reflected second laser, the second measuring device 82 can obtain displacement data in the X-axis, Y-axis, and Z-axis directions that is a composite of the displacement of the stage 20 and the displacement of the test object 100. The second measuring device 82 can obtain the displacement of the back surface of the test object 100 in the X-axis, Y-axis, and Z-axis directions by calculating the difference between the two displacement data obtained by the first laser and the second laser. In this manner, the second measuring device 82 measures the displacement of the back surface of the test object 100 during the test and outputs the measured displacement data to the data processing device 50. In the following, the displacement data transmitted from the second measuring device 82 to the data processing device 50 will be referred to as second displacement data. The process of calculating the difference between the two displacement data may be performed by the data processing device 50 to calculate the second displacement data.

[0023] The gas supply device 91 supplies an inert gas into the jacket 30 during the test. The illustrated arrows 91A and 91B indicate the supply path of the inert gas. In this manner, the inert gas passes through the first portion 31 and the second portion 32 of the jacket 30 and is supplied to the upper side of the electronic component 101. Even if the test device 1 is filled with an inert gas, fog, mist, heat haze, etc. may occur due to temperature differences. In this embodiment, however, since the inert gas can be supplied to the upper side of the electronic component 101, the occurrence of fog, mist, heat haze, etc. can be reliably prevented. As a result, the photographing device 40 can acquire image data of the upper side of the electronic component 101 and prevent the straightness of the laser from decreasing.

[0024] The gas supply device 92 supplies inert gas to the first spatial portion 21 of the stage 20 during testing. The illustrated arrow 92A indicates the supply path of the inert gas. As a result, the inert gas passes through the first spatial portion 21 and the second spatial portion 22 of the stage 20 and is supplied to the underside of the test subject 100. As with the gas supply device 91, the inert gas can prevent the generation of fog, mist, heat haze, and the like, and can prevent the straightness of the first laser and the second laser from decreasing.

[0025] The data processing device 50 is, for example, an information processing device such as a personal computer or a tablet terminal. After the start of the test, the data processing device 50 acquires image data of the top surface of the electronic component 101 from the photographing device 40, and also acquires first displacement data from the first measuring device 81 and second displacement data from the second measuring device 82. The data processing device 50 also generates synchronization data (described later) based on the acquired image data, first displacement data, and second displacement data. Furthermore, the data processing device 50 can obtain the acceleration α by using the velocity v and time t obtained from the first displacement data and second displacement data. Acceleration α (m / s 2 ) is calculated using the following formula: α = (v2-v1) / (t2-t1)

[0026] FIG. 3 is a diagram showing an example of the configuration of the data processing device 50. As shown in FIG. 3, the data processing device 50 includes a control unit 51, a receiving unit 52, a display unit 53, an operation unit 54, a first data storage unit 55, a second data storage unit 56, and a data processing program storage unit 57. The first data storage unit 55, the second data storage unit 56, and the data processing program storage unit 57 may be provided in one storage device or in different storage devices.

[0027] For example, the control unit 51 receives an operation from the operation unit 54, displays information on the display unit 53, and also reads out a data processing program stored in the data processing program storage unit 57 to execute data processing. The details of the data processing will be described later.

[0028] The receiving unit 52 receives the image data, the first displacement data, and the second displacement data transmitted from the imaging device 40, the first measuring device 81, and the second measuring device 82. The display unit 53 is, for example, a liquid crystal display, and displays predetermined information. The operation unit 54 is, for example, a keyboard and a mouse, and is used when the user inputs instructions.

[0029] The first data storage unit 55 includes an image data storage unit 55A, a first displacement data storage unit 55B, and a second displacement data storage unit 55C. The image data storage unit 55A stores image data received from the imaging device 40. The first displacement data storage unit 55B stores first displacement data received from the first measuring device 81. The second displacement data storage unit 55C stores second displacement data received from the second measuring device 82.

