Inspection device

Abstract

To provide an inspection device that allows detachable attachment of an imaging section forming a camera unit by using an attachment and detachment mechanism, and that facilitates attachment and detachment operations of the imaging section and can reduce adjustment operations after the attachment.SOLUTION: In an inspection device 10 that moves an imaging unit 20 having an image forming section such as a lens and a camera body 210 being an imaging section outputting image data, relative to a body to be inspected 12 to acquire image data of the body to be inspected 12, thereby conducting an inspection, the image forming section is arranged in a housing of the imaging unit 20, and the camera body 210 is configured to be detachably attached to the housing of the imaging unit 20 by using an attachment and detachment mechanism.SELECTED DRAWING: Figure 3

Description

[Technical Field]

[0001] The present invention relates to an inspection device. [Background technology]

[0002] In an inspection device that inspects an object under inspection, such as an electronic circuit board (hereinafter simply referred to as a "board"), the inspection is performed using preset inspection information on image data obtained by capturing an image of the board. The device (e.g., an image sensor) of the camera unit that captures the image of the object under inspection changes to a new generation every few years, improving its performance. In addition, the components to be inspected on the object under inspection also change to a new generation every few years. For this reason, in such an inspection device, a method has been proposed in which the camera unit (a combination of an optical system such as a lens and an image sensor) that captures image data of the object under inspection is replaced with a camera unit having an image sensor with a different resolution, for example (see, for example, Patent Document 1). [Prior art documents] [Patent documents]

[0003] [Patent Document 1] International Publication No. 2013 / 136416 Summary of the Invention [Problem to be solved by the invention]

[0004] However, when replacing only the camera unit, the replacement usually requires time because the lens mount is used for attachment and detachment. Furthermore, the attachment position is often different from before the replacement. This poses the problem of increased adjustment work (calibration work) required after the camera unit replacement, which takes time.

[0005] The present invention has been made in consideration of these problems, and aims to provide an inspection device that makes it possible to detach the imaging section that constitutes a camera unit having an imaging section consisting of an optical system or the like and an imaging section consisting of an image sensor or the like via an attachment / detachment mechanism, and that can improve the reproducibility of the position when the imaging section is replaced and attached, thereby making it easier to attach and detach the imaging section and reducing the adjustment work after attachment. [Means for solving the problem]

[0006] In order to solve the above problem, the inspection device of the present invention is an inspection device that performs inspection by acquiring image data of the object to be inspected by moving an imaging unit having an imaging section that forms an image of the object to be inspected and an imaging section that captures the image and outputs image data relative to the object to be inspected, wherein the imaging section is arranged within a housing of the imaging unit, and the imaging section is configured to be attachable and detachable to the housing of the imaging unit via an attachment and detachment mechanism.

[0007] In such an inspection device according to the present invention, the attachment / detachment mechanism has a first member attached to the housing side and a second member attached to the imaging unit side, one of the first member and the second member is provided with a recess having a circular cross section, and the other of the first member and the second member is provided with a cylindrical protrusion, and is configured so that the protrusion is fitted into the recess to fix the second member to the first member, and it is desirable that the attachment / detachment mechanism has a positioning unit that rotates the second member relative to the first member, causing the protrusion to rotate along the recess, thereby positioning the second member relative to the first member.

[0008] Furthermore, in such an inspection device according to the present invention, it is preferable that a cutout portion is provided on the inner peripheral surface of the recess, and an elastic portion protruding outward is provided on the outer peripheral surface of the convex portion, and when the second member is attached to the first member, the convex portion is fitted into the recess so that the elastic portion is inserted into the cutout portion, and when the second member is rotated relative to the first member, the elastic portion is pressed against the inner peripheral surface of the recess, thereby pressing the outer peripheral surface of the convex portion against the inner peripheral surface of the recess, thereby fixing the second member to the first member.

[0009] In addition, in the inspection device according to the present invention, the positioning portion has a positioning pin provided on one of the first member and the second member, and abutting portion provided on the other of the first member and the second member, which abuts against the positioning pin when the convex portion is rotated along the concave portion to position the second member relative to the first member, It is preferable that the positioning pin is made of a magnetic material, a part of the abutment portion is made of a magnet, and the abutment portion is attracted to the positioning pin to perform positioning.

[0010] In addition, in such an inspection device according to the present invention, it is preferable that the abutment portion is composed of a contact portion formed of a magnetic material and a magnet, and that when the abutment portion is attracted to the positioning pin, the contact portion comes into contact with the positioning pin.

[0011] Furthermore, in such an inspection device according to the present invention, it is preferable that a fixing screw extending in a direction opposite to the second member is attached to the first member, and that the second member is provided with a claw portion that engages with the shank of the fixing screw when rotated and positioned relative to the first member, and that when the second member is positioned relative to the first member, the fixing screw is tightened so that the head of the fixing screw presses the claw portion of the second member against the first member, thereby fixing the second member to the first member.

[0012] Furthermore, it is preferable that such an inspection device according to the present invention has a cover member having one end attached to the first member and the other end positioned so as to be inserted between the claw portion of the second member and the head of the fixing screw, and when the screw is tightened, the head presses the claw portion of the second member against the first member via the other end of the cover member.

[0013] Furthermore, in such an inspection device according to the present invention, it is preferable that the second member has a fixed member that fits into the first member, a movable member that is attached to the fixed member and supports the imaging unit, and an adjustment unit that rotates the movable member relative to the fixed member to adjust the rotational position of the imaging unit relative to the second member.

[0014] In addition, in the inspection device according to the present invention, a notch is provided on the inner peripheral surface of the recess, and an elastic portion protruding outward is provided on the outer peripheral surface of the protrusion, and when the second member is attached to the first member, the protrusion is fitted into the recess so that the elastic portion is inserted into the notch, and when the second member is rotated relative to the first member, the elastic portion is pressed against the inner peripheral surface of the recess, thereby pressing the outer peripheral surface of the protrusion against the inner peripheral surface of the recess and fixing the second member to the first member, and the positioning portion has a positioning pin provided on one of the first member and the second member, and an abutment portion provided on the other of the first member and the second member, which abuts against the positioning pin when the protrusion is rotated along the recess to position the second member relative to the first member, and the positioning pin The pin is formed of a magnetic material, and the abutment portion is composed of a contact portion made of a magnetic material and a magnet, and the contact portion of the abutment portion comes into contact with and is attracted to the positioning pin, thereby performing positioning. The pin preferably has a fixing screw attached to the first member and extending in a direction facing the second member, a cover member having one end attached to the first member and the other end arranged so as to be inserted between the second member and the head of the fixing screw, and a claw portion provided on the second member that engages with the shank of the fixing screw when the second member is rotated and positioned relative to the first member, and when the second member is positioned relative to the first member, the fixing screw can be tightened so that the head of the fixing screw presses the claw portion of the second member against the first member via the other end of the cover member, thereby fixing the second member to the first member.

