Case and treating method of object to be treated using the case

Abstract

To make a possible to easily maintain an accommodated state of an object to be treated during transportation, and to prevent a productivity from deteriorating due to transportation of a small amount of the object to be treated.SOLUTION: A case (10) includes a housing part (11), a lid part (12), and a coupling part (13) that couples the housing part and the lid part. The housing part includes a carry-in / out port (17) for carrying in / out a processing object (S), a support part (15) for supporting an outer peripheral edge of the processing object, a movement restricting wall (18) disposed so as to face the carry-in / out port, and an accommodation plate (16) disposed so as to cover one surface side of the processing object supported by the support part, and accommodates one processing object. The lid part includes a lid plate (25) covering the other surface side of the object to be processed supported by the support part, and a carry-in / out restricting part (26) protruding from the lid plate toward the accommodation plate side. The coupling part couples the accommodation part and the lid part and switches the coupling position to switch between a transport state in which the carry-in / out restriction part blocks the carry-in / out port and a carry-in / out state in which the carry-in / out restriction part does not block the carry-in / out port.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present invention relates to a case for accommodating an object to be treated and a method for treating the object using the case. [Background technology]

[0002] Patent Document 1 discloses a cassette for accommodating workpieces such as wafers with surface protection tape attached to their surfaces, wafers alone, and frame units in which a wafer and a frame are integrated with tape. In Patent Document 1, the workpieces are transported while housed in the cassette and supplied to various processing devices such as cutting devices and grinding devices. The cassette in Patent Document 1 is configured to be capable of accommodating workpieces in lots of, for example, about 25 pieces. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] JP 2015-50401 A [Patent Document 2] Japanese Patent Application Laid-Open No. 2000-77512 Summary of the Invention [Problem to be solved by the invention]

[0004] In the processing equipment described above, it is often the case that a cassette does not contain a full lot of workpieces, for example, only one workpiece, due to the supply of workpieces for transport confirmation. In this case, a cassette capable of accommodating a full lot of workpieces, particularly large-diameter wafers, is larger and heavier than a cassette capable of accommodating a single workpiece. In other words, even when transporting only one workpiece, an operator must carry a large and heavy cassette, which reduces productivity.

[0005] Here, Patent Document 2 discloses a wafer storage case in which a storage recess with an inner diameter corresponding to the diameter of the wafer is formed in the upper center. A protrusion is formed on the lower surface of this case, and an inner thick portion that fits into the protrusion is formed on the upper surface. In Patent Document 2, the upper and lower cases are fitted together to store the wafers stored in the storage recess by fitting the protrusion of the upper case into the inner thick portion of the lower case. This allows the wafers to be transported in a state where they are enclosed by the upper and lower cases to prevent them from falling out.

[0006] When wafers are transported using the case of Patent Document 2, they are transferred to a cassette just before being transported to the processing equipment, eliminating the need for workers to carry large, heavy cassettes. However, there is a problem in that productivity is reduced due to the work of transferring wafers (processing objects) to a cassette.

[0007] The present invention has been made in consideration of these points, and one of its objects is to provide a case and a method for processing workpieces using the case, which can easily maintain the storage state of the workpieces during transportation and prevent a decrease in productivity when transporting small amounts of workpieces. [Means for solving the problem]

[0008] A case according to one embodiment of the present invention is a case for accommodating workpieces, and is equipped with a storage section for accommodating one workpiece, the storage section having an inlet / outlet for loading and unloading the workpiece, a support section supporting the outer edge of the workpiece, a movement restriction wall arranged opposite the inlet / outlet and restricting movement of the workpiece supported by the support section in the loading direction, and a storage plate arranged to cover one side of the workpiece supported by the support section, a lid section having a cover plate covering the other side of the workpiece supported by the support section and an inlet / outlet restriction section protruding from the cover plate towards the storage plate, and a connecting section that connects the storage section and the lid section and switches the connection position to switch between a transport state in which the inlet / outlet restriction section blocks at least a portion of the inlet / outlet, and a inlet / outlet state in which the inlet / outlet restriction section does not block the inlet / outlet.

[0009] One aspect of the present invention is a method for processing workpieces using the above-mentioned case, which includes a storage step of placing the case in the loading / unloading state and storing the workpiece in the storage section, a transport step of transporting the case in the transporting state to a processing device, an installation step of installing the case in the loading / unloading state on the processing device, and a processing step of processing the workpiece in the processing device. [Effects of the Invention]

[0010] According to the present invention, switching between a transport state in which the loading / unloading port is blocked and a loading / unloading state in which the loading / unloading port is open and the workpiece can be loaded and unloaded can be achieved by switching the connection position of the storage section and the lid section. This allows a single workpiece to be maintained in a storage state in which it does not fall out in the transport state, and does not require the use of large, heavy cassettes, preventing a decrease in productivity during transportation. Furthermore, because loading and unloading of workpieces through the loading / unloading port is permitted by switching to the loading / unloading state, the work of transferring workpieces from the case to the cassette can be omitted, thereby also preventing a decrease in productivity. [Brief explanation of the drawings]

[0011] [Figure 1] FIG. 2 is a perspective view of the case according to the first embodiment in a transported state. [Figure 2] FIG. 2 is an exploded view of FIG. 1. [Figure 3] FIG. 2 is a side view of FIG. [Figure 4] FIG. 3 is a side view of FIG. 2. [Figure 5] FIG. 5A is a partially enlarged perspective view of the lock mechanism and its periphery, and FIG. 5B is a perspective view similar to FIG. 5A according to a modified example. [Figure 6] FIG. 2 is a perspective view of a case according to the first embodiment in a carry-in / out state. [Figure 7] FIG. 7 is an exploded view of FIG. [Figure 8] FIG. 7 is a side view of FIG. [Figure 9] FIG. 8 is a side view of FIG. [Figure 10]FIG. 2 is a perspective view of the state in which another case is connected to the case according to the first embodiment. [Figure 11] FIG. 11 is a side view of FIG. [Figure 12] FIG. 3 is a flow diagram of a processing method according to the first embodiment. [Figure 13] 1 is a schematic perspective view of a processing apparatus used in a processing method according to a first embodiment. [Figure 14] FIG. 10 is a perspective view of a case according to a second embodiment in a transported state. [Figure 15] FIG. 10 is a perspective view of a case according to a second embodiment in a carry-in / out state. [Figure 16] FIG. 10 is a perspective view showing a state in which the connecting position between the storage section and the lid section is being switched in the second embodiment. [Figure 17] FIG. 10 is a perspective view showing a state in which the connecting position between the storage section and the lid section is being switched in the second embodiment. [Figure 18] FIG. 15 is a side view of FIG. [Figure 19] FIG. 18 is a side view of FIG. DETAILED DESCRIPTION OF THE INVENTION

