Optical components and optical modules

Abstract

To provide optical components and optical modules that can be densely mounted.SOLUTION: An optical component according to one embodiment has a first surface, a second surface intersecting the first surface, and a third surface intersecting the first and second surfaces in a cross-section perpendicular to both of the first and second surfaces. The third surface has a convex mirror for reflecting light incident to the first surface toward the second surface. The second surface has a lens for outputting the light reflected from the convex mirror as collimated light.SELECTED DRAWING: Figure 3

Description

Technical Field

[0001] The present disclosure relates to optical components and optical modules.

Background Art

[0002] Patent Document 1 describes a wideband photonic bump (WBB) disposed in an optical waveguide. The WBB is mounted on an optical integrated circuit (PIC). The PIC has an inverse taper, a positive taper, a curved mirror, and an inclined plane mirror. An optical beam propagates through the inverse taper, and the positive taper expands the optical beam of the inverse taper. The optical beam expanded by the positive taper is reflected by the inclined plane mirror.

[0003] Patent Document 2 describes a substrate, a silicon photonics chip (SiPh chip), and a photonic plug. The SiPh chip has a curved mirror and an inclined plane mirror. The photonic plug has a second inclined plane mirror and a second curved mirror. Light from an optical fiber is incident on the second inclined plane mirror, and the second inclined plane mirror reflects the light toward the curved mirror. The curved mirror reflects the light from the second inclined plane mirror toward the inclined plane mirror, and the light reflected by the inclined plane mirror is incident on the waveguide of the SiPh chip.

[0004] Patent Document 3 describes a beam-expanding reflection prism having an incident surface, a reflection surface, and an exit surface. The reflection surface forms an angle of 45° with respect to the incident surface. The exit surface forms an angle of 45° with respect to the reflection surface. The reflection surface has a convex spherical mirror portion whose central portion penetrates into the prism body. The portion of the optical path from the reflection portion of the convex spherical mirror portion in the prism body to the exit surface functions as a concave lens. Thus, the beam diameter of the light emitted from the exit surface becomes larger with respect to the incident light.

[0005] Patent Document 4 describes an optical pickup device. The optical pickup device includes a laser diode that emits light, a mirror that reflects the light from the laser diode, an objective lens that condenses the light reflected by the mirror, and an optical disk that receives the light condensed by the objective lens. The mirror has a convex mirror. This mirror functions as a light diverging means for increasing the beam diameter at the objective lens.

Prior Art Documents

Patent Documents

[0006]

Patent Document 1

Patent Document 2

Patent Document 3

Patent Document 4

Summary of the Invention

Problems to be Solved by the Invention

[0007] By the way, in an optical module including optical components such as a lens and a mirror, a long optical path length may be required to emit light with an enlarged beam diameter. In this case, there is a concern about the increase in size of the optical components and the optical module. Therefore, it is required to shorten the optical path length of the optical components to mount the optical components at high density and realize the miniaturization of the optical components and the optical module.

[0008] An object of the present disclosure is to provide an optical component and an optical module that can be mounted at high density.

Means for Solving the Problems

[0009] The optical component according to the present disclosure has a first surface, a second surface intersecting the first surface, and a third surface intersecting the first and second surfaces in a cross-section orthogonal to both the first and second surfaces. The third surface has a convex mirror that reflects light incident on the first surface toward the second surface. The second surface has a lens that emits the light reflected from the convex mirror as collimated light.

Effects of the Invention

[0010] According to the present disclosure, it is possible to provide an optical component and an optical module that can be mounted with high density.

Brief Description of the Drawings

[0011]

Figure 1

Figure 2

Figure 3

Figure 4

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Figure 8

Figure 9

Figure 10

Modes for Carrying Out the Invention

[0012] [Description of Embodiments of the Present Disclosure] First, embodiments of the optical component and the optical module according to the present disclosure will be listed and described. (1) An optical component according to one embodiment has a first surface, a second surface intersecting the first surface, and a third surface intersecting the first and second surfaces in a cross-section orthogonal to both the first and second surfaces. The third surface has a convex mirror that reflects light incident on the first surface toward the second surface. The second surface has a lens that emits the light reflected from the convex mirror as collimated light.