[0015] Furthermore, the inspection device according to the present invention preferably comprises a holding section for holding an object to be inspected, a drive section for moving the imaging unit relative to the object to be inspected held by the holding section, and a control section for performing an inspection using image data of the object to be inspected captured by moving the imaging unit using the drive section, and the control section preferably calibrates information for controlling the drive section and the imaging unit using image data of an adjustment jig held by the holding section and captured by moving the imaging unit using the drive section. [Effects of the Invention]

[0016] According to the inspection device of the present invention, the imaging section constituting the camera unit, which has an imaging section consisting of an optical system or the like and an imaging section consisting of an image sensor or the like, can be attached and detached via an attachment / detachment mechanism, and the accuracy of the reproducibility of the position when the imaging section is replaced and attached (particularly, the accuracy of the position in the rotational direction around the optical axis) can be improved, thereby facilitating the attachment and detachment of the imaging section and reducing the adjustment work after attachment. [Brief explanation of the drawings]

[0017] [Figure 1] FIG. 2 is an explanatory diagram for explaining the configuration of an inspection device. [Figure 2] 10 is a flowchart for explaining a main process for inspecting an object to be inspected. [Figure 3] 1A and 1B are perspective views of an attachment / detachment mechanism including a camera body, in which FIG. 1A shows a state in which the second member is combined with the first member, and FIG. 1B shows a state in which the rotational position of the second member relative to the first member is determined. [Figure 4] FIG. 2 is a plan view of the first member. [Figure 5] FIG. 2 shows a second member, where (a) is a perspective view and (b) is a bottom view. [Figure 6] 1A and 1B are perspective views of the first member and the second member combined together, where FIG. 1A shows a state seen from above, and FIG. 1B shows a state seen from below. [Figure 7]FIG. 10 is a perspective view of the attachment / detachment mechanism including the camera body, showing the state in which the position of the second member relative to the first member in the rotational direction has been determined. [Figure 8] FIG. 2 is an explanatory diagram for explaining the relationship between the camera body and the attachment / detachment mechanism. DETAILED DESCRIPTION OF THE INVENTION

[0018] A preferred embodiment of the present invention will be described below with reference to the drawings. First, the configuration of an inspection device 10 according to this embodiment will be described with reference to Fig. 1. This inspection device 10 inspects an object 12 under inspection using image data (two-dimensional image data or pattern image data) of the object 12 under inspection obtained by imaging the object 12 under inspection. The object 12 under inspection is, for example, an electronic circuit board (substrate) on which components are mounted and solder is applied.

[0019] The inspection device 10 includes an inspection table 14 that holds the object under inspection 12, an imaging unit 20 that is an imaging section that illuminates and images the object under inspection 12, an XY stage 16 that moves the imaging unit 20 relative to the inspection table 14, and a control unit 30 that is a control section that controls the operation of the imaging unit 20 and the XY stage 16 and inspects the object under inspection 12. For ease of explanation, as shown in Fig. 1, the surface on the inspection table 14 on which the object under inspection is placed is defined as the XY plane (orthogonal X and Y directions), and the direction perpendicular to the placement surface (i.e., the imaging direction by the camera unit 21 that constitutes the imaging unit 20 (the optical axis direction of the optical system of the camera unit 21)) is defined as the Z direction.

[0020] The inspection table 14 is a transport unit such as a belt conveyor that transports the object to be inspected 12 into the inspection area within the inspection device 10 and transports the object to be inspected 12 out of the inspection area after inspection has been completed, and has the function of a holding unit that holds the object to be inspected 12 when it is imaged by the imaging unit 20.

[0021] The imaging unit 20 is attached to a moving table (not shown) of the XY stage 16 and can be moved in both the X and Y directions by the XY stage 16. The XY stage 16 functions as a drive unit that moves the imaging unit 20 relative to the object under test 12, and is, for example, a so-called H-shaped XY stage. Therefore, the XY stage 16 includes a Y-axis unit consisting of a Y-direction guide extending in the Y direction and a Y-drive unit that moves the movable table in the Y direction along the Y-direction guide, and an X-axis unit consisting of two X-direction guides that support the Y-direction guide at both ends and an X-drive unit that moves the Y-direction guide together with the movable table in the X direction along the X-direction guide. The XY stage 16 may also include a Z-axis unit having a Z-drive unit that moves the imaging unit 20 in the Z direction. The XY stage 16 may also include a rotation mechanism that rotates the imaging unit 20 around the optical axis of the optical system of the camera unit 21. The inspection device 10 may further include an XY stage that allows the inspection table 14 to move, in which case the XY stage 16 that moves the imaging unit 20 may be omitted. Furthermore, linear motors and ball screws may be used for the X drive unit, Y drive unit, and Z drive unit. Furthermore, instead of moving the imaging unit 20 in the Z direction, the XY stage 16 may be configured to move in the Z direction.

[0022] The imaging unit 20 includes a camera unit 21 that captures an image from a direction perpendicular (Z direction) to the inspection surface (substrate surface) of the object under inspection 12, an illumination unit 22, and a projection unit 23. In the inspection device 10 according to this embodiment, the camera unit 21, the illumination unit 22, and the projection unit 23 may be configured as an integrated imaging unit 20. In this integrated imaging unit 20, the relative positions of the camera unit 21, the illumination unit 22, and the projection unit 23 may be fixed, or each unit may be configured to be relatively movable. Alternatively, the camera unit 21, the illumination unit 22, and the projection unit 23 may be separate units configured to be independently movable.

[0023] The camera unit 21 includes an imaging element (imaging section) that generates a two-dimensional image of the object, and an optical system (e.g., an imaging section made up of a lens) that forms an image on the imaging element. The camera unit 21 is, for example, a CCD camera. The maximum field of view of the camera unit 21 (the imaging area based on the maximum field of view is called the FOV (Field Of View)) may be smaller than the area on the inspection table 14 where the object under test is placed. In this case, the camera unit 21 captures the entire object under test 12 by dividing it into multiple partial images. The control unit 30 controls the XY stage 16 so that the camera unit 21 moves to the next imaging position each time the camera unit 21 captures a partial image. The control unit 30 synthesizes the partial images to generate an entire image of the object under test 12.

