Gas-liquid separation pipe

Abstract

To provide a gas-liquid separation pipe capable of reducing gas remaining.SOLUTION: A gas-liquid separation pipe 1 separates gas present in a chemical solution 3 from the chemical solution 3, the gas-liquid separation pipe comprising at least: a flow path 11 having one end 111 and the other end 112, which connects the one end 111 and the other end 112 in a horizontal direction 5, and through which the chemical solution 3 flows; a liquid inlet 12 formed on the one end 111 side, into which the chemical solution 3 flows; a liquid outlet 13 formed between the one end 111 and the other end 112; and an outflow pipe 20 inserted into the liquid outlet 13, which discharges the chemical solution 3 in the flow path 11 to outside, wherein the flow path 11 is inclined upward from the one end 111 toward the other end 112.SELECTED DRAWING: Figure 2

Description

[Technical Field]

[0001] The present invention relates to a gas-liquid separation pipe. [Background technology]

[0002] Silicon wafers, which have multiple devices such as ICs (Integrated Circuits) and LSIs (Large Scale Integration) formed on their surface, have their back surfaces ground to a specified thickness, and then are cut into individual devices using a cutting machine for use in electrical equipment such as mobile phones and personal computers.

[0003] A typical method for dividing the silicon wafer into individual devices is to attach an electroplated grinding wheel, such as a hub blade that is electrodeposited on a base by plating, to a cutting device, and perform cutting while supplying cutting water to the surfaces of the hub blade and the silicon wafer to divide the wafer into individual devices (see, for example, Patent Document 1).

[0004] The cutting water is supplied for the purposes of cooling the processing point between the silicon wafer and the hub blade during cutting and removing cutting chips generated during cutting.

[0005] However, even if cutting water is supplied, cutting debris cannot be completely removed, and there is a problem that cutting debris adheres to and remains on the wafer surface.

[0006] Therefore, in order to prevent cutting debris from adhering and remaining on the wafer surface, the applicant has developed a chemical solution for dicing cutting water, which contains a chemical solution (surfactant) prepared to a predetermined concentration in the cutting water, and a processing method using the same, and these have been put into practical use (see, for example, Patent Document 2).

[0007] Furthermore, the present applicant has disclosed a chemical solution supplying device that adds a chemical prepared to a predetermined concentration to cutting water (see, for example, Patent Document 3).

[0008] The invention described in Patent Document 3 above is arranged in a cutting fluid supply passage through which cutting water flows, and a predetermined amount of chemical liquid prepared to a predetermined concentration and contained in a tank is supplied to the cutting fluid supply passage by a pump (diaphragm pump).

[0009] If gas (air bubbles) remain in the chemical solution supplied to the pump, a phenomenon known as air lock occurs, making it impossible to supply the specified concentration of chemical solution to the cutting water.

[0010] Therefore, a gas-liquid separation pipe is usually provided to remove gas remaining in the chemical liquid before the chemical liquid is supplied to the pump. [Prior art documents] [Patent documents]

[0011] [Patent Document 1] Japanese Patent Application Publication No. 10-242083 [Patent Document 2] Patent No. 5253765 [Patent Document 3] Japanese Patent Application Laid-Open No. 2016-165771 Summary of the Invention [Problem to be solved by the invention]

[0012] However, conventional gas-liquid separation piping has the problem that air bubbles remain near the suction port of the gas-liquid separation piping, which makes it impossible to reliably separate the gas and liquid, and the fluid containing the remaining air bubbles is supplied to the pump, causing an air lock in the pump.

[0013] An object of the present invention is to provide a gas-liquid separation pipe that can suppress residual gas. [Means for solving the problem]

[0014] In order to solve the above-mentioned problems and achieve the object, the gas-liquid separation pipe of the present invention is a gas-liquid separation pipe that separates gas present in a liquid from the liquid, and is characterized in that it has one end and the other end, and is equipped with at least a flow path through which the liquid flows that horizontally connects the one end and the other end, a liquid inlet formed on the one end side through which the liquid flows, a liquid outlet formed between the one end and the other end, and an outlet pipe that is inserted into the liquid outlet and through which the liquid in the flow path flows to the outside, and the flow path is inclined upward from the one end to the other end.

[0015] In the gas-liquid separation pipe, the inclination of the flow path may be such that the internal angle between the horizontal direction and the central axis of the flow path is greater than 0° and less than 45°.

[0016] In the gas-liquid separation pipe, the tip of the outflow pipe may be positioned below the center of the flow path.

[0017] The gas-liquid separation pipe may further include a gas outlet port at the other end thereof for discharging the separated gas.

