Opening / closing mechanism, exhaust switching mechanism, and substrate processing apparatus

Abstract

To provide an easy-to-install opening / closing mechanism, an exhaust switching mechanism, and a substrate processing apparatus.SOLUTION: An opening / closing mechanism 73 includes a base member 87 that can be attached to mounting openings 85A, 85B, and 85C of a switching box 71, an upper support member 89 provided on the upper surface of the base member 87, an actuator 91, a rod 93 that extends downward from the actuator 91 while penetrating the base member 87 and is moved in the vertical direction Z by the actuator 91, a lower support member 101 provided on the lower surface of the base member 87, a cover member 95 that is provided below the base member 87 and can close a communication opening 81, and a first link 103 and a second link 105 that are provided below the base member 87 and connect the rod 93, the lower support member 101, and the cover member 95. The movement of the rod 93 is transmitted to the cover member 95 via the first link 103 and the second link 105, such that the cover member 95 is switched between an open state and a closed state.SELECTED DRAWING: Figure 6

Description

[Technical field]

[0001] The present invention relates to an opening / closing mechanism and an exhaust switching mechanism used in an exhaust switching mechanism that switches an exhaust path from a processing chamber for processing a substrate to one of a plurality of exhaust pipes, and a substrate processing apparatus. Examples of the substrate include semiconductor substrates, substrates for FPDs (Flat Panel Displays), glass substrates for photomasks, substrates for optical disks, substrates for magnetic disks, ceramic substrates, and substrates for solar cells. Examples of the FPD include liquid crystal displays and organic EL (electroluminescence) displays. [Background technology]

[0002] The substrate processing apparatus includes a transfer space in which a transfer robot is provided, and four towers provided along the transfer space (see, for example, Patent Document 1). Each of the four towers includes six processing chambers arranged in the up-down direction (vertical direction). Each of the four towers is provided with three exhaust pipes extending in the up-down direction. For example, each of the six processing chambers in the first tower is connected to three exhaust pipes via an exhaust switching mechanism. As a result, the exhaust path from the processing chamber is selectively connected to one of the three exhaust pipes. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Patent Publication No. 2021-136435 Summary of the Invention [Problem to be solved by the invention]

[0004] However, the conventional example may have the following problem. If the substrate processing apparatus has, for example, 24 processing chambers, 24 exhaust switching mechanisms are provided. Also, if a specific processing chamber is selectively connected to, for example, one of three exhaust pipes, three opening and closing mechanisms are provided for one exhaust switching mechanism. Therefore, for example, 72 opening and closing mechanisms are provided. For example, if it is difficult to attach and detach the opening and closing mechanisms in the exhaust switching mechanism, the assembly or maintenance time of the exhaust switching mechanism and the substrate processing apparatus may become longer.

[0005] The present invention has been made in view of the above circumstances, and an object of the present invention is to provide an opening and closing mechanism, an exhaust switching mechanism, and a substrate processing apparatus that are easy to install. [Means for solving the problem]

[0006] In order to achieve the above object, the present invention has the following configuration: That is, the opening and closing mechanism according to the present invention is used in an exhaust switching mechanism that connects a processing chamber to any one of a plurality of exhaust pipes via a switching box, and opens and closes any one of a plurality of communication ports that communicate between the switching box and the plurality of exhaust pipes, and includes a base member that can be attached to a plurality of attachment openings that are provided in a ceiling wall of the switching box corresponding to the plurality of communication ports, an upper support member provided on an upper surface of the base member, an actuator attached to the upper support member, a rod that extends downward from the actuator while penetrating the base member and is moved in a vertical direction by the actuator, a lower support member provided on a lower surface of the base member, a cover member that is provided below the base member and capable of closing the one communication port, and a link member that is provided below the base member and connects the rod, the lower support member, and the cover member, and is characterized in that the vertical movement of the rod is transmitted to the cover member via the link member, so that the cover member is switched between an open state and a closed state.

[0007] The opening / closing mechanism according to the present invention includes a base member that can be attached to each of a plurality of mounting openings provided in the ceiling wall of the switching box corresponding to the plurality of communication ports. The upper support member, the actuator, the rod, the cover member, the lower support member, and the link member are integrally provided on the base member. Therefore, the opening / closing mechanism can be attached to the switching box as an integrated unit. This makes it easy to attach the opening / closing mechanism.

[0008] In addition, in the above-mentioned opening and closing mechanism, the link member comprises a first link whose upper end portion is connected to the lower end portion of the lower support member, is rotatable around a first horizontal axis passing through the connection portion with the lower support member, and whose lower end portion is connected to the back surface of the cover member, and a second link whose upper end portion is connected to the rod so as to be rotatable around a second horizontal axis passing through the lower end portion of the rod, and whose lower end portion is connected to the first link so as to be rotatable around a third horizontal axis passing through the first link, and it is preferable that the second horizontal axis and the third horizontal axis are each parallel to the first horizontal axis.

[0009] The base member is provided integrally with the lower support member, the first link, and the second link together with the cover member, etc. Therefore, the opening / closing mechanism can be attached integrally to the switching box.

[0010] Furthermore, it is preferable that the above-mentioned opening and closing mechanism further comprises a bellows extending in the vertical direction, a lower member provided at the lower end of the bellows and attached to the base member, and an upper member provided at the upper end of the bellows so as to close the upper end of the hollow of the bellows, and that the rod comprises a first rod and a second rod, the first rod extends downward from the actuator, the lower end of the first rod is connected to the upper member, the upper end of the second rod is connected to the upper member, and further, the second rod penetrates the lower member and the base member while being passed through the hollow of the bellows.

[0011] A lower member provided at the lower end of the bellows is attached to the base member. An upper member provided at the upper end of the bellows closes the upper end of the bellows cavity. The first rod is connected to a second rod via the upper member. The second rod passes through the lower member and the base member while passing through the cavity of the bellows. This structure of the bellows and its surroundings can prevent gas from leaking from inside the switching box even if there is a sliding portion of the rod relative to the base member.

[0012] In the above-described opening and closing mechanism, it is preferable that a lower end of the first rod is connected to the upper member via a joint that absorbs eccentricity and angular deviation between the first rod and the second rod.

[0013] The joint interposed between the lower end of the first rod and the upper member can absorb eccentricity and angular deviation between the first rod and the second rod.

[0014] In the above-described opening and closing mechanism, it is preferable that a packing is disposed on the peripheral portion of the surface of the cover member.

[0015] When the cover member is in the closed state, the airtightness is improved. For example, it is possible to prevent the intrusion of a gas containing a chemical (chemical atmosphere) into other exhaust lines. This makes it possible to prevent, for example, when a part of an organic exhaust line is made of a metal such as stainless steel, from corroding the metal part due to the intrusion of an acid exhaust.

