Conveyance system, conveyance device, control method, and program

Abstract

To provide a conveyance system capable of reducing the possibility that a conveyance device may deliver the wrong target.SOLUTION: A conveyance system 100 includes a storage unit 25, a connection unit, an acquisition unit 194, and a determination unit 322. The storage unit 25 stores conveyance target information I1 regarding a conveyance target 2. The conveyance target 2 is conveyed by the conveyance device 1, and supplies components to a substrate processing unit 4 in a state connected to the substrate processing unit 4 that regards a substrate as a work target. The connection unit is connected to a part to be connected of the conveyance target 2. The acquisition unit 194 acquires the conveyance target information I1 from the storage unit 25 in a state that the connection unit is connected to the part to be connected. The determination unit 322 determines whether the conveyance target 2 is the target to be conveyed by the conveyance device 1 based on the conveyance target information I1 acquired by the acquisition unit 194.SELECTED DRAWING: Figure 1

Description

Technical Field

[0001] The present disclosure relates to a conveyance system, a conveyance device, a control method, and a program, and more particularly to a conveyance system, a conveyance device, a control method, and a program used for a substrate processing apparatus that uses a substrate as a work target.

Background Art

[0002] Conventionally, a conveyance device that grips and conveys an object to be conveyed has been known (see Patent Document 1).

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] In a conveyance system including a conveyance device as described in Patent Document 1, the conveyance device may convey an incorrect object to be conveyed.

[0005] In view of the above reasons, the present disclosure is made, and an object thereof is to provide a conveyance system, a conveyance device, a control method, and a program that can reduce the possibility that the conveyance device conveys an incorrect object to be conveyed.

Means for Solving the Problems

[0006] A transport system according to one aspect of the present disclosure includes a storage unit, a connection unit, an acquisition unit, and a determination unit. The storage unit stores transport target information regarding a transport target that is transported by a transport device and supplies parts to a substrate processing device that has a substrate as a work target while being connected to the substrate processing device. The connection unit is connected to a connection target portion of the transport target. The acquisition unit acquires the transport target information from the storage unit in a state where the connection unit is connected to the connection target portion. The determination unit determines whether the transport target is a target to be transported by the transport device based on the transport target information acquired by the acquisition unit.

[0007] A transport device according to one aspect of the present disclosure includes a connection unit, an acquisition unit, and a determination unit. The connection unit is connected to a connection target portion of a transport target that supplies parts to a substrate processing device that has a substrate as a work target while being connected to the substrate processing device. The acquisition unit acquires transport target information regarding the transport target in a state where the connection unit is connected to the connection target portion. The determination unit determines whether the transport target is a target to be transported based on the transport target information acquired by the acquisition unit.

[0008] A control method according to one aspect of the present disclosure includes a storage step, an acquisition step, and a determination step. In the storage step, transport target information regarding a transport target is stored. The transport target is transported by a transport device and supplies parts to a substrate processing device that has a substrate as a work target while being connected to the substrate processing device. In the acquisition step, the transport target information stored in the storage step is acquired in a state where a connection unit connected to a connection target portion of the transport target is connected to the connection target portion. In the determination step, it is determined whether the transport target is a target to be transported by the transport device based on the transport target information acquired in the acquisition step.

[0009] A program according to one aspect of the present disclosure is a program for causing one or more processors to execute the control method.

Advantages of the Invention

[0010] According to the present disclosure, the possibility that the conveying device conveys an incorrect object to be conveyed can be reduced.

Brief Description of the Drawings

[0011]

Figure 1

Figure 2

Figure 3

Figure 4

Figure 5

Figure 6

Figure 7

Figure 8

Figure 9

Figure 10

Figure 11

Figure 12

Figure 13

Figure 14

Figure 15

Figure 16

[0012] The transport system 100 according to the embodiment of the present disclosure will be described in detail with reference to the drawings. Note that each drawing referred to in the following description is a schematic diagram, and the ratio of the size and thickness of each component in each drawing does not necessarily reflect the actual dimensional ratio. Further, the embodiments and modifications described below are merely examples of the present disclosure, and the present disclosure is not limited to the embodiments and modifications. Even outside these embodiments and modifications, various changes can be made according to the design and the like without departing from the technical idea of the present disclosure.

[0013] (1) Overview First, the overview of the transport system 100 of the present embodiment will be described with reference to FIGS. 1 to 3.

[0014] As shown in FIGS. 1 to 3, the transport system 100 includes a storage unit 25, a connection unit C1, an acquisition unit 194, and a determination unit 322.

[0015] The storage unit 25 stores transport target information I1 regarding the transport target 2. As shown in FIG. 2, the transport target 2 is transported by the transport device 1 and supplies parts to the substrate processing device 4 with the substrate as the work target while being connected to the substrate processing device 4.

[0016] As shown in FIGS. 2 and 3, the connection unit C1 is connected to a connected portion C2 of the transport target 2.

[0017] The acquisition unit 194 acquires the transport target information I1 from the storage unit 25 in a state where the connection unit C1 is connected to the connected portion C2.

[0018] Based on the conveyance target information I1 acquired by the acquisition unit 194, the determination unit 322 determines whether the conveyance target 2 is a target to be conveyed by the conveyance device 1.

[0019] Further, the conveyance device 1 includes a connection unit C1, an acquisition unit 194, and a determination unit 322. The connection unit C1 is connected to a connection part C2 of the conveyance target 2 that supplies parts to the substrate processing device 4 in a state of being connected to the substrate processing device 4 that uses the substrate as a work target. The acquisition unit 194 acquires conveyance target information I1 regarding the conveyance target 2 in a state where the connection unit C1 is connected to the connection part C2. Based on the conveyance target information I1 acquired by the acquisition unit 194, the determination unit 322 determines whether the conveyance target 2 is a target to be conveyed.

[0020] Here, the conveyance device 1 is used for conveyance work in facilities such as factories, logistics centers (including distribution centers), offices, stores, schools, and hospitals. The conveyance device 1 moves by traveling on the moving surface G1 with one or more wheels. The moving surface G1 is the surface on which the conveyance device 1 moves. When the conveyance device 1 moves inside the facility, the floor surface of the facility etc. becomes the moving surface G1, and when the conveyance device 1 moves outdoors, the ground etc. becomes the moving surface G1. Note that the conveyance device 1 is not limited to a vehicle-type robot that moves (travels) on the moving surface G1 with wheels. The conveyance device 1 may be an aerial drone that flies in the air, a water drone that sails on water, or an underwater drone that sails underwater etc. However, in the following embodiments, the case where the conveyance device 1 is a vehicle-type robot that travels on the moving surface G1 will be described.

[0021] According to the above configuration, since the determination unit 322 determines whether the conveyance target 2 is a target to be conveyed based on the conveyance target information I1, the possibility that the conveyance device 1 conveys the wrong conveyance target 2 can be reduced.

[0022] (2) Configuration The conveyance system 100 according to the present embodiment will be described in detail with reference to the drawings.

[0023] In the following description, the X-axis direction in the drawings is defined as the left-right direction, the Y-axis direction is defined as the front-back direction, the positive direction of the X-axis is the right side, and the positive direction of the Y-axis is the front side. Note that these directions are defined in the state where the conveying device 1 pulls the object to be conveyed 2 and travels, and are not intended to limit the direction during the use of the conveying device 1 to these directions. Also, the arrows indicating the respective directions in the drawings are merely for explanation and do not have an actual entity.

[0024] (2.1) Overall configuration of the conveying system As shown in FIG. 1, the conveying system 100 includes an object to be conveyed 2, a conveying device 1 that conveys the object to be conveyed 2, a management device 3 that controls the conveying operation of the object to be conveyed 2 by the conveying device 1, and a substrate processing device 4 to which the object to be conveyed 2 is connected.

[0025] The conveying device 1 and the management device 3 are configured to be able to communicate with each other. Note that "able to communicate" in the present disclosure means that information can be exchanged directly or indirectly via an appropriate communication method such as wired communication or wireless communication, or via a network NT1 or a relay device 5 or the like. In the present embodiment, the management device 3 and the conveying device 1 can communicate bidirectionally, and both the transmission of information from the management device 3 to the conveying device 1 and the transmission of information from the conveying device 1 to the management device 3 are possible. Note that in FIG. 1, the number of conveying devices 1 is one, but the number of conveying devices 1 may be two or more. That is, the management device 3 may control the conveying operations by each of the plurality of conveying devices 1.

[0026] Also, the conveying device 1 can convey a plurality of types of objects to be conveyed 2. That is, the management device 3 may control the conveying operations of a plurality of types of objects to be conveyed 2 by the conveying device 1.

