Processing device

Abstract

To inhibit influence of temperature change of a direct drive motor in a processing device including the direct drive motor.SOLUTION: A processing device 1 includes: a DD motor 4 configured to rotate a workpiece W; a temperature sensor 62 configured to detect a temperature of the DD motor 4; and a control device 6 configured to control a rotation amount of the DD motor 4 and control a processed amount of the workpiece W. The control device 6 corrects a processed amount of the workpiece W based on the detection temperature of the temperature sensor 62.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The present disclosure relates to processing equipment. [Background technology]

[0002] Patent Document 1 discloses a rotary table device as an example of a processing device. The processing device of Patent Document 1 includes a table unit and a rotary drive unit that rotates the table unit. The rotary drive unit includes, for example, a direct drive motor. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] JP 2023-018231 A Summary of the Invention [Problem to be solved by the invention]

[0004] In the processing device of Patent Document 1, the table section is connected to a rotary drive section. A workpiece is placed on the table section. When the temperature of the rotary drive section changes and the volume of the rotary drive section changes, the position of the table section and the position of the workpiece change. Therefore, the temperature change of the rotary drive section affects the processing accuracy of the workpiece.

[0005] The present disclosure aims to suppress the effects of temperature changes in a direct drive motor in a processing device equipped with a direct drive motor. [Means for solving the problem]

[0006] A machining apparatus according to one embodiment of the present disclosure includes a direct drive motor that rotates a workpiece, a temperature sensor that detects the temperature of the direct drive motor, and a control device that controls the amount of rotation of the direct drive motor and the amount of machining of the workpiece, and the control device corrects the amount of machining of the workpiece based on the temperature detected by the temperature sensor.

[0007] According to this, the control device corrects the amount of machining of the workpiece based on the temperature detected by the temperature sensor, and therefore, the influence of temperature changes on the direct drive motor in the machining device can be suppressed.

[0008] In addition, in a processing apparatus according to one aspect of the present disclosure, the direct drive motor includes a fixed member and a rotating member arranged outside the fixed member and rotatable relative to the fixed member, to which the workpiece is attached, and the temperature sensor is arranged on the outer surface of the rotating member.

[0009] This allows the temperature sensor to be easily disposed on the direct drive motor.

[0010] In addition, in a processing apparatus according to one embodiment of the present disclosure, the processing apparatus further includes a reader / writer and an RFID tag integral with the temperature sensor and transmitting the temperature detected by the temperature sensor to the reader / writer, and the control device acquires the temperature detected by the temperature sensor via the reader / writer.

[0011] This allows the control device to obtain the temperature detected by the temperature sensor with a simple configuration. [Brief description of the drawings]

[0012] [Figure 1] FIG. 1 is a diagram showing the configuration of a processing device. [Diagram 2] FIG. 2 is a cross-sectional view of the direct drive motor along the axis of rotation. [Diagram 3] FIG. 3 is a plan view of the temperature detection device. [Figure 4] FIG. 4 is a cross-sectional view taken along line IV-IV in FIG. 3, showing a state in which the temperature detection device 33 is disposed on the rotating member. [Diagram 5] FIG. 5 is a block diagram of an RFID tag. [Figure 6] FIG. 6 is a cross-sectional view of a temperature detection device in a processing apparatus according to a first modified example of the embodiment of the present disclosure. [Figure 7] FIG. 7 is a cross-sectional view of a temperature detection device in a processing apparatus according to a second modified example of the embodiment of the present disclosure. [Figure 8] FIG. 8 is a cross-sectional view of a temperature detection device in a processing apparatus according to a third modified example of the embodiment of the present disclosure. [Figure 9] FIG. 9 is a cross-sectional view of a temperature detection device in a processing apparatus according to a fourth modified example of the embodiment of the present disclosure. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0013] Hereinafter, embodiments of the present disclosure will be described with reference to the drawings, but the present disclosure is not limited thereto. The components of each embodiment and each modified example described below can be appropriately combined. In addition, some components may not be used.

[0014] In the following description, the Z direction shown in the drawing is the height direction of the processing apparatus 1, the X direction is the left-right direction of the processing apparatus 1, and the Y direction is the front-rear direction of the processing apparatus 1. The X direction, the Y direction, and the Z direction are perpendicular to each other. Note that the X, Y, and Z directions are merely examples, and the present disclosure is not limited to these directions.

