Moving image acquisition support device, moving image acquisition support method, and program

Abstract

To provide a technique that can effectively acquire moving images of operations of an operating screen of an operating device.SOLUTION: A moving image acquisition support device 40 comprises a control module 950 configured to control an operating device 30, and the control module executes specific control processing including: moving image acquisition processing of acquiring moving images of operations of an operating screen 30a of the operating device when an operator OP operates the operating screen 30a; meta information addition processing of adding, to the acquired moving images, meta information including at least the details of the operations performed by the operator on the operating screen; and moving image storage processing of storing the acquired moving images in a storage 952 together with the meta information added to the moving images.SELECTED DRAWING: Figure 6

Description

[Technical Field]

[0001] The present invention relates to a video acquisition support device, a video acquisition support method, and a program, and more particularly to a video acquisition support device, a video acquisition support method, and a program for an operation screen of an operation device. [Background technology]

[0002] Conventionally, for example, a substrate processing apparatus configured to process a substrate has been known (see Patent Document 1). Specifically, Patent Document 1 discloses a substrate processing apparatus configured to perform plasma processing on a substrate. Conventionally, such substrate processing apparatuses include an operation device having an operation screen operated by an operator. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Laid-Open No. 2014-164482 Summary of the Invention [Problem to be solved by the invention]

[0004] Generally, it takes a certain period of time (training period) for an operator to learn how to operate the operation screen of an operating device. If video of the operation of the operation screen could be effectively acquired, for example, by the operator watching this video during the training period, the operator would be able to quickly master the operation of the operation screen. However, conventionally, technology that can effectively acquire such video of the operation of the operation screen has not been sufficiently developed.

[0005] The present invention has been made in view of the above, and one of its objects is to provide a technique that can effectively acquire a video of operations on an operation screen of an operation device. [Means for solving the problem]

[0006] (Aspect 1) In order to achieve the above-mentioned object, a video acquisition support device according to one aspect of the present invention is a video acquisition support device for an operation device having an operation screen operated by a worker, and is equipped with a control module configured to control the operation device, and the control module executes specific control processes including a video acquisition process for acquiring a video of the operation of the operation screen when the worker operates the operation screen of the operation device, a meta information addition process for adding meta information including at least the operation content operated by the worker on the operation screen to the acquired video, and a video storage process for storing the acquired video in a storage device together with the meta information added to the video.

[0007] According to this aspect, a video of an operation on the operation screen of the operation device when the worker operates the operation screen can be stored in the storage device together with meta information including at least the operation content of the operation performed by the worker on the operation screen, thereby making it possible to effectively obtain a video of the operation on the operation screen of the operation device.

[0008] (Aspect 2) In the above-mentioned aspect 1, the control module executes the specific control process a plurality of times to store a plurality of the videos in the storage device, and selects a video of the operation from the plurality of videos stored in the storage device based on the operation content operated by the worker on the operation screen. A video display process may be executed to select the video related to the content and display it on a display device.

[0009] According to this aspect, when operating the operation screen of the operation device, the worker can quickly learn how to operate the operation screen of the operation device by watching the video displayed on the display device.

[0010] (Aspect 3) In the above aspect 2, the display device may be configured to allow a word to be input, the meta information may include the input word, and the control module may, in the video display process, select the video related to the input word and display it on the display device.

[0011] (Aspect 4) In the above-mentioned aspect 2 or 3, the display device may be configured to allow input of worker identification information for identifying the worker operating the operation device, the meta information may include the worker identification information, and the control module may, in the video display process, select the video related to the worker operating the operation screen of the operation device based on the worker identification information and display it on the display device.

[0012] (Aspect 5) In any one of the above aspects 1 to 4, the control module may further execute an external video loading process to load an external video, which is a video of the worker operating the operation screen of the operation device, acquired by an external video acquisition device.

[0013] (Aspect 6) In order to achieve the above-mentioned object, a video acquisition support method according to one aspect of the present invention is a video acquisition support method for an operation device having an operation screen operated by a worker, and includes the steps of: a control module configured to control the operation device executing a video acquisition process to acquire a video of operations on the operation screen when the worker operates the operation screen of the operation device; the control module executing a meta information addition process to add meta information including at least the operation content operated by the worker on the operation screen to the acquired video; and the control module executing a video storage process to store the acquired video in a storage device together with the meta information added to the video.

[0014] According to this aspect, a video of an operation on the operation screen of the operation device when the worker operates the operation screen can be stored in the storage device together with meta information including at least the operation content of the operation performed by the worker on the operation screen, thereby making it possible to effectively obtain a video of the operation on the operation screen of the operation device.

