Probe holder and inspection method

Abstract

To provide a probe holder and an inspection method, enabling an easy confirmation of abrasion wear.SOLUTION: A probe holder is configured to hold a contact probe configured to have contact with each electrode of a contact object at one end side in a longer direction. The probe holder includes a plurality of holder holes each for holding a contact probe. A holder hole includes an opening at one end side of the contact probe. The opening includes a side wall extending in an axial direction of the holder hole from an opening end of the holder hole, and a bottom face part disposed at an end part opposite to the opening end and being an end part in the axial direction of the side wall.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present invention relates to a probe holder and an inspection method. [Background technology]

[0002] Conventionally, when conducting a continuity test or an operating characteristic test on a test object such as a semiconductor integrated circuit or a liquid crystal display device, a conductive contact probe is used to establish an electrical connection between the test object and a signal processing device having a circuit board that outputs a test signal (see, for example, Patent Document 1). In semiconductor wafer-level testing, a probe card on which multiple contact probes are arranged is generally used. In addition, in finished semiconductor product testing, a socket incorporating a probe block on which multiple contact probes are arranged is generally used. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Publication No. 2022-151628 Summary of the Invention [Problem to be solved by the invention]

[0004] In probe holders that hold multiple contact probes, the sliding of the contact probes during inspections and other times gradually wears the wall surfaces of the holder's holes through which the contact probes are inserted. As the holes become worn, the position of the contact probes in the probe holder may change, which could affect the inspection. However, removing the contact probes from the probe holder to check the hole wear was time-consuming. For this reason, there was a demand for a method to easily check the hole wear.

[0005] The present invention has been made in view of the above, and has an object to provide a probe holder and an inspection method that allow for easy confirmation of wear on a hole. [Means for solving the problem]

[0006] In order to solve the above-mentioned problems and achieve the object, the probe holder of the present invention is a probe holder that holds a contact probe that contacts an electrode to be contacted at one end side in the longitudinal direction, and is characterized in that it has a plurality of holder holes that hold the contact probes, and an opening is formed in the holder hole on the one end side of the contact probe, and the opening has a side wall that extends from the opening end of the holder hole in the axial direction of the holder hole, and a bottom portion that is provided at the axial end of the side wall, opposite the opening end.

[0007] In addition, in the probe holder according to the present invention, the bottom surface portion is formed by a plane perpendicular to the axial direction.

[0008] In addition, in the probe holder according to the present invention, the bottom surface portion is formed by a plane inclined with respect to the axial direction.

[0009] Furthermore, the probe holder according to the present invention is characterized in that, in the above invention, the opening has a first opening extending in the axial direction from the opening end of the holder hole and a second opening extending from the first opening to the opposite side to the opening end, the first opening comprising a first side wall extending from the opening end in the axial direction of the holder hole and a hollow plate-shaped first bottom surface portion which is an end of the first side wall in the axial direction, the end opposite to the opening end, extending toward the inside, and the second opening comprising a second side wall extending in the axial direction of the holder hole from the opening end formed by the first bottom surface portion and a hollow plate-shaped second bottom surface portion which is an end of the second side wall in the axial direction, the end opposite to the opening end of the first bottom surface portion, extending toward the inside.

[0010] Furthermore, the probe holder according to the present invention is characterized in that, in the above invention, a hole is formed in the bottom surface portion, and the diameter of the hole in the bottom surface portion is set based on the wear limit of the holder hole.

[0011] Furthermore, the inspection method of the present invention is an inspection method for inspecting a probe holder that holds contact probes that each contact one electrode of a contact target at one end side in the longitudinal direction, and is characterized in that the degree of wear of the holder hole is inspected based on the state of the edge portion of the step in the holder hole that holds the contact probe, as observed when viewed in the axial direction of the holder hole from the opening end on the side from which the one end side of the contact probe extends. [Effects of the Invention]

[0012] According to the present invention, it is possible to easily check the wear of the hole. [Brief explanation of the drawings]

