Resist composition and method for producing resist pattern

Abstract

To provide a resist composition from which a resist pattern having a good pattern collapse margin can be produced.SOLUTION: In the resist composition, an acid generator contains a salt represented by formula (I) [where X represents a sulfur atom or an iodine atom; and AI- represents an anion containing two or more acid-labile groups].SELECTED DRAWING: None

Description

Technical Field

[0001] The present invention relates to a resist composition used for fine processing of semiconductors and a method for manufacturing a resist pattern.

Background Art

[0002] Patent Document 1 describes a resist composition containing an acid generator containing a salt represented by the following formula. TIFF2025084121000001.tif54102

[0003] Patent Document 2 describes a resist composition containing a salt represented by the following formula, an acid generator containing the salt, and a resin having an acid-labile group. TIFF2025084121000002.tif3860

[0004] Patent Document 3 describes resist compositions each containing a salt represented by the following formula, an acid generator containing the salt, and a resin having an acid-labile group. TIFF2025084121000003.tif3866

Prior Art Documents

Patent Documents

[0005]

Patent Document 1

Patent Document 2

Patent Document 3

Summary of the Invention

Problems to be Solved by the Invention

[0006] The present invention provides a salt that forms a resist pattern having better pattern collapse resistance (PCM) than a resist pattern formed by a resist composition containing the above salt.

Means for Solving the Problem

[0007] The present invention includes the following inventions. [1] A resist composition containing an acid generator, wherein the acid generator contains a salt represented by formula (I). TIFF2025084121000004.tif62150[In formula (I), X represents a sulfur atom or an iodine atom. m10 represents 0 or 1, when X is a sulfur atom, m10 is 1, and when X is an iodine atom, m10 is 0. R 1 , R 2 and R 3 each independently represents a hydroxy group, *-X 1 -R 10 , or *-X 1 -L 10 -X 2 -R 10 . X 1 and X 2 each independently represents *-CO-O-, *-O-CO-, *-O-CO-O- or *-O-. L 10 represents a hydrocarbon group having 1 to 28 carbon atoms which may have a substituent, and -CH 2 - contained in the hydrocarbon group may be replaced by -O-, -S-, -SO 2 - or -CO-. R 4 , R 5 and R 6 each independently represents a halogen atom, a hydrocarbon group having 1 to 18 carbon atoms, *-X 1 -R 10 , or *-X 1 -L 10 -X 2 -R 10 , and the hydrocarbon group may have a substituent, and -CH 2 - contained in the hydrocarbon group may be replaced by -O-, -CO-, -S-, -SO- or -SO 2 -. R 7 、R 8 and R 9 each independently represents a halogen atom, a hydrocarbon group having 1 to 18 carbon atoms, *-X 1 -R 10 , or *-X 1 -L 10 -X 2 -R 10 ; the hydrocarbon group may have a substituent, and -CH 2 - contained in the hydrocarbon group may be replaced by -O-, -CO-, -S-, -SO- or -SO 2 -. Further, when X is a sulfur atom, R 7 and R 8 or R 8 and R 9 may be bonded to form a ring containing S + . -CH 2 - contained in the ring may be replaced by -O-, -S-, -CO-, -SO- or -SO 2 -. R 7 and R 8 or R 8 and R 9 forming the ring may be a single bond formed between two benzene rings bonded to S + . R 10 represents an acid-labile group. A 1 , A 2 and A 3 each independently represents a single bond or a hydrocarbon group having 1 to 20 carbon atoms; the hydrocarbon group may have a substituent, and -CH 2 - contained in the hydrocarbon group may be replaced by -O-, -CO-, -S- or -SO 2 -. Ar 1 , Ar 2 and Ar 3 each independently represents an aromatic hydrocarbon group having 6 to 10 carbon atoms or a heteroaromatic hydrocarbon group having 4 to 9 carbon atoms. m1 represents any integer from 0 to 5; when m1 is 2 or more, the groups within multiple parentheses may be the same as or different from each other. m2 represents an integer from 0 to 5. When m2 is 2 or more, the groups in the plurality of parentheses may be the same as or different from each other. m3 represents an integer from 0 to 5. When m3 is 2 or more, the groups in the plurality of parentheses may be the same as or different from each other. m4 represents an integer from 0 to 4. When m4 is 2 or more, the plurality of Rs 4 may be the same as or different from each other. m5 represents an integer from 0 to 4. When m5 is 2 or more, the plurality of Rs 5 may be the same as or different from each other. m6 represents an integer from 0 to 4. When m6 is 2 or more, the plurality of Rs 6 may be the same as or different from each other. m7 represents an integer from 0 to 5. When m7 is 2 or more, the plurality of Rs 7 may be the same as or different from each other. m8 represents an integer from 0 to 5. When m8 is 2 or more, the plurality of Rs 8 may be the same as or different from each other. m9 represents an integer from 0 to 5. When m9 is 2 or more, the plurality of Rs 9 may be the same as or different from each other. However, 0 ≦ m1 + m7 ≦ 5, 0 ≦ m2 + m8 ≦ 5, 0 ≦ m3 + m9 ≦ 5, and at least one of m1, m2, m3, m7, m8, and m9 represents an integer of 1 or more. R 1 、R 2 and R 3 at least one of which represents *-X 1 -R 10 、or *-X 1 -L 10 -X 2 -R 10 When m1 = m2 = m3 = 0, R 7 、R 8 and R 9 at least one of which represents *-X 1 -R 10 、or *-X 1 -L 10 -X 2 -R 10represents. * represents a binding site. AI - represents an anion having two or more acid-labile groups. [2]A 1 is **-X 01 -L 01 - or **-L 01 -X 01 - and A 2 is **-X 02 -L 02 - or **-L 02 -X 02 - and A 3 is **-X 03 -L 03 - or **-L 03 -X 03 - and X 01 X 02 and X 03 each independently represents -O-, -CO-, -S- or -SO 2 -. L 01 L 02 and L 03 each independently represents a single bond or a hydrocarbon group having 1 to 18 carbon atoms (the hydrocarbon group may have a substituent, and -CH 2 - in the hydrocarbon group may be replaced by -O-, -CO-, -S- or -SO 2 -.). ** represents the binding site to the benzene ring to which X + is bonded in the resist composition described in [1]. [3]X 01 X 02 and X 03 each independently represents -O- or -S- in the resist composition described in [2]. [4]L 01 L 02 and L 03 each independently represents a single bond or an alkanediyl group having 1 to 6 carbon atoms (the -CH 2- may be replaced by -O- or -CO-. The resist composition according to [2] or [3]. [5]R 1 , R 2 , R 3 , R 4 , R 5 , R 6 , R 7 , R 8 and R 9 at least one of is *-X 1 -R 10 , or, *-X 1 -L 10 -X 2 -R 10 wherein R 10 and AI - the acid labile group in is a group represented by formula (1a) or a group represented by formula (2a). The resist composition according to any one of [1] to [4]. TIFF2025084121000005.tif2156[In formula (1a), R aa1 , R aa2 and R aa3 each independently represents an alkyl group having 1 to 8 carbon atoms, an alkenyl group having 2 to 8 carbon atoms, an alicyclic hydrocarbon group having 3 to 20 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms or a group combining these, or R aa1 and R aa2 are bonded to each other to form an alicyclic hydrocarbon group having 3 to 20 carbon atoms together with the carbon atom to which they are bonded, and the alkyl group, the alkenyl group, the alicyclic hydrocarbon group and the aromatic hydrocarbon group may have a halogen atom. * represents a bonding site.] TIFF2025084121000006.tif2161[In formula (2a), R aa1’ and R aa2’ each independently represents a hydrogen atom or a hydrocarbon group having 1 to 12 carbon atoms, R aa3’ represents a hydrocarbon group having 1 to 20 carbon atoms, or R aa2’ and R aa3’ are bonded to each other to form a -C-X a- together with a heterocyclic group having 3 to 20 carbon atoms, and -CH contained in the hydrocarbon group and the heterocyclic group 2 - may be replaced by -O- or -S-, and the hydrocarbon group and the heterocyclic group may have a halogen atom. X a represents an oxygen atom or a sulfur atom. * represents a bonding site. ] [6]R 1 、R 2 、R 3 、R 4 、R 5 、R 6 、R 7 、R 8 and R 9 at least one of and R 1 -R 10A 、or, *-X 1 -L 10 -X 2 -R 10A and R 10 and AI - The acid labile groups in are the resist compositions described in any one of [1] to [5] represented by any of the following groups. TIFF2025084121000007.tif51150[In the formula, R aa1’ represents a hydrogen atom or a hydrocarbon group having 1 to 12 carbon atoms. X a represents an oxygen atom or a sulfur atom. * represents a bonding site. ] [7] The resist composition according to any one of [1] to [6], wherein X is a sulfur atom. [8] Ar 1 、Ar 2 and Ar 3 are each independently a group derived from a benzene ring, a naphthalene ring, a furan ring or a thiophene ring, the resist composition according to any one of [1] to [7]. [9] AI - is an anion represented by formula (I-A) or formula (I-B), the resist composition according to any one of [1] to [8]. TIFF2025084121000008.tif1390[In formula (I-A), Lb1 represents a (nb1 + 1)-valent hydrocarbon group which may have a single bond or a substituent, and -CH 2 - may be replaced by -O-, -S-, -CO- or -SO 2 -. L b2 represents a divalent hydrocarbon group having 1 to 24 carbon atoms which may have a single bond or a substituent, and -CH 2 - may be replaced by -O-, -S-, -CO- or -SO 2 -. Y b1 represents a hydroxy group, *-X 1 -R 10 or *-X 1 -L 11 -X 2 -R 10 ; among a plurality of Y b1 , two or more Y b1 each independently represents *-X 1 -R 10 or *-X 1 -L 11 -X 2 -R 10 . X 1 and X 2 have the same meaning as in formula (I). L 11 represents an alkanediyl group having 1 to 6 carbon atoms. R 10 represents an acid-labile group. nb1 represents any integer from 2 to 6. The groups within a plurality of parentheses may be the same as or different from each other.] TIFF2025084121000009.tif1187[In formula (I-B), A 1 represents a nitrogen atom or a carbon atom. L b2 and Y b1 have the same meaning as in formula (I-A). nb5 represents 2 or 3. When nb5 is 2, A 1 represents a nitrogen atom, and when nb5 is 3, A 1represents a carbon atom. The groups within multiple parentheses may be the same as or different from each other. The groups within two parentheses may combine to form a ring containing A 1

[10] AI - The resist composition according to [9], wherein AI is an anion represented by formula (I-A1) or formula (I-A2). TIFF2025084121000010.tif27129[In formula (I-A1), L b2 and Y b1 have the same meanings as in formula (I-A). Q b1 Q b2 Q b3 and Q b4 each independently represents a hydrogen atom, a fluorine atom, a perfluoroalkyl group having 1 to 6 carbon atoms, or an alkyl group having 1 to 6 carbon atoms. z1 represents any integer from 0 to 6. When z1 is 2 or more, the groups within multiple parentheses may be the same as or different from each other. X 1 represents -O-CO-, -CO-O-, -O-CO-O-, or -O-. L b3 represents a single bond or an (nb2 + 1)-valent hydrocarbon group having 1 to 24 carbon atoms which may have a substituent, and -CH 2 - in the hydrocarbon group may be replaced by -O-, -S-, -CO-, or -SO 2 -. nb2 represents 2 or 3. The groups within multiple parentheses may be the same as or different from each other.] TIFF2025084121000011.tif2596[In formula (I-A2), L b2 and Y b1 have the same meanings as in formula (I-A). R b1 represents a halogen atom or an alkyl group having 1 to 6 carbon atoms, and -CH 2 - in the alkyl group may be replaced by -O- or -CO-. ​nb4 represents an integer of any one of 2 to 5. The groups in multiple parentheses may be the same as or different from each other. nb3 represents an integer of any one of 0 to 3. When nb3 is 2 or more, a plurality of Rs b1 may be the same as or different from each other. However, 2 ≤ nb4 + nb3 ≤ 5 is satisfied.

[11] R 1 、R 2 、R 3 、R 4 、R 5 、R 6 、R 7 、R 8 and R 9 The total number of acid-labile groups contained in is 2 or more, and the resist composition according to any one of [1] to

[10] .

[12] The resist composition according to any one of [1] to

[11] that does not contain a resin.

[13] Contains one or more resins, and at least one of the one or more resins contains a structural unit represented by one or more formulas (a2). When one or more resins contain a structural unit having an acid-labile group, in the resin containing the structural unit having an acid-labile group, the content of the structural unit having an acid-labile group is 1 mol% or less with respect to all the structural units constituting the resin containing the structural unit having an acid-labile group, and the resist composition according to any one of [1] to

[11] . TIFF2025084121000012.tif4095 [In formula (a2), R a2 represents a hydrogen atom, a halogen atom, or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. A a21 represents a single bond or an alkanediyl group having 1 to 12 carbon atoms, and -CH 2 - in the alkanediyl group may be replaced by -O-, -CO-, or -NR a28 -. R a28 represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. L a21represents a single bond or a hydrocarbon group having 1 to 28 carbon atoms, and the hydrocarbon group may have a substituent, and -CH contained in the hydrocarbon group 2 - may be replaced by -O-, -CO-, -S- or -SO 2 -. L a22 represents a single bond or a chain hydrocarbon group having 1 to 12 carbon atoms which may have a fluorine atom, and -CH contained in the chain hydrocarbon group 2 - may be replaced by -O- or -CO-. na2 represents any integer from 1 to 5. When na2 is 2 or more, a plurality of Ls a22 may be the same as or different from each other.]

[14] The resist composition according to

[13] , wherein the structural unit represented by one or more formulas (a2) contains one or more structural units represented by the formula (a2-A). TIFF2025084121000013.tif30128 [In the formula (a2-A), R a2 represents a hydrogen atom, a halogen atom or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. R a27 represents a halogen atom, a hydroxy group, a carboxy group, an alkyl group having 1 to 6 carbon atoms which may have a halogen atom, an alkoxy group having 1 to 6 carbon atoms, an alkoxyalkyl group having 2 to 12 carbon atoms, an alkoxyalkoxy group having 2 to 12 carbon atoms, an alkylcarbonyl group having 2 to 4 carbon atoms, an alkylcarbonyloxy group having 2 to 4 carbon atoms, an acryloyloxy group or a methacryloyloxy group. A a21 represents a single bond or an alkanediyl group having 1 to 12 carbon atoms, and -CH contained in the alkanediyl group 2 - may be replaced by -O-, -CO- or -NR a28 -. R a28 represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. X a2 represents a single bond or a carbonyl group. nA2 represents any integer from 1 to 5. When nA2 is 2 or more, the groups within the plurality of parentheses may be the same as or different from each other. na21 represents any integer from 0 to 4. When na21 is 2 or more, the plurality of Rs a27 may be the same as or different from each other. mc represents any integer from 0 to 2.

[15] The structural unit represented by one or more formulas (a2) is the resist composition according to

[13] or

[14] containing the structural unit represented by formula (a2-D). TIFF2025084121000014.tif51106 [In formula (a2-D), R a2 represents a hydrogen atom, a halogen atom, or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. R a27 represents a halogen atom, a hydroxy group, a carboxy group, an alkyl group having 1 to 6 carbon atoms which may have a halogen atom, an alkoxy group having 1 to 6 carbon atoms, an alkoxyalkyl group having 2 to 12 carbon atoms, an alkoxyalkoxy group having 2 to 12 carbon atoms, an alkylcarbonyl group having 2 to 4 carbon atoms, an alkylcarbonyloxy group having 2 to 4 carbon atoms, an acryloyloxy group, or a methacryloyloxy group. A a21 represents a single bond or an alkanediyl group having 1 to 12 carbon atoms, and -CH 2 - in the alkanediyl group may be replaced by -O-, -CO-, or -NR a28 -. R a28 represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. R a21 and R a22 each independently represent a fluorinated alkyl group having 1 to 4 carbon atoms. L a24 represents a single bond or an alkanediyl group having 1 to 3 carbon atoms, and the alkanediyl group may be substituted with a fluorine atom. nD2 represents any integer from 1 to 5. When nD2 is 2 or more, the groups within the plurality of parentheses may be the same as or different from each other. nD22 represents any integer from 0 to 4. When nD22 is 2 or more, a plurality of Rs a27 may be the same as or different from each other. However, 1 ≦ nD2 + nD22 ≦ 5.]

[16] The resist composition according to any one of [1] to

[15] , wherein the content of the salt represented by the formula (I) is 80% by mass or more based on the solid content of the resist composition.

[17] The resist composition according to any one of

[13] to

[16] , wherein the total content of the salt represented by the formula (I) and the resin containing the structural unit represented by the formula (a2) is 85% by mass or more based on the solid content of the resist composition.

[18] The resist composition according to any one of [1] to

[17] , further containing a salt that generates an acid having a lower acidity than the acid generated from the acid generator.

[19] (1) A step of applying the resist composition according to any one of [1] to

[18] onto a substrate, (2) A step of drying the applied resist composition to form a composition layer, (3) A step of exposing the composition layer, (4) A step of heating the exposed composition layer, and (5) A method for producing a resist pattern, including a step of developing the heated composition layer.

Advantages of the Invention

[0008] By using the resist composition containing the salt of the present invention, a resist pattern can be produced with good pattern collapse resistance (PCM).

Modes for Carrying Out the Invention

[0009] In the present specification, the “(meth)acrylic monomer” means at least one of an acrylic monomer and a methacrylic monomer. Descriptions such as “(meth)acrylate” and “(meth)acrylic acid” also represent the same meaning. Among the groups described in the present specification, those that can take both a linear structure and a branched structure may be either of them. -CH contained in a hydrocarbon group, etc. 2- is -O-, -S-, -SO-, -CO-, -NR- or -SO 2 - is replaced, the same examples shall apply to each group, and the number of carbon atoms before replacement shall be the number of carbon atoms of the hydrocarbon group or the like. The "combined group" means a group formed by combining two or more of the exemplified groups with appropriate changes in their valences, bonding forms, etc. "Derived from" or "induced from" means that the polymerizable C=C bond contained in the molecule becomes a -C-C- group (single bond) by polymerization. When stereoisomers exist, all stereoisomers are included. The "acid-labile group" means, as described later, a group having a leaving group that forms a hydrophilic group (e.g., a carboxy group or a hydroxy group, etc.) when it comes into contact with an acid (e.g., trifluoromethanesulfonic acid, etc.) and the leaving group detaches. The "base-labile group" means, as described later, a group having a leaving group that forms a hydrophilic group (e.g., a carboxy group or a hydroxy group, etc.) when it comes into contact with a base (e.g., trimethylamine, etc.) and the leaving group detaches. Each group may have any position and number of hydrogen atoms contained in the group replaced by a bond depending on the number of substituents, etc. The number of carbon atoms in the substituent is not included in the number of carbon atoms of the group being substituted. In the present specification, the "solid content of the resist composition" means the total of the components excluding the solvent (E) described later from the total amount of the resist composition.

[0010] 〔Resist composition〕 The resist composition of the present invention contains an acid generator. The acid generator contains a salt represented by the formula (I) (hereinafter sometimes referred to as "salt (I)"). The resist composition of the present invention may further contain an acid generator other than the salt represented by the formula (I) (hereinafter sometimes referred to as "compound (B)"). Further, the resist composition of the present invention may contain a crosslinking agent and / or a resin, or may be a molecular resist containing no resin. When the resist composition of the present invention contains a resin containing a structural unit having an acid-labile group, the content of the structural unit having an acid-labile group is 1 mol% or less, preferably 0.1 mol% or less, based on all the structural units constituting all the resins containing the structural unit having an acid-labile group. Substantially, the resist composition of the present invention preferably does not contain a resin containing a structural unit having an acid-labile group. The resist composition of the present invention preferably further contains a quencher (hereinafter sometimes referred to as "quencher (C)") such as a salt that generates an acid having a lower acidity than the acid generated from the acid generator, and more preferably contains a solvent (hereinafter sometimes referred to as "solvent (E)").

[0011] 〔Acid generator〕 The resist composition of the present invention contains a salt represented by formula (I) as an acid generator. <Salt represented by formula (I)> The present invention relates to a salt represented by formula (I) (hereinafter sometimes referred to as "salt (I)"). Among salts (I), the positively charged side may be referred to as "cation (I)", and the negatively charged side may be referred to as "anion (I)". 〔Cation (I)〕 The cation (I) of the salt represented by formula (I) is a cation represented by formula (I-C). TIFF2025084121000015.tif62158 [In formula (I-C), all symbols have the same meanings as in formula (I), respectively.]

[0012] R 1 、R 2 、R 3 、R 4 、R 5 、R 6 、R 7 、R 8 and R 9 The X 1 contained in is *-CO-O-, *-O- or *-O-CO-O- (* is Ar 1 、Ar 2, Ar 3 or represents a bonding site with a benzene ring. It is preferably (as such). R 1 R 2 R 3 R 4 R 5 R 6 R 7 R 8 and R 9 The X contained in 2 is preferably *-CO-O-, *-O-CO- or *-O-CO-O- (* represents the bonding site with L 10 ). More preferably, it is *-CO-O- or *-O-CO-. R 1 R 2 R 3 R 4 R 5 R 6 R 7 R 8 and R 9 The hydrocarbon group in the L contained in 10 includes chain hydrocarbon groups such as alkanediyl groups, alicyclic hydrocarbon groups that are monocyclic or polycyclic (including spiro rings, condensed rings, bridged rings, etc.), and aromatic hydrocarbon groups. A group formed by combining two or more of these groups (for example, a hydrocarbon group formed from an alicyclic hydrocarbon group and an alkanediyl group, etc.) may also be used. Examples of the alkanediyl group include linear alkanediyl groups such as methylene group, ethylene group, propane-1,3-diyl group, butane-1,4-diyl group, pentane-1,5-diyl group, hexane-1,6-diyl group, heptane-1,7-diyl group, octane-1,8-diyl group, nonane-1,9-diyl group, decane-1,10-diyl group, undecane-1,11-diyl group, dodecane-1,12-diyl group, tridecane-1,13-diyl group, tetradecane-1,14-diyl group, pentadecane-1,15-diyl group, hexadecane-1,16-diyl group, and heptadecane-1,17-diyl group, and Examples of the branched alkanediyl group include an ethane-1,1-diyl group, a propane-1,1-diyl group, a propane-1,2-diyl group, a propane-2,2-diyl group, a pentane-2,4-diyl group, a 2-methylpropane-1,3-diyl group, a 2-methylpropane-1,2-diyl group, a pentane-1,4-diyl group, a 2-methylbutane-1,4-diyl group, and the like. The terminal of the branched alkanediyl group may be an alkyl group such as a methyl group. The number of carbon atoms in the chain hydrocarbon group may be 1 to 24, preferably 1 to 18, more preferably 1 to 12, still more preferably 1 to 9, even more preferably 1 to 6, and even more preferably 1 to 4. Examples of the monocyclic or polycyclic alicyclic hydrocarbon group include the following groups. The bonding site can be at any position. TIFF2025084121000016.tif46168Specifically, examples of the alicyclic hydrocarbon group include a monocyclic divalent alicyclic hydrocarbon group which is a monocyclic cycloalkanediyl group such as a cyclobutane-1,3-diyl group, a cyclopentane-1,3-diyl group, a cyclohexane-1,4-diyl group, a cyclooctane-1,5-diyl group, and a polycyclic divalent alicyclic hydrocarbon group which is a polycyclic cycloalkanediyl group such as a norbornane-1,4-diyl group, a norbornane-2,5-diyl group, an adamantane-1,5-diyl group, an adamantane-2,6-diyl group, a spirocyclohexane-1,2'-cyclopentane group, a spiroadamantane-2,3'-cyclopentane group, and a spiro ring having a cycloalkyl group such as a norbornyl group or an adamantyl group and a cycloalkyl group bonded thereto by spiro. The number of carbon atoms in the alicyclic hydrocarbon group may be 3 to 24, preferably 3 to 18, more preferably 3 to 16, and still more preferably 3 to 12. Examples of the aromatic hydrocarbon group include aromatic hydrocarbon groups such as arylene groups such as a phenylene group, a naphthylene group, an anthrylene group, a biphenylene group, and a phenanthrylene group. The number of carbon atoms in the aromatic hydrocarbon group may be 6 to 24, preferably 6 to 18, more preferably 6 to 14, and still more preferably 6 to 10. Examples of the group formed by combining two or more of them include a group formed by combining an alicyclic hydrocarbon group and an alkanediyl group, a group formed by combining an aromatic hydrocarbon group and an alkanediyl group, and a group formed by combining an alicyclic hydrocarbon group and an aromatic hydrocarbon group. In the combination, two or more of the alicyclic hydrocarbon group, aromatic hydrocarbon group, and chain hydrocarbon group may be combined respectively. Also, any group may be bonded to X 1 or X 2 and may be bonded thereto. Examples of the group formed by combining an alicyclic hydrocarbon group and an alkanediyl group include, for example, -divalent alicyclic hydrocarbon group-alkanediyl group-, -alkanediyl group-divalent alicyclic hydrocarbon group-alkanediyl group-, -alkanediyl group-divalent alicyclic hydrocarbon group-, etc. Examples of the group formed by combining an aromatic hydrocarbon group and an alkanediyl group include, for example, -divalent aromatic hydrocarbon group-alkanediyl group-, -alkanediyl group-divalent aromatic hydrocarbon group-alkanediyl group-, -alkanediyl group-divalent aromatic hydrocarbon group-, etc. Examples of the group formed by combining an alicyclic hydrocarbon group and an aromatic hydrocarbon group include -aromatic hydrocarbon group-alicyclic hydrocarbon group-, -alicyclic hydrocarbon group-aromatic hydrocarbon group-, -alicyclic hydrocarbon group-aromatic hydrocarbon group-alicyclic hydrocarbon group-, etc. L 10 The -CH 2 - contained in the hydrocarbon group having 1 to 28 carbon atoms of L may be replaced by -O-, -S-, -SO 2 - or -CO-. L 10 When the -CH 2 - contained in the hydrocarbon group having 1 to 28 carbon atoms of L is replaced by -O-, -S-, -SO 2 - or -CO-, the carbon number before replacement is regarded as the carbon number of the hydrocarbon group. Examples of the group in which -CH 2 - contained in the hydrocarbon group is replaced by -O-, -S-, -SO 2 - or -CO- include a hydroxy group (-CH contained in a methyl group 2- is a group replaced by -O-), a carboxy group (-CH contained in the ethyl group) 2 -CH 2 - is a group replaced by -O-CO-), a thiol group (-CH contained in the methyl group) 2 - is a group replaced by -S-), an oxy group (-CH contained in the methylene group) 2 - is a group replaced by -O-), a carbonyl group (-CH contained in the methylene group) 2 - is a group replaced by -CO-), a thio group (-CH contained in the methylene group) 2 - is a group replaced by -S-), a sulfonyl group (-CH contained in the methylene group) 2 - is a group replaced by -SO 2 -), an alkoxy group (-CH at any position contained in the alkyl group) 2 - is a group replaced by -O-), an alkylthio group (-CH at any position contained in the alkyl group) 2 - is a group replaced by -S-), an alkylsulfonyl group (-CH at any position contained in the alkyl group) 2 - is a group replaced by -SO 2 -), an alkoxycarbonyl group (-CH at any position contained in the alkyl group) 2 -CH 2 - is a group replaced by -O-CO-), an alkylcarbonyl group (-CH at any position contained in the alkyl group) 2 - is a group replaced by -CO-), an alkylcarbonyloxy group (-CH at any position contained in the alkyl group) 2 -CH 2 - is a group replaced by -CO-O-), an alkoxycarbonyloxy group (-CH at any position contained in the alkyl group) 2 -CH 2 -CH 2 - is a group replaced by -O-CO-O-), an alkanediyl-oxy group (-CH at any position contained in the alkanediyl group) 2 - is a group replaced by -O-), an alkanediyl-oxycarbonyl group (-CH at any position contained in the alkanediyl group) 2 -CH 2- is a group replaced by -O-CO-, an alkanediylcarbonyl group (any -CH at any position contained in the alkanediyl group) 2 - is a group replaced by -CO-, an alkanediylcarbonyloxy group (any -CH at any position contained in the alkanediyl group) 2 -CH 2 - is a group replaced by -CO-O-, an alkanediylsulfonyl group (any -CH at any position contained in the alkanediyl group) 2 - is 2 - replaced by -SO 2 - is a group replaced by -S-, a cycloalkoxy group, a cycloalkylalkoxy group, an aromatic hydrocarbon group-carbonyloxy group, an aromatic hydrocarbon group-carbonyl group, an aromatic hydrocarbon group-oxy group, a group formed by combining two or more of these groups, etc. Examples of the alkoxy group include alkoxy groups having 1 to 27 carbon atoms, such as methoxy group, ethoxy group, propoxy group, butoxy group, pentyloxy group, hexyloxy group, octyloxy group, 2-ethylhexyloxy group, nonyloxy group, decyloxy group, undecyloxy group, etc. The number of carbon atoms of the alkoxy group is preferably 1 to 11, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. Examples of the alkylthio group include alkylthio groups having 1 to 27 carbon atoms, such as methylthio group, ethylthio group, propylthio group, butylthio group, pentylthio group, hexylthio group, octylthio group, 2-ethylhexylthio group, nonylthio group, decylthio group, undecylthio group, etc. The number of carbon atoms of the alkylthio group is preferably 1 to 11, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. Examples of the alkoxycarbonyl group include alkoxycarbonyl groups having 2 to 27 carbon atoms, such as methoxycarbonyl group, ethoxycarbonyl group, butoxycarbonyl group and the like. Examples of the alkylcarbonyl group include alkylcarbonyl groups having 2 to 28 carbon atoms, such as acetyl group, propionyl group and butyryl group and the like. Examples of the alkylcarbonyloxy group include alkylcarbonyloxy groups having 2 to 27 carbon atoms, such as acetyloxy group, propionyloxy group, butyryloxy group and the like. Examples of the alkoxycarbonyloxy group include alkoxycarbonyloxy groups having 2 to 26 carbon atoms, such as butoxycarbonyloxy group and the like. The number of carbon atoms of the alkoxycarbonyl group is preferably 2 to 11, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms of the alkylcarbonyl group is preferably 2 to 12, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms of the alkylcarbonyloxy group is preferably 2 to 11, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms of the alkoxycarbonyloxy group is preferably 2 to 10, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. Examples of the alkylsulfonyl group include alkylsulfonyl groups having 1 to 27 carbon atoms, such as methylsulfonyl group, ethylsulfonyl group, propylsulfonyl group, butylsulfonyl group, pentylsulfonyl group, hexylsulfonyl group, octylsulfonyl group, 2-ethylhexylsulfonyl group, nonylsulfonyl group, decylsulfonyl group, undecylsulfonyl group and the like. The number of carbon atoms of the alkylsulfonyl group is preferably 1 to 11, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. Examples of the alkanediyl-oxy group include alkanediyl-oxy groups having 1 to 27 carbon atoms, such as a methylene-oxy group, an ethylene-oxy group, a propanediyl-oxy group, a butanediyl-oxy group, and a pentanediyl-oxy group. The number of carbon atoms in the alkanediyl-oxy group is preferably 1 to 11, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. Examples of the alkanediyl-oxycarbonyl group include alkanediyl-oxycarbonyl groups having 2 to 27 carbon atoms, such as a methylene-oxycarbonyl group, an ethylene-oxycarbonyl group, a propanediyl-oxycarbonyl group, and a butanediyl-oxycarbonyl group. Examples of the alkanediyl-carbonyl group include alkanediyl-carbonyl groups having 2 to 28 carbon atoms, such as a methylene-carbonyl group, an ethylene-carbonyl group, a propanediyl-carbonyl group, a butanediyl-carbonyl group, and a pentanediyl-carbonyl group. Examples of the alkanediyl-carbonyloxy group include alkanediyl-carbonyloxy groups having 2 to 27 carbon atoms, such as a methylene-carbonyloxy group, an ethylene-carbonyloxy group, a propanediyl-carbonyloxy group, and a butanediyl-carbonyloxy group. The number of carbon atoms in the alkanediyl-oxycarbonyl group is preferably 2 to 11, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms in the alkanediyl-carbonyl group is preferably 2 to 12, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms in the alkanediyl-carbonyloxy group is preferably 2 to 11, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. Examples of the alkanediyl-sulfonyl group include alkanediyl-sulfonyl groups having 1 to 27 carbon atoms, such as a methylene-sulfonyl group, an ethylene-sulfonyl group, and a propylene-sulfonyl group. The number of carbon atoms in the alkanediyl-sulfonyl group is preferably 1 to 11, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. Examples of the alkanediylthio group include alkanediylthio groups having 1 to 27 carbon atoms, such as methylene thio group, ethylene thio group, propylene thio group and the like. The number of carbon atoms of the alkanediylthio group is preferably 1 to 11, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. Examples of the cycloalkoxy group include cycloalkoxy groups having 3 to 27 carbon atoms, such as cyclohexyloxy group and the like. Examples of the cycloalkylalkoxy group include cycloalkylalkoxy groups having 4 to 27 carbon atoms, such as cyclohexylmethoxy group and the like. Examples of the aromatic hydrocarbon group - carbonyloxy group include aromatic hydrocarbon group - carbonyloxy groups having 7 to 27 carbon atoms, such as benzoyloxy group and the like. Examples of the aromatic hydrocarbon group - carbonyl group include aromatic hydrocarbon group - carbonyl groups having 7 to 28 carbon atoms, such as benzoyl group and the like. Examples of the aromatic hydrocarbon group - oxy group include aromatic hydrocarbon group - oxy groups having 6 to 27 carbon atoms, such as phenyloxy group and the like.

[0013] In addition, -CH 2 - contained in the alicyclic hydrocarbon group is replaced with -O-, -S-, -CO- or -SO 2 - Examples of the resulting group include the following groups and the like. -O- or -CO- in the groups represented below may each be replaced with -S- or -SO 2 -. The bonding site can be at any position. TIFF2025084121000017.tif46168 -CH contained in the group combining an alicyclic hydrocarbon group and an aromatic hydrocarbon group 2 - is replaced with -O-, -S-, -CO- or -SO 2 - Examples of the resulting group also include the following groups and the like. The bonding site can be at any position. TIFF2025084121000018.tif26164

[0014] L 10Examples of the substituent that may be present include a halogen atom and a cyano group. L 10 When L is a group combining an alicyclic hydrocarbon group or an aromatic hydrocarbon group with a chain hydrocarbon group such as an alkyl group, the chain hydrocarbon group such as an alkyl group can be a substituent of the alicyclic hydrocarbon group or the aromatic hydrocarbon group. Also, L 10 In the chain hydrocarbon group such as an alkyl group contained in L, the -CH 2 - can be replaced by -O-, -CO-, -S- or -SO 2 -, so that L 1 can substantially have substituents such as a hydroxy group, a carboxy group, an alkoxy group, an alkylcarbonyl group, an alkoxycarbonyl group, an alkylcarbonyloxy group, a thiol group, an alkylthio group, and an alkylsulfonyl group. Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom. L 10 The substituent in L is preferably an alkyl group having 1 to 4 carbon atoms, a hydroxy group or a halogen atom, more preferably an alkyl group having 1 to 4 carbon atoms or a halogen atom, and even more preferably a methyl group or a fluorine atom.

[0015] L 10 Examples of L include a chain hydrocarbon group having 1 to 18 carbon atoms (wherein the -CH 2 - in the chain hydrocarbon group may be replaced by -O- or -CO-), or a group combining a chain hydrocarbon group having 1 to 8 carbon atoms and an alicyclic hydrocarbon group having 3 to 18 carbon atoms (wherein the -CH 2 - in the chain hydrocarbon group and the alicyclic hydrocarbon group may be replaced by -O- or -CO-). It may also be an alkanediyl group having 1 to 10 carbon atoms (wherein the -CH 2 - in the alkanediyl group may be replaced by -O- or -CO-), or a group combining an alkanediyl group having 1 to 4 carbon atoms and an alicyclic hydrocarbon group having 3 to 12 carbon atoms (wherein the -CH 2- may be replaced by -O- or -CO-. It is preferably an alkanediyl group having 1 to 6 carbon atoms, more preferably an alkanediyl group having 1 to 3 carbon atoms, still more preferably a methylene group, and even more preferably a methylene group.

[0016] R 1 、R 2 、R 3 、R 4 、R 5 、R 6 、R 7 、R 8 and R 9 The acid-labile group of R contained in 10 means a group that, when contacted with an acid (e.g., trifluoromethanesulfonic acid, etc.), a leaving group containing a group represented by R 10 is eliminated to form a carboxy group or a hydroxy group. As the acid-labile group, a group represented by the formula (1a) (hereinafter, sometimes referred to as "acid-labile group (1a)") and a group represented by the formula (2a) (hereinafter, sometimes referred to as "acid-labile group (2a)") are preferable. TIFF2025084121000019.tif2156 [In the formula (1a), R aa1 、R aa2 and R aa3 each independently represents an alkyl group having 1 to 8 carbon atoms, an alkenyl group having 2 to 8 carbon atoms, an alicyclic hydrocarbon group having 3 to 20 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a group combining these, or R aa1 and R aa2 are bonded to each other to form an alicyclic hydrocarbon group having 3 to 20 carbon atoms together with the carbon atom to which they are bonded, and the alkyl group, the alkenyl group, the alicyclic hydrocarbon group, and the aromatic hydrocarbon group may have a halogen atom. * represents the bonding site. ] TIFF2025084121000020.tif2161 [In the formula (2a), R aa1’ and R aa2’ each independently represents a hydrogen atom or a hydrocarbon group having 1 to 12 carbon atoms, and R aa3’ represents a hydrocarbon group having 1 to 20 carbon atoms, or R aa2’ and Raa3’ are bonded to each other and form a heterocyclic group having 3 to 20 carbon atoms together with the -C-X to which they are bonded, and the -CH contained in the hydrocarbon group and the heterocyclic group a - may be replaced by -O- or -S-, and the hydrocarbon group and the heterocyclic group may have a halogen atom. 2 - may be replaced by -O- or -S-, and the hydrocarbon group and the heterocyclic group may have a halogen atom. X a represents an oxygen atom or a sulfur atom. * represents a bonding site.]

