Suspension for disk device

Abstract

To provide a suspension capable of arranging a slider on a slider arrangement portion in a stable posture.SOLUTION: A slider arrangement portion 50 on which a slider 51 is arranged is formed on a flexure 22 of a suspension 1. The slider arrangement portion 50 includes an aperture portion 70 formed in a metal base 40 of the flexure 22. The aperture portion 70 is formed at a position on which the slider 51 is arranged, and is open in a thickness direction of the metal base 40. A conductor portion 80 is embedded in a resin member 71 filling the aperture portion 70. A slider support portion 90 is formed on a first surface 71a of the resin member 71. An abutting portion 91 contacting a protrusion portion 30a of a dimple portion 30 is formed on a second surface 71b of the resin member 71.SELECTED DRAWING: Figure 4

Description

[Technical Field]

[0001] The present invention relates to a suspension for a disk drive, which includes a load beam, a flexure, and the like. [Background technology]

[0002] Disk drives are used in information processing devices such as personal computers. A disk drive includes a magnetic disk that rotates around a spindle and a carriage that rotates around a pivot shaft. A disk drive suspension is attached to the carriage arm.

[0003] A disk drive suspension includes a base plate, a load beam, and a flexure arranged along the load beam. The flexure includes a metal base made of a thin stainless steel plate and a wiring section arranged along the metal base. Hereinafter, a disk drive suspension will be simply referred to as a suspension.

[0004] A swingable gimbal structure is formed near the tip of the flexure. The gimbal structure includes a slider placement portion for placing a slider. A portion of the flexure that forms the slider placement portion is sometimes called a tongue, and is formed on a portion of the metal base. The gimbal structure is supported by a protrusion formed on the load beam. In the industry, the protrusion is sometimes called a dimple. The tongue is swingably supported by the apex of the protrusion (the apex of the dimple).

[0005] A slider that functions as a magnetic head is attached to the slider placement section. The slider is equipped with an element for accessing, such as reading and writing, data recorded on the disk. As the disk rotates, an air bearing is formed between the slider and the disk. The distance from the air bearing surface of the slider to the disk surface (Head Media Spacing) is extremely small, for example, less than 10 nm.

[0006] For example, as described in Patent Document 1, a wiring portion is connected to a slider. The wiring portion in Patent Document 1 extends along one side surface and the other side surface of the slider in the longitudinal direction of the flexure. The slider is fixed to the metal base of the flexure by adhesive or the like. In this case, it is necessary to secure space for the wiring portion on both sides of the slider, which is disadvantageous in terms of miniaturizing the suspension.

[0007] In contrast, the suspension described in Patent Document 2 has a wiring section disposed between the back surface of the slider and the metal base. In other words, the metal base, wiring section, and slider are all stacked in the thickness direction. In this case, the back surface of the slider is fixed to the wiring section with an adhesive. This makes it possible to reduce the width of the slider placement section, which is advantageous for miniaturizing the suspension. [Prior art documents] [Patent documents]

[0008] [Patent Document 1] Patent No. 4993524 [Patent Document 2] Patent No. 5931624 Summary of the Invention [Problem to be solved by the invention]

[0009] In the suspension described in Patent Document 2, the wiring and slider overlap in the thickness direction. The wiring has multiple conductors that are independent of each other, and each conductor is covered with a cover resin. Therefore, if the heights of the individual conductors and the cover resin are not uniform, the slider cannot be mounted in the correct position. Furthermore, because the metal base, wiring, and slider overlap in the thickness direction, there is also the problem that the distance from the apex of the dimple to the air bearing surface of the slider increases by the thickness of the wiring.