[0013] [Figure 1] FIG. 1 is a perspective view showing the configuration of a probe unit according to an embodiment of the present invention. [Figure 2] FIG. 2 is a partial cross-sectional view showing the configuration of a main part of a probe unit according to an embodiment of the present invention. [Figure 3] FIG. 3 is a cross-sectional view showing the configuration of the main part of the probe holder. [Figure 4] FIG. 4 is a diagram for explaining confirmation of hole wear. [Figure 5] FIG. 5 is a cross-sectional view showing the configuration of a main part of a probe holder according to the first modified example of the present invention. [Figure 6] FIG. 6 is a cross-sectional view showing the configuration of a main part of a probe holder according to a second modified example of the present invention. [Figure 7] FIG. 7 is a cross-sectional view showing the configuration of a main part of a probe holder according to a third modified example of the present invention. [Figure 8] FIG. 8 is a diagram for explaining confirmation of hole wear. DETAILED DESCRIPTION OF THE INVENTION

[0014] Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. However, the present invention is not limited to the following embodiments. Furthermore, the drawings referred to in the following description merely show the shape, size, and positional relationship of the components to the extent that the contents of the present invention can be understood. In other words, the present invention is not limited to only the shape, size, and positional relationship exemplified in each drawing.

[0015] (Embodiment) Fig. 1 is a perspective view showing the configuration of a probe unit according to one embodiment of the present invention. The probe unit 1 shown in Fig. 1 is a device used when testing the electrical characteristics of a semiconductor integrated circuit 100, which is an object to be tested, and is a device that electrically connects the semiconductor integrated circuit 100 and a circuit board 200 that outputs a test signal to the semiconductor integrated circuit 100.

[0016] The probe unit 1 comprises conductive contact probes 2 (hereinafter simply referred to as "probes 2") that contact electrodes of two different contacted bodies, a semiconductor integrated circuit 100 and a circuit board 200, at both ends of the longitudinal direction, a probe holder 3 that stores and holds the multiple probes 2 according to a predetermined pattern, and a holder member 4 that is provided around the probe holder 3 and prevents the semiconductor integrated circuit 100, which comes into contact with the multiple probes 2 during testing, from shifting in position. In this embodiment, the electrodes of the semiconductor integrated circuit 100 may be electrodes in a known form, such as a BGA (Ball Grid Array) formed using solder or leads.

[0017] FIG. 2 is a cross-sectional view showing the configuration of a main part of a probe unit according to an embodiment of the present invention. FIG. 3 is a cross-sectional view showing the configuration of a main part of a probe holder. The probe 2 is formed using a conductive material and includes a first plunger 21 that contacts an electrode of a semiconductor integrated circuit 100 when testing the semiconductor integrated circuit 100, a second plunger 22 that contacts an electrode of a circuit board 200 that includes a test circuit, and a coil spring 23 that is provided between the first plunger 21 and the second plunger 22 and connects the first plunger 21 and the second plunger 22 so that they can move forward and backward. In FIG. 2, the first plunger 21, the second plunger 22, and the coil spring 23 that constitute the probe 2 share the same axis. That is, the central axes of the first plunger 21, the second plunger 22, and the coil spring 23 are located on the same straight line. Note that the "same axis" includes deviations due to distortion of individual components, manufacturing errors, etc. When the probe 2 contacts the semiconductor integrated circuit 100, the coil spring 23 expands and contracts in the axial direction, thereby cushioning the impact on the electrodes of the semiconductor integrated circuit 100 and applying a load to the semiconductor integrated circuit 100 and the circuit board 200.

[0018] The first plunger 21 has a tapered tip shape and a tip portion 21a that comes into contact with an electrode of the semiconductor integrated circuit 100. The first plunger 21 is movable in the axial direction by the expansion and contraction action of the coil spring 23, and is urged toward the semiconductor integrated circuit 100 by the elastic force of the coil spring 23, so that it comes into contact with the electrode of the semiconductor integrated circuit 100. In this embodiment, the tip portion 21a is described as being crown-shaped with a plurality of claws, but it may be conical, spherical, or have another shape.

[0019] Second plunger 22 has a tapered tip shape, and the tip comes into contact with an electrode of circuit board 200. Second plunger 22 is movable in the axial direction by the expansion and contraction action of coil spring 23, and is urged toward circuit board 200 by the elastic force of coil spring 23, so that second plunger 22 comes into contact with the electrode of circuit board 200.