[0015] 1 is a diagram showing the configuration of a processing device 1. The processing device 1 is a dicing machine that cuts a workpiece W (e.g., a semiconductor wafer). The processing device 1 includes a processing head 2, an XY table 3, a direct drive motor 4 (hereinafter referred to as a DD motor 4), a reader / writer 5, and a control device 6.

[0016] The machining head 2 machines the workpiece W with a tool T. The machining head 2 moves the tool T along the Z direction. The machining head 2 includes an arm 2a to which the tool T is attached, and a main body 2b in which the arm 2a is disposed so as to be movable along the Z direction. The main body 2b includes a ball nut that moves the arm 2a in the Z direction, and a motor that rotates the screw shaft of the ball nut.

[0017] The XY table 3 includes a transport unit 3a and a table 3b. The transport unit 3a moves the table 3b along the X and Y directions. The transport unit 3a includes a ball nut that moves the table 3b in the X and Y directions, and a motor that rotates the screw shaft of the ball nut.

[0018] 2 is a cross-sectional view of the DD motor 4 along the rotation axis Ax. The rotation axis Ax is parallel to the Z direction. The DD motor 4 is disposed on the table 3b and rotates the workpiece W about the rotation axis Ax.

[0019] The DD motor 4 is an outer rotor type direct drive motor and includes a fixed member 10, a rotating member 20, a motor section 30, a bearing 40, and a resolver 50.

[0020] The fixed member 10 has a cylindrical shape with the rotation axis Ax as the central axis. An end face S of the fixed member 10 on the -Z side in the Z direction is fixed to the table 3b.

[0021] The rotating member 20 has a cylindrical shape with a rotation axis Ax as its central axis. The rotating member 20 is disposed radially outside the fixed member 10 so as to be rotatable around the rotation axis Ax relative to the fixed member 10. A workpiece W is attached to an end face F1 of the rotating member 20 on the +Z side in the Z direction. The workpiece W rotates integrally with the rotating member 20.

[0022] The motor unit 30 rotates the rotating member 20 relative to the fixed member 10. The motor unit 30 includes a motor stator 31 and a motor rotor 32.

[0023] The motor stator 31 is fixed to the outer circumferential surface of the fixed member 10. The motor stator 31 includes a plurality of motor cores 31a and stator coils 31b.

[0024] The motor cores 31a are arranged at equal intervals around the rotation axis Ax. The stator coil 31b is formed by winding a wire around the motor core 31a.

[0025] The motor rotor 32 rotates about a rotation axis Ax relative to the motor stator 31. The motor rotor 32 is fixed to the inner circumferential surface of the rotating member 20.

[0026] The bearing 40 rotatably supports the rotating member 20 relative to the fixed member 10. The bearing 40 is a ball bearing. The bearing 40 may be a roller bearing. The bearing 40 includes an inner ring 41, an outer ring 42, and a plurality of balls 43.

[0027] The inner ring 41 is fixed to the outer circumferential surface of the fixed member 10. The outer ring is fixed to the inner circumferential surface of the rotating member 20. A plurality of balls 43 are disposed between the inner ring 41 and the outer ring so as to be able to roll.

[0028] The resolver 50 detects the rotation angle of the rotating member 20 relative to the fixed member 10. The resolver 50 is an incremental type resolver. The resolver 50 may be an absolute type resolver. The resolver 50 includes a resolver stator 51 and a resolver rotor 52.

[0029] The resolver stator 51 is annular and is fixed to the fixed member 10. The resolver rotor 52 is annular and is disposed radially outside the resolver stator 51. The resolver rotor 52 is fixed to the rotating member 20 and rotates integrally therewith.

[0030] The DD motor 4 does not include a reduction mechanism (eg, a reduction gear and a transmission belt), and directly transmits the rotational force of the motor section 30 to the rotating member 20, causing the rotating member 20 to rotate relative to the fixed member .

[0031] When the rotating member 20 rotates relative to the fixed member 10, the resolver rotor 52 rotates relative to the resolver stator 51. The reactance between the resolver rotor 52 and the resolver stator 51 changes in response to the rotation of the resolver rotor 52. The resolver 50 detects the rotation angle of the rotating member 20 relative to the fixed member 10 based on the change in reactance. The detection result of the resolver 50 is transmitted to the control device 6.

