Measurement method and measurement system

Abstract

To provide a measurement method and a measurement system capable of accurately measuring the surface condition of a measurement target object.SOLUTION: According to the present disclosure, the measurement method includes: causing electromagnetic waves to be incident so as to undergo multiple reflections between mutually opposing first and second surfaces; receiving the electromagnetic waves after the multiple reflections; analyzing frequency components of a modulated signal of the received electromagnetic waves; and calculating, on the basis of the frequency components, at least one of position, displacement, and velocity for at least one of the first and second surfaces, at least one of the first and second surfaces being in motion.SELECTED DRAWING: Figure 2

Description

[Technical Field]

[0001] The present disclosure relates to a measurement method and a measurement system. [Background technology]

[0002] 2. Description of the Related Art Conventionally, there are known techniques for measuring the state of a surface, such as the state of an adhesive surface between multiple layers of a sample having multiple layers.

[0003] For example, Patent Document 1 discloses a technology for measuring the state of the adhesive surface of an object to be measured by applying vibration to the object to be measured, irradiating electromagnetic waves onto the object to be measured, and measuring the reflected electromagnetic waves, thereby measuring the vibration state of the object to be measured. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] International Publication No. 2023 / 080217 Summary of the Invention [Problem to be solved by the invention]

[0005] There is a demand for accurate measurement of the surface condition of an object to be measured.

[0006] Therefore, an object of the present disclosure is to provide a measurement method and a measurement system that are capable of measuring the surface condition of a measurement object with high accuracy. [Means for solving the problem]

[0007] According to some embodiments, a measurement method includes the steps of: irradiating an electromagnetic wave so that the electromagnetic wave is reflected multiple times between a first surface and a second surface facing each other; receiving the electromagnetic wave after the multiple reflections; analyzing a frequency component of a modulated signal of the received electromagnetic wave; and calculating at least one of a position, a displacement, and a velocity of at least one of the first surface and the second surface based on the frequency component, wherein at least one of the first surface and the second surface is moving. According to such a measurement method, it is possible to accurately measure the state of the surface of a measurement object.

[0008] In the measuring method according to one embodiment, at least one of the first surface and the second surface may vibrate.

[0009] The measurement method according to one embodiment may further include a step of calculating a vibration amplitude for at least one of the first surface and the second surface that is vibrating based on the frequency components, thereby making it possible to calculate the vibration amplitude.

[0010] The measurement method according to one embodiment may further include the step of vibrating the first surface.

[0011] In one embodiment of the measuring method, the second surface may vibrate in response to vibration of the first surface.

[0012] The measurement method according to one embodiment may further include determining a contact state between the second surface and an opposing surface facing the second surface based on the frequency components, thereby making it possible to determine the type of contact state.

[0013] In one embodiment of the measuring method, the contact state may be any one of the following: the second surface and the opposing surface are in contact with each other; the second surface and the opposing surface are in contact but not in contact with each other; and the second surface and the opposing surface are not in contact with each other. This makes it possible to determine the type of contact state.

[0014] In one embodiment of the measuring method, the step of determining the contact state may determine the contact state based on a fundamental frequency component and a harmonic frequency component contained in the frequency components, the fundamental frequency component being a frequency component of a frequency at which the first surface vibrates in the vibrating step, and the harmonic frequency component being a frequency component of a harmonic of the fundamental frequency component. This makes it possible to determine the contact state based on the fundamental frequency component and the harmonic frequency component.

[0015] In one embodiment, the step of determining the contact state may determine the contact state based on a ratio between the fundamental frequency component and the harmonic frequency component, thereby making it possible to determine the contact state based on the ratio between the fundamental frequency component and the harmonic frequency component.

[0016] A measurement system according to some embodiments includes a generator that emits electromagnetic waves so that the waves are reflected multiple times between opposing first and second surfaces, a receiver that receives the electromagnetic waves after the multiple reflections, a measuring device that analyzes frequency components of a modulated signal of the received electromagnetic waves, and a control device that calculates at least one of a position, a displacement, and a velocity of at least one of the first surface and the second surface based on the frequency components, wherein at least one of the first surface and the second surface is moving. Such a measurement system enables accurate measurement of the surface condition of a measurement object.

[0017] In one embodiment, the measurement system further includes a vibration unit, the first surface being a lower surface of the vibration unit, and the vibration unit may be capable of applying vibration to the first layer in contact with the first surface, thereby allowing the vibration unit to apply vibration to the first layer in contact with the first surface.

[0018] In one embodiment of the measurement system, the vibration unit may be capable of applying a load to the first layer and changing the magnitude of the load, thereby enabling measurement while changing the magnitude of the load.

