Stand, fixing member for measuring device, and measuring system

Abstract

To facilitate work of installing a measuring device at an appropriate position.SOLUTION: A stand 1 comprises a support member 20 extending in the Z direction, and a fixing member 30 for fixing a measuring device. The support member 20 is configured so that a position of the measuring device in a Z direction can be adjusted. The fixing member 30 is configured so that a position of a mounting surface of the support member 20 in the Z direction can be adjusted. By adjusting the positions of the support member 20 and fixing member 30 in the Z direction, a distance in the Z direction between the measuring device and a workpiece can fall within a measurement range.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present disclosure relates to a stand for supporting a measuring device that measures a workpiece, a fixing member for the measuring device, and a measuring system that includes the stand. [Background technology]

[0002] When measuring a workpiece, a measuring device may be used that receives light reflected from the workpiece surface with an imaging unit and measures each part of the workpiece based on the amount of light received acquired by the imaging unit. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Publication No. 2020-027055 Summary of the Invention [Problem to be solved by the invention]

[0004] However, since the measurement distance (working distance: WD) that can be measured by measuring devices such as those described in Patent Document 1 varies from device to device, users need to appropriately install the measuring device they use according to their own measurement environment, but it is a hassle for them to prepare the mounting jig themselves to install the measuring device in the appropriate position.

[0005] The present disclosure has been made in consideration of the above points, and an object thereof is to make it possible to easily install a measuring device in an appropriate position. [Means for solving the problem]

[0006] To achieve the above object, one aspect of the present disclosure can be based on a stand for supporting a measuring device having a predetermined measurement range in the Z direction and for measuring a workpiece located within the measurement range. The stand includes a support member extending in the Z direction and having a first mounting surface, and a fixing member fixed to the first mounting surface of the support member and having a second mounting surface for fixing the measuring device. The support member is configured so that the position of the first mounting surface in the Z direction can be adjusted, and the fixing member is configured so that the position of the second mounting surface in the Z direction relative to the first mounting surface of the support member can be adjusted. By adjusting the positions of the support member and the fixing member in the Z direction, the distance in the Z direction between the workpiece and the measuring device can be included within the measurement range.

[0007] This allows the distance in the Z direction between the workpiece and the measuring device to be adjusted appropriately simply by preparing a stand, fixing the measuring device to a fixed member, and adjusting the Z direction position of the support member and the fixed member.

[0008] In another aspect of the present disclosure, a measurement system can be configured that includes the stand, the measuring device, and a display device that displays the measurement results of the measuring device. In this case, the fixing member of the stand and the measuring device are fixed via a mounting surface, and the position of the measuring device in the Z direction can be adjusted by the fixing member while the measurement results are displayed on the display device.

[0009] Yet another aspect of the present disclosure can be based on a fixing member for a measuring device that has a predetermined measurement range in the Z direction and is used to support a measuring device that measures a workpiece located within the measurement range. The fixing member includes a base member that is fixed to an external fixed surface, a mounting member that is connected to the base member and has a mounting surface for fixing the measuring device, and an adjustment screw for adjusting the position of the mounting member in the Z direction relative to the base member. In this case, the base member can be connected to the fixing surface with a fastening member from either the X direction or the Y direction. This facilitates coarse adjustment of the position of the measuring device in the Z direction relative to the external fixed surface. [Effects of the Invention]

[0010] As described above, it is possible to adjust the Z-direction position of the support member and the Z-direction position of the fixing member to which the measuring device is fixed, making it easier to install the measuring device in an appropriate position. [Brief explanation of the drawings]

[0011] [Figure 1] 1 is a perspective view of a stand according to an embodiment of the present invention; [Figure 2] 1 is a diagram showing a configuration of a measurement system according to an embodiment of the present invention. [Figure 3] FIG. 2 is a perspective view showing the appearance of the measuring device. [Figure 4] FIG. [Figure 5] FIG. 2 is a block diagram of a measurement device. [Figure 6] FIG. [Figure 7] FIG. [Figure 8] FIG. 3 is a view taken along the arrow Y in FIG. 2. [Figure 9] FIG. 2 is a perspective view of the upper part of the stand as seen from above. [Figure 10] FIG. [Figure 11] FIG. 4 is a plan view of the first mounting member. [Figure 12]FIG. 4 is a plan view of the second mounting member. [Figure 13] FIG. 10 is a view of the second mounting member as seen from the X direction. [Figure 14A] FIG. 10 is a side view showing the mounting member at the uppermost position. [Figure 14B] FIG. 10 is a side view showing the mounting member at its lowermost position. [Figure 15] FIG. 10 is a view corresponding to FIG. 2, showing a first modified example of the support member. [Figure 16] FIG. 10 is a view corresponding to FIG. 2, showing a second modified example of the support member. [Figure 17] FIG. 10 is a view corresponding to FIG. 2, showing a third modified example of the support member. [Figure 18] FIG. 2 is a side view of the measuring device fixing member according to the embodiment of the present invention. DETAILED DESCRIPTION OF THE INVENTION

[0012] Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. Note that the following description of the preferred embodiments is merely exemplary in nature and is not intended to limit the present invention, its applications, or its uses.

[0013] FIG. 1 is a perspective view of a stand 1 according to an embodiment of the present invention. FIG. 2 is a diagram showing a measurement system S including the stand 1, a measurement device 200 supported by the stand 1, and a display device 300 that displays the measurement results of the measurement device 200. As shown in each figure, in this embodiment, two horizontal directions that are orthogonal to each other are defined as the X direction and the Y direction, respectively, and the height direction (vertical direction) orthogonal to the X direction and the Y direction is defined as the Z direction. The X direction and the Y direction do not have to be horizontal and may be inclined with respect to a horizontal plane. In this case, the Z direction is not vertical but is inclined with respect to the vertical plane. In other words, the X direction, the Y direction, and the Z direction are set according to the user's environment, but the relationship in which the X direction and the Y direction are orthogonal, and the Z direction is orthogonal to the Y direction and the Z direction, is maintained.

[0014] The measurement system S can be used inline, for example, where multiple workpieces W flow continuously, or it can be used offline, where the workpieces W are measured one by one. In an inline system, each workpiece W that flows through is measured by the measurement system S.

