Melting formation apparatus

Abstract

To provide a melting formation apparatus of a transducer.SOLUTION: A melting formation apparatus includes a melting formation mold, a plate, a first contact part, and a second contact part. The melting formation mold includes a lower surface, an upper surface parallel to the lower surface, a hole part formed in a part of the upper surface, and a through hole passing from a bottom surface of the hole part to the lower surface. An exhaust port is formed on a surface of the plate. The first contact part and the second contact part are arranged between the lower surface of the melting formation mold and the surface of the plate and connect the melting formation mold and the plate such that they can be separated. The first contact part surrounds a periphery of the exhaust port exposed on the lower surface of the melting formation mold and a periphery of the exhaust port exposed on the surface of the plate. The second contact part is arranged inside the first contact part, and surrounds a periphery of the through hole and the exhaust port. A region where the first contact part and the second contact part are not arranged, a space is formed between the lower surface of the melting formation mold and the surface of the plate.SELECTED DRAWING: Figure 2

Description

[Technical Field]

[0001] The present specification relates to a melt-molding apparatus for a transducer. [Background technology]

[0002] Patent Document 1 discloses a Bird-bath Resonator Gyroscope (BRG) that uses fused silica as a vibrator, as a gyro capable of achieving high accuracy. Specifically, a fusion molding die is placed on a plate equipped with exhaust and heat dissipation functions. A quartz plate is placed so as to cover a hole formed in the surface of the fusion molding die. While the pressure inside the hole is reduced using the plate's exhaust function, the top surface of the quartz plate is heated with a burner. By melting and deforming the quartz plate so that it fits into the hole, a hemispherical vibrator can be produced. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] US Patent Application Publication No. 2018 / 079129 Summary of the Invention [Problem to be solved by the invention]

[0004] The heat from the heated quartz plate is released to the plate via the contact surface between the quartz plate and the surface of the melting mold, and via the melting mold. This creates a temperature gradient in the quartz plate, where the temperature decreases from the center of the hole to the periphery. This temperature gradient can affect the processed shape of the vibrator. [Means for solving the problem]

[0005] One embodiment of a melt-forming apparatus disclosed herein includes a melt-forming mold, a plate, a first contact portion, and a second contact portion. The melt-forming mold includes a lower surface, an upper surface parallel to the lower surface, a hole formed in a portion of the upper surface, and a through-hole extending from the bottom of the hole to the lower surface. An exhaust port is formed on the surface of the plate. The first and second contact portions are disposed between the lower surface of the melt-forming mold and the surface of the plate, and connect the melt-forming mold and the plate in a separable manner. The first contact portion surrounds the periphery of the through-hole exposed on the lower surface of the melt-forming mold and the periphery of the exhaust port exposed on the surface of the plate. The second contact portion is disposed inside the first contact portion and surrounds the periphery of the through-hole and the exhaust port. A space is formed between the lower surface of the melt-forming mold and the surface of the plate in areas where the first and second contact portions are not disposed.

[0006] The first and second contact portions form a space between the underside of the melt-forming mold and the surface of the plate. Compared to when the entire underside of the melt-forming mold is in contact with the surface of the plate, the contact area between the melt-forming mold and the plate can be reduced, making it possible to reduce the amount of heat released from the melt-forming mold to the plate. In other words, it becomes possible to store heat in the melt-forming mold. This makes it possible to suppress the temperature gradient that occurs in the quartz plate, thereby improving the machining accuracy of the vibrator. [Brief explanation of the drawings]

[0007] [Figure 1] 1 is a top view of a melt-molding apparatus 1 according to a first embodiment. [Figure 2] 1 is a cross-sectional view of a melt-molding apparatus 1 of Example 1. FIG. [Figure 3] FIG. 10 is a cross-sectional view after melt deformation. [Figure 4] 1A and 1B are a top view and a cross-sectional view of a BRG 60. [Figure 5] 10 is a cross-sectional view of a case where a vibrator 31 is produced using a molding die 1020 of a comparative example. [Figure 6] FIG. 10 is a cross-sectional view of a melt-molding apparatus 201 of Example 2. [Figure 7]FIG. 10 is a cross-sectional view of a melt-molding apparatus 301 according to a third embodiment. [Figure 8] 3 is a perspective view of a first contact portion 341 and a second contact portion 342. FIG. [Figure 9] FIG. 10 is a top view of a melt-molding apparatus 401 according to a fourth embodiment. DETAILED DESCRIPTION OF THE INVENTION [Example]

