Blade member and structural member

Abstract

To provide a processing system capable of properly processing an object.SOLUTION: A blade member such as a turbine blade having a groove structure 9 formed on a surface, wherein the groove structure includes a plurality of first groove structures, a plurality of second groove structures, and a third groove structure. The plurality of first groove structures is formed to extend in a first direction, the plurality of second groove structures is formed to extend in a second direction different from the first direction, and the third groove structure extends along a third direction different from the first and the second directions, and is formed between one of the first groove structures and one of the second groove structures.SELECTED DRAWING: Figure 13

Description

Technical Field

[0001] The present invention relates to the technical field of blade members and structural members such as turbine blades, for example.

Background Art

[0002] As an example of blade members and structural members, there is a turbine blade used in a turbine. For example, Patent Document 1 describes a turbine blade having a groove structure formed on its surface. In such blade members and structural members, it is required to form an appropriate groove structure on the surface.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

[0004] According to a first aspect, there is provided a blade member having a groove structure formed on its surface, the groove structure including a plurality of first groove structures, a plurality of second groove structures, and a third groove structure, the plurality of first groove structures being formed to extend in a first direction, the plurality of second groove structures being formed to extend in a second direction different from the first direction, the third groove structure extending along a third direction different from the first and second directions, and being formed between one of the plurality of first groove structures and one of the plurality of second groove structures.

[0005] According to a second aspect, there is provided a blade member having a groove structure formed on a surface, the groove structure including a plurality of first groove structures, a plurality of second groove structures, and a third groove structure. The plurality of first groove structures have a first wave shape extending in a first direction and are formed to be arranged at a first arrangement pitch along a direction intersecting the first direction. The plurality of second groove structures have a second wave shape extending in a second direction and are formed to be arranged at a second arrangement pitch different from the first arrangement pitch along a direction intersecting the second direction. The third groove structure has a third wave shape extending in a third direction and is formed between one of the plurality of first groove structures and one of the plurality of second groove structures.

[0006] According to a third aspect, there is provided a blade member having a groove structure formed on a surface, including a first region having a groove structure extending in a first direction, a second region where the groove structure is not formed, and a third region located between the first region and the second region and having a groove structure connected to the groove structure of the first region. The depth of the groove structure formed in the third region becomes shallower as it approaches the second region from the first region.

[0007] According to a fourth aspect, there is provided a structural member having a groove structure formed on a surface, the groove structure including a plurality of first groove structures, a plurality of second groove structures, and a third groove structure. The plurality of first groove structures are formed to extend in a first direction, the plurality of second groove structures are formed to extend in a second direction, and the third groove structure extends along a third direction and is formed between one of the plurality of first groove structures and one of the plurality of second groove structures.

[0008] According to a fifth aspect, there is provided a structural member having a groove structure formed on a surface, the groove structure including a plurality of first groove structures, a plurality of second groove structures, and a third groove structure, the plurality of first groove structures being in a first wave shape extending in a first direction and formed to be arranged at a first arrangement pitch along a direction intersecting the first direction, the plurality of second groove structures being in a second wave shape extending in a second direction and formed to be arranged at a second arrangement pitch along a direction intersecting the second direction, and the third groove structure being in a third wave shape extending in a third direction and formed between one of the plurality of first groove structures and one of the plurality of second groove structures.

[0009] According to a sixth aspect, there is provided a structural member having a groove structure formed on a surface, the groove structure including a plurality of first groove structures, a plurality of second groove structures, and a third groove structure, the plurality of first groove structures being in a first wave shape extending in a first direction and formed to be arranged at a first arrangement pitch along a direction intersecting the first direction, the plurality of second groove structures extending in a second direction and formed to be arranged at a second arrangement pitch along a direction intersecting the second direction, and the third groove structure being in a third wave shape extending in a third direction and formed between one of the plurality of first groove structures and one of the plurality of second groove structures.

[0010] According to a seventh aspect, there is provided a structural member having a groove structure formed on a surface, including a first region in which a groove structure extending in a first direction is formed, a second region in which the groove structure is not formed, and a third region located between the first region and the second region and having a groove structure connected to the groove structure in the first region, the depth of the groove structure formed in the third region becoming shallower as it approaches the second region from the first region.

Brief Description of the Drawings

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BEST MODE FOR CARRYING OUT THE INVENTION

[0012] Hereinafter, embodiments of a blade member, a structural member, a processing system, and a processing method will be described with reference to the drawings. Hereinafter, embodiments of a blade member, a structural member, a processing system, and a processing method will be described using a processing system SYS that performs a processing using processing light EL. However, the present invention is not limited to the embodiments described below.

[0013] Also, in the following description, the positional relationship of various components constituting the processing system SYS will be described using an XYZ orthogonal coordinate system defined by an X-axis, a Y-axis, and a Z-axis that are orthogonal to each other. In the following description, for convenience of explanation, each of the X-axis direction and the Y-axis direction is a horizontal direction (that is, a predetermined direction in a horizontal plane), and the Z-axis direction is a vertical direction (that is, a direction orthogonal to the horizontal plane, and substantially an up-and-down direction). Also, the rotational directions (in other words, the inclination directions) around the X-axis, the Y-axis, and the Z-axis are respectively referred to as the θX direction, the θY direction, and the θZ direction. Here, the Z-axis direction may be the gravity direction. Also, the XY plane may be the horizontal direction.

[0014] (1) Structure of the processing system SYS First, with reference to FIGS. 1 and 2, the structure of the processing system SYS of the present embodiment will be described. FIG. 1 is a cross-sectional view schematically showing the structure of the processing system SYS of the present embodiment. FIG. 2 is a system configuration diagram showing the system configuration of the processing system SYS of the present embodiment.

[0015] As shown in FIGS. 1 and 2, the processing system SYS includes a processing device 1, a processing light source 2, and a control device 3. At least a part of the processing device 1 is housed in the internal space of the housing 4. The internal space of the housing 4 may or may not be purged with a purge gas such as nitrogen gas. The internal space of the housing 4 may or may not be evacuated. However, the processing device 1 may not be housed in the internal space of the housing 4. That is, the processing system SYS may not include the housing 4 that houses the processing device 1.

[0016] The processing device 1 can process a workpiece W, which is a processing object (which may also be referred to as a base material), under the control of the control device 3. The workpiece W may be, for example, metal, an alloy (such as duralumin), a semiconductor (such as silicon), a resin, a composite material such as CFRP (Carbon Fiber Reinforced Plastic), a paint (as an example, a paint layer applied to a base material), glass, or an object composed of any other material.

[0017] The surface of the workpiece W may be coated with a film made of a material different from that of the workpiece W. In this case, the surface of the film coated on the surface of the workpiece W may be the surface processed by the processing device 1. Even in this case, the processing device 1 may be regarded as processing the workpiece W (that is, processing the workpiece W coated with the film).

[0018] The processing device 1 irradiates the workpiece W (for example, the turbine blade BL described above) with the processing light EL in order to process the workpiece W. The processing light EL may be any type of light as long as the workpiece W can be processed by irradiating the workpiece W. In the present embodiment, an example in which the processing light EL is a laser beam will be used for the explanation, but the processing light EL may be a type of light different from the laser beam. Further, the wavelength of the processing light EL may be any wavelength as long as the workpiece W can be processed by irradiating the workpiece W. For example, the processing light EL may be visible light, or may be invisible light (for example, at least one of infrared light, ultraviolet light, and extreme ultraviolet light). The processing light EL may include pulsed light (for example, pulsed light with a light emission time of picoseconds or less). Alternatively, the processing light EL may not include pulsed light. In other words, the processing light EL may be continuous light.

[0019] The processing device 1 may perform removal processing to remove a part of the workpiece W by irradiating the workpiece W with the processing light EL. In the present embodiment, the processing device 1 forms a riblet structure RB, which will be described in detail later with reference to FIG. 6, on the surface of the workpiece W by performing the removal processing. The riblet structure RB may include a structure capable of reducing the resistance of the fluid on the surface of the workpiece W (particularly, at least one of frictional resistance and turbulent frictional resistance). The riblet structure RB may include a structure capable of reducing the noise generated when the fluid moves relative to the surface of the workpiece W. Here, the "fluid" means a medium (for example, at least one of gas and liquid) flowing on the surface of the workpiece W. For example, when the surface of the workpiece W moves relative to the medium in a situation where the medium itself is stationary, this medium may also be referred to as a fluid. Here, the state where the medium is stationary may mean a state where the medium does not move with respect to a predetermined reference object (for example, the ground surface).

[0020] As an example of the work W on which the riblet structure RB is formed, a turbine blade BL can be given. In this case, the processing device 1 may form the riblet structure RB on the surface of the turbine blade BL by processing the turbine blade BL. The turbine blade BL is a member used in a turbine T which is an example of a fluid machine. Specifically, the turbine blade BL is a blade-shaped member that constitutes the blades of the turbine T. That is, the turbine blade BL is a structure that constitutes the blades of the turbine T. For this reason, the turbine blade BL may be referred to as a blade member or a structural member. An example of the turbine T is shown in FIGS. 3 and 4. FIG. 3 is a perspective view showing the appearance of the turbine T. FIG. 4 is a perspective view showing the appearance of the turbine blade BL. As shown in FIGS. 3 and 4, the turbine T includes a plurality of turbine blades BL. The turbine blade BL includes a shank 91 and a blade body 92 that is coupled to the shank 91 and extends radially outward from the shank 91 in the turbine T. At least one of the shank 91 and the blade body 92 may be composed of a single metal. At least one of the shank 91 and the blade body 92 may be composed of a plurality of metals. At least one of the shank 91 and the blade body 92 may be manufactured by an existing manufacturing method (for example, a manufacturing method using at least one of casting, forging, additive processing, removal processing, and machining). The shank 91 and the blade body 92 may be integrally manufactured. Alternatively, the separately manufactured shank 91 and blade body 92 may be coupled by an existing coupling method (for example, a coupling method using at least one of welding, brazing, and adhesion). The plurality of shanks 91 included in the plurality of turbine blades BL may be coupled to each other. The coupled plurality of shanks 91 may constitute at least a part of a rotatable rotor RT. The rotor RT and the turbine blade BL may be integrally formed.

[0021] The blade body 92 extends radially outward from the platform 911 of the shank 91 of the turbine T. The platform 911 includes a positive-pressure side platform 9111 and a negative-pressure side platform 9112. The blade body 92 includes a positive-pressure surface 921, a negative-pressure surface 922 facing the opposite side of the positive-pressure surface 921, a root portion 923 coupled to the shank 91, and a tip portion 924 constituting an end opposite to the root portion 923. The blade body 92 further includes a leading-edge surface 925 located between the positive-pressure surface 921 and the negative-pressure surface 922, and a trailing-edge surface 926 located between the positive-pressure surface 921 and the negative-pressure surface 922 on the side opposite to the leading-edge surface 925. At least one of the surfaces of the positive-pressure surface 921, the negative-pressure surface 922, the leading-edge surface 925, and the trailing-edge surface 926 may include a curved surface. For example, in the example shown in FIG. 4, the surfaces of at least the positive-pressure surface 921 and the negative-pressure surface 922 each include a curved surface.

[0022] The turbine T is rotatable using the flow of fluid supplied to the turbine T. Specifically, the turbine T is supplied with a fluid (for example, at least one of water, steam, air, and gas). The fluid supplied to the turbine T flows along the surfaces of each of the plurality of turbine blades BL. For this reason, the turbine blades BL are used in the fluid. As a result, the kinetic energy of the fluid is converted into the rotational energy of the turbine T by the plurality of turbine blades BL. As an example of such a turbine T, there is at least one of a steam turbine using steam as the fluid and a gas turbine using gas as the fluid. As another example of such a turbine T, there is at least one of a hydraulic turbine using water as the fluid and a buoyancy turbine using air as the fluid. Also, the turbine T may generate a fluid flow by its rotation.

[0023] The turbine T shown in FIGS. 3 and 4 still has axial-flow type turbine blades BL. That is, the turbine T shown in FIGS. 3 and 4 is an axial-flow turbine. However, as shown in FIG. 5, the turbine T may be a radial-flow turbine (i.e., a radial turbine). In a radial-flow turbine, as shown by arrows F1 and F2 in FIG. 5, the fluid enters the turbine blade BL parallel to the rotation axis 120 of the turbine blade BL and flows out from the outlet portion 160 in a direction intersecting the rotation axis 120.

[0024] In the following description, for the sake of convenience of explanation, an example in which the work W is the turbine blade BL will be described. However, the work W is not limited to the turbine blade BL. That is, the riblet structure RB may be formed on a work W different from the turbine blade BL. As another example of the work W on which the riblet structure RB is formed, any member that moves relative to a medium (for example, a fluid) can be mentioned. For example, the work W may be at least a part of a fan or a propeller (for example, a member constituting the blade of the fan or the propeller). A fan is a member (typically a rotating body) used in a blower or the like to form a gas flow. A propeller is a member (typically a rotating body) that converts the rotational force output from a prime mover including at least one of an engine and a motor into a propulsive force of a moving body including at least one of an airplane and a ship. For example, the work W may be at least a part of an impeller (for example, a member constituting the blade of the fan or the propeller). An impeller is a member used in a pump, for example, and is an impeller that can rotate so as to generate a force for the pump to send out (or suck in) a fluid. For example, the work W may be at least a part of a stationary separation plate disposed around the impeller. For example, the work W may be at least a part of the housing (for example, the fuselage or the hull) of a moving body including at least one of an airplane and a ship. For example, the work W may be at least a part of the wing portion (so-called wing) of an aircraft such as an airplane.

[0025] The workpiece W may include a casing. That is, the riblet structure RB may be formed on at least a part of the casing. For example, when the casing is used in the turbine T, the riblet structure RB may be formed on at least a part of the inner wall surface of the casing facing at least one of the accommodation space for accommodating the turbine blade BL (i.e., the movable blade) and the passage through which the fluid flows. For example, when the casing is used in a pump, the riblet structure RB may be formed on at least a part of the inner wall surface of the casing facing at least one of the accommodation space for accommodating the impeller and the passage through which the fluid flows. For example, when the casing is used to accommodate a fan of an air conditioner (e.g., at least one of the indoor unit and the outdoor unit constituting the air conditioner), the riblet structure RB may be formed on at least a part of the inner wall surface of the casing facing at least one of the accommodation space for accommodating the fan, the passage through which the fluid (e.g., refrigerant) flows, and the ventilation passage of the air conditioner.

[0026] The workpiece W may be a blade of a windmill (i.e., a blade) used for wind power generation. That is, the riblet structure RB may be formed on the blade of the windmill. In particular, the riblet structure RB may be formed on the blade of the windmill for obtaining clean energy (or natural energy or renewable energy) with low environmental impact. In this case, the energy efficiency can be improved.

[0027] Alternatively, in addition to or instead of the removal process, the processing apparatus 1 may perform an addition process of adding a new structure to the workpiece W by irradiating the workpiece W with the processing light EL. In this case, the processing apparatus 1 may form the above-described riblet structure RB on the surface of the workpiece W by performing the addition process. Alternatively, in addition to or instead of at least one of the removal process and the addition process, the processing apparatus 1 may perform a machining process of machining the workpiece W by bringing a tool into contact with the workpiece W. In this case, the processing apparatus 1 may form the above-described riblet structure RB on the surface of the workpiece W by performing the machining process.

[0028] The machining light EL is supplied from a machining light source 2 that generates the machining light EL to a machining apparatus 1 via an optical propagation member (e.g., at least one of an optical fiber and a mirror) (not shown). The machining apparatus 1 irradiates a workpiece W with the machining light EL supplied from the machining light source 2.

[0029] To machine the workpiece W, the machining apparatus 1 includes a machining head 11, a head drive system 12, a stage 13, and a stage drive system 14.

[0030] The machining head 1 irradiates the workpiece W with the machining light EL from the machining light source 2. To irradiate the workpiece W with the machining light EL, the machining head 11 includes a machining optical system 111. The machining head 11 irradiates the workpiece W with the machining light EL via the machining optical system 111. The machining optical system 111 may, for example, condense the machining light EL on the surface of the workpiece W. The machining optical system 111 may, for example, control the optical characteristics of the machining light EL. As an example of the optical characteristics of the machining light EL, at least one of the intensity of the machining light EL, the change in the intensity of the machining light EL over time, the condensing position of the machining light EL, the incident angle of the machining light EL with respect to the workpiece W, the shape of the machining light EL in an optical plane intersecting the optical axis of the machining optical system 111, the intensity distribution of the machining light EL in the optical plane, and the number of pulses of the machining light (provided that the machining light is pulsed light) can be mentioned.

[0031] The head drive system 12 moves the machining head 11 along at least one of the X-axis direction, the Y-axis direction, and the Z-axis direction under the control of the control device 3. Note that the head drive system 12 may move the machining head 11 along at least one of the θX direction, the θY direction, and the θZ direction in addition to or instead of at least one of the X-axis direction, the Y-axis direction, and the Z-axis direction. When the machining head 11 moves, the positional relationship between the stage 13 (and further, the workpiece W placed on the stage 13) and the machining head 11 changes. Furthermore, when the positional relationship between the stage 13 and the workpiece W and the machining head 11 changes, the irradiation position of the machining light EL on the workpiece W changes.

[0032] The work W is placed on the stage 13. The stage 13 does not necessarily have to hold the work W placed thereon. That is, the stage 13 does not have to apply a holding force for holding the work W to the work W placed on the stage 13. Alternatively, the stage 13 may hold the work W placed thereon. That is, the stage 13 may apply a holding force for holding the work W to the work W placed on the stage 13. For example, the stage 13 may hold the work W by vacuum adsorption and / or electrostatic adsorption.

[0033] The stage drive system 14 moves the stage 13 under the control of the control device 3. Specifically, the stage drive system 14 moves the stage 13 relative to the processing head 11. For example, the stage drive system 14 may move the stage 13 along at least one of the X-axis direction, Y-axis direction, Z-axis direction, θX direction, θY direction, and θZ direction under the control of the control device 3. Note that moving the stage 13 along at least one of the θX direction, θY direction, and θZ direction may be regarded as equivalent to changing the posture of the stage 13 (and further, the work W placed on the stage 13) around at least one of the X-axis, Y-axis, and Z-axis. Alternatively, moving the stage 13 along at least one of the θX direction, θY direction, and θZ direction may be regarded as equivalent to rotating (or rotationally moving) the stage 13 around at least one of the X-axis, Y-axis, and Z-axis.