[0015] The measuring device 200 supported by the stand 1 has a predetermined measurement range in the Z direction and is a device that measures a workpiece W located within the measurement range. Typical examples of such a measuring device 200 include, but are not limited to, an optical displacement meter, a smart camera, an image sensor, a stereo camera, etc. In this embodiment, a case will be described in which the measuring device 200 is an optical displacement meter.

[0016] FIG. 3 is a diagram showing the appearance of measuring device 200. Measuring device 200 is an optical displacement meter using a light-sectioning method that uses slit light S1 (shown in FIG. 2) to measure the cross-sectional profile of a workpiece W (measurement object) having a height in the Z direction based on the principle of triangulation. As also shown in FIGS. 4 and 5, measuring device 200 includes a light-emitting / receiving module 210, a motor 220 for oscillating light-emitting / receiving module 210, a control unit 230, and a housing 240. Light-emitting / receiving module 210, motor 220, and control unit 230 are housed in housing 240. As shown in FIG. 5, control unit 230 is configured by motor control unit 231, power supply unit 232 that supplies power to each unit, and signal processing unit 233.

[0017] As shown in FIG. 4, the light-emitting / receiving module 210 includes a light-emitting unit 211 that emits slit light S1 extending in the X direction, a light-collecting unit 212 that has a light-receiving lens that collects reflected light S2 reflected by the workpiece W, an imaging unit 213 that receives the light collected by the light-collecting unit 212, and a support member 214 that holds the light-emitting unit 211, the light-collecting unit 212, and the imaging unit 213 together.

[0018] 5, the light projection unit 211 has a laser beam emitter (light source) 211a, an optical system 211b, and a light projection control unit 211c that controls the laser beam emitter 211a. Light emitted from the laser beam emitter 211a is incident on the optical system 211b. The optical system 211b is composed of a plurality of lenses including, for example, cylindrical lenses (not shown), and spreads the incident laser beam into a strip-like shape to form slit light S1, which is then irradiated onto the workpiece W. The imaging unit 213 has an image sensor 213a such as a CMOS (complementary metal-oxide semiconductor) and an imaging control unit 213b.

[0019] 4, the support member 214 is fixed to a rotation shaft 250 provided inside the housing 240, and is supported by the housing 240 so as to be rotatable about a rotation center line 250a which is the axial core of the rotation shaft 250. Even when the light emitting and receiving module 210 is swung about the rotation center line 250a, the relative positional relationship between the light emitting unit 211, the light collecting unit 212, and the imaging unit 213 does not change.

[0020] 3 and 4, housing 240 is provided with a light-projecting window 243a and a light-receiving window 243b. Light-projecting window 243a is disposed to face the surface of light-projecting unit 211 that is irradiated with slit light S1. Light-receiving window 243b is disposed to face the light-incident surface of light-collecting unit 212.

[0021] The measuring device 200 is equipped with an encoder 252 for detecting the rotation angle of the rotation shaft 250, i.e., the rotation angle of the light emitting and receiving module 210. The encoder 252 is connected to the motor control unit 231. The motor control unit 231 can calculate the current rotation angle of the light emitting and receiving module 210 based on the pulse signal output from the encoder 252.

[0022] Once the scanning start position, scanning end position, scanning range, etc. of the slit light S1 relative to the workpiece W are set, it is possible to calculate the rotation start position, rotation end position, rotation angle, etc. of the light emitting and receiving module 210 that correspond to the set scanning start position, scanning end position, and scanning range. Based on the calculation results, the motor control unit 231 controls the motor 220 to oscillate the light emitting and receiving module 210 and scan the slit light S1 in a direction perpendicular to the X direction.

[0023] The signal processing unit 233 is configured by, for example, a microcomputer, a ROM, a RAM, etc., and operates according to a predetermined program to generate cross-sectional profile data of the workpiece W based on the amount of light received by the imaging unit 213.

[0024] The image sensor 213a of the imaging unit 213 has a plurality of pixels arranged two-dimensionally in a U direction corresponding to the X direction and a V direction perpendicular to the U direction. The signal processing unit 233 acquires the luminance value (amount of received light) of each pixel of the image sensor 213a and calculates an approximation curve of the change in luminance value. The signal processing unit 233 calculates the peak position in the V direction of each pixel row on the calculated approximation curve and acquires the calculated peak position as the displacement of the workpiece W.

[0025] The signal processing unit 233 performs the above-mentioned calculation of the peak position multiple times while the light emitting and receiving module 210 is oscillating. The signal processing unit 233 associates the obtained peak position with the rotation angle of the light emitting and receiving module 210 when the peak position was obtained, and stores this as measurement data. Because the rotation angle and UV coordinates of the light emitting and receiving module 210 correspond to the XYZ coordinates of the workpiece, cross-sectional profile data of the workpiece W at a desired rotation angle can be generated based on the measurement data. In addition, by acquiring multiple cross-sectional profiles of the workpiece W at different rotation angles, the signal processing unit 233 can generate data on the three-dimensional shape of the workpiece W.

[0026] The measuring device 200 configured as described above must be fixed to the stand 1 as shown in FIG. 2 because vibration during operation degrades measurement accuracy. In particular, during operation, the light-emitting / receiving module 210 oscillates, causing a vibration force in the Y direction. To prevent vibration even when this vibration force is applied, the stand 1 of this embodiment is not only strong but also highly rigid. This allows high measurement accuracy to be maintained over a long period of time, both inline and offline. While there are optical displacement meters in which the light-emitting unit 210 and the light-receiving unit 213 do not oscillate, as disclosed in Patent Document 1, for example, the stand 1 of this embodiment is effective for suppressing vibration during operation of such optical displacement meters.

[0027] Furthermore, the measurement distance (working distance: WD) that measuring device 200 can measure is predetermined, and the user needs to appropriately install measuring device 200 to be used according to their own measurement environment. Since stand 1 can adjust the position of measuring device 200 in the Z direction as described below, by using stand 1, measuring device 200 can be appropriately and easily installed according to their own measurement environment. In short, by supporting measuring device 200 with stand 1, the user does not need to prepare mounting jigs themselves. Note that the user may prepare only some of the mounting jigs, in which case the user does not need to prepare all of the mounting jigs.