[0016] The exhaust switching mechanism according to the present invention is an exhaust switching mechanism for switching an exhaust path from a processing chamber to one of a plurality of exhaust pipes, and includes a switching box that connects the processing chamber to the plurality of exhaust pipes, and a plurality of opening / closing mechanisms for individually opening and closing a plurality of communication ports that connect the switching box to the plurality of exhaust pipes, the plurality of opening / closing mechanisms being attached to a plurality of mounting openings provided in a ceiling wall of the switching box corresponding to the plurality of communication ports, and each of the plurality of opening / closing mechanisms includes a base member that can be attached to each of the plurality of mounting openings, an upper support member provided on an upper surface of the base member, and a plurality of opening / closing mechanisms attached to the upper support member. the cover member includes an actuator mounted on an underside of the base member, a rod extending downward from the actuator while penetrating the base member, the rod being moved vertically by the actuator, a lower support member provided on the underside of the base member, a cover member provided below the base member and capable of blocking a corresponding one of the plurality of communication ports, and a link member provided below the base member and connecting the rod, the lower support member, and the cover member, wherein the vertical movement of the rod is transmitted to the cover member via the link member, thereby switching the cover member between an open state and a closed state.

[0017] Furthermore, a substrate processing apparatus for processing a substrate according to the present invention is characterized in comprising the above-mentioned exhaust switching mechanism, the processing chamber, a holding part provided within the processing chamber for holding the substrate in a horizontal position, a nozzle provided within the processing chamber for ejecting a chemical solution onto the substrate held by the holding part, and the plurality of exhaust pipes provided on the sides of the processing chamber and extending in an upward and downward direction. Effect of the Invention

[0018] According to the opening and closing mechanism, the exhaust switching mechanism, and the substrate processing apparatus of the present invention, the opening and closing mechanism can be easily attached. [Brief description of the drawings]

[0019] [Figure 1]1 is a plan view showing a schematic configuration of a substrate processing apparatus according to an embodiment; [Diagram 2] 2 is a vertical sectional view of the substrate processing apparatus as seen in the direction of arrow AA in FIG. [Diagram 3] FIG. 2 is a cross-sectional view showing a processing chamber and an exhaust splitter mechanism. [Figure 4] FIG. 2 is a vertical cross-sectional view showing a processing chamber and an exhaust switching mechanism. [Diagram 5] FIG. 4 is a plan view showing three mounting openings formed in a ceiling wall of the switching box. [Figure 6] FIG. 11 is a side view showing three opening and closing mechanisms attached to a switching box. [Figure 7] FIG. 2A is a side view showing an opening / closing mechanism that is integrally formed with a base member as a foundation, and FIG. 2B is a diagram showing the surface of a cover member of the opening / closing mechanism. [Figure 8] FIG. 2(a) is a vertical cross-sectional view showing the opening and closing mechanism when the cover member is in a closed state, and FIG. 2(b) is a vertical cross-sectional view showing the opening and closing mechanism when the cover member is in an open state. [Figure 9] FIG. 2A is a longitudinal cross-sectional view showing the configuration of the bellows and its surroundings when the opening / closing mechanism is in a closed state, and FIG. 2B is a longitudinal cross-sectional view showing the configuration of the bellows and its surroundings when the opening / closing mechanism is in an open state. [Figure 10] 13 is a cross-sectional view showing a processing chamber and an exhaust switching mechanism according to a modified example. FIG. EXAMPLES

[0020] Hereinafter, an embodiment of the present invention will be described with reference to the drawings. Fig. 1 is a plan view (or a cross-sectional view) showing a schematic configuration of a substrate processing apparatus 1 according to the embodiment. Fig. 2 is a vertical cross-sectional view of the substrate processing apparatus as viewed in the direction of the arrow AA shown in Fig. 1.

[0021] <1. Substrate processing equipment> 1, the substrate processing apparatus 1 is a single-wafer processing apparatus that processes one substrate W at a time. The substrate processing apparatus 1 includes an indexer block 2 and a processing block 3.

[0022] For convenience, in this specification, the direction in which the indexer block 2 and the processing block 3 are lined up is referred to as the "front-rear direction X." The front-rear direction X is horizontal. Within the front-rear direction X, for example, the direction from the processing block 3 toward the indexer block 2 is referred to as the "front." The direction opposite to the front is referred to as the "rear." The horizontal direction perpendicular to the front-rear direction X is referred to as the "width direction Y." One direction in the "width direction Y" is referred to as the "right" as appropriate. The direction opposite to the right is referred to as the "left." The direction perpendicular to the horizontal direction is referred to as the "up-down direction Z." In each figure, for reference, front, back, right, left, top, and bottom are indicated as appropriate.

[0023] <2. Indexer block> The indexer block 2 includes a plurality of (for example, four) load ports LP and an indexer robot IR. The load ports LP are used for loading and unloading the carriers C. The carriers C are placed on the load ports LP. The load ports LP are disposed outside the indexer block 2.

[0024] The carrier C accommodates a plurality of (for example, 25) substrates W. For example, a front opening unify pod (FOUP) is used as the carrier C, but is not limited to this. The substrate W is formed, for example, in a disk shape.

[0025] The indexer robot IR is disposed inside the indexer block 2. The indexer robot IR transports substrates W between, for example, four carriers C placed on four load ports LP and a substrate placement part PS described below. The indexer robot IR includes a hand 5. The hand 5 is movable and holds one substrate W. The indexer robot IR moves the hand 5 holding one substrate W in the horizontal direction XY (front-back direction X and width direction Y) and the up-down direction Z. The indexer robot IR also rotates the hand 5 around a vertical axis.

[0026] <3. Processing block> The processing block 3 includes a transport robot TR, a substrate platform PS, and four towers TW1 to TW4. The transport robot TR and the substrate platform PS are provided in a transport space 11 extending in the front-rear direction X. The transport space 11 extends linearly from the indexer block 2 toward the rear X. The transport robot TR transports a substrate W between the substrate platform PS and each of the processing units 21 (described later) of the four towers TW1 to TW4. The transport robot TR includes a hand 13. The hand 13 is movable and holds one substrate W in a horizontal position. The transport robot TR moves the hand 13 holding one substrate W in the horizontal direction XY and the up-down direction Z. The transport robot TR also rotates the hand 13 around a vertical axis. The substrate platform PS is disposed between the indexer robot IR and the transport robot TR.

[0027] The first tower TW1 and the second tower TW2 are arranged in the front-rear direction X along the transport space 11. Similarly, the third tower TW3 and the fourth tower TW4 are arranged in the front-rear direction X along the transport space 11.

[0028] In addition, in the width direction Y, the two towers TW1, TW2 are disposed so as to face the two towers TW3, TW4 across the transport space 11. That is, the two towers TW1, TW2 are disposed on the right side Y of the transport space 11. In addition, the two towers TW3, TW4 are disposed on the left side Y of the transport space 11.