[0034] When the stage 13 moves, the positional relationship between the stage 13 (and further, the work W placed on the stage 13) and the processing head 11 changes. Furthermore, when the positional relationship between the stage 13 and the work W and the processing head 11 changes, the irradiation position of the processing light EL on the work W changes.

[0035] The control device 3 controls the operation of the processing system SYS. For example, the control device 3 may generate machining control information for machining the workpiece W, and control the machining device 1 based on the generated machining control information so that the workpiece W is machined according to the machining control information. That is, the control device 3 may control the machining of the workpiece W.

[0036] The control device 3 may include, for example, an arithmetic unit and a storage device. The arithmetic unit may include, for example, at least one of a CPU (Central Processing Unit) and a GPU (Graphics Processing Unit). The control device 3 functions as a device that controls the operation of the processing system SYS when the arithmetic unit executes a computer program. This computer program is a computer program for causing the control device 3 (for example, the arithmetic unit) to perform the operations described later that the control device 3 should perform (that is, execute). That is, this computer program is a computer program for causing the control device 3 to function so as to cause the processing system SYS to perform the operations described later. The computer program executed by the arithmetic unit may be recorded in a storage device (that is, a recording medium) provided in the control device 3, or may be recorded in any storage medium (for example, a hard disk or a semiconductor memory) built in the control device 3 or externally attachable to the control device 3. Alternatively, the arithmetic unit may download the computer program to be executed from a device external to the control device 3 via a network interface.

[0037] The control device 3 does not necessarily have to be provided inside the processing system SYS. For example, the control device 3 may be provided outside the processing system SYS as a server or the like. In this case, the control device 3 and the processing system SYS may be connected by a wired and / or wireless network (or a data bus and / or a communication line). As the wired network, for example, a network using an interface of a serial bus system represented by at least one of IEEE1394, RS-232x, RS-422, RS-423, RS-485, and USB may be used. As the wired network, a network using an interface of a parallel bus system may be used. As the wired network, a network using an interface compliant with Ethernet (registered trademark) represented by at least one of 10BASE-T, 100BASE-TX, and 1000BASE-T may be used. As the wireless network, a network using radio waves may be used. As an example of the network using radio waves, a network compliant with IEEE802.1x (for example, at least one of a wireless LAN and Bluetooth (registered trademark)) can be given. As the wireless network, a network using infrared rays may be used. As the wireless network, a network using optical communication may be used. In this case, the control device 3 and the processing system SYS may be configured to be able to transmit and receive various kinds of information via the network. Also, the control device 3 may be able to transmit information such as commands and control parameters to the processing system SYS via the network. The processing system SYS may include a receiving device that receives information such as commands and control parameters from the control device 3 via the above network. Alternatively, a first control device that performs a part of the processing performed by the control device 3 may be provided inside the processing system SYS, while a second control device that performs another part of the processing performed by the control device 3 may be provided outside the processing system SYS.

[0038] As a recording medium for recording a computer program executed by the arithmetic unit, at least one of an optical disk such as a CD-ROM, CD-R, CD-RW, flexible disk, MO, DVD-ROM, DVD-RAM, DVD-R, DVD+R, DVD-RW, DVD+RW, and Blu-ray (registered trademark), a magnetic medium such as a magnetic tape, a magneto-optical disk, a semiconductor memory such as a USB memory, and any other medium capable of storing a program may be used. The recording medium may include a device capable of recording a computer program (for example, a general-purpose device or a dedicated device in which a computer program is implemented in a state executable in at least one of the forms of software and firmware). Further, each process and function included in the computer program may be realized by a logical processing block realized in the control device 3 (that is, a computer) by executing the computer program, or may be realized by hardware such as a predetermined gate array (FPGA, ASIC) provided in the control device 3, or may be realized in a form in which a logical processing block and a partial hardware module realizing some elements of the hardware are mixed.

[0039] (2) Riblet structure RB Subsequently, with reference to FIGS. 6(a) to 6(c), the riblet structure RB formed on the workpiece W by the processing system SYS will be described. FIG. 6(a) is a perspective view showing the riblet structure RB, FIG. 6(b) is a cross-sectional view showing the riblet structure RB (the cross-sectional view taken along line VI-VI' in FIG. 6(a)), and FIG. 6(c) is a top view showing the riblet structure RB. Incidentally, hereinafter, the riblet structure RB formed on the turbine blade BL, which is a specific example of the workpiece W, will be described. However, the riblet structure RB formed on a workpiece W different from the turbine blade BL may also have the structure described below.

[0040] As shown in FIGS. 6(a) to 6(c), the riblet structure RB may include a structure in which grooves extending along a first direction along the surface of the turbine blade BL are arranged in a plurality along a second direction along the surface of the turbine blade BL and intersecting the first direction. That is, the riblet structure RB may include a groove structure 9 formed to extend along the first direction and a structure arranged along the second direction. In the example shown in FIGS. 6(a) to 6(c), the riblet structure RB includes a groove structure 9 extending along the X-axis direction and arranged in a plurality along the Y-axis direction.

[0041] The groove structure 9 is a structure recessed along a direction intersecting both the direction in which the groove structure 9 extends and the direction in which the groove structure 9 is arranged. The groove structure 9 is a structure recessed from the surface of the turbine blade BL. In the example shown in FIGS. 6(a) to 6(c), the groove structure 9 is a structure recessed along the Z-axis direction.

[0042] Between adjacent groove structures 9, a ridge structure 8 protruding compared to the surroundings is formed. For this reason, the riblet structure RB may include a plurality of ridge structures 8 extending along a first direction along the surface of the turbine blade BL and arranged along a second direction along the surface of the turbine blade BL and intersecting the first direction. That is, the riblet structure RB may include a ridge structure 8 formed to extend along the first direction and a structure arranged along the second direction. The ridge structure 8 is a structure protruding along a direction intersecting both the direction in which the ridge structure 8 extends and the direction in which the ridge structure 8 is arranged. The ridge structure 8 is a structure protruding from the surface of the turbine blade BL. In the example shown in FIGS. 6(a) to 6(c), the ridge structure 8 is a structure protruding along the Z-axis direction. Incidentally, the ridge structure 8 may include a protruding structure having a protruding shape with respect to the surface of the turbine blade BL. The ridge structure 8 may include a convex structure convex with respect to the surface of the turbine blade BL. The ridge structure 8 may include a mountain-shaped structure that forms a mountain with respect to the surface of the turbine blade BL.

[0043] The mountain structure 8 may be regarded as a structure protruding from the groove structure 9. The mountain structure 8 may be regarded as a structure that forms at least one of a protruding structure, a convex structure, and a mountain-shaped structure between two adjacent groove structures 9. The groove structure 9 may be regarded as a structure recessed from the mountain structure 8. The groove structure 9 may be regarded as a structure that forms a groove-shaped structure between two adjacent mountain structures 8.

[0044] As described above, the processing system SYS of the present embodiment forms the riblet structure RB by performing removal processing. Therefore, the processing system SYS may form the riblet structure RB by performing removal processing to remove a portion of the turbine blade BL where the groove structure 9 is formed. That is, the processing system SYS may form the riblet structure RB by performing removal processing to remove a part of the turbine blade BL so as to leave the portion where the mountain structure 8 is formed. For example, the processing system SYS may irradiate the turbine blade BL with the processing light EL so that the processing light EL is irradiated to a portion of the surface of the turbine blade BL where the groove structure 9 is formed. Specifically, the processing system SYS irradiates the surface of the turbine blade BL with the processing light EL while moving the irradiation region EA (see FIG. 1) where the processing light EL is irradiated along the X-axis direction in which the groove structure 9 extends, and moves the irradiation region EA of the processing light EL along the Y-axis along which the groove structures 9 are arranged without irradiating the surface of the turbine blade BL with the processing light EL. By repeating the step operation, the riblet structure RB may be formed. In this case, it can also be said that the processing system SYS forms the riblet structure RB (that is, forms the mountain structure 8) by forming the groove structure 9.

[0045] (3) Specific example of the operation for forming the riblet structure RB Subsequently, a specific example of the operation of forming the riblet structure RB will be described.

[0046] (3-1) First specific example of the operation for forming the riblet structure RB In the first specific example, the processing system SYS may form the riblet structure RB based on information regarding the streamlines of the turbine blade BL. For example, FIG. 7 is a plan view schematically showing an example of the streamlines on the surface of the turbine blade BL. Note that the streamlines in the present embodiment may mean a curve whose tangent is the velocity vector of the fluid at each part of the surface of the turbine blade BL (that is, the workpiece W) in a situation where the fluid is flowing with respect to the surface of the turbine blade BL. That is, the streamlines in the present embodiment may mean a curve whose tangent is the velocity vector of the flow field on the surface of the turbine blade BL (that is, the workpiece W).

[0047] In the first specific example, the processing system SYS may form the riblet structure RB on the surface of the turbine blade BL based on such information regarding the streamlines of the turbine blade BL. For example, FIG. 8 is a plan view schematically showing an example of the riblet structure RB formed based on the information regarding the streamlines. As shown in FIG. 8, the processing system SYS may form the riblet structure RB such that at least one of the plurality of groove structures 9 extends along the streamline. The processing system SYS may form the riblet structure RB such that at least a part of one groove structure 9 extends along the streamline. The processing system SYS may form the riblet structure RB such that at least one of the plurality of ridge structures 8 extends along the streamline. The processing system SYS may form the riblet structure RB such that at least a part of one ridge structure 8 extends along the streamline. The processing system SYS may form the riblet structure RB such that at least one of the plurality of groove structures 9 extends along the direction determined based on the streamline. The processing system SYS may form the riblet structure RB such that at least a part of one groove structure 9 extends along the direction determined based on the streamline. The processing system SYS may form the riblet structure RB such that at least one of the plurality of ridge structures 8 extends along the direction determined based on the streamline. The processing system SYS may form the riblet structure RB such that at least a part of one ridge structure 8 extends along the direction determined based on the streamline.

[0048] Hereinafter, with reference to FIG. 9, an example of the operation of forming the riblet structure RB based on the information regarding the streamline will be described. FIG. 9 is a flowchart showing an example of the flow of the operation of forming the riblet structure RB based on the information regarding the streamline.

[0049] As shown in FIG. 9, the control device 3 acquires information regarding the streamline (hereinafter referred to as "streamline information") (step S101). The streamline information may include information indicating the direction of the streamline (that is, the direction of the velocity vector of the flow field). For example, FIG. 10 schematically shows an example of the streamline information. As shown in FIG. 10, the streamline information may include information indicating the direction of the streamline at each position on the surface of the turbine blade BL. In particular, the streamline information may include information indicating the direction of the streamline at each of a plurality of positions (that is, at least two positions) on the surface of the turbine blade BL. For example, as shown in FIG. 10, the streamline information may include information indicating the direction of the streamline at the first position P11 on the surface of the turbine blade BL and information indicating the direction of the streamline at the second position P12 on the surface of the turbine blade BL. However, the streamline information may include any information regarding the streamline in addition to or instead of the information indicating the direction of the streamline.

[0050] For example, when the streamline information is stored in the storage device provided in the control device 3, the control device 3 may read out the streamline information stored in the storage device. For example, the control device 3 may acquire the streamline information from a recording medium externally attachable to the processing system SYS using a recording medium reading device (not shown) provided in the processing system SYS. For example, the control device 3 may acquire (that is, download) the streamline information from a device external to the processing system SYS that can communicate with the processing system SYS via a communication network using a communication device provided in the processing system SYS.

[0051] The control device 3 may acquire streamline information by generating the streamline information. Specifically, for example, the control device 3 may calculate a shear stress (e.g., wall shear stress) acting on the surface of the turbine blade BL due to the viscosity of the fluid based on model information indicating a three-dimensional model of the turbine blade BL and characteristic information regarding the characteristics of the fluid flowing on the surface of the turbine blade BL. Then, the control device 3 may calculate streamlines at each position on the surface of the turbine blade BL based on the calculated wall shear stress.

[0052] Again, referring to FIG. 9, the control device 3 acquires pitch information regarding the arrangement pitch of the groove structures 9 in addition to the streamline information (step S102). The arrangement pitch of the groove structures 9 corresponds to the interval between two adjacent groove structures 9. As described above, since the ridge structure 8 is formed between two adjacent groove structures 9, the arrangement pitch of the groove structures 9 may be regarded as substantially equivalent to the arrangement pitch of the ridge structures 8. The arrangement pitch of the ridge structures 8 corresponds to the interval between two adjacent ridge structures 8.

[0053] FIG. 11 schematically shows an example of pitch information. As shown in FIG. 11, the pitch information may include information indicating the array pitch at each position on the surface of the turbine blade BL. In particular, the pitch information may include information indicating the array pitch at each of a plurality of positions (i.e., at least two positions) on the surface of the turbine blade BL. For example, as shown in FIG. 11, the pitch information includes information indicating the array pitch at the first position P11 on the surface of the turbine blade BL, information indicating the array pitch at the second position P12 on the surface of the turbine blade BL, information indicating the array pitch at the third position P13 on the surface of the turbine blade BL, and information indicating the array pitch at the fourth position P14 on the surface of the turbine blade BL. For example, in the example shown in FIG. 11, the pitch information indicates that the array pitch at the first position P11 on the surface of the turbine blade BL is 60 micrometers, the array pitch at the second position P12 on the surface of the turbine blade BL is 60 micrometers, the array pitch at the third position P13 on the surface of the turbine blade BL is 70 micrometers, and the array pitch at the third position P13 on the surface of the turbine blade BL is 110 micrometers.

[0054] For example, when the pitch information is stored in the storage device included in the control device 3, the control device 3 may read the pitch information stored in the storage device. For example, the control device 3 may acquire the pitch information from a recording medium external to the processing system SYS that can be externally attached to the processing system SYS, using a recording medium reading device (not shown) included in the processing system SYS. For example, the control device 3 may acquire (i.e., download) the pitch information from a device external to the processing system SYS that can communicate with the processing system SYS via a communication network, using a communication device included in the processing system SYS.

[0055] The control device 3 may acquire pitch information by generating pitch information. Specifically, for example, the control device 3 calculates an appropriate array pitch capable of reducing the resistance of the fluid to the surface of the turbine blade BLW (particularly, at least one of frictional resistance and turbulent frictional resistance) based on model information indicating a three-dimensional model of the turbine blade BL and characteristic information regarding the characteristics of the fluid flowing on the surface of the turbine blade BL.

[0056] Again referring to FIG. 9, thereafter, the control device 3 sets (i.e., determines or calculates) the position where the groove structure 9 is formed on the surface of the turbine blade BL (step S103). As described above, the groove structure 9 extends linearly on the surface of the turbine blade BL. Therefore, the control device 3 may set a line representing the locus along which the groove structure 9 extends as the position where the groove structure 9 is formed. In the following description, for convenience of explanation, the line representing the locus along which the groove structure 9 extends is referred to as the "riblet line RL".

[0057] As described above, since the ridge structure 8 is formed between two adjacent groove structures 9, the position where the groove structure 9 is formed may be regarded as substantially indirectly indicating the position where the ridge structure 8 is formed. Therefore, the riblet line RL may be a line representing the locus along which the ridge structure 8 extends. In addition to or instead of the riblet line RL which is a line representing the locus along which the groove structure 9 extends, the control device 3 may set a riblet line RL which is a line representing the locus along which the ridge structure 8 extends. Incidentally, in the following, for convenience of explanation, the riblet line RL which is a line representing the locus along which the groove structure 9 extends will be described. However, the following description can be used as a description regarding the riblet line RL corresponding to the line representing the locus along which the ridge structure 8 extends by replacing the term "groove structure 9" with the term "ridge structure 8".

[0058] Based on the streamline information acquired in step S101 and the pitch information acquired in step S102, the control device 3 sets the riblet line RL. Specifically, the control device 3 specifies the direction of the streamline at each position on the surface of the turbine blade BL based on the streamline information. Further, the control device 3 specifies the array pitch of the groove structure 9 formed at each position on the surface of the turbine blade BL based on the pitch information. Thereafter, the control device 3 sets a plurality of riblet lines RL that extend along the specified direction of the streamline and are parallel to each other at the specified array pitch along a direction intersecting the specified direction of the streamline at each position on the surface of the turbine blade BL. That is, the control device 3 sets a plurality of riblet lines RL that are parallel to each other at each position on the surface of the turbine blade BL such that the extending direction of the plurality of riblet lines RL coincides with the direction of the streamline indicated by the streamline information and the array pitch of the riblet lines RL coincides with the array pitch indicated by the pitch information.

[0059] Specifically, as shown in FIG. 12 schematically showing the riblet lines RL, the control device 3 is configured such that, at the first position P11 on the surface of the turbine blade BL, the extending directions of the plurality of riblet lines RL coincide with the streamline direction at the first position P11 indicated by the streamline information, and the arrangement pitch of the riblet lines RL coincides with the arrangement pitch at the first position P11 indicated by the pitch information, and sets a plurality of riblet lines RL parallel to each other. For example, the control device 3 may set a plurality of riblet lines RL parallel to each other in a region on the surface of the turbine blade BL including the first position P11 such that the extending directions of the plurality of riblet lines RL coincide with the streamline direction at the first position P11 indicated by the streamline information, and the arrangement pitch of the riblet lines RL coincides with the arrangement pitch at the first position P11 indicated by the pitch information. Similarly, the control device 3 is configured such that, at the second position P12 on the surface of the turbine blade BL, the extending directions of the plurality of riblet lines RL coincide with the streamline direction at the second position P12 indicated by the streamline information, and the arrangement pitch of the riblet lines RL coincides with the arrangement pitch at the second position P12 indicated by the pitch information, and sets a plurality of riblet lines RL parallel to each other. For example, the control device 3 may set a plurality of riblet lines RL parallel to each other in a region on the surface of the turbine blade BL including the second position P12 such that the extending directions of the plurality of riblet lines RL coincide with the streamline direction at the second position P12 indicated by the streamline information, and the arrangement pitch of the riblet lines RL coincides with the arrangement pitch at the second position P12 indicated by the pitch information. However, the control device 3 may set a plurality of riblet lines RL including at least two riblet lines RL that are not parallel to each other (i.e., non-parallel).

