Actuator system

The actuator system with N actuators and magnetic control valves enables sequential deformation and return, addressing the lack of stimulus-responsive actuators by mimicking Mimosa pudica movement for soft, responsive systems.

JP2025178720APending Publication Date: 2025-12-09INSTITUTE OF SCIENCE TOKYO
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Patent Information

Application Number
JP2024085498
Authority / Receiving Office
JP · JP
Patent Type
Applications
Current Assignee / Owner
Filing Date
2024-05-27
Publication Date
2025-12-09

AI Technical Summary

Technical Problem

Existing actuators lack a stimulus-responsive function that mimics the flexible and rapid movement of plants like Mimosa pudica, limiting their integration into soft, responsive systems for human environments.

Method used

An actuator system comprising N actuators and N fluid circuits, where each actuator has two chambers that deform in opposite directions under pressure, with a fluid circuit that switches states based on pressure thresholds, allowing sequential deformation and return to initial states using magnetic control valves.

Benefits of technology

The system provides a stimulus-responsive actuator system capable of sequential deformation and return to initial states, mimicking the Mimosa pudica movement, suitable for integration into soft, responsive systems.

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Abstract

To provide an actuator system having a stimulus response function.SOLUTION: Fluid circuits 200 correspond to actuators 100. When i is an integer ranging from 1 to N, with 0 representing N-th, a first port P1 of an i-th fluid circuit 200 is connected to a first chamber 110 of an i-th actuator 100, a second port P2 is connected to a second chamber 120 of the i-th actuator, a third port P3 is connected to an air pressure source 4, and a fourth port P4 is connected to a second port P2 of an (i-1)th fluid circuit 200. In a first state φ1, the third port P3 and the first port P1 are in fluid communication, and the second port P2 is open to atmospheric pressure. In a second state φ2, the third port P3 and the second port P2 are electrically connected, and the first port P1 is open to atmospheric pressure.SELECTED DRAWING: Figure 7
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Description

[Technical Field]

[0001] The present disclosure relates to an actuator system that utilizes fluid pressure. [Background technology]

[0002] Various actuators are used in industrial and medical fields. Among these actuators, those using pneumatic pressure have attracted attention. Pneumatic pressure is characterized by its light weight and flexibility, and has high output, making it very useful in some applications.

[0003] The bowing movement of the Mimosa pudica (scientific name: Mimosa pudica) is a unique trait that exhibits exceptional speed for a plant. This bowing movement is generated by a motor organ at the base of the leaf called the pulvinus. When stimulated, the plant closes its leaves. After a certain period of time, the amount of fluid in the cells is restored to its initial state, allowing the leaves to return to their open state.

[0004] If we could artificially reproduce such flexible structures with stimulus-response functions, it would open up the possibility of developing them as new actuators with built-in safety functions that are integrated with the human living environment and the natural world. In particular, a seat-structured actuator can be easily fabricated into a drive system by wrapping or attaching it to an object. If sensing, signal transmission, and feedback functions could also be incorporated into this seat structure, it would be possible to design a stimulus-response mechanism that reacts to external stimuli with a soft configuration. [Prior art documents] [Non-patent literature]

[0005] [Non-Patent Document 1] Yuta Fujii and Hideyuki Tsukagoshi, "A fluid soft actuator aiming to reproduce the turgor movement of Mimosa pudica - Proposal of the basic structure of the actuator -", Japan Society of Mechanical Engineers ROBOMECH2023, June 23, 2023, 1P1-I15(1) -1P1-I15(4) [Non-patent document 2] Yuji Miyaki, Hideyuki Tsukagoshi, Self-Excited Vibration Valve That Induces Traveling Waves in Pneumatic Soft Mobile Robots, IEEE Robotics and Automation Letters (Volume: 5, Issue: 3, 04 March 2020) 4133 - 4139 [Non-patent document 3] Yijie Jiang, Lucia M. Korpas, Jordan R. Raney, "Bifurcation-based embodied logic and autonomous actuation", Nature Communications(2019) 10:128 https: / / doi.org / 10.1038 / s41467-018-0805 Summary of the Invention [Problem to be solved by the invention]

[0006] It is in this context that the present disclosure has been made, and one of its exemplary purposes is to provide an actuator system having a stimulus-responsive function. [Means for solving the problem]

[0007] An actuator system according to one embodiment of the present disclosure includes N actuators (N≧2) and N fluid circuits corresponding to the N actuators. Each actuator has a first chamber and a second chamber, and deforms in opposite directions when an input port of the first chamber is pressurized and when an input port of the second chamber is pressurized. Let i be an integer ranging from 1 to N, with 0 being the Nth. The i-th fluid circuit has a first port connected to the first chamber of the i-th actuator, a second port connected to the second chamber of the i-th actuator, a third port connected to an air pressure source, and a fourth port connected to the second port of the (i−1)-th fluid circuit. The fluid circuit is switchable between a first state in which the third port and the first port are electrically connected and the second port is open to atmospheric pressure, and a second state in which the third port and the second port are electrically connected and the first port is open to atmospheric pressure. The fluid circuit is configured such that in the first state, when the pressure at the first port exceeds a first threshold value, the fluid circuit transitions to the second state; in the second state, when the pressure at the second port exceeds a second threshold value, the fluid circuit transitions to the first state; and in the first state, when the pressure at the fourth port exceeds a third threshold value, the fluid circuit transitions to the second state.