[0029] Each of the four towers TW1 to TW4 includes six processing units 21 arranged in the vertical direction Z. That is, the processing block 3 includes 24 processing units 21. Note that, for example, Fig. 2 shows that each of the two towers TW2, TW4 includes six processing units 21 arranged in the vertical direction Z.

[0030] The processing block 3 includes four towers TW1 to TW4. In this regard, the processing block 3 may include one or two or more towers. Each of the towers TW1 to TW4 includes six processing units 21. In this regard, each of the towers TW1 to TW4 may include one processing unit 21 or two or more processing units 21 arranged in the vertical direction Z.

[0031] <3-1. Processing chamber> As shown in Fig. 1, each processing unit 21 includes a processing chamber 23 and an exhaust switching mechanism 25. Fig. 3 is a horizontal cross-sectional view showing the processing chamber 23 and the exhaust switching mechanism 25. Fig. 4 is a vertical cross-sectional view showing the processing chamber 23 and the exhaust switching mechanism 25.

[0032] The processing chamber 23 processes the substrates W one by one. The processing chamber 23 includes a holding and rotating part 27, three nozzles 29A, 29B, 29C, a substrate transfer port 30, and a fan filter unit 31 (see FIG. 4). The holding and rotating part 27 and the three nozzles 29A, 29B, 29C are each provided in the processing chamber 23. The fan filter unit 31 is provided on the ceiling of the processing chamber 23, as shown in FIG. 4. The fan filter unit 31 supplies clean air (gas) into the processing chamber 23.

[0033] The substrate transfer opening 30 is disposed facing the transfer space 11. The substrate W is transferred onto the holding and rotating unit 27 through the substrate transfer opening 30. The holding and rotating unit 27 rotates the substrate W about a vertical axis AX1 while holding the substrate W in a horizontal position. Specifically, the holding and rotating unit 27 includes a spin chuck 27A that holds the substrate W in a horizontal position, and an electric motor 27B that rotates the spin chuck 27A about the vertical axis AX1. The spin chuck 27A may be a chuck that holds the substrate W by clamping the side surfaces of the substrate W with three or more holding pins. The spin chuck 27A may also be a chuck that holds the lower surface of the substrate W by vacuum suction.

[0034] Each of the three nozzles 29A, 29B, 29C ejects a chemical liquid onto the substrate W held by the holding / rotating unit 27. The three nozzles 29A, 29B, 29C eject a first chemical liquid, a second chemical liquid, and a third chemical liquid. For example, the first nozzle 29A ejects the first chemical liquid, and the second nozzle 29B ejects the second chemical liquid. The third nozzle 29C ejects the third chemical liquid. The first chemical liquid, the second chemical liquid, and the third chemical liquid are different types from one another. Note that when the first chemical liquid, the second chemical liquid, and the third chemical liquid are not particularly distinguished from one another, they are referred to as "chemical liquids."

[0035] The first chemical liquid is classified as, for example, an acidic liquid (acid-based chemical liquid). The first chemical liquid includes, for example, at least one of hydrofluoric acid (hydrofluoric acid), hydrochloric acid-hydrogen peroxide solution, sulfuric acid, sulfuric acid-hydrogen peroxide solution, hydrofluoric nitric acid (a mixture of hydrofluoric acid and nitric acid), and hydrochloric acid.

[0036] The second chemical liquid is classified as, for example, an alkaline liquid (an alkaline-based chemical liquid). The second chemical liquid includes, for example, at least one of an ammonia hydrogen peroxide solution (SC1), an ammonia water solution, an ammonium fluoride solution, and a tetramethylammonium hydroxide (TMAH).

[0037] The third chemical liquid is, for example, classified as an organic liquid (organic chemical liquid). The organic liquid includes at least one of isopropyl alcohol (IPA), methanol, ethanol, hydrofluoroether (HFE), and acetone.

[0038] Each of the nozzles 29A, 29B, and 29C has a tubular shape that extends linearly. The nozzles 29A, 29B, and 29C include tip portions 33A, 33B, and 33C, respectively. The tip portions 33A, 33B, and 33C each have a discharge port (not shown) for discharging the chemical solution.

[0039] The processing chamber 23 further includes three rotational drive units 35A, 35B, and 35C. The three rotational drive units 35A, 35B, and 35C are connected to the three base ends of the three nozzles 29A, 29B, and 29C, respectively. Each of the rotational drive units 35A, 35B, and 35C includes, for example, an electric motor. The first rotational drive unit 35A rotates the first nozzle 29A around a vertical axis AX2. The second rotational drive unit 35B rotates the second nozzle 29B around a vertical axis AX3. The third rotational drive unit 35C rotates the third nozzle 29C around a vertical axis AX4.

[0040] 4, processing chamber 23 further includes three pipes 37, 39, and 41. One end of first pipe 37 is connected to first nozzle 29A. The other end of first pipe 37 is connected to first chemical liquid supply source 43. Also, first pipe 37 is provided with an on-off valve V1. When on-off valve V1 is opened, the first chemical liquid is sent from first chemical liquid supply source 43 to first pipe 37, and the first chemical liquid is discharged from first nozzle 29A.

[0041] Similarly, one end of the second pipe 39 is connected to the second nozzle 29B. The other end of the second pipe 39 is connected to the second chemical liquid supply source 45. Also, an on-off valve V2 is provided in the second pipe 39. When the on-off valve V2 is opened, the second chemical liquid is discharged from the second nozzle 29B. Similarly, one end of the third pipe 41 is connected to the third nozzle 29C. The other end of the third pipe 41 is connected to the third chemical liquid supply source 47. Also, an on-off valve V3 is provided in the third pipe 41. When the on-off valve V3 is opened, the third chemical liquid is discharged from the third nozzle 29C.

[0042] The processing chamber 23 further includes an upper cup 49 and a lower cup 51. The upper cup 49 and the lower cup 51 are each formed in a hollow cylindrical shape. As shown in Fig. 3 and Fig. 4, the upper cup 49 and the lower cup 51 are arranged so as to surround the side surfaces of the substrate W and the spin chuck 27A. The upper cup 49 is arranged above the lower cup 51. The upper cup 49 is raised and lowered relative to the lower cup 51, the substrate W, and the spin chuck 27A by a drive unit (not shown).

[0043] Furthermore, the upper cup 49 receives the chemical liquid scattered from the substrate W due to the rotation of the substrate W or the like, and guides the chemical liquid to the lower cup 51. A liquid discharge pipe 53 is provided at the bottom of the lower cup 51. The lower cup 51 stores the chemical liquid sent from the upper cup 49 or the like, and discharges the chemical liquid through the liquid discharge pipe 53. A liquid discharge pipe 53 is also connected to the bottom of the processing chamber 23.