[0027] As an example, the conveying system 100 of the present embodiment is used in a substrate processing system 200 as shown in FIG. 2.

[0028] The substrate processing system 200 includes a substrate processing apparatus 4 that targets a substrate for processing, and a conveyance target 2 that is a component supply apparatus for supplying components to the substrate processing apparatus 4. In the present embodiment, the substrate processing apparatus 4 is a component mounter that mounts components supplied from the conveyance target 2 onto the substrate. Note that the substrate processing apparatus 4 is not limited to a component mounter, and may be a screen printer that performs electrode printing or the like on the substrate. In this case, the conveyance target 2 supplies, for example, a mask to the screen printer.

[0029] In the present embodiment, the conveyance apparatus 1 conveys the conveyance target 2 in response to an instruction from, for example, the management apparatus 3. The conveyance target 2 is conveyed to the substrate processing apparatus 4 by the conveyance apparatus 1 and is connected to the substrate processing apparatus 4.

[0030] (2.2) Conveyance Apparatus As shown in FIGS. 2 and 3, the conveyance apparatus 1 includes an apparatus main body 10, at least one pair (for example, a pair in the present embodiment) of drive wheels W1, and a connection portion C1. The connection portion C1 includes a plurality (for example, a pair in the present embodiment) of gripping portions 11 and a first connector CN1.

[0031] Further, as shown in FIG. 1, the conveyance apparatus 1 includes a drive wheel unit 12, a gripping drive unit 13, a power supply PS1, a first communication unit 14, a second communication unit 15, a detection unit 16, a first power feeding unit 17, a storage unit 18, and a control unit 19.

[0032] As shown in FIGS. 2 and 3, the apparatus main body 10 is formed in a rectangular parallelepiped shape. The longitudinal direction and the lateral direction of the apparatus main body 10 are along the X-axis direction (left - right direction) and the Y-axis direction (front - rear direction), respectively.

[0033] The pair of drive wheels W1 are disposed at the lower part of the apparatus main body 10.

[0034] The pair of drive wheels W1 are arranged side by side in the left - right direction with respect to the apparatus main body 10. In the following description, among the pair of drive wheels W1, the drive wheel W1 located on the left side of the apparatus main body 10 may be denoted as the left drive wheel W1L, and the drive wheel W1 located on the right side of the apparatus main body 10 may be denoted as the right drive wheel W1R.

[0035] In this embodiment, each of the left drive wheel W1L and the right drive wheel W1R also serves as a steering wheel. A drive mechanism for driving the left drive wheel W1L and a steering mechanism for changing the direction of the left drive wheel W1L are integrated as a left drive wheel unit 12L (see FIG. 1). Further, a drive mechanism for driving the right drive wheel W1R and a steering mechanism for changing the direction of the right drive wheel W1R are integrated as a right drive wheel unit 12R (see FIG. 1). That is, the drive wheel unit 12 described above includes a left drive wheel unit 12L and a right drive wheel unit 12R.

[0036] The left drive wheel unit 12L controls the rotation and steering angle of the left drive wheel W1L. As shown in FIG. 1, the left drive wheel unit 12L includes a first motor M1L which is a drive motor for rotating the left drive wheel W1L in the circumferential direction, and a second motor M2L which is a steering motor for changing the direction (rolling direction) of the left drive wheel W1L.

[0037] In the left drive wheel unit 12L, in response to a control command from the control unit 19, the second motor M2L changes the left drive wheel W1L to the direction indicated by the control command, and the first motor M1L rotates the left drive wheel W1L at the rotational torque or rotational speed indicated by the control command. Further, when the rotational torque of the first motor M1L reaches a set value, the left drive wheel unit 12L stops the rotation of the first motor M1L.

[0038] The right drive wheel unit 12R controls the rotation and steering angle of the right drive wheel W1R. As shown in FIG. 1, the right drive wheel unit 12R includes a first motor M1R which is a drive motor for rotating the right drive wheel W1R in the circumferential direction, and a second motor M2R which is a steering motor for changing the direction (rolling direction) of the right drive wheel W1R.

[0039] In the right drive wheel unit 12R, in response to a control command from the control unit 19, the second motor M2R changes the right drive wheel W1R in the direction indicated by the control command, and the first motor M1R rotates the right drive wheel W1R at the rotational torque or rotational speed indicated by the control command. Further, when the rotational torque of the first motor M1R reaches the set value, the right drive wheel unit 12R stops the rotation of the first motor M1R.

[0040] As shown in FIGS. 2 and 3, the pair of gripping parts 11 are provided on the rear surface of the apparatus main body 10 so as to be arranged in the left - right direction. Each of the pair of gripping parts 11 is provided so as to be movable along the left - right direction. The pair of gripping parts 11 grip a pair of gripped parts 21 that the object to be conveyed 2 has. That is, the pair of gripping parts 11 are mechanically connected to the pair of gripped parts 21. In the following description, among the pair of gripping parts 11, the left - hand gripping part 11 may be referred to as the left gripping part 11L, and the right - hand gripping part 11 may be referred to as the right gripping part 11R.

[0041] The gripping part 11 is, for example, a plate - shaped member that protrudes rearward from the rear surface of the apparatus main body 10. On the outer surface of the gripping part 11, a recess 110 into which a cylindrical gripped member 210 that the gripped part 21 to be described later has is fitted is provided. Here, the "outer surface" means the left side surface when the gripping part 11 is the left gripping part 11L, and the right side surface when the gripping part 11 is the right gripping part 11R.

[0042] The gripping drive part 13 moves each of the pair of gripping parts 11 along the left - right direction. The gripping drive part 13 includes, for example, a feed screw arranged along the left - right direction, a servo motor that rotates the feed screw, and a speed reducer that transmits the rotation of the servo motor to the feed screw. The gripping drive part 13 is provided, for example, inside the apparatus main body 10.

[0043] The detection unit 16 includes, for example, a sensor such as LiDAR (Light Detection and Ranging) for detecting an object existing around the apparatus main body 10. The detection unit 16 detects the presence or absence of an object around the apparatus main body 10 and, if an object exists, its position, and outputs the detection result to the control unit 19. Note that the detection unit 16 for detecting an object existing around the apparatus main body 10 is not limited to LiDAR. As this type of sensor, a sensor that detects an object using at least one of sound waves, light, and radio waves may be used.

[0044] The first communication unit 14 is configured to be communicable with the object to be conveyed 2 via a first connector CN1, which will be described later. More specifically, the first communication unit 14 is configured to be communicable with the object to be conveyed 2 when the second connector CN2 of the object to be conveyed 2 and the first connector CN1 are connected.

[0045] The second communication unit 15 is configured to be communicable with the management device 3. In the present embodiment, the second communication unit 15 communicates with any one of a plurality of relay devices 5 installed within a predetermined area where the conveying device 1 moves by wireless communication using radio waves as a medium. Therefore, the second communication unit 15 and the management device 3 communicate indirectly via at least the network NT1 and the relay device 5.

[0046] Each relay device 5 is a device (access point) that relays communication between the second communication unit 15 and the management device 3. The relay device 5 communicates with the management device 3 via the network NT1. In the present embodiment, as an example, for communication between the relay device 5 and the second communication unit 15, wireless communication compliant with standards such as Wi-Fi (registered trademark), Bluetooth (registered trademark), ZigBee (registered trademark), or low-power wireless (specific low-power wireless) that does not require a license is adopted. Further, the network NT1 is not limited to the Internet, and for example, a local communication network within a predetermined area where the conveying device 1 moves or within the operating company of this predetermined area may be applied.

[0047] The power supply PS1 is, for example, a secondary battery. The power supply PS1 directly or indirectly supplies power to the gripping drive unit 13, the left drive wheel unit 12L, the right drive wheel unit 12R, the control unit 19, the first communication unit 14, the second communication unit 15, the detection unit 16, and the like. Note that the power supply PS1 may be outside the transport device 1. That is, the transport device 1 may be supplied with power from an external power source.

[0048] The first power supply unit 17 converts the power supplied from the power supply PS1 into an appropriate value for supplying it to the object to be transported 2. The first power supply unit 17 is connected to the first connector CN1.

[0049] The first connector CN1 is a connector that is mechanically and electrically connected to the second connector CN2 of the object to be transported 2. The transport device 1 communicates with the object to be transported 2 via the first connector CN1 and the first communication unit 14. Further, the transport device 1 supplies power to the object to be transported 2 via the first connector CN1 and the first power supply unit 17.