[0020] The coil spring 23 has a tightly wound portion 23a attached to the base end side of the first plunger 21 and a loosely wound portion 23b attached to the base end side of the second plunger 22 and wound at predetermined intervals. The coil spring 23 is formed, for example, by winding a single conductive wire.

[0021] An end of the tightly wound portion 23a is press-fitted, for example, into the base end side of the first plunger 21. Meanwhile, an end of the loosely wound portion 23b is press-fitted into the base end side of the second plunger 22. The first plunger 21 and the second plunger 22 are joined to the coil spring 23 by the winding force of the spring and / or by soldering. The probe 2 expands and contracts in the axial direction due to the expansion and contraction of the loosely wound portion 23b.

[0022] The probe holder 3 is made of an insulating material such as resin, machinable ceramic, or silicon, and is formed by laminating a first member 31 located on the upper surface side of Fig. 2 and a second member 32 located on the lower surface side. The first member 31 and the second member 32 are each formed with the same number of holder holes 33 and 34 for accommodating a plurality of probes 2, and the holder holes 33 and 34 for accommodating the probes 2 are formed so that their axes coincide with each other. The positions at which the holder holes 33 and 34 are formed are determined according to the wiring pattern of the semiconductor integrated circuit 100.

[0023] The holder holes 33 and 34 each have a stepped hole shape with a different diameter along the penetration direction. That is, the holder hole 33 is made up of a small diameter portion 33a having an opening on the upper end surface of the probe holder 3 and a large diameter portion 33b having a larger diameter than the small diameter portion 33a. On the other hand, the holder hole 34 is made up of a small diameter portion 34a having an opening on the lower end surface of the probe holder 3 and a large diameter portion 34b having a larger diameter than the small diameter portion 34a. The shapes of the holder holes 33 and 34 are determined depending on the configuration of the probe 2 to be accommodated.

[0024] Here, the small diameter portion 33a through which the first plunger 21 is inserted has a hole 331 extending upward from the large diameter portion 33b, and an opening 332 extending from the hole 331 and having an opening on the upper end surface (see FIG. 3). The axes of the hole 331 and the opening 332 are aligned on the axis N1 and are coincident. The diameters of the hole 331, the opening 332, and the large diameter portion 33b are in the following relationship: hole 331 < opening 332 < large diameter portion 33b. The diameter of the opening 332 may be equal to the diameter of the large diameter portion 33b, or the diameter of the opening 332 may be larger.

[0025] The opening 332 has a hole formed therein that communicates with the hole 331, and is an opening made up of a bottom surface 3321 that forms the bottom surface of the opening 332, and a cylindrical side wall 3322 that goes around the axis N1. The annular bottom surface formed by the bottom surface 3321 is perpendicular to the axis N1. Furthermore, the side wall 3322 has a wall surface that extends from the bottom surface 3321 toward the opening and is parallel to the axis N1. Therefore, the opening 332 forms a cylindrical space. The depth of the opening 332 (the length in the direction of the axis N1) can be measured visually using a magnifying glass, a microscope, or the like. The height is set to such an extent that the edge 3323 of the step formed by the hole 331 and the opening 332 can be confirmed by observation with a microscope.

[0026] The diameter R1 of the hole 331, which is the diameter of the hole in the bottom surface portion 3321, is set to be slightly larger than the diameter of the insertion portion of the first plunger 21 through the hole 331. Furthermore, the diameter R2 (>R1) of the opening 332 is set, for example, based on a diameter that can ensure the positional accuracy of the probe 2. This diameter that can ensure the positional accuracy is based on a wear limit that is set within a range in which the probe can properly contact the test object even if the bottom surface portion 3321 (edge ​​3323) or the hole 331 is partially or entirely worn.

[0027] During testing of the semiconductor integrated circuit 100, the coil spring 23 is compressed along the longitudinal direction due to contact loads from the semiconductor integrated circuit 100 and the circuit board 200. A test signal supplied from the circuit board 200 to the semiconductor integrated circuit 100 during testing travels from the electrode 201 of the circuit board 200 through the second plunger 22, the tightly wound portion 23a, and the first plunger 21 of the probe 2 to the connection electrode 101 of the semiconductor integrated circuit 100.

