Display method and substrate processing system

Abstract

To display a corresponding moving image file and substrate processing information on the same screen.SOLUTION: A control section 37 of a deposition device 10 creates a processing content log consisting of substrate processing information including a process recipe and processing state information at a time point in which deposition processing is finished, imparts a time which is counted at a time point when the processing content log is created to the processing content log as a first time, and transmits the processing content log to a management server 50 at a first time interval. The control section 37 transmits a second time, which is counted in a control device, to the management server 50 at a second time interval which is shorter than the first time interval. The management server 50 receives moving image files from cameras 22a and 22b and imparts to the moving image files the latest second time received from the control section 37 at a time point in which the reception of the moving image files is completed. An information processing device 60 simultaneously displays the substrate processing information of the processing content log managed by the management server 50 and the moving image file to which the second time closest to the first time imparted to the processing content log is imparted.SELECTED DRAWING: Figure 8

Description

[Technical field]

[0001] The present invention relates to a display method and a substrate processing system. [Background technology]

[0002] There is known a plasma processing apparatus that performs plasma processing on a substrate placed on a mounting table. In the plasma processing apparatus, the internal condition is photographed by a camera (see, for example, Patent Document 1). The camera photographs the inside of the plasma processing apparatus, for example, from the start to the end of the plasma processing. A video file generated by this photography is stored in a management server different from the plasma processing apparatus, and if the camera does not have a clock function, the generation time of the video file is given by the management server having the clock function. Meanwhile, the plasma processing apparatus generates a log file including substrate processing information in which parameters related to the plasma processing are recorded. The log file is also stored in the management server, but the generation time of the log file is given by the plasma processing apparatus having the clock function. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] JP 2020-95379 A Summary of the Invention [Problem to be solved by the invention]

[0004] The technology according to the present disclosure allows corresponding video files and substrate processing information to be displayed on the same screen. [Means for solving the problem]

[0005] One aspect of the technology disclosed herein is a display method for simultaneously displaying information recorded in association with substrate processing in a substrate processing system and a video of the processing from start to finish, the substrate processing system including a substrate processing apparatus including a processing vessel and a control device that performs the processing on the substrate therein, an imaging device that images the inside of the processing vessel through an observation window of the processing vessel, a management server that manages the video imaged and transmitted by the imaging device and information transmitted from the substrate processing apparatus, and a display device, the control device measuring time, performing the processing on the substrate based on a predetermined process recipe, and acquiring processing status information of the inside of the processing vessel as the processing progresses according to the measured time, and displaying at least the processing status information of the processing vessel when the processing is completed. A log file composed of substrate processing information including a recipe and the processing status information is created, and a time measured at the time the log file was created is assigned to the log file as a first time. The log file is transmitted to the management server at a first time interval, and a time measured at the control device is transmitted to the management server at a second time interval shorter than the first time interval as a second time. The management server receives the video from the imaging device and assigns to the video the second time that was latest received from the control device at the time when reception of the video was completed. The display device simultaneously displays the substrate processing information in the log file managed by the management server and the video assigned the second time that is closest to the first time assigned to the log file. Effect of the Invention

[0006] According to the technology of the present disclosure, it is possible to display corresponding moving image files and substrate processing information on the same screen. [Brief description of the drawings]

[0007] [Figure 1] 1 is a block diagram illustrating a schematic configuration of a substrate processing system according to an embodiment of the technology disclosed herein; [Diagram 2]FIG. 2 is a cross-sectional view illustrating a schematic configuration of the film forming apparatus of FIG. [Diagram 3] FIG. 2 is a diagram for explaining the configuration of an imaging device according to the present embodiment. [Figure 4] 4 is a diagram for explaining an image of the inside of the processing vessel captured by the camera in FIG. 3. FIG. [Diagram 5] 2 is a block diagram illustrating a schematic hardware configuration of a management server of FIG. 1. [Figure 6] 2 is a block diagram illustrating a schematic hardware configuration of the information processing device in FIG. 1. [Figure 7] 1. FIG. 4 is a diagram showing a procedure of a composite display control process executed in the substrate processing system of FIG. [Figure 8] FIG. 7 is a diagram showing an example of a confirmation screen displayed on the display unit in FIG. 6. [Figure 9] 9 is a diagram for explaining the interlocking of the seek bar and the slide bar in FIG. 8. FIG. [Figure 10] 9 is a diagram for explaining the operation of a seek bar and a slide bar based on the setting of a step selection section in FIG. 8. FIG. [Figure 11] 9 is a diagram for explaining the functions of operation buttons constituting the toolbar in FIG. 8. FIG. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0008] The video file and the substrate processing information included in the log file stored in the management server are used, for example, when analyzing an abnormality that occurs during plasma processing. When performing such an analysis, a mechanism is required that allows easy confirmation of the video file and the substrate processing information. As such a mechanism, a mechanism is being considered in which corresponding video files and substrate processing information are displayed on the same screen. In order to perform such display control, the management server needs to associate the video file and the substrate processing information received from different devices, and it is being considered to associate them using the generation times of these files.