[0024] Note that the camera unit 21 may include an imaging element that generates a one-dimensional image, instead of a two-dimensional imaging element. In this case, the entire image of the object under inspection 12 can be acquired by scanning the object under inspection 12 with the camera unit 21. Furthermore, the imaging unit 20 may include, in addition to the camera unit 21, a plurality of camera units that image the object under inspection 12 at angles different from that of the camera unit 21. By imaging the object under inspection 12 at angles different from that of the camera unit 21, areas that are shaded by components attached to the object under inspection 12 and cannot be imaged by the camera unit 21 can be inspected using image data captured at angles different from that of the camera unit 21.

[0025] The illumination unit 22 is configured to project illumination light onto the surface of the inspection object 12 for imaging by the camera unit 21. The illumination unit 22 includes one or more light sources that emit light of a wavelength or wavelength range selected from the wavelength range detectable by the imaging element of the camera unit 21. The illumination light is not limited to visible light, and ultraviolet light, X-rays, etc. may also be used. When multiple light sources are provided, each light source is configured to project light of a different wavelength (e.g., red, blue, and green) onto the surface of the inspection object 12 at a different projection angle.

[0026] The object under inspection 12 illuminated by the illumination unit 22 is imaged by the camera unit 21. The inspection device 10 determines the presence or absence of defects on the board of the object under inspection 12 (for example, whether components are present and properly arranged, and whether the state of solder application is good or bad) based on image data of the object under inspection 12 (this image data is referred to as "two-dimensional image data") obtained by illuminating and imaging the object under inspection 12 with the illumination by the illumination unit 22 and a height map, which will be described later.

[0027] In the inspection device 10 according to this embodiment, the illumination unit 22 is a side illumination source that projects illumination light obliquely onto the inspection surface of the object under inspection 12, and in this embodiment, includes an upper light source 22a, a middle light source 22b, and a lower light source 22c. In the inspection device 10 according to this embodiment, the side illumination sources 22a, 22b, and 22c are each a ring illumination source that surrounds the optical axis of the camera unit 21 and is configured to project illumination light obliquely onto the inspection surface of the object under inspection 12. Each of these side illumination sources 22a, 22b, and 22c may be configured with multiple light sources arranged in a circular ring shape. Furthermore, the upper light source 22a, the middle light source 22b, and the lower light source 22c, which are side illumination sources, are each configured to project illumination light at different angles onto the inspection surface.

[0028] The projection unit 23 projects a pattern (e.g., illumination light with varying intensity) onto the inspection surface of the object under inspection 12. The object under inspection 12 onto which the pattern is projected is imaged by the camera unit 21. The inspection device 10 creates a height map of the inspection surface of the object under inspection based on image data of the object under inspection 12 obtained by imaging (this image data is referred to as "pattern image data"). Here, the height map is data that contains height information of the object under inspection 12 for each pixel of the pattern image data. The control unit 30 detects local mismatches between the projected pattern and the pattern image data, and acquires height information for that portion based on the local mismatches. In other words, changes in the imaged pattern relative to the projected pattern correspond to changes in height on the inspection surface.

[0029] The projection pattern is preferably a one-dimensional stripe pattern in which different continuous intensities are periodically repeated. The projection unit 23 is arranged to project the stripe pattern obliquely onto the inspection surface of the inspection object 12. Discontinuities in height on the inspection surface of the inspection object 12 appear as pattern shifts in the stripe pattern image. Therefore, the height difference can be determined from the amount of pattern shift. For example, the control unit 30 creates a height map using the PMP (Phase Measurement Profilometry) method, which uses a stripe pattern whose brightness changes according to a sine curve. In the PMP method, the amount of shift in the stripe pattern corresponds to the phase difference of the sine curve.

[0030] The projection unit 23 includes a pattern forming device, a light source device for illuminating the pattern forming device, and an optical system for projecting a pattern (light transmitted through the pattern forming device) onto the inspection surface of the object under test 12. The pattern forming device may be, for example, a variable patterning device capable of dynamically generating a desired pattern, such as a liquid crystal display, or a fixed patterning device in which a pattern is fixedly formed on a substrate, such as a glass plate. When the pattern forming device is a fixed patterning device, it is preferable to provide a movement mechanism for moving the fixed patterning device or an adjustment mechanism in the optical system for pattern projection, thereby making the pattern projection position variable. Furthermore, the projection unit 23 may be configured to be able to switch between multiple fixed patterning devices having different patterns.

[0031] A plurality of projection units 23 may be provided around the camera unit 21. The plurality of projection units 23 are arranged so as to project patterns onto the inspection object 12 from different projection directions. In this way, it is possible to reduce the area on the inspection surface that is shaded due to height differences and onto which the pattern is not projected.

[0032] 1, which controls the entire device, is realized as hardware by the CPU, memory, and other LSIs of any computer, and as software by programs loaded into memory, but the diagram shows functional blocks realized by the cooperation of these. Therefore, it will be understood by those skilled in the art that these functional blocks can be realized in various ways by hardware alone, software alone, or a combination of both.

[0033] FIG. 1 shows an example of the configuration of the control unit 30. The control unit 30 includes an inspection control unit 31 and a memory 35, which is a storage unit. The inspection control unit 31 includes an image processing unit 32, an inspection information processing unit 33, and an inspection unit 34. The image processing unit 32 includes an image capturing processing unit 32a and a height measurement unit 32b. The inspection device 10 also includes an input unit 36 ​​for receiving input from a user or another device, and an output unit 37 for outputting information related to the inspection. The input unit 36 ​​and the output unit 37 are each connected to the control unit 30. The input unit 36 ​​includes, for example, input means such as a mouse or keyboard for receiving input from a user, and communication means for communicating with other devices. The output unit 37 includes known output means such as a display or printer.

[0034] As a preprocessing step for creating a height map, the inspection control unit 31 controls the relative movement of the imaging unit 20 and the inspection table 14 while projecting a pattern onto the object under inspection 12 from the projection unit 23 using the imaging processing unit 32a of the image processing unit 32, thereby dividing and sequentially capturing pattern images of the object under inspection 12. The projected pattern is preferably a stripe pattern whose brightness changes according to a sine curve based on the PMP method. The inspection control unit 31 combines the captured divided images to generate pattern image data for the entire inspection surface of the object under inspection 12. The inspection control unit 31 stores the pattern image data in the memory 35. Note that pattern image data may be generated for only a portion of the inspection surface of the object under inspection 12, rather than for the entire inspection surface.

