Adjustment unit for an X-ray optical element of an X-ray fluorescence system, and X-ray fluorescence system

Abstract

The invention relates to an adjustment device (31) for an X-ray optical element (19) of an X-ray fluorescence analyzer (11), and to an X-ray fluorescence analyzer (11), comprising an X-ray source (12) for generating X-ray radiation (18) which is focused by the X-ray optical element (19) onto a measurement object (21), and a detector (27) capable of detecting X-ray fluorescence radiation (26) reflected by the measurement object (21), the mounting frame (35) being arranged in a first position relative to the mounting frame (35). A first frame (36) is accommodated which can be displaced in one direction, and a second frame (37) is guided by the first frame (36) so as to be displaceable in a second direction, the first and second directions of the displacement motion of the frames (36, 37) being different from each other, a through opening (44) is provided which extends through the mounting frame (35), the first frame (36) and the second frame (37), and an X-ray optical element (19) can be positioned in the passage opening (44).

Description

[Technical field]

[0001] The present invention relates to an adjustment unit for X-ray optical elements of an X-ray fluorescence spectrometer, and to an X-ray fluorescence spectrometer. [Background technology]

[0002] DE 102013112736 A1 discloses a method and a device for inspecting a sample with radiation emitted by an X-ray radiation source, which radiation is directed via at least one beam shaping unit to a sample supported by a sample holder, detected by a detector and evaluated in an evaluation unit. Before starting the inspection of the sample, the radiation source and / or the beam shaping unit and / or the sample holder and / or the detector can be aligned or adjusted with respect to a predefined fixed point and / or beam path using a control unit via actuators.

[0003] DE 19710420 A1 discloses a method of a device for measuring the thickness of thin layers by means of X-ray fluorescence. This device for measuring layer thicknesses by means of X-ray fluorescence comprises an X-ray tube and a detector with a focusing element and an observation device, whereby the focusing element is mounted movably along its optical axis and is provided with a position measuring device, thereby avoiding movements of the stage supporting the workpiece, so that the workpiece surface remains stationary at a predefined measuring distance.

[0004] US 2015 / 0362639 discloses an X-ray fluorescence analyzer with an X-ray tube, an X-ray detector, and a camera for generating an optical image of an illuminated measurement point on a sample. An optical mirror is provided in the beam path, the optical mirror having a window through which the X-rays pass and covered with a film formed from a mirror layer.

[0005] From EP 1 100 092 an X-ray fluorescence analyzer is known which comprises an X-ray source for generating X-rays. This X-ray radiation is focused on the measurement object via an X-ray optical device. A second radiation emitted by the object to be measured is detected by a detector of the X-ray fluorescence analyzer and evaluated in a data processing device. It is also known to use two conically aligned reflecting surfaces and a collimator at the exit end of the reflecting surfaces to focus the X-rays onto a small focal point or measuring point in order to illuminate the object to be measured with high intensity. [Prior art documents] [Patent documents]

[0006] [Patent Document 1] DE 102013112736 [Patent Document 2] DE 19710420 A1 [Patent Document 3] US Patent Application Publication No. 2015 / 0362639 [Patent Document 4] European Patent No. 1100092 Summary of the Invention [Problem to be solved by the invention]

[0007] The object of the invention is to propose an adjustment device for the X-ray optics of an X-ray fluorescence spectrometer, and an X-ray fluorescence spectrometer, in order to allow a simple adjustment of the X-ray optical arrangement to the X-ray source. [Means for solving the problem]

[0008] This object is solved by an adjustment device for an X-ray optical device of an X-ray fluorescence analyzer, which comprises a mounting frame accommodating a first frame which is displaceable in a first direction relative to the mounting frame and a second frame which is guided in the first frame so as to be displaceable in a second direction, the first and second directions of the displacement movement of the frames being different from each other, and which is provided with a through opening, in particular a central through opening, extending through the mounting frame, the first frame and the second frame, in which the X-ray optical device can be positioned.