[0028] Furthermore, since the tip of tip portion 21a is tapered, even if an oxide film is formed on the surface of connection electrode 101, the oxide film can be broken through and the tip of tip portion 21a can be brought into direct contact with connection electrode 101.

[0029] When the inspection is repeated, the wall surface of the holder hole 33 is scraped and worn due to the extension and retraction of the probe 2, etc. FIG. 4 is a diagram for explaining how to check the wear of the hole. In the example shown in FIG. 4, the probe 2 (first plunger 21) slides on the wall surface of the hole 331 on the left side of the drawing, scraping the wall surface. In this case, in the state before wear (see FIG. 4(a)), the entire circumference of the edge 3323 of the step formed by the hole 331 and the opening 332 can be clearly seen. On the other hand, after wear, the worn portion 3323a of the edge 3323 of the step formed by the hole 331 and the opening 332 is displaced toward the side wall 3322 of the opening 332 (see FIG. 4(b)). Note that the dashed line in FIG. 4(b) indicates the position of the edge before wear. In this way, the degree of wear of holder hole 33 can be inspected based on the state of the edge portion of the step (edge ​​3323 in this case) observed when viewed from the open end in the axial direction of the holder hole. By checking this unclear portion, the user can determine the degree of wear of the holder hole.

[0030] According to the above-described embodiment, an opening 332 equivalent to a counterbore hole is formed on the upper end surface of the holder hole, and a step is formed near the opening by the hole 331 and the opening 332. This allows the user to easily check the wear on the hole by checking the edge of the step. In contrast, some conventional probe holders have chamfered or tapered edges, but they do not have the step configuration formed by the inner wall surface and a stepped shape as in the present embodiment. Therefore, wear on the edge cannot be visually checked, and it is not possible to grasp the wear as in the present embodiment. Furthermore, it is difficult to accurately control and process the maximum diameter of a tapered shape, making it difficult to create a tapered shape that allows wear to be sensed.

[0031] (Variation 1) Next, a first modification of this embodiment will be described with reference to Fig. 5. Fig. 5 is a cross-sectional view showing the configuration of the main part of the probe holder according to the first modification of the present invention. Note that the same components as those described above in Fig. 2 and the like are given the same reference numerals. This first modification has an opening 333 instead of the opening 332 of the holder hole 33 according to the above-described embodiment.

[0032] The opening 333 has a hole communicating with the hole 331, and is composed of a bottom surface 3331 forming the bottom surface of the opening 333, and a cylindrical side wall 3332 that circles around the axis N1. The bottom surface formed by the bottom surface 3331 is conical and inclined with respect to the axis N1. Specifically, the bottom surface 3331 forms a conical shape that slopes toward the opening as it extends inward. Therefore, the angle of the edge 3333 of the step formed by the bottom surface of the bottom surface 3331 and the wall surface of the hole 331 on the holder component side (opposite the hollow space side) is an acute angle. Furthermore, the wall surface of the side wall 3332 extending from the bottom surface 3331 toward the opening extends parallel to the axis N1. Therefore, the opening 333 forms a cylindrical space. The depth of the opening 333 (the length in the direction of the axis N1) is set to such an extent that the step formed by the hole 331 and the opening 333 can be visually confirmed.

[0033] The diameter of the hole in the bottom surface portion 3331, which is also the diameter of the opening 333 (corresponding to the above-mentioned diameter R2), is the same as that of the opening 332 described above. Furthermore, when the inspection is repeated, the wall surface of the holder hole is scraped and worn away by the extension and contraction of probe 2, etc., and after the wear, the worn part of edge 3333 of the step formed by hole 331 and opening 333 becomes unclear. By checking this unclear part, the user can determine the degree of wear of the holder hole.

[0034] According to the above-mentioned variant example 1, as in the above-mentioned embodiment, an opening 333 equivalent to a countersink hole is formed on the upper end surface of the holder hole, and a step portion is formed near the opening by the hole portion 331 and the opening 333, so that the user can easily check the wear of the hole by checking the edge portion of the step portion.

[0035] Furthermore, according to the present modified example 1, by making the bottom surface inclined with respect to the axis N1, the state of reflection of observation light changes, making observation easier than in the above-described embodiment.