[0035] The height measurement unit 32b creates a height map of the entire inspection surface of the object under inspection 12 based on the image of the pattern in the pattern image data. The height measurement unit 32b first calculates the local phase difference between the pattern image data and the reference pattern image data for the entire image data, thereby calculating a phase difference map of the inspection surface of the object under inspection 12. Here, the "reference pattern image data" refers to image data in which a pattern is projected onto a reference plane by the projection unit 23 (i.e., image data acquired by the camera unit 21 in a state in which a pattern generated by a pattern forming device built into the projection unit 23 is projected onto the reference plane). The height measurement unit 32b creates a height map of the object under inspection 12 based on a reference plane serving as a reference for height measurement and the phase difference map. The reference plane is, for example, the surface of the electronic circuit board to be inspected. The reference plane does not necessarily have to be flat, but may be a curved surface that reflects deformation such as warpage of the board.

[0036] Specifically, the height measurement unit 32b calculates the phase difference of the stripe pattern between each pixel of the pattern image data and the corresponding pixel of the reference pattern image data. The height measurement unit 32b converts the phase difference into height information. This is because the distance from the projection unit 23 varies depending on the position on the inspection surface, so even if the stripe width of the reference pattern is constant, the stripe width changes from one end of the pattern projection area on the inspection surface to the other. The height measurement unit 32b obtains height information from the reference plane based on the converted height information and the reference plane, and creates a height map of the inspection object 12.

[0037] The image processing unit 32 of the inspection control unit 31 may create an image of the object under test 12 having a height distribution by associating height information contained in the height map of the object under test 12 with each pixel of the two-dimensional image data of the object under test 12. The image processing unit 32 may also perform a three-dimensional modeling display of the object under test 12 based on the object under test image data with height distribution. The image processing unit 32 may also superimpose the height distribution on the two-dimensional image data of the object under test 12 and display it on the output unit 37. For example, the two-dimensional image data may be displayed in different colors depending on the height distribution.

[0038] The inspection control unit 31 is configured to execute various control processes for inspection based on input from the input unit 36 ​​and inspection-related information stored in the memory 35. The inspection-related information includes inspection information such as two-dimensional image data of the object 12 to be inspected, a height map of the object 12 to be inspected (calculated from the pattern image data as described above), and substrate inspection information. The inspection unit 34 executes inspection based on the created substrate inspection information and the two-dimensional image data and height map of the object 12 to be inspected.

[0039] Board inspection information is created for each type of board and is used in rule-based inspections. Board inspection information is a collection of inspection information for components placed on the board, their positions, and each solder applied to the board. The inspection information for each component or solder includes the inspection items required for that component or solder, the inspection window, which is the inspection area on the image for each inspection item, and the inspection criteria that serve as the basis for determining placement and pass / fail for each inspection item. One or more inspection windows are set for each inspection item. For example, in an inspection item that determines the pass / fail status of solder application, typically, the same number of inspection windows as the number of solder application areas on the component are set in a layout that corresponds to the layout of the solder application areas. Furthermore, for inspection items that use image data that has undergone predetermined image processing on 2D image data of the inspected object 12, the details of that image processing are also included in the inspection information.

[0040] Here, when multiple inspection rules are applied to one inspection object (for example, each pin of a semiconductor chip), one inspection window is set for that inspection object for each inspection rule. For example, when four inspection rules, "position shift inspection," "floating inspection," "polarity inspection," and "solder inspection," are applied to the tips of each pin of a semiconductor chip having multiple pins, four inspection windows corresponding to these inspection rules are set.

[0041] The inspection information processing unit 33 sets each item of inspection information to suit the board in the board inspection information creation process. For example, the inspection information processing unit 33 automatically sets the position and size of each inspection window for each inspection item so that it matches the solder layout of the board. The inspection information processing unit 33 may be configured to accept user input for some items of the inspection information. For example, the inspection information processing unit 33 may be configured to accept tuning of the inspection criteria by the user. The inspection criteria may be set using height information.

[0042] As a preprocessing step for creating the board inspection information, the inspection control unit 31 causes the image processing unit 32 to perform an imaging process of the object under inspection 12. Here, the image data (two-dimensional image data, which is image data of the entire board surface, and pattern image data) used for creating the board inspection information is an object under inspection 12 that has passed all inspection items. As described above, the imaging process is performed by controlling the relative movement of the imaging unit 20 and the inspection table 14 while illuminating the object under inspection 12 with the illumination unit 22, and sequentially capturing partial images of the object under inspection 12. Multiple partial images are captured so that the entire object under inspection 12 is covered. The inspection control unit 31 combines these multiple partial images to generate entire board image data (two-dimensional image data) including the entire inspection surface of the object under inspection 12. The inspection control unit 31 stores the entire board image data in the memory 35.

[0043] Next, the inspection process of the object under inspection 12 by the inspection apparatus 10 according to this embodiment will be described with reference to FIG. 2. When the inspection starts, the inspection control unit 31 of the control unit 30 executes a main process and loads a substrate, which is the object under inspection 12 to be inspected, into the inspection area on the inspection table 14 of the inspection apparatus 10 (step S100). Then, the inspection control unit 31 causes the imaging processing unit 32a of the image processing unit 32 to image the substrate, which is the object under inspection 12 loaded into the inspection area, and acquires two-dimensional image data and pattern image data of the object under inspection 12 (step S102). The acquired two-dimensional image data and pattern image data are stored in the memory 35. Furthermore, the inspection control unit 31 calculates height information using the acquired pattern image data using the height measurement unit 32b of the image processing unit 32, and creates a height map (step S104). This height map is also stored in the memory 35.

[0044] Next, the inspection control unit 31 uses the two-dimensional image data and height map acquired by the above processing to inspect the object under inspection 12 using the inspection unit 34. Specifically, it selects one of the inspection windows set for the object under inspection 12 (step S106), and executes inspection processing for the selected inspection window (step S108).

[0045] In the inspection process S108, the inspection unit 34 reads the inspection information set in the currently selected inspection window, i.e., the board inspection information, from the memory 35. Then, the inspection unit 34 performs an inspection using a rule-based inspection method on the two-dimensional image data and height map in the currently selected inspection window based on this board inspection information, judges whether the inspection is good or bad based on the inspection results, stores the result (good or bad) in the memory 35 as the inspection result for the currently selected inspection window, and ends the inspection process S108.