[0013] This optical component has a first surface, a second surface, and a third surface, and light is incident on the first surface. The third surface has a convex mirror that reflects light incident on the first surface toward the second surface. By having the convex mirror on the third surface, the beam diameter of the light traveling from the convex mirror toward the second surface can be enlarged. The second surface has a lens, and the lens emits the light reflected from the convex mirror as collimated light. Therefore, the light with an enlarged beam diameter by the convex mirror can be emitted outside the optical component as collimated light. In this optical component, since the convex mirror for enlarging the beam diameter of the light is formed on the third surface, and the lens for converting the light into collimated light is formed on the second surface intersecting the third surface, a long optical path length can be made unnecessary. Thus, the optical path length of the optical component can be shortened and the optical component can be mounted at high density.

[0014] (2) In the above (1), when the direction in which the third surface extends in the above cross-section is defined as the X direction, the direction in which the third surface extends and is orthogonal to the X direction is defined as the Y direction, and the direction orthogonal to the third surface is defined as the Z direction, the length in the X direction, the length in the Y direction, and the length in the Z direction may be 300 μm or less. In this case, since the optical component can be miniaturized, the optical component can be mounted at a higher density.

[0015] (3) In the above (1) or (2), when the direction in which the third surface extends in the cross section is defined as the X direction, the direction in which the third surface extends and is orthogonal to the X direction is defined as the Y direction, and the direction orthogonal to the third surface is defined as the Z direction, the curvature of the convex mirror cut by the surface extending in both the Z direction and the X direction may be different from the curvature of the convex mirror cut by the surface extending in both the Y direction and the Z direction. In this case, the light emitted from the lens can be made symmetrically closer.

[0016] (4) In any of the above (1) to (3), the angle of the third surface with respect to the optical axis of the light incident on the first surface may be 35° or more and 42° or less. In this case, the non-reflection component of the light in the convex mirror can be reduced.

[0017] (5) The optical module according to one embodiment of the present disclosure includes a first optical component having the above-described optical component and an optical fiber fixed to the first surface of the optical component, and a second optical component having the above-described optical component and a silicon photonics element fixed to the first surface of the optical component. The lens of the optical component of the first optical component and the lens of the optical component of the second optical component are optically coupled to each other.

[0018] (6) The optical module according to another embodiment of the present disclosure includes a first optical component having the above-described optical component and an optical fiber fixed to the first surface of the optical component, and a second optical component having the above-described optical component and a silicon photonics element fixed to the optical component. The silicon photonics element has an end face facing the first surface of the optical component and a protruding portion protruding from the end face. The optical component of the second optical component has a fixing portion fixed to the protruding portion and a convex lens that is optically coupled to the silicon photonics element in a state where the fixing portion is fixed to the protruding portion.

[0019] (7) Another form of the optical module according to the present disclosure includes a first optical component having the optical component described above and a glass substrate on which the first surface of the optical component is fixed and a first recess into which the optical component enters, and a second optical component having the optical component described above and a silicon photonics element on which the first surface of the optical component is fixed and a second recess into which the optical component enters. The lens of the optical component of the first optical component and the lens of the optical component of the second optical component are optically coupled to each other.

[0020] In each of the above optical modules, by providing the first optical component having an optical fiber or a glass substrate and the second optical component having a silicon photonics element with the optical component described above, the optical path length can be shortened and the optical component and the optical module can be mounted at high density.

[0021] [Details of Embodiments of the Present Disclosure] Specific examples of the optical component and the optical module according to the embodiment will be described below with reference to the drawings. Note that the present invention is not limited to the following examples, and is intended to include all modifications within the scope shown in the claims and equivalent scopes. In the description of the drawings, the same or corresponding elements are denoted by the same reference numerals, and redundant descriptions are omitted as appropriate. The drawings may be drawn with some parts simplified or exaggerated for ease of understanding, and the dimensional ratios and the like are not limited to those described in the drawings.

[0022] FIG. 1 is a perspective view showing an optical module 1 and an optical component 10 according to an embodiment. As shown in FIG. 1, the optical module 1 includes a first optical component 2 and a second optical component 3. The first optical component 2 has an optical fiber 2b and an optical component 10 fixed to an end face 2h of the optical fiber 2b. The second optical component 3 has a silicon photonics element 3b and an optical component 10 fixed to the silicon photonics element 3b. For example, the optical component 10 is manufactured by a 3D printer. However, the manufacturing method of the optical component 10 is not particularly limited. The material of the optical component 10 may be resin or glass.