[0060] The control device 3 may set the riblet line RL such that the size of the line segment constituting the riblet line RL (specifically, the size of the line segment of the riblet line RL in the extending direction of the riblet line RL, substantially the length) is larger than the arrangement pitch of the groove structure 9 (that is, the arrangement pitch of the riblet line RL). The control device 3 may set the riblet line RL such that the length of the line segment constituting the riblet line RL is several times to several tens of times the arrangement pitch of the groove structure 9 (that is, the arrangement pitch of the riblet line RL). As an example, when the arrangement pitch of the groove structure 9 is several tens of micrometers, the control device 3 may set the riblet line RL such that the length of the line segment constituting the riblet line RL is several hundreds of micrometers to several millimeters.

[0061] As described above, at each position on the surface of the turbine blade BL, a plurality of riblet lines RL are set, each of which is composed of a plurality of line segments extending along the direction of the streamline at each position indicated by the streamline information and arranged at the arrangement pitch at each position indicated by the pitch information. Therefore, the control device 3 may set, at each position on the surface of the turbine blade BL, a riblet line RL composed of a line segment that is longer than the arrangement pitch at each position indicated by the pitch information and extends along the direction of the streamline at each position indicated by the streamline information. For example, at the first position P11 on the surface of the turbine blade BL, the control device 3 may set a riblet line RL composed of a line segment that is longer than the arrangement pitch at the first position P11 indicated by the pitch information and extends along the direction of the streamline at the first position P11 indicated by the streamline information. For example, at the second position P12 on the surface of the turbine blade BL, the control device 3 may set a riblet line RL composed of a line segment that is longer than the arrangement pitch at the second position P12 indicated by the pitch information and extends along the direction of the streamline at the second position P12 indicated by the streamline information.

[0062] The direction of the streamline in the first region on the surface of the turbine blade BL does not necessarily coincide with the direction of the streamline in the second region on the surface of the turbine blade BL adjacent to the first region. For this reason, the direction in which the riblet line RL set in the first region on the surface of the turbine blade BL extends does not necessarily coincide with the direction in which the riblet line RL set in the second region on the surface of the turbine blade BL extends. FIG. 12 shows an example in which the direction in which the riblet line RL set in the first region (the region including the first position P11 in the example shown in FIG. 12) on the surface of the turbine blade BL extends is different from the direction in which the riblet line RL set in the second region (the region including the second position P12 in the example shown in FIG. 12) on the surface of the turbine blade BL extends. That is, FIG. 12 shows an example in which the riblet line RL set in the first region on the surface of the turbine blade BL is not parallel to the riblet line RL set in the second region on the surface of the turbine blade BL. However, the direction in which the riblet line RL set in the first region on the surface of the turbine blade BL extends may coincide with the direction in which the riblet line RL set in the second region on the surface of the turbine blade BL extends. That is, the riblet line RL set in the first region on the surface of the turbine blade BL and the riblet line RL set in the first region on the surface of the turbine blade BL may be parallel.

[0063] The array pitch of the groove structures 9 formed in the first region on the surface of the turbine blade BL does not necessarily match the array pitch of the groove structures 9 formed in the second region on the surface of the turbine blade BL adjacent to the first region. For this reason, the array pitch of the riblet lines RL set in the first region on the surface of the turbine blade BL does not necessarily match the array pitch of the riblet lines RL set in the second region on the surface of the turbine blade BL. FIG. 12 shows an example in which the array pitch of the riblet lines RL set in the first region on the surface of the turbine blade BL is different from the array pitch of the riblet lines RL set in the second region on the surface of the turbine blade BL. In this case, at least one of the plurality of riblet lines RL set in the first region on the surface of the turbine blade BL may not be connected to any of the plurality of riblet lines RL set in the second region on the surface of the turbine blade BL. However, the array pitch of the riblet lines RL set in the first region on the surface of the turbine blade BL may match the array pitch of the riblet lines RL set in the second region on the surface of the turbine blade BL.

[0064] Thereafter, the control device 3 generates machining control information for controlling the machining device 1 so as to form a riblet structure RB including a groove structure 9 extending along the riblet line RL set in step S103 (step S104). The machining control information may include, for example, machining path information indicating the relative movement locus of the irradiation region EA of the machining light EL on the surface of the workpiece W with respect to the workpiece W. Thereafter, the control device 3 controls the machining device 1 so as to form a riblet structure RB extending along the set riblet line RL based on the machining control information generated in step S104 (step S105). That is, the machining device 1 machines the turbine blade BL (that is, the workpiece W) so as to form a riblet structure RB extending along the set riblet line RL based on the machining control information generated in step S104 (step S105). As a result, as shown in FIG. 13, which is a plan view showing the turbine blade BL in which the riblet structure RB is formed, a riblet structure RB extending along the set riblet line RL is formed. That is, a riblet structure RB including a plurality of groove structures 9 extending along the direction in which the set riblet line RL extends and arranged at the same arrangement pitch as the arrangement pitch of the set riblet line RL is formed.

[0065] In the example shown in FIG. 13, in the region on the surface of the turbine blade BL including the first position P11, a plurality of groove structures 9 extending along the direction of the streamline at the first position P11 indicated by the streamline information and arranged at the arrangement pitch at the first position P11 indicated by the pitch information are formed. Further, in the region on the surface of the turbine blade BL including the second position P12 (that is, the region adjacent to the region including the first position P11), a plurality of groove structures 9 extending along the direction of the streamline at the second position P12 indicated by the streamline information and arranged at the arrangement pitch at the second position P12 indicated by the pitch information are formed. In the following description, the groove structure 9 formed at the first position P11 is referred to as "groove structure 9#1", and the groove structure 9 formed at the second position P12 is referred to as "groove structure 9#2".

[0066] The machining system SYS may form a riblet structure RB such that at least one of the plurality of groove structures 9 formed in the first region on the surface of the turbine blade BL is smoothly connected to at least one of the plurality of groove structures 9 formed in the second region on the surface of the turbine blade BL adjacent to the first region. Specifically, the machining system SYS may form a riblet structure RB including a third groove structure 9 that connects a first groove structure 9 formed in the first region and a second groove structure 9 formed in the second region. That is, the machining system SYS may form a riblet structure RB including a third groove structure 9 that constitutes a series of groove structures 9 together with one groove structure 9 and the second groove structure between the first groove structure 9 formed in the first region and the second groove structure 9 formed in the second region. In the following description, the third groove structure 9 for connecting the first and second groove structures 9 respectively formed in two adjacent regions is referred to as "groove structure 9_connect". For example, as shown in FIG. 13, the machining system SYS may form a riblet structure RB including a groove structure 9_connect that connects the groove structure 9#1 and the groove structure 9#2.

[0067] The direction in which the groove structure 9_connect extends may be different from the directions in which the two groove structures 9 to which the groove structure 9_connect is connected extend. For example, as shown in FIG. 13, the processing system SYS may form a re-riblet structure RB including a groove structure 9#1, a groove structure 9#2 extending along a direction different from the direction in which the groove structure 9#1 extends, and a groove structure 9_connect extending along a direction different from the directions in which the groove structures 9#1 and 9#2 extend. For example, the processing system SYS may form a re-riblet structure RB including a groove structure 9#1, a groove structure 9#2 extending along the same direction as the direction in which the groove structure 9#1 extends, and a groove structure 9_connect extending along a direction different from the directions in which the groove structures 9#1 and 9#2 extend. However, the direction in which the groove structure 9_connect extends may be the same as the direction in which at least one of the two groove structures 9 to which the groove structure 9_connect is connected extends. For example, the processing system SYS may form a re-riblet structure RB including a groove structure 9#1, a groove structure 9#2 extending along the same or different direction as the direction in which the groove structure 9#1 extends, and a groove structure 9_connect extending along the same direction as the direction in which at least one of the groove structures 9#1 and 9#2 extends.

[0068] The processing system SYS may form a groove structure 9_connect that satisfies the angular conditions described below. The angular conditions that the groove structure 9_connect connecting the groove structure 9#1 and the groove structure 9#2 may satisfy will be described. The angular conditions may include conditions related to the angle θ1 formed by the groove structure 9#1 and the groove structure 9_connect, the angle θ2 formed by the groove structure 9#2 and the groove structure 9_connect, and the angle θ3 formed by the groove structure 9#1 and the groove structure 9#2. The angle θ1 may be the angle formed by the axis along the direction in which the groove structure 9#1 extends and the axis along the direction in which the groove structure 9_connect extends. The angle θ1 may be the larger of the two angles formed by the groove structure 9#1 and the groove structure 9_connect (for example, an angle of 90 degrees or more and an angle of 90 degrees or less), such as an angle of 90 degrees or more. The angle θ2 may be the angle formed by the axis along the direction in which the groove structure 9#2 extends and the axis along the direction in which the groove structure 9_connect extends. The angle θ2 may be the larger of the two angles formed by the groove structure 9#2 and the groove structure 9_connect (for example, an angle of 90 degrees or more and an angle of 90 degrees or less), such as an angle of 90 degrees or more. The angle θ3 may be the angle formed by the axis along the direction in which the groove structure 9#1 extends and the axis along the direction in which the groove structure 9#2 extends. The angle θ3 may be the larger of the two angles formed by the groove structure 9#1 and the groove structure 9#2 (for example, an angle of 90 degrees or more and an angle of 90 degrees or less), such as an angle of 90 degrees or more. In this case, the angular conditions may include the condition that each of the angles θ1 and θ2 is larger than the angle θ3. The angular conditions may include the condition that the sum of the angles θ1 and θ2 is equal to the angle obtained by adding 180 degrees to the angle θ3.

[0069] The processing system SYS may form a riblet structure RB such that at least one of the plurality of first groove structures 9 formed in the first region on the surface of the turbine blade BL is not connected to any of the plurality of second groove structures 9 formed in the second region on the surface of the turbine blade BL adjacent to the first region. The processing system SYS may form a riblet structure RB such that at least one of the plurality of first groove structures 9 formed in the first region is not connected to the groove structure 9_connect. For example, as shown in FIG. 14, the processing system SYS may form a riblet structure RB such that at least one of the plurality of groove structures 9#1 is not connected to any of the plurality of groove structures 9#2 (in particular, not connected in the vicinity of the boundary between the groove structure 9#1 and the groove structure 9#2, that is, the boundary between the first region and the second region). The processing system SYS may form a riblet structure RB such that at least one of the plurality of groove structures 9#1 is not connected to the groove structure 9_connect.

[0070] However, the processing system SYS may form a riblet structure RB such that the plurality of first groove structures 9 formed in the first region on the surface of the turbine blade BL are respectively connected to the plurality of second groove structures 9 formed in the second region on the surface of the turbine blade BL adjacent to the first region. That is, the processing system SYS may form a riblet structure RB such that the first groove structure 9 and the groove structure 9_connect correspond one-to-one, and the second groove structure 9 and the groove structure 9_connect correspond one-to-one.

[0071] The machining system SYS may form a riblet structure RB such that the array pitch of a plurality of first groove structures 9 formed in a first region on the surface of the turbine blade BL is different from the array pitch of a plurality of second groove structures 9 formed in a second region on the surface of the turbine blade BL adjacent to the first region. For example, as shown in FIG. 15, the machining system SYS may form a riblet structure RB such that the array pitch PT1#1 of the plurality of groove structures 9#1 is different from the array pitch PT1#2 of the plurality of groove structures 9#2. In this case, as shown in FIG. 15, at least two of the plurality of groove structures 9_connect that connect the plurality of first groove structures 9 (for example, the plurality of groove structures 9#1 in FIG. 15) and the plurality of second groove structures 9 (for example, the plurality of groove structures 9#2 in FIG. 15) may not be parallel to each other (that is, they may be non-parallel). That is, at least two of the plurality of groove structures 9_connect that connect the plurality of first groove structures 9 (for example, the plurality of groove structures 9#1 in FIG. 15) and the plurality of second groove structures 9 (for example, the plurality of groove structures 9#2 in FIG. 15) may extend in different directions from each other (that is, one direction and another direction different from or intersecting the one direction). Typically, the plurality of groove structures 9_connect that connect the plurality of first groove structures 9 (for example, the plurality of groove structures 9#1 in FIG. 15) and the plurality of second groove structures 9 (for example, the plurality of groove structures 9#2 in FIG. 15) may not be parallel to each other (that is, they may be non-parallel). That is, the plurality of groove structures 9_connect that connect the plurality of first groove structures 9 (for example, the plurality of groove structures 9#1 in FIG. 15) and the plurality of second groove structures 9 (for example, the plurality of groove structures 9#2 in FIG. 15) may extend in different directions from each other. In this case, the array pitch of the groove structure 9_connect (for example, the array pitch PT1_connect shown in FIG. 15) may vary according to the position in the direction in which the groove structure 9_connect extends (in the example shown in FIG. 15, the Y-axis direction).As an example, as shown in FIG. 15, when the arrangement pitch PT1#1 of the plurality of groove structures 9#1 is larger than the arrangement pitch PT1#2 of the plurality of groove structures 9#2, in the first region, as approaching the boundary between the first region and the second region, the arrangement pitch of the groove structure 9_connect gradually becomes smaller, and in the second region, as departing from the boundary between the first region and the second region, the arrangement pitch of the groove structure 9_connect may gradually become smaller. As another example, although not shown, when the arrangement pitch PT1#1 of the plurality of groove structures 9#1 is smaller than the arrangement pitch PT1#2 of the plurality of groove structures 9#2, in the first region, as approaching the boundary between the first region and the second region, the arrangement pitch of the groove structure 9_connect gradually becomes larger, and in the second region, as departing from the boundary between the first region and the second region, the arrangement pitch of the groove structure 9_connect may gradually become larger.

[0072] However, the processing system SYS may form the riblet structure RB such that the arrangement pitch of the plurality of first groove structures 9 formed in the first region on the surface of the turbine blade BL is the same as the arrangement pitch of the plurality of second groove structures 9 formed in the second region on the surface of the turbine blade BL adjacent to the first region. In this case, the arrangement pitch of the groove structure 9_connect (for example, the arrangement pitch PT1_connect shown in FIG. 15) may be constant regardless of the position in the direction in which the groove structure 9_connect extends (in the example shown in FIG. 15, the Y-axis direction). In addition, when the groove structure 9_connect is formed, the control device 3 may preset the riblet line RL corresponding to the groove structure 9_connect. For example, instead of the riblet line RL shown in FIG. 12, the control device 3 may set the riblet line RL such that it is smoothly connected to at least one of the riblet line RL set in the first region and the plurality of riblet lines RL set in the second region adjacent to the first region. For example, instead of the riblet line RL shown in FIG. 12, the control device 3 may set another riblet line RL (specifically, the riblet line RL for forming the groove structure 9_connect) for connecting the two riblet lines RL respectively set in two adjacent regions. In this case, the processing device 1 may form the groove structure 9_connect based on the riblet line RL generated by the control device 3.

[0073] The surface of the turbine blade BL (or any workpiece W) may include a curved surface. In this case, the plurality of groove structures 9 extending along a plurality of riblet lines RL parallel to each other may not be exactly parallel on the surface of the turbine blade BL (or any workpiece W). However, even in this case, the plurality of groove structures 9 extending along a plurality of riblet lines RL parallel to each other may be regarded as parallel to each other on the surface of the turbine blade BL (or any workpiece W). Alternatively, when the plurality of groove structures 9 extending on the surface of the turbine blade BL are projected onto a predetermined plane (i.e., projected), if the plurality of groove structures 9 are parallel to each other on the predetermined plane, the plurality of riblet lines RL formed on the surface of the turbine blade BL (or any workpiece W) may be regarded as parallel to each other.

[0074] Thus, in the first specific example, the machining system SYS forms the riblet structure RB based on the streamline information. As a result, a riblet structure RB including groove structures 9 (and further ridge structures 8) extending along a direction determined based on the streamline (typically, the direction of the streamline) is formed. Therefore, it becomes possible to form a riblet structure RB that can appropriately reduce the resistance of the fluid to the surface of the workpiece W.

[0075] In particular, in the first specific example, a groove structure 9_connect that connects the first and second groove structures 9 adjacent to each other is formed. Therefore, compared with the case where the groove structure 9_connect is not formed, a series of groove structures 9 composed of the first and second groove structures 9 and the groove structure 9_connect extends more smoothly. As a result, it becomes possible to form a riblet structure RB that can appropriately reduce the resistance of the fluid to the surface of the workpiece W.

[0076] Furthermore, in the above description, the control device 3 included in the processing system SYS sets the reticle line RL. However, an information processing device external to the processing system SYS may set the reticle line RL. That is, the information processing device external to the processing system SYS may perform the operations from step S101 to step S105 in FIG. 9. In this case, the control device 3 may acquire information regarding the reticle line RL from the external information processing device and generate processing control information based on the acquired information regarding the reticle line RL. Alternatively, the external information processing device may set the reticle line RL and generate processing control information. That is, the information processing device external to the processing system SYS may perform the operations from step S101 to step S105 in FIG. 9. In this case, the control device 3 may acquire the processing control information from the external information processing device and control the processing device 1 based on the acquired processing control information.

[0077] (3-2) Second specific example of the operation for forming the riblet structure RB Subsequently, in the second specific example, the processing system SYS may form a reticle structure RB including a groove structure 9 having a wave shape. That is, the processing system SYS may form a reticle structure RB including a groove structure 9 extending so as to have a wave shape. When the shape of the groove structure 9 is wave-shaped, the ridge structure 8 located between two adjacent groove structures 9 also extends so as to have a wave shape. Therefore, the processing system SYS may form a reticle structure RB including a wave-shaped ridge structure 8 (that is, a ridge structure 8 extending so as to have a wave shape). Therefore, the following description can be used as a description regarding the ridge structure 8 extending so as to have a wave shape by replacing the term "groove structure 9" with the term "ridge structure 8". Also, in the following description, for convenience of explanation, the groove structure 9 extending so as to have a wave shape is referred to as a "wavy groove structure 9w".