[0010] An object of the present invention is to provide a suspension that can stabilize the attitude of a slider placed in a slider placement portion. [Means for solving the problem]

[0011] One embodiment is a disk drive suspension including a load beam and a flexure. The flexure has a metal base, a slider placement section for placing a slider, and a wiring section electrically connected to the slider. The slider placement section has an opening formed in the metal base, a resin member filled in the opening, and a conductor section. The opening is formed at a position where the slider is to be placed and opens in the thickness direction of the metal base. The conductor section is part of the wiring section and is embedded in the resin member. A slider support section on which the slider is placed is formed on a first surface in the thickness direction of the resin member. A contact section that comes into contact with a convex section (the apex of a dimple section) of the load beam is formed on a second surface in the thickness direction of the resin member.

[0012] In the suspension of this embodiment, the resin member may have a base resin layer formed inside the opening and a potting resin filled in the opening. The potting resin overlaps the base resin layer when the conductor portion is embedded. An auxiliary member that contacts the protrusion may be disposed on the contact portion. The thickness of the resin member may be smaller than the thickness of the metal base.

[0013] The resin member may have a base resin layer formed inside the opening, an embedding resin, and a base resin. The embedding resin overlaps one surface of the base resin layer when the conductor portion is embedded. The base resin overlaps the other surface of the base resin layer. The resin member may consist of only the embedding resin. The resin member may include the embedding resin and a base resin overlapping the embedding resin.

[0014] The base resin layer of the resin member may have a first portion having a greater thickness and a second portion having a smaller thickness than the first portion. The conductor portion may have a first conductor provided in the first portion and a second conductor provided in the second portion. A portion of the first conductor may be exposed on the first surface of the resin member. A portion of the second conductor may be exposed on the second surface of the resin member.

[0015] The slider may include a connecting conductor that electrically connects the first conductor and the second conductor. Also, the slider may include a grounding conductor that electrically connects the metal base and the conductor portion. A pedestal member may be provided on the slider support portion, and the slider may be disposed via the pedestal member. The resin member may include a pedestal portion that is integral with the resin member, and the slider may be disposed via the pedestal portion. [Effects of the Invention]

[0016] According to one embodiment of the present invention, in a suspension for a disk drive including a slider, wiring, etc., it is possible to stabilize the attitude of a slider placed on a slider placement portion. [Brief explanation of the drawings]

[0017] [Figure 1] 1 is a perspective view of a suspension according to a first embodiment. [Figure 2] FIG. [Figure 3] FIG. 1 is a cross-sectional view showing an example of a disk device. [Figure 4]FIG. 4 is a cross-sectional view of the slider placement portion taken along line F4-F4 in FIG. 2. [Figure 5] FIG. 5 is a cross-sectional view of the slider placement portion taken along line F5-F5 in FIG. 4. [Figure 6] FIG. 10 is a cross-sectional view of a slider placement portion according to a second embodiment. [Figure 7] FIG. 10 is a cross-sectional view of a slider placement portion according to a third embodiment. [Figure 8] FIG. 10 is a cross-sectional view of a slider placement portion according to a fourth embodiment. [Figure 9] FIG. 11 is a cross-sectional view of a slider placement portion according to a fifth embodiment. [Figure 10] FIG. 13 is a cross-sectional view of a slider placement portion according to a sixth embodiment. [Figure 11] FIG. 13 is a cross-sectional view of a slider placement portion according to the seventh embodiment. [Figure 12] FIG. 13 is a plan view showing a conductor portion of a slider placement portion according to the eighth embodiment. [Figure 13] FIG. 23 is a cross-sectional view of a slider placement portion according to a ninth embodiment. [Figure 14] FIG. 23 is a cross-sectional view of a slider placement portion according to a tenth embodiment. [Figure 15] FIG. 23 is a cross-sectional view of a slider placement portion according to an eleventh embodiment. [Figure 16] FIG. 23 is a cross-sectional view of a slider placement portion according to a twelfth embodiment. [Figure 17] FIG. 23 is a cross-sectional view of a slider placement portion according to a thirteenth embodiment. [Figure 18] FIG. 23 is a cross-sectional view of a slider placement portion according to a fourteenth embodiment. [Figure 19] FIG. 23 is a cross-sectional view of a slider placement portion according to the fifteenth embodiment. [Figure 20] FIG. 22 is a cross-sectional view of a slider placement portion according to the sixteenth embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0018] [First embodiment] A suspension including a slider mounting portion according to a first embodiment will be described below with reference to FIGS. 1 to 5. FIG. Fig. 1 is a perspective view of the suspension 1. Fig. 2 is a plan view of a portion of the suspension 1. In Fig. 1, a double-headed arrow X1 indicates the length direction of the suspension 1, and a double-headed arrow Y1 indicates the width direction of the suspension 1.

