Resist composition, method for producing resist pattern, ammonium carboxylate, and resin

Abstract

To provide an ammonium carboxylate, a resist composition and the like which allow a resist pattern having a good pattern collapse margin to be produced.SOLUTION: A resist composition contains an ammonium carboxylate represented by a formula (I) or a structural unit derived therefrom. [In the formula, L1 and L10 each represent a single bond or a substituted / unsubstituted hydrocarbon group; R2 represents a halogen atom or a hydrocarbon group; m2 represents an integer of 0-6; Rbb1 represents an H atom, a halogen atom or the like; X10 represents a single bond, -O-, -CO-O-, -O-CO-O-, -CO-NR30- or the like and R30 represents an H atom or an alkyl group; and R3, R4, R5 and R6 each represent an H atom or a substituted / unsubstituted hydrocarbon group, wherein R3 and R4, or R3, R4 and R5 may be bonded together to form a cyclic hydrocarbon group, and the group may have a double bond between carbon atoms].SELECTED DRAWING: None

Description

Technical Field

[0001] The present invention relates to a resist composition, a method for producing a resist pattern, and an ammonium carboxylate salt and a resin.

Background Art

[0002] Patent Document 1 describes a compound having the following structure. TIFF2025081270000001.tif1940

[0003] Patent Document 2 describes a resist composition containing a resin containing the following structural unit. TIFF2025081270000002.tif1941

Prior Art Documents

Patent Documents

[0004]

Patent Document 1

Patent Document 2

Summary of the Invention

Problems to be Solved by the Invention

[0005] The present invention provides an ammonium carboxylate salt that forms a resist pattern having better pattern collapse resistance (PCM) than a resist pattern formed by a resist composition containing the above ammonium carboxylate salt.

Means for Solving the Problems

[0006] The present invention includes the following inventions. [1] A resist composition containing an ammonium carboxylate salt represented by formula (I) or a structural unit represented by formula (IP). TIFF2025081270000003.tif77129[In formula (I) and formula (IP), L 1 and L 10 each independently represents a hydrocarbon group having 1 to 40 carbon atoms which may have a single bond or a substituent, and -CH 2 - in the hydrocarbon group may be replaced by -O-, -S-, -SO 2 - or -CO-. R 2 represents a halogen atom or a hydrocarbon group having 1 to 36 carbon atoms, the hydrocarbon group may have a substituent, and -CH 2 - in the hydrocarbon group may be replaced by -O-, -S-, -CO-, -SO- or -SO 2 -. m2 represents any integer from 0 to 6, and when m2 is 2 or more, a plurality of R 2 may be the same as or different from each other. R bb1 represents a hydrogen atom, a halogen atom or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. X 10 represents a single bond, *-O-**, *-CO-O-**, *-O-CO-O-**, *-CO-NR 30 -**, *-NR 30 -CO-O-**, *-O-CO-NR 30 -** or *-Ax-Ph-Ay-**. R 30 represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. Ph represents a phenylene group which may have a substituent. Ax and Ay each independently represent one or more bond types selected from the group consisting of a single bond, an ether bond, a thioether bond, an ester bond, an amide bond and a carbonate ester bond. * and ** represent bonding sites, and * represents the bonding site with the carbon atom to which R bb1 is bonded. R 3 R 4 R 5 and R 6 each independently represent a hydrogen atom or a hydrocarbon group having 1 to 20 carbon atoms which may have a substituent, and -CH2 - may be replaced by -O-, -S-, -NR 7 -, -SO 2 - or -CO-, and R 3 and R 4 , R 5 and R 6 or R 3 and R 4 and R 5 may combine to form a cyclic hydrocarbon group having 3 to 20 carbon atoms. The cyclic hydrocarbon group may have a double bond between one or more adjacent pairs of carbon atoms, and the -CH 2 - in the cyclic hydrocarbon group may be replaced by -O-, -CO- or -NR 7 -, and the -CH= in the cyclic hydrocarbon group may be replaced by -N=. R 7 represents a hydrogen atom or a hydrocarbon group having 1 to 20 carbon atoms which may have a substituent. The -CH 2 - in the hydrocarbon group may be replaced by -O-, -S-, -SO 2 - or -CO-. [2] X 10 is a single bond or a group represented by any one of formula (X 10 -1) to formula (X 10 -10) in the resist composition according to [1]. TIFF2025081270000004.tif43162 [In formula (X 10 -1) to formula (X 10 -10), *, ** are bonding sites, and * represents the bonding site with the carbon atom to which R bb1 is bonded. Rx represents a halogen atom, a hydroxy group, a C1-6 fluoroalkyl group, a C1-18 alkyl group or a C1-6 alkoxy group. mx represents any integer from 0 to 4. X 20 represents -O- or -NR 30 -. R 30 represents a hydrogen atom or a C1-6 alkyl group. [3] m2 is an integer of 1 or more, R 2 is an iodine atom, a fluorine atom, a haloalkyl group having 1 to 6 carbon atoms, or an alkyl group having 1 to 6 carbon atoms (the -CH 2 - in the alkyl group and the haloalkyl group may be replaced by -O- or -CO-). The resist composition according to [1] or [2]. [4]L 1 is a single bond, *-L 2 -, or *-L 2 -X 3 -L 3 -(L 2 represents a chain hydrocarbon group having 1 to 10 carbon atoms which may have a substituent, a cyclic hydrocarbon group having 3 to 24 carbon atoms which may have a substituent, or a combination of a cyclic hydrocarbon group having 3 to 24 carbon atoms which may have a substituent and a chain hydrocarbon group having 1 to 8 carbon atoms which may have a substituent. The -CH 2 - contained in the cyclic hydrocarbon group may be replaced by -O-, -S-, -CO-, or -SO 2 -, and the -CH 2 - contained in the chain hydrocarbon group may be replaced by -O- or -CO-. * represents the bonding site with the carbonyl group. X 3 represents **-CO-O-, **-O-CO-, **-O-CO-O-, or **-O-, and ** represents the bonding site with L 2 . L 3 represents a single bond or a chain hydrocarbon group having 1 to 8 carbon atoms which may have a substituent. The -CH 2 - contained in the chain hydrocarbon group may be replaced by -O- or -CO-. L 2 , X 3 and L 3 The total number of carbon atoms contained in does not exceed 40. The resist composition according to any one of [1] to [3]. [5] The resist composition according to any one of [1] to [4], containing an ammonium carboxylate salt represented by formula (I). [6] The resist composition according to any one of [1] to [5], containing a resin containing a structural unit represented by formula (IP). [7] The resist composition according to any one of [1] to [6], containing an acid generator having an acid-labile group or a resin containing a structural unit having an acid-labile group. [8] The resist composition according to any one of [1] to [7], containing a resin containing a structural unit represented by formula (IP) and a structural unit having an acid-labile group. [9] The resist composition according to any one of [1] to [8], containing a resin containing a structural unit having an acid-labile group, wherein the structural unit having an acid-labile group includes at least one selected from the group consisting of a structural unit represented by formula (a1-0), a structural unit represented by formula (a1-1), a structural unit represented by formula (a1-2), a structural unit represented by formula (a1-4), a structural unit represented by formula (a1-5), and a structural unit represented by formula (a1-6). TIFF2025081270000005.tif44144[In formula (a1-0), formula (a1-1) and formula (a1-2), L a01 , L a1 and L a2 each independently represents -O- or *-O-(CH 2 ) k1 -CO-O-, k1 represents an integer of 1 to 7, and * represents the bonding site with -CO-. R a01 , R a4 and R a5 each independently represents a hydrogen atom, a halogen atom or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. R a02 , R a03 and R a04 each independently represents an alkyl group having 1 to 8 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms or a group combining these, and the alkyl group, the alicyclic hydrocarbon group and the aromatic hydrocarbon group may have a halogen atom. R a6 and R a7Each independently represents an alkyl group having 1 to 8 carbon atoms, an alkenyl group having 2 to 8 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a group formed by combining these, and the alkyl group, the alkenyl group, the alicyclic hydrocarbon group, and the aromatic hydrocarbon group may have a halogen atom. m1’ represents any integer from 0 to 14. n1 represents any integer from 0 to 10. n1’ represents any integer from 0 to 3. TIFF2025081270000006.tif31118[In formula (a1-4), R a1 represents a hydrogen atom, a halogen atom, or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. R a17 represents a halogen atom, a hydroxy group, a carboxy group, an alkyl group having 1 to 6 carbon atoms which may have a halogen atom, an alkoxy group having 1 to 6 carbon atoms, an alkoxyalkyl group having 2 to 12 carbon atoms, an alkoxyalkoxy group having 2 to 12 carbon atoms, an alkylcarbonyl group having 2 to 4 carbon atoms, an alkylcarbonyloxy group having 2 to 4 carbon atoms, an acryloyloxy group, or a methacryloyloxy group. A a11 represents a single bond or an alkanediyl group having 1 to 12 carbon atoms, and -CH 2 - contained in the alkanediyl group may be replaced by -O-, -CO-, or -NR a18 -. R a18 represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. X a1 represents a single bond or a carbonyl group. R a34 and R a35 each independently represent a hydrogen atom or a hydrocarbon group having 1 to 12 carbon atoms, R a36 represents a hydrocarbon group having 1 to 20 carbon atoms, or R a35 and R a36 are bonded to each other to form a divalent hydrocarbon group having 2 to 20 carbon atoms together with the -C-O- to which they are bonded, and -CH2 - may be replaced by -O- or -S-. na1 represents any integer from 1 to 5. When na1 is 2 or more, the groups within multiple parentheses may be the same as or different from each other. na11 represents any integer from 0 to 4. When na11 is 2 or more, multiple Rs a17 may be the same as or different from each other. mc represents any integer from 0 to 2.] TIFF2025081270000007.tif4558[In formula (a1-5), R a8 represents an alkyl group having 1 to 6 carbon atoms which may have a halogen atom, a hydrogen atom or a halogen atom. Z a1 represents a single bond or *-(CH 2 ) h3 -CO-L 54 -. h3 represents any integer from 1 to 4. * represents the bonding site with L 51 and L. L 51 L 52 L 53 and L 54 each independently represents -O- or -S-. s1 represents any integer from 1 to 3. s1’ represents any integer from 0 to 3.] TIFF2025081270000008.tif3479[In formula (a1-6), R a61 represents a hydrogen atom, a halogen atom or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. R a62 R a63 and R a64 each independently represents an alkyl group having 1 to 6 carbon atoms or a cyclic hydrocarbon group having 3 to 18 carbon atoms which may have a substituent, or R a62 and R a63 are bonded to each other to form a ring having 3 to 20 carbon atoms together with the carbon atom to which they are bonded. X a61represents a single bond, -CO-O-* or -CO-NR a65 -*, where * represents the bonding site with Ar, and R a65 represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. X a62 represents a single bond, *-O-L a61 - or *-CO-O-L a62 -, where * represents the bonding site with Ar, and L a61 and L a62 each independently represents an alkanediyl group having 1 to 4 carbon atoms. Ar represents an aromatic hydrocarbon group having 6 to 20 carbon atoms which may have substituents.]

[10] The resist composition according to any one of [1] to [9], containing a resin containing a structural unit represented by the formula (a2-A). TIFF2025081270000009.tif30128 [In the formula (a2-A), R a2 represents a hydrogen atom, a halogen atom or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. R a27 represents a halogen atom, a hydroxy group, a carboxy group, an alkyl group having 1 to 6 carbon atoms which may have a halogen atom, an alkoxy group having 1 to 6 carbon atoms, an alkoxyalkyl group having 2 to 12 carbon atoms, an alkoxyalkoxy group having 2 to 12 carbon atoms, an alkylcarbonyl group having 2 to 4 carbon atoms, an alkylcarbonyloxy group having 2 to 4 carbon atoms, an acryloyloxy group or a methacryloyloxy group. A a21 represents a single bond or an alkanediyl group having 1 to 12 carbon atoms, and -CH 2 - contained in the alkanediyl group may be replaced by -O-, -CO- or -NR a28 -. R a28 represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. X a2 represents a single bond or a carbonyl group. nA2 represents any integer from 1 to 5, and when nA2 is 2 or more, the groups in a plurality of parentheses may be the same as or different from each other. Na21 represents any integer from 0 to 4. When Na21 is 2 or more, a plurality of Rs a27 may be the same as or different from each other. Mc represents any integer from 0 to 2.]

[11] The resist composition according to any one of [1] to

[10] , containing the salt represented by formula (B1). TIFF2025081270000010.tif1395 [In formula (B1), L b1 represents a single bond or an (nb1 + 1)-valent hydrocarbon group which may have a substituent, and -CH 2 - in the hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO 2 -. L b2 represents a single bond or a divalent hydrocarbon group having 1 to 24 carbon atoms which may have a substituent, and -CH 2 - in the hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO 2 -. Y b1 represents a methyl group which may have a substituent or a cyclic hydrocarbon group having 3 to 24 carbon atoms which may have a substituent, and -CH 2 - in the cyclic hydrocarbon group may be replaced by -O-, -S-, -SO 2 - or -CO-. Nb1 represents any integer from 1 to 6. When nb1 is 2 or more, the groups in the plurality of parentheses may be the same as or different from each other. Z1 + represents an organic cation.]

[12] The resist composition according to any one of [1] to

[11] , further containing an acid generator and a salt which generates an acid having a lower acidity than the acid generated from the acid generator.

[13] (1) A step of applying the resist composition according to any one of [1] to

[12] onto a substrate, (2) A step of drying the applied resist composition to form a composition layer, (3) A step of exposing the composition layer, (4) A step of heating the composition layer after exposure, and (5) A step of developing the composition layer after heating, which is a method for manufacturing a resist pattern.

[14] The ammonium carboxylate salt represented by the above formula (I).

[15] A resin containing a structural unit represented by the above formula (IP). [Effect of the Invention]

[0007] By using the resist composition containing the ammonium carboxylate salt or the structural unit of the present invention, a resist pattern can be manufactured with good pattern collapse resistance (PCM). [Embodiments for Carrying Out the Invention]

[0008] In this specification, the “(meth)acrylic monomer” means “at least one of an acrylic monomer and a methacrylic monomer”. Notations such as “(meth)acrylate” and “(meth)acrylic acid” also represent the same meaning. Among the groups described in this specification, those that can take both a linear structure and a branched structure may be either of them. When -CH 2 - is replaced by -O-, -S-, -CO- or -SO 2 -, the same examples are applied to each group, and the number of carbon atoms before replacement is taken as the number of carbon atoms of the hydrocarbon group or the like. The “combined group” means a group formed by bonding two or more of the exemplified groups, and the valences of these groups may be appropriately changed depending on the bonding form. “Derived from” or “induced” means that the polymerizable C = C bond contained in the molecule becomes a -C-C- group (single bond) by polymerization. When stereoisomers exist, all stereoisomers are included. Depending on the number of substituents and the like, any position and number of hydrogen atoms contained in the group may be replaced by a bonding site. The number of carbon atoms in the substituent is not included in the number of carbon atoms of the substituent. In this specification, the "acid-labile group" means a group having a leaving group, which, when contacted with an acid (e.g., trifluoromethanesulfonic acid, etc.), the leaving group leaves to form a hydrophilic group (e.g., hydroxy group or carboxy group, etc.). The "base-labile group" means a group having a leaving group, which, when contacted with a base (e.g., trimethylamine, etc.), the leaving group leaves to form a hydrophilic group (e.g., carboxy group or hydroxy group, etc.). The "solid content of the resist composition" means the total of the components excluding the solvent (E) described later from the total amount of the resist composition.

[0009] [ammonium carboxylate represented by formula (I)] The present invention relates to an ammonium carboxylate represented by formula (I) (hereinafter sometimes referred to as "ammonium carboxylate (I)" or "salt (I)"). Among salts (I), the side having a negative charge may be referred to as "anion (I)", and the side having a positive charge may be referred to as "cation (I)". TIFF2025081270000011.tif36114[wherein all symbols have the same meanings as described above respectively.]

[0010] (anion (I) In formula (I), L 1 and L 10 Examples of the hydrocarbon group of are a divalent linear or branched chain hydrocarbon group such as an alkanediyl group, a divalent alicyclic hydrocarbon group of a monocyclic or polycyclic (including spiro ring, condensed ring or bridged ring, etc.), a divalent cyclic hydrocarbon group such as a divalent aromatic hydrocarbon group, and a group formed by combining two or more of these groups (e.g., a divalent hydrocarbon group formed from an alicyclic hydrocarbon group or an aromatic hydrocarbon group and a chain hydrocarbon group) may also be used. The chain hydrocarbon group and the alicyclic hydrocarbon group are also referred to as aliphatic hydrocarbon groups, and the alicyclic hydrocarbon group, the aliphatic hydrocarbon group and the aromatic hydrocarbon group are also referred to as cyclic hydrocarbon groups. The carbon number of the hydrocarbon group is preferably 1 to 38, more preferably 1 to 36, still more preferably 1 to 32, and even more preferably 1 to 28. Examples of the alkanediyl group include linear alkanediyl groups such as methylene group, ethylene group, propane-1,3-diyl group, butane-1,4-diyl group, pentane-1,5-diyl group, hexane-1,6-diyl group, heptane-1,7-diyl group, octane-1,8-diyl group, nonane-1,9-diyl group, decane-1,10-diyl group, undecane-1,11-diyl group, dodecane-1,12-diyl group, tridecane-1,13-diyl group, tetradecane-1,14-diyl group, pentadecane-1,15-diyl group, hexadecane-1,16-diyl group, and heptadecane-1,17-diyl group, and branched alkanediyl groups such as ethane-1,1-diyl group, propane-1,1-diyl group, propane-1,2-diyl group, propane-2,2-diyl group, pentane-2,4-diyl group, 2-methylpropane-1,3-diyl group, 2-methylpropane-1,2-diyl group, pentane-1,4-diyl group, 2-methylbutane-1,4-diyl group. The terminal of the branched alkanediyl group may be an alkyl group such as a methyl group. The number of carbon atoms of the chain hydrocarbon group may be 1 to 36, examples thereof include 1 to 28, preferably 1 to 18, more preferably 1 to 12, still more preferably 1 to 10, even more preferably 1 to 8, still even more preferably 1 to 7, still more preferably 1 to 6, even more preferably 1 to 5, and particularly preferably 1 to 4. Examples of the monocyclic or polycyclic divalent alicyclic hydrocarbon group include the following alicyclic hydrocarbon groups. The bonding site can be at any position. TIFF2025081270000012.tif47169Specifically, monocyclic divalent alicyclic hydrocarbon groups which are monocyclic cycloalkanediyl groups such as cyclobutane-1,3-diyl group, cyclopentane-1,3-diyl group, cyclohexane-1,4-diyl group, cyclooctane-1,5-diyl group, and Examples of the polycyclic divalent alicyclic hydrocarbon group include a polycyclic spiro ring such as a spiro ring having a cycloalkanediyl group such as a norbornane-1,4-diyl group, a norbornane-2,5-diyl group, an adamantane-1,5-diyl group, an adamantane-2,6-diyl group, a spirocyclohexane-1,2'-cyclopentane-diyl group, a spiroadamantane-2,3'-cyclopentane-diyl group, etc., a norbornyl group or an adamantyl group, each having a cycloalkanediyl group spiro-bonded thereto. The alicyclic hydrocarbon group may have 3 to 36 carbon atoms, examples thereof include 3 to 28, preferably 3 to 24, more preferably 3 to 20, still more preferably 3 to 18, even more preferably 3 to 16, and still even more preferably 3 to 12. Examples of the divalent aromatic hydrocarbon group include aromatic hydrocarbon groups such as arylene groups such as a phenylene group, a naphthylene group, an anthrylene group, a biphenylene group, a phenanthrylene group, etc. The aromatic hydrocarbon group may have 6 to 36 carbon atoms, examples thereof include 6 to 28, preferably 6 to 24, more preferably 6 to 20, still more preferably 6 to 18, even more preferably 6 to 14, and still even more preferably 6 to 10.

[0011] Examples of the group formed by combining two or more types include a group formed by combining an alicyclic hydrocarbon group and a chain hydrocarbon group, a group formed by combining an aromatic hydrocarbon group and a chain hydrocarbon group, a group formed by combining an alicyclic hydrocarbon group and an aromatic hydrocarbon group, a group formed by combining an alicyclic hydrocarbon group, a chain hydrocarbon group, and an aromatic hydrocarbon group, etc. In the combination, the alicyclic hydrocarbon group, the aromatic hydrocarbon group, and the chain hydrocarbon group may each be combined with two or more types. Also, any of the groups may be bonded to a carbonyl group or X 10 and may be bonded thereto. Examples of the group formed by combining an alicyclic hydrocarbon group and a chain hydrocarbon group include, for example, -alicyclic hydrocarbon group-chain hydrocarbon group-, -chain hydrocarbon group-alicyclic hydrocarbon group-chain hydrocarbon group-, -chain hydrocarbon group-alicyclic hydrocarbon group-, etc. Examples of a group combining an aromatic hydrocarbon group and a chain hydrocarbon group include -aromatic hydrocarbon group-chain hydrocarbon group-, -chain hydrocarbon group-aromatic hydrocarbon group-chain hydrocarbon group-, -chain hydrocarbon group-aromatic hydrocarbon group-, etc. Examples of a group combining an alicyclic hydrocarbon group and an aromatic hydrocarbon group include -aromatic hydrocarbon group-alicyclic hydrocarbon group-, -alicyclic hydrocarbon group-aromatic hydrocarbon group-, -alicyclic hydrocarbon group-aromatic hydrocarbon group-alicyclic hydrocarbon group-, a group formed by condensation of an alicyclic hydrocarbon group and an aromatic hydrocarbon group, etc. L 1 and L 10 The -CH 2 - in the hydrocarbon group having 1 to 40 carbon atoms of L 2 - may be replaced by -O-, -S-, -SO L 1 and L 10 When the -CH 2 - in the hydrocarbon group having 1 to 40 carbon atoms of L 2 - is replaced by -O-, -S-, -SO - or -CO-, the number of carbon atoms before replacement is taken as the number of carbon atoms of the hydrocarbon group. 2 Examples of a group in which the -CH 2 - in the hydrocarbon group is replaced by -O-, -S-, -SO 2 - or -CO- include a hydroxy group (a group in which the -CH 2 -CH 2 - in the methyl group is replaced by -O-), a carboxy group (a group in which the -CH 2 - in the ethyl group is replaced by -O-CO-), a thiol group (a group in which the -CH 2 - in the alkyl group at any position is replaced by -S-), an alkoxy group (a group in which the -CH 2 -CH 2 - in the alkyl group at any position is replaced by -O-CO-), an alkoxycarbonyl group (a group in which the -CH 2 - in the alkyl group at any position is replaced by -SO 2-replaced group), alkylcarbonyl group (a group in which -CH at any position in the alkyl group 2 -is replaced by -CO-), alkylcarbonyloxy group (a group in which -CH at any position in the alkyl group 2 -CH 2 -is replaced by -CO-O-), alkoxycarbonyloxy group (a group in which -CH at any position in the alkyl group 2 -CH 2 -CH 2 -is replaced by -O-CO-O-), alkanediyl-oxy group (a group in which -CH at any position in the alkanediyl group 2 -is replaced by -O-), alkanediyl-oxycarbonyl group (a group in which -CH at any position in the alkanediyl group 2 -CH 2 -is replaced by -O-CO-), alkanediylcarbonyl group (a group in which -CH at any position in the alkanediyl group 2 -is replaced by -CO-), alkanediylcarbonyl-oxy group (a group in which -CH at any position in the alkanediyl group 2 -CH 2 -is replaced by -CO-O-), alkanediylsulfonyl group (a group in which -CH at any position in the alkanediyl group 2 -is replaced by -SO 2 -replaced group), alkylthio group (a group in which -CH at any position in the alkyl group 2 -is replaced by -S-), alkanediylthio group (a group in which -CH at any position in the alkanediyl group 2 -is replaced by -S-), oxy group (a group in which -CH in the methylene group 2 -is replaced by -O-), carbonyl group (a group in which -CH in the methylene group 2 -is replaced by -CO-), thio group (a group in which -CH in the methylene group 2 -is replaced by -S-), sulfonyl group (a group in which -CH in the methylene group 2 -is replaced by -SO 2-replaced group), cycloalkoxy group, cycloalkylalkoxy group, aromatic hydrocarbon group-carbonyl oxy group, aromatic hydrocarbon group-carbonyl group, aromatic hydrocarbon group-oxy group, and groups formed by combining two or more of these groups, etc. can be mentioned.

[0012] Examples of the alkoxy group include alkoxy groups having 1 to 39 carbon atoms, such as methoxy group, ethoxy group, propoxy group, butoxy group, pentyloxy group, hexyloxy group, octyloxy group, 2-ethylhexyloxy group, nonyloxy group, decyloxy group, undecyloxy group and the like. The number of carbon atoms of the alkoxy group is preferably 1 to 17, more preferably 1 to 11, still more preferably 1 to 6, even more preferably 1 to 4, and even more preferably 1 to 3. Examples of the alkoxycarbonyl group include alkoxycarbonyl groups having 2 to 39 carbon atoms, such as methoxycarbonyl group, ethoxycarbonyl group, butoxycarbonyl group and the like. Examples of the alkylcarbonyl group include alkylcarbonyl groups having 2 to 40 carbon atoms, such as acetyl group, propionyl group and butyryl group. Examples of the alkylcarbonyloxy group include alkylcarbonyloxy groups having 2 to 39 carbon atoms, such as acetyloxy group, propionyloxy group, butyryloxy group and the like. Examples of the alkoxycarbonyloxy group include alkoxycarbonyloxy groups having 2 to 38 carbon atoms, such as butoxycarbonyloxy group. The number of carbon atoms of the alkoxycarbonyl group is preferably 2 to 17, more preferably 2 to 11, still more preferably 2 to 6, even more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms of the alkylcarbonyl group is preferably 2 to 18, more preferably 2 to 12, still more preferably 2 to 6, even more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms of the alkylcarbonyloxy group is preferably 2 to 17, more preferably 2 to 11, still more preferably 2 to 6, even more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms of the alkoxycarbonyloxy group is preferably 2 to 16, more preferably 2 to 10, still more preferably 2 to 6, even more preferably 2 to 4, and even more preferably 2 or 3. Examples of the alkylsulfonyl group include alkylsulfonyl groups having 1 to 39 carbon atoms, such as methylsulfonyl group, ethylsulfonyl group, propylsulfonyl group, butylsulfonyl group, pentylsulfonyl group, hexylsulfonyl group, octylsulfonyl group, 2-ethylhexylsulfonyl group, nonylsulfonyl group, decylsulfonyl group, undecylsulfonyl group and the like. The number of carbon atoms of the alkylsulfonyl group is preferably 1 to 17, more preferably 1 to 11, still more preferably 1 to 6, even more preferably 1 to 4, and even more preferably 1 to 3. Examples of the alkanediyl-oxy group include alkanediyl-oxy groups having 1 to 39 carbon atoms, such as a methylene-oxy group, an ethylene-oxy group, a propanediyl-oxy group, a butanediyl-oxy group, and a pentanediyl-oxy group. The number of carbon atoms of the alkanediyl-oxy group is preferably 1 to 17, more preferably 1 to 11, still more preferably 1 to 6, even more preferably 1 to 4, and even more preferably 1 to 3. Examples of the alkanediyl-oxycarbonyl group include alkanediyl-oxycarbonyl groups having 2 to 39 carbon atoms, such as a methylene-oxycarbonyl group, an ethylene-oxycarbonyl group, a propanediyl-oxycarbonyl group, and a butanediyl-oxycarbonyl group. Examples of the alkanediyl-carbonyl group include alkanediyl-carbonyl groups having 2 to 40 carbon atoms, such as a methylene-carbonyl group, an ethylene-carbonyl group, a propanediyl-carbonyl group, a butanediyl-carbonyl group, and a pentanediyl-carbonyl group. Examples of the alkanediyl-carbonyl-oxy group include alkanediyl-carbonyl-oxy groups having 2 to 39 carbon atoms, such as a methylene-carbonyl-oxy group, an ethylene-carbonyl-oxy group, a propanediyl-carbonyl-oxy group, and a butanediyl-carbonyl-oxy group. The number of carbon atoms of the alkanediyl-oxycarbonyl group is preferably 2 to 17, more preferably 2 to 11, still more preferably 2 to 6, even more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms of the alkanediyl-carbonyl group is preferably 2 to 18, more preferably 2 to 12, still more preferably 2 to 6, even more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms of the alkanediyl-carbonyl-oxy group is preferably 2 to 17, more preferably 2 to 11, still more preferably 2 to 6, even more preferably 2 to 4, and even more preferably 2 or 3. Examples of the alkylthio group include alkylthio groups having 1 to 39 carbon atoms, such as methylthio group, ethylthio group, propylthio group, pentylthio group, hexylthio group, octylthio group, 2-ethylhexylthio group, nonylthio group, decylthio group, undecylthio group and the like. The number of carbon atoms of the alkylthio group is preferably 1 to 17, more preferably 1 to 11, still more preferably 1 to 6, even more preferably 1 to 4, and even more preferably 1 to 3. Examples of the alkanediylsulfonyl group include alkanediylsulfonyl groups having 1 to 39 carbon atoms, such as methylenesulfonyl group, ethylenesulfonyl group, propylenesulfonyl group and the like. The number of carbon atoms of the alkanediylsulfonyl group is preferably 1 to 17, more preferably 1 to 11, still more preferably 1 to 6, even more preferably 1 to 4, and even more preferably 1 to 3. Examples of the alkanediylthio group include alkanediylthio groups having 1 to 39 carbon atoms, such as methylenethio group, ethylenethio group, propylenethio group and the like. The number of carbon atoms of the alkanediylthio group is preferably 1 to 17, more preferably 1 to 11, still more preferably 1 to 6, even more preferably 1 to 4, and even more preferably 1 to 3. Examples of the cycloalkoxy group include cycloalkoxy groups having 3 to 39 carbon atoms, such as cyclohexyloxy group and the like. Examples of the cycloalkylalkoxy group include cycloalkylalkoxy groups having 4 to 39 carbon atoms, such as cyclohexylmethoxy group and the like. Examples of the aromatic hydrocarbon group-carbonyloxy group include aromatic hydrocarbon group-carbonyloxy groups having 7 to 39 carbon atoms, such as benzoyloxy group and the like. Examples of the aromatic hydrocarbon group-carbonyl group include aromatic hydrocarbon group-carbonyl groups having 7 to 40 carbon atoms, such as benzoyl group and the like. Examples of the aromatic hydrocarbon group-oxy group include aromatic hydrocarbon group-oxy groups having 6 to 39 carbon atoms, such as phenyloxy group and the like.

[0013] In addition, -CH contained in the alicyclic hydrocarbon group2 - is, -O-, -S-, -CO- or -SO 2 Examples of the group replaced by - include the following groups and the like. -O- or -CO- of the groups shown below may be replaced by -S- or -SO 2 - and the bonding site can be at any position. TIFF2025081270000013.tif47168

[0014] L 1 and L 10 Examples of the substituent that the chain hydrocarbon group contained in L 1 and L 10 may have include a halogen atom, a cyano group, a nitro group, and the like. Also, examples of the substituent that the cyclic hydrocarbon group contained in L 1 and L 10 may have include a halogen atom, a cyano group, a nitro group, and the like. When -CH 2 - contained in the hydrocarbon group of L 2 and L 1 is replaced by -O-, -CO-, -S- or -SO 10 L 1 and L 10 can have substituents such as a hydroxy group, a carboxy group, an alkoxy group, an alkylcarbonyl group, an alkoxycarbonyl group, an alkylcarbonyloxy group, a thiol group, an alkylthio group, an alkylsulfonyl group, and the like. When L Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom. The substituent is preferably a hydroxy group or a halogen atom. L 1 and L 10 The hydrocarbon group may have one substituent or a plurality of substituents.

[0015] L 1is a single bond, an optionally substituted chain hydrocarbon group having 1 to 18 carbon atoms (provided that -CH contained in the chain hydrocarbon group 2 - may be replaced by -O- or -CO-), an optionally substituted cyclic hydrocarbon group having 3 to 24 carbon atoms (provided that -CH contained in the cyclic hydrocarbon group 2 - may be replaced by -O-, -S-, -CO- or -SO 2 -), or a group formed by combining an optionally substituted chain hydrocarbon group having 1 to 16 carbon atoms and an optionally substituted cyclic hydrocarbon group having 3 to 24 carbon atoms (provided that -CH contained in the chain hydrocarbon group 2 - may be replaced by -O- or -CO-, and -CH contained in the cyclic hydrocarbon group 2 - may be replaced by -O-, -S-, -SO 2 - or -CO-). It may also be a single bond, an optionally substituted chain hydrocarbon group having 1 to 10 carbon atoms (provided that -CH contained in the chain hydrocarbon group 2 - may be replaced by -O- or -CO-), an optionally substituted cyclic hydrocarbon group having 3 to 24 carbon atoms (provided that -CH contained in the cyclic hydrocarbon group 2 - may be replaced by -O-, -S-, -CO- or -SO 2 -), or a group formed by combining an optionally substituted chain hydrocarbon group having 1 to 8 carbon atoms and an optionally substituted cyclic hydrocarbon group having 3 to 24 carbon atoms (provided that -CH contained in the chain hydrocarbon group 2 - may be replaced by -O- or -CO-, and -CH contained in the cyclic hydrocarbon group 2 - may be replaced by -O-, -S-, -SO 2 - or -CO-). More preferably, it is a single bond, an optionally substituted chain hydrocarbon group having 1 to 8 carbon atoms (provided that -CH contained in the chain hydrocarbon group 2 - may be replaced by -O- or -CO-), an optionally substituted cyclic hydrocarbon group having 3 to 20 carbon atoms (provided that -CH contained in the cyclic hydrocarbon group 2 - may be replaced by -O-, -S-, -CO- or -SO 2- may be replaced therewith. ) or a group formed by combining a linear hydrocarbon group having 1 to 6 carbon atoms which may have a substituent and a cyclic hydrocarbon group having 3 to 20 carbon atoms which may have a substituent (provided that -CH 2 - in the linear hydrocarbon group may be replaced with -O- or -CO-, and -CH 2 - in the cyclic hydrocarbon group may be replaced with -O-, -S-, -SO 2 - or -CO-. ) is more preferably the case, a single bond, a linear hydrocarbon group having 1 to 7 carbon atoms which may have a substituent (provided that -CH 2 - in the linear hydrocarbon group may be replaced with -O- or -CO-), a cyclic hydrocarbon group having 3 to 18 carbon atoms which may have a substituent (provided that -CH 2 - in the cyclic hydrocarbon group may be replaced with -O- or -CO-), or a group formed by combining a linear hydrocarbon group having 1 to 5 carbon atoms which may have a substituent and a cyclic hydrocarbon group having 3 to 18 carbon atoms which may have a substituent (provided that -CH 2 - in the linear hydrocarbon group may be replaced with -O- or -CO-, and -CH 2 - in the cyclic hydrocarbon group may be replaced with -O- or -CO-. ) is even more preferably the case. Also, L 1 is a single bond, *-L 2 -, or *-L 2 -X 3 -L 3 -(L 2 represents a linear hydrocarbon group having 1 to 10 carbon atoms which may have a substituent, a cyclic hydrocarbon group having 3 to 24 carbon atoms which may have a substituent, or a group formed by combining a cyclic hydrocarbon group having 3 to 24 carbon atoms which may have a substituent and a linear hydrocarbon group having 1 to 8 carbon atoms which may have a substituent, and -CH 2 - in the cyclic hydrocarbon group may be replaced with -O-, -S-, -CO- or -SO 2 -, and -CH 2 - in the linear hydrocarbon group may be replaced with -O- or -CO-. * represents the bonding site with the carbonyl group. X 3represents **-CO-O-, **-O-CO-, **-O-CO-O- or **-O-, and ** represents the bonding site with L 2 represents the bonding site with L 3 represents a single bond or a chain hydrocarbon group having 1 to 8 carbon atoms which may have a substituent, and -CH 2 - contained in the chain hydrocarbon group may be replaced by -O- or -CO-. L 2 , X 3 and L 3 The total number of carbon atoms contained in L The combination of the chain hydrocarbon group and the cyclic hydrocarbon group includes *-chain hydrocarbon group - alicyclic hydrocarbon group or aromatic hydrocarbon group -, *-alicyclic hydrocarbon group or aromatic hydrocarbon group - chain hydrocarbon group -, *-chain hydrocarbon group - alicyclic hydrocarbon group or aromatic hydrocarbon group - chain hydrocarbon group -, etc. * represents the bonding site with the carbonyl group.

[0016] L 2 and L 3 Examples of the substituents that L 1 may have include the same groups as those listed as the substituents that L L 2 Examples of the cyclic hydrocarbon group of L 1 include alicyclic hydrocarbon groups, aromatic hydrocarbon groups, or groups formed by condensing these, and the same groups as those exemplified by L L 2 and L 3 Examples of the chain hydrocarbon group of L 1 include the same groups as those exemplified by L L 2 is a chain hydrocarbon group having 1 to 8 carbon atoms which may have a substituent (where -CH 2 - contained in the chain hydrocarbon group may be replaced by -O- or -CO-), a cyclic hydrocarbon group having 3 to 20 carbon atoms which may have a substituent (where -CH 2 - contained in the cyclic hydrocarbon group is -O-, -S-, -CO- or -SO 2- may be replaced by.) Or a group combining a cyclic hydrocarbon group having 3 to 20 carbon atoms which may have a substituent and a chain hydrocarbon group having 1 to 6 carbon atoms which may have a substituent (the -CH 2 - is -O-, -S-, -CO- or -SO 2 - may be replaced by, and the -CH 2 - in the chain hydrocarbon group may be replaced by -O- or -CO-.), A chain hydrocarbon group having 1 to 6 carbon atoms which may have a substituent (the -CH 2 - in the chain hydrocarbon group may be replaced by -O- or -CO-), a cyclic hydrocarbon group having 3 to 18 carbon atoms which may have a substituent (the -CH 2 - is -O-, -S-, -CO- or -SO 2 - may be replaced by.) Or a group combining a cyclic hydrocarbon group having 3 to 18 carbon atoms which may have a substituent and a chain hydrocarbon group having 1 to 4 carbon atoms which may have a substituent (the -CH 2 - is -O-, -S-, -CO- or -SO 2 - may be replaced by, and the -CH 2 - in the chain hydrocarbon group may be replaced by -O- or -CO-.) is more preferred. L 3 is preferably a single bond or a chain hydrocarbon group having 1 to 6 carbon atoms which may have a substituent, more preferably a single bond or a chain hydrocarbon group having 1 to 4 carbon atoms, even more preferably a single bond, a methylene group or an ethylene group, and even more preferably a single bond or a methylene group. Among them, L 1 is preferably a single bond or *-L 2 -X 3 -L 3 -. In this case, L 2 is preferably a cyclic hydrocarbon group having 3 to 18 carbon atoms which may have a substituent, and more preferably an aromatic hydrocarbon group having 6 to 18 carbon atoms which may have a substituent. X 3 is preferably **-CO-O- or **-O-CO-O-. L 3is preferably a chain hydrocarbon group having 1 to 4 carbon atoms, more preferably a chain hydrocarbon group having 1 or 2 carbon atoms.