[0008] Any combination of the above elements, or mutual substitution of elements or expressions between methods, devices, systems, etc., are also valid aspects of the present invention or the present disclosure. Furthermore, the description in this section (Means for Solving the Problems) does not explain all essential features of the present invention, and therefore, subcombinations of the described features may also constitute the present invention. [Effects of the Invention]

[0009] According to one aspect of the present disclosure, an actuator system having a stimulus-responsive function can be provided. [Brief explanation of the drawings]

[0010] [Figure 1] FIG. 1 is a cross-sectional view of an actuator modeled after a mimosa pudica. [Figure 2]FIG. 2 is an exploded view of the first and second chambers. [Figure 3] FIG. 1 shows a basic actuator system. [Figure 4] 10A and 10B are diagrams illustrating the operation of the actuator system. [Figure 5] FIG. 2 is a diagram illustrating an example of the configuration of a fluid circuit. [Figure 6] 6 is a diagram illustrating the operation of a control valve in the fluid circuit of FIG. 5. FIG. [Figure 7] FIG. 1 illustrates a multi-actuator system. [Figure 8] FIG. 8 is a diagram showing an example of the configuration of the fluid circuit in FIG. 7. [Figure 9] FIG. 9 is a diagram showing an example of the configuration of the control valve of FIG. 8. [Figure 10] FIG. 1 illustrates a multi-actuator system. [Figure 11] FIG. 2 is a diagram illustrating a configuration example of a connection circuit. [Figure 12] FIG. 11 is a diagram showing an example of the configuration of the fluid circuit of FIG. [Figure 13] FIG. 10 is a diagram showing a multi-actuator system according to a modified example. DETAILED DESCRIPTION OF THE INVENTION

[0011] (Outline of the embodiment) A summary of some exemplary embodiments of the present disclosure is provided. This summary is intended to provide a simplified overview of some concepts of one or more embodiments in order to provide a basic understanding of the embodiments as a prelude to the more detailed description that follows. It is not intended to limit the scope of the invention or disclosure. This summary is not an exhaustive overview of all possible embodiments, and is not intended to identify key elements of all embodiments or to delineate the scope of some or all aspects. For convenience, the term "one embodiment" may refer to one embodiment (example or variant) or multiple embodiments (examples or variants) disclosed herein.

[0012] An actuator system according to one embodiment includes N actuators (N≧2) and N fluid circuits corresponding to the N actuators. Each actuator has a first chamber and a second chamber, and deforms in opposite directions when an input port of the first chamber is pressurized and when an input port of the second chamber is pressurized. Where i is an integer ranging from 1 to N, with 0 being the Nth, the i-th fluid circuit has a first port connected to the first chamber of the i-th actuator, a second port connected to the second chamber of the i-th actuator, a third port connected to an air pressure source, and a fourth port connected to the second port of the (i−1)th fluid circuit. The fluid circuit is switchable between a first state in which the third port and the first port are electrically connected and the second port is open to atmospheric pressure, and a second state in which the third port and the second port are electrically connected and the first port is open to atmospheric pressure. The fluid circuit is configured such that in the first state, when the pressure at the first port exceeds a first threshold value, the fluid circuit transitions to the second state; in the second state, when the pressure at the second port exceeds a second threshold value, the fluid circuit transitions to the first state; and in the first state, when the pressure at the fourth port exceeds a third threshold value, the fluid circuit transitions to the second state.

[0013] With this configuration, when a force (stimulus) is applied to the first chamber of one actuator, that actuator deforms in response to the stimulus, and the stimulus is then propagated to the next actuator. By repeating this process, multiple actuators can be deformed in sequence.

[0014] In one embodiment, the fluid circuit may include a first flow path connecting the first port and the third port, having a first opening, and having a first portion that is variable in expansion depending on internal pressure; a second flow path connecting the second port and the third port, having a second opening, and having a second portion that is variable in expansion depending on internal pressure; a mover including a mover magnet, reciprocable between a first position and a second position, configured to block the first opening at the first position and to block the second opening at the second position; and a stator magnet that generates a magnetic field whose strength changes depending on the pressure at the fourth port.