[0018] The gas-liquid separation pipe may further include a liquid outlet at the one end thereof for discharging the liquid in the flow path. [Effects of the Invention]

[0019] The present invention has an effect of suppressing residual gas. [Brief explanation of the drawings]

[0020] [Figure 1] FIG. 1 is a plan view showing an example of the configuration of the gas-liquid separation pipe according to the first embodiment. [Figure 2] FIG. 2 is a cross-sectional view taken along line II-II in FIG. [Figure 3] FIG. 3 is an exploded cross-sectional view of the gas-liquid separation pipe shown in FIG. DETAILED DESCRIPTION OF THE INVENTION

[0021] Modes (embodiments) for carrying out the present invention will be described in detail with reference to the drawings. The present invention is not limited to the contents described in the following embodiments. Furthermore, the components described below include those that can be easily imagined by a person skilled in the art and those that are substantially the same. Furthermore, the configurations described below can be combined as appropriate. Furthermore, various omissions, substitutions, or modifications of the configuration can be made within the scope of the gist of the present invention.

[0022] [Embodiment 1] A gas-liquid separation pipe according to a first embodiment of the present invention will be described with reference to the drawings. Fig. 1 is a plan view showing an example of the configuration of the gas-liquid separation pipe according to the first embodiment. Fig. 2 is a cross-sectional view taken along line II-II in Fig. 1. Fig. 3 is an exploded cross-sectional view showing the gas-liquid separation pipe shown in Fig. 2.

[0023] (Gas-liquid separation piping) The gas-liquid separation pipe 1 according to the first embodiment is provided in, for example, a chemical liquid supply system disposed in a fluid supply path that supplies a processing liquid (tap water, pure water, or the like) to a processing device 2. The chemical liquid supply system adds a predetermined chemical liquid to the processing liquid and supplies the processing liquid with the added chemical liquid to the processing device 2. The processing device 2 is, for example, a cutting device, a grinding device, or other processing device that processes a workpiece such as a semiconductor wafer. The chemical liquid is, for example, an additive, a surfactant, or carbon dioxide as described in Japanese Patent No. 5253765.

[0024] The gas-liquid separation pipe 1 supplies a chemical liquid 3 (corresponding to a fluid) supplied from a liquid supply source 4, which is, for example, a chemical liquid tank, to a fluid supply path, and separates gas present in the chemical liquid 3 from the chemical liquid 3. As shown in FIGS. 1, 2 and 3, the gas-liquid separation pipe 1 includes a separation pipe main body 10, an outflow pipe 20, and a fixing nut 30.

[0025] Separation pipe main body 10 is formed in a rod shape with its longitudinal direction arranged parallel to horizontal direction 5 (shown by a dashed line in FIGS. 2 and 3), and is provided with a flow path 11 inside through which chemical solution 3 supplied from liquid supply source 4 flows. Flow path 11 has one end 111 and the other end 112, extends linearly along separation pipe main body 10, and connects one end 111 and the other end 112 along horizontal direction 5. Flow path 11 is formed so that its cross-sectional area is constant from one end 111 to the other end 112.

[0026] Furthermore, the flow channel 11 is inclined with respect to the horizontal direction 5 so that the central axis 113 (shown by a two-dot chain line in FIGS. 2 and 3) gradually points upward from one end 111 to the other end 112. That is, the flow channel 11 is inclined upward from one end 111 to the other end 112. The central axis 113 is a straight line formed by connecting the centers of the vertical cross sections of the flow channel 11, and passes through the center of the flow channel 11 from one end 111 to the other end 112 of the flow channel 11.

[0027] In the first embodiment, the inclination of the flow path 11 is such that an interior angle 114 between the horizontal direction 5, which is the extension direction of the flow path 11, and the central axis 113 of the flow path 11 is an angle that is greater than 0° and smaller than 45°. The interior angle 114 is greater than 0° and smaller than 45° because, if the interior angle 114 is 0° or less, the gas in the chemical liquid 3 cannot be discharged from the gas discharge port 14, which will be described later, and the gas cannot be separated from the chemical liquid 3; and, if the interior angle 114 is 45° or more, there is a high possibility that the gas in the chemical liquid 3 will be supplied to the processing device 2 together with the chemical liquid 3, and the gas cannot be separated from the chemical liquid 3.

[0028] Separation piping main body 10 also includes liquid inlet 12 formed on one end 111, liquid outlet 13 formed between one end 111 and the other end 112, gas outlet 14, and liquid outlet 15. Liquid inlet 12 opens on top surface 101 of one end 111 of separation piping main body 10, and chemical liquid 3 is supplied from liquid supply source 4 and flows into liquid inlet 12. Liquid inlet 12 is a space connected to one end 111 of flow channel 11, and guides chemical liquid 3 that has flowed in from liquid supply source 4 into flow channel 11.