[0009] However, as described above, if the device that gives the generation time of the video file is different from the device that gives the generation time of the log file, and the times of these devices do not match, the video file and the log file cannot be properly associated with each other, and as a result, the substrate processing information contained in the corresponding video file and log file cannot be displayed on the same screen.

[0010] In contrast, the technology disclosed herein shares corresponding video files and log files based on the time measured by a control device of a substrate processing apparatus, and links the files using this reference time.

[0011] Hereinafter, an embodiment of the technology according to the present disclosure will be described with reference to the drawings.

[0012] FIG. 1 is a block diagram showing a schematic configuration of a substrate processing system 1 according to an embodiment of the technology disclosed herein. In FIG. 1, the substrate processing system 1 is composed of a film forming apparatus 10, a photographing device 22, a management server 50, and an information processing device 60. In the substrate processing system 1, the management server 50 saves and manages a log file composed of substrate processing information including parameters related to a film forming process performed on a substrate G inside a processing vessel 11 (to be described later) of the film forming apparatus 10. The management server 50 also saves and manages a video file for playing a video of the inside of the processing vessel 11 of the film forming apparatus 10 captured by the photographing device 22. Furthermore, the information processing device 60 causes a display unit 67 (to be described later) of the information processing device 60 to display the video file and the log file managed by the management server 50.

[0013] Fig. 2 is a cross-sectional view showing a schematic configuration of the film forming apparatus 10 shown in Fig. 1. The film forming apparatus 10 shown in Fig. 2 is an inductively coupled plasma processing apparatus (substrate processing apparatus). The film forming apparatus 10 performs a film forming process to form a protective film or the like on a substrate, for example, a rectangular glass substrate G (hereinafter referred to as "substrate G") for an FPD (Flat Panel Display), by using plasma generated from a processing gas.

[0014] The film forming apparatus 10 includes a processing vessel 11 having a rectangular cylindrical shape and made of a conductive material, and the processing vessel 11 accommodates a substrate G. In the present embodiment, for ease of explanation, the film forming apparatus 10 includes one processing vessel 11, but the film forming apparatus 10 may include a plurality of other processing vessels having the same configuration as the processing vessel 11. The upper portion of the processing vessel 11 is airtightly sealed by a window member 12. Inside the processing vessel 11, a mounting table 13 for mounting the substrate G thereon is disposed at the lower portion, and the mounting table 13 faces the window member 12. In the processing vessel 11, a processing space U is formed between the mounting table 13 and the window member 12. In the processing space U, plasma is generated from a processing gas, as described later.

[0015] An electrostatic chuck (not shown) is provided on the upper surface of the mounting table 13. The substrate G placed on the mounting table 13 is attracted and held to the mounting table 13 by the electrostatic chuck. A temperature control mechanism such as a chiller and a heat transfer gas supply mechanism (neither of which are shown) are provided inside the mounting table 13 to control the temperature of the placed substrate G. The mounting table 13 is installed on the bottom surface of the processing vessel 11 via an insulating frame 14.

[0016] A metal frame 15 is provided at the upper end of the sidewall of the processing vessel 11, and a sidewall portion 16 is provided on the upper surface of the metal frame 15. The sidewall portion 16 supports a top plate 17, and the top plate 17 covers the window member 12 from above. A seal member 18 such as an O-ring is provided between the sidewall of the processing vessel 11 and the metal frame 15 to keep the processing space U airtight.

[0017] One side wall of the processing vessel 11 is provided with a loading / unloading port 19 for loading / unloading the substrate G into / from the processing space U, and a gate valve 20 for opening / closing the loading / unloading port 19. The other side wall of the processing vessel 11 is provided with a monitoring window 21 (observation window) in which an optically transparent member is airtightly fitted, and an imaging device 22 for monitoring the inside of the processing vessel 11 through the monitoring window 21 is provided outside the processing vessel 11. The imaging device 22 may be composed of a plurality of cameras, and in this embodiment, as an example, the imaging device 22 is composed of two cameras 22a and 22b that capture images of the inside of the processing vessel 11 from different angles, as shown in FIG. 3.

[0018] The camera 22a photographs the inside of the processing vessel 11 through the monitoring window 21a, and the camera 22b photographs the inside of the processing vessel 11 through a monitoring window 21b provided at a position different from that of the monitoring window 21a. In this embodiment, the images photographed by the cameras 22a and 22b are not still images but videos. For example, each of the videos photographed by the cameras 22a and 22b includes information on the state of the inside of the processing vessel 11 when the film formation process is performed on the substrate G placed on the mounting table 13. The cameras 22a and 22b transmit video files for playing the videos of the inside of the processing vessel 11 photographed to the management server 50. In this embodiment, neither the cameras 22a and 22b have a clock function nor a time-imposing function. Therefore, the video files generated by the cameras 22a and 22b are given the generation time by the management server 50 having a time-imposing function, not by the cameras 22a and 22b that generated them.