[0036] (Variation 2) Next, a second modification of this embodiment will be described with reference to Fig. 6. Fig. 6 is a cross-sectional view showing the configuration of the main part of the probe holder according to the second modification of the present invention. Note that the same components as those described above in Fig. 2 and the like are given the same reference numerals. This second modification has an opening 334 instead of the opening 332 of the holder hole 33 according to the above-described embodiment.

[0037] The opening 334 has a hole communicating with the hole 331. The opening 334 is composed of a bottom surface 3341 forming the bottom surface of the opening 334 and a cylindrical side wall 3342 that circles around the axis N1. The bottom surface formed by the bottom surface 3341 has a hollow conical shape inclined with respect to the axis N1. Specifically, the bottom surface 3341 has a conical shape that approaches the opposite side from the opening side (the hole 331 side) as it approaches the interior. Therefore, the angle of the edge 3343 of the step formed by the bottom surface of the bottom surface 3341 and the wall surface of the hole 331 on the holder component side is an obtuse angle. Furthermore, the wall surface of the side wall 3342 extending from the bottom surface 3341 toward the opening extends parallel to the axis N1. Therefore, the opening 334 forms a cylindrical space. The depth of the opening 334 (the length in the direction of the axis N1) is set to such an extent that the step formed by the hole 331 and the opening 334 can be visually confirmed.

[0038] The diameter of the hole in the bottom surface portion 3341, which is also the diameter of the opening 334 (corresponding to the above-mentioned diameter R2), is the same as that of the opening 332 described above. Furthermore, when the inspection is repeated, the wall surface of the holder hole is scraped and worn away by the extension and contraction of the probe 2, and after the wear, the worn part of the edge 3343 of the step formed by the hole part 331 and the opening part 334 becomes unclear. By checking this unclear part, the user can determine the degree of wear of the holder hole.

[0039] According to the above-mentioned modified example 2, as in the above-mentioned embodiment, an opening 334 equivalent to a countersink hole is formed on the upper end surface of the holder hole, and a step is formed near the opening by the hole portion 331 and the opening 334, so that the user can easily check the wear of the hole by checking the edge portion of the step.

[0040] Furthermore, according to the present modified example 2, by making the bottom surface inclined with respect to the axis N1, the state of reflection of observation light changes compared to the above-described embodiment, making observation easier.

[0041] (Variation 3) Next, a third modification of the present embodiment will be described with reference to Figs. 7 and 8. Fig. 7 is a cross-sectional view showing the configuration of the main part of the probe holder according to the third modification of the present invention. Note that the same components as those described above in Fig. 2 and the like are given the same reference numerals. The third modification has an opening 335 instead of the opening 332 of the holder hole 33 according to the above-described embodiment.

[0042] The opening 335 is made up of a first opening 335a provided on the upper end surface (opening end) side and a second opening 335b extending from the first opening 335a to the side opposite the upper end surface and continuing to the hole 331. The first opening 335a and the second opening 335b are each made up of a side portion extending in the axial direction and a bottom portion in which a hole is formed. The bottom portion may have the configurations of Modifications 1 and 2. The depth of the opening 335 is set to such an extent that the step of the opening 335 or the step formed by the hole 331 and the opening 335 can be visually confirmed.

[0043] The diameter of the sidewall of the first opening 335a is the same as the diameter R2 of the opening 332 (see FIG. 3). The diameter of the sidewall of the second opening 335b, which is the diameter of the hole at the bottom of the first opening, is set to be slightly larger than the diameter R1 of the hole 331 and smaller than the diameter (diameter R2) of the first opening 335a. The diameter R2 is set, for example, based on the amount of wear that requires replacement of the probe holder, and the diameter R3 is set, for example, based on the amount of wear that prompts replacement of the probe holder, for example, when using a magnetic field. The diameter of the hole at the bottom of the second opening 335b is the same as the diameter R1 of the hole 331 (see FIG. 3).