[0015] (Aspect 7) In order to achieve the above object, a program according to one aspect of the present invention is a program that causes a computer to execute specific control processes, including a video acquisition process that acquires a video of operations on an operation screen of an operating device when an operator operates the operation screen; a meta information addition process that adds meta information including at least the operation content operated by the operator on the operation screen to the acquired video; and a video storage process that stores the acquired video in a storage device together with the meta information added to the video. [Brief explanation of the drawings]

[0016] [Figure 1] 1 is an overall layout diagram of a substrate processing apparatus according to an embodiment; [Figure 2] 1 is a schematic diagram illustrating an overall configuration of a video acquisition support device according to an embodiment. [Figure 3] 3A and 3B are schematic diagrams illustrating an example of an operation screen of an operation device and a display screen of a display device according to an embodiment. [Figure 4] 5A to 5C are schematic diagrams showing an example of a change in the display screen of the display device according to the embodiment. [Figure 5] FIG. 4 is a schematic diagram illustrating an example of a worker list according to the embodiment. [Figure 6] 10 is an example of a flowchart for explaining a series of processes from the start of acquisition of a moving image to storage of the moving image according to the embodiment. [Figure 7] 10 is an example of a flowchart for explaining a process for displaying a moving image on the display device according to the embodiment. [Figure 8] 10 is an example of a flowchart illustrating a process related to reading of an external video according to a first modified example of the embodiment. [Figure 9] FIG. 2 is a schematic diagram illustrating an example of a hardware configuration of a control module according to the embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0017] Hereinafter, embodiments of the present invention will be described with reference to the drawings. Note that the drawings are diagrammatically illustrated to facilitate understanding of the features of the embodiments, and the dimensional ratios of the components may not be the same as those in reality. In addition, some drawings show XYZ Cartesian coordinates for reference. In these Cartesian coordinates, the Z direction corresponds to the upward direction, and the -Z direction corresponds to the downward direction (the direction in which gravity acts).

[0018] The video acquisition support device 40 of the operation device 30 according to this embodiment is applied to a substrate processing apparatus 1 configured to process a substrate WF, as an example. That is, the video acquisition support device 40 according to this embodiment is a video acquisition support device for the operation screen 30a of the operation device 30 of the substrate processing apparatus 1. Therefore, first, an overview of the substrate processing apparatus 1 will be described, and then the configuration of the video acquisition support device 40 will be described.

[0019] 1 is an overall layout diagram of a substrate processing apparatus 1 according to this embodiment. The specific type of substrate processing apparatus 1 is not particularly limited as long as it is an apparatus capable of processing substrates WF, but in this embodiment, a plating apparatus 1000 that performs plating processing on substrates WF is used as an example of the substrate processing apparatus 1. However, the substrate processing apparatus 1 is not limited to the plating apparatus 1000, and the substrate processing apparatus 1 can be any known substrate processing apparatus, such as a polishing apparatus that performs polishing processing on substrates WF or a plasma processing apparatus that performs plasma processing on substrates WF.

[0020] The plating apparatus 1000, which is an example of the substrate processing apparatus 1 illustrated in FIG. 1, includes a load port 100, a transport robot 110, a load stage 120, an unload stage 130, a loader 140, a fixing module 200, a stocker module 300, a swap module 310, a holder cleaning module 320, a pre-wet module 400, a pre-soak module 500, a pre-soak cleaning module 510, a plating module 600, a plating cleaning module 700, a blow module 710, a temporary placement module 720, a cleaning module 800, a transport device 900, and a control module 950.

[0021] The load port 100 is a module for loading a substrate WF stored in a cassette such as a FOUP (Front Opening Unify Pod) (not shown) into the plating apparatus 1000, and for unloading the substrate WF from the plating apparatus 1000 to the cassette. In this embodiment, four load ports 100 are arranged horizontally, but the number and arrangement of the load ports 100 are optional. The transfer robot 110 is a robot for transporting the substrate WF horizontally, and is configured to transfer the substrate WF between the load port 100 and the load stage 120.

[0022] The load stage 120 is a stage for transferring the substrate WF before plating processing between the transfer robot 110 and the loader 140. The unload stage 130 is a stage for transferring the substrate WF after plating processing between the transfer robot 110 and the loader 140. The loader 140 is a robot for transferring the substrate WF horizontally, and is configured to transfer the substrate WF between the load stage 120, the unload stage 130, the fixing module 200, and the cleaning module 800.