[0023] The first optical component 2 has, for example, a fiber array 2c that holds an optical fiber 2b. The fiber array 2c has the optical fiber 2b and a V-groove substrate 2f in which a V-groove 2d into which the optical fiber 2b is inserted is formed. For example, the optical fiber 2b is fixed in the V-groove 2d. For example, the fiber array 2c may further have a pressing substrate (not shown), and the optical fiber 2b may be pressed into the V-groove 2d by the pressing substrate. In the first optical component 2, the optical fiber 2b and the V-groove 2d extend along a first direction D1. The first optical component 2 has a plurality of optical fibers 2b, and the V-groove substrate 2f has a plurality of V-grooves 2d. The plurality of optical fibers 2b and the plurality of V-grooves 2d are arranged along a second direction D2 that intersects the first direction D1. In the silicon photonics element 3b, a plurality of individuals are formed on one wafer. When a plurality of individuals are formed on the wafer, as shown in FIG. 1, another second optical component 3 is arranged next to one second optical component 3 along the first direction D1.

[0024] FIG. 2 is a diagram schematically showing a cross section of the first optical component 2 and the second optical component 3. As shown in FIGS. 1 and 2, the silicon photonics element 3b has, for example, an Si layer 3c and an SiN layer 3d laminated on the Si layer 3c. The silicon photonics element 3b has an optical waveguide 3f, and for example, the optical waveguide 3f is formed in the SiN layer 3d. The silicon photonics element 3b has a plurality of optical waveguides 3f, and the plurality of optical waveguides 3f are arranged along the second direction D2.

[0025] For example, the optical module 1 has a plurality of optical components 10, and the plurality of optical components 10 are arranged along the second direction D2. The plurality of optical components 10 may be arranged in an array. The silicon photonics element 3b has an end face 3g to which the optical component 10 is fixed. The end face 3g extends along the second direction D2 and a third direction D3 at an end of the silicon photonics element 3b in the first direction D1. The third direction D3 is a direction that intersects (orthogonal in one example) both the first direction D1 and the second direction D2.

[0026] The optical component 10 fixed to the end face 2h of the optical fiber 2b and the optical component 10 fixed to the end face 3g of the silicon photonics element 3b are arranged side by side along the third direction D3. For example, the optical component 10 fixed to the end face 2h is optically coupled to the optical component 10 fixed to the end face 3g. Thereby, the optical fiber 2b and the silicon photonics element 3b are optically coupled to each other via the two optical components 10.

[0027] Hereinafter, the direction in which the optical component 10 fixed to the optical fiber 2b is provided as viewed from the optical component 10 fixed to the silicon photonics element 3b may be referred to as up, upper side, or upward, and the direction in which the optical component 10 fixed to the silicon photonics element 3b is provided as viewed from the optical component 10 fixed to the optical fiber 2b may be referred to as down, lower side, or downward. In the present embodiment, the third direction D3 coincides with the downward direction. However, these directions are for convenience of explanation and do not limit the arrangement position or direction of an object, etc.

[0028] Next, the optical component 10 will be described in detail. FIG. 3 is a perspective view showing the optical component 10. As shown in FIGS. 2 and 3, the optical component 10 has a first surface 11, a second surface 12 intersecting the first surface 11, and a third surface 13 intersecting the first surface 11 and the second surface 12 in a cross section orthogonal to both the first surface 11 and the second surface 12. In the cross section, the direction in which the third surface 13 extends is defined as the X direction, the direction in which the third surface 13 extends and is orthogonal to the X direction is defined as the Y direction, and the direction orthogonal to the third surface 13 is defined as the Z direction.

