Composite Micro-Needle Structure Based on Integrated Circuit Chip

Abstract

The present application provides a composite micro-needle structure based on an integrated circuit chip. The composite micro-needle structure based on the integrated circuit chip includes a micro-strip line, at least one micro-needle body, and at least one integrated circuit chip. The micro-needle body includes a hard needle and a soft needle. The soft needle is fixed to the upper surface of the hard needle via a fixing structural member. The integrated circuit chip is provided on the substrate of the micro-needle body. The integrated circuit chip is fixed to the soft needle of the micro-needle body to form an electrical connection. The micro-strip line is fixed to one end of the integrated circuit chip to form an electrical connection. The present application uses a hard needle to introduce the soft needle into the tissue, and then pulls out the hard needle, so that the soft needle and the hard needle can be well fixed, their relative movement can be prevented, and the disadvantages when only the hard needle or the soft needle is adopted can be avoided. In addition, by integrating the micro-needle body and the integrated circuit chip, on-site collection and stimulation of nerve signals can be realized, the functionality of the nerve interface can be optimized accordingly, and clinical needs can be better met.

Description

Technical Field

[0001] This application belongs to the technical field of neural microelectrodes for brain-machine interfaces, and particularly relates to a composite microneedle structure based on an integrated circuit chip.

Background Art

[0002] In a nerve interface, brain signals are collected via electrodes. Among them, the electrodes include forms such as invasive and non-invasive types, and the brain signals collected by invasive electrodes are more accurate and have higher reliability. Many of the conventional invasive microneedle structures are single types of electrodes, for example, the Michigan electrode with a hard needle structure, the Utah electrode, and the polyimide electrode with a soft needle structure. However, a hard needle (rigid needle) cannot perform adaptive deformation along with the expansion and contraction of blood vessels during implantation, and may cause certain damage to tissues. On the other hand, the soft needle structure is easily deformed during implantation, and it is necessary to assist the implantation using an external device, and there are problems such as a complex structure and low efficiency. In addition, currently, the functions of hard needles or soft needles are relatively single, that is, they only have a recording function and do not have a stimulating effect. More importantly, the amplitude of the electrical signals in the brain is small, the frequency range is low, and it is easily affected by noise interference, and the extraction of brain electrical signals by conventional technologies is not accurate either.

Summary of the Invention

Problems to be Solved by the Invention

[0003] The object of this application is to provide a composite microneedle structure based on an integrated circuit chip that can solve at least some of the drawbacks existing in the prior art.

Means for Solving the Problems

[0004] To achieve the above object, the present invention adopts the following technical solutions.

[0005] The composite micro-needle structure based on an integrated circuit chip includes a micro-strip line, at least one micro-needle body, and at least one integrated circuit chip. The micro-needle body includes a hard needle and a soft needle. The soft needle is fixed to the upper surface of the hard needle via a fixing structural member. The integrated circuit chip is provided on the substrate of the micro-needle body. The integrated circuit chip is fixed to the soft needle of the micro-needle body to form an electrical connection, and the micro-strip line is fixed to one end of the integrated circuit chip to form an electrical connection.

[0006] Furthermore, the hard needle has a hard needle substrate and at least one hard needle bioelectrode formed on the hard needle substrate. The soft needle has a soft needle substrate and at least one soft needle bioelectrode formed on the soft needle substrate. The soft needle substrate is fixed to the hard needle substrate, and the soft needle bioelectrode is fixed to the hard needle bioelectrode.

[0007] Furthermore, the fixing structural member includes a first fixing member used to fix the soft needle bioelectrode and the hard needle bioelectrode, and a second fixing member used to fix the soft needle substrate and the hard needle substrate.

[0008] Furthermore, the first fixing member is a plurality of hook structures arranged at intervals in the length direction of the hard needle bioelectrode. The hook structure has a first portion and a second portion. Both ends of the second portion are respectively connected to the surface of the first portion and the hard needle bioelectrode. The first portion is parallel to the surface of the hard needle bioelectrode. The soft needle bioelectrode is located between the first portion and the surface of the hard needle bioelectrode, and the second portion forms a preset angle with the surface of the hard needle bioelectrode.

[0009] Furthermore, the preset angle between the second part of the hook structure and the hard needle bioprobe is an acute angle.