[0030] The storage areas in which the image data storage unit 55A, the first displacement data storage unit 55B, and the second displacement data storage unit 55C store the image data, the first displacement data, and the second displacement data are fixed. Therefore, when the storage areas for storing new data are exhausted before the end of the test, new data is overwritten on older data in the image data storage unit 55A, the first displacement data storage unit 55B, and the second displacement data storage unit 55C. Therefore, the first data storage unit 55 stores a fixed amount of image data, the first displacement data, and the second displacement data from the start to the end of the test.

[0031] The second data storage unit 56 includes an image data storage unit 56A, a first displacement data storage unit 56B, a second displacement data storage unit 56C, and a synchronization data storage unit 56D. The image data storage unit 56A, the first displacement data storage unit 56B, and the second displacement data storage unit 56C store image data, first displacement data, and second displacement data before and after deterioration of the electronic component 101 occurs. More specifically, when deterioration of the electronic component 101 is determined, image data, first displacement data, and second displacement data for a certain period from before the timing of the determination are stored in the image data storage unit 56A, the first displacement data storage unit 56B, and the second displacement data storage unit 56C, respectively.

[0032] In addition, the image data storage unit 55A, the first displacement data storage unit 55B, and the second displacement data storage unit 55C each have a storage area larger than at least the image data storage unit 56A, the first displacement data storage unit 56B, and the second displacement data storage unit 56C, respectively.

[0033] The synchronous data storage unit 56D stores synchronous data obtained by synchronizing in time the data stored in the image data storage unit 56A, the first displacement data storage unit 56B, and the second displacement data storage unit 56C. Since the data is stored as synchronous data in this manner, the image data storage unit 56A, the first displacement data storage unit 56B, and the second displacement data storage unit 56C may be used as temporary storage areas until the synchronous data is generated.

[0034] The data processing program storage unit 57 stores a data processing program. The data processing program is a program for causing the control unit 51 to execute a data storage process for storing image data, first displacement data, and second displacement data in the first data storage unit 55, and a synchronous data generation process for storing synchronous data for a certain period from before the timing of the judgment of deterioration of the test object in the second data storage unit 56 and creating the synchronous data when the deterioration of the test object is judged. The details of the data processing program will be described later with reference to Figs. 4 and 5.

[0035] Next, a data storage process for storing data will be described. Fig. 4 is a flow chart showing an example of the data storage process executed by the control unit 51. This data storage process is executed by the control unit 51 reading out a data processing program stored in the data processing program storage unit 57 when the test subject 100 is placed in the test device 1 and an instruction to start a test is given. When a test is started, the vibration device 25 randomly vibrates the stage 20, and the heating / cooling device 70 alternately blows cold air and hot air, creating a harsh environment inside the housing 10.

[0036] As shown in FIG. 4, when the test is started, the control unit 51 acquires image data from the photographing device 40 and stores it in the image data storage unit 55A (ST101). The control unit 51 extracts image data of the electronic component 101 from the photographed image data, for example, by YOLO (You Only Look Once: an algorithm used in machine learning to detect objects in real time). In this embodiment, since the electronic component 101 is photographed every microsecond, multiple image data are multi-focal synthesized by digital image processing to generate image data with a pseudo deep depth of field. This makes it possible to make the image clear even if the photographed image is blurred due to vibration of the stage 20. The image data of the multi-focal image generated in this manner is stored in the image data storage unit 55A of the first data storage unit 55.

[0037] Next, the control unit 51 judges whether or not there is free space in the image data storage unit 55A (ST102). If the control unit 51 judges that there is free space (ST102: YES), the process returns to step ST101. In this way, if there is free space in the image data storage unit 55A, the image data is stored sequentially in the image data storage unit 55A. If it is judged that there is no free space (ST102: NO), the control unit 51 overwrites the storage area in which the older image data is stored with new image data (ST103). In this way, the image data storage process is executed.

[0038] Furthermore, when the test is started, the control unit 51 acquires the first displacement data and the second displacement data from the first measuring device 81 and the second measuring device 82, and stores the first displacement data and the second displacement data in the first displacement data storage unit 55B and the second displacement data storage unit 55C, respectively (ST104). Note that, hereinafter, the first displacement data and the second displacement data may be collectively referred to as displacement data.