[0017] L 10 is a single bond, a chain hydrocarbon group having 1 to 10 carbon atoms (provided that -CH contained in the chain hydrocarbon group 2 - may be replaced by -O- or -CO-), a cyclic hydrocarbon group having 3 to 18 carbon atoms (provided that the cyclic hydrocarbon group may have a substituent, and -CH contained in the cyclic hydrocarbon group 2 - may be replaced by -O-, -S-, -SO 2 - or -CO-), or a group formed by combining a chain hydrocarbon group having 1 to 8 carbon atoms and a cyclic hydrocarbon group having 3 to 18 carbon atoms (provided that the cyclic hydrocarbon group may have a substituent, and -CH contained in the chain hydrocarbon group 2 - may be replaced by -O- or -CO, and -CH contained in the cyclic hydrocarbon group 2 - may be replaced by -O-, -S-, -SO 2 - or -CO-), and may also be a single bond, an alkanediyl group having 1 to 6 carbon atoms (provided that -CH contained in the alkanediyl group 2 - may be replaced by -O- or -CO-), a cyclic hydrocarbon group having 3 to 18 carbon atoms (provided that the cyclic hydrocarbon group may have a substituent, and -CH contained in the cyclic hydrocarbon group 2 - may be replaced by -O-, -S-, -SO 2 - or -CO-), or a group formed by combining an alkanediyl group having 1 to 6 carbon atoms and a cyclic hydrocarbon group having 3 to 18 carbon atoms (provided that the cyclic hydrocarbon group may have a substituent, and -CH contained in the alkanediyl group 2 - may be replaced by -O- or -CO, and -CH contained in the cyclic hydrocarbon group 2 - may be replaced by -O-, -S-, -SO 2 - or -CO-), and it is more preferably a single bond, an alkanediyl group having 1 to 4 carbon atoms (provided that -CH contained in the alkanediyl group 2- may be replaced by -O- or -CO-.), an alicyclic hydrocarbon group having 3 to 18 carbon atoms (provided that -CH contained in the alicyclic hydrocarbon group 2 - may be replaced by -O-, -S-, -SO 2 - or -CO-.), an aromatic hydrocarbon group having 6 to 18 carbon atoms which may have a substituent, a group formed by combining an alkanediyl group having 1 to 4 carbon atoms and an alicyclic hydrocarbon group having 3 to 18 carbon atoms (provided that -CH contained in the alkanediyl group 2 - may be replaced by -O- or -CO-, and -CH contained in the alicyclic hydrocarbon group 2 - may be replaced by -O-, -S-, -SO 2 - or -CO-.), or a group formed by combining an alkanediyl group having 1 to 4 carbon atoms and an aromatic hydrocarbon group having 6 to 18 carbon atoms which may have a substituent (provided that -CH contained in the alkanediyl group 2 - may be replaced by -O- or -CO-. It is more preferable that it is, a single bond, an alkanediyl group having 1 to 4 carbon atoms (provided that -CH contained in the alkanediyl group 2 - may be replaced by -O- or -CO-.), an alicyclic hydrocarbon group having 3 to 18 carbon atoms (provided that -CH contained in the alicyclic hydrocarbon group 2 - may be replaced by -O- or -CO-.), a phenylene group which may have a substituent, a group formed by combining an alkanediyl group having 1 to 4 carbon atoms and an alicyclic hydrocarbon group having 3 to 18 carbon atoms (provided that -CH contained in the alkanediyl group 2 - may be replaced by -O- or -CO-, and -CH contained in the alicyclic hydrocarbon group 2 - may be replaced by -O- or -CO-.), or a group formed by combining an alkanediyl group having 1 to 4 carbon atoms and a phenylene group which may have a substituent (provided that -CH contained in the alkanediyl group 2 - may be replaced by -O- or -CO-. It is even more preferable that it is, a single bond or an alkanediyl group having 1 to 4 carbon atoms (provided that -CH contained in the alkanediyl group 2- may be replaced by -O- or -CO-. It is even more preferable that it is).

[0018] L 1 The bonding position of L to the naphthalene ring is not particularly limited, but the 1-position or 2-position of the naphthalene ring is preferred, and the 2-position is more preferred. L 10 The bonding position of L to the naphthalene ring is not particularly limited, but when L 1 is bonded to the 1-position or 2-position of the naphthalene ring, it is preferably any of the 2-4 and 6-8 positions of the naphthalene ring, and more preferably any of the 3 and 6-8 positions.

[0019] R 2 Examples of the halogen atom of R include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom. R 2 Examples of the hydrocarbon group having 1 to 36 carbon atoms of R include a chain hydrocarbon group such as an alkyl group and an alkanediyl group, an alicyclic hydrocarbon group, an aromatic hydrocarbon group, and a group formed by combining these. The number of carbon atoms of the hydrocarbon group is preferably 1 to 30, more preferably 1 to 24, and even more preferably 1 to 18. The alkyl group is a linear or branched alkyl group, and examples thereof include a methyl group, an ethyl group, an n-propyl group, an isopropyl group, an n-butyl group, a sec-butyl group, a tert-butyl group, a pentyl group, a hexyl group, a heptyl group, a 2-ethylhexyl group, an octyl group, a nonyl group, a decyl group, an undecyl group, and a dodecyl group. Examples of the alkanediyl group include linear or branched alkanediyl groups such as methylene group, ethylene group, propane-1,3-diyl group, butane-1,4-diyl group, pentane-1,5-diyl group, hexane-1,6-diyl group, heptane-1,7-diyl group, octane-1,8-diyl group, nonane-1,9-diyl group, decane-1,10-diyl group, undecane-1,11-diyl group, dodecane-1,12-diyl group, tridecane-1,13-diyl group, tetradecane-1,14-diyl group, pentadecane-1,15-diyl group, hexadecane-1,16-diyl group, and heptadecane-1,17-diyl group; and branched alkanediyl groups such as ethane-1,1-diyl group, propane-1,1-diyl group, propane-1,2-diyl group, propane-2,2-diyl group, pentane-2,4-diyl group, 2-methylpropane-1,3-diyl group, 2-methylpropane-1,2-diyl group, pentane-1,4-diyl group, 2-methylbutane-1,4-diyl group, etc. The number of carbon atoms in the chain hydrocarbon group is preferably 1 to 18, more preferably 1 to 12, still more preferably 1 to 9, even more preferably 1 to 6, still even more preferably 1 to 4, and still even more preferably 1 to 3. The alicyclic hydrocarbon group may be monocyclic or polycyclic, and examples include the groups represented below. The bonding site can be at any position. TIFF2025081270000014.tif45168Specifically, examples of the monocyclic alicyclic hydrocarbon group include monocyclic cycloalkyl groups such as cyclopropyl group, cyclobutyl group, cyclopentyl group, cyclohexyl group, cycloheptyl group, cyclooctyl group, cyclononyl group, cyclodecyl group, cyclododecyl group, etc. Examples of the polycyclic alicyclic hydrocarbon group include polycyclic cycloalkyl groups such as decahydronaphthyl group, adamantyl group, norbornyl group, etc., cycloalkyl groups such as spirocyclohexane-1,2'-cyclopentane group, spiroadamantane-2,3'-cyclopentane group, etc., and spiro rings having a cycloalkyl group bonded to each of the norbornyl group or adamantyl group by spiro linkage. The number of carbon atoms of the alicyclic hydrocarbon group is preferably 3 to 18, more preferably 3 to 16, and still more preferably 3 to 12. Examples of the aromatic hydrocarbon group include phenyl group, naphthyl group, biphenyl group, anthryl group, phenanthryl group, binaphthyl group, etc. The number of carbon atoms of the aromatic hydrocarbon group is preferably 6 to 18, more preferably 6 to 14, and still more preferably 6 to 10.

[0020] Among the chain hydrocarbon group, alicyclic hydrocarbon group, and aromatic hydrocarbon group, examples of the group formed by combining two or more of these groups include a group formed by combining an aromatic hydrocarbon group and a chain hydrocarbon group (for example, aromatic hydrocarbon group - alkanediyl group - *, alkyl group - aromatic hydrocarbon group - *, alkyl group - aromatic hydrocarbon group - alkanediyl group - *, -CH contained in the alkanediyl group and the alkyl group 2 - may be replaced by -O-, -CO-, -S- or -SO 2 -). Examples of the group formed by combining an alicyclic hydrocarbon group and a chain hydrocarbon group include alicyclic hydrocarbon group - alkanediyl group - *, alkyl group - alicyclic hydrocarbon group - *, alkyl group - alicyclic hydrocarbon group - alkanediyl group - *, -CH contained in the alicyclic hydrocarbon group, the alkanediyl group and the alkyl group 2 - may be replaced by -O-, -CO-, -S- or -SO 2- may be replaced by). A group combining an aromatic hydrocarbon group and an alicyclic hydrocarbon group (e.g., aromatic hydrocarbon group - alicyclic hydrocarbon group - *, alicyclic hydrocarbon group - aromatic hydrocarbon group - *, -CH contained in the alicyclic hydrocarbon group 2 - is -O-, -CO-, -S- or -SO 2 - may be replaced by). * represents a bonding site. Examples of the aromatic hydrocarbon group - alkanediyl group - * include aralkyl groups such as benzyl group and phenethyl group. Examples of the alkyl group - aromatic hydrocarbon group - * include tolyl group, xylyl group, cumenyl group and the like. Examples of the alicyclic hydrocarbon group - alkanediyl group - * include cycloalkylalkyl groups such as cyclohexylmethyl group, cyclohexylethyl group, 1-(adamantan-1-yl)methyl group, 1-(adamantan-1-yl)-1-methylethyl group and the like. Examples of the alkyl group - alicyclic hydrocarbon group - * include cycloalkyl groups having an alkyl group such as methylcyclohexyl group, dimethylcyclohexyl group, 2-alkyladamantan-2-yl group and the like. Examples of the aromatic hydrocarbon group - alicyclic hydrocarbon group - * include phenylcyclohexyl group and the like. Examples of the alicyclic hydrocarbon group - aromatic hydrocarbon group - * include cyclohexylphenyl group and the like. In the combination, the alicyclic hydrocarbon group, the aromatic hydrocarbon group, and the chain hydrocarbon group may be combined with two or more of each. Also, any of the groups may be bonded to the naphthalene ring.

[0021] R 2 -CH contained in the hydrocarbon group represented by 2 - is -O-, -CO-, -S-, -SO- or -SO 2 - When replaced by, the number of carbon atoms before replacement is taken as the total number of carbon atoms of the hydrocarbon group. Also, the number may be one or two or more. -CH contained in the hydrocarbon group 2 - is -O-, -CO-, -S-, -SO- or -SO2 - As the group replaced by, a hydroxy group (-CH contained in a methyl group 2 - where - is replaced by -O-), a thiol group (-CH contained in a methyl group 2 - where - is replaced by -S-), a carboxy group (-CH contained in an ethyl group 2 -CH 2 - where - is replaced by -O-CO-), an alkoxy group (-CH at any position contained in an alkyl group 2 - where - is replaced by -O-), an alkoxycarbonyl group (-CH at any position contained in an alkyl group 2 -CH 2 - where - is replaced by -O-CO-), an alkylcarbonyl group (-CH at any position contained in an alkyl group 2 - where - is replaced by -CO-), an alkylcarbonyloxy group (-CH at any position contained in an alkyl group 2 -CH 2 - where - is replaced by -CO-O-), an alkoxyalkoxy group (two -CH at any position contained in an alkyl group 2 - where - is replaced by -O-), an alkoxycarbonyloxy group (-CH at any position contained in an alkyl group 2 -CH 2 -CH 2 - where - is replaced by -O-CO-O-), an alkylthio group (-CH at any position contained in an alkyl group 2 - where - is replaced by -S-), an alkylsulfinyl group (-CH at any position contained in an alkyl group 2 - where - is replaced by -SO-), an alkylsulfonyl group (-CH at any position contained in an alkyl group 2 - where - is replaced by -SO 2 - where - is replaced by -), an oxy group (-CH contained in a methylene group 2 - where - is replaced by -O-), a carbonyl group (-CH contained in a methylene group 2 - where - is replaced by -CO-), a thio group (-CH contained in a methylene group 2 - where - is replaced by -S-), a sulfinyl group (-CH contained in a methylene group2 - is a group replaced by -SO-), a sulfonyl group (including -CH in the methylene group) 2 - is -SO 2 - is a group replaced by -SO-), an alkanediyl-oxy group (including -CH at any position in the alkanediyl group) 2 - is a group replaced by -O-), an alkanediyl-oxycarbonyl group (including -CH at any position in the alkanediyl group) 2 -CH 2 - is a group replaced by -O-CO-), an alkanediyl-carbonyl group (including -CH at any position in the alkanediyl group) 2 - is a group replaced by -CO-), an alkanediyl-carbonyl-oxy group (including -CH at any position in the alkanediyl group) 2 -CH 2 - is a group replaced by -CO-O-), an alkanediyl-thio group (including -CH at any position in the alkanediyl group) 2 - is a group replaced by -S-), an alkanediyl-sulfinyl group (including -CH at any position in the alkanediyl group) 2 - is a group replaced by -SO-), an alkanediyl-sulfonyl group (including -CH at any position in the alkanediyl group) 2 - is -SO 2 - is a group replaced by -SO-), a cycloalkoxy group, a cycloalkylalkoxy group, an aromatic hydrocarbon group-carbonyl-oxy group, an aromatic hydrocarbon group-carbonyl group, an aromatic hydrocarbon group-oxy group, a group formed by combining two or more of these groups, etc. Examples of the alkoxy group include alkoxy groups having 1 to 35 carbon atoms, such as methoxy group, ethoxy group, propoxy group, butoxy group, pentyloxy group, hexyloxy group, octyloxy group, 2-ethylhexyloxy group, nonyloxy group, decyloxy group, undecyloxy group, etc. The number of carbon atoms of the alkoxy group is preferably 1 to 11, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. Examples of the alkoxycarbonyl group include alkoxycarbonyl groups having 2 to 35 carbon atoms, such as methoxycarbonyl group, ethoxycarbonyl group, butoxycarbonyl group and the like. Examples of the alkylcarbonyl group include alkylcarbonyl groups having 2 to 36 carbon atoms, such as acetyl group, propionyl group and butyryl group. Examples of the alkylcarbonyloxy group include alkylcarbonyloxy groups having 2 to 35 carbon atoms, such as acetyloxy group, propionyloxy group, butyryloxy group and the like. Examples of the alkoxycarbonyloxy group include alkoxycarbonyloxy groups having 2 to 34 carbon atoms, such as butoxycarbonyloxy group. The number of carbon atoms of the alkoxycarbonyl group is preferably 2 to 11, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms of the alkylcarbonyl group is preferably 2 to 12, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms of the alkylcarbonyloxy group is preferably 2 to 11, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms of the alkoxycarbonyloxy group is preferably 2 to 10, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. Examples of the alkoxyalkoxy group include alkoxyalkoxy groups having 2 to 34 carbon atoms, such as methoxymethoxy group, methoxyethoxy group, ethoxymethoxy group, ethoxyethoxy group, propoxymethoxy group, isopropoxymethoxy group, butoxymethoxy group, sec-butoxymethoxy group, tert-butoxymethoxy group. The number of carbon atoms of the alkoxyalkoxy group is preferably 2 to 10, more preferably 2 to 8, still more preferably 2 to 6, even more preferably 2 to 4, and still even more preferably 2 or 3. Examples of the alkylthio group include alkylthio groups having 1 to 35 carbon atoms, such as methylthio group, ethylthio group, propylthio group, butylthio group, pentylthio group, hexylthio group, octylthio group, 2-ethylhexylthio group, nonylthio group, decylthio group, undecylthio group and the like. The number of carbon atoms of the alkylthio group is preferably 1 to 11, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. Examples of the alkylsulfinyl group include alkylsulfinyl groups having 1 to 35 carbon atoms, such as methylsulfinyl group, ethylsulfinyl group, propylsulfinyl group, butylsulfinyl group, pentylsulfinyl group, hexylsulfinyl group, octylsulfinyl group, 2-ethylhexylsulfinyl group, nonylsulfinyl group, decylsulfinyl group, undecylsulfinyl group and the like. The number of carbon atoms of the alkylsulfinyl group is preferably 1 to 11, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. Examples of the alkylsulfonyl group include alkylsulfonyl groups having 1 to 35 carbon atoms, such as methylsulfonyl group, ethylsulfonyl group, propylsulfonyl group, butylsulfonyl group, pentylsulfonyl group, hexylsulfonyl group, octylsulfonyl group, 2-ethylhexylsulfonyl group, nonylsulfonyl group, decylsulfonyl group, undecylsulfonyl group and the like. The number of carbon atoms of the alkylsulfonyl group is preferably 1 to 11, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. Examples of the alkanedioxy group include alkanedioxy groups having 1 to 35 carbon atoms, such as methyleneoxy group, ethyleneoxy group, propanediioxy group, butanediioxy group, pentanediioxy group and the like. The number of carbon atoms of the alkanedioxy group is preferably 1 to 11, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. Examples of the alkanediyl-oxycarbonyl group include alkanediyl-oxycarbonyl groups having 2 to 35 carbon atoms, such as a methylene-oxycarbonyl group, an ethylene-oxycarbonyl group, a propanediyl-oxycarbonyl group, and a butanediyl-oxycarbonyl group. Examples of the alkanediyl-carbonyl group include alkanediyl-carbonyl groups having 2 to 36 carbon atoms, such as a methylene-carbonyl group, an ethylene-carbonyl group, a propanediyl-carbonyl group, a butanediyl-carbonyl group, and a pentanediyl-carbonyl group. Examples of the alkanediyl-carbonyloxy group include alkanediyl-carbonyloxy groups having 2 to 35 carbon atoms, such as a methylene-carbonyloxy group, an ethylene-carbonyloxy group, a propanediyl-carbonyloxy group, and a butanediyl-carbonyloxy group. The number of carbon atoms in the alkanediyl-oxycarbonyl group is preferably 2 to 11, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms in the alkanediyl-carbonyl group is preferably 2 to 12, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms in the alkanediyl-carbonyloxy group is preferably 2 to 11, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. Examples of the alkanediyl-thio group include alkanediyl-thio groups having 1 to 35 carbon atoms, such as a methylene-thio group, an ethylene-thio group, and a propylene-thio group. The number of carbon atoms in the alkanediyl-thio group is preferably 1 to 11, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. Examples of the alkanediyl-sulfinyl group include alkanediyl-sulfinyl groups having 1 to 35 carbon atoms, such as a methylene-sulfinyl group, an ethylene-sulfinyl group, and a propylene-sulfinyl group. The number of carbon atoms in the alkanediyl-sulfinyl group is preferably 1 to 11, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. Examples of the alkanediylsulfonyl group include alkanediylsulfonyl groups having 1 to 35 carbon atoms, such as a methylenesulfonyl group, an ethylenesulfonyl group, a propylenesulfonyl group, and the like. The number of carbon atoms of the alkanediylsulfonyl group is preferably 1 to 11, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. Examples of the cycloalkoxy group include cycloalkoxy groups having 3 to 35 carbon atoms, such as a cyclohexyloxy group, and the like. Examples of the cycloalkylalkoxy group include cycloalkylalkoxy groups having 4 to 35 carbon atoms, such as a cyclohexylmethoxy group, and the like. Examples of the aromatic hydrocarbon group-carbonyl-oxy group include aromatic hydrocarbon group-carbonyl-oxy groups having 7 to 35 carbon atoms, such as a benzoyloxy group, and the like. Examples of the aromatic hydrocarbon group-carbonyl group include aromatic hydrocarbon group-carbonyl groups having 7 to 36 carbon atoms, such as a benzoyl group, and the like. Examples of the aromatic hydrocarbon group-oxy group include aromatic hydrocarbon group-oxy groups having 6 to 35 carbon atoms, such as a phenyloxy group, and the like.

[0022] In addition, -CH 2 - contained in the alicyclic hydrocarbon group is replaced by -O-, -S-, -SO 2 - or -CO-. Examples of the group include the groups represented below. Among the groups represented below, groups in which -O- is replaced by -S-, -CO- is replaced by -SO- or -SO 2 - are also included. The bonding site can be at any position. TIFF2025081270000015.tif45168

[0023] R 2 Examples of the substituent that the hydrocarbon group of may have include a halogen atom, a cyano group, a nitro group, and the like. -CH 2 contained in R 2 - is replaced by -O-, -S-, -CO- or -SO 2 - to substantially form R 2can have substituents such as a hydroxy group, a carboxy group, an alkoxy group, an alkoxycarbonyl group, an alkylcarbonyl group, an alkylcarbonyloxy group, a thiol group, an alkylthio group, an alkylsulfonyl group, etc. Also, R 2 When 2 is a group combining an alicyclic hydrocarbon group or an aromatic hydrocarbon group and a chain hydrocarbon group, the chain hydrocarbon group can be a substituent of the alicyclic hydrocarbon group or the aromatic hydrocarbon group. Examples of the halogen atom include the same groups as those described above. R 2 When 2 is a hydrocarbon group having a halogen atom, examples of the hydrocarbon group having a halogen atom of R 2 include a chain hydrocarbon group having a halogen atom (such as a haloalkyl group), an alicyclic hydrocarbon group having a halogen atom, and an aromatic hydrocarbon group having a halogen atom. Examples of the alkyl group having a halogen atom include haloalkyl groups having 1 to 12 carbon atoms, such as alkyl fluoride groups having 1 to 12 carbon atoms, alkyl chloride groups having 1 to 12 carbon atoms, alkyl bromide groups having 1 to 12 carbon atoms, and alkyl iodide groups having 1 to 12 carbon atoms. Examples of the haloalkyl group include perfluoroalkyl groups having 1 to 12 carbon atoms (such as trifluoromethyl group, pentafluoroethyl group, heptafluoropropyl group, nonafluorobutyl group, etc.), 2,2,2-trifluoroethyl group, 3,3,3-trifluoropropyl group, 4,4,4-trifluorobutyl group, 3,3,4,4,4-pentafluorobutyl group, chloromethyl group, bromomethyl group, iodomethyl group, etc. The number of carbon atoms of the haloalkyl group is preferably 1 to 9, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. -CH contained in the haloalkyl group 2- may be replaced by -O- or -CO- etc. For example, a haloalkoxy group, a haloalkoxycarbonyl group, a haloalkylcarbonyl group, a haloalkylcarbonyloxy group, etc. may be mentioned. Specifically, a haloalkoxy group having 1 to 11 carbon atoms, a haloalkoxycarbonyl group having 2 to 11 carbon atoms, a haloalkylcarbonyl group having 2 to 12 carbon atoms, a haloalkylcarbonyloxy group having 2 to 11 carbon atoms, etc. may be mentioned. For example, a group in which one or more hydrogen atoms of the groups exemplified above are replaced by a halogen atom may be mentioned. The hydrocarbon group may have one substituent or a plurality of substituents. R 2 is a halogen atom, a haloalkyl group having 1 to 12 carbon atoms or an alkyl group having 1 to 12 carbon atoms (the -CH 2 - may be replaced by -O- or -CO-). Preferably, it is an iodine atom, a fluorine atom, a haloalkyl group having 1 to 8 carbon atoms or an alkyl group having 1 to 8 carbon atoms (the -CH 2 - may be replaced by -O- or -CO-). More preferably, it is an iodine atom, a fluorine atom, a haloalkyl group having 1 to 6 carbon atoms or an alkyl group having 1 to 6 carbon atoms (the -CH 2 - may be replaced by -O- or -CO-). Even more preferably, it is an iodine atom, a fluorine atom, a hydroxy group, a carboxy group, an alkyl group having 1 to 6 carbon atoms, a haloalkyl group having 1 to 6 carbon atoms, an alkoxy group having 1 to 5 carbon atoms or an alkoxyalkoxy group having 2 to 4 carbon atoms. Even more preferably, it is an iodine atom, a fluorine atom, a hydroxy group, a trifluoromethyl group, an alkoxy group having 1 to 3 carbon atoms or an alkoxyalkoxy group having 2 to 3 carbon atoms. Even more preferably, it is an iodine atom, a fluorine atom, a trifluoromethyl group, a hydroxy group or an ethoxymethoxy group. m2 is preferably any integer from 0 to 5, more preferably any integer from 0 to 4, even more preferably any integer from 0 to 3, even more preferably any integer from 0 to 2, and even more preferably 0 or 1.

[0024] R 2 The bonding position to the naphthalene ring of R is not particularly limited. However, when L 1 is bonded to the 1-position or 2-position of the naphthalene ring, it is preferably any of the 2nd to 8th positions of the naphthalene ring, and more preferably any of the 3rd, 4th, and 6th to 8th positions.

[0025] R bb1 The halogen atom of R is the same as the halogen atoms exemplified for R 2 . The alkyl group which may have a halogen atom of R is the same as the alkyl groups and haloalkyl groups exemplified for R bb1 as long as the upper limit of the number of carbon atoms permits. 2 R bb1 is preferably a hydrogen atom or an alkyl group having 1 to 4 carbon atoms, more preferably a hydrogen atom or an alkyl group having 1 to 3 carbon atoms, still more preferably a hydrogen atom or a methyl group, and even more preferably a methyl group. R 30 The alkyl group of R is the same as the alkyl groups exemplified for R 2 as long as the upper limit of the number of carbon atoms permits. R 30 is preferably a hydrogen atom or an alkyl group having 1 to 4 carbon atoms, more preferably a hydrogen atom or an alkyl group having 1 to 3 carbon atoms, still more preferably a hydrogen atom, a methyl group or an ethyl group, and even more preferably a hydrogen atom or a methyl group. X 10 When X is a group represented by *-Ax-Ph-Ay-**, it is preferably a linking group represented by the following formula (X10). TIFF2025081270000016.tif3449[In the formula (X10), Ax represents the bonding species that bonds to the carbon atom to which R bb1 is bonded, and represents one or more bonding species selected from the group consisting of a single bond, an ether bond, a thioether bond, an ester bond, an amide bond, and a carbonate ester bond. Ay is L 10represents a bonding species that binds to a naphthalene ring, and represents one or more bonding species selected from the group consisting of a single bond, an ether bond, a thioether bond, an ester bond, an amide bond, and a carbonate bond. Rx represents a halogen atom, a hydroxy group, a C1-C6 fluoroalkyl group, a C1-C18 alkyl group, or a C1-C6 alkoxy group. mx represents an integer from 0 to 4, and when mx is an integer of 2 or more, the plurality of Rx may be the same as or different from each other. When either Ax or Ay is a single bond, the other is preferably one or more selected from the group consisting of an ether bond, a thioether bond, an ester bond, an amide bond, and a carbonate bond. When either Ax or Ay is an amide bond, it is preferably a bond represented by -CO-NR 30 -. Rx is preferably a fluorine atom, an iodine atom, a trifluoromethyl group, a methyl group, or an ethyl group. mx is preferably 0, 1, or 2. The bonding position of Ay in the phenylene group is preferably the m-position or the p-position with respect to the bonding position of Ax, and more preferably the p-position. X 10 Examples of [X 10 -1) to formula (X 10 -10). * represents the bonding site with the carbon atom to which -R bb1 is bonded. ** represents the bonding site with L 10 or the naphthalene ring. TIFF2025081270000017.tif46170 [In formula (X 10 -1) to formula (X 10 -10), all symbols have the same meanings as described above. Specific examples of the group represented by formula (X 10 -1) to formula (X 10 -10) include the following groups. TIFF2025081270000018.tif87163 Among them, X 10is a single bond or a group represented by formula (X 10 -1’), and is preferably a group represented by any of formula (X 10 -3’) to formula (X 10 -10’), more preferably a single bond or a group represented by any of formula (X 10 -1’), formula (X 10 -4’), formula (X 10 -5’), formula (X 10 -6’) and formula (X 10 -10’), still more preferably a single bond, a group represented by formula (X 10 -1’), a group represented by formula (X 10 -5’) or a group represented by formula (X 10 -6’).

[0026] Examples of the anion (I) include the following anions. Among them, anions represented by formula (Ia-1) to formula (Ia-3), formula (Ia-13) to formula (Ia-17), and formula (Ia-26) to formula (Ia-35) are preferable. TIFF2025081270000019.tif231167

[0027] TIFF2025081270000020.tif70150

[0028] (Cation (I)) R 3 、R 4 、R 5 、R 6 and R 7 Examples of the hydrocarbon group having 1 to 20 carbon atoms for include chain hydrocarbon groups such as alkyl groups, alicyclic hydrocarbon groups, aromatic hydrocarbon groups, and groups formed by combining these. The alkandiyl group is a linear or branched alkandiyl group, including linear alkandiyl groups such as methylene group, ethylene group, propane-1,3-diyl group, butane-1,4-diyl group, pentane-1,5-diyl group, hexane-1,6-diyl group, heptane-1,7-diyl group, octane-1,8-diyl group, nonane-1,9-diyl group, decane-1,10-diyl group; and branched alkandiyl groups such as ethane-1,1-diyl group, propane-1,1-diyl group, propane-1,2-diyl group, propane-2,2-diyl group, pentane-2,4-diyl group, 2-methylpropane-1,3-diyl group, 2-methylpropane-1,2-diyl group, pentane-1,4-diyl group, 2-methylbutane-1,4-diyl group. The number of carbon atoms in the chain hydrocarbon group may be 1 to 18, preferably 1 to 12, more preferably 1 to 9, still more preferably 1 to 6, even more preferably 1 to 4, and even more preferably 1 to 3. The alicyclic hydrocarbon group may be monocyclic or polycyclic. Examples of the alicyclic hydrocarbon group include the groups represented below. The bonding site can be at any position. TIFF2025081270000021.tif47168Specifically, examples of the monocyclic alicyclic hydrocarbon group include monocyclic cycloalkyl groups such as cyclopropyl group, cyclobutyl group, cyclopentyl group, cyclohexyl group, cycloheptyl group, cyclooctyl group, cyclononyl group, cyclodecyl group. Examples of the polycyclic alicyclic hydrocarbon group include polycyclic cycloalkyl groups such as decahydronaphthyl group, adamantyl group, norbornyl group. The number of carbon atoms in the alicyclic hydrocarbon group is preferably 3 to 18, more preferably 3 to 16, and still more preferably 3 to 12. Examples of the aromatic hydrocarbon group include phenyl group, naphthyl group, biphenyl group, anthryl group, phenanthryl group, binaphthyl group. The number of carbon atoms in the aromatic hydrocarbon group is preferably 6 to 18, more preferably 6 to 14, and still more preferably 6 to 10. Among the chain hydrocarbon group, alicyclic hydrocarbon group, and aromatic hydrocarbon group, examples of the group formed by combining two or more of these groups include a group combining an aromatic hydrocarbon group and a chain hydrocarbon group (for example, aromatic hydrocarbon group - alkane diyl group - *, alkyl group - aromatic hydrocarbon group - *, alkyl group - aromatic hydrocarbon group - alkane diyl group - *, -CH contained in the alkane diyl group and the alkyl group 2 - may be replaced by -O-, -CO-, -S- or -SO 2 -). Examples of the group combining an alicyclic hydrocarbon group and a chain hydrocarbon group include an alicyclic hydrocarbon group - alkane diyl group - *, alkyl group - alicyclic hydrocarbon group - *, alkyl group - alicyclic hydrocarbon group - alkane diyl group - *, -CH contained in the alicyclic hydrocarbon group, the alkane diyl group and the alkyl group 2 - may be replaced by -O-, -CO-, -S- or -SO 2 -). Examples of the group combining an aromatic hydrocarbon group and an alicyclic hydrocarbon group include an aromatic hydrocarbon group - alicyclic hydrocarbon group - *, alicyclic hydrocarbon group - aromatic hydrocarbon group - *, -CH contained in the alicyclic hydrocarbon group 2 - may be replaced by -O-, -CO-, -S- or -SO 2 -). * represents a bonding site. Examples of the aromatic hydrocarbon group - alkane diyl group - * include aralkyl groups such as benzyl group and phenethyl group. Examples of the alkyl group - aromatic hydrocarbon group - * include tolyl group, xylyl group, cumenyl group and the like. Examples of the alicyclic hydrocarbon group - alkane diyl group - * include cycloalkylalkyl groups such as cyclohexylmethyl group, cyclohexylethyl group, 1-(adamantan-1-yl)methyl group, 1-(adamantan-1-yl)-1-methylethyl group and the like. Examples of the alkyl group - alicyclic hydrocarbon group - * include cycloalkyl groups having an alkyl group such as methylcyclohexyl group, dimethylcyclohexyl group, 2-alkyladamantan-2-yl group and the like. Examples of the aromatic hydrocarbon group - alicyclic hydrocarbon group - * include phenylcyclohexyl group and the like. Examples of the alicyclic hydrocarbon group-aromatic hydrocarbon group-* include a cyclohexylphenyl group. In the combination, two or more alicyclic hydrocarbon groups, aromatic hydrocarbon groups, and chain hydrocarbon groups may be combined with each other. Also, any of these groups may be bonded to the benzene ring.