[0010] Furthermore, an opening for the hook structure to pass through is provided at a position corresponding to the hook structure on the soft needle bioprobe. A hook detachment structure for the hook structure to detach from the soft needle is provided in the opening. The surfaces of the first part, the second part of the hook structure, and the hard needle bioprobe form a slot. The slot faces the tip of the hard needle. The hook detachment structure is provided at an end away from the tip of the soft needle 11.

[0011] Furthermore, the hook detachment structure is a hook detachment part extending from the edge of the opening into the opening. The distance between the hook detachment parts is smaller than the width of the second part of the hook structure. The hook detachment parts are symmetrically arranged with respect to the axis of the opening. There is a gap between the side edges of the hook detachment parts and the corresponding side edges of the opening.

[0012] Furthermore, the second fixing member is a plurality of pin structures arranged on the hard needle substrate at intervals in the width direction of the hard needle. The pin structure is composed of a coaxial upper cylinder with a large diameter and a lower cylinder with a small diameter. A pin hole is formed in the soft needle substrate at a position corresponding to the pin structure. A plurality of centrosymmetric patterns are provided on the soft needle substrate outward along the edge of the pin hole. The diameter of the upper cylinder of the pin structure is larger than the diameter of the pin hole.

[0013] Furthermore, the connection position between the soft needle substrate and the integrated circuit chip is located between the second fixing member and the soft needle bioprobe.

[0014] Furthermore, the integrated circuit chip includes a soft needle connection portion used to connect to the soft needle, and a microstrip line connection portion located on one side of the soft needle connection portion and used to connect to the microstrip line. The integrated circuit chip and the soft needle of the micro needle body are electrically connected by a flip chip method, and the microstrip line and the integrated circuit chip are electrically connected by a flip chip method. Compared with the prior art, the beneficial effects of the present application are as follows.

[0015] (1) According to the composite micro needle structure based on the integrated circuit chip provided by the present application, by directly integrating the micro needle body and the integrated circuit chip, real-time, rapid, and accurate extraction and stimulation of nerve signals can be realized, and transmission loss and noise signals can be reduced to the greatest extent, so as to ensure stable signal transmission without loss.

[0016] (2) According to the composite micro needle structure based on the integrated circuit chip provided by the present application, by using a hard needle to introduce a soft needle into the tissue and then pulling out the hard needle, the disadvantages of only using a hard needle or a soft needle can be avoided.

[0017] (3) According to the composite micro needle structure based on the integrated circuit chip provided by the present application, by patterning a hook detachment structure on the soft needle biologic electrode of the soft needle and growing a hook structure at the corresponding position of the hard needle, the soft needle can be introduced and implanted using the hook structure. On the other hand, the hard needle and the soft needle can be well fixed to prevent movement between them and reduce the risk of warping of the soft needle.

[0018] According to the composite micro-needle structure based on the integrated circuit chip as provided by the present application, by patterning a centrosymmetric pattern on the substrate of the soft needle and growing a pin structure at the corresponding position of the hard needle, the hard needle and the soft needle can be well fixed, the movement between them can be prevented, and the stability and accuracy of the implantation of the soft needle can be guaranteed.

[0019] Hereinafter, the present application will be described in more detail in connection with the drawings.

Brief Description of the Drawings

[0020]

Figure 1

Figure 2

Figure 3

Figure 4

Figure 5

Figure 6

Figure 7

Figure 8

Figure 9

Figure 10

Best Mode for Carrying Out the Invention

[0021] Hereinafter, in combination with the accompanying drawings in the embodiments of the present invention, the technical solutions in the embodiments of the present invention will be clearly and completely described. It is obvious that the described embodiments are only some of the embodiments of the present invention, not all of them. Based on the embodiments in the present invention, all other embodiments obtained by those skilled in the art without creative labor belong to the protection scope of the present invention.

[0022] In the description of the present application, the orientation or positional relationship indicated by terms such as "center", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. is the orientation or positional relationship shown based on the drawings, and is only for the convenience of description of the present application and for simplifying the description. It should be understood that it does not imply that the device or element it refers to must have a specific orientation and must be configured or operated in a specific orientation, so it should not be understood as a limitation to the present application.

[0023] It should be noted that in the description of the present application, unless otherwise clearly defined or limited, the terms "installation", "connection", and "attachment" should be understood in a broad sense. For example, it may be a fixed connection, a removable connection, a contact connection, or an integral connection. Those skilled in the art can understand the specific meaning of the above terms in the present invention according to the specific situation.