[0008] 1 and 2 show a melt-molding apparatus 1 of Example 1. FIG. 1 is a top view seen from a direction perpendicular to the upper surface 20s of the forming die 20 (z direction). FIG. 2 is a cross-sectional view taken along line II-II in FIG. 1. The melt-molding apparatus 1 includes a plate 10, an exhaust mechanism 11, the forming die 20, a quartz plate 30, a first contact portion 41, a second contact portion 42, and a burner 50. In FIG. 1, the first contact portion 41 and the second contact portion 42 are indicated by dotted lines, and the burner 50 and the exhaust mechanism 11 are not shown.

[0009] Plate 10 is a stainless steel base on which forming die 20 is placed. Exhaust port 10a is formed on surface 10s of plate 10. Exhaust port 10a is connected to exhaust mechanism 11 (e.g., vacuum pump) via exhaust path 10p.

[0010] The forming die 20 is a die for melting and deforming the quartz plate 30 to form a hemispherical vibrator 31. The forming die 20 is made of graphite. In this embodiment, the forming die 20 has a cylindrical shape with a central axis CA. The forming die 20 has a bottom surface 20r, a top surface 20s, a hole 20h, a support 20p, and a through-hole 20e. The bottom surface 20r and the top surface 20s are flat surfaces perpendicular to the central axis CA. The top surface 20s is parallel to the bottom surface 20r. A hole 20h is formed in a part of the top surface 20s. The hole 20h is a deformation space for melting and deforming the quartz plate 30. In this embodiment, the hole 20h has a shape formed by hollowing out a cylinder centered on the central axis CA. The inner wall of the hole 20h has a curved tapered shape with a diameter that narrows toward the bottom. In other words, the central axis CA is an axis that passes through the center of the hole 20h and is perpendicular to the lower surface 20r of the forming die 20. The hole 20h has a bottom surface 20b. A support 20p extending vertically upward from the bottom surface 20b is disposed in the center of the hole 20h. The support 20p is a cylinder with the central axis CA as its central axis. A plurality of through holes 20e that penetrate to the lower surface 20r are formed in the bottom surface 20b. The through holes 20e are in communication with the exhaust port 10a.

[0011] 1, the first contact portion 41 has a closed annular structure. Specifically, it has a circular ring shape centered on a central axis CA. The first contact portion 41 has a constant width W1 in the circumferential direction.

[0012] The second contact portion 42 has an annular structure. Specifically, it has a circular ring shape centered on the central axis CA. Four grooves 42c extending in the radial direction are arranged rotationally symmetrically on the circumference of the second contact portion 42. The second contact portion 42 is divided into four parts by the four grooves 42c. The second contact portion 42 has a constant width W2 in the circumferential direction. The width W2 is smaller than the width W1.

[0013] As shown in FIG. 2 , the first contact portion 41 and the second contact portion 42 are integrally formed with the molding die 20 and protrude downward (in the −z direction) from the lower surface 20r of the molding die 20. The first contact portion 41 and the second contact portion 42 protrude by the same amount. The lower surface 41r of the first contact portion 41 and the lower surface 42r of the second contact portion 42 are located on the same plane. The lower surfaces 41r and 42r are in contact with the surface 10s of the plate 10. In other words, the first contact portion 41 and the second contact portion 42 are disposed between the lower surface 20r of the molding die 20 and the surface 10s of the plate 10, connecting the molding die 20 and the plate 10. Furthermore, a space is formed between the surface 10s and the portion of the second contact portion 42 where the four grooves 42c are formed. The four grooves 42c function as communication paths between the second contact portion 42 and the first contact portion 41.

[0014] The first contact portion 41 surrounds the through-hole 20e exposed on the lower surface 20r and the exhaust port 10a exposed on the front surface 10s. The second contact portion 42 is disposed inside the first contact portion 41 and surrounds the through-hole 20e and the exhaust port 10a. In the area where the first contact portion 41 and the second contact portion 42 are not disposed, a space is formed between the lower surface 20r of the forming mold 20 and the front surface 10s of the plate 10. Specifically, a first space SP1 is formed on the inner periphery side of the second contact portion 42. Furthermore, a second space SP2 is formed between the outer periphery of the second contact portion 42 and the inner periphery of the first contact portion 41. The first space SP1 and the second space SP2 are connected to each other by four grooves 42c.