[0019] In one embodiment of the measurement system, the second surface may be an upper surface of a second layer below the first layer, and the control device may determine whether or not there is a gap between the lower surface of the first layer and the second surface based on the frequency components of the modulated signal analyzed while changing the magnitude of the load. This makes it possible to determine whether or not there is a gap between the lower surface of the first layer and the second surface by analyzing while changing the magnitude of the load. [Effects of the Invention]

[0020] According to the present disclosure, it is possible to provide a measurement method and a measurement system that are capable of measuring the surface condition of a measurement object with high accuracy. [Brief explanation of the drawings]

[0021] [Figure 1] 1 is a block diagram showing a schematic configuration of a measurement system according to a first embodiment. [Figure 2] FIG. 2 is a diagram showing a state of measurement by the measurement system according to the first embodiment. [Figure 3] 3 is a diagram showing how electromagnetic waves travel in the measurement system according to the first embodiment. FIG. [Figure 4] 4 is a flowchart showing the operation of the measurement system according to the first embodiment. [Figure 5] FIG. 10 is a block diagram showing a schematic configuration of a measurement system according to a second embodiment. [Figure 6] FIG. 10 is a diagram showing a state of measurement by the measurement system according to the second embodiment. [Figure 7] FIG. 10 is a diagram showing how electromagnetic waves travel in a measurement system according to a second embodiment. [Figure 8] 10 is a flowchart showing the operation of the measurement system according to the second embodiment. [Figure 9] FIG. 1 shows a state in which there is a gap between the first and second layers of the sample. [Figure 10] FIG. 10 is a diagram showing a state in which a load is applied to a sample by a vibrating unit. DETAILED DESCRIPTION OF THE INVENTION

[0022] Hereinafter, embodiments of the present disclosure will be described with reference to the drawings.

[0023] (First embodiment) Fig. 1 is a block diagram showing a schematic configuration of a measurement system 10 according to the first embodiment. Fig. 2 is a diagram showing how measurement is performed by the measurement system 10 according to the first embodiment. The configuration and functions of the measurement system 10 according to the first embodiment will be described with reference to Figs. 1 and 2.

[0024] The measurement system 10 is a device that applies an electromagnetic wave between a first surface and a second surface so that the wave is reflected multiple times between the first surface and the second surface, and measures the state of at least one of the first surface and the second surface based on the frequency component of the modulated signal of the electromagnetic wave that has been reflected multiple times between the first surface and the second surface.

[0025] 1 and 2, the first surface is the bottom surface of the measurement object 20, and the second surface is the top surface of the reflector 30.

[0026] The object to be measured 20 is not particularly limited, and may have a shape such as a rectangular parallelepiped or a cylinder. The bottom surface of the object to be measured 20 is made of a material capable of reflecting electromagnetic waves. The bottom surface of the object to be measured 20 may be made of, for example, a metal.

[0027] The reflector 30 may have, but is not limited to, a rectangular parallelepiped, a cylindrical shape, or the like. The upper surface of the reflector 30 is made of a material capable of reflecting electromagnetic waves. The upper surface of the reflector 30 may be made of, for example, a metal.

[0028] At least one of the first and second surfaces onto which the measurement system 10 emits electromagnetic waves is moving. In the first embodiment, a case where the measurement object 20 moves up and down above the reflecting plate 30 will be described as an example. In the first embodiment, it is assumed that the measurement object 20 is vibrating above the reflecting plate 30. Since the measurement object 20 is vibrating, the lower surface of the measurement object 20, which is the first surface, is also vibrating.

[0029] As shown in FIG. 1, the measurement system 10 includes a generating unit 11, a receiving unit 12, a measuring device 13, and a control device 14.

[0030] The generating unit 11 applies an electromagnetic wave between the lower surface of the object to be measured 20 and the upper surface of the reflector 30 so that the wave is reflected multiple times between the lower surface of the object to be measured 20 and the upper surface of the reflector 30 .

[0031] As shown in FIG. 2, the generating unit 11 includes a signal generator 111, a divider 112, and an antenna 113.

[0032] The signal generator 111 is a device capable of generating an electromagnetic wave of a predetermined frequency and a predetermined amplitude. The signal generator 111 may generate an electromagnetic wave of a frequency in the sub-terahertz band, for example. The signal generator 111 outputs the generated electromagnetic wave to the divider 112.

[0033] Divider 112 divides the electromagnetic wave supplied from signal generator 111 at a predetermined power ratio. The predetermined power ratio may be, for example, 1:1. Divider 112 outputs one of the electromagnetic waves divided at the predetermined power ratio to antenna 113, and outputs the other to mixer 122 of receiving unit 12 as an LO signal. Divider 112 may be a divider of any configuration that can divide the electromagnetic wave at the predetermined power ratio.