[0019] The window member 12 is made of a conductor, for example, a metal, has a rectangular shape, and is divided into a plurality of segments 23, with a partition member 24 made of an insulator disposed between each of the adjacent segments 23. The partition members 24 separate the adjacent segments 23 and electrically insulate them from each other.

[0020] In the film forming apparatus 10, the space surrounded by the window member 12, the side wall portion 16, and the top plate 17 constitutes an antenna chamber 25. In the antenna chamber 25, an inductive coupling antenna 26 is disposed so as to face the substrate G on the mounting table 13 via the window member 12. Moreover, the inductive coupling antenna 26 is disposed across the regions facing each of the divided pieces 23 as a whole, and is formed in a spiral shape so as to go around in the circumferential direction of the window member 12, but the shape of the inductive coupling antenna 26 is not limited to a spiral shape.

[0021] Each divided piece 23 has a number of gas holes 27 formed therein, which open toward the processing space U. A gas supply pipe 28 is connected to each divided piece 23, and the gas supply pipe 28 is connected to a gas supply device 29. A gas diffusion chamber 30 is formed inside each divided piece 23, and the gas supply device 29 introduces processing gas into the gas diffusion chamber 30 via the gas supply pipe 28. The processing gas introduced into the gas diffusion chamber 30 is supplied to the processing space U from each gas hole 27.

[0022] In the film forming apparatus 10, the high frequency power supply 32 is connected to the inductive coupling antenna 26 via a matching box 31. The high frequency power supply 32 supplies high frequency power for generating plasma, for example, 13.56 MHz, to the inductive coupling antenna 26. As a result, in each of the divided pieces 23 constituting the window member 12, an eddy current is induced that circulates from the upper surface (the inductive coupling antenna 26 side) to the lower surface (the processing space U side), and this eddy current forms an induced electric field in the processing space U. Then, this induced electric field excites the processing gas supplied to the processing space U to generate plasma. In the above embodiment, the case where the window member 12 is made of a conductor such as a metal has been described, but the window member 12 may be made of a dielectric material. In this case, the electric field formed by the inductive coupling antenna 26 passes through the window member 12 and acts directly on the processing gas to generate plasma.

[0023] Furthermore, a high frequency power supply 34 is connected to the mounting table 13 via a matching box 33. The high frequency power supply 34 supplies, for example, a high frequency bias power of 3.2 MHz to the mounting table 13. This allows various ions in the plasma in the processing space U to be attracted to the substrate G, thereby performing a film formation process for forming various films on the substrate G. Note that the film formation apparatus 10 may also perform an etching process on the substrate G by attracting various ions to the substrate G. In this case, the film formation apparatus 10 functions as an etching apparatus.

[0024] Furthermore, in the film forming apparatus 10, an exhaust port 35 is formed on the bottom surface of the processing vessel 11. An exhaust device 36 such as a turbo molecular pump or a dry pump is connected to the exhaust port 35. When performing the film forming process, the exhaust device 36 maintains the processing space U at a predetermined pressure lower than atmospheric pressure. In addition, the film forming apparatus 10 is provided with a control unit 37. The control unit 37 is composed of a computer having at least a CPU and a memory, and a process recipe (program) for performing a predetermined film forming process is recorded in the memory. The process recipe is composed of a plurality of steps, and includes, for example, information indicating the type of one or more processing gases supplied to the processing vessel 11 and information indicating the flow rate of the processing gas, information indicating one or two high frequency powers supplied to the processing vessel 11, and information indicating a DC voltage applied to an electrostatic chuck that holds the substrate G inside the processing vessel 11.

[0025] The control unit 37 also has a clock function for generating time and a clock function for measuring time, and acquires processing status information inside the processing vessel 11 as the film formation process progresses according to the measured time. The processing status information includes, for example, information indicating the pressure and temperature inside the processing vessel 11. Furthermore, the control unit 37 generates a processing content log, which is a log file composed of substrate processing information, at the time when the film formation process is completed. The substrate processing information includes a process recipe, processing status information, and substrate identification information. The substrate identification information includes a substrate ID (identification code) for identifying the substrate G subjected to the film formation process in the film formation apparatus 10 and a PC (Process Chamber) number indicating the processing vessel 11 in which the film formation process was performed. The control unit 37 assigns a first time, which is the time measured at the time when the processing content log is generated, to the processing content log, and transmits the processing content log to the management server 50 at a first predetermined time interval. The first time interval is, for example, about 5 minutes to 1 hour. When the film forming apparatus 10 includes only one processing vessel 11 as in this embodiment, the substrate identification information may include only the substrate ID without including the PC number.