[0050] As shown in FIG. 4, the first connector CN1 is attached to the rear surface of the apparatus main body 10.

[0051] The first connector CN1 has a first surface portion S1 and a pair of insertion holes H1 provided on the left and right of the first surface portion S1.

[0052] A plurality of pin holes H2 are provided in the first surface portion S1. A part of the plurality of pin holes H2 is electrically connected to the first communication unit 14. Also, another part of the plurality of pin holes H2 is electrically connected to the first power supply unit 17.

[0053] The storage unit 18 includes, for example, a rewritable nonvolatile memory such as an EEPROM. The storage unit 18 stores in advance electronic map information of the moving surface G1 on which the transport device 1 moves. The electronic map information of the moving surface G1 includes position information of objects arranged on the moving surface G1 and the like.

[0054] The control unit 19 (see FIG. 1) mainly consists of a computer system having one or more processors and a memory. The functions of the control unit 19 are realized by the processor of the computer system executing a program recorded in the memory of the computer system. The program may be recorded in the memory, may be provided through a telecommunication line such as the Internet, or may be provided by being recorded in a non-transitory recording medium such as a memory card.

[0055] The control unit 19 operates by the power supplied from the power supply PS1.

[0056] The control unit 19 has functions such as a movement control unit 191, a gripping control unit 192, a position detection unit 193, an acquisition unit 194, an output unit 195, and a power supply control unit 196. Note that these only indicate the functions realized by the control unit 19 and do not necessarily indicate a physical configuration.

[0057] The movement control unit 191 controls the movement of the device main body 10 of the transport device 1. More specifically, the movement control unit 191 controls the operations of the left drive wheel unit 12L and the right drive wheel unit 12R based on a control command transmitted from the management device 3 and received by the second communication unit 15, and moves the device main body 10 on the moving surface G1. More specifically, the movement control unit 191 controls the current flowing through the second motor M2L to change the direction of the left drive wheel W1L, and controls the current flowing through the second motor M2R to change the direction of the right drive wheel W1R. Also, the movement control unit 191 controls the current flowing through the first motor M1L to rotate the left drive wheel W1L, and controls the current flowing through the first motor M1R to rotate the right drive wheel W1R.

[0058] The gripping control unit 192 controls the gripping drive unit 13 based on the control command received by the second communication unit 15 to move each of the pair of gripping units 11 in the left - right direction.

[0059] The acquisition unit 194 acquires conveyance target information I1 regarding the conveyance target 2 via the first communication unit 14 and the first connector CN1. More specifically, when the first connector CN1 and the second connector CN2 of the conveyance target 2 are connected, the acquisition unit 194 acquires the conveyance target information I1 from the conveyance target 2 via the first communication unit 14 and the first connector CN1. Here, the conveyance target information I1 includes at least one of information regarding the specifications of the conveyance target 2 and information regarding the specifications of the components that the conveyance target 2 supplies to the substrate processing apparatus 4. Here, the information regarding the specifications of the conveyance target 2 includes a serial number unique to one conveyance device 2 and the like. Further, the information regarding the specifications of the components that the conveyance target 2 supplies to the substrate processing apparatus 4 includes the product name, model, type, etc. of the components that the conveyance target 2 supplies to the substrate processing apparatus 4. In the present embodiment, the conveyance target information I1 includes both information regarding the specifications of the conveyance target 2 and information regarding the specifications of the components that the conveyance target 2 supplies to the substrate processing apparatus 4.

[0060] The position detection unit 193 detects the current position of the apparatus main body 10. The position detection unit 193 estimates the current position on the moving surface G1 using, for example, LPS (Local Positioning System) using a radio beacon. That is, the position detection unit 173 estimates the current position based on the radio wave intensity when the beacon signals respectively transmitted from a plurality of transmitters installed in the facility are received by the receiver provided in the conveyance device 1 and the installation positions of the respective transmitters. Further, the position detection unit 173 may estimate the current position of the apparatus main body 10 using a global satellite positioning system (GNSS: Global Navigation Satellite System) such as GPS (Global Positioning System). The position coordinates of the apparatus main body 10 detected by the position detection unit 173 may be position coordinates in a two-dimensional orthogonal coordinate system set on the moving surface G1 or position coordinates in a three-dimensional orthogonal coordinate system.

[0061] The output unit 195 outputs the conveyance target information I1 acquired by the acquisition unit 194 to the management device 3 via the second communication unit 15. Further, the output unit 195 outputs the identification information (identification ID) unique to the conveyance device 1 to the management device 3 together with the conveyance target information I1.

[0062] The power supply control unit 196 controls the first power supply unit 17 to convert the power supplied from the power supply PS1 into an appropriate value and supply it to the conveyance target 2 via the first connector CN1.

[0063] (2.3) Conveyance Target As shown in FIGS. 2 and 3, the conveyance target 2 includes a main body 20, a plurality (for example, four in this embodiment) of casters 22, and a connected portion C2. The connected portion C2 includes a plurality (for example, a pair in this embodiment) of gripped portions 21 and a second connector CN2. Further, as shown in FIGS. 1 and 2, the conveyance target 2 has a third connector CN3.

[0064] The main body 20 is formed in a rectangular parallelepiped shape. The short side direction and the long side direction of the main body 20 are along the X-axis direction (left-right direction) and the Y-axis direction (front-back direction), respectively.

[0065] The four casters 22 are provided on the lower surface of the main body 20. Thereby, the conveyance target 2 can be moved on the moving surface G1 by being towed by the conveyance device 1.

[0066] The pair of gripped portions 21 are provided on the front surface of the main body 20 so as to be arranged in the left-right direction with a space therebetween. In the following description, among the pair of gripped portions 21, the left gripped portion 21 may be referred to as the left gripped portion 21L, and the right gripped portion 21 may be referred to as the right gripped portion 21R.

[0067] As shown in FIG. 5, the gripped portion 21 includes a gripped member 210 and a fixing member 211.

[0068] The gripped member 210 is a cylindrical member extending in the vertical direction. The gripped portion 21 is gripped by the gripping portion 11 by fitting the gripped member 210 into the concave portion 110 of the gripping portion 11.

[0069] The fixing member 211 is formed in a substantially U shape and holds the both ends of the gripped member 210 in a sandwiching manner. The fixing member 211 is fixed to the main body 20 while holding the gripped member 210.

[0070] As shown in FIGS. 1 and 2, the second connector CN2 is a connector to which the first connector CN1 is connected. The object to be conveyed 2 communicates with the conveying device 1 via the second connector CN2. Further, the object to be conveyed 2 is powered from the conveying device 1 via the second connector CN2.

[0071] The second connector CN2 is attached to the front surface of the main body 20.

[0072] As shown in FIG. 5, the second connector CN2 includes a first substrate B1, a second substrate B2, a second surface portion S2, and a pair of guide pins Pn1 provided on the left and right of the second surface portion S2.

[0073] The first substrate B1 is, for example, a plate-shaped member. The first substrate B1 is attached to the front surface of the main body 20 via an attachment member T1.

[0074] The second substrate B2 is, for example, an L-shaped plate-shaped member. The second surface portion S2 and a pair of guide pins Pn1 are fixed to the second substrate B2. The second substrate B2 is attached to the first substrate B1.

[0075] The second surface portion S2 is fixed to the second substrate B2 by screws or the like. A plurality of connection pins Pn2 are provided on the surface of the second surface portion S2. A part of the plurality of connection pins Pn2 is electrically connected to the power receiving terminals of the control unit 26. Also, a part of the plurality of connection pins Pn2 is electrically connected to the third communication unit 23.

[0076] The first connector CN1 and the second connector CN2 are electrically connected by inserting the plurality of connection pins Pn2 into a plurality of pin holes H2 provided in the first surface portion S1.

[0077] When the first connector CN1 and the second connector CN2 are connected, the pair of guide pins Pn1 are respectively inserted into a pair of insertion holes H1 provided in the first connector CN1, and define the position of the second connector CN2 with respect to the first connector CN1.

[0078] The third connector CN3 is a connector that is connected to a fourth connector CN4 included in a substrate processing apparatus 4 described later. The object to be transported 2 communicates with the substrate processing apparatus 4 via the third connector CN3 and a fourth communication unit 24 described later. Further, the object to be transported 2 is powered by the substrate processing apparatus 4 via the third connector CN3.

[0079] Also, as shown in FIG. 1, the object to be transported 2 includes a storage unit 25, a third communication unit 23, a fourth communication unit 24, and a control unit 26.