[0078] An example of a riblet structure RB including a wavy groove structure 9w is shown in FIG. 16. As shown in FIG. 16, the wavy groove structure 9w may mean a groove structure 9 that extends in a plane (in the example shown in FIG. 16, the XY plane) including a first direction (in the example shown in FIG. 16, the Y-axis direction) in which the wavy groove structure 9w extends and a second direction (in the example shown in FIG. 16, the X-axis direction) in which a plurality of wavy groove structures 9w are arranged, so as to draw a wavy locus. The wavy groove structure 9w may be a groove structure 9 that extends along the first direction while swinging along the second direction in which a plurality of wavy groove structures 9w are arranged. The wavy groove structure 9w may be a groove structure 9 having a sinusoidal shape.

[0079] As shown in FIG. 17, which is an enlarged view of the wavy groove structure 9w, the wavy groove structure 9w may intersect an axis AX extending along the first direction in which the wavy groove structure 9w extends at at least three locations. In the example shown in FIG. 17, the wavy groove structure 9w intersects the axis AX at each of positions P21, P22, and P23. Further, a position P24 of the wavy groove structure 9w between the position P21 and the position P22 may be located on one direction side of the axis AX (in the example shown in FIG. 17, the -X side). Further, a position P25 of the wavy groove structure 9w between the position P22 and the position P23 may be located on the other direction side of the axis AX (specifically, the side opposite to one direction, and in the example shown in FIG. 17, the +X side).

[0080] The riblet structure RB may include a plurality of wavy groove structures 9w arranged at a first array pitch and a plurality of wavy groove structures 9w arranged at a second array pitch. In the following description, for convenience of explanation, each of the plurality of wavy groove structures 9w arranged at the first array pitch is referred to as "wavy groove structure 9w#a", and each of the plurality of wavy groove structures 9w arranged at the second array pitch is referred to as "wavy groove structure 9w#b".

[0081] The wavy groove structure 9w#a may satisfy the conditions shown in FIG. 17. That is, the wavy groove structure 9w#a may intersect with a first axis extending along the direction in which the wavy groove structure 9w#a extends, at each of a first position, a second position, and a third position. Further, a fourth position of the wavy groove structure 9w#a between the first position and the second position may be located on the first direction side of the first axis. Further, a fifth position of the wavy groove structure 9w#a between the second position and the third position may be located on the second direction side (specifically, the side opposite to the first direction) of the first axis.

[0082] The wavy groove structure 9w#b may satisfy the conditions shown in FIG. 17. That is, the wavy groove structure 9w#b may intersect with a second axis extending along the direction in which the wavy groove structure 9w#b extends, at each of a sixth position, a seventh position, and an eighth position. Further, a ninth position of the wavy groove structure 9w#b between the sixth position and the seventh position may be located on the third direction side of the second axis. Further, a tenth position of the wavy groove structure 9w#b between the seventh position and the eighth position may be located on the fourth direction side (specifically, the side opposite to the third direction) of the second axis.

[0083] When the riblet structure RB includes the wavy groove structures 9w#a and 9w#b, the riblet structure RB may include a wavy groove structure 9w that connects the wavy groove structure 9w#a and the wavy groove structure 9w#b. In the following description, for convenience of explanation, the wavy groove structure 9w that connects the wavy groove structure 9w#a and the wavy groove structure 9w#b is referred to as "wavy groove structure 9w_connect". The wavy groove structure 9w_connect is typically formed between the wavy groove structure 9w#a and the wavy groove structure 9w#b. As described above, when the riblet structure RB includes a plurality of wavy groove structures 9w#a and a plurality of wavy groove structures 9w#b, the riblet structure RB may include a plurality of wavy groove structures 9w_connect that connect the plurality of wavy groove structures 9w#a and the plurality of wavy groove structures 9w#b, respectively. That is, the riblet structure RB may include a plurality of wavy groove structures 9w_connect that connect one of the plurality of wavy groove structures 9w#a and one of the plurality of wavy groove structures 9w#b.

[0084] The wavy groove structure 9w_connect may satisfy the conditions shown in FIG. 17. That is, the wavy groove structure 9w_connect may intersect with a third axis extending along the direction in which the wavy groove structure 9w_connect extends, and at the 11th position, the 12th position, and the 13th position, respectively. Further, the 14th position of the wavy groove structure 9w_connect between the 11th position and the 12th position may be located on the fifth direction side of the third axis. Further, the 15th position of the wavy groove structure 9w_connect between the 12th position and the 13th position may be located on the sixth direction side (specifically, the side opposite to the fifth direction) of the third axis.

[0085] Hereinafter, with reference to FIG. 18, the riblet structure RB including the wavy groove structures 9w#a, 9w#b, and 9w_connect will be described. FIG. 18 is a plan view schematically showing the riblet structure RB including the wavy groove structures 9w#a, 9w#b, and 9w_connect. Incidentally, hereinafter, the wavy groove structure 9w_connect formed when the arrangement pitch of the wavy groove structure 9w#a and the arrangement pitch of the wavy groove structure 9w#b are different will be described. However, the same can be said for the wavy groove structure 9w_connect formed when the arrangement pitch of the wavy groove structure 9w#a and the arrangement pitch of the wavy groove structure 9w#b are the same.

[0086] As shown in FIG. 18, one end of one wavy groove structure 9w_connect that connects one wavy groove structure 9w#a and one wavy groove structure 9w#b is connected to the end of one wavy groove structure 9w#a. At this time, at the boundary BD#a between one wavy groove structure 9w#a and one wavy groove structure 9w_connect, one wavy groove structure 9w#a and one wavy groove structure 9w_connect may be smoothly connected. For example, at the boundary BD#a, one wavy groove structure 9w#a and one wavy groove structure 9w_connect may be connected such that the tangent direction (that is, the direction in which the tangent extends) of one wavy groove structure 9w#a and the tangent direction of one wavy groove structure 9w_connect are aligned. In this case, compared with the case where the tangent direction of one wavy groove structure 9w#a and the tangent direction of one wavy groove structure 9w_connect are not aligned, one wavy groove structure 9w#a and one wavy groove structure 9w_connect may be regarded as being smoothly connected.

[0087] Furthermore, the other end of one wavey groove structure 9w_connect is connected to the end of one wavey groove structure 9w#b. At this time, at the boundary BD#b between one wavey groove structure 9w#b and one wavey groove structure 9w_connect, one wavey groove structure 9w#b and one wavey groove structure 9w_connect may be smoothly connected. For example, at the boundary BD#b, one wavey groove structure 9w#b and one wavey groove structure 9w_connect may be connected such that the tangent direction of one wavey groove structure 9w#b and the tangent direction of one wavey groove structure 9w_connect are aligned. In this case, compared with the case where the tangent direction of one wavey groove structure 9w#b and the tangent direction of one wavey groove structure 9w_connect are not aligned, one wavey groove structure 9w#b and one wavey groove structure 9w_connect may be regarded as being smoothly connected.

[0088] At least one of the plurality of wavy groove structures 9w_connect may extend along a direction intersecting the direction in which the wavy groove structures 9w#a and 9w#b connected by the at least one wavy groove structure 9w_connect extend. In this case, all of the plurality of wavy groove structures 9w_connect may extend along a direction intersecting the direction in which the wavy groove structures 9w#a and 9w#b extend. Alternatively, at least one of the plurality of wavy groove structures 9w_connect may extend along a direction parallel to the direction in which the wavy groove structures 9w#a and 9w#b connected by the at least one wavy groove structure 9w_connect extend. In the example shown in FIG. 18, the riblet structure RB includes a wavy groove structure 9w_connect-1 that connects the wavy groove structures 9w#a-1 and 9w#b-1 and extends in a direction different from the direction in which the wavy groove structures 9w#a-1 and 9w#b-1 extend, a wavy groove structure 9w_connect-2 that connects the wavy groove structures 9w#a-2 and 9w#b-2 and extends in a direction different from the direction in which the wavy groove structures 9w#a-2 and 9w#b-2 extend, a wavy groove structure 9w_connect-3 that connects the wavy groove structures 9w#a-3 and 9w#b-3 and extends in a direction parallel to the direction in which the wavy groove structures 9w#a-1 and 9w#b-1 extend, a wavy groove structure 9w_connect-4 that connects the wavy groove structures 9w#a-4 and 9w#b-4 and extends in a direction different from the direction in which the wavy groove structures 9w#a-4 and 9w#b-4 extend, and a wavy groove structure 9w_connect-5 that connects the wavy groove structures 9w#a-5 and 9w#b-5 and extends in a direction different from the direction in which the wavy groove structures 9w#a-5 and 9w#b-5 extend.

[0089] The plurality of wavy groove structures 9w_connect may include at least two wavy groove structures 9w_connect extending along different directions. That is, at least one of the plurality of wavy groove structures 9w_connect may extend along one direction, and at least one of the other plurality of wavy groove structures 9w_connect may extend along another direction different from the one direction. In the example shown in FIG. 18, the extending directions of the wavy groove structures 9w_connect-1 to 9w_connect-5 are different from each other.

[0090] In addition, in the example shown in FIG. 18, the plurality of wavy groove structures 9w#a and the plurality of wavy groove structures 9w#b extend along the same direction (in the example shown in FIG. 18, the Y-axis direction). However, the plurality of wavy groove structures 9w#a may include at least two wavy groove structures 9w#a extending along different directions. The plurality of wavy groove structures 9w#b may include at least two wavy groove structures 9w#b extending along different directions. At least one of the plurality of wavy groove structures 9w#a may extend along a direction intersecting the direction in which at least one of the plurality of wavy groove structures 9w#b extends.

[0091] When the plurality of wavy groove structures 9w_connect includes at least two wavy groove structures 9w_connect extending along different directions, the array pitch PT2_connect of the wavy groove structures 9w_connect may vary according to the position in the direction in which the wavy groove structures 9w_connect extend. However, the array pitch PT2_connect may be constant regardless of the position in the direction in which the wavy groove structures 9w_connect extend. In this case, typically, the plurality of wavy groove structures 9w_connect extend along the same direction.

[0092] Furthermore, the array pitch PT2#a of the wavy groove structure 9w#a may vary according to the position in the direction in which the wavy groove structure 9w#a extends. Alternatively, the array pitch PT2#a may be constant regardless of the position in the direction in which the wavy groove structure 9w#a extends. Also, the array pitch PT2#b of the wavy groove structure 9w#b may vary according to the position in the direction in which the wavy groove structure 9w#b extends. Alternatively, the array pitch PT2#b may be constant regardless of the position in the direction in which the wavy groove structure 9w#b extends.

[0093] The amplitude period (i.e., the wave period) of the wavy groove structure 9w_connect may vary according to the position in the direction in which the wavy groove structure 9w_connect extends. For example, when the amplitude period of the wavy groove structure 9w#a is different from the amplitude period of the wavy groove structure 9w#b, the amplitude period of the wavy groove structure 9w_connect may vary along the direction in which the wavy groove structure 9w_connect extends such that the amplitude period of the wavy groove structure 9w_connect changes from the amplitude period of the wavy groove structure 9w#a to the amplitude period of the wavy groove structure 9w#b (e.g., changes continuously or stepwise). For example, when the amplitude period of the wavy groove structure 9w#a is different from the amplitude period of the wavy groove structure 9w#b, the amplitude period of the wavy groove structure 9w_connect may vary along the direction in which the wavy groove structure 9w_connect extends such that the amplitude period of the wavy groove structure 9w_connect coincides with the amplitude period of the wavy groove structure 9w#a at the boundary BD#a and the amplitude period of the wavy groove structure 9w_connect coincides with the amplitude period of the wavy groove structure 9w#b at the boundary BD#b. Alternatively, the amplitude period of the wavy groove structure 9w_connect may be constant regardless of the position in the direction in which the wavy groove structure 9w_connect extends.

[0094] Furthermore, the amplitude period of the wavy groove structure 9w#a may vary according to the position in the direction in which the wavy groove structure 9w#a extends. Alternatively, the amplitude period of the wavy groove structure 9w#a may be constant regardless of the position in the direction in which the wavy groove structure 9w#a extends. Also, the amplitude period of the wavy groove structure 9w#b may vary according to the position in the direction in which the wavy groove structure 9w#b extends. Alternatively, the amplitude period of the wavy groove structure 9w#b may be constant regardless of the position in the direction in which the wavy groove structure 9w#b extends.

[0095] The amplitude of the wavy groove structure 9w_connect (i.e., the amplitude of the wave) may vary according to the position in the direction in which the wavy groove structure 9w_connect extends. For example, when the amplitude of the wavy groove structure 9w#a is different from the amplitude of the wavy groove structure 9w#b, the amplitude of the wavy groove structure 9w_connect may vary along the direction in which the wavy groove structure 9w_connect extends such that the amplitude of the wavy groove structure 9w_connect changes from the amplitude of the wavy groove structure 9w#a to the amplitude of the wavy groove structure 9w#b (e.g., changes continuously or stepwise). For example, when the amplitude of the wavy groove structure 9w#a is different from the amplitude of the wavy groove structure 9w#b, the amplitude of the wavy groove structure 9w_connect may vary along the direction in which the wavy groove structure 9w_connect extends such that the amplitude of the wavy groove structure 9w_connect coincides with the amplitude of the wavy groove structure 9w#a at the boundary BD#a and the amplitude of the wavy groove structure 9w_connect coincides with the amplitude of the wavy groove structure 9w#b at the boundary BD#b. Alternatively, the amplitude of the wavy groove structure 9w_connect may be constant regardless of the position in the direction in which the wavy groove structure 9w_connect extends.

[0096] Furthermore, the amplitude of the wavy groove structure 9w#a may vary according to the position in the direction in which the wavy groove structure 9w#a extends. Alternatively, the amplitude of the wavy groove structure 9w#a may be constant regardless of the position in the direction in which the wavy groove structure 9w#a extends. Also, the amplitude of the wavy groove structure 9w#b may vary according to the position in the direction in which the wavy groove structure 9w#b extends. Alternatively, the amplitude of the wavy groove structure 9w#b may be constant regardless of the position in the direction in which the wavy groove structure 9w#b extends.

[0097] The processing device 1 may form a riblet structure RB having wavy groove structures 9w#a, 9w#b, and 9w_connect as follows under the control of the control device 3. Specifically, the processing device 1 may first form the wavy groove structure 9w#a. Thereafter, the processing device 1 may form the wavy groove structure 9w_connect connected to the wavy groove structure 9w#a. At this time, the processing device 1 may form the wavy groove structure 9w_connect while adjusting the characteristics of the wavy groove structure 9w_connect so that the wavy groove structure 9w#a and the wavy groove structure 9w_connect are smoothly connected. For example, the processing device 1 may form the wavy groove structure 9w_connect while adjusting the characteristics of the wavy groove structure 9w_connect so that the tangent directions of the wavy groove structure 9w#a and the wavy groove structure 9w_connect align at the boundary BD#a. The characteristics of the wavy groove structure 9w_connect may include, for example, at least one of the amplitude period, amplitude, phase, and length of the wavy groove structure 9w_connect. Thereafter, the processing device 1 may form the wavy groove structure 9w#b connected to the wavy groove structure 9w_connect. At this time, the processing device 1 may form the wavy groove structure 9w#b while adjusting the characteristics of the wavy groove structure 9w#b so that the wavy groove structure 9w#b and the wavy groove structure 9w_connect are smoothly connected. For example, the processing device 1 may form the wavy groove structure 9w#b while adjusting the characteristics of the wavy groove structure 9w#b so that the tangent directions of the wavy groove structure 9w#b and the wavy groove structure 9w_connect align at the boundary BD#b. The characteristics of the wavy groove structure 9w#b may include, for example, at least one of the amplitude period, amplitude, phase, and length of the wavy groove structure 9w#b.

[0098] Thus, in the second specific example, the processing system SYS forms a riblet structure RB having a wavy groove structure 9w. In particular, the processing system SYS forms a riblet structure RB having a wavy groove structure 9w_connect formed between the wavy groove structures 9w#a and 9w#b such that the wavy groove structures 9w#a and 9w#b having different characteristics such as array pitch are smoothly connected. As a result, a wavy groove structure 9w that extends more smoothly can be formed as compared with the case where the wavy groove structures 9w#a and 9w#b having different characteristics such as array pitch are directly connected (that is, without passing through the wavy groove structure 9w_connect). For this reason, a riblet structure RB that can appropriately reduce the resistance of the fluid to the surface of the workpiece W can be formed.

[0099] In addition, in the above description, the wavy groove structure 9w_connect connects the wavy groove structure 9w#a and the wavy groove structure 9w#b. However, the wavy groove structure 9w_connect may connect the wavy groove structure 9w#a and a groove structure 9 that extends linearly (that is, is not wavy). In the following description, the linearly extending groove structure 9 connected to the wavy groove structure 9w_connect is referred to as a "non-wavy groove structure 9n#b". The non-wavy groove structure 9n#b is different from the wavy groove structure 9w#b in that it is not wavy. Other characteristics of the non-wavy groove structure 9n#b may be the same as other characteristics of the wavy groove structure 9w#b.

[0100] Also in this case, as shown in FIG. 19 showing the wavy groove structure 9w_connect connecting the wavy groove structure 9w#a and the non-wavy groove structure 9n#b, at the boundary BD#b between one non-wavy groove structure 9n#b and one wavy groove structure 9w_connect, one non-wavy groove structure 9n#b and one wavy groove structure 9w_connect may be smoothly connected. For example, at the boundary BD#b, one non-wavy groove structure 9n#b and one wavy groove structure 9w_connect may be connected such that the tangent direction of one non-wavy groove structure 9w#b and the tangent direction of one wavy groove structure 9w_connect are aligned.

[0101] The amplitude of the wavy groove structure 9w_connect connected to the non-wavy groove structure 9n#b may change according to the position in the direction in which the wavy groove structure 9w_connect extends. For example, the amplitude of the wavy groove structure 9w_connect may change along the direction in which the wavy groove structure 9w_connect extends so as to decrease as it approaches the boundary BD#b. For example, the amplitude of the wavy groove structure 9w_connect may change along the direction in which the wavy groove structure 9w_connect extends such that the amplitude of the wavy groove structure 9w_connect becomes zero at the boundary BD#b.