[0039] Next, the control unit 51 judges whether or not there is free space in each of the first displacement data storage unit 55B and the second displacement data storage unit 55C (ST105). When the control unit 51 judges that there is free space (ST105: YES), the process returns to step ST104. In this way, when there is free space in the first displacement data storage unit 55B and the second displacement data storage unit 55C, the first displacement data and the second displacement data are stored in sequence in the first displacement data storage unit 55B and the second displacement data storage unit 55C. When it is judged that there is no free space (ST105: NO), the control unit 51 overwrites the new first displacement data and the second displacement data in the storage area in which the older first displacement data and the second displacement data are stored, respectively (ST106). In this way, the storage process of the first displacement data and the second displacement data is executed.

[0040] Next, the control unit 51 judges whether the test is completed (ST107). The test is judged whether the test is completed, for example, by whether a preset test time has elapsed. If the control unit 51 judges that the test is not completed (ST107: NO), the process returns to the process of steps ST103 and ST106. That is, the process of storing the image data and the displacement data is continued.

[0041] When it is determined that the test is to be ended (ST107: YES), the control unit 51 stops the process of storing data (ST108) and ends this process. As a result, the image data, the first displacement data, and the second displacement data for the storage areas of the image data storage unit 55A, the first displacement data storage unit 55B, and the second displacement data storage unit 55C are stored in the first data storage unit 55, respectively, from the start of the test to the end of the test.

[0042] Next, the synchronous data generation process will be described. Fig. 5 is a flow chart showing an example of the synchronous data generation process executed by the control unit 51. This synchronous data generation process is executed by the control unit 51 reading out the data processing program stored in the data processing program storage unit 57 when the test subject 100 is placed in the test device 1 and an instruction to start a test is given, in the same manner as in the case of the data storage process described above.

[0043] As shown in FIG. 5, when the test starts, the control unit 51 acquires initial image data (ST201). When the control unit 51 receives image data from the photographing device 40 at the start of the test (time T0), the control unit 51 acquires the received image data as initial image data (first image data). Here, FIG. 6 is a diagram showing an example of an initial image of the electronic component 101 at time T0. FIG. 6 shows an image of the top surface of the electronic component 101 in the photographing range A1 of the photographing device 40. Since it is time T0 (the start of the test), no deterioration has occurred in the electronic component 101. This initial image data may be stored in a specified storage area.

[0044] Thereafter, the control unit 51 acquires the image data (ST202). As described above in steps ST101 to ST103 of FIG. 4, the control unit 51 acquires the image data to be stored in the image data storage unit 55A.

[0045] Next, the control unit 51 judges whether or not deterioration has occurred in the electronic component 101 (ST203). More specifically, the control unit 51 compares the image data (first image data) of the initial image acquired in step ST101 with the image data (second image data) acquired in step ST202, and judges that deterioration has occurred in the electronic component 101 if a change has occurred in the image as a result of the comparison. For example, both sets of image data may be binarized, difference image data may be acquired from both sets of binarized image data, and if the data area of ​​the difference image data is equal to or greater than a certain amount, it may be judged that deterioration has occurred in the electronic component 101. Here, it is desirable that the certain amount is a value that takes into consideration an error. Note that the method by which the control unit 51 judges whether or not deterioration has occurred is not limited to this.

[0046] If the control unit 51 determines that the electronic component 101 has not deteriorated (ST203: NO), the process returns to step ST202. As a result, image data of the electronic component 101 is acquired, and a determination as to whether or not the acquired image data has changed from the initial image data is repeated every time image data is acquired.