[0023] The fixing module 200 is a module for attaching and detaching a substrate WF to and from the substrate holder 210. The stocker module 300 is a module for vertically storing the substrate holders 210. The swap module 310 is a module for temporarily storing a substrate holder 210 that requires replacement or maintenance, and is structured to allow the substrate holder 210 to be inserted and removed. The substrate holder 210 removed from the swap module 310 is maintained within the plating apparatus 1000 or removed outside the plating apparatus 1000 for maintenance, and the maintained substrate holder 210 or a new substrate holder 210 can be inserted into the swap module 310. The holder cleaning module 320 is a module for cleaning the substrate holder 210.

[0024] The pre-wet module 400 is a module for replacing air inside a pattern formed on the substrate surface with a processing liquid such as pure water or degassed water by wetting the surface to be plated of the substrate WF before plating. The pre-wet module 400 is configured to perform a pre-wet process that replaces the processing liquid inside the pattern with a plating liquid during plating, thereby making it easier to supply the plating liquid inside the pattern.

[0025] The presoak module 500 is configured to perform a presoak process in which, for example, an oxide film with high electrical resistance present on the surface of a seed layer formed on the surface to be plated of the substrate WF before plating is etched away with a treatment solution such as sulfuric acid or hydrochloric acid to clean or activate the surface of the substrate to be plated. The presoak cleaning module 510 is a module for cleaning the substrate WF that has been subjected to the presoak process.

[0026] The plating module 600 is a module for plating the substrate WF. The plating cleaning module 700 is a module for cleaning the substrate WF to remove plating solution and the like remaining on the substrate WF after plating. In this embodiment, three plating modules 600 and three plating cleaning modules 700 are arranged horizontally, but the number and arrangement of the plating modules 600 and the plating cleaning modules 700 are optional. The blow module 710 is a module for drying the substrate WF after cleaning. The temporary placement module 720 is a module for temporarily placing the substrate holder 210 to which the substrate WF is attached so that the substrate holder 210 can be transferred between multiple transport devices 900. In this embodiment, the temporary placement module 720 can accommodate one substrate holder 210, but the number can be optional.

[0027] The cleaning module 800 is a module for performing cleaning and drying processes on the substrate WF to remove plating solution and the like remaining on the substrate WF after plating processing that has been removed from the substrate holder 210. In this embodiment, two cleaning modules 800 are arranged horizontally side by side with the load stage 120 and the unload stage 130 in between, but the number and arrangement of the cleaning modules 800 are arbitrary. The transfer device 900 is a device for vertically transferring the substrate holder 210 between multiple modules in the plating apparatus 1000. In this embodiment, three transfer devices 900 are arranged side by side, but the number and arrangement of the transfer devices 900 are arbitrary.

[0028] The control module 950 is configured to control multiple modules of the plating apparatus 1000. The computer may be a general or special purpose computer with input / output interfaces to and from an operator.

[0029] An example of a series of plating processes performed by the plating apparatus 1000 will be described. First, the substrate WF stored in a cassette is carried into the load port 100. Next, the transfer robot 110 removes the substrate WF from the cassette in the load port 100 and places the substrate WF on the load stage 120. The loader 140 receives the substrate WF from the load stage 120 and transports it to the fixing module 200.

[0030] The fixing module 200 attaches the substrate WF to the substrate holder 210. The transfer device 900 transfers the substrate holder 210 with the substrate WF attached to it to the prewet module 400. The prewet module 400 performs a prewet process on the substrate WF. The transfer device 900 transfers the substrate holder 210 with the prewet-treated substrate WF attached to it to the presoak module 500. The presoak module 500 performs a presoak process on the substrate WF. The transfer device 900 transfers the substrate holder 210 with the presoak-treated substrate WF attached to it to the presoak cleaning module 510. The presoak cleaning module 510 cleans the substrate WF. The transfer device 900 transfers the substrate holder 210 with the cleaned substrate WF attached to it to the plating module 600. The plating module 600 performs a plating process on the substrate WF.

[0031] The transfer device 900 transfers the substrate holder 210, to which the plated substrate WF is attached, to the plating cleaning module 700. The plating cleaning module 700 performs a cleaning process on the substrate WF and the substrate holder 210. The transfer device 900 transfers the substrate holder 210, to which the cleaned substrate WF is attached, to the blow module 710. The blow module 710 performs a drying process on the substrate WF. The transfer device 900 transfers the substrate holder 210, to which the dried substrate WF is attached, to the temporary placement module 720, and another transfer device 900 transfers the substrate holder 210 from the temporary placement module 720 to the fixing module 200. The fixing module 200 removes the substrate WF from the substrate holder 210.