[0029] R 3 、R 4 、R 5 and R 6 When the -CH 2 - contained in the hydrocarbon group represented by is replaced by -O-, -CO-, -NR 7 -, -S- or -SO 2 -, the total number of carbon atoms of the hydrocarbon group before replacement is taken as the total number of carbon atoms of the hydrocarbon group. Also, the number may be one or two or more. The -CH 2 - contained in the hydrocarbon group is replaced by -O-, -CO-, -NR 7 -, -S- or -SO 2 - The groups thus replaced include a hydroxy group (a group in which -CH 2 - contained in the methyl group is replaced by -O-), an amino group (a group in which -CH 2 - contained in the methyl group is replaced by -NH-), a thiol group (a group in which -CH 2 - contained in the methyl group is replaced by -S-), a carboxy group (a group in which -CH 2 -CH 2 - contained in the ethyl group is replaced by -O-CO-), an alkoxy group (a group in which -CH 2 - at any position contained in the alkyl group is replaced by -O-), an alkoxycarbonyl group (a group in which -CH 2 -CH 2 - at any position contained in the alkyl group is replaced by -O-CO-), an alkylcarbonyl group (a group in which -CH 2 - at any position contained in the alkyl group is replaced by -CO-), an alkylcarbonyloxy group (a group in which -CH 2 -CH 2- is a group replaced by -CO-O-, an alkoxycarbonyloxy group (any -CH at any position in the alkyl group) 2 -CH 2 -CH 2 - is a group replaced by -O-CO-O-, an alkylamino group (any -CH at any position in the alkyl group) 2 - is a group replaced by -NR 7 - is a group replaced by -SR, an alkylthio group (any -CH at any position in the alkyl group) 2 - is a group replaced by -S-, an alkylsulfonyl group (any -CH at any position in the alkyl group) 2 - is a group replaced by -SO 2 - is a group replaced by -O-, an oxy group (any -CH in the methylene group) 2 - is a group replaced by -CO-, a carbonyl group (any -CH in the methylene group) 2 - is a group replaced by -CO-, a thio group (any -CH in the methylene group) 2 - is a group replaced by -S-, a peptide group (any -CH in the ethylene group) 2 -CH 2 - is a group replaced by -CO-NR 7 - is a group replaced by -SO 2 - is a group replaced by -SO 2 - is a group replaced by -O-, an alkanediyl-oxy group (any -CH at any position in the alkanediyl group) 2 - is a group replaced by -O-CO-, an alkanediyl-oxycarbonyl group (any -CH at any position in the alkanediyl group) 2 -CH 2 - is a group replaced by -O-CO-, an alkanediyl-carbonyl group (any -CH at any position in the alkanediyl group) 2 - is a group replaced by -CO-, an alkanediyl-carbonyl-oxy group (any -CH at any position in the alkanediyl group) 2 -CH 2 - is a group replaced by -CO-O-, an alkanediyl-amino group (any -CH at any position in the alkanediyl group) 2 - is a group replaced by -NR 7-replaced group), an alkanediylthio group (a group in which any -CH in the alkanediyl group 2 -is replaced by -S-), an alkanediylsulfonyl group (any -CH in the alkanediyl group 2 -is replaced by -SO 2 -replaced group), a cycloalkoxy group, a cycloalkylalkoxy group, an aromatic hydrocarbon group-carbonyloxy group, an aromatic hydrocarbon group-carbonyl group, an aromatic hydrocarbon group-oxy group, or a group formed by combining two or more of these groups, etc. can be mentioned. Examples of the alkoxy group include alkoxy groups having 1 to 19 carbon atoms, such as a methoxy group, an ethoxy group, a propoxy group, a butoxy group, a pentyloxy group, a hexyloxy group, an octyloxy group, a 2-ethylhexyloxy group, a nonyloxy group, a decyloxy group, an undecyloxy group, etc. The number of carbon atoms of the alkoxy group is preferably 1 to 11, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. Examples of the alkoxycarbonyl group include alkoxycarbonyl groups having 2 to 19 carbon atoms, such as methoxycarbonyl group, ethoxycarbonyl group, butoxycarbonyl group and the like. Examples of the alkylcarbonyl group include alkylcarbonyl groups having 2 to 20 carbon atoms, such as acetyl group, propionyl group and butyryl group and the like. Examples of the alkylcarbonyloxy group include alkylcarbonyloxy groups having 2 to 19 carbon atoms, such as acetyloxy group, propionyloxy group, butyryloxy group and the like. Examples of the alkoxycarbonyloxy group include alkoxycarbonyloxy groups having 2 to 18 carbon atoms, such as butoxycarbonyloxy group and the like. The number of carbon atoms of the alkoxycarbonyl group and the alkylcarbonyloxy group is preferably 2 to 11, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms of the alkylcarbonyl group is preferably 2 to 12, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms of the alkoxycarbonyloxy group is preferably 2 to 10, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. Examples of the alkylamino group include alkylamino groups having 1 to 19 carbon atoms, such as methylamino group, ethylamino group, propylamino group, butylamino group, pentylamino group, hexylamino group, and octylamino group. Examples of the alkylthio group include alkylthio groups having 1 to 19 carbon atoms, such as methylthio group, ethylthio group, propylthio group, butylthio group, pentylthio group, hexylthio group, octylthio group, 2-ethylhexylthio group, nonylthio group, decylthio group, undecylthio group, and the like. Examples of the alkylsulfonyl group include alkylsulfonyl groups having 1 to 19 carbon atoms, such as methylsulfonyl group, ethylsulfonyl group, propylsulfonyl group, butylsulfonyl group, pentylsulfonyl group, hexylsulfonyl group, octylsulfonyl group, 2-ethylhexylsulfonyl group, nonylsulfonyl group, decylsulfonyl group, undecylsulfonyl group, and the like. The number of carbon atoms of the alkylamino group, alkylthio group, and alkylsulfonyl group is preferably 1 to 11, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3, respectively. Examples of the alkanedioxy group include alkanedioxy groups having 1 to 19 carbon atoms, such as methyleneoxy group, ethyleneoxy group, propanediyl-oxy group, butanediyl-oxy group, pentanediyl-oxy group, and the like. The number of carbon atoms of the alkanedioxy group is preferably 1 to 11, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. Examples of the alkanediyl-oxycarbonyl group include alkanediyl-oxycarbonyl groups having 2 to 19 carbon atoms, such as a methylene-oxycarbonyl group, an ethylene-oxycarbonyl group, a propanediyl-oxycarbonyl group, and a butanediyl-oxycarbonyl group. Examples of the alkanediyl-carbonyl group include alkanediyl-carbonyl groups having 2 to 20 carbon atoms, such as a methylene-carbonyl group, an ethylene-carbonyl group, a propanediyl-carbonyl group, a butanediyl-carbonyl group, and a pentanediyl-carbonyl group. Examples of the alkanediyl-carbonyloxy group include alkanediyl-carbonyloxy groups having 2 to 19 carbon atoms, such as a methylene-carbonyloxy group, an ethylene-carbonyloxy group, a propanediyl-carbonyloxy group, and a butanediyl-carbonyloxy group. The number of carbon atoms of the alkanediyl-oxycarbonyl group and the alkanediyl-carbonyloxy group is each preferably 2 to 11, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms of the alkanediyl-carbonyl group is preferably 2 to 12, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. Examples of the alkanediyl-amino group include alkanediyl-thio groups having 1 to 19 carbon atoms, such as a methylene-amino group, an ethylene-amino group, and a propylene-amino group. Examples of the alkanediyl-thio group include alkanediyl-thio groups having 1 to 19 carbon atoms, such as a methylene-thio group, an ethylene-thio group, and a propylene-thio group. The number of carbon atoms of the alkanediyl-thio group is preferably 1 to 11, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. Examples of the alkanediyl-sulfonyl group include alkanediyl-sulfonyl groups having 1 to 19 carbon atoms, such as a methylene-sulfonyl group, an ethylene-sulfonyl group, and a propylene-sulfonyl group. The number of carbon atoms of the alkanediyl-amino group, the alkanediyl-thio group, and the alkanediyl-sulfonyl group is preferably 1 to 11, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. Examples of the cycloalkoxy group include cycloalkoxy groups having 3 to 19 carbon atoms, such as a cyclohexyloxy group. Examples of the cycloalkylalkoxy group include cycloalkylalkoxy groups having 4 to 19 carbon atoms, such as a cyclohexylmethoxy group. Examples of the aromatic hydrocarbon group-carbonyl-oxy group include aromatic hydrocarbon group-carbonyl-oxy groups having 7 to 19 carbon atoms, such as a benzoyloxy group. Examples of the aromatic hydrocarbon group-carbonyl group include aromatic hydrocarbon group-carbonyl groups having 7 to 20 carbon atoms, such as a benzoyl group. Examples of the aromatic hydrocarbon group-oxy group include aromatic hydrocarbon group-oxy groups having 6 to 19 carbon atoms, such as a phenyloxy group.

[0030] In addition, -CH 2 - contained in the alicyclic hydrocarbon group is replaced with -O-, -CO-, -S-, -NR 7 -, or -SO 2 - to give groups such as those represented below. The bonding site can be at any position. TIFF2025081270000022.tif58168R 7 -CH 2 - contained in the hydrocarbon group represented by is replaced with -O-, -CO-, -S- or -SO 2 - to give groups similar to those exemplified for the group in which -CH 3 - in the hydrocarbon group represented by R 4 - in the hydrocarbon group represented by R 5 - and R 6 -CH 2 - contained in the hydrocarbon group represented by is replaced with -O-, -CO-, -S- or -SO 2 -. R 3 - and R 4 -, R 5 - and R 6 - and / or R 3 - and R 4 - and R 5 - combine to form a cyclic hydrocarbon group, which includes a cyclic ammonium cation containing a nitrogen atom. -CH2 - may be replaced by -O-, -CO- or -NR 7 - and the -CH= contained in the cyclic ammonium cation may be replaced by -N=. Examples of the cyclic ammonium cation include cations derived from monocyclic or polycyclic heterocyclic alicyclic hydrocarbon rings containing a nitrogen atom, heterocyclic aromatic hydrocarbon rings containing a nitrogen atom, etc. Examples of the heterocyclic alicyclic hydrocarbon ring containing a nitrogen atom include pyrrolidine ring, imidazolidine ring, pyrazolidine ring, oxazolidine ring, isoxazolidine ring, pyridine ring, piperazine ring, morpholine ring, succinimide ring, 2-oxazolidone ring, quinuclidine ring, 1-azaadamantane ring, etc. Examples of the heterocyclic aromatic hydrocarbon ring containing a nitrogen atom include pyrrole ring, pyrazole ring, imidazole ring, oxazole ring, imidazolidine ring, triazole ring, pyrazine ring, pyrimidine ring, indole ring, isoindole ring, quinoline ring, isoquinoline ring, carbazole ring, etc. Examples of the cyclic ammonium cation include ammonium cations represented by the following. R 3 and R 4 、R 5 and R 6 and / or R 3 and R 4 and R 5 and are each preferably bonded to form a cyclic hydrocarbon group having 3 to 12 carbon atoms, more preferably 4 to 12 carbon atoms. When R 3 and R 4 、R 5 and R 6 and / or R 3 and R 4 and R 5 and are bonded to form a cyclic hydrocarbon group, for example, it is preferably a cyclic ammonium cation represented by the following formula. TIFF2025081270000023.tif40158R 3 and R 4 、R 5 and R 6 and / or R 3 and R 4 and R 5Even when they are combined to form a cyclic hydrocarbon group, as the other hydrocarbon group, a chain hydrocarbon group or the like may be bonded and may have a substituent. R 3 , R 4 , R 5 , R 6 and R 7 Examples of the substituent that the hydrocarbon group of R Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom. The hydrocarbon group may have one substituent or a plurality of substituents.

[0031] R 3 , R 4 , R 5 and R 6 are each independently a hydrogen atom, a chain hydrocarbon group having 1 to 12 carbon atoms, a cyclic hydrocarbon group having 3 to 12 carbon atoms, or a group combining a chain hydrocarbon group having 1 to 8 carbon atoms and a cyclic hydrocarbon group having 3 to 12 carbon atoms, or R 3 and R 4 or R 3 and R 4 and R 5 are preferably each bonded to form a cyclic hydrocarbon group having 3 to 12 carbon atoms, a hydrogen atom, an alkyl group having 1 to 4 carbon atoms, a cyclic hydrocarbon group having 3 to 10 carbon atoms, or a group combining an alkyl group having 1 to 3 carbon atoms and a cyclic hydrocarbon group having 3 to 10 carbon atoms, or R 3 and R 4 or R 3 and R 4 and R 5 are more preferably each bonded to form a cyclic hydrocarbon group having 3 to 10 carbon atoms. Here, in the above groups, -CH 2 - contained in the chain hydrocarbon group, the cyclic hydrocarbon group, and the alkyl group is -O-, -S-, -NR 7 -, -SO 2-Or it may be replaced by -CO-, and the chain hydrocarbon group, the cyclic hydrocarbon group, and the alkyl group may have a substituent. Further, when each group is bonded to form a cyclic hydrocarbon group, the cyclic hydrocarbon group may form a double bond between one or more adjacent carbon atoms, and -CH 2 - in the cyclic hydrocarbon group may be replaced by -O-, -CO- or -NR 7 -, and -CH= in the cyclic hydrocarbon group may be replaced by -N=. Also, in one aspect, R 3 , R 4 , R 5 and R 6 are each independently a hydrogen atom, an alkyl group having 1 to 9 carbon atoms, a phenyl group which may have a substituent, or an aralkyl group having 7 to 12 carbon atoms which may have a substituent (the -CH 2 - contained in the aralkyl group may be replaced by -O- or -CO-). It is preferable that R 3 and R 4 are a hydrogen atom or an alkyl group having 1 to 9 carbon atoms, at least one of R 5 and R 6 is a phenyl group which may have a substituent or an aralkyl group having 7 to 12 carbon atoms which may have a substituent (the -CH 2 - contained in the aralkyl group may be replaced by -O- or -CO-). Also, in another aspect, R 3 and R 4 form a 5- or 6-membered alicyclic hydrocarbon group containing N + (the -CH 2 - contained in the alicyclic hydrocarbon group may be replaced by -O-), and R 5 and R 6 are each independently a hydrogen atom, an alkyl group having 1 to 9 carbon atoms, a phenyl group which may have a substituent, or an aralkyl group having 7 to 12 carbon atoms which may have a substituent (the -CH 2 - contained in the aralkyl group may be replaced by -O- or -CO-). It is preferable that Furthermore, in another aspect, R 3 , R4 and R 5 is an aromatic hydrocarbon group of a 5- or 6-membered ring containing N + to form an aromatic hydrocarbon group of a 5- or 6-membered ring containing N (the -CH= contained in the aromatic hydrocarbon group may be replaced by -N=). R 6 is a hydrogen atom, an alkyl group having 1 to 9 carbon atoms, a phenyl group which may have a substituent, or an aralkyl group having 7 to 12 carbon atoms which may have a substituent (the -CH 2 - in the aralkyl group may be replaced by -O- or -CO-).) is preferably used. R 7 is preferably a hydrogen atom or an alkyl group having 1 to 4 carbon atoms, more preferably a hydrogen atom or an alkyl group having 1 to 3 carbon atoms, and even more preferably a hydrogen atom.

[0032] Examples of the cation of the ammonium carboxylate salt (I) include cations represented by the following formulas (I-c-1) to (I-c-25). TIFF2025081270000024.tif88167

[0033] The ammonium carboxylate salt (I) is a combination of the above-mentioned anion and the above-mentioned cation, and these can be arbitrarily combined. As the ammonium carboxylate salt (I), preferably, an anion represented by any of the formulas (Ia-1) to (Ia-3), (Ia-13) to (Ia-17), (Ia-26) to (Ia-35), and a cation represented by the formulas (I-c-1) to (I-c-25) are mentioned.

[0034] Examples of the ammonium carboxylate salt (I) include the salts described in Table 1. In the following table, each symbol represents a symbol attached to the structure representing the above-mentioned anion or cation. For example, the ammonium carboxylate salt (I-1) means a salt composed of an anion represented by the formula (Ia-1) and a cation represented by the formula (I-c-1), and represents the following salt. TIFF2025081270000025.tif2387

Table 1

[0035] Among them, as the ammonium carboxylate salt (I), a salt formed by combining an anion represented by any of formula (Ia-1) to formula (Ia-3), formula (Ia-13) to formula (Ia-17), and formula (Ia-26) to formula (Ia-35) with a cation represented by any of formula (I-c-1) to formula (I-c-25) is preferred.

[0036] <Method for Producing Ammonium Carboxylate Salt (I)> The ammonium carboxylate salt (I) can be produced by reacting a salt represented by formula (I-a) and a salt represented by formula (I-b) in a solvent. TIFF2025081270000028.tif65153 [In the formula, all symbols have the same meanings as described above.] Examples of the solvent in this reaction include chloroform, acetonitrile, methanol, ion-exchanged water, etc. The reaction temperature is usually 0°C to 80°C, and the reaction time is usually 0.5 hour to 24 hours.

[0037] Examples of the salt represented by formula (I-a) include salts represented by the following formula, etc., which can be easily obtained from the market and can also be easily produced by known production methods. TIFF2025081270000029.tif71163

[0038] Examples of the salt represented by formula (I-b) include salts represented by the following formula, etc., which can be easily obtained from the market and can also be easily produced by known production methods. TIFF2025081270000030.tif81167

[0039] [Structural Unit Derived from Ammonium Carboxylate Salt Represented by Formula (I)] The structural unit derived from the ammonium carboxylate salt represented by formula (I) shows a state in which the double bond of CH 2 =C-R bb1 in the ammonium carboxylate salt (I) is cleaved, and examples thereof include a structural unit represented by the following formula (IP) (hereinafter sometimes referred to as "structural unit (IP)"). TIFF2025081270000031.tif40128[In the formula, all symbols have the same meanings as described above.]

[0040] [Resin containing a structural unit derived from the ammonium carboxylate salt represented by formula (I)] The resin of the present invention is a resin containing a structural unit (IP) derived from the ammonium carboxylate salt represented by formula (I) (hereinafter sometimes referred to as "resin (Ap)"). Resin (Ap) may be a homopolymer containing one kind of structural unit (IP) or a copolymer containing two or more kinds of structural units (IP). In addition, resin (Ap) may contain a structural unit other than structural unit (IP). Examples of the structural unit other than structural unit (IP) include a structural unit having an acid-labile group (hereinafter sometimes referred to as "structural unit (a1)") and a structural unit other than the structural unit having an acid-labile group. Examples of the structural unit other than the structural unit having an acid-labile group include a structural unit having no acid-labile group (hereinafter sometimes referred to as "structural unit (s)") and structural units known in the art. The content of structural unit (IP) is 0.1 mol% or more, preferably 0.5 mol% or more, more preferably 0.8 mol% or more, and still more preferably 1 mol% or more with respect to all the structural units of resin (Ap). Also, it is 100 mol% or less, preferably 50 mol% or less, more preferably 30 mol% or less, and still more preferably 10 mol% or less. Specifically, 0.1 to 100 mol% is mentioned, preferably 0.5 to 50 mol%, more preferably 0.8 to 30 mol%, and still more preferably 1 to 10 mol%.

[0041] In particular, when the resin (Ap) is used in a resist composition, as will be described later, it preferably further contains a structural unit (a1) in addition to the structural unit (IP). Also, when the resin (Ap) is used in a resist composition, as will be described later, regardless of whether it contains the structural unit (a1) or not, it may be used in combination with a resin containing the structural unit (a1) (hereinafter sometimes referred to as "resin (A)"). Hereinafter, the resin (Ap) and / or the resin (A) may sometimes be referred to as "resin (A) etc.". The resin (Ap) and the resin (A) preferably further contain structural units other than the structural unit (a1).

[0042] 〈Structural unit (a1)〉 The structural unit (a1) is derived from a monomer having an acid-labile group (hereinafter sometimes referred to as "monomer (a1)"). The acid-labile groups contained in the resin (A) etc. are preferably a group represented by formula (1) (hereinafter also referred to as group (1)) and / or a group represented by formula (2) (hereinafter also referred to as group (2)). TIFF2025081270000032.tif1988 [In formula (1), R a1 , R a2 and R a3 each independently represents an alkyl group having 1 to 8 carbon atoms, an alkenyl group having 2 to 8 carbon atoms, an alicyclic hydrocarbon group having 3 to 20 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a group combining these, or R a1 and R a2 are bonded to each other to form an alicyclic hydrocarbon group having 3 to 20 carbon atoms together with the carbon atom to which they are bonded, and the alkyl group, the alkenyl group, the alicyclic hydrocarbon group, and the aromatic hydrocarbon group may have a halogen atom. ma and na each independently represent 0 or 1, and at least one of ma and na represents 1. * represents a bonding site. ] TIFF2025081270000033.tif2171 [In formula (2), R a1’ and R a2’ each independently represent a hydrogen atom or a hydrocarbon group having 1 to 12 carbon atoms, R a3’represents a hydrocarbon group having 1 to 20 carbon atoms, or R a2’ and R a3’ are bonded to each other to form, together with the carbon atom to which they are bonded and X, a heterocyclic group having 3 to 20 carbon atoms, and the -CH 2 - in the hydrocarbon group and the heterocyclic group may be replaced by -O- or -S-, and the hydrocarbon group and the heterocyclic group may have a halogen atom. X represents an oxygen atom or a sulfur atom. na’ represents 0 or 1. * represents a bonding site.]

[0043] R a1 、R a2 and R a3 Examples of the alkyl group in R R a1 、R a2 and R a3 include a methyl group, an ethyl group, a propyl group, a butyl group, a pentyl group, a hexyl group, a heptyl group, an octyl group and the like. R a1 、R a2 and R a3 Examples of the alicyclic hydrocarbon group in R a1 、R a2 and R a3 may be either monocyclic or polycyclic. Examples of the monocyclic alicyclic hydrocarbon group include cycloalkyl groups such as a cyclopentyl group, a cyclohexyl group, a cycloheptyl group, a cyclooctyl group and the like. Examples of the polycyclic alicyclic hydrocarbon group include a decahydronaphthyl group, an adamantyl group, a norbornyl group and the following group (* represents a bonding site.). The carbon number of the alicyclic hydrocarbon group of R TIFF2025081270000034.tif10150R a1 、R a2 and R a3Examples of the aromatic hydrocarbon group include aryl groups such as phenyl group, naphthyl group, anthryl group, biphenyl group, and phenanthryl group. Examples of the combined group include a group formed by combining the above-mentioned alkyl group and alicyclic hydrocarbon group (for example, alkylcycloalkyl groups or cycloalkylalkyl groups such as methylcyclohexyl group, dimethylcyclohexyl group, methylnorbornil group, cyclohexylmethyl group, adamantylmethyl group, adamantyldimethyl group, norbornylethyl group, etc.), aralkyl groups such as benzyl group, aromatic hydrocarbon groups having an alkyl group (p-methylphenyl group, p-tert-butylphenyl group, tolyl group, xylyl group, cumenyl group, mesityl group, 2,6-diethylphenyl group, 2-methyl-6-ethylphenyl group, etc.), aromatic hydrocarbon groups having an alicyclic hydrocarbon group (p-cyclohexylphenyl group, p-adamantylphenyl group, etc.), aryl-cycloalkyl groups such as phenylcyclohexyl group, etc. Preferably, ma is 0 and na is 1. R a1 and R a2 When they are bonded to each other to form an alicyclic hydrocarbon group, examples of -C(R a1 )(R a2 )(R a3 ) include the following groups. The alicyclic hydrocarbon group preferably has 3 to 12 carbon atoms. * represents the bonding site with -O-. TIFF2025081270000035.tif27138

[0044] R a1’ 、R a2’ and R a3’ Examples of the hydrocarbon group in R 、R a1 、R a2 and R a3 include alkyl groups, alicyclic hydrocarbon groups, aromatic hydrocarbon groups, and groups formed by combining these. R a2’ and Ra3’ When they are bonded to each other to form a heterocyclic group together with the carbon atom to which they are bonded and X, -C(R a1’ )(R a2’ )-X-R a3’ Examples thereof include the following groups. * represents the bonding site. TIFF2025081270000036.tif18130R a1 , R a2 , R a3 , R a1 , R a2’ and R a3’ The halogen atom that R R a1’ and R a2’ may have includes a fluorine atom, a chlorine atom, a bromine atom or an iodine atom. na’ is preferably 0.

[0045] Examples of the group (1) include the following groups. In formula (1), R a1 , R a2 and R a3 are alkyl groups, ma = 0, and na = 1. Preferred as such a group is a tert-butoxycarbonyl group. In formula (1), R a1 , R a2 together with the carbon atom to which they are bonded form an adamantyl group, and R a3 is an alkyl group, ma = 0, and na = 1. In formula (1), R a1 and R a2 are each independently an alkyl group, R a3 is an adamantyl group, ma = 0, and na = 1. Specific examples of the group (1) include the following groups. * represents the bonding site. TIFF2025081270000037.tif150162

[0046] Specific examples of the group (2) include the following groups. * represents the bonding site. TIFF2025081270000038.tif55153

[0047] The monomer (a1) is preferably a monomer having an acid labile group and an ethylenically unsaturated bond, more preferably a (meth)acrylic monomer having an acid labile group. Of the (meth)acrylic monomers having an acid labile group, preferred are those having an alicyclic hydrocarbon group having 5 to 20 carbon atoms. By using a resin (A) or the like having a structural unit derived from a monomer (a1) having a bulky structure such as an alicyclic hydrocarbon group in a resist composition, the resolution of the resist pattern can be improved.

[0048] Examples of the structural unit derived from the (meth)acrylic monomer having the group (1) include a structural unit represented by formula (a1-0) (hereinafter, sometimes referred to as structural unit (a1-0)), a structural unit represented by formula (a1-1) (hereinafter, sometimes referred to as structural unit (a1-1)), or a structural unit represented by formula (a1-2) (hereinafter, sometimes referred to as structural unit (a1-2)). Preferably, it is at least one structural unit selected from the group consisting of the structural unit (a1-0), the structural unit (a1-1) and the structural unit (a1-2), more preferably at least one structural unit selected from the group consisting of the structural unit (a1-1) and the structural unit (a1-2). These may be used alone or in combination of two or more. TIFF2025081270000039.tif44144 [In formula (a1-0), formula (a1-1) and formula (a1-2), all symbols have the same meaning as above.]

[0049] R a01 , R a4 and R a5 The halogen atom in the formula (I) includes a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom. R a01 , R a4 and R a5Examples of the alkyl group which may have a halogen atom include trifluoromethyl group, difluoromethyl group, methyl group, perfluoroethyl group, 2,2,2-trifluoroethyl group, 1,1,2,2-tetrafluoroethyl group, ethyl group, perfluoropropyl group, 2,2,3,3,3-pentafluoropropyl group, propyl group, perfluorobutyl group, 1,1,2,2,3,3,4,4-octafluorobutyl group, butyl group, perfluoropentyl group, 2,2,3,3,4,4,5,5,5-nonafluoropentyl group, pentyl group, hexyl group, perfluorohexyl group, chloromethyl group, bromomethyl group, and iodomethyl group. The number of carbon atoms of the alkyl group is preferably 1 to 4, more preferably 1 to 3, and still more preferably 1 or 2. The alkyl group is preferably a methyl group or an ethyl group, and more preferably a methyl group. R a01 , R a4 and R a5 are preferably a hydrogen atom or a methyl group, and more preferably a methyl group. L a01 , L a1 and L a2 are preferably an oxygen atom or *-O-(CH 2 ) k01 -CO-O- (wherein k01 is preferably any integer from 1 to 4, and more preferably 1), and more preferably an oxygen atom. R a02 , R a03 and R a04 Examples of the alkyl group, alicyclic hydrocarbon group, aromatic hydrocarbon group and the group formed by combining these in R a1 , R a2 and R a3 include the same groups as those exemplified for R R a6 and R a7 Examples of the alkyl group, alkenyl group, alicyclic hydrocarbon group, aromatic hydrocarbon group and the group formed by combining these in R a1 , R a2 and R a3 include the same groups as those exemplified for R R a02, R a03 , and R a04 The alkyl group in is preferably an alkyl group having 1 to 6 carbon atoms, more preferably a methyl group or an ethyl group, and still more preferably a methyl group. R a6 and R a7 The alkyl group in is preferably an alkyl group having 1 to 6 carbon atoms, more preferably a methyl group, an ethyl group, an isopropyl group or a t-butyl group, and still more preferably an ethyl group, an isopropyl group or a t-butyl group. R a6 and R a7 The alkenyl group in is preferably an alkenyl group having 2 to 6 carbon atoms, more preferably an ethenyl group, a propenyl group, an isopropenyl group or a butenyl group. R a02 , R a03 , R a04 , R a6 and R a7 The number of carbon atoms of the alicyclic hydrocarbon group of is preferably 5 to 12, more preferably 5 to 10. R a02 , R a03 , R a04 , R a6 and R a7 The number of carbon atoms of the aromatic hydrocarbon group of is preferably 6 to 12, more preferably 6 to 10. For the group combining an alkyl group and an alicyclic hydrocarbon group, it is preferable that the total number of carbon atoms of these alkyl group and alicyclic hydrocarbon group is 18 or less. For the group combining an alkyl group and an aromatic hydrocarbon group, it is preferable that the total number of carbon atoms of these alkyl group and aromatic hydrocarbon group is 18 or less. R a02 and R a03 are preferably an alkyl group having 1 to 6 carbon atoms which may have a halogen atom or an aromatic hydrocarbon group having 6 to 12 carbon atoms which may have a halogen atom, more preferably a methyl group, an ethyl group, a phenyl group or a naphthyl group which may have a halogen atom. R a04is preferably an alkyl group having 1 to 6 carbon atoms which may have a halogen atom or an alicyclic hydrocarbon group having 5 to 12 carbon atoms which may have a halogen atom, more preferably a methyl group, an ethyl group, a cyclohexyl group or an adamantyl group which may have a halogen atom. R a6 and R a7 are preferably an alkyl group having 1 to 6 carbon atoms which may have a halogen atom, an alkenyl group having 2 to 6 carbon atoms which may have a halogen atom or an aromatic hydrocarbon group having 6 to 12 carbon atoms which may have a halogen atom, more preferably a methyl group, an ethyl group, an isopropyl group, a t-butyl group, an ethenyl group, a phenyl group or a naphthyl group which may have a halogen atom, still more preferably an ethyl group, an isopropyl group, a t-butyl group, an ethenyl group or a phenyl group which may have a halogen atom. m1’ is preferably any integer from 0 to 3, more preferably 0 or 1. n1 is preferably any integer from 0 to 3, more preferably 0 or 1. n1’ is preferably 0 or 1.

[0050] Examples of the structural unit (a1-0) include a structural unit represented by any of formula (a1-0-1) to formula (a1-0-24) and a structural unit in which the methyl group corresponding to R a01 in the structural unit (a1-0) is replaced with a hydrogen atom, a halogen atom, a haloalkyl group or another alkyl group. A structural unit represented by any of formula (a1-0-1) to formula (a1-0-10), formula (a1-0-13), formula (a1-0-14), formula (a1-0-19) to formula (a1-0-24) is preferred. TIFF2025081270000040.tif119160

[0051] Examples of the structural unit (a1-1) include a structural unit derived from the monomers described in JP-A-2010-204646. Among them, a structural unit represented by any of formula (a1-1-1) to formula (a1-1-7) and R a4A structural unit in which the methyl group corresponding to [[ID=]] is replaced by a hydrogen atom, a halogen atom, a haloalkyl group or another alkyl group is preferable, and a structural unit represented by any of formula (a1-1-1) to formula (a1-1-4) is more preferable. TIFF2025081270000041.tif38168

[0052] Examples of the structural unit (a1-2) include a structural unit represented by any of formula (a1-2-1) to formula (a1-2-20) and R in the structural unit (a1-2) a5 A structural unit in which the methyl group corresponding to [[ID=]] is replaced by a hydrogen atom, a halogen atom, a haloalkyl group or another alkyl group, and a structural unit represented by any of formula (a1-2-2), formula (a1-2-5), formula (a1-2-6) and formula (a1-2-10) to formula (a1-2-20) is preferable. TIFF2025081270000042.tif91163

[0053] When the resin (A) etc. contain the structural unit (a1-0) and / or the structural unit (a1-1) and / or the structural unit (a1-2), the total content rate thereof is 10 mol% or more, preferably 15 mol% or more, more preferably 20 mol% or more, further preferably 25 mol% or more, still more preferably 30 mol% or more, even more preferably 40 mol% or more, and even more preferably 50 mol% or more with respect to all the structural units of the resin (A) etc. Also, it is 95 mol% or less, preferably 90 mol% or less, more preferably 85 mol% or less, further preferably 70 mol% or less, still more preferably 65 mol% or less. Specifically, 10 to 95 mol% is mentioned, preferably 15 to 90 mol%, more preferably 20 to 85 mol%, further preferably 25 to 70 mol%, and still more preferably 30 to 70 mol%. When the resin (A) etc. contains the structural unit (a1-0), the content rate is 5 mol% or more, preferably 10 mol% or more, more preferably 15 mol% or more, still more preferably 20 mol% or more, even more preferably 25 mol% or more, still even more preferably 30 mol% or more, and even more preferably 35 mol% or more with respect to all the structural units of the resin (A) etc. Also, 80 mol% or less is mentioned, preferably 75 mol% or less, more preferably 70 mol% or less, still more preferably 65 mol% or less, even more preferably 60 mol% or less. Specifically, 5 to 80 mol% is mentioned, preferably 5 to 75 mol%, and more preferably 10 to 70 mol%. When the resin (A) etc. contains the structural unit (a1-1) and / or the structural unit (a1-2), the total content rate of these is 10 mol% or more, preferably 15 mol% or more, more preferably 20 mol% or more, still more preferably 25 mol% or more, even more preferably 30 mol% or more, still even more preferably 40 mol% or more, and even more preferably 50 mol% or more with respect to all the structural units of the resin (A) etc. Also, 95 mol% or less is mentioned, preferably 90 mol% or less, more preferably 85 mol% or less, still more preferably 80 mol% or less, even more preferably 75 mol% or less, still even more preferably 70 mol% or less, and even more preferably 65 mol% or less. Specifically, 10 to 90 mol% is mentioned, preferably 15 to 85 mol%, more preferably 15 to 80 mol%, still more preferably 20 to 80 mol%, even more preferably 20 to 75 mol%, and still even more preferably 20 to 70 mol%.

[0054] Examples of the structural unit having the group (2) in the structural unit (a1) include a structural unit represented by the formula (a1-4) (hereinafter sometimes referred to as "structural unit (a1-4)"). TIFF2025081270000043.tif31119[In the formula (a1-4), all the symbols have the same meanings as described above respectively.]

[0055] R a1 and R a17 Examples of the halogen atom and the alkyl group having 1 to 6 carbon atoms which may have a halogen atom in R a01 include the same ones as those exemplified by formula (a1-0) etc. R a1 is preferably a hydrogen atom or an alkyl group having 1 to 4 carbon atoms, more preferably a hydrogen atom, a methyl group or an ethyl group, and still more preferably a hydrogen atom or a methyl group. R a17 Examples of the alkoxy group in R R a17 include a methoxy group, an ethoxy group, a propoxy group, an isopropoxy group, a butoxy group, a sec-butoxy group, a tert-butoxy group, a pentyloxy group, and a hexyloxy group. The alkoxy group is preferably an alkoxy group having 1 to 4 carbon atoms, more preferably an alkoxy group having 1 to 3 carbon atoms, still more preferably a methoxy group or an ethoxy group, and even more preferably a methoxy group. R a17 Examples of the alkoxyalkyl group in R R a17Examples of the alkylcarbonyl group in [description] include an acetyl group, a propionyl group, a butyryl group and the like. The alkylcarbonyl group is preferably an alkylcarbonyl group having 2 to 4 carbon atoms, more preferably an alkylcarbonyl group having 2 to 3 carbon atoms, and even more preferably an acetyl group. R a17 Examples of the alkylcarbonyloxy group in [description] include an acetyloxy group, a propionyloxy group and a butyryloxy group. The alkylcarbonyloxy group is preferably an alkylcarbonyloxy group having 2 to 4 carbon atoms, more preferably an alkylcarbonyloxy group having 2 to 3 carbon atoms, and even more preferably an acetyloxy group. R a17 is preferably a halogen atom, a hydroxy group, a carboxy group, an optionally halogenated alkyl group having 1 to 4 carbon atoms, an alkoxy group having 1 to 4 carbon atoms or an alkoxyalkoxy group having 2 to 8 carbon atoms, more preferably a fluorine atom, an iodine atom, a hydroxy group, a methyl group, a methoxy group, an ethoxy group, an ethoxyethoxy group or an ethoxymethoxy group, and even more preferably a fluorine atom, an iodine atom, a hydroxy group, a methyl group, a methoxy group or an ethoxyethoxy group.

[0056] A a11Examples of the alkanediyl group include linear alkanediyl groups such as methylene group, ethylene group, propane-1,3-diyl group, propane-1,2-diyl group, butane-1,4-diyl group, pentane-1,5-diyl group, hexane-1,6-diyl group, heptane-1,7-diyl group, octane-1,8-diyl group, nonane-1,9-diyl group, decane-1,10-diyl group, undecane-1,11-diyl group, dodecane-1,12-diyl group, etc., and branched alkanediyl groups such as butane-1,3-diyl group, 2-methylpropane-1,3-diyl group, 2-methylpropane-1,2-diyl group, pentane-1,4-diyl group, 2-methylbutane-1,4-diyl group, heptane-1,6-diyl group, octane-1,7-diyl group, nonane-1,8-diyl group, decane-1,9-diyl group, undecane-1,10-diyl group, etc. The number of carbon atoms in the alkanediyl group is preferably 1 to 10, more preferably 1 to 8, still more preferably 1 to 6, even more preferably 1 to 4, still even more preferably 1 to 3, and still more preferably 1 or 2. R a18 Examples of the alkyl group include methyl group, ethyl group, n-propyl group, isopropyl group, n-butyl group, and tert-butyl group. A a11 When -CH 2 - included in the alkanediyl group of A is replaced by -O-, -CO- or -NR a18 -, the number of carbon atoms before replacement is regarded as the number of carbon atoms of the alkanediyl group. A a11 Examples of the group in which -CH 2 - included in the alkanediyl group of A is replaced by -O-, -CO- or -NR a18 - include hydroxy group, carboxy group, carbonyl group, oxy group, amino group (the group in which -CH 2 - included in the methyl group is replaced by -NR a18 -), alkoxy group, alkoxycarbonyl group, alkylcarbonyl group, alkylamino group (the group in which -CH 2 - at any position included in the alkyl group is replaced by -NR a18 -), peptide group (the group in which -CH included in the ethylene group2 -CH 2 - is replaced by -CO-NR a18 - (a group in which -CH 2 - is replaced by -NR a18 -), an alkanediyl-oxy group, an alkanediyl-oxy-carbonyl group, an alkanediyl-carbonyl group, an alkanediyl-carbonyl-oxy group, an alkanediyl-sulfonyl group, an alkanediyl-thio group, an alkanediyl-amino group (wherein any -CH Examples of the alkylamino group include alkylamino groups having 1 to 11 carbon atoms, such as methylamino group, ethylamino group, propylamino group, butylamino group, pentylamino group, hexylamino group, octylamino group, etc. The number of carbon atoms of the alkylamino group is preferably 1 to 8, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. Examples of the alkanediylamino group include alkanediylamino groups having 1 to 11 carbon atoms, such as methyleneamino group, ethyleneamino group, propyleneamino group, etc. The number of carbon atoms of the alkanediylamino group is preferably 1 to 8, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. For example, as the group in which -CH a11 in the alkanediyl group of A 2 - is replaced by -O-, -CO- or -NR a18 -, there may be mentioned *-O-, *-CO-O-, *-O-CO-, *-CO-O-A a12 -CO-O-, *-O-CO-A a12 -O-, *-O-A a12 -CO-O-, *-CO-O-A a12 -O-CO-, *-O-CO-A a12 -O-CO-, *-CO-NR a18 -. Among them, *-CO-O-, *-CO-O-A a12 -CO-O-, *-O-A a12 -CO-O-, *-CO-NRa18 - is preferred. Here, A a12 represents an alkanediyl group having 1 to 8 carbon atoms, and * represents the bonding site with the carbon atom to which R a1 is bonded. The alkanediyl group of A a12 includes alkanediyl groups similar to A a11 within the range allowed by the upper limit of the number of carbon atoms. A a11 is preferably a single bond, *-CO-O- or *-CO-O-A a12 -CO-O-, more preferably a single bond, *-CO-O- or *-CO-O-CH 2 -CO-O-, and even more preferably a single bond or *-CO-O-. na1 is preferably 1, 2, 3 or 4, more preferably 1, 2 or 3, and even more preferably 1 or 2. na11 is preferably 0, 1, 2 or 3, more preferably 0, 1 or 2, and even more preferably 0 or 1. mc is preferably 0 or 1.