[0015] The forming die 20 and the plate 10 are in close contact around the entire periphery of the first contact portion 41. This allows the first contact portion 41 to function as a seal that ensures airtightness. The width W1 of the first contact portion 41 may be any width that can maintain a predetermined airtightness.

[0016] Here, when viewed from a direction perpendicular to the top surface of the melt-forming mold (FIG. 1), the area of ​​the first contact portion 41 is defined as a first area, and the area of ​​the second contact portion 42 is defined as a second area. The second area is preferably half or less of the first area.

[0017] A quartz plate 30 is placed on the upper surface 20s of the mold 20 so as to cover the hole 20h. The quartz plate 30 is a material to be processed to form the vibrator. The thickness of the quartz plate 30 is, for example, 100 μm or less. In this embodiment, the quartz plate 30 is square, but it may be a point-symmetric polygon such as a hexagon or octagon, or a circle. The burner 50 is a means for heating the quartz plate 30 with a flame. The burner 50 is movable up and down along a central axis CA.

[0018] (Vibrator manufacturing process) The manufacturing process of the vibrator will be described using Figures 2 and 3. Figure 3(A) is a cross-sectional view similar to Figure 2. Note that Figure 3(A) omits the illustration of the exhaust mechanism 11 and the lower part of the plate 10. Figure 3(B) shows the two-dimensional temperature distribution TP1 of the quartz plate 30. The temperature is higher as the temperature distribution TP1 is positioned higher on the paper. The temperature distribution TP1 can be measured, for example, by an infrared camera.

[0019] In step S1, the mold 20 is placed on the surface 10s of the plate 10. In step S2, a quartz plate 30 is placed on the upper surface 20s. In step S3, the exhaust mechanism 11 is used to evacuate the exhaust port 10a and the first space SP1 to a desired negative pressure (e.g., 90 kPa). The second space SP2 is also evacuated via the groove 42c. The hole 20h is also evacuated via the through-hole 20e. As a result, the quartz plate 30 is adsorbed and fixed to the upper surface 20s, resulting in the state shown in FIG. 2.

[0020] In step S4, a heating process is performed. Specifically, the burner 50 is ignited and lowered at a desired speed. This allows the quartz plate 30 to be melted and deformed into a desired shape, as shown in FIG. 3. In step S5, the burner 50 is raised and extinguished in response to detection of the processing end point. The processing end point can be detected by various methods. For example, a radiation thermometer (not shown) may be used to detect that the temperature of the support 20p has reached a predetermined temperature. In step S6, the unformed region UR of the quartz plate 30 is removed by a CMP method or the like, thereby completing the vibrator 31 shown in FIG. 4.

[0021] In step S7, a Bird-bath Resonator Gyroscope (BRG) is assembled. FIG. 4(A) shows a top view of the assembled BRG 60. FIG. 4(B) shows a cross-sectional view taken along line BB in FIG. 4(A). The BRG 60 includes a transducer 31, a glass substrate 61, and a silicon electrode 62. The transducer 31 includes an anchor 31a and a rim 31r. The anchor 31a is fixed to a fixed portion 61f of the glass substrate 61. The silicon electrode 62 is disposed so as to surround the periphery of the rim 31r.

[0022] (assignment) As a comparative example for explaining the problem, a case where vibrator 31 is produced using molding die 1020 shown in Fig. 5 will be described. Molding die 1020 of the comparative example differs from molding die 20 of this example in that it does not include first contact portion 41 and second contact portion 42. The content of Fig. 5 is the same as that of Fig. 3 described above.

[0023] The comparative molding die 1020 does not have a first contact portion 41 or a second contact portion 42. Therefore, the entire lower surface 1020r of the molding die 1020 is in contact with the surface 10s of the plate 10. The thick arrows Y0 indicate heat conduction, and the greater the number and area of ​​the arrows Y0, the greater the amount of heat transfer. In the comparative molding die 1020, the entire lower surface 1020r serves as a heat conduction path to the plate 10, so the width HW0 of the heat conduction path is very wide. Therefore, as shown by the arrows Y0, a large portion of the heat from the quartz plate 30 is dissipated to the plate 10 via the molding die 20.