[0102] (3-3) Third specific example of the operation for forming the riblet structure RB Subsequently, in the third specific example, the processing system SYS may form a reticle structure RB including the groove structure 9 subjected to the end process. Hereinafter, an example of the reticle structure RB including the groove structure 9 subjected to the end process will be described with reference to FIGS. 20(a) and 20(b). FIG. 20(a) is a perspective view showing the reticle structure RB including the groove structure 9 subjected to the end process, and FIG. 20(b) is a cross-sectional view (particularly, the A-A' cross-sectional view of FIG. 20(a)) showing the reticle structure RB including the groove structure 9 subjected to the end process.

[0103] As shown in FIGS. 20(a) and 20(b), the groove structure 9 subjected to the end processing is a groove structure 9 including an end structure 93 in which the depth of the groove changes according to the position in the direction in which the groove structure 9 extends. In this case, the processing system SYS may form a riblet structure RB including a groove structure 9 including an end structure 93 in which the depth of the groove changes according to the position in the direction in which the groove structure 9 extends. For this reason, the end processing may include a process for changing the depth of the groove structure 9 according to the position in the direction in which the groove structure 9 extends at the end of the groove structure 9. Here, the "depth of the groove structure 9 (that is, the depth of the groove formed by the groove structure 9)" may represent the position of the bottom of the groove structure 9 with respect to the apex of the mountain structure 8 (in the example shown in FIGS. 20(a) and 20(b), the position in the Z-axis direction).

[0104] Specifically, the workpiece W includes a formation region W1 where the riblet structure RB is formed (that is, the groove structure 9 is formed) and a non-formation region W2 where the riblet structure RB is not formed (that is, the groove structure 9 is not formed). Further, the formation region W1 includes a formation region W11 and a formation region W12 adjacent to each other along the direction in which the groove structure 9 extends. A part of the groove structure 9 is formed in the formation region W11. Hereinafter, for convenience of explanation, the groove structure 9 formed in the formation region W11 is referred to as "groove structure 91". The formation region W12 is located between the formation region W11 and the non-formation region W2 along the direction in which the groove structure 9 extends. In the formation region W12, another part of the groove structure 9 connected to a part of the groove structure 9 (that is, the groove structure 91) formed in the formation region W11 is formed. Hereinafter, for convenience of explanation, the groove structure 9 formed in the formation region W12 is referred to as "groove structure 92".

[0105] The processing system SYS changes the depth of the groove structure 92 formed in the formation region W12 according to the position in the direction in which the groove structure 9 extends. That is, the processing system SYS forms the groove structure 92 in the formation region W12 so that the depth of the groove structure 92 formed in the formation region W12 changes according to the position in the direction in which the groove structure 9 extends. For this reason, the groove structure 92 may constitute the above-described end structure 93.

[0106] In particular, in the present embodiment, the processing system SYS changes the depth of the groove structure 92 such that the depth of the groove structure 92 becomes shallower as the groove structure 92 approaches the non-formation region W2 from the formation region W11 along the direction in which the groove structure 92 extends. Specifically, the processing system SYS changes the depth of the groove structure 92 according to the position in the direction in which the groove structure 9 extends such that the depth of the groove structure 92 at a second position closer to the non-formation region W2 than the first position is shallower than the depth of the groove structure 92 at the first position. For this reason, the end processing may include processing for making the depth of the groove structure 9 shallower as the groove structure 92 approaches the non-formation region W2 from the formation region W11 along the direction in which the groove structure 92 extends.

[0107] As shown in FIG. 21(a), which is a cross-sectional view showing the cross-section of the groove structure 91 (in particular, the B-B' cross-sectional view of FIG. 20(a)), and FIG. 21(b), which is a cross-sectional view showing the cross-section of the groove structure 92 (in particular, the C-C' cross-sectional view of FIG. 20(a)), the groove structure 92 may be formed such that the width WD of the groove structure 92 is smaller than the width WD of the groove structure 91. In this case, the processing system SYS may form the groove structure 92 such that the width WD of the groove structure 92 becomes smaller as the depth of the groove structure 92 becomes shallower. The processing system SYS may form the groove structure 92 such that the width WD of the groove structure 92 becomes smaller as the groove structure 92 approaches the non-formation region W2 from the formation region W11 along the direction in which the groove structure 92 extends. Alternatively, as shown in FIG. 22(a), which is a cross-sectional view showing the cross-section of the groove structure 91 (in particular, the B-B' cross-sectional view of FIG. 20(a)), and FIG. 22(b), which is a cross-sectional view showing the cross-section of the groove structure 92 (in particular, the C-C' cross-sectional view of FIG. 20(a)), the groove structure 92 may be formed such that the width WD of the groove structure 92 is the same as the width WD of the groove structure 91. In this case, the processing system SYS may form the groove structure 92 such that the width WD of the groove structure 92 is constant regardless of the depth of the groove structure 92. The processing system SYS may form the groove structure 92 such that the width WD of the groove structure 92 is constant regardless of the position in the direction in which the groove structure 92 extends. Here, the "width WD of the groove structure 91" may mean the size of the groove structure 91 in the direction intersecting the direction in which the groove structure 91 extends (that is, the size of the groove structure 91 in the direction in which a plurality of groove structures 91 are arranged). Similarly, the "width WD of the groove structure 92" here may mean the size of the groove structure 92 in the direction intersecting the direction in which the groove structure 92 extends (that is, the size of the groove structure 92 in the direction in which a plurality of groove structures 92 are arranged).

[0108] On the other hand, the processing system SYS does not necessarily need to form the groove structure 91 with a shallower depth as it approaches the non-formation region W2 in the formation region W11. That is, the depth of the groove structure 91 formed in the formation region W11 does not necessarily need to become shallower as the groove structure 91 approaches the non-formation region W2. In this case, the processing system SYS does not necessarily need to change the depth of the groove structure 91 according to the position in the direction in which the groove structure 9 extends. For example, the processing system SYS may form the groove structure 91 in the formation region W11 such that the depth of the groove structure 91 is constant regardless of the position in the direction in which the groove structure 9 extends.

[0109] At the boundary BD31 between the formation region W11 and the formation region W12, the groove structure 92 and the groove structure 91 are connected. At this time, the depth of the groove structure 92 and the depth of the groove structure 91 may be the same at the boundary BD31. That is, in the direction in which the groove structure 9 extends, the depth of the groove structure 92 at the end of the formation region W12 connected to the end of the formation region W11 may be the same as the depth of the groove structure 91 at the end of the formation region W11 connected to the end of the formation region W12.

[0110] At the boundary BD32 between the formation region W12 and the non-formation region W2, the groove structure 92 may disappear. That is, the processing system SYS may form the groove structure 92 in the formation region W12 such that the groove structure 92 disappears at the boundary BD32. In this case, the height of the formation region W12 and the height of the non-formation region W2 may be the same at the boundary BD32. That is, in the direction in which the groove structure 9 extends, the height of the end of the formation region W12 connected to the end of the non-formation region W2 may be the same as the height of the end of the non-formation region W2 connected to the end of the formation region W12.

[0111] In order to form the groove structure 92 with a varying depth, the processing system SYS may control the number of irradiations of the processing light EL under the control of the control device 3. For example, usually, the processing system SYS irradiates the processing light EL a plurality of times at the same position of the workpiece W to form a groove structure 92 with a certain depth. Specifically, when the processing system SYS can remove a structural portion with a thickness of d from the workpiece W by one irradiation of the processing light EL, in order to form a groove structure 92 with a depth of D, the processing light EL is irradiated D / d times at the same position of the workpiece W. At this time, the smaller the number of irradiations of the processing light EL, the shallower the depth of the formed groove structure 92. Therefore, as shown in FIG. 23 indicating the number of irradiations of the processing light EL with respect to the formation region W12, the processing system SYS may irradiate the formation region W12 with the processing light EL such that the number of irradiations of the processing light EL with respect to the formation region W12 decreases as the irradiation position of the processing light EL approaches the non-formation region W2. That is, the processing system SYS may irradiate the formation region W12 with the processing light EL such that each time the processing light EL irradiates the workpiece W, the range within the formation region W12 where the processing light EL is irradiated gradually becomes narrower. The processing system SYS may irradiate the formation region W12 with the processing light EL such that each time the processing light EL irradiates the workpiece W, the end portion of the range within the formation region W12 where the processing light EL is irradiated on the non-formation region W2 side gradually moves away from the non-formation region W2.

[0112] In order to form the groove structure 92 with variable depth, the processing system SYS may control the moving speed of the irradiation area EA of the processing light EL (i.e., the scanning speed of the processing light EL) under the control of the control device 3. For example, the faster the moving speed of the irradiation area EA, the less the amount of energy transmitted from the processing light EL to the workpiece W per unit area or per unit time. As a result, the thickness of the structural part that can be removed from the workpiece W by one irradiation of the processing light EL becomes thinner. That is, the depth of the groove structure 9 formed in the workpiece W by one irradiation of the processing light EL becomes shallower. Therefore, as shown in FIG. 24 indicating the moving speed of the irradiation area EA in the formation area W12, the processing system SYS may irradiate the formation area W12 with the processing light EL such that the moving speed of the irradiation area EA in the formation area W12 increases as the irradiation position of the processing light EL approaches the non-formation area W2.

[0113] In order to form the groove structure 92 with variable depth, the processing system SYS may control the intensity of the processing light EL under the control of the control device 3. For example, the lower the intensity of the processing light EL, the less the amount of energy transmitted from the processing light EL to the workpiece W per unit area or per unit time. As a result, the thickness of the structural part that can be removed from the workpiece W by one irradiation of the processing light EL becomes thinner. That is, the depth of the groove structure 9 formed in the workpiece W by one irradiation of the processing light EL becomes shallower. Therefore, as shown in FIG. 25 indicating the intensity of the processing light EL in the formation area W12, the processing system SYS may irradiate the formation area W12 with the processing light EL such that the intensity of the processing light EL in the formation area W12 decreases as the irradiation position of the processing light EL approaches the non-formation area W2.

[0114] When a riblet structure RB including a groove structure 92 with a varying depth is formed in this way, the technical effects described below can be achieved. First, in a comparative example where a riblet structure RB without the groove structure 92 is formed, as shown in FIG. 26, which is a cross-sectional view showing the riblet structure RB without the groove structure 92, the fluid flowing along the groove structure 9 is blocked by a wall formed in the non-formation region W2 at the end of the formation region W1 (W11) where the groove structure 9 is formed (typically, a wall that rises up to block the fluid flow). For this reason, it is difficult for the fluid flowing along the groove structure 9 to be smoothly discharged from the groove structure 9. As a result, since the fluid flow is disturbed, the effect of reducing the resistance to the fluid on the surface of the work W is diminished. On the other hand, in the present embodiment where a riblet structure RB including a groove structure 92 with a varying depth is formed, as shown in FIG. 20(b), the fluid flowing along the groove structure 9 is smoothly discharged from the groove structure 9 through the groove structure 92 that constitutes the end structure 93 of the groove structure 9. For this reason, in the present embodiment, the fluid flow is less likely to be disturbed. As a result, in the present embodiment, a riblet structure RB capable of appropriately reducing the resistance to the fluid on the surface of the work W can be formed.

[0115] In addition, in the examples shown in FIGS. 20(a) and 20(b), the depth of the groove structure 92 changes such that the rate of change of the depth of the groove structure 9 increases as the groove structure 92 approaches the non-formation region W12. However, as shown in FIG. 27, the depth of the groove structure 92 may change such that the rate of change of the depth of the groove structure 9 decreases as the groove structure 92 approaches the non-formation region W12. Alternatively, as shown in FIG. 28, the depth of the groove structure 92 may be constant regardless of the position in the direction in which the groove structure 92 extends.

[0116] Also, in the examples shown in FIGS. 20(a) to 20(b) and FIGS. 27 to 28, the depth of the groove structure 92 continuously decreases as the groove structure 92 approaches the non-formation region W12. However, as shown in FIGS. 29 and 30, the depth of the groove structure 92 may decrease stepwise as the groove structure 92 approaches the non-formation region W12 from the formation region W11. In this case, as shown in FIGS. 29 and 30, the groove structure 92 may include a bottom surface 921, a side surface 922, and a side surface 923. The bottom surface 921 may be a surface parallel to the bottom surface 911 of the groove structure 91. As shown in FIG. 29, the side surface 922 may be a surface extending upward (in the example shown in FIG. 29, the +Z side) from the end on the non-formation region W2 side of the bottom surface 921 along a direction inclined with respect to the bottom surface 921. Alternatively, as shown in FIG. 30, the side surface 922 may be a surface extending upward (in the example shown in FIG. 30, the +Z side) from the end on the non-formation region W2 side of the bottom surface 921 along a direction orthogonal to the bottom surface 921. As shown in FIG. 29, the side surface 923 may be a surface extending downward (in the example shown in FIG. 29, the -Z side) from the end on the formation region W11 side of the bottom surface 921 along a direction inclined with respect to the bottom surface 921. Alternatively, as shown in FIG. 30, the side surface 923 may be a surface extending downward (in the example shown in FIG. 29, the -Z side) from the end on the formation region W11 side of the bottom surface 921 along a direction orthogonal to the bottom surface 921. Even when the depth of the groove structure 92 decreases stepwise in this way, a riblet structure RB that can appropriately reduce the resistance of the fluid to the surface of the work W can be formed, as compared with a comparative example in which a riblet structure RB that does not include the groove structure 92 is formed, similar to the case where the depth of the groove structure 92 continuously decreases.

[0117] However, when the depth of the groove structure 92 gradually becomes shallower, as described above, side surfaces 922 and 923 that may function as walls blocking the flow of the fluid flowing through the groove structure 9 are formed. In particular, when the side surfaces 922 and 923 extend along a direction orthogonal to the bottom surface 921, the possibility that the side surfaces 922 and 923 function as walls blocking the flow of the fluid flowing through the groove structure 9 becomes relatively high. Therefore, when the depth of the groove structure 92 gradually becomes shallower, as shown in FIG. 31, the groove structure 92 may be formed such that the heights of the side surfaces 922 and 923 (that is, the sizes in the Z-axis direction) become relatively low. That is, the groove structure 92 may be formed such that the height of the wall (that is, the step) blocking the flow of the fluid flowing through the groove structure 9 becomes relatively low. In this case, typically, the groove structure 92 may be formed such that a plurality of steps formed by the side surfaces 922 and 923 are formed (that is, a large number of steps with low heights are formed).

[0118] (4) Modification example (4-1) First modification example The control device 3 may generate machining control information (for example, machining path information) based on the reticle information regarding the reticle structure RB to be formed on the workpiece W. Note that the reticle information regarding the reticle structure RB may include, for example, at least one of information regarding the reticle line RL, information regarding the direction in which the groove structure 9 extends, information regarding the size of the groove structure 9 (for example, at least one of the depth and width of the groove), information regarding the direction in which the mountain structure 8 extends, information regarding the size of the mountain structure 8 (for example, at least one of the height and width of the mountain), information regarding the arrangement pitch of the groove structure 9, and information regarding the arrangement pitch of the mountain structure 8.

[0119] The control device 3 may acquire relet information from outside the processing system SYS and generate processing control information based on the acquired relet information. At this time, the control device 3 may correct the acquired relet information and generate processing control information based on the corrected relet information. For example, the control device 3 may correct the acquired relet information based on the constraint conditions caused by the processing device 1 (that is, the constraint conditions caused by the operations for processing the workpiece W). For example, the control device 3 may correct the acquired relet information based on the constraint conditions caused by the workpiece W. Hereinafter, examples of correcting the relet information will be described.

[0120] As described above, the processing apparatus 1 processes the workpiece W by irradiating the processing light EL onto the workpiece W. For this reason, if the processing light EL cannot be irradiated onto the desired position of the workpiece W under the situation where it is desired to process the desired position of the workpiece W, the processing apparatus 1 cannot appropriately process the workpiece W. For example, the processing light EL irradiated onto the first portion of the workpiece W to process the first portion of the workpiece W may be blocked by the second portion of the workpiece W. In this case, the processing apparatus 1 cannot form the riblet structure RB indicated by the acquired riblet information by processing the first portion of the workpiece W. Therefore, in this case, instead of the riblet structure RB indicated by the acquired riblet information, the processing apparatus 1 may form a riblet structure RB that can be formed by the processing light EL irradiated onto the first portion of the workpiece W from a direction not blocked by the second portion of the workpiece W. In this case, the control device 3 may generate riblet information regarding the riblet structure RB that can be formed by the processing light EL irradiated onto the first portion of the workpiece W from a direction not blocked by the second portion of the workpiece W by correcting the acquired riblet information. As an example, when the processing light EL irradiated perpendicularly onto the first portion of the workpiece W to process the first portion of the workpiece W is blocked by the second portion of the workpiece W, the control device 3 may generate riblet information regarding the riblet structure RB that can be formed by the processing light EL irradiated obliquely onto the first portion of the workpiece W by correcting the acquired riblet information. That is, as shown in FIG. 32, the control device 32 may generate riblet information regarding the riblet structure RB (refer to the lower side of FIG. 32) formed by the processing light EL incident obliquely on the workpiece W by correcting the riblet information regarding the riblet structure RB (refer to the upper side of FIG. 32) formed by the processing light EL incident perpendicularly on the workpiece W.