[0026] Furthermore, the control unit 37 transmits the time measured by the control unit 37 at a second time interval shorter than the first time interval to the management server 50 as the second time. The second time interval is, for example, about 0.5 to 1 second. Both the first time and the second time are generated by a clock included in the control unit 37, but the first time is given meaning by being added to the processing content log, and the second time is given meaning by being transmitted to the management server 50.

[0027] Fig. 4(A) is a diagram for explaining an image of the inside of the processing vessel 11 captured by the camera 22a in Fig. 3, and Fig. 4(B) is a diagram for explaining an image of the inside of the processing vessel 11 captured by the camera 22b in Fig. 3. Note that Fig. 4(A) and Fig. 4(B) each show a captured image of one frame among a plurality of frames constituting a moving image captured by the cameras 22a and 22b.

[0028] As described above, the camera 22a captures the state of the inside of the processing vessel 11 through the monitoring window 21a, specifically, the state of the film forming process performed on the substrate G from start to finish, and obtains a video including the captured image of FIG. 4(A). The camera 22b captures the state of the inside of the processing vessel 11 through the monitoring window 21b provided at a position different from the monitoring window 21a, and obtains a video including the captured image of FIG. 4(B). The captured image of FIG. 4(A) and the captured image of FIG. 4(B) each include structural members inside the processing vessel 11, such as the mounting table 13 and the substrate G mounted on the mounting table 13. Then, the cameras 22a and 22b each transmit a video file for playing the video to the management server 50. The management server 50 stores the received video file and provides the video file to the information processing device 60 in response to a request received from the information processing device 60.

[0029] Fig. 5 is a block diagram showing a schematic hardware configuration of the management server 50 in Fig. 1. In Fig. 5, the management server 50 includes a CPU 51, a ROM 52, a RAM 53, a HDD 54, a communication I / F 55, and an input / output I / F 56, which are connected to each other via a system bus 57 so as to be able to communicate with each other.

[0030] The CPU 51 is a microprocessor that performs overall control of the management server 50. Specifically, the CPU 51 reads out programs stored in the ROM 52 or HDD 54, and executes the programs deployed on the RAM 53. The ROM 52 stores the programs and the like to be executed by the CPU 51. The RAM 53 is used as the main memory of the CPU 51, and is also used as an area for temporarily storing programs and data.

[0031] The HDD 54 stores various data and programs executed by the CPU 51. For example, the HDD 54 saves video files received from the camera 22a and the camera 22b, processing content logs received from the control unit 37, and the like. Note that, in the present embodiment, a configuration in which the management server 50 includes an HDD as an example of a storage device will be described, but the management server 50 may include a storage device other than an HDD, such as an SSD.

[0032] The communication I / F 55 is an interface for the management server 50 to communicate with an external device. For example, the communication I / F 55 receives a video file from the image capturing device 22. The communication I / F 55 also receives a second time and a processing content log from the control unit 37. The communication by the communication I / F 55 is realized by various communication technologies, whether wireless or wired. The input / output I / F 56 is connected to an output device such as a display that displays various information, and an input device such as a mouse or a keyboard for use by a user.

[0033] Fig. 6 is a block diagram showing a schematic hardware configuration of the information processing device 60 shown in Fig. 1. The information processing device 60 is, for example, a personal computer. The information processing device 60 includes a CPU 61, a ROM 62, a RAM 63, a HDD 64, a communication I / F 65, and an input / output I / F 66, which are connected to each other via a system bus 69 so as to be able to communicate with each other.

[0034] The CPU 61 is a microprocessor that performs overall control of the information processing device 60. Specifically, the CPU 61 reads out programs stored in the ROM 62 or HDD 64, and executes the programs deployed on the RAM 63. The ROM 62 stores the programs and the like to be executed by the CPU 61. The RAM 63 is used as the main memory of the CPU 61, and is also used as an area for temporarily storing programs and data.

[0035] The HDD 64 stores various data and programs executed by the CPU 61. Note that, in the present embodiment, a configuration in which the information processing device 60 includes an HDD as an example of a storage device will be described, but the information processing device 60 may include a storage device other than an HDD, such as an SSD.

[0036] The communication I / F 65 is an interface for the information processing device 60 to communicate with an external device. For example, the communication I / F 65 receives a video file or a processing content log from the management server 50. Note that communication by the communication I / F 65 is realized by various communication technologies, whether wireless or wired. The input / output I / F 66 is connected to a display unit 67 such as a display that displays various information, and an operation unit 68 such as a mouse and a keyboard that are used by the user.

[0037] Next, a composite display control process will be described in which the management server 50 stores a video file and a processing content log in the substrate processing system 1, and the information processing device 60 displays the video file and the processing content log stored in the management server 50 on the display unit 67.

[0038] FIG. 7 is a diagram showing a procedure of a composite display control process executed in the substrate processing system 1 of FIG.