[0047] When it is determined that deterioration has occurred (ST203: YES), the control unit 51 displays an image on the display unit 53 (ST204). Here, FIG. 7 is a diagram showing an example of an image of the electronic component 101 at the timing when it is determined that deterioration has occurred in the electronic component 101. As shown in FIG. 7, a state in which a crack C1 has occurred as deterioration in a part of the electronic component 101 is shown in the shooting range A1. FIG. 8 is a diagram showing an example of differential image data. As shown in FIG. 8, in the shooting range A1, the part of the crack C1 that has occurred in the electronic component 101 is displayed in black as a differential image.

[0048] The display unit 53 displays the difference image data shown in Fig. 8. This allows the operator of the data processing device 50 to confirm that deterioration has occurred in the electronic component 101. The display unit 53 may display an initial image of the electronic component 101 shown in Fig. 6 and an image at the timing when it is determined that deterioration has occurred in the electronic component 101 shown in Fig. 7 together with the difference image data.

[0049] Next, the control unit 51 stores image data and displacement data for a certain period from the timing when the deterioration of the electronic component 101 is determined (ST205). The length of the time before the timing when the deterioration is determined is set in advance from past test results, etc. This time varies depending on the type, size, and test time of the test object 100, but is set to, for example, about several seconds in this embodiment. The certain period is similarly set in advance from past test results, etc. It also varies depending on the type, size, and test time of the test object 100, but is set to, for example, about several minutes in this embodiment. The control unit 51 reads out the image data, first displacement data, and second displacement data from the first data storage unit 55 for the set time ago, and stores the read image data, first displacement data, and second displacement data in the second data storage unit 56, respectively, until the certain period ends. As a result, image data, first displacement data, and second displacement data for a certain period of time before the time when deterioration of electronic component 101 is determined are stored in image data memory unit 56A, first displacement data memory unit 56B, and second displacement data memory unit 56C, respectively.

[0050] Next, the control unit 51 executes a data synchronization process (ST206). The control unit 51 synthesizes the image data, the first displacement data, and the second displacement data stored in the second data storage unit 56 based on time to create one piece of synchronization data. In this embodiment, the synchronization data also includes acceleration data calculated using the first displacement data and the second displacement data. Next, the control unit 51 outputs the created synchronization data (ST207). In this embodiment, the control unit 51 stores the created synchronization data in the synchronization data storage unit 56D.

[0051] Next, the images of the electronic component 101 stored in the image data storage unit 56A will be described. Fig. 9 is a diagram showing an example of the images of the electronic component 101 stored in the image data storage unit 56A. In this embodiment, times T1, T2, T3, T4, and T5 are shown as examples. Fig. 9 shows images at times T1, T2, T3, T4, and T5, but the image data storage unit 56A stores continuous images every microsecond from time T1 to time T5.

[0052] As shown in FIG. 9, images of the electronic component 101 at times T1 to T5 are shown. In terms of time series, the image of the electronic component 101 represented by time T1 is the earliest time from the start of the test, and the image of the electronic component 101 represented by time T5 is the latest time from the start of the test. That is, the relationship is time T1<time T2<time T3<time T4<time T5. Time T2 is the timing at which a change occurs in the image between the initial image and the image represented by the second image data, and the image at time T2 is the same image as that in FIG. 7 described above. Time T1 is the time before that timing, and in this embodiment, is the image several seconds before. Time T5 is the time a certain period of time has passed before that timing, and in this embodiment, is the image several minutes after.

[0053] At time T2, degradation of the electronic component 101 is determined, so at time T1, before the degradation begins, the electronic component 101 is not degraded. In other words, this is the same image as the initial image of the electronic component 101 shown in FIG. 6. At time T2, a crack C1 appears in the electronic component 101. As time passes, from time T3 to time T5, this degradation of the electronic component 101 grows larger, like crack C2 and crack C3, and at time T5, the crack reaches the other end, like crack C4, and the electronic component 101 breaks.

[0054] 10 is a diagram showing an example of displacement data. In this embodiment, an example of the first displacement data is shown as an example of the displacement data, but the second displacement data is also stored in the same manner as the first displacement data. 10 shows the first displacement data with respect to three axes (XYZ axes). The first displacement data is data from time T1 to time T5, similar to the image data. The vibration state of the surface of the test object 100 actually fixed to the stage 20 is shown from time T1 to time T5.