[0034] The antenna 113 inputs the electromagnetic waves supplied from the divider 112 between the lower surface of the object to be measured 20 and the upper surface of the reflector 30. At this time, the antenna 113 inputs the electromagnetic waves at a predetermined angle of incidence θ onto the upper surface of the reflector 30 so that the electromagnetic waves are reflected multiple times between the lower surface of the object to be measured 20 and the upper surface of the reflector 30. The number of times the electromagnetic waves are reflected between the lower surface of the object to be measured 20 and the upper surface of the reflector 30 may be any number of times greater than or equal to two. The operator of the measurement system 10 can adjust the number of times the electromagnetic waves are reflected by adjusting the angle of incidence θ. The antenna 113 may be, for example, a horn antenna, but is not limited thereto.

[0035] The receiving unit 12 receives the electromagnetic waves that have been reflected multiple times between the lower surface of the object to be measured 20 and the upper surface of the reflector 30 .

[0036] As shown in FIG. 2, the receiving unit 12 includes an antenna 121 and a mixer 122.

[0037] Antenna 121 receives the electromagnetic waves that have been reflected multiple times between the bottom surface of object to be measured 20 and the top surface of reflector 30. Antenna 121 outputs the received electromagnetic waves as an RF signal to mixer 122. Antenna 121 may be, for example, a horn antenna, although it is not limited thereto.

[0038] The mixer 122 receives an RF signal from the antenna 121. The mixer 122 also receives an LO signal from the divider 112. The mixer 122 mixes the received RF signal and LO signal to down-convert the RF signal. The mixer 122 outputs the IF signal obtained by down-converting the RF signal to the measuring device 13. The mixer 122 may have any configuration.

[0039] Here, with reference to FIG. 3, the state in which an electromagnetic wave travels between the lower surface of the measurement object 20 and the upper surface of the reflector 30 while being reflected multiple times will be described.

[0040] In this embodiment, the measurement object 20 vibrates up and down above the reflecting plate 30. The left side of Fig. 3 shows a state in which the vibrating measurement object 20 is raised. The right side of Fig. 3 shows a state in which the vibrating measurement object 20 is lowered. As shown in Fig. 3, the position of the bottom surface of the measurement object 20 differs by a distance d between the raised state and the lowered state of the measurement object 20.

[0041] As shown in Figure 3, when the object to be measured 20 vibrates, the path length of the electromagnetic wave that travels between the lower surface of the object to be measured 20 and the upper surface of the reflector 30 while being reflected multiple times varies with the frequency at which the object to be measured 20 is vibrating.

[0042] The amplitude by which the path length of the electromagnetic wave varies is proportional to the vibration amplitude of the measurement object 20. The amplitude by which the path length of the electromagnetic wave varies increases as the number of times the electromagnetic wave is reflected between the lower surface of the measurement object 20 and the upper surface of the reflecting plate 30 increases.

[0043] In this way, the path length of the electromagnetic wave traveling between the lower surface of the measurement object 20 and the upper surface of the reflector 30 varies due to the vibration of the measurement object 20. As a result, the electromagnetic wave received by the antenna 121 becomes a modulated electromagnetic wave.

[0044] At this time, the frequency of the modulated signal of the electromagnetic wave received by the antenna 121 includes many frequencies at which the object to be measured 20 is vibrating. In addition, the magnitude of the amplitude of the modulated signal of the electromagnetic wave received by the antenna 121 is proportional to the vibration amplitude of the object to be measured 20 and the number of reflections of the electromagnetic wave.

[0045] Therefore, the more times the electromagnetic wave is reflected, the greater the amplitude of the modulated signal of the electromagnetic wave received by antenna 121, and measurement system 10 can measure the vibration amplitude of measurement object 20 with a high S / N ratio.

[0046] The measuring device 13 analyzes the frequency components of the modulated electromagnetic wave signal supplied as an IF signal from the mixer 122 of the receiving unit 12. Here, analyzing the frequency components of the modulated electromagnetic wave signal means calculating the magnitude of each frequency component of the modulated electromagnetic wave signal.

[0047] The measuring device 13 analyzes the frequency components of the modulated signal of the electromagnetic wave supplied from the mixer 122 and outputs the results to the control device 14 .

[0048] The measuring device 13 may be any device capable of analyzing the frequency components of an electromagnetic wave, such as a spectrum analyzer.

[0049] The control device 14 may be a general-purpose PC (Personal Computer), or may be a dedicated computer that functions as a control device for the measurement system 10. The control device 14 is capable of communicating with the generating unit 11 and the measuring device 13.

[0050] The control device 14 can control the signal generator 111 of the generating unit 11 to generate an electromagnetic wave of a predetermined frequency and a predetermined amplitude.

[0051] When the control device 14 acquires the analysis result of the frequency components of the modulated signal of the electromagnetic wave analyzed by the measurement device 13, the control device 14 calculates the vibration amplitude of the bottom surface of the measurement object 20 based on the acquired frequency components.

[0052] The control device 14 calculates the vibration amplitude of the lower surface of the object 20 to be measured based on the magnitude of the frequency component of the vibration frequency of the object 20 to be measured, which is included in the frequency components acquired from the measurement device 13 .