[0032] The loader 140 transports the plated substrate WF, which has been removed from the substrate holder 210, to the cleaning module 800. The cleaning module 800 performs cleaning and drying processes on the substrate WF. The loader 140 places the substrate WF, which has been cleaned and dried, on the unload stage 130. The transfer robot 110 receives the substrate WF from the unload stage 130 and transports it to a cassette on the load port 100. Finally, the cassette containing the substrate WF is unloaded from the load port 100.

[0033] The substrate holder 210 from which the substrate WF has been removed in the fixing module 200 has the next substrate WF attached thereto or is returned to the stocker module 300 by the transport device 900. The substrate holder 210 not holding the substrate WF is cleaned in the holder cleaning module 320 as necessary.

[0034] The substrate processing apparatus 1 (for example, the plating apparatus 1000) according to this embodiment also includes an operation device 30 that can be operated by an operator OP. Specifically, the operation device 30 has an operation screen 30a that can be operated by the operator OP. An example of the operation screen 30a is shown in FIGS. 2 and 3, which will be described later. The operation device 30 and the control module 950 are electrically connected. Operation information on the operation screen 30a of the operation device 30 is transmitted to the control module 950. Details of the operation device 30 will be described later.

[0035] The control module 950 according to this embodiment includes a microcomputer. 9, the microcomputer of the control module 950 may include a processor 951, a storage device 952 as an example of a non-transitory storage medium, and the like. The storage device 952 may include, for example, a read-only memory (ROM) 953 and a random access memory (RAM) 954. The control module 950 controls controlled units of the substrate processing apparatus 1 (for example, a plating apparatus 1000) by the processor 951 operating in accordance with commands from a program stored in the storage device 952.

[0036] 6, 7, and 8, which will be described later, are realized by causing a control module 950 (specifically, a processor 951), which is an example of a computer, to execute a program stored in a storage device 952, which is an example of a storage medium. The storage medium for storing this program may be, for example, a CD-ROM (Compact Read Only Memory). The storage medium may be any of various known storage media, such as a Disk Read Only Memory (FDLM) or a USB (Universal Serial Bus) memory.

[0037] The above-described configuration of the substrate processing apparatus 1 is merely an example, and is not limited to the above-described configuration. The substrate processing apparatus 1 according to this embodiment is configured to be switchable between an "automatic mode" in which the above-described series of substrate processing (for example, plating processing) is performed automatically under the control of the control module 950, and a "manual mode" in which the series of substrate processing is performed based on the operation of an operator OP.

[0038] Next, the video acquisition support device 40 will be described. Fig. 2 is a schematic diagram showing the overall configuration of the video acquisition support device 40. Fig. 2 also schematically shows an example of how the operator OP operates the operation screen 30a of the operation device 30 of the video acquisition support device 40, which will be described later. Fig. 3 is a schematic diagram showing an example of the operation screen 30a of the operation device 30 and the display screen of the display device 50.

[0039] 2, the moving image acquisition support device 40 includes a display device 50 and a control module 950. The moving image acquisition support device 40 may also include an image capturing device 41, as shown in FIG.

[0040] The photographing device 41 is configured to photograph a video of the operation of the operation screen 30a of the operation device 30 when the worker OP operates the operation screen 30a. As the photographing device 41, for example, a known camera capable of photographing a video can be used. The photographing device 41 and the control module 950 are electrically connected. The operation of the photographing device 41 is controlled by the control module 950. The video captured by the photographing device 41 is stored in, for example, a storage device 952. This allows the control module 950 to acquire a video of the operation of the operation screen 30a.

[0041] 2, the photographing device 41 may be fixed to a predetermined location (for example, a predetermined location in the building where the operating device 30 is located). However, the present invention is not limited to this configuration, and the photographing device 41 may be attached to an article of clothing (for example, a hat, a helmet, or goggles) that can be worn by the worker OP.

[0042] The method for acquiring the video of the operation of the operation screen 30a of the operation device 30 is not limited to the above-described method using the image capturing device 41. Instead of or in addition to the method using the image capturing device 41, the control module 950 may acquire the video of the operation screen 30a of the operation device 30 by performing so-called "video capture processing (or "screen capture processing")."

[0043] This video capture process involves capturing and saving a series of image information displayed on a monitor as a video, and is a technique widely known in the field of personal computers, for example.

[0044] 2 and 3, the display device 50 is a device for displaying predetermined information. The display device 50 and the control module 950 are electrically connected. The operation of the display device 50 is controlled by the control module 950. Information input to the display device 50 is transmitted to the control module 950.

[0045] In this embodiment, as an example, the operation device 30 and the display device 50 are integrated. Moreover, the operation device 30 (specifically, the operation screen 30a) and the display device 50 according to this embodiment are configured by a display having, for example, a touch panel screen. That is, in this case, a predetermined area of the display functions as the operation screen 30a, and another predetermined area of the display functions as the display device 50.