[0032] The DD motor 4 further includes a temperature detection device 60.

[0033] The temperature detection device 60 detects the temperature of the DD motor 4. Specifically, the temperature detection device 60 detects the temperature of the rotating member 20. The temperature detection device 60 is disposed on the outer peripheral surface F2 of the outer surface of the rotating member 20. The temperature detection device 60 has flexibility to deform along the outer peripheral surface F2.

[0034] Fig. 3 is a plan view of the temperature detecting device 60. Fig. 4 is a cross-sectional view taken along line IV-IV shown in Fig. 3, and shows a state in which the temperature detecting device 60 is disposed on the rotating member 20.

[0035] The temperature detection device 60 includes an RFID tag 61, a temperature sensor 62, a cover member 63, and an adhesive member 64. The RFID tag 61 and the temperature sensor 62 are integrally formed.

[0036] 5 is a block diagram of an RFID tag 61. The RFID tag 61 is a passive RFID tag. The RFID tag 61 performs wireless communication with the reader / writer 5.

[0037] The RFID tag 61 includes a substrate 61a shown in Fig. 4. On the substrate 61a, a temperature sensor 62, an antenna 65 shown in Fig. 5, and a control circuit 66 are arranged.

[0038] The temperature sensor 62 detects the temperature of the rotating member 20. That is, the detected temperature of the temperature sensor 62 corresponds to the detected temperature of the temperature detection device 60.

[0039] 4, the temperature sensor 62 is disposed on a main surface 61a1 of the substrate 61a. When the temperature detection device 60 is disposed on the rotating member 20, the temperature sensor 62 faces an outer peripheral surface F2 of the rotating member 20. There is a space between the temperature sensor 62 and the outer peripheral surface F2 of the rotating member 20. This prevents vibrations from the rotating member 20 from being transmitted to the temperature sensor 62, thereby preventing the temperature sensor 62 from breaking down.

[0040] 5 is electrically connected to the temperature sensor 62 and the antenna 65. The antenna 65 receives a carrier wave from the reader / writer 5. The control circuit 66 is driven by power generated by the carrier wave.

[0041] The control circuit 66 acquires the temperature detected by the temperature sensor 62 and stores it in the memory area 66a. The control circuit 66 transmits the temperature detected by the temperature sensor 62, stored in the memory area 66a, to the reader / writer 5 via the antenna 65.

[0042] Furthermore, the control circuit 66 transmits to the reader / writer 5 identification information (for example, an identification number) for identifying the DD motor 4 in association with the temperature detected by the temperature sensor 62. The identification information is stored in advance in the memory area 66a by the reader / writer 5.

[0043] 4 protects the RFID tag 61. The cover member 63 is flat and includes an arrangement surface 63a. The arrangement surface 63a is flat. The arrangement surface 63a has a recess 63b in which the RFID tag 61 is arranged. In a plan view of the cover member 63, the recess 63b is located in the center of the cover member 63.

[0044] Moreover, when the RFID tag 61 is placed in the recess 63b, the placement surface 63a of the cover member 63 and the main surface 61a1 of the substrate 61a are on the same plane. That is, when the RFID tag 61 is placed in the recess 63b, the placement surface 63a is present all around the main surface 61a1 of the substrate 61a. Note that the placement surface 63a of the cover member 63 and the main surface 61a1 of the substrate 61a may be on different planes. Moreover, when the RFID tag 61 is placed in the recess 63b, the temperature sensor 62 protrudes from the placement surface 63a.

[0045] The material of the cover member 63 is a thermoplastic resin. Specifically, the material of the cover member 63 is a nylon resin having waterproof and oil resistance. Therefore, the cover member 63 is waterproof and oil resistant. The fact that the cover member 63 has waterproof and oil resistance means that changes in the properties of the cover member 63 caused by water and oil and grease used in the processing device 1 during the period of use of the DD motor 4 are suppressed, and no problems occur in the operation of the temperature sensor 62 and the RFID tag 61.