[0053] The control device 14 may display the calculated vibration amplitude of the lower surface of the measurement object 20 on a display provided in the control device 14.

[0054] 2 shows a configuration in which the electromagnetic wave is directly supplied from the divider 112 to the antenna 113, but the generating unit 11 may include a multiplier between the divider 112 and the antenna 113. The multiplier may, for example, increase the frequency of the electromagnetic wave supplied from the divider 112 by 10 times and output the increased frequency to the antenna 113. When the generating unit 11 is configured to include a multiplier, the signal generator 111 may output an electromagnetic wave having a frequency lower by the multiplication factor of the multiplier.

[0055] When generating unit 11 is configured to include a multiplier, shortening the distance between the multiplier and antenna 113 shortens the distance over which high-frequency electromagnetic waves are transmitted, thereby reducing the effect of dielectric loss on the electromagnetic waves. In this case, if a waveguide is used instead of a coaxial cable to connect the multiplier and antenna 113, the effect of dielectric loss on the electromagnetic waves can be further reduced.

[0056] If the generating unit 11 is configured to include a multiplier, the receiving unit 12 also includes a multiplier between the divider 112 and the mixer 122 .

[0057] Furthermore, in the first embodiment, the case where the measurement object 20 is vibrating has been described as an example, but the measurement object 20 may be in any state as long as it is moving.

[0058] When the measurement object 20 is moving, the control device 14 can calculate at least one of the position, displacement, and velocity of the bottom surface of the measurement object 20 based on the frequency component of the modulated signal acquired from the measurement device 13. At this time, the more times the electromagnetic wave is reflected, the more the modulated signal acquired from the measurement device 13 fluctuates depending on the position, displacement, and velocity of the bottom surface of the measurement object 20. Therefore, by reflecting the electromagnetic wave multiple times, the measurement system 10 can accurately measure at least one of the position, displacement, and velocity of the bottom surface of the measurement object 20 with a high S / N ratio.

[0059] When the measurement object 20 is vibrating, the control device 14 can calculate the vibration amplitude of the bottom surface of the measurement object 20 as the displacement of the bottom surface of the measurement object 20.

[0060] The operation of the measurement system 10 according to the first embodiment will be described with reference to the flowchart shown in FIG.

[0061] The generating unit 11 applies an electromagnetic wave between the lower surface of the object to be measured 20 and the upper surface of the reflecting plate 30 so that the wave is reflected multiple times between the lower surface of the object to be measured 20 and the upper surface of the reflecting plate 30 (step S101).

[0062] The receiving unit 12 receives the electromagnetic waves that have been reflected multiple times between the lower surface of the measurement object 20 and the upper surface of the reflector 30 (step S102).

[0063] The measuring device 13 analyzes the frequency components of the modulated signal of the electromagnetic wave supplied as an IF signal from the mixer 122 of the receiving unit 12 (step S103).

[0064] The control device 14 calculates the vibration amplitude of the lower surface of the measurement object 20 based on the magnitude of the frequency component of the vibration frequency of the measurement object 20 included in the frequency components acquired from the measurement device 13 (step S104).

[0065] The measurement system 10 according to the first embodiment described above can accurately measure the condition of the surface of the object to be measured. More specifically, in the measurement system 10, the generator 11 emits an electromagnetic wave so that the electromagnetic wave is reflected multiple times between the bottom surface of the object to be measured 20 (the first surface) and the top surface of the reflector 30 (the second surface). The receiver 12 receives the electromagnetic wave that has been reflected multiple times, and the measurement device 13 analyzes the frequency components of the modulated signal of the received electromagnetic wave. The control device 14 of the measurement system 10 then calculates at least one of the position, displacement, and velocity of the bottom surface of the object to be measured 20 based on the frequency components of the modulated signal analyzed by the measurement device 13. Because the measurement system 10 according to the first embodiment calculates the condition of the bottom surface of the object to be measured 20 by analyzing the frequency components of the modulated signal of the electromagnetic wave that has been reflected multiple times, the condition of the bottom surface of the object to be measured 20 can accurately measure the condition of the bottom surface of the object to be measured 20.

[0066] (Second embodiment) Fig. 5 is a block diagram showing a schematic configuration of a measurement system 10a according to the second embodiment. Fig. 6 is a diagram showing how measurement is performed by the measurement system 10a according to the second embodiment. The configuration and functions of the measurement system 10a according to the second embodiment will be described with reference to Figs. 5 and 6.

[0067] Regarding the measurement system 10a of the second embodiment, the differences from the measurement system 10 of the first embodiment will be mainly described, and explanations of points common or similar to the measurement system 10 of the first embodiment will be omitted as appropriate.