[0046] However, the present invention is not limited to the above configuration. For example, the display device 50 may be configured as a device separate from the operation screen 30a of the operation device 30.

[0047] Note that if the operation video is acquired by video capture processing, the photographing device 41 (camera) is not required. In this case, the video acquisition support device 40, the operation device 30, and the display device 50 may be configured, for example, by a single personal computer (for example, a personal computer with a display (display device 50)). The video acquisition support device 40 (or the personal computer serving as the video acquisition support device 40) may further include, for example, a keyboard 60 and a mouse 61.

[0048] 2, the control module 950 according to this embodiment is, for example, a control module for the substrate processing apparatus 1 and also a control module for the video acquisition support device 40. The control module 950 controls the operation device 30, the display device 50, and the imaging device 41 by operating a processor 951 in accordance with commands from a program stored in a storage device 952. Note that the video acquisition support device 40 may be configured to include a control module dedicated to the video acquisition support device 40, in addition to a control module dedicated to the substrate processing apparatus 1.

[0049] The video acquisition assistance device 40 may include an "external storage device 23" provided separately from the storage device 952 as a "storage device" for storing videos and the like. This external storage device 23 may be, for example, a known storage (such as a hard disk drive or a solid state drive) or a known server. Furthermore, when a server is used as the external storage device 23, this server may be connected to the control module 950 via, for example, the Internet.

[0050] 3, an operation screen 30a of the operation device 30 according to this embodiment displays at least an operation section 31 and a status display section 32, for example.

[0051] A plurality of operation icons 33 are displayed on the operation unit 31. The plurality of operation icons 33 include an "icon for starting operation" and an "icon for stopping operation" for each component device of the substrate processing apparatus 1. For example, when operating the substrate processing apparatus 1 in manual mode, the operator OP can transmit commands to start and stop operation of each component device of the substrate processing apparatus 1 to the control module 950 by operating these icons.

[0052] The status display unit 32 is configured to display, for example, the operating status of the substrate processing apparatus 1. As an example, the status display unit 32 displays the current status of each component of the substrate processing apparatus 1. The name of the component device currently in operation can be displayed, and the icon corresponding to this component device can be illuminated, allowing the operator OP to easily understand which component device is in operation.

[0053] Furthermore, the status display unit 32 may be configured to display an alarm when a malfunction occurs in the substrate processing apparatus 1, for example.

[0054] The display device 50 is configured to display a word input section 51 and a display section 52, for example.

[0055] The word input unit 51 is configured so that the operator OP can input a predetermined word (for example, a search word) using an input device such as a touch pen or a keyboard 60. Alternatively, the word input unit 51 may not be configured to be displayed on the display device 50, but may be configured by, for example, the keyboard 60.

[0056] The display unit 52 is configured to display at least moving images. As an example, as shown in FIG. 4, the display unit 52 according to this embodiment is configured to display a plurality of moving image lists 53 (i.e., moving image candidates). When the worker OP selects (touches) a desired moving image list 53 (e.g., moving image list No. 1 53) from the plurality of moving image lists 53, the selected moving image is displayed on the display unit 52.

[0057] It should be noted that the "selection by the worker OP" is not limited to touching the screen as described above, and may be performed by clicking the mouse 61, for example (this also applies to the following explanation).

[0058] Furthermore, the display device 50 according to this embodiment is configured, for example, to allow input of "operator identification information" for identifying the operator OP who operates the operation device 30. For example, when the operator OP operates a predetermined operation icon 33 (operation icon for displaying a list of operators), a list of multiple operators 55, as shown in FIG. 5, is displayed on the display unit 52, for example. This list of multiple operators 55 corresponds to the "operator identification information."

[0059] The worker OP selects (touches) the worker list 55 on which his or her own name is written from among the multiple worker lists 55. In this way, the worker OP who will actually operate the operation screen 30a of the operation device 30 can be selected. In other words, the operation of selecting this worker list 55 corresponds to the "operation of inputting worker identification information."

[0060] The location where the worker list 55 is displayed is not limited to the display unit 52. For example, if the operation device 30 and the display device 50 are configured as an integrated display as in this embodiment, the worker list 55 may be displayed in any location on this display (i.e., any location on the display device 50 or any location on the operation screen 30a).

[0061] Furthermore, for example, to ensure security, when an operator inputs (logs in to) operator identification information such as an operator name and password into the operation device 30 at the start of use of the operation device 30, the information input at the time of login (login information) may be used as the operator identification information. In this case, the operator list 55 does not need to be displayed.