[0017] R aa1 R aa2 and R aa3 Examples of the alkyl group of R, R and R include a methyl group, an ethyl group, a propyl group, an n-butyl group, an n-pentyl group, an n-hexyl group, an n-heptyl group, an n-octyl group and the like. R aa1 R aa2 and R aa3 The number of carbon atoms of the alkyl group of R, R and R is preferably 1 to 8, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. R aa1 R aa2 and R aa3 Examples of the alkenyl group of R, R and R include an ethenyl group, a propenyl group, an isopropenyl group, a butenyl group, an isobutenyl group, a tert-butenyl group, a pentenyl group, a hexenyl group, a heptenyl group, an octenyl group, an isooctenyl group, a nonenyl group. R aa1 R aa2 and R aa3 The alicyclic hydrocarbon group of R, R and R may be either monocyclic or polycyclic. Examples of the monocyclic alicyclic hydrocarbon group include cycloalkyl groups such as a cyclopentyl group, a cyclohexyl group, a cycloheptyl group, a cyclooctyl group and the like. Examples of the polycyclic alicyclic hydrocarbon group include, for example, a decahydronaphthyl group, an adamantyl group, a norbornyl group and the following group (* represents a bonding site). R aa1 R aa2 and R aa3 The number of carbon atoms of the alicyclic hydrocarbon group of R, R and R is preferably 3 to 20, more preferably 3 to 18, still more preferably 3 to 16, and even more preferably 3 to 12. TIFF2025084121000021.tif9159R aa1 and R aa2 and R aa3 Examples of the aromatic hydrocarbon group of R, R, and R include aryl groups such as phenyl group, naphthyl group, anthryl group, biphenyl group, and phenanthryl group. R aa1 and R aa2 and R aa3 The number of carbon atoms of the aromatic hydrocarbon group of R, R, and R is 6 to 18, preferably 6 to 14, and more preferably 6 to 10.

[0018] Examples of the combined group include a group combining the above-mentioned alkyl group and alicyclic hydrocarbon group (for example, alkylcycloalkyl group or cycloalkylalkyl group such as methylcyclohexyl group, dimethylcyclohexyl group, methylnorbornil group, cyclohexylmethyl group, adamantylmethyl group, adamantyldimethyl group, norbornylethyl group, etc.), aralkyl group such as benzyl group, aromatic hydrocarbon group having an alkyl group (p-methylphenyl group, p-tert-butylphenyl group, tolyl group, xylyl group, cumenyl group, mesityl group, 2,6-diethylphenyl group, 2-methyl-6-ethylphenyl group, etc.), aromatic hydrocarbon group having an alicyclic hydrocarbon group (p-cyclohexylphenyl group, p-adamantylphenyl group, etc.), aryl-cycloalkyl group such as phenylcyclohexyl group, etc.

[0019] R aa1 and R aa2 When R and R are bonded to each other to form an alicyclic hydrocarbon group together with the carbon atom to which they are bonded, examples of -C(R aa1 )(R aa2 )(R aa3 ) include the following groups. The number of carbon atoms of the alicyclic hydrocarbon group is preferably 3 to 18, more preferably 3 to 16, and still more preferably 3 to 12. * represents the bonding site with -O-. TIFF2025084121000022.tif30140

[0020] Examples of the group represented by formula (1a) include 1,1,1-trialkyl group (in formula (1a), Raa1 , R aa2 and R aa3 is a group in which the group is an alkyl group, preferably a tert-butyl group), 2-alkyladamantan-2-yl group (in formula (1a), R aa1 , R aa2 and the carbon atom to which they are attached forms an adamantyl group, and R aa3 is a group in which the group is an alkyl group) and 1-(adamantan-1-yl)-1,1-dialkyl group (in formula (1a), R aa1 and R aa2 are alkyl groups, and R aa3 is an adamantyl group), etc. are mentioned.

[0021] R aa1' , R aa2' and R aa3' Examples of the hydrocarbon group of R , R aa1 , R aa2 and R aa3 include chain hydrocarbon groups such as alkyl groups, alicyclic hydrocarbon groups, cyclic hydrocarbon groups such as aromatic hydrocarbon groups, and groups formed by combining these. R aa2' and R aa3' are bonded to each other to form a heterocyclic group together with the carbon atom to which they are attached and X a , -C(R aa1' )(R aa2' )-X a -(R aa3' ) includes the following groups. * represents the bonding site. The number of carbon atoms of the heterocyclic group is from 3 to 20, preferably from 3 to 18, more preferably from 3 to 16, and still more preferably from 3 to 12. TIFF2025084121000023.tif21143R aa1 , R aa2 , R aa3 , R aa1' , R aa2' and R aa3' Examples of the halogen atom that may be possessed include a fluorine atom, a chlorine atom, a bromine atom, or an iodine atom. R aa1' and R aa2' Among them, at least one is preferably a hydrogen atom. The acid-labile group (2a) is R aa1’ and R aa2’ are each independently a hydrogen atom or a hydrocarbon group having 1 to 12 carbon atoms, and R aa3’ is a hydrocarbon group having 3 to 20 carbon atoms containing a cyclic hydrocarbon group (the total number of carbon atoms of R aa3’ is 3 to 20), or R aa2’ and R aa3’ are bonded to each other to form a heterocyclic group having 3 to 20 carbon atoms together with the -C-X a - to which they are bonded. The -CH 2 - contained in the hydrocarbon group and heterocyclic group here may be replaced by -O- or -S-.

[0022] Specific examples of the acid-labile group (1a) include the following groups. * represents the bonding site. TIFF2025084121000024.tif55162 Specific examples of the acid-labile group (2a) include the following groups. * represents the bonding site. TIFF2025084121000025.tif59148R 10 The acid-labile group of R is preferably a group represented by the formula (2a), and more preferably a group represented by the following. TIFF2025084121000026.tif60151[Wherein, the symbols of R aa1’ , X a and * have the same meanings as in the formula (2a).] R 1 、R 2 、R 3 、R 4 、R 5 、R 6 、R 7 、R 8 and R 9 The total number of acid-labile groups contained in is preferably 2 or more, and more preferably 3 or more. R 1 、R 2 and R 3is, independently of each other, a hydroxy group, -O-R 10 , -O-CO-O-R 10 or -O-L 10 -CO-O-R 10 is preferably, a hydroxy group, -O-R 10 or -O-L 10 -CO-O-R 10 is more preferably, -O-R 10 or -O-L 10 -CO-O-R 10 is even more preferably.

[0023] R 4 、R 5 、R 6 、R 7 、R 8 and R 9 Examples of the halogen atoms of include fluorine atoms, chlorine atoms, bromine atoms, iodine atoms and the like. R 4 、R 5 、R 6 、R 7 、R 8 and R 9 Examples of the hydrocarbon groups having 1 to 18 carbon atoms of include chain hydrocarbon groups such as alkyl groups, alicyclic hydrocarbon groups, aromatic hydrocarbon groups, and groups formed by combining these. The alkyl group is a linear or branched alkyl group, and examples thereof include methyl group, ethyl group, n-propyl group, isopropyl group, n-butyl group, sec-butyl group, tert-butyl group, pentyl group, hexyl group, heptyl group, 2-ethylhexyl group, octyl group, nonyl group, decyl group, undecyl group, dodecyl group and the like. The number of carbon atoms of the alkyl group is preferably 1 to 12, more preferably 1 to 9, even more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. The alkanediyl group is a linear or branched alkanediyl group, and examples thereof include linear alkanediyl groups such as methylene group, ethylene group, propane-1,3-diyl group, butane-1,4-diyl group, pentane-1,5-diyl group, hexane-1,6-diyl group; and Examples of the branched alkanediyl group include an ethane-1,1-diyl group, a propane-1,1-diyl group, a propane-1,2-diyl group, a propane-2,2-diyl group, a pentane-2,4-diyl group, a 2-methylpropane-1,3-diyl group, a 2-methylpropane-1,2-diyl group, a pentane-1,4-diyl group, a 2-methylbutane-1,4-diyl group, and the like. The number of carbon atoms in the chain hydrocarbon group is preferably from 1 to 12, more preferably from 1 to 9, still more preferably from 1 to 6, even more preferably from 1 to 4, and even more preferably from 1 to 3. The alicyclic hydrocarbon group may be either monocyclic or polycyclic, and examples thereof include the groups represented below. The bonding site can be at any position. TIFF2025084121000027.tif46168Specifically, examples of the monocyclic alicyclic hydrocarbon group include monocyclic cycloalkyl groups such as a cyclopropyl group, a cyclobutyl group, a cyclopentyl group, a cyclohexyl group, a cycloheptyl group, a cyclooctyl group, a cyclononyl group, a cyclodecyl group, and a cyclododecyl group. Examples of the polycyclic alicyclic hydrocarbon group include polycyclic cycloalkyl groups such as a decahydronaphthyl group, an adamantyl group, and a norbornyl group, cycloalkyl groups such as a spirocyclohexane-1,2'-cyclopentane group and a spiroadamantane-2,3'-cyclopentane group, and spiro rings having a cycloalkyl group spiro-bonded to a norbornyl group or an adamantyl group, respectively. The number of carbon atoms in the alicyclic hydrocarbon group is preferably from 3 to 18, more preferably from 3 to 16, and still more preferably from 3 to 12. Examples of the aromatic hydrocarbon group include a phenyl group, a naphthyl group, a biphenyl group, an anthryl group, a phenanthryl group, and a binaphthyl group. The number of carbon atoms in the aromatic hydrocarbon group is preferably from 6 to 18, more preferably from 6 to 14, and still more preferably from 6 to 10.

[0024] Among the chain hydrocarbon group, alicyclic hydrocarbon group, and aromatic hydrocarbon group, examples of the group formed by combining two or more of these groups include a group formed by combining an aromatic hydrocarbon group and a chain hydrocarbon group (e.g., aromatic hydrocarbon group - alkane diyl group - *, alkyl group - aromatic hydrocarbon group - *, alkyl group - aromatic hydrocarbon group - alkane diyl group - *, where the -CH contained in the alkane diyl group and the alkyl group 2 - may be replaced by -O-, -CO-, -S- or -SO 2 -). Examples of the group formed by combining an alicyclic hydrocarbon group and a chain hydrocarbon group include an alicyclic hydrocarbon group - alkane diyl group - *, alkyl group - alicyclic hydrocarbon group - *, alkyl group - alicyclic hydrocarbon group - alkane diyl group - *, where the -CH contained in the alicyclic hydrocarbon group, the alkane diyl group and the alkyl group 2 - may be replaced by -O-, -CO-, -S- or -SO 2 -). Examples of the group formed by combining an aromatic hydrocarbon group and an alicyclic hydrocarbon group include an aromatic hydrocarbon group - alicyclic hydrocarbon group - *, alicyclic hydrocarbon group - aromatic hydrocarbon group - *, where the -CH contained in the alicyclic hydrocarbon group 2 - may be replaced by -O-, -CO-, -S- or -SO 2 -). * represents a bonding site. Examples of the aromatic hydrocarbon group - alkane diyl group - * include aralkyl groups such as benzyl group and phenethyl group. Examples of the alkyl group - aromatic hydrocarbon group - * include tolyl group, xylyl group, cumenyl group, etc. Examples of the alicyclic hydrocarbon group - alkane diyl group - * include cycloalkylalkyl groups such as cyclohexylmethyl group, cyclohexylethyl group, 1-(adamantan-1-yl)methyl group, 1-(adamantan-1-yl)-1-methylethyl group, etc. Examples of the alkyl group - alicyclic hydrocarbon group - * include cycloalkyl groups having an alkyl group such as methylcyclohexyl group, dimethylcyclohexyl group, 2-alkyladamantan-2-yl group, etc. Examples of the aromatic hydrocarbon group - alicyclic hydrocarbon group - * include phenylcyclohexyl group, etc. Examples of the alicyclic hydrocarbon group-aromatic hydrocarbon group-* include a cyclohexylphenyl group and the like. In the combination, two or more alicyclic hydrocarbon groups, aromatic hydrocarbon groups, and chain hydrocarbon groups may be combined with each other. Also, any of the groups may be bonded to Ar 1 Ar 2 Ar 3 or a benzene ring.

[0025] R 4 R 5 R 6 R 7 R 8 and R 9 When the -CH 2 - contained in the hydrocarbon group represented by is replaced by -O-, -CO-, -S-, -SO- or -SO 2 -, the total number of carbon atoms of the hydrocarbon group before replacement is taken as the total number of carbon atoms of the hydrocarbon group. Also, the number may be one or two or more. Examples of the group in which the -CH 2 - contained in the hydrocarbon group is replaced by -O-, -CO-, -S-, -SO- or -SO 2 - include a hydroxy group (a group in which the -CH 2 - contained in the methyl group is replaced by -O-), a thiol group (a group in which the -CH 2 - contained in the methyl group is replaced by -S-), a carboxy group (a group in which the -CH 2 -CH 2 - contained in the ethyl group is replaced by -O-CO-), an alkoxy group (a group in which any -CH 2 - contained in the alkyl group is replaced by -O-), an alkoxycarbonyl group (a group in which any -CH 2 -CH 2 - contained in the alkyl group is replaced by -O-CO-), an alkylcarbonyl group (a group in which any -CH 2 - contained in the alkyl group is replaced by -CO-), an alkylcarbonyloxy group (a group in which any -CH 2 -CH 2- is a group replaced by -CO-O-), an alkoxycarbonyloxy group (any -CH at any position contained in the alkyl group) 2 -CH 2 -CH 2 - is a group replaced by -O-CO-O-), an alkylthio group (any -CH at any position contained in the alkyl group) 2 - is a group replaced by -S-), an alkylsulfinyl group (any -CH at any position contained in the alkyl group) 2 - is a group replaced by -SO-), an alkylsulfonyl group (any -CH at any position contained in the alkyl group) 2 - is 2 - replaced by -SO-), an oxy group (any -CH contained in the methylene group) 2 - is a group replaced by -O-), a carbonyl group (any -CH contained in the methylene group) 2 - is a group replaced by -CO-), a thio group (any -CH contained in the methylene group) 2 - is a group replaced by -S-), a sulfinyl group (any -CH contained in the methylene group) 2 - is a group replaced by -SO-), a sulfonyl group (any -CH contained in the methylene group) 2 - is 2 - replaced by -SO-), an alkanediyl-oxy group (any -CH at any position contained in the alkanediyl group) 2 - is a group replaced by -O-), an alkanediyl-oxycarbonyl group (any -CH at any position contained in the alkanediyl group) 2 -CH 2 - is a group replaced by -O-CO-), an alkanediyl-carbonyl group (any -CH at any position contained in the alkanediyl group) 2 - is a group replaced by -CO-), an alkanediyl-carbonyl-oxy group (any -CH at any position contained in the alkanediyl group) 2 -CH 2 - is a group replaced by -CO-O-), an alkanediyl-thio group (any -CH at any position contained in the alkanediyl group) 2 - is a group replaced by -S-), an alkanediyl-sulfinyl group (any -CH at any position contained in the alkanediyl group) 2- is a group replaced by -SO-, an alkanediylsulfonyl group (a group at any position contained in the alkanediyl group where -CH 2 - is -SO 2 - replaced group), a cycloalkoxy group, a cycloalkylalkoxy group, an aromatic hydrocarbon group -carbonyloxy group, an aromatic hydrocarbon group -carbonyl group, an aromatic hydrocarbon group -oxy group, a group formed by combining two or more of these groups, etc. can be mentioned. Examples of the alkoxy group include alkoxy groups having 1 to 17 carbon atoms, such as methoxy group, ethoxy group, propoxy group, butoxy group, pentyloxy group, hexyloxy group, octyloxy group, 2-ethylhexyloxy group, nonyloxy group, decyloxy group, undecyloxy group and the like. The number of carbon atoms of the alkoxy group is preferably 1 to 11, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. Examples of the alkoxycarbonyl group include alkoxycarbonyl groups having 2 to 17 carbon atoms, such as methoxycarbonyl group, ethoxycarbonyl group, butoxycarbonyl group and the like. Examples of the alkylcarbonyl group include alkylcarbonyl groups having 2 to 18 carbon atoms, such as acetyl group, propionyl group and butyryl group and the like. Examples of the alkylcarbonyloxy group include alkylcarbonyloxy groups having 2 to 17 carbon atoms, such as acetyloxy group, propionyloxy group, butyryloxy group and the like. Examples of the alkoxycarbonyloxy group include alkoxycarbonyloxy groups having 2 to 16 carbon atoms, such as butoxycarbonyloxy group and the like. The number of carbon atoms of the alkoxycarbonyl group is preferably 2 to 11, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms of the alkylcarbonyl group is preferably 2 to 12, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms of the alkylcarbonyloxy group is preferably 2 to 11, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms of the alkoxycarbonyloxy group is preferably 2 to 10, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. Examples of the alkylthio group include alkylthio groups having 1 to 17 carbon atoms, such as methylthio group, ethylthio group, propylthio group, butylthio group, pentylthio group, hexylthio group, octylthio group, 2-ethylhexylthio group, nonylthio group, decylthio group, undecylthio group and the like. The number of carbon atoms of the alkylthio group is preferably 1 to 11, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. Examples of the alkylsulfuryl group include alkylsulfuryl groups having 1 to 17 carbon atoms, such as methylsulfuryl group, ethylsulfuryl group, propylsulfuryl group, butylsulfuryl group, pentylsulfuryl group, hexylsulfuryl group, octylsulfuryl group, 2-ethylhexylsulfuryl group, nonylsulfuryl group, decylsulfuryl group, undecylsulfuryl group, and the like. The number of carbon atoms of the alkylsulfuryl group is preferably 1 to 11, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. Examples of the alkylsulfonyl group include alkylsulfonyl groups having 1 to 17 carbon atoms, such as methylsulfonyl group, ethylsulfonyl group, propylsulfonyl group, butylsulfonyl group, pentylsulfonyl group, hexylsulfonyl group, octylsulfonyl group, 2-ethylhexylsulfonyl group, nonylsulfonyl group, decylsulfonyl group, undecylsulfonyl group, and the like. The number of carbon atoms of the alkylsulfonyl group is preferably 1 to 11, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. Examples of the alkanedioxy group include alkanedioxy groups having 1 to 17 carbon atoms, such as methyleneoxy group, ethyleneoxy group, propanedioxy group, butanedioxy group, pentanedioxy group, and the like. The number of carbon atoms of the alkanedioxy group is preferably 1 to 11, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. Examples of the alkanediyl oxycarbonyl group include alkanediyl oxycarbonyl groups having 2 to 17 carbon atoms, such as a methylene oxycarbonyl group, an ethylene oxycarbonyl group, a propanediyl oxycarbonyl group, and a butanediyl oxycarbonyl group. Examples of the alkanediyl carbonyl group include alkanediyl carbonyl groups having 2 to 18 carbon atoms, such as a methylene carbonyl group, an ethylene carbonyl group, a propanediyl carbonyl group, a butanediyl carbonyl group, and a pentanediyl carbonyl group. Examples of the alkanediyl carbonyloxy group include alkanediyl carbonyloxy groups having 2 to 17 carbon atoms, such as a methylene carbonyloxy group, an ethylene carbonyloxy group, a propanediyl carbonyloxy group, and a butanediyl carbonyloxy group. The number of carbon atoms in the alkanediyl oxycarbonyl group is preferably 2 to 11, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms in the alkanediyl carbonyl group is preferably 2 to 12, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms in the alkanediyl carbonyloxy group is preferably 2 to 11, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. Examples of the alkanediyl thio group include alkanediyl thio groups having 1 to 17 carbon atoms, such as a methylene thio group, an ethylene thio group, and a propylene thio group. The number of carbon atoms in the alkanediyl thio group is preferably 1 to 11, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. Examples of the alkanediyl sulfinyl group include alkanediyl sulfinyl groups having 1 to 17 carbon atoms, such as a methylene sulfinyl group, an ethylene sulfinyl group, and a propylene sulfinyl group. The number of carbon atoms in the alkanediyl sulfinyl group is preferably 1 to 11, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. Examples of the alkanediylsulfonyl group include alkanediylsulfonyl groups having 1 to 17 carbon atoms, such as methylenesulfonyl group, ethylenesulfonyl group, propylenesulfonyl group and the like. The number of carbon atoms of the alkanediylsulfonyl group is preferably 1 to 11, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. Examples of the cycloalkoxy group include cycloalkoxy groups having 3 to 17 carbon atoms, such as cyclohexyloxy group and the like. Examples of the cycloalkylalkoxy group include cycloalkylalkoxy groups having 4 to 17 carbon atoms, such as cyclohexylmethoxy group and the like. Examples of the aromatic hydrocarbon group - carbonyloxy group include aromatic hydrocarbon group - carbonyloxy groups having 7 to 17 carbon atoms, such as benzoyloxy group and the like. Examples of the aromatic hydrocarbon group - carbonyl group include aromatic hydrocarbon group - carbonyl groups having 7 to 18 carbon atoms, such as benzoyl group and the like. Examples of the aromatic hydrocarbon group - oxy group include aromatic hydrocarbon group - oxy groups having 6 to 17 carbon atoms, such as phenyloxy group and the like.

[0026] In addition, the -CH 2 - contained in the alicyclic hydrocarbon group, -O-, -S-, -SO 2 - or -CO- replaced groups include the groups represented below and the like. The -O- or -CO- in the groups represented below may be replaced by -S- or -SO 2 -. The bonding site can be at any position. TIFF2025084121000028.tif46168 -CH contained in the group combining the alicyclic hydrocarbon group and the aromatic hydrocarbon group 2 - replaced by -O-, -S-, -CO- or -SO 2 - groups include, within the range allowed by the upper limit of the number of carbon atoms, the same as the groups exemplified in this specification.

[0027] R 4 、R 5 、R 6 、R 7 、R8 and R 9 Examples of the substituent that the hydrocarbon group of R may have include a halogen atom and a cyano group. Examples of the halogen atom include the same groups as those described above. R 4 、R 5 、R 6 、R 7 、R 8 and R 9 When R, R, R, R, R, R, and R are hydrocarbon groups having a halogen atom, examples of the hydrocarbon group having a halogen atom of R, R, R, R, R, R, and R include a chain hydrocarbon group having a halogen atom such as a haloalkyl group, an alicyclic hydrocarbon group having a halogen atom, and an aromatic hydrocarbon group having a halogen atom. 4 、R 5 、R 6 、R 7 、R 8 and R 9 Examples of the hydrocarbon group having a halogen atom of R, R, R, R, R, R, and R include a chain hydrocarbon group having a halogen atom such as a haloalkyl group, an alicyclic hydrocarbon group having a halogen atom, and an aromatic hydrocarbon group having a halogen atom. Examples of the alkyl group having a halogen atom include haloalkyl groups having 1 to 12 carbon atoms such as a fluorinated alkyl group having 1 to 12 carbon atoms, a chlorinated alkyl group having 1 to 12 carbon atoms, a brominated alkyl group having 1 to 12 carbon atoms, and an iodinated alkyl group having 1 to 12 carbon atoms. Examples of the haloalkyl group include perfluoroalkyl groups having 1 to 12 carbon atoms (such as a trifluoromethyl group, a pentafluoroethyl group, a heptafluoropropyl group, and a nonafluorobutyl group), a 2,2,2-trifluoroethyl group, a 3,3,3-trifluoropropyl group, a 4,4,4-trifluorobutyl group, a 3,3,4,4,4-pentafluorobutyl group, a chloromethyl group, a bromomethyl group, and an iodomethyl group. The number of carbon atoms of the haloalkyl group is preferably 1 to 9, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. -CH contained in the haloalkyl group 2- may be replaced by -O- or -CO-. Such groups include haloalkoxy groups, haloalkoxycarbonyl groups, haloalkylcarbonyl groups, haloalkylcarbonyloxy groups, etc. Specifically, haloalkoxy groups having 1 to 11 carbon atoms, haloalkoxycarbonyl groups having 2 to 11 carbon atoms, haloalkylcarbonyl groups having 2 to 12 carbon atoms, haloalkylcarbonyloxy groups having 2 to 11 carbon atoms, etc. may be mentioned. For example, groups in which one or more hydrogen atoms of the groups exemplified above are replaced by halogen atoms may be mentioned. The hydrocarbon group may have one substituent or a plurality of substituents.

[0028] R 4 、R 5 and R 6 are each independently a halogen atom, a haloalkyl group having 1 to 6 carbon atoms, an alkyl group having 1 to 6 carbon atoms (the -CH 2 - in the haloalkyl group and the alkyl group may be replaced by -O- or -CO-), -X 1 -R 10 or -X 1 -L 10 -X 2 -R 10 is preferably, more preferably an iodine atom, a fluorine atom, a haloalkyl group having 1 to 6 carbon atoms or an alkyl group having 1 to 6 carbon atoms (the -CH 2 - in the haloalkyl group and the alkyl group may be replaced by -O- or -CO-), an iodine atom, a fluorine atom, a haloalkyl group having 1 to 4 carbon atoms or an alkyl group having 1 to 4 carbon atoms (the -CH 2- may be replaced by -O- or -CO-. It is more preferably the case, more preferably it is an iodine atom, a fluorine atom, a hydroxy group, an alkyl group having 1 to 4 carbon atoms, a haloalkyl group having 1 to 4 carbon atoms or an alkoxy group having 1 to 3 carbon atoms, still more preferably it is an iodine atom, a fluorine atom, a hydroxy group, an alkyl group having 1 to 4 carbon atoms, a perfluoroalkyl group having 1 to 4 carbon atoms or an alkoxy group having 1 to 3 carbon atoms, and even more preferably it is an iodine atom, a fluorine atom, a trifluoromethyl group, a methyl group, a methoxy group, an ethoxy group or a hydroxy group. Also, in one embodiment, one or more R 4 , R 5 and R 6 may each independently contain an acid-labile group, and R 4 , R 5 , R 6 may each independently be the same group as R 1 , R 2 , R 3 . When R 1 is -O-R 10 , it is preferable that one or two of R 4 are the same -O-R 1 as R 10 . When R 1 is -O-CO-O-R 10 , it is preferable that one or two of R 4 are the same -O-CO-O-R 1 as R 10 . When R 1 is -O-L 10 -CO-O-R 10 , it is preferable that one or two of R 4 are the same -O-L 1 -CO-O-R 10 as R 10 . The combinations of R 2 and R 5 and the combinations of R 3 and R 6 are also the same as the combinations of R 1 and R 4 respectively.

[0029] R7 , R 8 and R 9 are each independently a halogen atom, a haloalkyl group having 1 to 6 carbon atoms, an alkyl group having 1 to 6 carbon atoms (wherein -CH 2 - in the haloalkyl group and the alkyl group may be replaced by -O- or -CO-), -X 1 -R 10 or -X 1 -L 10 -X 2 -R 10 is preferably, a halogen atom, a fluoroalkyl group having 1 to 4 carbon atoms, an alkyl group having 1 to 4 carbon atoms (wherein -CH 2 - in the alkyl group may be replaced by -O- or -CO-), -O-R 10 , -O-CO-O-R 10 or -O-L 10 -CO-O-R 10 is more preferably, a fluorine atom, an iodine atom, a perfluoroalkyl group having 1 to 4 carbon atoms, an alkyl group having 1 to 4 carbon atoms (wherein -CH 2 - in the alkyl group may be replaced by -O- or -CO-), -O-R 10 , -O-CO-O-R 10 or -O-L 10 -CO-O-R 10 is even more preferably, a fluorine atom, an iodine atom, a trifluoromethyl group, a hydroxy group, a methoxy group, a methyl group, a t-butyl group, -O-R 10 , -O-CO-O-R 10 or -O-L 10 -CO-O-R 10 is still more preferably.

[0030] Ar 1 , Ar 2 and Ar 3 Examples of the aromatic hydrocarbon group having 6 to 10 carbon atoms for 1 , Ar 2 and Ar 3 ​Examples of the heterocyclic aromatic hydrocarbon group having 4 to 9 carbon atoms include groups derived from a furan ring, a thiophene ring, a benzofuran ring, a benzothiophene ring, or the like. Ar 1 , Ar 2 and Ar 3 are each independently preferably a group derived from a benzene ring, a naphthalene ring, a furan ring, or a thiophene ring, and more preferably a group derived from a benzene ring.

[0031] A 1 , A 2 and A 3 Examples of the hydrocarbon group include linear or branched chain hydrocarbon groups (e.g., alkanediyl groups, etc.), monocyclic or polycyclic alicyclic hydrocarbon groups, and aromatic hydrocarbon groups, and those obtained by combining two or more of these groups may also be used. The number of carbon atoms of the hydrocarbon group is preferably 1 to 19, more preferably 1 to 18, still more preferably 1 to 16, even more preferably 1 to 14, and even more preferably 1 to 12. Examples of the chain hydrocarbon group include linear alkanediyl groups such as a methylene group, an ethylene group, a propane-1,3-diyl group, a butane-1,4-diyl group, a pentane-1,5-diyl group, a hexane-1,6-diyl group, a heptane-1,7-diyl group, an octane-1,8-diyl group, a nonane-1,9-diyl group, a decane-1,10-diyl group, an undecane-1,11-diyl group, a dodecane-1,12-diyl group, a tridecane-1,13-diyl group, a tetradecane-1,14-diyl group, a pentadecane-1,15-diyl group, a hexadecane-1,16-diyl group, and a heptadecane-1,17-diyl group, and branched alkanediyl groups such as an ethane-1,1-diyl group, a propane-1,1-diyl group, a propane-1,2-diyl group, a propane-2,2-diyl group, a pentane-2,4-diyl group, a 2-methylpropane-1,3-diyl group, a 2-methylpropane-1,2-diyl group, a pentane-1,4-diyl group, and a 2-methylbutane-1,4-diyl group. The number of carbon atoms in the chain hydrocarbon group is preferably from 1 to 18, more preferably from 1 to 12, still more preferably from 1 to 9, even more preferably from 1 to 6, yet more preferably from 1 to 4, and still yet more preferably from 1 to 3. The alicyclic hydrocarbon group may be either monocyclic or polycyclic, and examples thereof include the groups represented below. The bonding site can be at any position. TIFF2025084121000029.tif46168Specifically, monocyclic alicyclic hydrocarbon groups which are monocyclic cycloalkane diyl groups such as cyclobutane-1,3-diyl group, cyclopentane-1,3-diyl group, cyclohexane-1,4-diyl group, cyclooctane-1,5-diyl group and polycyclic alicyclic hydrocarbon groups which are polycyclic cycloalkane diyl groups such as norbornane-1,4-diyl group, norbornane-2,5-diyl group, adamantane-1,5-diyl group, adamantane-2,6-diyl group, spirocyclohexane-1,2'-cyclopentane group, spiroadamantane-2,3'-cyclopentane group and other cycloalkyl groups, and spiro rings having a cycloalkyl group spiro-bonded to each of a norbornyl group or an adamantyl group. The number of carbon atoms in the alicyclic hydrocarbon group is preferably from 3 to 18, more preferably from 3 to 16, still more preferably from 3 to 12, and even more preferably from 3 to 10. Examples of the aromatic hydrocarbon group include arylene groups such as phenylene group, naphthylene group, anthrylene group, biphenylene group, phenanthrylene group and other aromatic hydrocarbon groups. The number of carbon atoms in the aromatic hydrocarbon group is preferably from 6 to 18, more preferably from 6 to 14, and still more preferably from 6 to 10.

[0032] Examples of groups formed by combining include a group formed by combining an alicyclic hydrocarbon group with an alkanediyl group, a group formed by combining an aromatic hydrocarbon group with an alkanediyl group, and a group formed by combining an alicyclic hydrocarbon group with an aromatic hydrocarbon group. In the combination, two or more types of chain hydrocarbon groups, alicyclic hydrocarbon groups, and aromatic hydrocarbon groups may be combined. Any of the groups may be bonded to a benzene ring. Examples of groups combining an alicyclic hydrocarbon group and an alkanediyl group include -divalent alicyclic hydrocarbon group-alkanediyl group-, -alkanediyl group-divalent alicyclic hydrocarbon group-alkanediyl group-, and -alkanediyl group-divalent alicyclic hydrocarbon group-. Examples of groups combining an aromatic hydrocarbon group and an alkanediyl group include -divalent aromatic hydrocarbon group-alkanediyl group-, -alkanediyl group-divalent aromatic hydrocarbon group-alkanediyl group-, -alkanediyl group-divalent aromatic hydrocarbon group-, and the like. Examples of groups combining an alicyclic hydrocarbon group and an aromatic hydrocarbon group include -aromatic hydrocarbon group-alicyclic hydrocarbon group-, -alicyclic hydrocarbon group-aromatic hydrocarbon group-, -alicyclic hydrocarbon group-aromatic hydrocarbon group-, and -alicyclic hydrocarbon group-aromatic hydrocarbon group-alicyclic hydrocarbon group-.

[0033] A 1 , A 2 and A 3 So, the -CH 2 - is -O-, -CO-, -S- or -SO 2 When it is replaced with -, the number of carbon atoms before the replacement is regarded as the total number of carbon atoms of the hydrocarbon group. The number may be 1 or 2 or more, but is preferably 1 or 2. -CH contained in the hydrocarbon group 2 - is -O-, -CO-, -S- or -SO 2 The group substituted for - is a hydroxy group (-CH 2 - is replaced by -O-), carboxy group (-CH contained in ethyl group) 2 -CH 2- is a group replaced by -O-CO-), a thiol group (-CH contained in the methyl group) 2 - is a group replaced by -S-), an alkoxy group (-CH at any position contained in the alkyl group) 2 - is a group replaced by -O-), an alkoxycarbonyl group (-CH at any position contained in the alkyl group) 2 -CH 2 - is a group replaced by -O-CO-), an alkylcarbonyl group (-CH at any position contained in the alkyl group) 2 - is a group replaced by -CO-), an alkylcarbonyloxy group (-CH at any position contained in the alkyl group) 2 -CH 2 - is a group replaced by -CO-O-), an alkoxycarbonyloxy group (-CH at any position contained in the alkyl group) 2 -CH 2 -CH 2 - is a group replaced by -O-CO-O-), an alkylthio group (-CH at any position contained in the alkyl group) 2 - is a group replaced by -S-), an alkylsulfonyl group (-CH at any position contained in the alkyl group) 2 - is replaced by -SO 2 -), an oxy group (-CH contained in the methylene group) 2 - is a group replaced by -O-), a carbonyl group (-CH contained in the methylene group) 2 - is a group replaced by -CO-), a thio group (-CH contained in the methylene group) 2 - is a group replaced by -S-), a sulfonyl group (-CH contained in the methylene group) 2 - is replaced by -SO 2 -), an alkanedioxy group (-CH at any position contained in the alkanediyl group) 2 - is a group replaced by -O-), an alkanedioxycarbonyl group (-CH at any position contained in the alkanediyl group) 2 -CH 2 - is a group replaced by -O-CO-), an alkanediylcarbonyl group (-CH at any position contained in the alkanediyl group) 2- is a group replaced by -CO-, an alkanediylcarbonyloxy group (any -CH at any position contained in the alkanediyl group) 2 -CH 2 - is a group replaced by -CO-O-, an alkanediylsulfonyl group (any -CH at any position contained in the alkanediyl group) 2 - is replaced by -SO 2 - is a group replaced by -SO-, an alkanediylthio group (any -CH at any position contained in the alkanediyl group) 2 - is a group replaced by -S-, a cycloalkoxy group, a cycloalkylalkoxy group, an aromatic hydrocarbon group-carbonyl-oxy group, an aromatic hydrocarbon group-carbonyl group, an aromatic hydrocarbon group-oxy group, a group formed by combining two or more of these groups, etc. Examples of the alkoxy group include alkoxy groups having 1 to 19 carbon atoms, such as methoxy group, ethoxy group, propoxy group, butoxy group, pentyloxy group, hexyloxy group, octyloxy group, 2-ethylhexyloxy group, nonyloxy group, decyloxy group, undecyloxy group and the like. The number of carbon atoms of the alkoxy group is preferably 1 to 11, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. Examples of the alkoxycarbonyl group include alkoxycarbonyl groups having 2 to 19 carbon atoms, such as methoxycarbonyl group, ethoxycarbonyl group, butoxycarbonyl group and the like. Examples of the alkylcarbonyl group include alkylcarbonyl groups having 2 to 20 carbon atoms, such as acetyl group, propionyl group and butyryl group and the like. Examples of the alkylcarbonyloxy group include alkylcarbonyloxy groups having 2 to 19 carbon atoms, such as acetyloxy group, propionyloxy group, butyryloxy group and the like. Examples of the alkoxycarbonyloxy group include alkoxycarbonyloxy groups having 2 to 18 carbon atoms, such as butoxycarbonyloxy group and the like. The number of carbon atoms of the alkoxycarbonyl group is preferably 2 to 11, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms of the alkylcarbonyl group is preferably 2 to 12, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms of the alkylcarbonyloxy group is preferably 2 to 11, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms of the alkoxycarbonyloxy group is preferably 2 to 10, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. Examples of the alkylthio group include alkylthio groups having 1 to 19 carbon atoms, such as methylthio group, ethylthio group, propylthio group, butylthio group, pentylthio group, hexylthio group, octylthio group, 2-ethylhexylthio group, nonylthio group, decylthio group, undecylthio group and the like. The number of carbon atoms of the alkylthio group is preferably 1 to 11, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. Examples of the alkylsulfonyl group include alkylsulfonyl groups having 1 to 19 carbon atoms, such as methylsulfonyl group, ethylsulfonyl group, propylsulfonyl group, butylsulfonyl group, pentylsulfonyl group, hexylsulfonyl group, octylsulfonyl group, 2-ethylhexylsulfonyl group, nonylsulfonyl group, decylsulfonyl group, undecylsulfonyl group and the like. The number of carbon atoms of the alkylsulfonyl group is preferably 1 to 11, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. Examples of the alkanedioxy group include alkanedioxy groups having 1 to 19 carbon atoms, such as methyleneoxy group, ethyleneoxy group, propanedioxy group, butanedioxy group, pentanedioxy group and the like. The number of carbon atoms of the alkanedioxy group is preferably 1 to 11, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. Examples of the alkanediyl oxycarbonyl group include alkanediyl oxycarbonyl groups having 2 to 19 carbon atoms, such as a methylene oxycarbonyl group, an ethylene oxycarbonyl group, a propanediyl oxycarbonyl group, and a butanediyl oxycarbonyl group. Examples of the alkanediyl carbonyl group include alkanediyl carbonyl groups having 2 to 20 carbon atoms, such as a methylene carbonyl group, an ethylene carbonyl group, a propanediyl carbonyl group, a butanediyl carbonyl group, and a pentanediyl carbonyl group. Examples of the alkanediyl carbonyloxy group include alkanediyl carbonyloxy groups having 2 to 19 carbon atoms, such as a methylene carbonyloxy group, an ethylene carbonyloxy group, a propanediyl carbonyloxy group, and a butanediyl carbonyloxy group. The number of carbon atoms of the alkanediyl oxycarbonyl group is preferably 2 to 11, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms of the alkanediyl carbonyl group is preferably 2 to 12, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms of the alkanediyl carbonyloxy group is preferably 2 to 11, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. Examples of the alkanediyl sulfonyl group include alkanediyl sulfonyl groups having 1 to 19 carbon atoms, such as a methylene sulfonyl group, an ethylene sulfonyl group, and a propylene sulfonyl group. The number of carbon atoms of the alkanediyl sulfonyl group is preferably 1 to 11, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. Examples of the alkanediyl thio group include alkanediyl thio groups having 1 to 19 carbon atoms, such as a methylene thio group, an ethylene thio group, and a propylene thio group. The number of carbon atoms of the alkanediyl thio group is preferably 1 to 11, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. Examples of the cycloalkoxy group include cycloalkoxy groups having 3 to 19 carbon atoms, such as a cyclohexyloxy group. Examples of the cycloalkylalkoxy group include cycloalkylalkoxy groups having 4 to 19 carbon atoms, such as a cyclohexylmethoxy group. Examples of the aromatic hydrocarbon group-carbonyl oxy group include aromatic hydrocarbon group-carbonyl oxy groups having 7 to 19 carbon atoms, such as a benzoyloxy group. Examples of the aromatic hydrocarbon group-carbonyl group include aromatic hydrocarbon group-carbonyl groups having 7 to 20 carbon atoms, such as a benzoyl group. Examples of the aromatic hydrocarbon group-oxy group include aromatic hydrocarbon group-oxy groups having 6 to 19 carbon atoms, such as a phenyloxy group.