[0057] R a34 , R a35 and R a36 include alkyl groups, alicyclic hydrocarbon groups, aromatic hydrocarbon groups and groups combining these as the hydrocarbon groups. Examples of the alkyl group include methyl group, ethyl group, propyl group, butyl group, pentyl group, hexyl group, heptyl group, octyl group and the like. The alicyclic hydrocarbon group may be either monocyclic or polycyclic. Examples of the monocyclic alicyclic hydrocarbon group include cycloalkyl groups such as cyclopentyl group, cyclohexyl group, cycloheptyl group, cyclooctyl group and the like. Examples of the polycyclic alicyclic hydrocarbon group include decahydronaphthyl group, adamantyl group, norbornyl group and the following groups (* represents the bonding site.). TIFF2025081270000044.tif10151 Examples of the aromatic hydrocarbon group include aryl groups such as phenyl group, naphthyl group, anthryl group, biphenyl group, phenanthryl group and the like. Examples of the combined group include a group formed by combining the above-described alkyl group and alicyclic hydrocarbon group (e.g., alkylcycloalkyl group or cycloalkylalkyl group such as methylcyclohexyl group, dimethylcyclohexyl group, methylnorbornil group, cyclohexylmethyl group, adamantylmethyl group, adamantyldimethyl group, norbornylethyl group, etc.), aralkyl group such as benzyl group, aromatic hydrocarbon group having an alkyl group (p-methylphenyl group, p-tert-butylphenyl group, tolyl group, xylyl group, cumenyl group, mesityl group, 2,6-diethylphenyl group, 2-methyl-6-ethylphenyl group, etc.), aromatic hydrocarbon group having an alicyclic hydrocarbon group (p-cyclohexylphenyl group, p-adamantylphenyl group, etc.), aryl-cycloalkyl group such as phenylcyclohexyl group, etc. In particular, R a36 Examples of R include an alkyl group having 1 to 18 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a group formed by combining these. R a35 and R a36 Examples of the divalent hydrocarbon group having 2 to 20 carbon atoms formed by R and R bonding to each other and together with the -C-O- to which they are bonded include the following groups. * represents the bonding site, and one is the bonding site with R a34 and the other is the bonding site with R. TIFF2025081270000045.tif15105

[0058] R a34 is preferably a hydrogen atom. R a35 is preferably a hydrogen atom, an alkyl group having 1 to 12 carbon atoms, or an alicyclic hydrocarbon group having 3 to 12 carbon atoms, and more preferably a methyl group or an ethyl group. R a36 The hydrocarbon group of R is preferably an alkyl group having 1 to 18 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a group formed by combining these, and more preferably an alkyl group having 1 to 18 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, or an aralkyl group having 7 to 18 carbon atoms. R a36The alkyl group and alicyclic hydrocarbon group in [the compound] are preferably unsubstituted. R a36 The aromatic hydrocarbon group in [the compound] preferably has an aromatic ring having an aryloxy group with 6 to 10 carbon atoms.

[0059] -O-C(R a34 )(R a35 )-O-R a36 in the structural unit (a1-4) is eliminated upon contact with an acid (e.g., p-toluenesulfonic acid) to form a hydroxy group or a carboxy group. -X a1 -O-C(R a34 )(R a35 )-O-R a36 in the case of a benzene ring may be bonded to any of the o-position, m-position, or p-position with respect to the bonding position of A a11 . Among them, at least one is preferably bonded to the o-position or p-position, and more preferably bonded to the p-position. In the case of a naphthalene ring, when the bonding position of A a11 is at the 1-position, it may be bonded to any of the 2nd to 8th positions, and when the bonding position of A a11 is at the 2nd position, it may be bonded to any of the 1st and 3rd to 8th positions. Among them, when the bonding position of A a11 is at the 1-position, at least one is preferably bonded to the 3rd to 6th positions, and more preferably bonded to the 3rd or 4th position. When the bonding position of A a11 is at the 2nd position, it is preferably bonded to the 4th to 7th positions, and more preferably bonded to the 5th or 6th position.

[0060] Examples of the structural unit (a1-4) include structural units derived from the monomers described in JP-A-2010-204646. Preferably, the structural units represented by formula (a1-4-1) to formula (a1-4-42) respectively and R in the structural unit (a1-4) a1Examples of the structural unit in which the hydrogen atom corresponding to is replaced with a halogen atom, a haloalkyl group, or an alkyl group include, more preferably, structural units represented by Formula (a1-4-1) to Formula (a1-4-5), Formula (a1-4-10), Formula (a1-4-13), Formula (a1-4-14), Formula (a1-4-19), and Formula (a1-4-20). TIFF2025081270000046.tif155164

[0061] TIFF2025081270000047.tif75164When the resin (A) or the like contains the structural unit (a1-4), the content thereof is 10 mol% or more, preferably 15 mol% or more, more preferably 20 mol% or more, still more preferably 25 mol% or more, even more preferably 30 mol% or more, still even more preferably 40 mol% or more, and still more preferably 50 mol% or more, based on the total of all the structural units of the resin (A) or the like. Further, it is 95 mol% or less, preferably 90 mol% or less, more preferably 85 mol% or less, still more preferably 80 mol% or less, even more preferably 75 mol% or less, still even more preferably 70 mol% or less, and still more preferably 65 mol% or less. Specifically, it is preferably 10 to 95 mol%, more preferably 15 to 90 mol%, still more preferably 20 to 85 mol%, still even more preferably 20 to 70 mol%, and particularly preferably 20 to 60 mol%.

[0062] Examples of the structural unit derived from the (meth)acrylic monomer having the group (2) also include a structural unit represented by Formula (a1-5) (hereinafter sometimes referred to as "structural unit (a1-5)"). TIFF2025081270000048.tif4558[In Formula (a1-5), all the symbols have the same meanings as described above.]

[0063] R a8 Examples of the halogen atom and the alkyl group having 1 to 6 carbon atoms which may have a halogen atom in are the R of Formula (a1-0). a01Examples thereof include those similar to those exemplified above. In formula (a1-5), R a8 is preferably a hydrogen atom, a methyl group, or a trifluoromethyl group. L 51 is preferably an oxygen atom. L 52 and L 53 Among them, it is preferable that one of them is -O- and the other is -S-. s1 is preferably 1. s1' is preferably any integer from 0 to 2. Z a1 is preferably a single bond or *-CH 2 -CO-O-.

[0064] Examples of the structural unit (a1-5) include structural units derived from the monomers described in JP-A-2010-61117. Among them, the structural units represented by formulas (a1-5-1) to (a1-5-4) are preferable, and the structural unit represented by formula (a1-5-1) or formula (a1-5-2) is more preferable. TIFF2025081270000049.tif33133

[0065] When the resin (A) or the like contains the structural unit (a1-5), the content thereof is 1 mol% or more, preferably 2 mol% or more, more preferably 3 mol% or more, still more preferably 5 mol% or more, even more preferably 10 mol% or more, still even more preferably 20 mol% or more, and still more preferably 25 mol% or more, based on all the structural units of the resin (A) or the like. Also, 80 mol% or less is mentioned, preferably 70 mol% or less, more preferably 60 mol% or less, still more preferably 50 mol% or less, even more preferably 45 mol% or less, still even more preferably 40 mol% or less, and still more preferably 30 mol% or less. Specifically, 1 to 50 mol% is preferable, 3 to 45 mol% is more preferable, 5 to 40 mol% is still more preferable, and 5 to 30 mol% is still more preferable.

[0066] Examples of the structural unit having the group (1) in the structural unit (a1) include a structural unit represented by the formula (a1-6) (hereinafter sometimes referred to as "structural unit (a1-6)"). TIFF2025081270000050.tif3481[In the formula (a1-6), all the symbols have the same meanings as described above.]

[0067] R a61 Examples of the halogen atom and the alkyl group having 1 to 6 carbon atoms which may have a halogen atom in include the same as those exemplified for R in the formula (a1-0). a01 The same as those exemplified above can be mentioned. R a61 is preferably a hydrogen atom, a methyl group or a trifluoromethyl group. R a62 、R a63 、R a64 and R a65 Examples of the alkyl group in include a methyl group, an ethyl group, a propyl group, a butyl group, a pentyl group, a hexyl group and the like. The alkyl group is preferably an alkyl group having 1 to 4 carbon atoms, more preferably an alkyl group having 1 to 3 carbon atoms, and even more preferably a methyl group or an ethyl group. R a62 、R a63 and R a64 Examples of the cyclic hydrocarbon group in include an alicyclic hydrocarbon group and an aromatic hydrocarbon group. The alicyclic hydrocarbon group may be either monocyclic or polycyclic. Examples of the monocyclic alicyclic hydrocarbon group include a cyclopentyl group, a cyclohexyl group, a cycloheptyl group, a cyclooctyl group and the like. Examples of the polycyclic alicyclic hydrocarbon group include a decahydronaphthyl group, an adamantyl group, a norbornyl group and the like. The number of carbon atoms of the alicyclic hydrocarbon group is preferably 3 to 16, more preferably 3 to 12. Examples of the aromatic hydrocarbon group include a phenylene group, a naphthylene group and the like. Examples of the substituent that the cyclic hydrocarbon group may have include a halogen atom, a hydroxy group, an alkyl group having 1 to 6 carbon atoms, an alkoxy group having 1 to 6 carbon atoms, an alkoxyalkyl group having 2 to 12 carbon atoms, an alkoxyalkoxy group having 2 to 12 carbon atoms, an alkylcarbonyl group having 2 to 4 carbon atoms, an alkylcarbonyloxy group having 2 to 4 carbon atoms, an acryloyloxy group, or a methacryloyloxy group. R a62 and R a63 Examples of the ring formed by bonding with each other include an adamantane ring, a cyclopentane ring, or a cyclohexane ring. Specifically, when R a62 and R a63 bond with each other to form a ring, examples of -C(R a62 )(R a63 )(R a64 ) include the following groups. * represents the bonding site with an oxygen atom. The number of carbon atoms in the ring is preferably 3 to 16, more preferably 3 to 12. TIFF2025081270000051.tif33110

[0068] L a61 and L a62 Examples of the alkanediyl group having 1 to 4 carbon atoms in L L a61 and L a62 each independently preferably include a methylene group or an ethylene group. X a61 is preferably a single bond or -CO-O-*, more preferably a single bond. X a62 is preferably a single bond or *-O-L a61 -, more preferably a single bond.

[0069] Examples of the aromatic hydrocarbon group having 6 to 20 carbon atoms for Ar include a phenylene group, 1-naphthylene group, 2-naphthylene group, 1-anthrylene group, 9-anthrylene group, biphenylene group, 1-phenanthrylene group, 2-phenanthrylene group, and the like. Examples of the substituent that the aromatic hydrocarbon group may have include a halogen atom, hydroxy group, alkyl group having 1 to 6 carbon atoms, alkoxy group having 1 to 6 carbon atoms, alkoxyalkyl group having 2 to 12 carbon atoms, alkoxyalkoxy group having 2 to 12 carbon atoms, alkylcarbonyl group having 2 to 4 carbon atoms, alkylcarbonyloxy group having 2 to 4 carbon atoms, acryloyloxy group, or methacryloyloxy group.

[0070] Examples of the halogen atom include a fluorine atom, iodine atom, chlorine atom, bromine atom, and the like. Examples of the alkyl group include a methyl group, ethyl group, propyl group, isopropyl group, butyl group, sec-butyl group, tert-butyl group, pentyl group, and hexyl group. The alkyl group preferably has 1 to 4 carbon atoms, more preferably a methyl group or an ethyl group, and even more preferably a methyl group. Examples of the alkoxy group include a methoxy group, ethoxy group, propoxy group, isopropoxy group, butoxy group, sec-butoxy group, tert-butoxy group, pentyloxy group, and hexyloxy group. The alkoxy group preferably has 1 to 4 carbon atoms, more preferably a methoxy group or an ethoxy group, and even more preferably a methoxy group. Examples of the alkoxyalkyl group include a methoxymethyl group, ethoxyethyl group, propoxymethyl group, isopropoxymethyl group, butoxymethyl group, sec-butoxymethyl group, and tert-butoxymethyl group. The alkoxyalkyl group preferably has 2 to 8 carbon atoms, more preferably a methoxymethyl group or an ethoxyethyl group, and even more preferably a methoxymethyl group. Examples of the alkoxyalkoxy group include a methoxymethoxy group, a methoxyethoxy group, an ethoxymethoxy group, an ethoxyethoxy group, a propoxymethoxy group, an isopropoxymethoxy group, a butoxymethoxy group, a sec-butoxymethoxy group, and a tert-butoxymethoxy group. The alkoxyalkoxy group is preferably an alkoxyalkoxy group having 2 to 8 carbon atoms, more preferably a methoxyethoxy group or an ethoxyethoxy group. Examples of the alkylcarbonyl group include an acetyl group, a propionyl group, and a butyryl group. The alkylcarbonyl group is preferably an alkylcarbonyl group having 2 to 3 carbon atoms, more preferably an acetyl group. Examples of the alkylcarbonyloxy group include an acetyloxy group, a propionyloxy group, and a butyryloxy group. The alkylcarbonyloxy group is preferably an alkylcarbonyloxy group having 2 to 3 carbon atoms, more preferably an acetyloxy group. Preferred substituents include a halogen atom, a hydroxy group, an alkyl group having 1 to 4 carbon atoms, an alkoxy group having 1 to 4 carbon atoms, or an alkoxyalkoxy group having 2 to 8 carbon atoms. More preferred are a fluorine atom, an iodine atom, a hydroxy group, a methyl group, a methoxy group, an ethoxy group, an ethoxyethoxy group, or an ethoxymethoxy group. Even more preferred are a fluorine atom, an iodine atom, a hydroxy group, a methyl group, a methoxy group, or an ethoxyethoxy group. Ar is preferably a phenylene group which may have a substituent, more preferably a phenylene group which may have a hydroxy group.

[0071] Examples of the structural unit (a1-6) include structural units represented by Formula (a1-6-1) to Formula (a1-6-44). Structural units represented by Formula (a1-6-1) to Formula (a1-6-9) are preferred, structural units represented by Formula (a1-6-1), Formula (a1-6-2), Formula (a1-6-4), Formula (a1-6-5), Formula (a1-6-7), or Formula (a1-6-8) are more preferred, and structural units represented by Formula (a1-6-1) or Formula (a1-6-2) are even more preferred. In the following structural units, R a61A structural unit in which a hydrogen atom corresponding to is replaced with a methyl group or the like, and in the following structural units, R a61 A structural unit in which a methyl group corresponding to a61 is replaced with a hydrogen atom or the like is also cited as the structural unit (a1-6). TIFF2025081270000052.tif227164

[0072] When the resin (A) or the like contains the structural unit (a1-6), the content thereof is 3 mol% or more, preferably 5 mol% or more, more preferably 7 mol% or more, still more preferably 10 mol% or more, even more preferably 20 mol% or more, still even more preferably 30 mol% or more, and even more preferably 40 mol% or more, based on all the structural units of the resin (A) or the like. Also, 80 mol% or less is cited, preferably 75 mol% or less, more preferably 70 mol% or less, still more preferably 65 mol% or less. Specifically, it is preferably 3 to 80 mol%, more preferably 5 to 75 mol%, still more preferably 7 to 70 mol%, even more preferably 7 to 65 mol%, and particularly preferably 10 to 65 mol%.

[0073] Also, as the structural unit (a1), the following structural units are also cited. TIFF2025081270000053.tif33167

[0074] When the resin (A) or the like contains structural units represented by the formulas (a1-7-1) to (a1-7-7), the content thereof is 10 mol% or more, preferably 15 mol% or more, more preferably 20 mol% or more, still more preferably 25 mol% or more, even more preferably 30 mol% or more, still even more preferably 40 mol% or more, and even more preferably 50 mol% or more, based on all the structural units of the resin (A) or the like. Further, 95 mol% or less is mentioned, preferably 90 mol% or less, more preferably 85 mol% or less, still more preferably 80 mol% or less, even more preferably 75 mol% or less, still even more preferably 70 mol% or less, and even more preferably 60 mol% or less. Specifically, 10 to 95 mol% is preferable, 15 to 90 mol% is more preferable, 20 to 85 mol% is still more preferable, 20 to 70 mol% is even more preferable, and 20 to 60 mol% is particularly preferable.

[0075] In addition, examples of the structural unit (a1) also include the following structural units. TIFF2025081270000054.tif51120 When the resin (A) or the like contains structural units represented by the formulas (a1-8-1) to (a1-8-3), the content thereof is 10 mol% or more, preferably 15 mol% or more, more preferably 20 mol% or more, still more preferably 25 mol% or more, even more preferably 30 mol% or more, still even more preferably 40 mol% or more, and even more preferably 50 mol% or more, based on all the structural units of the resin (A) or the like. Further, 95 mol% or less is mentioned, preferably 90 mol% or less, more preferably 85 mol% or less, still more preferably 80 mol% or less, even more preferably 75 mol% or less, still even more preferably 70 mol% or less, and even more preferably 60 mol% or less. Specifically, 10 to 60 mol% is preferable, 15 to 55 mol% is more preferable, 20 to 50 mol% is still more preferable, 20 to 45 mol% is even more preferable, and 20 to 40 mol% is particularly preferable.

[0076] 〈Structural unit (s)〉 The structural unit(s) is / are derived from a monomer having no acid-labile group (hereinafter sometimes referred to as "monomer(s)"). As the monomer from which the structural unit(s) is / are derived, a monomer having no acid-labile group known in the resist field can be used. The structural unit(s) preferably has a hydroxy group, a carboxy group or a lactone ring. By using a resin containing a structural unit having a hydroxy group or a carboxy group and no acid-labile group (hereinafter sometimes referred to as "structural unit (a2)") and / or a structural unit having a lactone ring and no acid-labile group (hereinafter sometimes referred to as "structural unit (a3)") in the resist composition of the present invention, the resolution of the resist pattern and the adhesion to the substrate can be improved. In addition to the above-described structural units, the structural unit(s) includes a structural unit having a halogen atom (hereinafter sometimes referred to as "structural unit (a4)"), a structural unit having a non-leaving hydrocarbon group (hereinafter sometimes referred to as "structural unit (a5)"), a structural unit having a sultone structure (hereinafter sometimes referred to as "structural unit (a6)"), or a structural unit that decomposes upon exposure to generate an acid (hereinafter sometimes referred to as "structural unit (a7)"), and the like.

[0077] 〈Structural unit (a2)〉 The structural unit (a2) is a structural unit represented by the formula (a2) and has an alcoholic hydroxy group, a phenolic hydroxy group or a carboxy group. TIFF2025081270000055.tif4095[In the formula (a2), R a2 represents a hydrogen atom, a halogen atom or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. A a21 represents a single bond or an alkanediyl group having 1 to 12 carbon atoms, and -CH 2 - contained in the alkanediyl group may be replaced by -O-, -CO- or -NR a28 -. R a28 represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. L a21represents a single bond or a hydrocarbon group having 1 to 28 carbon atoms, and the hydrocarbon group may have a substituent, and -CH contained in the hydrocarbon group 2 - may be replaced by -O-, -CO-, -S- or -SO 2 -. L a22 represents a single bond or a chain hydrocarbon group having 1 to 12 carbon atoms which may have a fluorine atom, and -CH contained in the chain hydrocarbon group 2 - may be replaced by -O- or -CO-. na2 represents any integer from 1 to 5. When na2 is 2 or more, a plurality of Ls a22 may be the same as or different from each other. R a2 Examples of the halogen atom in R include a fluorine atom, an iodine atom, a chlorine atom, a bromine atom and the like. R a2 Examples of the alkyl group having 1 to 6 carbon atoms which may have a halogen atom in R include a trifluoromethyl group, a difluoromethyl group, a methyl group, a perfluoroethyl group, a 2,2,2-trifluoroethyl group, a 1,1,2,2-tetrafluoroethyl group, an ethyl group, a perfluoropropyl group, a 2,2,3,3,3-pentafluoropropyl group, a propyl group, a perfluorobutyl group, a 1,1,2,2,3,3,4,4-octafluorobutyl group, a butyl group, a perfluoropentyl group, a 2,2,3,3,4,4,5,5,5-nonafluoropentyl group, a pentyl group, a hexyl group, a perfluorohexyl group, a chloromethyl group, a bromomethyl group, an iodomethyl group and the like. The number of carbon atoms of the alkyl group is preferably 1 to 4, more preferably 1 to 3, and still more preferably 1 or 2. R a2 is preferably a hydrogen atom or an alkyl group having 1 to 4 carbon atoms, more preferably a hydrogen atom, a methyl group or an ethyl group, and still more preferably a hydrogen atom or a methyl group.

[0078] A a21Examples of the alkanediyl group include linear alkanediyl groups such as methylene group, ethylene group, propane-1,3-diyl group, propane-1,2-diyl group, butane-1,4-diyl group, pentane-1,5-diyl group, hexane-1,6-diyl group, heptane-1,7-diyl group, octane-1,8-diyl group, nonane-1,9-diyl group, decane-1,10-diyl group, undecane-1,11-diyl group, dodecane-1,12-diyl group, etc., and branched alkanediyl groups such as butane-1,3-diyl group, 2-methylpropane-1,3-diyl group, 2-methylpropane-1,2-diyl group, pentane-1,4-diyl group, 2-methylbutane-1,4-diyl group, heptane-1,6-diyl group, octane-1,7-diyl group, nonane-1,8-diyl group, decane-1,9-diyl group, undecane-1,10-diyl group, etc. The number of carbon atoms in the alkanediyl group is preferably 1 to 10, more preferably 1 to 8, still more preferably 1 to 6, even more preferably 1 to 4, still even more preferably 1 to 3, and even more preferably 1 or 2. R a28 Examples of the alkyl group include methyl group, ethyl group, n-propyl group, isopropyl group, n-butyl group, and tert-butyl group. A a21 When -CH 2 - included in the alkanediyl group of A is replaced by -O-, -CO- or -NR a28 -, the number of carbon atoms before replacement is regarded as the number of carbon atoms of the alkanediyl group. A a21 When -CH 2 - included in the alkanediyl group of A is replaced by -O-, -CO- or -NR a28As the group replaced by - as described above, there may be mentioned a hydroxy group, a carboxy group, a carbonyl group, an oxy group, an amino group, an alkoxy group, an alkoxycarbonyl group, an alkylcarbonyl group, an alkylamino group, a peptide group, an alkanediyl-oxy group, an alkanediyl-oxycarbonyl group, an alkanediylcarbonyl group, an alkanediylcarbonyl-oxy group, an alkanediylsulfonyl group, an alkanediylthio group, an alkanediylamino group and the like. These replaced groups may be those similar to those exemplified herein, within the range allowed by the upper limit of the number of carbon atoms. Among them, A a21 The -CH 2 - contained in the alkanediyl group of - may be replaced by -O-, -CO- or -NR a28 - The groups replaced thereby include *-O-, *-CO-O-, *-O-CO-, *-CO-O-A a22 -CO-O-, *-O-CO-A a22 -O-, *-O-A a22 -CO-O-, *-CO-O-A a22 -O-CO-, *-O-CO-A a22 -O-CO-, *-CO-NR a28 - Among them, *-CO-O-, *-CO-O-A a22 -CO-O-, *-O-A a22 -CO-O-, *-CO-NR a28 - are preferred. Here, A a22 represents an alkanediyl group having 1 to 8 carbon atoms, and * represents the bonding site with the carbon atom to which R a2 is bonded. The alkanediyl group of A a22 may be an alkanediyl group similar to A a21 within the range allowed by the upper limit of the number of carbon atoms. A a21 is preferably a single bond, *-CO-O- or *-CO-O-A a22 -CO-O-, more preferably a single bond, *-CO-O- or *-CO-O-CH 2 -CO-O-, and even more preferably a single bond or *-CO-O-.

[0079] L a21The hydrocarbon group in [description] is a (na2 + 1)-valent hydrocarbon group, and examples include linear or branched chain hydrocarbon groups, monocyclic or polycyclic (including spiro rings, condensed rings, bridged rings, etc.) alicyclic hydrocarbon groups, and cyclic hydrocarbon groups such as aromatic hydrocarbon groups. A group formed by combining two or more of these groups (for example, a hydrocarbon group formed from an alicyclic hydrocarbon group or an aromatic hydrocarbon group and a chain hydrocarbon group) may also be used. L a21 Examples of the chain hydrocarbon group of [description] include divalent to hexavalent chain hydrocarbon groups such as alkanediyl groups, alkanetriyl groups, alkanetetrayl groups, alkanepentayl groups, and alkanexayl groups. Examples of the alkanediyl group include, for example, an alkanediyl group similar to A a21 as described above. Examples of the alkanetriyl group include methanetriyl group, ethanetriyl group, propanetriyl group, butanetriyl group, pentanetriyl group, hexanetriyl group, heptanetriyl group, octanetriyl group, nonanetriyl group, decanetriyl group, undecanetriyl group, dodecanetriyl group, tridecanetriyl group, tetradecanetriyl group, pentadecanetriyl group, hexadecanetriyl group, and heptadecanetriyl group. Examples of the alkanetetrayl group include methanetetrayl group, ethanetetrayl group, propanetetrayl group, butanetetrayl group, pentanetetrayl group, hexanetetrayl group, heptanetetrayl group, octanetetrayl group, nonanetetrayl group, decanetetrayl group, undecanetetrayl group, dodecanetetrayl group, tridecanetetrayl group, tetradecanetetrayl group, pentadecanetetrayl group, hexadecanetetrayl group, and heptadecanetetrayl group. Examples of the alkanepentayl group include methanepentayl group, ethanepentayl group, propanepentayl group, butanepentayl group, pentanepentayl group, and hexanepentayl group. Also, examples include a group in which one or more hydrogen atoms of the above-described group are replaced with a bonding site. The number of carbon atoms in the chain hydrocarbon group is preferably from 1 to 18, more preferably from 1 to 12, still more preferably from 1 to 10, even more preferably from 1 to 9, yet even more preferably from 1 to 8, still even more preferably from 1 to 6, yet still even more preferably from 1 to 5, and particularly preferably from 1 to 4. L a21 Examples of the monocyclic and polycyclic alicyclic hydrocarbon groups in a21 include the following alicyclic hydrocarbon groups and the like. The bonding site can be at any position. TIFF2025081270000056.tif46168For example, divalent to hexavalent alicyclic hydrocarbon groups such as cycloalkanediyl groups, cycloalkanetriyl groups, cycloalkanetetrayl groups, cycloalkanepentayl groups, cyclohexanehexayl groups, and the like can be mentioned. Specifically, monocyclic alicyclic hydrocarbon groups such as cyclobutane-1,3-diyl group, cyclopentane-1,3-diyl group, cyclohexane-1,4-diyl group, cyclooctane-1,5-diyl group, cyclopropanetriyl group, cyclobutanetriyl group, cyclopentanetriyl group, cyclohexanetriyl group, cycloheptanetriyl group, cyclooctanetriyl group, cyclodecanetriyl group, cyclopropanetetrayl group, cyclobutanetetrayl group, cyclopentanetetrayl group, cyclohexanetetrayl group, cycloheptanetetrayl group, cyclooctanetetrayl group, cyclodecanetetrayl group and polycyclic alicyclic hydrocarbon groups such as norbornane-1,4-diyl group, norbornane-2,5-diyl group, adamantane-1,5-diyl group, adamantane-2,6-diyl group, decahydronaphthalenediyl group, bicyclo[3.3.0]octanediy group, norbornanetriyl group, adamantanetriyl group, decahydronaphthalenetriyl group, bicyclo[3.3.0]octanetriyl group, norbornanetetrayl group, adamantanetetrayl group, decahydronaphthalenetetrayl group, bicyclo[3.3.0]octanetetrayl group can be mentioned. In addition, groups in which one or more hydrogen atoms of the above-mentioned groups are replaced by a bonding site and the like can also be mentioned. The number of carbon atoms in the alicyclic hydrocarbon group is preferably 3 to 20, more preferably 3 to 18, still more preferably 3 to 16, even more preferably 3 to 12, yet even more preferably 6 to 12, and still even more preferably 6 to 10. L a21 Examples of the aromatic hydrocarbon group in a21 include divalent to hexavalent aromatic hydrocarbon groups such as an arylene group, an arenetriyl group, an arenetetrayl group, an arenepentayl group, and an arenexayl group. Specifically, a phenylene group, a naphthylene group, an anthrylene group, a biphenylene group, a phenanthrylene group, a benzenetriyl group, a naphthalenetriyl group, an anthracenetriyl group, a biphenylenetriyl group, a phenanthrenetriyl group, a benzenetetrayl group, a naphthalenetetrayl group, an anthracenetetrayl group, a biphenylenetetrayl group, a phenanthrenetetrayl group, etc. can be mentioned. In addition, groups in which one or more hydrogen atoms of the above-described groups are replaced by a bonding site, etc. can also be mentioned. The number of carbon atoms in the aromatic hydrocarbon group is preferably 6 to 20, more preferably 6 to 18, still more preferably 6 to 14, even more preferably 6 to 12, and yet even more preferably 6 to 10. Examples of the group formed by combining two or more types include a group formed by combining an alicyclic hydrocarbon group and a chain hydrocarbon group, a group formed by combining an aromatic hydrocarbon group and a chain hydrocarbon group, a group formed by combining an alicyclic hydrocarbon group and an aromatic hydrocarbon group, a group formed by combining an alicyclic hydrocarbon group, a chain hydrocarbon group, and an aromatic hydrocarbon group, etc. In the combination, the alicyclic hydrocarbon group, the aromatic hydrocarbon group, and the chain hydrocarbon group may each be combined with two or more types. Also, any group may be bonded to A a21 and L a22 and may be bonded. -CH 2 - contained in the hydrocarbon group is -O-, -S-, -SO 2-Or as the group replaced by -CO-, there are a hydroxy group, a carboxy group, a thiol group, an alkoxy group, an alkylthio group, an alkoxycarbonyl group, an alkoxycarbonyloxy group, an alkylsulfonyl group, an alkylcarbonyl group, an alkylcarbonyloxy group, an oxy group, a carbonyl group, a thio group, a sulfonyl group, an alkanediyl-oxy group, an alkanediyl-oxycarbonyl group, an alkanediylcarbonyl group, an alkanediylcarbonyloxy group, an alkanediylsulfonyl group, an alkanediylthio group, a cycloalkoxy group, a cycloalkylalkoxy group, an aromatic-hydrocarbon-group-carbonyloxy group, an aromatic-hydrocarbon-group-carbonyl group, an aromatic-hydrocarbon-group-oxy group, a group formed by combining two or more of these groups, etc. Further, a group in which one or more hydrogen atoms of these groups are replaced by a bonding site, etc. are also included. These replaced groups include those similar to the groups exemplified in this specification within the range where the upper limit of the number of carbon atoms permits.

[0080] In addition, -CH 2 - contained in the alicyclic hydrocarbon group is replaced by -O-, -S-, -CO- or -SO 2 - As the group replaced, those similar to the groups exemplified in this specification are included within the range where the upper limit of the number of carbon atoms permits. -CH contained in the group combining the alicyclic hydrocarbon group and the aromatic hydrocarbon group 2 - is replaced by -O-, -S-, -CO- or -SO 2 - As the group replaced, the following groups, etc. are also included. The bonding site can be at any position. TIFF2025081270000057.tif26164L a21 The hydrocarbon group in may have one or more substituents. Examples of the substituent include a halogen atom, a haloalkyl group having 1 to 12 carbon atoms, an alkyl group having 1 to 16 carbon atoms (the -CH 2 - contained in the alkyl group may be replaced by -O- or -CO-), an acryloyloxy group or a methacryloyloxy group, etc. Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, an iodine atom, etc. La21 In the hydrocarbon group, by having a halogen atom as a substituent, it can substantially have substituents such as a haloalkyl group. Examples of the haloalkyl group include an alkyl fluoride group, an alkyl chloride group, an alkyl bromide group, an alkyl iodide group, etc. For example, a chloromethyl group, a bromomethyl group, an iodomethyl group, a fluoromethyl group, a difluoromethyl group, a trifluoromethyl group, a perfluoroethyl group, a perfluoropropyl group, a perfluorobutyl group, etc. can be mentioned. The number of carbon atoms of the haloalkyl group is preferably 1 to 8, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. L a21 By including a branched structure in the hydrocarbon group of L a21 can substantially have substituents such as an alkyl group. Examples of the alkyl group include a methyl group, an ethyl group, an n-propyl group, an isopropyl group, an n-butyl group, a sec-butyl group, a tert-butyl group, a pentyl group, a hexyl group, a heptyl group, a 2-ethylhexyl group, an octyl group, a nonyl group, a decyl group, an undecyl group, a dodecyl group, etc. The number of carbon atoms of the alkyl group is preferably 1 to 12, more preferably 1 to 10, still more preferably 1 to 8, even more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. L a21 In the hydrocarbon group of L, when -CH 2 - is replaced by a group such as -O- or -CO-, L a21can substantially have substituents such as a hydroxy group, a carboxy group, an alkoxy group, a thiol group, a sulfonyl group, an alkoxycarbonyl group, an alkylcarbonyl group, an alkylcarbonyloxy group, an alkoxyalkyl group, an alkoxyalkoxy group, an acryloyloxy group, a methacryloyloxy group, etc. The number of carbon atoms of the alkoxy group is preferably 1 to 12, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. The number of carbon atoms of the alkoxycarbonyl group, the alkylcarbonyl group, and the alkylcarbonyloxy group is preferably 2 to 12, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 to 3. The number of carbon atoms of the alkoxyalkyl group and the alkoxyalkoxy group is preferably 2 to 12, more preferably 2 to 8, still more preferably 2 to 6, and even more preferably 2 to 4. Examples of the above groups also include those similar to the ones exemplified in this specification. L a21 Examples of the substituent that the hydrocarbon group in L may have include a halogen atom, a haloalkyl group having 1 to 8 carbon atoms, or an alkyl group having 1 to 12 carbon atoms (the -CH 2 - included in the alkyl group may be replaced by -O- or -CO-).) are preferred, a halogen atom, a haloalkyl group having 1 to 6 carbon atoms, or an alkyl group having 1 to 10 carbon atoms (the -CH 2 - included in the alkyl group may be replaced by -O- or -CO-).) are more preferred, a halogen atom, a haloalkyl group having 1 to 4 carbon atoms, an alkyl group having 1 to 4 carbon atoms, a hydroxy group, an alkoxy group having 1 to 4 carbon atoms, or an alkoxyalkoxy group having 2 to 8 carbon atoms are still more preferred, a fluorine atom, an iodine atom, a trifluoromethyl group, a methyl group, a hydroxy group, a methoxy group, an ethoxy group, an ethoxyethoxy group, or an ethoxymethoxy group are even more preferred, and a fluorine atom, an iodine atom, a trifluoromethyl group, a methyl group, a hydroxy group, a methoxy group, or an ethoxyethoxy group are still even more preferred. Also, when the alkanediyl group of L a21 is replaced by -O- or -CO-, etc., for example, *-L a23-X a21 -(L a23 represents an alkanediyl group having 1 to 8 carbon atoms, and X a21 represents -O-, -O-CO-, -CO-O- or -O-CO-O-, and * represents the bonding site with A a21 .) It is also preferable that it is so. L a21 is a single bond, an optionally substituted chain hydrocarbon group having 1 to 12 carbon atoms (provided that -CH 2 - contained in the chain hydrocarbon group may be replaced by -O- or -CO-), an optionally substituted cyclic hydrocarbon group having 3 to 20 carbon atoms (provided that -CH 2 - contained in the cyclic hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO 2 -), or a group formed by combining an optionally substituted chain hydrocarbon group having 1 to 8 carbon atoms and an optionally substituted cyclic hydrocarbon group having 3 to 20 carbon atoms (provided that -CH 2 - contained in the chain hydrocarbon group may be replaced by -O- or -CO-, and -CH 2 - contained in the cyclic hydrocarbon group may be replaced by -O-, -S-, -SO 2 - or -CO-). It is preferably so, an optionally substituted chain hydrocarbon group having 1 to 10 carbon atoms (provided that -CH 2 - contained in the chain hydrocarbon group may be replaced by -O- or -CO-), an optionally substituted cyclic hydrocarbon group having 3 to 18 carbon atoms (provided that -CH 2 - contained in the cyclic hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO 2 -), or a group formed by combining an optionally substituted chain hydrocarbon group having 1 to 6 carbon atoms and an optionally substituted cyclic hydrocarbon group having 3 to 18 carbon atoms (provided that -CH 2 - contained in the chain hydrocarbon group may be replaced by -O- or -CO-, and -CH 2 - contained in the cyclic hydrocarbon group may be replaced by -O-, -S-, -SO 2 - or -CO-). It is more preferably so.

[0081] L a22 Examples of the chain hydrocarbon group having 1 to 12 carbon atoms represented by L include linear alkanediyl groups such as methylene group, ethylene group, propane-1,3-diyl group, propane-1,2-diyl group, butane-1,4-diyl group, pentane-1,5-diyl group, hexane-1,6-diyl group, heptane-1,7-diyl group, octane-1,8-diyl group, nonane-1,9-diyl group, decane-1,10-diyl group, undecane-1,11-diyl group, dodecane-1,12-diyl group, etc., and branched alkanediyl groups such as ethane-1,1-diyl group, propane-1,1-diyl group, propane-1,2-diyl group, propane-2,2-diyl group, 1-methylpropane-1,3-diyl group, 2-methylpropane-1,3-diyl group, 2-methylpropane-1,2-diyl group, 1-dimethylpropane-1,3-diyl group, pentane-2,4-diyl group, pentane-1,4-diyl group, 2-methylbutane-1,4-diyl group, etc. The number of carbon atoms of the chain hydrocarbon group is preferably 1 to 10, more preferably 1 to 8, still more preferably 1 to 6, and even more preferably 1 to 4. Examples of the group in which -CH 2 - contained in the chain hydrocarbon group is replaced by -O- or -CO- are the same as those exemplified in this specification. L a22 The fluorine atom that L has may be one or two or more. na2 is preferably any integer from 1 to 4, and more preferably any integer from 1 to 3. L a21 Examples of the structural unit (a2) when L is a single bond or a chain hydrocarbon group include, for example, the following structural units. Among the following structural units, the structural units in which the methyl group corresponding to R a2 is replaced by a hydrogen atom or the like are also suitable structural units of the structural unit (a2) in the same manner as the following structural units. TIFF2025081270000058.tif67168

[0082] When producing a resist pattern from the resist composition of the present invention, when using a high-energy ray such as a KrF excimer laser (248 nm), an electron beam, or EUV (extreme ultraviolet light) as the exposure light source, as the structural unit (a2), a structural unit (a2) having a phenolic hydroxy group is preferable, and it is more preferable to use the structural unit (a2-A) described later. Further, when using an ArF excimer laser (193 nm) or the like, as the structural unit (a2), a structural unit (a2) having an alcoholic hydroxy group is preferable, and it is more preferable to use the structural unit (a2-C) described later. The structural unit (a2) may contain one kind alone or two or more kinds.