[0029] The first surface 11 is a surface on which light L is incident from the outside of the optical component 10. For example, light L propagating through the optical waveguide 3f or light L propagating through the optical fiber 2b is incident on the first surface 11. The first surface 11 extends along the second direction D2 and the third direction D3. The third surface 13 has a convex mirror 13b that reflects the light L incident on the first surface 11 toward the second surface 12. The convex mirror 13b protrudes from the third surface 13 when viewed from the light L incident on the first surface 11. The second surface 12 has a lens 12b that emits the light L reflected by the convex mirror 13b as collimated light. The shape of the lens 12b in a top view (plan view) is, for example, circular. For example, the lens 12b is an aspherical lens. When the lens 12b is an aspherical lens, the efficiency of optical coupling can be improved when two optical components 10 are opposed to each other and optically coupled compared to the case where the lens 12b is a spherical lens. However, for example, when high efficiency is not required for optical coupling, the lens 12b may be a spherical lens. The shape of the lens 12b can be changed as appropriate.

[0030] For example, the lens 12b of the optical component 10 of the first optical component 2 and the lens 12b of the optical component 10 of the second optical component 3 are optically coupled to each other. For example, the light L incident on the first surface 11 is reflected by the convex mirror 13b toward the lens 12b and the divergence angle of the light L is widened. When the light L with the widened divergence angle is incident on the lens 12b, the light L is converted into collimated light by the lens 12b and emitted from the lens 12b to the outside of the optical component 10. In the present disclosure, "collimated light" includes not only strictly parallel light but also light that converges more after passing through the lens 12b than before passing through the lens 12b.

[0031] FIG. 4 shows a side view of the optical component 10 as viewed along the Y direction, a front view of the optical component 10 as viewed along a direction orthogonal to the first surface 11, and a plan view of the optical component 10 as viewed along the first surface 11. As shown in FIGS. 3 and 4, the optical component 10 has a fourth surface 14 that extends in both the Z direction and the X direction at an end of the optical component 10 in the Y direction, and a fifth surface 15 that extends in both the Z direction and the X direction at an end of the optical component 10 opposite to the fourth surface 14.

[0032] For example, the length of the optical component 10 in the X direction, the length of the optical component 10 in the Y direction, and the length of the optical component 10 in the Z direction are 300 μm or less. For example, the length L1 of the optical component 10 in the third direction D3 is 50 μm or more and 100 μm or less (for example, 85 μm). The length L2 of the optical component 10 in the direction orthogonal to the first surface 11 is, for example, 50 μm or more and 80 μm or less (for example, 66 μm). The length L3 of the optical component 10 in the Y direction is, for example, 50 μm or more and 80 μm or less (for example, 67 μm). The length of the lens 12b in the Y direction may be approximately the same as the length L3 of the optical component 10 in the Y direction.

[0033] The first surface 11 has a connection portion 11b connected to the optical waveguide 3f (or the optical fiber 2b). For example, the length L4 of the optical axis of the light L extending from the connection portion 11b to the third surface 13 is 20 μm or more and 30 μm or less (for example, 25 μm). For example, the length L5 of the optical axis of the light L extending from the third surface 13 to the lens 12b is 50 μm or more and 70 μm or less (for example, 60 μm). For example, the angle θ1 of the third surface 13 with respect to the optical axis of the light L incident on the first surface 11 is 35° or more and 42° or less (for example, 39°). The angle θ2 between the second surface 12 and the first surface 11 is, for example, 80° or more and 90° or less (for example, 84°).

[0034] For example, when viewed from a direction orthogonal to the first surface 11, the convex mirror 13b has an elliptical shape with a major axis extending along the Y direction. Also, when viewed along the Z direction, the convex mirror 13b has a circular shape. FIG. 5 shows a cross-section (ZX cross-section) of the convex mirror 13b when cut by a plane extending in both the Z direction and the X direction, and a cross-section (YZ cross-section) of the convex mirror 13b when cut by a plane extending in both the Y direction and the Z direction. Each cross-section in FIG. 5 is a cross-section passing through the center of the convex mirror 13b. As shown in FIG. 5, the curvature of the convex mirror 13b cut by a plane extending in both the Z direction and the X direction is different from the curvature of the convex mirror 13b cut by a plane extending in both the Y direction and the Z direction.