[0034] In addition, -CH 2 - contained in the alicyclic hydrocarbon group is replaced with -O-, -CO-, -S- or -SO 2 - Examples of the resulting group include the groups represented below. Among the groups represented below, groups in which -O- is replaced with -S- and -CO- is replaced with -SO 2 - are also included. The bonding site can be at any position. TIFF2025084121000030.tif46169 -CH contained in a group combining an alicyclic hydrocarbon group and an aromatic hydrocarbon group 2 - is replaced with -O-, -S-, -CO- or -SO 2 - Examples of the resulting group include those similar to the groups exemplified in this specification within the range allowed by the upper limit of the number of carbon atoms. A 1 、A 2 and A 3 Examples of the substituent that the hydrocarbon group of 4 ~R 9 may have are the same as the groups exemplified as the substituents that the hydrocarbon group may have.

[0035] A 1 、A 2 and A 3is, independently of each other, a single bond or a hydrocarbon group having 1 to 20 carbon atoms (the hydrocarbon group may have a substituent, and -CH contained in the hydrocarbon group 2 - is optionally replaced by -O-, -CO-, -S- or -SO 2 -. However, at least one of -CH contained in the hydrocarbon group 2 - is replaced by -O-, -CO-, -S- or -SO 2 -). It is preferably so. Specifically, A 1 is, ***-L 011 -X 01 -L 012 -, A 2 is, ***-L 021 -X 02 -L 022 -, A 3 is, ***-L 031 -X 03 -L 032 - (X 01 , X 02 and X 03 each independently represent -O-, -CO-, -S- or -SO 2 -. L 011 , L 012 , L 021 , L 022 , L 031 and L 032 each independently represent a single bond or a hydrocarbon group having 1 to 18 carbon atoms, the hydrocarbon group may have a substituent, and -CH contained in the hydrocarbon group 2 - is optionally replaced by -O-, -CO-, -S- or -SO 2 -. However, the total number of carbon atoms of L 011 and L 012 is 0 to 18, the total number of carbon atoms of L 021 and L 022 is 0 to 18, and the total number of carbon atoms of L 031 and L 032 is 0 to 18. *** represents the bonding site with Ar 1 , Ar 2 or Ar 3 .) It is more preferably so, and A 1 is, ***-X 01 -L 01- or *** -L 01 -X 01 - and A 2 is *** -X 02 -L 02 - or *** -L 02 -X 02 - and A 3 is *** -X 03 -L 03 - or *** -L 03 -X 03 - and (X 01 X 02 and X 03 each independently represents -O-, -CO-, -S- or -SO 2 -. L 01 L 02 and L 03 each independently represents a single bond or a hydrocarbon group having 1 to 18 carbon atoms, and the hydrocarbon group may have a substituent, and -CH 2 - in the hydrocarbon group may be replaced by -O-, -CO-, -S- or -SO 2 -. *** represents the bonding site with Ar 1 Ar 2 or Ar 3 or Ar. It is more preferable that). A 1 A 2 and A 3 preferably have no substituent other than being replaced by -O-, -CO-, -S- or -SO 2 -. L 011 L 012 L 021 L 022 L 031 L 032 L 01 L 02 and L 03 The hydrocarbon group having 1 to 18 carbon atoms (the hydrocarbon group may have a substituent, and -CH 2 - in the hydrocarbon group may be replaced by -O-, -CO-, -S- or -SO 2 -) includes groups similar to the groups exemplified for A 1 A 2 and A 3 in the range of 1 to 18 carbon atoms. X 01 、 X 02 and X 03 are each independently preferably -O- or -S-, more preferably -O-. L 011 、 L 012 、 L 021 、 L 022 、 L 031 、 L 032 、 L 01 、 L 02 and L 03 are each independently a single bond or a hydrocarbon group having 1 to 18 carbon atoms (wherein -CH 2 - in the hydrocarbon group may be replaced by -O-, -CO-, -S- or -SO 2 -). Preferably, it is a single bond or a hydrocarbon group having 1 to 12 carbon atoms (wherein -CH 2 - in the hydrocarbon group may be replaced by -O-, -CO-, -S- or -SO 2 -). More preferably, it is a single bond, a chain hydrocarbon group having 1 to 9 carbon atoms, an alicyclic hydrocarbon group having 3 to 12 carbon atoms, or a group combining a chain hydrocarbon group having 1 to 4 carbon atoms and an alicyclic hydrocarbon group having 3 to 10 carbon atoms (wherein -CH 2 - in the chain hydrocarbon group and the alicyclic hydrocarbon group may be replaced by -O-, -CO-, -S- or -SO 2 -). Even more preferably, it is a single bond or an alkanediyl group having 1 to 6 carbon atoms (wherein -CH 2 - in the alkanediyl group may be replaced by -O- or -CO-). Even more preferably, it is a single bond or an alkanediyl group having 1 to 4 carbon atoms (wherein -CH 2 - in the alkanediyl group may be replaced by -O- or -CO-). Even more preferably, it is a single bond or an alkanediyl group having 1 to 3 carbon atoms (wherein -CH 2- may be replaced by -O- or -CO-. It is even more preferable that it is. Among them, a single bond, a methylene group, an ethane-1,1-diyl group, a propane-1,1-diyl group, a propane-2,2-diyl group, a carbonyl group, a carbonyloxy group, a carbonyloxymethylene group, an ethyleneoxy group, an ethyleneoxymethylene group, a methylenecarbonyloxy group, a methylenecarbonyloxymethylene group or an ethyleneoxycarbonyl group is preferable, and a single bond, a methylene group, an ethane-1,1-diyl group, a propane-1,1-diyl group, a propane-2,2-diyl group or a carbonyl group is more preferable. However, L 011 and L 012 The total number of carbon atoms of and is 0 to 18, and L 021 and L 022 The total number of carbon atoms of and is 0 to 18, and L 031 and L 032 The total number of carbon atoms of and is 0 to 18.

[0036] m1 is preferably 0, 1, 2, 3 or 4, more preferably 0, 1, 2 or 3, even more preferably 0, 1 or 2, and even more preferably 0 or 1. m2 is preferably 0, 1, 2, 3 or 4, more preferably 0, 1, 2 or 3, even more preferably 0, 1 or 2, and even more preferably 0 or 1. m3 is preferably 0, 1, 2, 3 or 4, more preferably 0, 1, 2 or 3, even more preferably 0, 1 or 2, and even more preferably 0 or 1. m4 is preferably 0, 1, 2 or 4, more preferably 0, 1 or 2. m5 is preferably 0, 1, 2 or 4, more preferably 0, 1 or 2. m6 is preferably 0, 1, 2 or 4, more preferably 0, 1 or 2. m7 is preferably 0, 1, 2, 3 or 4, more preferably 0, 1, 2 or 3, even more preferably 0, 1 or 2, and even more preferably 0 or 1. m8 is preferably 0, 1, 2, 3 or 4, more preferably 0, 1, 2 or 3, even more preferably 0, 1 or 2, and even more preferably 0 or 1. m9 is preferably 0, 1, 2, 3 or 4, more preferably 0, 1, 2 or 3, even more preferably 0, 1 or 2, and even more preferably 0 or 1.

[0037] R 1 , R 2 and R 3 Ar 1 , Ar 2 and Ar 3 The bond position to Ar 1 , Ar 2 and Ar 3 are each independently a group derived from a benzene ring, 1 , A 2 and A 3 The bonding position of A may be either o-position, m-position or p-position. 1 , A 2 and A 3 It is preferably bonded to the p-position or m-position, more preferably bonded to the p-position, relative to the bonding position of Ar 1 , Ar 2 and Ar 3 When A is a group derived from a naphthalene ring, for example, 1 , A 2 and A 3 When the bonding position of is the 1st position, it may be any of the 2nd to 8th positions. 1 , A 2 and A 3 When the bonding position of A is the 2-position, it may be any of the 1-position and the 3-8-positions. 1 , A 2 and A 3 When the bonding position of A is the 1st position, it is preferably bonded to the 3rd to 6th positions. 1 , A2 and A 3 When the bonding position of is the second position, it is preferably bonded at the fourth to seventh positions. R 4 、R 5 and R 6 of Ar 1 、Ar 2 and Ar 3 The bonding positions to Ar, Ar, and Ar are not particularly limited. However, when Ar, Ar, and Ar are groups derived from a benzene ring, each independently, A 1 、Ar 2 and Ar 3 can be bonded to any of the ortho, meta, or para positions with respect to the bonding position of A, A, and A. Among them, when m4, m5, and m6 are 1, R 1 、A 2 and A 3 is preferably bonded to the para or meta position with respect to the bonding position of A, A, and A, and more preferably bonded to the meta position. When m4, m5, and m6 are 2, R 4 、R 5 and R 6 are each independently preferably bonded to the para or meta position with respect to the bonding position of A, A, and A, and more preferably bonded to the meta position. When m4, m5, and m6 are 3, R 1 、A 2 and A 3 is preferably bonded to the ortho or meta position and one is preferably bonded to the para or meta position with respect to the bonding position of A, A, and A, and more preferably two are bonded to the meta position. When m4, m5, and m6 are 4, R 4 、R 5 and R 6 are each independently preferably bonded to the ortho or meta position and one is preferably bonded to the para or meta position with respect to the bonding position of A, A, and A, and more preferably one is bonded to the ortho position and two are bonded to the meta position. When m4, m5, and m6 are 4, R 1 、A 2 and A 3 is preferably bonded to the ortho or meta position and one is preferably bonded to the para or meta position with respect to the bonding position of A, A, and A, and more preferably one is bonded to the ortho position and two are bonded to the meta position. When m4, m5, and m6 are 4, R 4 、R 5 and R 6 are each independently preferably bonded to the ortho or meta position and one is preferably bonded to the para or meta position with respect to the bonding position of A, A, and A, and more preferably one is bonded to the ortho position and two are bonded to the meta position. When m4, m5, and m6 are 4, R 1 、A 2 and A 3 is preferably bonded to the ortho or meta position and one is preferably bonded to the para or meta position with respect to the bonding position of A, A, and A, and more preferably one is bonded to the ortho position and two are bonded to the meta position. When m4, m5, and m6 are 4, R 4 、R 5 and R 6 are each independently preferably bonded to the ortho or meta position and one is preferably bonded to the para or meta position with respect to the bonding position of A, A, and A, and more preferably one is bonded to the ortho position and two are bonded to the meta position. When m4, m5, and m6 are 4, R 1 、A 2 and A3 With respect to the bonding positions of the two, it is preferable that two are bonded at the ortho or meta position, and two are bonded at the para or meta position. More preferably, two are bonded at the ortho position and two are bonded at the meta position. Also, Ar 1 , Ar 2 and Ar 3 are groups derived from a naphthalene ring. For example, when the bonding positions of A 1 , A 2 and A 3 are at the 1-position, any of the 2nd to 8th positions may be used. When the bonding positions of A 1 , A 2 and A 3 are at the 2nd position, any of the 1st, 3rd to 8th positions may be used. Among them, when the bonding positions of A 1 , A 2 and A 3 are at the 1st position, it is preferable that at least one is bonded at the 3rd to 6th positions. When the bonding positions of A 1 , A 2 and A 3 are at the 2nd position, it is preferable that at least one is bonded at the 4th to 7th positions. R 7 , R 8 and R 9 's bonding positions to the benzene ring may each independently be at the ortho, meta, or para position with respect to the bonding position of X + . For example, when the bonding positions of R 7 , R 8 and R 9 to the benzene ring are such that m1, m2, m3 are 0, and R 7 , R 8 and R 9 are -O-R 10 , -CO-O-R 10 , -O-CO-O-R 10 or -O-L 10 -CO-O-R 10 , they may each independently be at the ortho, meta, or para position with respect to the bonding position of X + . Among them, it is preferable that they are bonded at the para or meta position with respect to the bonding position of X + , and more preferably, they are bonded at the para position. Among them, when m7, m8, and m9 are 1, R7 and R 8 and R 9 are each independently preferably bonded to the p-position or m-position with respect to the bonding position of X + , and more preferably bonded to the p-position. When m7, m8, and m9 are 2, R 7 , R 8 and R 9 are each independently preferably bonded such that one is bonded to the o-position or m-position and one is bonded to the p-position or m-position with respect to the bonding position of X + , and more preferably bonded such that one is bonded to the m-position and one is bonded to the p-position or m-position. When m7, m8, and m9 are 3, R 7 , R 8 and R 9 are each independently preferably bonded such that two are bonded to the o-position or m-position and one is bonded to the p-position or m-position with respect to the bonding position of X + , and more preferably bonded such that two are bonded to the m-position and one is bonded to the p-position. When m7, m8, and m9 are 4, R 7 , R 8 and R 9 are each independently preferably bonded such that two are bonded to the o-position or m-position and two are bonded to the p-position or m-position with respect to the bonding position of X + , and more preferably bonded such that two are bonded to the m-position, one is bonded to the o-position, and one is bonded to the p-position.

[0038] A 1 , A 2 and A 3 are each independently bonded to the benzene ring to which the X + is bonded at any position among the o-position, m-position, and p-position with respect to the bonding position of X + . Among these, it is preferably bonded to the p-position or m-position with respect to the bonding position of X + . More specifically, when m1, m2, and m3 are 1, A 1 , A 2 and A 3 are each independently +With respect to the bonding position of , it is preferably bonded to the p-position or m-position, more preferably bonded to the p-position. When m1, m2 and m3 are 2, A 1 , A 2 and A 3 are each independently, with respect to the bonding position of X + , one is bonded to the o-position or m-position, one is preferably bonded to the o-position or m-position, and more preferably two are bonded to the m-position. When m1, m2 and m3 are 3, A 1 , A 2 and A 3 are each independently, with respect to the bonding position of X + , two are bonded to the o-position or m-position, one is preferably bonded to the p-position or m-position, and more preferably two are bonded to the m-position and one is bonded to the p-position. When m1, m2 and m3 are 4, A 1 , A 2 and A 3 are each independently, with respect to the bonding position of X + , two are bonded to the o-position or m-position, two are preferably bonded to the p-position or m-position, and more preferably two are bonded to the o-position and two are bonded to the m-position.

[0039] Further, when X is a sulfur atom and m10 = 1, R 7 and R 8 or R 8 and R 9 may combine to form a ring containing S + . Among them, it is preferable that R 8 and R 9 combine to form a ring containing S + , and it is more preferably a cation represented by formula (I-C’). TIFF2025084121000031.tif51153[In formula (I-C’), R 1 , R 2 , R 3 , R 4 , R 5 , R 6 , R 7 , R 8 , R9 、m1, m2, m3, m4, m5, m6, m7, m8, m9, A 1 、A 2 、A 3 、Ar 1 、Ar 2 、Ar 3 have the same meaning as described above. X 7 represents a single bond, -CH 2 -, -O-, -S-, -CO-, -SO- or -SO 2 -.] X 7 is preferably a single bond, -CH 2 - or -O-.

[0040] Examples of the cation (I) represented by formula (I-C) include the cations represented by formula (I-C-1) or formula (I-C-2) (hereinafter, may be referred to as "cation (I-C-1)" and "cation (I-C-2)", respectively). Further, examples of the cation represented by formula (I-C') include the cation represented by formula (I-C'-1) (hereinafter, may be referred to as "cation (I-C'-1)"). TIFF2025084121000032.tif136166 [In formula (I-C-1), formula (I-C-2) and formula (I-C'-1), R 1 、R 2 、R 3 、R 4 、R 5 、R 6 、R 7 、R 8 、R 9 、m1, m2, m3, m4, m5, m6, m7, m8, m9, L 01 、L 02 、L 03 、X 01 、X 02 、X 03 and X 7 have the same meaning as described above.] X 01 、X 02 and X 03 are each bonded to the benzene ring at A 1 、A 2and A 3 is the same as the bonding position to the benzene ring of

[0041] Examples of the cation of salt (I) include cations represented by the following formulas (I-c-1) to (I-c-348). TIFF2025084121000033.tif229140

[0042] TIFF2025084121000034.tif252162

[0043] TIFF2025084121000035.tif249165

[0044] TIFF2025084121000036.tif236143

[0045] TIFF2025084121000037.tif245165

[0046] TIFF2025084121000038.tif249157

[0047] TIFF2025084121000039.tif242163

[0048] TIFF2025084121000040.tif244165

[0049] TIFF2025084121000041.tif221143

[0050] TIFF2025084121000042.tif211169

[0051] TIFF2025084121000043.tif204164

[0052] TIFF2025084121000044.tif214158

[0053] TIFF2025084121000045.tif190165

[0054] TIFF2025084121000046.tif199161

[0055] TIFF2025084121000047.tif234166

[0056] TIFF2025084121000048.tif237155

[0057] TIFF2025084121000049.tif242162

[0058] TIFF2025084121000050.tif225158

[0059] TIFF2025084121000051.tif247161

[0060] TIFF2025084121000052.tif252153

[0061] TIFF2025084121000053.tif223165

[0062] TIFF2025084121000054.tif240161

[0063] TIFF2025084121000055.tif246163

[0064] TIFF2025084121000056.tif211161

[0065] TIFF2025084121000057.tif250147

[0066] TIFF2025084121000058.tif227161

[0067] TIFF2025084121000059.tif252164

[0068] TIFF2025084121000060.tif218161

[0069] [Anion (I)] The anion (I) of the salt represented by formula (I) is an anion having two or more acid-labile groups. As the acid-labile group that anion (I) has, the above-described acid-labile group (1a) or acid-labile group (2a) is preferable. Examples of anion (I) include an anion represented by formula (I-A) (hereinafter, may be referred to as "anion (I-A)") or an anion represented by formula (I-B) (hereinafter, may be referred to as "anion (I-B)"). TIFF2025084121000061.tif1390[In formula (I-A), all symbols represent the same meaning as described above.] L b1 As the (nb1 + 1)-valent hydrocarbon group of, from a monovalent chain hydrocarbon group, a monovalent alicyclic hydrocarbon group, a monovalent aromatic hydrocarbon group, and a monovalent group obtained by combining two or more of these groups, nb1 hydrogen atoms are removed, and a group that binds to one or more L b2 is mentioned. The number of carbon atoms of the hydrocarbon group is preferably 1 to 48, more preferably 1 to 42, still more preferably 1 to 36, even more preferably 1 to 30, and even more preferably 1 to 24. Examples of the chain hydrocarbon group include a group obtained by removing nb1 hydrogen atoms from an alkyl group or an alkenyl group. The alkyl group may be linear or branched, and specifically, methyl group, ethyl group, n-propyl group, iso-propyl group, n-butyl group, sec-butyl group, iso-butyl group, tert-butyl group, pentyl group, hexyl group, heptyl group, octyl group, nonyl group, decyl group, undecyl group, dodecyl group, tridecyl group, tetradecyl group, pentadecyl group, heptadecyl group, etc. are mentioned. Examples of the alkenyl group include ethenyl group, propenyl group, isopropenyl group, butenyl group, isobutenyl group, tert-butenyl group, pentenyl group, hexenyl group, heptenyl group, octenyl group, isooctenyl group, nonenyl group. The number of carbon atoms in the chain hydrocarbon group is preferably from 1 to 36, more preferably from 1 to 24, still more preferably from 1 to 20, even more preferably from 1 to 18, even further preferably from 1 to 12, and even further preferably from 1 to 10. Examples of the alicyclic hydrocarbon group include a group obtained by removing nb1 hydrogen atoms from a monocyclic or polycyclic cycloalkyl group. Examples of the monocyclic cycloalkyl group include a cyclobutyl group, a cyclopentyl group, a cyclohexyl group, a cycloheptyl group, a cyclooctyl group and the like. Examples of the polycyclic cycloalkyl group include a cycloalkyl group having a crosslinked structure, a cycloalkyl group in which two or more rings are condensed, a cycloalkyl group in which two rings are spiro-bonded, and the like. Examples of the cycloalkyl group having a crosslinked structure include a norbornyl group, an adamantyl group and the like. Examples of the cycloalkyl group in which two or more rings are condensed include a bicyclo[4,4,0]decane group, a steroid group (steroid skeleton) and the like. Examples of the cycloalkyl group in which two rings are spiro-bonded include a spirocyclic cycloalkyl group in which one or more cycloalkyl groups selected from the group consisting of a cyclopentyl group, a cyclohexyl group, a norbornyl group and an adamantyl group and a cycloalkyl group having 5 to 8 carbon atoms are spiro-bonded. A double bond may be formed between two carbon atoms contained in the alicyclic hydrocarbon group. More specifically, examples of the alicyclic hydrocarbon group include those represented by the following formula. When the alicyclic hydrocarbon group is a monocyclic cycloalkyl group, the number of carbon atoms in the alicyclic hydrocarbon group is preferably 3 to 24, more preferably 3 to 20, still more preferably 3 to 18, even more preferably 3 to 12, still even more preferably 3 to 10, and even more preferably 3 to 8. When the alicyclic hydrocarbon group is a polycyclic cycloalkyl group, the number of carbon atoms in the alicyclic hydrocarbon group is preferably 6 to 24, more preferably 6 to 20, still more preferably 6 to 18, even more preferably 6 to 12, and still even more preferably 7 to 12. Examples of the aromatic hydrocarbon group include a group obtained by removing nb1 hydrogen atoms from an aryl group. Examples of the aryl group include a phenyl group, a naphthyl group, an anthryl group, a biphenyl group, a fluorenyl group, and the like. More specifically, examples of the aromatic hydrocarbon group include those represented by the following formula. TIFF2025084121000063.tif1286 The number of carbon atoms in the aromatic hydrocarbon group is preferably 4 to 24, more preferably 4 to 20, still more preferably 4 to 18, even more preferably 5 to 14, still even more preferably 5 to 10, and even more preferably 6 to 10.

[0070] L b1 In the hydrocarbon group of, -CH 2 - is replaced by -O-, -CO-, -S- or -SO 2 - when replaced, the number of carbon atoms before replacement is taken as the number of carbon atoms of the hydrocarbon group. L b1 Among the hydrocarbon groups of, -CH 2 - in the chain hydrocarbon group is replaced by -O-, -CO-, -S- or -SO 2Examples of the group that replaces the - include a hydroxy group, a carboxy group, a carbonyl group (, an oxy group, an alkoxy group, an alkoxycarbonyl group, an alkylcarbonyl group, an alkylcarbonyloxy group, an alkoxycarbonyloxy group, an alkanediyl-oxy group, an alkanediyl-oxycarbonyl group, an alkanediylcarbonyl group, an alkanediylcarbonyl-oxy group, etc. These replaced groups include those similar to the groups exemplified in this specification within the range allowed by the upper limit of the number of carbon atoms. L b1 Among the hydrocarbon groups of b1 , the -CH 2 - contained in the alicyclic hydrocarbon group is -O-, -CO-, -S- or -SO 2 Examples of the group that replaces the - include groups containing structures such as a cyclic ether, a cyclic ketone, a cyclic ester (lactone), a cyclic thioether, a cyclic acetal, a cyclic sulfonic acid ester (sultone), etc. Specifically, alicyclic hydrocarbon groups represented by the following formulas can be mentioned. The bonding position of the alicyclic hydrocarbon group mentioned in the following formulas can be any position. TIFF2025084121000064.tif48165L b1 Among the hydrocarbon groups of b1 , the -CH 2 - contained in the aromatic hydrocarbon group may be replaced by -O- or -S-, and -CH 2 Examples of the group in which - is replaced by -O- or -S- include groups derived from a furan ring or a thiophene ring, respectively. Specifically, aromatic hydrocarbon groups represented by the following formulas can be mentioned. TIFF2025084121000065.tif1325 Examples of the group that replaces the -CH- contained in a group combining an alicyclic hydrocarbon group and an aromatic hydrocarbon group with -O-, -S-, -CO- or -SO 2 - include those similar to the groups exemplified in this specification within the range allowed by the upper limit of the number of carbon atoms. 2 ​Examples of a group formed by combining two or more of an alicyclic hydrocarbon group, an alicyclic hydrocarbon group, and an aromatic hydrocarbon group include a group formed by combining the above alicyclic hydrocarbon group and the above alicyclic hydrocarbon group, a group formed by combining the above alicyclic hydrocarbon group and the above aromatic hydrocarbon group, a group formed by combining the above alicyclic hydrocarbon group and the above aromatic hydrocarbon group, and a group formed by combining the above alicyclic hydrocarbon group, the above alicyclic hydrocarbon group, and the above aromatic hydrocarbon group. The group formed by combining the alicyclic hydrocarbon group and the aromatic hydrocarbon group may be a condensed ring.

[0071] L b2 Examples of the divalent hydrocarbon group of include a divalent chain hydrocarbon group, a divalent alicyclic hydrocarbon group, a divalent aromatic hydrocarbon group, and a group formed by combining two or more of these groups, and a group formed by removing one hydrogen atom from a monovalent hydrocarbon group and bonding to Y b1 . L b2 Examples of the divalent chain hydrocarbon group, the divalent alicyclic hydrocarbon group, the divalent aromatic hydrocarbon group, and the divalent group formed by combining two or more of these groups of L b1 are groups formed by removing one hydrogen atom from the monovalent chain hydrocarbon group, the monovalent alicyclic hydrocarbon group, the monovalent aromatic hydrocarbon group, and the monovalent group formed by combining two or more of these groups exemplified by L

[0072] L b1 and L b2 The hydrogen atoms contained in the hydrocarbon groups of may be replaced by substituents. L b1 and L b2 Examples of the substituents that the hydrocarbon groups of may have include a halogen atom, a cyano group, a nitro group, and the like. Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, an iodine atom, and the like. L b1 and L b2 When and are groups formed by combining an alicyclic hydrocarbon group or an aromatic hydrocarbon group and a chain hydrocarbon group, the chain hydrocarbon group may be substantially regarded as a substituent that the alicyclic hydrocarbon group or the aromatic hydrocarbon group has. Also, L b1 and Lb2 The -CH of the chain hydrocarbon group contained in the hydrocarbon group of 2 - is replaced by -O-, -CO-, -S- or -SO 2 - to form L b1 and L b2 The hydrocarbon group of may substantially have substituents such as a hydroxy group, a carboxy group, an alkoxy group, an alkylcarbonyl group, an alkoxycarbonyl group, an alkylcarbonyloxy group, a thiol group, a sulfonyl group and the like. L b1 and L b2 The number of substituents that may be possessed is not particularly limited, and may have a plurality of substituents.

[0073] Y b1 The acid-labile group of R contained in 10 is a group represented by the above formula (1a) or formula (2a). Y b1 The alkane diyl group of L contained in 11 Examples of the alkane diyl group include linear alkane diyl groups such as a methylene group, an ethylene group, a propane-1,3-diyl group, a butane-1,4-diyl group, a pentane-1,5-diyl group, a hexane-1,6-diyl group; and branched alkane diyl groups such as an ethane-1,1-diyl group, a propane-1,1-diyl group, a propane-1,2-diyl group, a propane-2,2-diyl group, a pentane-2,4-diyl group, a 2-methylpropane-1,3-diyl group, a 2-methylpropane-1,2-diyl group, a pentane-1,4-diyl group, a 2-methylbutane-1,4-diyl group and the like. The number of carbon atoms of the alkane diyl group is preferably 1 to 4, more preferably 1 to 3. L 11 is preferably an alkane diyl group having 1 to 3 carbon atoms, more preferably a methylene group.

[0074] Examples of the anion represented by the formula (I-A) include an anion represented by the formula (I-A1) (hereinafter sometimes referred to as "anion (I-A1)") and an anion represented by the formula (I-A2) (hereinafter sometimes referred to as "anion (I-A2)"). TIFF2025084121000066.tif29126[In formula (I-A1), all the symbols have the same meanings as described above.]

[0075] Q b1 , Q b2 , Q b3 and Q b4 Examples of the alkyl group of Q b1 , Q b2 , Q b3 and Q b4 include a methyl group, an ethyl group, a propyl group, an isopropyl group, a butyl group, a sec-butyl group, a tert-butyl group, a pentyl group, a hexyl group and the like. Q b1 , Q b2 , Q b3 and Q b4 Examples of the perfluoroalkyl group of Q b1 , Q b2 , Q b3 and Q b4 include a trifluoromethyl group, a perfluoroethyl group, a perfluoropropyl group, a perfluoroisopropyl group, a perfluorobutyl group, a perfluoro sec-butyl group, a perfluoro tert-butyl group, a perfluoropentyl group, a perfluorohexyl group and the like. Q b1 and Q b2 are preferably, at least one of Q b1 and Q b2 , contains a fluorine atom or a perfluoroalkyl group, more preferably is a fluorine atom or a perfluoroalkyl group, even more preferably is a fluorine atom or a trifluoromethyl group, and even more preferably both are fluorine atoms. b1 and Q b2 are each independently preferably a hydrogen atom, a fluorine atom or a perfluoroalkyl group having 1 to 3 carbon atoms, Q b3 is preferably a hydrogen atom, a fluorine atom or a perfluoroalkyl group having 1 to 3 carbon atoms, and Q b4 is preferably a hydrogen atom or a fluorine atom. Q b3 and Q b4 are each independently preferably a hydrogen atom, a fluorine atom or a perfluoroalkyl group having 1 to 3 carbon atoms, b3 Q b4 is preferably a hydrogen atom, a fluorine atom or a perfluoroalkyl group having 1 to 3 carbon atoms, and Q b4 is preferably a hydrogen atom or a fluorine atom. z1 is preferably any integer from 0 to 3, and more preferably 0, 1 or 2. X 1 is preferably -O-CO- or -CO-O-. L b3As the hydrocarbon group in, within the range allowed by the upper limit of the number of carbon atoms, L of formula (I-A) b1 includes the same hydrocarbon groups as exemplified above. L b3 represents a single bond, a chain hydrocarbon group having 1 to 12 carbon atoms which may have a substituent (in the chain hydrocarbon group, -CH 2 - may be replaced by -O- or -CO-), an alicyclic hydrocarbon group having 3 to 18 carbon atoms which may have a substituent (in the alicyclic hydrocarbon group, -CH 2 - may be replaced by -O-, -S-, -CO- or -SO 2 -), an aromatic hydrocarbon group having 6 to 10 carbon atoms which may have a substituent (in the aromatic hydrocarbon group, -CH 2 - may be replaced by -O- or -S-), or a group formed by combining two or more of these groups, and is preferably a single bond, a chain hydrocarbon group having 1 to 6 carbon atoms or a group represented by the following formula (Lb3-1). In addition, when -CH 2 - in the chain hydrocarbon group is replaced by -O- or -CO-, the number thereof is preferably 1 to 4, and when one -CH 2 -CH 2 - in the chain hydrocarbon group is replaced by -O-CO- or -CO-O-, or when one -CH 2 -CH 2 -CH 2 - in the chain hydrocarbon group is replaced by -O-CO-O-, it is preferred. TIFF2025084121000067.tif1582 [In formula (Lb3-1), nb2 represents the same meaning as in formula (I-A1). L b31 represents a single bond or a chain hydrocarbon group having 1 to 12 carbon atoms, -CH 2 - in the chain hydrocarbon group may be replaced by -O- or -CO-, and the chain hydrocarbon group may have a substituent. W b3 represents an alicyclic hydrocarbon group having 3 to 18 carbon atoms or an aromatic hydrocarbon group having 6 to 10 carbon atoms, -CH 2- may be replaced by -O-, -S-, -CO- or -SO 2 - and the -CH 2 - may be replaced by -O- or -S-, and the alicyclic hydrocarbon group and the aromatic hydrocarbon group may have substituents. * and ** represent bonding sites, and * represents the bonding site with X 1 .] In formula (Lb3-1), the chain hydrocarbon group of L b31 is, as long as the upper limit of the number of carbon atoms permits, the same group as the chain hydrocarbon group exemplified by L b3 . In formula (Lb3-1), the alicyclic hydrocarbon group and the aromatic hydrocarbon group of W b3 are, as long as the upper limit of the number of carbon atoms permits, the same group as the alicyclic hydrocarbon group and the aromatic hydrocarbon group exemplified by L b3 . In formula (Lb3-1), the substituents that the chain hydrocarbon group of L b31 may have and the substituents that the alicyclic hydrocarbon group and the aromatic hydrocarbon group of W b3 may have are the same groups as the substituents exemplified as the substituents that the hydrocarbon group of L b3 may have. L b31 is preferably a single bond or an alkanediyl group having 1 to 6 carbon atoms (the -CH 2 - contained in the alkanediyl group may be replaced by -O- or -CO-). Among them, as the alicyclic hydrocarbon group and the aromatic hydrocarbon group of W b3 , the alicyclic hydrocarbon group and the aromatic hydrocarbon group represented below are preferable. In the alicyclic hydrocarbon group and the aromatic hydrocarbon group represented below, * and ** represent bonding sites, * represents the bonding site with X 1 or L b31 , ** represents a hydrogen atom, a substituent or the bonding site with L b2 , and at least one ** represents the bonding site with L b2 . Also, in the alicyclic hydrocarbon group represented below, the -CH 2 - contained in the alicyclic hydrocarbon group may be -O-, -S-, -CO- or -SO2 - may be replaced. -CH contained in the alicyclic hydrocarbon group 2 - is replaced by -O-, -S-, -CO- or -SO 2 - When replaced, it preferably forms an ether ring, an ester ring (lactone), a carbonate ester ring, a sulfonic acid ester ring (sultone) or an acetal ring. TIFF2025084121000068.tif37168

[0076] In formula (I-A1), L b2 and Y b1 are the same as those in formula (I-A). Among them, L b2 is a single bond or a chain hydrocarbon group having 1 to 12 carbon atoms (the -CH contained in the chain hydrocarbon group 2 - may be replaced by -O- or -CO-).) is preferable, and a single bond, -O-, -O-CO-, -CO-O-, -O-CO-O- or *-L b21 -X 2b -L b22 -**(L b21 and L b22 either one of them represents a chain hydrocarbon group having 1 to 6 carbon atoms, and the other represents a single bond or a chain hydrocarbon group having 1 to 6 carbon atoms. X 2b represents -O-, -CO-O-, -O-CO- or -O-CO-O-. * and ** represent bonding sites, and ** represents the bonding site with Y b1 However, the total number of carbon atoms of L b21 , X 2b and L b22 is 12 or less.)) is more preferable, and a single bond or -CO- is even more preferable.

[0077] Examples of the anion (I-A1) include the following anions. Among them, the anions represented by formula (I-a-1) to formula (I-a-21), formula (I-a-27), and formula (I-a-28) are preferable. TIFF2025084121000069.tif195161

[0078] TIFF2025084121000070.tif253142

[0079] The anion represented by formula (I-A2) is represented by the following formula. TIFF2025084121000071.tif2495[In formula (I-A2), all symbols have the same meanings as described above.]

[0080] In formula (I-A2), L b2 hydrocarbon group and Y b1 The R contained in b10 acid-labile group and L b10 Examples of the alkanediyl group of are, within the range permitted by the upper limit of the number of carbon atoms, the L in anion (I) and formula (I-A) b2 hydrocarbon group and Y b1 The R contained in 10 acid-labile group and L 11 are the same as the examples of the alkanediyl group of. Substituents that the hydrocarbon group of L b2 may have are also the same as the examples of the substituents that the hydrocarbon group of L in formula (I-A) b2 may have. In formula (I-A2), L b2 is preferably a chain hydrocarbon group having 1 to 12 carbon atoms or a group combining a chain hydrocarbon group having 1 to 12 carbon atoms and a phenylene group which may have a substituent (the -CH 2 - in the chain hydrocarbon group may be replaced by -O- or -CO-).), more preferably, *-CO-O-L b41 - or *-CO-O-L b41 -Ar b1 - (L b41 represents a single bond or a chain hydrocarbon group having 1 to 6 carbon atoms, and the -CH 2 - in the chain hydrocarbon group may be replaced by -O- or -CO-. Ar b1 represents a phenylene group which may have a substituent. * represents the bonding site with the benzene ring to which SO 3 - is bonded. L b41 is preferably a single bond or a chain hydrocarbon group having 1 to 3 carbon atoms.). Arb1 The substituent of b1 is preferably a fluorine atom, a fluorinated alkyl group having 1 to 3 carbon atoms, or an iodine atom.