[0083] In the structural unit (a2), L a21 When is a cyclic hydrocarbon group, examples of the structural unit having a phenolic hydroxy group or a carboxy group include a structural unit represented by the formula (a2-A) (hereinafter sometimes referred to as "structural unit (a2-A)"). TIFF2025081270000059.tif30128 [In the formula (a2-A), all the symbols have the same meanings as described above.]

[0084] R a2 and A a21 are each a group similar to those exemplified in the formula (a2). R a27 Examples of the halogen atom of include a fluorine atom, a chlorine atom, an iodine atom, and a bromine atom. R a27Examples of the alkyl group having 1 to 6 carbon atoms which may have a halogen atom include trifluoromethyl group, difluoromethyl group, methyl group, perfluoroethyl group, 2,2,2-trifluoroethyl group, 1,1,2,2-tetrafluoroethyl group, ethyl group, perfluoropropyl group, 2,2,3,3,3-pentafluoropropyl group, propyl group, perfluorobutyl group, 1,1,2,2,3,3,4,4-octafluorobutyl group, butyl group, perfluoropentyl group, 2,2,3,3,4,4,5,5,5-nonafluoropentyl group, pentyl group, hexyl group, perfluorohexyl group, chloromethyl group, bromomethyl group, and iodomethyl group. The alkyl group is preferably an alkyl group having 1 to 4 carbon atoms, more preferably an alkyl group having 1 to 3 carbon atoms, still more preferably a methyl group or an ethyl group, and even more preferably a methyl group. R a27 Examples of the alkoxy group include methoxy group, ethoxy group, propoxy group, isopropoxy group, butoxy group, sec-butoxy group, and tert-butoxy group. The alkoxy group is preferably an alkoxy group having 1 to 4 carbon atoms, more preferably an alkoxy group having 1 to 3 carbon atoms, still more preferably a methoxy group or an ethoxy group, and even more preferably a methoxy group. R a27 Examples of the alkoxyalkyl group include methoxymethyl group, ethoxyethyl group, propoxymethyl group, isopropoxymethyl group, butoxymethyl group, sec-butoxymethyl group, and tert-butoxymethyl group. The alkoxyalkyl group is preferably an alkoxyalkyl group having 2 to 8 carbon atoms, more preferably a methoxymethyl group or an ethoxyethyl group, and still more preferably a methoxymethyl group. R a27Examples of the alkoxyalkoxy group include a methoxymethoxy group, a methoxyethoxy group, an ethoxymethoxy group, an ethoxyethoxy group, a propoxymethoxy group, an isopropoxymethoxy group, a butoxymethoxy group, a sec-butoxymethoxy group, and a tert-butoxymethoxy group. The alkoxyalkoxy group is preferably an alkoxyalkoxy group having 2 to 8 carbon atoms, more preferably a methoxyethoxy group or an ethoxyethoxy group. R a27 Examples of the alkylcarbonyl group include an acetyl group, a propionyl group, and a butyryl group. The alkylcarbonyl group is preferably an alkylcarbonyl group having 2 to 3 carbon atoms, more preferably an acetyl group. R a27 Examples of the alkylcarbonyloxy group include an acetyloxy group, a propionyloxy group, and a butyryloxy group. The alkylcarbonyloxy group is preferably an alkylcarbonyloxy group having 2 to 3 carbon atoms, more preferably an acetyloxy group. R a27 is preferably a halogen atom, a hydroxy group, a carboxy group, an optionally halogenated alkyl group having 1 to 4 carbon atoms, an alkoxy group having 1 to 4 carbon atoms, or an alkoxyalkoxy group having 2 to 8 carbon atoms, more preferably a fluorine atom, an iodine atom, a hydroxy group, a methyl group, a methoxy group, an ethoxy group, an ethoxyethoxy group, or an ethoxymethoxy group, still more preferably a fluorine atom, an iodine atom, a hydroxy group, a methyl group, a methoxy group, or an ethoxyethoxy group. nA2 is preferably 1, 2, 3, or 4, more preferably 1, 2, or 3, still more preferably 1 or 2. na21 is preferably 0, 1, 2, or 3, more preferably 0, 1, or 2, still more preferably 0 or 1. mc is preferably 0 or 1. -X a2 -OH, in the case of a benzene ring, may be bonded to any of the o-position, m-position, or p-position with respect to the bonding position of A a21 . Among them, at least one is preferably bonded to the m-position or p-position, more preferably bonded to the m-position. In the case of a naphthalene ring, A a21When the bonding position of is the 1st position, it may be bonded to any of the 2nd to 8th positions, A a21 When the bonding position of is the 2nd position, it may be bonded to the 1st position and any of the 3rd to 8th positions. Among them, A a21 When the bonding position of is the 1st position, at least one is preferably bonded to the 3rd to 6th positions, and more preferably bonded to the 3rd or 4th position. A a21 When the bonding position of is the 2nd position, it is preferably bonded to the 4th to 7th positions, and more preferably bonded to the 5th or 6th position.

[0085] Examples of the structural unit (a2-A) include structural units derived from monomers described in JP-A-2010-204634 and JP-A-2012-12577. Examples of the structural unit (a2-A) include structural units represented by formula (a2-2-1) to formula (a2-2-32), formula (a2-3-1) to formula (a2-3-24), and in the structural units represented by formula (a2-2-1) to formula (a2-2-32), formula (a2-3-1) to formula (a2-3-24), R in the structural unit (a2-A) a2 Examples include structural units in which the methyl group corresponding to is replaced by a hydrogen atom, a halogen atom, a haloalkyl group or another alkyl group. TIFF2025081270000060.tif107170

[0086] When the structural unit (a2-A) is included in the resin (A) etc., the content rate of the structural unit (a2-A) is preferably 5 mol% or more, more preferably 10 mol% or more, still more preferably 15 mol% or more, and even more preferably 20 mol% or more with respect to all the structural units. Also, it is preferably 80 mol% or less, more preferably 70 mol% or less, still more preferably 65 mol% or less, even more preferably 60 mol% or less, still even more preferably 50 mol% or less, still more preferably 45 mol% or less, and even more preferably 40 mol% or less. Specifically, it is preferably 5 to 80 mol%, more preferably 10 to 70 mol%, still more preferably 15 to 65 mol%, and even more preferably 20 to 65 mol%. The structural unit (a2-A) can be included in the resin (A) etc. by polymerizing a compound that induces the structural unit (a2-A) (for example, a compound (a2-A’) etc. in which the -CH 2 -C(-R a2 )- is in the state of CH 2 =C(-R a2 ) of the double bond before cleavage). Also, for example, after polymerizing using the structural unit (a1-4), it can be included in the resin (A) etc. by treating with an acid such as p-toluenesulfonic acid. Also, after polymerizing using acetoxystyrene etc., the structural unit (a2-A) can be included in the resin (A) etc. by treating with an alkali such as tetramethylammonium hydroxide.

[0087] In the structural unit (a2), when L a21 is a cyclic hydrocarbon group, examples of the structural unit having an alcoholic hydroxy group or a carboxy group include the structural unit represented by the formula (a2-B) (hereinafter sometimes referred to as “structural unit (a2-B)”), the structural unit represented by the formula (a2-C) (hereinafter sometimes referred to as “structural unit (a2-C)”), and the structural unit represented by the formula (a2-D) (hereinafter sometimes referred to as “structural unit (a2-D)”). TIFF2025081270000062.tif46100In formulas (a2-B) and (a2-C), R a2 represents the same meaning as formula (a2). R a27 represents the same meaning as formula (a2-A). L a25 represents -O- or *-O-(CH 2 ) k2 -CO-O-, k2 represents an integer from 1 to 7. * represents the bonding site with -CO-. X a2 represents a single bond or -CO-. R a25 and R a26 each independently represents a hydrogen atom, a methyl group, or a hydroxy group. nB2 represents an integer from 1 to 5. When nB2 is 2 or more, the plurality of X a2 may be the same as or different from each other. nB22 represents an integer from 0 to 8. When nB22 is 2 or more, the plurality of R a27 may be the same as or different from each other. nC22 represents an integer from 0 to 10. When nC22 is 2 or more, the plurality of R a27 may be the same as or different from each other.] L a25 is preferably -O-, -O-(CH 2 ) f1 -CO-O- (where f1 represents an integer from 1 to 4), more preferably -O-. R a2 is preferably a methyl group. X a2 is preferably a single bond. R a25 is preferably a hydrogen atom. R a26 is preferably a hydrogen atom or a hydroxy group. R a27is preferably a halogen atom, a hydroxy group, a carboxy group, an alkyl group having 1 to 4 carbon atoms which may have a halogen atom, an alkoxy group having 1 to 4 carbon atoms or an alkoxyalkoxy group having 2 to 8 carbon atoms, more preferably a fluorine atom, an iodine atom, a hydroxy group, a methyl group, a methoxy group, an ethoxy group, an ethoxyethoxy group or an ethoxy methoxy group, and even more preferably a fluorine atom, an iodine atom, a hydroxy group, a methyl group, a methoxy group or an ethoxyethoxy group. nB2 is preferably 1, 2, 3 or 4, more preferably 1, 2 or 3, and even more preferably 1 or 2. nB22 is preferably any integer from 0 to 3, more preferably 0, 1 or 2, and even more preferably 0 or 1. nC22 is preferably any integer from 0 to 6, more preferably any integer from 0 to 3, and even more preferably 0 or 1.

[0088] Examples of the structural unit (a2-B) and the structural unit (a2-C) include structural units derived from the monomers described in JP-A-2010-204646, the following structural units, and methyl groups or hydrogen atoms corresponding to R in the following structural units, which are replaced with hydrogen atoms, halogen atoms, haloalkyl groups or other alkyl groups. Among them, the structural units represented by any of formula (a2-B-1) to formula (a2-B-5) and formula (a2-C-1) to formula (a2-C-9) are preferable. a2 When the resin (A) etc. contains the structural unit (a2-B) or the structural unit (a2-C), the content thereof is 1 mol% or more, preferably 2 mol% or more, based on all the structural units of the resin (A) etc. Further, it is 45 mol% or less, preferably 40 mol% or less, more preferably 35 mol% or less, even more preferably 20 mol% or less, and still more preferably 10 mol% or less. Specifically, it is 1 to 45 mol%, preferably 1 to 40 mol%, more preferably 1 to 35 mol%, even more preferably 1 to 20 mol%, and still more preferably 1 to 10 mol%. TIFF2025081270000063.tif80164 When the resin (A) etc. contains the structural unit (a2-B) or the structural unit (a2-C), the content thereof is 1 mol% or more, preferably 2 mol% or more, based on all the structural units of the resin (A) etc. Further, it is 45 mol% or less, preferably 40 mol% or less, more preferably 35 mol% or less, even more preferably 20 mol% or less, and still more preferably 10 mol% or less. Specifically, it is 1 to 45 mol%, preferably 1 to 40 mol%, more preferably 1 to 35 mol%, even more preferably 1 to 20 mol%, and still more preferably 1 to 10 mol%.

[0089] TIFF2025081270000064.tif51106[In formula (a2-D), R a2 and A a21 each represent the same meaning as in formula (a2). R a27 represents the same meaning as in formula (a2-A). R a21 and R a22 each independently represent an alkyl fluoride group having 1 to 4 carbon atoms. L a24 represents a single bond or an alkanediyl group having 1 to 3 carbon atoms, and the alkanediyl group may be substituted with a fluorine atom. nD2 represents any integer from 1 to 5. When nD2 is 2 or more, the groups within multiple parentheses may be the same or different from each other. nD22 represents any integer from 0 to 4. When nD22 is 2 or more, multiple a27 Rs may be the same or different from each other. However, 1 ≦ nD2 + nD22 ≦ 5.] R a21 and R a22 As the alkyl fluoride groups of R and R, independently, a trifluoromethyl group, 2,2,2-trifluoroethyl group, 3,3,3-trifluoropropyl group, 4,4,4-trifluorobutyl group, etc. may be mentioned. R a21 and R a22 are preferably a trifluoromethyl group. L a24 As the alkanediyl group of L, a methylene group, ethane-1,1-diyl group, propane-1,1-diyl group, propane-2,2-diyl group, etc. may be mentioned. L a24 is preferably a single bond or a methylene group. R a27is preferably a halogen atom, a hydroxy group, a carboxy group, an alkyl group having 1 to 4 carbon atoms which may have a halogen atom, an alkoxy group having 1 to 4 carbon atoms or an alkoxyalkoxy group having 2 to 8 carbon atoms, more preferably a fluorine atom, an iodine atom, a hydroxy group, a methyl group, a methoxy group, an ethoxy group, an ethoxyethoxy group or an ethoxymethoxy group, and even more preferably a fluorine atom, an iodine atom, a hydroxy group, a methyl group, a methoxy group or an ethoxyethoxy group. nD2 is preferably 1, 2, 3 or 4, more preferably 1, 2 or 3, even more preferably 1 or 2, and still more preferably 1. Further, preferably, nD2 is 1 and the group in parentheses is bonded to the para position. nD22 is preferably any integer from 0 to 3, more preferably any integer from 0 to 2, even more preferably 0 or 1, and still more preferably 0.

[0090] As the structural unit (a2-D), a structural unit represented by the following formula (a2-D1) (hereinafter sometimes referred to as "structural unit (a2-D1)") is more preferable. TIFF2025081270000065.tif51108[In formula (a2-D1), R a2 、A a21 、R a27 、nD2 and nD22 represent the same meanings as in formula (a2-D).] In formula (a2-D1), R a2 is preferably a hydrogen atom or a methyl group. A a21 is preferably a single bond.

[0091] Examples of the structural unit (a2-D) include the structural units described below. TIFF2025081270000066.tif62167

[0092] In the structural units represented by formula (a2-D-1) to formula (a2-D-8), R a2A structural unit in which a hydrogen atom corresponding to is replaced by a methyl group or the like, and in the structural units represented by Formula (a2-D-9) to Formula (a2-D-16), R a2 A structural unit in which a methyl group corresponding to is replaced by a hydrogen atom or the like can also be cited as a specific example of the structural unit (a2-D). Among them, the structural units represented by Formula (a2-D-1) to Formula (a2-D-8) are preferable, the structural units represented by Formula (a2-D-1) to Formula (a2-D-4) are more preferable, and the structural unit represented by Formula (a2-D-1) is even more preferable.

[0093] When the resin (A) or the like contains the structural unit (a2-D), the content is preferably 3 mol% or more, more preferably 5 mol% or more, still more preferably 10 mol% or more, based on all the structural units of the resin (A) or the like. Also, it is preferably 80 mol% or less, more preferably 75 mol% or less, still more preferably 70 mol% or less, and even more preferably 65 mol% or less. Specifically, it is preferably 3 to 80 mol%, more preferably 5 to 75 mol%, still more preferably 10 to 70 mol%, and even more preferably 10 to 65 mol%.

[0094] 〈Structural unit (a3)〉 The lactone ring contained in the structural unit (a3) may be a monocyclic ring such as a β-propiolactone ring, a γ-butyrolactone ring, or a δ-valerolactone ring, or may be a condensed ring of a monocyclic lactone ring and another ring. Preferably, a γ-butyrolactone ring, an adamantane lactone ring, or a bridged ring containing a γ-butyrolactone ring structure (for example, the structural unit represented by the following Formula (a3-2)) can be cited.

[0095] The structural unit (a3) is preferably a structural unit represented by Formula (a3-1), Formula (a3-2), Formula (a3-3), or Formula (a3-4). These may be contained alone or in combination of two or more. TIFF2025081270000067.tif48155[In Formula (a3-1), Formula (a3-2), Formula (a3-3), and Formula (a3-4), L a4 、La5 and L a6 is, independently of one another, -O- or *-O-(CH 2 ) k3 -CO-O-(where k3 represents an integer from 1 to 7). L a7 is -O-, *-O-L a8 -O-, *-O-L a8 -CO-O-, *-O-L a8 -CO-O-L a9 -CO-O- or *-O-L a8 -O-CO-L a9 -O-. L a8 and L a9 are, independently of one another, alkane diyl groups having 1 to 6 carbon atoms. * represents the bonding site with the carbonyl group. R a18 , R a19 , R a20 and R a24 are, independently of one another, alkyl groups having 1 to 6 carbon atoms which may have a halogen atom, a hydrogen atom or a halogen atom. X a3 is -CH 2 - or an oxygen atom. R a21 represents an aliphatic hydrocarbon group having 1 to 4 carbon atoms. R a22 , R a23 and R a25 are, independently of one another, a carboxy group, a cyano group or an aliphatic hydrocarbon group having 1 to 4 carbon atoms. p1 represents an integer from 0 to 5. q1 represents an integer from 0 to 3. r1 represents an integer from 0 to 3. w1 represents an integer from 0 to 8. When p1, q1, r1 and / or w1 is 2 or more, a plurality of R a21 , R a22 , R a23 and / or R a25 may be the same as or different from one another.]

[0096] R a21 、R a22 、R a23 and R a25 Examples of the aliphatic hydrocarbon group for R R a18 、R a19 、R a20 and R a24 Examples of the halogen atom and the alkyl group which may have a halogen atom for R a01 are the same as those exemplified by R L a8 and L a9 Examples of the alkanediyl group for L L a4 ~L a6 are each independently, preferably -O- or, *-O-(CH 2 ) k3 -CO-O- wherein k3 is an integer of 1 to 4, more preferably -O- and, *-O-CH 2 -CO-O-, still more preferably an oxygen atom. L a7 is preferably -O- or *-O-L a8 -CO-O-, more preferably -O-, -O-CH 2 -CO-O- or -O-C 2 H 4 -CO-O-. R a18 、R a19 、R a20 and R a24is preferably a hydrogen atom or an alkyl group having 1 to 4 carbon atoms, more preferably a hydrogen atom, a methyl group or an ethyl group, and still more preferably a hydrogen atom or a methyl group. R a21 is preferably a methyl group. R a22 、R a23 and R a25 are each independently preferably a carboxy group, a cyano group or a methyl group. p1, q1 and r1 are each independently preferably any integer from 0 to 2, more preferably 0 or 1. w1 is preferably any integer from 0 to 2, more preferably 0 or 1. In particular, formula (a3-4) is preferably formula (a3-4)’. TIFF2025081270000068.tif3848(wherein R a24 、L a7 represents the same meaning as described above.)

[0097] Examples of the structural unit (a3) include structural units derived from the monomers described in JP-A-2010-204646, the monomers described in JP-A-2000-122294, and the monomers described in JP-A-2012-41274. Examples of the structural unit (a3) include structural units represented by any of formula (a3-1-1), formula (a3-1-2), formula (a3-2-1), formula (a3-2-2), formula (a3-3-1), formula (a3-3-2) and formula (a3-4-1) to formula (a3-4-12), and, in the above structural units, structural units in which the methyl groups corresponding to R a18 、R a19 、R a20 and R a24 are replaced with hydrogen atoms are preferred. TIFF2025081270000069.tif108164

[0098] When the resin (A) etc. contains the structural unit (a3), the total content rate thereof is 1 mol% or more, preferably 3 mol% or more, more preferably 5 mol% or more, still more preferably 10 mol% or more, with respect to all the structural units of the resin (A) etc. Also, 70 mol% or less is mentioned, preferably 65 mol% or less, more preferably 60 mol% or less, still more preferably 50 mol% or less, even more preferably 40 mol% or less, still even more preferably 30 mol% or less, still more preferably 25 mol% or less, and still even more preferably 20 mol% or less. Specifically, 1 to 70 mol% is mentioned, preferably 3 to 70 mol%, more preferably 3 to 65 mol%, still more preferably 5 to 65 mol%, even more preferably 5 to 60 mol%, and still even more preferably 10 to 60 mol%. Also, the content rate of the structural unit (a3-1), the structural unit (a3-2), the structural unit (a3-3) or the structural unit (a3-4) is preferably 1 mol% or more, more preferably 3 mol% or more, still more preferably 5 mol% or more, and still even more preferably 10 mol% or more, with respect to all the structural units of the resin (A) etc. Also, it is preferably 60 mol% or less, more preferably 55 mol% or less, still more preferably 50 mol% or less, even more preferably 40 mol% or less, still even more preferably 30 mol% or less, still more preferably 25 mol% or less, and still even more preferably 20 mol% or less. Specifically, 1 to 60 mol% is preferable, 3 to 60 mol% is more preferable, 3 to 55 mol% is still more preferable, 5 to 55 mol% is still even more preferable, 5 to 50 mol% is even more preferably, and 10 to 50 mol% is still even more preferable.

[0099] 〈Structural unit (a4)〉 The structural unit represented by the formula (a4) is shown below. TIFF2025081270000070.tif3255[In the formula (a4), R 41 represents a hydrogen atom or a methyl group. R 42represents a saturated hydrocarbon group having a halogen atom with 1 to 24 carbon atoms, and -CH 2 - may be replaced by -O- or -CO-.]

[0100] R 42 The saturated hydrocarbon group represented by includes a linear or branched chain saturated hydrocarbon group, a monocyclic or polycyclic alicyclic saturated hydrocarbon group, and a group formed by combining these, etc. Examples of the chain saturated hydrocarbon group include linear alkyl groups such as methyl group, ethyl group, propyl group, butyl group, pentyl group, hexyl group, heptyl group, octyl group, decyl group, dodecyl group, pentadecyl group, hexadecyl group, heptadecyl group and octadecyl group, and branched alkyl groups such as isopropyl group and isobutyl group. Examples of the monocyclic or polycyclic alicyclic saturated hydrocarbon group include monocyclic alicyclic saturated hydrocarbon groups which are monocyclic cycloalkyl groups such as cyclopentyl group, cyclohexyl group, cycloheptyl group, cyclooctyl group; polycyclic alicyclic saturated hydrocarbon groups which are polycyclic cycloalkyl groups such as decahydronaphthyl group, adamantyl group, norbornyl group and the following group (* represents the bonding site). Examples of the group formed by combination include a group formed by combining one or more alkyl groups or one or more alkanediyl groups with one or more alicyclic saturated hydrocarbon groups, such as -alkanediyl group - alicyclic saturated hydrocarbon group, -alicyclic saturated hydrocarbon group - alkyl group, -alkanediyl group - alicyclic saturated hydrocarbon group - alkyl group, etc. Examples of the alkanediyl group include linear alkanediyl groups such as methylene group, ethylene group, propane-1,3-diyl group, butane-1,4-diyl group, pentane-1,5-diyl group, hexane-1,6-diyl group; branched alkanediyl groups such as propane-1,2-diyl group, butane-1,3-diyl group, 2-methylpropane-1,2-diyl group, 1-methylbutane-1,4-diyl group, 2-methylbutane-1,4-diyl group. The terminal of the branched alkanediyl group may be a methyl group. R 42 Examples of the halogen atom included in the saturated hydrocarbon group in R include a fluorine atom, a chlorine atom, a bromine atom, or an iodine atom. R 42 Examples of the group in which -CH 2 - in the saturated hydrocarbon group included in R is replaced by -O- or -CO- include a hydroxy group, a carboxy group, a carbonyl group, an oxy group, an alkoxy group, an alkoxycarbonyl group, an alkylcarbonyl group, an alkylcarbonyloxy group, an alkanedioxy group, an alkanedioxycarbonyl group, an alkanediylcarbonyl group, an alkanediylcarbonyloxy group, a cycloalkoxy group, a cycloalkylalkoxy group, a group formed by combining two or more of these groups, and the like. These replaced groups include those similar to the groups exemplified in this specification within the range where the upper limit of the number of carbon atoms permits.

[0101] As the structural unit (a4), it is preferable that R 42 is a saturated hydrocarbon group having a fluorine atom, and as an example of the structural unit (a4) in which R 42 is a saturated hydrocarbon group having a fluorine atom, there are a structural unit represented by the formula (a4-1) (hereinafter sometimes referred to as "structural unit (a4-1)"), a structural unit represented by the formula (a4-2) (hereinafter sometimes referred to as "structural unit (a4-2)"), a structural unit represented by the formula (a4-3) (hereinafter sometimes referred to as "structural unit (a4-3)"), and a structural unit represented by the formula (a4-A) (hereinafter sometimes referred to as "structural unit (a4-A)"). The structural unit represented by the formula (a4-1) is the structural unit shown below. TIFF2025081270000072.tif4864[In the formula (a4-1), R 41 represents a hydrogen atom or a methyl group. L 41 represents a single bond or an alkanediyl group having 1 to 4 carbon atoms. L 42f represents an alkanediyl group having 1 to 8 carbon atoms and having a fluorine atom or a cycloalkanediyl group having 3 to 12 carbon atoms and having a fluorine atom. R 42f represents a hydrogen atom or a fluorine atom.

[0102] L 41 Examples of the alkanediyl group in L include linear alkanediyl groups such as a methylene group, an ethylene group, a propane-1,3-diyl group, and a butane-1,4-diyl group; and branched alkanediyl groups such as an ethane-1,1-diyl group, a propane-1,2-diyl group, a butane-1,3-diyl group, a 2-methylpropane-1,3-diyl group, and a 2-methylpropane-1,2-diyl group. The terminal of the branched alkanediyl group may be a methyl group. L 42f Examples of the alkanediyl group having a fluorine atom in L include linear alkanediyl groups having a fluorine atom such as a methylene group having a fluorine atom, an ethylene group having a fluorine atom, a propane-1,3-diyl group having a fluorine atom, a butane-1,4-diyl group having a fluorine atom, a pentane-1,5-diyl group having a fluorine atom, a hexane-1,6-diyl group having a fluorine atom, a heptane-1,7-diyl group having a fluorine atom, and an octane-1,8-diyl group having a fluorine atom; branched alkanediyl groups having a fluorine atom such as an ethane-1,1-diyl group having a fluorine atom, a propane-1,1-diyl group having a fluorine atom, a propane-1,2-diyl group having a fluorine atom, a propane-2,2-diyl group having a fluorine atom, a pentane-2,4-diyl group having a fluorine atom, a 2-methylpropane-1,3-diyl group having a fluorine atom, a 2-methylpropane-1,2-diyl group having a fluorine atom, a pentane-1,4-diyl group having a fluorine atom, and a 2-methylbutane-1,4-diyl group having a fluorine atom. The terminal of the branched alkanediyl group may be a methyl group which may have a fluorine atom. L 42fExamples of the cycloalkanediyl group having a fluorine atom in [L] include monocyclic cycloalkanediyl groups having a fluorine atom such as a cyclobutane-1,3-diyl group having a fluorine atom, a cyclopentane-1,3-diyl group having a fluorine atom, a cyclohexane-1,4-diyl group having a fluorine atom, a cyclohexene-3,6-diyl group having a fluorine atom, a cycloheptane-1,4-diyl group having a fluorine atom, and a cyclooctane-1,5-diyl group having a fluorine atom. Examples of the polycyclic cycloalkanediyl group having a fluorine atom include a norbornane-1,4-diyl group having a fluorine atom, a norbornane-2,5-diyl group having a fluorine atom, a 5-norbornene-2,3-diyl group having a fluorine atom, an adamantane-1,5-diyl group having a fluorine atom, and an adamantane-2,6-diyl group having a fluorine atom. L 42f The number of fluorine atoms in the alkanediyl group having a fluorine atom and the cycloalkanediyl group in [L] may be 1 or more, and is preferably 2 or more. L 42f The alkanediyl group having a fluorine atom and the cycloalkanediyl group in [L] are preferably a perfluoroalkanediyl group and a perfluorocycloalkanediyl group, respectively.

[0103] L 42fExamples of the perfluoroalkanediyl group include a difluoromethylene group, a perfluoroethylene group, a perfluoroethylfluoromethylene group, a perfluoropropane-1,3-diyl group, a perfluoropropane-1,2-diyl group, a perfluoropropane-2,2-diyl group, a perfluorobutane-1,4-diyl group, a perfluorobutane-2,2-diyl group, a perfluorobutane-1,2-diyl group, a perfluoropentane-1,5-diyl group, a perfluoropentane-2,2-diyl group, a perfluoropentane-3,3-diyl group, a perfluorohexane-1,6-diyl group, a perfluorohexane-2,2-diyl group, a perfluorohexane-3,3-diyl group, a perfluoroheptane-1,7-diyl group, a perfluoroheptane-2,2-diyl group, a perfluoroheptane-3,4-diyl group, a perfluoroheptane-4,4-diyl group, a perfluorooctane-1,8-diyl group, a perfluorooctane-2,2-diyl group, a perfluorooctane-3,3-diyl group, a perfluorooctane-4,4-diyl group, and the like. L 42f Examples of the perfluorocycloalkanediyl group include a perfluorocyclohexanediyl group, a perfluorocyclopentanediyl group, a perfluorocycloheptanediyl group, a perfluoroadamantanediyl group, and the like.

[0104] L 41 is preferably a single bond or an alkanediyl group having 1 to 3 carbon atoms, more preferably a single bond, a methylene group or an ethylene group, and still more preferably a single bond or a methylene group. L 42f is preferably a perfluoroalkanediyl group having 1 to 8 carbon atoms or a perfluorocycloalkanediyl group having 3 to 12 carbon atoms, more preferably a perfluoroalkanediyl group having 1 to 6 carbon atoms, and still more preferably a perfluoroalkanediyl group having 1 to 3 carbon atoms.

[0105] Examples of the structural unit (a4-1) include the structural units shown below and R in the structural unit (a4-1) in the following structural units. 41Examples thereof include structural units in which the methyl group corresponding thereto is replaced with a hydrogen atom. The structural unit represented by formula (a4-2) in TIFF2025081270000073.tif98158 is the structural unit shown below. TIFF2025081270000074.tif5574[In formula (a4-2), R 41 represents a hydrogen atom or a methyl group. L 43f represents a saturated hydrocarbon group having 1 to 20 carbon atoms which may have a fluorine atom, and -CH 2 - contained in the saturated hydrocarbon group may be replaced with -O- or -CO-. R 43f represents a saturated hydrocarbon group having 1 to 20 carbon atoms which may have a fluorine atom, and -CH 2 - contained in the saturated hydrocarbon group may be replaced with -O- or -CO-. However, at least one of L 43f and R 43f has a fluorine atom, and the upper limit of the total carbon number of L 43f and R 43f is 21.]

[0106] Examples of the saturated hydrocarbon group in L 43f and R 43f include linear or branched chain saturated hydrocarbon groups, monocyclic or polycyclic alicyclic saturated hydrocarbon groups, and groups formed by combining these. Examples of the saturated hydrocarbon group in L 43f and R 43f are the same as the saturated hydrocarbon groups exemplified as the saturated hydrocarbon group of R 43f and R 43f in formula (a4) as long as the upper limit of the total carbon number of L 42 and R allows it.

[0107] As the saturated hydrocarbon group of L 43f a C1-C6 alkanediyl group or a group represented by formula (L43f-1) is preferable. TIFF2025081270000075.tif13120[In formula (L43f-1), s represents 0 or 1. L 45f and L 46f each independently represents a divalent saturated hydrocarbon group having 1 to 5 carbon atoms which may have a fluorine atom. L 47f represents a single bond or a divalent saturated hydrocarbon group having 1 to 5 carbon atoms which may have a fluorine atom. X 46f and X 47f each independently represents -O-, -CO-, -CO-O- or -O-CO-. However, the total number of carbon atoms of L 45f L 46f L 47f X 46f and X 47f is 7 or less. * and ** are bonding sites, and ** is the bonding site with -O-CO-R 43f is the bonding site with.

[0108] In the group represented by formula (L43f-1), the divalent saturated hydrocarbon groups represented by L 45f L 46f and L 47f include linear or branched alkanediyl groups, monocyclic or polycyclic divalent alicyclic saturated hydrocarbon groups, and divalent saturated hydrocarbon groups formed by combining an alkanediyl group and a divalent alicyclic saturated hydrocarbon group. Specifically, methylene group, ethylene group, propane-1,3-diyl group, propane-1,2-diyl group, butane-1,4-diyl group, 1-methylpropane-1,3-diyl group, 2-methylpropane-1,3-diyl group, 2-methylpropane-1,2-diyl group, etc. may be mentioned. s is preferably 0.

[0109] Examples of the group represented by formula (L43f-1) include the following groups. In the following examples, * and ** each represent a bonding site, and ** is the bonding site with -O-CO-R 43f is the bonding site with. TIFF2025081270000076.tif47140

[0110] R 43f is preferably a saturated hydrocarbon group having a fluorine atom. The structural unit represented by the formula (a4-2) in this case includes, for example, the structural units represented by the formula (a4-2A) or (formula a4-2B). TIFF2025081270000077.tif69102[In the formula (a4-2A) and the formula (a4-2B), R 41 and L 43f represent the same as those in the formula (a4-2). R 43fA represents a saturated hydrocarbon group having 1 to 20 carbon atoms and having a fluorine atom. A 43f represents a divalent saturated hydrocarbon group having 1 to 17 carbon atoms which may have a fluorine atom, and -CH 2 - contained in the saturated hydrocarbon group may be replaced by -O- or -CO-. X 43 represents **-O-CO- or **-CO-O-, and ** represents the bonding site with A 43f R 43fB represents a saturated hydrocarbon group having 1 to 17 carbon atoms which may have a fluorine atom. However, in the formula (a4-2A), the total number of carbon atoms of L 43f and R 43fA is 21 or less, and in the formula (a4-2B), the total number of carbon atoms of L 43f , A 43f , X 43 and R 43fB is 21 or less, and at least one of A 43f and R 43fB has at least one fluorine atom. R 43fA The saturated hydrocarbon group of is, as long as the upper limit of the number of carbon atoms permits, the same saturated hydrocarbon group as the saturated hydrocarbon group exemplified by R 42 R 43fA is preferably an alkyl group having 1 to 13 carbon atoms and having a fluorine atom, a cycloalkyl group having 3 to 12 carbon atoms and having a fluorine atom, or a group combining them, *-(CF 2 ​​) n43f -R 42’ (* represents the bonding site with the carbonyl group. n43f represents an integer from 1 to 6. R 42’ represents a hydrogen atom or a fluorine atom.) Or a perfluorocycloalkyl group having 3 to 12 carbon atoms is more preferable. A 43f and R 43fB 's saturated hydrocarbon group, as long as the upper limit of the number of carbon atoms permits, is the same as the saturated hydrocarbon group exemplified by R 42 in formula (a4). A 43f is preferably a divalent chain saturated hydrocarbon group which may have a fluorine atom, a divalent alicyclic saturated hydrocarbon group or a group combining them, more preferably a divalent chain saturated hydrocarbon group having a fluorine atom, and even more preferably a fluoroalkanediyl group having 1 to 6 carbon atoms. R 43fBThe saturated hydrocarbon group which may have a fluorine atom is preferably a chain saturated hydrocarbon group, an alicyclic saturated hydrocarbon group which may have a fluorine atom, or a group combining them, more preferably an alkyl group having 1 to 12 carbon atoms which may have a fluorine atom, a cycloalkyl group having 3 to 12 carbon atoms which may have a fluorine atom, or a group combining them, and still more preferably a trifluoromethyl group, a difluoromethyl group, a methyl group, a perfluoroethyl group, a 2,2,2-trifluoroethyl group, a 1,1,2,2-tetrafluoroethyl group, an ethyl group, a perfluoropropyl group, a 2,2,3,3,3-pentafluoropropyl group, a propyl group, a perfluorobutyl group, a 1,1,2,2,3,3,4,4-octafluorobutyl group, a butyl group, a perfluoropentyl group, a 2,2,3,3,4,4,5,5,5-nonafluoropentyl group, a pentyl group, a hexyl group, a perfluorohexyl group, a heptyl group, a perfluoroheptyl group, an octyl group, a perfluorooctyl group and other alkyl fluoride groups, a cyclopropylmethyl group, a cyclopropyl group, a cyclobutylmethyl group, a cyclopentyl group, a cyclohexyl group, a perfluorocyclohexyl group, an adamantyl group, an adamantylmethyl group, an adamantyldimethyl group, a norbornyl group, a norbornylmethyl group, a perfluoroadamantyl group, a perfluoroadamantylmethyl group and the like.

[0111] In formula (a4-2B), *-A f43 -X 43 -R f43B An example of the structure that the group represented by can take is the following structure (* is the bonding site with the carbonyl group). TIFF2025081270000078.tif14169

[0112] Examples of the structural unit represented by formula (a4-2A) include the following structural units and the structural units in which the methyl group corresponding to R in the structural unit represented by formula (a4-2A) below is replaced by a hydrogen atom. 41 are mentioned. TIFF2025081270000079.tif99167

[0113] Examples of the structural unit represented by formula (a4-2B) include the following structural units and the structural units in the following structural units where the methyl group corresponding to R in the structural unit represented by formula (a4-2B) is replaced by a hydrogen atom. 41 Examples include structural units in which the methyl group corresponding to 41 is replaced by a hydrogen atom. TIFF2025081270000080.tif111163

[0114] Examples of the structural unit (a4) also include the structural unit represented by formula (a4-3). TIFF2025081270000081.tif5576[In formula (a4-3), R 41 represents a hydrogen atom or a methyl group. L 44f represents a saturated hydrocarbon group having 1 to 20 carbon atoms which may have a fluorine atom, and -CH 2 - contained in the saturated hydrocarbon group may be replaced by -O- or -CO-. R 44f represents a saturated hydrocarbon group having 1 to 20 carbon atoms which may have a fluorine atom, and -CH 2 - contained in the saturated hydrocarbon group may be replaced by -O- or -CO-. However, at least one of L 44f and R 44f has a fluorine atom, and the upper limit of the total number of carbon atoms of L 44f and R 44f is 21.]