[0035] In this embodiment, the curvature of the convex mirror 13b in the ZX cross-section is smaller than the curvature of the convex mirror 13b in the YZ cross-section. That is, the radius of curvature of the convex mirror 13b in the ZX cross-section is larger than the radius of curvature of the convex mirror 13b in the YZ cross-section. For example, the radius of curvature of the convex mirror 13b in the ZX cross-section is 50 μm or more and 100 μm or less (for example, 70 μm), and the radius of curvature of the convex mirror 13b in the YZ cross-section is 20 μm or more and 30 μm or less (for example, 25 μm).

[0036] The operation and effects of the optical component 10 and the optical module 1 configured as described above will be explained. The optical component 10 has a first surface 11, a second surface 12, and a third surface 13, and light L is incident on the first surface 11. The third surface 13 has a convex mirror 13b that reflects the light L incident on the first surface 11 toward the second surface 12. By having the convex mirror 13b on the third surface 13, the beam diameter of the light L traveling from the convex mirror 13b toward the second surface 12 can be enlarged. The second surface 12 has a lens 12b, and the lens 12b emits the light L reflected from the convex mirror 13b as collimated light. Therefore, the light L with an enlarged beam diameter by the convex mirror 13b can be emitted outside the optical component 10 as collimated light. In the optical component 10, since the convex mirror 13b that enlarges the beam diameter of the light L is formed on the third surface 13, and the lens 12b that converts the light L into collimated light is formed on the second surface 12 that intersects the third surface 13, a long optical path length can be made unnecessary. Thus, the optical path length of the optical component 10 can be shortened and the optical component 10 can be mounted at high density. As shown in FIG. 2, regarding the alignment of the optical axis of the lower optical component 10 and the optical axis of the upper optical component 10 when two optical components 10 are facing each other vertically along the third direction D3, the tolerance for misalignment between the optical axes can be increased by enlarging the beam diameter. Thereby, a decrease in the efficiency in the optical coupling of the two optical components 10 can be reduced. Further, for example, as shown in FIG. 1, the second optical component 3 emits collimated light along the direction perpendicular to the wafer surface (third direction D3) by fixing the optical component 10 to each of a plurality of silicon photonics elements 3b formed in a wafer state. Therefore, the individual second optical components 3 can be inspected in a wafer state.

[0037] As described above, when the direction in which the third surface 13 extends in the above cross section is defined as the X direction, the direction in which the third surface 13 extends and is orthogonal to the X direction is defined as the Y direction, and the direction orthogonal to the third surface 13 is defined as the Z direction, the lengths in the X direction, Y direction, and Z direction may be 300 μm or less. In this case, since the optical component 10 can be miniaturized, the optical component 10 can be mounted at a higher density. As described above, the curvature of the convex mirror 13b cut by the surface extending in both the Z direction and the X direction may be different from the curvature of the convex mirror 13b cut by the surface extending in both the Y direction and the Z direction. In this case, the light L emitted from the lens 12b can be symmetrically approximated.

[0038] As described above, the angle of the third surface 13 with respect to the optical axis of the light L incident on the first surface 11 may be 35° or more and 42° or less. In this case, the non-reflection component of the light L in the convex mirror 13b can be reduced.

[0039] The optical module 1 includes a first optical component 2 having an optical component 10 and an optical fiber 2b fixed to the first surface 11 of the optical component 10, and a second optical component 3 having an optical component 10 and a silicon photonics element 3b fixed to the first surface 11 of the optical component 10. The lens 12b of the optical component 10 of the first optical component 2 and the lens 12b of the optical component 10 of the second optical component 3 are optically coupled to each other. In the optical module 1, since each of the first optical component 2 having the optical fiber 2b and the second optical component 3 having the silicon photonics element 3b includes the optical component 10, the optical path length can be shortened and the optical component 10 and the optical module 1 can be mounted at a high density.

[0040] Next, various modifications of the optical module and the optical component according to the present disclosure will be described. Some configurations of the optical module and the optical component according to the various modifications are the same as some configurations of the optical module 1 and the optical component 10 described above. Therefore, hereinafter, descriptions overlapping with the descriptions of the optical module 1 and the optical component 10 will be appropriately omitted with the same reference numerals.

[0041] FIG. 6 is a diagram schematically showing a cross section of the optical module 1A according to the first modification. As shown in FIG. 6, the optical module 1A includes a first optical component 2 and a second optical component 3A. The second optical component 3A is different from the second optical component 3 described above in that it has a silicon photonics element 3h having a shape different from that of the silicon photonics element 3b. The silicon photonics element 3h has a SiN layer 3d and a Si layer 3j laminated on the SiN layer 3d.