[0012] Hereinafter, a case according to an embodiment will be described with reference to the accompanying drawings. Note that the present invention is not limited to the following embodiment, and can be appropriately modified and implemented within the scope of the present invention. For the sake of convenience, some components may be omitted in the following drawings.

[0013] The X-axis, Y-axis, and Z-axis directions of case 10 are perpendicular to one another. The X-axis and Y-axis directions are approximately horizontal, and the Z-axis direction is the up-down direction (vertical direction). Of the two arrows indicating the X-axis direction, the +X side is the right side and the -X side is the left side. Of the two arrows indicating the Y-axis direction, the +Y side is the front side and the -Y side is the rear side. Of the two arrows indicating the Z-axis direction, the +Z side is the up side and the -Z side is the down side. These directions may be changed as long as the same functions as those of the embodiment can be achieved.

[0014] [First embodiment] FIG. 1 is a perspective view of a case according to a first embodiment in a transport state. FIG. 2 is an exploded view of FIG. 1. FIG. 3 is a side view of FIG. 1. FIG. 4 is a side view of FIG. 2. Here, case 10 according to this embodiment has the same configuration but can be used in two different states by changing the orientation or position of some of the components. One of these two states is the "transport state" shown in FIG. 1, and the other is the "loading / unloading state" shown in FIG. 6. Below, we will first describe case 10 in the "transporting state", and then we will describe case 10 in the "loading / unloading state".

[0015] 1 to 4, the case 10 includes a storage section 11 disposed at the top of the figure, a lid section 12 disposed at the bottom of the figure, and a connecting section 13 that connects the storage section 11 and the lid section 12. One case 10 is configured to be able to store one (single) workpiece S. The case 10 is configured in a roughly symmetrical structure with respect to the ZX plane, and only the configuration on one side of the center in the Y direction will be described, and the description of the configuration on the other side may be omitted.

[0016] In this embodiment, the workpiece S is a wafer W supported on a ring frame F by a tape T, and the wafer W, tape T, and ring frame F are integrated together.

[0017] The accommodation section 11 has a support section 15, an accommodation plate 16, an inlet / outlet 17, and a movement restricting wall 18, and the accommodation section 11 accommodates one workpiece S therein.

[0018] The support part 15 is configured by a storage groove 21 formed on the inner surface of each of a pair of side walls 20 arranged opposite each other in the X direction. Each side wall 20 is formed to extend in the Y direction, and the storage groove 21 is also formed to extend in the Y direction parallel to the extension direction of the side walls 20. The support part 15 is provided so that the outer peripheral edges of the ring frame F of the workpiece S on both sides in the X direction can be inserted into the storage grooves 21 on both sides in the X direction. In this way, by inserting the outer peripheral edge of the ring frame F into the storage groove 21, the support part 15 supports the outer peripheral edge of the workpiece S. The thickness direction of the workpiece S supported by the support part 15 is oriented in the Z direction.

[0019] The accommodating plate 16 is formed in a roughly rectangular shape when viewed from the Z direction, with two of its four sides parallel to the X direction and the other two sides parallel to the Y direction. Both sides of the accommodating plate 16 in the Y direction are fixed to the +Z side surfaces of the side walls 20. Therefore, the accommodating plate 16 is arranged so as to cover one surface (top surface) in the +Z direction of the workpiece S supported by the support portion 15.

[0020] The loading / unloading port 17 is formed by being surrounded by the end (front end) on the +Y side of the storage plate 16 and each side wall 20, and the workpiece S is loaded and unloaded through the loading / unloading port 17. More specifically, the workpiece S can be loaded and unloaded (taken in and out) along the Y direction at the front end of the storage groove 21 that forms part of the loading / unloading port 17. Therefore, when the workpiece S is loaded and unloaded at the loading / unloading port 17, the -Y direction is the load direction and the +Y direction is the unload direction.

[0021] The movement restriction wall 18 is provided on the -Y side (rear side) of the storage plate 16 and each side wall 20, and is disposed opposite the loading / unloading port 17 in the Y direction. The movement restriction wall 18 is provided in the shape of a piece or plate that blocks the space between the -Y side ends of each side wall 20 on the -Z side of the storage plate 16, and abuts against the -Y side end of the workpiece S supported by the support part 15. Therefore, the movement restriction wall 18 restricts the movement of the workpiece S supported by the support part 15 in the loading direction (-Y direction).

[0022] A pair of corner spacers 24 are provided between both sides of the movement restriction wall 18 in the X direction and the -Y side of each side wall 20 at positions where the workpiece S does not come into contact. The movement restriction wall 18 is connected to the side wall 20 via the pair of corner spacers 24.

[0023] The cover portion 12 has a cover plate 25 and a carry-in / out restricting portion 26 .

[0024] The cover plate 25 is formed in a roughly rectangular shape that is slightly larger than the storage plate 16 when viewed from the Z direction, with two of its four sides parallel to the X direction and the other two sides parallel to the Y direction. Side walls 20 are arranged on the +Z side surfaces (upper surfaces) of the cover plate 25 on both sides in the X direction. Therefore, the cover plate 25 can be arranged to cover one surface (lower surface) in the -Z direction of the workpiece S supported by the support part 15.