[0055] 11 is a diagram showing an example of acceleration data at times T1 to T5. The control unit 51 can calculate the acceleration at any time within times T1 to T5 based on the displacement data at times T1 to T5. In this embodiment, the control unit 51 calculates the acceleration according to a predetermined interval (e.g., every microsecond) at which image data is acquired. This allows the image of the electronic component 101 to correspond to the acceleration for the time period from time T1 to time T5.

[0056] As described above, when the storage capacity of the first data storage unit 55 of the test device 1 runs out, new image data and displacement data are overwritten on old image data and displacement data. Furthermore, the test device 1 can store image data and displacement data from a time TI slightly before the timing when the deterioration is judged in the second data storage unit 56 to a certain period T5 in the second data storage unit 56 by using the data stored in the first data storage unit 55. Because of this configuration, the test device 1 can reduce the storage area for storing data and can acquire image data and displacement data for a certain period before the deterioration of the electronic component 101 is judged from among the huge amount of data acquired during the test. Therefore, in a harsh test environment, the test device 1 can accurately acquire test data (in this embodiment, image data, displacement data, and acceleration data) for an appropriate period of the electronic component 101 to be tested.

[0057] The tester of the test device 1 can operate the operation unit 54 of the data processing device 50 to display the synchronization data stored in the synchronization data storage unit 56D on the display unit 53, thereby checking images of the electronic component 101 at times T1 to T5, and visually confirm in detail the progress of where the electronic component 101 began to deteriorate, how the deterioration progressed, and how it broke, as well as the time until the deterioration started and the time from that time until the electronic component 101 broke. In addition, the operator can check the displacement data and acceleration data, and visually confirm what vibration was applied to the test object 100 when the deterioration of the electronic component 101 occurred, the deterioration spread, and led to the breakage.

[0058] Furthermore, the photographing section 41 of the photographing device 40 passes through the inside of the jacket 30, and is disposed so that the photographing surface of the photographing section 41 is positioned above the electronic component 101. Furthermore, the tip of the photographing section 41 is adapted to move integrally with the stage 20 by the fixed arm 60. Therefore, the photographing device 40 is not affected by random vibrations of the stage 20, and it is possible to prevent the photographing range A1 from shifting from the upper side of the electronic component 101. Therefore, the test apparatus 1 can reliably obtain an image of the electronic component 101.

[0059] Furthermore, during the test, the inert gas is supplied from the gas supply device 91 through the jacket 30 to the upper side of the electronic component 101. For this reason, for example, the generation of airflow due to temperature changes caused by hot and cold air from the heating and cooling device 70 can be suppressed by supplying the inert gas. For this reason, it is possible to prevent fog, mist, heat haze, etc. on the upper part of the electronic component 101, and the effects of expansion, contraction, warping, frost, water droplets, etc. of the test object 100 from appearing. As a result, the test device 1 can prevent the straightness, etc. of the laser irradiated from the first measuring device 81 from decreasing. Therefore, the test device 1 can measure the accurate displacement of the surface of the test object 100.

[0060] Second embodiment The second embodiment differs from the first embodiment in that a plurality of image capturing devices are provided. Therefore, the different configuration will be described in detail. Note that the same components as those in the first embodiment are given the same reference numerals, and detailed description of these components will be omitted.

[0061] FIG. 12 is a diagram illustrating an example of the configuration of the test device 2. As shown in FIG. As shown in Fig. 12, the test apparatus 2 is provided with an imaging device 40A, an imaging device 40B, and an imaging device 40C. Compared to the test apparatus 1 shown in Fig. 1, three imaging devices (imaging device 40A, imaging device 40B, and imaging device 40C) are provided instead of the imaging device 40. The number of imaging devices may not be three, but may be two, or four or more.