[0009] This adjustment device provides the advantage that the X-ray optical device for focusing the X-rays can be easily aligned and adjusted relative to the X-ray source. This allows the optical axis of the X-ray optical device to be aligned with the X-rays emitted by the X-ray source. This adjustment is performed in particular for commissioning the X-ray fluorescence analyzer. For example, due to thermal generation of the X-ray source during operation, the X-rays may drift relative to the beam axis of the X-ray optical device. This adjustment device allows for simple readjustment and accurate alignment of the X-ray optical device relative to the X-rays, for example during operation and / or after a predefined operating time. The adjustment allows for high-intensity X-ray radiation to be focused at a measurement point on the measurement surface, thereby allowing an increase in the count rate of the X-ray fluorescence radiation on the detector of the X-ray fluorescence analyzer. The increase in the count rate may allow an improved evaluation of the emitted second radiation and thus an improved evaluation of the measurement result. Thus, for example, the measurement of the layer thickness of the measurement object and / or the material analysis of the layers on the measurement object can be improved.

[0010] The X-ray optical device arranged in the through opening can be preferably displaced by the first frame and / or the second frame in a plane perpendicular to the beam axis of the X-rays, which allows a simple adjustment. Advantageously, the extension planes of the first frame and the second frame are aligned parallel to each other.

[0011] The X-ray optical device has its beam axis preferably aligned with the Z-axis and can be displaced in the X-direction and / or the Y-direction by the first frame and / or the second frame of the adjustment device, thereby allowing the focal point of the X-ray optical device to be easily aligned with the beam axis of the X-rays.

[0012] A first linear guide is provided between the mounting frame and the first frame, and a second linear guide is provided between the first frame and the second frame, each of the first frame and the second frame being adjustable using an actuator, thereby allowing simple adjustment of the X-ray optics relative to the X-ray beam axis.

[0013] The first actuator for the displacement movement of the first frame relative to the mounting frame and the second actuator for the displacement movement of the first frame relative to the second frame are aligned with a common operating side, as a result of which accessibility to the adjustment devices of the X-ray fluorescence analyzer from only one side is sufficient to adjust the displacement movements of the frames which differ from each other by 90° in particular.

[0014] Preferably, the first actuator comprises an adjustment screw, which is spring preloaded to a first flange fixed to the mounting frame, which makes it possible to eliminate any play or hysteresis of the screw drive during successive adjustment movements of the adjustment screw by turning the screw clockwise and counterclockwise, thus ensuring simple adjustment and improved accuracy.

[0015] Additionally, a friction element is preferably provided between the adjustment screw of the first actuator and the flange, which facilitates preventing the adjustment screw from independently changing its set position.

[0016] The second actuator of the adjustment device preferably comprises an adjustment screw and an adjustment member, by means of which a 90° deflection of the adjustment movement of the adjustment screw for the displacement movement of the first frame relative to the second frame can be controlled. Advantageously, the actuator is spring preloaded to the first frame on a second flange fixed to the second frame. Fixing the actuator to the first frame by preloading it further allows a backlash-free arrangement to be generated.

[0017] Furthermore, the second actuator preferably has a clamping device for fixing the set position of the adjusting screw, which can be fixed by slightly pulling the clamping device with a clamping element after the first frame is aligned with the second frame, thereby creating friction between the adjusting screw and the second flange of the second adjusting screw.

[0018] The linear guides of the adjustment device are advantageously designed as ball guides. Such ball guides offer the advantage that when controlling the displacement movements they can be controlled with low forces. Alternatively, the linear guides can also be designed as sliding guides or a combination of rolling and sliding guides.

[0019] The linear guide provided on the adjustment device preferably comprises two guide rods aligned in pairs at a fixed distance from each other, between which the bearing rollers are arranged so as to be guided by a linear cage. The bearing rollers are guided between the guide rods, which are preferably aligned parallel to each other, and are displaceable along the guide rods.

[0020] The guide rods are arranged in pairs and are advantageously inserted respectively into recesses in the frame, the recesses having a width equal to or greater than the thickness of the two guide rods. A preloaded guiding can be realised by means of bearing rollers and a pressure pin arranged between the guide rods, which pressures at least one side of the pair of guide rods via a pressure element.

[0021] Preferably, the guide rod is secured in the recess by a transverse pin, aligned perpendicular to the longitudinal axis of the guide rod, which makes it easy to install and secure the guide rod.