[0024] Furthermore, the central axis CA of the burner 50 and the support 20p coincide. Therefore, the heat input is greatest at the support 20p. Therefore, the temperature distribution TP0 of the quartz plate 30 is highest at the center of the support 20p and decreases with increasing distance from the support 20p toward the periphery (see FIG. 5B). That is, a temperature gradient occurs in which the temperature decreases from the center of the hole 20h toward the periphery. As a result, the temperature difference TD0 between the support 20p and the edge 20m of the hole 20h increases. The viscosity (ease of deformation) of the quartz plate 30 that exceeds its softening point correlates with the temperature distribution. Therefore, even if a uniform pressure difference is applied by the exhaust mechanism 11, the higher the temperature, the greater the deformation. As a result, the temperature difference TD0 causes melting and forming to begin locally at locations that reach or exceed the softening temperature, resulting in a problem of the glass vibrator's geometric symmetry being lost.

[0025] (effect) The effects of the melt-molding apparatus 1 of this embodiment will be described using FIG. 3 . In the mold 20 of this embodiment, the first contact portion 41 and the second contact portion 42 form a first space SP1 and a second space SP2 between the lower surface 20r of the mold 20 and the surface 10s of the plate 10. The thermal conductivity of the first space SP1 and the second space SP2 is significantly lower than that of the graphite of the mold 20. Therefore, only the first contact portion 41 and the second contact portion 42 can serve as the heat conduction path to the plate 10. As a result, the width HW1 of the heat conduction path in this embodiment ( FIG. 3 ) can be narrower than the width HW0 of the heat conduction path in the comparative example ( FIG. 5 ). As indicated by the arrow Y1 in FIG. 3 , the amount of heat transferred from the mold 20 to the plate 10 can be significantly reduced. This allows heat to be stored in the mold 20, making the temperature distribution in the mold 20 more uniform. Therefore, the temperature difference TD1 (FIG. 3B) between the support 20p and the edge 20m of the hole 20h in the temperature distribution TP1 of the quartz plate 30 can be made smaller than the conventional temperature difference TD0 (FIG. 5B). By having a smaller temperature difference TD1, the difference in ease of melting and deformation depending on the location can be reduced, making it possible to manufacture a glass vibrator with good shape symmetry.

[0026] In the melt molding apparatus 1 of this embodiment, heat can be stored in the forming die 20, so it is possible to increase the temperature rise gradient of the quartz plate 30. This makes it possible to shorten the processing time. Furthermore, as the processing time is shortened, it is possible to reduce gas consumption and increase the number of times the forming die 20 can be reused.

[0027] The amount of heat input by the burner is greatest at the central axis CA. The second contact portion 42 is closer to the central axis CA than the first contact portion 41, and therefore conducts heat more easily. Therefore, in the melt molding apparatus 1 of this embodiment, the second area of ​​the second contact portion 42 is set to be half or less of the first area of ​​the first contact portion 41. This makes it possible to make the heat conduction path through the second contact portion 42 smaller than the heat conduction path through the first contact portion 41, thereby suppressing heat conduction through the second contact portion 42. This makes it possible to further enhance the effect of suppressing heat exhaust from the forming mold 20 to the plate 10.

[0028] In the melt-molding apparatus 1 of this embodiment, the second space SP2 can be evacuated via the groove 42c. Since the second space SP2 can provide vacuum insulation, it is possible to further enhance the effect of suppressing heat dissipation from the forming mold 20 to the plate 10.

[0029] The area where the grooves 42c are arranged has no heat conduction path, which affects the temperature gradient. Therefore, in the melt-molding device 1 of this embodiment, the multiple grooves 42c are arranged rotationally symmetrically with respect to the central axis CA. This makes it possible to achieve a temperature gradient that is rotationally symmetric with respect to the central axis CA even when the grooves 42c are arranged. This makes it possible to manufacture a glass vibrator with good shape symmetry.