[0024] The terms "first" and "second" are only used for the purpose of description, and should not be understood as indicating or implying relative importance, or implicitly designating the number of technical features presented. Therefore, the features limited by "first" and "second" may explicitly or implicitly include one or more of such features. In the description of the present application, unless otherwise limited, "a plurality" means two or more.

[0025] As shown in FIGS. 1 and 2, this embodiment provides a composite micro-needle structure based on an integrated circuit chip. The composite micro-needle structure based on the integrated circuit chip includes a micro-strip line 1, at least one micro-needle body, and at least one integrated circuit chip 2. The micro-needle body includes a hard needle 3 and a soft needle 4. The soft needle 4 is fixed to the upper surface of the hard needle 3 via a fixing structural member. The integrated circuit chip 2 is provided on the substrate of the micro-needle body. The integrated circuit chip 2 is fixed to the soft needle 4 of the micro-needle body to form an electrical connection. The micro-strip line 1 is fixed to one end of the integrated circuit chip 2 to form an electrical connection. Among them, the hard needle 3 has a certain rigidity and can be implanted into the soft tissue of the human body or an animal. For example, the hard needle 3 can be made of a silicon material. The soft needle 4 has a certain flexibility. For example, the soft needle 4 can be made of materials such as silicon nitride, polysilicon, and silicon carbide. In this embodiment, since the hard needle 3 has a certain rigidity, by laying the soft needle 4 flat on the upper surface of the hard needle 3, the hard needle 3 can move the soft needle 4 and be implanted into the soft tissue of the human body or an animal together with it. After the soft needle 4 is implanted into the tissue, the hard needle 3 is pulled out, the hard needle 3 and the soft needle 4 are separated, and the soft needle 11 remains in the implanted tissue, effectively avoiding the drawbacks caused by using only the hard needle or the soft needle. In addition, by integrating the micro-needle body and the integrated circuit chip 2, on-site collection and stimulation of nerve signals can be realized, thereby optimizing the functionality of the nerve interface and better meeting the clinical needs.

[0026] In one preferred embodiment, as shown in FIGS. 2, 3 and 6, the hard needle 3 has a hard needle base body 16 and at least one hard needle bioelectrode 11 formed on the hard needle base body 16. The soft needle 4 has a soft needle base body 17 and at least one soft needle bioelectrode 12 formed on the soft needle base body 17. The soft needle bioelectrode 12 and the hard needle bioelectrode 11 are fixed via a first fixing member 6, and the soft needle base body 17 and the hard needle base body 16 are fixed via a second fixing member 5. The first fixing member 6 and the second fixing member 6 jointly constitute the above-described fixing structural member, function to fix the hard needle 3 and the soft needle 4, ensure that the soft needle 4 can be implanted into the tissue together with the hard needle 3, and ensure that no displacement occurs between the hard needle 10 and the soft needle 11. The integrated circuit chip 2 and the soft needle base body 17 are bonded and fixed to form an electrical connection, realizing real-time, rapid, and accurate extraction and stimulation of nerve signals.