[0022] Furthermore, it is advantageously provided that at least one pressure pin is aligned with one recess of each frame in order to adjust the bearing play of the linear guide. For example, the pressure pin can be aligned with an intermediate space between the guide rods arranged in pairs in the recesses and at least partially engage in the intermediate space between the guide rods arranged in pairs in order to adjust the distance between the guide rods in the recesses. Alternatively, it can be provided that a pressure element is assigned to the pair of guide rods and that at least one pressure pin acts on the pressure element and also on the guide rods assigned in pairs to each other. Both alternatives are used to adjust the bearing play of the linear guide.

[0023] To align and mount the adjustment device in the X-ray fluorescence spectrometer, the mounting flange preferably has a connection surface with at least one stop surface for aligning it, which allows simple positioning and mounting, in particular for alignment perpendicular to the X-ray beam axis.

[0024] Furthermore, it is preferred to detachably fasten the X-ray optical device in the through opening of the second frame using a holder or a mounting aid, the X-ray optical device being displaceable in the through opening of the first frame and the mounting frame in the X-direction and / or the Y-direction.

[0025] According to a preferred further development of the adjustment device, a third frame is provided on a second frame opposite the first frame and the X-ray optical device can be arranged on the third frame, whereby a third actuator is provided between the second frame and the third frame, which can result in the distance between the second frame and the third frame being adjustable. This means that the X-ray optical device can also be adjusted along the X-ray beam axis, i.e. preferably along the Z-axis. This allows alignment with respect to the anode, in particular with respect to the origin of the X-ray beam at the anode.

[0026] The X-ray optical device can be designed as a monocapillary or a polycapillary, whereby, in particular, a polycapillary is provided such that the focal spot can have a diameter of 30 μm to 600 μm or 10 μm to 100 μm, or in particular less than 200 μm, such as 1 to 5 μm.

[0027] The object of the present invention is further solved by an X-ray fluorescence spectrometer, which is provided with an adjustment device according to one of the above-described embodiments, by means of which the X-ray optical arrangement can be aligned with the X-ray source.

[0028] The invention, as well as other and further embodiments of the invention, are described and explained in more detail below with reference to examples shown in the drawings. According to the invention, the features taken from the description and the drawings can be used individually or in any combination. [Brief description of the drawings]

[0029] [Figure 1] FIG. 1 is a schematic simplified cross-sectional view of an X-ray fluorescence spectrometer. [Diagram 2] FIG. 2 is a perspective view of an adjustment device. [Diagram 3] FIG. 3 is an exploded perspective view of the components of the adjustment device shown in FIG. 2. [Figure 4] FIG. 4 is a schematic cross-sectional view taken along line IV-IV in FIG. [Diagram 5] FIG. 3 is a schematic cross-sectional view taken along line VV in FIG. [Figure 6] FIG. 3 is a schematic cross-sectional view taken along line VI-VI in FIG. 2. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0030] 1 is a simplified diagram of an X-ray fluorescence spectrometer 11. This X-ray fluorescence spectrometer 11 comprises an X-ray source 12, for example designed as an X-ray tube 14. This X-ray tube 14 comprises a glow cathode 16, from which electrons are emitted and accelerated by an applied accelerating voltage U B The electron beam is accelerated by the anode 17 towards the anode 17, where it is decelerated and X-rays 18 are generated. The wavelength range of the X-rays 18 is typically determined by the acceleration voltage U B The anode material can be, for example, tungsten or molybdenum.

[0031] The X-rays 18 are focused by an X-ray optics device 19 and directed onto a measurement object 21. The measurement object 21 may, for example, have a coating 22 or a layer system. X-ray fluorescence radiation 26 is generated at or at a measurement spot 24 on the measurement object 21, and the X-ray radiation 18 strikes the measurement object 21 and is detected by a detector 27, for example a semiconductor detector. By evaluating the detected energy spectrum, for example the material composition of the coating 22 or of the measurement object 21 and / or the layer thickness of the at least one coating 22 can be determined.

[0032] Furthermore, the X-ray fluorescence spectrometer 11 may comprise an optical device 29. This optical device 29 may be provided for monitoring and positioning the measurement object 21 with respect to the measurement position. This may also include video observation. An adjustment device 31 may be provided for positioning and holding the X-ray optical arrangement 19 in the X-ray fluorescence spectrometer 11. This adjustment device 31 may be removably attached to a further component 32 of the X-ray fluorescence spectrometer 11. In an example embodiment, the component 32 may be a so-called shutter. A safety device 33 for the X-ray optical arrangement 19 is preferably provided below the adjustment device 31. In an example embodiment, the X-ray optical arrangement 19 is designed as a polycapillary. The X-ray optical arrangement 19 is aligned with the beam axis of the X-rays 18. Preferably, the beam axis of the X-rays 18 lies in the Z-axis. The adjustment device 31 allows the X-ray optical arrangement 19 to be moved in a plane perpendicular to the beam axis of the X-rays 18, i.e. the Z-axis. In particular, the adjustment device 31 is adjustable in the XY plane so that the beam axis of the X-ray optical arrangement 19 can be aligned with the beam axis of the X-rays 18, in particular so that they are inside each other.