[0080] The storage unit 25 includes, for example, a rewritable nonvolatile memory such as an EEPROM. The storage unit 25 stores transport object information I1 regarding the transport object 2.

[0081] The third communication unit 23 is configured to be communicable with the transport device 1 via the second connector CN2. More specifically, the third communication unit 23 is configured to be communicable with the transport device 1 when the first connector CN1 and the second connector CN2 included in the transport device 1 are connected. The third communication unit 23 transmits the transport object information I1 to the transport device 1 via the second connector CN2.

[0082] The fourth communication unit 24 is configured to be communicable with the substrate processing apparatus 4 via the third connector CN3. More specifically, the fourth communication unit 24 is configured to be communicable with the substrate processing apparatus 4 when the third connector CN3 is connected to a fourth connector CN4 included in the substrate processing apparatus 4. The fourth communication unit 24 transmits the transport object information I1 to the substrate processing apparatus 4 via the third connector CN3.

[0083] The control unit 26 mainly consists of a computer system having one or more processors and a memory. The functions of the control unit 26 are realized by the processor of the computer system executing a program recorded in the memory of the computer system. The program may be recorded in the memory, may be provided through a telecommunication line such as the Internet, or may be provided by being recorded on a non-transitory recording medium such as a memory card.

[0084] When the third connector CN3 of the control unit 26 is connected to the fourth connector CN4 of the substrate processing apparatus 4, the control unit 26 operates with the power supplied from the second power supply unit 44 of the substrate processing apparatus 4. Also, when the second connector CN2 of the control unit 26 is connected to the first connector CN1 of the transfer apparatus 1, the control unit 26 operates with the power supplied from the first power supply unit 17 of the transfer apparatus 1 through the second connector CN2.

[0085] The control unit 26 controls the operations of the third communication unit 23 and the fourth communication unit 24.

[0086] (2.4) Substrate Processing Apparatus As described above, the substrate processing apparatus 4 is a component mounter that mounts components supplied from the transfer apparatus 2 onto a substrate.

[0087] As shown in FIG. 1, the substrate processing apparatus 4 includes a storage unit 41, a fifth communication unit 42, a control unit 43, a fourth connector CN4, and a second power supply unit 44. In FIG. 1, the description of the functional units related to the mounting of components on the substrate of the substrate processing apparatus 4 is omitted.

[0088] The storage unit 41 includes, for example, a rewritable non-volatile memory such as an EEPROM. The storage unit 41 stores mounting operation information related to the mounting operations performed by the substrate processing apparatus 4. The mounting operation information includes, for example, information related to the specifications of the components to be mounted in the mounting operation.

[0089] The fourth connector CN4 is a connector that is connected to the third connector CN3 of the object to be transported 2. The substrate processing apparatus 4 communicates with the object to be transported 2 via the fourth connector CN4. Further, the substrate processing apparatus 4 supplies power to the object to be transported 2 via the fourth connector CN4.

[0090] The fifth communication unit 42 is configured to be able to communicate with the object to be transported 2 via the fourth connector CN4. More specifically, the fifth communication unit 42 is configured to be able to communicate with the object to be transported 2 when the fourth connector CN4 is connected to the third connector CN3. The fifth communication unit 42 receives the transport object information I1 transmitted from the transport object 2.

[0091] The second power supply unit 44 converts the power supplied from the external power supply PS2 into an appropriate value for supplying to the object to be transported 2.

[0092] The control unit 43 mainly consists of a computer system having one or more processors and a memory. The functions of the control unit 43 are realized by the processor of the computer system executing the program recorded in the memory of the computer system. The program may be recorded in the memory, may be provided through an electrical communication line such as the Internet, or may be provided by being recorded on a non-transitory recording medium such as a memory card.

[0093] The control unit 43 operates by the power supplied from the external power supply PS2.

[0094] The control unit 43 controls the operations of the fifth communication unit 42 and the second power supply unit 44.

[0095] Further, the control unit 43 collates the transport object information I1 received by the fifth communication unit 42 with the implementation work information stored in the storage unit 41, and determines whether or not the object to be transported 2 is mounted with the components to be mounted in the implementation work. When the control unit 43 determines that the object to be transported 2 is mounted with the components to be mounted in the implementation work, the control unit 43 causes the functional units provided in the substrate processing apparatus 4 to perform the component mounting work on the substrate.

[0096] In addition, the control unit 43 supplies the power supplied from the external power supply PS2 to the conveyance target 2 via the second power supply unit 44, the fourth connector CN4, and the third connector CN3.

[0097] (2.5) Management device The management device 3 is a system for controlling the conveyance device 1, and is realized by, for example, a server device.

[0098] As shown in FIG. 1, the management device 3 includes a sixth communication unit 31, a control unit 32, and a storage unit 33.

[0099] The sixth communication unit 31 is configured to be communicable with the conveyance device 1 via the network NT1 and the relay device 5. As a communication method between the sixth communication unit 31 and the relay device 5, an appropriate communication method such as wireless communication or wired communication is adopted.

[0100] The sixth communication unit 31 receives the conveyance target information I1 output from the output unit 195 of the conveyance device 1. In addition, the sixth communication unit 31 receives the identification ID unique to the conveyance device 1 output from the output unit 195.

[0101] The control unit 32 mainly includes a computer system having one or more processors and a memory. The functions of the control unit 32 are realized by the processor of the computer system executing a program recorded in the memory of the computer system. The program may be recorded in the memory, may be provided through a telecommunication line such as the Internet, or may be recorded and provided on a non-temporary recording medium such as a memory card.

[0102] The control unit 32 has functions such as a specifying unit 321, a determining unit 322, an instructing unit 323, and a notifying unit 324. Note that these only indicate the functions realized by the control unit 32, and do not necessarily indicate an entity configuration.

[0103] The specific unit 321 identifies the object to be transported (corresponding transport object) by the transport device 1 based on the identification ID unique to the transport device 1 received by the sixth communication unit 31. Here, the corresponding transport object is a transport device on which components to be mounted on the substrate by the substrate processing device 4, which is the transport destination of the transport object 2, are mounted in the mounting operation.

[0104] Based on the transport object information I1 received by the sixth communication unit 31, the determination unit 322 determines whether the transport object 2 connected to the transport device 1 via the first connector CN1 and the second connector CN2 is the corresponding transport object to be transported by the transport device 1.

[0105] The instruction unit 323 outputs a control instruction to the control unit 19 of the transport device 1 to the transport device 1.

[0106] The notification unit 324 notifies the user of the determination result of the determination unit 322. As an example, the notification unit 324 notifies the user of the determination result of the determination unit 322 by outputting the determination result of the determination unit 322 to a user terminal 6 such as a smartphone, a tablet terminal, and a personal computer held by the user of the management device 3. Here, the user terminal 6 and the management device 3 are configured to be able to communicate with each other via the network NT1 and the relay device 5.

[0107] The storage unit 33 includes a rewritable non-volatile memory such as an EEPROM, for example. As described above, the storage unit 33 stores a transport plan created in advance by the user of the management device 3 or the like.

[0108] (3) First operation example Hereinafter, the first operation example of the transport system 100 will be described with reference to FIG. 6, which is a flowchart. Note that the flowchart shown in FIG. 6 only shows an example of the operation of the transport system 100 according to the present embodiment, and the order of processing may be appropriately changed, and processing may be appropriately added or omitted.

[0109] As an initial state in the first operation example, as shown in FIG. 3, assume a state where the object to be conveyed 2 is placed on the moving surface G1 in the preparation area. Here, the preparation area is an area where, before the object to be conveyed 2 is conveyed to the substrate processing apparatus 4 by the conveying apparatus 1, the operation of mounting the reel on which the components to be mounted on the substrate are attached to the object to be conveyed 2 is performed. In the initial state, assume that the mounting of the reel on the object to be conveyed 2 is completed.

[0110] Also, in the initial state, assume that the object to be conveyed 2 is placed on the moving surface G1 in a state where its backward movement is restricted by the restricting portion 7. The restricting portion 7 is, for example, a so-called wheel stopper installed on the moving surface G1. The restricting portion 7 is arranged behind the two casters 22 arranged behind the main body 20 among the four casters 22 provided in the object to be conveyed 2.

[0111] First, the instruction portion 323 included in the control portion 32 of the management apparatus 3 gives a control instruction (first control instruction) for starting the conveyance of the object to be conveyed 2 to the conveying apparatus 1 via the sixth communication portion 31 based on the conveyance plan stored in the storage portion 33. The first control instruction includes the position information of the object to be conveyed 2 and the position information of the conveyance destination (substrate processing apparatus 4) of the object to be conveyed 2.