[0081] In formula (I-A2), nb4 is preferably any integer from 2 to 4, more preferably any integer from 2 to 3, and even more preferably 2. When nb4 is 2, -L b2 -Y b1 The bonding position of is preferably the following structure which is the m-position substitution of the benzene ring with respect to the bonding position of SO 3 - TIFF2025084121000072.tif2344 [wherein, L b2 , Y b1 , R b1 , and nb3 have the same meanings as in formula (I-A2).] In formula (I-A2), when nb4 is 2 or more, a plurality of Ls b2 and Ys b1 are preferably the same groups as each other.

[0082] R b1 Examples of the alkyl group having 1 to 6 carbon atoms for R include alkyl groups such as methyl group, ethyl group, propyl group, isopropyl group, butyl group, isobutyl group, tert-butyl group, pentyl group, and hexyl group. The number of carbon atoms of the alkyl group is preferably 1 to 4, and more preferably 1 to 3. R b1 Examples of the halogen atom for R include fluorine atom, chlorine atom, bromine atom, and iodine atom. Examples of the group in which -CH 2 - contained in the alkyl group is replaced by -O- or -CO- include hydroxy group, carboxy group, alkoxy group, alkoxycarbonyl group, alkylcarbonyl group, alkylcarbonyloxy group, oxy group, carbonyl group, etc. Specific examples thereof are the same as those described above. R b1 are each independently a halogen atom or an alkyl group having 1 to 4 carbon atoms (wherein -CH 2 ​- may be replaced by -O- or -CO-. It is preferably a fluorine atom, an iodine atom or an alkyl group having 1 to 3 carbon atoms (the -CH contained in the alkyl group) 2 - may be replaced by -O- or -CO-. It is more preferably a fluorine atom, an iodine atom, a hydroxy group, a methoxy group or a methyl group, and still more preferably a fluorine atom, an iodine atom, a hydroxy group, a methoxy group or a methyl group. nb3 is preferably any integer from 0 to 2, and more preferably any integer from 0 to 1. In one embodiment, nb3 is preferably 0.

[0083] Examples of the anion (I-A2) include the following anions. Among them, anions represented by Formula (I-a-29) to Formula (I-a-37), Formula (I-a-39) to Formula (I-a-47), Formula (I-a-52) to Formula (I-a-55), Formula (I-a-66), Formula (I-a-67), Formula (I-a-69), and Formula (I-a-70) are preferred. TIFF2025084121000073.tif190167

[0084] TIFF2025084121000074.tif250166

[0085] TIFF2025084121000075.tif221159

[0086] The anion represented by Formula (I-B) is represented by the following formula. TIFF2025084121000076.tif1187 [In Formula (I-B), all symbols have the same meanings as described above.] In Formula (I-B), L b2 and Y b1 Examples of each group of are the same groups as L b2 and Y b1 in Formula (I-A). In Formula (I-B), L b2 is a single bond, *-L b23 -, *-L b23 -X 2b - or *-L b23 -X2b -W 2 -X 3b -(L b23 represents a linear hydrocarbon group having 1 to 6 carbon atoms which may have a fluorine atom. X 2b and X 3b each independently represent -CO-O-, -O-CO-, -O-CO-O- or -O-. W 2 represents an alicyclic hydrocarbon group having 3 to 12 carbon atoms, and -CH 2 - contained in the alicyclic hydrocarbon group may be replaced by -O- or -CO-. * represents the bonding site with SO 2 . It is preferably (). In formula (I-B), when the groups in the two parentheses combine together to form a ring containing A 1 , for example, an anion represented by formula (I-B’) can be mentioned. TIFF2025084121000077.tif21116 [In formula (I-B’), A 1 , Y b1 , L b2 and nb5 have the same meanings as in formula (I-B). W b4 represents a disulfonylimide ring or a disulfonylmethide ring having 2 to 12 carbon atoms which may have a fluorine atom.] W b4 The disulfonylimide ring or disulfonylmethide ring of W preferably has 3 to 12 carbon atoms, more preferably 3 to 6 carbon atoms, and the hydrogen atom of the methylene group contained in the ring is preferably replaced by a fluorine atom.

[0087] Examples of the anion represented by formula (I-B) include the following. Among them, anions represented by formula (I-a-62) and formula (I-a-63) are preferred. TIFF2025084121000078.tif94166

[0088] Specific examples of salt (I) include salts obtained by arbitrarily combining the above-mentioned cation and anion. Specific examples of salt (I) are shown in the following table. In the following table, each symbol represents the symbol attached to the structure representing the above-mentioned anion or cation, and "~" indicates that each of salt (I) and anion (I) or cation (I) corresponds. For example, salt (I-1) is a salt composed of the anion represented by formula (I-a-1) and the cation represented by formula (I-c-1), salt (I-2) is a salt composed of the anion represented by formula (I-a-2) and the cation represented by formula (I-c-1), and salt (I-66) is a salt composed of the anion represented by formula (I-a-1) and the cation represented by formula (I-c-2). TIFF2025084121000079.tif38131

Table 1

[0089] Among them, salt (I) is preferably a salt obtained by combining an anion represented by any of formula (I-a-1) to formula (I-a-21), formula (I-a-27) to formula (I-a-37), formula (I-a-39) to formula (I-a-47), formula (I-a-52) to formula (I-a-55), formula (I-a-62), formula (I-a-63), formula (I-a-66), formula (I-a-67), formula (I-a-69), and formula (I-a-70) with a cation represented by any of formula (I-c-1) to formula (I-c-348). These salts can be produced by known methods. Commercially available products may also be used.

[0090] The resist composition of the present invention may contain one kind of salt (I) or may contain two or more kinds of salt (I). In the resist composition of the present invention, the total content of the salt (I) is preferably 20% by mass or more, more preferably 30% by mass or more, and even more preferably 35% by mass or more, based on the solid content of the resist composition. For example, when a resin is contained. Also, it is preferably 95% by mass or less, more preferably 90% by mass or less, and even more preferably 80% by mass or less. Specifically, it is preferably 20% by mass or more and 95% by mass or less, more preferably 35% by mass or more and 90% by mass or less, and even more preferably 35% by mass or more and 80% by mass or less. In this case, the total content of the salt (I) and the resin is preferably 60% by mass or more, more preferably 70% by mass or more, even more preferably 80% by mass or more, and even more preferably 85% by mass or more. Also, it is preferably 99% by mass or less, more preferably 98% by mass or less, and even more preferably 97% by mass or less. Specifically, it is preferably 60% by mass or more and 99% by mass or less, more preferably 70% by mass or more and 98% by mass or less, and even more preferably 80% by mass or more and 97% by mass or less. Further, as another embodiment, for example, when no resin is contained, it is preferably 50% by mass or more, more preferably 60% by mass or more, even more preferably 70% by mass or more, and even more preferably 80% by mass or more. Also, it is preferably 99% by mass or less, more preferably 97% by mass or less, and even more preferably 95% by mass or less. Specifically, it is preferably 50% by mass or more and 99% by mass or less, more preferably 60% by mass or more and 97% by mass or less, and even more preferably 70% by mass or more and 95% by mass or less.

[0091] <Compound (B)> Either a non-ionic compound or an ionic compound may be used as compound (B). Examples of the non-ionic compound include sulfonate esters (e.g., 2-nitrobenzyl ester, aromatic sulfonate, oxime sulfonate, N-sulfonyloxyimide, sulfonyloxy ketone, diazonaphthoquinone 4-sulfonate), sulfones (e.g., disulfone, ketosulfone, sulfonyldiazomethane), etc. Representative examples of the ionic compound include onium salts containing an onium cation (e.g., diazonium salt, phosphonium salt, sulfonium salt, iodonium salt). Examples of the anion of the onium salt include sulfonic acid anion, sulfonylimide anion, sulfonylmethide anion, and carboxylic acid anion, etc. However, compound (B) does not contain salt (I). Compound (B) may be part or all of a resin containing a structural unit having an acid generating function, such as structural unit (a7) described below, for example.

[0092] As compound (B), compounds that generate an acid by radiation, such as those described in JP-A-63-26653, JP-A-55-164824, JP-A-62-69263, JP-A-63-146038, JP-A-63-163452, JP-A-62-153853, JP-A-63-146029, U.S. Patent No. 3,779,778, U.S. Patent No. 3,849,137, German Patent No. 3914407, European Patent No. 126,712, etc., can be used. Also, a compound produced by a known method may be used. Compound (B) may be used alone or in combination of two or more. Compound (B) may be an acid generator having an acid-labile group. For example, the compound or resin serving as the acid generator may contain a partial structure serving as an acid-labile group, and the acid-labile group preferably contains group (1) or group (2) described below. When the resist composition of the present invention contains a compound having an acid-labile group, a resin containing a structural unit having an acid-labile group may not be included. As a preferred form of compound (B), a salt represented by formula (B1) (hereinafter sometimes referred to as "salt (B1)", "compound (B1)" or "acid generator (B1)") or a salt represented by formula (B2) (hereinafter sometimes referred to as "salt (B2)", "compound (B2)" or "acid generator (B2)") is exemplified. However, salt (I) is excluded. TIFF2025084121000089.tif1492[In formula (B1), L b1 represents a single bond or an (nb1 + 1)-valent hydrocarbon group which may have a substituent, and -CH 2 - in the hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO 2 -. L b2 represents a single bond or a divalent hydrocarbon group having 1 to 24 carbon atoms which may have a substituent, and -CH 2 - in the hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO 2 -. Y represents a methyl group which may have a substituent or a cyclic hydrocarbon group having 3 to 24 carbon atoms which may have a substituent, and -CH 2 - in the cyclic hydrocarbon group may be replaced by -O-, -S-, -SO 2 - or -CO-. nb11 represents any integer from 1 to 6. When nb11 is 2 or more, the groups in a plurality of parentheses may be the same as or different from each other. Z1 + represents an organic cation.] As the (nb11 + 1)-valent hydrocarbon group of L b1 , examples include a monovalent chain hydrocarbon group, a monovalent alicyclic hydrocarbon group, a monovalent aromatic hydrocarbon group, and a monovalent group formed by combining two or more of these groups, from which nb11 hydrogen atoms are removed and which is bonded to one or more L b2 . The number of carbon atoms of the hydrocarbon group is preferably 1 to 48, more preferably 1 to 42, still more preferably 1 to 36, even more preferably 1 to 30, and even more preferably 1 to 24. Examples of the chain hydrocarbon group include a group obtained by removing nb11 hydrogen atoms from an alkyl group or an alkenyl group. The alkyl group may be linear or branched, and specific examples include methyl group, ethyl group, n-propyl group, iso-propyl group, n-butyl group, sec-butyl group, iso-butyl group, tert-butyl group, pentyl group, hexyl group, heptyl group, octyl group, nonyl group, decyl group, undecyl group, dodecyl group, tridecyl group, tetradecyl group, pentadecyl group, heptadecyl group, and the like. Examples of the alkenyl group include ethenyl group, propenyl group, isopropenyl group, butenyl group, isobutenyl group, tert-butenyl group, pentenyl group, hexenyl group, heptenyl group, octenyl group, isooctenyl group, and nonenyl group. The number of carbon atoms in the chain hydrocarbon group is preferably from 1 to 36, more preferably from 1 to 24, still more preferably from 1 to 20, even more preferably from 1 to 18, even still more preferably from 1 to 12, and even more preferably from 1 to 10. Examples of the alicyclic hydrocarbon group include a group obtained by removing nb11 hydrogen atoms from a monocyclic or polycyclic cycloalkyl group. Examples of the monocyclic cycloalkyl group include cyclobutyl group, cyclopentyl group, cyclohexyl group, cycloheptyl group, cyclooctyl group, and the like. Examples of the polycyclic cycloalkyl group include a cycloalkyl group having a crosslinked structure, a cycloalkyl group in which two or more rings are condensed, or a cycloalkyl group in which two rings are spiro-bonded. Examples of the cycloalkyl group having a crosslinked structure include a norbornyl group and an adamantyl group. Examples of the cycloalkyl group in which two or more rings are condensed include a bicyclo[4,4,0]decane group and a steroid group (steroid skeleton). Examples of the cycloalkyl group in which two rings are spiro-bonded include a spirocycloalkyl group in which one or more cycloalkyl groups selected from the group consisting of a cyclopentyl group, a cyclohexyl group, a norbornyl group, and an adamantyl group and a cycloalkyl group having 5 to 8 carbon atoms are spiro-bonded. Further, a double bond may be formed between two carbon atoms included in the alicyclic hydrocarbon group. More specifically, examples of the alicyclic hydrocarbon group include those represented by the following formula. TIFF2025084121000090.tif26168 When the alicyclic hydrocarbon group is a monocyclic cycloalkyl group, the number of carbon atoms in the alicyclic hydrocarbon group is preferably 3 to 24, more preferably 3 to 20, still more preferably 3 to 18, even more preferably 3 to 12, even more preferably 3 to 10, and even more preferably 3 to 8. When the alicyclic hydrocarbon group is a polycyclic cycloalkyl group, the number of carbon atoms in the alicyclic hydrocarbon group is preferably 6 to 24, more preferably 6 to 20, still more preferably 6 to 18, even more preferably 6 to 12, and even more preferably 7 to 12. Examples of the aromatic hydrocarbon group include a group obtained by removing 11 hydrogen atoms of an aryl group. Examples of the aryl group include a phenyl group, a naphthyl group, an anthryl group, a biphenyl group, and a fluorenyl group. More specifically, examples of the aromatic hydrocarbon group include those represented by the following formula. As for the number of carbon atoms of the aromatic hydrocarbon group in TIFF2025084121000091.tif1085, it is preferably 4 to 24, more preferably 4 to 20, even more preferably 4 to 18, still more preferably 5 to 14, even still more preferably 5 to 10, and even more preferably 6 to 10. L b1 When -CH contained in the hydrocarbon group of 2 - is replaced by -O-, -CO-, -S- or -SO 2 -, the number of carbon atoms before replacement shall be taken as the number of carbon atoms of the hydrocarbon group. L b1 Among the hydrocarbon groups of 2 L, as for -CH contained in the chain hydrocarbon group 2 - being replaced by -O-, -CO-, -S- or -SO 2 -, examples of the group thus replaced include a hydroxy group (-CH contained in a methyl group 2 - being replaced by -O-), a carboxy group (-CH contained in an ethyl group 2 -CH 2 - being replaced by -O-CO-), a carbonyl group (-CH contained in a methylene group 2 - being replaced by -CO-), an oxy group (-CH contained in a methylene group 2 - being replaced by -O-), an alkoxy group (any -CH at any position contained in an alkyl group 2 - being replaced by -O-), an alkoxycarbonyl group (any -CH at any position contained in an alkyl group 2 -CH 2 - being replaced by -O-CO-), an alkylcarbonyl group (any -CH at any position contained in an alkyl group 2 - being replaced by -CO-), an alkylcarbonyloxy group (any -CH at any position contained in an alkyl group 2 -CH 2 - being replaced by -CO-O-), an alkoxycarbonyloxy group (any -CH at any position contained in an alkyl group 2 -CH 2- is a group replaced by -O-CO-O-, an alkanediyl-oxy group (where -CH at any position in the alkanediyl group) 2 - is a group replaced by -O-, an alkanediyl-oxycarbonyl group (where -CH at any position in the alkanediyl group) 2 -CH 2 - is a group replaced by -O-CO-, an alkanediyl-carbonyl group (where -CH at any position in the alkanediyl group) 2 - is a group replaced by -CO-, an alkanediyl-carbonyl-oxy group (where -CH at any position in the alkanediyl group) 2 -CH 2 - is a group replaced by -CO-O-, etc. These replaced groups include, within the range permitted by the upper limit of the number of carbon atoms, those similar to the groups exemplified in this specification. L b1 Among the hydrocarbon groups of, the -CH contained in the alicyclic hydrocarbon group 2 - as a group replaced by -O-, -CO-, -S- or -SO 2 - includes groups containing structures such as cyclic ethers, cyclic ketones, cyclic esters (lactones), cyclic thioethers, cyclic acetals, cyclic sulfonic acid esters (sultones), etc. Specifically, alicyclic hydrocarbon groups represented by the following formulas can be mentioned. The bonding positions of the alicyclic hydrocarbon groups mentioned in the following formulas can be at any position. TIFF2025084121000092.tif48165L b1 Among the hydrocarbon groups of, the -CH contained in the aromatic hydrocarbon group 2 - may be replaced by -O- or -S-, and for the group where -CH 2 - is replaced by -O- or -S-, groups derived from a furan ring or a thiophene ring, etc. can be mentioned respectively. Specifically, aromatic hydrocarbon groups represented by the following formulas can be mentioned. As the group combining two or more of the linear hydrocarbon group, alicyclic hydrocarbon group, and aromatic hydrocarbon group, examples include the group combining the above linear hydrocarbon group and the above alicyclic hydrocarbon group, the group combining the above linear hydrocarbon group and the above aromatic hydrocarbon group, the group combining the above alicyclic hydrocarbon group and the above aromatic hydrocarbon group, and the group combining the above linear hydrocarbon group, the above alicyclic hydrocarbon group, and the above aromatic hydrocarbon group. As the group combining the alicyclic hydrocarbon group and the aromatic hydrocarbon group, it may be a condensed ring. -CH contained in the group combining an alicyclic hydrocarbon group and an aromatic hydrocarbon group 2 - is replaced by -O-, -S-, -CO- or -SO 2 - Examples of the resulting group include those similar to the groups exemplified in this specification within the range allowed by the upper limit of the number of carbon atoms. L b2 Examples of the divalent hydrocarbon group of include a divalent linear hydrocarbon group, a divalent alicyclic hydrocarbon group, a divalent aromatic hydrocarbon group, and a group combining two or more of these groups, and a group obtained by removing one hydrogen atom from a monovalent hydrocarbon group and bonding to Y b1 and. L b2 Examples of the divalent linear hydrocarbon group, divalent alicyclic hydrocarbon group, divalent aromatic hydrocarbon group, and divalent group combining two or more of these groups of L are each a group obtained by removing one hydrogen atom from the monovalent linear hydrocarbon group, monovalent alicyclic hydrocarbon group, monovalent aromatic hydrocarbon group, and monovalent group combining two or more of these exemplified by L within the range allowed by the upper limit of the number of carbon atoms. b1 L b1 and L b2 Examples of the substituent that the hydrocarbon group of and L may have include a halogen atom, a cyano group, a nitro group, etc. Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, an iodine atom, etc. L b1 and L b2When it is a group combining an alicyclic hydrocarbon group or an aromatic hydrocarbon group and a chain hydrocarbon group, substantially, the chain hydrocarbon group may be regarded as a substituent possessed by the alicyclic hydrocarbon group or the aromatic hydrocarbon group. Also, L b1 and L b2 In the hydrocarbon group of, the -CH 2 - of the chain hydrocarbon group contained in the hydrocarbon group of, is replaced by -O-, -CO-, -S- or -SO 2 -, then the hydrocarbon groups of L b1 and L b2 can substantially have substituents such as a hydroxy group, a carboxy group, an alkoxy group, an alkylcarbonyl group, an alkoxycarbonyl group, an alkylcarbonyloxy group, a thiol group, an alkylthio group, an alkylsulfonyl group and the like. Examples of the cyclic hydrocarbon group of Y include an alicyclic hydrocarbon group, an aromatic hydrocarbon group, and a group combining an alicyclic hydrocarbon group and an aromatic hydrocarbon group. The alicyclic hydrocarbon group and the aromatic hydrocarbon group of Y are the same as the alicyclic hydrocarbon group and the aromatic hydrocarbon group exemplified by L b1 respectively, and when having no substituent, they may be monovalent alicyclic hydrocarbon groups and aromatic hydrocarbon groups. Examples of the substituent that the methyl group of Y may have include a halogen atom, a cyano group, a hydroxy group, a nitro group and the like. Examples of the substituent that the cyclic hydrocarbon group of Y may have include a halogen atom, a cyano group, a nitro group, or a hydrocarbon group having 1 to 18 carbon atoms that may have a halogen atom, a cyano group or a nitro group. The -CH 2 - contained in the hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO 2 -. The number of carbon atoms of the hydrocarbon group that the cyclic hydrocarbon group of Y may have is not included in the number of carbon atoms of the cyclic hydrocarbon group of Y. The hydrocarbon group having 1 to 18 carbon atoms which the cyclic hydrocarbon group of Y may have as a substituent includes a chain hydrocarbon group, an alicyclic hydrocarbon group, an aromatic hydrocarbon group, and a group combining these groups. Examples of the chain hydrocarbon group, alicyclic hydrocarbon group, aromatic hydrocarbon group, and a group combining two or more of these groups include, within the range allowed by the upper limit of the number of carbon atoms, L b1 the same groups as the chain hydrocarbon group, alicyclic hydrocarbon group, aromatic hydrocarbon group, and a group combining two or more of these groups exemplified by b1 . In the hydrocarbon group having 1 to 18 carbon atoms which the cyclic hydrocarbon group of Y may have as a substituent, -CH 2 - being replaced by -O-, -S-, -CO- or -SO 2 - Examples of the resulting group include, within the range allowed by the upper limit of the number of carbon atoms, L b1 the same groups as the groups exemplified by -CH 2 - being replaced by -O-, -S-, -CO- or -SO 2 - in the hydrocarbon group of b1 . Further, as the hydrocarbon group having 1 to 18 carbon atoms which the cyclic hydrocarbon group of Y may have as a substituent, it may constitute a protecting group or a leaving group (an acid-labile group or a base-labile group such as group (1) or group (2)) generally used in the art.

[0093] The anion of compound (B1) is preferably an anion represented by formula (B1-A1) (hereinafter sometimes referred to as "anion (B1-A1)") or an anion represented by formula (B1-A2) (hereinafter sometimes referred to as "anion (B1-A2)"). However, the anion of salt (I) is excluded. TIFF2025084121000094.tif29122[In formula (B1-A1), L b2 and Y represent the same meanings as in formula (B1). Q b1 、Q b2 、Q b3 and Q b4 each independently represent a hydrogen atom, a fluorine atom, a perfluoroalkyl group having 1 to 6 carbon atoms, or an alkyl group having 1 to 6 carbon atoms. z1 represents any integer from 0 to 6. When z1 is 2 or more, the groups within the plurality of parentheses may be the same as or different from each other. X 1 represents -O-CO-, -CO-O-, -O-CO-O- or -O-. L b3 represents a single bond or an (nb2 + 1)-valent hydrocarbon group having 1 to 24 carbon atoms which may have a substituent, and -CH 2 - in the hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO 2 -. nb22 represents any integer from 1 to 3. When nb22 is 2 or more, the groups within the plurality of parentheses may be the same as or different from each other.

[0094] Q in formula (B1 - A1) b1 Q b2 Q b3 Q b4 Q, z1, X 1 L b3 L b2 are, respectively, the same as Q in formula (I - A1) or formula (B1) etc. described above b1 Q b2 Q b3 Q b4 Q, z1, X 1 L b3 L b2 and the like can be mentioned. In formula (B1 - A1), Y is preferably a cyclic hydrocarbon group having 3 to 20 carbon atoms which may have a substituent (-CH 2 - in the cyclic hydrocarbon group may be replaced by -O-, -CO-, -S- or -SO 2 -), more preferably an alicyclic hydrocarbon group having 3 to 18 carbon atoms which may have a substituent (-CH 2 - in the alicyclic hydrocarbon group may be replaced by -O-, -CO-, -S- or -SO 2 -), or an aromatic hydrocarbon group having 6 to 18 carbon atoms which may have a substituent, and most preferably an alicyclic hydrocarbon group having 3 to 16 carbon atoms which may have a substituent (-CH 2- may be replaced by -O-, -CO-, -S- or -SO 2 - may also be an aromatic hydrocarbon group having 6 to 10 carbon atoms which may have a substituent. More preferably, it is a group represented by the following formula (Y1) to formula (Y36). In formula (Y1) to formula (Y36), R Yb represents a hydrogen atom or an alkyl group having 1 to 4 carbon atoms among the substituents which the cyclic hydrocarbon group of Y may have, and R Yc represents a hydrogen atom or a substituent which the cyclic hydrocarbon group of Y may have, and * represents the bonding site with L b2 . The alicyclic hydrocarbon group and aromatic hydrocarbon group represented by the following formula may have other substituents although not particularly shown in the following formula. TIFF2025084121000095.tif83159

[0095] As the anion represented by formula (B1-A1), anions represented by formula (B1-A-1) to formula (B1-A-85) [hereinafter, may be referred to as "anion (B1-A-1)" etc. according to the formula number] are preferable, and an anion represented by any of formula (B1-A-1) to formula (B1-A-4), formula (B1-A-9), formula (B1-A-10), formula (B1-A-24) to formula (B1-A-33), formula (B1-A-36) to formula (B1-A-40), formula (B1-A-47) to formula (B1-A-85) is more preferable. TIFF2025084121000096.tif205160

[0096] TIFF2025084121000097.tif249150

[0097] TIFF2025084121000098.tif250163 Here, R i2 ~R i7 are each independently, for example, an alkyl group having 1 to 4 carbon atoms, preferably a methyl group or an ethyl group. R i8is, for example, a chain hydrocarbon group having 1 to 12 carbon atoms, preferably an alkyl group having 1 to 4 carbon atoms, an alicyclic hydrocarbon group having 5 to 12 carbon atoms, or a group formed by combining these, more preferably a methyl group, an ethyl group, a cyclohexyl group or an adamantyl group. L A41 is a single bond or an alkanediyl group having 1 to 4 carbon atoms. Q b1 and Q b2 represent the same meaning as described above. Specific examples of the anion represented by the formula (B1-A1) include the anions described in JP-A-2010-204646.

[0098] Preferred examples of the anion represented by the formula (B1-A1) include the anions represented by the formulas (B1a-1) to (B1a-70). Among them, an anion represented by any of the formulas (B1a-1) to (B1a-4), (B1a-7) to (B1a-11), (B1a-14) to (B1a-30), and (B1a-35) to (B1a-70) is preferred. TIFF2025084121000099.tif185163

[0099] TIFF2025084121000100.tif252166

[0100] TIFF2025084121000101.tif70166

[0101] The anion represented by the formula (B1-A2) is represented by the following formula. TIFF2025084121000102.tif24100[In the formula (B1-A2), L b2 and Y represent the same meaning as in the formula (B1). R b1 represents a halogen atom or an alkyl group having 1 to 6 carbon atoms, and -CH 2 - in the alkyl group may be replaced by -O- or -CO-. nb44 represents an integer from 1 to 5. When nb44 is 2 or more, the groups in the plurality of parentheses may be the same as or different from each other. nb33 represents an integer from 0 to 4. When nb33 is 2 or more, the plurality of Rs b1 may be the same as or different from each other. However, 1 ≦ nb44 + nb33 ≦ 5 is satisfied. In formula (B1 - A2), L b2 , R b1 are, respectively, the same as L b2 , R b1 in formula (I - A2) or formula (B1) etc. described above.

[0102] In formula (B1 - A2), Y is preferably a cyclic hydrocarbon group having 3 to 20 carbon atoms which may have a substituent (the -CH 2 - in the cyclic hydrocarbon group may be replaced by -O-, -CO-, -S- or -SO 2 -). More preferably, it is an alicyclic hydrocarbon group having 3 to 18 carbon atoms which may have a substituent (the -CH 2 - in the alicyclic hydrocarbon group may be replaced by -O-, -CO-, -S- or -SO 2 -), or an aromatic hydrocarbon group having 6 to 18 carbon atoms which may have a substituent. Even more preferably, it is an alicyclic hydrocarbon group or an aromatic hydrocarbon group exemplified by Y or L b1 in formula (B1 - A1). Specifically, it is preferably a group represented by the above-mentioned formula (Y1) to formula (Y36), and more preferably a group represented by the above-mentioned formula (Y1) to formula (Y19).

[0103] In formula (B1 - A2), nb44 is preferably an integer from 1 to 4, more preferably an integer from 1 to 3, even more preferably 1 or 2, and even more preferably 2. When nb44 is 1 or 2, the bonding position of -L b2 -Y is preferably the following structure which is the m-position substitution of the benzene ring with respect to the bonding position of SO 3 - . TIFF2025084121000103.tif24107[In the above formula, L b2 、Y, R b1 、nb33 represents the same meaning as formula (B1 - A2).] In formula (B1 - A2), when nb44 is 2 or more, a plurality of L b2 and Y are preferably the same group as each other. nb33 is preferably any integer from 0 to 3, more preferably any integer from 0 to 2. In one embodiment, nb33 is preferably 0. In another embodiment, nb33 is preferably 1 or 2. When nb33 is 1, R b1 is preferably a halogen atom, and R b1 is more preferably a fluorine atom or an iodine atom. When nb33 is 2, one of R b1 is preferably a halogen atom and the other is preferably a halogen atom or an alkyl group having 1 to 4 carbon atoms, and one of R b1 is more preferably a fluorine atom or an iodine atom and the other is preferably a fluorine atom, an iodine atom or an alkyl group having 1 to 3 carbon atoms.

[0104] Examples of the anion represented by formula (B1 - A2) include the following anions. Among them, the anions represented by formula (B2a - 1) to formula (B2a - 20) are preferred, and the anions represented by formula (B2a - 1) to formula (B2a - 11), formula (B2a - 16) to formula (B2a - 20) are more preferred. The following anions have some R b1 omitted and may contain substituents not shown. TIFF2025084121000104.tif102153

[0105] TIFF2025084121000105.tif13103[In formula (B2), A 1 represents a nitrogen atom or a carbon atom. L b2 ’ represents a divalent hydrocarbon group having 1 to 24 carbon atoms which may have a substituent, and -CH 2- may be replaced by -O-, -S-, -CO- or -SO 2 - may be replaced by -O-, -S-, -CO- or -SO Y ’ represents a methyl group which may have a substituent or a cyclic hydrocarbon group having 3 to 24 carbon atoms which may have a substituent, and -CH 2 - may be replaced by -O-, -S-, -CO- or -SO 2 - may be replaced by -O-, -S-, -CO- or -SO nb55 represents an integer of 2 or 3. When nb55 is 2, A 1 is a nitrogen atom, and when nb55 is 3, A 1 is a carbon atom. The groups in a plurality of parentheses may be the same as or different from each other, and the groups in two parentheses may be bonded to form a ring containing A 1 may be formed. Z1 + represents an organic cation.] A in formula (B2) 1 and L b2 ' are the same as those of A 1 and L b2 in formula (I-B) or formula (B1), etc. In formula (B2), Y ’ is preferably a methyl group having a fluorine atom or a cyclic hydrocarbon group having 3 to 20 carbon atoms which may have a substituent (-CH 2 - may be replaced by -O-, -CO-, -S- or -SO 2 -), more preferably a trifluoromethyl group, an alicyclic hydrocarbon group having 3 to 18 carbon atoms which may have a substituent (-CH 2 - may be replaced by -O-, -S-, -CO- or -SO 2 -), or an aromatic hydrocarbon group having 6 to 18 carbon atoms which may have a substituent. Specifically, it is more preferably a trifluoromethyl group or a group represented by formula (Y1) to formula (Y36) exemplified in formula (B1-A1). In formula (B2), the groups in two parentheses are combined to form A 1When forming a ring containing, for example, an anion represented by the formula (B2’) can be mentioned. TIFF2025084121000106.tif21112[In the formula (B2’), A 1 , Y’, L b2 ’ and nb55 represent the same meaning as in the formula (B2). W b4 represents a disulfonylimide ring or a disulfonylmethide ring having 2 to 12 carbon atoms which may have a fluorine atom.] W in the formula (B2’) b4 is the same as W in the formula (I-B) etc. b4 and the like can be mentioned.

[0106] Examples of the anion in the salt represented by the formula (B2) include the following. Among them, an anion represented by the formula (B3a-1) or the formula (B3a-2) is preferable. TIFF2025084121000107.tif176163

[0107] In another form of the compound (B), a salt in which the anion in the salt represented by the formula (B1) etc. is replaced with a carboxylic acid anion etc. is also preferably used as the compound (B). Examples of the carboxylic acid anion include the following. TIFF2025084121000108.tif43155

[0108] Z1 + Examples of the organic cation of include organic onium cations, organic sulfonium cations, organic iodonium cations, organic ammonium cations, benzothiazolium cations and organic phosphonium cations etc. Among these, organic sulfonium cations and organic iodonium cations are preferable, and arylsulfonium cations or aryl iodonium cations are more preferable. Specifically, cations represented by any of the formulas (b2-1) to (b2-5) (hereinafter may be referred to as "cation (b2-1)" etc. according to the formula number) can be mentioned. TIFF2025084121000109.tif84162[In formulas (b2-1) to (b2-5), R b4 ~R b6 each independently represents a linear hydrocarbon group having 1 to 30 carbon atoms, an alicyclic hydrocarbon group having 3 to 36 carbon atoms, or an aromatic hydrocarbon group having 6 to 36 carbon atoms, and the hydrogen atom contained in the linear hydrocarbon group may be substituted with a hydroxy group, an alkoxy group having 1 to 12 carbon atoms, an alicyclic hydrocarbon group having 3 to 12 carbon atoms, or an aromatic hydrocarbon group having 6 to 18 carbon atoms, the hydrogen atom contained in the alicyclic hydrocarbon group may be substituted with a halogen atom, an aliphatic hydrocarbon group having 1 to 18 carbon atoms, an alkylcarbonyl group having 2 to 4 carbon atoms, or a glycidyloxy group, and the hydrogen atom contained in the aromatic hydrocarbon group may be substituted with a halogen atom, a hydroxy group, an aliphatic hydrocarbon group having 1 to 18 carbon atoms, a fluorinated alkyl group having 1 to 12 carbon atoms, or an alkoxy group having 1 to 12 carbon atoms. R b4 and R b5 may combine with each other to form a ring together with the sulfur atom to which they are attached, and the -CH 2 - contained in the ring may be replaced with -O-, -S-, or -CO-. R b7 and R b8 each independently represents a halogen atom, a hydroxy group, an aliphatic hydrocarbon group having 1 to 12 carbon atoms, a fluorinated alkyl group having 1 to 12 carbon atoms, or an alkoxy group having 1 to 12 carbon atoms. m2 and n2 each independently represent an integer of 0 to 5. When m2 is 2 or more, the plurality of R b7 may be the same or different, and when n2 is 2 or more, the plurality of R b8 may be the same or different. R b9 and R b10 each independently represents a linear hydrocarbon group having 1 to 36 carbon atoms or an alicyclic hydrocarbon group having 3 to 36 carbon atoms. R b9 and R b10 may combine with each other to form a ring together with the sulfur atom to which they are attached, and the -CH 2- may be replaced by -O-, -S- or -CO-. R b11 represents a hydrogen atom, a chain hydrocarbon group having 1 to 36 carbon atoms, an alicyclic hydrocarbon group having 3 to 36 carbon atoms or an aromatic hydrocarbon group having 6 to 18 carbon atoms. R b12 represents a chain hydrocarbon group having 1 to 12 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms or an aromatic hydrocarbon group having 6 to 18 carbon atoms, and the hydrogen atom contained in the chain hydrocarbon group may be substituted with an aromatic hydrocarbon group having 6 to 18 carbon atoms, and the hydrogen atom contained in the aromatic hydrocarbon group may be substituted with an alkoxy group having 1 to 12 carbon atoms or an alkylcarbonyloxy group having 1 to 12 carbon atoms. R b11 and R b12 and may be bonded to each other to form a ring including -CH-CO- to which they are bonded, and -CH 2 - may be replaced by -O-, -S- or -CO-. R b13 ~R b18 and R b21 ~R b26 each independently represents a halogen atom, a hydroxy group, an aliphatic hydrocarbon group having 1 to 12 carbon atoms, a fluorinated alkyl group having 1 to 12 carbon atoms or an alkoxy group having 1 to 12 carbon atoms. R b13 and R b14 and R b21 and R b22 and may be bonded to each other to form a ring containing a sulfur atom together with the benzene ring to which they are bonded, and -CH 2 - may be replaced by -O-, -S- or -CO-. R b27 ~R b29 each independently represents a hydrogen atom or a group containing an acid-labile group. L b31 and L b41 ~L b43 each independently represents a sulfur atom or an oxygen atom. o2, p2, s2, and t2 each independently represent an integer of 0 to 5. q2 and r2 each independently represent an integer from 0 to 4. u2 represents 0 or 1. o21, p22, q23, r24, t25 and s26 each independently represent an integer from 0 to 4. u3 represents an integer from 1 to 3 and satisfies 1 ≤ u3 + q23 ≤ 5. u4 and u5 each independently represent an integer from 0 to 3 and satisfy 0 ≤ u4 + o21 ≤ 5 and 0 ≤ u5 + p22 ≤ 5. When o2 is 2 or more, a plurality of Rs b13 are the same or different. When p2 is 2 or more, a plurality of Rs b14 are the same or different. When q2 is 2 or more, a plurality of Rs b15 are the same or different. When r2 is 2 or more, a plurality of Rs b16 are the same or different. When s2 is 2 or more, a plurality of Rs b17 are the same or different. When t2 is 2 or more, a plurality of Rs b18 are the same or different. When o21, p22, q23, r24, t25 and s26 are each 2 or more, a plurality of Rs b21 ~R b26 are each the same or different. When u3, u4 and u5 are each 2 or more, the groups within the plurality of parentheses are each the same or different. When u2 is 0, at least one of o2, p2, q2 and r2 is 1 or more, and at least one of Rs b13 ~R b16 is preferably a halogen atom. When u2 is 1, at least one of o2, p2, s2, t2, q2 and r2 is 1 or more, and at least one of Rs b13 ~R b18 is preferably a halogen atom. Furthermore, when u2 is 0, r2 is preferably 1 or more, more preferably 1. Also, when u2 is 0 and r2 is 1 or more, R b16 is preferably a halogen atom. The aliphatic hydrocarbon group represents a chain hydrocarbon group and an alicyclic hydrocarbon group. Examples of the chain hydrocarbon group include alkyl groups such as methyl group, ethyl group, propyl group, isopropyl group, butyl group, sec-butyl group, tert-butyl group, pentyl group, hexyl group, octyl group and 2-ethylhexyl group. In particular, R b9 ~R b12 The chain hydrocarbon group is preferably a C1-C12 group. The alicyclic hydrocarbon group may be either monocyclic or polycyclic. Examples of the monocyclic alicyclic hydrocarbon group include cycloalkyl groups such as cyclopropyl group, cyclobutyl group, cyclopentyl group, cyclohexyl group, cycloheptyl group, cyclooctyl group and cyclodecyl group. Examples of the polycyclic alicyclic hydrocarbon group include decahydronaphthyl group, adamantyl group, norbornyl group and the following groups. TIFF2025084121000110.tif10158 In particular, R b9 ~R b12 The alicyclic hydrocarbon group is preferably a C3-C18 group, more preferably a C4-C12 group. Examples of the alicyclic hydrocarbon group in which a hydrogen atom is substituted with an aliphatic hydrocarbon group include methylcyclohexyl group, dimethylcyclohexyl group, 2-methyladamantan-2-yl group, 2-ethyladamantan-2-yl group, 2-isopropyladamantan-2-yl group, methylnorbornyl group and isobornyl group. In the alicyclic hydrocarbon group in which a hydrogen atom is substituted with an aliphatic hydrocarbon group, the total carbon number of the alicyclic hydrocarbon group and the aliphatic hydrocarbon group is preferably 20 or less. The alkyl fluoride group represents an alkyl group having 1 to 12 carbon atoms and having a fluorine atom, and examples thereof include fluoromethyl group, difluoromethyl group, trifluoromethyl group and perfluorobutyl group. The carbon number of the alkyl fluoride group is preferably 1 to 9, more preferably 1 to 6, and still more preferably 1 to 4.

