Petal

Abstract

A valve (1), in particular a vacuum valve, for metering a volumetric flow through a flow opening (2), having a valve disk (3) which closes the flow opening (2) in the closed position of the valve (1) and at least two valve rods (4, 5) each extending in the longitudinal direction, these valve rods (4, 5) being attached at spaced-apart locations on the valve disk (3), at least one of the valve rods (4, 5) being linearly movable and driven by a valve drive device (6, 7) of the valve (1) so as to displace the valve disk (3) between the closed position and the maximum open position, the valve rods (4, 5) being formed with different rigidities with respect to deflection in a direction transverse to their respective longitudinal extension directions, the valve (1).

Description

Technical Field

[0001] The present invention relates to a valve for metering a volumetric flow through a flow opening, in particular a vacuum valve, having a valve disk that closes the flow opening in the closed position of the valve and at least two valve rods each extending in the longitudinal direction, these valve rods being attached to spaced-apart locations on the valve disk, and at least one of the valve rods being linearly movable and driven by a valve drive of the valve so as to displace the valve disk between the closed position and the maximum open position.

[0002] Valves of this type are used, in particular in vacuum technology, to meter the volumetric flow of a fluid, in particular a gas, through a flow opening, i.e., the inflow or outflow. In many cases, the flow opening is a flow opening for the inflow of fluid into the process chamber or for the outflow of fluid from the process chamber. With such a valve, the volumetric flow through the flow opening can be well metered. Valves of this type are shown, for example, in FIGS. 5a and 5b of U.S. Patent No. 10,156,299.

[0003] Typically, valves of this type are assembled such that the valve disk is located within the process chamber and the valve drive is located outside the process chamber. In many cases, a temperature difference occurs between the region inside the process chamber and the region outside the process chamber, so it is necessary to compensate for the thermal deformation caused by this temperature difference, in particular without generating particles thereby, or to avoid particle generation as much as possible in this case.

[0004] The object of the present invention is to provide a solution for this purpose.

[0005] This is achieved by the valve according to claim 1.

[0006] Accordingly, according to the present invention, it has been identified that the valve rods are formed with different rigidities with respect to deflection in a direction transverse to their respective longitudinal extension directions.

[0007] By the present invention, a valve rod having a relatively low rigidity with respect to deflection in a direction transverse to the longitudinal extension direction is deflected sufficiently more than a valve rod having a relatively high rigidity with respect to deflection in a direction transverse to the longitudinal extension direction, thereby compensating for the linear expansion of the valve plate due to temperature. As a result, the difference in linear expansion caused by temperature inside and outside the process chamber can be compensated without generating particles thereby.

[0008] Advantageously, it has been identified that the valve rods are driven to be linearly movable exclusively by their respective valve drive devices.

[0009] The valve rods may basically be made of various different materials. Also, it may be identified that one of the plurality of valve rods is made of a first material and one or more other valve rods are made of another material. However, a preferred variant of the present invention specifies that the valve rods are each formed of the same material, preferably steel. Preferably, the valve rods are made of steel, particularly special steel.

[0010] That is, the different rigidities of the valve rods can be achieved by using various different materials. However, preferably, it has been identified that the valve rods each have at least partially different diameters.

[0011] Regardless of how this is achieved, in any case, in a preferred configuration of the present invention, a valve rod having a relatively high rigidity with respect to deflection in a direction transverse to the longitudinal extension direction has a resistance moment that is at least five times greater than that of another valve rod, or in other words, greater than that of a valve rod having a relatively low rigidity with respect to deflection in a direction transverse to the longitudinal extension direction.

[0012] In this case, the resistance moment is a measure representing how much mechanical resistance each valve rod can withstand during loading. In this example where the valve rod bends in a direction transverse to its respective longitudinal extension direction, an axial resistance moment or a bending resistance moment may be mentioned with respect to the resistance moment.

[0013] When implementing the present invention, as the valve drive device, basically any known linear valve drive device is possible. That is, the valve drive device may be a hydraulic type, a pneumatic type, or an electric valve drive device. In a preferred variant, it is specified that each valve rod is driven by a specific valve drive device of the valve. In this case, it is also advantageous if the valve drive devices of the valve rods are synchronized with each other. The synchronization may be achieved by an electronic or control-technical connection between the valve drive devices. However, in the case of a pneumatic and / or hydraulic valve drive device, this may also be achieved by corresponding hydraulic or pneumatic connection pipelines.