[0046] The adhesive member 64 is disposed on the arrangement surface 63a of the cover member 63, and adheres the RFID tag 61 and the cover member 63 to the outer peripheral surface F2 of the rotating member 20. The adhesive member 64 is also disposed on the main surface 61a1 of the substrate 61a. The adhesive member 64 has a through hole 64a inside which the temperature sensor 62 is located. As a result, the temperature sensor 62 faces the outer peripheral surface F2 of the rotating member 20 across a space. In addition, the through hole 64a can reduce the space between the temperature sensor 62 and the outer peripheral surface F2 of the rotating member 20. Therefore, the temperature sensor 62 can detect the temperature of the rotating member 20 with high accuracy.

[0047] The adhesive member 64 is a double-sided tape. The adhesive member 64 is waterproof. The adhesive member 64 is a so-called waterproof tape. The fact that the adhesive member 64 is waterproof means that changes in the properties of the adhesive member 64 caused by water during the period in which the DD motor 4 is used are suppressed, and no problems occur in the operation of the temperature sensor 62 and the RFID tag 61.

[0048] Moreover, the adhesive member 64 is disposed all around the RFID tag 61 on the arrangement surface 63a of the cover member 63. This ensures watertightness between the cover member 63 and the outer peripheral surface F2 of the rotating member 20, and prevents water from adhering to the temperature sensor 62 and the RFID tag 61.

[0049] 1 performs wireless communication with the RFID tag 61. Therefore, the reader / writer 5 and the RFID tag 61 can communicate with each other even when the rotating member 20 is rotating. The reader / writer 5 can be carried by a user. The reader / writer 5 is electrically connected to the control device 6 by wire or wirelessly.

[0050] A user operates the reader / writer 5, which transmits a carrier wave toward the RFID tag 61. In response, the RFID tag 61 transmits the temperature detected by the temperature sensor 62 to the reader / writer 5. The reader / writer 5 acquires the temperature detected by the temperature sensor 62 and transmits it to the control device 6.

[0051] The control device 6 is a computer, and includes, for example, a CPU (Central Processing Unit), a ROM (Read Only Memory), a RAM (Random Access Memory), an internal storage unit, an input interface, and an output interface. The CPU, ROM, RAM, and internal storage unit are connected via an internal bus. Programs such as BIOS are stored in the ROM. The internal storage unit is, for example, a HDD (Hard disk drive) or flash memory, and stores an operating system program and application programs. The CPU realizes various functions by executing programs stored in the ROM or internal storage unit while using the RAM as a work W area.

[0052] The control device 6 controls the amount of rotation of the DD motor 4 and also controls the amount of machining of the workpiece W. Specifically, the control device 6 controls the motor included in the machining head 2 to adjust the position of the tool T with respect to the workpiece W in the Z direction.

[0053] Furthermore, the control device 6 adjusts the orientation of the workpiece W around the rotation axis Ax by controlling the DD motor 4. Specifically, the control device 6 adjusts the orientation of the workpiece W around the rotation axis Ax by controlling the rotation angle of the rotating member 20. When power is supplied from the control device 6 to the stator coil 31b, the motor rotor 32 rotates relative to the motor stator 31. As a result, the rotating member 20 rotates around the rotation axis Ax relative to the fixed member 10.

[0054] Furthermore, the control device 6 controls the rotation angle of the rotating member 20 based on the detection result of the resolver 50. As described above, the rotating member 20 and the workpiece W rotate integrally. That is, the control device 6 adjusts the orientation of the workpiece W around the rotation axis Ax based on the detection result of the resolver 50.

[0055] Next, the control device 6 controls the motor of the transport unit 3a to move the tool T in the X and Y directions relative to the workpiece W, thereby cutting the workpiece W. The amount of machining of the workpiece W in the Z direction is determined by the position of the tool T in the Z direction.

[0056] Furthermore, when the temperature of the rotating member 20 changes due to a temperature rise in the motor unit 30 caused by driving the DD motor 4 and a change in the ambient temperature of the DD motor 4, the length of the rotating member 20 in the Z direction changes. The change in the length of the rotating member 20 in the Z direction affects the amount of machining of the workpiece W in the Z direction.

[0057] Therefore, the control device 6 corrects the amount of machining of the workpiece W in the Z direction based on the temperature detected by the temperature sensor 62. The control device 6 corrects the position of the tool T in the Z direction, thereby correcting the amount of machining of the workpiece W in the Z direction.