[0042] The Si layer 3j has an end face 3k to which the first face 11 of the optical component 10 is fixed, and a protruding portion 3p that protrudes from the upper end of the end face 3k and is located above the optical component 10. The protruding portion 3p is interposed between the optical component 10 fixed to the optical fiber 2b and the optical component 10 fixed to the silicon photonics element 3h. The light L from the lens 12b of the optical component 10 fixed to the silicon photonics element 3h is, for example, light in the communication wavelength band and passes through the Si layer 3j. The lens 12b of the optical component 10 fixed to the silicon photonics element 3h is optically coupled to the lens 12b of the optical component 10 fixed to the optical fiber 2b via the protruding portion 3p.

[0043] FIG. 7 is a diagram schematically showing a cross section of the optical module 1B according to the second modification. As shown in FIG. 7, the optical module 1B includes a first optical component 2 and a second optical component 3B. The second optical component 3B has a silicon photonics element 3q having a shape different from that of the silicon photonics element 3b and an optical component 10A having a shape different from that of the optical component 10. The optical component 10A is different from the optical component 10 described above in that it has a convex lens 11c optically coupled to the silicon photonics element 3q and a fixing portion 16 fixed to the silicon photonics element 3q. The fixing portion 16 extends along the second face 12 between the first face 11 and the third face 13.

[0044] The silicon photonics device 3q has a SiN layer 3d and a Si layer 3r on which the SiN layer 3d is laminated. The Si layer 3r has an end face 3s facing the optical component 10A and a protruding portion 3t protruding from the lower end of the end face 3s to which the optical component 10A is fixed. The fixing portion 16 of the optical component 10A is fixed to the protruding portion 3t. In a state where the fixing portion 16 is fixed to the silicon photonics device 3q (the protruding portion 3t), the convex lens 11c of the optical component 10A is optically coupled to the optical waveguide 3f of the silicon photonics device 3q.

[0045] As described above, the optical module 1B according to the second modification includes a first optical component 2 having an optical component 10 and an optical fiber 2b fixed to the first surface 11 of the optical component 10, and a second optical component 3B having an optical component 10A and a silicon photonics device 3q fixed to the optical component 10A. The silicon photonics device 3q has an end face 3s facing the first surface 11 of the optical component 10 and a protruding portion 3t protruding from the end face 3s. The optical component 10A of the second optical component 3B has a fixing portion 16 fixed to the protruding portion 3t and a convex lens 11c that is optically coupled to the silicon photonics device 3q in a state where the fixing portion 16 is fixed to the protruding portion 3t. In the optical module 1B, since each of the first optical component 2 having the optical fiber 2b and the second optical component 3B having the silicon photonics device 3q includes the optical components 10 and 10A, the optical path length can be shortened and the optical components 10 and 10A and the optical module 1B can be mounted at high density.

[0046] FIG. 8 is a diagram schematically showing a cross section of an optical module 1C according to a third modification. As shown in FIG. 8, the optical module 1C includes a first optical component 2 and a second optical component 3C. The second optical component 3C includes a silicon photonics element 3h and an optical component 10B having a shape different from that of the optical component 10A. The optical component 10B has a fixing portion 16A provided on the second surface 12 instead of the fixing portion 16 described above. The fixing portion 16A is fixed to a protruding portion 3p of the silicon photonics element 3h. The fixing portion 16A has a plurality of protruding portions 16b protruding from the second surface 12. The plurality of protruding portions 16b are arranged, for example, along the first direction D1. The fixing portion 16A is fixed to the silicon photonics element 3h by fixing the upper surface of the protruding portion 16b to the lower surface of the protruding portion 3p.

[0047] FIG. 9 is a diagram schematically showing a cross section of an optical module 1D according to a fourth modification. As shown in FIG. 9, the optical module 1D includes a first optical component 2D and a second optical component 3D. The first optical component 2D includes an optical component 10 and a glass substrate 20 having a first concave portion 21 formed therein where the first surface 11 of the optical component 10 is fixed and the optical component 10 is inserted. The second optical component 3D includes an optical component 10 and a silicon photonics element 30 having a second concave portion 31 formed therein where the first surface 11 of the optical component 10 is fixed and the optical component 10 is inserted.