[0068] 5, the measurement system 10a according to the second embodiment includes a generating unit 11, a receiving unit 12, a measuring device 13, a control device 14, and a vibrating unit 15. The measurement system 10a according to the second embodiment differs from the measurement system 10 according to the first embodiment mainly in that it includes the vibrating unit 15.

[0069] The measurement system 10a according to the second embodiment also causes an electromagnetic wave to be incident between the first surface and the second surface so that the wave is reflected multiple times between the first surface and the second surface.

[0070] In the second embodiment, the first surface is the lower surface of the vibrating part 15, and the second surface is the upper surface of the second layer 42 of the sample 40. The second layer 42 of the sample 40 is illustrated in FIG.

[0071] The vibration unit 15 is a device capable of applying vibrations to the sample 40. The vibration unit 15 may be any device capable of applying vibrations to the sample 40, and may be, for example, an ultrasonic horn. When the vibration unit 15 is an ultrasonic horn, the vibration unit 15 can apply ultrasonic vibrations to the sample 40. The vibration unit 15 applies vibrations to the sample 40 at a predetermined frequency and a predetermined amplitude.

[0072] 6, the vibration part 15 is used in a state where it is pressed against the sample 40. In a state where the vibration part 15 is pressed against the sample 40, the vibration part 15 can apply vibration to the sample 40.

[0073] The lower surface of the vibration section 15 is made of a material capable of reflecting electromagnetic waves. The lower surface of the vibration section 15 may be made of, for example, a metal.

[0074] As shown in FIG. 6, the sample 40 includes a first layer 41, a second layer 42, and a third layer 43.

[0075] The first layer 41 is a layer through which electromagnetic waves can pass. The first layer 41 is made of a material through which electromagnetic waves can pass. The first layer 41 may be made of, for example, a polymer, an inorganic material, or the like.

[0076] The second layer 42 is a layer capable of reflecting electromagnetic waves. The second layer 42 is made of a material that has high reflective properties and is capable of reflecting electromagnetic waves. The second layer 42 may be made of, for example, a metal.

[0077] The third layer 43 is a layer that bonds the first layer 41 and the second layer 42. The third layer 43 is made of a material that is permeable to electromagnetic waves. The third layer 43 may be made of an adhesive made of, for example, a polymer, an inorganic material, or the like.

[0078] The sample 40 does not necessarily include the third layer 43. In this case, the first layer 41 and the second layer 42 may be directly bonded together by the micro-anchor effect.

[0079] The measurement system 10a vibrates the vibrating unit 15 at a predetermined frequency and a predetermined amplitude while the vibrating unit 15 is pressed against the first layer 41 of the sample 40. This causes the lower surface of the vibrating unit 15, which is the first surface, to vibrate, and in response, the upper surface of the second layer 42, which is the second surface, to vibrate.

[0080] While the vibrating unit 15 is vibrating, the antenna 113 of the generating unit 11 causes the electromagnetic wave supplied from the divider 112 to be incident between the lower surface of the vibrating unit 15 and the upper surface of the second layer 42 of the sample 40. At this time, the antenna 113 causes the electromagnetic wave to be incident on the upper surface of the second layer 42 at a predetermined incident angle θ so that the electromagnetic wave is reflected multiple times between the lower surface of the vibrating unit 15 and the upper surface of the second layer 42 of the sample 40.

[0081] The antenna 121 of the receiving section 12 receives the electromagnetic wave that has been reflected multiple times between the lower surface of the vibrating section 15 and the upper surface of the second layer 42 of the sample 40 .

[0082] Here, with reference to FIG. 7, a description will be given of how the electromagnetic wave travels between the lower surface of the vibration part 15 and the upper surface of the second layer 42 of the sample 40 while being reflected multiple times.

[0083] In the sample 40, the electromagnetic wave passes through the first layer 41 and the third layer 43, and is reflected by the upper surface of the second layer .

[0084] The electromagnetic waves reflected by the upper surface of the second layer 42 pass through the third layer 43 and the first layer 41 again, and are reflected by the lower surface of the vibrating part 15. Thereafter, the electromagnetic waves are reflected multiple times by the upper surface of the second layer 42 and the lower surface of the vibrating part 15, and are received by the antenna 121.

[0085] When vibrating section 15 vibrates, the upper surface of second layer 42 also vibrates in response to the lower surface of vibrating section 15. At this time, how the upper surface of second layer 42 vibrates depends on the state of contact between first layer 41 and second layer 42.

[0086] When the first layer 41 and the second layer 42 are well bonded to each other, the upper surface of the second layer 42 vibrates substantially in synchronization with the lower surface of the vibrating section 15. When the first layer 41 and the second layer 42 are in contact but not bonded to each other, the upper surface of the second layer 42 vibrates asynchronously with the lower surface of the vibrating section 15. When there is a gap between the first layer 41 and the second layer 42 and the first layer 41 and the second layer 42 are not in contact with each other, the upper surface of the second layer 42 also vibrates asynchronously with the lower surface of the vibrating section 15. When the first layer 41 and the second layer 42 are not in contact with each other, the degree of asynchrony is greater than when the first layer 41 and the second layer 42 are in contact with each other but not bonded to each other.