[0058] The control device 6 acquires the detected temperature of the temperature sensor 62 from the reader / writer 5. The control device 6 derives a correction value using the detected temperature of the temperature sensor 62. When the temperature of the rotating member 20 rises, the rotating member 20 expands. Therefore, the correction value is set to a value that increases the Z-direction position of the tool T as the detected temperature of the temperature sensor 62 increases. The relationship between the detected temperature of the temperature sensor 62 and the correction value is derived by experiments, simulations, etc., and is stored in advance in the internal storage unit of the control device 6.

[0059] The control device 6 adds the correction value to the Z-direction position of the tool T. This causes the machining amount of the workpiece W in the Z direction to be corrected, and the workpiece W is machined with high precision.

[0060] By periodically checking the temperature detected by the temperature sensor 62, the user can adjust the amount of processing of the workpiece W with high precision.

[0061] As described above, according to this embodiment, the machining device 1 includes the DD motor 4 that rotates the workpiece W, the temperature sensor 62 that detects the temperature of the DD motor 4, and the control device 6 that controls the rotation amount of the DD motor 4 and also controls the machining amount of the workpiece W. The control device 6 corrects the machining amount of the workpiece W based on the temperature detected by the temperature sensor 62.

[0062] According to this, the control device 6 corrects the machining amount of the workpiece W based on the temperature detected by the temperature sensor 62. Therefore, in the machining device 1, the influence of temperature changes of the DD motor 4 can be suppressed.

[0063] The DD motor 4 also includes a fixed member 10 and a rotating member 20 that is disposed outside the fixed member 10 so as to be rotatable relative to the fixed member 10 and to which a workpiece W is attached. The temperature sensor 62 is disposed on the outer surface of the rotating member 20.

[0064] This allows the temperature sensor 62 to be easily disposed on the DD motor 4.

[0065] The processing device 1 further includes a reader / writer 5 and an RFID tag 61 that is integrated with a temperature sensor 62 and transmits the temperature detected by the temperature sensor 62 to the reader / writer 5. The control device 6 acquires the temperature detected by the temperature sensor 62 via the reader / writer 5.

[0066] This allows the control device 6 to obtain the detected temperature of the temperature sensor 62 with a simple configuration.

[0067] Next, a processing device 1 according to a modified embodiment of the present disclosure will be described, focusing mainly on the differences from the processing device 1 of the above embodiment.

[0068] For example, it goes without saying that the processing device 1 is not limited to a dicing machine, and may be, for example, a machining center.

[0069] The DD motor 4 may be a direct drive motor on the inner rotor side. In this case, the temperature detection device 60 may be disposed on the end surface on the -Z side in the Z direction of the rotating member 20. The temperature detection device 60 may be disposed on the fixed member 10.

[0070] Furthermore, the RFID tag 61 may be an active RFID tag, in which case the RFID tag 61 further includes a power source.

[0071] The adhesive member 64 may have elasticity. In this case, the adhesive member 64 has, for example, an elastic sheet-like base material and adhesive layers disposed on both sides of the base material. The base material is formed of, for example, a foamed resin such as foamed polyethylene. When the DD motor 4 is operating, the elasticity of the adhesive member 64 can suppress vibrations transmitted from the rotating member 20 to the temperature sensor 62 and the RFID tag 61.

[0072] The adhesive member 64 may be a hardened adhesive (for example, an epoxy adhesive) or may be a butyl tape that is waterproof and oil resistant.

[0073] Moreover, the temperature detection device 60 does not need to include the adhesive member 64. In this case, the temperature detection device 60 is fixed to the rotating member 20 by, for example, a bolt.

[0074] Furthermore, the cover member 63 may be shaped to cover a part of the main surface 61a1 of the substrate 61a with the temperature sensor 62 exposed.

[0075] FIG. 6 is a cross-sectional view of a temperature detection device 60 in a processing device 1 according to a first modified example of the embodiment of the present disclosure.

[0076] The temperature detection device 60 of the processing apparatus 1 according to the first modified example further includes a thermally conductive paste 167. The thermally conductive paste 167 is, for example, a silicon-based thermally conductive grease. Needless to say, the thermally conductive paste 167 is not limited to a silicon-based paste as long as it is in a paste form. The thermally conductive paste 167 may be a thermosetting resin (for example, an epoxy resin) containing particles of Ag or the like having a relatively high thermal conductivity.