[0039] In the composite display control process, first, when the control unit 37 of the film forming apparatus 10 receives an instruction from a user to start a film forming process for the substrate G, it sets the number of times the process recipe has been executed to "1" and instructs the cameras 22a and 22b to start capturing images. The control unit 37 also starts a film forming process for the substrate G placed on the mounting table 13 of the processing vessel 11 based on the process recipe recorded in the memory of the control unit 37. When the film forming process starts, the control unit 37 starts acquiring processing status information inside the processing vessel 11 as the film forming process progresses according to the clocked time. The processing status information is acquired at a predetermined cycle, for example, at a cycle of 100 msec. Furthermore, the control unit 37 transmits the number of times the process recipe has been executed, the substrate identification information, and the clocked second time to the management server 50 at a second time interval (S71). The second time received by the management server 50 is updated to the latest one. The management server 50 stores the received number of times the process recipe has been executed and the substrate identification information in association with each other. As described above, the second time interval is about 0.5 to 1 second.

[0040] Meanwhile, upon receiving the instruction to start shooting, cameras 22a and 22b shoot images of the inside of processing vessel 11 through monitoring windows 21a and 21b, respectively (S72). Cameras 22a and 22b shoot videos at a frame rate of, for example, 25 fps, and continue shooting until receiving an instruction to stop shooting transmitted from control unit 37 when the film formation process is completed. That is, cameras 22a and 22b shoot images of the inside of processing vessel 11 from the start to the end of the film formation process.

[0041] When the cameras 22a and 22b receive an instruction to end shooting from the control unit 37, they generate a moving image file for playing the shot moving image, and transmit the generated moving image file to the management server 50 (S73). As described above, since neither the cameras 22a and 22b has a clock function, the generation time of these moving image files is not added in the cameras 22a and 22b. Also, while the moving image file is being created and transmitted, the second time is transmitted from the control unit 37 to the management server 50 at the second time interval and updated.

[0042] When the management server 50 completes receiving the moving image file, it assigns a generation time to the received moving image file and stores it in the HDD 54. For example, when the management server 50 completes receiving the moving image file transmitted from the camera 22a, it assigns the latest second time received from the control unit 37 to the moving image file as the generation time and stores it in the HDD 54 (S74). Similarly, the moving image file transmitted from the camera 22b is also assigned a generation time and stored in the HDD 54. Thus, in this embodiment, the management server 50 assigns the generation time to the moving image files generated by the cameras 22a and 22b. The assigned generation time is not the time measured by the management server 50, but the time measured by the control unit 37 of the film forming apparatus 10 (the second time). Even if the cameras 22a and 22b have their own clocking function, it is preferable to re-assign the latest second time at the time the moving image file is received by the management server 50 from the viewpoint of time discrepancy.

[0043] On the other hand, when the film formation process is completed, the control unit 37 of the film formation apparatus 10 generates a process content log composed of substrate processing information (S75). As described above, the control unit 37 assigns to the process content log the first time measured at the time the process content log is generated as the generation time of the process content log. The control unit 37 stores the generated process content log, for example, in the memory of the control unit 37. Thereafter, the control unit 37 performs the processes of S71 to S75 on the next substrate. In this manner, a plurality of process content logs are stored in the memory of the control unit 37.

[0044] Next, the control unit 37 transmits the processing content log stored in the memory of the control unit 37 to the management server 50 at a first time interval (S76). Note that the first time interval is about 5 minutes to 1 hour, as described above.

[0045] The management server 50 stores the received processing content log in the HDD 54 (S77). The number of times the process recipe has been executed and the substrate identification information transmitted from the control unit 37 in S71 are stored in association with each other in the HDD 54 of the management server 50. The management server 50 associates the number of times the process recipe has been executed with the processing content log using the substrate identification information and the substrate identification information included in the processing content log stored in S77.

[0046] Thereafter, the management server 50 provides the information processing device 60 with a video file and a processing content log corresponding to the request in accordance with the request received from the information processing device 60 (S78). For example, when the management server 50 receives a request specifying a substrate ID indicating a substrate G, the management server 50 acquires from the HDD 54 two video files having different shooting angles, the two video files being assigned a generation time (second time) that is closest to the generation time (first time) of a processing content log including substrate processing information including the substrate ID. Furthermore, the management server 50 acquires from the HDD 54 a processing content log including substrate processing information including the specified substrate ID. Then, the management server 50 provides the two acquired video files and processing content log to the information processing device 60. That is, the management server 50 provides to the information processing device 60 a processing content log including substrate processing information including the specified substrate ID, and two video files being assigned a generation time that is closest to the generation time of the processing content log.

[0047] Thereafter, the information processing device 60 displays the confirmation screen 80 of FIG. 8 on the display unit 67 based on the received processing content log and two moving image files (S79).

[0048] Fig. 8 is a diagram showing an example of a confirmation screen 80 displayed on display unit 67 in Fig. 6. The confirmation screen 80 is made up of a first moving image display area 81, a second moving image display area 83, a substrate processing information display area 85, a substrate identification information display area 88, and a toolbar 89.