[0015] In one embodiment, the actuator system may further include N connection circuits. The i-th connection circuit may have a fifth port connected to the second port of the i-th fluid circuit and a sixth port connected to the fourth port of the (i+1)-th fluid circuit. The connection circuit may be switchable between a third state in which the fifth port and the sixth port are blocked and a fourth state in which the fifth port and the sixth port are electrically connected. The connection circuit may be configured to transition to the fourth state when the pressure at the first port of any of the fluid circuits other than the (i+1)-th fluid circuit exceeds a fourth threshold in the third state, and to transition to the third state when the pressure at the second port of the (i+1)-th fluid circuit exceeds a fifth threshold in the fourth state. This configuration allows the multiple actuators to deform sequentially and ultimately return to their initial states.

[0016] In one embodiment, the connection circuit may include a first flat tube connecting the fifth port and the sixth port; a mover including a mover magnet and reciprocating between a first position and a second position, the mover pressing down and blocking the first flat tube at the first position and being spaced apart from the first flat tube at the second position; and a stator that transitions the mover between the first position and the second position depending on the pressure at the first port of each of the fluid circuits other than the (i+1)th fluid circuit and the pressure at the second port of the (i+1)th fluid circuit.

[0017] (Embodiment) Preferred embodiments will be described below with reference to the drawings. The same or equivalent components, parts, and processes shown in each drawing will be designated by the same reference numerals, and redundant descriptions will be omitted where appropriate. Furthermore, the embodiments are merely examples and do not limit the invention, and all features and combinations thereof described in the embodiments are not necessarily essential to the invention.

[0018] The actuator system according to the embodiment will be described using an actuator modeled after a mimosa pudica as an example, although the type and structure of the actuator are not limited to those described here.

[0019] 1. Single Actuator 1.1 Actuator 1 is a cross-sectional view of an actuator 100 modeled after a mimosa pudica. The actuator 100 is in a first state (open state) φ OPEN and the second state (closed state) φ CLOSE The actuator 100 is used in combination with a fluid circuit (200) described later, and is in an open state φ OPEN When an external pressure is applied to the actuator 100, the actuator 100 transitions to the closed state φ2. Thereafter, the actuator 100 transitions to the open state φ OPEN Return to.

[0020] The actuator 100 has a first chamber 110, a second chamber 120, and a fixing member .

[0021] First chamber 110 has an input port 112, and has the property of expanding into a flat shape when the interior is pressurized through input port 112. First chamber 110 has a low-rigidity portion (flexible portion) 114, and bends at flexible portion 114 in an unpressurized state.

[0022] Second chamber 120 has an input port 122, and has the property of expanding into a flat shape when the interior thereof is pressurized via input port 122. Second chamber 120 has a low-rigidity portion (flexible portion) 124, and bends at flexible portion 124 in an unpressurized state.

[0023] The fixing member 130 supports and fixes the first chamber 110 and the second chamber 120 so that their unfolded states are perpendicular to each other. That is, the first chamber 110 is supported so that it is parallel to the xy plane when the input port 112 is pressurized. On the other hand, the second chamber 120 is supported so that it is parallel to the yz plane when the input port 122 is pressurized.

[0024] The fixing member 130 supports the second chamber 120 so that the inner portion sandwiched between the two flexible portions 124 is parallel to the xz plane. The portion of the first chamber 110 that is inner than the two flexible portions 114 is parallel to the xy plane. The portions of the second chamber 120 that are outer than the two flexible portions 124 are stuck together.

[0025] The input ports 112 and 122 are connected to a fluid circuit (not shown). When the input port 112 is pressurized, the first chamber 110 expands, and the first chamber 110 is parallel to the xy plane, and in the open state φ OPEN When the input port 122 is pressurized, the second chamber 120 expands, and the second chamber 120 becomes parallel to the yz plane, and the closed state φ CLOSE This becomes:

[0026] That is, the actuator 100 is configured to deform in opposite directions when the input port 112 of the first chamber 110 is pressurized and when the input port 122 of the second chamber 120 is pressurized.

[0027] The portion of the first chamber 110 outside the flexible portion 114 serves as a sensor for detecting external pressure. OPEN In the figure, the inside of the first chamber 110 is pressurized, causing the portion outside the flexible portion 114 to expand. When pressure is applied to this expanded portion from the outside, high pressure is fed back from the input port 112 to the fluid circuit (not shown).

[0028] 2 is an exploded view of first chamber 110 and second chamber 120. First chamber 110 is formed, for example, by bonding two flexible films together at their peripheries, with section 116 surrounded by the bonded portions being expandable by pressure. Second chamber 120 is also formed similarly by bonding two flexible films together at their peripheries, with section 126 surrounded by the bonded portions being expandable by pressure.

[0029] 1.2 Actuator System 3 is a diagram showing a basic actuator system 2. The actuator system 2 includes an air pressure source 4, one actuator 100, and one fluid circuit 200.

[0030] The fluid circuit 200 has a first port P1, a second port P2, and a third port P3. The first port P1 is connected to an input port 112 of a first chamber 110 of the actuator 100. The second port P2 is connected to an input port 122 of a second chamber 120 of the actuator 100. The third port P3 is connected to an air pressure source 4. The air pressure source 4 generates a predetermined pressure Ps.