[0109] Examples of the aromatic hydrocarbon group include aryl groups such as phenyl group, biphenyl group, naphthyl group, and phenanthryl group. The aromatic hydrocarbon group may have a chain hydrocarbon group or an alicyclic hydrocarbon group, and examples thereof include an aromatic hydrocarbon group having a chain hydrocarbon group with 1 to 18 carbon atoms (such as tolyl group, xylyl group, cumenyl group, mesityl group, p-ethylphenyl group, p-tert-butylphenyl group, 2,6-diethylphenyl group, 2-methyl-6-ethylphenyl group, etc.), and an aromatic hydrocarbon group having an alicyclic hydrocarbon group with 3 to 18 carbon atoms (such as p-cyclohexylphenyl group, p-adamantylphenyl group, etc.). When the aromatic hydrocarbon group has a chain hydrocarbon group or an alicyclic hydrocarbon group, a chain hydrocarbon group with 1 to 18 carbon atoms and an alicyclic hydrocarbon group with 3 to 18 carbon atoms are preferable. Examples of the aromatic hydrocarbon group in which a hydrogen atom is substituted with an alkoxy group include p-methoxyphenyl group. Examples of the chain hydrocarbon group in which a hydrogen atom is substituted with an aromatic hydrocarbon group include aralkyl groups such as benzyl group, phenethyl group, phenylpropyl group, trityl group, naphthylmethyl group, and naphthylethyl group. Examples of the alkoxy group include methoxy group, ethoxy group, propoxy group, butoxy group, pentyloxy group, hexyloxy group, heptyloxy group, octyloxy group, decyloxy group, and dodecyloxy group. Examples of the alkylcarbonyl group include acetyl group, propionyl group, and butyryl group. Examples of the halogen atom include fluorine atom, chlorine atom, bromine atom, and iodine atom. Examples of the alkylcarbonyloxy group include methylcarbonyloxy group, ethylcarbonyloxy group, propylcarbonyloxy group, isopropylcarbonyloxy group, butylcarbonyloxy group, sec-butylcarbonyloxy group, tert-butylcarbonyloxy group, pentylcarbonyloxy group, hexylcarbonyloxy group, octylcarbonyloxy group, and 2-ethylhexylcarbonyloxy group. R b4 and R b5The ring formed by the combination of the two and the sulfur atom to which they are attached may be a monocyclic, polycyclic, aromatic, non-aromatic, saturated or unsaturated ring. Examples of this ring include rings having 3 to 18 carbon atoms, preferably rings having 4 to 18 carbon atoms. The ring containing a sulfur atom includes 3-membered to 12-membered rings, preferably 3-membered to 7-membered rings, and examples include the following rings. * represents a bonding site. TIFF2025084121000111.tif18125R b9 and R b10 The ring formed by the combination of the two may be a monocyclic, polycyclic, aromatic, non-aromatic, saturated or unsaturated ring. Examples of this ring include 3-membered to 12-membered rings, preferably 3-membered to 7-membered rings. Examples include thiolan-1-ium ring (tetrahydrothiophenium ring), thian-1-ium ring, 1,4-oxathian-4-ium ring, and the like. R b11 and R b12 The ring formed by the combination of the two may be a monocyclic, polycyclic, aromatic, non-aromatic, saturated or unsaturated ring. Examples of this ring include 3-membered to 12-membered rings, preferably 3-membered to 7-membered rings. Examples include oxocycloheptane ring, oxocyclohexane ring, oxonorbornane ring, oxoadamantane ring, and the like. R b27 ~R b29 Examples of the group containing an acid-labile group of ~R include -R c30 , -CO-O-R c30 or -L c10 -CO-O-R c30 wherein the group (L c10 represents an alkanediyl group having 1 to 6 carbon atoms, and R c30 represents an acid-labile group.). Examples include the like. R b27 ~R b29 Examples of the acid-labile group of ~R include the above-described group (1a) and group (2a), group (1) and group (2) described later, and the like.

[0110] Among the cations (b2-1) to (b2-5), preferably, the cation (b2-1), the cation (b2-4) or the cation (b2-5). Examples of the cation (b2-1) include the following cations. TIFF2025084121000112.tif150165 Examples of the cation (b2-2) include the following cations. TIFF2025084121000113.tif14136 Examples of the cation (b2-3) include the following cations. TIFF2025084121000114.tif21130 Examples of the cation (b2-4) include the following cations. TIFF2025084121000115.tif124159 Examples of the cation (b2-5) include the following cations. TIFF2025084121000116.tif103156

[0111] Compound (B) is a combination of the above-mentioned anion and the above-mentioned organic cation, and these can be arbitrarily combined. Preferred examples of compound (B) include combinations of anions represented by any of formula (B1a-1) to formula (B1a-4), formula (B1a-7) to formula (B1a-11), formula (B1a-14) to formula (B1a-30), formula (B1a-35) to formula (B1a-70), formula (B2a-1) to formula (B2a-11), formula (B2a-16) to formula (B2a-20), and formula (B3a-1) to formula (B3a-20), and the cation (b2-1), the cation (b2-2), the cation (b2-3), the cation (b2-4), or the cation (b2-5).

[0112] Preferred examples of compound (B) include those represented by formula (B1-1) to formula (B1-105), formula (B2-1) to formula (B2-20), and formula (B3-1) to formula (B3-28). Among them, those containing an arylsulfonium cation are preferred, and those represented by formula (B1-1) to formula (B1-3), formula (B1-5) to formula (B1-7), formula (B1-11) to formula (B1-14), formula (B1-20) to formula (B1-26), formula (B1-29), formula (B1-31) to formula (B1-105), formula (B2-1) to formula (B2-20), and formula (B3-1) to formula (B3-28) are particularly preferred. TIFF2025084121000117.tif174167

[0113] TIFF2025084121000118.tif250160

[0114] TIFF2025084121000119.tif254166

[0115] TIFF2025084121000120.tif254160

[0116] TIFF2025084121000121.tif249163

[0117] TIFF2025084121000122.tif251151

[0118] TIFF2025084121000123.tif184158

[0119] When the resist composition contains salt (I) and compound (B) as an acid generator, the ratio of the contents of salt (I) and compound (B) (mass ratio; salt (I): compound (B)) is usually 1:99 to 99:1, preferably 2:98 to 98:2, more preferably 5:95 to 95:5, still more preferably 10:90 to 90:10, and particularly preferably 15:85 to 85:15. In the resist composition of the present invention, when salt (I) and compound (B) are contained as an acid generator, the total content ratio of salt (I) and compound (B) is preferably 20% by mass or more and 95% by mass or less, more preferably 35% by mass or more and 90% by mass or less, and still more preferably 35% by mass or more and 80% by mass or less with respect to the solid content of the resist composition.

[0120] <Crosslinking agent> The crosslinking agent is not particularly limited, and can be appropriately selected from crosslinking agents used in the art. Specifically, epoxy compounds, compounds having a methylol group or a methylol ether group, etc. can be mentioned. Examples of epoxy crosslinking agents include low molecular weight phenolic compounds such as bisphenol A (2,2-bis(4-glycidyloxyphenyl)propane). Examples of compounds having a methylol group or a methylol ether group include compounds obtained by reacting an amino group-containing compound such as acetoguanamine, benzoguanamine, urea, ethylene urea, propylene urea, glycoluril, or melamine with formaldehyde or formaldehyde and a lower alcohol to substitute a hydrogen atom of the amino group with a hydroxymethyl group or a lower alkoxymethyl group; aliphatic hydrocarbons having two or more ethylene oxide structural parts. Among these, in particular, those using urea are called urea-based crosslinking agents, those using alkylene ureas such as ethylene urea and propylene urea are called alkylene urea-based crosslinking agents, those using glycoluril are called glycoluril-based crosslinking agents, and those using melamine are called melamine-based crosslinking agents. Among them, urea-based crosslinking agents, alkylene urea-based crosslinking agents, glycoluril-based crosslinking agents, and melamine-based crosslinking agents are preferred, and glycoluril-based crosslinking agents and melamine-based crosslinking agents are more preferred.

[0121] Examples of urea-based crosslinking agents include compounds obtained by reacting urea with formaldehyde to substitute a hydrogen atom of the amino group with a hydroxymethyl group, and compounds obtained by reacting urea with formaldehyde and a lower alcohol to substitute a hydrogen atom of the amino group with a lower alkoxymethyl group. Specifically, bis-methoxymethyl urea, bis-ethoxymethyl urea, bis-propoxymethyl urea, bis-butoxymethyl urea, etc. can be mentioned. Among them, bis-methoxymethyl urea is preferred.

[0122] Alkylene urea-based crosslinking agents can be obtained by subjecting alkylene urea and formalin to a condensation reaction and further reacting the product with a lower alcohol. It can be used. Specific examples of the alkylene urea-based crosslinking agent include ethylene urea-based crosslinking agents such as mono- and / or dihydroxymethylated ethylene urea, mono- and / or dimethoxymethylated ethylene urea, mono- and / or diethoxymethylated ethylene urea, mono- and / or dipropoxymethylated ethylene urea, mono- and / or dibutoxymethylated ethylene urea; propylene urea-based crosslinking agents such as mono- and / or dihydroxymethylated propylene urea, mono- and / or dimethoxymethylated propylene urea, mono- and / or diethoxymethylated propylene urea, mono- and / or dipropoxymethylated propylene urea, mono- and / or dibutoxymethylated propylene urea; 1,3-di(methoxymethyl)-4,5-dihydroxy-2-imidazolidinone, 1,3-di(methoxymethyl)-4,5-dimethoxy-2-imidazolidinone, and the like.

[0123] Examples of the glycoluril-based crosslinking agent include glycoluril derivatives in which the N-position is substituted with one or both of a hydroxyalkyl group and an alkoxyalkyl group having 1 to 4 carbon atoms. This glycoluril derivative can be obtained by subjecting glycoluril and formalin to a condensation reaction and further reacting the product with a lower alcohol. Examples of the glycoluril-based crosslinking agent include mono-, di-, tri- and / or tetrahydroxymethylated glycoluril, mono-, di-, tri- and / or tetramethoxymethylated glycoluril, mono-, di-, tri- and / or tetraethoxymethylated glycoluril, mono-, di-, tri- and / or tetrapropoxymethylated glycoluril, mono-, di-, tri- and / or tetrabutoxymethylated glycoluril, and the like.

[0124] As the melamine-based crosslinking agent, a compound represented by the formula (G-1) is preferable. For example, hexamethylol melamine, pentamethylol melamine, tetramethylol melamine, hexamethoxymethyl melamine, pentamethoxymethyl melamine, tetramethoxymethyl melamine, hexaethoxymethyl melamine, tetramethylol benzoguanamine, tetramethoxymethyl benzoguanamine, trimethoxymethyl benzoguanamine, tetraethoxymethyl benzoguanamine, etc. may be mentioned. TIFF2025084121000124.tif3686[In the formula (G-1), R g1 represents -N-R g6 R g7 or an aromatic hydrocarbon group having 6 to 18 carbon atoms. R g2 、R g3 、R g4 、R g5 、R g6 and R g7 each independently represents a hydrogen atom or -CH 2 -O-R g8 and at least one selected from the group of R g2 、R g3 、R g4 and R g5 is -CH 2 -O-R g8 . R g8 represents a hydrogen atom or an alkyl group having 1 to 8 carbon atoms.] The crosslinking agent may be used alone or in combination of two or more. The content of the crosslinking agent is preferably 0.5 to 30 parts by mass, more preferably 0.5 to 15 parts by mass, and most preferably 1 to 12 parts by mass with respect to 100 parts by mass of the solid content in the resist composition.

[0125] <Resin> As the resin contained in the resist composition of the present invention, a resin containing a structural unit represented by the formula (a2) having an alcoholic hydroxy group, a phenolic hydroxy group or a carboxy group, etc. (hereinafter sometimes referred to as "structural unit (a2)") (hereinafter sometimes referred to as "resin (AX)") may be mentioned. The resin (AX) may contain structural units other than the structural unit (a2). Examples of the structural units other than the structural unit (a2) include a structural unit having a lactone ring (hereinafter sometimes referred to as "structural unit (a3)") described later, a structural unit having a halogen atom (hereinafter sometimes referred to as "structural unit (a4)") described later, a structural unit having a non-leaving hydrocarbon group (hereinafter sometimes referred to as "structural unit (a5)") described later, a structural unit having a sultone ring (hereinafter sometimes referred to as "structural unit (a6)") described later, a structural unit that decomposes upon exposure to generate an acid (hereinafter sometimes referred to as "structural unit (a7)") described later, a structural unit having an acid-labile group (hereinafter sometimes referred to as "structural unit (a1)") described later, and structural units derived from other monomers known in the art. However, when the resin (AX) contains the structural unit (a1), its content is preferably 1 mol% or less, more preferably substantially not contained, based on all the structural units constituting the resin (AX). The content of each structural unit contained in the resin (AX) can be measured using an NMR (Nuclear Magnetic Resonance) apparatus.

[0126] 〈Structural unit (a2)〉 The structural unit (a2) is a structural unit represented by the formula (a2) and has an alcoholic hydroxy group, a phenolic hydroxy group, or a carboxy group. TIFF2025084121000125.tif4095[In the formula (a2), R a2 represents a hydrogen atom, a halogen atom, or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. A a21 represents a single bond or an alkanediyl group having 1 to 12 carbon atoms, and -CH 2 - contained in the alkanediyl group may be replaced by -O-, -CO-, or -NR a28 -. R a28 represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. L a21represents a single bond or a hydrocarbon group having 1 to 28 carbon atoms, and the hydrocarbon group may have a substituent, and -CH contained in the hydrocarbon group 2 - may be replaced by -O-, -CO-, -S- or -SO 2 -. L a22 represents a single bond or a chain hydrocarbon group having 1 to 12 carbon atoms which may have a fluorine atom, and -CH contained in the chain hydrocarbon group 2 - may be replaced by -O- or -CO-. na2 represents any integer from 1 to 5. When na2 is 2 or more, a plurality of Ls a22 may be the same as or different from each other.] R a2 Examples of the halogen atom in R include a fluorine atom, an iodine atom, a chlorine atom, a bromine atom and the like. R a2 Examples of the alkyl group having 1 to 6 carbon atoms which may have a halogen atom in R include a trifluoromethyl group, a difluoromethyl group, a methyl group, a perfluoroethyl group, a 2,2,2-trifluoroethyl group, a 1,1,2,2-tetrafluoroethyl group, an ethyl group, a perfluoropropyl group, a 2,2,3,3,3-pentafluoropropyl group, a propyl group, a perfluorobutyl group, a 1,1,2,2,3,3,4,4-octafluorobutyl group, a butyl group, a perfluoropentyl group, a 2,2,3,3,4,4,5,5,5-nonafluoropentyl group, a pentyl group, a hexyl group, a perfluorohexyl group, a chloromethyl group, a bromomethyl group, an iodomethyl group and the like. The number of carbon atoms of the alkyl group is preferably 1 to 4, more preferably 1 to 3, and still more preferably 1 or 2. R a2 is preferably a hydrogen atom or an alkyl group having 1 to 4 carbon atoms, more preferably a hydrogen atom, a methyl group or an ethyl group, and still more preferably a hydrogen atom or a methyl group.

[0127] A a21Examples of the alkanediyl group include linear alkanediyl groups such as methylene group, ethylene group, propane-1,3-diyl group, propane-1,2-diyl group, butane-1,4-diyl group, pentane-1,5-diyl group, hexane-1,6-diyl group, heptane-1,7-diyl group, octane-1,8-diyl group, nonane-1,9-diyl group, decane-1,10-diyl group, undecane-1,11-diyl group, dodecane-1,12-diyl group, etc., and branched alkanediyl groups such as butane-1,3-diyl group, 2-methylpropane-1,3-diyl group, 2-methylpropane-1,2-diyl group, pentane-1,4-diyl group, 2-methylbutane-1,4-diyl group, heptane-1,6-diyl group, octane-1,7-diyl group, nonane-1,8-diyl group, decane-1,9-diyl group, undecane-1,10-diyl group, etc. The number of carbon atoms in the alkanediyl group is preferably 1 to 10, more preferably 1 to 8, still more preferably 1 to 6, even more preferably 1 to 4, still even more preferably 1 to 3, and even more preferably 1 or 2. R a28 Examples of the alkyl group include methyl group, ethyl group, n-propyl group, isopropyl group, n-butyl group, and tert-butyl group. A a21 When -CH 2 - in the alkanediyl group of a21 is replaced by -O-, -CO- or -NR a28 -, the number of carbon atoms before replacement is taken as the number of carbon atoms of the alkanediyl group. A a21 When -CH 2 - in the alkanediyl group of a21 is replaced by -O-, -CO- or -NR a28As the group replaced by -, as described above, there may be mentioned a hydroxy group, a carboxy group, a carbonyl group, an oxy group, an amino group, an alkoxy group, an alkoxycarbonyl group, an alkylcarbonyl group, an alkylamino group, a peptide group, an alkanediyl-oxy group, an alkanediyl-oxycarbonyl group, an alkanediylcarbonyl group, an alkanediylcarbonyl-oxy group, an alkanediylsulfonyl group, an alkanediylthio group, an alkanediylamino group, etc. These replaced groups include those similar to those exemplified herein, within the range where the upper limit of the number of carbon atoms is allowed. Examples of the alkylamino group include alkylamino groups having 1 to 11 carbon atoms, such as a methylamino group, an ethylamino group, a propylamino group, a butylamino group, a pentylamino group, a hexylamino group, an octylamino group, etc. The number of carbon atoms of the alkylamino group is preferably 1 to 8, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. Examples of the alkanediylamino group include alkanediylamino groups having 1 to 11 carbon atoms, such as a methyleneamino group, an ethyleneamino group, a propyleneamino group, etc. The number of carbon atoms of the alkanediylamino group is preferably 1 to 8, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. A a21 The -CH 2 - contained in the alkanediyl group of A a28 - being replaced by -O-, -CO- or -NR a28 - may be mentioned groups such as *-O-, *-CO-O-, *-O-CO-, *-CO-O-A a22 -CO-O-, *-O-CO-A a22 -O-, *-O-A a22 -CO-O-, *-CO-O-A a22 -O-CO-, *-O-CO-A a22 -O-CO-, *-CO-NR a28 - may be mentioned. Among them, *-CO-O-, *-CO-O-A a22 -CO-O-, *-O-A a22 -CO-O-, *-CO-NR a28 - are preferred. Here, Aa22 represents an alkanediyl group having 1 to 8 carbon atoms, and * represents the bonding site with the carbon atom to which R a2 is bonded. The alkanediyl group of A a22 includes, within the range permitted by the upper limit of the number of carbon atoms, an alkanediyl group similar to that of A a21 . A a21 is preferably a single bond, *-CO-O- or *-CO-O-A a22 -CO-O-, more preferably a single bond, *-CO-O- or *-CO-O-CH 2 -CO-O-, and even more preferably a single bond or *-CO-O-.

[0128] L a21 The hydrocarbon group in is a (na2 + 1)-valent hydrocarbon group, and examples thereof include linear or branched chain hydrocarbon groups, monocyclic or polycyclic (including spiro rings, condensed rings, bridged rings, etc.) alicyclic hydrocarbon groups, and cyclic hydrocarbon groups such as aromatic hydrocarbon groups. A group formed by combining two or more of these groups (for example, a hydrocarbon group formed from an alicyclic hydrocarbon group or an aromatic hydrocarbon group and a chain hydrocarbon group) may also be used. L a21 Examples of the chain hydrocarbon group of include divalent to hexavalent chain hydrocarbon groups such as alkanediyl groups, alkanetriyl groups, alkanetetrayl groups, alkanepentayl groups, and alkanexayl groups. Examples of the alkanediyl group include, for example, an alkanediyl group similar to that of A a21 . Examples of the alkanetriyl group include methanetriyl group, ethanetriyl group, propanetriyl group, butanetriyl group, pentanetriyl group, hexanetriyl group, heptanetriyl group, octanetriyl group, nonanetriyl group, decanetriyl group, undecanetriyl group, dodecanetriyl group, tridecanetriyl group, tetradecanetriyl group, pentadecanetriyl group, hexadecanetriyl group, and heptadecanetriyl group. Examples of the alkanetetrayl group include a methanetetrayl group, an ethanetetrayl group, a propanetetrayl group, a butanetetrayl group, a pentanetetrayl group, a hexanetetrayl group, a heptanetetrayl group, an octanetetrayl group, a nonanetetrayl group, a decanetetrayl group, an undecanetetrayl group, a dodecanetetrayl group, a tridecanetetrayl group, a tetradecanetetrayl group, a pentadecanetetrayl group, a hexadecanetetrayl group, a heptadecanetetrayl group, and the like. Examples of the alkanepentayl group include a methanepentayl group, an ethanepentayl group, a propanepentayl group, a butanepentayl group, a pentanepentayl group, a hexanepentayl group, and the like. Examples of the alkanexayl group include a methanexayl group, an ethanexayl group, a propanexayl group, a butanexayl group, a pentanexayl group, a hexanexayl group, and the like. Examples also include a group in which one or more hydrogen atoms of the above-described group are replaced with a bonding site, and the like. The number of carbon atoms in the chain hydrocarbon group is preferably 1 to 18, more preferably 1 to 12, still more preferably 1 to 10, even more preferably 1 to 9, still even more preferably 1 to 8, still more preferably 1 to 6, still even more preferably 1 to 5, and particularly preferably 1 to 4. L a21 Examples of the monocyclic and polycyclic alicyclic hydrocarbon groups in L include the following alicyclic hydrocarbon groups and the like. The bonding site can be at any position. TIFF2025084121000126.tif46168For example, divalent to hexavalent alicyclic hydrocarbon groups such as a cycloalkanediyl group, a cycloalkanetriyl group, a cycloalkanetetrayl group, a cycloalkanepentayl group, a cycloalkanexayl group, and the like can be mentioned. Specifically, monocyclic alicyclic hydrocarbon groups such as cyclobutane-1,3-diyl group, cyclopentane-1,3-diyl group, cyclohexane-1,4-diyl group, cyclooctane-1,5-diyl group, cyclopropanetriyl group, cyclobutanetriyl group, cyclopentanetriyl group, cyclohexanetriyl group, cycloheptanetriyl group, cyclooctanetriyl group, cyclodecanetriyl group, cyclopropanetetrayl group, cyclobutanetetrayl group, cyclopentanetetrayl group, cyclohexanetetrayl group, cycloheptanetetrayl group, cyclooctanetetrayl group, cyclodecanetetrayl group, etc. and polycyclic alicyclic hydrocarbon groups such as norbornane-1,4-diyl group, norbornane-2,5-diyl group, adamantane-1,5-diyl group, adamantane-2,6-diyl group, decahydronaphthalenediyl group, bicyclo[3.3.0]octanediy group, norbornanetriyl group, adamantanetriyl group, decahydronaphthalenetriyl group, bicyclo[3.3.0]octanetriyl group, norbornanetetrayl group, adamantanetetrayl group, decahydronaphthalenetetrayl group, bicyclo[3.3.0]octanetetrayl group, etc. can be mentioned. Moreover, groups in which one or more hydrogen atoms of the above-mentioned groups are replaced with a bonding site, etc. can also be mentioned. The number of carbon atoms of the alicyclic hydrocarbon group is preferably 3 to 20, more preferably 3 to 18, still more preferably 3 to 16, even more preferably 3 to 12, still even more preferably 6 to 12, and even more preferably 6 to 10. L a21 Examples of the aromatic hydrocarbon group in L include divalent to hexavalent aromatic hydrocarbon groups such as arylene group, arenetriyl group, arenetetrayl group, arenepentayl group, arenexayl group, etc. Specifically, examples thereof include a phenylene group, a naphthylene group, an anthrylene group, a biphenylene group, a phenanthrylene group, a benzenetriyl group, a naphthalenetriyl group, an anthracenetriyl group, a biphenylenetriyl group, a phenanthrenetriyl group, a benzenetetrayl group, a naphthalenetetrayl group, an anthracenetetrayl group, a biphenylenetetrayl group, a phenanthrenetetrayl group, and the like. Examples thereof also include a group in which one or more hydrogen atoms of the above-described group are replaced with a bonding site, and the like. The number of carbon atoms of the aromatic hydrocarbon group is preferably 6 to 20, more preferably 6 to 18, still more preferably 6 to 14, even more preferably 6 to 12, and even more preferably 6 to 10. Examples of the group formed by combining two or more types thereof include a group formed by combining an alicyclic hydrocarbon group and a chain hydrocarbon group, a group formed by combining an aromatic hydrocarbon group and a chain hydrocarbon group, a group formed by combining an alicyclic hydrocarbon group and an aromatic hydrocarbon group, a group formed by combining an alicyclic hydrocarbon group, a chain hydrocarbon group, and an aromatic hydrocarbon group, and the like. In the combination, the alicyclic hydrocarbon group, the aromatic hydrocarbon group, and the chain hydrocarbon group may each be combined with two or more types. Further, any group may be bonded to A a21 and L a22 and may be bonded thereto. -CH 2 - contained in the hydrocarbon group is -O-, -S-, -SO 2-Or as a group replaced by -CO-, there are a hydroxy group, a carboxy group, a thiol group, an alkoxy group, an alkylthio group, an alkoxycarbonyl group, an alkoxycarbonyloxy group, an alkylsulfonyl group, an alkylcarbonyl group, an alkylcarbonyloxy group, an oxy group, a carbonyl group, a thio group, a sulfonyl group, an alkanedioxy group, an alkanedioxycarbonyl group, an alkanediylcarbonyl group, an alkanediylcarbonyloxy group, an alkanediylsulfonyl group, an alkanediylthio group, a cycloalkoxy group, a cycloalkylalkoxy group, an aromatic hydrocarbon group-carbonyl oxy group, an aromatic hydrocarbon group-carbonyl group, an aromatic hydrocarbon group-oxy group, a group formed by combining two or more of these groups, etc. Further, a group in which one or more hydrogen atoms of these groups are replaced at the bonding site, etc. are also included. These replaced groups include those similar to the groups exemplified in this specification within the range where the upper limit of the number of carbon atoms permits.

[0129] In addition, the -CH 2 - contained in an alicyclic hydrocarbon group or a group combining an alicyclic hydrocarbon group and an aromatic hydrocarbon group is replaced by -O-, -S-, -CO- or -SO 2 - As the group replaced, those similar to the groups exemplified in this specification are included within the range where the upper limit of the number of carbon atoms permits. L a21 The hydrocarbon group in may have one or more substituents. Examples of the substituent include a halogen atom, a haloalkyl group having 1 to 12 carbon atoms, an alkyl group having 1 to 16 carbon atoms (the -CH 2 - contained in the alkyl group may be replaced by -O- or -CO-.), an acryloyloxy group or a methacryloyloxy group, etc. Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, an iodine atom, etc. L a21The hydrocarbon group in can have a substituent such as a haloalkyl group by having a halogen atom as a substituent. Examples of the haloalkyl group include an alkyl fluoride group, an alkyl chloride group, an alkyl bromide group, an alkyl iodide group, etc. For example, a chloromethyl group, a bromomethyl group, an iodomethyl group, a fluoromethyl group, a difluoromethyl group, a trifluoromethyl group, a perfluoroethyl group, a perfluoropropyl group, a perfluorobutyl group, etc. can be mentioned. The number of carbon atoms of the haloalkyl group is preferably 1 to 8, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. L a21 The hydrocarbon group of can have a substituent such as an alkyl group by including a branched structure. a21 Examples of the alkyl group include a methyl group, an ethyl group, an n-propyl group, an isopropyl group, an n-butyl group, a sec-butyl group, a tert-butyl group, a pentyl group, a hexyl group, a heptyl group, a 2-ethylhexyl group, an octyl group, a nonyl group, a decyl group, an undecyl group, a dodecyl group, etc. The number of carbon atoms of the alkyl group is preferably 1 to 12, more preferably 1 to 10, still more preferably 1 to 8, even more preferably 1 to 6, still even more preferably 1 to 4, and even more preferably 1 to 3. L a21 The -CH 2 - in the hydrocarbon group of is replaced by a group such as -O- or -CO-, so that L a21can substantially have substituents such as a hydroxy group, a carboxy group, an alkoxy group, an alkoxycarbonyl group, an alkylcarbonyl group, an alkylcarbonyloxy group, an alkoxyalkyl group, an alkoxyalkoxy group, an acryloyloxy group, a methacryloyloxy group, etc. The number of carbon atoms of the alkoxy group is preferably 1 to 12, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. The number of carbon atoms of the alkoxycarbonyl group, the alkylcarbonyl group, and the alkylcarbonyloxy group is preferably 2 to 12, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 to 3. The number of carbon atoms of the alkoxyalkyl group and the alkoxyalkoxy group is preferably 2 to 12, more preferably 2 to 8, still more preferably 2 to 6, and even more preferably 2 to 4. Examples of the above groups include those similar to those exemplified in this specification. L a21 Examples of the substituent that the hydrocarbon group in may optionally have include a halogen atom, a haloalkyl group having 1 to 8 carbon atoms, or an alkyl group having 1 to 12 carbon atoms (the -CH 2 - contained in the alkyl group may be replaced by -O- or -CO-).) are preferred, a halogen atom, a haloalkyl group having 1 to 6 carbon atoms, or an alkyl group having 1 to 10 carbon atoms (the -CH 2 - contained in the alkyl group may be replaced by -O- or -CO-).) are more preferred, a halogen atom, a haloalkyl group having 1 to 4 carbon atoms, an alkyl group having 1 to 4 carbon atoms, a hydroxy group, an alkoxy group having 1 to 4 carbon atoms, or an alkoxyalkoxy group having 2 to 8 carbon atoms are still more preferred, a fluorine atom, an iodine atom, a trifluoromethyl group, a methyl group, a hydroxy group, a methoxy group, an ethoxy group, an ethoxyethoxy group, or an ethoxymethoxy group are even more preferred, and a fluorine atom, an iodine atom, a trifluoromethyl group, a methyl group, a hydroxy group, a methoxy group, or an ethoxyethoxy group are even more preferred. Also, when the alkanediyl group of L a21 is replaced by -O- or -CO-, etc., for example, *-L a23 -X a21-(L a23 represents an alkanediyl group having 1 to 8 carbon atoms, and X a21 represents -O-, -O-CO-, -CO-O- or -O-CO-O-, and * represents the bonding site with A a21 .) It is also preferable that it is so. L a21 is a single bond, an optionally substituted chain hydrocarbon group having 1 to 12 carbon atoms (provided that -CH 2 - contained in the chain hydrocarbon group may be replaced by -O- or -CO-), an optionally substituted cyclic hydrocarbon group having 3 to 20 carbon atoms (provided that -CH 2 - contained in the cyclic hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO 2 -), or a group formed by combining an optionally substituted chain hydrocarbon group having 1 to 8 carbon atoms and an optionally substituted cyclic hydrocarbon group having 3 to 20 carbon atoms (provided that -CH 2 - contained in the chain hydrocarbon group may be replaced by -O- or -CO-, and -CH 2 - contained in the cyclic hydrocarbon group may be replaced by -O-, -S-, -SO 2 - or -CO-). It is preferably so, an optionally substituted chain hydrocarbon group having 1 to 10 carbon atoms (provided that -CH 2 - contained in the chain hydrocarbon group may be replaced by -O- or -CO-), an optionally substituted cyclic hydrocarbon group having 3 to 18 carbon atoms (provided that -CH 2 - contained in the cyclic hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO 2 -), or a group formed by combining an optionally substituted chain hydrocarbon group having 1 to 6 carbon atoms and an optionally substituted cyclic hydrocarbon group having 3 to 18 carbon atoms (provided that -CH 2 - contained in the chain hydrocarbon group may be replaced by -O- or -CO-, and -CH 2 - contained in the cyclic hydrocarbon group may be replaced by -O-, -S-, -SO 2 - or -CO-). It is more preferably so.

[0130] L a22 Examples of the chain hydrocarbon group having 1 to 12 carbon atoms for L include linear alkanediyl groups such as methylene group, ethylene group, propane-1,3-diyl group, propane-1,2-diyl group, butane-1,4-diyl group, pentane-1,5-diyl group, hexane-1,6-diyl group, heptane-1,7-diyl group, octane-1,8-diyl group, nonane-1,9-diyl group, decane-1,10-diyl group, undecane-1,11-diyl group, dodecane-1,12-diyl group, etc., and branched alkanediyl groups such as ethane-1,1-diyl group, propane-1,1-diyl group, propane-1,2-diyl group, propane-2,2-diyl group, 1-methylpropane-1,3-diyl group, 2-methylpropane-1,3-diyl group, 2-methylpropane-1,2-diyl group, 1-dimethylpropane-1,3-diyl group, pentane-2,4-diyl group, pentane-1,4-diyl group, 2-methylbutane-1,4-diyl group, etc. The number of carbon atoms of the chain hydrocarbon group is preferably 1 to 10, more preferably 1 to 8, still more preferably 1 to 6, and even more preferably 1 to 4. The group in which -CH 2 - in the chain hydrocarbon group is replaced by -O- or -CO- includes, within the range allowed by the upper limit of the number of carbon atoms, those similar to those exemplified in this specification. L a22 The fluorine atom that L has may be one or two or more. na2 is preferably any integer from 1 to 4, and more preferably any integer from 1 to 3. L a21 Examples of the structural unit (a2) when L is a single bond or a chain hydrocarbon group include, for example, the following structural units. Among the following structural units, the structural units in which the methyl group corresponding to R a2 is replaced by a hydrogen atom or the like are also suitable structural units of the structural unit (a2) in the same manner as the following structural units. TIFF2025084121000127.tif67168

[0131] When producing a resist pattern from the resist composition of the present invention, when using a high-energy ray such as a KrF excimer laser (248 nm), an electron beam, or EUV (extreme ultraviolet light) as the exposure light source, as the structural unit (a2), a structural unit (a2) having a phenolic hydroxy group is preferable, and it is more preferable to use the structural unit (a2-A) described later. Further, when using an ArF excimer laser (193 nm) or the like, as the structural unit (a2), a structural unit (a2) having an alcoholic hydroxy group is preferable, and it is more preferable to use the structural unit (a2-C) described later. As the structural unit (a2), one kind may be contained alone, or two or more kinds may be contained.

[0132] In the structural unit (a2), when L a21 is a cyclic hydrocarbon group, examples of the structural unit having a phenolic hydroxy group or a carboxy group include a structural unit represented by the formula (a2-A) (hereinafter sometimes referred to as "structural unit (a2-A)"). TIFF2025084121000128.tif30128 [In the formula (a2-A), all the symbols have the same meanings as described above.]