[0044] The processing chamber 23 includes a partition plate 55 that separates the upper space SP1 and the lower space SP2 inside. The air supplied from the fan filter unit 31 is sent from the upper space SP1 to the lower space SP2 while flowing inside and outside the upper cup 49 as shown by flows FL1, FL2, FL3, FL4, FL5, and FL6 indicated by dashed lines in Fig. 4. Then, the air is sent from the lower space SP2 of the processing chamber 23 to one of three exhaust pipes 61, 62, and 63 (described later) via the exhaust switching mechanism 25 described later. Note that the partition plate 55 is not shown in Fig. 3.

[0045] <3-2.3 exhaust pipes> Three exhaust pipes 61, 62, 63 extending in the vertical direction Z are provided on the sides of each processing chamber 23. Specifically, the three exhaust pipes 61, 62, 63 are provided in each of the four towers TW1 to TW4. For example, as shown in FIG. 2, the three exhaust pipes 61, 62, 63 are provided on the sides of the six processing chambers 23 of the second tower TW2. The three exhaust pipes 61, 62, 63 each extend in the vertical direction Z. In the four towers TW1 to TW4, the three exhaust pipes 61, 62, 63 are arranged side by side in the width direction Y.

[0046] As shown in FIG. 2, six horizontal exhaust pipes 65A, 66A, 67A, 65B, 66B, 67B are provided on the roof of the substrate processing apparatus 1. The six exhaust pipes 61, 62, 63 of the two towers TW1, TW2 are connected to three horizontal exhaust pipes 65A, 66A, 67A. The six exhaust pipes 61, 62, 63 of the two towers TW3, TW4 are connected to three horizontal exhaust pipes 65B, 66B, 67B. For example, the upper end of the first exhaust pipe 61 of the first tower TW1 and the upper end of the first exhaust pipe 61 of the second tower TW2 are connected to the horizontal exhaust pipe 65A. Similarly, the second exhaust pipe 62 of the first tower TW1 and the second exhaust pipe 62 of the second tower TW2 are connected to the horizontal exhaust pipe 66A. Furthermore, the third exhaust pipe 63 of the first tower TW1 and the third exhaust pipe 63 of the second tower TW2 are connected to the horizontal exhaust pipe 67A.

[0047] <3-3. Exhaust switching mechanism> As described above, each of the 24 processing units 21 includes an exhaust switching mechanism 25. The exhaust switching mechanism 25 connects the processing chamber 23 to any one of the three exhaust pipes 61, 62, 63 via the switching box 71. That is, the exhaust switching mechanism 25 switches the exhaust path from the processing chamber 23 to any one of the three exhaust pipes 61, 62, 63.

[0048] 1, 3, and 4, the exhaust switching mechanism 25 is disposed between the processing chamber 23 and the three exhaust pipes 61, 62, and 63. The exhaust switching mechanism 25 includes a switching box 71 and three opening / closing mechanisms 73, 74, and 75. The opening / closing mechanisms 73, 74, and 75 are used in the exhaust switching mechanism 25.

[0049] The switching box 71 connects the processing chamber 23 to the three exhaust pipes 61, 62, 63. The switching box 71 is connected to the inside of the processing chamber 23 via an exhaust inlet 78 of a connecting pipe 76. The connecting pipe 76 connects between the processing chamber 23 and the switching box 71. The connecting pipe 76 is equipped with an exhaust control damper (not shown). The exhaust control damper adjusts the flow rate (=volume / time) of gas passing through the connecting pipe 76. One end of the connecting pipe 76 forms an exhaust inlet 78. The gas in the processing chamber 23 is sent from the exhaust inlet 78 into the switching box 71.

[0050] The three exhaust pipes 61, 62, 63 are provided with three communication ports 81, 82, 83 corresponding to the area of ​​the switching box 71. The first exhaust pipe 61 is provided with a first communication port 81. Similarly, the second exhaust pipe 62 is provided with a second communication port 82. The third exhaust pipe 63 is provided with a third communication port 83. The three communication ports 81, 82, 83 are aligned in the width direction Y. Each of the three communication ports 81, 82, 83 is formed in a circular shape.

[0051] The three communication ports 81, 82, 83 communicate between the switching box 71 and the three exhaust pipes 61, 62, 63. That is, the switching box 71 is connected to the first exhaust pipe 61 via the first communication port 81. Similarly, the switching box 71 is connected to the second exhaust pipe 62 via the second communication port 82. The switching box 71 is connected to the third exhaust pipe 63 via the third communication port 83.

[0052] The three opening / closing mechanisms 73, 74, 75 individually open and close the three communication ports 81, 82, 83. Each of the opening / closing mechanisms 73, 74, 75 opens and closes one of the three communication ports 81, 82, 83. Specifically, as shown in FIG. 3, the first opening / closing mechanism 73 opens and closes the first communication port 81 (corresponding communication port). Similarly, the second opening / closing mechanism 74 opens and closes the second communication port 82. The third opening / closing mechanism 75 opens and closes the third communication port 83.

[0053] Next, the characteristic features of this embodiment will be described. As shown in Fig. 3 and Fig. 4, the three opening and closing mechanisms 73, 74, and 75 are attached to the switching box 71. If it is difficult to attach and detach the three opening and closing mechanisms 73, 74, and 75, for example, the assembly time of the substrate processing apparatus 1 will become longer. Therefore, in the exhaust switching mechanism 25 of this embodiment, each of the three opening and closing mechanisms 73, 74, and 75 is an integrally assembled part based on a base member 87 (described later). This makes it easy to attach and detach each of the three opening and closing mechanisms 73, 74, and 75.

[0054] Please refer to Fig. 5. The ceiling wall 71A of the switching box 71 has three mounting openings 85A, 85B, 85C for mounting the three opening / closing mechanisms 73, 74, 75 to the ceiling wall 71A. The three mounting openings 85A, 85B, 85C are provided in the ceiling wall 71A of the switching box 71 in correspondence with the three communication ports 81, 82, 83. The three mounting openings 85A, 85B, 85C are arranged in the width direction Y. Each of the mounting openings 85A, 85B, 85C is formed to have a size that allows a cover member 95 and a link mechanism 97 provided on a base member 87, which will be described later, to pass through.

[0055] Please refer to Figures 5, 6, and 7(a). Figure 7(a) is a side view showing the first opening and closing mechanism 73 (the second opening and closing mechanism 74 or the third opening and closing mechanism 75) that is integrally configured based on the base member 87. The three opening and closing mechanisms 73, 74, and 75 are attached to the three attachment openings 85A, 85B, and 85C.

[0056] The first opening and closing mechanism 73 is attached to the attachment opening 85A. The second opening and closing mechanism 74 is attached to the attachment opening 85B. The third opening and closing mechanism 75 is attached to the attachment opening 85C. The three opening and closing mechanisms 73, 74, 75 have substantially the same configuration.