[0031] The fluid circuit 200 can be in a first state φ1 and a second state φ2. In the first state φ1, the third port P3 and the first port P1 are electrically connected, and the second port P2 is open to the atmosphere. In the second state φ2, the third port P3 and the second port P2 are electrically connected, and the first port P1 is open to the atmosphere.

[0032] In the first state φ1, the pressure inside the third port P3, the first port P1, and the first chamber 110 is Ps. As described above, the first chamber 110 functions as a pressure sensor that detects external forces. When a force is applied to the first chamber 110, the pressure inside the first chamber 110 becomes higher than Ps, and the pressure at the first port P1 also increases.

[0033] When the pressure at the first port P1 exceeds a first threshold value TH1 in the first state φ1, the fluid circuit 200 transitions to the second state φ2. The first threshold value TH1 is set to be higher than the pressure Ps of the air pressure source 4.

[0034] When the pressure at the third port P3 reaches a second threshold value TH2, which is lower than the first threshold value TH1, the fluid circuit 200 transitions to the first state φ1 in the second state φ2. The second threshold value TH2 is set to be equal to or slightly lower than the pressure Ps of the air pressure source 4.

[0035] 4 is a diagram illustrating the operation of the actuator system 2. S1 represents the initial state. In the initial state S100, the fluid circuit 200 is in the first state φ1, a pressure Ps is applied to the first chamber 110, and the second chamber 120 is open to the atmosphere. As a result, the actuator 100 is in the open state φ OPEN In Figure 4, atmospheric pressure is shown as 0.

[0036] In state S102, an external force F is applied to the first chamber 110. This force F causes the pressure inside the first chamber 110 to become Ps+ΔP, and the pressure at the first port P1 of the fluid circuit 200 also rises to Ps+ΔP.

[0037] In state S104, when Ps+ΔP>TH1, the fluid circuit 200 switches to the second state φ2. This causes the pressure inside the second chamber 120 to increase, and the pressure inside the first chamber 110 to decrease. During this time, the first chamber 110 remains in the open state φ OPEN From the closed state φ CLOSE transforms towards

[0038] In state S106, when the pressure inside the second chamber 120 rises to near Ps, the pressure at the second port P2 of the fluid circuit 200 reaches the second threshold value TH2, which causes the fluid circuit 200 to switch to the first state φ1.

[0039] In state S108, pressure is applied to the first chamber 110, and the actuator 100 is in the closed state φ CLOSE From open state φ OPEN When the transformation is completed, the state returns to S100.

[0040] The above is the basic operation of the actuator system 2 simulating the mimosa pudica. Next, an example of the configuration of the fluid circuit 200 will be described.

[0041] The fluid circuit diagram in Figure 3 is shown to make it easier to intuitively understand the function of each block, and is not limited to using mechanical valves. If a mechanical valve is used, problems such as stuck operation in an intermediate state can occur, in addition to the two states of pressurization and depressurization.

[0042] To solve this problem, it is preferable to use a structure using magnets, as described below, instead of a mechanical valve, for the fluid circuit 200. A transition structure using magnets does not allow an unstable state and has the property of always attracting one of the magnets, making it possible to reliably switch between only the pressurized and depressurized states.

[0043] 1.3 Fluid circuit 5 is a diagram showing an example of the configuration of the fluid circuit 200. The fluid circuit 200 includes a check valve 201, a Y-junction 202, a first flow path 204, a second flow path 206, a restricting portion 208, and a control valve 210.

[0044] The Y-junction 202 branches into two at the third port P3. A first flow path 204 connects one side of the Y-junction 202 to the first port P1, and a second flow path 206 connects the other side of the Y-junction 202 to the second port P2. A hole 205 is formed in the first flow path 204. A hole 207 is also formed in the second flow path 206.

[0045] In the first state φ1 of the control valve 210, the hole 205 of the first flow path 204 is blocked and the hole 207 of the second flow path 206 is opened. In addition, in the second state φ2 of the control valve 210, the hole 205 of the first flow path 204 is opened and the hole 207 of the second flow path 206 is blocked.

[0046] Control valve 210 has a mover 212 and a stator 214. Mover 212 is movable between a first position and a second position. The first position corresponds to a first state φ1, and the second position corresponds to a second state φ2. When mover 212 is in the first position, hole 205 is blocked, and when mover 212 is in the second position, hole 207 is blocked.

[0047] The mover 212 has a first magnet M1. The first magnet M1 is also referred to as a mover magnet. The stator 214 has a second magnet M2 and a third magnet M3. The second magnet M2 and the third magnet M3 are also referred to as stator magnets. The first magnet M1 and the second magnet M2 are arranged on either side of the first flow path 204 and are attracted to each other. Similarly, the first magnet M1 and the third magnet M3 are arranged on either side of the second flow path 206 and are attracted to each other.