[0133] R a2 and A a21 are each a group similar to those exemplified by the formula (a2). R a27 Examples of the halogen atom of R include a fluorine atom, a chlorine atom, an iodine atom, and a bromine atom. R a27Examples of the alkyl group having 1 to 6 carbon atoms which may have a halogen atom include trifluoromethyl group, difluoromethyl group, methyl group, perfluoroethyl group, 2,2,2-trifluoroethyl group, 1,1,2,2-tetrafluoroethyl group, ethyl group, perfluoropropyl group, 2,2,3,3,3-pentafluoropropyl group, propyl group, perfluorobutyl group, 1,1,2,2,3,3,4,4-octafluorobutyl group, butyl group, perfluoropentyl group, 2,2,3,3,4,4,5,5,5-nonafluoropentyl group, pentyl group, hexyl group, perfluorohexyl group, chloromethyl group, bromomethyl group, iodomethyl group. The alkyl group is preferably an alkyl group having 1 to 4 carbon atoms, more preferably an alkyl group having 1 to 3 carbon atoms, still more preferably a methyl group or an ethyl group, and even more preferably a methyl group. R a27 Examples of the alkoxy group include methoxy group, ethoxy group, propoxy group, isopropoxy group, butoxy group, sec-butoxy group, tert-butoxy group. The alkoxy group is preferably an alkoxy group having 1 to 4 carbon atoms, more preferably an alkoxy group having 1 to 3 carbon atoms, still more preferably a methoxy group or an ethoxy group, and even more preferably a methoxy group. R a27 Examples of the alkoxyalkyl group include methoxymethyl group, ethoxyethyl group, propoxymethyl group, isopropoxymethyl group, butoxymethyl group, sec-butoxymethyl group, tert-butoxymethyl group. The alkoxyalkyl group is preferably an alkoxyalkyl group having 2 to 8 carbon atoms, more preferably a methoxymethyl group or an ethoxyethyl group, and still more preferably a methoxymethyl group. R a27 Examples of the alkoxyalkoxy group include methoxymethoxy group, methoxyethoxy group, ethoxymethoxy group, ethoxyethoxy group, propoxymethoxy group, isopropoxymethoxy group, butoxymethoxy group, sec-butoxymethoxy group, tert-butoxymethoxy group. The alkoxyalkoxy group is preferably an alkoxyalkoxy group having 2 to 8 carbon atoms, more preferably a methoxyethoxy group or an ethoxyethoxy group. R a27 Examples of the alkylcarbonyl group of R include an acetyl group, a propionyl group, and a butyryl group. The alkylcarbonyl group is preferably an alkylcarbonyl group having 2 to 3 carbon atoms, and more preferably an acetyl group. R a27 Examples of the alkylcarbonyloxy group of R include an acetyloxy group, a propionyloxy group, and a butyryloxy group. The alkylcarbonyloxy group is preferably an alkylcarbonyloxy group having 2 to 3 carbon atoms, and more preferably an acetyloxy group. R a27 is preferably a halogen atom, a hydroxy group, a carboxy group, an optionally halogenated alkyl group having 1 to 4 carbon atoms, an alkoxy group having 1 to 4 carbon atoms, or an alkoxyalkoxy group having 2 to 8 carbon atoms, more preferably a fluorine atom, an iodine atom, a hydroxy group, a methyl group, a methoxy group, an ethoxy group, an ethoxyethoxy group, or an ethoxymethoxy group, and even more preferably a fluorine atom, an iodine atom, a hydroxy group, a methyl group, a methoxy group, or an ethoxyethoxy group. nA2 is preferably 1, 2, 3, or 4, more preferably 1, 2, or 3, and even more preferably 1 or 2. na21 is preferably 0, 1, 2, or 3, more preferably 0, 1, or 2, and even more preferably 0 or 1. mc is preferably 0 or 1. -X a2 -OH, in the case of a benzene ring, may be bonded to any of the o-position, m-position, or p-position with respect to the bonding position of A. Among them, at least one is preferably bonded to the m-position or p-position, and more preferably bonded to the m-position. In the case of a naphthalene ring, when the bonding position of A is at the 1-position, it may be bonded to any of the 2nd to 8th positions, and when the bonding position of A is at the 2nd position, it may be bonded to the 1st position and any of the 3rd to 8th positions. Among them, when the bonding position of A is at the 1st position, at least one is preferably bonded to the 3rd to 6th positions, and more preferably bonded to the 3rd or 4th position. A a21 a21 a21 a21 a21When the bonding position is the 2nd position, it is preferably bonded to the 4th to 7th positions, and more preferably bonded to the 5th or 6th position.

[0134] Examples of the structural unit (a2-A) include structural units derived from the monomers described in JP-A-2010-204634 and JP-A-2012-12577. Examples of the structural unit (a2-A) include structural units represented by Formula (a2-2-1) to Formula (a2-2-32), Formula (a2-3-1) to Formula (a2-3-24), and structural units in which the methyl group corresponding to R in the structural unit (a2-A) is replaced with a hydrogen atom, a halogen atom, a haloalkyl group, or another alkyl group. a2 Examples of the structural unit (a2-A) include structural units represented by Formula (a2-2-1) to Formula (a2-2-32), Formula (a2-3-1) to Formula (a2-3-24), and structural units in which the methyl group corresponding to R in the structural unit (a2-A) is replaced with a hydrogen atom, a halogen atom, a haloalkyl group, or another alkyl group. TIFF2025084121000129.tif107170

[0135] When the structural unit (a2-A) is contained in the resin (AX), the content of the structural unit (a2-A) is preferably 5 mol% or more, more preferably 10 mol% or more, still more preferably 15 mol% or more, and even more preferably 20 mol% or more, based on all the structural units. Also, it is preferably 80 mol% or less, more preferably 70 mol% or less, still more preferably 65 mol% or less, even more preferably 60 mol% or less, still even more preferably 50 mol% or less, still more preferably 45 mol% or less, and even more preferably 40 mol% or less. Specifically, it is preferably 5 to 80 mol%, more preferably 10 to 70 mol%, still more preferably 15 to 65 mol%, and even more preferably 20 to 65 mol%. The structural unit (a2-A) is a compound that induces the structural unit (a2-A) (for example, the -CH 2 -C(-R a2 )- of the structural unit (a2-A) is the CH of the double bond before cleavage 2 =C(-R a2By polymerizing a compound (such as (a2-A’)) in the state of , it can be incorporated into the resin (A). Further, for example, after polymerization using the structural unit (a1-4), it can be incorporated into the resin (AX) by treatment with an acid such as p-toluenesulfonic acid. Also, after polymerization using acetoxystyrene or the like, the structural unit (a2-A) can be incorporated into the resin (AX) by treatment with an alkali such as tetramethylammonium hydroxide.

[0136] When the structural unit (a2-A) is contained in the resin (AX), it is preferably contained two or more kinds of the structural unit (a2-A). For example, it is preferable to use in combination the structural unit represented by the formula (a2-A1) (hereinafter sometimes referred to as "structural unit (a2-A1)") and the structural unit represented by the formula (a2-A2) (hereinafter sometimes referred to as "structural unit (a2-A2)"). TIFF2025084121000131.tif52136[In the formula (a2-A1) and the formula (a2-A2), R a50 and A a50 each represent the same meaning as R of the formula (a2) a2 and A a21 respectively. mb1 represents any integer from 0 to 4. R a52 represents a halogen atom. R a53 represents an alkyl group having 1 to 6 carbon atoms, an alkoxy group having 1 to 6 carbon atoms, an alkoxyalkyl group having 2 to 12 carbon atoms, an alkoxyalkoxy group having 2 to 12 carbon atoms, an alkylcarbonyl group having 2 to 4 carbon atoms, an alkylcarbonyloxy group having 2 to 4 carbon atoms, an acryloyloxy group or a methacryloyloxy group. mb2 and mb3 each independently represent any integer from 0 to 4. When mb2 is 2 or more, a plurality of R a52 may be the same or different from each other. When mb3 is 2 or more, a plurality of R a53 may be the same or different from each other, and 1 ≦ mb2 + mb3 ≦ 4 is satisfied. R a52As the halogen atom, a fluorine atom or an iodine atom is preferred. R a53 As the alkyl group having 1 to 6 carbon atoms, the alkoxy group having 1 to 6 carbon atoms, the alkoxyalkyl group having 2 to 12 carbon atoms, the alkoxyalkoxy group having 2 to 12 carbon atoms, the alkylcarbonyl group having 2 to 4 carbon atoms, the alkylcarbonyloxy group having 2 to 4 carbon atoms, the acryloyloxy group or the methacryloyloxy group, each is the same as R in formula (a2-A) a27 and examples thereof include a methyl group, a methoxy group, an ethoxy group, an ethoxyethoxy group or an ethoxy methoxy group, with a methoxy group or an ethoxyethoxy group being more preferred, and a methoxy group or an ethoxyethoxy group being even more preferred. mb1 is preferably any integer from 0 to 3, more preferably any integer from 0 to 2, and even more preferably 0 or 1. mb2 is preferably any integer from 0 to 3, more preferably any integer from 1 to 3, and even more preferably 1 or 2. mb3 is preferably any integer from 0 to 3, more preferably any integer from 0 to 2, and even more preferably 0 or 1. In the resin (AX), the content ratio of the structural unit (a2-A1) and the structural unit (a2-A2) is not particularly limited, but is preferably 1:10 to 10:1, and more preferably 5:5 to 3:7.

[0137] In the structural unit (a2), when L a21 is a cyclic hydrocarbon group, examples of the structural unit having an alcoholic hydroxy group or a carboxy group include the structural unit represented by formula (a2-B) (hereinafter sometimes referred to as "structural unit (a2-B)"), the structural unit represented by formula (a2-C) (hereinafter sometimes referred to as "structural unit (a2-C)"), and the structural unit represented by formula (a2-D) (hereinafter sometimes referred to as "structural unit (a2-D)"). TIFF2025084121000132.tif46100 [In formula (a2-B) and formula (a2-C), R a2 represents the same meaning as in formula (a2). R a27 represents the same meaning as in formula (a2-A). L a25 represents -O- or *-O-(CH 2 ) k2 -CO-O-, where k2 represents any integer from 1 to 7. * represents the bonding site with -CO-. X a2 represents a single bond or -CO-. R a25 and R a26 each independently represent a hydrogen atom, a methyl group, or a hydroxy group. nB2 represents any integer from 1 to 5. When nB2 is 2 or more, the plurality of X a2 may be the same as or different from each other. nB22 represents any integer from 0 to 8. When nB22 is 2 or more, the plurality of R a27 may be the same as or different from each other. nC22 represents any integer from 0 to 10. When nC22 is 2 or more, the plurality of R a27 may be the same as or different from each other. L a25 is preferably -O-, -O-(CH 2 ) f1 -CO-O- (where f1 represents any integer from 1 to 4), and more preferably -O-. R a2 is preferably a methyl group. X a2 is preferably a single bond. R a25 is preferably a hydrogen atom. R a26 is preferably a hydrogen atom or a hydroxy group. R a27is preferably a halogen atom, a hydroxy group, a carboxy group, an alkyl group having 1 to 4 carbon atoms which may have a halogen atom, an alkoxy group having 1 to 4 carbon atoms or an alkoxyalkoxy group having 2 to 8 carbon atoms, more preferably a fluorine atom, an iodine atom, a hydroxy group, a methyl group, a methoxy group, an ethoxy group, an ethoxyethoxy group or an ethoxy methoxy group, and even more preferably a fluorine atom, an iodine atom, a hydroxy group, a methyl group, a methoxy group or an ethoxyethoxy group. nB2 is preferably 1, 2, 3 or 4, more preferably 1, 2 or 3, and even more preferably 1 or 2. nB22 is preferably any integer from 0 to 3, more preferably 0, 1 or 2, and even more preferably 0 or 1. nC22 is preferably any integer from 0 to 6, more preferably any integer from 0 to 3, and even more preferably 0 or 1.

[0138] Examples of the structural unit (a2-B) and the structural unit (a2-C) include structural units derived from the monomers described in JP-A-2010-204646, the following structural units, and methyl groups or hydrogen atoms corresponding to R in the following structural units, which are replaced with hydrogen atoms, halogen atoms, haloalkyl groups or other alkyl groups. Among them, the structural units represented by any of formula (a2-B-1) to formula (a2-B-5) and formula (a2-C-1) to formula (a2-C-9) are preferable. a2 When the resin (AX) contains the structural unit (a2-B) or the structural unit (a2-C), the content thereof is 1 mol% or more, preferably 2 mol% or more, based on all the structural units of the resin (AX). Further, it is 45 mol% or less, preferably 40 mol% or less, more preferably 35 mol% or less, even more preferably 20 mol% or less, and still more preferably 10 mol% or less. Specifically, 1 to 45 mol% is mentioned, preferably 1 to 40 mol%, more preferably 1 to 35 mol%, even more preferably 1 to 20 mol%, and still more preferably 1 to 10 mol%. TIFF2025084121000133.tif80164 When the resin (AX) contains the structural unit (a2-B) or the structural unit (a2-C), the content thereof is 1 mol% or more, preferably 2 mol% or more, based on all the structural units of the resin (AX). Further, it is 45 mol% or less, preferably 40 mol% or less, more preferably 35 mol% or less, even more preferably 20 mol% or less, and still more preferably 10 mol% or less. Specifically, 1 to 45 mol% is mentioned, preferably 1 to 40 mol%, more preferably 1 to 35 mol%, even more preferably 1 to 20 mol%, and still more preferably 1 to 10 mol%.

[0139] TIFF2025084121000134.tif51106[in formula (a2-D), R a2 and A a21 each represent the same meaning as in formula (a2). R a27 represents the same meaning as in formula (a2-A). R a21 and R a22 each independently represent an alkyl fluoride group having 1 to 4 carbon atoms. L a24 represents a single bond or an alkanediyl group having 1 to 3 carbon atoms, and the alkanediyl group may be substituted with a fluorine atom. nD2 represents any integer from 1 to 5. When nD2 is 2 or more, the groups within multiple parentheses may be the same as or different from each other. nD22 represents any integer from 0 to 4. When nD22 is 2 or more, the plurality of a27 Rs may be the same as or different from each other. However, 1 ≦ nD2 + nD22 ≦ 5.] R a21 and R a22 As the alkyl fluoride groups of R and R, independently of each other, a trifluoromethyl group, a 2,2,2-trifluoroethyl group, a 3,3,3-trifluoropropyl group, a 4,4,4-trifluorobutyl group, etc. may be mentioned. R a21 and R a22 are preferably a trifluoromethyl group. L a24 As the alkanediyl group of L, a methylene group, an ethane-1,1-diyl group, a propane-1,1-diyl group, a propane-2,2-diyl group, etc. may be mentioned. L a24 is preferably a single bond or a methylene group. R a27is preferably a halogen atom, a hydroxy group, a carboxy group, an alkyl group having 1 to 4 carbon atoms which may have a halogen atom, an alkoxy group having 1 to 4 carbon atoms or an alkoxyalkoxy group having 2 to 8 carbon atoms, more preferably a fluorine atom, an iodine atom, a hydroxy group, a methyl group, a methoxy group, an ethoxy group, an ethoxyethoxy group or an ethoxy methoxy group, and still more preferably a fluorine atom, an iodine atom, a hydroxy group, a methyl group, a methoxy group or an ethoxyethoxy group. nD2 is preferably 1, 2, 3 or 4, more preferably 1, 2 or 3, still more preferably 1 or 2, and even more preferably 1. Further, preferably, nD2 is 1 and the group in parentheses is bonded to the para position. nD22 is preferably any integer from 0 to 3, more preferably any integer from 0 to 2, still more preferably 0 or 1, and even more preferably 0.

[0140] As the structural unit (a2-D), a structural unit represented by the following formula (a2-D1) (hereinafter sometimes referred to as "structural unit (a2-D1)") is more preferable. TIFF2025084121000135.tif51107[In formula (a2-D1), R a2 、A a21 、R a27 、nD2 and nD22 represent the same meanings as in formula (a2-D).] In formula (a2-D1), R a2 is preferably a hydrogen atom or a methyl group. A a21 is preferably a single bond.

[0141] Examples of the structural unit (a2-D) include the structural units described below. TIFF2025084121000136.tif62167

[0142] In the structural units represented by formulas (a2-D-1) to (a2-D-8), R a2A structural unit in which a hydrogen atom corresponding to is replaced with a methyl group or the like, and in the structural units represented by Formula (a2-D-9) to Formula (a2-D-16), R a2 Structural units in which a methyl group corresponding to a2 is replaced with a hydrogen atom or the like can also be cited as specific examples of the structural unit (a2-D). Among them, the structural units represented by Formula (a2-D-1) to Formula (a2-D-8) are preferable, the structural units represented by Formula (a2-D-1) to Formula (a2-D-4) are more preferable, and the structural unit represented by Formula (a2-D-1) is even more preferable.

[0143] When the resin (AX) contains the structural unit (a2-D), its content is preferably 3 mol% or more, more preferably 5 mol% or more, and even more preferably 10 mol% or more with respect to all the structural units of the resin (AX). Also, it is preferably 80 mol% or less, more preferably 75 mol% or less, even more preferably 70 mol% or less, and still more preferably 65 mol% or less. Specifically, it is preferably 3 to 80 mol%, more preferably 5 to 75 mol%, even more preferably 10 to 70 mol%, and still more preferably 10 to 65 mol%. When the resin (AX) contains the structural unit (a2-D) or the structural unit (a2-D1), the content of the structural unit (a2-D) or the structural unit (a2-D1) in the resin (AX) is 1 mol% or more, preferably 3 mol% or more, more preferably 5 mol% or more, and even more preferably 10 mol% or more with respect to all the structural units. Also, it is 100 mol% or less, preferably 80 mol% or less, more preferably 75 mol% or less, even more preferably 70 mol% or less, and still more preferably 65 mol% or less. Specifically, 1 to 100 mol% can be cited, preferably 3 to 80 mol%, more preferably 5 to 75 mol%, even more preferably 10 to 70 mol%, and still more preferably 10 to 65 mol%. When the resin (AX) contains the structural unit (a2-D), it is preferably used in combination with the structural unit (a2-A), and more preferably used in combination with the structural unit (a2-A1) and the structural unit (a2-D). When the structural unit (a2-A) and the structural unit (a2-D) are used in combination, the content ratios of the structural unit (a2-A) and the structural unit (a2-D) in the resin (AX) are not particularly limited, but are preferably 1:10 to 10:1, and more preferably 5:5 to 3:7.

[0144] 〈Structural unit (a3)〉 The structural unit (a3) is a structural unit having a lactone ring and no acid-labile group. The lactone ring possessed by the structural unit (a3) may be a monocyclic ring such as a β-propiolactone ring, a γ-butyrolactone ring, or a δ-valerolactone ring, or may be a condensed ring of a monocyclic lactone ring and another ring. Preferably, a γ-butyrolactone ring, an adamantane lactone ring, or a bridged ring containing a γ-butyrolactone ring structure (for example, a structural unit represented by the following formula (a3-2)) can be mentioned.

[0145] The structural unit (a3) is preferably a structural unit represented by the formula (a3-1), the formula (a3-2), the formula (a3-3), or the formula (a3-4). These may be contained alone or in combination of two or more. TIFF2025084121000137.tif48155[In the formula (a3-1), the formula (a3-2), the formula (a3-3), and the formula (a3-4), L a4 、L a5 and L a6 each independently represents a group represented by -O- or *-O-(CH 2 ) k3 -CO-O- (k3 represents an integer of 1 to 7). L a7 is -O-, *-O-L a8 -O-, *-O-L a8 -CO-O-, *-O-L a8 -CO-O-L a9 -CO-O- or *-O-L a8 -O-CO-L a9represents -O-. L a8 and L a9 each independently represents an alkanediyl group having 1 to 6 carbon atoms. * represents the bonding site with the carbonyl group. R a18 R a19 R a20 and R a24 each independently represents an alkyl group having 1 to 6 carbon atoms which may have a halogen atom, a hydrogen atom or a halogen atom. X a3 represents -CH 2 - or an oxygen atom. R a21 represents an aliphatic hydrocarbon group having 1 to 4 carbon atoms. R a22 R a23 and R a25 each independently represents a carboxy group, a cyano group or an aliphatic hydrocarbon group having 1 to 4 carbon atoms. p1 represents any integer from 0 to 5. q1 represents any integer from 0 to 3. r1 represents any integer from 0 to 3. w1 represents any integer from 0 to 8. When p1, q1, r1 and / or w1 is 2 or more, the plurality of R a21 R a22 R a23 and / or R a25 may be the same as or different from each other.

[0146] R a21 R a22 R a23 and R a25 Examples of the aliphatic hydrocarbon group in R R a18 R a19 R a20 and R a24 include alkyl groups such as methyl group, ethyl group, propyl group, isopropyl group, butyl group, sec-butyl group and tert-butyl group. a2 a2Examples thereof include those similar to those exemplified above. L a8 and L a9 Examples of the alkanediyl group in a9 include a methylene group, an ethylene group, a propane-1,3-diyl group, a propane-1,2-diyl group, a butane-1,4-diyl group, a pentane-1,5-diyl group, a hexane-1,6-diyl group, a butane-1,3-diyl group, a 2-methylpropane-1,3-diyl group, a 2-methylpropane-1,2-diyl group, a pentane-1,4-diyl group, a 2-methylbutane-1,4-diyl group, and the like. L a4 ~L a6 are each independently preferably -O- or, *-O-(CH 2 ) k3 -CO-O- wherein k3 is an integer of any one of 1 to 4, more preferably -O- and, *-O-CH 2 -CO-O-, still more preferably an oxygen atom. L a7 is preferably -O- or *-O-L a8 -CO-O-, more preferably -O-, -O-CH 2 -CO-O- or -O-C 2 H 4 -CO-O-. R a18 、R a19 、R a20 and R a24 are preferably a hydrogen atom or an alkyl group having 1 to 4 carbon atoms, more preferably a hydrogen atom, a methyl group or an ethyl group, still more preferably a hydrogen atom or a methyl group. R a21 is preferably a methyl group. R a22 、R a23 and R a25 are each independently preferably a carboxy group, a cyano group or a methyl group. p1, q1 and r1 are each independently preferably an integer of any one of 0 to 2, more preferably 0 or 1. w1 is preferably an integer of any one of 0 to 2, more preferably 0 or 1. In particular, formula (a3-4) is preferably formula (a3-4)'. TIFF2025084121000138.tif3848 (wherein R a24 , L a7 represents the same meaning as above.)

[0147] Examples of the structural unit (a3) include structural units derived from the monomers described in JP-A-2010-204646, the monomers described in JP-A-2000-122294, and the monomers described in JP-A-2012-41274. Examples of the structural unit (a3) include structural units represented by any of formula (a3-1-1), formula (a3-1-2), formula (a3-2-1), formula (a3-2-2), formula (a3-3-1), formula (a3-3-2), and formula (a3-4-1) to formula (a3-4-12), and, in the above structural units, structural units in which the methyl groups corresponding to R a18 , R a19 , R a20 and R a24 are replaced with hydrogen atoms are preferred. TIFF2025084121000139.tif108163 When the resin (AX) contains the structural unit (a3), the total content thereof is 1 mol% or more, preferably 3 mol% or more, more preferably 5 mol% or more, still more preferably 10 mol% or more, based on all the structural units of the resin (AX). Further, it is 70 mol% or less, preferably 65 mol% or less, more preferably 60 mol% or less, still more preferably 55 mol% or less, even more preferably 50 mol% or less, still even more preferably 45 mol% or less, and even more preferably 30 mol% or less. Specifically, it is 1 to 70 mol%, preferably 3 to 70 mol%, more preferably 3 to 65 mol%, still more preferably 5 to 60 mol%, and even more preferably 5 to 55 mol%. Further, the content rate of the structural unit (a3-1), the structural unit (a3-2), the structural unit (a3-3), or the structural unit (a3-4) is preferably 1 mol% or more, more preferably 3 mol% or more, still more preferably 5 mol% or more, and even more preferably 10 mol% or more, respectively, based on all the structural units of the resin (AX). Further, it is preferably 60 mol% or less, more preferably 55 mol% or less, still more preferably 50 mol% or less, even more preferably 45 mol% or less, still even more preferably 40 mol% or less, even more preferably 35 mol% or less, and even more preferably 30 mol% or less. Specifically, 1 to 60 mol% is preferable, 3 to 60 mol% is more preferable, 3 to 55 mol% is still more preferable, 5 to 55 mol% is even more preferable, 5 to 50 mol% is even more preferably, and 10 to 50 mol% is still even more preferable.

[0148] <Structural unit (a4)> The structural unit represented by the formula (a4) is shown below. TIFF2025084121000140.tif3355[In the formula (a4), R 41 represents a hydrogen atom or a methyl group. R 42 represents a saturated hydrocarbon group having a halogen atom with 1 to 24 carbon atoms, and -CH 2 - contained in the saturated hydrocarbon group may be replaced by -O- or -CO-.

[0149] R 42 The saturated hydrocarbon group represented by is a linear or branched chain saturated hydrocarbon group, a monocyclic or polycyclic alicyclic saturated hydrocarbon group, and a group formed by combining these, etc. Examples of the chain saturated hydrocarbon group include linear alkyl groups such as methyl group, ethyl group, propyl group, butyl group, pentyl group, hexyl group, heptyl group, octyl group, decyl group, dodecyl group, pentadecyl group, hexadecyl group, heptadecyl group, and octadecyl group, and branched alkyl groups such as isopropyl group and isobutyl group. Examples of the monocyclic or polycyclic alicyclic saturated hydrocarbon group include a monocyclic alicyclic saturated hydrocarbon group which is a monocyclic cycloalkyl group such as a cyclopentyl group, a cyclohexyl group, a cycloheptyl group, a cyclooctyl group, etc.; and a polycyclic alicyclic saturated hydrocarbon group which is a polycyclic cycloalkyl group such as a decahydronaphthyl group, an adamantyl group, a norbornyl group, and the following group (* represents the bonding site). Examples of the group formed by the combination of and TIFF2025084121000141.tif10146 include a group formed by combining one or more alkyl groups or one or more alkanediyl groups with one or more alicyclic saturated hydrocarbon groups, such as -alkanediyl group-alicyclic saturated hydrocarbon group, -alicyclic saturated hydrocarbon group-alkyl group, -alkanediyl group-alicyclic saturated hydrocarbon group-alkyl group, etc. Examples of the alkanediyl group include linear alkanediyl groups such as a methylene group, an ethylene group, a propane-1,3-diyl group, a butane-1,4-diyl group, a pentane-1,5-diyl group, a hexane-1,6-diyl group, etc.; and branched alkanediyl groups such as a propane-1,2-diyl group, a butane-1,3-diyl group, a 2-methylpropane-1,2-diyl group, a 1-methylbutane-1,4-diyl group, a 2-methylbutane-1,4-diyl group, etc. The terminal of the branched alkanediyl group may be a methyl group. R 42 Examples of the halogen atom contained in the saturated hydrocarbon group included in 42 include a fluorine atom, a chlorine atom, a bromine atom, or an iodine atom. R 42 Examples of the group in which -CH 2 - in the saturated hydrocarbon group contained in 42 is replaced by -O- or -CO- include a hydroxy group (a group in which -CH 2 - contained in the methyl group is replaced by -O-), a carboxy group (a group in which -CH 2 -CH 2 - contained in the ethyl group is replaced by -O-CO-), a carbonyl group (a group in which -CH 2 - contained in the methylene group is replaced by -CO-), and an oxy group (a group in which -CH 2- is a group replaced by -O-, an alkoxy group (-CH at any position in the alkyl group) 2 - is a group replaced by -O-, an alkoxycarbonyl group (-CH at any position in the alkyl group) 2 -CH 2 - is a group replaced by -O-CO-, an alkylcarbonyl group (-CH at any position in the alkyl group) 2 - is a group replaced by -CO-, an alkylcarbonyloxy group (-CH at any position in the alkyl group) 2 -CH 2 - is a group replaced by -CO-O-, an alkanedioxy group (-CH at any position in the alkanedioyl group) 2 - is a group replaced by -O-, an alkanedioxycarbonyl group (-CH at any position in the alkanedioyl group) 2 -CH 2 - is a group replaced by -O-CO-, an alkanedioylcarbonyl group (-CH at any position in the alkanedioyl group) 2 - is a group replaced by -CO-, an alkanedioylcarbonyloxy group (-CH at any position in the alkanedioyl group) 2 -CH 2 - is a group replaced by -CO-O-, a cycloalkoxy group, a cycloalkylalkoxy group, a group formed by combining two or more of these groups, etc. These replaced groups include those similar to the groups exemplified in this specification within the range allowed by the upper limit of the number of carbon atoms.

[0150] As the structural unit (a4), R 42 is preferably a saturated hydrocarbon group having a fluorine atom, R 42Examples of the structural unit (a4) which is a saturated hydrocarbon group having a fluorine atom include a structural unit represented by the formula (a4-1) (hereinafter sometimes referred to as "structural unit (a4-1)"), a structural unit represented by the formula (a4-2) (hereinafter sometimes referred to as "structural unit (a4-2)"), a structural unit represented by the formula (a4-3) (hereinafter sometimes referred to as "structural unit (a4-3)"), and a structural unit represented by the formula (a4-A) (hereinafter sometimes referred to as "structural unit (a4-A)"). The structural unit represented by the formula (a4-1) is the structural unit shown below. TIFF2025084121000142.tif4764[In the formula (a4-1), R 41 represents a hydrogen atom or a methyl group. L 41 represents a single bond or an alkanediyl group having 1 to 4 carbon atoms. L 42f represents an alkanediyl group having 1 to 8 carbon atoms having a fluorine atom or a cycloalkanediyl group having 3 to 12 carbon atoms having a fluorine atom. R 42f represents a hydrogen atom or a fluorine atom.]

[0151] Examples of the alkanediyl group in L 41 include linear alkanediyl groups such as a methylene group, an ethylene group, a propane-1,3-diyl group, and a butane-1,4-diyl group, and branched alkanediyl groups such as an ethane-1,1-diyl group, a propane-1,2-diyl group, a butane-1,3-diyl group, a 2-methylpropane-1,3-diyl group, and a 2-methylpropane-1,2-diyl group. The terminal of the branched alkanediyl group may be a methyl group. L 42fExamples of the alkanediyl group having a fluorine atom in [[]] include a methylene group having a fluorine atom, an ethylene group having a fluorine atom, a propane-1,3-diyl group having a fluorine atom, a butane-1,4-diyl group having a fluorine atom, a pentane-1,5-diyl group having a fluorine atom, a hexane-1,6-diyl group having a fluorine atom, a heptane-1,7-diyl group having a fluorine atom, an octane-1,8-diyl group having a fluorine atom, and other linear alkanediyl groups having a fluorine atom; Examples of the branched alkanediyl group having a fluorine atom include an ethane-1,1-diyl group having a fluorine atom, a propane-1,1-diyl group having a fluorine atom, a propane-1,2-diyl group having a fluorine atom, a propane-2,2-diyl group having a fluorine atom, a pentane-2,4-diyl group having a fluorine atom, a 2-methylpropane-1,3-diyl group having a fluorine atom, a 2-methylpropane-1,2-diyl group having a fluorine atom, a pentane-1,4-diyl group having a fluorine atom, a 2-methylbutane-1,4-diyl group having a fluorine atom, and the like. The terminal of the branched alkanediyl group may be a methyl group which may have a fluorine atom. L 42f Examples of the cycloalkanediyl group having a fluorine atom in [[]] include a cyclobutane-1,3-diyl group having a fluorine atom, a cyclopentane-1,3-diyl group having a fluorine atom, a cyclohexane-1,4-diyl group having a fluorine atom, a cyclohexene-3,6-diyl group having a fluorine atom, a cycloheptane-1,4-diyl group having a fluorine atom, a cyclooctane-1,5-diyl group having a fluorine atom, and other monocyclic cycloalkanediyl groups having a fluorine atom, Examples of the polycyclic cycloalkanediyl group having a fluorine atom include a norbornane-1,4-diyl group having a fluorine atom, a norbornane-2,5-diyl group having a fluorine atom, a 5-norbornene-2,3-diyl group having a fluorine atom, an adamantane-1,5-diyl group having a fluorine atom, an adamantane-2,6-diyl group having a fluorine atom, and the like. L 42fThe number of fluorine atoms in the alkanediyl group and the cycloalkanediyl group having a fluorine atom is preferably 1 or more, and more preferably 2 or more. L 42f The alkanediyl group and the cycloalkanediyl group having a fluorine atom in are preferably a perfluoroalkanediyl group and a perfluorocycloalkanediyl group, respectively.

[0152] L 42f Examples of the perfluoroalkanediyl group in include a difluoromethylene group, a perfluoroethylene group, a perfluoroethylfluoromethylene group, a perfluoropropane-1,3-diyl group, a perfluoropropane-1,2-diyl group, a perfluoropropane-2,2-diyl group, a perfluorobutane-1,4-diyl group, a perfluorobutane-2,2-diyl group, a perfluorobutane-1,2-diyl group, a perfluoropentane-1,5-diyl group, a perfluoropentane-2,2-diyl group, a perfluoropentane-3,3-diyl group, a perfluorohexane-1,6-diyl group, a perfluorohexane-2,2-diyl group, a perfluorohexane-3,3-diyl group, a perfluoroheptane-1,7-diyl group, a perfluoroheptane-2,2-diyl group, a perfluoroheptane-3,4-diyl group, a perfluoroheptane-4,4-diyl group, a perfluorooctane-1,8-diyl group, a perfluorooctane-2,2-diyl group, a perfluorooctane-3,3-diyl group, a perfluorooctane-4,4-diyl group, and the like. L 42f Examples of the perfluorocycloalkanediyl group in include a perfluorocyclohexanediyl group, a perfluorocyclopentanediyl group, a perfluorocycloheptanediyl group, a perfluoroadamantanediyl group, and the like.

[0153] L 41 is preferably a single bond or an alkanediyl group having 1 to 3 carbon atoms, more preferably a single bond, a methylene group or an ethylene group, and even more preferably a single bond or a methylene group. L 42fis preferably a perfluoroalkanediyl group having 1 to 8 carbon atoms or a perfluorocycloalkanediyl group having 3 to 12 carbon atoms, more preferably a perfluoroalkanediyl group having 1 to 6 carbon atoms, and still more preferably a perfluoroalkanediyl group having 1 to 3 carbon atoms.

[0154] Examples of the structural unit (a4-1) include the structural units shown below and the structural units in the structural unit (a4-1) in the following structural units where the methyl group corresponding to R 41 is replaced by a hydrogen atom. The structural unit represented by the formula (a4-2) is the structural unit shown below. TIFF2025084121000144.tif5575 [In the formula (a4-2), R 41 represents a hydrogen atom or a methyl group. L 43f represents a saturated hydrocarbon group having 1 to 20 carbon atoms which may have a fluorine atom, and -CH 2 - contained in the saturated hydrocarbon group may be replaced by -O- or -CO-. R 43f represents a saturated hydrocarbon group having 1 to 20 carbon atoms which may have a fluorine atom, and -CH 2 - contained in the saturated hydrocarbon group may be replaced by -O- or -CO-. However, at least one of L 43f and R 43f has a fluorine atom, and the upper limit of the total number of carbon atoms of L 43f and R 43f is 21.

[0155] Examples of the saturated hydrocarbon group in L 43f and R 43f include linear or branched chain saturated hydrocarbon groups, monocyclic or polycyclic alicyclic saturated hydrocarbon groups, and groups formed by combining these. Examples of the saturated hydrocarbon group in L 43f and R 43f are as follows. Examples of the saturated hydrocarbon group in L 43f and R 43fAs long as the upper limit of the total number of carbon atoms permits, R in formula (a4) 42 includes the same groups as the saturated hydrocarbon groups exemplified as the saturated hydrocarbon groups of 42 .

[0156] L 43f As the saturated hydrocarbon group of 43f , an alkanediyl group having 1 to 6 carbon atoms or a group represented by formula (L43f-1) is preferable. TIFF2025084121000145.tif13119 [In formula (L43f-1), s represents 0 or 1. L 45f and L 46f each independently represent a divalent saturated hydrocarbon group having 1 to 5 carbon atoms which may have a fluorine atom. L 47f represents a single bond or a divalent saturated hydrocarbon group having 1 to 5 carbon atoms which may have a fluorine atom. X 46f and X 47f each independently represent -O-, -CO-, -CO-O- or -O-CO-. However, the total number of carbon atoms of L 45f L 46f L 47f X 46f and X 47f is 7 or less. * and ** are bonding sites, and ** is the bonding site with -O-CO-R 43f

[0157] As the divalent saturated hydrocarbon groups represented by L 45f L 46f and L 47f in the group represented by formula (L43f-1), there may be mentioned linear or branched alkanediyl groups, monocyclic or polycyclic divalent alicyclic saturated hydrocarbon groups, and divalent saturated hydrocarbon groups formed by combining an alkanediyl group and a divalent alicyclic saturated hydrocarbon group. Specifically, there may be mentioned a methylene group, an ethylene group, a propane-1,3-diyl group, a propane-1,2-diyl group, a butane-1,4-diyl group, a 1-methylpropane-1,3-diyl group, a 2-methylpropane-1,3-diyl group, a 2-methylpropane-1,2-diyl group and the like.​ s is preferably 0.