[0014] In a group of implementation forms of the present invention, it may be specified that each of the valve rods is driven by its respective valve drive device to be linearly movable throughout the displacement stroke of the valve disk between the closed position and the maximum open position. In these variants, in other words, both a valve rod with relatively high rigidity with respect to bending in a direction transverse to the longitudinal extension direction and a valve rod with relatively low rigidity with respect to bending in a direction transverse to the longitudinal extension direction are driven throughout the opening and closing stroke of the valve disk.

[0015] However, differently, it is also possible that only a valve rod with relatively high rigidity with respect to bending in a direction transverse to the longitudinal extension direction is driven by its valve drive device to be linearly movable throughout the displacement stroke of the valve disk between the closed position and the maximum open position.

[0016] In this case, in these variants, advantageously, a valve rod that is relatively low in rigidity with respect to deflection in a direction transverse to the longitudinal extension direction is driven by the valve drive device to be linearly movable only in a partial section of the displacement stroke of the valve disk in a direction toward the closed position and in a direction away from the closed position. This can be realized, for example, by the valve rod that is relatively low in rigidity with respect to deflection in a direction transverse to the longitudinal extension direction being disconnected from the valve drive device in a partial section of the displacement stroke of the valve disk in a direction toward the maximum open position and in a direction away from the maximum open position. That is, in such a configuration of the present invention, the linear drive device for the relatively low-rigidity valve rod is effective only for pressing the valve disk against the valve seat and / or lifting the valve disk from the valve seat. The remaining movement of the valve disk is realized exclusively via the valve drive device of the relatively high-rigidity valve rod.

[0017] In terms of language, when simplified, a valve rod that is relatively high in rigidity with respect to deflection in a direction transverse to the longitudinal extension direction may be simply abbreviated as a relatively high-rigidity valve rod in this specification. Also, in terms of language, when simplified, a valve rod that is relatively low in rigidity with respect to deflection in a direction transverse to the longitudinal extension direction may be simply abbreviated as a relatively low-rigidity valve rod in this specification.

[0018] The flow-through opening is advantageously surrounded by a valve seat, against which the valve disk is pressed when the valve disk closes the flow-through opening in its closed position. The valve seat may be part of the valve or may also be part of a valve seat plate that is also part of the valve. However, the valve seat may also be formed directly on the chamber wall of the process chamber.

[0019] Further features and details of preferred configurations are exemplified in the description of the drawings below.

Brief Description of the Drawings

[0020]

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[0021] The valve 1 according to the present invention is also preferably a so-called vacuum valve in the embodiments shown below. Vacuum valves are usually used when working in a special atmosphere and / or at a special pressure level. Vacuum valves are particularly mentioned when working with a pressure difference of 0.001 mbar (millibar) or less than 0.1 Pascal. However, vacuum valves may also be mentioned when already defined for a pressure difference less than atmospheric pressure, i.e., less than 1 bar. All valves 1 shown in the embodiments below may be used as vacuum valves.

[0022] In FIG. 1, the valve 1 of the first embodiment is shown in a perspective view separately from the process chamber 22. In this case, the valve disk 3 is in the maximum open position. Two valve rods 4, 5 are attached to the valve disk 3. For each of these valve rods 4, 5, a respective valve drive device 6, 7 is provided. By means of this valve drive device 6, 7, the valve rods 4, 5 and thus also the valve disk 3 can be linearly moved in the longitudinal direction of the valve rods 4, 5. In this way, in order to close the flow opening 2, the valve disk 3 can be brought into the closed position, and also into the maximum open position and into the intermediate positions arranged between them equally well, whereby the volumetric flow of the fluid flowing through the flow opening 2, whether it is a gas or a liquid, can be metered. The flow opening 2 is formed in the first embodiment both in the valve seat plate 15 and in the corresponding process chamber 22 as shown in FIGS. 3, 4 and 5. In the illustrated first embodiment, the valve seat 14 against which the valve disk 3 is pressed in the closed position is located on the valve seat plate 15. That is, in the first embodiment, the valve seat 14 and the valve seat plate 15 form part of the valve 1. However, it may also be well specified to omit the valve seat plate 15. In this case, the valve seat 14 may be formed directly in the chamber wall of the process chamber 22 surrounding the flow opening 2. In the illustrated embodiment, a seal 13 for sealing the flow opening 2 in the closed position of the valve disk 3 is located on the valve disk 3. However, of course, the corresponding seal 13 may be realized at the valve seat 14 or may be realized at the valve disk 3 and the valve seat 14.

[0023] According to the present invention, it has been specified that the valve rods 4, 5 are formed with different rigidities with respect to deflection in a direction transverse to their respective longitudinal extension directions. In this case, in the first embodiment, preferably, it has been specified that the valve rods 4, 5 are formed of the same material as each other, preferably steel or special steel. In order to form the valve rods 4, 5 with different rigidities with respect to deflection in a direction transverse to their respective longitudinal extension directions, in the first embodiment, it has been specified that the valve rods 4, 5 have at least partially different diameters 8, 9. In this case, as already explained at the beginning, it is advantageous that the valve rod 4, which has relatively high rigidity with respect to deflection in a direction transverse to the longitudinal extension direction, has a resistance moment at least five times greater than that of the other valve rod 5. Each of the valve rods 4, 5 is driven by a respective valve drive device 6; 7 of the valve 1. In the first embodiment, the valve drive devices 6, 7 for both valve rods 4, 5 are formed identically to each other. This valve drive device 6, 7 is a spindle drive device known per se. Specifically, this means that in the first embodiment, each of the valve rods 4, 5 is attached to the carriage 20 at the end opposite to the valve disk 3, and in this case, the carriage 20 is realized so as to be linearly movably supported on the respective guide rails 19. Each of the valve drive devices 6, 7 has a respective motor, an electric motor 16 in the first embodiment. Each of the electric motors 16 drives the spindle 18 via a respective drive belt 17, as is known per se. One spindle nut 21 engaged with the male thread of the spindle 18 is located on the carriage 20, respectively. Therefore, by each motor 16, each of the valve drive devices 6; 7 can move each of the valve rods 4, 5 along the respective guide rails 19 in a direction parallel to their longitudinal extension directions. The rod seal 23 surrounding each of the valve rods 4, 5 serves to seal the chamber inner chamber 25. The corresponding rod seal 23 and spindle drive device are known per se and do not need to be further explained.

[0024] Of course, the valve drive devices 6, 7 in the form implemented in the first embodiment may be replaced by another suitable electric, pneumatic or hydraulic linear drive device. In any case, it is specified that the valve drive devices 6, 7 of the valve rods are advantageously synchronized with each other. In the first embodiment shown in FIG. 1, this may be achieved, for example, by corresponding electrical control of the motor 16, which is not explicitly shown in FIG. 1. In the case of a pneumatic or hydraulic drive device, this may be achieved by a corresponding pressure supply.

[0025] In any case, the first embodiment is a variant in which each of the valve rods 4, 5 is linearly movable over the entire displacement stroke 10 of the valve disk 3 between the closed position and the maximum open position by its respective valve drive device 6; 7.

[0026] FIG. 2 shows a plan view of the process chamber 22 schematically shown for the first embodiment. On the lower surface of the process chamber 22, the valve 1 shown in FIG. 1, which cannot be correspondingly recognized in FIG. 2, is arranged. Only the cutting lines AA, BB, and CC are marked in the plan view shown in FIG. 2. FIGS. 3 to 5 show cross-sectional views along the cutting line AA. In this case, the valve disk 3 of the valve 1 is in the closed position in FIG. 3, in the intermediate position in FIG. 4, and in the fully open position in FIG. 5. FIGS. 6 to 8 show cross-sectional views along the cutting line BB. In this case, the valve disk 3 is also in the closed position in FIG. 6, in the intermediate position in FIG. 7, and in the fully open position in FIG. 8. FIGS. 9 to 11 show cross-sectional views along the cutting line CC. The valve disk 3 is also in the closed position in FIG. 9, in the intermediate position in FIG. 10, and in the fully open position in FIG. 11. As can be well recognized in FIGS. 3 to 5, the diameter 8 of the relatively high-rigidity valve rod 4 is sufficiently larger than the diameter 9 of the relatively low-rigidity valve rod 5. Further, as can be well recognized, the drive device housings 26 of the valve drive devices 6 and 7 are located outside the inner chamber 25 of the chamber of the process chamber 22, while the valve disk 3 is always arranged in the inner chamber 25 at all its positions. Usually, a different temperature level exists in this inner chamber 25 than outside the process chamber 22. While the valve disk 3 has the temperature of the inner chamber 25, the valve drive devices 6 and 7 substantially have the temperature outside the process chamber 22. When the temperatures in the inner chamber 25 and the process chamber 22 change relative to each other, length changes due to heat occur in both the valve disk 3 and the valve drive devices 6 and 7. According to the present invention, the different linear expansions due to temperature are compensated by the relatively low-rigidity valve rod 5 being correspondingly deflected to some extent, preferably elastically, in a direction transverse to its longitudinal extension direction. Thereby, the different expansions due to temperature can be compensated extremely well without generating particles. The feed-through 38 passing through the wall of the process chamber 22 and, optionally, the valve seat plate 15 that may exist is advantageously formed to such a size that there is correspondingly a lot of space for the deflection of the valve rod 5.The rod seal 23 can easily compensate for the deflection of the valve rod 5 caused by heat.

[0027] In FIGS. 3 to 11, an introduction opening 24 is also provided through which the object to be processed can be introduced into the inner chamber 25 of the chamber and can be taken out from the process chamber 22. This introduction opening 24 may be closed by a valve (not shown) known per se. The valve 1 for closing the flow-through opening 2 is used, as described above, to measure the volumetric flow of a gaseous or liquid fluid flowing into or out of the inner chamber 25 of the chamber. The pumps and the like required for this purpose are not shown but are known per se.

[0028] In the first embodiment shown in FIGS. 1 to 11, both valve rods 4, 5 are driven by their respective valve drive devices 6, 7 to be linearly movable throughout the displacement stroke 10 of the valve disk 3 between its closed position and its maximum open position, whereas this is different in the embodiments described below. In the variant described below, only the valve rod 4, which is relatively rigid with respect to deflection in a direction transverse to its longitudinal extension direction, is driven by its valve drive device 6 to be linearly movable throughout the displacement stroke 10 of the valve disk 3 between its closed position and its maximum open position. In the embodiments described below, the valve rod 5, which is relatively flexible with respect to deflection in a direction transverse to its longitudinal extension direction, is driven by its valve drive device 7 to be linearly movable only in a partial section 11 of the displacement stroke 10 of the valve disk 3 in the direction towards the closed position and / or in the direction away from the closed position. In another partial section 12 of the remaining displacement stroke 10, the valve rod 5, which is relatively flexible with respect to deflection in a direction transverse to its longitudinal extension direction, is disengaged by its valve drive device 7 in all the implementation variants described below.

[0029] Figures 12 to 22 show a second embodiment of the present invention. In the following description of this second embodiment and the embodiments to be further described subsequently, only the differences from the first embodiment will be described. Otherwise, refer to the above description of the first embodiment, which can be read analogously for the second and subsequent embodiments.

[0030] In FIG. 12, the valve 1 of the second embodiment is also shown in a perspective view separately from the process chamber 22. FIG. 13 shows a corresponding plan view of the process chamber 22 including cutting lines DD, EE, FF, corresponding to FIG. 2. FIGS. 14 to 16 show cross-sectional views along the cutting line DD. In this case, the valve disk 3 is in the closed position in FIG. 14, in the intermediate position in FIG. 15, and in the maximum open position in FIG. 16. FIGS. 17 to 19 show cross-sectional views along the cutting line EE shown in FIG. 13. In this case, again, FIG. 17 shows the closed position of the valve disk 3, FIG. 18 shows the intermediate position, and FIG. 19 shows the maximum open position. FIGS. 20 to 22 show corresponding cross-sectional views along the cutting line FF. The valve disk 3 is again in the closed position in FIG. 20, in the intermediate position in FIG. 21, and in the maximum open position in FIG. 22.