[0027] Regarding the specific structural design of the first fixing member 6 and the second fixing member 5, when implanting the microneedle into the tissue, it is necessary to satisfy that the soft needle 4 can be fixed and the hard needle 3 can move the soft needle 4 and implant it into the tissue together. At the same time, when pulling out the hard needle 3, it is necessary to satisfy that the separation between the soft needle 4 and the hard needle 3 can be facilitated. Therefore, in a possible preferred embodiment, a specific structure of the first fixing member 6 and the second fixing member 5 is provided. As shown in FIGS. 3, 4, and 5, the first fixing member 6 is a plurality of hook structures 13 arranged at intervals in the length direction of the hard needle bioelectrode 11. The hook structure 13 has a first portion and a second portion. Both ends of the second portion are respectively connected to the surface of the first portion and the hard needle bioelectrode 11. The first portion is parallel to the surface of the hard needle bioelectrode 11. The soft needle bioelectrode 12 is located between the first portion and the surface of the hard needle bioelectrode 11. The second portion and the surface of the hard needle bioelectrode 11 form a preset angle. Accordingly, an opening 14 for the hook structure 13 to pass through is provided at a position corresponding to the hook structure 13 on the soft needle bioelectrode 12. A hook detachment structure for the hook structure 13 to detach from the soft needle 4 is provided in the opening 14. Specifically, the first portion, the second portion of the hook structure 13, and the surface of the hard needle bioelectrode 11 form a slot. The slot faces the tip of the hard needle 3. The hook detachment structure is provided at an end away from the tip of the soft needle 4. When manufacturing the microneedle body in which the hard needle 3 and the soft needle 4 are combined, first, a sacrificial layer with a certain thickness is grown on the surface of the hard needle 3. Further, the soft needle 4 is grown on the surface of the sacrificial layer. An opening 14 is formed in the soft needle bioelectrode 12 of the soft needle 4. The hook detachment structure is patterned on the soft needle 4. Then, the second portion of the hook structure 13 is grown at the position of the opening 14. Finally, the first portion of the hook structure 13 is grown. Next, the sacrificial layer between the hard needle 3 and the soft needle 4 is removed.As a result, a part of the soft needle bioelectrode 12 at the edge of the opening 14 is pushed into the hook structure 13. When the hard needle 3 is implanted into the tissue, the soft needle 4 is moved and implanted together with it using this hook structure 13. When the implantation point is reached and the hard needle 3 is pulled backward, when the hook structure on the hard needle bioelectrode 11 contacts the hook detachment structure at the rear end of the opening 14, the hook detachment structure detaches the hook structure 13 from the soft needle bioelectrode 12, releasing the fixation between the soft needle bioelectrode 12 and the hard needle bioelectrode 11, pulling out the hard needle 3, and achieving the purpose of leaving the soft needle 4 in the tissue.

[0028] Preferably, as shown in FIG. 5, the hook detachment structure is two hook detachment portions 15 extending from the edge of the opening 14 into the opening 14. The two hook detachment portions 15 are symmetrically arranged with respect to the axis of the opening 14. There is a gap between the two hook detachment portions 15, and this gap is smaller than the width of the second part of the hook structure 13. There is a gap between the side edges of the two hook detachment portions 18 and the corresponding side edges of the opening 14 so that the hook detachment portions 15 can be warped upward and pressed from both sides. When pulling out the hard needle 3, when the hard needle 3 is pulled backward and the hook structure 13 contacts this hook detachment portion 15, the hook detachment portion 15 warps slowly upward, so that the hook structure 13 exits downward from the opening 14. Preferably, by making the two hook detachment portions 15 and the soft needle bioelectrode 12 an integrally formed structure, in the process of the two hook detachment portions 15 opening upward, the second part of the hook structure 13 presses the hook detachment portion 15, causing the hook detachment portion 15 to warp upward in the backward movement direction of the hard needle 3. As a result, the area of the opening 14 is expanded, and the hook structure 13 detaches from the soft needle 4 from the opening 14. Since the soft needle 4 and the hook detachment portion 15 are made of an elastic material, when the hard needle 3 detaches from the soft needle 4, the warped part of the hook detachment portion 15 drops and returns to its original shape.

[0029] Preferably, as shown in FIGS. 3 to 5, in order to increase the strength of the hook structure 13, the first part and the second part of the hook structure 13 are integrally formed. In the process of separating the hard needle 3 from the soft needle 4, to facilitate the detachment of the hook structure 13 from the opening 14 and to avoid the first part affecting the hook detachment part 15 in the process of the hook structure 13 pressing the hook detachment part 15, the bottom surface of the second part in this embodiment abuts against the surface of the hard needle bioelectrode 11, the top surface of the second part abuts against the bottom surface of the first part, and the bottom surface of the second part is larger than the top surface of the second part. Preferably, in this embodiment, the angle between the second part of the hook structure 13 and the surface of the hard needle bioelectrode 11 is set to an acute angle so that the hard needle 3 can be easily detached from the soft needle 4. That is, in the direction away from the tip of the hard needle 3, it is avoided that the first part exceeds the end of the second part, and it is facilitated that the second part of the hook structure 13 presses the hook detachment part 15 and warps the hook detachment part 15 upward.