[0028] As shown in FIG. 1 , the stand 1 includes a bottom member 10, a support member 20 extending in the Z direction, and a fixing member 30 to which a measuring device 200 is fixed. The bottom member 10 is made of a metal plate for fixing the support member 20 and extends along the YX plane. The bottom member 10 has a sufficient thickness so that the support member 20 does not easily deform when fixed. As shown in FIG. 6 , a portion of the bottom member 10 near the outer periphery is formed with a plurality of first screw holes 11 for fixing the support member 20 and second screw holes 12 for fixing a member other than the support member 20, with the holes spaced apart from each other. The first screw holes 11 and the second screw holes 12 open on the top surface of the bottom member 10. The support member 20 can be firmly fixed by screwing a fastening member such as a screw or a bolt (described later) into the first screw hole 11 from above. The top surface of the bottom member 10 can be used as a mounting surface A on which a workpiece W is placed. The placement surface A is configured as a plane perpendicular to the Z direction. The upper surface of the bottom surface member 10 can be used as a fixing surface for fixing the support member 20.

[0029] A fastening member for fixing a positioning member for positioning the workpiece W can be screwed into the second screw hole 12. In addition, a fastening member can be screwed into the second screw hole 12 when fixing the bottom member 10 to a user's device or instrument. Examples of the user's device include a transport device, a device for attaching the measuring device 200, etc. Examples of the user's instrument include a rail, frame, bracket, surface plate, etc. extending in the Y direction.

[0030] The support member 20 includes a support body 21 extending in the Z direction and a connecting member 22 provided on top of the support body 21 and connected to the fixing member 30. The support body 21 is formed by stacking a plurality of blocks 23 which are connected to each other by first fastening members C1. The first fastening members C1 are bolts, screws, etc., and in this embodiment are hexagon socket head bolts. The other fastening members are not particularly limited, but can be hexagon socket head bolts like the first fastening members C1.

[0031] The connecting member 22 is a member that is attached to the uppermost block 23, and has a first attachment surface 22a (shown by a dashed line in FIG. 2) to which the fixing member 30 is fixed. The first attachment surface 22a is a surface that extends in the Y direction and the Z direction.

[0032] 1 and 2 show four blocks 23 constituting the support body 21, but this is not limited to four and may be three or less, or five or more. Reducing the number of blocks 23 reduces the height of the first mounting surface 22a of the connecting member 22, while increasing the number of blocks 23 increases the height of the first mounting surface 22a of the connecting member 22. In this way, the support member 20 is configured so that the position of the first mounting surface 22a in the Z direction can be adjusted. Specifically, by increasing or decreasing the number of blocks 23, the position of the first mounting surface 22a of the connecting member 22 in the Z direction can be adjusted in stages. Because the length of the support member 20 can be adjusted in the Z direction by increasing or decreasing the number of blocks 23, it can also be called a length-adjusting member.

[0033] The Z-direction dimension of one block 23 is the Z-direction adjustment granularity of the first mounting surface 22a, and can be set, for example, in the range of 30 mm to 100 mm. The adjustment granularity is the minimum height change amount when making an adjustment; for example, if the vertical dimension of the block 23 is 50 mm, the minimum height change amount when making an adjustment is 50 mm. In other words, the adjustment granularity represents the fineness of adjustment when adjusting the position in the Z direction. Note that all the blocks 23 may be the same, or some of the blocks 23 may be different from the other blocks 23. In this embodiment, a case where all the blocks 23 are the same will be described.

[0034] 7 is a view of the support body 21 viewed from the X direction, and schematically shows the state in which the bottom block 23 has been separated from the second-lowest block 23. Each block 23 is formed by extrusion molding of, for example, an aluminum alloy. The block 23 has a pair of side plate portions 23a, 23a, a pair of end plate portions 23b, 23b, and a reinforcing plate portion 23c. The side plate portion 23a, the end plate portion 23b, and the reinforcing plate portion 23c are integrally molded.

[0035] The pair of side plates 23a, 23a are parallel to each other. The pair of end plates 23b, 23b are also parallel to each other, and the pair of side plates 23a, 23a and the pair of end plates 23b, 23b form a rectangular closed cross section. The reinforcing plate 23c is provided to form a diagonal brace within the closed cross section, dividing the closed cross section formed by the pair of side plates 23a, 23a and the pair of end plates 23b, 23b into multiple triangular closed cross sections. This improves the strength and rigidity of the block 23. Note that the shape of the reinforcing plate 23c is not limited to a diagonal brace-like shape and may be, for example, a shape extending in the Z direction or a shape extending in the Y direction. Furthermore, multiple reinforcing plate portions extending in the Z direction or multiple reinforcing plate portions extending in the Y direction may be provided.

[0036] Both ends of each end plate portion 23b are extension plate portions 23d extending from the side plate portions 23a, 23a. The upper extension plate portion 23d has a screw hole 23e formed therethrough in the thickness direction. The lower extension plate portion 23d has a through hole 23f formed therethrough in the thickness direction. When joining the top block 23 to the second block 23 from the top in FIG. 7 , the lower extension plate portion 23d of the top block 23 is placed on the upper extension plate portion 23d of the second block 23. Then, a first fastening member C1 is inserted through the through hole 23f from above the lower extension plate portion 23d of the top block 23 and then screwed into the screw hole 23e of the upper extension plate portion 23d of the second block 23. The blocks 23 are joined by four first fastening members C1 at mutually spaced locations, thereby achieving sufficient joining strength. In this manner, the extension plate portions 23d function as joining members. Furthermore, the contact surfaces between the blocks 23 are formed on planes perpendicular to the Z direction and have widths in the X and Y directions, so that rattles and the like are unlikely to occur when the blocks 23 are joined together.

[0037] As described above, the top block 23, the second-highest block 23, the second-lowest block 23, and the bottom block 23 are joined together to form a support member 20 extending in the Z direction. When joining the lower part of the support member 20 to the bottom member 10, second fastening members C2 (shown in FIGS. 1 and 2) are inserted into the through holes 23f from above the lower extension plate portion 23d of the bottom block 23 and then screwed into the first screw holes 11 of the bottom member 10. The blocks 23 and the bottom member 10 are joined at mutually spaced locations by the four second fastening members C2, thereby sufficiently increasing the joining strength. Furthermore, the contact surface of the blocks 23 with the bottom member 10 has width in both the X and Y directions, so rattles and the like are unlikely to occur when the blocks 23 are joined to the bottom member 10.