[0030] In the melt-molding apparatus 1 of this embodiment, the first contact portion 41 and the second contact portion 42 are integrally formed on the lower surface 20r of the molding die 20. This allows the surface 10s of the plate 10 to be flat, which makes it easier to process the plate 10 and improves maintainability. [Example]

[0031] 6 shows a cross-sectional view of a melt-molding apparatus 201 of Example 2. Example 2 differs from Example 1 in that a first contact portion 241 and a second contact portion 242 are integrally formed with the plate 10. Portions common to the melt-molding apparatus 1 of Example 1 are given the same reference numerals, and description thereof will be omitted.

[0032] The first contact portion 241 and the second contact portion 242 are formed integrally with the plate 10 and protrude upward (in the +z direction) from the surface 10s. The upper surface 241s of the first contact portion 241 and the upper surface 242s of the second contact portion 242 are located on the same plane. The upper surfaces 241s and 242s are in contact with the lower surface 20r of the forming die 20. Furthermore, the portion of the second contact portion 242 where the four grooves 42c are formed functions as a communicating passage (see FIG. 1).

[0033] The melt-molding apparatus 201 of Example 2 can also form a first space SP1 and a second space SP2 between the lower surface 20r of the forming die 20 and the surface 10s of the plate 10. Therefore, it is possible to obtain the same effects as the melt-molding apparatus 1 of Example 1. Furthermore, since the lower surface 20r of the forming die 20 can be made flat, it is possible to improve the ease of processing the forming die 20. [Example]

[0034] Fig. 7 shows a cross-sectional view of a melt-molding apparatus 301 of Example 3. Example 3 differs from Example 1 in that a first contact portion 341 and a second contact portion 342 are configured separately from the plate 10 and the molding die 20. Portions common to the melt-molding apparatus 1 of Example 1 are given the same reference numerals, and description thereof will be omitted. Fig. 8 shows a perspective view of the first contact portion 341 and the second contact portion 342.

[0035] The first contact portion 341 and the second contact portion 342 have a circular ring shape. As shown in Fig. 8, the second contact portion 342 has four grooves 342c extending in the radial direction and arranged in a rotationally symmetrical manner. The depth of the grooves 342c in the z direction is smaller than the height of the second contact portion 342 in the z direction. As a result, the second contact portion 342 is formed as a single ring.

[0036] The first contact portion 341 and the second contact portion 342 have the same thermal expansion coefficient. This allows the first contact portion 341 and the second contact portion 342 to expand by the same amount in the z direction when heated. Even when heated, both the first contact portion 341 and the second contact portion 342 can maintain a state in which they are in close contact with the plate 10 and the forming die 20.

[0037] Furthermore, it is preferable that the thermal expansion coefficients of the first contact portion 341 and the second contact portion 342 are approximately the same as the thermal expansion coefficient of the plate 10. Furthermore, it is more preferable that the material of the first contact portion 341 and the second contact portion 342 is the same as the material of the plate 10. This makes it possible to make the amount of expansion of the first contact portion 341 and the second contact portion 342 in the planar directions (x and y directions) the same when heated. Therefore, it is possible to prevent the forming die 20 from moving in the planar directions due to a difference in the amount of expansion in the planar directions.

[0038] The first contact portion 341 and the second contact portion 342 are made of a material with a melting point of 800° C. Specific examples of the material include stainless steel, high-melting-point metals (e.g., gold, platinum, zirconia, etc.), various alloys, oxides, etc. These materials may be used alone, in combination, or as a compound.

[0039] The first space SP1 and the second space SP2 can also be formed by the melt-molding apparatus 301 of Example 3. Therefore, it is possible to obtain the same effects as the melt-molding apparatus 1 of Example 1. Furthermore, since both the lower surface 20r of the molding die 20 and the surface 10s of the plate 10 can be made flat, it is possible to improve ease of processing and maintainability. [Example]

[0040] 9 shows a top view of a melt-forming apparatus 401 of Example 4. Example 4 differs from Example 1 in that it further includes a third contact portion 43. The same reference numerals are used to designate parts common to the melt-forming apparatus 1 of Example 1, and descriptions thereof will be omitted.

[0041] The third contact portion 43 has a circular ring shape centered on the central axis CA. The third contact portion 43 is disposed inside the second contact portion 42. Four grooves 43c extending in the radial direction are arranged rotationally symmetrically on the circumference of the third contact portion 43. The four grooves 42c function as communication paths. The first contact portion 41, the second contact portion 42, and the third contact portion 43 may be formed integrally with the molding die 20 (Example 1), may be formed integrally with the plate 10 (Example 2), or may be separate structures (Example 3).