[0049] In the first moving image display area 81, the moving image file received in S79, for example, the moving image file created by the camera 22a, and a slide bar 82 for displaying the time of the frame to be displayed in the moving image file are displayed. In the second moving image display area 83, the moving image file received in S79, for example, the moving image file created by the camera 22b, and a slide bar 84 for displaying the time of the frame to be displayed in the moving image file are displayed. By moving the slide bar 82 or the slide bar 84, a frame of an arbitrary time may be displayed in the first moving image display area 81 and the second moving image display area 83. The slide bar 82 and the slide bar 84 can be moved by dragging the slide bars on a touch panel or by keyboard operation, or by any other commonly used method. The time of the frame displayed in the first moving image display area 81 and the time of the frame displayed in the second moving image display area 83 are calculated based on the second time.

[0050] In the substrate processing information display area 85, at least a part of the data of the substrate processing information included in the processing content log received in S79 is displayed as a time chart, and this time chart has an indicator indicating the time of the substrate processing information to be displayed. This allows the user to check the data included in the substrate processing information along with the video file for each time. The time of the substrate processing information is calculated based on the first time.

[0051] As an index showing the time of the substrate processing information, for example, a seek bar 86 capable of selecting any time in this time chart is displayed in the substrate processing information display area 85. Since both the first time and the second time are based on the time generated by the clock function of the control unit 37, the seek bar 86 based on the first time works in conjunction with the slide bars 82 and 84 based on the second time. The seek bar 86 is an example of a time selection means.

[0052] For example, when the user moves the seek bar 86 to the 400 msec position as shown in Fig. 9(A), the slide bar 82 and the slide bar 84 also move to the 400 msec position in conjunction with the seek bar 86. As a result, in the first moving image display area 81 and the second moving image display area 83, moving images are played back from the frame corresponding to 400 msec based on the moving image file received in S79.

[0053] Also, when the user moves the seek bar 86 to the 700 msec position as shown in FIG. 9B, the slide bar 82 and the slide bar 84 also move to the 700 msec position in conjunction with the seek bar 86. In this embodiment, the cameras 22a and 22b shoot at 25 fps (40 msec cycle), so that the first moving image display area 81 and the second moving image display area 83 each play a moving image from a frame corresponding to 680 msec, which is closest to 700 msec, based on the moving image file received in S79. By providing such a seek bar 86, the user can check the image at the desired time in the moving image file while checking the data at the desired time in the substrate processing information. To move the seek bar 86, a commonly used method can be used, such as dragging the seek bar 86 on a touch panel or moving it by keyboard operation.

[0054] Furthermore, in the substrate processing information display area 85, a step selection section 87 for selecting any one of a plurality of steps in the process recipe is displayed. For example, when the user selects "Step-2" in the step selection section 87, as shown in FIG. 10, the seek bar 86 moves to the position of 12 sec, which is the start time of "Step-2". In addition, in conjunction with the seek bar 86, the slide bar 82 and the slide bar 84 also move to the position of 12 sec. As a result, in the first moving image display area 81 and the second moving image display area 83, the moving image is played from the frame corresponding to 12 sec based on the moving image file received in S79. By providing such a step selection section 87, the user can check the data included in the processing content log together with the moving image file for each step. The step selection section 87 is an example of a time selection means.

[0055] The board identification information display area 88 displays the board identification information included in the processing content log received in S79. The toolbar 89 includes a plurality of operation buttons, such as a one frame back button 90 and a one frame forward button 91 shown in Fig. 11(A), a 10 sec back button 92 and a 10 sec forward button 93 shown in Fig. 11(B), and a repeat start button 94 and a repeat end button 95 shown in Fig. 11(C). The one frame back button 90 and the one frame forward button 91, the 10 sec back button 92 and the 10 sec forward button 93, the repeat start button 94 and the repeat end button 95 are each an example of a time selection means.

[0056] For example, when the user presses the stop button 96 to stop the video and display a still image, and then selects the step back button 90, the frame one frame earlier from the stopped still image is displayed in each of the first video display area 81 and the second video display area 83. When the user selects the step forward button 91, the frame one frame earlier from the stopped still image is displayed in each of the first video display area 81 and the second video display area 83.

[0057] Furthermore, when the user selects the 10 sec rewind button 92, the first moving image display area 81 and the second moving image display area 83 each play a moving image from a frame 10 seconds back based on the moving image file received in S79. Furthermore, when the user selects the 10 sec forward button 93, the first moving image display area 81 and the second moving image display area 83 each play a moving image from a frame 10 seconds forward based on the moving image file received in S79. Note that, after pressing the stop button 96 to create a still image, when the 10 sec rewind button 92 or the 10 sec forward button 93 is selected, a frame 10 seconds back or 10 seconds forward from the stopped still image is displayed, respectively.