[0038] When supporting the measuring device 200, the orientation of the support member 20 can be set as desired. In the example shown in Fig. 7, the orientation of the support member 20 is set so that the pair of extending plate portions 23d, 23d located on the upper side of the block 23 are spaced apart from each other in the Y direction, but this is not limiting, and the orientation of the support member 20 can also be set so that the pair of extending plate portions 23d, 23d located on the upper side of the block 23 are spaced apart from each other in the X direction. Furthermore, the support member 20 can also be installed with its longitudinal direction inclined with respect to the vertical line.

[0039] As shown in Fig. 8, the connecting member 22 has a block-shaped portion 22b connected to the top block 23 of the support main body 21, a plate-shaped portion 22c extending upward from the top surface of the block-shaped portion 22b, and a vertical plate portion 22d provided at the tip of the plate-shaped portion 22c. As shown in Figs. 1 and 2, the block-shaped portion 22b has a cross-sectional shape similar to that of the block 23, and is connected to the top block 23 by a third fastening member C3. This connecting structure can be the same as the connecting structure between the blocks 23. The first mounting surface 22a is formed on the vertical plate portion 22d.

[0040] 2, the fixing member 30 is fixed to the first mounting surface 22a of the support member 20, and has a second mounting surface 30a for fixing the measuring device 200, and as will be described in detail later, is configured so that the position of the second mounting surface 30a in the Z direction relative to the first mounting surface 22a of the support member 20 is adjustable. In other words, the stand 1 according to this embodiment is capable of adjusting the positions of the first mounting surface 22a of the support member 20 and the second mounting surface 30a of the fixing member 30 in the Z direction, so that the distance in the Z direction between the workpiece W and the measuring device 200 is included within the measurement range of the measuring device 200.

[0041] 2, measuring device 200 is fixed to fixing member 30 so that the width direction of slit beam S1 of measuring device 200 is along the X direction. However, measuring device 200 can also be rotated 90° around the Z axis and fixed to fixing member 30 so that the width direction of slit beam S1 of measuring device 200 is along the Y direction. In other words, fixing member 30 is configured to be able to selectively fix measuring device 200 so that the width direction of slit beam S1 is along either the X direction or the Y direction. Furthermore, stand 1 can also be used in a state rotated 90° around the Z axis.

[0042] 9, the fixing member 30 has a base member 31 fixed to the first mounting surface 22a of the support member 20, a first mounting member 32 connected to the base member 31, a second mounting member 33 connected to the first mounting member 32, and a height adjustment screw 34 for adjusting the Z-direction positions of the first mounting member 32 and the second mounting member 33 relative to the base member 31. The first mounting member 32 and the second mounting member 33 constitute the mounting member of the present invention.

[0043] The base member 31 has a pillar-side member 31A made up of a plate-like member extending in the Z and Y directions, and a movable member 31B that is separate from the pillar-side member 31A. The pillar-side member 31A and the vertical plate portion 22d of the connecting member 22 are connected by a fastening member C shown in Figure 8. Therefore, the pillar-side member 31A cannot move in any of the X, Y, or Z directions.

[0044] 8, the Y-direction dimension of the pillar-side member 31A is set to be longer than the Y-direction dimension of the vertical plate portion 22d of the connecting member 22, and both sides of the pillar-side member 31A in the Y direction extend outward beyond both Y-direction ends of the vertical plate portion 22d. Two slits 31a that are long in the Z direction are formed on each side of the pillar-side member 31A in the Y direction. The Z-direction dimension of the slits 31a is equal to the Z-direction position adjustment range of the measuring device 200 by the fixing member 30.

[0045] The movable member 31B is attached so as to be movable relative to the pillar-side member 31A. That is, the movable member 31B is guided in the Z direction while in contact with the surface of the pillar-side member 31A on the side of the measuring device 200. As shown in Fig. 10, screw holes 31b are formed in the movable member 31B. The screw holes 31b open on the pillar-side member 31A side, and four of them are provided so as to coincide with the slits 31a of the pillar-side member 31A.

[0046] The base member 31 has a position fixing screw 31C for fixing the position of the movable member 31B relative to the support-side member 31A. The position fixing screw 31C is inserted into a slit 31a in the support-side member 31A from the side opposite the measuring device 200 and is threaded into a screw hole 31b in the movable member 31B. The outer surface of the head of the position fixing screw 31C is treated with a non-slip finish. Examples of the non-slip finish include knurling, and the non-slip finish allows the user to tighten and loosen the position fixing screw 31C without using tools. Note that a hexagonal hole is formed in the head of the position fixing screw 31C, so that the position fixing screw 31C can be tightly tightened or loosened using a tool.

[0047] The first mounting member 32 is composed of a plate-like member extending in the X and Y directions along the upper surface of the movable member 31B. As shown in FIG. 11, the first mounting member 32 has a plurality of first openings 32a each formed by an elongated hole that penetrates the first mounting member 32 in the thickness direction and is formed long in the X direction. When the X direction is defined as the first direction and the Y direction is defined as the second direction, the width of the first openings 32a in the first direction is wider than the width in the second direction. The plurality of first openings 32a are formed at intervals from one another in the Y direction. The first openings 32a are openings for adjusting the position in the X direction.

[0048] As shown in FIGS. 9 and 10 , a fourth fastening member C4 is inserted from above into the first opening 32a of the first mounting member 32. The fourth fastening member C4 inserted into the first opening 32a is adapted to thread into a screw hole (not shown) formed in the movable member 31B. When the fourth fastening member C4 is loosened, the first mounting member 32 is uncoupled from the movable member 31B. In this uncoupled state, the first opening 32a is elongated in the X direction, allowing the first mounting member 32 to be moved to a desired position in the X direction relative to the movable member 31B. When the fourth fastening member C4 is tightened, the fourth fastening member C4 couples the first mounting member 32 to the movable member 31B via the first opening 32a, preventing relative movement between the first mounting member 32 and the movable member 31B. In other words, in this embodiment, the fixing member 30 allows adjustment of the position of the measuring device 200 in the X direction, resulting in a stand 1 having an X-direction position adjustment mechanism.