[0030] Regarding one specific structure of the second fixing member 5, as shown in FIGS. 6, 7, and 8, the second fixing member 5 is a plurality of pin structures 18 arranged on the hard needle base body 16 at intervals in the width direction of the hard needle 3. The pin structure 18 is composed of a large-diameter upper cylinder and a small-diameter lower cylinder on the same axis. In the soft needle base body 17, a pin hole 20 is formed at a position corresponding to the pin structure 18. On the soft needle base body 17, a plurality of centrosymmetric patterns 19 are provided on the outside along the edge of the pin hole 20. For example, the centrosymmetric pattern 19 in the pattern in this embodiment may be a petal-shaped structure. The diameter of the upper cylinder of the pin structure 18 is larger than the diameter of the pin hole 20. When fixing the hard needle 3 and the soft needle 4, the upper cylinder on the pin structure 18 is passed through the corresponding pin hole 20 of the soft needle base body 17. Since the diameter of the upper cylinder of the pin structure 18 is larger than the diameter of the pin hole 20, the upper cylinder can hold a part of the soft needle structure at the edge of the pin hole 20, thereby fixing the soft needle 4 and ensuring that no displacement occurs between the hard needle 3 and the soft needle 4. After the hard needle 3 moves the soft needle 4 and implants it into the tissue together, by pulling the hard needle 3 downward until the pin structure 18 completely exits, the upper cylinder of the pin structure 18 applies a certain downward force to the soft needle 4, causing the centrosymmetric pattern 19 of the soft needle 4 to be bent and deformed to a certain extent. Subsequently, by pulling the hard needle 3 backward to withdraw the hook structure 13 on the hard needle 3, the hard needle 3 and the soft needle 4 are completely separated, the hard needle 3 is pulled out, and the soft needle 4 remains in the tissue.

[0031] In this embodiment, the center point of the centrosymmetric pattern 19 coincides with the center point of the pin hole 20.

[0032] Preferably, the connection position between the soft needle substrate 17 and the integrated circuit chip 2 is located between the second fixing member 5 and the soft needle bioelectrode 12. Such a structural design can effectively reduce the influence of the pulling force downward on the connection between the soft needle substrate 17 and the integrated circuit chip 2 in the process of pulling the hard needle 3 downward to separate the soft needle substrate 17 from the hard needle substrate 16, and can guarantee the stability of the connection between the integrated circuit chip 2 and the soft needle 4.

[0033] In a preferred embodiment, as shown in FIGS. 1, 9 and 10, the integrated circuit chip 2 includes a soft needle connection portion 7 used for being connected to the soft needle 4, and a microstrip line connection portion 10 located on one side of the soft needle connection portion 7 and used for being connected to the microstrip line 1. Preferably, the integrated circuit chip 2 and the soft needle 4 of the micro needle body are electrically connected by a flip chip method, and the microstrip line 1 and the integrated circuit chip 2 are electrically connected by a flip chip method. By directly flip chip bonding the micro needle body and the microstrip line 1 to the integrated circuit chip 2, real-time, rapid and accurate extraction and stimulation of nerve signals can be realized, and the transmission loss and noise signals can be reduced to the maximum extent, so as to guarantee stable signal transmission without loss.

[0034] Furthermore, when there are a plurality of the above-described composite micro needle structures, the integrated circuit chip 2 may be set to include a chip connection portion 8 used for connection with other integrated circuit chips 2. The chip connection portion 8 is located at both ends of the soft needle connection portion 7, and a connection through hole 9 is formed in the chip connection portion 8. One micro needle body and the integrated circuit chip 2 are connected according to the connection method in the above-described embodiment. The connection and fixation of a plurality of integrated circuit chips 2 to each other are achieved by connecting and fixing the connection through holes 9 of each integrated circuit chip 2 using steel pins, so as to assemble the micro needle body into a planar array type structure form, and the application range of the composite micro needle structure can be expanded.

[0035] From the above, according to the composite micro-needle structure based on the integrated circuit chip as provided by the present application, by using the hard needle to introduce the soft needle into the tissue and then pulling out the hard needle, the soft needle and the hard needle can be well fixed, relative movement between them can be prevented, and the drawbacks when only adopting the hard needle or the soft needle can be avoided. Further, by integrating the micro-needle body and the integrated circuit chip, on-site collection and stimulation of nerve signals can be realized, accordingly, the functionality of the nerve interface can be optimized, and clinical needs can be better met.

[0036] The above examples are merely illustrative of the present application and do not constitute limitations on the protection scope of the present application. All designs identical or similar to the present application fall within the protection scope of the present application.

Description of Reference Numerals

[0037] 1 Microstrip line 2 Integrated circuit chip 3 Hard needle 4 Soft needle 5 Second fixing member 6 First fixing member 7 Soft needle connection part 8 Chip connection part 9 Connection through hole 10 Microstrip line connection part 11 Hard needle bioelectrode 12 Soft needle bioelectrode 13 Hook structure 14 Opening 15 Hook detachment part 16 Hard needle substrate 17 Soft needle substrate 18 Pin structure 19 Centrosymmetric pattern 20 Pin hole

Claims

1. A microstrip line, at least one microneedle body, and at least one integrated circuit chip, wherein the microneedle body includes a hard needle and a soft needle, the soft needle is fixed to the upper surface of the hard needle via a fixing structural member, the integrated circuit chip is provided on the substrate of the microneedle body, the integrated circuit chip is fixed to the soft needle of the microneedle body to form an electrical connection, and the microstrip line is fixed to one end of the integrated circuit chip to form an electrical connection. A composite microneedle structure based on an integrated circuit chip, characterized in that.

2. The hard needle has a hard needle substrate and at least one hard needle bioelectrode formed on the hard needle substrate, the soft needle has a soft needle substrate and at least one soft needle bioelectrode formed on the soft needle substrate, the soft needle substrate is fixed to the hard needle substrate, and the soft needle bioelectrode is fixed to the hard needle bioelectrode. The composite microneedle structure based on the integrated circuit chip according to claim 1, characterized in that.

3. The fixing structural member includes a first fixing member used to fix the soft needle bioelectrode and the hard needle bioelectrode, and a second fixing member used to fix the soft needle substrate and the hard needle substrate. The composite microneedle structure based on the integrated circuit chip according to claim 2, characterized in that.

4. The first fixing member is a plurality of hook structures arranged at intervals in the length direction of the hard needle bioelectrode. The hook structure has a first portion and a second portion. Both ends of the second portion are respectively connected to the surface of the first portion and the hard needle bioelectrode. The first portion and the surface of the hard needle bioelectrode are parallel. The soft needle bioelectrode is located between the first portion and the surface of the hard needle bioelectrode, and the second portion and the surface of the hard needle bioelectrode form a preset angle. The composite microneedle structure based on the integrated circuit chip according to claim 3, characterized in that.

5. The preset angle between the second part of the hook structure and the hard needle bioprobe is an acute angle. The composite micro-needle structure based on the integrated circuit chip according to claim 4, characterized in that.

6. An opening for the hook structure to pass through is provided in the soft needle bioprobe at a position corresponding to the hook structure. A hook detachment structure for the hook structure to detach from the soft needle is provided in the opening. The surfaces of the first part, the second part of the hook structure and the hard needle bioprobe form a slot. The slot faces the tip of the hard needle. The hook detachment structure is provided at an end away from the tip of the soft needle. The composite micro-needle structure based on the integrated circuit chip according to claim 4, characterized in that.

7. The hook detachment structure is a hook detachment part extending from the edge of the opening into the opening. The distance between the hook detachment parts is smaller than the width of the second part of the hook structure. The hook detachment parts are symmetrically arranged with respect to the axis of the opening. There is a gap between the side edge of the hook detachment part and the corresponding side edge of the opening. The composite micro-needle structure based on the integrated circuit chip according to claim 6, characterized in that.

8. The second fixing member is a plurality of pin structures arranged on the hard needle substrate at intervals in the width direction of the hard needle. The pin structure is composed of a coaxial upper cylinder with a large diameter and a lower cylinder with a small diameter. A pin hole is formed in the soft needle substrate at a position corresponding to the pin structure. A plurality of centrosymmetric patterns are provided on the soft needle substrate outward along the edge of the pin hole. The diameter of the upper cylinder of the pin structure is larger than the diameter of the pin hole. The composite micro-needle structure based on the integrated circuit chip according to claim 3, characterized in that.

9. The connection position between the soft needle substrate and the integrated circuit chip is located between the second fixing member and the soft needle bioprobe. The composite micro-needle structure based on the integrated circuit chip according to claim 3, characterized in that.

10. The integrated circuit chip includes a soft needle connection portion used to be connected to the soft needle, and a microstrip line connection portion used to be connected to the microstrip line, which is located on one side of the soft needle connection portion. The integrated circuit chip and the soft needle of the micro needle body are electrically connected by a flip chip method, and the microstrip line and the integrated circuit chip are electrically connected by a flip chip method. A composite micro needle structure based on the integrated circuit chip according to claim 1, characterized in that.

Images