[0019] 3 is a cross-sectional view showing a typical example of a disk device 10. The disk device 10 includes a case 11 (only a portion of which is shown), a disk 12 that rotates around a spindle, a carriage 14 that rotates around a pivot shaft 13, and a positioning motor 15 that drives the carriage 14. The case 11 is sealed with a lid. A suspension 1 is attached to the tip of an arm 16 of the carriage 14.

[0020] As shown in FIGS. 1 and 2, the suspension 1 includes a base plate 20, a load beam 21, and a flexure 22. The base plate 20 is made of, for example, a stainless steel plate. The base plate 20 is fixed to the carriage 14 (shown in FIG. 3) via a boss portion 23. The thickness of the base plate 20 is, for example, 100-300 μm, but other thicknesses are also possible.

[0021] The load beam 21 extends in the longitudinal direction of the suspension 1. The thickness of the load beam 21 is, for example, 20-40 μm, but may be other thicknesses. The load beam 21 has a first face 21 a on the side where the flexure 22 is disposed, and a second face 21 b on the opposite side to the first face 21 a.

[0022] A dimple portion 30 is formed near the tip of the load beam 21. The dimple portion 30 has a protrusion 30a. The protrusion 30a protrudes from the first surface 21a of the load beam 21 toward the flexure 22. The dimple portion 30 is recessed when viewed from the second surface 21b of the load beam 21. For this reason, the protrusion 30a is sometimes referred to as a dimple in the industry, but it is sufficient that it is a protrusion that protrudes toward the flexure 22.

[0023] The flexure 22 is fixed to the load beam 21 by welds 35 and 36 (parts of which are shown in FIGS. 1 and 2). The flexure 22 extends along the length of the suspension 1 along the load beam 21. The flexure 22 includes a metal base 40 made of a stainless steel plate that is thinner than the load beam 21, and a wiring portion 41 disposed on the surface of the metal base 40. The thickness of the metal base 40 is, for example, 20 μm (12-25 μm), but other thicknesses are also acceptable.

[0024] A slider mounting portion 50 is formed near the tip of the flexure 22. A slider 51 serving as a magnetic head is disposed on the slider mounting portion 50. The slider 51 is provided with an element for magnetically recording data on the disk 12, an element for reading data recorded on the disk 12, and the like.

[0025] The slider mounting portion 50 includes a plate portion 55 that is a part of the metal base 40. In the industry, this plate portion 55 is sometimes referred to as a tongue. In this embodiment, the plate portion 55 is supported by arms 56 and 57 and limiter members 58 and 59 so as to be able to swing relative to the load beam 21. The plate portion 55 includes a first plate 55a and a second plate 55b. The first plate 55a and the second plate 55b can move slightly relative to each other in the width direction of the suspension 1, with a slit 55c as the boundary.

[0026] Actuator elements 61 and 62 are arranged on both sides of the slider 51. The actuator elements 61 and 62 are made of a piezoelectric material such as PZT (lead zirconate titanate). When a voltage is applied to the actuator elements 61 and 62, the piezoelectric material expands and contracts in response to the applied voltage. This allows the tip of the slider 51 to move a small amount in the width direction of the suspension 1 (indicated by the double-headed arrow Y1 in FIG. 1). An element for reading and writing data is provided on the tip of the slider 51.