[0049] Furthermore, a cutout portion 32b, into which the shank of an adjustment screw hole 31e (described later) is inserted, is formed in the middle portion in the Y direction of the first mounting member 32. The cutout portion 32b is open to the support-side member 31A side. The width of the cutout portion 32b in the Y direction is set to be sufficiently larger than the outer diameter of the shank of the adjustment screw hole 31e, so that the outer surface of the shank of the adjustment screw hole 31e does not interfere with the inner surface of the cutout portion 32 of the first mounting member 32 during position adjustment in the Y direction (described later).

[0050] The second mounting member 33 is arranged on the upper surface of the first mounting member 32 and is composed of a plate-like member extending in the X and Y directions. The lower surface of the portion of the second mounting member 33 that protrudes from the first mounting member 32 in the X direction serves as a second mounting surface 30a extending in the X and Y directions, and the measuring device 200 is mounted on this portion. The dimension of the second mounting surface 30a in the X direction can be set as desired depending on the size of the measuring device 200 to be mounted, etc.

[0051] As shown in Figure 12, the second mounting member 33 has a plurality of second openings 33a, each formed by a slot that penetrates the second mounting member 33 in the thickness direction and is elongated in the Y direction. When the X direction is defined as the first direction and the Y direction is defined as the second direction, the width of the second openings 33a in the second direction is wider than the width in the first direction. The plurality of second openings 33a are formed at intervals from one another in the Y direction and the X direction. The second openings 33a are openings for adjusting the position in the Y direction.

[0052] As shown in FIGS. 9 and 10 , a fifth fastening member C5 is inserted from above into the second opening 33a of the second mounting member 33. The fifth fastening member C5 inserted into the second opening 33a is adapted to thread into a screw hole 32c (shown in FIG. 11 ) formed in the first mounting member 32. When the fifth fastening member C5 is loosened, the second mounting member 33 is uncoupled from the first mounting member 32. In this uncoupled state, the second opening 33a is elongated in the Y direction, allowing the second mounting member 33 to be moved to a desired position in the Y direction relative to the first mounting member 32. When the fifth fastening member C5 is tightened, the second mounting member 33 is coupled to the first mounting member 32 by the fifth fastening member C5, preventing relative movement between the second mounting member 33 and the first mounting member 32. In other words, in this embodiment, the fixing member 30 allows adjustment of the position of the measuring device 200 in the Y direction, resulting in a stand 1 having a Y-direction position adjustment mechanism. Furthermore, since the fifth fastening member C5 is screwed into the screw hole 32c from above, the second mounting member 33 is joined to the first mounting member 32 from above.

[0053] The height adjustment screw 34 is disposed so as to extend in the Z direction, i.e., so that its axis faces the Z direction. That is, as shown in FIGS. 1 and 2, a support plate portion 31d that protrudes toward the measuring device 200 is provided on the upper part of the support column side member 31A. The head of the height adjustment screw 34 is positioned above the support plate portion 31d, and the lower surface of the head of the height adjustment screw 34 is supported from below by the upper surface of the support plate portion 31d. In this state, the height adjustment screw 34 is rotatable around its axis. Because no thread groove is formed in the support plate portion 31d, the position of the height adjustment screw 34 in the Z direction does not change even when the height adjustment screw 34 rotates.

[0054] Meanwhile, the movable member 31B is formed with an adjustment screw hole 31e (shown in FIG. 9) extending in the Z direction, into which the shank of the height adjustment screw 34 screws. The shank of the height adjustment screw 34 is disposed so as to pass through a notch 32b formed in the first mounting member 32, and screws into the adjustment screw hole 31e of the movable member 31B. As shown in FIGS. 14A and 14B, rotating the height adjustment screw 34 in one direction moves the movable member 31B upward, and rotating the height adjustment screw 34 in the other direction moves the movable member 31B downward. In this way, the position of the movable member 31B in the Z direction can be changed by rotating the height adjustment screw 34. This mechanism is called a Z-direction position adjustment mechanism using a screw.

[0055] The head of the height adjustment screw 34 has a cylindrical knob shape and protrudes from the upper surface of the support side member 31A. A user can rotate the head of the height adjustment screw 34 by hand without using any tools. Because a screw-based Z-direction position adjustment mechanism is used, even if the measuring device 200 is heavy, it is possible to move the measuring device 200 in the Z direction with a small force, or even move it slightly, simply by rotating the head of the height adjustment screw 34.

[0056] 14A is the uppermost position of the first mounting member 32 and the second mounting member 33. The position shown in Fig. 14B is the lowermost position of the first mounting member 32 and the second mounting member 33. The distance in the Z direction between the uppermost position of the first mounting member 32 and the second mounting member 33 and the lowermost position of the first mounting member 32 and the second mounting member 33 is the adjustment amount made by the height adjustment screw 34. The adjustment amount made by the height adjustment screw 34 is set to be larger than the dimension of the block 23 in the Z direction.

[0057] The first mounting member 32 and the second mounting member 33 are connected to the movable member 31B, so that when the movable member 31B moves in the Z direction, the first mounting member 32 and the second mounting member 33 also move in the Z direction, thereby making it possible to adjust the position of the second mounting surface 30a in the Z direction.

[0058] The adjustment of the position of the second mounting surface 30a in the Z direction using the height adjustment screw 34 is an adjustment of the position of the second mounting surface 30a in the Z direction relative to the first mounting surface 22a using the fixing member 30. Before performing the adjustment using the height adjustment screw 34, the position fixing screw 31C is loosened and the movable member 31B is not fastened to the support side member 31A. Then, the height adjustment screw 34 is rotated to adjust the position of the second mounting surface 30a in the Z direction. At this time, the smaller the rotation angle of the height adjustment screw 34, the smaller the adjustment granularity of the position of the second mounting surface 30a in the Z direction. Conversely, the larger the rotation angle of the height adjustment screw 34, the greater the adjustment granularity of the position of the second mounting surface 30a in the Z direction.