[0158] Examples of the group represented by formula (L43f-1) include the following groups. In the following examples, * and ** each represent a bonding site, and ** is the bonding site with -O-CO-R 43f and. TIFF2025084121000146.tif47140

[0159] R 43f is preferably a saturated hydrocarbon group having a fluorine atom. In this case, examples of the structural unit represented by formula (a4-2) include the structural units represented by formula (a4-2A) or (formula a4-2B). TIFF2025084121000147.tif71102[In formula (a4-2A) and formula (a4-2B), R 41 and L 43f represent the same as those in formula (a4-2). R 43fA represents a saturated hydrocarbon group having 1 to 20 carbon atoms and having a fluorine atom. A 43f represents a divalent saturated hydrocarbon group having 1 to 17 carbon atoms which may have a fluorine atom, and -CH 2 - contained in the saturated hydrocarbon group may be replaced by -O- or -CO-. X 43 represents **-O-CO- or **-CO-O-, and ** represents the bonding site with A 43f and. R 43fB represents a saturated hydrocarbon group having 1 to 17 carbon atoms which may have a fluorine atom. However, in formula (a4-2A), the total number of carbon atoms of L 43f and R 43fA is 21 or less, and in formula (a4-2B), the total number of carbon atoms of L 43f , A 43f , X 43 and R 43fB is 21 or less, and the total number of carbon atoms of A 43f and R 43fBAt least one of them has at least one fluorine atom. R 43fA The saturated hydrocarbon group of R, as long as the upper limit of the number of carbon atoms permits, is a saturated hydrocarbon group similar to the saturated hydrocarbon group exemplified by R 42 and includes saturated hydrocarbon groups similar to the saturated hydrocarbon groups exemplified by R R 43fA is preferably an alkyl group having 1 to 13 carbon atoms and having a fluorine atom, a cycloalkyl group having 3 to 12 carbon atoms and having a fluorine atom, or a group combining them, *-(CF 2 ) n43f -R 42’ (* represents the bonding site with the carbonyl group. n43f represents any integer from 1 to 6. R 42’ represents a hydrogen atom or a fluorine atom.) or a perfluorocycloalkyl group having 3 to 12 carbon atoms is more preferable. A 43f and the saturated hydrocarbon group of R, as long as the upper limit of the number of carbon atoms permits, is a saturated hydrocarbon group similar to the saturated hydrocarbon group exemplified by R in formula (a4) 43fB and includes saturated hydrocarbon groups similar to the saturated hydrocarbon groups exemplified by R 42 in formula (a4). A 43f is preferably a divalent chain-like saturated hydrocarbon group which may have a fluorine atom, a divalent alicyclic saturated hydrocarbon group, or a group combining them, more preferably a divalent chain-like saturated hydrocarbon group having a fluorine atom, and even more preferably a fluoroalkanediyl group having 1 to 6 carbon atoms. R 43fBThe saturated hydrocarbon group which may have a fluorine atom is preferably a chain saturated hydrocarbon group, an alicyclic saturated hydrocarbon group or a combination thereof which may have a fluorine atom, more preferably an alkyl group having 1 to 12 carbon atoms, a cycloalkyl group having 3 to 12 carbon atoms or a combination thereof which may have a fluorine atom, and still more preferably a trifluoromethyl group, a difluoromethyl group, a methyl group, a perfluoroethyl group, a 2,2,2-trifluoroethyl group, a 1,1,2,2-tetrafluoroethyl group, an ethyl group, a perfluoropropyl group, a 2,2,3,3,3-pentafluoropropyl group, a propyl group, a perfluorobutyl group, a 1,1,2,2,3,3,4,4-octafluorobutyl group, a butyl group, a perfluoropentyl group, a 2,2,3,3,4,4,5,5,5-nonafluoropentyl group, a pentyl group, a hexyl group, a perfluorohexyl group, a heptyl group, a perfluoroheptyl group, an octyl group, a perfluorooctyl group and other alkyl fluoride groups, a cyclopropylmethyl group, a cyclopropyl group, a cyclobutylmethyl group, a cyclopentyl group, a cyclohexyl group, a perfluorocyclohexyl group, an adamantyl group, an adamantylmethyl group, an adamantyldimethyl group, a norbornyl group, a norbornylmethyl group, a perfluoroadamantyl group, a perfluoroadamantylmethyl group and the like.

[0160] In formula (a4-2B), *-A f43 -X 43 -R f43B An example of the structure that the group represented by can take is the following structure (* is the bonding site with the carbonyl group). TIFF2025084121000148.tif15170

[0161] Examples of the structural unit represented by formula (a4-2A) include the following structural units and the structural units in which the methyl group corresponding to R in the structural unit represented by formula (a4-2A) below is replaced by a hydrogen atom. 41 are mentioned. TIFF2025084121000149.tif99167

[0162] Examples of the structural unit represented by formula (a4-2B) include the following structural units and structural units in which the methyl group corresponding to R in the following structural units is replaced with a hydrogen atom. 41 Examples include structural units in which the methyl group corresponding to R is replaced with a hydrogen atom. TIFF2025084121000150.tif111163

[0163] Examples of the structural unit (a4) also include the structural unit represented by formula (a4-3). TIFF2025084121000151.tif5577[In formula (a4-3), R 41 represents a hydrogen atom or a methyl group. L 44f represents a saturated hydrocarbon group having 1 to 20 carbon atoms which may have a fluorine atom, and -CH 2 - contained in the saturated hydrocarbon group may be replaced with -O- or -CO-. R 44f represents a saturated hydrocarbon group having 1 to 20 carbon atoms which may have a fluorine atom, and -CH 2 - contained in the saturated hydrocarbon group may be replaced with -O- or -CO-. However, at least one of L 44f and R 44f has a fluorine atom, and the upper limit of the total number of carbon atoms of L 44f and R 44f is 21.]

[0164] Examples of the saturated hydrocarbon groups in L 44f and R 44f include linear or branched chain saturated hydrocarbon groups, monocyclic or polycyclic alicyclic saturated hydrocarbon groups, and groups formed by combining these. Examples of the saturated hydrocarbon groups in L 44f and R 44f are, as long as the upper limit of the total number of carbon atoms of L 44f and R 44f allows, the same groups as the saturated hydrocarbon groups exemplified as the saturated hydrocarbon groups of R 42 in formula (a4). L 44fis an alkanediyl group having 1 to 14 carbon atoms (in the alkanediyl group, -CH 2 - may be replaced by -O- or -CO-).), and it is preferably -(CH 2 ) j1 -, -(CH 2 ) j2 -O-(CH 2 ) j3 -, or -(CH 2 ) j4 -CO-O-(CH 2 ) j5 - (where j1 to j5 each independently represent an integer from 1 to 6).) is more preferable. Further, an alkanediyl group having 1 to 4 carbon atoms (one -CH 2 - in the alkanediyl group may be replaced by -O-, and one -CH 2 -CH 2 - in the alkanediyl group may be replaced by -CO-O- or -O-CO-).) is even more preferable. R 44f is preferably a saturated hydrocarbon group having 1 to 10 carbon atoms having a fluorine atom, more preferably an alkyl group having 1 to 10 carbon atoms having a fluorine atom, an alicyclic saturated hydrocarbon group having 3 to 10 carbon atoms having a fluorine atom, or a group combining them, even more preferably an alkyl group having 1 to 10 carbon atoms having a fluorine atom, and still more preferably an alkyl group having 1 to 6 carbon atoms having a fluorine atom.

[0165] Examples of the structural unit represented by the formula (a4-3) include, for example, the following structural units and the structural units represented by the following formulas, in which the methyl group corresponding to R 41 in the structural unit (a4-3) is replaced by a hydrogen atom. TIFF2025084121000152.tif85165

[0166] TIFF2025084121000153.tif3686[In the formula (a4-A), R 1represents a hydrogen atom, a halogen atom, or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. X 11 represents a single bond or *-CO-O-. * represents R 1 and represents the bonding site with the carbon atom to which R is bonded. L 1 represents an aliphatic hydrocarbon group having 1 to 28 carbon atoms which may have a substituent, and -CH 2 - in the aliphatic hydrocarbon group may be replaced by -O-, -S-, -SO 2 - or -CO-. R 2 represents a fluorinated alkyl group having 1 to 8 carbon atoms. R 3 represents a hydrogen atom or a fluorinated alkyl group having 1 to 6 carbon atoms, and the fluorinated alkyl group may combine with L 1 to form an alicyclic hydrocarbon group having 3 to 12 carbon atoms, and -CH 2 - in the alicyclic hydrocarbon group may be replaced by -O-. mi represents any integer from 1 to 4. When mi is 2 or more, the groups in the plurality of parentheses may be the same as or different from each other.

[0167] R 1 Examples of the halogen atom and the alkyl group which may have a halogen atom in R are the same as those exemplified by R in formula (a2). a2 R 1 is preferably a hydrogen atom or an alkyl group having 1 to 4 carbon atoms, more preferably a hydrogen atom or an alkyl group having 1 to 3 carbon atoms, still more preferably a hydrogen atom, a methyl group or an ethyl group, and even more preferably a hydrogen atom or a methyl group. L 1 Examples of the aliphatic hydrocarbon group in L include a chain hydrocarbon group, a monocyclic or polycyclic (including a spiro ring, a condensed ring, a bridged ring, etc.) alicyclic hydrocarbon group, and a group formed by combining two or more of these groups (for example, a hydrocarbon group formed from an alicyclic hydrocarbon group and a chain hydrocarbon group) may also be used. Examples of the chain hydrocarbon group include divalent to pentavalent chain hydrocarbon groups such as an alkanediyl group, an alkanetriyl group, an alkanetetrayl group, and an alkanepentayl group. Examples of the alkanediyl group include linear alkanediyl groups such as a methylene group, an ethylene group, a propane-1,3-diyl group, a butane-1,4-diyl group, a pentane-1,5-diyl group, a hexane-1,6-diyl group, a heptane-1,7-diyl group, an octane-1,8-diyl group, a nonane-1,9-diyl group, a decane-1,10-diyl group, an undecane-1,11-diyl group, a dodecane-1,12-diyl group, a tridecane-1,13-diyl group, a tetradecane-1,14-diyl group, a pentadecane-1,15-diyl group, a hexadecane-1,16-diyl group, and a heptadecane-1,17-diyl group, and branched alkanediyl groups such as an ethane-1,1-diyl group, a propane-1,1-diyl group, a propane-1,2-diyl group, a propane-2,2-diyl group, a pentane-2,4-diyl group, a 2-methylpropane-1,3-diyl group, a 2-methylpropane-1,2-diyl group, a pentane-1,4-diyl group, and a 2-methylbutane-1,4-diyl group. Examples also include groups in which one or more hydrogen atoms of the above-described groups are replaced with a bonding site. The number of carbon atoms in the chain hydrocarbon group is preferably 1 to 18, more preferably 1 to 12, still more preferably 1 to 10, even more preferably 1 to 9, still even more preferably 1 to 8, still more preferably 1 to 6, still even more preferably 1 to 5, and particularly preferably 1 to 4.

[0168] Examples of the monocyclic or polycyclic alicyclic hydrocarbon group include the following alicyclic hydrocarbon groups. The bonding site can be at any position. TIFF2025084121000154.tif46164 For example, divalent to pentavalent alicyclic hydrocarbon groups such as a cycloalkanediyl group, a cycloalkanetriyl group, a cycloalkanetetrayl group, and a cycloalkanepentayl group. Specifically, monocyclic alicyclic hydrocarbon groups such as cyclobutane-1,3-diyl group, cyclopentane-1,3-diyl group, cyclohexane-1,4-diyl group, cyclooctane-1,5-diyl group, and polycyclic alicyclic hydrocarbon groups such as spiro rings having a cycloalkanediyl group, norbornanediy group or adamantanediy group in which a norbornane-1,4-diyl group, norbornane-2,5-diyl group, adamantane-1,5-diyl group, adamantane-2,6-diyl group, decahydronaphthalenediyl group, bicyclo[3.3.0]octanediy group, spirocyclohexane-1,2'-cyclopentane-diyl group, spiroadamantane-2,3'-cyclopentane-diyl group, etc. is spiro-bonded to each of them can be mentioned. Moreover, groups in which one or more hydrogen atoms of the above-mentioned groups are replaced at the bonding site, etc. can also be mentioned. The number of carbon atoms of the alicyclic hydrocarbon group is preferably 3 to 20, more preferably 3 to 18, still more preferably 3 to 16, and even more preferably 3 to 12.

[0169] Examples of the group combined with two or more types include a group combining an alicyclic hydrocarbon group and a chain hydrocarbon group. In the combination, two or more types of alicyclic hydrocarbon groups and chain hydrocarbon groups may be combined respectively. Also, any group may be bonded to X 11 It may be. Examples of a group combining an alicyclic hydrocarbon group and a chain hydrocarbon group include a group in which an alicyclic hydrocarbon group is bonded to a chain hydrocarbon group (e.g., *-chain hydrocarbon group-alicyclic hydrocarbon group-), a group in which a chain hydrocarbon group is bonded to an alicyclic hydrocarbon group (e.g., *-alicyclic hydrocarbon group-chain hydrocarbon group-), a group in which an alicyclic hydrocarbon group and a chain hydrocarbon group are bonded to a chain hydrocarbon group (e.g., *-chain hydrocarbon group-alicyclic hydrocarbon group-chain hydrocarbon group-), a group in which a chain hydrocarbon group and an alicyclic hydrocarbon group are bonded to an alicyclic hydrocarbon group (e.g., *-alicyclic hydrocarbon group-chain hydrocarbon group-alicyclic hydrocarbon group-), a group in which an alicyclic hydrocarbon group, a chain hydrocarbon group, and an alicyclic hydrocarbon group are bonded to a chain hydrocarbon group (e.g., *-chain hydrocarbon group-alicyclic hydrocarbon group-chain hydrocarbon group-alicyclic hydrocarbon group-), a group in which a chain hydrocarbon group, an alicyclic hydrocarbon group, and a chain hydrocarbon group are bonded to an alicyclic hydrocarbon group (e.g., *-alicyclic hydrocarbon group-chain hydrocarbon group-alicyclic hydrocarbon group-chain hydrocarbon group-), and the like. * represents X 11 and represents the bonding site with. Examples also include a group in which one or more hydrogen atoms of the above-described group are replaced with a bonding site.

[0170] L 1 In the aliphatic hydrocarbon group having 1 to 28 carbon atoms of, -CH 2 - may be replaced with -O-, -S-, -SO 2 - or -CO-. L 1 In the aliphatic hydrocarbon group having 1 to 28 carbon atoms of, -CH 2 - is replaced with -O-, -S-, -SO 2 - or -CO-, the number of carbon atoms before replacement is defined as the number of carbon atoms of the aliphatic hydrocarbon group. -CH contained in the aliphatic hydrocarbon group 2 - is -O-, -S-, -SO 2-Or as a group replaced by -CO-, examples include a hydroxy group, a carboxy group, a thiol group, an alkoxy group, an alkylthio group, an alkoxycarbonyl group, an alkylsulfonyl group, an alkylcarbonyl group, an alkylcarbonyloxy group, an alkoxycarbonyloxy group, an oxy group, a carbonyl group, a thio group, a sulfonyl group, an alkanediyl-oxy group, an alkanediyl-oxycarbonyl group, an alkanediylcarbonyl group, an alkanediylcarbonyloxy group, an alkanediylsulfonyl group, an alkanediylthio group, a cycloalkoxy group, a cycloalkylalkoxy group, a group formed by combining two or more of these groups, and the like. These replaced groups include those similar to the groups exemplified in this specification within the range where the upper limit of the number of carbon atoms is allowed. Also included are groups in which one or more hydrogen atoms of the above-described groups are replaced by a bonding site, and the like. -CH contained in the alicyclic hydrocarbon group 2 -When replaced by -O-, -S-, -CO- or -SO 2 -As the replaced group, those similar to the groups exemplified in this specification are included within the range where the upper limit of the number of carbon atoms is allowed.

[0171] L 1 The aliphatic hydrocarbon group in may have one or more substituents. Examples of the substituent include a halogen atom, a haloalkyl group having 1 to 4 carbon atoms, an alkyl group having 1 to 12 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, or an aromatic hydrocarbon group having 6 to 18 carbon atoms (-CH contained in the alkyl group or the alicyclic hydrocarbon group 2 -May be replaced by -O- or -CO-). Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, an iodine atom, and the like. The haloalkyl groups having 1 to 4 carbon atoms include fluoroalkyl groups having 1 to 4 carbon atoms, chloroalkyl groups having 1 to 4 carbon atoms, bromoalkyl groups having 1 to 4 carbon atoms, iodoalkyl groups having 1 to 4 carbon atoms, and the like. Examples of the haloalkyl group include perfluoroalkyl groups having 1 to 4 carbon atoms (such as trifluoromethyl group, pentafluoroethyl group, heptafluoropropyl group, nonafluorobutyl group, etc.), 2,2,2-trifluoroethyl group, 3,3,3-trifluoropropyl group, 4,4,4-trifluorobutyl group, 3,3,4,4,4-pentafluorobutyl group, chloromethyl group, bromomethyl group, iodomethyl group, and the like. The number of carbon atoms of the haloalkyl group is preferably 1 to 3, more preferably 1 or 2. Examples of the alkyl group having 1 to 12 carbon atoms include methyl group, ethyl group, propyl group, butyl group, pentyl group, hexyl group, heptyl group, octyl group, nonyl group, decyl group, undecyl group, dodecyl group, and the like. The number of carbon atoms of the alkyl group is preferably 1 to 9, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. Examples of the alicyclic hydrocarbon group having 3 to 18 carbon atoms include monocyclic cycloalkyl groups such as cyclopropyl group, cyclobutyl group, cyclopentyl group, cyclohexyl group, cycloheptyl group, cyclooctyl group, cyclodecyl group, and polycyclic cycloalkyl groups such as decahydronaphthyl group, adamantyl group, norbornyl group, and the like. The number of carbon atoms of the alicyclic hydrocarbon group is preferably 3 to 16, more preferably 3 to 12, and still more preferably 3 to 10. Examples of the aromatic hydrocarbon group having 6 to 18 carbon atoms include phenyl group, naphthyl group, biphenyl group, anthryl group, phenanthryl group, binaphthyl group, and the like. The number of carbon atoms of the aromatic hydrocarbon group is preferably 6 to 14, more preferably 6 to 12, and still more preferably 6 to 10. -CH contained in the alkyl group 2- When it is replaced by -O- or -CO-, the number of carbon atoms before replacement is defined as the total number of carbon atoms of the alkyl group. Examples of the replaced group include a hydroxy group, a carboxy group, an alkoxy group, an alkoxycarbonyl group, an alkylcarbonyl group, an alkylcarbonyloxy group, etc. These replaced groups include those similar to the groups exemplified in this specification within the range allowed by the upper limit of the number of carbon atoms. The number of carbon atoms of the alkoxy group is preferably from 1 to 9, more preferably from 1 to 6, still more preferably from 1 to 4, and even more preferably from 1 to 3. The number of carbon atoms of the alkoxycarbonyl group is preferably from 2 to 9, more preferably from 2 to 6, still more preferably from 2 to 4, and even more preferably 2 or 3. The number of carbon atoms of the alkylcarbonyl group is preferably from 2 to 10, more preferably from 2 to 6, still more preferably from 2 to 4, and even more preferably 2 or 3. The number of carbon atoms of the alkylcarbonyloxy group is preferably from 2 to 9, more preferably from 2 to 6, still more preferably from 2 to 4, and even more preferably 2 or 3. In addition, as the group in which -CH 2 - in the alicyclic hydrocarbon group is replaced by -O- or -CO-, those similar to the groups exemplified in this specification within the range allowed by the upper limit of the number of carbon atoms are included. L 1 Examples of the substituent that the aliphatic hydrocarbon group in L may have include a halogen atom, a haloalkyl group having 1 to 3 carbon atoms, an alkyl group having 1 to 6 carbon atoms, an alicyclic hydrocarbon group having 3 to 10 carbon atoms, or an aromatic hydrocarbon group having 6 to 10 carbon atoms (the -CH 2 - in the alkyl group or the alicyclic hydrocarbon group may be replaced by -O- or -CO-). Fluorine atom, iodine atom, a perfluoroalkyl group having 1 to 3 carbon atoms or an alkyl group having 1 to 4 carbon atoms (the -CH 2 - in the alkyl group may be replaced by -O- or -CO-) are more preferred, and fluorine atom, iodine atom, trifluoromethyl group, methyl group, hydroxy group or methoxy group are still more preferred. L 1 is R 3When not forming an alkyl fluoride group and an alicyclic hydrocarbon group, an optionally substituted chain hydrocarbon group having 1 to 12 carbon atoms (the -CH 2 - in the chain hydrocarbon group may be replaced by -O- or -CO-), an optionally substituted alicyclic hydrocarbon group having 3 to 18 carbon atoms (the -CH 2 - in the alicyclic hydrocarbon group may be replaced by -O- or -CO-), or a group formed by combining an optionally substituted chain hydrocarbon group having 1 to 6 carbon atoms and an optionally substituted alicyclic hydrocarbon group having 3 to 18 carbon atoms (the -CH 2 - in the chain hydrocarbon group may be replaced by -O- or -CO-, and the -CH 2 - in the alicyclic hydrocarbon group may be replaced by -O- or -CO-). Preferably, it is an optionally substituted chain hydrocarbon group having 1 to 8 carbon atoms (the -CH 2 - in the chain hydrocarbon group may be replaced by -O- or -CO-), an optionally substituted alicyclic hydrocarbon group having 3 to 12 carbon atoms, or a group formed by combining an optionally substituted chain hydrocarbon group having 1 to 6 carbon atoms and an optionally substituted alicyclic hydrocarbon group having 3 to 18 carbon atoms (the -CH 2 - in the chain hydrocarbon group may be replaced by -O- or -CO-). More preferably, it is an optionally substituted chain hydrocarbon group having 1 to 8 carbon atoms (the -CH 2 - in the chain hydrocarbon group may be replaced by -O- or -CO-), an optionally substituted alicyclic hydrocarbon group having 5 to 12 carbon atoms, a group formed by combining a chain hydrocarbon group having 1 to 6 carbon atoms and an optionally substituted alicyclic hydrocarbon group having 5 to 12 carbon atoms (the -CH 2 - in the chain hydrocarbon group may be replaced by -O- or -CO-), or a group formed by combining an optionally substituted alicyclic hydrocarbon group having 5 to 12 carbon atoms, a chain hydrocarbon group having 1 to 6 carbon atoms, and an optionally substituted alicyclic hydrocarbon group having 5 to 12 carbon atoms (the -CH 2- may be replaced by -O- or -CO-. It is more preferable that it is).

[0172] R 2 Examples of the C1-C8 fluoroalkyl group in include difluoromethyl group, trifluoromethyl group, 1,1-difluoroethyl group, 2,2-difluoroethyl group, 2,2,2-trifluoroethyl group, perfluoroethyl group, 1,1,2,2-tetrafluoropropyl group, 1,1,2,2,3,3-hexafluoropropyl group, perfluoroethylmethyl group, 1-(trifluoromethyl)-1,2,2,2-tetrafluoroethyl group, perfluoropropyl group, 1,1,2,2-tetrafluorobutyl group, 1,1,2,2,3,3-hexafluorobutyl group, 1,1,2,2,3,3,4,4-octafluorobutyl group, perfluorobutyl group, 1,1-bis(trifluoro)methyl-2,2,2-trifluoroethyl group, 2-(perfluoropropyl)ethyl group, 1,1,2,2,3,3,4,4-octafluoropentyl group, perfluoropentyl group, 1,1,2,2,3,3,4,4,5,5-decafluoropentyl group, 1,1-bis(trifluoromethyl)-2,2,3,3,3-pentafluoropropyl group, perfluoropentyl group, 2-(perfluorobutyl)ethyl group, 1,1,2,2,3,3,4,4,5,5-decafluorohexyl group, 1,1,2,2,3,3,4,4,5,5,6,6-dodecafluorohexyl group, perfluoropentylmethyl group, perfluorohexyl group, perfluoroheptyl group, perfluorooctyl group. The number of carbon atoms of the fluoroalkyl group is preferably 1-6, more preferably 1-5, still more preferably 1-4, and even more preferably 1-3. R 3 The C1-C6 fluoroalkyl group in, as long as the upper limit of the number of carbon atoms permits, the C1-C6 fluoroalkyl groups exemplified in the fluoroalkyl group of 2 are similarly exemplified. R 2 is 3When it is an alkyl fluoride group having 1 to 6 carbon atoms, it is preferably an alkyl fluoride group having 1 to 6 carbon atoms, more preferably an alkyl fluoride group having 1 to 3 carbon atoms, still more preferably a trifluoromethyl group, a perfluoroethyl group or a perfluoropropyl group, and even more preferably a trifluoromethyl group. R 2 When R 3 is a hydrogen atom, it is preferably an alkyl fluoride group having 1 to 6 carbon atoms, more preferably an alkyl fluoride group having 1 to 5 carbon atoms, and still more preferably an alkyl fluoride group having 3 to 5 carbon atoms. R 3 When R 1 is bonded to L 3 to form an alicyclic hydrocarbon group having 3 to 12 carbon atoms, R 1 The group formed by bonding to L 2 includes, for example, groups represented by the following formulas. In the following formulas, * and ** represent bonding sites, and the two ** represent that one represents the bonding site with a hydroxy group and the other represents the bonding site with R 1A L 1 is a part of the hydrocarbon group of L 3 and represents a single bond or an alkanediyl group having 1 to 4 carbon atoms. R 1 The number of carbon atoms of the alicyclic hydrocarbon group formed by bonding to L TIFF2025084121000155.tif26130R 3 is preferably a hydrogen atom or an alkyl fluoride group having 1 to 3 carbon atoms. mi is preferably any integer from 1 to 3, more preferably 1 or 2, and still more preferably 1.

[0173] Examples of the structural unit (a4-A) include the following structural units and the like. In the following structural units, the methyl group corresponding to R 1 is replaced by a hydrogen atom, a halogen atom, a haloalkyl group or an alkyl group other than a methyl group, and R 1A structural unit in which a hydrogen atom corresponding to the following is replaced with a halogen atom, a haloalkyl group, or an alkyl group can also be cited as a specific example of the structural unit (a4-A). TIFF2025084121000156.tif120167

[0174] TIFF2025084121000157.tif74169

[0175] When the resin (AX) contains the structural unit (a4), the content thereof is preferably 1 to 20 mol%, more preferably 2 to 15 mol%, and still more preferably 3 to 10 mol% with respect to all the structural units of the resin (AX).

[0176] 〈Structural unit (a5)〉 Examples of the non-leaving hydrocarbon group included in the structural unit (a5) include groups having a linear, branched, or cyclic hydrocarbon group. Among them, the structural unit (a5) is preferably a group having an alicyclic hydrocarbon group. Examples of the structural unit (a5) include, for example, a structural unit represented by the formula (a5-1). TIFF2025084121000158.tif3351[In the formula (a5-1), R 51 represents a hydrogen atom or a methyl group. R 52 represents an alicyclic hydrocarbon group having 3 to 18 carbon atoms, and the hydrogen atoms contained in the alicyclic hydrocarbon group may be substituted with aliphatic hydrocarbon groups having 1 to 8 carbon atoms. L 55 represents a single bond or a divalent saturated hydrocarbon group having 1 to 18 carbon atoms, and -CH 2 - contained in the saturated hydrocarbon group may be replaced with -O- or -CO-.]

[0177] R 52The alicyclic hydrocarbon group in [the formula] may be either monocyclic or polycyclic. Examples of the monocyclic alicyclic hydrocarbon group include a cyclopropyl group, a cyclobutyl group, a cyclopentyl group, and a cyclohexyl group. Examples of the polycyclic alicyclic hydrocarbon group include an adamantyl group and a norbornyl group, etc. Examples of the aliphatic hydrocarbon group having 1 to 8 carbon atoms include alkyl groups such as a methyl group, an ethyl group, a propyl group, an isopropyl group, a butyl group, a sec-butyl group, a tert-butyl group, a pentyl group, a hexyl group, an octyl group, and a 2-ethylhexyl group. Examples of the alicyclic hydrocarbon group having a substituent include a 3-methyladamantyl group, etc. R 52 is preferably an unsubstituted alicyclic hydrocarbon group having 3 to 18 carbon atoms, more preferably an adamantyl group, a norbornyl group, or a cyclohexyl group.

[0178] L 55 Examples of the divalent saturated hydrocarbon group in [the formula] include a divalent chain saturated hydrocarbon group and a divalent alicyclic saturated hydrocarbon group, and preferably a divalent chain saturated hydrocarbon group. Examples of the divalent chain saturated hydrocarbon group include alkanediyl groups such as a methylene group, an ethylene group, a propanediyl group, a butanediyl group, and a pentanediyl group. The divalent alicyclic saturated hydrocarbon group may be either monocyclic or polycyclic. Examples of the monocyclic alicyclic saturated hydrocarbon group include cycloalkanediyl groups such as a cyclopentanediyl group and a cyclohexanediyl group. Examples of the polycyclic divalent alicyclic saturated hydrocarbon group include an adamantanediyl group and a norbornanediyl group, etc.

[0179] L 55 Examples of the group in which -CH 2 - contained in the divalent saturated hydrocarbon group represented by L is replaced by -O- or -CO- include groups represented by formula (L1-1) to formula (L1-4). In the following formulas, * and ** each represent a bonding site, and * represents a bonding site with an oxygen atom. TIFF2025084121000159.tif18164In formula (L1-1), X x1 represents *-O-CO- or *-CO-O- (* represents the bonding site with L x1 .). L x1 represents a divalent aliphatic saturated hydrocarbon group having 1 to 16 carbon atoms. L x2 represents a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 15 carbon atoms. However, the total number of carbon atoms of L x1 and L x2 is 16 or less. In formula (L1-2), L x3 represents a divalent aliphatic saturated hydrocarbon group having 1 to 17 carbon atoms. L x4 represents a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 16 carbon atoms. However, the total number of carbon atoms of L x3 and L x4 is 17 or less. In formula (L1-3), L x5 represents a divalent aliphatic saturated hydrocarbon group having 1 to 15 carbon atoms. L x6 and L x7 each independently represent a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 14 carbon atoms. However, the total number of carbon atoms of L x5 , L x6 and L x7 is 15 or less. In formula (L1-4), L x8 and L x9 each represent a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 12 carbon atoms. W x1 represents a divalent alicyclic saturated hydrocarbon group having 3 to 15 carbon atoms. However, the total number of carbon atoms of L x8 , L x9 and W x1 is 15 or less.]

[0180] Lx1 is preferably a divalent aliphatic saturated hydrocarbon group having 1 to 8 carbon atoms, more preferably a methylene group or an ethylene group. L x2 is preferably a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 8 carbon atoms, more preferably a single bond. L x3 is preferably a divalent aliphatic saturated hydrocarbon group having 1 to 8 carbon atoms. L x4 is preferably a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 8 carbon atoms. L x5 is preferably a divalent aliphatic saturated hydrocarbon group having 1 to 8 carbon atoms, more preferably a methylene group or an ethylene group. L x6 is preferably a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 8 carbon atoms, more preferably a methylene group or an ethylene group. L x7 is preferably a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 8 carbon atoms. L x8 is preferably a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 8 carbon atoms, more preferably a single bond or a methylene group. L x9 is preferably a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 8 carbon atoms, more preferably a single bond or a methylene group. W x1 is preferably a divalent alicyclic saturated hydrocarbon group having 3 to 10 carbon atoms, more preferably a cyclohexanediyl group or an adamantanediyl group.

[0181] Examples of the group represented by the formula (L1-1) include the following divalent groups. Examples of the group represented by the formula (L1-2) include the following divalent groups. Examples of the group represented by the formula (L1-3) include the following divalent groups. As the group represented by the formula (L1-4), for example, the following divalent groups can be mentioned. TIFF2025084121000163.tif13168L 55 is preferably a single bond or a group represented by the formula (L1-1).

[0182] As the structural unit (a5-1), the following structural units and the methyl group corresponding to R in the structural unit (a5-1) in the following structural units, in which the methyl group is replaced by a hydrogen atom, can be mentioned. 51 are mentioned. When the resin (AX) contains the structural unit (a5), its content is preferably 1 to 30 mol%, more preferably 2 to 20 mol%, and still more preferably 3 to 15 mol% with respect to all the structural units of the resin (AX).

[0183] 〈Structural unit (a6)〉 The structural unit (a6) is a structural unit having a -SO 2 - group, and preferably has a -SO 2 - group in the side chain. -SO 2 - group having a structural unit may have a linear structure having a -SO 2 - group, or may have a branched structure having a -SO 2 - group, or may have a cyclic structure (monocyclic and polycyclic structures) having a -SO 2 - group. Preferably, it is a structural unit having a cyclic structure having a -SO 2 - group, and more preferably, it is a structural unit having a cyclic structure (sultone ring) containing -SO 2 -O-.

[0184] As the sultone ring, the following formula (T 1 -1), formula (T 1 -2), formula (T 1 -3) and formula (T 1Examples of the ring represented by (1-4) include those in which the bonding site can be at any position. The sultone ring may be monocyclic, but is preferably polycyclic. The polycyclic sultone ring means a bridged ring containing -SO 2 -O- as an atomic group constituting the ring, and examples of the ring represented by formula (T 1 -1) and formula (T 1 -2). The sultone ring may further contain a heteroatom in addition to -SO 1 -O- as an atomic group constituting the ring, such as the ring represented by formula (T 2 -2). Examples of the heteroatom include an oxygen atom, a sulfur atom, or a nitrogen atom, preferably an oxygen atom. TIFF2025084121000165.tif3087

[0185] The sultone ring may have a substituent, and examples of the substituent include an alkyl group having 1 to 12 carbon atoms which may have a halogen atom or a hydroxy group, a halogen atom, a hydroxy group, a cyano group, an alkoxy group having 1 to 12 carbon atoms, an aryl group having 6 to 12 carbon atoms, an aralkyl group having 7 to 12 carbon atoms, a glycidyloxy group, an alkoxycarbonyl group having 2 to 12 carbon atoms, and an alkylcarbonyl group having 2 to 4 carbon atoms.

[0186] Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom. Examples of the alkyl group include a methyl group, an ethyl group, a propyl group, a butyl group, a pentyl group, a hexyl group, an octyl group, and a decyl group, preferably an alkyl group having 1 to 6 carbon atoms, and more preferably a methyl group. Examples of the alkyl group having a halogen atom include a trifluoromethyl group, a perfluoroethyl group, a perfluoropropyl group, a perfluoroisopropyl group, a perfluorobutyl group, a perfluoro sec-butyl group, a perfluoro tert-butyl group, a perfluoropentyl group, a perfluorohexyl group, a trichloromethyl group, a tribromomethyl group, and a triiodomethyl group, preferably a trifluoromethyl group. Examples of the alkyl group having a hydroxy group include hydroxyalkyl groups such as hydroxymethyl group and 2-hydroxyethyl group. Examples of the alkoxy group include methoxy group, ethoxy group, propoxy group, butoxy group, pentyloxy group, hexyloxy group, heptyloxy group, octyloxy group, decyloxy group and dodecyloxy group. Examples of the aryl group include phenyl group, naphthyl group, anthryl group, p-methylphenyl group, p-tert-butylphenyl group, p-adamantylphenyl group, tolyl group, xylyl group, cumyl group, mesityl group, biphenyl group, phenanthryl group, 2,6-diethylphenyl group and 2-methyl-6-ethylphenyl group. Examples of the aralkyl group include benzyl group, phenethyl group, phenylpropyl group, naphthylmethyl group and naphthylethyl group. Examples of the alkoxycarbonyl group include a group in which an alkoxy group such as methoxycarbonyl group and ethoxycarbonyl group is bonded to a carbonyl group, preferably an alkoxycarbonyl group having 6 or less carbon atoms, more preferably methoxycarbonyl group. Examples of the alkylcarbonyl group include acetyl group, propionyl group and butyryl group. From the viewpoint of easy production of the monomer leading to the structural unit (a6), a sultone ring having no substituent is preferable.

[0187] As the sultone ring, a ring represented by the following formula (T1') is preferable. TIFF2025084121000166.tif2665[In the formula (T1'), X 11 represents an oxygen atom, a sulfur atom or a methylene group. R 41represents an alkyl group having 1 to 12 carbon atoms which may have a halogen atom or a hydroxy group, a halogen atom, a hydroxy group, a cyano group, an alkoxy group having 1 to 12 carbon atoms, an aryl group having 6 to 12 carbon atoms, an aralkyl group having 7 to 12 carbon atoms, a glycidyloxy group, an alkoxycarbonyl group having 2 to 12 carbon atoms or an alkylcarbonyl group having 2 to 4 carbon atoms. ma represents any integer from 0 to 9. When ma is 2 or more, a plurality of R 41 may be the same or different. The bonding site is at an arbitrary position. X 11 is preferably an oxygen atom or a methylene group, more preferably a methylene group. R 41 Examples of R include the same ones as the substituents of the sultone ring described above, and an alkyl group having 1 to 12 carbon atoms which may have a halogen atom or a hydroxy group is preferred. ma is preferably 0 or 1, more preferably 0.

[0188] Examples of the ring represented by the formula (T1’) include the following rings. The bonding site is at an arbitrary position. Among them, the bonding site is preferably at the 1-position or 3-position. TIFF2025084121000167.tif44148-SO 2 The structural unit having a - group preferably further has a group derived from a polymerizable group. Examples of the polymerizable group include a vinyl group, an acryloyl group, a methacryloyl group, an acryloyloxy group, a methacryloyloxy group, an acryloylamino group, a methacryloylamino group, an acryloylthio group, a methacryloylthio group and the like. Among them, the monomer that leads to the structural unit (a6) is preferably a monomer having an ethylenically unsaturated bond, more preferably a (meth)acrylic monomer.

[0189] The structural unit (a6) is preferably a structural unit represented by the formula (a6-0). TIFF2025084121000168.tif4077[In the formula (a6-0), Rx represents an alkyl group having 1 to 6 carbon atoms which may have a halogen atom, a hydrogen atom or a halogen atom. A xx represents an oxygen atom, -N(R c )- or a sulfur atom. A x represents a single bond or a divalent saturated hydrocarbon group having 1 to 18 carbon atoms, and -CH 2 - contained in the saturated hydrocarbon group may be replaced by -O-, -CO- or -N(R d )-. X 11 , R 41 and ma represent the same meaning as above. R c and R d each independently represent a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. R x Examples of the halogen atom of R include a fluorine atom, a chlorine atom, a bromine atom and an iodine atom. x Examples of the alkyl group of R include, for example, a methyl group, an ethyl group, an n-propyl group, an isopropyl group, an n-butyl group, a sec-butyl group, a tert-butyl group, an n-pentyl group and an n-hexyl group, etc., preferably an alkyl group having 1 to 4 carbon atoms, more preferably a methyl group or an ethyl group. x Examples of the alkyl group having a halogen atom of R include, for example, a trifluoromethyl group, a perfluoroethyl group, a perfluoropropyl group, a perfluoroisopropyl group, a perfluorobutyl group, a perfluorosec-butyl group, a perfluorotert-butyl group, a perfluoropentyl group, a perfluorohexyl group, a trichloromethyl group, a tribromomethyl group and a triiodomethyl group, etc. x R A xExamples of the divalent saturated hydrocarbon group include linear alkanediyl groups, branched alkanediyl groups, monocyclic or polycyclic divalent alicyclic saturated hydrocarbon groups, and combinations of two or more of these groups may also be used. Specifically, linear alkanediyl groups such as methylene group, ethylene group, propane-1,3-diyl group, propane-1,2-diyl group, butane-1,4-diyl group, pentane-1,5-diyl group, hexane-1,6-diyl group, heptane-1,7-diyl group, octane-1,8-diyl group, nonane-1,9-diyl group, decane-1,10-diyl group, undecane-1,11-diyl group, dodecane-1,12-diyl group, tridecane-1,13-diyl group, tetradecane-1,14-diyl group, pentadecane-1,15-diyl group, hexadecane-1,16-diyl group, heptadecane-1,17-diyl group, ethane-1,1-diyl group, propane-1,1-diyl group, and propane-2,2-diyl group; branched alkanediyl groups such as butane-1,3-diyl group, 2-methylpropane-1,3-diyl group, 2-methylpropane-1,2-diyl group, pentane-1,4-diyl group, and 2-methylbutane-1,4-diyl group; monocyclic divalent alicyclic saturated hydrocarbon groups which are cycloalkanediyl groups such as cyclobutane-1,3-diyl group, cyclopentane-1,3-diyl group, cyclohexane-1,4-diyl group, and cyclooctane-1,5-diyl group; polycyclic divalent alicyclic saturated hydrocarbon groups such as norbornane-1,4-diyl group, norbornane-2,5-diyl group, adamantane-1,5-diyl group, and adamantane-2,6-diyl group, etc. A x The bonding position to the sultone ring of A can be any position, but the one at the 1-position is preferred.