[0112] When the second communication portion 15 of the conveying apparatus 1 receives the first control instruction, the movement control portion 191 of the conveying apparatus 1 moves the apparatus main body 10 to a position (initial position) where the front surface of the main body 20 and the rear surface of the apparatus main body 10 face each other in the vicinity of the object to be conveyed 2, as shown in FIG. 3. Here, the vicinity of the object to be conveyed 2 mentioned here is, for example, within a predetermined range around the object to be conveyed 2.

[0113] When the movement control portion 191 moves the apparatus main body 10 to the initial position, the gripping control portion 192 adjusts the interval between the pair of gripping portions 11 to be narrower than the interval between the pair of gripped portions 21.

[0114] The movement control unit 191 moves the apparatus main body 10 backward so as to approach the conveyance target 2. As a result, as shown in FIG. 7, a plurality of connection pins Pn2 are inserted into a plurality of pin holes H2. That is, the first connector CN1 is connected to the second connector CN2 (step ST1).

[0115] When the first connector CN1 is connected to the second connector CN2, the acquisition unit 194 of the transfer device 1 acquires transfer target information I1 from the transfer target 2 via the first communication unit 14 (step ST2). At this time, the control unit 26 of the transfer target 2 operates by the power supplied from the first power supply unit 17 of the transfer device 1. Note that the control unit 26 may operate by the power supplied from a power supply device installed in the preparation area. In this case, it is sufficient that the power supply connector of the power supply device is connected to, for example, the third connector CN3.

[0116] When the acquisition unit 194 acquires the transfer target information I1, the output unit 195 outputs the transfer target information I1 to the management device 3 (step ST3). Further, the output unit 195 outputs an identification ID unique to the transfer device 1 to the management device 3 together with the transfer target information I1. The identification ID is stored in advance, for example, in the storage unit 18 of the transfer device 1.

[0117] The specifying unit 321 of the management device 3 specifies a corresponding transfer target to be transferred by the transfer device 1 based on the identification ID transmitted from the transfer device 1 and the transfer plan stored in advance in the storage unit 33 of the management device 3. Here, the transfer plan includes information regarding the specifications of the corresponding transfer target associated with the identification ID of the transfer device 1.

[0118] The determination unit 322 of the management device 3 determines whether or not the transfer target 2 is the corresponding transfer target specified by the specifying unit 321 based on the information regarding the specifications of the transfer target 2 included in the transfer target information I1 (step ST4).

[0119] When the determination unit 322 determines that the transfer target 2 is the corresponding transfer target (step ST4: Yes), the instruction unit 323 gives a control instruction (second control instruction) to the transfer device 1 to continue the transfer of the transfer target 2.

[0120] When the gripping control unit 192 of the transfer device 1 receives the second control instruction from the second communication unit 15, as shown in FIG. 8, it expands the distance between the pair of gripping units 11 to the distance between the pair of gripped units 21. As a result, the gripped members 210 of the pair of gripped units 21 are respectively fitted into the recesses 110 of the pair of gripping units 11, and the pair of gripping units 11 grip the pair of gripped units 21.

[0121] When the pair of gripping units 11 grip the pair of gripped units 21, the movement control unit 191 starts moving the apparatus main body 10 toward the substrate processing apparatus 4 which is the transfer destination of the transfer target 2. That is, when the pair of gripping units 11 grip the pair of gripped units 21, the transfer device 1 starts transferring the transfer target 2 to the substrate processing apparatus 4 (step ST5).

[0122] On the other hand, when the determination unit 322 determines that the transfer target 2 is not the corresponding transfer target, that is, the transfer target 2 is not the target to be transferred by the transfer device 1 (step ST4: No), the gripping control unit 192 maintains the distance between the pair of gripping units 11 in a state narrower than the distance between the pair of gripped units 21. As a result, the pair of gripped units 21 are not gripped by the pair of gripping units 11, and the transfer of the transfer target 2 by the transfer device 1 is not started.

[0123] Also, when the determination unit 322 determines that the transfer target 2 is not the target to be transferred by the transfer device 1 (step ST4: No), the notification unit 324 notifies the user of the management device 3 of the determination result of the determination unit 322 (step ST6). Specifically, the notification unit 324 notifies the user of the determination result of the determination unit 322 by outputting the determination result of the determination unit 322 to the user terminal 6. The user terminal 6 displays the determination result of the determination unit 322 on a display unit (such as a display) provided in the user terminal 6, for example.

[0124] As a result, the user who has received the notification from the notification unit 324 can take actions such as going to the preparation area to confirm the transfer target 2, for example.

[0125] (4) Second operation example Next, a second operation example of the transport system 100 will be described with reference to FIG. 9, which is a flowchart. Note that the flowchart shown in FIG. 9 only shows an example of the operation of the transport system 100 according to the present embodiment, and the order of processing may be changed as appropriate, or processing may be added or omitted as appropriate.

[0126] In the second operation example, as shown in FIGS. 10 to 13, it is assumed that two substrates to be transported 2 (2A, 2B) are respectively connected to two substrate processing apparatuses 4 (4A, 4B) connected to each other.

[0127] First, the instruction unit 323 of the management device 3 gives a control instruction (third control instruction) for starting the recovery of the transport target 2A from the substrate processing apparatus 4A to the transport device 1 based on the transport plan stored in the storage unit 33. The third control instruction includes the position information of the transport target 2A and the position information of the transport destination (for example, the preparation area) of the transport target 2A.

[0128] When the second communication unit 15 receives the third control instruction, the movement control unit 191 of the transport device 1 moves the device main body 10 from the standby location to the reference position P0 as shown in FIG. 10 (step ST11). Here, the movement control unit 191 moves the device main body 10 to the reference position P0 based on the detection result of the current position of the device main body 10 by the position detection unit 193.

[0129] Also, from the reference position P0, the movement control unit 191 moves the device main body 10 based on the detection result of the objects existing around the device main body 10 by the detection unit 16. Specifically, the movement control unit 191 estimates the current position of the device main body 10 based on the detection result of the detection unit 16 and the electronic map information of the movement surface G1 stored in the storage unit 18, and moves the device main body 10 until the estimated current position becomes a position where the transport target 2A can be recovered. That is, the reference position P0 is the position where the movement control unit 191 starts moving the device main body 10 based on the detection result of the detection unit 16.

[0130] Here, when the apparatus main body 10 is traveling toward the right from the reference position P0 (rightward in FIG. 10), for example, when the pair of drive wheels W1 slip due to dew condensation on the moving surface G1 or the like, and the apparatus main body 10 passes beyond the object to be conveyed 2A. At this time, the detection unit 16 erroneously detects the object to be conveyed 2B as the object to be conveyed 2A, and as shown in FIG. 11, it is assumed that the movement control unit 191 moves the apparatus main body 10 to the vicinity point P2 of the object to be conveyed 2B.

[0131] When the movement control unit 191 moves the apparatus main body 10 to the vicinity point P2, the gripping control unit 192 adjusts the interval between the pair of gripping units 11 to be narrower than the interval between the pair of gripped units 21.

[0132] The movement control unit 191 moves the apparatus main body 10 backward so as to approach the object to be conveyed 2B. As a result, the first connector CN1 is connected to the second connector CN2 of the object to be conveyed 2B (step ST12).

[0133] When the first connector CN1 is connected to the second connector CN2, the acquisition unit 194 of the transfer device 1 acquires the transfer target information I1 from the transfer target 2B via the first communication unit 14 (step ST13). At this time, the control unit 26 of the object to be conveyed 2B is operating with the power supplied from the second power supply unit 44 of the substrate processing apparatus 4B. Note that the control unit 26 may also operate with the power supplied from the first power supply unit 17 of the transfer device 1.

[0134] When the acquisition unit 194 acquires the transfer target information I1, the output unit 195 outputs the transfer target information I1 to the management device 3 (step ST14). Further, the output unit 195 outputs the identification ID unique to the transfer device 1 to the management device 3 together with the transfer target information I1.

[0135] The specifying unit 321 of the management device 3 specifies the corresponding transfer target to be transferred by the transfer device 1 based on the identification ID and the transfer plan stored in advance in the storage unit 33 of the management device 3. Here, the specifying unit 321 specifies that the corresponding transfer target to be transferred by the transfer device 1 is the transfer target 2A.

[0136] The determination unit 322 of the management device 3 determines whether or not the conveyance target 2B is the corresponding conveyance target (conveyance target 2A) specified by the specifying unit 321 based on the information regarding the specifications of the conveyance target 2B included in the conveyance target information I1 (step ST15).