[0087] When the vibrating part 15 vibrates, the path length of the electromagnetic wave traveling between the bottom surface of the vibrating part 15 and the top surface of the second layer 42 of the sample 40 varies. At this time, if the first layer 41 and the second layer 42 are well bonded to each other, the path length of the electromagnetic wave varies mainly at the fundamental frequency, which is the frequency at which the vibrating part 15 vibrates. Furthermore, if the first layer 41 and the second layer 42 are in contact but not bonded to each other, or if the first layer 41 and the second layer 42 are not in contact with each other, the path length of the electromagnetic wave varies not only at the fundamental frequency but also at frequencies that are harmonics of the fundamental frequency.

[0088] At this time, the amplitude of the change in the path length of the electromagnetic wave increases as the number of times the electromagnetic wave is reflected between the lower surface of the vibration unit 15 and the upper surface of the second layer 42 of the sample 40 increases. Therefore, the more times the electromagnetic wave is reflected, the greater the amplitude of the modulated signal of the electromagnetic wave received by the antenna 121, and the measurement system 10a can measure the vibration amplitude with a high S / N ratio.

[0089] The amplitude of the modulation signal of the electromagnetic wave depends on the vibration amplitude of the lower surface of the vibrating part 15 and the vibration amplitude of the upper surface of the second layer 42 of the sample 40. However, since the vibration amplitude of the lower surface of the vibrating part 15 is known, the vibration amplitude of the upper surface of the second layer 42 of the sample 40 can be calculated by subtracting the vibration amplitude of the lower surface of the vibrating part 15.

[0090] The measuring device 13 analyzes the frequency components of the modulated signal of the electromagnetic wave supplied as an IF signal from the mixer 122 of the receiving unit 12. The measuring device 13 outputs the results of analyzing the frequency components of the modulated signal of the electromagnetic wave supplied from the mixer 122 to the control device 14.

[0091] When the control device 14 acquires the analysis result of the frequency components of the modulated signal of the electromagnetic wave analyzed by the measurement device 13, it calculates the vibration amplitude of the upper surface of the second layer 42 of the sample 40 based on the acquired frequency components.

[0092] In addition, when the control device 14 acquires the analysis results of the frequency components of the modulated signal of the electromagnetic waves analyzed by the measuring device 13, it determines the contact state between the lower surface of the first layer 41 facing the upper surface of the second layer 42 and the upper surface of the second layer 42 based on the acquired frequency components.

[0093] The control device 14 may determine whether the contact state between the lower surface of the first layer 41 and the upper surface of the second layer 42 is in any of the following states. The lower surface of the first layer 41 and the upper surface of the second layer 42 are bonded together. The lower surface of the first layer 41 and the upper surface of the second layer 42 are in contact with each other but are not bonded to each other. The lower surface of the first layer 41 and the upper surface of the second layer 42 are not in contact with each other.

[0094] The control device 14 may determine the contact state based on the fundamental frequency component and the harmonic frequency components contained in the acquired frequency components. Here, the fundamental frequency component is the frequency component of the frequency at which the vibration unit 15 vibrates. The harmonic frequency components are frequency components that are harmonics of the fundamental frequency component.

[0095] For example, if the vibrating part vibrates at 35 kHz, the fundamental frequency component is the frequency component of 35 kHz, and the harmonic frequency component is the sum of frequency components of 70 kHz, 105 kHz, etc., which are harmonics of 35 kHz.

[0096] The control device 14 may determine the contact state between the lower surface of the first layer 41 and the upper surface of the second layer 42 based on the ratio between the fundamental frequency component contained in the acquired frequency components and the harmonic frequency component contained in the acquired frequency components.

[0097] For example, when the lower surface of the first layer 41 and the upper surface of the second layer 42 are bonded together, the ratio of harmonic frequency components to the fundamental frequency component is small. When the lower surface of the first layer 41 and the upper surface of the second layer 42 are in contact but not bonded together, the ratio of harmonic frequency components to the fundamental frequency component is larger than when the lower surface of the first layer 41 and the upper surface of the second layer 42 are bonded together. When the lower surface of the first layer 41 and the upper surface of the second layer 42 are not in contact with each other, the ratio of harmonic frequency components to the fundamental frequency component is the same as when the lower surface of the first layer 41 and the upper surface of the second layer 42 are in contact but not bonded together, or only the fundamental frequency component is detected. For example, if the bottom surface of the first layer 41 and the top surface of the second layer 42 are not in contact with each other and there is a large gap between them, the vibration of the bottom surface of the first layer 41 is not transmitted to the top surface of the second layer 42. Therefore, depending on the load conditions of the vibrating unit 15, only the fundamental frequency component, which is the vibration frequency component of the vibrating unit 15, is detected.