[0059] The Z-direction position adjustment using the height adjustment screw 34 is not a stepwise adjustment like the Z-direction position adjustment by increasing or decreasing the block 23, but is essentially a stepless adjustment, allowing for precise adjustment. In other words, the adjustment granularity of the Z-direction position of the second mounting surface 30a using the height adjustment screw 34 is set to a finer adjustment granularity than the Z-direction position adjustment of the first mounting surface 22a by increasing or decreasing the block 23 of the support member 20. Once the Z-direction position adjustment of the second mounting surface 30a is complete, the position fixing screw 31C is tightened. The position fixing screw 31C can be easily tightened by hand without using any tools.

[0060] The position fixing screw 31C can be loosened or tightened by hand, and the height adjusting screw 34 can also be rotated by hand, so when the user wants to fine-tune the position of the measuring device 200 in the Z direction, no tools are required and the fine adjustment can be made easily and quickly.

[0061] When adjusting the second mounting surface 30a in the X direction, the fourth fastening member C4 is loosened to leave the first mounting member 32 untightened to the movable member 31B. This allows the first mounting member 32 to move in the X direction, which is the longitudinal direction of the first opening 32a, so the user can move the first mounting member 32 in the X direction until it reaches the desired position. After the first mounting member 32 has moved to the desired position, the fourth fastening member C4 is tightened to fix the first mounting member 32 to the movable member 31B. Note that the X-direction adjustment mechanism may be provided as needed or may be omitted.

[0062] When adjusting the second mounting surface 30a in the Y direction, the fifth fastening member C5 is loosened to leave the second mounting member 33 untightened to the first mounting member 32. This allows the second mounting member 33 to move in the Y direction, which is the longitudinal direction of the second opening 33a, so the user can move the second mounting member 33 in the Y direction until it reaches the desired position. After the second mounting member 33 has moved to the desired position, the fifth fastening member C5 is tightened to fix the second mounting member 33 to the first mounting member 32. Note that the Y direction adjustment mechanism may be provided as needed or may be omitted.

[0063] When the adjustment mechanisms in the X and Y directions are omitted, a mounting member consisting of a single component can be used without the structure having the first mounting member 32 and the second mounting member 33. By directly connecting this mounting member to the movable member 31B, it becomes possible to adjust the position only in the Z direction.

[0064] Here, for example, if the fifth fastening member C5 is loosened and comes off the first mounting member 32, there is a risk that the second mounting member 33 to which the measuring device 200 is attached may fall off. As a structure to prevent the second mounting member 33 from falling off, in this embodiment, a temporary fixing structure for the second mounting member 33 is provided.

[0065] That is, as shown in Fig. 13, the second mounting member 33 is formed with downwardly protruding temporary fixing projections 33c. The projections 33c are formed on both sides of the second mounting member 33 in the Y direction. Meanwhile, as shown in Fig. 11, the first mounting member 32 is formed with insertion holes 32d on both sides of the first mounting member 32 in the Y direction, into which the projections 33c of the second mounting member 33 are inserted. The insertion holes 32d are formed long in the Y direction, similar to the second openings 33a, and each projection 33c is relatively movable in the Y direction within each insertion hole 32d so as not to hinder position adjustment in the Y direction. Furthermore, for position adjustment in the Y direction, each projection 33c is guided in the Y direction by the side surface of each insertion hole 32d extending in the Y direction.

[0066] In a state where the second mounting member 33 is not joined from above by the fifth fastening member C5, the protrusion 33c inserted into the insertion hole 32d comes into contact with the inner surface of the insertion hole 32d, thereby temporarily fixing the second mounting member 33 to the first mounting member 32. By setting the thickness of the protrusion 33c, the width of the insertion hole 32d in the X direction, the length of the protrusion 33c, etc., the protrusion 33c can be made to come into contact with and engage the inner surface of the insertion hole 32d before the second mounting member 33 falls off.

[0067] (display device) The display device 300 shown in FIGS. 2 and 5 may be configured by installing a predetermined program or application on a general-purpose computer such as a desktop personal computer or a notebook personal computer, or may be configured by a controller specifically designed for the measurement system S. FIGS. 2 and 5 show an example in which the display device 300 includes a main body 301 and a monitor 302. In this case, the main body 301 may be configured, for example, by a desktop personal computer or a controller, and the monitor 302 may be configured by a liquid crystal display or an organic EL display connected to the desktop personal computer or the controller. When a notebook personal computer is used as the display device 300, the main body 301 and the monitor 302 are integrated. In other words, the display device 300 may have any configuration.

[0068] The measurement data output from the signal processing unit 233 of the measuring device 200 is input to the main body unit 301. As shown in Fig. 2, the main body unit 301 generates an interface screen 303 for displaying the measurement data and displays it on the monitor 302. The interface screen 303 is provided with a displacement display area 303a that displays the displacement in the Z direction as measurement data, and a profile display area 303b that displays the cross-sectional profile. Only one of the displacement display area 303a and the profile display area 303b may be provided.

[0069] The measurement data output from the measuring device 200 reflects, in approximately real time, the current measurement results of the workpiece W. For this reason, when the position in the Z direction is adjusted using the height adjustment screw 34, for example, and the measuring device 200 moves in the Z direction accordingly, the displacement displayed in the displacement display area 303a changes in approximately real time and is updated to the adjusted displacement.

[0070] Similarly, for the profile display area 303b, when the position in the Z direction is adjusted using, for example, the height adjustment screw 34, the profile is updated to the profile measured at the adjusted height. In this way, the measurement system S of this embodiment is configured so that the position of the measuring device 200 in the Z direction can be adjusted using the fixing member 30 while the user is viewing the measurement results displayed on the display device 300, and therefore the work of including the distance in the Z direction between the workpiece W and the measuring device 200 within the measurement range can be easily performed.

[0071] (Stand configuration example) The lower part of the support member 20 may be connected to the above-mentioned user's device or tool without being connected to the bottom member 10. In this case, the stand 1 does not have the bottom member 10. The workpiece W may be transported by a transport device such as a conveyor without being placed on the bottom member 10. In this case, the position of the measuring device 200 in the Z direction can be adjusted with the lower part of the support member 20 connected to the frame of the transport device or a frame separate from the transport device.