[0115] Examples of the saturated hydrocarbon group in L 44f and R 44f include linear or branched chain saturated hydrocarbon groups, monocyclic or polycyclic alicyclic saturated hydrocarbon groups, and groups formed by combining these. Examples of the saturated hydrocarbon group in L 44f and R 44f are, as long as the upper limit of the total number of carbon atoms of L 44f and R 44f allows, the same groups as the saturated hydrocarbon groups exemplified as the saturated hydrocarbon group of R 42 in formula (a4). L 44fis an alkanediyl group having 1 to 14 carbon atoms (in the alkanediyl group, -CH 2 - may be replaced by -O- or -CO-). It is preferably -(CH 2 ) j1 -, -(CH 2 ) j2 -O-(CH 2 ) j3 -, or -(CH 2 ) j4 -CO-O-(CH 2 ) j5 - (where j1 to j5 each independently represent an integer from 1 to 6). More preferably, it is an alkanediyl group having 1 to 4 carbon atoms (one -CH 2 - in the alkanediyl group may be replaced by -O-, and one -CH 2 -CH 2 - in the alkanediyl group may be replaced by -CO-O- or -O-CO-). R 44f is preferably a saturated hydrocarbon group having 1 to 10 carbon atoms with a fluorine atom, more preferably an alkyl group having 1 to 10 carbon atoms with a fluorine atom, an alicyclic saturated hydrocarbon group having 3 to 10 carbon atoms with a fluorine atom, or a combination thereof, even more preferably an alkyl group having 1 to 10 carbon atoms with a fluorine atom, and still more preferably an alkyl group having 1 to 6 carbon atoms with a fluorine atom.

[0116] Examples of the structural unit represented by formula (a4-3) include structural units in which, in the following structural units and the following formulas, the methyl group corresponding to R 41 in structural unit (a4-3) is replaced by a hydrogen atom. TIFF2025081270000082.tif85165

[0117] TIFF2025081270000083.tif3686[In formula (a4-A), R 1represents a hydrogen atom, a halogen atom, or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. X 11 represents a single bond or *-CO-O-. * represents the bonding site with the carbon atom to which R 1 is bonded. L 1 represents an aliphatic hydrocarbon group having 1 to 28 carbon atoms which may have a substituent, and -CH 2 - in the aliphatic hydrocarbon group may be replaced by -O-, -S-, -SO 2 - or -CO-. R 2 represents a fluorinated alkyl group having 1 to 8 carbon atoms. R 3 represents a hydrogen atom or a fluorinated alkyl group having 1 to 6 carbon atoms, and the fluorinated alkyl group may combine with L 1 to form an alicyclic hydrocarbon group having 3 to 12 carbon atoms, and -CH 2 - in the alicyclic hydrocarbon group may be replaced by -O-. mi represents any integer from 1 to 4. When mi is 2 or more, the groups in multiple parentheses may be the same as or different from each other.]

[0118] R 1 Examples of the halogen atom and the alkyl group which may have a halogen atom in R a01 are the same as those exemplified by R a4 and R a5 in formula (a1-0) to formula (a1-2). R 1 is preferably a hydrogen atom or an alkyl group having 1 to 4 carbon atoms, more preferably a hydrogen atom or an alkyl group having 1 to 3 carbon atoms, still more preferably a hydrogen atom, a methyl group or an ethyl group, and still more preferably a hydrogen atom or a methyl group. L 1 Examples of the aliphatic hydrocarbon group in L include a chain hydrocarbon group, a monocyclic or polycyclic (including a spiro ring, a condensed ring, a bridged ring, etc.) alicyclic hydrocarbon group, and a group formed by combining two or more of these groups (for example, a hydrocarbon group formed from an alicyclic hydrocarbon group and a chain hydrocarbon group) may also be used. Examples of the chain hydrocarbon group include divalent to pentavalent chain hydrocarbon groups such as an alkanediyl group, an alkanetriyl group, an alkanetetrayl group, and an alkanepentayl group. Examples of the alkanediyl group include linear alkanediyl groups such as a methylene group, an ethylene group, a propane-1,3-diyl group, a butane-1,4-diyl group, a pentane-1,5-diyl group, a hexane-1,6-diyl group, a heptane-1,7-diyl group, an octane-1,8-diyl group, a nonane-1,9-diyl group, a decane-1,10-diyl group, an undecane-1,11-diyl group, a dodecane-1,12-diyl group, a tridecane-1,13-diyl group, a tetradecane-1,14-diyl group, a pentadecane-1,15-diyl group, a hexadecane-1,16-diyl group, and a heptadecane-1,17-diyl group, and branched alkanediyl groups such as an ethane-1,1-diyl group, a propane-1,1-diyl group, a propane-1,2-diyl group, a propane-2,2-diyl group, a pentane-2,4-diyl group, a 2-methylpropane-1,3-diyl group, a 2-methylpropane-1,2-diyl group, a pentane-1,4-diyl group, and a 2-methylbutane-1,4-diyl group. Examples also include groups in which one or more hydrogen atoms of the above-described groups are replaced with a bonding site. The number of carbon atoms of the chain hydrocarbon group is preferably 1 to 18, more preferably 1 to 12, still more preferably 1 to 10, even more preferably 1 to 9, still even more preferably 1 to 8, still more preferably 1 to 6, still even more preferably 1 to 5, and particularly preferably 1 to 4.

[0119] Examples of the monocyclic or polycyclic alicyclic hydrocarbon group include the following alicyclic hydrocarbon groups. The bonding site can be at any position. TIFF2025081270000084.tif46163 For example, divalent to pentavalent alicyclic hydrocarbon groups such as a cycloalkanediyl group, a cycloalkanetriyl group, a cycloalkanetetrayl group, and a cycloalkanepentayl group. Specifically, monocyclic alicyclic hydrocarbon groups such as cyclobutane-1,3-diyl group, cyclopentane-1,3-diyl group, cyclohexane-1,4-diyl group, cyclooctane-1,5-diyl group, and polycyclic alicyclic hydrocarbon groups such as spiro rings having a cycloalkanediyl group, norbornanediy group or adamantanediyl group each spiro-bonded to a norbornane-1,4-diyl group, norbornane-2,5-diyl group, adamantane-1,5-diyl group, adamantane-2,6-diyl group, decahydronaphthalenediyl group, bicyclo[3.3.0]octanediy group, spirocyclohexane-1,2'-cyclopentane-diyl group, spiroadamantane-2,3'-cyclopentane-diyl group, etc. are mentioned. In addition, groups in which one or more hydrogen atoms of the above-described groups are replaced at the bonding site, etc. are also mentioned. The number of carbon atoms of the alicyclic hydrocarbon group is preferably 3 to 20, more preferably 3 to 18, still more preferably 3 to 16, and even more preferably 3 to 12.

[0120] Examples of the group combined with two or more types include a group combining an alicyclic hydrocarbon group and a chain hydrocarbon group. In the combination, the alicyclic hydrocarbon group and the chain hydrocarbon group may each be combined with two or more types. Also, any group may be bonded to X 11 and may be bonded. Examples of a group combining an alicyclic hydrocarbon group and a chain hydrocarbon group include a group in which an alicyclic hydrocarbon group is bonded to a chain hydrocarbon group (e.g., *-chain hydrocarbon group - alicyclic hydrocarbon group - etc.), a group in which a chain hydrocarbon group is bonded to an alicyclic hydrocarbon group (e.g., *-alicyclic hydrocarbon group - chain hydrocarbon group - etc.), a group in which an alicyclic hydrocarbon group and a chain hydrocarbon group are bonded to a chain hydrocarbon group (e.g., *-chain hydrocarbon group - alicyclic hydrocarbon group - chain hydrocarbon group - etc.), a group in which a chain hydrocarbon group and an alicyclic hydrocarbon group are bonded to an alicyclic hydrocarbon group (e.g., *-alicyclic hydrocarbon group - chain hydrocarbon group - alicyclic hydrocarbon group - etc.), a group in which an alicyclic hydrocarbon group, a chain hydrocarbon group, and an alicyclic hydrocarbon group are bonded to a chain hydrocarbon group (e.g., *-chain hydrocarbon group - alicyclic hydrocarbon group - chain hydrocarbon group - alicyclic hydrocarbon group - etc.), a group in which a chain hydrocarbon group, an alicyclic hydrocarbon group, and a chain hydrocarbon group are bonded to an alicyclic hydrocarbon group (e.g., *-alicyclic hydrocarbon group - chain hydrocarbon group - alicyclic hydrocarbon group - chain hydrocarbon group - etc.), and the like. * represents X 11 and indicates the bonding site. Examples also include a group in which one or more hydrogen atoms of the above-described group are replaced with a bonding site.

[0121] L 1 The -CH 2 - in the aliphatic hydrocarbon group having 1 to 28 carbon atoms of L 2 may be replaced with -O-, -S-, -SO L 1 The -CH 2 - in the aliphatic hydrocarbon group having 1 to 28 carbon atoms of L 2 When - is replaced with -O-, -S-, -SO The -CH 2 - contained in the aliphatic hydrocarbon group 2-Or the group replaced by -CO- includes a hydroxy group, a carboxy group, a thiol group, an alkoxy group, an alkylthio group, an alkoxycarbonyl group, an alkylsulfonyl group, an alkylcarbonyl group, an alkylcarbonyloxy group, an oxy group, a carbonyl group, a thio group, a sulfonyl group, an alkanediyl-oxy group, an alkanediyl-oxycarbonyl group, an alkanediylcarbonyl group, an alkanediylcarbonyloxy group, an alkanediylsulfonyl group, an alkanediylthio group, a cycloalkoxy group, a cycloalkylalkoxy group, an alkoxycarbonyloxy group, a group formed by combining two or more of these groups, and the like. These replaced groups include the same groups as those exemplified in the present specification within the range allowed by the upper limit of the number of carbon atoms. In addition, a group in which one or more hydrogen atoms of the above-described group are replaced by a bonding site, and the like are also included. In addition, -CH 2 - included in the alicyclic hydrocarbon group is replaced by -O-, -S-, -CO- or -SO 2 - As the replaced group, within the range allowed by the upper limit of the number of carbon atoms, the same groups as those exemplified in the present specification are included.

[0122] L 1 The aliphatic hydrocarbon group in may have one or more substituents. Examples of the substituent include a halogen atom, a haloalkyl group having 1 to 4 carbon atoms, an alkyl group having 1 to 12 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, or an aromatic hydrocarbon group having 6 to 18 carbon atoms (-CH 2 - included in the alkyl group or the alicyclic hydrocarbon group may be replaced by -O- or -CO-). Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, an iodine atom, and the like. The haloalkyl groups having 1 to 4 carbon atoms include fluoroalkyl groups having 1 to 4 carbon atoms, chloroalkyl groups having 1 to 4 carbon atoms, bromoalkyl groups having 1 to 4 carbon atoms, iodoalkyl groups having 1 to 4 carbon atoms, and the like. Examples of the haloalkyl group include perfluoroalkyl groups having 1 to 4 carbon atoms (such as trifluoromethyl group, pentafluoroethyl group, heptafluoropropyl group, nonafluorobutyl group, etc.), 2,2,2-trifluoroethyl group, 3,3,3-trifluoropropyl group, 4,4,4-trifluorobutyl group, 3,3,4,4,4-pentafluorobutyl group, chloromethyl group, bromomethyl group, iodomethyl group, and the like. The number of carbon atoms of the haloalkyl group is preferably 1 to 3, more preferably 1 or 2. Examples of the alkyl group having 1 to 12 carbon atoms include methyl group, ethyl group, propyl group, butyl group, pentyl group, hexyl group, heptyl group, octyl group, nonyl group, decyl group, undecyl group, dodecyl group, and the like. The number of carbon atoms of the alkyl group is preferably 1 to 9, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. Examples of the alicyclic hydrocarbon group having 3 to 18 carbon atoms include monocyclic cycloalkyl groups such as cyclopropyl group, cyclobutyl group, cyclopentyl group, cyclohexyl group, cycloheptyl group, cyclooctyl group, cyclodecyl group, and polycyclic cycloalkyl groups such as decahydronaphthyl group, adamantyl group, norbornyl group, and the like. The number of carbon atoms of the alicyclic hydrocarbon group is preferably 3 to 16, more preferably 3 to 12, and still more preferably 3 to 10. Examples of the aromatic hydrocarbon group having 6 to 18 carbon atoms include phenyl group, naphthyl group, biphenyl group, anthryl group, phenanthryl group, binaphthyl group, and the like. The number of carbon atoms of the aromatic hydrocarbon group is preferably 6 to 14, more preferably 6 to 12, and still more preferably 6 to 10. -CH contained in the alkyl group 2- When it is replaced by -O- or -CO-, the number of carbon atoms before replacement is defined as the total number of carbon atoms of the alkyl group. Examples of the replaced group include a hydroxy group, a carboxy group, an alkoxy group, an alkoxycarbonyl group, an alkylcarbonyl group, an alkylcarbonyloxy group, etc. These replaced groups include those similar to the groups exemplified in this specification within the range allowed by the upper limit of the number of carbon atoms. The number of carbon atoms of the alkoxy group is preferably 1 to 9, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. The number of carbon atoms of the alkoxycarbonyl group is preferably 2 to 9, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms of the alkylcarbonyl group is preferably 2 to 10, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms of the alkylcarbonyloxy group is preferably 2 to 9, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. In addition, as the group in which -CH 2 - in the alicyclic hydrocarbon group is replaced by -O- or -CO-, those similar to the groups exemplified in this specification are included within the range allowed by the upper limit of the number of carbon atoms. L 1 Examples of the substituent that the aliphatic hydrocarbon group in L may have include a halogen atom, a haloalkyl group having 1 to 3 carbon atoms, an alkyl group having 1 to 6 carbon atoms, an alicyclic hydrocarbon group having 3 to 10 carbon atoms, or an aromatic hydrocarbon group having 6 to 10 carbon atoms (wherein -CH 2 - in the alkyl group or the alicyclic hydrocarbon group may be replaced by -O- or -CO-). Fluorine atom, iodine atom, a perfluoroalkyl group having 1 to 3 carbon atoms, or an alkyl group having 1 to 4 carbon atoms (wherein -CH 2 - in the alkyl group may be replaced by -O- or -CO-) are preferred, and a fluorine atom, an iodine atom, a trifluoromethyl group, a methyl group, a hydroxy group, or a methoxy group are more preferred. L 1 is R 3When not forming an alkyl fluoride group and an alicyclic hydrocarbon group, a chain hydrocarbon group having 1 to 12 carbon atoms which may have a substituent (—CH contained in the chain hydrocarbon group 2 — may be replaced by —O— or —CO—), an alicyclic hydrocarbon group having 3 to 18 carbon atoms which may have a substituent (—CH contained in the alicyclic hydrocarbon group 2 — may be replaced by —O— or —CO—), or a group formed by combining a chain hydrocarbon group having 1 to 6 carbon atoms which may have a substituent and an alicyclic hydrocarbon group having 3 to 18 carbon atoms which may have a substituent (—CH contained in the chain hydrocarbon group 2 — may be replaced by —O— or —CO—, and —CH contained in the alicyclic hydrocarbon group 2 — may be replaced by —O— or —CO—). It is preferably, a chain hydrocarbon group having 1 to 8 carbon atoms which may have a substituent (—CH contained in the chain hydrocarbon group 2 — may be replaced by —O— or —CO—), an alicyclic hydrocarbon group having 3 to 12 carbon atoms which may have a substituent, or a group formed by combining a chain hydrocarbon group having 1 to 6 carbon atoms which may have a substituent and an alicyclic hydrocarbon group having 3 to 18 carbon atoms which may have a substituent (—CH contained in the chain hydrocarbon group 2 — may be replaced by —O— or —CO—). It is more preferably, a chain hydrocarbon group having 1 to 8 carbon atoms which may have a substituent (—CH contained in the chain hydrocarbon group 2 — may be replaced by —O— or —CO—), an alicyclic hydrocarbon group having 5 to 12 carbon atoms which may have a substituent, a group formed by combining a chain hydrocarbon group having 1 to 6 carbon atoms and an alicyclic hydrocarbon group having 5 to 12 carbon atoms which may have a substituent (—CH contained in the chain hydrocarbon group 2 — may be replaced by —O— or —CO—), or a group formed by combining an alicyclic hydrocarbon group having 5 to 12 carbon atoms which may have a substituent, a chain hydrocarbon group having 1 to 6 carbon atoms and an alicyclic hydrocarbon group having 5 to 12 carbon atoms which may have a substituent (—CH contained in the chain hydrocarbon group 2- may be replaced by -O- or -CO-. It is more preferable that it is so.

[0123] R 2 Examples of the C1-C8 fluoroalkyl group in include difluoromethyl group, trifluoromethyl group, 1,1-difluoroethyl group, 2,2-difluoroethyl group, 2,2,2-trifluoroethyl group, perfluoroethyl group, 1,1,2,2-tetrafluoropropyl group, 1,1,2,2,3,3-hexafluoropropyl group, perfluoroethylmethyl group, 1-(trifluoromethyl)-1,2,2,2-tetrafluoroethyl group, perfluoropropyl group, 1,1,2,2-tetrafluorobutyl group, 1,1,2,2,3,3-hexafluorobutyl group, 1,1,2,2,3,3,4,4-octafluorobutyl group, perfluorobutyl group, 1,1-bis(trifluoro)methyl-2,2,2-trifluoroethyl group, 2-(perfluoropropyl)ethyl group, 1,1,2,2,3,3,4,4-octafluoropentyl group, perfluoropentyl group, 1,1,2,2,3,3,4,4,5,5-decafluoropentyl group, 1,1-bis(trifluoromethyl)-2,2,3,3,3-pentafluoropropyl group, perfluoropentyl group, 2-(perfluorobutyl)ethyl group, 1,1,2,2,3,3,4,4,5,5-decafluorohexyl group, 1,1,2,2,3,3,4,4,5,5,6,6-dodecafluorohexyl group, perfluoropentylmethyl group, perfluorohexyl group, perfluoroheptyl group, perfluorooctyl group. The carbon number of the fluoroalkyl group is preferably 1-6, more preferably 1-5, still more preferably 1-4, and even more preferably 1-3. R 3 The C1-C6 fluoroalkyl group in, as long as the upper limit of the carbon number permits, includes the same C1-C6 fluoroalkyl groups as those exemplified for the fluoroalkyl group of. 2 R 2 is 3When it is an alkyl fluoride group having 1 to 6 carbon atoms, it is preferably an alkyl fluoride group having 1 to 6 carbon atoms, more preferably an alkyl fluoride group having 1 to 3 carbon atoms, still more preferably a trifluoromethyl group, a perfluoroethyl group or a perfluoropropyl group, and even more preferably a trifluoromethyl group. R 2 When R 3 is a hydrogen atom, it is preferably an alkyl fluoride group having 1 to 6 carbon atoms, more preferably an alkyl fluoride group having 1 to 5 carbon atoms, still more preferably an alkyl fluoride group having 3 to 5 carbon atoms. R 3 When R 1 is bonded to L 3 to form an alicyclic hydrocarbon group having 3 to 12 carbon atoms, R 1 Examples of the group formed by bonding to L 2 include groups represented by the following formulas. Among the following formulas, * and ** represent bonding sites, and two ** represent that one represents the bonding site with a hydroxy group and the other represents the bonding site with R 1A L 1 is a part of the hydrocarbon group of L 3 and represents a single bond or an alkanediyl group having 1 to 4 carbon atoms. R 1 The number of carbon atoms of the alicyclic hydrocarbon group formed by bonding to L TIFF2025081270000085.tif25130R 3 is preferably a hydrogen atom or an alkyl fluoride group having 1 to 3 carbon atoms. mi is preferably any integer from 1 to 3, more preferably 1 or 2, and still more preferably 1.

[0124] Examples of the structural unit (a4-A) include the following structural units and the like. In these structural units, the methyl group corresponding to R 1 is replaced by a hydrogen atom, a halogen atom, a haloalkyl group or an alkyl group other than a methyl group, and R 1Structural units in which the hydrogen atom corresponding thereto is replaced with a halogen atom, a haloalkyl group or an alkyl group can also be cited as specific examples of the structural unit (a4-A). TIFF2025081270000086.tif221155

[0125] When the resin (A) or the like contains the structural unit (a4), the content thereof is preferably 1 to 20 mol%, more preferably 2 to 15 mol%, still more preferably 3 to 10 mol% based on all the structural units of the resin (A) or the like.

[0126] 〈Structural unit (a5)〉 Examples of the non-leaving hydrocarbon group of the structural unit (a5) include groups having a linear, branched or cyclic hydrocarbon group. Among them, the structural unit (a5) is preferably a group having an alicyclic hydrocarbon group. Examples of the structural unit (a5) include a structural unit represented by the formula (a5-1). TIFF2025081270000087.tif3971[In the formula (a5-1), R 51 represents a hydrogen atom or a methyl group. R 52 represents an alicyclic hydrocarbon group having 3 to 18 carbon atoms, and the hydrogen atom contained in the alicyclic hydrocarbon group may be substituted with an aliphatic hydrocarbon group having 1 to 8 carbon atoms. L 55 represents a single bond or a divalent saturated hydrocarbon group having 1 to 18 carbon atoms, and -CH 2 - contained in the saturated hydrocarbon group may be replaced with -O- or -CO-.]

[0127] R 52 The alicyclic hydrocarbon group in may be either monocyclic or polycyclic. Examples of the monocyclic alicyclic hydrocarbon group include a cyclopropyl group, a cyclobutyl group, a cyclopentyl group and a cyclohexyl group. Examples of the polycyclic alicyclic hydrocarbon group include an adamantyl group and a norbornyl group, etc. The aliphatic hydrocarbon groups having 1 to 8 carbon atoms include, for example, alkyl groups such as methyl group, ethyl group, propyl group, isopropyl group, butyl group, sec-butyl group, tert-butyl group, pentyl group, hexyl group, octyl group and 2-ethylhexyl group. Examples of the alicyclic hydrocarbon group having a substituent include 3-methyladamantyl group. R 52 is preferably an unsubstituted alicyclic hydrocarbon group having 3 to 18 carbon atoms, more preferably an adamantyl group, a norbornyl group or a cyclohexyl group. L 55 Examples of the divalent saturated hydrocarbon group in L include a divalent chain saturated hydrocarbon group and a divalent alicyclic saturated hydrocarbon group, and preferably a divalent chain saturated hydrocarbon group. Examples of the divalent chain saturated hydrocarbon group include alkanediyl groups such as methylene group, ethylene group, propanediyl group, butanediyl group and pentanediyl group. The divalent alicyclic saturated hydrocarbon group may be either monocyclic or polycyclic. Examples of the monocyclic alicyclic saturated hydrocarbon group include cycloalkanediyl groups such as cyclopentanediyl group and cyclohexanediyl group. Examples of the polycyclic divalent alicyclic saturated hydrocarbon group include adamantanediyl group and norbornanediyl group.

[0128] L 55 Examples of the group in which -CH 2 - included in the divalent saturated hydrocarbon group represented by L is replaced by -O- or -CO- include, for example, the groups represented by formula (L1-1) to formula (L1-4). In the following formulas, * and ** each represent a bonding site, and * represents a bonding site with an oxygen atom. TIFF2025081270000088.tif18165[In formula (L1-1), X x1 represents *-O-CO- or *-CO-O- (* represents a bonding site with L x1 .). L x1 represents a divalent aliphatic saturated hydrocarbon group having 1 to 16 carbon atoms. L x2represents a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 15 carbon atoms. However, L x1 and L x2 have a total carbon number of 16 or less. In formula (L1-2), L x3 represents a divalent aliphatic saturated hydrocarbon group having 1 to 17 carbon atoms. L x4 represents a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 16 carbon atoms. However, L x3 and L x4 have a total carbon number of 17 or less. In formula (L1-3), L x5 represents a divalent aliphatic saturated hydrocarbon group having 1 to 15 carbon atoms. L x6 and L x7 each independently represent a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 14 carbon atoms. However, L x5 , L x6 and L x7 have a total carbon number of 15 or less. In formula (L1-4), L x8 and L x9 each represent a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 12 carbon atoms. W x1 represents a divalent alicyclic saturated hydrocarbon group having 3 to 15 carbon atoms. However, L x8 , L x9 and W x1 have a total carbon number of 15 or less.

[0129] L x1 is preferably a divalent aliphatic saturated hydrocarbon group having 1 to 8 carbon atoms, more preferably a methylene group or an ethylene group. L x2 is preferably a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 8 carbon atoms, more preferably a single bond. L x3 is preferably a divalent aliphatic saturated hydrocarbon group having 1 to 8 carbon atoms. L x4 is preferably a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 8 carbon atoms. L x5 is preferably a divalent aliphatic saturated hydrocarbon group having 1 to 8 carbon atoms, more preferably a methylene group or an ethylene group. L x6 is preferably a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 8 carbon atoms, more preferably a methylene group or an ethylene group. L x7 is preferably a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 8 carbon atoms. L x8 is preferably a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 8 carbon atoms, more preferably a single bond or a methylene group. L x9 is preferably a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 8 carbon atoms, more preferably a single bond or a methylene group. W x1 is preferably a divalent alicyclic saturated hydrocarbon group having 3 to 10 carbon atoms, more preferably a cyclohexanediyl group or an adamantanediyl group.

[0130] Examples of the group represented by the formula (L1-1) include the following divalent groups. TIFF2025081270000089.tif37147Examples of the group represented by the formula (L1-2) include the following divalent groups. TIFF2025081270000090.tif23130Examples of the group represented by the formula (L1-3) include the following divalent groups. TIFF2025081270000091.tif15147Examples of the group represented by the formula (L1-4) include the following divalent groups. TIFF2025081270000092.tif13168L 55 is preferably a single bond or a group represented by the formula (L1-1).

[0131] As the structural unit (a5-1), there are the following structural units and the structural unit (a5-1) in the following structural units where the methyl group corresponding to R 51 is replaced by a hydrogen atom. When resin (A) etc. contains the structural unit (a5), its content is preferably 1 to 30 mol%, more preferably 2 to 20 mol%, and still more preferably 3 to 15 mol% with respect to all the structural units of resin (A) etc.

[0132] 〈Structural unit (a6)〉 The structural unit (a6) is a structural unit having a -SO 2 - group, and preferably has a -SO 2 - group in the side chain. -SO 2 The structural unit having a - group may have a linear structure having a -SO 2 - group, or may have a branched structure having a -SO 2 - group, or may have a cyclic structure (monocyclic and polycyclic structures) having a -SO 2 - group. Preferably, it is a structural unit having a cyclic structure having a -SO 2 - group, and more preferably, it is a structural unit having a cyclic structure (sultone ring) containing -SO 2 -O-.

[0133] As the sultone ring, there are rings represented by the following formula (T 1 -1), formula (T 1 -2), formula (T 1 -3) and formula (T 1 -4). The bonding site can be at any position. The sultone ring may be monocyclic, but is preferably polycyclic. The polycyclic sultone ring means a bridged ring containing -SO 2 -O- as an atomic group constituting the ring, and rings represented by formula (T 1 -1) and formula (T 1 -2) are exemplified. The sultone ring, like the ring represented by formula (T 1 -2), has -SO 2In addition to -O-, it may further contain a heteroatom. Examples of the heteroatom include an oxygen atom, a sulfur atom, or a nitrogen atom, preferably an oxygen atom. TIFF2025081270000094.tif2977

[0134] The sultone ring may have a substituent. Examples of the substituent include an alkyl group having 1 to 12 carbon atoms which may have a halogen atom or a hydroxy group, a halogen atom, a hydroxy group, a cyano group, an alkoxy group having 1 to 12 carbon atoms, an aryl group having 6 to 12 carbon atoms, an aralkyl group having 7 to 12 carbon atoms, a glycidyloxy group, an alkoxycarbonyl group having 2 to 12 carbon atoms, and an alkylcarbonyl group having 2 to 4 carbon atoms, etc.

[0135] Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom. Examples of the alkyl group include a methyl group, an ethyl group, a propyl group, a butyl group, a pentyl group, a hexyl group, an octyl group, and a decyl group. Preferably, it is an alkyl group having 1 to 6 carbon atoms, more preferably a methyl group. Examples of the alkyl group having a halogen atom include a trifluoromethyl group, a perfluoroethyl group, a perfluoropropyl group, a perfluoroisopropyl group, a perfluorobutyl group, a perfluoro sec-butyl group, a perfluoro tert-butyl group, a perfluoropentyl group, a perfluorohexyl group, a trichloromethyl group, a tribromomethyl group, and a triiodomethyl group. Preferably, a trifluoromethyl group is mentioned. Examples of the alkyl group having a hydroxy group include a hydroxymethyl group and a hydroxyalkyl group such as a 2-hydroxyethyl group. Examples of the alkoxy group include a methoxy group, an ethoxy group, a propoxy group, a butoxy group, a pentyloxy group, a hexyloxy group, a heptyloxy group, an octyloxy group, a decyloxy group, and a dodecyloxy group. Examples of the aryl group include a phenyl group, naphthyl group, anthryl group, p-methylphenyl group, p-tert-butylphenyl group, p-adamantylphenyl group, tolyl group, xylyl group, cumyl group, mesityl group, biphenyl group, phenanthryl group, 2,6-diethylphenyl group, and 2-methyl-6-ethylphenyl group. Examples of the aralkyl group include a benzyl group, phenethyl group, phenylpropyl group, naphthylmethyl group, and naphthylethyl group. Examples of the alkoxycarbonyl group include a group in which an alkoxy group such as a methoxycarbonyl group or an ethoxycarbonyl group is bonded to a carbonyl group, preferably an alkoxycarbonyl group having 6 or less carbon atoms, and more preferably a methoxycarbonyl group. Examples of the alkylcarbonyl group include an acetyl group, propionyl group, and butyryl group. From the viewpoint of easy production of the monomer leading to the structural unit (a6), a sultone ring having no substituent is preferred.

[0136] As the sultone ring, a ring represented by the following formula (T1') is preferred. TIFF2025081270000095.tif2665[In the formula (T1'), X 11 represents an oxygen atom, a sulfur atom, or a methylene group. R 41 represents an alkyl group having 1 to 12 carbon atoms which may have a halogen atom or a hydroxy group, a halogen atom, a hydroxy group, a cyano group, an alkoxy group having 1 to 12 carbon atoms, an aryl group having 6 to 12 carbon atoms, an aralkyl group having 7 to 12 carbon atoms, a glycidyloxy group, an alkoxycarbonyl group having 2 to 12 carbon atoms, or an alkylcarbonyl group having 2 to 4 carbon atoms. ma represents any integer from 0 to 9. When ma is 2 or more, a plurality of R 41 may be the same or different. The bonding site is at an arbitrary position.] X 11 is preferably an oxygen atom or a methylene group, and more preferably a methylene group. R 41 Examples thereof include the same as the substituents of the sultone ring, and an alkyl group having 1 to 12 carbon atoms which may have a halogen atom or a hydroxy group is preferable. ma is preferably 0 or 1, more preferably 0.

[0137] Examples of the ring represented by formula (T1’) include the following rings. The bonding site can be at any position. Among them, the bonding site is preferably at the 1-position or 3-position. TIFF2025081270000096.tif44147

[0138] -SO 2 The structural unit having a - group preferably further has a group derived from a polymerizable group. Examples of the polymerizable group include a vinyl group, an acryloyl group, a methacryloyl group, an acryloyloxy group, a methacryloyloxy group, an acryloylamino group, a methacryloylamino group, an acryloylthio group, a methacryloylthio group, and the like. Among them, the monomer that leads to the structural unit (a6) is preferably a monomer having an ethylenically unsaturated bond, more preferably a (meth)acrylic monomer.

[0139] The structural unit (a6) is preferably a structural unit represented by formula (a6-0). TIFF2025081270000097.tif4077[In formula (a6-0), R x represents an alkyl group having 1 to 6 carbon atoms which may have a halogen atom, a hydrogen atom, or a halogen atom. A xx represents an oxygen atom, -N(R c )-, or a sulfur atom. A x represents a single bond or a divalent saturated hydrocarbon group having 1 to 18 carbon atoms, and -CH 2 - contained in the saturated hydrocarbon group may be replaced by -O-, -CO-, or -N(R d ). X 11 represents an oxygen atom, a sulfur atom, or a methylene group. R 41 represents the same meaning as described above. ma represents an integer from 0 to 9. When ma is 2 or more, a plurality of Rs 41 may be the same or different. R c and R d each independently represent a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. R x Examples of the halogen atom of R include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom. R x Examples of the alkyl group of R include a methyl group, an ethyl group, an n-propyl group, an isopropyl group, an n-butyl group, a sec-butyl group, a tert-butyl group, an n-pentyl group, and an n-hexyl group, etc. Preferably, it is an alkyl group having 1 to 4 carbon atoms, and more preferably a methyl group or an ethyl group. R x Examples of the alkyl group having a halogen atom of R include a trifluoromethyl group, a perfluoroethyl group, a perfluoropropyl group, a perfluoroisopropyl group, a perfluorobutyl group, a perfluorosec-butyl group, a perfluorotert-butyl group, a perfluoropentyl group, a perfluorohexyl group, a trichloromethyl group, a tribromomethyl group, and a triiodomethyl group, etc. R x is preferably a hydrogen atom or an alkyl group having 1 to 4 carbon atoms, more preferably a hydrogen atom, a methyl group or an ethyl group, and even more preferably a hydrogen atom or a methyl group. A x Examples of the divalent saturated hydrocarbon group of A include a linear alkanediyl group, a branched alkanediyl group, a monocyclic or polycyclic divalent alicyclic saturated hydrocarbon group, and those obtained by combining two or more of these groups may also be used. Specifically, linear alkanediyl groups such as methylene group, ethylene group, propane-1,3-diyl group, propane-1,2-diyl group, butane-1,4-diyl group, pentane-1,5-diyl group, hexane-1,6-diyl group, heptane-1,7-diyl group, octane-1,8-diyl group, nonane-1,9-diyl group, decane-1,10-diyl group, undecane-1,11-diyl group, dodecane-1,12-diyl group, tridecane-1,13-diyl group, tetradecane-1,14-diyl group, pentadecane-1,15-diyl group, hexadecane-1,16-diyl group, heptadecane-1,17-diyl group, ethane-1,1-diyl group, propane-1,1-diyl group and propane-2,2-diyl group; Branched alkanediyl groups such as butane-1,3-diyl group, 2-methylpropane-1,3-diyl group, 2-methylpropane-1,2-diyl group, pentane-1,4-diyl group, 2-methylbutane-1,4-diyl group; Monocyclic divalent alicyclic saturated hydrocarbon groups which are cycloalkanediyl groups such as cyclobutane-1,3-diyl group, cyclopentane-1,3-diyl group, cyclohexane-1,4-diyl group, cyclooctane-1,5-diyl group; Polycyclic divalent alicyclic saturated hydrocarbon groups such as norbornane-1,4-diyl group, norbornane-2,5-diyl group, adamantane-1,5-diyl group, adamantane-2,6-diyl group, etc. may be mentioned. A x The bonding position to the sultone ring of can be any position, but the one at the 1-position is preferred.

[0140] Examples of the structural unit (a6-0) include the following structural units. TIFF2025081270000098.tif93150Among them, the structural units represented by formula (a6-1), formula (a6-2), formula (a6-6), formula (a6-7), formula (a6-8) and formula (a6-12) are preferred, and the structural units represented by formula (a6-1), formula (a6-2), formula (a6-7) and (a6-8) are more preferred. When the resin (A) etc. contain the structural unit (a6), the content thereof is preferably 1 to 50 mol%, more preferably 2 to 40 mol%, still more preferably 3 to 30 mol% with respect to all the structural units of the resin (A) etc.

[0141] 〈Structural unit (a7)〉 The resin (A) etc. may further contain a structural unit that decomposes upon exposure to generate an acid (hereinafter sometimes referred to as "structural unit (a7)"). Specific examples of the structural unit (a7) include the structural units described in JP-A-2016-79235, and it is preferably a structural unit having a sulfonate group or a carboxylate group and an organic cation in the side chain or a structural unit having a sulfonio group and an organic anion in the side chain.

[0142] The structural unit having a sulfonate group or a carboxylate group and an organic cation in the side chain is preferably a structural unit represented by the formula (a7-A). TIFF2025081270000099.tif26123[In the formula (a7-A), R a7 represents a hydrogen atom, a halogen atom or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. X a71 represents a single bond, *-O-*, *-CO-O-*, *-O-CO-O-*, *-CO-NR a71 -*, *-NR a71 -CO-O-*, *-O-CO-NR a71 -* or *-Ax-Ph-Ay-*. R a71 represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. Ph represents a phenylene group which may have a substituent. Ax and Ay each independently represent one or more bond types selected from the group consisting of a single bond, an ether bond, a thioether bond, an ester bond, an amide bond and a carbonate ester bond. * and ** represent bonding sites, and * represents the bonding site with the carbon atom to which R a7 is bonded. L a71and L a72 each independently represents a hydrocarbon group having 1 to 24 carbon atoms which may have a substituent, and -CH 2 - in the hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO 2 -. X a72 represents ***-CO-O-, ***-O-CO-, ***-O-CO-O-, ***-O-, where *** represents the bonding site with L a71 na7 represents any integer from 0 to 2. When na7 is 2, the groups in the plurality of parentheses may be the same as or different from each other. RA - represents a sulfonate anion or a carboxylate anion. ZA + represents an organic cation.]