[0121] The control device 3 may modify the reticle information so as to change the array pitch of the groove structure 9 indicated by the reticle information (or the array pitch of the ridge structure 8, the same hereinafter in the first modification example). For example, the larger the array pitch, the longer the time required to form the reticle structure RB. Therefore, as shown in FIG. 33, the control device 3 may modify the reticle information so that the array pitch of the groove structure 9 indicated by the reticle information becomes smaller. As a result, the time required to form the reticle structure RB is shortened. That is, the throughput for forming the reticle structure RB is improved. Alternatively, depending on the characteristics of the processing device 1, the processing device 1 may not be able to form a plurality of groove structures 9 arranged at the array pitch indicated by the reticle information. This is because the smaller the array pitch, the higher the processing accuracy required for the processing device 1. Therefore, there is a lower limit value (lower limit pitch) caused by the characteristics (for example, processing accuracy) of the processing device 1 for the array pitch of the groove structure 9 that the processing device 1 can process. For this reason, when the array pitch of the groove structure 9 indicated by the acquired reticle information is smaller than the lower limit pitch, the control device 3 may modify the reticle information so that the array pitch of the groove structure 9 indicated by the reticle information becomes the lower limit pitch (or becomes larger than the lower limit pitch). As a result, the processing device 1 can appropriately form the reticle structure RB on the workpiece W without requiring an expensive optical system or the like for improving the processing accuracy. However, when the array pitch of the groove structure 9 indicated by the acquired reticle information is much smaller than the lower limit pitch (for example, less than N (where N is a variable greater than 0 and less than 100, for example, a variable less than 60) % of the lower limit pitch), even if a plurality of groove structures 9 arranged at the lower limit pitch are formed, the effect of reducing the resistance of the fluid on the surface of the workpiece W may be weakened or disappear. For this reason, when the array pitch of the groove structure 9 indicated by the acquired reticle information is much smaller than the lower limit pitch, the processing device 1 may not form the reticle structure RB on the workpiece W. In this case, the control device 3 may output a warning indicating that the reticle structure RB cannot be formed.

[0122] The control device 3 may modify the reticle information so as to change the size of the groove structure 9 indicated by the reticle information (or the size of the ridge structure 8, the same hereinafter in the first modification example). For example, the deeper the groove forming the groove structure 9, the longer the time required to form the reticle structure RB. Therefore, as shown in FIG. 34, the control device 3 may modify the reticle information so that the depth of the groove structure 9 indicated by the reticle information becomes shallower. As a result, the time required to form the reticle structure RB is shortened. That is, the throughput for forming the reticle structure RB is improved. Alternatively, depending on the characteristics (e.g., size) of the workpiece W, the processing device 1 may not be able to form the groove structure 9 having the size (e.g., depth) indicated by the reticle information. Even if the groove structure 9 having the size (e.g., depth) indicated by the reticle information can be formed in the workpiece W, the quality of the workpiece W may deteriorate excessively (e.g., the strength or composition of the workpiece W deteriorates excessively). Therefore, the control device 3 may modify the reticle information so that the depth of the groove structure 9 indicated by the reticle information becomes a realistic depth that can be formed in the workpiece W. As a result, the processing device 1 can appropriately form the reticle structure RB in the workpiece W while maintaining the quality of the workpiece W.

[0123] In addition, when the control device 3 changes the arrangement pitch of the groove structure 9, it may also change the size of the groove structure 9 (e.g., at least one of the width and depth of the groove). For example, when the control device 3 changes the arrangement pitch of the groove structure 9, it may also change the size of the groove structure 9 so that the changed arrangement pitch and the changed size satisfy a predetermined numerical condition. For example, when the control device 3 changes the arrangement pitch of the groove structure 9, it may also change the size of the groove structure 9 so that the ratio of the changed arrangement pitch to the changed size becomes a predetermined ratio. For example, when the control device 3 changes the arrangement pitch of the groove structure 9, it may also change the size of the groove structure 9 so that the ratio of the changed arrangement pitch to the changed size becomes 2:1.

[0124] Similarly, when changing the size of the groove structure 9, the control device 3 may also change the array pitch of the groove structure 9 accordingly. For example, when changing the size of the groove structure 9, the control device 3 may change the array pitch of the groove structure 9 so that the changed array pitch and the changed size satisfy a predetermined numerical condition. For example, when changing the size of the groove structure 9, the control device 3 may change the array pitch of the groove structure 9 so that the ratio of the changed array pitch to the changed size becomes a predetermined ratio. For example, when changing the size of the groove structure 9, the control device 3 may change the array pitch of the groove structure 9 so that the ratio of the changed array pitch to the changed size is 2:1.

[0125] The control device 3 may modify the reticle information so as to change the cross-sectional shape of the groove structure 9 indicated by the reticle information (or the cross-sectional shape of the ridge structure 8, the same hereinafter in the first modification example). For example, depending on the characteristics of the processing device 1, the processing device 1 may not be able to form the groove structure 9 having the cross-sectional shape indicated by the reticle information. As an example, as shown in the upper part of FIG. 35, in a situation where reticle information indicating a groove structure 9 composed of V-shaped grooves with an inverted triangular cross-sectional shape is acquired, if there is a minimum value (minimum width) of the width of the groove that the processing device 1 can form due to the processing accuracy of the processing device 1, the processing device 1 cannot form the groove structure 9 indicated by the reticle information. Therefore, the control device 3 may modify the reticle information so that the cross-sectional shape of the groove structure 9 indicated by the reticle information becomes a realistic cross-sectional shape that the processing device 1 can form. As an example, as shown in the lower part of FIG. 35, the processing device 1 may modify the reticle information so that the width of the groove structure 9 indicated by the reticle information does not fall below the minimum width that the processing device 1 can form. As a result, the processing device 1 can appropriately form the reticle structure RB on the workpiece W without requiring an expensive optical system or the like for improving the processing accuracy.

[0126] The control device 3 may modify the relet information so as to change the joints of the groove structure 9 indicated by the relet information (or the joints of the ridge structure 8, the same applies hereinafter in the first modification example). For example, when the length of the groove structure 9 exceeds a predetermined length, there is a possibility that the processing device 1 cannot form the groove structure 9 at once. In this case, the processing device 1 may form the first structural part of the groove structure 9, and then form the second structural part of the groove structure 9 so as to connect to the first structural part. However, there is a possibility that a step is formed at the joint between the first structural part and the second structural part (that is, the joint of the groove structure 9). Therefore, the control device 3 may modify the relet information so that the joints of the groove structure 9 exist at positions on the surface of the workpiece W where the steps of the groove structure 9 are allowed to exist. As a result, the processing device 1 can appropriately form the relet structure RB on the workpiece W.

[0127] As described above, the relet information (particularly, the information regarding the relet line RL described above) may be generated based on the direction of the streamline. On the other hand, depending on the shape of the workpiece W, the direction of the streamline may be extremely complicatedly distributed on the surface of the workpiece W. The relet information generated under such a situation where the direction of the streamline is extremely complicatedly distributed indicates a groove structure 9 (or a ridge structure 8) that is distributed in an extremely complicated pattern on the surface of the workpiece W. As a result, there is a possibility that the processing device 1 cannot appropriately form such a groove structure 9. Therefore, the control device 3 may modify the relet information so that the direction in which the groove structure 9 (or the ridge structure 8) extends is averaged. The control device 3 may modify the relet information so that the groove structure 9 (or the ridge structure 8) extends along the direction in which the groove structure 9 (or the ridge structure 8) distributed in a complicated pattern extends on average. As a result, the processing device 1 can appropriately form the relet structure RB on the workpiece W.

[0128] (4-2) Other modification examples The processing device 1 may form a mold composed of the processed workpiece W by processing the workpiece W. In this case, the processing device 1 may form a mold having a draft gradient under the control of the control device 3. That is, the processing device 1 may form a mold having a surface inclined in the direction in which the mold opens (that is, the direction in which the molded product formed using the mold is demolded) under the control of the control device 3.

[0129] In the above description, the processing device 1 includes the head drive system 12. However, the processing device 1 may not include the head drive system 12. That is, the processing head 11 may not be movable. Also, in the above description, the processing device 1 includes the stage drive system 14. However, the processing device 1 may not include the stage drive system 14. That is, the stage 13 may not be movable.

[0130] In the above description, an example in which the processing device 1 forms the re-let structure RB on the metallic workpiece W (i.e., the base material), and an example in which the processing device 1 forms the re-let structure RB on the film coated on the surface of the workpiece W have been described. However, the processing performed by the processing device 1 is not limited to the above-described examples. For example, the processing device 1 may form the re-let structure RB on the surface of the workpiece W, and the surface of the workpiece W on which the re-let structure RB is formed may be coated with a film. For example, when the processing device 1 forms the re-let structure RB on the film coated on the surface of the workpiece W, the film on which the re-let structure RB is formed may be further coated with another film. In any example, the re-let structure RB may be coated with a film. In this case, the thickness of the film may be determined so that the function of the re-let structure RB is not reduced by the film coated on the re-let structure RB. For example, since there is a possibility that the function of the re-let structure RB may be reduced by the film when the re-let structure RB is buried in the film, the thickness of the film may be determined so that the re-let structure RB is not buried in the film. The film may be formed along the shape of the re-let structure RB (e.g., along the groove structure 9 or the ridge structure 8) so that the function of the re-let structure RB is not reduced by the film coated on the re-let structure RB.

[0131] The processing device 1 may form the re-let structure RB on the surface of the film using the workpiece W with a film stretched on the surface. The film may be a resinous film, a metallic film, or a film composed of other materials.

[0132] The material of the above-mentioned film (or film) may be a material containing at least one of CrN, TiN, TiLN, Y2O3, ZrO2, MCrALY (or MCrAlY), NiCr, Wc (or WC), Al2O3-TiO2, Cr2O3 and water-soluble aluminum, or may be other materials. Further, the film coated on the surface of the metal workpiece W may have a plurality of layers. In this case, the material of the first layer among the plurality of layers may be the same as or different from the material of the second layer different from the first layer among the plurality of layers. For example, the material of at least one of the first layer and the second layer may or may not contain at least one of CrN, TiN, TiLN, Y2O3, ZrO2, MCrALY (or MCrAlY), NiCr, Wc (or WC), Al2O3-TiO2, Cr2O3 and water-soluble aluminum.

[0133] The effects caused by coating the film on the workpiece W (particularly, the effects occurring on the workpiece W) may include at least one of the effects of protecting the workpiece W, improving the heat insulation property of the workpiece W, improving the heat resistance property of the workpiece W, improving the corrosion resistance property of the workpiece W, improving the wear resistance property of the workpiece W, and improving the oxidation resistance property of the workpiece W. The effects caused by forming the film on the riblet RB structure (that is, the effects realized by the film) may include at least one of the effects of protecting the riblet RB structure, improving the heat insulation property of the riblet RB structure, improving the heat resistance property of the riblet RB structure, improving the corrosion resistance property of the riblet RB structure, improving the wear resistance property of the riblet RB structure, and improving the oxidation resistance property of the riblet RB structure. The effects caused by forming a plurality of layers of different materials on the workpiece W (for example, forming a film including a plurality of layers of different materials) may include an anti-peeling effect. For example, considering the difference in the thermal expansion characteristics between the film close to the workpiece W and the workpiece W, and the difference in the thermal expansion characteristics between the film far from the workpiece W and the workpiece W, the film formed on the workpiece W may be selected. When the difference in the thermal expansion characteristics between the film close to the workpiece W and the workpiece W is smaller than the difference in the thermal expansion characteristics between the film far from the workpiece W (for example, the film on which the riblet structure RB is formed) and the workpiece W, peeling of the riblet structure RB due to the expansion of the film by heat can be suppressed.

[0134] In the above description, the machining system SYS forms a riblet structure RB having a function of reducing the resistance of the fluid against the surface of the workpiece W. However, the machining system SYS may form a structure having a function different from the function of reducing the resistance of the fluid against the surface of the workpiece W on the workpiece W. For example, the machining system SYS may form a riblet structure on the workpiece W for reducing the noise generated when the fluid and the surface of the workpiece W move relatively. For example, the machining system SYS may form a riblet structure on the workpiece W that generates vortices with respect to the flow of the fluid on the surface of the workpiece W. For example, the machining system SYS may form a structure for imparting hydrophobicity to the surface of the workpiece W on the workpiece W.

[0135] In the above description, the processing system SYS forms the riblet structure RB on the surface of the workpiece W. However, the processing system SYS may form any structure having an arbitrary shape on the surface of the workpiece W. As an example of an arbitrary structure, there is a structure that generates vortices with respect to the flow of fluid on the surface of the workpiece W. As another example of an arbitrary structure, there is a structure for imparting hydrophobicity to the surface of the workpiece W. As another example of an arbitrary structure, there is a fine texture structure on the order of micro-nanometers formed regularly or irregularly (typically, a concavo-convex structure including a mountain structure and a groove structure). The fine texture structure may include at least one of a sharkskin structure and a dimple structure having a function of reducing resistance by a fluid (gas and / or liquid). The fine texture structure may include a lotus leaf surface structure having at least one of a liquid repellent function and a self-cleaning function (for example, having a lotus effect). The fine texture structure includes a fine protrusion structure having a liquid transport function (see U.S. Patent Publication No. 2017 / 0044002), a concavo-convex structure having a lyophilic function, a concavo-convex structure having an antifouling function, a moth-eye structure having at least one of a reflectance reduction function and a liquid repellent function, a concavo-convex structure that exhibits a structural color by enhancing only light of a specific wavelength by interference, a pillar array structure having an adhesion function using van der Waals force, a concavo-convex structure having an aerodynamic noise reduction function, a honeycomb structure having a droplet collection function, and a concavo-convex structure that improves the adhesion to a layer formed on the surface, a concavo-convex structure for reducing frictional resistance, etc. may include at least one of them. Also in this case, the groove structure constituting the concavo-convex structure may have the same structure as the groove structure 9 constituting the riblet structure RB described above. The mountain structure constituting the concavo-convex structure may have the same structure as the mountain structure 8 constituting the riblet structure RB described above. Note that the fine texture structure may not have a specific function.

[0136] In the above description, the processing system SYS processes the workpiece W by irradiating the workpiece W with the processing light EL. However, the processing system SYS may irradiate the workpiece W with any energy beam different from light to process the workpiece W. In this case, the processing system SYS may include, in addition to or instead of the processing light source 2, a beam irradiation device capable of irradiating any energy beam. As an example of any energy beam, at least one of a charged particle beam and an electromagnetic wave can be given. As an example of a charged particle beam, at least one of an electron beam and an ion beam can be given.