[0046] When the inspection process S108 is completed, the inspection unit 34 determines whether all inspection windows have been selected (step S110). If it determines that unselected inspection windows remain (step S110: N), the inspection unit 34 returns to step S106 and repeats the subsequent processes. On the other hand, if it determines that all inspection windows have been selected (step S110: Y), the inspection unit 34 determines whether the inspection results of all inspection windows have been determined to be good (step S112). If it determines that the inspection results of all inspection windows are good (step S112: Y), the inspection unit 34 determines the currently inspected object 12 to be a good product and stores this in the memory 35 (step S114). On the other hand, if it determines that at least one inspection window has been determined to be bad (step S112: N), the inspection unit 34 determines the currently inspected object 12 to be a bad product and stores this in the memory 35 together with information on the inspection window that was determined to be bad (step S116).

[0047] Finally, the inspection control unit 31 removes the object 12 under inspection from the inspection area (step S118), completing the inspection of one object 12 under inspection. When there is a next object 12 to be inspected, the inspection control unit 31 executes the inspection from step S100, repeating the process of carrying in, taking an image, inspecting, and carrying out. After the image of the object 12 under inspection in step S102 is completed, the process from step S104 onwards is executed, and the object 12 under inspection is removed from the inspection area and the next object 12 under inspection is carried into the inspection area and imaged. This allows the inspection of the previous object 12 under inspection and the image of the next object 12 under inspection to be executed in parallel, thereby shortening the takt time required for inspection.

[0048] The inspection device 10 according to this embodiment is configured so that the camera body 210 including the imaging element (imaging section) of the camera unit 21 can be replaced with respect to the imaging unit 20 via an attachment / detachment mechanism 220. The attachment / detachment mechanism 220 will be described below with reference to Figs. 3 to 7.

[0049] As shown in FIG. 3, the attachment / detachment mechanism 220 is made up of a first member 230 attached to the housing of the imaging unit 20 and a second member 240 attached to the camera body 210.

[0050] As shown in FIG. 4, the first member 230 is a cross-shaped plate-like member and has four support portions 230a, 230b, 230c, and 230d formed to protrude outward from the four corners of a rectangular base, a cylindrical protrusion 230e formed in the center of the base and protruding toward the second member 240, and an opening 230f formed in the center of the protrusion 230e. The protrusion 230e and the opening 230f of the first member 230 are concentrically arranged with the same central axis A. The optical system (an imaging unit such as a lens) of the camera unit 21 is disposed within the housing of the imaging unit 20, and when the first member 230 is attached to the housing of the imaging unit 20, the central axis A is configured to coincide with the optical axis of the camera unit 21 (the optical axis of the optical system). Fixing portions 231 having pins 231a protruding outward from the outer circumferential surface of the cylindrical protrusion 230e are attached to two locations on the upper surface of the protrusion 230e. Pin 231a of this fixing portion 231 is arranged on a line extending outward from central axis A of protrusion 230e, and is configured so that even if pressed inward, it rebounds outward due to a spring. In the example shown in Fig. 4, two fixing portions 231 are arranged at an angle of approximately 90° with respect to central axis A, but this is not limited to this, and for example, two fixing portions 231 may be arranged at an angle of approximately 120° with respect to central axis A, or one fixing portion 231 may be arranged.

[0051] The support portions 230b, 230c, and 230d of the first member 230 are formed with a fixing screw hole 230g into which a fixing screw 232 is screwed, and a cover mounting hole 230h into which a screw 236 for attaching the friction-reducing cover 233 is screwed. The support portion 230d also has a support member mounting hole 230j into which a screw 234b for attaching the support member 234a that supports the press screw 234 is screwed. The support portion 230a also has a positioning pin 235 attached thereto, which extends toward the second member 240.

[0052] As shown in FIG. 5( a), the second member 240 is composed of a fixed member 250 disposed on the first member 230 side and a movable member 260 attached to the surface of the fixed member 250 opposite the first member 230. A cylindrical convex portion is formed on one of the surfaces of the fixed member 250 facing the movable member 260 and the movable member 260 facing the fixed member 250, and a recessed portion having a circular cross section that fits into the convex portion is formed on the other surface, thereby connecting the fixed member 250 and the movable member 260. The central axis of the cylindrical convex portion coincides with the central axis of the circular recessed portion, and also coincides with the central axis A described above when the second member 240 is connected to the first member 230. The movable member 260 is configured to be rotatable relative to the fixed member 250 via the fitted convex portion and recessed portion.

[0053] A feed screw 261 is rotatably supported at an end of the fixed member 250, and a receiving portion 262 is fixed to an end of the movable member 260. The feed screw 261 is threaded into a threaded hole formed in the receiving portion 262, and by turning the feed screw 261, the receiving portion 262 is pushed or pulled back (performs a circulating motion) along the feed screw 261 in the direction of arrow F in Fig. 5(a) (the direction of movement of the receiving portion 262 by the feed screw 261, which is a tangent direction to a circle centered on the central axis A). Further, near the receiving portion 262 of the movable member 260, an elongated guide hole 263 is formed, extending in a direction perpendicular to the arrow F (a tangent direction to a circle centered on the central axis A). Further, a guide pin 251 extending in the Z direction so as to pass through the guide hole 263 is attached to the fixed member 250. Therefore, when the feed screw 261 is turned to move the receiving portion 262 in the direction of arrow F, the guide pin 251 and the guide hole 263 cause the movable member 260 to rotate about the central axis A relative to the fixed member 250 (rotating in the direction of arrow R shown in FIG. 5(a)). When the position of the movable member 260 in the rotational direction relative to the fixed member 250 is determined by the feed screw 261, the fixed member 250 and the movable member 260 are fixed by tightening four fixing screws 252 that pass through the through holes of the movable member 260 and are screwed into the screw holes 250c on the fixed member 250 side.

[0054] A circular opening 250a is formed in the center of the fixed member 250, with the above-mentioned central axis A as its center, and a circular opening 260a is formed in the center of the movable member 260, with the central axis A as its center (that is, when the movable member 260 is attached to the fixed member 250, the openings 250a and 260a are formed concentrically with the central axis A as their center). These openings 250a, 260a are configured so that their central axes (central axis A) coincide when the second member 240 is fitted to the first member 230. The camera body 210 is attached to the movable member 260 of the second member 240. Therefore, opening 230f of first member 230, opening 250a of fixed member 250 of second member 240, and opening 260a of movable member 260 are arranged concentrically around central axis A, and optical systems such as lenses arranged in imaging unit 20 and imaging elements arranged in camera body 210 communicate with each other via these openings 230f, 250a, and 260a. Central axis A is arranged so as to be positioned at the center of the imaging elements of camera body 210.