[0048] The first flow path 204 and the second flow path 206 are made up of flat tubes. The flat tubes have a flat cross-section in an unpressurized state, and when the inside of the tube is pressurized, the cross-section becomes closer to a circle while maintaining a substantially constant circumferential length.

[0049] The restraint portion 208 sandwiches the first flow path 204 and the second flow path 206. In the first state φ1, the pressure Ps is applied to the first flow path 204, causing the first flow path 204 to expand and the second flow path 206 to be crushed. This prevents the pressure Ps from leaking from the hole 207. In the second state φ2, when the pressure Ps is applied to the second flow path 206, the second flow path 206 expands and the first flow path 204 is crushed. This prevents the pressure Ps from leaking from the hole 205.

[0050] Figure 6 is a diagram illustrating the operation of the control valve 210 of the fluid circuit 200 of Figure 5. The left side of Figure 6 shows the first state φ1, and the right side of Figure 6 shows the second state φ2.

[0051] In the first state φ1, the mover 212 is in the first position. The force acting on the mover 212 at this time is the resultant force of the upward magnetic force Fm2 of the second magnet M2, the downward magnetic force Fm3 of the third magnet M3, and the downward pushing force Ft1 of the first flow path 204. Fm2>Fm3+Ft1 When the following equation holds, the movable element 212 is stationary at the first position. At the first position, the pressure in the first flow path 204 increases, Fm2 <Fm3+Ft1 When this occurs, the mover 212 moves to the second position. When this movement occurs, the force Ft1 with which the first flow path 204 pushes the magnet M1 corresponds to the first threshold value TH1.

[0052] In the second state φ2, the mover 212 is in the second position. The force acting on the mover 212 at this time is the resultant force of the magnetic force Fm2 that attracts it upward from the second magnet M2, the magnetic force Fm3 that attracts it downward from the third magnet M3, and the force Ft2 that pushes it upward from the second flow path 206. Fm3>Fm2+Ft2 When the following equation holds, the movable element 212 is stationary at the second position. At the second position, the pressure in the second flow path 206 increases, Fm3 <Fm2+Ft2 As a result, the mover 212 moves to the first position. When this movement occurs, the force Ft2 with which the second flow path 206 pushes the magnet M1 corresponds to the second threshold value TH2.

[0053] The first threshold value TH1 and the second threshold value TH2 can be adjusted by optimizing the arrangement and strength of the magnets.

[0054] The above is the basic single-actuator system. Next, we will explain a multi-actuator system that has multiple actuators.

[0055] 2. Multi-actuator 7 is a diagram showing a multi-actuator system 2A. The multi-actuator system 2A includes N actuators 100_1 to 100_N and N fluid circuits 200A_1 to 200A_N. The function of each actuator 100 has already been described.

[0056] The fluid circuit 200A further includes a fourth port P4. Let i be an integer of 1, 2, ..., N. For the sake of convenience, the 0th actuator is defined as the Nth actuator, and the N+1th actuator is defined as the 1st actuator in this specification. The N actuators 100_1 to 100_N are connected in a daisy chain via the N fluid circuits 200A_1 to 200A_N.

[0057] A first port P1 of the i-th fluid circuit 200A_i is connected to the input port 112 of the first chamber 110 of the corresponding i-th actuator 100. A second port P2 of the i-th fluid circuit 200A_i is connected to the input port 122 of the second chamber 120 of the corresponding i-th actuator 100. A third port P3 of the i-th fluid circuit 200A_i is connected to the air pressure source 4.

[0058] The fluid circuit 200A can be switched between a first state φ1 and a second state φ2. In the first state φ1, the fluid circuit 200A provides electrical continuity between the third port P3 and the first port P1, and the second port P2 is open to atmospheric pressure. In the second state φ2, the fluid circuit 200A provides electrical continuity between the third port P3 and the second port P2, and the first port P1 is open to atmospheric pressure.

[0059] When the pressure at the first port P1 exceeds a first threshold value TH1 in the first state φ1, the fluid circuit 200A transitions to the second state φ2. When the pressure at the second port P2 exceeds a second threshold value TH2 in the second state φ2, the fluid circuit 200A transitions to the first state φ1. This is similar to the fluid circuit 200 in FIG. 3.

[0060] In the fluid circuit 200 of Fig. 3, the transition from the first state φ1 to the second state φ2 is triggered only by the pressure at its own first port P1. In contrast, in the fluid circuit 200A of Fig. 7, the transition from the first state φ1 to the second state φ2 is triggered not only by the pressure at its own first port P1 but also by the pressure at the second port P2 of the adjacent fluid circuit 200A.

[0061] A fourth port P4 is added to the fluid circuit 200A to monitor the state of the second port P2 of the adjacent fluid circuit 200A. The fourth port P4 of the i-th fluid circuit 200A_i is connected to the second port P2 of the adjacent (i-1)-th fluid circuit 200A_i-1.

[0062] When the pressure at the fourth port P4 exceeds the third threshold value TH3 in the first state φ1, the fluid circuit 200A transitions to the second state φ2.