[0042] Here, the area of ​​the third contact portion 43 when viewed from a direction perpendicular to the top surface of the melt-forming mold (FIG. 9) is defined as the third area. The sum of the second area and the third area is preferably half or less of the first area. This makes it possible to make the heat conduction path through the second contact portion 42 and the third contact portion 43 smaller than the heat conduction path through the first contact portion 41, thereby suppressing heat conduction through the second contact portion 42 and the third contact portion 43. This makes it possible to further enhance the effect of suppressing heat dissipation from the forming mold 20 to the plate 10.

[0043] Although specific examples of the present invention have been described above in detail, these are merely examples and do not limit the scope of the claims. The technology described in the claims includes various modifications and alterations of the specific examples exemplified above.

[0044] (Variation) The second and third contact portions, which are disposed inside the first contact portion, may not have grooves. In other words, the second and third contact portions may not have connecting passages. This allows the second and third contact portions to tightly contact the forming die 20 and the plate 10 over the entire circumference of the annular structure. Since heat can be uniformly released from the entire circumference of the second and third contact portions, a concentric temperature gradient around the central axis CA can be achieved. This allows for further improvement in the shape symmetry of the vibrator.

[0045] The shape of the first to third contact portions in a top view is not limited to a circle, but may be a rotationally symmetric polygon.

[0046] The number of grooves formed in the second contact portion and the third contact portion is not limited to four, and may be any number as long as they are arranged rotationally symmetrically.

[0047] The material of the mold 20 is not limited to graphite. Various materials can be used as long as they have a predetermined thermal shock resistance and thermal conductivity, and may be, for example, boron nitride.

[0048] The material of the vibrator is not limited to the quartz plate 30. Any dielectric material that melts and deforms can be used.

[0049] Furthermore, the technical elements described in this specification or drawings may exhibit technical utility alone or in various combinations, and are not limited to the combinations described in the claims at the time of filing. Furthermore, the technologies illustrated in this specification or drawings may achieve multiple objectives simultaneously, and achieving one of those objectives alone is technically useful.

[0050] Aspects of the present technology are listed below. [Aspect 1] A melt-forming device comprising a melt-forming mold, a plate, a first contact portion, and a second contact portion, the melt-forming mold comprises a lower surface, an upper surface parallel to the lower surface, a hole formed in a part of the upper surface, and a through-hole extending from a bottom surface of the hole to the lower surface, An exhaust port is formed on the surface of the plate, the first contact portion and the second contact portion are disposed between a lower surface of the melt-forming mold and a surface of the plate, and connect the melt-forming mold and the plate in a separable manner; the first contact portion surrounds a periphery of the through hole exposed on a lower surface of the melt-forming mold and a periphery of the exhaust port exposed on a surface of the plate, the second contact portion is disposed inside the first contact portion and surrounds the through hole and the exhaust port; In a region where the first contact portion and the second contact portion are not arranged, a space is formed between the lower surface of the melt-forming mold and the surface of the plate. [Aspect 2] When viewed from a direction perpendicular to an upper surface of the melt-forming mold, the first contact portion has a closed annular structure, 2. The melt-forming apparatus according to aspect 1, wherein the melt-forming mold and the plate are in close contact with each other around the entire periphery of the first contact portion. [Aspect 3] When viewed from a direction perpendicular to an upper surface of the melt-forming mold, the second contact portion has an annular structure, The second contact portion is divided into a plurality of portions by grooves extending in the radial direction, a first space is formed on the inner circumferential side of the second contact portion, a second space is formed between an outer periphery of the second contact portion and an inner periphery of the first contact portion; 3. The melt-molding apparatus according to claim 1, wherein the groove connects the first space and the second space. [Aspect 4] When viewed from a direction perpendicular to an upper surface of the melt-forming mold, the second contact portion has a closed annular structure, 3. The melt-forming apparatus according to aspect 1 or 2, wherein the melt-forming mold and the plate are in close contact with each other around the entire periphery of the second contact portion. [Aspect 5] The melt-forming device according to any one of Aspects 1 to 4, wherein the first contact portion and the second contact portion are integrally formed with the melt-forming mold and protrude from a lower surface of the melt-forming mold. [Aspect 6] Aspects 1-4. The melt-molding apparatus according to any one of Aspects 1-4, wherein the first contact portion and the second contact portion are integrally formed with the plate and protrude from a surface of the plate. [Aspect 7] The melt-forming device according to any one of aspects 1 to 4, wherein the first contact portion and the second contact portion are configured separately from the plate and the melt-forming mold. [Aspect 8] 8. The melt-forming apparatus of claim 7, wherein the first contact portion and the second contact portion have substantially the same thermal expansion coefficient as the plate. [Aspect 9] When viewed from a direction perpendicular to an upper surface of the melt-forming mold, the first contact portion has a first area and the second contact portion has a second area; Aspects 9. The melt-forming apparatus of any one of aspects 1-8, wherein the second area is less than or equal to half of the first area. [Aspect 10] a third contact portion disposed inside the second contact portion and surrounding the through hole and the exhaust port; Aspects 1-9. The melt-forming apparatus according to any one of Aspects 1-9, wherein the third contact portion has an annular structure when viewed from a direction perpendicular to an upper surface of the melt-forming mold. [Explanation of symbols]