[0027] 4 is a cross-sectional view of the slider mounting portion 50 taken along line F4-F4 in FIG. 2. FIG. 5 is a cross-sectional view of the slider mounting portion 50 taken along line F5-F5 in FIG. 4. The slider mounting portion 50 includes an opening 70 formed in the metal base 40. The opening 70 is formed at a position where the slider 51 is to be mounted, and is open in the thickness direction of the metal base 40. The width W1 (shown in FIG. 4) of the opening 70 is greater than the width of the slider 51. The length L1 (shown in FIG. 5) of the opening 70 is greater than the length of the slider 51.

[0028] A resin member 71 made of an electrically insulating resin is formed inside the opening 70. The resin member 71 of this embodiment includes a base resin layer 72 formed inside the opening 70 and a potting resin 73 that overlaps the base resin layer 72 inside the opening 70. The base resin layer 72 and the potting resin 73 are each made of an electrically insulating resin such as polyimide.

[0029] As shown in Figures 4 and 5, a conductor portion 80 is disposed in the opening 70. The conductor portion 80 includes a plurality of conductors (for example, a first conductor 81 and a second conductor 82). In this embodiment, the first conductor 81 and the second conductor 82 are described as an example, but the number and shape of the conductors are not limited to the embodiment. The conductor portion 80 is formed on the base resin layer 72 inside the opening 70 and is embedded in the potting resin 73.

[0030] The conductor portion 80 is a longitudinal portion of the wiring portion 41, and is electrically connected to the terminal of the slider 51 via a terminal portion 85 (shown in Figures 2 and 5) and a conductive member 86. The conductors 81 and 82 are mainly made of copper, and a plating layer of gold or the like is provided on the outside of the copper as needed. However, to avoid complicating the drawings, the plating layer is omitted from the drawings. The conductors do not necessarily have to be provided with the plating layer. The conductors 81 and 82 are embedded in the potting resin 73 filled in the opening 70.

[0031] One example of the resin member 71 is composed of a base resin layer 72 and an embedding resin 73. The double-headed arrow X2 in FIG. 4 indicates the thickness direction of the resin member 71. The resin member 71 has a first surface 71a in the thickness direction and a second surface 71b in the thickness direction. A slider support portion 90 is formed on the first surface 71a of the resin member 71. The slider support portion 90 is substantially flat. The slider 51 is fixed to the slider support portion 90 by adhesive.

[0032] An abutment portion 91 is formed on the second surface 71b of the resin member 71. A protrusion 30a (approximately the apex of the dimple portion 30) abuts the abutment portion 91. The protrusion 30a is formed on the load beam 21 and protrudes toward the slider mounting portion 50. The slider mounting portion 50 can swing in the thickness direction of the metal base 40 with the protrusion 30a as a fulcrum.

[0033] According to the slider arrangement section 50 of this embodiment, a substantially flat slider support section 90 is formed on the first surface 71a of the resin member 71 filled in the opening 70. In the step of forming the potting resin 73, the potting resin 73 before hardening is supplied to the opening 70. The surface of the potting resin 73 supplied to the opening 70 is shaped flat using a tool such as a squeegee. A flat slider support section 90 with few irregularities can be formed.

[0034] By placing the slider 51 on the slider support portion 90, the attitude of the slider 51 can be stabilized. This makes it possible to accurately regulate the distance between the disk 12 and the air bearing surface 51a of the slider 51 (the flying height of the slider). Because the flying height of the slider is extremely small, it is important to accurately regulate the attitude of the slider 51.

[0035] According to the slider mounting section 50 of this embodiment, the conductor section 80 is embedded in the resin member 71 filled in the opening 70. The slider 51 is mounted on the first surface 71a of the resin member 71. The protrusions 30a (the apexes of the dimples) are in contact with the second surface 71b of the resin member 71. This reduces the distance from the apex of the dimple to the air bearing surface 51a, contributing to a low profile of the slider mounting section 50. Furthermore, because the slider 51 and the conductor section 80 overlap in the thickness direction, the width of the slider mounting section 50 can be reduced.