[0029] Liquid outlet 13 is a space that opens on top surface 101 of separation piping main body 10 and is connected between one end 111 and the other end 112 of flow path 11, and guides chemical solution 3 that flows into flow path 11 from liquid inlet 12 to processing device 2. In embodiment 1, liquid outlet 13 has a circular planar shape as shown in FIG. 1 . Liquid outlet 13 includes a large diameter section 131 that opens on top surface 101 of separation piping main body 10, and a small diameter section 132 that has an inner diameter smaller than that of large diameter section 131, is arranged coaxially with large diameter section 131, and opens between one end 111 and the other end 112 of flow path 11. Liquid outlet 13 has a screw groove 133 formed on the inner surface of large diameter section 131.

[0030] Gas discharge port 14 opens on upper surface 101 of other end 112 of separation pipe main body 10, and is provided on the other end 112 side of flow path 11. Gas discharge port 14 is a space connected to other end 112 of flow path 11, and is used to discharge gas separated from chemical solution 3.

[0031] Liquid outlet 15 opens to underside 102 of one end 111 of separation piping main body 10, and is provided on the side of one end 111 of flow path 11. Liquid outlet 15 is a space connected to one end 111 of flow path 11, and is used to discharge chemical liquid 3 in flow path 11 to the outside of separation piping main body 10.

[0032] When the chemical liquid 3 is supplied from the liquid supply source 4 to the processing device 2, the liquid outlet 15 and the other end 112 of the flow path 11 of the separation pipe body 10 are sealed by the sealing plug 16.

[0033] Outlet pipe 20 is a pipe that is inserted into liquid outlet 13 and discharges chemical solution 3 in flow path 11 to the outside. Outlet pipe 20 is formed in a circular pipe shape and integrally includes large diameter portion 201 and small diameter portion 202 that has an outer diameter smaller than that of large diameter portion 201 and is coaxial with large diameter portion 201. The outer diameter of large diameter portion 201 is smaller than the inner diameter of large diameter portion 131 of liquid outlet 13 and is larger than the inner diameter of small diameter portion 132 of liquid outlet 13.

[0034] Large diameter portion 201 is inserted into large diameter portion 131 of liquid outlet 13 and connected to processing device 2. Small diameter portion 202 is formed so that its outer diameter is smaller than the inner diameter of small diameter portion 132 of liquid outlet 13, and is inserted into small diameter portion 132 of liquid outlet 13, with its tip positioned within flow path 11. When small diameter portion 202 is inserted into small diameter portion 132 of liquid outlet 13, tip 203 of small diameter portion 202 of outflow pipe 20 is positioned below central axis 113, which is the center of flow path 11.

[0035] Furthermore, the outflow pipe 20 is formed with a flange 204 that protrudes outwardly around the entire circumference of the large diameter portion 201 at the end of the large diameter portion 201 closer to the small diameter portion 202. The outer diameter of the flange 204 is formed to be slightly smaller than the inner diameter of the large diameter portion 131 of the liquid outflow port 13 or equal to the inner diameter of the large diameter portion 131 of the liquid outflow port 13.

[0036] The fixing nut 30 is formed in a ring shape, and its inner diameter is formed to be equal to the outer diameter of the large diameter portion 201 of the outflow pipe 20. The fixing nut 30 is equipped with a large diameter portion 301 whose outer diameter is formed to be larger than the inner diameter of the large diameter portion 131 of the liquid outflow port 13, and a small diameter portion 302 whose outer diameter is formed to be equal to the inner diameter of the large diameter portion 131 of the liquid outflow port 13 and which is coaxial with the large diameter portion 301. The fixing nut 30 has a thread groove 303 formed on the outer peripheral surface of the small diameter portion 302 that screws into the thread groove 133. The fixing nut 30 is passed through the large diameter portion 201 of the outflow pipe 20 inserted into the liquid outlet 13, the small diameter portion 302 is inserted into the large diameter portion 131 of the liquid outlet 13, the thread groove 303 screws into the thread groove 133, pressing the flange 204 downward, and the large diameter portion 301 fits tightly against the upper surface 101 to fix the outflow pipe 20 to the separation piping main body 10.

[0037] The gas-liquid separation pipe 1 having the above-described configuration is assembled by closing the liquid outlet 15 of the separation pipe main body 10 and the other end 112 of the flow path 11 with a sealing plug 16, and fixing the outflow pipe 20 to the separation pipe main body 10 with a fixing nut 30. The gas-liquid separation pipe 1 has a liquid supply source 4 connected to the liquid inlet 12, and a processing device 2 connected to the outflow pipe 20.