[0058] Furthermore, when the user specifies a time range with the repeat start button 94 and the repeat end button 95, the video within the specified time range is repeatedly played back based on the video file received in S79 in the first video display area 81 and the second video display area 83. Providing such a repeat start button 94 and a repeat end button 95 allows the user to easily identify the time at which a particular phenomenon occurred.

[0059] As described above, according to the present embodiment, the control unit 37 creates a processing content log consisting of substrate processing information including a process recipe and processing state information when the film formation process is completed, and assigns a first time measured at the time when the processing content log is created to the processing content log and transmits the processing content log to the management server 50 at a first time interval. The control unit 37 also transmits a second time measured at a second time interval shorter than the first time interval to the management server 50. The management server 50 receives a moving image file from each of the cameras 22a and 22b, and assigns to the moving image file the latest second time received from the control unit 37 at the time when the management server 50 has completed receiving the moving image file. The information processing device 60 simultaneously displays the substrate processing information of the processing content log managed by the management server 50 and the moving image file to which the second time closest to the first time assigned to the processing content log has been assigned. That is, the substrate processing information and the moving image file are both linked using the first time and the second time measured by the control unit 37. This makes it possible to accurately match the video file with the processing content log even if the reference times of the film forming apparatus 10 and the management server 50 do not match, thereby allowing the corresponding video file and substrate processing information to be displayed on the same screen.

[0060] Furthermore, in this embodiment, the processing state information includes at least information indicating the pressure inside processing vessel 11, and the process recipe includes at least information indicating the type of one or more processing gases supplied to processing vessel 11 and information indicating the flow rates of the processing gases, information indicating one or two high frequency powers supplied to processing vessel 11, and information indicating a DC voltage applied to an electrostatic chuck that holds substrate G inside processing vessel 11. This allows the video file and this information to be displayed on the same screen, allowing the user to easily check the processing state while matching the video file with this information.

[0061] In this embodiment, the video files received by management server 50 from cameras 22a and 22b are video files created by cameras 22a and 22b by capturing images from the start to the end of a process. This allows the video files created by cameras 22a and 22b to be associated with the processing content log and displayed on the same screen.

[0062] In this embodiment, the photographing device 22 is composed of at least a camera 22a that photographs the inside of the processing vessel 11 and a camera 22b that photographs the inside of the processing vessel 11 from an angle different from that of the camera 22a. This allows the user to check the state of the inside of the processing vessel 11 from multiple viewpoints.

[0063] Furthermore, in this embodiment, substrate processing information in a processing content log managed by management server 50 and including a substrate ID specified by a user, and a moving image file to which a second time closest to a first time given to the processing content log including the substrate processing information is assigned are simultaneously displayed. This allows the user to easily understand which substrate the displayed moving image file and substrate processing information relate to.

[0064] Although the preferred embodiments of the present disclosure have been described above, the present disclosure is not limited to the above-described embodiments, and various modifications and changes are possible within the scope of the gist of the present disclosure.

[0065] For example, the management server 50 may not be a single physical server, but may be a cloud server in which one or more virtualized servers are available via the Internet.

[0066] Furthermore, management server 50 may be configured with a first server that stores moving image files and a second server that manages information indicating the storage destination of the moving image files. Even in such a configuration in which moving image files are managed by a plurality of servers, corresponding moving image files and substrate processing information can be displayed on the same screen.

[0067] In the above-described embodiment, the configuration in which the photographing device 22 generates a video file and transmits the video file to the management server 50 has been described, but the present invention is not limited to this configuration. For example, the photographing device 22 may transmit the photographed video to the management server 50 in real time, and the management server 50 may generate a video file for playing the received video. Even in such a configuration, the management server 50 assigns the latest second time received from the control unit 37 at the time when the reception of the video is completed to the video file for playing the video. That is, even in this case, the substrate processing information and the video file can be linked using the first time and the second time measured by the control unit 37. Therefore, even in the configuration in which the management server 50 generates a video file, the corresponding video file and the substrate processing information can be displayed on the same screen.

[0068] In the above-mentioned embodiment, the processing apparatus for performing the film formation process on a rectangular substrate, particularly a glass substrate, has been described, but is not limited thereto. The substrate may be of other shapes such as a circle in addition to a rectangle, and may be a substrate made of other materials such as a silicon (Si) wafer or a silicon carbide (SiC) wafer in addition to a glass substrate. In accordance with this, the processing vessel may have a shape corresponding to the substrate to be processed, such as a cylindrical shape in addition to the above-mentioned square tube shape. The processing apparatus is not limited to a film formation apparatus, and may be an etching apparatus or an ashing apparatus that performs other processes on the substrate. In addition to the above-mentioned inductively coupled plasma apparatus, the processing apparatus may be a plasma processing apparatus using other methods such as a capacitively coupled plasma apparatus or a microwave plasma apparatus, or may be an apparatus that does not use plasma. [Explanation of symbols]