[0036] As the disk 12 rotates, an air bearing is formed between the disk 12 and the slider 51. When the carriage 14 is rotated by a positioning motor 15 (shown in FIG. 3), the suspension 1 moves in the radial direction of the disk 12, thereby moving the slider 51 to the desired position on the disk 12. When a voltage is applied to the actuator elements 61 and 62, the actuator elements 61 and 62 expand and contract. This allows the tip side of the slider 51 to move precisely and quickly in the width direction (indicated by the double-headed arrow Y1 in FIG. 1).

[0037] Slider arrangement sections according to second to sixteenth embodiments will be described below with reference to Figures 6 to 20. In these embodiments, components common to the slider arrangement section 50 of the first embodiment are given the same reference numerals as those of the slider arrangement section 50 of the first embodiment, and descriptions thereof will be omitted.

[0038] [Second embodiment] 6 is a cross-sectional view of a slider mounting portion 50A according to the second embodiment. In this slider mounting portion 50A, an auxiliary member 91a is provided at a contact portion 91 of a resin member 71. The auxiliary member 91a is made of a material (e.g., metal) that is harder than the resin member 71. The protrusion 30a of the dimple portion 30 comes into contact with the auxiliary member 91a.

[0039] [Third embodiment] 7 is a cross-sectional view of a slider mounting portion 50B according to the third embodiment. The thickness T1 of the resin member 71 in this embodiment is smaller than the thickness of the metal base 40. In this case, the thickness of the base resin layer 72 may be reduced, or the thickness of the embedding resin 73 may be reduced. By reducing the thickness T1 of the resin member 71, the distance from the apex of the dimple to the air bearing surface of the slider can be further reduced.

[0040] [Fourth embodiment] 8 is a cross-sectional view of a slider mounting portion 50C according to the fourth embodiment. The resin member 71 of this slider mounting portion 50C includes a base resin 100. The base resin 100 is made of an electrically insulating resin such as polyimide, and a contact portion 91 is formed in the base resin 100. An embedding resin 73 overlaps one surface (the upper surface in FIG. 8) of the base resin layer 72. A conductor portion 80 is embedded in the embedding resin 73. The base resin 100 overlaps the other surface (the lower surface in FIG. 8) of the base resin layer 72.

[0041] [Fifth embodiment] Figure 9 is a cross-sectional view of a slider mounting section 50D according to the fifth embodiment. The slider mounting section 50D of this embodiment does not have the base resin layer 72 described in the first embodiment. As shown in Figure 9, a base resin 100 is provided. A conductor section 80 is disposed on the base resin 100. The conductor section 80 is embedded in an embedding resin 73. A contact section 91 is formed in the base resin 100.

[0042] [Sixth embodiment] 10 is a cross-sectional view of a slider mounting section 50E according to the sixth embodiment. This slider mounting section 50E differs from the first embodiment in that it does not have the base resin layer 72 described in the first embodiment. As shown in FIG. 10, a slider support section 90 is formed on a first surface 71a of a resin member 71 made of potting resin 73. A contact section 91 is formed on a second surface 71b of the resin member 71.

[0043] [Seventh embodiment] 11 is a cross-sectional view of a slider mounting section 50F according to the seventh embodiment. In this slider mounting section 50F, the distance W2 between adjacent first conductors 81 and second conductors 82 is greater than the distance between the other conductors. This increases the electrical insulation distance between the dimple section 30 and the conductors 81 and 82.

[0044] [Eighth embodiment] 12 is a plan view showing a portion of a slider mounting portion 50G according to the eighth embodiment. The conductor portion 80 of this slider mounting portion 50G is bent around the dimple portion 30 so as to bypass the dimple portion 30. This makes it possible to increase the electrical insulation distance between the dimple portion 30 and the conductor portion 80.