[0057] Each of the three opening / closing mechanisms 73, 74, and 75 includes a base member 87, an upper support member 89, an actuator 91, a rod 93, a cover member 95, and a link mechanism 97. The rod 93 includes an upper rod 93U and a lower rod 93L. When there is no need to distinguish between the upper rod 93U and the lower rod 93L, they are referred to as "rod 93."

[0058] The base member 87 is attached (assembled) to the ceiling wall 71A while closing one of the three mounting openings 85A, 85B, 85C. For example, the base member 87 of the first opening / closing mechanism 73 is attached to the ceiling wall 71A while closing the mounting opening 85A. The base member 87 of the second opening / closing mechanism 74 is attached to the ceiling wall 71A while closing the mounting opening 85B. In FIG. 5, the outlines of the three base members 87 of the three opening / closing mechanisms 73, 74, 75 are indicated by two-dot chain lines. The three base members 87 are attached to the three mounting openings 85A, 85B, 85C, respectively, with a plurality of screws.

[0059] The upper support member 89 is provided on the upper surface of the base member 87. The upper support member 89 is formed in a gate shape, but it does not have to be formed in a gate shape. The actuator 91 is attached to the upper support member 89. In other words, the upper support member 89 is a member for fixing the actuator 91 to the base member 87. The actuator 91 includes, for example, an air cylinder, but may also include an electric motor.

[0060] The rod 93 extends downward from the actuator 91 while penetrating the base member 87. The rod 93 (upper rod 93U) is moved in the up-down direction Z by the actuator 91. The cover member 95 is disposed below the base member 87.

[0061] The cover member 95 is a member that allows gas from the processing chamber 23 to flow between the inside of the switching box 71 and, for example, the first exhaust pipe 61, or blocks gas from the processing chamber 23. The state in which gas from the processing chamber 23 is allowed to flow is called an open state. The state in which gas from the processing chamber 23 is blocked is called a closed state. The cover member 95 is formed in a disk shape. As shown in FIG. 7(b), a ring-shaped packing (seal member) 95A is disposed on the peripheral portion of the surface (front surface) of the circular cover member 95.

[0062] See Figures 7(a), 8(a) and 8(b). The link mechanism 97 is provided on the underside of the base member 87. The link mechanism 97 converts the movement of the rod 93 in the up-down direction Z into the swinging of the cover member 95 around the horizontal axis AX5. The link mechanism 97 includes a lower support member 101, a first link 103 and a second link 105. The lower support member 101 is provided on the underside of the base member 87. In other words, the lower support member 101 is fixed to the underside of the base member 87. The first link 103 and the second link 105 correspond to the link members of the present invention.

[0063] The horizontal axis AX5 is located at a height between the base member 87 and the cover member 95. The horizontal axis AX5 passes through a lower end portion of the lower support member 101. The horizontal axis AX6 passes through a lower end portion of the rod 93 (93L). The horizontal axis AX7 passes through a lower end side of the first link 103. The horizontal axis AX6 and the horizontal axis AX7 are each parallel to the horizontal axis AX5. That is, each of the three horizontal axes AX5, AX6, and AX7 extends in the width direction Y. In addition, in the closed state shown in FIG. 8(a), the horizontal axis AX6 is located at a height between the two horizontal axes AX5 and AX7. In addition, in the closed state, the horizontal axis AX5 is located between the two horizontal axes AX6 and AX7 in a plan view.

[0064] An upper end portion of the first link 103 is connected to a lower end portion of the lower support member 101. The first link 103 is rotatable about a horizontal axis AX5 that passes through the connection portion with the lower support member 101. That is, the first link 103 is rotatable around the horizontal axis AX5. A lower end portion of the first link 103 is connected to the rear surface of the disk-shaped cover member 95. An upper end portion of the second link 105 is connected to the rod 93 (lower rod 93L) so as to be rotatable around a horizontal axis AX6. A lower end portion of the second link 105 is connected to the first link 103 so as to be rotatable around a horizontal axis AX7.

[0065] Next, the bellows structure, which is another characteristic part of this embodiment, will be described. It is difficult to ensure airtightness at the part where the lower rod 93L slides against the base member 87. Therefore, if an acidic gas, for example, in the switching box 71 leaks at the sliding part, it may corrode electronic devices, for example, that are arranged around it. Therefore, in this embodiment, a bellows structure is adopted for the sliding part. This prevents gas from leaking at the sliding part.

[0066] Please refer to Figures 9(a) and 9(b). Each of the three opening / closing mechanisms 73, 74, and 75 includes a bellows 107, a lower flange member 109L, an upper flange member 109U, a lower rod holding member 111, and a connecting screw 113. The lower flange member 109L corresponds to the lower member of the present invention. The upper flange member 109U, the lower rod holding member 111, and the connecting screw 113 correspond to the upper member of the present invention.

[0067] The bellows 107 extends in the vertical direction Z. A cavity TN of the bellows 107 can accommodate a part or all of the lower rod 93L. A lower flange member 109L is provided at the lower end of the bellows 107. The lower flange member 109L is formed in a plate shape. An opening OP1 having a size (diameter) large enough for the lower rod 93L to pass through is formed in the center of the lower flange member 109L.

[0068] An opening OP2 having a size (diameter) large enough for the lower rod 93L to pass through is also formed in the base member 87. Each of the two openings OP1, OP2 is formed in a circular shape. The lower flange member 109L is attached to the upper surface of the base member 87 by, for example, a plurality of screws. The lower rod 93L passes through the lower flange member 109L and the base member 87 while passing through the cavity TN of the bellows 107.

[0069] An upper flange member 109U is provided at the upper end of the bellows 107. The upper flange member 109U has an opening OP3 with a size (diameter) that allows the lower rod 93L to pass through. That is, the internal cavity TN of the bellows 107 is accessible only through the two openings OP1 and OP3.

[0070] The lower rod holding member 111 is attached to the upper surface of the upper flange member 109U by, for example, a plurality of screws. A hole portion OP4 slightly larger than the diameter of the lower rod 93L is formed in the center of the lower rod holding member 111 and on the lower surface of the lower rod holding member 111. An opening OP5 of a size that does not allow the lower rod 93L to pass through is formed on the upper surface of the lower rod holding member 111. The opening OP5 is formed with a size that allows the threaded portion (external threaded portion) 113A of the connecting screw 113 to pass through, but does not allow the head portion 113B of the connecting screw 113 to pass through. In a plan view, it is preferable that the center of the opening OP5 coincides with the centers of the opening OP3 and the hole portion OP4.

[0071] The lower rod holding member 111 restricts the movement of the lower rod 93L in the horizontal direction XY by accommodating the upper end of the lower rod 93L in the hole portion OP4. Furthermore, while the lower rod holding member 111 is sandwiched between the head portion 113B and the lower rod 93L, a connecting screw 113 is tightened into a screw hole (internal thread) provided on the upper end surface of the lower rod 93L.