[0137] (5) Supplementary note Regarding the embodiments described above, the following additional remarks are further disclosed. [Appendix 1] A blade member having a groove structure formed on its surface, The groove structure includes a plurality of first groove structures, a plurality of second groove structures, and a third groove structure, The plurality of first groove structures are formed to extend in a first direction, The plurality of second groove structures are formed to extend in a second direction different from the first direction, The third groove structure extends along a third direction different from the first and second directions, and is formed between one of the plurality of first groove structures and one of the plurality of second groove structures. Blade member. [Appendix 2] A first angle corresponding to the larger angle among the angles formed by a first axis extending along the first direction and a third axis extending along the third direction, and a second angle corresponding to the larger angle among the angles formed by a second axis extending along the second direction and the third axis, each of which is larger than a third angle corresponding to the larger angle among the angles formed by the first axis and the second axis. The blade member according to Appendix 1. [Appendix 3] The sum of the first angle and the second angle is an angle obtained by adding 180° to the third angle. The blade member according to Appendix 2. [Appendix 4] A plurality of the third groove structures are formed, and at least two of the plurality of the third groove structures extend along the third direction The blade member according to any one of Appendices 1 to 3. [Appendix 5] The plurality of the first groove structures are parallel to each other, and the plurality of the second groove structures are parallel to each other The blade member according to any one of Appendices 1 to 4. [Appendix 6] The arrangement pitch of the plurality of the third groove structures is constant regardless of the position in the third direction The blade member according to Appendix 4. [Appendix 7] A plurality of the third groove structures are formed, and at least one of the plurality of the third groove structures extends along the third direction, and at least one of the other of the plurality of the third groove structures extends along a fourth direction different from the third direction The blade member according to any one of Appendices 1 to 3. [Appendix 8] The arrangement pitch of the plurality of the first groove structures is different from the arrangement pitch of the plurality of the second groove structures The blade member according to any one of Appendices 1 to 7. [Appendix 9] A plurality of the third groove structures are formed, and the arrangement pitch of two of the plurality of the first groove structures connected to at least two of the plurality of the third groove structures is different from the arrangement pitch of two of the plurality of the second groove structures connected to at least two of the plurality of the third groove structures. The blade member according to any one of Appendices 1 to 3 and 7 to 8. [Appendix 10] The arrangement pitch of the plurality of the third groove structures varies according to the position The blade member according to Appendix 7 or 9. [Appendix 11] At least one structure among a protrusion shape, a convex shape, and a mountain shape is included between two adjacent ones of the plurality of first groove structures, the plurality of second groove structures, and the third groove structure. The blade member according to any one of Appendices 1 to 10. [Appendix 12] A blade member having a groove structure formed on its surface, The groove structure includes a plurality of first groove structures, a plurality of second groove structures, and a third groove structure. The plurality of first groove structures have a first waveform extending in a first direction and are formed so as to be arranged at a first array pitch along a direction intersecting the first direction. The plurality of second groove structures have a second waveform extending in a second direction and are formed so as to be arranged at a second array pitch different from the first array pitch along a direction intersecting the second direction. The third groove structure has a third waveform extending in a third direction and is formed between one of the plurality of first groove structures and one of the plurality of second groove structures. Blade member. [Appendix 13] At the boundary between the one first groove structure and the third groove structure, the one first groove structure and the third groove structure are connected so that the tangent direction of the one first groove structure and the tangent direction of the third groove structure are aligned. At the boundary between the one second groove structure and the third groove structure, the one second groove structure and the third groove structure are connected so that the tangent direction of the one second groove structure and the tangent direction of the third groove structure are aligned. The blade member according to Appendix 12. [Appendix 14] A plurality of the third groove structures are formed. At least one of the plurality of third groove structures extends along the third direction. At least another one of the plurality of third groove structures extends along a fourth direction different from the third direction. The blade member according to Appendix 12 or 13. [Appendix 15] The amplitude period of the third wavy shape changes according to the position in the third direction. The blade member according to any one of Appendices 12 to 14. [Appendix 16] The amplitude period of the third wavy shape is fixed regardless of the position in the third direction. The blade member according to any one of Appendices 12 to 15. [Appendix 17] The third groove structure extends along a direction intersecting the first and second directions. The blade member according to any one of Appendices 12 to 16. [Appendix 18] The third groove structure extends along a direction parallel to the first and second directions. The blade member according to any one of Appendices 12 to 17. [Appendix 19] The amplitude of the third wavy shape changes according to the position in the third direction. The blade member according to any one of Appendices 12 to 18. [Appendix 20] The amplitude of the third wavy shape is fixed regardless of the position in the third direction. The blade member according to any one of Appendices 12 to 19. [Appendix 21] A blade member having a groove structure formed on its surface, a first region in which a groove structure extending in a first direction is formed, a second region in which the groove structure is not formed, and a third region located between the first region and the second region and having a groove structure formed therein that is connected to the groove structure of the first region and comprising the depth of the groove structure formed in the third region becomes shallower as it approaches the second region from the first region Blade member. [Appendix 22] The depth of the groove structure formed in the third region becomes continuously shallower as the groove structure approaches the second region from the first region along the first direction. The blade member described in Supplementary Note 21. [Supplementary Note 23] The depth of the groove structure formed in the third region gradually becomes shallower as the groove structure approaches the second region from the first region along the first direction. The blade member described in Supplementary Note 21 or 22. [Supplementary Note 24] The depth of the groove structure at the end of the first region is the same as the depth of the groove structure at the end of the third region connected to the end of the first region. The blade member described in any one of Supplementary Notes 21 to 23. [Supplementary Note 25] The height of the end of the third region connected to the second region is the same as the height of the end of the second region connected to the third region. The blade member described in any one of Supplementary Notes 21 to 24. [Supplementary Note 26] In the first region, the groove structure is formed including two grooves arranged along a second direction intersecting the first direction so as to form at least one of a protrusion shape, a convex shape, and a mountain shape. The blade member described in any one of Supplementary Notes 21 to 25. [Supplementary Note 27] In at least a part of the third region, the groove structure is formed including two grooves arranged along a second direction intersecting the first direction so as to form at least one of a protrusion shape, a convex shape, and a mountain shape. The blade member described in any one of Supplementary Notes 21 to 26. [Supplementary Note 28] The depth of the groove represents the position of the bottom of the groove with respect to the apex of at least one of a protrusion shape, a convex shape, and a mountain shape. The blade member described in Supplementary Note 26 or 27. [Supplementary Note 29] A structural member having a groove structure formed on its surface, The groove structure includes a plurality of first groove structures, a plurality of second groove structures, and a third groove structure. The plurality of first groove structures are formed to extend in the first direction. The plurality of second groove structures are formed to extend in a second direction. The third groove structure extends along a third direction and is formed between one of the plurality of first groove structures and one of the plurality of second groove structures. Structural member. [Appendix 30] A first angle corresponding to the larger of the angles formed by a first axis extending along the first direction and a third axis extending along the third direction, and a second angle corresponding to the larger of the angles formed by a second axis extending along the second direction and the third axis are each larger than a third angle corresponding to the larger of the angles formed by the first axis and the second axis. The structural member according to Appendix 29. [Appendix 31] The third direction is a direction different from the first and second directions. The structural member according to Appendix 29. [Appendix 32] A plurality of the third groove structures are formed. At least two of the plurality of third groove structures extend along the third direction. The structural member according to any one of Appendices 29 to 31. [Appendix 33] A plurality of the third groove structures are formed. The directions in which at least two of the plurality of third groove structures extend are parallel to each other. The structural member according to any one of Appendices 29 to 32. [Appendix 34] The arrangement pitch of the plurality of third groove structures is constant regardless of the position in the direction in which the plurality of third groove structures extend. The structural member according to any one of Appendices 29 to 33. [Appendix 35] A plurality of the third groove structures are formed. At least one of the plurality of third groove structures extends along the third direction. At least one of the plurality of third groove structures extends along a fourth direction intersecting the third direction. The structural member according to any one of Appendices 29 to 34. [Appendix 36] A plurality of the third groove structures are formed. The directions in which at least two of the plurality of third groove structures extend are non-parallel to each other. The structural member according to any one of Appendices 29 to 35. [Appendix 37] The array pitch of two of the plurality of first groove structures connected to at least two of the plurality of third groove structures is different from the array pitch of two of the plurality of second groove structures connected to at least two of the plurality of third groove structures. The structural member according to Appendix 36. [Appendix 38] A plurality of the third groove structures are formed. The array pitch of the plurality of third groove structures changes according to the position in the direction in which the plurality of third groove structures extend. The structural member according to any one of Appendices 29 to 37. [Appendix 39] Between two adjacent ones of the plurality of first groove structures, the plurality of second groove structures, and the third groove structures, at least one structure of a protrusion shape, a convex shape, and a mountain shape is included. The structural member according to any one of Appendices 29 to 38. [Appendix 40] The first direction is different from the second direction. The structural member according to any one of Appendices 29 to 39. [Appendix 41] The first direction is the same as the second direction. The structural member according to any one of Appendices 29 to 40. [Appendix 42] The array pitch of the first groove structure is different from the array pitch of the second groove structure. The structural member according to any one of Appendices 29 to 41. [Appendix 43] The array pitch of the first groove structure is the same as the array pitch of the second groove structure. The structural member according to any one of Appendices 29 to 42. [Appendix 44] The first direction is the direction in which the streamline extends in the first region of the surface where the plurality of first groove structures are formed. The second direction is the direction in which the streamline extends in the second region of the surface where the plurality of second groove structures are formed. The structural member according to any one of Appendices 29 to 43. [Appendix 45] Between any two adjacent ones of the plurality of first groove structures, the plurality of second groove structures, and the third groove structure, at least one structure of a protrusion shape, a convex shape, and a mountain shape is included. The structural member according to any one of Appendices 29 to 44. [Appendix 46] A structural member having a groove structure formed on a surface, The groove structure includes a plurality of first groove structures, a plurality of second groove structures, and a third groove structure. The plurality of first groove structures are of a first waveform extending in a first direction and are formed so as to be arranged at a first array pitch along a direction intersecting the first direction. The plurality of second groove structures are of a second waveform extending in a second direction and are formed so as to be arranged at a second array pitch along a direction intersecting the second direction. The third groove structure is of a third waveform extending in a third direction and is formed between one of the plurality of first groove structures and one of the plurality of second groove structures. Structural member. [Appendix 47] A structural member having a groove structure formed on a surface, The groove structure includes a plurality of first groove structures extending in a first direction and arranged at a first array pitch along a direction intersecting the first direction, a plurality of second groove structures extending in a second direction and arranged at a second array pitch along a direction intersecting the second direction, and a third groove structure extending along a third direction. The first groove structure intersects a first axis along the first direction at first to third positions, a fourth position between the first position and the second position of the first groove structure is located on a fourth direction side of the first axis, and a fifth position between the second position and the third position of the first groove structure is located on a fifth direction side opposite to the fourth direction with respect to the first axis. The second groove structure intersects a second axis along the second direction at sixth to eighth positions, a ninth position between the sixth position and the seventh position of the second groove structure is located on a sixth direction side of the second axis, and a tenth position between the seventh position and the eighth position of the second groove structure is located on a seventh direction side opposite to the sixth direction with respect to the second axis. The third groove structure intersects a third axis along the third direction at eleventh to thirteenth positions, a fourteenth position between the eleventh position and the twelfth position of the third groove structure is located on an eighth direction side of the third axis, and a fifteenth position between the twelfth position and the thirteenth position of the third groove structure is located on a ninth direction side opposite to the eighth direction with respect to the third axis. The third groove structure is formed between one of the plurality of first groove structures and one of the plurality of second groove structures. Structural member. [Appendix 48] At the boundary between the one first groove structure and the third groove structure, the one first groove structure and the third groove structure are smoothly connected. At the boundary between the one second groove structure and the third groove structure, the one second groove structure and the third groove structure are smoothly connected. The structural member according to Appendix 46 or 47. [Appendix 49] At the boundary between the one first groove structure and the third groove structure, the one first groove structure and the third groove structure are connected such that a tangential direction of the one first groove structure and a tangential direction of the third groove structure are aligned. At the boundary between the one second groove structure and the third groove structure, the one second groove structure and the third groove structure are connected such that a tangential direction of the one second groove structure and a tangential direction of the third groove structure are aligned. The structural member according to any one of Supplementary Notes 46 to 48. [Supplementary Note 50] A structural member having a groove structure formed on its surface, wherein the groove structure includes a plurality of first groove structures, a plurality of second groove structures, and a third groove structure, the plurality of first groove structures are in a first wave shape extending in a first direction and are formed to be arranged at a first array pitch along a direction intersecting the first direction, the plurality of second groove structures extend in a second direction and are formed to be arranged at a second array pitch along a direction intersecting the second direction, the third groove structure is in a third wave shape extending in a third direction and is formed between one of the plurality of first groove structures and one of the plurality of second groove structures. Structural member. [Supplementary Note 51] A structural member having a groove structure formed on its surface, wherein the groove structure includes a plurality of first groove structures extending in a first direction and arranged at a first array pitch along a direction intersecting the first direction, a plurality of second groove structures extending in a second direction and arranged at a second array pitch along a direction intersecting the second direction, and a third groove structure extending along a third direction, the first groove structure intersects a first axis along the first direction at first to third positions, a fourth position between the first position and the second position of the first groove structure is located on a fourth direction side of the first axis, and a fifth position between the second position and the third position of the first groove structure is located on a fifth direction side opposite to the fourth direction with respect to the first axis, the third groove structure intersects a second axis along the third direction at sixth to eighth positions, a ninth position between the sixth position and the seventh position of the third groove structure is located on a sixth direction side of the second axis, and a tenth position between the seventh position and the eighth position of the third groove structure is located on a seventh direction side opposite to the sixth direction with respect to the second axis, the third groove structure is formed between one of the plurality of first groove structures and one of the plurality of second groove structures. Structural member. [Appendix 52] At the boundary between the one second groove structure and the third groove structure, the end of the one second groove structure and the end of the third groove structure are located at the same position along a direction intersecting the second direction. The structural member according to Appendix 50 or 51. [Appendix 53] The one second groove structure extends linearly along the second direction. The structural member according to any one of Appendices 50 to 52. [Appendix 54] The amplitude of the third wave shape decreases as the third groove structure approaches the boundary between the one second groove structure and the third groove structure. The structural member according to any one of Appendices 50 to 53. [Appendix 55] At the boundary between the one first groove structure and the third groove structure, the one first groove structure and the third groove structure are connected such that the tangential directions of the one first groove structure and the third groove structure are aligned. At the boundary between the one second groove structure and the third groove structure, the one second groove structure and the third groove structure are connected such that the tangential directions of the one second groove structure and the third groove structure are aligned. The structural member according to Appendix 54. [Appendix 56] The amplitude period of the third wave shape changes according to the position in the third direction. The structural member according to any one of Appendices 46 to 49. [Appendix 57] The amplitude period of the third wave shape is fixed regardless of the position in the third direction. The structural member according to any one of Appendices 46 to 56. [Appendix 58] The amplitude of the third wave shape changes according to the position in the third direction. The structural member according to any one of Appendices 46 to 57. [Appendix 59] The amplitude of the third wave shape is fixed regardless of the position in the third direction. The structural member according to any one of Supplementary Notes 46 to 49. [Supplementary Note 60] The third groove structure extends along a direction intersecting the first and second directions. The structural member according to any one of Supplementary Notes 46 to 59. [Supplementary Note 61] The third groove structure extends along a direction parallel to the first and second directions. The structural member according to any one of Supplementary Notes 46 to 60. [Supplementary Note 62] A structural member having a groove structure formed on its surface, The groove structure includes a plurality of third groove structures, One of the plurality of third groove structures has a third wave shape extending in a third direction, Another one of the plurality of third groove structures has a fourth wave shape extending in a fourth direction different from the third direction, The arrangement pitch of the plurality of third groove structures varies according to the position. Structural member. [Supplementary Note 63] A structural member having a groove structure formed on its surface, The groove structure includes a plurality of first groove structures and a plurality of third groove structures, The plurality of first groove structures have a first wave shape extending in a first direction and are formed to be arranged at a first arrangement pitch along a direction intersecting the first direction, The plurality of third groove structures include one third groove structure having a third wave shape extending in a third direction and another third groove structure having a fourth wave shape extending in a fourth direction different from the third direction, and are formed to be respectively connected to the plurality of first groove structures. Structural member. [Supplementary Note 64] A structural member having a groove structure formed on its surface, A first region in which a groove structure extending in a first direction is formed, A second region in which the groove structure is not formed, A third region located between the first region and the second region and having a groove structure formed that is connected to the groove structure of the first region comprising The depth of the groove structure formed in the third region becomes shallower as it approaches the second region from the first region structural member. [Appendix 65] The depth of the groove structure formed in the third region continuously becomes shallower as the groove structure approaches the second region from the first region along the first direction The structural member according to Appendix 64. [Appendix 66] The depth of the groove structure formed in the third region becomes shallower stepwise as the groove structure approaches the second region from the first region along the first direction The structural member according to Appendix 64 or 65. [Appendix 67] The depth of the groove structure at the end of the first region is the same as the depth of the groove structure at the end of the third region connected to the end of the first region The structural member according to any one of Appendices 64 to 66. [Appendix 68] The height of the end of the third region connected to the second region is the same as the height of the end of the second region connected to the third region The structural member according to any one of Appendices 64 to 67. [Appendix 69] In the first region, the groove structure including two grooves arranged along a second direction intersecting the first direction is formed so as to form at least one of a protrusion shape, a convex shape, and a mountain shape The structural member according to any one of Appendices 64 to 68. [Appendix 70] In at least a part of the third region, the groove structure including two grooves arranged along a second direction intersecting the first direction is formed so as to form at least one of a protrusion shape, a convex shape, and a mountain shape The structural member according to any one of Appendices 64 to 69. [Appendix 71] The depth of the groove represents the position of the bottom of the groove with respect to the apex of at least one of a protrusion shape, a convex shape, and a mountain shape The structural member described in Supplementary Note 69 or 70. [Supplementary Note 72] The structural member includes at least one of a blade member that is part of a rotating body, a housing of a moving body, and a wing portion of a flying body. The structural member according to any one of Supplementary Notes 29 to 71. [Supplementary Note 73] A processing apparatus capable of processing an object by irradiating the object with an energy beam, and A control apparatus that controls the processing apparatus so as to form a groove structure on the surface of the object by processing the object. Comprising: The control apparatus controls the processing apparatus so as to form the groove structure including a plurality of first groove structures extending in a first direction, a plurality of second groove structures extending in a second direction different from the first direction, and a third groove structure extending along a third direction and formed between one of the plurality of first groove structures and one of the plurality of second groove structures. Processing system. [Supplementary Note 74] A processing apparatus capable of processing an object by irradiating the object with an energy beam, and A control apparatus that controls the processing apparatus so as to form a groove structure on the surface of the object by processing the object. Comprising: The control apparatus controls the processing apparatus so as to form the groove structure including a plurality of first groove structures that are first wave-shaped and extend in a first direction and are arranged at a first array pitch along a direction intersecting the first direction, a plurality of second groove structures that are second wave-shaped and extend in a second direction and are arranged at a second array pitch along a direction intersecting the second direction, and a third groove structure that is third wave-shaped and extends in a third direction and is formed between one of the plurality of first groove structures and one of the plurality of second groove structures. Processing system. [Supplementary Note 75] A processing apparatus capable of processing an object by irradiating the object with an energy beam, and A control device that controls the processing device so as to form a groove structure on the surface of the object by processing the object is provided, The control device controls the processing device to form the groove structure including a plurality of first groove structures extending in a first direction and arranged at a first array pitch along a direction intersecting the first direction, a plurality of second groove structures extending in a second direction and arranged at a second array pitch along a direction intersecting the second direction, and a third groove structure formed between one of the plurality of first groove structures and one of the plurality of second groove structures and extending along a third direction, The first groove structure intersects a first axis along the first direction at first to third positions, a fourth position between the first position and the second position of the first groove structure is located on a fourth direction side of the first axis, and a fifth position between the second position and the third position of the first groove structure is located on a fifth direction side opposite to the fourth direction with respect to the first axis, The second groove structure intersects a second axis along the second direction at sixth to eighth positions, a ninth position between the sixth position and the seventh position of the second groove structure is located on a sixth direction side of the second axis, and a tenth position between the seventh position and the eighth position of the second groove structure is located on a seventh direction side opposite to the sixth direction with respect to the second axis, The third groove structure intersects a third axis along the third direction at eleventh to thirteenth positions, a fourteenth position between the eleventh position and the twelfth position of the third groove structure is located on an eighth direction side of the third axis, and a fifteenth position between the twelfth position and the thirteenth position of the third groove structure is located on a ninth direction side opposite to the eighth direction with respect to the third axis Processing system. [Appendix 76] A processing device capable of processing an object by irradiating the object with an energy beam, A control device that controls the processing device so as to form a groove structure on the surface of the object by processing the object is provided, The control device has a first groove structure that extends in a first direction and has a first wave shape, and a plurality of first groove structures arranged at a first array pitch along a direction intersecting the first direction, Extend in the second direction, and a plurality of second groove structures arranged at a second array pitch along a direction intersecting the second direction, and a third groove structure that extends in a third direction and has a third wave shape, and is formed between one of the first groove structures among the plurality of first groove structures and one of the second groove structures among the plurality of second groove structures, and controls the processing device to form the groove structure having the same. Processing system. [Appendix 77] A processing device capable of processing an object by irradiating the object with an energy beam, and a control device that controls the processing device so as to form a groove structure on the surface of the object by processing the object. Comprising, the control device controls the processing device to form the groove structure including a plurality of first groove structures that extend in a first direction and are arranged at a first array pitch along a direction intersecting the first direction, a plurality of second groove structures that extend in a second direction and are arranged at a second array pitch along a direction intersecting the second direction, and a third groove structure that extends along a third direction and is formed between one of the first groove structures among the plurality of first groove structures and one of the second groove structures among the plurality of second groove structures, the first groove structure intersects a first axis along the first direction at first to third positions, a fourth position between the first position and the second position of the first groove structure is located on the fourth direction side of the first axis, and a fifth position between the second position and the third position of the first groove structure is located on the fifth direction side opposite to the fourth direction with respect to the first axis, the third groove structure intersects a second axis along the third direction at sixth to eighth positions, a ninth position between the sixth position and the seventh position of the third groove structure is located on the sixth direction side of the second axis, and a tenth position between the seventh position and the eighth position of the third groove structure is located on the seventh direction side opposite to the sixth direction with respect to the second axis. Processing system. [Appendix 78] A processing apparatus capable of processing the object by irradiating the object with an energy beam, and a control device for controlling the processing apparatus so as to form a groove structure on the surface of the object by processing the object. The processing system includes: The control device controls the processing apparatus to form the groove structure including a plurality of third groove structures, wherein one of the plurality of third groove structures has a third waveform extending in a third direction, and another one of the plurality of third groove structures has a fourth waveform extending in a fourth direction different from the third direction. The arrangement pitch of the plurality of third groove structures varies according to the position. A processing system. [Appendix 79] A processing apparatus capable of processing the object by irradiating the object with an energy beam, and a control device for controlling the processing apparatus so as to form a groove structure on the surface of the object by processing the object. The processing system includes: The control device includes a plurality of first groove structures having a first waveform extending in a first direction and arranged at a first arrangement pitch along a direction intersecting the first direction, one third groove structure having a third waveform extending in a third direction, and another third groove structure having a fourth waveform extending in a fourth direction different from the third direction, and controls the processing apparatus to form the groove structure including the plurality of third groove structures respectively connected to the plurality of first groove structures. A processing system. [Appendix 80] A processing apparatus capable of processing the object by irradiating the object with an energy beam, and a control device for controlling the processing apparatus so as to form a groove structure on the surface of the object by processing the object. The processing system includes: The control device controls the processing apparatus to form a groove structure extending in a first direction in a first region of the surface, and to form a groove structure connected to the groove structure in the first region in a third region of the surface located between the first region and a second region of the surface where the groove structure is not formed. The depth of the groove structure formed in the third region becomes shallower as it approaches the second region from the first region. Processing system. [Appendix 81] A processing method for processing an object by irradiating the object with an energy beam to form a groove structure on the surface of the object, wherein the groove structure includes a plurality of first groove structures, a plurality of second groove structures, and a third groove structure, forming the plurality of first groove structures extending in a first direction, forming the plurality of second groove structures extending in a second direction different from the first direction, forming the third groove structure extending along a third direction and formed between one of the plurality of first groove structures and one of the plurality of second groove structures, and a processing method including the above. [Appendix 82] A processing method for processing an object by irradiating the object with an energy beam to form a groove structure on the surface of the object, wherein the groove structure includes a plurality of first groove structures, a plurality of second groove structures, and a third groove structure, forming the plurality of first groove structures that are in a first wave shape extending in a first direction and arranged at a first array pitch along a direction intersecting the first direction, forming the plurality of second groove structures that are in a second wave shape extending in a second direction and arranged at a second array pitch along a direction intersecting the second direction, forming the third groove structure extending in a third direction and formed between one of the plurality of first groove structures and one of the plurality of second groove structures, and a processing method including the above. [Appendix 83] A processing method for processing an object by irradiating the object with an energy beam to form a groove structure on the surface of the object, wherein the groove structure includes a plurality of first groove structures, a plurality of second groove structures, and a third groove structure, Forming the plurality of first groove structures that extend in a first direction and are arranged at a first array pitch along a direction intersecting the first direction; Forming the plurality of second groove structures that extend in a second direction and are arranged at a second array pitch along a direction intersecting the second direction; Forming a third groove structure that extends along a third direction and is formed between one of the first groove structures among the plurality of first groove structures and one of the second groove structures among the plurality of second groove structures; comprising; The first groove structure intersects a first axis along the first direction at first to third positions, a fourth position between the first position and the second position of the first groove structure is located on a fourth direction side of the first axis, and a fifth position between the second position and the third position of the first groove structure is located on a fifth direction side opposite to the fourth direction with respect to the first axis; The second groove structure intersects a second axis along the second direction at sixth to eighth positions, a ninth position between the sixth position and the seventh position of the second groove structure is located on a sixth direction side of the second axis, and a tenth position between the seventh position and the eighth position of the second groove structure is located on a seventh direction side opposite to the sixth direction with respect to the second axis; The third groove structure intersects a third axis along the third direction at eleventh to thirteenth positions, a fourteenth position between the eleventh position and the twelfth position of the third groove structure is located on an eighth direction side of the third axis, and a fifteenth position between the twelfth position and the thirteenth position of the third groove structure is located on a ninth direction side opposite to the eighth direction with respect to the third axis. Processing method. [Appendix 84] A processing method for processing an object so as to form a groove structure on the surface of the object by irradiating the object with an energy beam, wherein the groove structure includes a plurality of first groove structures, a plurality of second groove structures, and a third groove structure; forming the plurality of first groove structures that have a first waveform extending in a first direction and are arranged at a first array pitch along a direction intersecting the first direction; forming the plurality of second groove structures that extend in a second direction and are arranged at a second array pitch along a direction intersecting the second direction; forming a third groove structure that is a third waveform extending in a third direction and is formed between one of the plurality of first groove structures and one of the plurality of second groove structures; A processing method including the above. [Appendix 85] A processing method for processing an object by irradiating the object with an energy beam to form a groove structure on the surface of the object, wherein the groove structure includes a plurality of first groove structures, a plurality of second groove structures, and a third groove structure; forming the plurality of first groove structures that extend in a first direction and are arranged at a first array pitch along a direction intersecting the first direction; forming the plurality of second groove structures that extend in a second direction and are arranged at a second array pitch along a direction intersecting the second direction; forming a third groove structure that extends along a third direction and is formed between one of the plurality of first groove structures and one of the plurality of second groove structures; including the above; the first groove structure intersects a first axis along the first direction at first to third positions, a fourth position between the first position and the second position of the first groove structure is located on a fourth direction side of the first axis, and a fifth position between the second position and the third position of the first groove structure is located on a fifth direction side opposite to the fourth direction with respect to the first axis; the third groove structure intersects a second axis along the third direction at sixth to eighth positions, a ninth position between the sixth position and the seventh position of the third groove structure is located on a sixth direction side of the second axis, and a tenth position between the seventh position and the eighth position of the third groove structure is located on a seventh direction side opposite to the sixth direction with respect to the second axis; A processing method. [Appendix 86] A processing method for processing an object by irradiating the object with an energy beam to form a groove structure on the surface of the object, The groove structure includes a plurality of third groove structures. One of the plurality of third groove structures is a third waveform extending in a third direction, and another one of the plurality of third groove structures is a fourth waveform extending in a fourth direction different from the third direction, and the plurality of third groove structures are formed such that the arrangement pitch of the plurality of third groove structures changes according to the position. Processing method. [Appendix 87] A processing method for processing an object by irradiating the object with an energy beam to form a groove structure on the surface of the object, The groove structure includes a plurality of first groove structures and a plurality of third groove structures. Forming the plurality of first groove structures that are a first waveform extending in a first direction and arranged at a first arrangement pitch along a direction intersecting the first direction. Forming the plurality of third groove structures including one third groove structure that is a third waveform extending in a third direction and another third groove structure that is a fourth waveform extending in a fourth direction different from the third direction, and each of the plurality of third groove structures is connected to one of the plurality of first groove structures. A processing method including the above. [Appendix 88] A processing method for processing an object by irradiating the object with an energy beam to form a groove structure on the surface of the object, Forming a groove structure extending in a first direction in a first region of the surface. Forming a groove structure connected to the groove structure in the first region in a third region of the surface located between the first region and a second region of the surface where the groove structure is not formed. Including the above, The depth of the groove structure formed in the third region becomes shallower as it approaches the second region from the first region. Processing method.