[0069] 1. Substrate Processing System 10 Film deposition equipment 22 Imaging Equipment 22a Camera 22b Camera 37 Control Unit 50 Management Server 51 CPU 54 HDD 60 Information processing equipment 61 CPU 67 Display section 80 Confirmation Screen 81 First video display area 83 Second video display area 85 Substrate processing information display area 86 Seek Bar 87 Step selection section 88 Board identification information display area 94 Repeat Start Button 95 Repeat end button

Claims

1. A display method for simultaneously displaying information recorded in association with a substrate processing in a substrate processing system and a video of the processing from start to finish, the method comprising: The substrate processing system includes: a substrate processing apparatus including a processing vessel for performing the processing on the substrate therein and a control device; an imaging device for imaging the inside of the processing vessel through an observation window of the processing vessel; a management server that manages the moving image captured by the imaging device and transmitted therefrom and information transmitted from the substrate processing apparatus; A display device, The control device includes: Keeping time, performing the processing on the substrate based on a predetermined process recipe, and acquiring processing state information inside the processing vessel as the processing progresses according to the measured time; creating a log file including substrate processing information including at least the process recipe and the processing status information when the processing is completed, and adding a time measured when the log file was created as a first time to the log file; transmitting the log file to the management server at a first time interval; a second time interval that is shorter than the first time interval, the second time interval being a time measured by the control device, the second time being transmitted to the management server; The management server includes: receiving the video from the imaging device; adding the latest second time received from the control device to the video at the time when reception of the video is completed; The display device includes: A display method for simultaneously displaying the substrate processing information of a log file managed by the management server and a video assigned with the second time that is closest to the first time assigned to the log file.

2. the processing state information includes at least information indicating an internal pressure of the processing vessel, 2. The display method according to claim 1, wherein the process recipe includes at least information indicating the type of one or more gases supplied to the processing vessel and information indicating the flow rates of the gases, information indicating one or two high frequency powers supplied to the processing vessel, and information indicating a DC voltage applied to an electrostatic chuck that holds the substrate inside the processing vessel.

3. The display method according to claim 1 , wherein the video that the management server receives from the imaging device is a video file that the imaging device has created by imaging the video from the start to the end of the process.

4. The display method described in claim 3, wherein the photographing device is composed of at least a first camera that photographs the inside of the processing vessel and a second camera that photographs the inside of the processing vessel from an angle different from that of the first camera, and the first camera and the second camera each create the video file.

5. 2. The display method according to claim 1, wherein the display device displays at least a portion of the data included in the log file as a time chart together with the video, and the time chart is provided with an indicator indicating time.

6. 6. The display method according to claim 5, wherein said display device displays a time selection means for selecting an arbitrary time within a range of execution times of said process contained in said log file.

7. 7. The display method according to claim 6, wherein the time selection means is an indicator indicating the time.

8. 7. The display method according to claim 6, wherein the process recipe is composed of a plurality of steps, and the time selection means is a step designation means for designating any one of the plurality of steps.

9. the time selection means is capable of specifying an arbitrary range of execution times; The display method according to claim 6 , wherein the display device repeatedly displays the movement of the indicator and the video in conjunction with each other within the range of the arbitrary execution time designated.

10. The substrate processing information further includes an identification code of the substrate, The display method according to claim 1, wherein the display device simultaneously displays the substrate processing information of a log file managed by the management server, the substrate processing information including an identification code of a substrate specified by a user, and a video assigned with the second time closest to the first time assigned to the log file including the substrate processing information.

11. The display method according to claim 1 , wherein the management server comprises a first server that stores the video and a second server that manages information indicating a destination where the video is stored.

12. A substrate processing system that simultaneously displays information recorded in association with a substrate processing and a video of the processing from start to finish, a substrate processing apparatus including a processing vessel for performing the processing on the substrate therein and a control device; an imaging device for imaging the inside of the processing vessel through an observation window of the processing vessel; a management server that manages the moving image captured by the imaging device and transmitted therefrom and information transmitted from the substrate processing apparatus; A display device, The control device includes: Keeping time, performing the processing on the substrate based on a predetermined process recipe, and acquiring processing state information inside the processing vessel as the processing progresses according to the measured time; creating a log file including substrate processing information including at least the process recipe and the processing status information when the processing is completed, and adding a time measured when the log file was created as a first time to the log file; transmitting the log file to the management server at a first time interval; a second time interval that is shorter than the first time interval, the second time interval being a time measured by the control device, the second time being transmitted to the management server; The management server includes: receiving the video from the imaging device; adding the latest second time received from the control device to the video at the time when reception of the video is completed; The display device includes: A substrate processing system that simultaneously displays the substrate processing information of a log file managed by the management server and a video assigned with the second time that is closest to the first time assigned to the log file.

13. 13. The substrate processing system according to claim 12, wherein the display device displays a time selection means for selecting an arbitrary time within a range of execution times of the process contained in the log file.

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