[0072] As a result, the upper end of the lower rod 93L is connected to the upper member (upper flange member 109U, lower rod holding member 111, and connecting screw 113). Also, the upper member (upper flange member 109U, lower rod holding member 111, and connecting screw 113) is provided at the upper end of the bellows 107 so as to close the upper end of the cavity TN. Also, the lower rod 93L, upper flange member 109U, lower rod holding member 111, and connecting screw 113 are moved together.

[0073] As shown in Figures 9(a) and 9(b), the lower rod 93L is raised and lowered relative to the base member 87. At this time, gas can move between the inside of the switching box 71 and the inside of the cavity TN of the bellows 107. However, because the upper end of the bellows 107 is closed, the space inside the cavity TN is isolated from the space SP3 outside the bellows 107. In other words, the gas inside the cavity TN is prevented from leaking into the space SP3.

[0074] The upper rod 93U extends downward from the actuator 91. The upper rod 93U is moved in the up-down direction Z by the actuator 91. The lower end of the upper rod 93U is connected to the upper member (the upper flange member 109U, the lower rod holding member 111, and the connecting screw 113) via a floating joint 115. The floating joint 115 is a joint that absorbs eccentricity and angular misalignment between the upper rod 93U and the lower rod 93L.

[0075] Specifically, the lower end of the upper rod 93U is connected to an upper portion of a floating joint (joint) 115. Also, a threaded portion 115A of the floating joint 115 is fastened to a threaded hole 113C formed in an upper surface of the connecting screw 113. As a result, the floating joint 115 is connected to the connecting screw 113 and also to the upper rod 93U.

[0076] Here, the operation of the three opening and closing mechanisms 73, 74, 75 will be briefly described. As shown in FIG. 8(b), the actuator 91 moves the rods 93 (upper rod 93U and lower rod 93L) upward. This causes the cover member 95 to be in an open state that allows gas to flow from the processing chamber 23. When the cover member 95 of the first opening and closing mechanism 73 is in an open state, the first communication port 81 is opened. Similarly, when the cover member 95 of the second opening and closing mechanism 74 is in an open state, the second communication port 82 is opened. Moreover, when the cover member 95 of the third opening and closing mechanism 75 is in an open state, the third communication port 83 is opened.

[0077] 8(a), the actuator 91 moves the rod 93 downward. This places the cover member 95 in a closed state that blocks gas from the processing chamber 23. When the cover member 95 of the first opening and closing mechanism 73 is in the closed state, the first communication port 81 is closed. Similarly, when the cover member 95 of the second opening and closing mechanism 74 is in the closed state, the second communication port 82 is closed. When the cover member 95 of the third opening and closing mechanism 75 is in the closed state, the third communication port 83 is closed. Note that the opening and closing mechanisms 73, 74, and 75 shown in FIGS. 6 and 7(A) are in the closed state.

[0078] The horizontal axis AX5 corresponds to the first horizontal axis of the present invention. The horizontal axis AX6 corresponds to the second horizontal axis of the present invention. The horizontal axis AX7 corresponds to the third horizontal axis of the present invention. The upper rod 93U corresponds to the first rod of the present invention. The lower rod 93L corresponds to the second rod of the present invention.

[0079] <4. Control unit> The substrate processing apparatus 1 includes a control unit 120 (see FIG. 1) and a storage unit (not shown). The control unit 120 controls each component of the substrate processing apparatus 1. The control unit 120 includes one or more processors, such as a central processing unit (CPU). The storage unit includes at least one of a read-only memory (ROM) and a random-access memory (RAM). The storage unit stores computer programs required to control each component of the substrate processing apparatus 1.

[0080] <5. Operation of the substrate processing device> Next, the operation of the substrate processing apparatus 1 will be described with reference to Fig. 1. A carrier C is transported to the load port LP. The indexer robot IR takes out the substrate W from the carrier C transported to the load port LP, and transports the substrate W to the substrate platform PS.

[0081] The transport robot TR in the processing block 3 takes out the substrate W from the substrate placement part PS and transports the substrate W to any one of the 24 processing chambers 23 (24 processing units 21). For example, the substrate W is sent to a predetermined processing chamber 23 in the second tower TW2. At this time, the substrate W is transported through the substrate transport port 30 onto the holding rotator 27 of the predetermined processing chamber 23. The holding rotator 27 holds the transported substrate W. After the substrate W is transported onto the holding rotator 27, the substrate transport port 30 is closed by a shutter (not shown).

[0082] The fan filter unit 31 shown in FIG. 4 supplies clean air into the processing chamber 23. The exhaust equipment of the factory sucks in gas from one end of each of the six horizontal exhaust pipes 65A, 66A, 67A, 65B, 66B, and 67B. For example, in the exhaust switching mechanism 25 shown in FIG. 3 and FIG. 6, the two opening / closing mechanisms 73 and 74 close the two communication ports 81 and 82, and the third opening / closing mechanism 75 opens the third communication port 83. Therefore, the gas in the specified processing chamber 23 is sent to the exhaust equipment of the factory via the third communication port 83, the third exhaust pipe 63, and the horizontal exhaust pipe 67A.

[0083] For example, the first exhaust pipe 61 is used to exhaust acid gas. The second exhaust pipe 62 is used to exhaust alkaline gas. The third exhaust pipe 63 is used to exhaust organic gas. For example, the second exhaust pipe 62 may be used to exhaust organic gas, and the third exhaust pipe 63 may be used to exhaust alkaline gas. The roles of the three exhaust pipes 61, 62, 63 are not limited.

[0084] <5-1. Exhaust operation of a given processing unit> First, a case where an acid-based chemical liquid (first chemical liquid) is supplied to a substrate W to perform chemical liquid processing will be described. In the exhaust switching mechanism 25 shown in Figs. 3 and 6, the first opening and closing mechanism 73 opens the first communication port 81, and the two opening and closing mechanisms 74, 75 close the two communication ports 82, 83. As a result, gas in a predetermined processing chamber 23 is sent in the order of the connection pipe 76 (exhaust inlet 78), the switching box 71, and the first exhaust pipe 61. For example, the upper end of the first exhaust pipe 61 is connected to the horizontal exhaust pipe 65A. Therefore, the gas sent to the first exhaust pipe 61 is sent to the exhaust facility of the factory via the horizontal exhaust pipe 65A.