[0025] The loading / unloading restricting portion 26 extends in the X direction along the +Y side end (front end) of the cover plate 25. The loading / unloading restricting portion 26 is formed in a piece or plate shape and protrudes from the upper surface (+Z side surface) of the cover plate 25 toward the upper storage plate 16 of the storage section 11. A pair of support blocks 28 (not shown in FIGS. 1 and 3) are provided on both sides in the X direction of the -Y side surface of the loading / unloading restricting portion 26, and the protruding state of the loading / unloading restricting portion 26 is maintained via the support blocks 28.

[0026] The loading / unloading restricting unit 26 is capable of closing the space between the +Y side ends of the side walls 20, and is disposed near the +Y side end of the workpiece S supported by the support unit 15. Thus, the loading / unloading restricting unit 26 closes the loading / unloading opening 17 and restricts movement in the unloading direction (+Y direction) of the workpiece S supported by the support unit 15. In this way, the state in which the loading / unloading restricting unit 26 closes the loading / unloading opening 17 is referred to as the "transport state."

[0027] The connecting portion 13 includes a fitting projection 31 that projects upward from the top surface of the cover plate 25 and a fitting receiving portion 32 formed on the side wall 20 .

[0028] Three mating protrusions 31 are provided on each of the two ends of the cover plate 25 extending in the Y direction, for a total of six mating protrusions 31. More specifically, along each edge extending in the Y direction, the mating protrusions 31 are located near the end on the -Y side, at a position offset from the center in the Y direction toward the -Y side, and at a position slightly offset from the end on the +Y side toward the -Y side. All of the mating protrusions 31 in the connecting portion 13 have the same shape and configuration.

[0029] The mating protrusion 31 has a base 33 and a protrusion 34 that is connected to the +Z side end (upper end) of the base 33 and protrudes from the base 33 to the -Y side, and is formed in a roughly upside-down L shape.

[0030] Three mating receiving portions 32 are formed on each of the outer surfaces of the two side walls 20, for a total of six mating receiving portions 32, and the position of each mating receiving portion 32 in the Y direction corresponds to the position of each mating protrusion 31. All of the mating receiving portions 32 in the connecting portion 13 are formed to have approximately the same shape.

[0031] The fitting receiving portion 32 includes an insertion portion 37 formed to open in the Z direction while recessing the outer surface of the side wall 20 inward, and an extension portion 38 formed to extend the -Y side on the +Z side of the insertion portion 37. A protrusion portion 39 that protrudes toward the +Y side is formed between the extension portion 38 and the underside of the side wall 20.

[0032] 5A is a partially enlarged perspective view of the locking mechanism and its periphery. In each side wall 20, a recess 41 that reduces the height in the Z direction is formed at a position adjacent to the central fitting receiver 32 of the three fitting receivers 32 in the Y direction, and a locking mechanism 42 is provided in the recess 41. The locking mechanism 42 includes a support piece 44 disposed along the bottom surface of the recess 41, a fixed shaft 45 that fixes the +Y side end of the support piece 44, and an insertion block 46 that is provided at the -Y side end of the support piece 44 and follows the +Y side forming surface of the fitting receiver 32. The support piece 44 is formed, for example, by a leaf spring and is provided so that the insertion block 46 can be inserted into and removed from the fitting receiver 32 by deforming as shown by the two-dot chain line in FIG. 5A.

[0033] Next, a description will be given of a method for connecting the storage part 11 and the lid part 12 by the connecting part 13. Such a connecting method may be performed manually by a worker, or may be performed automatically using an assembly robot or the like.

[0034] When connecting the storage unit 11 and the lid unit 12 from a disassembled state, the orientation of the storage unit 11 and the lid unit 12 is set so that the loading / unloading restricting portion 26 of the lid unit 12 fits into the loading / unloading opening 17 of the storage unit 11, as shown in Fig. 2. At this time, the fitting protrusions 31 and the fitting receiving portions 32 of the connecting portion 13 are arranged opposite each other in the Z direction.

[0035] In this state, by bringing the storage portion 11 and the lid portion 12 closer to each other, the fitting protrusions 31 are inserted into the fitting receivers 32 of the connecting portion 13, as shown in FIGS. 3 and 4. In other words, the Y-direction width of the fitting protrusions 31 on the +Z side (the protruding portion 34 side) is formed slightly smaller than the Y-direction width of the insertion portion 37 of the fitting receiver 32, allowing the fitting protrusions 31 to be inserted into the fitting receivers 32. When the fitting protrusions 31 are inserted into the fitting receivers 32, the storage portion 11, including each side wall 20, is sandwiched from the outside in the X direction by the fitting protrusions 31 on both sides in the X direction, restricting relative movement in the X direction between the storage portion 11 and the lid portion 12 (see FIG. 2). In addition, the +Z-side surface of the cover plate 25 of the lid portion 12 is placed in contact with the -Z-side surface of the side wall 20.

[0036] Next, the accommodation unit 11 and the lid unit 12 are moved relative to each other in the Y direction, and the protruding portion 34 of the fitting protrusion 31 is inserted into the expanding portion 38 of the fitting receiving unit 32. In other words, the fitting receiving unit 32 and the fitting protrusion 31 are formed so that the protruding portion 39 formed by the fitting receiving unit 32 is inserted between the protruding portion 34 of the fitting protrusion 31 and the lid plate 25 and fits tightly in the Z direction. The fitting protrusion 31 and the fitting receiving unit 32 fit together, and the protruding portion 39 is sandwiched between the protruding portion 34 of the fitting protrusion 31 and the lid plate 25 from the Z direction, thereby restricting the relative movement of the accommodation unit 11 and the lid unit 12 in the Z direction.

[0037] When the fitting protrusion 31 is inserted into the fitting receiver 32, as shown by the two-dot chain line in Fig. 5A, the insertion block 46 of the locking mechanism 42 is lifted by the fitting protrusion 31, and the support piece 44 is deformed so as to tilt. Thereafter, by moving the accommodation unit 11 and the lid unit 12 relative to each other in the Y direction, the +Y side surface of the fitting protrusion 31 and the -Y side surface of the fitting receiver 32 are separated, and the insertion block 46 is displaced so as to be inserted between them. The displacement of the insertion block 46 is caused by the elastic force of the deformed support piece 44.