[0063] Fig. 8 is a diagram showing an example of the configuration of the fluid circuit 200A of Fig. 7. The fluid circuit 200A includes a check valve 201, a Y-junction 202, a first flow path 204, a second flow path 206, a restricting portion 208, and a control valve 210A.

[0064] Pressure information of the fourth port P4 is input to the control valve 210A. When the pressure of the fourth port P4 exceeds a third threshold value TH3 in the first state φ1, the movable element 212 moves from the first position to the second position, and the control valve 210A transitions to the second state φ2.

[0065] Fig. 9 is a diagram showing an example of the configuration of the control valve 210A in Fig. 8. The strength of the magnetic field generated by the stator magnets including the second magnet M2 and the third magnet M3 changes according to the pressure at the fourth port P4.

[0066] The control valve 210A is configured so that as the pressure at the fourth port P4 increases, the force Fm2 with which the second magnet M2 attracts the first magnet M1 decreases. When the pressure at the fourth port P4 exceeds a certain threshold value TH3, the force Fm2 decreases, Fm2 <Fm3+Ft1 As a result, the mover 212 moves to the second position.

[0067] The left side of FIG. 9 shows the state when the pressure at the fourth port P4 is low (that is, atmospheric pressure), and the right side of FIG. 9 shows the state when the pressure at the fourth port P4 is high (that is, Ps).

[0068] The second magnet M2 includes a stator component M2a and a mover component M2b. The position of the stator component M2a is fixed and it exerts a constant force Fm2a on the first magnet M1, which is located at the first position. The mover component M2b is displaced according to the pressure at the fourth port P4. Specifically, the control valve 210A is configured so that as the pressure at the fourth port P4 increases, the mover component M2b moves away from the first magnet M1. As the distance increases, the force Fm2b' with which the mover component M2b attracts the first magnet M1 decreases.

[0069] In the left state of Figure 9, Fm2a+Fm2b>Fm3+Ft1 The first state φ1 is maintained. When the pressure at the fourth port P4 increases and Fm2b decreases, Fm2a+Fm2b <Fm3+Ft1 As a result, the mover 212 moves toward the second position.

[0070] The above is an example of the configuration of the fluid circuit 200A.

[0071] Returning to FIG. 7, in the initial state, all of the actuators 100_1 to 100_N are in the open state φ OPEN When a force F is applied to the first chamber 110 of any one (assumed to be the j-th) of the plurality of actuators 100_1 to 100_N, the j-th fluid circuit 200A_j transitions to the second state φ2, and the corresponding j-th actuator 100_j transitions to the closed state φ CLOSE Transition to.

[0072] When the j-th fluid circuit 200A_j transitions to the second state φ2, the pressure at its second port P2 increases, the pressure at the fourth port P4 of the j+1-th fluid circuit 200A_j+1 increases, the j+1-th fluid circuit 200A_j+1 transitions to the second state φ2, and the corresponding j+1-th actuator 100_j+1 transitions to the closed state φ CLOSE Transition to.

[0073] In this manner, the actuators 100 are successively switched to the closed state φ CLOSEThe transition is cyclical.

[0074] Each fluid circuit 200A_j is in a closed state φ CLOSE After the transition to , the pressure at the second port P2 increases, so the state returns to the second state φ2, and the corresponding actuator 100_j is in the open state φ OPEN automatically returns to normal.

[0075] 10 is a diagram showing a multi-actuator system 2B. The multi-actuator system 2B includes N actuators 100_1 to 100_N, N fluid circuits 200B_1 to 200B_N, and N connection circuits 300_1 to 300_N. In this example, N=2.

[0076] The i-th connection circuit 300_i has the function of blocking the transmission of pressure from the second port P2 of the i-th fluid circuit 200B_i to the fourth port P4 of the (i+1)-th fluid circuit 200B_i+1.

[0077] Each connection circuit 300 has a fifth port P5 to an eighth port P8. The fifth port P5 is connected to the second port P2 of the corresponding i-th fluid circuit 200B_i. The sixth port P6 is connected to the fourth port P4 of the (i+1)-th fluid circuit 200B_i+1. The connection circuit 300 is switchable between a third state φ3 and a fourth state φ4. In the third state φ3, the fifth port P5 and the sixth port P6 are blocked. In the fourth state φ4, the fifth port P5 and the sixth port P6 are conductive.

[0078] The switching between the third state φ3 and the fourth state φ4 of the connection circuit 300_i is based on the pressure at the first port P1 of the fluid circuit 200B_i and the pressure at the second port P2 of the fluid circuit 200B_i+1. The seventh port P7 is connected to the first port P1 of the fluid circuit 200B_i, and the eighth port P8 is connected to the second port P2 of the fluid circuit 200B_i+1.