[0138] The requirements of each of the above-described embodiments can be combined as appropriate. Some of the requirements of each of the above-described embodiments may not be used. The requirements of each of the above-described embodiments can be replaced as appropriate with the requirements of other embodiments. Also, to the extent permitted by law, all of the published gazettes and U.S. patent disclosures regarding the devices and the like cited in each of the above-described embodiments are incorporated by reference and made part of the description herein.

[0139] Further, the present invention can be appropriately modified within a range not contrary to the gist or idea of the invention that can be read from the claims and the entire specification, and the blade member, structural member, processing system, and processing method involving such modifications are also included in the technical idea of the present invention.

Description of Reference Numerals

[0140] 1 Processing apparatus 3 Control apparatus 8 Ridge structure 9 Groove structure EL Processing light SYS Processing system W Workpiece BL Turbine blade RB Riblet structure RL Riblet line

Claims

1. A blade member having a groove structure formed on its surface, wherein the groove structure includes a plurality of first groove structures, a plurality of second groove structures, and a third groove structure, the plurality of first groove structures are formed to extend in a first direction, the plurality of second groove structures are formed to extend in a second direction different from the first direction, the third groove structure extends along a third direction different from the first and second directions, and is formed between one of the plurality of first groove structures and one of the plurality of second groove structures Blade member.

2. A first angle corresponding to the larger of the angles formed by a first axis extending along the first direction and a third axis extending along the third direction, and a second angle corresponding to the larger of the angles formed by a second axis extending along the second direction and the third axis, are each larger than a third angle corresponding to the larger of the angles formed by the first axis and the second axis The blade member according to claim 1.

3. The sum of the first angle and the second angle is equal to the angle obtained by adding 180° to the third angle The blade member according to claim 2.

4. A plurality of the third groove structures are formed, at least two of the plurality of third groove structures extend along the third direction The blade member according to any one of claims 1 to 3.

5. The plurality of first groove structures are parallel to each other, The plurality of second groove structures are parallel to each other The blade member according to any one of claims 1 to 4.

6. The arrangement pitch of the plurality of third groove structures is constant regardless of the position in the third direction The blade member according to claim 4.

7. A plurality of the third groove structures are formed, at least one of the plurality of third groove structures extends along the third direction, at least one other of the plurality of third groove structures extends along a fourth direction different from the third direction The blade member according to any one of claims 1 to 3.

8. The arrangement pitch of the plurality of first groove structures is different from the arrangement pitch of the plurality of second groove structures The blade member according to any one of claims 1 to 7.

9. A plurality of the third groove structures are formed, Of the plurality of first groove structures connected to at least two of the plurality of third groove structures, the array pitch of two of them, and the array pitch of two of the plurality of second groove structures connected to at least two of the plurality of third groove structures are different. The blade member according to any one of claims 1 to 3 and 7 to 8.

10. The array pitch of the plurality of third groove structures varies according to the position. The blade member according to claim 7 or 9.

11. Between two adjacent ones of the plurality of first groove structures, the plurality of second groove structures, and the third groove structure, at least one structure of a protrusion shape, a convex shape, and a mountain shape is included. The blade member according to any one of claims 1 to 10.

12. A blade member having a groove structure formed on the surface, The groove structure includes a plurality of first groove structures, a plurality of second groove structures, and a third groove structure. The plurality of first groove structures are in a first wave shape extending in a first direction and are formed to be arranged at a first array pitch along a direction intersecting the first direction. The plurality of second groove structures are in a second wave shape extending in a second direction and are formed to be arranged at a second array pitch different from the first array pitch along a direction intersecting the second direction. The third groove structure is in a third wave shape extending in a third direction and is formed between one of the plurality of first groove structures and one of the plurality of second groove structures. Blade member.

13. At the boundary between the one first groove structure and the third groove structure, the one first groove structure and the third groove structure are connected so that the tangent directions of the one first groove structure and the third groove structure are aligned. At the boundary between the one second groove structure and the third groove structure, the one second groove structure and the third groove structure are connected so that the tangent directions of the one second groove structure and the third groove structure are aligned. The blade member according to claim 12.

14. A plurality of the third groove structures are formed. At least one of the plurality of third groove structures extends along the third direction. At least one other of the plurality of third groove structures extends along a fourth direction different from the third direction. The blade member according to claim 12 or 13.

15. The amplitude period of the third wave shape varies according to the position in the third direction. The blade member according to any one of claims 12 to 14.

16. The amplitude period of the third wavy shape is fixed regardless of the position in the third direction. The blade member according to any one of claims 12 to 15. **Claim 17** The third groove structure extends along a direction intersecting the first and second directions. The blade member according to any one of claims 12 to 16. **Claim 18** The third groove structure extends along a direction parallel to the first and second directions. The blade member according to any one of claims 12 to 17. **Claim 19** The amplitude of the third wavy shape changes according to the position in the third direction. The blade member according to any one of claims 12 to 18. **Claim 20** The amplitude of the third wavy shape is fixed regardless of the position in the third direction. The blade member according to any one of claims 12 to 19. **Claim 21** A blade member having a groove structure formed on its surface, a first region in which a groove structure extending in a first direction is formed, a second region in which the groove structure is not formed, and a third region located between the first region and the second region and having a groove structure connected to the groove structure of the first region and comprising: The depth of the groove structure formed in the third region becomes shallower as it approaches the second region from the first region. Blade member. **Claim 22** The depth of the groove structure formed in the third region continuously becomes shallower as the groove structure approaches the second region from the first region along the first direction. The blade member according to claim 21. **Claim 23** The depth of the groove structure formed in the third region becomes shallower stepwise as the groove structure approaches the second region from the first region along the first direction. The blade member according to claim 21 or 22. **Claim 24** The depth of the groove structure at the end of the first region is the same as the depth of the groove structure at the end of the third region connected to the end of the first region. The blade member according to any one of claims 21 to 23. **Claim 25** The height of the end of the third region connected to the second region is the same as the height of the end of the second region connected to the third region. The blade member according to any one of claims 21 to 24. **Claim 26** In the first region, the groove structure includes two grooves arranged along a second direction intersecting the first direction so as to form at least one of a protrusion shape, a convex shape, and a mountain shape. The blade member according to any one of claims 21 to 25.

27. In at least a part of the third region, the groove structure including two grooves arranged along a second direction intersecting the first direction is formed so as to form at least one of a protrusion shape, a convex shape, and a mountain shape. The blade member according to any one of claims 21 to 26.

28. The depth of the groove represents the position of the bottom of the groove with respect to the apex of at least one of a protrusion shape, a convex shape, and a mountain shape. The blade member according to claim 26 or 27.

29. A structural member having a groove structure formed on a surface, The groove structure includes a plurality of first groove structures, a plurality of second groove structures, and a third groove structure, The plurality of first groove structures are formed to extend in a first direction, The plurality of second groove structures are formed to extend in a second direction, The third groove structure extends along a third direction and is formed between one of the plurality of first groove structures and one of the plurality of second groove structures. Structural member.

30. A plurality of the third groove structures are formed, The directions in which at least two of the plurality of third groove structures extend are parallel to each other. The structural member according to claim 29.

31. The first direction is the same as the second direction. The structural member according to claim 29 or 30.

32. The arrangement pitch of the first groove structure is the same as the arrangement pitch of the second groove structure. The structural member according to any one of claims 29 to 31.

33. The first direction is the direction in which the streamline extends in the first region of the surface where the plurality of first groove structures are formed, The second direction is the direction in which the streamline extends in the second region of the surface where the plurality of second groove structures are formed. The structural member according to any one of claims 29 to 32.

34. Between two adjacent ones of the plurality of first groove structures, the plurality of second groove structures, and the third groove structure, at least one structure of a protrusion shape, a convex shape, and a mountain shape is included. The structural member according to any one of claims 29 to 33.

35. A structural member having a groove structure formed on a surface, The groove structure includes a plurality of first groove structures, a plurality of second groove structures, and a third groove structure, The plurality of first groove structures are a first wave shape extending in a first direction and are formed to be arranged at a first arrangement pitch along a direction intersecting the first direction. The plurality of second groove structures are in a second waveform extending in a second direction, and are formed so as to be arranged at a second array pitch along a direction intersecting the second direction. The third groove structure is in a third waveform extending in a third direction, and is formed between one of the plurality of first groove structures and one of the plurality of second groove structures. Structural member.

36. A structural member having a groove structure formed on a surface, wherein the groove structure includes a plurality of first groove structures, a plurality of second groove structures, and a third groove structure, the plurality of first groove structures are in a first waveform extending in a first direction, and are formed so as to be arranged at a first array pitch along a direction intersecting the first direction, the plurality of second groove structures extend in a second direction, and are formed so as to be arranged at a second array pitch along a direction intersecting the second direction, the third groove structure is in a third waveform extending in a third direction, and is formed between one of the plurality of first groove structures and one of the plurality of second groove structures. Structural member.

37. At the boundary between the one second groove structure and the third groove structure, an end portion of the one second groove structure and an end portion of the third groove structure are located at the same position along a direction intersecting the second direction. The structural member according to claim 36.

38. The one second groove structure extends linearly along the second direction. The structural member according to claim 36 or 37.

39. The amplitude of the third waveform decreases as the third groove structure approaches the boundary between the one second groove structure and the third groove structure. The structural member according to any one of claims 36 to 38.

40. At the boundary between the one first groove structure and the third groove structure, the one first groove structure and the third groove structure are connected such that a tangential direction of the one first groove structure and a tangential direction of the third groove structure are aligned. At the boundary between the one second groove structure and the third groove structure, the one second groove structure and the third groove structure are connected such that a tangential direction of the one second groove structure and a tangential direction of the third groove structure are aligned. The structural member according to claim 39.

41. The amplitude period of the third waveform changes according to the position in the third direction. The structural member according to claim 35.

42. The amplitude period of the third waveform is fixed regardless of the position in the third direction. The structural member according to any one of claims 35 to 41.

43. The amplitude of the third wavy shape changes according to the position in the third direction. The structural member according to any one of claims 35 to 42.

44. The amplitude of the third wavy shape is fixed regardless of the position in the third direction. The structural member according to claim 35.

45. The third groove structure extends along a direction intersecting the first and second directions. The structural member according to any one of claims 35 to 44.

46. The third groove structure extends along a direction parallel to the first and second directions. The structural member according to any one of claims 35 to 45.

47. A structural member having a groove structure formed on its surface, a first region in which a groove structure extending in a first direction is formed, a second region in which the groove structure is not formed, and a third region located between the first region and the second region and having a groove structure connected to the groove structure of the first region are provided, wherein the depth of the groove structure formed in the third region becomes shallower as it approaches the second region from the first region. Structural member.

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