[0085] Thereafter, the first rotary drive unit 35A rotates the first nozzle 29A around the vertical axis AX2. As a result, the tip 33A of the first nozzle 29A is moved from a standby position outside the substrate W to above the substrate W held by the holding rotation unit 27. Thereafter, the on-off valve V1 is opened, whereby an acid-based chemical is discharged from the first nozzle 29A. In addition, the holding rotation unit 27 rotates the substrate W it holds around the vertical axis AX1. The discharge of the acid-based chemical generates a mist (or vapor) of the acid-based chemical in the processing chamber 23. The gas containing the mist of the acid-based chemical is sent to the first exhaust pipe 61 through the switching box 71.

[0086] Next, a case where an alkaline chemical liquid (second chemical liquid) is supplied to the substrate W to perform chemical liquid processing will be described. In the exhaust switching mechanism 25 shown in Figs. 3 and 6, the second opening and closing mechanism 74 opens the second communication port 82, and the two opening and closing mechanisms 73, 75 close the two communication ports 81, 83. As a result, the gas in the predetermined processing chamber 23 is sent in the order of the connection pipe 76 (exhaust inlet 78), the switching box 71, and the second exhaust pipe 62. For example, the upper end of the second exhaust pipe 62 is connected to the horizontal exhaust pipe 66A. Therefore, the gas sent to the second exhaust pipe 62 is sent to the exhaust facility of the factory via the horizontal exhaust pipe 66A.

[0087] Thereafter, the second rotary drive unit 35B rotates the second nozzle 29B about the vertical axis AX3. As a result, the tip 33B of the second nozzle 29B is moved above the substrate W held by the holding rotation unit 27. Thereafter, the on-off valve V2 is opened, whereby the alkaline chemical liquid is discharged from the second nozzle 29B. In addition, the holding rotation unit 27 rotates the substrate W it holds about the vertical axis AX1. The discharge of the alkaline chemical liquid generates a mist of the alkaline chemical liquid (or vapor) in the processing chamber 23. The gas containing the mist of the alkaline chemical liquid is sent to the second exhaust pipe 62 through the switching box 71.

[0088] Next, a case where an organic chemical liquid (third chemical liquid) is supplied to the substrate W to perform chemical liquid processing will be described. In the exhaust switching mechanism 25 shown in Figs. 3 and 6, the third opening and closing mechanism 75 opens the third communication port 83, and the two opening and closing mechanisms 73, 74 close the two communication ports 81, 82. As a result, the gas in the predetermined processing chamber 23 is sent in the order of the connection pipe 76 (exhaust inlet 78), the switching box 71, and the third exhaust pipe 63. For example, the upper end of the third exhaust pipe 63 is connected to the horizontal exhaust pipe 67A. Therefore, the gas sent to the third exhaust pipe 63 is sent to the exhaust facility of the factory via the horizontal exhaust pipe 67A.

[0089] Thereafter, the third rotary drive unit 35C rotates the third nozzle 29C about the vertical axis AX4. As a result, the tip 33C of the third nozzle 29C is moved above the substrate W held by the holding rotation unit 27. Thereafter, the on-off valve V3 is opened, whereby the organic chemical is discharged from the third nozzle 29C. In addition, the holding rotation unit 27 rotates the substrate W it holds about the vertical axis AX1. The discharge of the organic chemical generates a mist (or vapor) of the organic chemical in the processing chamber 23. The gas containing the mist of the organic chemical is sent to the third exhaust pipe 63 through the switching box 71.

[0090] After the substrate W has been subjected to chemical processing in a predetermined processing chamber 23, a shutter (not shown) is moved to open the substrate transfer opening 30 of that processing chamber 23. The transfer robot TR transfers the substrate W from that processing chamber 23 to the substrate placement part PS through the substrate transfer opening 30. The indexer robot IR transfers the substrate W that has been chemically processed from the substrate placement part PS to the carrier C of the load port LP.

[0091] According to this embodiment, the switching box 71 is provided with a base member 87 that is detachable (attachable (assembleable) and removable) to each of three mounting openings 85A, 85B, 85C provided in the ceiling wall 71A of the switching box 71 corresponding to the three communication openings 81, 82, 83. The base member 87 is integrally provided with an upper support member 89, an actuator 91, a rod 93 (93U, 93L), a cover member 95, and a link mechanism 97 (a lower support member 101, a first link 103, and a second link 105). Therefore, the opening / closing mechanisms 73, 74, 75 can be attached to and detached from the switching box 71 as an integrated unit. This makes it possible to easily attach and detach the opening / closing mechanisms 73, 74, 75.

[0092] Further, a lower flange member 109L provided at the lower end of the bellows 107 is attached to the base member 87. Further, an upper member (upper flange member 109U, lower rod holding member 111, and connecting screw 113) provided at the upper end of the bellows 107 closes the upper end of the cavity TN of the bellows 107. Furthermore, the upper rod 93U is connected to the lower rod 93L via the upper member. The lower rod 93L penetrates the lower flange member 109L and the base member 87 while passing through the cavity TN of the bellows 107. Such a structure of the bellows 107 and its surroundings can prevent gas from leaking from inside the switching box 71 even if there is a sliding portion of the rod 93 (93L) relative to the base member 87.

[0093] A floating joint 115 interposed between the lower end of the upper rod 93U and the upper member (upper flange member 109U, lower rod holding member 111, and connecting screw 113) can absorb eccentricity and angular misalignment between the upper rod 93U and the lower rod 93L.

[0094] When the cover member 95 is in the closed state, the packing 95A improves airtightness. For example, it is possible to prevent the intrusion of a gas containing a chemical (chemical atmosphere) into other exhaust lines. This makes it possible to prevent, for example, when a part of an organic exhaust line is made of a metal such as stainless steel, from corroding the metal part due to the intrusion of an acid exhaust gas.

[0095] The present invention is not limited to the above-described embodiment, but can be modified as follows.

[0096] (1) In the above-described embodiment, as shown in Fig. 4, the exhaust switching mechanism 25 (particularly, the three opening and closing mechanisms 73, 74, and 75) is disposed between the processing chamber 23 and the three exhaust pipes 61, 62, and 63. In this regard, as shown in Fig. 10, the three exhaust pipes 61, 62, and 63 may be disposed between the processing chamber 23 and the three opening and closing mechanisms 73, 74, and 75.

[0097] (2) In the above-described embodiment and modified example (1), the floating joint 115 is provided between the upper rod 93U and the connecting screw 113. For example, if there is no need to absorb the eccentricity and angular misalignment between the upper rod 93U and the lower rod 93L, the floating joint 115 does not need to be provided. In other words, the lower end of the upper rod 93U is connected to the connecting screw 113 without the floating joint 115 being interposed.

[0098] (3) In the above-described embodiment and each modified example, each of the opening and closing mechanisms 73, 74, 75 includes the floating joint 115. In this regard, the floating joint 115 may be replaced with another joint that absorbs at least one of the eccentricity and the angular deviation between the upper rod 93U and the lower rod 93L.