[0077] The thermally conductive paste 167 is filled into the through-hole 64a in a state in which the temperature detection device 60 is disposed on the rotating member 20. As a result, the temperature sensor 62 and the rotating member 20 are thermally connected via the thermally conductive paste 167.

[0078] In the processing apparatus 1 according to the first modified example, the heat of the rotating member 20 is transferred to the temperature sensor 62 via the thermally conductive paste 167 more efficiently than in the processing apparatus 1 according to the above embodiment.

[0079] 7 is a cross-sectional view of the temperature detection device 60 in the processing apparatus 1 according to a second modified example of the embodiment of the present disclosure. In this second modified example, the adhesive member 264 does not have a through hole 64a. The adhesive member 264 covers the entire RFID tag 61. As a result, the temperature sensor 62 is covered by the adhesive member 264. The temperature sensor 62 and the rotating member 20 are thermally connected via the adhesive member 264.

[0080] In the processing apparatus 1 according to the second modified example, the heat of the rotating member 20 is more efficiently transferred to the temperature sensor 62 via the adhesive member 264 than in the processing apparatus 1 according to the above embodiment. The adhesive member 264 may contain particles of Ag or the like having a relatively high thermal conductivity. In this case, the heat of the rotating member 20 is more efficiently transferred to the temperature sensor 62 via the adhesive member 264.

[0081] FIG. 8 is a cross-sectional view of a temperature detection device 60 in a processing apparatus 1 according to a third modified example of an embodiment of the present disclosure. In this third modified example, the outer peripheral surface F2 of the rotating member 20 has a recess C into which the temperature sensor 62 fits. In FIG. 8, the adhesive member 64 is omitted. In this third modified example, the adhesive member 64 may be, for example, a hardened cyanoacrylate adhesive. In this case, the thickness of the adhesive member 64 can be reduced.

[0082] In the processing apparatus 1 of the third modified example, the temperature sensor 62 is located inside the recessed portion C, so that the temperature sensor 62 can detect the temperature of the rotating member 20 with higher accuracy.

[0083] 9 is a cross-sectional view of a temperature detection device 470 in a processing apparatus 1 according to a fourth modified example of the embodiment of the present disclosure. The temperature detection device 470 of the fourth modified example does not include an RFID tag 61 and a cover member 63. The temperature detection device 470 of the fourth modified example includes a substrate 471, a temperature sensor 472, and an adhesive member 473. The temperature sensor 472 is disposed on a main surface 471a of the substrate 471. The substrate 471 includes a terminal that outputs a detected temperature of the temperature sensor 472.

[0084] In this case, the processing device 1 does not include the reader / writer 5, and the control device 6 acquires the detected temperature of the temperature sensor 472 by electrically connecting to the terminal of the board 471. The board 471 may include a display unit that displays the detected temperature of the temperature sensor 472. In this case, the user may check the detected temperature of the temperature sensor 472 on the display unit and input it to the control device 6.

[0085] The adhesive member 473 adheres the substrate 471 to the rotating member 20. The adhesive member 473 is, for example, a double-sided tape. The temperature detection device 470 may include a cover member for protecting the substrate 471. [Explanation of symbols]

[0086] 1 Processing equipment 4 Direct drive motor (DD motor) 5 Reader / Writer 6. Control device 10 Fixing member 20 Rotating member 60 Temperature detection device 61 RFID tags 62 Temperature Sensor Double work

Claims

1. A direct drive motor that rotates the workpiece; a temperature sensor for detecting a temperature of the direct drive motor; A control device that controls the rotation amount of the direct drive motor and controls the machining amount of the workpiece, The control device corrects the amount of machining of the workpiece based on the temperature detected by the temperature sensor. Processing equipment.

2. The direct drive motor is A fixing member; a rotating member disposed outside the fixed member so as to be rotatable relative to the fixed member, and to which the workpiece is attached; The temperature sensor is disposed on an outer surface of the rotating member. The processing device according to claim 1 .

3. A reader / writer, an RFID tag that is integrated with the temperature sensor and transmits the temperature detected by the temperature sensor to the reader / writer; the control device acquires the detected temperature of the temperature sensor via the reader / writer; The processing device according to claim 1 .

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