[0062] Moreover, the photographing devices 40A, 40B, and 40C each photograph the top surface of the electronic component 101 of the test subject 100. The control unit 51 of the data processing device 50 is configured to generate image data of a multifocal image using the most focused image data among the multiple image data photographed by the multiple photographing devices 40A, 40B, and 40C, and to determine whether or not a change has occurred in the image between the image represented by the initial image data and the image represented by the generated image data.

[0063] The test apparatus 2 configured in this manner can also achieve the same effects as the test apparatus 1 of the first embodiment. Furthermore, if the multiple imaging devices 40A, 40B, and 40C are all configured to capture images of the upper side of the electronic component 101 and combine the captured images, the accuracy of the captured images of the upper side of the electronic component 101 can be improved. Furthermore, by configuring at least one imaging device among the multiple imaging devices 40A, 40B, and 40C to capture an image of the upper side of the electronic component 101 and at least one imaging device to capture an image of the upper side of the capacitor 102, the test apparatus 2 can simultaneously obtain images of multiple components, for example, not only an image of the electronic component 101 of the test target 100 but also an image of the capacitor 102.

[0064] In this embodiment, the photographing unit 41 is provided, and the image photographed by the photographing unit 41 is divided into three by mirrors or the like arranged at predetermined positions, and the camera bodies of the photographing devices 40A, 40B, and 40C acquire the photographed images, but this is not limited thereto. For example, the photographing devices 40A, 40B, and 40C may each be provided with a photographing unit and acquire an image of the electronic component 101.

[0065] Third embodiment The third embodiment differs from the first embodiment in that the jacket 30 is not provided and the measurement device is configured to measure the displacement of the stage 20. Therefore, the different configuration will be described in detail. Note that the same components as those in the first embodiment are given the same reference numerals and detailed description of these components will be omitted.

[0066] FIG. 13 is a diagram illustrating an example of the configuration of the test device 3. As shown in FIG. As shown in Fig. 13, a test object 100 is fixed on the upper surface of a stage 20A. The test object 100 is provided with an electronic component 101 and a capacitor 102. The photographing section 41 of the photographing device 40 is disposed so as to penetrate the housing 10, and is positioned so that the photographing range A1 of the photographing section 41 corresponds to the upper surface of the electronic component 101. The inside of the housing 10 is sealed and filled with, for example, an inert gas. This allows the photographing device 40 to photograph an image of the upper surface of the electronic component 101 during testing.

[0067] A mirror 26 that reflects the laser is provided below the stage 20A. The mirror 26 is attached to the underside of the stage 20A so that the reflecting surface of the mirror 26 forms a predetermined angle with respect to the underside of the stage 20A. A measuring device 83 is disposed below the stage 20A at a distance from the stage 20A. The measuring device 83 measures the displacement of the underside of the stage 20A by using the reflection of the laser by the mirror 26. A reflector 84 is disposed at the irradiation destination of the laser that is irradiated from the measuring device 83 and reflected by the mirror 26. The reflector 84 reflects the laser so that the traveling direction is opposite to the incident direction of the irradiated laser. The reflecting surface of the reflector 84 has a predetermined area. As a result, even if the incident direction of the laser is shifted due to the vibration of the reflecting surface of the mirror 26 vibrating due to the vibration of the stage 20, the reflector 84 can receive the laser and reflect the received laser to the mirror 26. The laser reflected by the reflector 84 to the mirror 26 has its direction of travel changed by the mirror 26, and is incident on the measuring device 83. In this way, by measuring the positional deviation between the irradiated laser and the received laser, the measuring device 83 can measure the displacement of the rear surface of the stage 20A.

[0068] During the test, the gas supply device 92 supplies the inert gas to the underside of the stage 20A and to the vicinity of the mirror 26. The illustrated arrow 92C indicates the supply path of the inert gas. For example, when cold air is blown from the heating / cooling device 70, the stage 20A is cooled, and further the mirror 26 and the atmosphere in the vicinity of the mirror are cooled. In this embodiment, since the gas supply device 92 supplies the inert gas to the vicinity of the mirror 26, it is possible to prevent, for example, water droplets from being generated on the mirror 26. Therefore, it is possible to prevent the straightness of the laser irradiated from the measuring device 83 from decreasing, and the test device 3 can accurately measure the displacement of the stage 20A.