[0045] [Ninth embodiment] 13 is a cross-sectional view of a slider placement section 50H according to the ninth embodiment. As shown in FIG. 13, the base resin layer 72 includes a first portion 72a having a greater thickness and a second portion 72b having a smaller thickness than the first portion 72a. A first conductor 81 is disposed in the first portion 72a. A second conductor 82 is disposed in the second portion 72b. A portion of the first conductor 81 is exposed on the first surface 71a of the resin member 71. This allows the first conductor 81 to be electrically connected to a terminal (top-bond pad) 51b on the back side of the slider 51.

[0046] [Tenth embodiment] 14 is a cross-sectional view of a slider mounting section 50J according to the tenth embodiment. The base resin layer 72 has a first portion 72a having a greater thickness and a second portion 72b having a smaller thickness. A first conductor 81 is disposed in the first portion 72a. A second conductor 82 is disposed in the second portion 72b. A portion of the first conductor 81 is exposed on the first surface 71a of the resin member 71. A portion of the second conductor 82 is exposed on the second surface 71b of the resin member 71. This allows the second conductor 82 to be electrically connected to the terminal 110 of the flexure 22.

[0047] [Eleventh embodiment] 15 is a cross-sectional view of a slider mounting section 50K according to the eleventh embodiment. This slider mounting section 50K also has a first portion 72a having a large thickness and a second portion 72b having a small thickness. A first conductor 81 is disposed in the first portion 72a. A second conductor 82 is disposed in the second portion 72b. The first conductor 81 and the second conductor 82 that are adjacent to each other are electrically connected to each other by a connecting conductor 120.

[0048] [Twelfth embodiment] 16 is a cross-sectional view of a slider placement section 50L according to the twelfth embodiment. As shown in Fig. 16, a ground conductor 130 is provided on the metal base 40. The second conductor 82 and the ground conductor 130 are electrically connected to each other by a connecting conductor 131.

[0049] [Thirteenth embodiment] FIG. 17 is a cross-sectional view of a slider mounting portion 50M according to the thirteenth embodiment. The slider mounting portion 50M has a base member 140. The base member 140 is mounted on a flat slider support portion 90. A resin member 71 is formed by an embedding resin 73 and a base resin 100. An uncured liquid adhesive is supplied to a gap 141 between the slider 51 and the embedding resin 73. The slider 51 is fixed by the adhesive curing. Note that the base resin 100 does not necessarily have to be provided.

[0050] [Fourteenth embodiment] 18 is a cross-sectional view of a slider mounting section 50N according to the fourteenth embodiment. In this slider mounting section 50N, a slider 51 is mounted on a flat surface 100a of a base resin 100. A resin member 71 is filled in an opening 70. The resin member 71 is made up of a base resin layer 72 and an embedding resin 73. A conductor portion 80 is embedded in the resin member 71. The slider 51 is mounted on the flat surface 100a of the base resin 100. This allows the posture of the slider 51 to be stabilized.

[0051] [Fifteenth embodiment] 19 is a cross-sectional view of a slider placement portion 50P according to the fifteenth embodiment. As shown in FIG. 19, a resin member 71 is formed of a base resin layer 72 and an embedding resin 73. A slider support portion 90 is formed in the base resin layer 72. A contact portion 91 is formed in the embedding resin 73. The pedestal member 140 shown in FIG. 17 may be provided between the base resin layer 72 and the slider 51.

[0052] [16th embodiment] 20 is a cross-sectional view of a slider mounting section 50Q according to the sixteenth embodiment. In the case of this slider mounting section 50Q, a base section 150 is integrally formed with a base resin 100. A gap 151 is formed between the slider 51 and the base resin 100. An uncured liquid adhesive is supplied into this gap 151. When this adhesive hardens, the slider 51 is fixed.