[0038] By inserting the insertion block 46 between the fitting protrusion 31 and the fitting receiver 32, movement of the fitting protrusion 31 in the Y direction within the fitting receiver 32 is restricted, and relative movement in the Y direction between the storage unit 11 and the lid 12 is restricted. As a result, movement in the X, Y, and Z directions, which are the three orthogonal axial directions, of the storage unit 11 and the lid 12 is restricted by the connecting portion 13, completing the connection between the storage unit 11 and the lid 12 and establishing the case 10 in a "transport state." In this state, the loading / unloading restricting portion 26 of the case 10 blocks the loading / unloading opening 17, restricting the stored workpiece S from unintentionally falling out. When the case 10 is in the transport state, the connecting position of the connecting portion 13 is the fitting protrusion 31 and the fitting receiver 32.

[0039] On the other hand, the connection between the storage section 11 and the lid section 12 in the case 10 in the transport state can be released by generally reversing the connection method described above. In this procedure, the insertion block 46 of the locking mechanism 42 is removed from the fitting receiving section 32, and then the storage section 11 and the lid section 12 are moved relative to each other in the Y direction to remove the protruding sections 34 of the fitting protrusions 31 from the expanding sections 38 of the fitting receiving section 32. Thereafter, the storage section 11 and the lid section 12 are moved apart in the Z direction, thereby removing the fitting protrusions 31 from the fitting receiving sections 32, releasing the connection by the connecting sections 13 and allowing the storage section 11 and the lid section 12 to be disassembled.

[0040] Next, the case 10 in the "loading / unloading state" will be described. Fig. 6 is a perspective view of the case according to the first embodiment in the loading / unloading state. Fig. 7 is an exploded view of Fig. 6, Fig. 8 is a side view of Fig. 6, and Fig. 9 is a side view of Fig. 7.

[0041] 6 and 7, the case 10 in the loading / unloading state is connected to the storage section 11 by the connecting section 13, with the lid section 12 rotated 180° around the Z axis relative to the case 10 in the transporting state (see FIGS. 1 and 2). To enable such connection, the connecting section 13 has, in addition to the configuration described above, a plurality of recesses 50 formed on the -Z side surface of the side wall 20. The connecting section 13 also has a first magnetic body 51 provided on the +Z side (upper side) of the protruding section 34 of each fitting protrusion 31, and a second magnetic body 52 provided in the portion where each recess 50 is formed.

[0042] Three recesses 50 are formed on each of the −Z side surfaces of the two side walls 20, for a total of six recesses 50, and the position of each recess 50 in the Y direction corresponds to each fitting protrusion 31 provided on each first magnetic body 51, i.e., the lid portion 12. More specifically, on each side wall 20 extending in the Y direction, the recesses 50 are located near the end on the +Y side, at a position shifted from the center in the Y direction to the +Y side, and at a position slightly shifted from the end on the −Y side to the +Y side.

[0043] The widths of the recess 50 in the X, Y, and Z directions are set to be approximately the same as those of the first magnetic body 51, so that the recess 50 can receive the first magnetic body 51. Therefore, as shown in Figures 6 and 8, when the first magnetic body 51 is received in the recess 50, the relative movement of the first magnetic body 51 in the X and Y directions within the recess 50 is restricted, and the relative movement of the storage section 11 and the lid section 12 in the X and Y directions is restricted. Note that when the case 10 is in the loading / unloading state, the fitting protrusion 31 and the fitting receiving section 32 are set to a positional relationship in which their positions in the Y direction are misaligned.

[0044] The second magnetic body 52 is provided so as to be embedded on the +Z side of each recess 50 in the side wall 20. At least one of the second magnetic body 52 and the first magnetic body 51 is magnetized, and they are provided so as to exert a magnetic force that attracts each other. Therefore, as shown in FIGS. 6 and 8, when the first magnetic body 51 is received in the recess 50, an attractive magnetic force is exerted between the first magnetic body 51 received in the recess 50 and the second magnetic body 52. ​​This magnetic force restricts the relative movement of the storage portion 11 and the lid portion 12 in the Z direction.

[0045] Therefore, in the case 10 in the loading / unloading state, by receiving the first magnetic body 51 in the recess 50 by the connecting portion 13, movement in each of the X, Y, and Z directions, which are the three orthogonal axial directions between the storage portion 11 and the lid portion 12, is restricted, and the case 10 is in the "loading / unloading state." In this state, the loading / unloading restricting portion 26 of the case 10 opens the loading / unloading opening 17 without blocking it (see FIG. 6), and the stored workpiece S can be loaded through the loading / unloading opening 17 and can be loaded and stored in the storage portion 11. In the case 10 in the loading / unloading state, the connecting position of the connecting portion 13 is the recess 50 and the first magnetic body 51.

[0046] The connection between the storage section 11 and the lid section 12 in the case 10 in the loading / unloading state can be released by pulling the storage section 11 and the lid section 12 apart against the attractive force between the first magnetic body 51 and the second magnetic body 52, thereby disassembling the storage section 11 and the lid section 12.

[0047] As described above, by switching the connection position of the connection part 13 as described above, the case 10 can be switched between the "transportation state" and the "loading / unloading state."

[0048] Fig. 10 is a perspective view of the case according to the embodiment when another case is connected to it. Fig. 11 is a side view of Fig. 10. As shown in Figs. 10 and 11, when the case 10 is in the loading / unloading state, the storage section 11 of another case 10 can be connected to the +Z side of the storage section 11 in a stackable manner. To enable such connection, the case 10 further includes a stacking connecting section 55. The stacking connecting section 55 is configured to include a plurality of third magnetic bodies 56 in addition to the recess 50 and each second magnetic body 52 described above.

[0049] Three third magnetic bodies 56 are provided on each of the +Z side surfaces of the two side walls 20, for a total of six, and the position of each third magnetic body 56 in the Y direction is the same as that of each recess 50. The widths of the third magnetic bodies 56 in the X, Y, and Z directions are set to be approximately the same as those of the recess 50 and the first magnetic bodies 51, and the third magnetic bodies 56 are provided so as to be receivable in the recess 50 of another stacked storage section 11. The third magnetic bodies 56 and the second magnetic bodies 52 are provided so as to exert magnetic forces that attract each other.