[0143] R a7 and R a71 The alkyl groups having 1 to 6 carbon atoms in include a methyl group, an ethyl group, an n-propyl group, an isopropyl group, an n-butyl group, a sec-butyl group, a tert-butyl group, a pentyl group, and a hexyl group. R a7 Examples of the halogen atom in include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom. R a7 Examples of the alkyl group having 1 to 6 carbon atoms and having a halogen atom in include a trifluoromethyl group, a difluoromethyl group, a perfluoroethyl group, a 2,2,2-trifluoroethyl group, a 1,1,2,2-tetrafluoroethyl group, a perfluoropropyl group, a 2,2,3,3,3-pentafluoropropyl group, a perfluorobutyl group, a 1,1,2,2,3,3,4,4-octafluorobutyl group, a perfluoropentyl group, a 2,2,3,3,4,4,5,5,5-nonafluoropentyl group, a perfluorohexyl group, a trichloromethyl group, a dichloromethyl group, a triiodomethyl group, a diiodomethyl group, a tribromomethyl group, and a dibromomethyl group. R a7 ​is preferably a hydrogen atom or an alkyl group having 1 to 4 carbon atoms, more preferably a hydrogen atom or an alkyl group having 1 to 3 carbon atoms, still more preferably a hydrogen atom, a methyl group or an ethyl group, and even more preferably a hydrogen atom or a methyl group.

[0144] X a71 When it is a group represented by *-Ax-Ph-Ay-**, it is preferably a linking group represented by the following formula (X10). TIFF2025081270000100.tif3251[In the formula (X10), Ax represents a bonding type that binds to the carbon atom to which R a7 is bonded, and represents one or more bonding types selected from the group consisting of a single bond, an ether bond, a thioether bond, an ester bond, a carbonate ester bond, and an amide bond. Ay represents a bonding type that binds to L a71 and represents one or more bonding types selected from the group consisting of a single bond, an ether bond, a thioether bond, an ester bond, a carbonate ester bond, and an amide bond. Rx represents a halogen atom, a hydroxy group, a fluorinated alkyl group having 1 to 6 carbon atoms, an alkyl group having 1 to 18 carbon atoms, or an alkoxy group having 1 to 6 carbon atoms. mx represents any integer from 0 to 4, and when mx is an integer of 2 or more, a plurality of Rx may be the same or different from each other.] When either Ax or Ay is a single bond, the other is preferably one or more selected from the group consisting of an ether bond, a thioether bond, an ester bond, a carbonate ester bond, and an amide bond. When either Ax or Ay is an amide bond, it is preferably a bond represented by -CO-NR a71 -. The bonding position of Ay in the phenylene group is preferably the m-position or the p-position with respect to the bonding position of Ax, and more preferably the p-position. Among them, Rx is preferably a fluorine atom, an iodine atom, a trifluoromethyl group, a methyl group or an ethyl group. mx is preferably 0, 1 or 2. Xa71 Examples include a single bond and groups represented by the following formula (X 10 -1) to formula (X 10 -10). * represents the bonding site with the carbon atom to which -R a7 is bonded. ** represents the bonding site with L a71 . X 20 represents -O- or -NR a71 -. TIFF2025081270000101.tif43161Examples of the groups represented by formula (X 10 -1) to formula (X 10 -10) include the following groups. TIFF2025081270000102.tif87162Among them, X a71 is preferably a single bond or a group represented by any of formula (X 10 -1’), formula (X 10 -3’) to formula (X 10 -9’), more preferably a single bond or a group represented by any of formula (X 10 -1’), formula (X 10 -4’), formula (X 10 -5’), formula (X 10 -6’) and formula (X 10 -9’), and even more preferably a single bond, a group represented by formula (X 10 -1’), a group represented by formula (X 10 -5’), a group represented by formula (X 10 -6’) or a group represented by formula (X 10 -9’).

[0145] L a71 The hydrocarbon group of is a group obtained by removing one hydrogen atom from a chain hydrocarbon group, an alicyclic hydrocarbon group, an aromatic hydrocarbon group, or a group combining two or more of these groups, and is a group that binds to X a71 and X a72 . Further, the hydrocarbon group of L a72 is a group obtained by removing one hydrogen atom from a chain hydrocarbon group, an alicyclic hydrocarbon group, an aromatic hydrocarbon group, or a group combining two or more of these groups, and is a group that binds to X a72 and RA - . L a71 and L a72 Examples of the chain hydrocarbon group of L and L include a group in which one hydrogen atom of an alkyl group or an alkenyl group is removed. The alkyl group may be linear or branched, and specifically includes a methyl group, an ethyl group, an n-propyl group, an iso-propyl group, an n-butyl group, a sec-butyl group, an iso-butyl group, a tert-butyl group, a pentyl group, a hexyl group, a heptyl group, an octyl group, a nonyl group, a decyl group, an undecyl group, a dodecyl group, a tridecyl group, a tetradecyl group, a pentadecyl group, a heptadecyl group, and the like. Examples of the alkenyl group include an ethenyl group, a propenyl group, an isopropenyl group, a butenyl group, an isobutenyl group, a tert-butenyl group, a pentenyl group, a hexenyl group, a heptenyl group, an octenyl group, an isooctenyl group, a nonenyl group, and the like. The number of carbon atoms of the chain hydrocarbon group is preferably 1 to 20, more preferably 1 to 18, and even more preferably 1 to 10. L a71 and L a72 Examples of the alicyclic hydrocarbon group of L and L include a group in which one hydrogen atom of a monocyclic or polycyclic cycloalkyl group is removed. Examples of the monocyclic cycloalkyl group include a cyclobutyl group, a cycloheptyl group, a cyclohexyl group, a cyclopentyl group, a cyclooctyl group, and the like. L a71 and L a72Examples of the polycyclic cycloalkyl group include a cycloalkyl group having a crosslinked structure, a cycloalkyl group in which two or more rings are condensed, or a cycloalkyl group in which two rings are spiro-bonded. Examples of the cycloalkyl group having a crosslinked structure include a norbornyl group and an adamantyl group. Examples of the cycloalkyl group in which two or more rings are condensed include a bicyclo[4,4,0]decane group and a steroid group (steroid skeleton). Examples of the cycloalkyl group in which two rings are spiro-bonded include a spirocyclic cycloalkyl group in which one or more cycloalkyl groups selected from the group consisting of a cyclopentyl group, a cyclohexyl group, a norbornyl group, and an adamantyl group and a cycloalkyl group having 5 to 8 carbon atoms are spiro-bonded. Also, a double bond may be formed between two carbon atoms included in the alicyclic hydrocarbon group. More specifically, examples of the alicyclic hydrocarbon group represented by the following formula can be given. TIFF2025081270000103.tif28158 When the alicyclic hydrocarbon group is a monocyclic cycloalkyl group, the number of carbon atoms of the alicyclic hydrocarbon group is preferably 3 to 18, more preferably 3 to 12, and even more preferably 3 to 8. When the alicyclic hydrocarbon group is a polycyclic cycloalkyl group, the number of carbon atoms of the alicyclic hydrocarbon group is preferably 6 to 18, and more preferably 7 to 12. L a71 and L a72 Examples of the aromatic hydrocarbon group of and include a group obtained by removing one hydrogen atom from an aryl group. Examples of the aryl group include a phenyl group, a naphthyl group, an anthryl group, a biphenyl group, and a fluorenyl group. The number of carbon atoms of the aromatic hydrocarbon group is preferably 5 to 14, more preferably 6 to 14, and even more preferably 6 to 10. L a71 and L a72 When the -CH 2 - contained in the hydrocarbon group of and is replaced by -O-, -CO-, -S-, or -SO 2 -, the number of carbon atoms before replacement is taken as the number of carbon atoms of the hydrocarbon group. L a71 and L a72Among the hydrocarbon groups, -CH contained in the chain hydrocarbon group 2 - being replaced by -O-, -CO-, -S- or -SO 2 - The resulting groups include a hydroxy group, a carboxy group, a thiol group, a carbonyl group, an oxy group, a thio group, a sulfonyl group, an alkoxy group, an alkoxycarbonyl group, an alkylcarbonyl group, an alkylcarbonyloxy group, an alkanedioxy group, an alkanedioxycarbonyl group, an alkanediylcarbonyl group, an alkanediylcarbonyloxy group, and the like. These replaced groups include the same ones as the groups exemplified in this specification within the range where the upper limit of the number of carbon atoms permits. L a71 and L a72 Among the hydrocarbon groups of 2 -CH contained in the alicyclic hydrocarbon group being replaced by -O-, -CO-, -S- or -SO 2 - The resulting groups include a group containing a cyclic ether, a cyclic ketone, a cyclic ester (lactone), a cyclic thioether, a cyclic acetal, a cyclic sulfonic acid ester (sultone) structure, and the like. Specifically, alicyclic hydrocarbon groups represented by the following formulas are included. The bonding positions of the alicyclic hydrocarbon groups listed in the following formulas can be at arbitrary positions. TIFF2025081270000104.tif46146L a71 and L a72 Among the hydrocarbon groups of 2 -CH in the aromatic hydrocarbon group may be replaced by -O- or -S-, and -CH 2 - being replaced by -O- or -S-, the resulting groups include groups derived from a furan ring or a thiophene ring, respectively. L a71 and L a72Examples of a group formed by combining two or more of an aliphatic hydrocarbon group, an alicyclic hydrocarbon group, and an aromatic hydrocarbon group include a group formed by combining the above aliphatic hydrocarbon group and the above alicyclic hydrocarbon group, a group formed by combining the above aliphatic hydrocarbon group and the above aromatic hydrocarbon group, a group formed by combining the above alicyclic hydrocarbon group and the above aromatic hydrocarbon group, and a group formed by combining the above aliphatic hydrocarbon group, the above alicyclic hydrocarbon group, and the above aromatic hydrocarbon group. The group formed by combining an alicyclic hydrocarbon group and an aromatic hydrocarbon group may be a condensed ring. L a71 and L a72 Examples of the substituent that the hydrocarbon group of may have include a halogen atom, a cyano group, and a nitro group. Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom. L a71 and L a72 When and are a group formed by combining an alicyclic hydrocarbon group or an aromatic hydrocarbon group and an aliphatic hydrocarbon group, the aliphatic hydrocarbon group may be substantially regarded as a substituent that the alicyclic hydrocarbon group or the aromatic hydrocarbon group has. Also, L a71 and L a72 When the -CH 2 - in the aliphatic hydrocarbon group contained in the hydrocarbon group of and is replaced by -O-, -CO-, -S-, or -SO 2 -, the hydrocarbon group of L a71 and L a72 may substantially have substituents such as a hydroxy group, a carboxy group, an alkoxy group, an alkylcarbonyl group, an alkoxycarbonyl group, an alkylcarbonyloxy group, a thiol group, and a sulfonyl group. na7 is preferably 0 or 1. ZA in formula (a7-A) + is the same as those exemplified for the cation in the salt represented by formula (B1) and the like.

[0146] In formula (a7-A), when the hydrocarbon groups of L a71 and L a72 are saturated hydrocarbon groups, in formula (a7-B) described later, A b7 may contain the same groups as those exemplified as the divalent linking group. Examples of the structural unit represented by formula (a7-A) include the structural unit represented by formula (a7-A1). TIFF2025081270000105.tif30138[In formula (a7-A1), R a7 、X a71 、L a71 、X a72 、na7、RA - and ZA + represent the same meaning as described above. z7 represents any integer from 0 to 6. Q a7 、Q b7 、R z71 and R z72 each independently represent a hydrogen atom, a fluorine atom, a perfluoroalkyl group having 1 to 6 carbon atoms, or an alkyl group having 1 to 6 carbon atoms. When z7 is 2 or more, a plurality of R z71 and R z72 may be the same as or different from each other.] Q a7 、Q b7 、R z71 and R z72 Examples of the perfluoroalkyl group having 1 to 6 carbon atoms or the alkyl group having 1 to 6 carbon atoms in include groups similar to the groups exemplified by R a7 .

[0147] Examples of the structural unit represented by formula (a7-A) include, for example, the following structural units, a group corresponding to the methyl group of R a7 being replaced with a hydrogen atom, a halogen atom (e.g., a fluorine atom), or an alkyl group having 1 to 6 carbon atoms that may have a halogen atom (e.g., a trifluoromethyl group, etc.), and the structural units described in WO 2012 / 050015. ZA + represents an organic cation. TIFF2025081270000106.tif130157

[0148] JPEG2025081270000107.jpg244163

[0149] The structural unit having a sulfonio group and an organic anion in the side chain is preferably a structural unit represented by the formula (a7-B). TIFF2025081270000108.tif28104[In the formula (a7-B), R a7 represents a hydrogen atom, a halogen atom, or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. A b7 represents a single bond or a divalent linking group. R b71 represents a divalent aromatic hydrocarbon group having 6 to 18 carbon atoms which may have a substituent. R b72 and R b73 each independently represent a hydrocarbon group having 1 to 18 carbon atoms which may have a substituent, and R b72 and R b73 may be bonded to each other to form a ring together with the sulfur atom to which they are bonded. A - represents an organic anion.] R a7 Examples of the halogen atom and the alkyl group which may have a halogen atom of R include the same halogen atom and the alkyl group which may have a halogen atom as those in the formula (a7-A). R b71 Examples of the divalent aromatic hydrocarbon group having 6 to 18 carbon atoms represented by include a phenylene group and a naphthylene group. R b72 and R b73 Examples of the hydrocarbon group represented by include an alkyl group, an alicyclic hydrocarbon group, an aromatic hydrocarbon group, and a group formed by combining these. Examples of the alkyl group, the alicyclic hydrocarbon group, the aromatic hydrocarbon group, and the group formed by combining these are the same as those described above. A b7 Examples of the divalent linking group represented by include a divalent saturated hydrocarbon group having 1 to 18 carbon atoms, and -CH 2 - contained in the divalent saturated hydrocarbon group may be replaced by -O-, -S-, or -CO-. Examples of the divalent saturated hydrocarbon group include a divalent chain saturated hydrocarbon group such as a linear or branched alkanediyl group, and a monocyclic or polycyclic divalent alicyclic saturated hydrocarbon group, and combinations thereof may also be used. Specifically, linear alkanediyl groups such as methylene group, ethylene group, propane-1,3-diyl group, propane-1,2-diyl group, butane-1,4-diyl group, pentane-1,5-diyl group, hexane-1,6-diyl group, heptane-1,7-diyl group, octane-1,8-diyl group, nonane-1,9-diyl group, decane-1,10-diyl group, undecane-1,11-diyl group, dodecane-1,12-diyl group; branched alkanediyl groups such as butane-1,3-diyl group, 2-methylpropane-1,3-diyl group, 2-methylpropane-1,2-diyl group, pentane-1,4-diyl group, 2-methylbutane-1,4-diyl group; divalent monocyclic alicyclic saturated hydrocarbon groups which are monocyclic cycloalkanediyl groups such as cyclobutane-1,3-diyl group, cyclopentane-1,3-diyl group, cyclohexane-1,4-diyl group, cyclooctane-1,5-diyl group; divalent polycyclic alicyclic saturated hydrocarbon groups which are polycyclic cycloalkanediyl groups such as norbornane-1,4-diyl group, norbornane-2,5-diyl group, adamantane-1,5-diyl group, adamantane-2,6-diyl group, etc. may be mentioned. Examples of those in which -CH 2 - in the saturated hydrocarbon group is replaced by -O-, -S- or -CO- include the following divalent groups. However, the number of carbon atoms before -CH 2 - in the saturated hydrocarbon group is replaced by -O-, -S- or -CO- is 17 or less, respectively. In the following formula, * and ** represent bonding sites, and * represents the bonding site with R b71 . TIFF2025081270000109.tif123161[wherein, X 3 represents a divalent saturated hydrocarbon group having 1 to 16 carbon atoms. X 4 represents a divalent saturated hydrocarbon group having 1 to 15 carbon atoms. X 5 represents a divalent saturated hydrocarbon group having 1 to 13 carbon atoms. X 6 represents a divalent saturated hydrocarbon group having 1 to 14 carbon atoms. X 7 represents a trivalent saturated hydrocarbon group having 1 to 14 carbon atoms. X 8 represents a divalent saturated hydrocarbon group having 1 to 13 carbon atoms.

[0150] Examples of the structural unit containing the cation in formula (a7-B) include the structural units represented below and a group corresponding to the methyl group of R a7 in which the methyl group is replaced with a hydrogen atom, a halogen atom (e.g., a fluorine atom), or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom (e.g., a trifluoromethyl group, etc.). TIFF2025081270000110.tif75163

[0151] A - Examples of the organic anion represented by A include sulfonate anions, sulfonylimide anions, sulfonylmethide anions, and carboxylate anions. A - The organic anion represented by A is preferably a sulfonate anion, and more preferably the same as the anion exemplified by the acid generator (B). Examples of the sulfonylimide anion, sulfonylmethide anion, and carboxylate anion include the same as the anion exemplified by the acid generator (B).

[0152] Examples of the structural unit represented by formula (a7-B) include the structural units represented below. When the resin (A) etc. contains the structural unit (a7), the structural unit (a7) may be contained alone or in combination of two or more. The total content ratio of the structural unit (a7) is preferably 1 to 30 mol%, more preferably 1 to 25 mol%, still more preferably 2 to 20 mol%, even more preferably 3 to 15 mol%, and even more preferably 3 to 10 mol% based on all the structural units of the resin (A) etc.

[0153] Resin (A) etc. are preferably resins containing structural unit (a1). In particular, resin (Ap) is more preferably a resin composed of structural unit (IP), structural unit (a1), and structural unit (s), that is, a copolymer of salt (I), monomer (a1), and monomer (s). Resin (A) that does not contain structural unit (IP) is preferably a resin composed of structural unit (a1) and structural unit (s), that is, a copolymer of monomer (a1) and monomer (s). Structural unit (a1) is preferably at least one selected from the group consisting of structural unit (a1-0), structural unit (a1-1), structural unit (a1-2) (preferably the structural unit having a cyclohexyl group or a cyclopentyl group), the structural unit represented by formula (a1-4), the structural unit represented by formula (a1-5), and the structural unit represented by formula (a1-6), more preferably at least two kinds, and still more preferably at least two kinds selected from the group consisting of structural unit (a1-1) and structural unit (a1-2). Structural unit (s) is preferably at least one selected from the group consisting of structural unit (a2) and structural unit (a3). Structural unit (a2) is preferably structural unit (a2-C) or structural unit (a2-A). Structural unit (a3) is preferably at least one selected from the group consisting of the structural unit represented by formula (a3-1), the structural unit represented by formula (a3-2), and the structural unit represented by formula (a3-4).

[0154] Each structural unit constituting resin (A) etc. may be used alone or in combination of two or more, and can be produced by a known polymerization method (for example, radical polymerization method) using the monomers that lead to these structural units. The content of each structural unit possessed by resin (A) etc. can be adjusted by the amount of monomers used in the polymerization. The weight average molecular weight of the resin (Ap) and the resin (A) is preferably 2,000 or more (more preferably 2,500 or more, still more preferably 3,000 or more) and 50,000 or less (more preferably 30,000 or less, still more preferably 15,000 or less), but may contain oligomers having a weight average molecular weight smaller than this. In this specification, the weight average molecular weight is a value determined by gel permeation chromatography under the conditions described in the examples. Note that the structural unit (IP) may constitute a dimer, trimer, compound or oligomer having a weight average molecular weight of less than 2,000.

[0155] Resist composition The resist composition of the present invention contains the ammonium carboxylate represented by the formula (I) of the present invention or the structural unit represented by the formula (IP). The resist composition of the present invention contains at least one of the ammonium carboxylate represented by the formula (I) and the structural unit represented by the formula (IP), and may contain both. The resist composition of the present invention preferably further contains a resin. The resin may contain a structural unit represented by the formula (IP). Further, the resist composition of the present invention preferably contains an acid generator having an acid-labile group or a resin containing a structural unit (a1) having an acid-labile group. The resin containing the structural unit (a1) having an acid-labile group may be either the resin (A) or the resin (Ap). Furthermore, it is preferable to contain a resin containing the structural unit (a2-A), and the resin containing the structural unit (a2-A) may be the resin (A) or the resin (Ap), or may be a resin other than the resin (A) composed of a structural unit not containing an acid-labile group (hereinafter sometimes referred to as "resin (AX)"). The resist composition of the present invention preferably further contains an acid generator (hereinafter sometimes referred to as "acid generator (B)"), a quencher (hereinafter sometimes referred to as "quencher (C)") and / or a solvent (hereinafter sometimes referred to as "solvent (E)") regardless of the presence or absence of an acid-labile group. Further, the resist composition of the present invention may further contain a resin other than the resin (A) etc. described above. Ammonium carboxylate In the resist composition of the present invention, the content of the ammonium carboxylate (I) or the compound containing the structural unit represented by the formula (IP) is preferably about 0.001 to 15% by mass, more preferably about 0.001 to 10% by mass, still more preferably about 0.001 to 8% by mass, and even more preferably about 0.005 to 7% by mass based on the solid content of the resist composition.

[0156] <Resin (Ap) containing the structural unit represented by the formula (IP)> The content of the resin (Ap) of the present invention is preferably 60% by mass or more and 99% by mass or less, more preferably 70% by mass or more and 99% by mass or less, and still more preferably 75% by mass or more and 99% by mass or less with respect to the solid content of the resist composition.

[0157] <Resins other than resin (A) etc.> The resist composition of the present invention may be used in combination with a resin other than resin (A) etc. Examples of the resin other than resin (Ap) and resin (A) include a resin (AX) having the same structural unit as the resin (A) described above except for not containing the structural unit (a1), and a resin containing the structural unit (a4) and / or the structural unit (a5) (however, not containing the structural unit (IP) and the structural unit (a1). Hereinafter, it may be referred to as "resin (X)"). Examples of the resin (AX) include a resin containing the structural unit (a2), and a resin containing the structural unit (a2-A) is preferred. In the resin (AX), the content of the structural unit (a2-A) is preferably 5 mol% or more, more preferably 10 mol% or more, still more preferably 15 mol% or more with respect to the total of all the structural units of the resin (AX). Also, it is preferably 80 mol% or less, more preferably 70 mol% or less. Examples of the structural units that resin (X) may further have include structural unit (a2), structural unit (a3), and structural units derived from other known monomers. Among them, resin (X) is preferably a resin composed only of structural unit (a4) and / or structural unit (a5), and more preferably a resin composed only of structural unit (a4). When resin (X) contains structural unit (a4), in resin (X), the content of structural unit (a4) is 20 mol% or more, preferably 30 mol% or more, more preferably 40 mol% or more, and still more preferably 45 mol% or more, based on the total of all the structural units of resin (X). Also, it is 100 mol% or less, preferably 80 mol% or less, more preferably 70 mol% or less, still more preferably 60 mol% or less, and even more preferably 55 mol% or less. Specifically, it is 20 to 100 mol%, preferably 20 to 80 mol%, more preferably 30 to 70 mol%, still more preferably 40 to 60 mol%, and even more preferably 45 to 55 mol%. When resin (X) contains structural unit (a5), the content of structural unit (a5) is 20 mol% or more, preferably 30 mol% or more, more preferably 40 mol% or more, and still more preferably 45 mol% or more, based on the total of all the structural units of resin (X). Also, it is 100 mol% or less, preferably 80 mol% or less, more preferably 70 mol% or less, still more preferably 60 mol% or less, and even more preferably 55 mol% or less. Specifically, it is 20 to 100 mol%, preferably 20 to 80 mol%, more preferably 30 to 70 mol%, still more preferably 40 to 60 mol%, and even more preferably 45 to 55 mol%. Further, when resin (X) contains structural unit (a4) and structural unit (a5), the total content of structural unit (a4) and structural unit (a5) is 40 mol% or more, preferably 60 mol% or more, more preferably 70 mol% or more, and still more preferably 80 mol% or more, based on the total of all the structural units of resin (X). Furthermore, it is 100 mol% or less. Specifically, it is 40 to 100 mol%, preferably 60 to 100 mol%, more preferably 70 to 100 mol%, and still more preferably 80 to 100 mol%.

[0158] Each structural unit constituting resin (AX) and resin (X) may be used alone or in combination of two or more, and can be produced by a known polymerization method (for example, radical polymerization method) using monomers that induce these structural units. The content of each structural unit of resin (AX) and resin (X) can be adjusted by the amount of monomers used in the polymerization. The weight average molecular weight of resin (AX) and resin (X) is preferably 6,000 or more (more preferably 7,000 or more) and 80,000 or less (more preferably 60,000 or less), but may contain oligomers having a weight average molecular weight smaller than this. The means for measuring the weight average molecular weight of resin (AX) and resin (X) is the same as in the case of resin (A) and the like.

[0159] When the resist composition of the present invention contains resin (X), its content is preferably 1 to 60 parts by mass, more preferably 1 to 50 parts by mass, still more preferably 1 to 40 parts by mass, even more preferably 1 to 30 parts by mass, and particularly preferably 1 to 8 parts by mass with respect to a total of 100 parts by mass of resin (A) and resin (Ap).

[0160] The total content of the resin (A) and the resin (Ap) in the resist composition is preferably 60% by mass or more and 99% by mass or less, more preferably 70% by mass or more and 99% by mass or less, still more preferably 80% by mass or more and 99% by mass or less, and even more preferably 90% by mass or more and 99% by mass or less, based on the solid content of the resist composition. Further, the total content of each of the resin (A) and the resin (Ap) is preferably 60% by mass or more and 99% by mass or less, more preferably 70% by mass or more and 99% by mass or less, still more preferably 80% by mass or more and 99% by mass or less, and even more preferably 90% by mass or more and 99% by mass or less, based on the solid content of the resist composition. When a resin other than the resin (A) etc. is included, the total content of the resin (A) etc. and the resin other than the resin (A) etc. is preferably 60% by mass or more and 99% by mass or less, more preferably 70% by mass or more and 99% by mass or less, still more preferably 80% by mass or more and 99% by mass or less, and even more preferably 90% by mass or more and 99% by mass or less, based on the solid content of the resist composition. In the present specification, the "solid content of the resist composition" means the total of the components excluding the solvent (E) described later from the total amount of the resist composition. The solid content of the resist composition and the content of the resin relative thereto can be measured by known analytical means such as liquid chromatography or gas chromatography.

[0161] <Acid generator (B)> As the acid generator (B), either a nonionic compound or an ionic compound may be used. Examples of the nonionic compound include sulfonate esters (e.g., 2-nitrobenzyl ester, aromatic sulfonate, oxime sulfonate, N-sulfonyloxyimide, sulfonyloxy ketone, diazonaphthoquinone 4-sulfonate), sulfones (e.g., disulfone, ketosulfone, sulfonyldiazomethane), and the like. Representative examples of the ionic compound include onium salts containing an onium cation (e.g., diazonium salt, phosphonium salt, sulfonium salt, iodonium salt). Examples of the anion of the onium salt include sulfonic acid anion, benzenesulfonyl anion, sulfonylimide anion, sulfonylmethide anion, and carboxylic acid anion, etc. Further, the acid generator (B) may be a structural unit having an acid generation function, and for example, like the above structural unit (a7), it may be a part of the structural unit constituting the resin contained in the resist composition.

[0162] As the acid generator (B), compounds that generate an acid by radiation described in, for example, JP-A-63-26653, JP-A-55-164824, JP-A-62-69263, JP-A-63-146038, JP-A-63-163452, JP-A-62-153853, JP-A-63-146029, U.S. Patent No. 3,779,778, U.S. Patent No. 3,849,137, German Patent No. 3914407, European Patent No. 126,712, etc. can be used. Also, compounds produced by known methods may be used. The acid generator (B) may be used alone or in combination of two or more. Further, the acid generator (B) may be an acid generator having an acid-labile group. For example, the compound or resin serving as the acid generator may contain a partial structure that becomes an acid-labile group, and the acid-labile group preferably contains the above group (1) or group (2). When the resist composition of the present invention contains a compound having an acid-labile group, the resin containing a structural unit having an acid-labile group may not be contained.

[0163] As a preferred form of the acid generator (B), a salt represented by the formula (B1) (hereinafter sometimes referred to as "salt (B1)", "compound (B1)" or "acid generator (B1)") or a salt represented by the formula (B2) (hereinafter sometimes referred to as "salt (B2)", "compound (B2)" or "acid generator (B2)") can be mentioned. TIFF2025081270000112.tif1395[In the formula (B1), all the symbols have the same meanings as described above.] L b1 As the (nb1 + 1)-valent hydrocarbon group of L, from a monovalent chain hydrocarbon group, a monovalent alicyclic hydrocarbon group, a monovalent aromatic hydrocarbon group, and a monovalent group formed by combining two or more of these groups, nb1 hydrogen atoms are removed, and a group that binds to one or more L b2 can be mentioned. The number of carbon atoms of the hydrocarbon group is preferably from 1 to 48, more preferably from 1 to 42, still more preferably from 1 to 36, even more preferably from 1 to 30, and even still more preferably from 1 to 24. As the chain hydrocarbon group, a group obtained by removing nb1 hydrogen atoms from an alkyl group or an alkenyl group can be mentioned. The alkyl group may be linear or branched, and specifically, a methyl group, an ethyl group, an n-propyl group, an iso-propyl group, an n-butyl group, a sec-butyl group, an iso-butyl group, a tert-butyl group, a pentyl group, a hexyl group, a heptyl group, an octyl group, a nonyl group, a decyl group, an undecyl group, a dodecyl group, a tridecyl group, a tetradecyl group, a pentadecyl group, a heptadecyl group, etc. can be mentioned. As the alkenyl group, an ethenyl group, a propenyl group, an isopropenyl group, a butenyl group, an isobutenyl group, a tert-butenyl group, a pentenyl group, a hexenyl group, a heptenyl group, an octenyl group, an isooctenyl group, a nonenyl group can be mentioned. The number of carbon atoms of the chain hydrocarbon group is preferably from 1 to 36, more preferably from 1 to 24, still more preferably from 1 to 20, even more preferably from 1 to 18, even still more preferably from 1 to 12, and even still more preferably from 1 to 10. Examples of the alicyclic hydrocarbon group include a group obtained by removing nb1 hydrogen atoms from a monocyclic or polycyclic cycloalkyl group. Examples of the monocyclic cycloalkyl group include a cyclobutyl group, a cyclopentyl group, a cyclohexyl group, a cycloheptyl group, and a cyclooctyl group. Examples of the polycyclic cycloalkyl group include a cycloalkyl group having a crosslinked structure, a cycloalkyl group in which two or more rings are condensed, or a cycloalkyl group in which two rings are spiro-bonded. Examples of the cycloalkyl group having a crosslinked structure include a norbornyl group and an adamantyl group. Examples of the cycloalkyl group in which two or more rings are condensed include a bicyclo[4,4,0]decane group and a steroid group (steroid skeleton). Examples of the cycloalkyl group in which two rings are spiro-bonded include a spirocyclic cycloalkyl group in which one or more cycloalkyl groups selected from the group consisting of a cyclopentyl group, a cyclohexyl group, a norbornyl group, and an adamantyl group and a cycloalkyl group having 5 to 8 carbon atoms are spiro-bonded. A double bond may be formed between two carbon atoms contained in the alicyclic hydrocarbon group. More specifically, examples of the alicyclic hydrocarbon group include those represented by the following formula. TIFF2025081270000113.tif26168 When the alicyclic hydrocarbon group is a monocyclic cycloalkyl group, the number of carbon atoms in the alicyclic hydrocarbon group is preferably 3 to 24, more preferably 3 to 20, further preferably 3 to 18, still more preferably 3 to 12, even more preferably 3 to 10, and even more preferably 3 to 8. When the alicyclic hydrocarbon group is a polycyclic cycloalkyl group, the number of carbon atoms in the alicyclic hydrocarbon group is preferably 6 to 24, more preferably 6 to 20, further preferably 6 to 18, still more preferably 6 to 12, and even more preferably 7 to 12. Examples of the aromatic hydrocarbon group include a group obtained by removing nb1 hydrogen atoms from an aryl group. Examples of the aryl group include a phenyl group, a naphthyl group, an anthryl group, a biphenyl group, and a fluorenyl group. More specifically, examples of the aromatic hydrocarbon group are represented by the following formula. TIFF2025081270000114.tif1085 The number of carbon atoms in the aromatic hydrocarbon group is preferably 4 to 24, more preferably 4 to 20, still more preferably 4 to 18, even more preferably 5 to 14, still even more preferably 5 to 10, and even more preferably 6 to 10. L b1 When the -CH 2 - contained in the hydrocarbon group of 2 is replaced by -O-, -CO-, -S- or -SO L b1 in the hydrocarbon group of, when the -CH 2 - contained in the chain hydrocarbon group is replaced by -O-, -CO-, -S- or -SO 2 -, examples of the resulting group include a hydroxy group (the group in which -CH 2 - contained in a methyl group is replaced by -O-), a carboxy group (the group in which -CH 2 -CH 2 - contained in an ethyl group is replaced by -O-CO-), a carbonyl group (the group in which -CH 2 - contained in a methylene group is replaced by -CO-), an oxy group (the group in which -CH 2 - contained in a methylene group is replaced by -O-), an alkoxy group (the group in which -CH 2 - at any position contained in an alkyl group is replaced by -O-), an alkoxycarbonyl group (the group in which -CH 2 -CH 2 - at any position contained in an alkyl group is replaced by -O-CO-), an alkylcarbonyl group (the group in which -CH 2 - at any position contained in an alkyl group is replaced by -CO-), an alkylcarbonyloxy group (the group in which -CH 2 -CH 2 - at any position contained in an alkyl group is replaced by -CO-O-), an alkanedioxy group (the group in which -CH 2- is a group replaced by -O-, an alkanediyl oxycarbonyl group (any -CH at any position in the alkanediyl group) 2 -CH 2 - is a group replaced by -O-CO-, an alkanediyl carbonyl group (any -CH at any position in the alkanediyl group) 2 - is a group replaced by -CO-, an alkanediyl carbonyl oxy group (any -CH at any position in the alkanediyl group) 2 -CH 2 - is a group replaced by -CO-O-, etc. Examples of these replaced groups include those similar to the groups exemplified in this specification within the range allowed by the upper limit of the number of carbon atoms. L b1 Among the hydrocarbon groups of, the -CH contained in the alicyclic hydrocarbon group 2 - being replaced by -O-, -CO-, -S- or -SO 2 - Examples of the resulting groups include groups containing structures such as cyclic ethers, cyclic ketones, cyclic esters (lactones), cyclic thioethers, cyclic acetals, cyclic sulfonic acid esters (sultones), etc. Specifically, alicyclic hydrocarbon groups represented by the following formulas can be mentioned. The bonding positions of the alicyclic hydrocarbon groups listed in the following formulas can be at any position. TIFF2025081270000115.tif48165L b1 Among the hydrocarbon groups of, the -CH contained in the aromatic hydrocarbon group 2 - may be replaced by -O- or -S-, and for the group where -CH 2 - is replaced by -O- or -S-, examples include groups derived from a furan ring or a thiophene ring, respectively. Specifically, aromatic hydrocarbon groups represented by the following formulas can be mentioned. As the group combining two or more of the linear hydrocarbon group, alicyclic hydrocarbon group, and aromatic hydrocarbon group, examples thereof include the group combining the above linear hydrocarbon group and the above alicyclic hydrocarbon group, the group combining the above linear hydrocarbon group and the above aromatic hydrocarbon group, the group combining the above alicyclic hydrocarbon group and the above aromatic hydrocarbon group, and the group combining the above linear hydrocarbon group, the above alicyclic hydrocarbon group, and the above aromatic hydrocarbon group. The group combining the alicyclic hydrocarbon group and the aromatic hydrocarbon group may be a condensed ring. L b2 Examples of the divalent hydrocarbon group of include a divalent linear hydrocarbon group, a divalent alicyclic hydrocarbon group, a divalent aromatic hydrocarbon group, and a group combining two or more of these groups, and a group obtained by removing one hydrogen atom from a monovalent hydrocarbon group and bonding to Y b1 is mentioned. L b2 Examples of the divalent linear hydrocarbon group, divalent alicyclic hydrocarbon group, divalent aromatic hydrocarbon group, and divalent group combining two or more of these groups of are, within the range allowed by the upper limit of the number of carbon atoms, respectively, a group obtained by removing one hydrogen atom from the monovalent linear hydrocarbon group, monovalent alicyclic hydrocarbon group, monovalent aromatic hydrocarbon group, and monovalent group combining two or more of these groups exemplified by L b1 are mentioned. L b1 and L b2 Examples of the substituent that the hydrocarbon group of and L may have include a halogen atom, a cyano group, a nitro group, and the like. Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, an iodine atom, and the like. L b1 and L b2 When and L are a group combining an alicyclic hydrocarbon group or an aromatic hydrocarbon group and a linear hydrocarbon group, substantially, the linear hydrocarbon group may be regarded as a substituent that the alicyclic hydrocarbon group or aromatic hydrocarbon group has. Also, when the -CH b1 - of the linear hydrocarbon group contained in the hydrocarbon group of and L is replaced by -O-, -CO-, -S-, or -SO b2 -, L 2 - is replaced by -O-, -CO-, -S-, or -SO 2 - to form Lb1 and L b2 The hydrocarbon groups of and L may substantially have substituents such as a hydroxy group, a carboxy group, a carbonyl group, an oxycarbonyl group, a carbonyloxy group, an alkoxy group, an alkylcarbonyl group, an alkoxycarbonyl group, an alkylcarbonyloxy group, a thiol group, an alkylthio group, an alkylsulfonyl group and the like. L b1 and L b2 The number of substituents that and L may have is not particularly limited, and they may have a plurality of substituents. Y b1 Examples of the cyclic hydrocarbon group of Y include an alicyclic hydrocarbon group, an aromatic hydrocarbon group, and a group combining an alicyclic hydrocarbon group and an aromatic hydrocarbon group. Y b1 The alicyclic hydrocarbon group and the aromatic hydrocarbon group of Y are respectively the same as the alicyclic hydrocarbon group and the aromatic hydrocarbon group exemplified by L, and when they have no substituent, they may be a monovalent alicyclic hydrocarbon group and an aromatic hydrocarbon group. b1 Examples of the substituents that the methyl group of Y may have include a halogen atom, a cyano group, a hydroxy group, a nitro group and the like. Y b1 Examples of the substituents that the cyclic hydrocarbon group of Y may have include a halogen atom, a cyano group, a nitro group, or a hydrocarbon group having 1 to 18 carbon atoms that may have a halogen atom, a cyano group or a nitro group (the -CH in the hydrocarbon group Y b1 - may be replaced by -O-, -S-, -CO- or -SO 2 -). And the like. 2 -). Y b1 The number of carbon atoms of the hydrocarbon group that the cyclic hydrocarbon group of Y may have is not included in the number of carbon atoms of the cyclic hydrocarbon group of Y. b1 The number of carbon atoms of the cyclic hydrocarbon group of Y is not included in the number of carbon atoms of the cyclic hydrocarbon group of Y. Examples of the halogen atom include the same halogen atoms as the halogen atoms exemplified as the substituents of L b1 and L b2 and the same halogen atoms as the halogen atoms exemplified as the substituents of L. Y b1The hydrocarbon group having 1 to 18 carbon atoms which may have a cyclic hydrocarbon group as a substituent includes a chain hydrocarbon group, an alicyclic hydrocarbon group, an aromatic hydrocarbon group, and a group combining these groups. Examples of the chain hydrocarbon group, the alicyclic hydrocarbon group, the aromatic hydrocarbon group, and a group combining two or more of these groups include, within the range allowed by the upper limit of the number of carbon atoms, L b1 The same groups as the chain hydrocarbon group, the alicyclic hydrocarbon group, the aromatic hydrocarbon group, and a group combining two or more of these groups exemplified by b1 The -CH 2 - contained in the hydrocarbon group having 1 to 18 carbon atoms which may have a cyclic hydrocarbon group of Y as a substituent is replaced by -O-, -S-, -CO- or -SO 2 - Examples of the group include, within the range allowed by the upper limit of the number of carbon atoms, L b1 The -CH 2 - contained in the hydrocarbon group of 2 is replaced by -O-, -S-, -CO- or -SO b1 - The same groups as the groups exemplified by the group are included. Further, the hydrocarbon group having 1 to 18 carbon atoms which may have a cyclic hydrocarbon group of Y as a substituent may constitute a protecting group or a leaving group (an acid-labile group or a base-labile group) generally used in the art.