[0033] 2 shows a perspective view of the adjustment device 31. The adjustment device 31 comprises a mounting frame 35. The adjustment device 31 can be attached to another component 32 by means of the mounting frame 35. A first frame 36 is accommodated in the mounting frame 35 so as to be displaceable in one direction. A second frame 37 is provided on the first frame 36, is opposite the mounting frame 35 and is arranged on the first frame 36 so as to be displaceable in a different direction than the first frame 36.

[0034] A first actuator 38 is provided for controlling the displacement movement of the first frame 36 relative to the mounting frame 35. A second actuator 39 is provided for controlling the displacement movement of the first frame 36 relative to the second frame 37. By aligning the first actuator and the second actuator 38, 39 on the same operating side, both actuators 38, 39 are easily accessible when the adjustment device 31 is installed.

[0035] A connection surface 41 is provided on the mounting frame 35 so that the adjustment device 31 is aligned and parallel to the stage axis of the diagrammatically shown measuring stage 25, on which the measurement object 21 can be positioned. This connection surface 41 has several stop surfaces 42, which allow the adjustment device 31 to be rotated in increments of 90° and to set the adjustment of the adjustment device 31 from all sides.

[0036] The adjustment device 31 has a through opening 44, which is preferably provided in the center of the adjustment device 31. The through opening 44 extends through the mounting frame 35, the first frame 36 and the second frame 37. The X-ray optical device 18 is removably held on the second frame 37 by means of a mounting aid 46 (FIG. 1).

[0037] Figure 3 is a schematic exploded view of the components of the adjustment device 31 as shown in Figure 2. The first frame 36 is guided in the mounting frame 35 by means of linear guides 48. A second linear guide 49 is provided between the first frame 36 and the second frame 37 with a 90° offset. These linear guides 48, 49 are preferably designed as ball guides.

[0038] The first linear guide 48 and the second linear guide 49 are preferably of the same design. The linear guide 48, 49 comprises two guide rods 51 between which bearing rollers 52 are provided, guided by a linear cage 53. A first pair of guide rods 51 is provided, for example, in a recess 54 in the first frame 36. A second pair of guide rods 51 is provided in an opposite recess 54 in the mounting frame 35. For ease of manufacture, the recesses 54 extend completely along the entire length of the mounting frame 35 or the first frame 36. To fix the guide rods 51 in the recesses 54, a transverse pin 56 is provided which is inserted into the recesses 54 transversely to the longitudinal direction of the recesses 54, fixing the guide rods between them.

[0039] To adjust the bearing clearance of the linear guides 48, 49, pressure pins 58 are provided. These pressure pins 58 can, for example, be inserted in the mounting frame 35 and actuated from the outside, so that the distance between the guide rod 51 in the recess 54 of the mounting frame 35 and the guide rod 51 in the recess 54 of the first frame 36 can be adjusted. Furthermore, it can be provided that preferably a pressure element 59 or pressure rod is provided in one of the two recesses 54 between the pressure pin 58 and the guide rod 51 which are aligned in pairs relative to each other in order to allow a uniform pressure distribution and clearance adjustment.

[0040] The linear guides 48, 49 described above are provided in a double manner between the mounting frame 35 and the first frame 36, advantageously between the first frame 36 and the second frame 37.

[0041] The first actuator 38 includes a first flange 62 and is secured to an end face of the mounting frame 35. The first flange 62 receives a set screw 63 that engages threads on the first frame 36. A compression spring 64 (FIG. 6) around the adjustment screw 63 is provided between the first frame 36 and the first flange 62 to reduce or eliminate hysteresis when controlling the travel motion.