[0055] 5(b), a recess 250b having a circular cross section is formed on the surface of the fixing member 250 facing the first member 230 so as to surround the opening 250a, and this recess 250b is configured to fit with the protrusion 230e of the first member 230. Here, a notch 250d is formed at the end of the recess 250b of the fixing member 250 at a position facing the pin 231a of the fixing portion 231. Therefore, when the second member 240 is fitted to the first member 230 so that the pin 231a of the fixing portion 231 fits into this notch 250d and the second member 240 is rotated relative to the first member 230 about the central axis A, the pin 231a moves from the notch 250d and comes into contact with the inner circumferential surface of the recess 250b, and is pressed into the fixing portion 231. As described above, pin 231a is configured by a spring to repel outward even when pushed inward. Therefore, even if there is a space (play) between the inner surface of recess 250b and the outer surface of protrusion 230e, the repulsive force of pin 231a presses the outer surface of protrusion 230e on its extension against the inner surface of recess 250b, thereby fixing second member 240 to first member 230 and improving the positional repeatability of second member 240 relative to first member 230 (the central axes A of first member 230 and second member 240 coincide within a specified error). In this way, the fixing portion 231 functions as an elastic portion that fixes the second member 240 to the first member 230 by pressing the outer periphery of the convex portion 230e of the first member 230 against the inner periphery of the concave portion 250b of the second member 240 by pushing back the inner periphery of the concave portion 250b of the second member 240 with the pin 231a.

[0056] Furthermore, the attachment / detachment mechanism 220 of the inspection device 10 according to this embodiment is configured to rotate the second member 240 relative to the first member 230 (rotate around the central axis A) while the convex portion 230e of the first member 230 is engaged with the concave portion 250b of the second member 240, and position the second member 240 in the rotational direction relative to the first member 230 by a positioning portion consisting of the positioning pin 235 and the abutment portion 253.

[0057] As shown in FIGS. 5(b) and 6, the fixing member 250 constituting the second member 240 is a rectangular plate-like member. An abutment portion 253 is attached to one of the four corners of this fixing member 250 by a fixing screw 254 threaded into a screw hole 250f. When the second member 240 is rotated relative to the first member 230, the abutment portion 253 is positioned in the rotational direction at a position where the abutment portion 253 abuts against the positioning pin 235 of the first member 230. The abutment portion 253 is composed of a magnet 253a and a contact portion (iron bracket) 253b formed of a magnetic material and assembled to sandwich the magnet 253a. The positioning pin 235 is also composed of a magnetic material (iron pin). Here, the contact portion 253b of the abutment portion 253 is configured to come into contact with the positioning pin 235 (the magnet 253a does not come into contact with the positioning pin 235). Contact portion 253b of abutment portion 253 is magnetized by magnet 253a, and positioning pin 235 in contact with contact portion 253b is also magnetized, so that abutment portion 253 is attracted to positioning pin 235 and fixes the position of second member 240 in the rotational direction relative to first member 230. When abutment portion 253 and positioning pin 235 are configured as described above, abutment portion 253 is fixed and positioned by magnetic force at the position where it contacts positioning pin 235, so it is possible to improve the positional repeatability of second member 240 in the rotational direction relative to first member 230. Furthermore, because magnet 253a does not directly contact positioning pin 235, it is possible to prevent wear of magnet 253a (improving wear resistance).

[0058] Claw portions 250e are formed at the remaining three of the four corners of fixing member 250 constituting second member 240. As shown in Fig. 7, when second member 240 is rotated relative to first member 230 and abutment portion 253 abuts against positioning pin 235 to position the second member 240 in the rotational direction, claw portions 250e are configured to mesh with the shank of fixing screw 232 that is threaded into fixing screw hole 230g of first member 230 and extends in the Z direction.

[0059] A friction-reducing cover 233, which is a metal cover member with a U-shaped cross section, is attached near the fixing screw 232 of the first member 230. One end of the friction-reducing cover 233 is fixed to the back side (imaging unit 20 side) of the first member 230 by a screw 236 that passes through a hole 233a formed in the one end and is screwed into a cover mounting hole 230h. The other end of the friction-reducing cover 233 is disposed below the head of the fixing screw 232 (on the front side (second member 240 side) of the first member 230), the fixing screw 232 having its shank passing through a hole 233b formed in the other end and screwed into a fixing screw hole 230g. When the claw portion 250e engages with the shank of the fixing screw 232, the other end of the friction-reducing cover 233 is inserted between the upper surface of the claw portion 250e and the head of the screw 232. Therefore, when the fixing screw 232 is rotated to fasten the second member 240 to the first member 230, the rotational force of the head of the fixing screw 232 is not transmitted directly to the second member 240, but is reduced at the other end of the friction-reducing cover 233, so the second member 240 does not rotate relative to the first member 230 (it rotates in the opposite direction to the direction in which the first member 230 is rotated when the second member 240 is attached to the first member 230) and the rotational position does not shift.

[0060] As shown in FIG. 3(b), etc., by tightening the pressure screw 234, the second member 240 (the fixed member 250 thereof) can be pressed by the pressure screw 234 in the direction in which the abutment portion 253 abuts against the positioning pin 235, thereby fixing it (clamping the rotational position), thereby preventing the rotational position of the second member 240 from shifting relative to the first member 230.

[0061] In this way, the image pickup element (image pickup section) arranged in the camera body 210 can be positioned within a specified error range relative to the optical system (image formation section) of the camera unit 21 arranged on the image pickup unit 20 side.

[0062] In the above description, a case has been described in which convex portion 230e is formed on first member 230, fixing portion 231 is arranged on this convex portion 230, and recessed portion 250b and notched portion 250d are formed on fixing member 250 of second member 240, but a configuration in which a recessed portion and a notched portion are formed on first member 230, and a convex portion is formed on fixing member 250 of second member 240 and fixing portion 231 is arranged thereon may also be used. Also, a case has been described in which positioning pin 235 is arranged on first member 230 and abutting portion 253 is arranged on second member 240, but a configuration in which abutting portion is arranged on first member 230 and a positioning pin is arranged on second member 240 may also be used.