[0050] When the storage section 11 of another case 10 is stacked on the +Z side of a case 10 in the loaded / unloaded state, the third magnetic body 56 is received in the recess 50 of the storage section 11 of the other case 10 by the stacking connecting portion 55. This restricts relative movement of the third magnetic body 56 in the X and Y directions within the recess 50, and restricts relative movement of the cases 10 in the X and Y directions. Furthermore, an attractive magnetic force is exerted between the third magnetic body 56 received in the recess 50 and the second magnetic body 52, and this magnetic force restricts relative movement of the cases 10 in the Z direction. Therefore, by receiving the third magnetic body 56 in the recess 50, movement of the cases 10 in each of the X, Y, and Z directions, which are the three orthogonal axial directions, is restricted, and the state in which the storage section 11 of the other case 10 is stacked and connected to the case 10 in the loaded / unloaded state is maintained.

[0051] Next, a flow of a method for treating the object S using the case 10 of the embodiment will be described. Fig. 12 is a flow diagram of the treatment method of the first embodiment. As shown in Fig. 12, the treatment method of the present embodiment includes a storage step S01, a transport step S02, an installation step S03, and a treatment step S04.

[0052] In the accommodation step S01, the case 10 is set to the loading / unloading state in the same manner as described above, as shown in Fig. 6. Then, the workpiece S is loaded into the accommodation section 11 through the loading / unloading port 17 of the case 10 that is set to the loading / unloading state, and the outer peripheral edges of the ring frame F on both sides in the X direction of the workpiece S are inserted into the accommodation grooves 21 on both sides in the X direction. This brings the workpiece S into a state where it is accommodated in the accommodation section 11 of the case 10.

[0053] In the transport step S02, the case 10 in the carry-in / out state in which the object to be processed S is accommodated in the accommodation step S01 is put into the transport state shown in Fig. 1 in the same manner as described above. As a result, the carry-in / out opening 17 of the case 10 is blocked by the carry-in / out restricting section 26, preventing the accommodated object to be processed S from unintentionally falling out. In the transport step S02, the case 10 in the transport state is transported to the processing device 80 shown in Fig. 13 by a worker, a transport robot, or equipment. Fig. 13 is a schematic perspective view of the processing device used in the processing method of the first embodiment.

[0054] As shown in FIG. 13, the processing device 80 includes a spin cleaning mechanism 81, a transfer mechanism 82, and a processing unit 83.

[0055] The spin cleaning mechanism 81 cleans the workpiece S by spinning a spinner table 86 that holds the workpiece S while supplying a cleaning liquid from a nozzle 85 .

[0056] The transport mechanism 82 transports the workpiece S into and out of the spin cleaning mechanism 81 and also transports the workpiece S between the spinner table 86 and the chuck table 88 of the processing section 83 .

[0057] The processing section 83 includes a chuck table 88, a laser irradiation section 90, an imaging section 91, a casing 92 to which the laser irradiation section 90 and the imaging section 91 are fixed at their tips, and a horizontal movement mechanism 94 that moves the chuck table 88 in two horizontal orthogonal axis directions, and performs laser processing on the wafer W to be processed.

[0058] The chuck table 88 sucks the workpiece S onto its upper surface, which is formed of, for example, a porous member that communicates with a suction source (not shown).

[0059] The laser irradiation unit 90 focuses a laser beam emitted by an oscillator housed inside a casing 92 and irradiates the laser beam vertically downward onto the wafer W. This laser beam has, for example, a wavelength that is absorbed by the wafer W. By irradiating the wafer W with the laser beam by the laser irradiation unit 90, grooves are formed, for example, along the planned dividing lines.

[0060] The imaging unit 91 captures an image of the wafer W. The image of the wafer W captured by the imaging unit 91 is used to determine the irradiation position of the laser beam on the wafer W.

[0061] In the setting step S03, the case 10 that was transported to the processing device 80 in the transporting state in the transporting step S02 is set in the transporting state again. Thereafter, the case 10 is set on the cassette stage 96 of the processing device 80.

[0062] In processing step S04, the workpiece S is carried out from the case 10 in the carry-in / out state via the carry-in / out mechanism 97 of the processing device 80. The workpiece S carried out from the case 10 is cleaned by the spin cleaning mechanism 81, and then carried to the processing unit 83 by the transport mechanism 82, where laser processing (treatment) is performed on the wafer W of the workpiece S by the laser irradiation unit 90. The workpiece S, after the wafer W has been laser processed, is carried into the case 10 in the carry-in / out state via the transport mechanism 82 and the carry-in / out mechanism 97.

[0063] According to the case 10 of the first embodiment, the connecting portion 13 can be used to switch between a transport state in which the loading / unloading opening 17 is blocked and a loading / unloading state in which the loading / unloading opening 17 is not blocked and the workpiece S can be loaded and unloaded. More specifically, by rotating the lid portion 12 180° relative to the storage portion 11 and connecting the case 10 to the storage portion 11 via the connecting portion 13, the case 10 can be switched between the transport state and the loading / unloading state. This allows a single workpiece S to be maintained in a storage state in which it will not fall out in the transport state, eliminating the need to use a conventional large, heavy cassette in the transport step S02. Therefore, the workpiece S can be stored and transported in the lightweight, compact case 10, preventing a decrease in productivity during transportation.

[0064] Moreover, because switching to the loading / unloading state allows the workpieces S to be loaded and unloaded through the loading / unloading port 17, the conventional work of transferring the workpieces from the case to the cassette can be omitted in the installation step S03. Therefore, the case 10 containing the workpieces S can be installed in the processing device 80 easily and in a short time, which also prevents a decrease in productivity.

[0065] Furthermore, since the case 10 has a stacking connecting portion 55, when two workpieces S are to be placed and processed (treated), the storage sections 11 of other cases 10 can be stacked as shown in Figures 10 and 11. When placing three or more workpieces S, multiple storage sections 11 can be stacked in the same manner as described above. Therefore, by stacking the storage sections 11 according to the number of workpieces S to be processed, it is possible to place multiple workpieces S stored in cases 10 in the treatment device 80 while minimizing the size and weight of the multiple stacked cases 10, and to prevent a decrease in productivity in the installation step S03.