[0042] The second actuator 39 of the adjusting device 31 is offset by 90° with respect to the first actuator 38. This second actuator 39 comprises a second flange 66 which is attached to the second frame 37. Furthermore, an adjusting member 67 is attached to the second frame 37 on which an adjusting screw 68 (FIG. 6) acts. The adjusting screw 68 has a conical tip which abuts and engages against an inclined surface 69 of the adjusting member 67. The inclined surface 69 and the conical tip are aligned at an angle of 45° with respect to the longitudinal axis of the adjusting screw 68 or with respect to the displacement direction of the first frame 36 with respect to the second frame 37.

[0043] The clamping device 72 is provided on the second flange 66 and can be actuated by a clamping element 73, specifically a clamping screw. The adjusting screw 68 engages with a thread on a bent clamping tab 74 arranged on the second flange 66 and on the second flange 66. By actuating the clamping element 73, a preload can be accumulated on the adjusting screw 68 via the bent clamping tab 74. This results in an increase in friction between the adjusting screw 68 and the thread of the second flange 66. The second actuator 39 can be fixed in a set position by friction.

[0044] Figure 4 shows a schematic cross-sectional view along the line IV-IV in Figure 2. From this cross-sectional view it can be seen that the displacement movement of the first frame 36 in the Y direction can be controlled by the adjustment movement of the adjustment screw 63 of the first actuator 38.

[0045] At the same time, the cross-sectional view according to FIG. 4 shows the arrangement of two linear guides 49 aligned parallel to one another for the displaceable mounting of the first frame 36 on the second frame 37 .

[0046] Figure 5 shows a schematic cross-sectional view taken along line VV in Figure 2. From this cross-sectional view it can be seen that the first frame 36 is slidably received relative to the mounting frame 35 by two parallel linear guides 48.

[0047] Figure 6 shows a schematic cross-section along the line VI-VI shown in figure 2. The adjusting screw 63 of the first actuator 38 can preferably be designed with a friction element 75. As a result, the adjusting position of the adjusting screw 63 can be fixed, in particular by interaction with the compression spring 64. The friction element 75 can be an O-ring.

[0048] The cross-sectional view of the second actuator 39 shows a 90° deflection of the feed-in movement of the adjustment screw 68 onto the actuator 67. Preferably, the second frame 37 and the actuator 67 are arranged together under preload by a compression spring 64.

[0049] During operation of the X-ray source 12, heating of the X-ray source 12 may lead to inaccuracies due to thermal expansion of the components of the X-ray fluorescence spectrometer 11. Using the adjustment device 31, the X-ray optical arrangement 19 positioned in the through opening 44 perpendicular to the beam axis of the X-rays 18 in the X / Y direction can be moved, thereby making it possible to adjust the beam axis of the X-ray optical arrangement 19 relative to the beam axis of the X-ray source 12. This leads to an increase in the intensity of the X-rays 18 at the measurement spot 24 and an improved evaluation of the measured values.

Claims

1. An adjustment device for an X-ray optical arrangement (19) of an X-ray fluorescence analyzer (11), the X-ray fluorescence analyzer (11) comprising an X-ray source (12) for generating X-ray radiation (18) which is focused by the X-ray optical arrangement (19) onto a measurement object (21) and a detector (27) capable of detecting X-ray fluorescence radiation reflected by the measurement object, a mounting frame (35) is provided to accommodate a first frame (36) displaceable in a first direction relative to said mounting frame (35) and to accompany a second frame (37) guided by said first frame (36) so as to be displaceable in a second direction, said first direction and said second direction of displacement movement of said frames (36, 37) being different from each other; A through opening (44) is provided to extend through the mounting frame (35), the first frame (36), and the second frame (37); 13. An adjustment device, characterized in that the X-ray optical device (19) is positionable in the through opening (44).

2. 2. The adjustment device according to claim 1, characterized in that the X-ray optical device (19) arranged in the through-opening (44) is displaceable by the frame (36, 37) in a plane perpendicular to a beam axis of the X-ray optical device (19) arranged in the through-opening (44).

3. 3. The adjustment device according to claim 2, characterized in that the X-ray optical arrangement (19) is displaceable in the X-direction and / or in the Y-direction by the first frame (36) and / or the second frame (37), and the beam axis of the X-ray optical arrangement (19) preferably lies in the Z-axis.

