Environment adjusting apparatus, processing system, article manufacturing method, and management method

Abstract

To provide a technique advantageous for monitoring a state of a filter element.SOLUTION: An environment adjusting apparatus includes a storage container storing a filter element and including a primary side space and a secondary side space separated by the filter element, a measuring instrument for measuring weight of the storage container, a first flexible duct connected to an inlet of the primary side space, and a second flexible duct connected to an outlet of the secondary side space.SELECTED DRAWING: Figure 2

Description

[Technical Field]

[0001] The present invention relates to an environmental conditioning device, a processing system, an article manufacturing method, and an article management method. [Background technology]

[0002] Patent Document 1 describes a filter device in which a filter element is provided in each hole of a porous plate disposed inside the filter device. This filter device has a weight sensor that measures the weight of the filter element, and sets parameters for cleaning the filter element based on the output of the weight sensor. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Laid-Open No. 2014-42911 Summary of the Invention [Problem to be solved by the invention]

[0004] In the configuration described in Patent Document 1, the filter element needs to be supported in a form that allows the weight of the filter element to be measured. For example, if the filter element is fixed to a structure that supports it, the weight of the filter element cannot be measured.

[0005] SUMMARY OF THE INVENTION The present invention aims to provide an advantageous technique for monitoring the condition of a filter element. [Means for solving the problem]

[0006] One aspect of the present invention relates to an environmental conditioning device, comprising: a containment vessel that houses a filter element and includes a primary side space and a secondary side space separated by the filter element; a measuring instrument that measures the weight of the containment vessel; a first flexible duct connected to an inlet of the primary side space; and a second flexible duct connected to an outlet of the secondary side space. [Effects of the Invention]

[0007] SUMMARY OF THE INVENTION The present invention provides an advantageous technique for monitoring the condition of a filter element. [Brief explanation of the drawings]

[0008] [Figure 1] FIG. 1 is a diagram schematically illustrating the configuration of a processing system according to an embodiment. [Figure 2] FIG. 1 is a diagram schematically illustrating a first configuration example of an environment adjustment device or a filtering device. [Figure 3] FIG. 10 is a diagram schematically illustrating a second configuration example of an environment adjustment device or a filtering device. [Figure 4] FIG. 10 is a diagram schematically illustrating a third configuration example of an environment adjustment device or a filtering device. [Figure 5] FIG. 4 is a diagram showing the procedure of a management method for managing an environmental adjustment device. DETAILED DESCRIPTION OF THE INVENTION

[0009] Hereinafter, embodiments will be described in detail with reference to the accompanying drawings. Note that the following embodiments do not limit the scope of the invention claimed. Although multiple features are described in the embodiments, not all of these multiple features are necessarily essential to the invention, and multiple features may be combined arbitrarily. Furthermore, in the accompanying drawings, the same reference numerals are used to designate the same or similar components, and redundant explanations will be omitted.

[0010] FIG. 1 schematically illustrates the configuration of a processing system 1000 according to one embodiment. The processing system 1000 may include a processing device 100 and an environmental conditioning device 200. The processing device 100 may include a chamber 110 and a processing unit 120 that performs processing within the chamber 110. The environmental conditioning device 200 conditions the environment within the chamber 110 of the processing device 100. The chamber 110 is a component for enclosing a space and may be located within, for example, a clean room. The term "processing" is broadly interpreted to include, for example, adding a physical element to a processing object, removing a physical element from a processing object, changing the properties of the entire or partial processing object, and applying energy to a processing object. The term "processing" also includes measuring, inspecting, and observing the processing object. The processing unit 120 is configured to perform, for example, a process of transferring a pattern of an original onto the object to be processed, and in this case, the processing unit 100 is a transfer device that transfers the pattern of the original onto the object to be processed, such as an exposure device or an imprint device. Note that the exposure device forms a latent image in a photosensitive material of the substrate, which is the object to be processed, and the imprint device adds a film having a pattern to the substrate, which is the object to be processed.

[0011] The environmental conditioning device 200 may include, for example, a filtering device 230. The environmental conditioning device 200 may also include, for example, a cooler 220 and a heater 240. The cooler 220 may be configured to cool air to a first target temperature and supply the cooled air to the filtering device 230. The heater 240 may be configured to receive air filtered by the filtering device 230, heat the air to a second target temperature, and send it out. The filtering device 230 and the cooler 220 may be connected by a first flexible duct 261. The filtering device 230 and the heater 240 may be connected by a second flexible duct 262. The term flexible duct is used to encompass, for example, a bellows, a vibration-isolating duct, a duct having a labyrinth structure, and the like.