[0079] When the pressure at the first port P1 of the fluid circuit 200B_i exceeds a fourth threshold value TH4 in the third state φ3, the connection circuit 300_i transitions to the fourth state φ4. When the pressure at the second port P2 of the fluid circuit 200B_i+1 exceeds a fifth threshold value TH5 in the fourth state φ4, the connection circuit 300_i transitions to the third state.

[0080] The operation of this multi-actuator system 2B will now be described.

[0081] (1) In the initial state, all of the actuators 100_1 to 100_2 are in the open state φ OPEN Furthermore, all of the plurality of fluid circuits 200B_1 to 200B_2 are in the first state φ1, and all of the plurality of connection circuits 300_1 to 300_2 are in the third state φ3.

[0082] (2) When a force F is applied to the first chamber 110 of any one (first) of the plurality of actuators 100_1-100_2, the first fluid circuit 200B_1 transitions to the second state φ2. At this time, the first connection circuit 300_1 transitions to the fourth state φ4.

[0083] (3) When the first fluid circuit 200B_1 transitions to the second state φ2, the corresponding first actuator 100_1 transitions to the closed state φ CLOSE When the first fluid circuit 200B_1 transitions to the second state φ2, the pressure at the second port P2 increases.

[0084] (4) This high pressure at the second port P2 is propagated to the fourth port P4 of the second fluid circuit 200B_2 via the connection circuit 300_1, which is in the fourth state φ4, causing the second fluid circuit 200B_2 to transition to the second state φ2.

[0085] (5) When the second fluid circuit 200B_2 transitions to the second state φ2, the corresponding second actuator 100_2 transitions to the closed state φ CLOSE Transition to.

[0086] When the second fluid circuit 200B_2 transitions to the second state φ2, the pressure at the second port P2 increases. However, at this time, the second connection circuit 300_2 remains in the third state φ3, so the high pressure at the second port P2 is blocked by the connection circuit 300_2 and does not reach the fourth port P4 of the first fluid circuit 200B_1.

[0087] (6) Due to the pressure increase at the second port P2 of the second fluid circuit 200B_2, the first connection circuit 300_1 returns to the third state φ3.

[0088] (7) Subsequently, the first fluid circuit 200B_1 returns to the first state φ1. This causes the first actuator 100_1 to return to the open state φ OPEN Return to.

[0089] (8) Furthermore, the second fluid circuit 200B_2 returns to the first state φ1. This causes the second actuator 100_2 to return to the open state φ OPEN Return to.

[0090] In this way, the multi-actuator system 2B returns to the initial state.

[0091] 11 is a diagram showing an example of the configuration of the connection circuit 300. The connection circuit 300 has a first flat tube 302, a second flat tube 304, a third flat tube 306, a mover 310, and a stator 320.

[0092] The first flat tube 302 connects the fifth port P5 and the sixth port P6. The mover 310 includes a mover magnet 312. The mover 310 is capable of reciprocating between a first position (i) and a second position (ii). In the first position (i), the mover 310 presses down on and closes the first flat tube 302. At this time, the connection circuit 300 is in the third state φ3, and communication between the fifth port P5 and the sixth port P6 is blocked.

[0093] In addition, in the second position (ii), the mover 310 is separated from the first flat tube 302. At this time, the connection circuit 300 is in the fourth state φ4, and electrical continuity is established between the fifth port P5 and the sixth port P6.

[0094] The stators 320A, 320B cause the mover magnet 312 to transition between the first position (i) and the second position (ii) in response to the pressure at the seventh port P7 and the pressure at the eighth port P8.

[0095] The stator 320A is provided on the first position (i) side and includes a stator magnet 322 and a second flat tube 304. One end of the second flat tube 304 is connected to the seventh port P7, and the second flat tube 304 is disposed so as to overlap the first flat tube 302.

[0096] The stator 320B is provided on the second position (ii) side and includes a stator magnet 324 and a third flat tube 306. One end of the third flat tube 306 is connected to the eighth port P8.

[0097] When the mover 310 is at the first position (i), if the pressure at the seventh port P7 increases, the second flat tube 304 deforms, increasing the distance between the mover magnet 312 and the stator magnet 322 and decreasing the distance between the mover magnet 312 and the stator magnet 324. This increases the force acting on the mover 310 in the right direction on the page, and the mover 310 moves to the second position (ii).

[0098] Similarly, when the mover 310 is at the second position (ii), if the pressure at the eighth port P8 increases, the third flat tube 306 deforms, increasing the distance between the mover magnet 312 and the stator magnet 324 and decreasing the distance between the mover magnet 312 and the stator magnet 322. This increases the force acting on the mover 310 in the left direction on the page, and the mover 310 moves to the first position (i).

[0099] The configuration of the connection circuit 300 is not limited to that shown in FIG.

[0100] Fig. 12 is a diagram showing an example of the configuration of the fluid circuit 200B of Fig. 10. The configuration of the control valve 210B is basically the same as the configuration of the control valve 210A of Fig. 9, but an opening 216 is provided at the tip of the tube connected to the fourth port P4 to allow pressure to escape.