[0098] The operation of the measurement system 10a according to the second embodiment will be described with reference to the flowchart shown in FIG.

[0099] The vibration unit 15 applies vibration to the sample 40 at a predetermined frequency and a predetermined amplitude (step S201).

[0100] The generating unit 11 inputs electromagnetic waves between the lower surface of the vibrating unit 15 and the upper surface of the second layer 42 of the sample 40 so that the waves are reflected multiple times between the lower surface of the vibrating unit 15 and the upper surface of the second layer 42 of the sample 40 (step S202).

[0101] The receiving unit 12 receives the electromagnetic wave that has been reflected multiple times between the lower surface of the vibrating unit 15 and the upper surface of the second layer 42 of the sample 40 (step S203).

[0102] The measuring device 13 analyzes the frequency components of the modulated signal of the electromagnetic wave supplied as an IF signal from the mixer 122 of the receiving unit 12 (step S204).

[0103] The control device 14 calculates the vibration amplitude of the upper surface of the second layer 42 based on the frequency components acquired from the measuring device 13. The control device 14 also determines the contact state between the lower surface of the first layer 41 and the upper surface of the second layer 42 based on the frequency components acquired from the measuring device 13 (step S205).

[0104] The measurement system 10a according to the second embodiment described above can accurately measure the surface condition of the object to be measured. More specifically, in the measurement system 10a, the generator 11 emits an electromagnetic wave so that the electromagnetic wave is reflected multiple times between the lower surface of the vibrating unit 15 (the first surface) and the upper surface of the second layer 42 of the sample 40 (the second surface). The receiver 12 receives the electromagnetic wave that has been reflected multiple times, and the measurement device 13 analyzes the frequency components of the modulated signal of the received electromagnetic wave. The control device 14 of the measurement system 10a then calculates the vibration amplitude of the upper surface of the second layer 42 based on the frequency components of the modulated signal analyzed by the measurement device 13. Because the measurement system 10a according to the second embodiment calculates the vibration amplitude of the upper surface of the second layer 42 by analyzing the frequency components of the modulated signal of the electromagnetic wave that has been reflected multiple times, the measurement system 10a according to the second embodiment can accurately measure the condition of the upper surface of the second layer 42.

[0105] <Applying load to the sample by the vibrating part> The vibration unit 15 may be capable of applying a load to the first layer 41 of the sample 40. Furthermore, when applying a load, the vibration unit 15 may be capable of changing the magnitude of the load applied to the sample 40.

[0106] 9 shows an example of a configuration in which there is a gap 201 in the third layer 43. In this case, if the load applied by the vibrating section 15 to the first layer 41 is small, the first layer 41 and the second layer 42 are not in contact with each other due to the presence of the gap 201.

[0107] In this case, the vibrations applied to the first layer 41 by the vibrating section 15 do not reach the second layer 42, and therefore the top surface of the second layer 42 hardly vibrates.

[0108] FIG. 10 shows a state in which the load applied by the vibrating section 15 to the first layer 41 is increased, so that the lower surface of the first layer 41 and the upper surface of the second layer 42 come into contact with each other.

[0109] In this case, the vibrations applied to the first layer 41 by the vibrating section 15 are transmitted to the second layer 42, causing the upper surface of the second layer 42 to vibrate.

[0110] In this way, the vibration state of the upper surface of the second layer 42 differs depending on whether the lower surface of the first layer 41 and the upper surface of the second layer 42 are in contact with each other.

[0111] The measuring device 13 analyzes the frequency components of the modulated electromagnetic wave signal supplied as an IF signal from the mixer 122 of the receiving unit 12, and the frequency components of the modulated electromagnetic wave signal change depending on the vibration state of the upper surface of the second layer 42.

[0112] Therefore, if the acquired frequency components change significantly at a certain point when the load applied by vibrating unit 15 to first layer 41 is changed, this means that there is a gap between the lower surface of first layer 41 and the upper surface of second layer 42. If the acquired frequency components change significantly at a certain point when the load applied by vibrating unit 15 to first layer 41 is changed, control device 14 can determine that there is a gap between the lower surface of first layer 41 and the upper surface of second layer 42.

[0113] <Size of vibrating part> When the state of the upper surface of the second layer 42 of the sample 40 is measured by the measurement system 10a according to the second embodiment, the area resolution of the measurement range of the upper surface of the second layer 42 depends on the area of ​​the vibrating part 15.

[0114] If the area of ​​the vibrating part 15 is large, the resolution will be low, but if the entire sample 40 is measured while changing the position of the vibrating part 15, the entire sample 40 can be measured with a small number of measurements.

[0115] If the area of ​​the vibrating part 15 is small, the resolution becomes high, but when measuring the entire sample 40 while changing the position of the vibrating part 15, the number of measurements must be increased in order to measure the entire sample 40.