[0012] The environmental conditioning device 200 may also include a blower 210 that blows air into the cooler 220. The blower 210 may be configured, for example, to take in air through a duct 271 and blow the air to the cooler 220 via a duct 272. The blower 210 may be disposed at any position between the cooler 220 and the processing device 100. The environmental conditioning device 200 may also include a particle collection filter 250. The particle collection filter 250 may be disposed, for example, between the heater 240 and the processing device 100. The particle collection filter 250 and the heater 240 may be connected by a duct 273, and the particle collection filter 250 and the processing device 100 may be connected by a duct 274.

[0013] FIG. 2 schematically illustrates a first configuration example of the environmental conditioning device 200 or the filtering device 230. The environmental conditioning device 200 or the filtering device 230 may include a containment vessel 1, a measuring instrument 5, a first flexible duct 261, and a second flexible duct 262. The containment vessel 1 may house a filter element FE and define a primary space S1 and a secondary space S2 separated by the filter element FE. In another aspect, the containment vessel 1 houses the filter element FE and includes a primary space S1 and a secondary space S2 separated by the filter element FE. The containment vessel 1 may include a support portion 7 that supports the filter element FE. The filter element FE may be, for example, a chemical filter element. The support portion 7 may support the filter element FE by, for example, pressing a seal member 8 against the filter element FE. The measuring instrument 5 may be configured to measure the weight of the containment vessel 1 housing the filter element FE. The measuring instrument 5 may include one or more weight scales. The containment vessel 1 has an inlet 3 communicating with the primary side space S1 and an outlet 4 communicating with the secondary side space S2. The first flexible duct 261 is connected to the inlet 3 of the primary side space S1, and the second flexible duct 262 is connected to the outlet 4 of the secondary side space S2.

[0014] The environment conditioning device 200 or the filtering device 230 may further include a controller 6. The controller 6 may include an output unit 61 that outputs status information indicating the status of the filter element FE based on the output of the measuring instrument 5. The output unit 61 may be provided separately from the controller 6. The output unit 61 may have an output device such as a display device (a display, a light-emitting element, etc.), a speaker, or a network interface, and may output the status information using the output device. The controller 6 may be configured, for example, by a PLD (abbreviation for Programmable Logic Device) such as an FPGA (abbreviation for Field Programmable Gate Array), an ASIC (abbreviation for Application Specific Integrated Circuit), a general-purpose or dedicated computer with an embedded program, or a combination of all or part of these.

[0015] The controller 6 or the output unit 61 may be configured to output status information indicating the status of the filter element FE based on the output of the measuring instrument 5 while filtering is being performed by the filter element FE. The controller 6 or the output unit 61 may be configured to output status information indicating the status of the filter element FE, for example, based on a change in the output of the measuring instrument 5. The status information indicating the status of the filter element FE may include, for example, information regarding the remaining life of the filter element FE. The information regarding the remaining life of the filter element FE may be, for example, information indicating the remaining period of usable time or information indicating the degree of deterioration of the filter element FE. The controller 6 or the output unit 61 may output status information indicating the status of the filter element FE based on humidity in addition to the output of the measuring instrument 5.

[0016] In one aspect, the controller 6 executes a management method for managing the environmental conditioning device 200. FIG. 5 illustrates an example of the management method for the environmental conditioning device 200 executed by the controller 6. The management method may include a measurement step S520 for measuring the weight of the containment vessel 1 containing the filter element FE, and an output step S530 for outputting status information indicating the status of the filter element FE based on the weight measured in the measurement step S520. The management method may also include, for example, a determination step S510 for determining whether the scheduled measurement timing has arrived, and may execute the measurement step S520 and the output step S530 when the scheduled measurement timing arrives. Instead of the determination step S510, the measurement step S520 and the output step S530 may be executed by a timer interrupt.

[0017] The environment conditioning device 200 or the filtering device 230 may have a hygrometer for measuring or acquiring humidity, or may have an input interface for a user or the like to input humidity.

[0018] Here, the weight W of water contained in the structure ST including the filter element FE and the containment vessel 1 wet is a function of humidity m wet =W(m) where the function W wet =W(m) can be obtained in advance by experiment or the like and incorporated into the controller 6.

[0019] The humidity on the first day of use of the filter element FE is m a , the weight measurement value of the structure ST by the measuring instrument 5 is W a , the dry weight of the structure ST is W drya Then, W drya =W a -W(m a )...Equation (1) holds true.

[0020] The humidity on the filter element FE's use date b is m b , the weight measurement value of the structure ST is W bThen, the amount (mass) of substances to be removed (e.g., chemical components) captured by the filter element FE on the day of use b is W r teeth, W r =W b -W(m b )-W drya =W b -W a -W(m b )+W(m a )...Equation (2) Normally, the containment vessel 1 does not absorb moisture. Therefore, normally, W(ma) is the weight of moisture contained in the filter element FE on the start date of use a, and W(ma) is the weight of moisture contained in the filter element FE on the start date of use b. The repairable amount (mass) of the object to be removed (for example, chemical components) by the unused filter element FE (start date of use b) is W cap , the remaining capture amount (mass) is W el Then, W el =W cap -W r ...Equation (1) The remaining collectable amount may be understood as the remaining removable amount. The controller 6 may use, for example, W el , or W el / W cap、 Or, (W cap -W el ) / W cap The values ​​may be output, or may be converted into information such as bar fluff, color, etc. and output.

[0021] When the environmental conditioning device 200 is used in an environment or under conditions where the humidity of the air sent to the filtering device 230 can be considered constant, there is no need to consider humidity. r =W b -W a holds true.

[0022] In addition, if the weight of the containment vessel 1 is considered to be constant, the amount (mass) Wr of the object to be removed (for example, chemical components) captured by the filter element FE at any date and time is given by Wr=Wmeas-W0-Wd-Wf(m)...Equation (3) It may be calculated according to

[0023] Here, Wmeas is the weight measurement value of the structure ST by the measuring instrument 5 at an arbitrary date and time, W0 is the weight of the containment vessel, Wd is the dry weight of the filter element FE, and Wf(m) is the weight of the water contained in the filter element FE. Wf(m) can be obtained in advance by an experiment or the like as a function of humidity m and can be incorporated into the controller 6. In this case as well, the controller 6 calculates the remaining capture amount (mass) Wel at an arbitrary date and time as follows: Wel = Wcap - Wr (4) It can be calculated according to:

[0024] When the filter element FE is a chemical filter element that removes (captures) organic gases, activated carbon is generally used as the filter material, and the capture capacity (mass) is generally about 5% to 10% of the weight of the filter element FE. For example, for a 10 kg chemical filter element, the capture capacity is 500 to 1000 g. Therefore, a measurement resolution of 0.1 g, for example, is sufficient for the measuring instrument 5.

[0025] The filter element FE can be constructed by, for example, stacking multiple organic gas filter materials. The filter element FE is preferably capable of capturing only one of organic gases and inorganic gases. This is because, in general, filter materials that capture organic gases increase in weight as they capture gases, while filter materials that capture inorganic gases increase in weight as they capture gases.

[0026] The first flexible duct 261 and the second flexible duct 262 can be configured so that their influence on the measurement results of the structure ST by the measuring instrument 5 can be negligible.

[0027] 3 schematically shows a second configuration example of the environmental conditioning device 200 or the filtering device 230. The second configuration example may have a configuration in which a first pressure gauge 11 and a second pressure gauge 12 are added to the first configuration example. The first pressure gauge 11 is arranged to measure the pressure in the primary-side space S1, and the second pressure gauge 12 is arranged to measure the pressure in the secondary-side space S2, and the outputs of the first pressure gauge 11 and the second pressure gauge 12 are provided to the controller 6. The controller 6 or the output unit 61 outputs status information indicating the status of the filter element FE, such as information regarding the remaining life, based on the output of the measuring instrument 5 as well as the pressure in the primary-side space S1 and the pressure in the secondary-side space S2.

[0028] A specific example will be described below. For example, let P0 be the pressure inside the containment vessel 1 before the filter element FE is installed. In this state, the containment vessel 1 is not separated into a primary-side space S1 and a secondary-side space S2 by the filter element FE, so the output of the first pressure gauge 11 and the output of the second pressure gauge 12 match. In an environmental conditioning device 200 that is installed and in operation with the filter element FE installed, let P1 be the pressure P in the primary-side space S1 and P2 be the pressure P in the secondary-side space S2. Let V1 be the volume of the primary-side space S1 and V2 be the volume of the secondary-side space S2. Let D0, D1, and D2 be the densities D of air at pressures P=P0, P1, and P2, respectively. Here, density D can be calculated from pressure P, and the relationship between pressure P and density D can be expressed by the function D=f(P).

[0029] When the pressure P1 in the primary space S1 and the pressure P2 in the secondary space S2 are taken into consideration in the operating environment conditioning device 200, the weight measurements Wa and Wb by the measuring instrument 5 can be corrected by the following Wd. a As W a -W d is used, and W b As W b -W d The weight measurement value W can be used as D1 and D2. a、 W b The value obtained at the time is used.

[0030] W d =(V1×D1+V2×D2)-(V1+V2)×D0...Equation (5) FIG. 4 schematically illustrates a third configuration example of the environmental conditioning device 200 or the filtering device 230. The third configuration example may have a configuration in which a first load cell 13 and a second load cell 14 are added to the first configuration example. The first load cell 13 is disposed between the inlet 3 of the primary-side space S1 and the first flexible duct 261, and the second load cell 14 is disposed between the outlet 4 of the secondary-side space S2 and the second flexible duct 262. The outputs of the first load cell 13 and the second load cell 14 are provided to the controller 6. The controller 6 or the output unit 61 then outputs status information indicating the status of the filter element FE, such as information regarding the remaining life, based on the outputs of the measuring instrument 5 as well as the outputs of the first load cell 13 and the second load cell 14.

[0031] There are cases where the first flexible duct 261 and the second flexible duct 262 have a non-negligible effect on the measurement value obtained by the measuring instrument 5. For example, in the configuration of Fig. 4, the first flexible duct 261 and the second flexible duct 262 can function to cancel out part of the gravity acting on the structure ST, or to apply a force other than gravity to the structure ST. Here, if the force in the compression direction measured by the first load cell 13 is W1 and the force in the compression direction measured by the second load cell 14 is W2, then W a As W a +W1-W2 is used, W b As W b +W1-W2 can be used. Note that W1 and W2 are the weight measurements W a、 W b The value obtained at the time is used.

[0032] In the processing system 1000, the processing unit 120 or the processing device 100 is configured to, for example, transfer a pattern of an original onto a substrate, and the processing system 1000 can be used to implement an article manufacturing method for manufacturing an article. Such an article manufacturing method can include a transfer step in which the processing system 1000 transfers the pattern of the original onto a substrate, and a processing step in which the substrate that has undergone the transfer step is processed to obtain an article. The processing step can include, for example, an etching step, a film formation step, a dicing step, an encapsulation step, etc. The article can be, for example, a semiconductor device, a display device, a MEMS, etc.

[0033] This specification and the accompanying drawings include the following disclosure: (Item 1) a containment vessel that contains a filter element and includes a primary space and a secondary space separated by the filter element; a measuring instrument for measuring the weight of the containment vessel; a first flexible duct connected to an inlet of the primary side space; a second flexible duct connected to the outlet of the secondary space; An environmental adjustment device comprising: (Item 2) An output unit that outputs status information indicating a status of the filter element based on an output of the measuring instrument is further provided. 2. The environmental conditioning device according to item 1, (Item 3) the output unit outputs the status information based on an output of the measuring instrument while filtering by the filter element is being performed. 3. The environmental conditioning device according to item 2. (Item 4) the output unit outputs the status information based on a change in the output of the measuring instrument. 4. The environmental conditioning device according to item 3. (Item 5) The output unit outputs information regarding the remaining life of the filter element as the status information. 5. The environment conditioning device according to any one of items 2 to 4. (Item 6) the output unit outputs the status information based on humidity. 6. The environment conditioning device according to any one of items 2 to 5, characterized in that: (Item 7) the output unit outputs the state information based on the pressure in the primary space and the pressure in the secondary space. 7. The environment conditioning device according to any one of items 2 to 6, characterized in that: (Item 8) a first load cell disposed between the inlet and the first flexible duct; a second load cell disposed between the outlet and the second flexible duct; the output unit outputs the status information based on the output of the measuring instrument, the output of the first load cell, and the output of the second load cell. 8. The environment conditioning device according to any one of items 2 to 7, characterized in that: (Item 9) The filter element is a chemical filter element. 9. The environment conditioning device according to any one of items 1 to 8, characterized in that: (Item 10) The chemical filter element is capable of collecting only one of organic gases and inorganic gases. 10. The environmental conditioning device according to item 9. (Item 11) Further comprising a cooler; The cooler and the inlet of the containment vessel are connected via the first flexible duct. 11. The environment conditioning device according to any one of items 1 to 10. (Item 12) Further comprising a heater; The heater and the outlet of the containment vessel are connected via the second flexible duct. Item 12. The environmental conditioning device according to item 11. (Item 13) a processing device including a chamber and a processing section for performing processing in the chamber; The environmental conditioning device according to any one of items 1 to 12, The environmental conditioning device adjusts the environment within the chamber. A processing system comprising: (Item 14) The processing unit is configured to transfer a pattern of an original onto a substrate. Item 14. The processing system according to item 13. (Item 15) A transfer step of transferring a pattern of the original onto a substrate by the processing system according to item 14; a processing step of obtaining an article by processing the substrate that has undergone the transfer step; A method for manufacturing an article, comprising: (Item 16) A management method for managing an environmental conditioning device comprising a containment vessel that houses a filter element and includes a primary side space and a secondary side space separated by the filter element, wherein a first flexible duct is connected to an inlet of the primary side space and a second flexible duct is connected to an outlet of the secondary side space, the method comprising: a measuring step of measuring the weight of the storage vessel storing the filter element; an output step of outputting status information indicating a status of the filter element based on the weight measured in the measuring step; A management method comprising:

[0034] The invention is not limited to the above-described embodiments, and various changes and modifications can be made without departing from the spirit and scope of the invention. Accordingly, the following claims are appended to apprise the public of the scope of the invention. [Explanation of symbols]

[0035] FE: filter element, 1: containment vessel, 2: inlet, 3: outlet, 5: measurement unit, 6: control unit, 261: first flexible duct, 632: second flexible duct

Claims

1. a containment vessel that contains a filter element and includes a primary space and a secondary space separated by the filter element; a measuring instrument for measuring the weight of the containment vessel; a first flexible duct connected to an inlet of the primary side space; a second flexible duct connected to an outlet of the secondary space; An environmental adjustment device comprising:

2. An output unit that outputs status information indicating a status of the filter element based on an output of the measuring instrument is further provided.

2. The environment conditioning device according to claim 1.

3. the output unit outputs the status information based on an output of the measuring instrument while filtering by the filter element is being performed.

3. The environment conditioning device according to claim 2.

4. the output unit outputs the status information based on a change in the output of the measuring instrument.

4. The environment conditioning device according to claim 3.

5. The output unit outputs information regarding the life of the filter element as the status information.

3. The environment conditioning device according to claim 2.

6. the output unit outputs the status information based on humidity.

3. The environment conditioning device according to claim 2.

7. the output unit outputs the state information based on the pressure in the primary space and the pressure in the secondary space.

3. The environment conditioning device according to claim 2.

8. a first load cell disposed between the inlet and the first flexible duct; a second load cell disposed between the outlet and the second flexible duct; the output unit outputs the status information based on the output of the measuring instrument, the output of the first load cell, and the output of the second load cell.

3. The environment conditioning device according to claim 2.

9. The filter element is a chemical filter element.

9. The environment conditioning device according to claim 1, wherein the temperature is 100° C. or higher.

10. The chemical filter element is capable of collecting only one of organic gases and inorganic gases.

10. The environment conditioning device according to claim 9.

11. Further comprising a cooler; the cooler and the inlet of the containment vessel are connected via the first flexible duct; 9. The environment conditioning device according to claim 1, wherein the temperature is 100° C. or higher.

12. Further comprising a heater; the heater and the outlet of the containment vessel are connected via the second flexible duct; 12. The environment conditioning device according to claim 11.

13. a processing device including a chamber and a processing section for performing processing in the chamber; and an environment conditioning device according to any one of claims 1 to 8, The environmental conditioning device adjusts the environment within the chamber. A processing system comprising:

14. The processing unit is configured to transfer a pattern of an original onto a substrate.

14. The processing system of claim 13.

15. a transfer step of transferring a pattern of an original onto a substrate by the processing system according to claim 14; a processing step of obtaining an article by processing the substrate that has undergone the transfer step; A method for manufacturing an article, comprising:

16. 1. A management method for managing an environmental conditioning device comprising: a containment vessel that houses a filter element and includes a primary side space and a secondary side space separated by the filter element; a first flexible duct connected to an inlet of the primary side space; and a second flexible duct connected to an outlet of the secondary side space, a measuring step of measuring the weight of the storage vessel storing the filter element; an output step of outputting status information indicating a status of the filter element based on the weight measured in the measuring step; A management method comprising:

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