[0101] 13 is a diagram showing a multi-actuator system 2C according to a modified example. This multi-actuator system 2 is an extension of the multi-actuator system 2B of FIG. 10 to N=3 or more.

[0102] In this modification, the seventh port P7 of the connection circuit 300_i (i=1, 2...N) is connected to the first port P1 of the fluid circuit 200B other than the (i+1)th fluid circuit 200B. The connection circuit 300_i transitions to the fourth state when the pressure of the first port P1 of any fluid circuit 200B other than the (i+1)th fluid circuit 200B exceeds a fourth threshold value.

[0103] For example, in the initial state, when a force F is applied to the j-th actuator 100_1, the pressure at the first port of the j-th fluid circuit 200B increases. This increase in pressure causes the connection circuits 300 other than the (j-1)th one to transition to the fourth state φ4.

[0104] Furthermore, when the pressure at the second port P2 of the (i+1)th fluid circuit 200B exceeds a fifth threshold value TH5 in the fourth state φ4, the connection circuit 300_i transitions to the third state φ3.

[0105] According to this modification, when a force is applied to one of the actuators 100, all of the actuators 100 are sequentially brought into the closed state φ CLOSE Then, all the actuators 100 are deformed to the open state φ OPEN After returning to the normal state, the system can be stopped in the initial state.

[0106] The embodiments described using specific terms merely illustrate the principles and applications of the present invention, and many modifications and changes in arrangement are permitted in the embodiments as long as they do not deviate from the spirit of the present invention as defined in the claims. [Explanation of symbols]

[0107] 2...actuator system, 4...air pressure source, 100...actuator, 110...first chamber, 112...input port, 114...flexible portion, 120...second chamber, 122...input port, 124...flexible portion, 130...fixed member, 200...fluid circuit, 300...connecting circuit, 201...check valve, 202...Y-junction, 204...first flow path, 205...hole, 206...second flow path, 207...hole, 208...restraint portion, 210...control valve, 212...moving element, 214...stator, 300...connecting circuit, 302...first flat tube, 304...second flat tube, 306...third flat tube, 310...moving element, 312...moving element magnet, 320, 320A, 320B...stator, 322, 324...stator magnet.

Claims

1. a plurality of N (N≧2) actuators, each having a first chamber and a second chamber, the actuators deforming in opposite directions when an input port of the first chamber is pressurized and when an input port of the second chamber is pressurized; N fluid circuits corresponding to the N actuators; Equipped with When i is an integer of 1, 2, ..., N, and 0th is the Nth, the i-th fluid circuit is a first port connected to the first chamber of the i-th actuator; a second port connected to the second chamber of the i-th actuator; a third port connected to an air pressure source; a fourth port connected to the second port of the (i-1)th fluid circuit; and The fluid circuit includes: a first state in which the third port and the first port are electrically connected and the second port is open to atmospheric pressure; a second state in which the third port and the second port are electrically connected and the first port is open to atmospheric pressure; is switchable, In the first state, when the pressure at the first port exceeds a first threshold, the state transitions to the second state; In the second state, when the pressure at the second port exceeds a second threshold, the state transitions to the first state; An actuator system configured to transition to the second state when the pressure at the fourth port exceeds a third threshold value in the first state.

2. The fluid circuit includes: a first flow path connecting the first port and the third port, having a first opening, and being variably expandable in response to internal pressurization in a first portion; a second flow path connecting the second port and the third port, having a second opening, and being variably expandable in response to internal pressurization in a second portion; a mover including a mover magnet, reciprocable between a first position and a second position, configured to block the first opening at the first position and to block the second opening at the second position; a stator magnet that generates a magnetic field whose strength changes in response to the pressure at the fourth port; 10. The actuator system of claim 1, comprising:

3. N connection circuits are further provided; The i-th connection circuit is a fifth port connected to the second port of the i-th fluid circuit; a sixth port connected to the fourth port of the (i+1)th fluid circuit; and a third state in which the fifth port and the sixth port are blocked; a fourth state in which conduction exists between the fifth port and the sixth port; is switchable, In the third state, when the pressure of any of the first ports of the fluid circuits other than the (i+1)th fluid circuit exceeds a fourth threshold value, the state transitions to the fourth state; 3. The actuator system according to claim 1, wherein the actuator system is configured to transition to the third state when the pressure at the second port of the (i+1)th fluid circuit exceeds a fifth threshold value in the fourth state.

4. The connection circuit includes: a first flat tube connecting the fifth port and the sixth port; a mover including a mover magnet, reciprocating between a first position and a second position, pressing against and blocking the first flat tube at the first position, and separating from the first flat tube at the second position; a stator that transitions the movable element between the first position and the second position in response to a pressure at the first port of each fluid circuit other than the (i+1)th fluid circuit and a pressure at the second port of the (i+1)th fluid circuit; 4. The actuator system of claim 3, comprising: