Scroll pump seal, scroll pump, and method

The scroll pump seal with angled protrusions and optional additional elements addresses the issue of fluid leakage, improving sealing strength and pump performance by preventing fluid inflow and outflow, thus extending the seal's lifespan.

JP2025523234APending Publication Date: 2025-07-17EDWARDS SRO
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Patent Information

Application Number
JP2025503101
Authority / Receiving Office
JP · JP
Patent Type
Applications
Current Assignee / Owner
Priority Date
2022-08-22
Filing Date
2023-08-21
Publication Date
2025-07-17

AI Technical Summary

Technical Problem

Existing scroll pump seals are ineffective in preventing fluid leakage into and out of the pump chamber, which can degrade pump performance and cause damage by allowing lubricating oil and particles into the chamber.

Method used

A scroll pump seal with an annular body and two angled seal protrusions, one angled towards the shaft and the other towards the pump chamber, forming a V-shape to enhance sealing strength and directionally prevent fluid inflow and outflow, optionally with additional seal elements and a biasing member to maintain contact during orbiting motion.

Benefits of technology

The seal effectively reduces leakage in both directions, prolongs the seal's lifespan, and enhances pump performance by maintaining a strong seal under differential pressures and varying operational states.

✦ Generated by Eureka AI based on patent content.

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Abstract

A scroll pump seal is disclosed for preventing the inflow of fluid into and the outflow of fluid from a pump chamber defined between a first scroll and a second scroll of a scroll pump. The first scroll and the second scroll are configured to revolve relative to each other. The scroll pump seal includes an annular body that is attached around a shaft of the scroll pump and is adapted to be fixed to one of the first scroll and the second scroll, and a first seal element including an inner annular protrusion and an outer annular protrusion extending from an axial end face of the annular body, the inner annular protrusion and the outer annular protrusion being configured to contact the other of the first scroll and the second scroll relative to which the annular body is not fixed. Thus, the scroll pump seal can provide an improved seal for preventing the inflow of fluid into and the outflow of fluid from the pump chamber. Accordingly, leakage can be reduced and the pump performance of the scroll pump can be improved.
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Description

Technical Field

[0001] The present invention relates to a scroll pump, and more particularly to a scroll pump seal for preventing the inflow of fluid into and the outflow of fluid from a pump chamber defined between a first scroll and a second scroll of the scroll pump.

Background Art

[0002] Scroll pumps are known that include a first scroll and a second scroll configured to perform a relative orbiting motion. The pump chamber is defined between the first scroll and the second scroll. A seal can be disposed between the first scroll and the second scroll to prevent fluid leakage from outside the scroll mechanism into the pump chamber. Although such scroll pumps exist, they have drawbacks. Therefore, it is desirable to provide an improved scroll pump and scroll pump seal.

Summary of the Invention

Means for Solving the Problems

[0003] A first aspect provides a scroll pump seal for preventing the inflow of fluid into and the outflow of fluid from a pump chamber defined between a first scroll and a second scroll of a scroll pump, the first scroll and the second scroll being configured to perform a relative orbiting motion, the scroll pump seal being attached around a shaft of the scroll pump and including an annular body fixed to one of the first scroll and the second scroll, and a first seal element including an inner annular protrusion and an outer annular protrusion extending from an axial end face of the annular body, the inner annular protrusion and the outer annular protrusion being configured to contact the other of the first scroll and the second scroll to which the annular body is not relatively fixed.

[0004] Some scroll pump seals prevent leakage into the pump chamber (or flow path) of a scroll pump (or scroll mechanism) by providing a protrusion (or lip). For example, UK Patent No. 2503723 discloses a scroll pump having an axial lip seal disposed between the orbiting scroll and the fixed scroll to resist leakage of fluid from outside the scroll mechanism into the flow path. The axial lip seal is fixed to either the orbiting scroll or the fixed scroll and seals against the other of the orbiting scroll or the fixed scroll, and the orbiting motion is transmitted to the seal against the other scroll. The axial lip seal comprises a lip angled toward the shaft of the scroll pump to which the axial lip seal is attached.