[0031] The difference from the first embodiment can already be clearly seen in FIG. 12. The valve drive device 6 for the relatively high-rigidity valve rod 4 is formed in the same way as in the first embodiment, while the valve drive device 7 for the relatively low-rigidity valve rod 5 is a valve drive device that drives the relatively low-rigidity valve rod 5 to move only in a partial section 11 of the displacement stroke 10 of the valve disk 3 towards the closed position. In the remaining partial section 12 of the displacement stroke 10, the valve rod 5 is disengaged from its valve drive device 7. The disengaged state can be clearly seen in FIGS. 12, 21, and 22. In FIG. 20, it can be seen that the valve drive device 7 is engaged within the carriage 20 of the relatively low-rigidity valve rod 5, and thus, the valve disk 3 is pressed towards the valve seat 14 in the direction towards the closed position by the tension of the relatively low-rigidity valve rod 5.

[0032] In the second embodiment, the valve drive device 7 has a drive pin 27 and a pin drive device 28 that linearly moves the drive pin 27. A slope 29 is located at the front end of the drive pin 27, and this slope 29 presses against a corresponding slope 30 provided on the carriage 20 of the valve rod 5 with relatively low rigidity in the connected state. Therefore, when the drive pin 27 advances by the pin drive device 28, in the connected state, the valve rod 5 is also pulled toward the closed position of the valve disk 3. For opening, the drive pin 27 is pulled back until it releases the carriage 20, whereupon the valve disk 3 can then be moved to the intermediate position and the maximum open position solely by the relatively high-rigidity valve rod 4 and its valve drive device 6.

[0033] The third embodiment shown in FIGS. 23 to 26 is a variant of the second embodiment shown in FIGS. 12 to 22. In this case, FIG. 23 is shown similar to FIG. 12, and FIGS. 24 to 26 are correspondingly shown similar to FIGS. 20 to 22. In the third embodiment, the valve drive device 7 of the relatively low-rigidity valve rod 5 also has a drive pin 27 and a pin drive device 28. However, in the third embodiment, the slope 29 is omitted at the front end of the drive pin. Instead, the movement direction and the longitudinal extension direction of the drive pin 27 are correspondingly arranged obliquely, whereby, as shown in FIG. 24, by pressing the drive pin 27 toward the corresponding slope 30 provided on the carriage 20 of the relatively low-rigidity valve rod 5, the movement of the relatively low-rigidity valve rod 5 is also performed. Thus, also in the third embodiment, the valve disk 3 is moved toward the valve seat 14 in a partial section 11 by both valve rods 4 and 5 and pressed against this valve seat 14. The travel of the valve disk 3 in the opening direction is also performed solely by the valve drive device 6 and the relatively high-rigidity valve rod 4, as shown in FIGS. 25 and 26. The relatively low-rigidity valve rod 5 is disconnected from the valve drive device 7 in a partial section 12 of the entire displacement stroke 10.

[0034] The valve drive device 6 for the relatively high-rigidity valve rod 4 is formed in the same manner as in the first embodiment, and thus will not be described again. This also applies to the implementation variations described further below.

[0035] In the fourth embodiment shown in FIGS. 27 to 30, the valve drive device 7 for the relatively low-rigidity valve rod 5 is formed in the form of an electromagnet 31. This electromagnet 31 may be used to pull the relatively low-rigidity valve rod 5 downward in a partial section 11, and thus to pull the valve disk 3 to the closed position. However, by means of a corresponding polarity reversal, the electromagnet 31 may be used to drive the valve rod 5 in the partial section 11 towards the open position when the valve disk 3 is opened. Otherwise, since the fourth embodiment is implemented in the same manner as the third embodiment, further description is omitted. In any case, FIG. 27 shows a perspective view, and FIGS. 28 to 30 correspondingly show the same as FIGS. 20 to 22 of the second embodiment.

[0036] The fifth embodiment shown in FIGS. 31 to 34 differs from the second, third, and fourth embodiments only in terms of the configuration of the valve drive device 7 for the relatively low-rigidity valve rod 5. In the fifth embodiment, the valve drive device 7 has a cam 32 that can be rotated by a cam drive device 33, and this cam 32 engages in a slide guide 34 provided on the carriage 20 in a partial section 11, and thus the valve rod 5 and thus the valve disk 3 are also pulled to the closed position. This can be seen in FIG. 32. FIGS. 33 and 34 show the position where the cam 32 is disengaged from the slide guide 34, and thus the valve rod 5 is disconnected from the valve drive device 7. Also in this variation, the valve drive device 7 is used to substantially pull the valve rod 5 in the last partial section 11 in the direction of the closed position of the valve disk 3. All other movements are realized by the relatively high-rigidity valve rod 4 and its valve drive device 6.