[0063] The procedure for attaching the camera body 210 to the imaging unit 20 using the above-described attachment / detachment mechanism 220 will be described. First, the first member 230 attached to the housing of the imaging unit 20 is assembled so that the convex portion 230e formed on this first member 230 fits into the concave portion 250b of the second member 240 attached to the camera body 210. At this time, when the assembly is performed so that the pin 231a of the fixing portion 231 provided on the convex portion 230e is inserted into the notch portion 250d of the concave portion 250b, the state shown in FIG. 3(a) or FIG. 6 is reached. That is, the positioning pin 235 and the abutment portion 253 are separated, and the fixing screw 232 and the claw portion 250e are not engaged with each other. In this state, when the second member 240 is rotated relative to the first member 230 in a direction in which the abutment portion 253 abuts against the positioning pin 235 (clockwise when viewed from above in FIGS. 3 and 6), the abutment portion 253 abuts against the positioning pin 235, stopping the rotation and positioning the second member 240 in the rotational direction relative to the first member 230. Then, the pressure screw 234 is tightened to press the abutment portion 253 more firmly against the positioning pin 235, thereby fixing the second member 240 to the first member 230, and the fixing screw 232 is tightened to couple the first member 230 and the second member 240 together. Note that when removing the camera body 210 from the imaging unit 20, the above steps are reversed. In this way, the camera body 210 can be attached to and detached from the imaging unit 20 with a simple procedure.

[0064] By configuring the attachment / detachment mechanism 220 as described above, for example, when changing to a camera body 210 having an imaging element with a different resolution or when replacing a faulty camera body 210 with a normal camera body 210, if the above-mentioned procedure is performed to attach the new camera body 210, the rotational position of the second member 240 relative to the first member 230 can be accurately determined by the positioning pin 235 and the abutment portion 253, and therefore the rotational position of the camera body 210 (particularly the imaging element) relative to the imaging unit 20 can be accurately determined (reproduced). Generally, the optical system of the camera unit 21 has a shape that is rotationally symmetrical with respect to the optical axis, but the imaging element is rectangular. Therefore, by accurately aligning the long and short sides of the rectangular imaging field (FOV) with the X and Y directions of the XY stage 16, that is, by improving the accuracy of the rotational position of the camera body 210 (imaging element) with respect to the imaging unit 20, the position of the rectangular imaging field (FOV) with respect to the inspected object 12 can be accurately determined, and the adjustment work (proofreading or calibration work) of the inspection device 10 can be reduced.

[0065] Furthermore, the inspection device 10 according to this embodiment is configured such that the optical system (imaging section) of the camera unit 21 is disposed in the imaging unit 20, and only the camera body 210 having the imaging element (imaging section) is replaceable. Therefore, the camera body 210 can be replaced with one having an imaging element with a different resolution without changing the imaging area (FOV).

[0066] Since the convex portion 230e of the first member 230 and the concave portion 250b of the second member 240 are fitted together, a gap (play) occurs between the outer peripheral surface of the convex portion 230e and the inner peripheral surface of the concave portion 250b. However, as described above, the pin 231a of the fixing portion 231 presses the outer peripheral surface of the convex portion 230e against the inner peripheral surface of the concave portion 250b on the opposite side of the pin 231a to fix the convex portion 230e. Therefore, the optical system of the camera unit 21 arranged in the imaging unit 20 and the imaging element arranged in the camera body 210 can be positioned with high precision (the optical axis of the optical system (the above-mentioned central axis A) can be aligned with the center of the imaging element within a specified error range).

[0067] Here, the position in the rotational direction of the imaging element built into the camera body 210 may differ for each camera body 210 (for example, due to an error during the manufacturing process of the camera body 210 or an error when the second member 240 is attached to the camera body 210). In such cases, as described above, the position in the rotational direction of the camera body 210 (imaging element) relative to the imaging unit 20 can be adjusted by rotating the movable member 260 relative to the fixed member 250 of the second member 240 (rotating about the central axis A) using the feed screw 261. Furthermore, adjustment of the angle in the rotational direction of the movable member 260 relative to the fixed member 250 of the second member 240 only needs to be performed once for each camera unit 210; when the camera body 210 is removed from the imaging unit 20 and then attached to the imaging unit 20 again, there is no need to adjust the position in the rotational direction of the movable member 260 relative to the fixed member 250. Therefore, if the position of the camera body 210 in the rotational direction is adjusted in advance using the feed screw 261, no adjustment work is required when the camera body 210 is attached to the imaging unit 20.

[0068] In the camera unit 21, the positional relationship in the Z direction between the optical system arranged in the imaging unit 20 and the imaging element arranged in the camera body 210, specifically, the Z direction adjustment (flange back adjustment) to align the focal plane of the optical system with the imaging surface of the imaging element, can be adjusted by inserting a member (a shim or spacer) that adjusts the distance in the Z direction between the camera unit 210 and the second member 240, or by removing this member.

[0069] Furthermore, when performing adjustment work related to changes in the relative positional relationship of the camera unit 21 or the positional accuracy of the XY stage 16, an adjustment jig large enough to cover the entire inspection area on the inspection table 14 is required (a glass board with dots drawn at intervals with a predetermined accuracy, or a height measurement jig with cylinders of different heights formed with a predetermined accuracy). However, with the inspection device 10 according to this embodiment, as described above, these adjustment work is not necessary, and therefore adjustment work can be performed with an adjustment jig having approximately the same size as the object under inspection 12. Therefore, conventional adjustment jigs can be reused, and adjustment work can be performed with these adjustment jigs placed on the inspection table 14 (the glass board and the height measurement jig can be placed side by side on the inspection table 14, respectively).

[0070] In this way, the attachment / detachment mechanism 220 of the inspection device 10 according to this embodiment can attach / detach the camera body 210 to / from the imaging unit 20 by rotating the second member 240 relative to the first member 230, so that the camera body 210 can be replaced in a short time. Furthermore, the position of the second member 240 in the rotational direction relative to the first member 230 can be determined with high precision by the positioning pin 235 and the abutment portion 253, so that subsequent adjustment work, etc. can be simplified and performed in a short time.

[0071] Furthermore, if the camera body 210 is replaced without using the above-described attachment / detachment mechanism 220, it would be necessary to carry out adjustment work (calibration work of parameters (information) for control) regarding changes in the relative positional relationship between the imaging section (lens, etc.) and the imaging section (camera body 210 having an imaging element) of the camera unit 21 and the positional accuracy of the XY stage 16. However, as described above, the attachment / detachment mechanism 210 of the inspection device 10 according to this embodiment has high reproducibility of the position when the camera body 210 is attached to the imaging unit 20, particularly the accuracy of the position in the rotational direction relative to the optical axis (central axis A), making these adjustment work unnecessary. Therefore, the time required for adjustment work after replacing the camera body 210 is shortened.