[0066] Furthermore, the loading / unloading opening 17 of the case 10 in the loading / unloading state can be positioned higher relative to the underside (-Z side) of the cover plate 25 than the loading / unloading opening 17 of the case 10 in the transportation state (see FIGS. 1 and 6). By matching the height of the loading / unloading opening 17 in the loading / unloading state with the height of the loading / unloading opening of a cassette normally used in the processing device 80, the workload of adjustments and other tasks required to install the case 10 in installation step S03 can be reduced. The height (position in the Z direction) of the loading / unloading opening 17 in the loading / unloading state is adjusted by the Z-direction dimensions of the side wall 20, the fitting protrusion 31, and the recess 50. Here, the side wall 20, the fitting protrusion 31, and the recess 50 constitute a height adjustment unit, which can adjust the height of the loading / unloading opening 17 from the cover plate 25 between the transportation state and the loading / unloading state.

[0067] [Second embodiment] Next, a second embodiment of the present invention will be described. In the following description, the same reference numerals may be used for components that are the same as or equivalent to those in the first embodiment, and descriptions thereof may be omitted or simplified.

[0068] A second embodiment of the present invention will be described with reference to Figs. 14 to 19. Fig. 14 is a perspective view of a case according to the second embodiment in a transported state. Fig. 15 is a perspective view of a case according to the second embodiment in a loaded / unloaded state. Figs. 16 and 17 are perspective views of a state in the middle of switching the coupling position between the storage section and the lid section in the second embodiment. Fig. 18 is a side view of Fig. 14. Fig. 19 is a side view of Fig. 17. As shown in Figs. 14 to 19, in the second embodiment, the configuration of coupling sections 13, 100 is mainly changed compared to the first embodiment.

[0069] The connecting part 100 in the second embodiment includes a connecting shaft part 101 that protrudes upward (in the +Z direction) from the upper surface (the surface on the +Z side) of the cover plate 25, a receiving part 102 formed on the side wall 20, and a locking mechanism 103 that restricts relative movement between the storage part 11 and the cover part 12. In the second embodiment as well, the storage part 11 and the cover part 12 are connected by the connecting part 100, and by switching the connection position of the storage part 11 and the cover part 12, it is possible to switch between the transport state (see FIG. 14) and the loading / unloading state (see FIG. 15) of the case 10.

[0070] Two connecting shafts 101 are provided at each of two ends extending in the Y direction on both sides of the cover plate 25 in the X direction, for a total of four. More specifically, along each edge extending in the Y direction, the connecting shafts 101 are disposed at a position near the -Y side end and a position near the +Y side end. The connecting shafts 101 near the -Y side end and the connecting shafts 101 near the +Y side end have a common configuration and are arranged in a generally symmetrical structure with respect to the ZX plane. Furthermore, the two connecting shafts 101 provided on the +X side of the cover plate 25 and the two connecting shafts 101 provided on the -X side have a common configuration and are arranged in a generally symmetrical structure with respect to the YZ plane.

[0071] Further, a receiving portion 102 is formed corresponding to each of the four connecting shaft portions 101. More specifically, two receiving portions 102 are formed on each of the outer surfaces of the two side walls 20, for a total of four, and each receiving portion 102 is formed at a position corresponding to each connecting shaft portion 101. Furthermore, the four receiving portions 102 have a common configuration and are configured symmetrically like the connecting shaft portions 101. Therefore, in the following description of the connecting shaft portions 101 and receiving portions 102, the connecting shaft portions 101 and receiving portions 102 on the +X side and +Y side as enlarged in Figures 14 to 17 will be described unless otherwise specified.

[0072] The connecting shaft portion 101 includes a cylindrical shaft body 106, and a first pin 107 and a second pin 108 that are provided so as to protrude from the shaft body 106, one each.

[0073] Shaft body 106 is erected on the upper surface of cover plate 25 and extends in the Z direction, with first pin 107 protruding outward from shaft body 106 in the +X direction, and second pin 108 protruding from shaft body 106 in the +Y direction along the front-to-rear direction. In the transport state shown in Figure 14, the upper end (end face on the +Z side) of shaft body 106 is aligned with the upper surface of storage plate 16, first pin 107 is positioned slightly below the upper surface of side wall 20 in the Z direction, and second pin 108 is positioned so that its position in the Z direction is aligned with the upper end of shaft body 106.

[0074] 16 and 17 , receiving portion 102 is formed in side wall 20 to receive connecting shaft portion 101. Receiving portion 102 has a recessed portion 110 that is formed so as to open the +X side, which is the outer side of side wall 20, and recess toward the -X side. Recessed portion 110 is formed by opening side wall 20 in the Z direction, and while shaft body 106 is inserted from the Z direction, recessed portion 110 is disposed in contact with or with a slight gap between both Y direction sides and the -X side of shaft body 106. Therefore, when housing portion 11 and cover portion 12 are moved relatively in the Z direction as described below, the relative movement is guided by recessed portion 110 and shaft body 106 of connecting shaft portion 101.

[0075] By inserting shaft body 106 into recessed portion 110, shaft body 106 is sandwiched between recessed portion 110 from the Y direction, restricting relative movement in the Y direction, and thereby restricting relative movement in the Y direction between storage portion 11 and lid portion 12. Furthermore, storage portion 11 including each side wall 20 is sandwiched from the outside in the X direction by connecting shaft portions 101 (shaft bodies 106) on both sides of cover plate 25 in the X direction, restricting relative movement in the X direction between storage portion 11 and lid portion 12.

[0076] The receiving portion 102 further includes a movement restricting groove 111 that communicates with the +Y side (one side in the Y direction) of the recessed portion 110 and is capable of receiving the second pin 108. The movement restricting groove 111 is formed in the side wall 20 so as to extend in the Z direction, with its upper end opening onto the upper surface of the side wall 20 and its lower end, not shown, being formed above the lower surface of the side wall 20. When the second pin 108 abuts against the lower end of the movement restricting groove 111, the relative movement of the receiving portion 11 and the lid portion 12 in the direction of separation in the Z direction is restricted.