[0048] The glass substrate 20 has a first surface 22 and a second surface 23 opposite to the first surface 22. The first concave portion 21 opens to the first surface 22. The glass substrate 20 has a glass waveguide 24 extending toward the first concave portion 21. The glass waveguide 24 is optically coupled to the silicon photonics element 30 via the optical component 10 of the first optical component 2D and the optical component 10 of the second optical component 3D. The first concave portion 21 is defined by an inner surface 21b where the glass waveguide 24 is formed and the first surface 11 of the optical component 10 is fixed, a bottom surface 21c facing the optical component 10 along the third direction D3, and an inner surface 21d facing the inner surface 21b along the first direction D1.

[0049] The silicon photonics device 30 has an Si layer 32 and an SiN layer 33 laminated on the Si layer 32. The silicon photonics device 30 has an optical waveguide 34. For example, the optical waveguide 34 is formed in the SiN layer 33. The optical waveguide 34 is optically coupled to the glass waveguide 24 via the optical component 10 of the second optical component 3D and the optical component 10 of the first optical component 2D. The Si layer 32 has a third surface 35 fixed to the first surface 22 of the glass substrate 20 and a fourth surface 36 opposite to the third surface 35. The second recess 31 opens to the fourth surface 36. The second recess 31 is defined by an inner surface 31b facing the first surface 11 of the optical component 10, a bottom surface 31c facing the optical component 10 along the third direction D3, and an inner surface 31d facing the inner surface 31b along the first direction D1.

[0050] As described above, the optical module 1D includes a first optical component 2D having an optical component 10 and a glass substrate 20 on which the first surface 11 of the optical component 10 is fixed and a first recess 21 into which the optical component 10 is inserted, and a second optical component 3D having an optical component 10 and a silicon photonics device 30 on which the first surface 11 of the optical component 10 is fixed and a second recess 31 into which the optical component 10 is inserted. The lens 12b of the optical component 10 of the first optical component 2D and the lens 12b of the optical component 10 of the second optical component 3D are optically coupled to each other. In the optical module 1D, since each of the first optical component 2D having the glass substrate 20 and the second optical component 3D having the silicon photonics device 30 includes the optical component 10, the optical path length can be shortened and the optical component 10 and the optical module 1D can be mounted at high density. Further, since the optical component 10 is inserted into each of the first recess 21 and the second recess 31, it contributes to the miniaturization of the optical module 1D.

[0051] FIG. 10 is a diagram schematically showing a cross section of an optical module 1E according to a fifth modification. As shown in FIG. 10, the optical module 1E includes a first optical component 2D and a second optical component 3E. The second optical component 3E includes an optical component 10 and a silicon photonics element 30E in which a second recess 31E with the first surface 11 of the optical component 10 fixed thereto is formed. The silicon photonics element 30E includes an SiN layer 33E in which an optical waveguide 34 is formed and an Si layer 32E laminated on the SiN layer 33E.

[0052] The silicon photonics element 30E has a third surface 35E fixed to the first surface 22 of the glass substrate 20 and a fourth surface 36E opposite to the third surface 35E. The second recess 31E opens to the third surface 35E. The second recess 31E faces the first recess 21 along the third direction D3, and the internal space of the second recess 31E communicates with the internal space of the first recess 21. The second recess 31E is defined by an inner surface 31f facing the first surface 11 of the optical component 10, a bottom surface 31g facing the bottom surface 21c of the first recess 21 along the third direction D3, and an inner surface 31h facing the inner surface 31f along the first direction D1.

[0053] As described above, similar to the optical module 1D described above, the optical module 1E includes a first optical component 2D having a glass substrate 20 in which a first recess 21 is formed and a second optical component 3D having a silicon photonics element 30E in which a second recess 31E is formed. The lens 12b of the optical component 10 of the first optical component 2D and the lens 12b of the optical component 10 of the second optical component 3E are optically coupled to each other. Therefore, the same operational effects as those of the optical module 1D can be obtained from the optical module 1E.