[0137] In this operation example, the determination unit 322 determines that the conveyance target 2B is not the target conveyance target (conveyance target 2A). That is, the determination unit 322 determines that the conveyance target 2B is not the target to be conveyed by the conveyance device 1 (step ST15: No).

[0138] When the determination unit 322 determines that the conveyance target 2B is not the corresponding conveyance target, the instruction unit 323 gives a control instruction (fourth control instruction) to the conveyance device 1 to stop the conveyance of the conveyance target 2B.

[0139] When the second communication unit 15 of the conveyance device 1 receives the fourth control instruction, as shown in FIG. 13, the movement control unit 191 moves the apparatus main body 10 backward and releases the connection between the first connector CN1 and the second connector CN2 (step ST16). The movement control unit 191 moves the apparatus main body 10 to the reference position P0 in a state where the connection between the first connector CN1 and the second connector CN2 is released (step ST11). At this time, the movement control unit 191 moves the apparatus main body 10 to the reference position P0 based on, for example, the detection result of the current position of the apparatus main body 10 by the position detection unit 193.

[0140] When the apparatus main body 10 moves to the reference position P0, the output unit 195 outputs movement completion information indicating that the movement to the reference position P0 has been completed to the management device 3.

[0141] When the sixth communication unit 31 of the management device 3 receives the movement completion information, the instruction unit 323 gives a third control instruction to the conveyance device 1 to start the recovery of the conveyance target 2A from the substrate processing device 4A again. That is, the conveyance device 1 can try to recover the conveyance target 2A again from the reference position P0.

[0142] When the second communication unit 15 receives the third control instruction, the movement control unit 191 moves the apparatus main body 10 to the vicinity point P1 of the conveyance target 2A as shown in FIG. 13.

[0143] When the movement control unit 191 moves the apparatus main body 10 to the vicinity point P1, the gripping control unit 192 adjusts the interval between the pair of gripping units 11 to be narrower than the interval between the pair of gripped units 21.

[0144] The movement control unit 191 moves the apparatus main body 10 backward so as to approach the conveyance target 2A. As a result, the first connector CN1 is connected to the second connector CN2 of the conveyance target 2A (step ST12).

[0145] When the first connector CN1 is connected to the second connector CN2, the acquisition unit 194 of the conveyance device 1 acquires the conveyance target information I1 from the conveyance target 2A via the first communication unit 14 (step ST13).

[0146] When the acquisition unit 194 acquires the conveyance target information I1, the output unit 195 outputs the conveyance target information I1 to the management device 3 (step ST14). Further, the output unit 195 outputs the identification ID unique to the conveyance device 1 to the management device 3 together with the conveyance target information I1.

[0147] Based on the identification ID and the conveyance plan stored in advance in the storage unit 33 of the management device 3, the specifying unit 321 of the management device 3 specifies that the corresponding conveyance target to be conveyed by the conveyance device 1 is the conveyance target 2A.

[0148] Based on the information regarding the specifications of the conveyance target 2A included in the conveyance target information I1, the determination unit 322 of the management device 3 determines whether or not the conveyance target 2A is the corresponding conveyance target (conveyance target 2A) specified by the specifying unit 321 (step ST15).

[0149] The determination unit 322 determines that the conveyance target 2A is the target conveyance target (conveyance target 2A). That is, the determination unit 322 determines that the conveyance target 2B is the target to be conveyed by the conveyance device 1 (step ST15: Yes).

[0150] When the determination unit 322 determines that the conveyance target 2A is the target conveyance target, the instruction unit 323 gives a control instruction (fifth control instruction) to the conveyance device 1 to continue the conveyance of the conveyance target 2A.

[0151] When the second communication unit 15 receives the fifth control instruction, the gripping control unit 192 of the conveyance device 1 widens the interval between the pair of gripping units 11 to the interval between the pair of gripped units 21. As a result, the gripped members 210 of the pair of gripped units 21 are respectively fitted into the recesses 110 of the pair of gripping units 11, and the pair of gripping units 11 grip the pair of gripped units 21.

[0152] When the pair of gripping units 11 grip the pair of gripped units 21, the movement control unit 191 starts moving the apparatus main body 10 toward the conveyance destination (for example, the preparation area) of the conveyance target 2A. That is, when the pair of gripping units 11 grip the pair of gripped units 21, the conveyance device 1 starts conveying the conveyance target 2A to the preparation area (step ST17).

[0153] (5) Modification The above embodiment is merely one of various embodiments of the present disclosure. The above embodiment can be variously modified according to design and the like as long as the object of the present disclosure can be achieved. Further, functions similar to those of the conveyance system 100 according to the above embodiment may be embodied by a control method, a (computer) program, or a non-transitory recording medium recording the computer program.

[0154] A control method according to one aspect includes a storage step, an acquisition step, and a determination step. In the storage step, conveyance target information I1 regarding the conveyance target 2 is stored. The conveyance target 2 is conveyed by the conveyance device 1 and supplies components to the substrate processing device 4 with the substrate as the work target while being connected to the substrate processing device 4. In the acquisition step, the conveyance target information I1 stored in the storage step is acquired in a state where the connection part C1 connected to the connected part C2 of the conveyance target 2 is connected to the connected part C2. In the determination step, based on the conveyance target information I1 acquired in the acquisition step, it is determined whether the conveyance target 2 is an object to be conveyed by the conveyance device 1.

[0155] A program according to one aspect is a program for causing one or more processors to execute the above control method.

[0156] Hereinafter, a modification of the above embodiment will be described. In the modifications described below, the same reference numerals are given to the components common to the above embodiment, and the description thereof will be omitted.

[0157] (5.1) Modification 1 In the second operation example of the above embodiment, when the determination unit 322 determines that the conveyance target 2B is not an object to be conveyed by the conveyance device 1, the movement control unit 191 moves the apparatus main body 10 to the reference position P0 with the connection between the first connector CN1 and the second connector CN2 released. On the other hand, in this modification 1, when the determination unit 322 determines that the conveyance target 2B is not an object to be conveyed by the conveyance device 1, the movement control unit 191 moves the conveyance device 1 to another conveyance target 2 (conveyance target 2A) different from the conveyance target 2B with the connection between the first connector CN1 and the second connector CN2 unlocked.

[0158] Next, an operation example of the transport system 100 in the first modified example will be described with reference to FIG. 14, which is a flowchart. Note that the flowchart shown in FIG. 14 only shows an example of the operation of the transport system 100 according to the present embodiment, and the order of the processes may be changed as appropriate, or the processes may be added or omitted as appropriate. The operation example described below assumes a state in which two substrates to be transported 2 (2A, 2B) are respectively connected to two substrate processing apparatuses 4 (4A, 4B) connected to each other, similar to the second operation example in the above embodiment (see FIGS. 10 to 13, 15). In addition, since the operations in steps ST21 to ST24 in FIG. 14 are the same as the operations in steps ST11 to ST14 in the second operation example, the description will be omitted as appropriate.

[0159] The determination unit 322 of the management device 3 determines whether or not the substrate to be transported 2B is the corresponding substrate to be transported (substrate to be transported 2A) specified by the specifying unit 321 based on the information regarding the specifications of the substrate to be transported 2B included in the substrate to be transported information I1 (step ST25).

[0160] In this operation example, the determination unit 322 determines that the substrate to be transported 2B is not the target substrate to be transported (substrate to be transported 2A). That is, the determination unit 322 determines that the substrate to be transported 2B is not the target that the transport device 1 should transport (step ST25: No).

[0161] When the determination unit 322 determines that the substrate to be transported 2B is not the target substrate to be transported, the instruction unit 323 gives a control instruction (sixth control instruction) to the transport device 1 to transport a substrate to be transported 2 (substrate to be transported 2A) different from the substrate to be transported 2B.

[0162] When the second communication unit 15 receives the sixth control instruction, the movement control unit 191 retracts the apparatus main body 10 as shown in FIG. 15 and releases the connection between the first connector CN1 and the second connector CN2 (step ST26). With the connection between the first connector CN1 and the second connector CN2 released, the movement control unit 191 moves the apparatus main body 10 to the vicinity point P1 of the conveyance target 2A (step ST27). That is, the movement control unit 191 moves the apparatus main body 10 to another conveyance target (the conveyance target 2A) that is highly likely to be the correct conveyance target.

[0163] Since the subsequent operations (steps ST22 to ST25, ST28) are the same as the operations of steps ST12 to ST15, ST17 in the second operation example, the description thereof is omitted.