[0077] Two locking mechanisms 103 are provided in total, one on each of the two side walls 20. The locking mechanism 103 provided on the +X side wall 20 and the locking mechanism 103 provided on the -X side wall 20 have a common configuration and are provided in a generally symmetrical structure with respect to the YZ plane. Therefore, in the following description of the locking mechanisms 103, the locking mechanism 103 on the +X side will be described unless otherwise specified.

[0078] The lock mechanism 103 includes a rotating plate 113, a rotation support portion 114 that rotatably supports the rotating plate 113, and a spring member 115 that applies a rotational force to the rotating plate 113.

[0079] Rotating plate 113 is disposed along the outer surface (+X side surface) of side wall 20, and is formed so that its width in the Z direction is slightly smaller than the width in the Z direction of side wall 20. Rotating plate 113 has a length in the Y direction that is sufficient to cover recesses 110 formed on both sides of side wall 20 in the Y direction.

[0080] 14, a finger hook 117 formed as a substantially rectangular cutout is formed in the center in the Y direction at the lower end (edge ​​on the -Z side) of the rotating plate 113 in FIG. 14. An operator can insert his / her fingertip into the inside of the finger hook 117 to rotate the rotating plate 113.

[0081] 14, the rotating plate 113 has upper receiving portions 118 formed by recessing the upper ends (edges on the -Z side) in Fig. 14 in an arc shape on both sides of the Y direction of the rotating plate 113, and lower receiving portions 119 formed by recessing the lower ends in Fig. 14 in an arc shape. The upper receiving portions 118 and lower receiving portions 119 are capable of receiving and fitting with the first pin 107.

[0082] The rotation support parts 114 have a hinge structure that connects the upper surface of the side wall 20 and the outer surface (the surface on the +X side) of the rotating plate 113, and one is provided on each side of the rotating plate 113 in the Y direction. The rotation support parts 114 are provided so that the rotating plate 113 can rotate approximately 180° around the vicinity of the upper end of the rotating plate 113 as the center of rotation in the state shown in Fig. 14. Specifically, the rotating plate 113 can rotate between the position shown in Figs. 14 and 15 where it is along the outer surface of the side wall 20, and the position shown in Figs. 16 and 17 where it has rotated in the +Z direction (upward) from that position and is above the side wall 20.

[0083] The spring member 115 is composed of a torsion spring provided around the central axis of rotation in the hinge structure of the rotation support part 114. The spring member 115 exerts an elastic force that presses the rotating plate 113 against the outer surface of the side wall 20, and the state shown in Fig. 14 or 18 is normally maintained. When the rotating plate 113 is rotated to the positions shown in Figs. 16, 17, and 19, the rotation is performed against the elastic force of the spring member 115.

[0084] In the second embodiment, movement restricting wall 121 is fixed to the -Z side surface of storage plate 16 and is provided so as to block the space between the -Y side ends of each side wall 20. A stopper 122, with which ring frame F of workpiece S abuts, is provided on the inner surface (-Z side surface) of storage plate 16 adjacent to the +Y side of movement restricting wall 121.

[0085] The loading / unloading restricting portion 124 of the second embodiment is formed in an angled shape and is provided so as to protrude from the upper surface (the surface on the +Z side) of the cover plate 25 toward the upper storage plate 16 side of the storage portion 11. A magnet 126 is provided on the -Y side of the loading / unloading restricting portion 124, and the magnet 126 is magnetically attached to the ring frame F, thereby restricting the displacement of the workpiece S including the ring frame F.

[0086] 14 and 18, the case 10 is placed in a transport state in which the lower surface (-Z side surface) of the side wall 20 contacts the upper surface (+Z side surface) of the cover plate 25 of the lid portion 12. Furthermore, in the connecting portion 100, the first pins 107 of the connecting shaft portion 101 are received in the upper receiving portions 118 of the rotating plate 113, and the first pins 107 act as stoppers to restrict movement of the storage portion 11 including the rotating plate 113 in a direction away from the lid portion 12 in the Z direction. This restricts relative movement between the storage portion 11 and the lid portion 12 in the Z direction.

[0087] As described above, relative movement between the storage unit 11 and the lid unit 12 in the X and Y directions is restricted, and therefore movement between the storage unit 11 and the lid unit 12 in the X, Y, and Z directions, which are three orthogonal axial directions, is restricted by the connecting unit 100. Therefore, when the case 10 is in the transport state, the connection between the storage unit 11 and the lid unit 12 is maintained via the connecting unit 100, and the loading / unloading restricting unit 124 is in a state of blocking the loading / unloading opening 17. Here, when the case 10 is in the transport state, the connecting position of the connecting unit 100 is the upper receiving portion 118 of the rotating plate 113 and the first pin 107 of the connecting shaft 101.

[0088] Next, in the second embodiment, a method for switching between the transport state and the loading / unloading state of case 10 will be described. When switching from the transport state shown in Fig. 14 to the loading / unloading state shown in Fig. 15, first, a fingertip is placed on finger hook portion 117 of rotating plate 113, and rotating plate 113 is rotated upward from a position along the outer surface of side wall 20, as shown by the two-dot chain line in Figs. 16 and 18. This rotation disengages upper receiving portion 118 of rotating plate 113 from first pin 107, allowing relative movement of storage portion 11 away from lid portion 12 in the Z direction.

[0089] Next, with the shaft body 106 of the connecting shaft portion 101 received in the recess 110 of the receiving portion 102, the accommodation portion 11 and the lid portion 12 are relatively moved apart in the Z direction using these as guides. This results in the state shown in Figures 17 and 19. From this state, the rotating plate 113 is rotated upward and then rotated back to a position along the outer surface of the side wall 20. This rotation may be performed by an operator, but it can also be performed automatically by releasing the rotating plate 113 and using the elastic force of the spring member 115.