[0044] When the inspection is repeated, the wall surface of the holder hole is scraped and worn due to the extension and retraction of the probe 2, etc. FIG. 8 is a diagram for explaining how to check the wear of the hole. In the example shown in FIG. 8, the probe 2 (first plunger 21) slides on the wall surface of the hole 331 on the left side of the drawing, scraping the wall surface. In this case, in the state before the wear (see FIG. 8(a)), the entire circumference of the edge 3351 of the step formed by the first opening 335a and the second opening 335b and the entire circumference of the edge 3352 of the step formed by the second opening 335b and the hole 331 can be clearly seen. On the other hand, after the wear, the worn portion 3352a of the edge 3351 is displaced toward the side wall of the second opening 335b (see FIG. 8(b)). Note that the dashed line in FIG. 8(b) indicates the edge position before the wear. The user can determine the degree of wear of the holder hole by checking this unclear area. In the third modification, when a part of the edge 3351 is flush with the wall surface of the first opening 335a, it can be used as an indication that the probe holder should be replaced the next time it is used.

[0045] According to the above-mentioned third modified example, as in the above-mentioned embodiment, an opening 335 equivalent to a countersink hole is formed on the upper end surface of the holder hole, and a step is formed near the opening by the hole portion 331 and the opening 335, so that the user can easily check the wear of the hole by checking the edge portion of the step.

[0046] Furthermore, according to this variant example 3, two steps are formed at the opening, allowing the user to grasp the degree of wear in two stages, so that the degree of wear and the timing of replacement can be grasped in more detail than in the embodiment.

[0047] Although the embodiments for carrying out the present invention have been described above, the present invention should not be limited to only the above-described embodiments. For example, in the above-described embodiments and modifications, examples have been described in which the amount of wear on the edge portion is determined by visually checking the wear on the edge portion, but it is also possible to image the opening of the hole from the axial direction, calculate the amount of wear on the edge portion by image processing, and determine whether the probe holder needs to be replaced.

[0048] As described above, the probe holder and inspection method according to the present invention are useful for easily checking the wear of a hole. [Explanation of symbols]

[0049] 1 probe unit 2 Contact probe (probe) 3 Probe holder 4 Holder member 21 First plunger 21a Tip 22 Second plunger 23 Coil spring 31 First member 32 Second member 33, 34 Holder holes 33a, 34a Small diameter section 33b, 34b Large diameter section 331 Hole 332, 333, 334, 335 Openings 335a 1st opening 335b 2nd opening 100 Semiconductor Integrated Circuit 200 Circuit Boards

Claims

1. A probe holder that holds a contact probe that contacts an electrode to be contacted at one end in a longitudinal direction, a plurality of holder holes for holding the contact probes are formed; an opening is formed in the holder hole on the side of the one end of the contact probe, The opening is a side wall extending from an open end of the holder hole in an axial direction of the holder hole; a bottom surface portion provided at an end portion of the side wall in the axial direction, the end portion being opposite the open end; having A probe holder characterized by:

2. The bottom surface portion is formed by a plane perpendicular to the axial direction.

2. The probe holder according to claim 1.

3. The bottom surface portion is formed by a plane inclined with respect to the axial direction.

2. The probe holder according to claim 1.

4. The opening is a first opening extending in the axial direction from an open end of the holder hole; a second opening extending from the first opening to a side opposite to the opening end; and The first opening is a first side wall extending from the open end in the axial direction of the holder hole; a hollow plate-shaped first bottom surface portion that is an end portion of the first side wall in the axial direction, the first bottom surface portion extending from an end portion opposite the open end toward an inner side; It consists of The second opening is a second side wall extending from an open end formed by the first bottom surface portion in the axial direction of the holder hole; a hollow plate-shaped second bottom surface portion that is an end portion of the second side wall in the axial direction and extends inward from an end portion opposite to an open end of the first bottom surface portion; 2. The probe holder according to claim 1, comprising:

5. A hole is formed in the bottom surface portion, The diameter of the hole in the bottom surface portion is set based on the wear limit of the holder hole.

2. The probe holder according to claim 1.

6. 1. An inspection method for inspecting a probe holder that holds contact probes that each contact one electrode of a contact target at one end side in a longitudinal direction, comprising: the degree of wear of the holder hole is inspected based on the state of an edge portion of a step portion in the holder hole observed when viewed in the axial direction of the holder hole from the open end on the side from which the one end side of the contact probe extends, An inspection method characterized by:

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