[0069] In the above third embodiment, the test device 3 is described as not having the jacket 30, but the present invention is not limited to this. For example, the test device 3 may be configured to have the jacket 30, the photographing unit 41 passes through the jacket 30 to photograph the upper side of the electronic component 101, and further, to supply an inert gas into the jacket 30.

[0070] Although several embodiments of the present invention have been described above, these embodiments are presented as examples and are not intended to limit the scope of the invention. These novel embodiments can be implemented in various other forms, and various omissions, substitutions, and modifications can be made without departing from the gist of the invention. These embodiments and their modifications are included within the scope and gist of the invention, and are included in the scope of the invention and its equivalents described in the claims. In addition, the above-mentioned embodiments can be implemented in combination with each other.

[0071] The embodiments include the following aspects.

[0072] (Appendix 1) a mounting table that is installed in the housing and that fixes the test object and is capable of vibrating the test object; an imaging device that images an upper surface of the test object through a hollow structure that extends from outside the housing to an upper side of the test object fixed to the mounting table; a data processing device that, when a change occurs in an image between first image data of the test subject captured by the image capture device at a first time and second image data of the test subject captured at a second time that is later than the first time after the start of vibration of the mounting table, stores image data for a certain period of time from before the change occurs in the image between the first time and the second time; A test device comprising:

[0073] (Appendix 2) 2. The test apparatus according to claim 1, further comprising a fixed arm fixed to the mounting table and for fixing a tip of the imaging device.

[0074] (Appendix 3) An inert gas is supplied through the structure to the top surface of the test object. 3. A test apparatus according to claim 1 or 2.

[0075] (Appendix 4) 4. The testing apparatus according to claim 1, further comprising a heating / cooling device provided in the housing for blowing cold air or hot air.

[0076] (Appendix 5) The data processing device includes: a first storage unit that stores image data captured between the first time and the second time in the predetermined storage area after the start of vibration, and overwrites the first image data with third image data of the test subject captured at a third time that is later than the second time; a second storage unit configured to store, when a change occurs in the image, the image data for a certain period of time from before the timing at which the change occurs in the image, which is between the first time and the third time; 5. A test apparatus according to any one of claims 1 to 4.

[0077] (Appendix 6) Further, a measuring device for measuring the displacement of the test object is provided, The data processing device stores displacement data indicating the displacement measured by the measuring device. 6. A test apparatus according to any one of claims 1 to 5.

[0078] (Appendix 7) the structure is formed by a first portion penetrating the housing from a side surface of the housing and extending into the housing, and a second portion extending from the first portion to be positioned above the test object; A reflector that reflects a laser is provided on the inner side of the first portion, The measurement device measures the displacement of the surface of the test object using reflection of the laser by the reflecting material. 6. The test apparatus described in Appendix 6.

[0079] (Appendix 8) the mounting table includes a first space portion extending from a side surface to a center portion, and a second space portion extending from the first space portion to a lower side of the test object, A first reflecting material that reflects a first laser and a second reflecting material that is disposed above the first reflecting material and reflects a second laser are provided on the rear side of the first spatial portion, The measurement device measures a displacement of the rear surface of the test object by utilizing reflection of the first laser by the first reflecting material and reflection of the second laser by the second reflecting material. 6. The test apparatus described in Appendix 6.

[0080] (Appendix 9) the data processing device acquires displacement data measured by the measuring device for a period equal to a certain period before a timing when a change occurs in the image, and stores synchronization data in which the acquired displacement data is synchronized with the stored second image data; 6. The test apparatus described in Appendix 6.

[0081] (Appendix 10) The imaging device is provided in a plurality of types. Each of the plurality of imaging devices images the test subject; The data processing device determines whether or not an image has changed from the first image data by using the second image data that is most in focus among the plurality of second image data captured by the plurality of photographing devices. 2. The test apparatus described in Appendix 1.