[0054] The embodiments and various modifications of the optical component and the optical module according to the present disclosure have been described above. However, the optical component and the optical module according to the present disclosure are not limited to the above-described embodiments or modifications, and may be further modified within the scope of the gist described in the claims. That is, the configuration, shape, size, material, number, and arrangement mode of each part of the optical component and the optical module according to the present disclosure can be appropriately changed within the scope of the above gist.

Explanation of Reference Numerals

[0055] 1, 1A, 1B, 1C, 1D, 1E... optical module 2, 2D... first optical component 2b... optical fiber 2c... fiber array 2d... V-groove 2f... V-groove substrate 2h... end face 3, 3A, 3B, 3C, 3D, 3E... second optical component 3b... silicon photonics element 3c... Si layer 3d... SiN layer 3f... optical waveguide 3g... end face 3h, 3q... silicon photonics element 3j... Si layer 3k... end face 3p... protruding portion 3r... Si layer 3s... end face 3t... protruding portion 10, 10A, 10B... optical component 11... first surface 11b... connection portion 11c... convex lens 12... second surface 12b... lens 13... third surface 13b... convex mirror 14... fourth surface 15... fifth surface 16, 16A... fixing portion 16b... protruding portion 20... glass substrate 21…First concave part 21b…Inner surface 21c…Bottom surface 21d…Inner surface 22…First surface 23…Second surface 24…Glass waveguide 30, 30E…Silicon photonics element 31, 31E…Second concave part 31b…Inner surface 31c…Bottom surface 31d…Inner surface 31f…Inner surface 31g…Bottom surface 31h…Inner surface 32, 32E…Si layer 33, 33E…SiN layer 34…Optical waveguide 35, 35E…Third surface 36, 36E…Fourth surface L…Light

Claims

1. a first surface, a second surface intersecting the first surface, and a third surface intersecting the first surface and the second surface in a cross section perpendicular to both the first surface and the second surface; the third surface has a convex mirror that reflects light incident on the first surface toward the second surface, the second surface has a lens that outputs the light reflected from the convex mirror as collimated light; Optical components.

2. When the direction in which the third surface extends in the cross section is defined as an X direction, the direction in which the third surface extends and is perpendicular to the X direction is defined as a Y direction, and the direction perpendicular to the third surface is defined as a Z direction, the length in the X direction, the length in the Y direction, and the length in the Z direction are 300 μm or less. The optical component according to claim 1 .

3. When the direction in which the third surface extends in the cross section is defined as an X direction, the direction in which the third surface extends and is perpendicular to the X direction is defined as a Y direction, and the direction perpendicular to the third surface is defined as a Z direction, a curvature of the convex mirror cut by a surface extending in both the Z direction and the X direction is different from a curvature of the convex mirror cut by a surface extending in both the Y direction and the Z direction; The optical component according to claim 1 or 2.

4. an angle of the third surface with respect to an optical axis of light incident on the first surface is 35° or more and 42° or less; The optical component according to claim 1 or 2.

5. a first optical component having the optical component according to claim 1 or 2 and an optical fiber fixed to the first surface of the optical component; a second optical component having the optical component according to claim 1 or 2 and a silicon photonics element fixed to the first surface of the optical component; Equipped with The lens of the optical component of the first optical component and the lens of the optical component of the second optical component are optically coupled to each other. Optical module.

6. a first optical component having the optical component according to claim 1 or 2 and an optical fiber fixed to the first surface of the optical component; A second optical component having the optical component according to claim 1 or 2 and a silicon photonics element fixed to the optical component; Equipped with the silicon photonics device has an end surface facing the first surface of the optical component and a protrusion protruding from the end surface; The optical component of the second optical component has a fixing portion fixed to the protruding portion, and a convex lens optically coupled to the silicon photonics element when the fixing portion is fixed to the protruding portion. Optical module.

7. a first optical component including the optical component according to claim 1 or 2 and a glass substrate to which the first surface of the optical component is fixed and in which a first recess into which the optical component is inserted is formed; a second optical component including the optical component according to claim 1 or 2 and a silicon photonics element to which the first surface of the optical component is fixed and in which a second recess into which the optical component is inserted is formed; Equipped with The lens of the optical component of the first optical component and the lens of the optical component of the second optical component are optically coupled to each other. Optical module.

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