[0062] FIG. 6 is an example of a flowchart for explaining a series of processes from the start of video acquisition to video storage. Specifically, FIG. 6 shows a flowchart of a "specific control process" executed by the control module 950 according to this embodiment. The "constant control process" includes steps S10 to S40, which will be described later. FIG. 6 is also a flowchart of the "video acquisition support method" executed by the control module 950 according to this embodiment.

[0063] In step S10, the control module 950 starts a "video acquisition process" for acquiring a video of the operation on the operation screen 30a when the operator OP operates the operation screen 30a of the operation device 30. The control module 950 may start this video acquisition process, for example, when the operator OP operates (clicks) the operation icon 33 corresponding to a "video acquisition start command" for starting video acquisition.

[0064] In this embodiment, the "movie of the operation of the operation screen 30a" is specifically a movie including images of the "operation icons 33 on the operation screen 30a" operated by the worker OP. Preferably, the movie further includes images that are displayed on the operation screen 30a when the worker OP operates the operation icons 33.

[0065] Specifically, in step S10, the control module 950, for example, acquires (that is, records) the operation screen 30a operated by the operator OP by the above-mentioned "video capture process."

[0066] To give a specific example, when the operator OP operates a plurality of operation icons 33 on the operation screen 30a in order to operate the substrate processing apparatus 1, in step S10 the control module 950 acquires, as a video, the operations of the plurality of operation icons 33. More specifically, the control module 950 acquires, for example, images of the plurality of operation icons 33 operated by the operator OP in chronological order as a video.

[0067] Note that the specific execution contents of step S10 are not limited to those described above. For example, in step S10, the control module 950 may acquire a video of the operation of the operation screen 30a by having the imaging device 41 capture the operation of the operation screen 30a.

[0068] In step S10, information relating to the operation content of the operation screen 30a is transmitted to the control module 950. The control module 950 temporarily stores this information in the storage device 952, for example.

[0069] Next, the control module 950 ends the video acquisition process (step S20). Specifically, the control module 950 ends the video acquisition process when, for example, the operator OP operates (clicks) the operation icon 33 corresponding to a "video acquisition end command" to end the video acquisition.

[0070] Next, the control module 950 executes a "meta information addition process" that adds predetermined meta information to the video acquired in the video acquisition process (step S30). Note that "adding meta information to a video" specifically means linking a video (specifically, video information) with meta information, that is, associating a video with meta information. Furthermore, in this step S30, it is preferable that not only meta information is added but also meta information can be modified.

[0071] In this embodiment, the "meta information" in step S30 specifically includes at least the operation content operated by the worker OP on the operation screen 30a (for example, information about the operated operation icon 33, etc.). That is, this meta information includes information about the type of operation icon 33 operated by the worker OP, information about the order of the operated operation icons 33, etc. Contains:

[0072] The meta information may include information about the title of the acquired video. Specifically, in this case, if the worker OP inputs the title of the video acquired in the video acquisition process into the word input unit 51 in step S20, the control module 950 adds the input title to the video as meta information in step S30.

[0073] The meta information may also include information about an alarm. Specifically, in this case, the control module 950 adds, as meta information, an alarm that occurs while the operator OP is operating the operation screen 30a to the video.

[0074] The meta information may also include information about video search words. Specifically, in this case, when the operator OP inputs a video search word into the word input unit 51 in step S20, the control module 950 adds the input video search word to the video as meta information in step S30.

[0075] The meta information may also include information related to worker identification information. Specifically, in this case, if the worker OP inputs worker identification information in step S20, the control module 950 adds the input worker identification information to the video as meta information in step S30.

[0076] Next, in step S40, the control module 950 executes a "video storage process" to store the acquired video together with the meta information added to this video in the storage device 952. By this step S40, the video linked to the meta information can be stored (i.e., saved) in the storage device 952.

[0077] 6 (that is, the "specific control process") multiple times, multiple moving images associated with the operations on the operation screen 30a are stored in the storage device 952.

[0078] This allows for storing a video of "how an operator OP (including the developer of the operation device 30) who is proficient in operating the operation device 30 operates the operation device 30." As a result, by executing the flowchart of FIG. 7, which will be described later, an operator OP who is not proficient in operating the operation device 30 can watch this video. This allows an operator OP who is not proficient in operating the operation device 30 to easily operate the operation device 30 by referring to this video.

[0079] Fig. 7 is an example of a flowchart for explaining a process for displaying a moving image on the display device 50. Note that the flowchart in Fig. 7 may be executed, for example, when the worker OP is actually operating the operation screen 30a (for example, while the worker OP is undergoing training on how to operate the operation screen 30a).