[0082] (Appendix 11) The second image data is acquired at a predetermined interval; The predetermined interval varies depending on the test subject. The test apparatus according to any one of claims 1 to 9. [Explanation of symbols]

[0083] Reference Signs List 1,2,3...test device, 10...housing, 20,20A...stage, 21...first spatial portion, 22...second spatial portion, 23...first reflecting material, 24...second reflecting material, 25...vibration device, 26...mirror, 30...jacket, 31...first portion, 32...second portion, 33...reflecting material, 40...imaging device, 41...imaging section, 42...camera body, 50...data processing device, 51...control section, 55...first data storage section, 56...second 2 data storage unit, 56A...image data storage unit, 56B...first displacement data storage unit, 56C...second displacement data storage unit, 56D...synchronization data storage unit, 60...fixed arm, 70...heating / cooling device, 81...first measuring device, 82...second measuring device, 83...measuring device, 84...reflector, 91, 92...gas supply device, 100...test object, 101...electronic component, 102...capacitor, C1, C2, C3, C4...crack

Claims

1. a mounting table that is installed in the housing and that fixes the test object and is capable of vibrating the test object; an imaging device that images an upper surface of the test object through a hollow structure that extends from outside the housing to an upper side of the test object fixed to the mounting table; a data processing device which, when a change occurs in an image between first image data of the test subject captured by the image capture device at a first time and second image data of the test subject captured at a second time that is later than the first time after the start of vibration of the mounting table, stores image data for a certain period of time from before the change in the image occurs between the first time and the second time; A test device comprising:

2. 2. The test apparatus according to claim 1, further comprising a fixed arm that is fixed to the mounting table and that fixes a tip of the imaging device.

3. An inert gas is supplied through the structure to the top surface of the test object.

2. The test device of claim 1.

4. The testing apparatus according to claim 1 , further comprising a heating / cooling device provided within the housing for blowing cold air or hot air.

5. The data processing device includes: a first storage unit that stores a predetermined area of ​​image data captured between the first time and the second time after the start of the vibration, and overwrites the first image data with third image data of the test subject captured at a third time that is later than the second time; a second storage unit configured to store, when a change occurs in the image, the image data for a certain period of time from before the timing at which the change occurs in the image, which is between the first time and the third time; 2. The test device of claim 1.

6. Further, a measuring device for measuring the displacement of the test object is provided, The data processing device stores displacement data indicating the displacement measured by the measuring device.

2. The test device of claim 1.

7. the structure is formed by a first portion penetrating the housing from a side surface of the housing and extending into the housing, and a second portion extending from the first portion to be positioned above the test object; A reflector that reflects a laser is provided on the inner side of the first portion, The measurement device measures the displacement of the surface of the test object using reflection of the laser by the reflecting material.

7. A test device according to claim 6.

8. the mounting table includes a first space portion extending from a side surface to a center portion, and a second space portion extending from the first space portion to a lower side of the test object, A first reflector that reflects a first laser beam and a second reflector that is disposed above the first reflector and reflects a second laser beam are provided on the rear side of the first spatial portion, The measurement device measures a displacement of the rear surface of the test object by utilizing reflection of the first laser by the first reflecting material and reflection of the second laser by the second reflecting material.

7. A test device according to claim 6.

9. the data processing device acquires displacement data measured by the measuring device for a period equal to a certain period before a timing when a change occurs in the image, and stores synchronization data in which the acquired displacement data is synchronized with the stored second image data; 7. A test device according to claim 6.

10. The imaging device is provided in a plurality of types. Each of the plurality of imaging devices images the test subject; The data processing device determines whether or not an image has changed from the first image data by using the second image data that is most in focus among the plurality of second image data captured by the plurality of photographing devices.

2. The test device of claim 1.

11. The second image data is acquired at a predetermined interval; The predetermined interval varies depending on the test subject.

2. The test device of claim 1.

Images