4. 4. The adjusting device according to claim 1, wherein a first linear guide (48) is provided between the mounting frame (35) and the first frame (36) and a second linear guide (49) is provided between the first frame (36) and the second frame (37), the first frame (36) and the second frame (37) being adjustable by actuators (38, 39), respectively.

5. 5. An adjusting device according to claim 4, characterized in that the first actuator (38) for controlling the displacement movement of the first frame (36) relative to the mounting frame (35) and the second actuator (39) for controlling the displacement movement of the first frame (36) relative to the second frame (37) are aligned with a common operating side.

6. 6. An adjusting device according to claim 4 or 5, characterized in that the first actuator (38) comprises an adjustment screw (63), the adjustment screw (63) being preloaded by a compression spring (64) between the first frame (36) and a first flange (62) fixed to the mounting frame (35).

7. 7. Adjusting device according to claim 6, characterized in that a friction element (75) is provided between the adjusting screw (63) and the flange (62).

8. 5. An adjusting device according to claim 4, characterized in that the second actuator (39) comprises an adjusting screw (68) and an adjusting member (67) by means of which a 90° deflection of the adjusting movement of the adjusting screw (68) is controllable, and the adjusting member (67) is arranged to be preloaded against the first frame (36) by a compression spring (64) and is fastenable to the second frame (37).

9. 9. An adjusting device according to claim 8, characterized in that the second flange (66) fastened to the second frame (37) has a clamping device (72) for fixing it in the position of the adjusting screw (67) of the second actuator (39), in particular by friction.

10. 5. Adjusting device according to claim 4, characterized in that the linear guides (48, 49) are designed as ball guides or sliding guides.

11. 5. An adjusting device according to claim 4, characterized in that the linear guides (48, 49) are paired and aligned at a constant distance from each other and comprise two guide rods (51) between which bearing rollers (52) are provided which are guided by a cage (53) of linear design.

12. 12. The adjusting device according to claim 11, characterized in that the paired guide rods (51) are provided in recesses (54) in the mounting frame (35) and / or the first frame (36) and / or the second frame (37), and the height of the recesses (54) is equal to or greater than the thickness of the two guide rods (51) arranged one above the other.

13. 13. An adjusting device according to claim 11 or 12, characterized in that the guide rod (51) is fixed in the recess (54) by means of a transverse pin (56) aligned perpendicularly to the longitudinal axis of the guide rod (51).

14. Adjusting device according to any one of claims 11 to 13, characterized in that at least one pressure pin (58) engages in the recess (54) and is aligned with an intermediate space between the guide rods (51) assigned to one another in a pair, or that the at least one pressure pin (58) engages on a pressure element (59) and bears against the guide rods (51) aligned in a pair, and the bearing play of the linear guides (48, 49) is adjustable by means of the at least one pressure pin (58).

15. An adjustment device according to any one of claims 1 to 14, characterized in that a connection surface (41) with at least one stop surface (42) for alignment with an operating side of the X-ray fluorescence analysis device (11) is provided on the mounting frame (35).

16. 16. The adjustment device according to claim 1, wherein the X-ray optical arrangement (19) is detachably fastened in the through-opening (44) of the second frame (37) by means of mounting aids (46) and is displaceable in the X-direction and / or Y-direction in the through-openings (44) of the first frame (36) and the mounting frame (35).

17. The adjustment device according to any one of claims 1 to 15, characterized in that a third frame is provided on the second frame (37) opposite the first frame (36), and a third actuator is provided for actuating the third frame, by means of which the distance between the second frame (37) and the third frame is adjustable, in particular the distance of the X-ray optical arrangement (19), which can be fastened to the third frame, is adjustable relative to the X-ray source (12), preferably along a beam axis of the X-rays (18).

18. Adjusting device according to any one of the preceding claims, characterized in that the X-ray optical arrangement (19) is designed as a monocapillary or polycapillary.

19. 19. An X-ray fluorescence spectrometer with an X-ray source (12) for generating X-ray radiation (18) and an X-ray optical device (19) for focusing said X-ray radiation (18) on a measurement object (21), characterized in that the X-ray optical device (19) is aligned with respect to the X-ray source (12) by means of an adjustment device (31) according to any one of claims 1 to 18, the X-ray fluorescence spectrometer having a detector (27) for detecting X-ray fluorescence radiation reflected by the measurement object (21) and a data processing device for detecting and evaluating said X-ray fluorescence radiation (26).

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