[0099] (4) In the above-described embodiment and each modified example, each processing chamber 23 is provided with three nozzles 29A, 29B, and 29C. In this regard, each processing chamber 23 may be provided with two nozzles 29A and 29B, rather than nozzle 29C. That is, each processing chamber 23 may be provided with a plurality of nozzles.

[0100] (5) In the above-described embodiments and modifications, each of the opening / closing mechanisms 73, 74, 75 includes the bellows 107, the lower member (lower flange member 109L), and the upper member (upper flange member 109U, lower rod holding member 111, and connecting screw 113). In this regard, for example, if sufficient airtightness can be ensured at the sliding portion of the rod 93 relative to the base member 87, each of the opening / closing mechanisms 73, 74, 75 does not need to include the bellows 107, the lower member, and the upper member. In this case, for example, the upper rod 93U is connected to the lower rod 93L via a floating joint 115.

[0101] (6) In the above-described embodiment and each modified example, three exhaust pipes 61, 62, 63 are provided on the side of processing chamber 23, but the number of exhaust pipes is not limited to three. That is, it is sufficient if multiple exhaust pipes are provided on the side of processing chamber 23. Furthermore, in response to multiple (e.g., two) exhaust pipes, multiple (e.g., two) opening / closing mechanisms that individually open and close multiple (e.g., two) communication ports may be attached to switching box 71.

[0102] (7) In the embodiment and modified examples described above, for example as shown in Fig. 4, the cover member 95 comes into direct contact with the third exhaust pipe 63 in order to close the third communication port 83. For example, a side wall having an opening that communicates with the third communication port 83 may be provided between the cover member 95 and the third exhaust pipe 63. In this case, the cover member 95 may close the third communication port 83 by closing the opening.

[0103] (8) In the above-described embodiment and each modified example, the lower end of the lower rod 93L is connected to the upper end of the second link 105. At this time, the connecting screw 113 is tightened into a threaded hole provided in the upper end surface of the lower rod 93L while the lower rod holding member 111 is sandwiched between the head 113B of the connecting screw 113 and the lower rod 93L. Thereafter, the lower rod holding member 111 may be attached to the upper surface of the upper flange member 109U, for example, by a plurality of screws. This makes it possible to easily connect the lower rod 93L to the connecting screw 113. [Explanation of symbols]

[0104] 1 ... Substrate processing equipment 23 … Processing chamber 25 ... Exhaust switching mechanism 27 … Rotating holding part 29A, 29B, 29C … Nozzle 61,62,63 … Exhaust pipe 71 … Switching box 71A … Ceiling wall 73,74,75 … Opening and closing mechanism 81, 82, 83 … Connecting port 85A, 85B, 85C … Installation opening 87 ... Base material 89 ... Upper support member 91 ... Actuator 93 ... Rod 95 ... Lid member 97 … Link mechanism 101 ... Lower support member 103 … Link 1 105 … 2nd link 107 ... Bellows TN…Cavity 109L … Lower flange part 109U … Upper flange member 111 ... Lower rod holding member 113 ... Connecting screw 115 … Floating joint 120 ... Control section W … Substrate

Claims

1. An opening / closing mechanism for opening and closing one of a plurality of communication ports connecting a processing chamber to one of a plurality of exhaust pipes via a switching box, the opening / closing mechanism comprising: a base member that can be attached to a plurality of attachment openings provided in a ceiling wall of the switching box corresponding to the plurality of communication ports; an upper support member provided on an upper surface of the base member; an actuator attached to the upper support member; a rod extending downward from the actuator while penetrating the base member, the rod being moved in a vertical direction by the actuator; A lower support member provided on a lower surface of the base member; a cover member provided below the base member and capable of closing the one communication port; a link member provided below the base member and connecting the rod, the lower support member, and the lid member; An opening and closing mechanism, characterized in that the vertical movement of the rod is transmitted to the lid member via the link member, thereby switching the lid member between an open state and a closed state.

2. The opening and closing mechanism according to claim 1, The link member is a first link having an upper end portion connected to a lower end portion of the lower support member, being rotatable about a first horizontal axis passing through a connecting portion with the lower support member, and having a lower end portion connected to a back surface of the cover member; a second link having an upper end portion connected to the rod so as to be rotatable about a second horizontal axis passing through a lower end portion of the rod, and a lower end portion connected to the first link so as to be rotatable about a third horizontal axis passing through the first link; An opening and closing mechanism, wherein the second horizontal axis and the third horizontal axis are each parallel to the first horizontal axis.

3. The opening and closing mechanism according to claim 1 or 2, A bellows extending in the vertical direction; a lower member provided at a lower end of the bellows and attached to the base member; An upper member provided at an upper end of the bellows so as to close an upper end of the cavity of the bellows, The rod comprises a first rod and a second rod, the first rod extends downward from the actuator, and a lower end of the first rod is connected to the upper member; The upper end of the second rod is connected to the upper member, and An opening and closing mechanism characterized in that the second rod penetrates the lower member and the base member while being passed through the cavity of the bellows.

4. The opening and closing mechanism according to claim 3, An opening and closing mechanism characterized in that a lower end of the first rod is connected to the upper member via a joint that absorbs eccentricity and angular deviation between the first rod and the second rod.

5. The opening and closing mechanism according to claim 1, An opening and closing mechanism characterized in that a packing is arranged on the peripheral portion of the surface of the lid member.

6. An exhaust switching mechanism for switching an exhaust path from a processing chamber to any one of a plurality of exhaust pipes, a switching box connecting the processing chamber to the plurality of exhaust pipes; a plurality of opening / closing mechanisms for individually opening and closing a plurality of communication ports that communicate between the switching box and the plurality of exhaust pipes, the plurality of opening / closing mechanisms being attached to a plurality of mounting openings provided in a ceiling wall of the switching box corresponding to the plurality of communication ports; Each of the plurality of opening and closing mechanisms includes: a base member attachable to each of the plurality of attachment openings; an upper support member provided on an upper surface of the base member; an actuator attached to the upper support member; a rod extending downward from the actuator while penetrating the base member, the rod being moved in a vertical direction by the actuator; A lower support member provided on a lower surface of the base member; a cover member provided below the base member and capable of closing a corresponding one of the plurality of communication openings; a link member provided below the base member and connecting the rod, the lower support member, and the lid member; An exhaust switching mechanism characterized in that the vertical movement of the rod is transmitted to the lid member via the link member, thereby switching the lid member between an open state and a closed state.

7. A substrate processing apparatus for processing a substrate, The exhaust gas switching mechanism according to claim 6 ; the processing chamber; a holder provided in the processing chamber and configured to hold the substrate in a horizontal position; a nozzle provided in the processing chamber and configured to eject a chemical solution onto the substrate held by the holder; the plurality of exhaust pipes are provided on the sides of the processing chamber and extend in a vertical direction; A substrate processing apparatus comprising:

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