[0090] 15 and 19, the first pin 107 is received in the lower receiving portion 119 of the rotating plate 113, and the storage unit 11 including the rotating plate 113 is placed on the first pin 107. This restricts the movement of the storage unit 11 in the direction approaching the lid unit 12 in the Z direction.

[0091] 15, the second pin 108 received in the movement restricting groove 111 abuts against the lower end of the movement restricting groove 111, restricting movement of the storage unit 11 in the direction away from the lid unit 12 in the Z direction. Furthermore, since the relative movement between the storage unit 11 and the lid unit 12 in the X and Y directions is maintained in a restricted state in the same manner as described above, the connecting unit 100 restricts movement of the storage unit 11 and the lid unit 12 in the X, Y, and Z directions, which are the three orthogonal axial directions. This places the case 10 in a loading / unloading state, maintaining the connection between the storage unit 11 and the lid unit 12 via the connecting unit 100, and the loading / unloading restricting unit 124 opens the loading / unloading opening 17 without blocking it. When the case 10 is in the loading / unloading state, the connecting position of the connecting unit 100 is the lower receiving portion 119 of the rotating plate 113 and the first pin 107 of the connecting shaft 101.

[0092] The height (position in the Z direction) of the loading / unloading opening 17 in the loading / unloading state is adjusted by the Z direction dimensions of the side wall 20, the rotating plate 113, and the shaft body 106. Here, the side wall 20, the rotating plate 113, and the shaft body 106 constitute a height adjustment unit, and the height of the loading / unloading opening 17 from the cover plate 25 can be adjusted by the height adjustment unit between the transport state and the loading / unloading state.

[0093] According to the case 10 of the second embodiment, it is possible to switch between a transport state in which the loading / unloading opening 17 is blocked and a loading / unloading state in which the loading / unloading opening 17 is not blocked and the workpiece S is allowed to be loaded and unloaded via the connecting part 100. As a result, the second embodiment can also achieve the same effects as the first embodiment. Furthermore, switching between the transport state and the loading / unloading state of the case 10 can be performed by rotating the rotating plate 113 and moving the storage part 11 and the lid part 12 closer or farther apart, which simplifies the switching operation and reduces the burden and shortens the operation time.

[0094] The present invention is not limited to the above-described embodiments, and various modifications can be made. In the above-described embodiments, the size and shape shown in the accompanying drawings are not limited to these, and can be modified as appropriate within the scope of the effects of the present invention. In addition, the present invention can be modified as appropriate within the scope of the object of the present invention.

[0095] In the above-described first embodiment, a laser processing device has been described as an example of processing device 80, but the present invention may also be applied to other processing devices that process wafers, such as a polishing device or a cutting device. When the processing device is a polishing device, processing unit 83 is a polishing pad, and when the processing device is a cutting device, processing unit 83 is a cutting tool or a cutting blade.

[0096] Furthermore, the configuration of the connecting portion 13 and the stacking connecting portion 55 may be changed as long as they exhibit the same functions as those in the above embodiment.

[0097] Furthermore, the locking mechanism 42 only needs to restrict movement of the fitting protrusion 31 in the Y direction inside the fitting receiving portion 32, and can be modified to the configuration shown in Fig. 5B, for example. In the locking mechanism 42 of Fig. 5B, the support piece 44 is provided so as to be rotatable around a fixed shaft 45, and the insertion block 46 can be moved in and out of the fitting receiving portion 32 by the rotational displacement.

[0098] Furthermore, the movement restriction wall 18 and the loading / unloading restriction section 26 may be configured to have a smaller width in the X direction or to be divided in the X direction, as long as they are able to restrict the movement of the workpiece S in the Y direction, as in the above embodiment.

[0099] Furthermore, the workpiece S is not limited to the above-mentioned configuration, and may be a wafer with a surface protection tape attached to its surface, or a single wafer.

[0100] Furthermore, in the case 10 of the second embodiment, it is not prohibited to stack a plurality of cases in the Z direction. [Industrial Applicability]

[0101] As described above, when used in a processing device, for example, the present invention has the effect of easily maintaining the storage state of the workpieces during transportation, and preventing a decrease in productivity when transporting and loading / unloading small amounts of workpieces. [Explanation of symbols]

[0102] 10: Case 11: Storage section 12: Lid part 13:Connection part 15: Support part 16: Storage plate 17: Loading / unloading entrance 18: Movement control wall 20: Side wall (height adjustment part) 25: Lid plate 26: Carry-in / out control section 31: Fitting protrusion (height adjustment part) 50: Recess (height adjustment part) 55: Stacked connection section 80: Processing equipment 100: Connection part 106: Shaft body (height adjustment part) 113: Rotating plate (height adjustment part) S: Material to be treated

Claims

1. A case for accommodating an object to be treated, a loading / unloading port for loading / unloading the object to be treated; a support portion that supports the outer periphery of the object to be processed; a movement restriction wall disposed opposite the loading / unloading port and restricting movement of the workpiece supported by the support portion in the loading direction; a storage section for storing one of the objects to be processed, the storage section having a storage plate arranged to cover one surface of the object to be processed supported by the support section; a cover plate for covering the other side of the object to be processed supported by the support portion; a cover portion having a carry-in / out restricting portion protruding from the cover plate toward the storage plate; The case is provided with a connecting section that connects the storage section and the lid section and switches the connection position to switch between a transport state in which the loading / unloading control section blocks at least a portion of the loading / unloading opening and a loading / unloading state in which the loading / unloading control section does not block the loading / unloading opening.

2. The case according to claim 1 , wherein the storage section further comprises a stacking connecting section that connects the storage section to another storage section so that the storage section can be stacked.

3. 3. The case according to claim 1, further comprising a height adjustment section for adjusting the height of the loading / unloading opening from the cover plate between the transport state and the loading / unloading state.

4. A method for treating an object using the case according to claim 1, comprising: a accommodating step of placing the case in the carry-in / out state and accommodating the object to be processed in the accommodating section; a transport step of transporting the case in the transport state to a processing device; an installation step of installing the case in the loading / unloading state in the processing device; a processing step of processing the object with the processing device.

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