[0072] Furthermore, the inspection device 10 according to this embodiment is configured so that the camera body 210 is attached to the housing of the imaging unit 20 via the above-described attachment / detachment mechanism 220. Therefore, as shown in Fig. 8, if the first member 230 attached to the housing side of the imaging unit 20 and the second member 240 attached to the camera body 210 have the same specifications, the size and the like of the camera body 210 can be freely designed and selected according to the size of the imaging unit (camera body) housed in the camera body 210, the size of the image sensor, the flange focal distance, and the like, and various imaging units (camera bodies) can be attached and detached to the inspection device 10 according to this embodiment by the above-described method to inspect the object under inspection 12.

[0073] It goes without saying that the above embodiments do not limit the invention described in the claims, and that not all of the combinations of the characteristic features described in the embodiments are necessarily essential features of the solution. [Explanation of symbols]

[0074] 10 Inspection equipment 12 Test subject 14 Inspection table (holding part) 16 XY stage (drive unit) 20 Imaging unit 21 Camera unit (imaging unit, imaging unit) 30 Control unit (control section) 220 Detachable mechanism 230 First member 230e convex part 231 Fixed part (elastic part) 232 Fixing screw 233 Friction reduction cover (cover material) 235 Locating pin (locating part) 240 Second member 250 Fixing member 250d cutout 253 Abutment (positioning part) 253a Magnet 253b Contact part 250b recess 260 Movable parts

Claims

1. An inspection apparatus for performing an inspection by acquiring image data of an object to be inspected by moving an imaging unit having an imaging section that forms an image of the object to be inspected and an imaging section that captures the image and outputs image data, relative to the object to be inspected, the imaging unit is disposed within a housing of the imaging unit; The imaging section is configured to be detachable from the housing of the imaging unit via an attachment / detachment mechanism. Inspection equipment.

2. The attachment / detachment mechanism includes: a first member attached to the housing; a second member attached to the imaging unit side; and a recess having a circular cross section is provided in one of the first member and the second member, a cylindrical protrusion is provided on the other of the first member and the second member, The second member is fixed to the first member by fitting the protrusion into the recess, a positioning portion that rotates the second member relative to the first member, causing the convex portion to rotate along the concave portion, thereby positioning the second member relative to the first member; The inspection device according to claim 1 .

3. A notch is provided on the inner circumferential surface of the recess, An elastic portion that protrudes outward is provided on the outer circumferential surface of the protrusion, When the second member is attached to the first member, the convex portion is fitted into the concave portion so that the elastic portion is inserted into the notch portion, and when the second member is rotated relative to the first member, the elastic portion is pressed against the inner peripheral surface of the concave portion, thereby pressing the outer peripheral surface of the convex portion against the inner peripheral surface of the concave portion, thereby fixing the second member to the first member. The inspection device according to claim 2 .

4. The positioning unit is a positioning pin provided on one of the first member and the second member; a stop portion that is provided on the other of the first member and the second member and that abuts against the positioning pin when the convex portion is rotated along the concave portion to position the second member relative to the first member, The positioning pin is made of a magnetic material, A part of the abutment portion is formed of a magnet, The abutment part adheres to the positioning pin, thereby performing positioning.

4. The inspection device according to claim 2 or 3.

5. The abutting portion is composed of a contact portion made of a magnetic material and a magnet, When the abutting portion is attracted to the positioning pin, the contact portion comes into contact with the positioning pin. The inspection device according to claim 4.

6. a fixing screw is attached to the first member and extends in a direction facing the second member; the second member is provided with a claw portion that meshes with a shaft portion of the fixing screw when the second member is rotated and positioned relative to the first member, When the second member is positioned relative to the first member, the fixing screw is tightened so that the head of the fixing screw presses the claw portion of the second member against the first member, thereby fixing the second member to the first member.

4. The inspection device according to claim 2 or 3.

7. a cover member having one end attached to the first member and the other end arranged to be inserted between the claw portion of the second member and the head of the fixing screw; When the screw is tightened, the head presses the claw portion of the second member against the first member via the other end of the cover member. The inspection device according to claim 6.

8. The second member is a fixing member that fits with the first member; a movable member attached to the fixed member and supporting the imaging unit; The inspection device according to claim 2 or 3, further comprising an adjustment unit that rotates the movable member relative to the fixed member to adjust the position of the imaging unit in the rotational direction relative to the second member.

9. A notch is provided on the inner circumferential surface of the recess, An elastic portion that protrudes outward is provided on the outer circumferential surface of the protrusion, When attaching the second member to the first member, the convex portion is fitted into the concave portion so that the elastic portion is inserted into the notch portion, and when the second member is rotated relative to the first member, the elastic portion is pressed against the inner peripheral surface of the concave portion, thereby pressing the outer peripheral surface of the convex portion against the inner peripheral surface of the concave portion, thereby fixing the second member to the first member, The positioning unit is a positioning pin provided on one of the first member and the second member; a stop portion that is provided on the other of the first member and the second member and that abuts against the positioning pin when the convex portion is rotated along the concave portion to position the second member relative to the first member, The positioning pin is made of a magnetic material, The abutting portion is composed of a contact portion made of a magnetic material and a magnet, The contact portion of the abutting portion comes into contact with the positioning pin and adheres to it, thereby performing positioning. a fixing screw attached to the first member and extending in a direction facing the second member; a cover member having one end attached to the first member and the other end arranged to be inserted between the second member and the head of the fixing screw; a claw portion that is provided on the second member and that engages with a shaft portion of the fixing screw when the second member is rotated and positioned relative to the first member, When the second member is positioned relative to the first member, the fixing screw is tightened so that the head of the fixing screw presses the claw portion of the second member against the first member via the other end of the cover member, thereby fixing the second member to the first member. The inspection device according to claim 2 .

10. a holder for holding an object to be inspected; a drive unit that moves the imaging unit relative to the object to be inspected held by the holder; a control unit that performs an inspection using image data of the object to be inspected, the image data being captured by moving the imaging unit using the driving unit; The control unit calibrates information for controlling the drive unit and the imaging unit based on image data captured by moving the imaging unit with the drive unit while using the adjustment jig held by the holding unit.

10. The inspection device according to claim 1, 2, 3, or 9.

Images