[0080] 7, the control module 950 executes an "operation content acquisition process" for acquiring the operation content of the operation screen 30a by the operator OP. As an example, assume that the operator OP operates the operation icon 33 corresponding to a "transport start command" to start transport of the substrate WF by the transport robot 110 of the substrate processing apparatus 1. Note that the operation of this operation icon 33 may include moving a pointer displayed on the screen to the operation icon 33 corresponding to the operation start command. In this case, in step S100, the control module 950 acquires information that the operation icon 33 corresponding to this transport start command has been operated.

[0081] As another example, suppose that the operator OP operates the operation icon 33 corresponding to a "restart command" to restart the substrate processing by the substrate processing apparatus 1. In this case, in step S100, the control module 950 acquires information that the operation icon 33 corresponding to this restart command has been operated.

[0082] Next, in step S110, the control module 950 executes a "video list display process" to display a "video list," which is at least one video related to the operation content of the worker OP acquired in step S100, from among the multiple videos stored in the storage device 952.

[0083] As one example, when the operation icon 33 corresponding to the "transport start command" is operated in step S100, the control module 950 causes the display device 50 to display a moving image, to which meta information related to the operation icon 33 corresponding to this transport start command has been added, as a moving image list 53 (see the left diagram in FIG. 4 described above). As another example, when the operation icon 33 corresponding to the "restart command" is operated in step S100, the control module 950 causes the display device 50 to display a moving image, to which meta information related to the operation icon 33 corresponding to this restart command has been added, as a moving image list 53.

[0084] Next, in step S120, the control module 950 acquires information regarding the video selection by the worker OP. Specifically, the worker OP selects a video that the worker OP wants to view from the video list 53 displayed on the display device 50. In step S120, the control module 950 acquires the type of video selected by the worker OP.

[0085] Next, in step S130, the control module 950 executes a "selected moving image display process" for displaying the moving image selected by the worker OP in step S120 on the display device 50. For example, referring to FIG. 4 described above, if the No. 1 moving image list 53 is selected by the worker OP, in step S130 the control module 950 causes the display device 50 to display the moving image 54 corresponding to the selected No. 1 moving image list 53 (i.e., the selected moving image).

[0086] Steps S110, S120, and S130 are an example of "video display processing in which, based on the operation content of the operation screen 30a performed by the worker OP, a video related to the operation content is selected from multiple videos stored in the memory device 952 and displayed on the display device 50."

[0087] 7, in step S140, the control module 950 may update the meta information. Specifically, in this case, the control module 950 adds, as meta information, information related to viewing, such as the number of times the video has been viewed and the viewing history, to the viewed video, and stores the information in the storage device 952.

[0088] For example, in step S100, if the worker OP inputs a word for video search (including the title of the video) into the word input unit 51, the control module 950 may acquire information related to the input word in step S100. In this case, the control module 950 may select a video related to the input word from the videos in the storage device 952 and display it as the video list 53 in step S110.

[0089] Also, in step S100, if the operator OP inputs operator identification information (or, as described above, if the operator identification information is input when logging in to the operation device 30), In step S100, the control module 950 may acquire this input worker identification information. In this case, in step S110, the control module 950 may select a video related to the input worker identification information and display it as the video list 53. This allows the video list 53 to be displayed according to the worker OP operating the operation screen 30a.

[0090] According to the present embodiment as described above, the flowchart illustrated in Fig. 6 is executed, so that a video of the operation performed by the worker OP on the operation screen 30a of the operation device 30 can be stored in the storage device 952 together with meta information including the operation details performed by the worker OP on the operation screen 30a. This makes it possible to effectively acquire a video of the operation performed on the operation screen 30a of the operation device 30.

[0091] 7 is executed, a video related to the operation content performed by the operator OP on the operation screen 30a can be displayed on the display device 50. This allows the operator OP to quickly learn how to operate the operation screen 30a of the operation device 30 by watching the video displayed on the display device 50 when operating the operation screen 30a of the operation device 30.

[0092] (Variation 1) In the above-described embodiment, the video acquisition support device 40 may be configured to be able to read an "external video." Specifically, this external video is a video of the operation screen 30a of the operation device 30 by the worker OP, and is a video acquired by an external video acquisition device 40a (this reference numeral is exemplified in FIG. 2). Note that this external video acquisition device 40a is a device that can acquire in advance a video of the operation screen 30a of the operation device 30 by the worker OP.

[0093] 8 is an example of a flowchart for explaining a process related to loading of an external video according to this modification. In step S200, the control module 950 according to this modification executes an "external video loading process" for loading an external video.