[0190] Examples of the structural unit (a6-0) include the following structural units. Among them, the structural units represented by formula (a6-1), formula (a6-2), formula (a6-6), formula (a6-7), formula (a6-8), and formula (a6-12) are preferred, and the structural units represented by formula (a6-1), formula (a6-2), formula (a6-7), and (a6-8) are more preferred. When the resin (AX) contains the structural unit (a6), its content is preferably 1 to 50 mol%, more preferably 2 to 40 mol%, and still more preferably 3 to 30 mol% based on all the structural units of the resin (AX).

[0191] 〈Structural unit (a7)〉 The resin (AX) etc. may further contain a structural unit that decomposes upon exposure to generate an acid (hereinafter sometimes referred to as "structural unit (a7)"). Specific examples of the structural unit (a7) include the structural units described in JP-A-2016-79235, and it is preferably a structural unit having a sulfonate group or a carboxylate group and an organic cation in the side chain or a structural unit having a sulfonio group and an organic anion in the side chain.

[0192] The structural unit having a sulfonate group or a carboxylate group and an organic cation in the side chain is preferably a structural unit represented by the formula (a7-A). TIFF2025084121000170.tif26123[In the formula (a7-A), R a7 represents a hydrogen atom, a halogen atom, or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. X a71 represents a single bond, *-O-*, *-CO-O-*, *-O-CO-O-*, *-CO-NR a71 -*, *-NR a71 -CO-O-*, *-O-CO-NR a71 -* or *-Ax-Ph-Ay-*. R a71 represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. Ph represents a phenylene group which may have a substituent. Ax and Ay each independently represent one or more bond types selected from the group consisting of a single bond, an ether bond, a thioether bond, an ester bond, an amide bond, and a carbonate ester bond. * and ** represent bonding sites, * is R a7represents the bonding site with the carbon atom to which it is bonded. L a71 and L a72 each independently represent a hydrocarbon group having 1 to 24 carbon atoms which may have a substituent, and -CH 2 - in the hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO 2 -. X a72 represents ***-CO-O-, ***-O-CO-, ***-O-CO-O-, ***-O-, where *** represents the bonding site with L a71 represents the bonding site with L. na7 represents any integer from 0 to 2. When na7 is 2, the groups within the plurality of parentheses may be the same as or different from each other. RA - represents a sulfonate anion or a carboxylate anion. ZA + represents an organic cation.

[0193] R a7 and R a71 Examples of the alkyl group having 1 to 6 carbon atoms in R include a methyl group, an ethyl group, an n-propyl group, an isopropyl group, an n-butyl group, a sec-butyl group, a tert-butyl group, a pentyl group, and a hexyl group. R a7 Examples of the halogen atom in R include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom. R a7 Examples of the alkyl group having 1 to 6 carbon atoms having a halogen atom in R include a trifluoromethyl group, a difluoromethyl group, a perfluoroethyl group, a 2,2,2-trifluoroethyl group, a 1,1,2,2-tetrafluoroethyl group, a perfluoropropyl group, a 2,2,3,3,3-pentafluoropropyl group, a perfluorobutyl group, a 1,1,2,2,3,3,4,4-octafluorobutyl group, a perfluoropentyl group, a 2,2,3,3,4,4,5,5,5-nonafluoropentyl group, a perfluorohexyl group, a trichloromethyl group, a dichloromethyl group, a triiodomethyl group, a diiodomethyl group, a tribromomethyl group, a dibromomethyl group, etc. Ra7 is preferably a hydrogen atom or an alkyl group having 1 to 4 carbon atoms, more preferably a hydrogen atom or an alkyl group having 1 to 3 carbon atoms, still more preferably a hydrogen atom, a methyl group or an ethyl group, and even more preferably a hydrogen atom or a methyl group.

[0194] X a71 When it is a group represented by *-Ax-Ph-Ay-**, it is preferably a linking group represented by the following formula (X10). TIFF2025084121000171.tif3251[In the formula (X10), Ax represents a bonding species that binds to the carbon atom to which R a7 is bonded, and represents one or more bonding species selected from the group consisting of a single bond, an ether bond, a thioether bond, an ester bond, a carbonate ester bond, and an amide bond. Ay represents a bonding species that binds to L a71 and represents one or more bonding species selected from the group consisting of a single bond, an ether bond, a thioether bond, an ester bond, a carbonate ester bond, and an amide bond. Rx represents a halogen atom, a hydroxy group, a fluorinated alkyl group having 1 to 6 carbon atoms, an alkyl group having 1 to 18 carbon atoms, or an alkoxy group having 1 to 6 carbon atoms. mx represents any integer from 0 to 4. When mx is an integer of 2 or more, a plurality of Rx may be the same as or different from each other.] When either Ax or Ay is a single bond, the other is preferably one or more selected from the group consisting of an ether bond, a thioether bond, an ester bond, a carbonate ester bond, and an amide bond. When either Ax or Ay is an amide bond, it is preferably a bond represented by -CO-NR a71 -. The bonding position of Ay in the phenylene group is preferably the m-position or the p-position with respect to the bonding position of Ax, and more preferably the p-position. Among them, Rx is preferably a fluorine atom, an iodine atom, a trifluoromethyl group, a methyl group or an ethyl group. mx is preferably 0, 1 or 2. X a71 Examples of X include, for example, a single bond and the groups represented by the following formula (X 10 -1) to formula (X 10 -10). * represents the bonding site with the carbon atom to which -R a7 is bonded. ** represents the bonding site with L a71 . X 20 represents -O- or -NR a71 -. TIFF2025084121000172.tif43161 Examples of the groups represented by formula (X 10 -1) to formula (X 10 -10) include the following groups. TIFF2025084121000173.tif87162 Among them, X a71 is preferably a single bond or a group represented by formula (X 10 -1’), formula (X 10 -3’) to formula (X 10 -9’), more preferably a single bond or a group represented by formula (X 10 -1’), formula (X 10 -4’), formula (X 10 -5’), formula (X 10 -6’) and formula (X 10 -9’), and even more preferably a single bond, a group represented by formula (X 10 -1’), a group represented by formula (X 10 -5’), a group represented by formula (X 10 -6’) or a group represented by formula (X 10 -9’).

[0195] L a71 Examples of the hydrocarbon group of L include a chain hydrocarbon group, an alicyclic hydrocarbon group, an aromatic hydrocarbon group, and a group formed by combining two or more of these groups, with one hydrogen atom removed, and a group that binds to X a71 and X a72 . Also, examples of the hydrocarbon group of L a72 include a chain hydrocarbon group, an alicyclic hydrocarbon group, an aromatic hydrocarbon group, and a group formed by combining two or more of these groups, with one hydrogen atom removed, and a group that binds to X a72 and RA -Groups that bind thereto can be mentioned. L a71 and L a72 Examples of the chain hydrocarbon group of L and L include groups in which one hydrogen atom of an alkyl group or an alkenyl group is removed. The alkyl group may be linear or branched, and specifically, methyl group, ethyl group, n-propyl group, iso-propyl group, n-butyl group, sec-butyl group, iso-butyl group, tert-butyl group, pentyl group, hexyl group, heptyl group, octyl group, nonyl group, decyl group, undecyl group, dodecyl group, tridecyl group, tetradecyl group, pentadecyl group, heptadecyl group, etc. can be mentioned. Examples of the alkenyl group include ethenyl group, propenyl group, isopropenyl group, butenyl group, isobutenyl group, tert-butenyl group, pentenyl group, hexenyl group, heptenyl group, octenyl group, isooctenyl group, nonenyl group, etc. The number of carbon atoms of the chain hydrocarbon group is preferably 1 to 20, more preferably 1 to 18, and even more preferably 1 to 10. L a71 and L a72 Examples of the alicyclic hydrocarbon group of L and L include groups in which one hydrogen atom of a monocyclic or polycyclic cycloalkyl group is removed. Examples of the monocyclic cycloalkyl group include cyclobutyl group, cycloheptyl group, cyclohexyl group, cyclopentyl group, cyclooctyl group, etc. L a71 and L a72Examples of the polycyclic cycloalkyl group include a cycloalkyl group having a crosslinked structure, a cycloalkyl group in which two or more rings are condensed, or a cycloalkyl group in which two rings are spiro-bonded. Examples of the cycloalkyl group having a crosslinked structure include a norbornyl group and an adamantyl group. Examples of the cycloalkyl group in which two or more rings are condensed include a bicyclo[4,4,0]decane group and a steroid group (steroid skeleton). Examples of the cycloalkyl group in which two rings are spiro-bonded include a spirocycloalkyl group in which one or more cycloalkyl groups selected from the group consisting of a cyclopentyl group, a cyclohexyl group, a norbornyl group, and an adamantyl group are spiro-bonded to a cycloalkyl group having 5 to 8 carbon atoms. In addition, a double bond may be formed between two carbon atoms included in the alicyclic hydrocarbon group. More specifically, examples of the alicyclic hydrocarbon group represented by the following formula can be given. TIFF2025084121000174.tif28158 When the alicyclic hydrocarbon group is a monocyclic cycloalkyl group, the number of carbon atoms in the alicyclic hydrocarbon group is preferably 3 to 18, more preferably 3 to 12, and even more preferably 3 to 8. When the alicyclic hydrocarbon group is a polycyclic cycloalkyl group, the number of carbon atoms in the alicyclic hydrocarbon group is preferably 6 to 18, and more preferably 7 to 12. L a71 and L a72 Examples of the aromatic hydrocarbon group of L and L include a group obtained by removing one hydrogen atom from an aryl group. Examples of the aryl group include a phenyl group, a naphthyl group, an anthryl group, a biphenyl group, and a fluorenyl group. The number of carbon atoms in the aromatic hydrocarbon group is preferably 5 to 14, more preferably 6 to 14, and even more preferably 6 to 10. L a71 and L a72 When -CH in the hydrocarbon group of L and L 2 - is replaced by -O-, -CO-, -S-, or -SO 2 -, the number of carbon atoms before replacement is taken as the number of carbon atoms in the hydrocarbon group. L a71 and L a72Among the hydrocarbon groups, -CH contained in the chain hydrocarbon group 2 - being replaced by -O-, -CO-, -S- or -SO 2 - The resulting groups include hydroxyl group, carboxyl group, thiol group, carbonyl group, oxy group, thio group, sulfonyl group, alkoxy group, alkoxycarbonyl group, alkylcarbonyl group, alkylcarbonyloxy group, alkoxycarbonyloxy group, alkanedioxy group, alkanedioxycarbonyl group, alkanediylcarbonyl group, alkanediylcarbonyloxy group, etc. These replaced groups include those similar to the groups exemplified in this specification within the range allowed by the upper limit of the number of carbon atoms. L a71 and L a72 Among the hydrocarbon groups of, the -CH contained in the alicyclic hydrocarbon group or the group combining the alicyclic hydrocarbon group and the aromatic hydrocarbon group 2 - being replaced by -O-, -CO-, -S- or -SO 2 - The resulting groups include those similar to the groups exemplified in this specification within the range allowed by the upper limit of the number of carbon atoms. L a71 and L a72 Among the hydrocarbon groups of, -CH contained in the aromatic hydrocarbon group 2 - may be replaced by -O- or -S-, and -CH 2 - The groups in which - is replaced by -O- or -S- include groups derived from furan ring or thiophene ring, etc. L a71 and L a72 The groups combining two or more of the chain hydrocarbon group, alicyclic hydrocarbon group and aromatic hydrocarbon group of L and L include the group combining the above chain hydrocarbon group and the above alicyclic hydrocarbon group, the group combining the above chain hydrocarbon group and the above aromatic hydrocarbon group, the group combining the above alicyclic hydrocarbon group and the above aromatic hydrocarbon group, and the group combining the above chain hydrocarbon group, the above alicyclic hydrocarbon group and the above aromatic hydrocarbon group. The group combining the alicyclic hydrocarbon group and the aromatic hydrocarbon group may be a condensed ring. L a71 and L a72Examples of the substituent that the hydrocarbon group may have include a halogen atom, a cyano group, and a nitro group. Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom. L a71 and L a72 When is a group formed by combining an alicyclic hydrocarbon group or an aromatic hydrocarbon group with a chain hydrocarbon group, substantially, the chain hydrocarbon group may be regarded as a substituent that the alicyclic hydrocarbon group or the aromatic hydrocarbon group has. Also, L a71 and L a72 In the hydrocarbon group of, when the -CH 2 - of the chain hydrocarbon group contained in is replaced by -O-, -CO-, -S- or -SO 2 -, the hydrocarbon group of L a71 and L a72 can substantially have substituents such as a hydroxy group, a carboxy group, an alkoxy group, an alkylcarbonyl group, an alkoxycarbonyl group, an alkylcarbonyloxy group, a thiol group, and a sulfonyl group. na7 is preferably 0 or 1. ZA in the formula (a7-A) + is the same as those of the cations in the salts represented by the formula (B1) etc.

[0196] In the formula (a7-A), when the hydrocarbon groups of L a71 and L a72 are saturated hydrocarbon groups, in the formula (a7-B) described later, A b7 may contain the same groups as the groups exemplified as the divalent linking group of. Examples of the structural unit represented by the formula (a7-A) also include the structural unit represented by the formula (a7-A1). TIFF2025084121000175.tif30138 [In the formula (a7-A1), R a7 、X a71 、L a71 、X a72 、na7、RA - and ZA + represent the same meanings as above. z7 represents any integer from 0 to 6. Qa7 , Q b7 , R z71 and R z72 each independently represents a hydrogen atom, a fluorine atom, a perfluoroalkyl group having 1 to 6 carbon atoms, or an alkyl group having 1 to 6 carbon atoms. When z7 is 2 or more, a plurality of R z71 and R z72 may be the same as or different from each other.] Q a7 , Q b7 , R z71 and R z72 Examples of the perfluoroalkyl group having 1 to 6 carbon atoms or the alkyl group having 1 to 6 carbon atoms in Q a7 include the same groups as those exemplified by R

[0197] Examples of the structural unit represented by formula (a7-A) include, for example, the following structural units, a group corresponding to the methyl group of R a7 replaced with a hydrogen atom, a halogen atom (for example, a fluorine atom), or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom (for example, a trifluoromethyl group, etc.), and the structural units described in International Publication No. 2012 / 050015. ZA + represents an organic cation. TIFF2025084121000176.tif236159

[0198] TIFF2025084121000177.tif130158

[0199] The structural unit having a sulfonio group and an organic anion in the side chain is preferably a structural unit represented by formula (a7-B). TIFF2025084121000178.tif28104[In formula (a7-B), R a7 represents a hydrogen atom, a halogen atom, or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. A b7 represents a single bond or a divalent linking group. R b71 represents a divalent aromatic hydrocarbon group having 6 to 18 carbon atoms which may have a substituent. R b72 and R b73 each independently represents a hydrocarbon group having 1 to 18 carbon atoms which may have a substituent, and R b72 and R b73 may be bonded to each other to form a ring together with the sulfur atom to which they are bonded. A - represents an organic anion. R a7 Examples of the halogen atom of R and the alkyl group which may have a halogen atom include the same halogen atom and the alkyl group which may have a halogen atom as those of formula (a7-A). R b71 Examples of the divalent aromatic hydrocarbon group having 6 to 18 carbon atoms represented by R include a phenylene group and a naphthylene group. R b72 and R b73 Examples of the hydrocarbon group represented by include an alkyl group, an alicyclic hydrocarbon group, an aromatic hydrocarbon group, and a group formed by combining these. Examples of the alkyl group, the alicyclic hydrocarbon group, the aromatic hydrocarbon group, and the group formed by combining these are the same as those described above. A b7 Examples of the divalent linking group represented by include a divalent saturated hydrocarbon group having 1 to 18 carbon atoms, and -CH 2 - contained in the divalent saturated hydrocarbon group may be replaced by -O-, -S- or -CO-. Examples of the divalent saturated hydrocarbon group include a divalent chain saturated hydrocarbon group such as a linear or branched alkanediyl group, a monocyclic or polycyclic divalent alicyclic saturated hydrocarbon group, and combinations thereof. Specifically, linear alkanediyl groups such as methylene group, ethylene group, propane-1,3-diyl group, propane-1,2-diyl group, butane-1,4-diyl group, pentane-1,5-diyl group, hexane-1,6-diyl group, heptane-1,7-diyl group, octane-1,8-diyl group, nonane-1,9-diyl group, decane-1,10-diyl group, undecane-1,11-diyl group, dodecane-1,12-diyl group; branched alkanediyl groups such as butane-1,3-diyl group, 2-methylpropane-1,3-diyl group, 2-methylpropane-1,2-diyl group, pentane-1,4-diyl group, 2-methylbutane-1,4-diyl group; divalent monocyclic alicyclic saturated hydrocarbon groups which are monocyclic cycloalkanediyl groups such as cyclobutane-1,3-diyl group, cyclopentane-1,3-diyl group, cyclohexane-1,4-diyl group, cyclooctane-1,5-diyl group; divalent polycyclic alicyclic saturated hydrocarbon groups which are polycyclic cycloalkanediyl groups such as norbornane-1,4-diyl group, norbornane-2,5-diyl group, adamantane-1,5-diyl group, adamantane-2,6-diyl group, etc. are exemplified. -CH contained in the saturated hydrocarbon group 2 Examples of those in which - is replaced by -O-, -S- or -CO- include the following divalent groups. However, the number of carbon atoms before -CH contained in the saturated hydrocarbon group is each 17 or less. In the following formula, * and ** represent bonding sites, and * represents the bonding site with R 2 and. b71 represents the bonding site with. TIFF2025084121000179.tif123161[wherein X 3 represents a divalent saturated hydrocarbon group having 1 to 16 carbon atoms. X 4 represents a divalent saturated hydrocarbon group having 1 to 15 carbon atoms. X 5 represents a divalent saturated hydrocarbon group having 1 to 13 carbon atoms. X 6 represents a divalent saturated hydrocarbon group having 1 to 14 carbon atoms. X 7 represents a trivalent saturated hydrocarbon group having 1 to 14 carbon atoms. X8 represents a divalent saturated hydrocarbon group having 1 to 13 carbon atoms.

[0200] Examples of the structural unit containing the cation in formula (a7-B) include the structural unit represented below and a group corresponding to the methyl group of R a7 wherein the hydrogen atom, a halogen atom (e.g., fluorine atom) or a halogen atom may have an alkyl group having 1 to 6 carbon atoms (e.g., trifluoromethyl group, etc.) and the like replaced with a structural unit and the like. JPEG2025084121000180.jpg72164

[0201] A - Examples of the organic anion represented by A include sulfonate anion, sulfonylimide anion, sulfonylmethide anion, carboxylic acid anion and the like. A - The organic anion represented by A is preferably a sulfonate anion, and more preferably the same as the anion exemplified by the acid generator (B). Examples of the sulfonylimide anion, sulfonylmethide anion and carboxylic acid anion include the same anions as those exemplified by the acid generator (B).

[0202] Examples of the structural unit represented by formula (a7-B) include the structural unit represented below and the like. TIFF2025084121000181.tif95157 When the resin (AX) contains the structural unit (a7), the structural unit (a7) may be contained alone or in combination of two or more. The total content ratio of the structural unit (a7) is preferably 1 to 30 mol%, more preferably 1 to 25 mol%, still more preferably 2 to 20 mol%, even more preferably 3 to 15 mol%, and even more preferably 3 to 10 mol% based on all the structural units of the resin (AX).

[0203] 〈Structural unit (a1)〉 The structural unit (a1) is derived from a monomer having an acid-labile group (hereinafter sometimes referred to as "monomer (a1)"). The acid-labile group contained in the structural unit (a1) is R in formula (I). 10 In addition to the acid-labile group (1a) and the acid-labile group (2a) of 10 , the group represented by formula (1) or the group represented by formula (2) can be mentioned. Among them, the group represented by formula (1) (hereinafter also referred to as group (1)) and / or the group represented by formula (2) (hereinafter also referred to as group (2)) are preferable. TIFF2025084121000182.tif1988[In formula (1), R a1 , R a2 and R a3 each independently represent an alkyl group having 1 to 8 carbon atoms, an alkenyl group having 2 to 8 carbon atoms, an alicyclic hydrocarbon group having 3 to 20 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a group combining these, or R a1 and R a2 are bonded to each other to form an alicyclic hydrocarbon group having 3 to 20 carbon atoms together with the carbon atom to which they are bonded, and the alkyl group, the alkenyl group, the alicyclic hydrocarbon group, and the aromatic hydrocarbon group may have a halogen atom. ma and na each independently represent 0 or 1, and at least one of ma and na represents 1. * represents a bonding site.] TIFF2025084121000183.tif2171[In formula (2), R a1’ and R a2’ each independently represent a hydrogen atom or a hydrocarbon group having 1 to 12 carbon atoms, R a3’ represents a hydrocarbon group having 1 to 20 carbon atoms, or R a2’ and R a3’ are bonded to each other to form a heterocyclic group having 3 to 20 carbon atoms together with the carbon atom to which they are bonded and X, and -CH 2 - contained in the hydrocarbon group and the heterocyclic group may be replaced by -O- or -S-, and the hydrocarbon group and the heterocyclic group may have a halogen atom. X represents an oxygen atom or a sulfur atom. na’ represents 0 or 1. * represents a bonding site.]

[0204] R a1 , Ra2 and R a3 Examples of the alkyl group in a3 include a methyl group, an ethyl group, a propyl group, a butyl group, a pentyl group, a hexyl group, a heptyl group, an octyl group, and the like. R a1 、R a2 and R a3 Examples of the alkenyl group in a3 include an ethenyl group, a propenyl group, an isopropenyl group, a butenyl group, an isobutenyl group, a tert-butenyl group, a pentenyl group, a hexenyl group, a heptenyl group, an octenyl group, an isooctenyl group, and a nonenyl group. R a1 、R a2 and R a3 The alicyclic hydrocarbon group in a3 may be either monocyclic or polycyclic. Examples of the monocyclic alicyclic hydrocarbon group include cycloalkyl groups such as a cyclopentyl group, a cyclohexyl group, a cycloheptyl group, and a cyclooctyl group. Examples of the polycyclic alicyclic hydrocarbon group include a decahydronaphthyl group, an adamantyl group, a norbornyl group, and the following...

Claims

1. A resist composition containing an acid generator, The resist composition, wherein the acid generator contains a salt represented by formula (I): [In formula (I), X represents a sulfur atom or an iodine atom. m10 represents 0 or 1, and when X is a sulfur atom, m10 is 1, and when X is an iodine atom, m10 is 0. R １ , R ２ and R ３ each independently represents a hydroxy group, *-X １ -R １０ , or *-X １ -L １０ -X ２ -R １０ Represents. X １ and X ２ each independently represents *-CO-O-, *-O-CO-, *-O-CO-O- or *-O-. L １０ represents a hydrocarbon group having 1 to 28 carbon atoms which may have a substituent, and the —CH 2 - is -O-, -S-, -SO ２ It may be replaced by --or --CO--. R ４ , R ５ and R ６ each independently represents a halogen atom, a hydrocarbon group having 1 to 18 carbon atoms, *-X １ -R １０ , or *-X １ -L １０ -X ２ -R １０ The hydrocarbon group may have a substituent, and the —CH 2 - is -O-, -CO-, -S-, -SO- or -SO ２ It may be replaced by -. R ７ , R ８ and R ９ each independently represents a halogen atom, a hydrocarbon group having 1 to 18 carbon atoms, *-X １ -R １０ , or *-X １ -L １０ -X ２ -R １０ The hydrocarbon group may have a substituent, and the —CH 2 - is -O-, -CO-, -S-, -SO- or -SO ２ When X is a sulfur atom, R ７ and R ８ Or R ８ and R ９ is bonded to S ＋ The ring may contain —CH 2 - is -O-, -S-, -CO-, -SO- or -SO ２ R forming the ring may be replaced with -. ７ and R ８ Or R ８ and R ９ , S ＋ and a single bond formed between two benzene rings connecting the two. R １０ represents an acid labile group. A １ , A ２ and A ３ each independently represents a single bond or a hydrocarbon group having 1 to 20 carbon atoms, the hydrocarbon group may have a substituent, and -CH 2 - is -O-, -CO-, -S- or -SO ２ It may be replaced by -. Ar １ , Ar ２ and Ar ３ each independently represents an aromatic hydrocarbon group having 6 to 10 carbon atoms or a heterocyclic aromatic hydrocarbon group having 4 to 9 carbon atoms. m1 represents an integer of 0 to 5, and when m1 is 2 or more, the groups in multiple parentheses may be the same or different. m2 represents an integer of 0 to 5, and when m2 is 2 or more, the groups in the parentheses may be the same or different. m3 represents an integer of 0 to 5, and when m3 is 2 or more, the groups in the parentheses may be the same or different. m4 represents an integer of 0 to 4, and when m4 is 2 or more, a plurality of R ４ may be the same or different from each other. m5 represents an integer of 0 to 4, and when m5 is 2 or more, a plurality of R ５ may be the same or different from each other. m6 represents an integer of 0 to 4, and when m6 is 2 or more, a plurality of R ６ may be the same or different from each other. m7 represents an integer of 0 to 5, and when m7 is 2 or more, a plurality of R ７ may be the same or different from each other. m8 represents an integer of 0 to 5, and when m8 is 2 or more, a plurality of R ８ may be the same or different from each other. m9 represents an integer of 0 to 5, and when m9 is 2 or more, a plurality of R ９ may be the same or different from each other. However, 0≦m1+m7≦5, 0≦m2+m8≦5, and 0≦m3+m9≦5, and at least one of m1, m2, m3, m7, m8, and m9 represents an integer of 1 or more; R １ , R ２ and R ３ At least one of the following is *-X １ -R １０ , or *-X １ -L １０ -X ２ -R １０ When m1 = m2 = m3 = 0, R ７ , R ８ and R ９ At least one of the following is *-X １ -R １０ , or *-X １ -L １０ -X ２ -R １０ Represents. * denotes a binding site. AI － represents an anion having two or more acid labile groups.

2. A １ But, **-X ０１ -L ０１ - or **-L ０１ -X ０１ - and A ２ But, **-X ０２ -L ０２ - or **-L ０２ -X ０２ - and A ３ But, **-X ０３ -L ０３ - or **-L ０３ -X ０３ - and X ０１ , X ０２ and X ０３ each independently represents -O-, -CO-, -S- or -SO ２ - represents L ０１ , L ０２ and L ０３ each independently represents a single bond or a hydrocarbon group having 1 to 18 carbon atoms (the hydrocarbon group may have a substituent, and the —CH 2 - is -O-, -CO-, -S- or -SO ２ - may be replaced by . ** is X ＋ 2. The resist composition according to claim 1, wherein the bond site to the benzene ring is

3. X ０１ , X ０２ and X ０３ The resist composition according to claim 2, wherein each of the groups independently represents --O-- or --S--.

4. L ０１ , L ０２ and L ０３ each independently represents a single bond or an alkanediyl group having 1 to 6 carbon atoms (the —CH 2 3. The resist composition according to claim 2, wherein - may be replaced by -O- or -CO-.

5. R １ , R ２ , R ３ , R ４ , R ５ , R ６ , R ７ , R ８ and R ９ At least one of the following is *-X １ -R １０ , or *-X １ -L １０ -X ２ -R １０ and R １０ and AI － 3. The resist composition according to claim 1, wherein the acid labile group is a group represented by formula (1a) or a group represented by formula (2a). [In formula (1a), R aa1 , R aa2 and R aa3 each independently represents an alkyl group having 1 to 8 carbon atoms, an alkenyl group having 2 to 8 carbon atoms, an alicyclic hydrocarbon group having 3 to 20 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a combination thereof, or R aa1 and R aa2 are bonded to each other to form, together with the carbon atom to which they are bonded, an alicyclic hydrocarbon group having 3 to 20 carbon atoms, and the alkyl group, the alkenyl group, the alicyclic hydrocarbon group and the aromatic hydrocarbon group may have a halogen atom. * indicates a binding site.] [In formula (2a), R aa1’ and R aa2’ each independently represents a hydrogen atom or a hydrocarbon group having 1 to 12 carbon atoms; R aa3’ represents a hydrocarbon group having 1 to 20 carbon atoms, or R aa2’ and R aa3’ are bonded to each other and bonded to -C-X ａ Together with --, it forms a heterocyclic group having 3 to 20 carbon atoms, and the --CH contained in the hydrocarbon group and the heterocyclic group ２ - may be replaced by -O- or -S-, and the hydrocarbon group and the heterocyclic group may have a halogen atom. X a represents an oxygen atom or a sulfur atom. * indicates a binding site.]

6. R １ , R ２ , R ３ , R ４ , R ５ , R ６ , R ７ , R ８ and R ９ At least one of the following is *-X １ -R １０Ａ , or *-X １ -L １０ -X ２ -R １０Ａ and R １０ and AI － 3. The resist composition according to claim 1, wherein the acid labile group is any one of the following groups: [In the formula, R aa1’ represents a hydrogen atom or a hydrocarbon group having 1 to 12 carbon atoms. X a represents an oxygen atom or a sulfur atom. * indicates a binding site.]

7. 3. The resist composition according to claim 1, wherein X is a sulfur atom.

8. Ar １ , Ar ２ and Ar ３ 3. The resist composition according to claim 1, wherein each of the groups independently represents a group derived from a benzene ring, a naphthalene ring, a furan ring, or a thiophene ring.

9. AI － 3. The resist composition according to claim 1, wherein is an anion represented by formula (IA) or formula (IB): [In formula (IA), L ｂ１ represents a single bond or a (nb1+1)-valent hydrocarbon group which may have a substituent, and —CH ２ - is -O-, -S-, -CO- or -SO ２ It may be replaced by -. L ｂ２ represents a single bond or a divalent hydrocarbon group having 1 to 24 carbon atoms which may have a substituent, and the —CH ２ - is -O-, -S-, -CO- or -SO ２ It may be replaced by -. Y ｂ１ is a hydroxy group, *-X １ -R １０ , or *-X １ -L １１ -X ２ -R １０ represents a plurality of Y ｂ１ Among them, 2 or more Y ｂ１ are each independently *-X １ -R １０ , or *-X １ -L １１ -X ２ -R １０ Represents. X １ and X ２ has the same meaning as in formula (I). L １１ represents an alkanediyl group having 1 to 6 carbon atoms. R １０ represents an acid labile group. nb1 represents an integer of 2 to 6. The groups in multiple parentheses may be the same or different. [In formula (IB), A １ represents a nitrogen atom or a carbon atom. L ｂ２ and Y ｂ１ has the same meaning as in formula (IA). nb5 represents 2 or 3. When nb5 is 2, A １ represents a nitrogen atom; when nb5 is 3, A １ represents a carbon atom. The groups in the brackets may be the same or different. Two groups in the brackets taken together form A １ may form a ring containing the following.

10. AI － The resist composition according to claim 9, wherein is an anion represented by formula (I-A1) or formula (I-A2). [In formula (I-A1), L ｂ２ and Y ｂ１ has the same meaning as in formula (IA). Q b1 , Q b2 , Q b3 and Q. b4 each independently represents a hydrogen atom, a fluorine atom, a perfluoroalkyl group having 1 to 6 carbon atoms, or an alkyl group having 1 to 6 carbon atoms. z1 represents an integer of 0 to 6. When z1 is 2 or more, the groups in the parentheses may be the same or different. X 1 represents -O-CO-, -CO-O-, -O-CO-O- or -O-. L b3 represents a single bond or a (nb2+1)-valent hydrocarbon group having 1 to 24 carbon atoms which may have a substituent, and -CH 2 - is -O-, -S-, -CO- or -SO 2 It may be replaced by -. nb2 represents 2 or 3. The groups in multiple parentheses may be the same or different. [In formula (I-A2), L ｂ２ and Y ｂ１ has the same meaning as in formula (IA). R b1 represents a halogen atom or an alkyl group having 1 to 6 carbon atoms, and the —CH 2 - may be replaced by -O- or -CO-. nb4 represents an integer of 2 to 5. The groups in multiple parentheses may be the same or different. nb3 represents an integer of 0 to 3. When nb3 is 2 or more, a plurality of R b1 may be the same or different from each other. However, 2≦nb4+nb3≦5 is satisfied.

11. R １ , R ２ , R ３ , R ４ , R ５ , R ６ , R ７ , R ８ and R ９ 3. The resist composition according to claim 1, wherein the total number of acid labile groups contained in

12. 3. The resist composition according to claim 1, which does not contain a resin.

13. Contains one or more resins, At least one resin of the one or more resins comprises one or more structural units represented by formula (a2):

3. The resist composition according to claim 1, wherein when one or more resins contain a structural unit having an acid labile group, the content of the structural unit having an acid labile group in the resin containing the structural unit having an acid labile group is 1 mol % or less based on all structural units constituting the resin containing the structural unit having an acid labile group. [In formula (a2), R a２ represents a hydrogen atom, a halogen atom or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. A ａ２１ represents a single bond or an alkanediyl group having 1 to 12 carbon atoms, and the —CH ２ - is -O-, -CO- or -NR ａ２８ May be replaced with -. R ａ２８ represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. L ａ２１ represents a single bond or a hydrocarbon group having 1 to 28 carbon atoms, the hydrocarbon group may have a substituent, and the —CH ２ - is -O-, -CO-, -S- or -SO ２ It may be replaced with -. L ａ２２ represents a chain hydrocarbon group having 1 to 12 carbon atoms which may have a single bond or a fluorine atom, and —CH 2 - may be replaced by -O- or -CO-. na2 represents an integer of 1 to 5. When na2 is 2 or more, multiple L ａ２２ may be the same or different.

14. One or more structural units represented by formula (a2) The resist composition according to claim 13, which comprises one or more structural units represented by formula (a2-A). [In formula (a2-A), R ａ２ represents a hydrogen atom, a halogen atom or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. R ａ２７ represents a halogen atom, a hydroxy group, a carboxy group, an alkyl group having 1 to 6 carbon atoms which may have a halogen atom, an alkoxy group having 1 to 6 carbon atoms, an alkoxyalkyl group having 2 to 12 carbon atoms, an alkoxyalkoxy group having 2 to 12 carbon atoms, an alkylcarbonyl group having 2 to 4 carbon atoms, an alkylcarbonyloxy group having 2 to 4 carbon atoms, an acryloyloxy group, or a methacryloyloxy group. A ａ２１ represents a single bond or an alkanediyl group having 1 to 12 carbon atoms, and the —CH ２ - is -O-, -CO- or -NR ａ２８ May be replaced with -. R ａ２８ represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. X ａ２ represents a single bond or a carbonyl group. nA2 represents an integer of 1 to 5, and when nA2 is 2 or more, the groups in the parentheses may be the same or different. na21 represents an integer of 0 to 4, and when na21 is 2 or more, a plurality of R ａ２７ may be the same or different from each other. mc represents an integer of 0 to 2.

15. One or more structural units represented by formula (a2) The resist composition according to claim 13, which comprises a structural unit represented by formula (a2-D): [In formula (a2-D), R ａ２ represents a hydrogen atom, a halogen atom or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. R ａ２７ represents a halogen atom, a hydroxy group, a carboxy group, an alkyl group having 1 to 6 carbon atoms which may have a halogen atom, an alkoxy group having 1 to 6 carbon atoms, an alkoxyalkyl group having 2 to 12 carbon atoms, an alkoxyalkoxy group having 2 to 12 carbon atoms, an alkylcarbonyl group having 2 to 4 carbon atoms, an alkylcarbonyloxy group having 2 to 4 carbon atoms, an acryloyloxy group, or a methacryloyloxy group. A ａ２１ represents a single bond or an alkanediyl group having 1 to 12 carbon atoms, and the —CH ２ - is -O-, -CO- or -NR ａ２８ May be replaced with -. R ａ２８ represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. R ａ２１ and R ａ２２ each independently represents a fluorinated alkyl group having 1 to 4 carbon atoms. L ａ２４ represents a single bond or an alkanediyl group having 1 to 3 carbon atoms, and the alkanediyl group may be substituted with a fluorine atom. nD2 represents an integer of 1 to 5. When nD2 is 2 or more, the groups in the parentheses may be the same or different. nD22 represents an integer of 0 to 4. When nD22 is 2 or more, a plurality of R ａ２７ may be the same or different from each other. However, 1≦nD2+nD22≦5.

16. 3. The resist composition according to claim 1, wherein the content of the salt represented by formula (I) is 80 mass % or more relative to the solid content of the resist composition.

17. 14. The resist composition according to claim 13, wherein a total content of the salt represented by formula (I) and the resin containing the structural unit represented by formula (a2) is 85 mass % or more relative to the solid content of the resist composition.

18. 3. The resist composition according to claim 1, further comprising a salt capable of generating an acid having a weaker acidity than the acid generated from the acid generator.

19. (1) a step of applying the resist composition according to claim 1 or 2 onto a substrate; (2) A step of drying the applied resist composition to form a composition layer; (3) exposing the composition layer to light; (4) heating the composition layer after exposure; and (5) developing the composition layer after heating; A method for producing a resist pattern comprising the steps of:

Images