[0164] (5.2) Modification 2 In the conveyance system 100 of the above-described embodiment, the control unit 32 of the management device 3 has the function of the determination unit 322. However, as shown in FIG. 16, the control unit 19 of the conveyance device 1 may have the function of the determination unit 322. Further, in this case, it is preferable that the control unit 19 of the conveyance device 1 also has the function of the specifying unit 321.

[0165] An operation example of the conveyance system 100 when the control unit 19 of the conveyance device 1 has the functions of the determination unit 322 and the specifying unit 321 is shown below. Note that, similar to the first operation example in the above-described embodiment, the following operation example assumes a state in which the conveyance target 2 is placed on the movement surface G1 in the preparation area as an initial state. Hereinafter, the determination unit 322 and the specifying unit 321 included in the control unit 19 of the conveyance device 1 are referred to as a determination unit 322A and a specifying unit 321A.

[0166] First, the instruction unit 323 of the management device 3 gives a first control instruction for starting the conveyance of the conveyance target 2 to the conveyance device 1 via the sixth communication unit 31 based on the conveyance plan stored in the storage unit 33.

[0167] When the second communication unit 15 receives the first control instruction, the movement control unit 191 of the transfer device 1 moves the device main body 10 to the initial position where the front surface of the main body 20 faces the rear surface of the device main body 10 in the vicinity of the transfer target 2.

[0168] When the movement control unit 191 moves the device main body 10 to the initial position, the gripping control unit 192 adjusts the distance between the pair of gripping units 11 to be narrower than the distance between the pair of gripped parts 21.

[0169] The movement control unit 191 moves the device main body 10 backward so as to approach the transfer target 2. As a result, the plurality of connection pins Pn2 are inserted into the plurality of pin holes H2. That is, the first connector CN1 is connected to the second connector CN2.

[0170] When the first connector CN1 is connected to the second connector CN2, the acquisition unit 194 of the transfer device 1 acquires the transfer target information I1 from the transfer target 2 via the first communication unit 14.

[0171] When the acquisition unit 194 acquires the transfer target information I1, the specifying unit 321A specifies the corresponding transfer target to be transferred by the transfer device 1 based on the transfer plan previously stored in the storage unit 18 of the transfer device 1.

[0172] The determination unit 322A determines whether the transfer target 2 is the corresponding transfer target specified by the specifying unit 321A based on the information regarding the specifications of the transfer target 2 included in the transfer target information I1.

[0173] The output unit 195 outputs the determination result of the determination unit 322A to the management device 3.

[0174] The instruction unit 323 of the management device 3 gives a control instruction corresponding to the determination result of the determination unit 322 output from the output unit 195 to the control unit 19 of the transfer device 1.

[0175] (5.3) Modified Example 3 In the transport system 100 of the above embodiment, the storage unit 25 of the object to be transported 2 stores the transport object information I1 regarding the object to be transported 2. However, the storage unit 41 of the substrate processing apparatus 4 may store the transport object information I1.

[0176] In this case, when the object to be transported 2 is recovered from the substrate processing apparatus 4 or the like, the acquisition unit 194 acquires the transport object information I1 from the storage unit 41 via the object to be transported 2 in a state where the first connector CN1 is connected to the second connector CN2 and the object to be transported 2 is connected to the substrate processing apparatus 4. Specifically, the acquisition unit 194 acquires the transport object information I1 from the storage unit 41 of the substrate processing apparatus 4 via the control unit 43, the fifth communication unit 42, the fourth connector CN4, the third connector CN3, the fourth communication unit 24, the control unit 26, the third communication unit 23, the second connector CN2, the first connector CN1, and the first communication unit 14. Note that the state where the object to be transported 2 is connected to the substrate processing apparatus 4 is a state where the third connector CN3 (see FIG. 1) of the object to be transported 2 is connected to the fourth connector CN4 (see FIG. 1) of the substrate processing apparatus 4.

[0177] (5.4) Other Modification Examples The transport system 100 in the present disclosure includes a computer system. The computer system mainly consists of a processor and a memory as hardware. By the processor executing a program recorded in the memory of the computer system, the functions as the transport system 100 in the present disclosure are realized. The program may be pre-recorded in the memory of the computer system, may be provided through a telecommunication line, or may be provided by being recorded on a non-transitory recording medium such as a memory card, an optical disk, or a hard disk drive that can be read by the computer system. The processor of the computer system is composed of one or more electronic circuits including a semiconductor integrated circuit (IC) or a large-scale integrated circuit (LSI). Here, integrated circuits such as the IC or LSI have different names depending on the degree of integration, and include integrated circuits called system LSI, VLSI (Very Large Scale Integration), or ULSI (Ultra Large Scale Integration). Furthermore, for an FPGA (Field-Programmable Gate Array) that is programmed after the manufacture of the LSI, or a logic device capable of reconfiguring the bonding relationship inside the LSI or reconfiguring the circuit sections inside the LSI, it can also be adopted as a processor. The one or more electronic circuits may be integrated on one chip, or may be provided distributed on a plurality of chips. The plurality of chips may be integrated in one device, or may be provided distributed on a plurality of devices. The computer system mentioned here includes a microcontroller having one or more processors and one or more memories. Therefore, the microcontroller is also composed of one or more electronic circuits including a semiconductor integrated circuit or a large-scale integrated circuit.

[0178] In the conveying system 100, it is not essential for the connection part C1 of the conveying device 1 to have the first connector CN1. The connection part C1 may have a reader that constitutes an RFID (Radio Frequency Identification) system instead of the first connector CN1. Also, in the conveying system 100, it is not essential for the connected part C2 of the object to be conveyed 2 to have the second connector CN2. The connected part C2 may have an electronic tag that constitutes an RFID system instead of the second connector CN2. In this case, the acquisition unit 194 of the conveying device 1 acquires the conveyance target information I1 by the reader included in the connection part C1 reading the conveyance target information I1 included in the electronic tag included in the connected part C2 of the object to be conveyed 2.

[0179] (6) Summary As described above, the conveying system (100) of the first aspect includes a storage unit (25, 41), a connection part (C1), an acquisition unit (194), and a determination unit (322). The storage unit (25, 41) stores conveyance target information (I1) regarding the object to be conveyed (2). The object to be conveyed (2) is conveyed by the conveying device (1) and supplies parts to the substrate processing device (4) while being connected to the substrate processing device (4) that uses the substrate as the work target. The connection part (C1) is connected to the connected part (C2) that the object to be conveyed (2) has. The acquisition unit (194) acquires the conveyance target information (I1) from the storage unit (25, 41) in a state where the connection part (C1) is connected to the connected part (C2). The determination unit (322) determines whether the object to be conveyed (2) is an object that the conveying device (1) should convey based on the conveyance target information (I1) acquired by the acquisition unit (194).

[0180] According to this aspect, since the determination unit (322) determines whether the object to be conveyed (2) is an object that should be conveyed based on the conveyance target information (I1), the possibility that the conveying device (1) conveys the wrong object to be conveyed (2) can be reduced.

[0181] The conveying system (100) of the second aspect further includes a management device (3) provided communicably with the conveying device (1) in the first aspect. The management device (3) has the determination unit (322).

[0182] According to this aspect, since the management device (3) performs the determination process as to whether the object to be conveyed (2) is an object to be conveyed, the load of the processes performed by components other than the management device (3) in the conveyance system (100) can be reduced.

[0183] The conveyance system (100) according to the third aspect further includes a conveyance device (1) in the first aspect. The conveyance device (1) has a determination unit (322).

[0184] According to this aspect, since the conveyance device (1) performs the determination process as to whether the object to be conveyed (2) is an object to be conveyed, the load of the processes performed by the management device (3) can be reduced.

[0185] The conveyance system (100) according to the fourth aspect further includes an object to be conveyed (2) in any one of the first to third aspects. The object to be conveyed (2) has a storage unit (25).

[0186] According to this aspect, the acquisition unit (194) can acquire the conveyance object information (I1) from the conveyance object (2) in a state where the connection unit (C1) is connected to the connected unit (C2).

[0187] The conveyance system (100) according to the fifth aspect further includes a substrate processing device (4) in any one of the first to third aspects. The substrate processing device (4) has a storage unit (41).

[0188] According to this aspect, the acquisition unit (194) can acquire the conveyance object information (I1) from the substrate processing device (4) in a state where the connection unit (C1) is connected to the connected unit (C2).

[0189] In the conveyance system (100) according to the sixth aspect, in the fifth aspect, the acquisition unit (194) acquires the conveyance object information (I1) from the storage unit (41) via the conveyance object (2) in a state where the connection unit (C1) is connected to the connected unit (C2) and the conveyance object (2) is connected to the substrate processing device (4).