[0051] 1: Molding device 10: Plate 10s: Surface 10a: Exhaust port 20: Molding mold 20s: Top surface 20h: Hole 20r: Bottom surface 20e: Through hole 41: First contact portion 42: Second contact portion SP1: First space SP2: Second space

Claims

1. A melt-forming device including a melt-forming mold, a plate, a first contact portion, and a second contact portion, the melt-forming mold comprises a lower surface, an upper surface parallel to the lower surface, a hole formed in a part of the upper surface, and a through-hole extending from a bottom surface of the hole to the lower surface, An exhaust port is formed on the surface of the plate, the first contact portion and the second contact portion are disposed between a lower surface of the melt-forming mold and a surface of the plate, and connect the melt-forming mold and the plate in a separable manner; the first contact portion surrounds a periphery of the through hole exposed on a lower surface of the melt-forming mold and a periphery of the exhaust port exposed on a surface of the plate, the second contact portion is disposed inside the first contact portion and surrounds the through hole and the exhaust port; A melt-molding device, wherein a space is formed between the lower surface of the melt-molding mold and the surface of the plate in an area where the first contact portion and the second contact portion are not arranged.

2. When viewed from a direction perpendicular to an upper surface of the melt-forming mold, the first contact portion has a closed annular structure, The melt-forming device according to claim 1 , wherein the melt-forming mold and the plate are in close contact with each other around the entire periphery of the first contact portion.

3. When viewed from a direction perpendicular to an upper surface of the melt-forming mold, the second contact portion has an annular structure, The second contact portion is divided into a plurality of portions by grooves extending in a radial direction, a first space is formed on the inner circumferential side of the second contact portion, a second space is formed between an outer periphery of the second contact portion and an inner periphery of the first contact portion; The melt-molding device according to claim 2 , wherein the groove connects the first space and the second space.

4. When viewed from a direction perpendicular to an upper surface of the melt-forming mold, the second contact portion has a closed annular structure, The melt-forming device according to claim 2 , wherein the melt-forming mold and the plate are in close contact with each other around the entire periphery of the second contact portion.

5. 5. The melt-molding device according to claim 1, wherein the first contact portion and the second contact portion are integrally formed with the melt-molding mold and protrude from a lower surface of the melt-molding mold.

6. The melt-molding device according to any one of claims 1 to 4, wherein the first contact portion and the second contact portion are integrally formed with the plate and protrude from a surface of the plate.

7. 5. The melt-forming device according to claim 1, wherein the first contact portion and the second contact portion are configured as separate bodies from the plate and the melt-forming mold.

8. The melt-forming device according to claim 7 , wherein the first contact portion and the second contact portion have a coefficient of thermal expansion that is substantially the same as a coefficient of thermal expansion of the plate.

9. When viewed from a direction perpendicular to an upper surface of the melt-forming mold, the first contact portion has a first area and the second contact portion has a second area; The melt-forming apparatus of claim 1 , wherein the second area is less than or equal to half of the first area.

10. a third contact portion disposed inside the second contact portion and surrounding the through hole and the exhaust port; The melt-molding device according to claim 1 , wherein the third contact portion has an annular structure when viewed from a direction perpendicular to an upper surface of the melt-molding mold.

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