[0164] Examples of the anion of the salt represented by the formula (B1) include, for example, an anion represented by the following formula (B1-A1) (hereinafter sometimes referred to as "anion (B1-A1)") or an anion represented by the formula (B1-A2) (hereinafter sometimes referred to as "anion (B1-A2)"). TIFF2025081270000117.tif30117 [In the formula (B1-A1), L b2 and Y b1 represent the same meaning as in the formula (B1). Q b1 Q b2 Q b3 and Q b4 each independently represent a hydrogen atom, a fluorine atom, a perfluoroalkyl group having 1 to 6 carbon atoms, or an alkyl group having 1 to 6 carbon atoms. z1 represents an integer of 0 to 6. When z1 is 2 or more, the groups in the multiple parentheses may be the same or different. X 1 represents -O-CO-, -CO-O-, -O-CO-O- or -O-. L b3 represents a single bond or a (nb2+1)-valent hydrocarbon group having 1 to 24 carbon atoms which may have a substituent, and -CH 2 - is -O-, -S-, -CO- or -SO 2 It may be replaced with -. nb2 represents an integer of 1 to 3. When nb2 is 2 or more, the groups in the parentheses may be the same or different.]

[0165] Q b1 , Q b2 , Q b3 and Q b4 Examples of the perfluoroalkyl group include a trifluoromethyl group, a perfluoroethyl group, a perfluoropropyl group, a perfluoroisopropyl group, a perfluorobutyl group, a perfluorosec-butyl group, a perfluorotert-butyl group, a perfluoropentyl group, and a perfluorohexyl group. Q b1 , Q b2 , Q b3 and Q b4 Examples of the alkyl group include a methyl group, an ethyl group, a propyl group, an isopropyl group, a butyl group, a sec-butyl group, a tert-butyl group, a pentyl group, and a hexyl group. Q b1 and Q b2 Q b1 and Q b2 At least one of the groups preferably contains a fluorine atom or a perfluoroalkyl group, more preferably a fluorine atom or a perfluoroalkyl group, even more preferably a fluorine atom or a trifluoromethyl group, and even more preferably both are fluorine atoms. Q b3 and Q b4is preferably, independently of each other, a hydrogen atom, a fluorine atom or a perfluoroalkyl group having 1 to 3 carbon atoms, and Q b3 is preferably a hydrogen atom, a fluorine atom or a perfluoroalkyl group having 1 to 3 carbon atoms, and Q b4 is preferably a hydrogen atom or a fluorine atom. z1 is preferably any integer from 0 to 3, more preferably 0, 1 or 2. X 1 is preferably -O-CO- or -CO-O-.

[0166] L b3 As the hydrocarbon group in, within the range allowed by the upper limit of the number of carbon atoms, the L exemplified in the formula (B1) b1 The same hydrocarbon groups as those exemplified can be mentioned. L b3 is a single bond, an optionally substituted chain hydrocarbon group having 1 to 12 carbon atoms (the -CH 2 - in the chain hydrocarbon group may be replaced by -O- or -CO-), an optionally substituted alicyclic hydrocarbon group having 3 to 18 carbon atoms (the -CH 2 - in the alicyclic hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO 2 -), an optionally substituted aromatic hydrocarbon group having 6 to 10 carbon atoms (the -CH 2 - in the aromatic hydrocarbon group may be replaced by -O- or -S-), or a group formed by combining two or more of these groups is preferable, and a single bond, a chain hydrocarbon group having 1 to 6 carbon atoms or a group represented by the following formula (Lb3-1) is more preferable. In addition, when -CH 2 - in the chain hydrocarbon group is replaced by -O- or -CO-, the number thereof is preferably 1 to 4, and one -CH 2 -CH 2 - in the chain hydrocarbon group is preferably replaced by -O-CO- or -CO-O-, or one -CH 2 -CH 2 -CH 2 - in the chain hydrocarbon group is preferably replaced by -O-CO-O-. TIFF2025081270000118.tif1682[In formula (Lb3-1), nb2 represents the same meaning as formula (B1-A1). L b31 represents a single bond or a chain hydrocarbon group having 1 to 12 carbon atoms, and -CH 2 - in the chain hydrocarbon group may be replaced by -O- or -CO-, and the chain hydrocarbon group may have a substituent. W b3 represents an alicyclic hydrocarbon group having 3 to 18 carbon atoms or an aromatic hydrocarbon group having 6 to 10 carbon atoms, and -CH 2 - in the alicyclic hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO 2 -, and -CH 2 - in the aromatic hydrocarbon group may be replaced by -O- or -S-, and the alicyclic hydrocarbon group and the aromatic hydrocarbon group may have a substituent. * and ** represent bonding sites, and * represents the bonding site with X 1 . In formula (Lb3-1), the chain hydrocarbon group of L b31 , as long as the upper limit of the number of carbon atoms permits, includes groups similar to the chain hydrocarbon group exemplified by L b1 . In formula (Lb3-1), the alicyclic hydrocarbon group and the aromatic hydrocarbon group of W b3 , as long as the upper limit of the number of carbon atoms permits, includes groups similar to the alicyclic hydrocarbon group and the aromatic hydrocarbon group exemplified by L b1 . In formula (Lb3-1), the substituents that the chain hydrocarbon group of L b31 may have, and the substituents that the alicyclic hydrocarbon group and the aromatic hydrocarbon group of W b3 may have, include groups similar to the substituents exemplified as the substituents that the hydrocarbon group of L b1 may have. L b31 is preferably a single bond or an alkanediyl group having 1 to 6 carbon atoms (-CH 2 - in the alkanediyl group may be replaced by -O- or -CO-). Among them, W b3 As the alicyclic hydrocarbon group and aromatic hydrocarbon group of b3 , the alicyclic hydrocarbon group and aromatic hydrocarbon group represented below are preferable. In the alicyclic hydrocarbon group and aromatic hydrocarbon group represented below, * and ** represent bonding sites, * represents the bonding site with X 1 or L b31 and ** represents a hydrogen atom, a substituent or the bonding site with L b2 and at least one ** represents the bonding site with L b2 In addition, in the alicyclic hydrocarbon group represented below, -CH 2 - contained in the alicyclic hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO 2 -. When -CH 2 - contained in the alicyclic hydrocarbon group is replaced by -O-, -S-, -CO- or -SO 2 -, it is preferably forming an ether ring, an ester ring (lactone), a carbonate ester ring, a sulfonic acid ester ring (sultone) or an acetal ring. In formula (B1-A1), L b2 is a single bond or a chain hydrocarbon group having 1 to 12 carbon atoms (wherein -CH 2 - contained in the chain hydrocarbon group may be replaced by -O- or -CO-).), preferably a single bond, -O-, -O-CO-, -CO-O-, -O-CO-O- or *-L b21 -X 2 -L b22 -** (wherein one of L b21 and L b22 represents a chain hydrocarbon group having 1 to 6 carbon atoms, and the other represents a single bond or a chain hydrocarbon group having 1 to 6 carbon atoms. X 2 represents -O-, -CO-O-, -O-CO- or -O-CO-O-. * and ** represent bonding sites, and ** represents the bonding site with Y b1 . However, the total number of carbon atoms of L b21 , X 2 and L b22 is 12 or less.). It is more preferably the above. In formula (B1-A1), Y b1is a cyclic hydrocarbon group having 3 to 20 carbon atoms which may have a substituent (the -CH 2 - in the cyclic hydrocarbon group may be replaced by -O-, -CO-, -S- or -SO 2 -). It is preferably an alicyclic hydrocarbon group having 3 to 18 carbon atoms which may have a substituent (the -CH 2 - in the alicyclic hydrocarbon group may be replaced by -O-, -CO-, -S- or -SO 2 -), or an aromatic hydrocarbon group having 6 to 18 carbon atoms which may have a substituent. More preferably, it is an alicyclic hydrocarbon group having 3 to 16 carbon atoms which may have a substituent (the -CH 2 - in the alicyclic hydrocarbon group may be replaced by -O-, -CO-, -S- or -SO 2 -), or an aromatic hydrocarbon group having 6 to 10 carbon atoms which may have a substituent. Specifically, it is preferably a group represented by the following formula (Y1) to formula (Y36). In formula (Y1) to formula (Y36), R Yb represents a hydrogen atom or an alkyl group having 1 to 4 carbon atoms among the substituents which the cyclic hydrocarbon group of Y b1 may have, and R Yc represents a hydrogen atom or a substituent which the cyclic hydrocarbon group of Y b1 may have, and * represents the bonding site with L b2 . The alicyclic hydrocarbon group and aromatic hydrocarbon group represented by the following formula may have a substituent which the cyclic hydrocarbon group of Y b1 may have, although not particularly shown in the following formula. As the anion represented by formula (B1-A1), an anion represented by formula (B1-A1-1) to formula (B1-A1-85) [hereinafter, may be referred to as "anion (B1-A1-1)" etc. according to the formula number] is preferable, and an anion represented by any of formula (B1-A1-1) to formula (B1-A1-4), formula (B1-A1-9), formula (B1-A1-10), formula (B1-A1-24) to formula (B1-A1-33), formula (B1-A1-36) to formula (B1-A1-40), and formula (B1-A1-47) to formula (B1-A1-85) is more preferable. TIFF2025081270000121.tif234161

[0167] TIFF2025081270000122.tif249153

[0168] TIFF2025081270000123.tif254163

[0169] In formulas (B1-A1-1) to (B1-A1-85), R i2 ~R i7 are each independently, for example, an alkyl group having 1 to 4 carbon atoms, preferably a methyl group or an ethyl group. R i8 is, for example, a chain hydrocarbon group having 1 to 12 carbon atoms, preferably an alkyl group having 1 to 4 carbon atoms, an alicyclic hydrocarbon group having 5 to 12 carbon atoms, or a group formed by combining these, more preferably a methyl group, an ethyl group, a cyclohexyl group or an adamantyl group. L A41 is a single bond or an alkanediyl group having 1 to 4 carbon atoms. Q b1 and Q b2 represent the same meaning as described above. Specific examples of the anion represented by formula (B1-A1) include the anions described in JP-A-2010-204646.

[0170] Preferred examples of the anion represented by formula (B1-A1) include the anions represented by formulas (B1a-1) to (B1a-70), respectively. Among them, an anion represented by any one of formulas (B1a-1) to (B1a-4), formulas (B1a-7) to (B1a-11), formulas (B1a-14) to (B1a-30), and formulas (B1a-35) to (B1a-70) is preferred. TIFF2025081270000124.tif183158

[0171] TIFF2025081270000125.tif252162

[0172] TIFF2025081270000126.tif68163

[0173] The anion represented by the formula (B1-A2) is represented by the following formula. TIFF2025081270000127.tif23100[In the formula (B1-A2), L b2 and Y b1 have the same meaning as in the formula (B1). R b1 represents a halogen atom or an alkyl group having 1 to 6 carbon atoms, and -CH 2 - contained in the alkyl group may be replaced by -O- or -CO-. nb4 represents any integer from 1 to 5. When nb4 is 2 or more, the groups in the plurality of parentheses may be the same as or different from each other. nb3 represents any integer from 0 to 4. When nb3 is 2 or more, the plurality of R b1 may be the same as or different from each other. However, 1 ≦ nb4 + nb3 ≦ 5 is satisfied.]

[0174] In the formula (B1-A2), L b2 's hydrocarbon group and Y b1 's cyclic hydrocarbon group examples, within the range allowed by the upper limit of the number of carbon atoms, are the same as the examples of L b2 's hydrocarbon group and Y b1 's cyclic hydrocarbon group in the formula (B1). Examples of the substituents that the hydrocarbon group of L b2 , the methyl group of Y b1 and the cyclic hydrocarbon group may have are also the same as the examples of the substituents that the hydrocarbon group of L b2 in the formula (B1), the methyl group of Y b1 and the cyclic hydrocarbon group may have. These hydrocarbon groups, methyl groups and cyclic hydrocarbon groups may have one substituent or a plurality of substituents. In the formula (B1-A2), L b2 is preferably a chain hydrocarbon group having 1 to 12 carbon atoms (where -CH 2 - contained in the chain hydrocarbon group may be replaced by -O- or -CO-.), more preferably, *-CO-O-L b41-(L b41 is a single bond or a chain hydrocarbon group having 1 to 6 carbon atoms, and -CH 2 - in the chain hydrocarbon group may be replaced by -O- or -CO-. * represents the bonding site with the benzene ring to which SO 3 - is bonded. L b41 is preferably a single bond or a chain hydrocarbon group having 1 to 3 carbon atoms. ), and more preferably, *-CO-O-. Y b1 is preferably a cyclic hydrocarbon group having 3 to 20 carbon atoms which may have a substituent (wherein -CH 2 - in the cyclic hydrocarbon group may be replaced by -O-, -CO-, -S- or -SO 2 -), more preferably an alicyclic hydrocarbon group having 3 to 18 carbon atoms which may have a substituent (wherein -CH 2 - in the alicyclic hydrocarbon group may be replaced by -O-, -CO-, -S- or -SO 2 -), or an aromatic hydrocarbon group having 6 to 18 carbon atoms which may have a substituent. Even more preferably, Y in formula (B1-A1) b1 or L b1 is an alicyclic hydrocarbon group or an aromatic hydrocarbon group exemplified by. Specifically, it is preferably a group represented by the above-described formulas (Y1) to (Y36), and more preferably a group represented by the above-described formulas (Y1) to (Y19). In formula (B1-A2), nb4 is preferably any integer from 1 to 4, more preferably any integer from 1 to 3, even more preferably 1 or 2, and even more preferably 2. When nb4 is 1 or 2, -L b2 -Y b1 is preferably in the following structure which is the m-position substitution of the benzene ring with respect to the bonding position of SO 3 - . TIFF2025081270000128.tif29107[In the above formula, L b2 , Y b1 , R b1 , and nb3 have the same meanings as in formula (B1-A2).] When nb4 is 2 or more, a plurality of L b2 and Y b1 are preferably the same group as each other.

[0175] R b1 Examples of the alkyl group having 1 to 6 carbon atoms for R include alkyl groups such as methyl group, ethyl group, propyl group, isopropyl group, butyl group, isobutyl group, tert-butyl group, pentyl group, and hexyl group. The number of carbon atoms of the alkyl group is preferably 1 to 4, more preferably 1 to 3. R b1 Examples of the halogen atom for R include fluorine atom, chlorine atom, bromine atom, and iodine atom. Examples of the group in which -CH 2 - contained in the alkyl group is replaced by -O- or -CO- include hydroxy group, carboxy group, alkoxy group, alkoxycarbonyl group, alkylcarbonyl group, alkylcarbonyloxy group, oxy group, carbonyl group, etc. Specific examples of these are the same as those described above. R b1 is each independently preferably a halogen atom or an alkyl group having 1 to 4 carbon atoms (where -CH 2 - contained in the alkyl group may be replaced by -O- or -CO-). More preferably, it is a fluorine atom, an iodine atom, or an alkyl group having 1 to 3 carbon atoms (where -CH 2 - contained in the alkyl group may be replaced by -O- or -CO-). Even more preferably, it is a fluorine atom, an iodine atom, a hydroxy group, a methoxy group, or a methyl group. nb3 is preferably any integer from 0 to 3, more preferably any integer from 0 to 2. In one embodiment, nb3 is preferably 0. In another embodiment, it is preferable that nb3 is 1 or 2. When nb3 is 1, R b1 is preferably a halogen atom, and R b1 is more preferably a fluorine atom or an iodine atom. When nb3 is 2, the two R b1One of them is a halogen atom, and the other is preferably a halogen atom or an alkyl group having 1 to 4 carbon atoms. R b1 It is more preferable that one of them is a fluorine atom or an iodine atom, and the other is a fluorine atom, an iodine atom, or an alkyl group having 1 to 3 carbon atoms.

[0176] Examples of the anion represented by the formula (B1-A2) include the following anions. Among them, the anions represented by the formulas (B2a-1) to (B2a-20) are preferable, and the anions represented by the formulas (B2a-1) to (B2a-11) and the formulas (B2a-16) to (B2a-20) are more preferable. The following anions have some Rs b1 omitted and may contain substituents not shown. TIFF2025081270000129.tif118155

[0177] TIFF2025081270000130.tif1399[In the formula (B2), A 1 represents a nitrogen atom or a carbon atom. L b2 ’ represents a divalent hydrocarbon group having 1 to 24 carbon atoms which may have a substituent, and -CH 2 - contained in the hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO 2 -. Y b1’ represents a methyl group which may have a substituent or a cyclic hydrocarbon group having 3 to 24 carbon atoms which may have a substituent, and -CH 2 - contained in the cyclic hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO 2 -. nb5 represents an integer of 2 or 3. When nb5 is 2, A 1 is a nitrogen atom, and when nb5 is 3, A 1 is a carbon atom. The groups in a plurality of parentheses may be the same as or different from each other, and the groups in two parentheses may combine to form a ring containing A 1 . Z2 +represents an organic cation. In formula (B2), L b2’ and Y b1’ Examples of the hydrocarbon group, cyclic hydrocarbon group, and substituent of are the same groups as L b2 and Y b1 in formula (B1-A1). In formula (B2), L b2’ is a single bond, *-L b23 -, *-L b23 -X 2 - or *-L b23 -X 2 -W 2 -X 3 -(L b23 represents a chain hydrocarbon group having 1 to 6 carbon atoms which may have a fluorine atom. X 2 and X 3 each independently represent -O-, -CO-O-, -O-CO-, -O-CO-O- or -O-. W 2 represents an alicyclic hydrocarbon group having 3 to 12 carbon atoms, and -CH 2 - contained in the alicyclic hydrocarbon group may be replaced by -O- or -CO-. * represents the bonding site with SO 2 .). It is preferably). Y b1’ is a methyl group having a fluorine atom or a cyclic hydrocarbon group having 3 to 20 carbon atoms which may have a substituent (-CH 2 - contained in the cyclic hydrocarbon group may be replaced by -O-, -CO-, -S- or -SO 2 -). It is preferably, and more preferably a trifluoromethyl group, an alicyclic hydrocarbon group having 3 to 18 carbon atoms which may have a substituent (-CH 2 - contained in the alicyclic hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO 2 -), or an aromatic hydrocarbon group having 6 to 18 carbon atoms which may have a substituent. Specifically, it is preferably a trifluoromethyl group or a group represented by formula (Y1) to formula (Y36) exemplified in formula (B1-A1). In formula (B2), two -SO 2 -L b2’ -Y b1’combine to form A 1 When forming a ring containing, for example, the anion represented by formula (B2’) can be mentioned. TIFF2025081270000131.tif21112 [In formula (B2’), A 1 , Y b1’ L b2’ and nb5 represent the same meaning as in formula (B2). W b4 represents a disulfonylimide ring or a disulfonylmethide ring having 2 to 12 carbon atoms which may have a fluorine atom.] W b4 The disulfonylimide ring or disulfonylmethide ring of W preferably has 3 to 12 carbon atoms, more preferably 3 to 6 carbon atoms, and the hydrogen atoms of the methylene groups contained in the ring are preferably replaced by fluorine atoms.

[0178] Examples of the anion of the salt represented by formula (B2) include the following. Among them, the anion represented by formula (B3a-1) or formula (B3a-2) is preferred. TIFF2025081270000132.tif174163

[0179] In another form of the acid generator (B), a salt in which the sulfonic acid anion in the salt represented by formula (B1) is replaced with a carboxylic acid anion or the like is also preferably used as the acid generator (B). Examples of the carboxylic acid anion include the following. TIFF2025081270000133.tif41155

[0180] Z1 + and Z2 +Examples of the organic cation include organic onium cations, organic sulfonium cations, organic iodonium cations, organic ammonium cations, benzothiazolium cations, organic phosphonium cations, and the like. Among these, organic sulfonium cations and organic iodonium cations are preferred, and arylsulfonium cations or aryliodonium cations are more preferred. Specifically, cations represented by any of formula (b2-1) to formula (b2-5) (hereinafter sometimes referred to as "cation (b2-1)" etc. according to the formula number) can be mentioned. TIFF2025081270000134.tif84161[In formula (b2-1) to formula (b2-5), R b4 ~R b6 each independently represents a chain hydrocarbon group having 1 to 30 carbon atoms, an alicyclic hydrocarbon group having 3 to 36 carbon atoms, or an aromatic hydrocarbon group having 6 t...

Claims

1. A resist composition comprising an ammonium carboxylate represented by formula (I) or a structural unit represented by formula (IP). [In formula (I) and formula (IP), L 1 and L １０ each independently represents a single bond or a hydrocarbon group having 1 to 40 carbon atoms which may have a substituent, and -CH 2 - is -O-, -S-, -SO ２ It may be replaced by --or --CO--. R ２ represents a halogen atom or a hydrocarbon group having 1 to 36 carbon atoms, the hydrocarbon group optionally having a substituent, and the —CH 2 - is -O-, -S-, -CO-, -SO- or -SO ２ It may be replaced by -. m2 represents an integer of 0 to 6, and when m2 is 2 or more, a plurality of R ２ may be the same or different from each other. R ｂｂ１ represents a hydrogen atom, a halogen atom or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. X １０ represents a single bond, *-O-**, *-CO-O-**, *-O-CO-O-**, *-CO-NR ３０ -**, *-NR ３０ -CO-O-**, *-O-CO-NR ３０ -** or *-Ax-Ph-Ay-**. R ３０ represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. Ph represents a phenylene group which may have a substituent. Ax and Ay each independently represent one or more bond types selected from the group consisting of a single bond, an ether bond, a thioether bond, an ester bond, an amide bond, and a carbonate bond. * and ** represent binding sites, * represents R ｂｂ１ represents the bonding site with the carbon atom to which it is bonded. R ３ , R ４ , R ５ and R ６ each independently represents a hydrogen atom or a hydrocarbon group having 1 to 20 carbon atoms which may have a substituent, and -CH 2 - is -O-, -S-, -NR ７ -, -SO ２ may be replaced by - or -CO-, R ３ and R ４ , R ５ and R ６ Or R ３ and R ４ and R ５ may be bonded to form a cyclic hydrocarbon group having 3 to 20 carbon atoms, and the cyclic hydrocarbon group may have one or more double bonds between two adjacent carbon atoms, and the -CH ２ - is -O-, -CO- or -NR ７ - may be substituted, and -CH= contained in the cyclic hydrocarbon group may be substituted with -N=. R ７ represents a hydrogen atom or a hydrocarbon group having 1 to 20 carbon atoms which may have a substituent, and the —CH 2 - is -O-, -S-, -SO ２ - or -CO- may be substituted.]

2. X １０ is a single bond or a group represented by the formula (X １０ -1) ~Formula (X １０ 2. The resist composition according to claim 1, wherein the aryl group is a group represented by any one of the following formulas: [Formula (X １０ -1) ~ Type (X １０ -10) *, ** are binding sites, * is R ｂｂ１ represents the bonding site with the carbon atom to which it is bonded. Rx represents a halogen atom, a hydroxy group, a fluorinated alkyl group having 1 to 6 carbon atoms, an alkyl group having 1 to 18 carbon atoms, or an alkoxy group having 1 to 6 carbon atoms. mx represents an integer of 0 to 4. X ２０ is -O- or -NR ３０ Represents -. R ３０ represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms.

3. m2 is an integer of 1 or more, R ２ is an iodine atom, a fluorine atom, a haloalkyl group having 1 to 6 carbon atoms, or an alkyl group having 1 to 6 carbon atoms (the —CH ２ 3. The resist composition according to claim 1, wherein - may be replaced by -O- or -CO-.

4. L １ is a single bond, *-L ２ - or *-L ２ -X ３ -L ３ - (L ２ represents an optionally substituted chain hydrocarbon group having 1 to 10 carbon atoms, an optionally substituted cyclic hydrocarbon group having 3 to 24 carbon atoms, or a group combining an optionally substituted cyclic hydrocarbon group having 3 to 24 carbon atoms and an optionally substituted chain hydrocarbon group having 1 to 8 carbon atoms, and -CH contained in the cyclic hydrocarbon group 2 - is -O-, -S-, -CO- or -SO ２ may be replaced by -, and -CH contained in the chain hydrocarbon group 2 - may be replaced by -O- or -CO-. * represents the bonding site with a carbonyl group. X ３ represents **-CO-O-, **-O-CO-, **-O-CO-O- or **-O-, and ** represents L ２ It represents the binding site with L ３ represents a single bond or a chain hydrocarbon group having 1 to 8 carbon atoms which may have a substituent, and —CH 2 - may be replaced by -O- or -CO-. ２ , X ３ and L ３ The resist composition according to claim 1 or 2, wherein the total number of carbon atoms contained in does not exceed 40.

5. 3. The resist composition according to claim 1, which contains an ammonium carboxylate represented by formula (I).

6. 3. The resist composition according to claim 1, which contains a resin containing a structural unit represented by formula (IP).

7. 3. The resist composition according to claim 1, which contains an acid generator having an acid labile group, or a resin that contains a structural unit having an acid labile group.

8. 3. The resist composition according to claim 1, which contains a resin containing a structural unit represented by formula (IP) and a structural unit having an acid labile group.

9. The composition contains a resin including a structural unit having an acid labile group, 3. The resist composition according to claim 1, wherein the structural unit having an acid labile group includes at least one selected from the group consisting of a structural unit represented by formula (a1-0), a structural unit represented by formula (a1-1), a structural unit represented by formula (a1-2), a structural unit represented by formula (a1-4), a structural unit represented by formula (a1-5), and a structural unit represented by formula (a1-6). [In formula (a1-0), formula (a1-1) and formula (a1-2), L ａ０１ , L ａ１ and L ａ２ are each independently -O- or *-O-(CH ２ ) ｋ１ represents --CO--O--, k1 represents an integer of 1 to 7, and * represents the bonding site with --CO--. R ａ０１ , R ａ４ and R ａ５ each independently represents a hydrogen atom, a halogen atom, or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. R ａ０２ , R ａ０３ and R ａ０４ each independently represents an alkyl group having 1 to 8 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a combination thereof, and the alkyl group, alicyclic hydrocarbon group and aromatic hydrocarbon group may contain a halogen atom. R ａ６ and R ａ７ each independently represents an alkyl group having 1 to 8 carbon atoms, an alkenyl group having 2 to 8 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a group formed by combining these, and the alkyl group, alkenyl group, alicyclic hydrocarbon group and aromatic hydrocarbon group may have a halogen atom. m1′ represents an integer of 0 to 14. n1 represents an integer of 0 to 10. n1' represents an integer of 0 to 3. [In formula (a1-4), R ａ１ represents a hydrogen atom, a halogen atom or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. R ａ１７ represents a halogen atom, a hydroxy group, a carboxy group, an alkyl group having 1 to 6 carbon atoms which may have a halogen atom, an alkoxy group having 1 to 6 carbon atoms, an alkoxyalkyl group having 2 to 12 carbon atoms, an alkoxyalkoxy group having 2 to 12 carbon atoms, an alkylcarbonyl group having 2 to 4 carbon atoms, an alkylcarbonyloxy group having 2 to 4 carbon atoms, an acryloyloxy group, or a methacryloyloxy group. A ａ１１ represents a single bond or an alkanediyl group having 1 to 12 carbon atoms, and the —CH ２ - is -O-, -CO- or -NR ａ１８ May be replaced with -. R ａ１８ represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. X ａ１ represents a single bond or a carbonyl group. R a34 and R a35 each independently represents a hydrogen atom or a hydrocarbon group having 1 to 12 carbon atoms; R a36 represents a hydrocarbon group having 1 to 20 carbon atoms, or R a35 and R a36 are bonded to each other to form a divalent hydrocarbon group having 2 to 20 carbon atoms together with the -C-O- to which they are bonded, and the hydrocarbon group and the -CH 2 - may be replaced by -O- or -S-. na1 represents an integer of 1 to 5, and when na1 is 2 or more, the groups in the parentheses may be the same or different. na11 represents an integer of 0 to 4, and when na11 is 2 or more, a plurality of R ａ１７ may be the same or different from each other. mc represents an integer of 0 to 2. [In formula (a1-5), R a8 represents an alkyl group having 1 to 6 carbon atoms which may have a halogen atom, a hydrogen atom or a halogen atom. Z a1 is a single bond or *-(CH 2 ) h3 -CO-L 54 -, h3 represents an integer of 1 to 4, * represents L 51 represents the binding site with L 51 , L 52 , L 53 and L 54 each independently represents --O-- or --S--. s1 represents an integer of 1 to 3. s1′ represents an integer of 0 to 3.] [In formula (a1-6), R a61 represents a hydrogen atom, a halogen atom or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. R a6２ , R a63 and R a6４ each independently represents an alkyl group having 1 to 6 carbon atoms or a cyclic hydrocarbon group having 3 to 18 carbon atoms which may have a substituent, or R a6２ and R a63 are bonded to each other to form, together with the carbon atoms to which they are attached, a ring having 3 to 20 carbon atoms. X a61 is a single bond, -CO-O-* or -CO-NR a65 - represents *, * represents a bonding site with Ar, R a65 represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. X a62 is a single bond, *-O-L a61 - or *-CO-OL a62 -, * represents a bonding site with Ar, L a61 and L a62 each independently represents an alkanediyl group having 1 to 4 carbon atoms. Ar represents an aromatic hydrocarbon group having 6 to 20 carbon atoms which may have a substituent.]

10. 3. The resist composition according to claim 1, which contains a resin containing a structural unit represented by formula (a2-A). [In formula (a2-A), R ａ２ represents a hydrogen atom, a halogen atom or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. R ａ２７ represents a halogen atom, a hydroxy group, a carboxy group, an alkyl group having 1 to 6 carbon atoms which may have a halogen atom, an alkoxy group having 1 to 6 carbon atoms, an alkoxyalkyl group having 2 to 12 carbon atoms, an alkoxyalkoxy group having 2 to 12 carbon atoms, an alkylcarbonyl group having 2 to 4 carbon atoms, an alkylcarbonyloxy group having 2 to 4 carbon atoms, an acryloyloxy group, or a methacryloyloxy group. A ａ２１ represents a single bond or an alkanediyl group having 1 to 12 carbon atoms, and the —CH ２ - is -O-, -CO- or -NR ａ２８ May be replaced with -. R ａ２８ represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. X ａ２ represents a single bond or a carbonyl group. nA2 represents an integer of 1 to 5, and when nA2 is 2 or more, the groups in the parentheses may be the same or different. na21 represents an integer of 0 to 4, and when na21 is 2 or more, a plurality of R ａ２７ may be the same or different from each other. mc represents an integer of 0 to 2.

11. 3. The resist composition according to claim 1, which contains a salt represented by formula (B1): [In formula (B1), L b1 represents a single bond or a (nb1+1)-valent hydrocarbon group which may have a substituent, and —CH 2 - is -O-, -S-, -CO- or -SO 2 It may be replaced with -. L b2 represents a single bond or a divalent hydrocarbon group having 1 to 24 carbon atoms which may have a substituent, and the —CH 2 - is -O-, -S-, -CO- or -SO 2 It may be replaced by -. Y b1 represents a methyl group which may have a substituent or a cyclic hydrocarbon group having 3 to 24 carbon atoms which may have a substituent, and —CH 2 - is -O-, -S-, -SO 2 It may be replaced by --or --CO--. nb1 represents an integer of 1 to 6. When nb1 is 2 or more, the groups in the parentheses may be the same or different. Z1 ＋ represents an organic cation.

12. An acid generator; 3. The resist composition according to claim 1, further comprising a salt capable of generating an acid having a weaker acidity than the acid generated from said acid generator.

13. (1) a step of applying the resist composition according to claim 1 or 2 onto a substrate; (2) A step of drying the applied resist composition to form a composition layer; (3) exposing the composition layer to light; (4) heating the composition layer after exposure; and (5) developing the composition layer after heating; A method for producing a resist pattern comprising the steps of:

14. An ammonium carboxylate represented by formula (I): [In formula (I), L 1 and L １０ each independently represents a single bond or a hydrocarbon group having 1 to 40 carbon atoms which may have a substituent, and -CH 2 - is -O-, -S-, -SO ２ It may be replaced by --or --CO--. R ２ represents a halogen atom or a hydrocarbon group having 1 to 36 carbon atoms, the hydrocarbon group optionally having a substituent, and the —CH 2 - is -O-, -S-, -CO-, -SO- or -SO ２ It may be replaced by -. m2 represents an integer of 0 to 6, and when m2 is 2 or more, a plurality of R ２ may be the same or different from each other. R ｂｂ１ represents a hydrogen atom, a halogen atom or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. X １０ represents a single bond, *-O-**, *-CO-O-**, *-O-CO-O-**, *-CO-NR ３０ -**, *-NR ３０ -CO-O-**, *-O-CO-NR ３０ -** or *-Ax-Ph-Ay-**. R ３０ represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. Ph represents a phenylene group which may have a substituent. Ax and Ay each independently represent one or more bond types selected from the group consisting of a single bond, an ether bond, a thioether bond, an ester bond, an amide bond, and a carbonate bond. * and ** represent binding sites, * represents R ｂｂ１ represents the bonding site with the carbon atom to which it is bonded. R ３ , R ４ , R ５ and R ６ each independently represents a hydrogen atom or a hydrocarbon group having 1 to 20 carbon atoms which may have a substituent, and -CH 2 - is -O-, -S-, -NR ７ -, -SO ２ may be replaced by - or -CO-, R ３ and R ４ , R ５ and R ６ Or R ３ and R ４ and R ５ may be bonded to form a cyclic hydrocarbon group having 3 to 20 carbon atoms, and the cyclic hydrocarbon group may have one or more double bonds between two adjacent carbon atoms, and the -CH ２ - is -O-, -CO- or -NR ７ - may be substituted, and -CH= contained in the cyclic hydrocarbon group may be substituted with -N=. R ７ represents a hydrogen atom or a hydrocarbon group having 1 to 20 carbon atoms which may have a substituent, and the —CH 2 - is -O-, -S-, -SO ２ - or -CO- may be substituted.]

15. A resin containing a structural unit represented by formula (IP): [In the formula (IP), L 1 and L １０ each independently represents a single bond or a hydrocarbon group having 1 to 40 carbon atoms which may have a substituent, and -CH 2 - is -O-, -S-, -SO ２ It may be replaced by --or --CO--. R ２ represents a halogen atom or a hydrocarbon group having 1 to 36 carbon atoms, the hydrocarbon group optionally having a substituent, and the —CH 2 - is -O-, -S-, -CO-, -SO- or -SO ２ It may be replaced with -. m2 represents an integer of 0 to 6, and when m2 is 2 or more, a plurality of R ２ may be the same or different from each other. R ｂｂ１ represents a hydrogen atom, a halogen atom or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. X １０ represents a single bond, *-O-**, *-CO-O-**, *-O-CO-O-**, *-CO-NR ３０ -**, *-NR ３０ -CO-O-**, *-O-CO-NR ３０ -** or *-Ax-Ph-Ay-**. R ３０ represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. Ph represents a phenylene group which may have a substituent. Ax and Ay each independently represent one or more bond types selected from the group consisting of a single bond, an ether bond, a thioether bond, an ester bond, an amide bond, and a carbonate bond. * and ** represent binding sites, * represents R ｂｂ１ represents the bonding site with the carbon atom to which it is bonded. R ３ , R ４ , R ５ and R ６ each independently represents a hydrogen atom or a hydrocarbon group having 1 to 20 carbon atoms which may have a substituent, and -CH 2 - is -O-, -S-, -NR ７ -, -SO ２ may be replaced by - or -CO-, R ３ and R ４ , R ５ and R ６ Or R ３ and R ４ and R ５ may be bonded to form a cyclic hydrocarbon group having 3 to 20 carbon atoms, and the cyclic hydrocarbon group may have one or more double bonds between two adjacent carbon atoms, and the -CH ２ - is -O-, -CO- or -NR ７ - may be substituted, and -CH= contained in the cyclic hydrocarbon group may be substituted with -N=. R ７ represents a hydrogen atom or a hydrocarbon group having 1 to 20 carbon atoms which may have a substituent, and the —CH 2 - is -O-, -S-, -SO ２ - or -CO- may be substituted.]

Images