[0190] According to this aspect, the acquisition unit (194) can acquire the conveyance target information (I1) from the substrate processing apparatus (4) in a state where the connection unit (C1) is connected to the connected unit (C2).

[0191] In the conveyance system (100) of the seventh aspect, in any of the first to sixth aspects, the connection unit (C1) is mechanically connected to the connected unit (C2).

[0192] According to this aspect, the connection unit (C1) is mechanically connected to the conveyance target (2).

[0193] In the conveyance system (100) of the eighth aspect, in the seventh aspect, the connection unit (C1) is electrically connected to the connected unit (C2).

[0194] According to this aspect, the connection unit (C1) is mechanically and electrically connected to the conveyance target (2).

[0195] The conveyance system (100) of the ninth aspect further includes a notification unit (324) in any of the first to eighth aspects. The notification unit (324) notifies the determination result when the determination unit (322) determines that the conveyance target (2) is not a target to be conveyed by the conveyance device (1).

[0196] According to this aspect, it is possible to notify the user of the determination result that the conveyance target (2) is not a target to be conveyed by the conveyance device (1), and the user who has received the notification from the notification unit (324) can take measures such as going to the preparation area for confirmation of the conveyance target (2).

[0197] The conveyance system (100) of the tenth aspect further has a movement control unit (191) that controls the movement of the conveyance device (1) in any of the first to ninth aspects. When the determination unit (322) determines that the conveyance target (2) is not a target to be conveyed by the conveyance device (1), the movement control unit (191) moves the conveyance device (1) to the reference position (P0) in a state where the connection between the connection unit (C1) and the connected unit (C2) is released.

[0198] According to this aspect, when the object to be conveyed (2) is not an object to be conveyed by the conveying device (1), the conveying device (1) can be made to stop conveying the object to be conveyed (2).

[0199] The conveying system (100) according to the eleventh aspect further includes a movement control unit (191) that controls the movement of the conveying device (1) in any of the first to tenth aspects. When the determination unit (322) determines that the object to be conveyed (2) is not an object to be conveyed by the conveying device (1), the movement control unit (191) moves the conveying device (1) to another object to be conveyed in a state where the connection between the connection unit (C1) and the connected unit (C2) is released.

[0200] According to this aspect, when the object to be conveyed (2) is not an object to be conveyed by the conveying device (1), the conveying device (1) can be made to convey another object to be conveyed.

[0201] The conveying system (100) according to the twelfth aspect, in any of the first to eleventh aspects, the object-to-be-conveyed information (I1) includes at least one of information regarding the specifications of the object to be conveyed (2) and information regarding the specifications of the components supplied by the object to be conveyed (2) to the substrate processing device (4).

[0202] According to this aspect, the determination unit (322) can determine whether the object to be conveyed (2) is an object to be conveyed by the conveying device (1) based on at least one of information regarding the specifications of the object to be conveyed (2) and information regarding the specifications of the components supplied by the object to be conveyed (2) to the substrate processing device (4).

[0203] The transfer device (1) according to the 13th aspect includes a connection part (C1), an acquisition part (194), and a determination part (322). The connection part (C1) is connected to a connection part (C2) of the transfer target (2). The transfer target (2) supplies parts to the substrate processing apparatus (4) while being connected to the substrate processing apparatus (4) that uses the substrate as a work target. The acquisition part (194) acquires transfer target information (I1) regarding the transfer target (2) in a state where the connection part (C1) is connected to the connection part (C2). The determination part (322) determines whether or not the transfer target (2) is a target to be transferred based on the transfer target information (I1) acquired by the acquisition part (194).

[0204] According to this aspect, the possibility that the transfer device (1) transfers an incorrect transfer target (2) can be reduced.

[0205] The control method according to the 14th aspect includes a storage step, an acquisition step, and a determination step. In the storage step, transfer target information (I1) regarding the transfer target (2) is stored. The transfer target (2) is transferred by the transfer device (1) and supplies parts to the substrate processing apparatus (4) while being connected to the substrate processing apparatus (4) that uses the substrate as a work target. In the acquisition step, the transfer target information (I1) stored in the storage step is acquired in a state where a connection part (C1) connected to a connection part (C2) of the transfer target (2) is connected to the connection part (C2). In the determination step, it is determined whether or not the transfer target (2) is a target to be transferred by the transfer device (1) based on the transfer target information (I1) acquired in the acquisition step.

[0206] According to this aspect, the possibility that the transfer device (1) transfers an incorrect transfer target (2) can be reduced.

[0207] The program according to the 15th aspect is a program for causing one or more processors to execute the control method according to the 14th aspect.

[0208] According to this aspect, the possibility that the transfer device (1) transfers an incorrect transfer target (2) can be reduced.

[0209] Note that the second to twelfth aspects are not essential components of the transport system (100) and can be omitted as appropriate.

Explanation of Signs

[0210] 1 Transport device 2 Object to be transported 3 Management device 4 Substrate processing device 25, 41 Storage unit 100 Transport system 191 Movement control unit 194 Acquisition unit 322 Determination unit 324 Notification unit C1 Connection part C2 Connected part I1 Transport object information P0 Reference position

Claims

1. A storage unit that stores transport target information regarding a transport target that is transported by a transport device and is connected to a substrate processing device that uses a substrate as a work target, and supplies parts to the substrate processing device; A connection part that is connected to a connection part of the transport target; An acquisition unit that acquires the transport target information from the storage unit in a state where the connection unit is connected to the connection unit; A determination unit that determines whether the transport target is a target to be transported by the transport device based on the transport target information acquired by the acquisition unit. A transport system.

2. The transport system further includes a management device provided communicably with the transport device, The management device has the determination unit. The transport system according to claim 1.

3. The transport system further includes the transport device, The transport device has the determination unit. The transport system according to claim 1.

4. The transport system further includes the transport target, The transport target has the storage unit. The transport system according to any one of claims 1 to 3.

5. The transport system further includes the substrate processing device, The substrate processing device has the storage unit. The transport system according to any one of claims 1 to 3.

6. The acquisition unit acquires the transport target information from the storage unit via the transport target in a state where the connection unit is connected to the connection unit and the transport target is connected to the substrate processing device. The transport system according to claim 5.

7. The connection unit is mechanically connected to the connection unit. The transport system according to any one of claims 1 to 3.

8. The connection unit is electrically connected to the connection unit. The transport system according to claim 7.

9. The transport system further includes a notification unit, When the determination unit determines that the transport target is not a target to be transported by the transport device, the notification unit notifies the determination result. The transport system according to any one of claims 1 to 3.

10. The transport system further has a movement control unit that controls the movement of the transport device, When the determination unit determines that the transport target is not a target to be transported by the transport device, the movement control unit moves the transport device to a reference position in a state where the connection between the connection unit and the connection unit is released. The transport system according to any one of claims 1 to 3.

11. The transport system further has a movement control unit that controls the movement of the transport device, When the determination unit determines that the object to be conveyed is not an object to be conveyed by the conveying device, the movement control unit moves the conveying device to another object to be conveyed with the connection between the connection unit and the connected unit released. The conveying system according to any one of claims 1 to 3.

12. The object-to-be-conveyed information includes at least one of information regarding the specifications of the object to be conveyed and information regarding the specifications of the components to be supplied by the object to be conveyed to the substrate processing apparatus. The conveying system according to any one of claims 1 to 3.

13. A connection unit that is connected to a connected unit of an object to be conveyed that supplies components to the substrate processing apparatus while being connected to the substrate processing apparatus having the substrate as the work object; An acquisition unit that acquires object-to-be-conveyed information regarding the object to be conveyed in a state where the connection unit is connected to the connected unit; A determination unit that determines whether or not the object to be conveyed is an object to be conveyed based on the object-to-be-conveyed information acquired by the acquisition unit. Conveying device.

14. A storage step of storing object-to-be-conveyed information regarding an object to be conveyed that is conveyed by a conveying device and supplies components to a substrate processing apparatus having a substrate as a work object while being connected to the substrate processing apparatus; An acquisition step of acquiring the object-to-be-conveyed information stored in the storage step in a state where a connection unit connected to a connected unit of the object to be conveyed is connected to the connected unit; A determination step of determining whether or not the object to be conveyed is an object to be conveyed by the conveying device based on the object-to-be-conveyed information acquired in the acquisition step. Control method.

15. A program for causing one or more processors to execute the control method according to claim 14 Program.

Images