[0116] The area of ​​the vibration section 15 may be determined appropriately depending on the required resolution.

[0117] It will be apparent to those skilled in the art that the present disclosure can be embodied in other specific forms other than the above-described embodiments without departing from the spirit or essential characteristics thereof. Therefore, the foregoing description is illustrative and not limiting. The scope of the disclosure is defined not by the foregoing description but by the appended claims. All modifications within the range of equivalents of any modifications are intended to be encompassed therein.

[0118] For example, the arrangement and number of each component described above are not limited to the above description and the illustrations in the drawings, and may be arbitrarily configured as long as the functions thereof can be realized.

[0119] For example, in the above-described embodiment, an example was given in which the generating unit 11 incidents electromagnetic waves and causes them to be reflected multiple times between the first surface and the second surface, but the generating unit 11 may incident sound waves instead of electromagnetic waves.

[0120] For example, in the above-described embodiment, the receiving unit 12 is configured to include the mixer 122, but the receiving unit 12 does not have to include the mixer 122. In this case, the receiving unit 12 may output the RF signal directly to the measuring device 13 without down-converting it. In this case, the measuring device 13 may analyze the frequency components of the modulated signal of the electromagnetic wave based on the electromagnetic wave supplied as the RF signal.

[0121] For example, some of the processing operations executed in the control device 14 in the above-described embodiment may be executed in the measurement device 13.

[0122] For example, in the above embodiment, the measuring device 13 and the control device 14 are described as independent devices, but the measuring device 13 and the control device 14 may be integrated into one device. [Explanation of symbols]

[0123] 10, 10a Measurement System 11 Generation section 12 Receiving unit 13 Measuring equipment 14 Control device 15 Vibration unit 20 Measurement object 30 Reflector 40 samples 41 First Layer 42 Second Layer 43 Third Layer 111 Signal Generator 112 Divider 113 Antenna 121 Antenna 122 Mixer 201 void

Claims

1. Incidentally, an electromagnetic wave is incident on the first surface and the second surface so as to be reflected multiple times between the first surface and the second surface facing each other; receiving the electromagnetic wave after multiple reflections; analyzing the frequency components of the modulated signal of the received electromagnetic wave; calculating at least one of a position, a displacement, and a velocity of at least one of the first surface and the second surface based on the frequency components; Including, A measurement method wherein at least one of the first surface and the second surface is moving.

2. 2. The measurement method according to claim 1, A measuring method, wherein at least one of the first surface and the second surface is vibrating.

3. 3. The measurement method according to claim 2, The measurement method further includes a step of calculating a vibration amplitude for at least one of the first surface and the second surface that is vibrating based on the frequency components.

4. 3. The measurement method according to claim 2, The method further comprises vibrating the first surface.

5. 5. The measurement method according to claim 4, The second surface vibrates in response to vibration of the first surface.

6. 6. The measurement method according to claim 5, The measurement method further includes a step of determining a contact state between the second surface and an opposing surface opposing the second surface based on the frequency components.

7. 7. The measurement method according to claim 6, the contact state is one of: the second surface and the opposing surface are adhered to each other; the second surface and the opposing surface are in contact but not adhered to each other; and the second surface and the opposing surface are not in contact with each other.

8. 7. The measurement method according to claim 6, the step of determining the contact state includes determining the contact state based on a fundamental frequency component included in the frequency components and a harmonic frequency component included in the frequency components; the fundamental frequency component is a frequency component of a frequency at which the first surface vibrates in the vibrating step, The harmonic frequency components are frequency components that are harmonics of the fundamental frequency component.

9. 9. The measurement method according to claim 8, The step of determining the contact state determines the contact state based on a ratio between the fundamental frequency component and the harmonic frequency component.

10. a generating unit that applies an electromagnetic wave so that the electromagnetic wave is reflected multiple times between a first surface and a second surface that face each other; a receiving unit that receives the electromagnetic wave reflected multiple times; a measuring device that analyzes the frequency components of the modulated signal of the received electromagnetic wave; a control device that calculates at least one of a position, a displacement, and a velocity of at least one of the first surface and the second surface based on the frequency component; Equipped with A measurement system wherein at least one of the first surface and the second surface is in motion.

11. 11. The measurement system according to claim 10, Further comprising a vibration unit, the first surface is a lower surface of the vibration unit, A measurement system, wherein the vibration unit is capable of applying vibration to a first layer in contact with the first surface.

12. 12. The measurement system according to claim 11, The vibration unit is a load can be applied to the first layer; A measurement system capable of varying the magnitude of the load.

13. 13. The measurement system of claim 12, the second surface is a top surface of a second layer below the first layer; The control device determines whether or not there is a gap between the lower surface of the first layer and the second surface based on the frequency components of the modulated signal analyzed while changing the magnitude of the load.

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