[0072] 9, a through-hole 22A is formed in the block-shaped portion 22b of the connecting member 22. For example, when the support member 20 of the stand 1 is omitted for use, the connecting member 22 can be fixed to an external frame or the like by a fastening member (not shown) inserted into the through-hole 22A.

[0073] (Example of support member configuration) 15 shows a first modified example. In the first modified example, a support member 40 has a first support member 41 extending in the Z direction, a second support member 42 extending in the X direction and having a first mounting surface 42a, and an intermediate member 43 connecting the first support member 41 and the second support member 42. Similar to the support member 20 shown in FIG. 2, the first support member 41 is formed by stacking a plurality of blocks 23 connected to each other by first fastening members C1 in the Z direction. Therefore, the first support member 41 is a length adjustment member in the Z direction.

[0074] The intermediate member 43 is made of the same material as the connecting member 22 shown in Fig. 2. That is, the connecting member 22 is a member attached to the uppermost block 23 constituting the first support member 41, and has a block-shaped portion 43b, a plate-shaped portion 43c extending upward from the top surface of the block-shaped portion 43b, and a vertical plate portion 43d provided at the tip of the plate-shaped portion 43c. The first mounting surface 42a is formed on the vertical plate portion 43d. The fixing member 30 of the first modified example is the same as the fixing member 30 shown in Fig. 2.

[0075] The second support member 42 is composed of the same blocks 23 as the blocks 23 that constitute the first support member 41. By rotating the blocks 23 that constitute the first support member 41 by 90 degrees around the Y axis, they can be used as the blocks 23 of the second support member 42. In other words, the blocks 23 used in the first support member 41 and the blocks 23 used in the second support member 42 have the same spacing between multiple fastening members, which reduces the amount of work required to check whether the block 23 is for the first support member 41 or the second support member 42, and simplifies assembly. Note that the blocks that constitute the second support member 42 and the blocks that constitute the first support member 41 may be different.

[0076] 15 shows the case where the second support member 42 includes only one block 23, but the second support member 42 may also be configured by arranging multiple blocks 23 in the X direction and joining them together with fastening members. By reducing the number of blocks 23 that make up the second support member 42, the measuring device 200 can be used in a position closer to the first support member 41, and by increasing the number of blocks 23 that make up the second support member 42, the measuring device 200 can be used in a position farther away from the first support member 41. In this way, the second support member 42 is configured so that the position of the first mounting surface 42a in the X direction relative to the first support member 41 is adjustable, and it can also be called an X-direction length adjustment member.

[0077] The orientation of the stand 1 when installed is not limited to the orientation shown in FIG. 15 . For example, the stand 1 can be rotated 90° around the Z axis and installed so that the second support member 42 extends in the Y direction. In this case, the second support member 42 is configured by arranging multiple blocks 23 in the Y direction and connected to each other by fastening members. The Y-direction position of the first mounting surface 42a relative to the first support member 41 can be adjusted by increasing or decreasing the number of blocks 23 that make up the second support member 42. In this case, the second support member 42 can also be called a Y-direction length adjustment member. Furthermore, if the second support member 42 is omitted in the first modified example, the stand 1 shown in FIG. 2 is obtained, and such a usage form can also be adopted.

[0078] 16 shows a second modified example. In the second modified example, the bottom member 10 of the first modified example is omitted. In this case, for example, a frame 340 extending in the Y direction is prepared as a support member on the user side. The frame 340 may be a general-purpose frame or a dedicated frame for supporting the measuring device 200.

[0079] 17 shows a third modified example. In the third modified example, the first support member 41 is omitted from the first modified example, and the stand 1 is composed of the second support member 42 and the fixing member 30. When using the stand 1 according to the third modified example, for example, a frame 350 extending in the Z direction is prepared as a support member on the user side. The frame 350 may be a general-purpose frame or a dedicated frame for supporting the measuring device 200.

[0080] The second support member 42 is fixed to a desired position on the frame 350. The Z-direction position of the measuring device 200 can be roughly adjusted by adjusting the fixed position of the second support member 42 relative to the frame 350. After the second support member 42 is fixed to the frame 350, the position can be adjusted in the Z direction and in the X and Y directions using the adjustment mechanism of the fixing member 30.

[0081] (Fixing member for measuring device) FIG. 18 shows the state of use of the measuring device fixing member 30. The measuring device fixing member 30 is configured as the fixing member 30 shown in FIG. 2, and therefore, the measuring device fixing member 30 can be obtained by omitting the support member 20 and the connecting member 22 of the stand 1 shown in FIG. 2. When using the measuring device fixing member 30, a frame 350 is prepared as an external fixing surface. The support side member 31A of the base member 31 is connected to the side surface (external fixing surface) 350a of the frame 350 from the X direction by the sixth fastening member C6. Note that in a configuration that also uses the connecting member 22 as shown in FIGS. 14A and 14B, the connecting member 22 may be connected to the frame 350 via the lower surface 22e in the Z direction of the connecting member 22 by the third fastening member C3 (see FIG. 1) or the through hole 22A (see FIG. 9). In this case, the connecting member 22 serves as the external fixing surface for the measuring device fixing member 30.

[0082] Since the measuring device 200 is fixed to the mounting surface 30a of the second mounting member 33, the position of the measuring device 200 in the Z direction can be roughly adjusted by adjusting the fixed position of the pillar-side member 31A relative to the frame 350. After the pillar-side member 31A is fixed to the frame 350, the position can be adjusted in the Z direction and in the X and Y directions using the adjustment mechanism of the fixing member 30.

[0083] The measuring apparatus fixing member 30 can also be used by rotating it 90° around the Z axis. In this case, the support column side member 31A of the base member 31 is connected to the side surface 350a of the frame 350 from the Y direction by the sixth fastening member C6.