[0094] Specifically, for example, when the worker OP operates the operation icon 33 corresponding to the "external video loading start command" to start loading the external video, the control module 950 executes the loading process of this external video.

[0095] Specifically, in step S200, the control module 950 may store the external video that has been previously acquired by and stored in the external video acquisition device 40a, for example, in the storage device 952 and / or the external storage device 23. Alternatively, if the external video has been stored in, for example, the external storage device 23 before step S200 is executed, the control module 950 may read the external video stored in the external storage device 23 into the storage device 952 in step S200.

[0096] In step S200, the control module 950 may read not only the external video but also data relating to the operation manual of the operating device 30 (which may include text data, image data, video data, etc.).

[0097] Alternatively, if a component of the substrate processing apparatus 1 is equipped with a built-in camera or the like and an image captured by the built-in camera is available, the control module 950 may read this image. Alternatively, if the operator OP uses a technology such as augmented reality or mixed reality when operating the operation screen 30a of the operation device 30, the control module 950 may read an image used when using augmented reality or mixed reality. These images are also examples of external videos.

[0098] Next, in step S210, the control module 950 executes an "external video meta information addition process" for adding external video meta information to the loaded external video.

[0099] This external video meta information includes the same information as the meta information described above. Specifically, the external video meta information includes the operation details of the operator OP operating the operation screen 30a when the external video was acquired (for example, information on the operated operation icon 33, etc.).

[0100] The control module 950 may acquire this external video meta information from, for example, the control module (computer) of the external video acquisition device 40a and add it to the external video.

[0101] Next, in step S220, the control module 950 executes an "external video storage process" to store the read external video in the storage device 952 together with the external video meta information added to the external video.

[0102] 7, the control module 950 according to this modification selects an external video related to the operation content performed by the worker OP on the operation screen 30a of the operation device 30, and displays the selected external video on the display device 50. This allows the external video to be displayed on the display device 50 in the same way as the video acquired in the flow of FIG. 7.

[0103] According to this modified example as described above, an external video can be loaded, which effectively helps the worker OP quickly learn how to operate the operation screen 30a of the operation device 30.

[0104] Although the embodiments and modifications of the present invention have been described in detail above, the present invention is not limited to such specific embodiments and modifications, and various further modifications and alterations are possible within the scope of the gist of the present invention as set forth in the claims. [Explanation of symbols]

[0105] 1. Substrate processing equipment 30 Operating device 30a Operation screen 40 Video acquisition support device 50 Display device 950 Control Module (or Computer) 951 Processor (or computer) 952 Storage device OP worker

Claims

1. A video capture support device for an operation device having an operation screen operated by an operator, a control module configured to control the operating device; The control module a video acquisition process for acquiring a video of an operation on the operation screen of the operation device when the worker operates the operation screen; a meta information adding process for adding meta information including at least the operation content of the operation performed by the worker on the operation screen to the acquired video; a video storage process for storing the acquired video together with the meta information added to the video in a storage device;

2. The control module By executing the specific control process a plurality of times, the video is stored in the storage device a plurality of times; The video acquisition support device of claim 1, which executes a video display process in which, based on the operation content operated by the worker on the operation screen, a video related to the operation content is selected from the plurality of videos stored in the storage device and displayed on a display device.

3. the display device is configured to allow input of a word; the meta-information includes the input word; The video acquisition assistance device according to claim 2 , wherein the control module, in the video display process, selects the video related to the input word and displays it on the display device.

4. the display device is configured to allow input of worker identification information for identifying the worker operating the operation device, the meta-information includes the worker identification information, The video acquisition support device according to claim 2, wherein the control module, in the video display processing, selects the video related to the worker operating the operation screen of the operation device based on the worker identification information and displays it on the display device.

5. The video acquisition assistance device according to claim 1, wherein the control module further executes an external video loading process to load an external video, which is a video of the worker operating the operation screen of the operation device, acquired by an external video acquisition device.

6. A video capture support method for an operation device having an operation screen operated by an operator, comprising: a control module configured to control the operation device executes a video acquisition process to acquire a video of an operation on the operation screen of the operation device when the worker operates the operation screen; the control module executes a meta information addition process to add meta information including at least the operation content of the operation performed by the worker on the operation screen to the acquired video; The control module executes a video storage process to store the acquired video together with the meta information added to the video in a storage device.

7. On the computer, a video acquisition process for acquiring a video of an operation on an operation screen of an operation device when the worker operates the operation screen; a meta information adding process for adding meta information including at least the operation content of the operation performed by the worker on the operation screen to the acquired video; a video storage process for storing the acquired video together with the meta information added to the video in a storage device;

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