[0053] The slider mounting section 50, 50A-50Q of each of the above-described embodiments has an opening 70 that opens in the thickness direction of the metal base 40, a resin member 71 filled in the opening 70, and a conductor section 80 embedded in the resin member 71. A flat slider support section 90 is formed in the resin member 71, allowing the slider 51 to be mounted in a stable position. Moreover, the metal base 40 does not exist between the slider 51 and the abutment section 91 with which the apex of the dimple contacts. This allows the distance between the apex of the dimple and the air bearing surface of the slider to be reduced.

[0054] It goes without saying that the present invention can be implemented by changing various aspects of the elements that make up the flexure, such as the metal base and wiring section, etc. Furthermore, the openings and resin members formed in the slider placement section, the slider support section, and the contact section can also be implemented in various forms without departing from the scope of the present invention. [Explanation of symbols]

[0055] 1...suspension, 10...disk device, 21...load beam, 22...flexure, 30...dimple portion, 30a...convex portion, 40...metal base, 41...wiring portion, 50...slider arrangement portion, 50A, 50B, 50C, 50D, 50E, 50F, 50G, 50H, 50J, 50K, 50L, 50M, 50N, 50P, 50Q...slider arrangement portion, 51...slider, 55...plate portion, 70...opening, 71...resin member, 71a...first surface, 71b...second surface, 72...base resin layer, 73...embedding resin, 80...conductor portion, 81...first conductor, 82...second conductor, 90...slider support portion, 91...contact portion, 100...base resin, 140...base member, 150...base portion.

Claims

1. A disk drive suspension including a load beam and a flexure, The flexure is Metal base and a slider placement unit for placing a slider; a wiring portion electrically connected to the slider, The slider arrangement portion is an opening formed at a position where the slider is to be disposed and opening in a thickness direction of the metal base; a resin member filled in the opening; a conductor portion embedded in the resin member at a portion of the wiring portion; a slider support portion formed on a first surface of the resin member in a thickness direction, on which the slider is disposed; a contact portion formed on a second surface of the resin member in a thickness direction and contacting a protrusion of the dimple portion of the load beam; A suspension characterized by comprising:

2. 2. The suspension of claim 1, The resin member is a suspension including a base resin layer formed inside the opening, and an embedding resin that embeds the conductor portion while overlapping the base resin layer.

3. 2. The suspension of claim 1, A suspension in which an auxiliary member that comes into contact with the protrusion is disposed on the contact portion.

4. 2. The suspension of claim 1, The resin member has a thickness smaller than that of the metal base.

5. 2. The suspension of claim 1, The resin member is a base resin layer formed inside the opening; a potting resin that is superimposed on one surface of the base resin layer and that embeds the conductor portion; and a base resin layer overlying the other surface of the base resin layer.

6. 2. The suspension of claim 1, The resin member is a suspension made of a potting resin that fills the opening and buries the conductor portion.

7. 2. The suspension of claim 1, The resin member includes a potting resin that fills the opening and buries the conductor portion, and a base resin that overlaps the potting resin.

8. 3. The suspension of claim 2, The base resin layer of the resin member is a first portion having a greater thickness and a second portion having a smaller thickness than the first portion; The conductor portion is a first conductor provided in the first portion; a second conductor provided in the second portion.

9. 9. The suspension of claim 8, A suspension in which a portion of the first conductor is exposed on the first surface of the resin member.

10. 9. The suspension of claim 8, A suspension in which a portion of the second conductor is exposed on the second surface of the resin member.

11. 9. The suspension of claim 8, The suspension has a connecting conductor that electrically connects the first conductor and the second conductor.

12. 2. The suspension of claim 1, The suspension has a ground conductor that electrically connects the metal base and the conductor portion.

13. 2. The suspension of claim 1, A suspension in which a base member is provided on the slider support portion, and the slider is disposed on the slider support portion via the base member.

14. 2. The suspension of claim 1, The resin member is provided with a base portion integral with the resin member, and the slider is disposed on the slider support portion via the base portion.

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