[0084] The above-described embodiments are merely examples in all respects and should not be construed as limiting. Furthermore, all modifications and variations within the scope of the claims are within the scope of the present invention. [Industrial Applicability]

[0085] As described above, the present disclosure can be used to support a measuring device that measures a workpiece. [Explanation of symbols]

[0086] 1 Stand 10 Bottom member 20 Support member 22a First mounting surface 23 blocks 30 Fixing member for measuring device 30a Second mounting surface 31 Foundation members 32 First mounting member 32a 1st opening 33 Second mounting member 33a 2nd opening 200 Measuring Equipment 300 display device A Placement surface S Measurement System S1 Slit light double work

Claims

1. A stand for supporting a measuring device having a predetermined measurement range in the Z direction and measuring a workpiece positioned in the measurement range, a support member extending in the Z direction and having a first mounting surface; a fixing member that is fixed to the first mounting surface of the support member and has a second mounting surface for fixing the measuring device, the support member is configured so that the position of the first mounting surface in the Z direction is adjustable, the fixing member is configured to be able to adjust a position of the second mounting surface of the support member relative to the first mounting surface in the Z direction, A stand characterized in that the distance in the Z direction between the workpiece and the measuring device is included within the measurement range by adjusting the positions of the support member and the fixing member in the Z direction.

2. 2. The stand according to claim 1, A stand in which the support member is constructed by stacking one or more blocks connected by fastening members.

3. 2. The stand according to claim 1, The stand is configured such that the position of the second mounting surface of the support member relative to the first mounting surface in the X direction or the Y direction can be further adjusted.

4. 2. The stand according to claim 1, The support member is a first support member extending in the Z direction; a second support member extending in the X direction or the Y direction and having the first mounting surface; an intermediate member that connects the first support member and the second support member; and The second support member is configured so that the position of the first mounting surface relative to the first support member in the X direction or the Y direction can be adjusted.

5. 5. The stand according to claim 4, The first support member is configured by stacking one or more blocks connected in the Z direction by fastening members, The second support member is a stand configured by arranging one or more blocks in the X direction or the Y direction and connecting them with fastening members.

6. 6. The stand according to claim 5, A stand in which the one or more blocks used in the first support member and the one or more blocks used in the second support member have the same spacing between the multiple fastening members.

7. 2. The stand according to claim 1, The fixing member is a base member fixed to the first mounting surface of the support member; a mounting member coupled to the base member and having the second mounting surface; an adjustment screw for adjusting the position of the mounting member in the Z direction relative to the base member; A stand having:

8. 8. The stand according to claim 7, The mounting member has an opening whose width in one of the X and Y directions is greater than the width in the other direction, and the mounting member is coupled to the base member by a fastening member via the opening.

9. 8. The stand according to claim 7, The mounting member is a first mounting member having a first opening whose width in a first direction, which is one of the X direction and the Y direction, is wider than its width in a second direction, which is the other of the X direction and the Y direction, and which is coupled to the base member by a fastening member via the first opening; A stand having a second mounting member that has the second mounting surface and a second opening whose width in the second direction is wider than its width in the first direction, and that is connected to the first mounting member by a fastening member through the second opening.

10. 2. The stand according to claim 1, the measuring device is an optical displacement meter that projects a slit light extending in one direction and receives light reflected from the workpiece, thereby acquiring a cross-sectional profile of the workpiece; The fixing member is configured to be able to selectively fix the measurement device so that the slit light is aligned along one of the X direction and the Y direction.

11. 2. The stand according to claim 1, The stand further comprises a bottom member that is placed on the XY plane and that fixes the support member.

12. 12. The stand according to claim 11, A stand in which a plurality of first screw holes for fixing the support member and a plurality of second screw holes for fixing a member other than the support member are formed at intervals in a portion of the bottom member near the outer periphery.

13. 2. The stand according to claim 1, A stand in which the Z-direction position adjustment of the second mounting surface relative to the first mounting surface by the fixing member is set to a finer adjustment granularity than the Z-direction position adjustment of the first mounting surface by the support member.

14. 10. The stand according to claim 9, the second mounting member is coupled to the first mounting member from above by the fastening member, The second mounting member has a projection that projects downward, The first mounting member has an insertion hole into which the protrusion is inserted, A stand in which the second mounting member is temporarily fixed to the first mounting member by the protrusion inserted into the insertion hole abutting against the inner surface of the insertion hole without being joined from above by the fastening member.

15. The stand according to claim 1; the measuring device; a display device that displays the measurement results of the measuring device, A measurement system configured such that the fixing member of the stand and the measuring device are fixed via the second mounting surface and the Z-direction position of the measuring device can be adjusted by the fixing member while the measurement results are displayed on the display device.

16. A fixing member for a measuring device that has a predetermined measurement range in the Z direction and is used to support a measuring device that measures a workpiece located in the measurement range, a base member fixed to an external fixed surface; a mounting member coupled to the base member and having a mounting surface for fixing a measuring device; an adjustment screw extending in the Z direction for adjusting the position of the mounting member relative to the base member in the Z direction, The base member is coupled to the fixing surface by a fastening member in either the X direction or the Y direction.

17. 17. The measuring device fixing member according to claim 16, The mounting member has an opening whose width in one of the X and Y directions is greater than the width in the other direction, and is connected to the base member by a fastening member via the opening.

18. 18. The measuring device fixing member according to claim 17, The mounting member is a first mounting member having a first opening whose width in a first direction, which is one of the X direction and the Y direction, is wider than its width in a second direction, which is the other of the X direction and the Y direction, and which is coupled to the base member by a fastening member via the first opening; A fixing member for a measuring device, comprising: a second mounting member having the mounting surface and a second opening whose width in the second direction is wider than its width in the first direction, and which is connected to the first mounting member by a fastening member via the second opening.

19. 19. The measuring device fixing member according to claim 18, the second mounting member is coupled to the first mounting member from above by the fastening member, The second mounting member has a projection that projects downward, The first mounting member has an insertion hole into which the protrusion is inserted, A fixing member for a measuring device, in which the second mounting member is temporarily fixed to the first mounting member by the protrusion inserted into the insertion hole abutting the inner surface of the insertion hole without being joined from above by the fastening member.

20. 17. The measuring device fixing member according to claim 16, the measuring device is an optical displacement meter that projects a slit light extending in one direction and receives light reflected from the workpiece, thereby acquiring a cross-sectional profile of the workpiece; The mounting member is configured to be able to selectively fix the measurement device so that the slit light is aligned along one of the X direction and the Y direction.

Images