[0037] In the last embodiment shown in FIGS. 35 to 38, corresponding figures are also shown. In the last embodiment, a valve drive device 7 for a relatively low-rigidity valve rod 5 has a gear 35 driven by a gear drive device 36. This gear 35 engages with a rack 37 provided on a carriage 20 of the relatively low-rigidity valve rod 5 in a lower partial section 11. Thereby, the relatively low-rigidity valve rod 5 can be driven both in the direction toward the closed position of the valve disk 3 and in the reverse direction away from the closed position in the partial section 11. Also in the last embodiment, the remaining movement in the partial section 12 is realized only by the relatively high-rigidity valve rod 4 and its valve drive device 6. The forms shown in FIGS. 35 to 38 are selected corresponding to the above-described embodiments.

Explanation of Signs

[0038] 1 Valve 2 Flow-through opening 3 Valve disk 4 Valve rod 5 Valve rod 6 Valve drive device 7 Valve drive device 8 Diameter 9 Diameter 10 Total displacement stroke 11 Partial section 12 Partial section 13 Seal 14 Valve seat 15 Valve seat plate 16 Motor 17 Drive belt 18 Spindle 19 Guide rail 20 Carriage 21 Spindle nut 22 Process chamber 23 Rod seal 24 Introduction opening 25 Inner chamber of the chamber 26 Drive device housing 27 Drive pin 28 Pin drive device 29 Inclined surface 30 Corresponding inclined surface 31 Electromagnet 32 Cam 33 Cam drive device 34 Slide guide 35 Gear 36 Gear drive device 37 Rack 38 Feed-through

Claims

1. A valve (1), particularly a vacuum valve, that controls the volume flow through a passage opening (2), The valve (1) comprises a valve disc (3) that closes the passage opening (2) when the valve (1) is in the closed position, and at least two valve rods (4, 5) that extend in the longitudinal direction, The valve rods (4, 5) are attached to the valve disc (3) at positions spaced apart from each other, and at least one of the valve rods (4, 5) is driven linearly by the valve drive unit (6, 7) of the valve (1) to displace the valve disc (3) between the closed position and the fully open position, in the valve (1), The valve (1) is characterized in that the valve rods (4, 5) are formed with different rigidities with respect to deflection in a direction that transverses their respective longitudinal extension directions.

2. The valve (1) according to claim 1, characterized in that the valve rods (4, 5) are each formed from the same material, preferably steel.

3. The valve (1) according to claim 1 or 2, characterized in that the valve rods (4, 5) have at least partially different diameters (8, 9).

4. The valve (1) according to claim 1 or 2, characterized in that the valve rod (4), which is relatively rigid with respect to the deflection in the direction transverse to the longitudinal extension direction, has a resistance moment at least five times larger than that of another valve rod (5).

5. The valve (1) according to claim 1 or 2, characterized in that each valve rod (4, 5) is driven by a valve drive device (6, 7) specific to the valve (1).

6. The valve (1) according to claim 5, characterized in that the valve rods (4, 5) and the valve drive devices (6, 7) are synchronized with each other.

7. The valve (1) according to claim 5, characterized in that each of the valve rods (4, 5) is driven by each of the valve drive devices (6, 7) so as to be linearly movable over the entire displacement stroke (10) of the valve disc (3) between the closed position and the maximum open position.

8. The valve (1) according to claim 5, characterized in that only the valve rod (4), which is relatively rigid with respect to the deflection in the direction transverse to the longitudinal extension direction, is driven by the valve drive device (6) to be linearly movable over the entire displacement stroke (10) of the valve disc (3) between the closed position and the maximum open position.

9. The valve rod (5), which is relatively low in rigidity with respect to the deflection in the direction transverse to the longitudinal extension direction, is driven by the valve drive device (7) to be linearly movable only in the direction toward the closed position and toward the closed position in a portion (11) of the displacement stroke (10) of the valve disc (3), the valve (1) according to claim 8.

10. The valve rod (5), which is relatively low in rigidity with respect to the deflection in the direction transverse to the longitudinal extension direction, is disconnected from the valve drive device (7) in a portion (12) of the displacement stroke (10) of the valve disc (3) in a direction toward and toward the maximum open position, and toward the maximum open position, as described in claim 9.

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