[0038] In the gas-liquid separation pipe 1, the chemical liquid 3 from the liquid supply source 4 flows into the flow path 11 through the liquid inlet 12, and the flowing chemical liquid 3 flows within the flow path 11 from one end 111 to the other end 112. In the gas-liquid separation pipe 1, gas remaining in the chemical liquid 3 flowing within the flow path 11 collects at the upper part of the flow path 11, and because the central axis 113 of the flow path 11 is inclined with respect to the horizontal direction 5 as described above, the gas collects at the upper part of the other end 112 of the flow path 11. The gas-liquid separation pipe 1 discharges the gas collected at the upper part of the other end 112 of the flow path 11 to the outside through the gas discharge port 14. Furthermore, the gas-liquid separation pipe 1 supplies the chemical liquid 3 from which the gas has been separated, via the outflow pipe 20, to the processing device 2.

[0039] In addition, when the liquid supply source 4 is removed from the liquid inlet 12, the processing device 2 is removed from the outlet pipe 20, and the sealing plug 16 is removed, the chemical liquid 3 in the flow path 11 is discharged through the liquid outlet 15.

[0040] As described above, the gas-liquid separation pipe 1 of embodiment 1 is inclined upward from the horizontal direction from one end 111 to the other end 112 from the flow path 11, and the chemical liquid 3 flows in from the one end 111 side through the liquid inlet 12, and the chemical liquid 3 is discharged through the outlet pipe 20 connected to the liquid outlet 13 formed between the one end 111 and the other end 112.

[0041] Therefore, the gas-liquid separation pipe 1 of embodiment 1 can prevent gas remaining in the chemical liquid 3 that flows in from one end 111 of the flow path 11 from collecting at the top of the other end 112 of the flow path 11 and being discharged through the outflow pipe 20.

[0042] As a result, the gas-liquid separation pipe 1 according to the first embodiment has the effect of being able to suppress the remaining bubbles, ie, gas, in the chemical liquid 3 supplied to the processing device 2 or the like.

[0043] Furthermore, in the gas-liquid separation pipe 1 according to embodiment 1, the interior angle 114 between the horizontal direction 5 and the central axis 113 is greater than 0° and less than 45°, which has the effect of suppressing the remaining bubbles, i.e., gas, in the chemical solution 3 supplied to the processing device 2 or the like.

[0044] Furthermore, in the gas-liquid separation pipe 1 of embodiment 1, the tip 203 of the small diameter portion 202 of the outflow pipe 20 is located below the central axis 113 of the flow path 11, so that gas collected at the upper part on the other end 112 side of the flow path 11 can be prevented from entering the outflow pipe 20.

[0045] Furthermore, the gas-liquid separation pipe 1 according to the first embodiment is provided with the gas outlet 14 on the other end 112 side, so that gas collected at the upper part of the other end 112 side of the flow channel 11 can be discharged through the gas outlet 14.

[0046] The present invention is not limited to the above-described embodiment, and can be implemented in various modifications without departing from the gist of the present invention. [Explanation of symbols]

[0047] 1 Gas-liquid separation piping 3. Chemicals (liquids) 5 horizontal direction 11 Flow path 12 Liquid inlet 13 Liquid outlet 14 Gas outlet 15 Liquid outlet 20 Outflow pipe 111 one end 112 other end 113 Center axis (center) 114 Interior angle

Claims

1. A gas-liquid separation pipe that separates gas present in a liquid from the liquid, a flow path having one end and the other end, the flow path connecting the one end and the other end in a horizontal direction, through which the liquid flows; a liquid inlet formed on the one end side through which the liquid flows; a liquid outlet formed between the one end and the other end; an outflow pipe inserted into the liquid outflow port to allow the liquid in the flow path to flow out; At least The flow path slopes upward from one end to the other. Gas-liquid separation piping.

2. 2. The gas-liquid separation pipe according to claim 1, wherein the inclination of the flow path is such that the internal angle between the horizontal direction and the central axis of the flow path is greater than 0° and less than 45°.

3. 2. The gas-liquid separation pipe according to claim 1, wherein the tip of the outflow pipe is positioned below the center of the flow path.

4. 3. The gas-liquid separation pipe according to claim 1, further comprising a gas outlet port at the other end for discharging the separated gas.

5. The gas-liquid separation pipe according to claim 1 , further comprising a liquid outlet at the one end for discharging liquid from the flow path.

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