[0005] This aspect recognizes that such scroll pump seals have drawbacks in their ability to prevent fluid leakage. Specifically, such scroll pump seals cannot effectively prevent the pumped medium from leaking out of the pump chamber. Further, there may be a limit to the strength of the seal to prevent unwanted fluid leakage into the pump chamber. Leakage of the pumped substance out of the pump chamber can lead to a decrease in the pump performance of the scroll pump. Leakage of ambient fluid into the pump chamber can also not only decrease the pump performance but also damage the scroll pump. Leakage of fluid into the pump chamber can draw in unwanted lubricating oil, oil, and particles into the pump chamber, which can be harmful or damaging to the scroll pump.

[0006] Accordingly, the present aspect provides a scroll pump seal. The scroll pump seal can prevent the inflow of fluid into the pump chamber defined between the first scroll and the second scroll of the scroll pump and the outflow of fluid from the pump chamber. The first scroll and the second scroll are configured to revolve relative to each other. The scroll pump can be a scroll vacuum pump. The scroll pump seal includes an annular body (or a ring-shaped portion). The annular body can be adapted to be attached around the shaft of the scroll pump. The annular body can be fixed to one of the first scroll and the second scroll. The scroll pump seal can include a first seal element. The first seal element is for sealing between the first scroll and the second scroll of the scroll pump. The first seal element can include an inner annular protrusion (or an inner lip). The first seal element can include an outer annular protrusion (or an outer lip). The inner annular protrusion and the outer annular protrusion can extend from the axial end face (or end) of the annular body. The inner annular protrusion and the outer annular protrusion can be configured to contact (or seal) the other of the first scroll and the second scroll to which the annular body is not relatively fixed.

[0007] Thus, a scroll pump seal having two seal protrusions is provided. The two protrusions can improve the seal strength against the movement of fluid in one direction or both directions. Accordingly, leakage into and out of the pump chamber can be reduced. Also, one aspect provides an advantage over existing shaft seals. Specifically, since the high-speed rotation of the pump shaft causes wear, the shaft seal needs to be replaced regularly. The relative revolving speed between the first scroll and the second scroll is smaller than the rotational speed of the shaft. Therefore, providing the first seal element between the scrolls means that the scroll pump seal of the first aspect may last longer than a similar shaft seal.

[0008] In some embodiments, the inner annular protrusion and the outer annular protrusion extend at a predetermined angle such that the inner annular protrusion is angled toward the shaft and the outer annular protrusion is angled toward the pump chamber. In other words, the inner annular protrusion and the outer annular protrusion do not extend perpendicular to the axial end face of the annular body. In this way, the inner annular protrusion is excellent at preventing leakage of surrounding fluid, lubricating oil, and fine particles into the pump chamber, and the outer annular protrusion is particularly effective at preventing leakage of the pumping medium from the pump chamber. Further, the use of angled protrusions can improve the seal strength because the seal may be strengthened when the differential pressure across the angled protrusions increases.

[0009] In some embodiments, the inner annular protrusion and the outer annular protrusion together define a V shape. In this way, this shape forms a particularly effective seal against fluid being drawn into the pump chamber and fluid leaving the pump chamber, thus reducing both leakage into the pump chamber and leakage from the pump chamber. In some embodiments, the inner annular protrusion and the outer annular protrusion include curved portions such that they are not completely straight. This can help strengthen the seal when the differential pressure across the seal increases.

[0010] In some embodiments, the inner annular protrusion and the outer annular protrusion extend the same length. In this way, the seal into the pump chamber and the seal from the pump chamber can be of similar strength.

[0011] In some embodiments, the outer annular protrusion extends beyond the radial outer surface of the annular body. The longer protrusion can be pressed more against one of the first or second scrolls, thus forming a stronger seal. However, when selecting the length of the protrusion, there is a trade-off between space savings and seal strength.

[0012] In some embodiments, the scroll pump seal includes a second seal element for preventing fluid flow between the annular body and the shaft of the scroll pump, and the second seal element includes an additional annular protrusion (or lip) extending from the radially inner surface of the annular body. In this way, an additional seal is provided to block the flow paths into and out of the pump chamber, further preventing leakage into and out of the pump chamber. Therefore, the strength of the seal, and as a result the pump performance, can be improved.

[0013] In some embodiments, the additional annular protrusion is angled toward the axial end face with the first seal element. In this way, the additional annular protrusion may be particularly excellent in preventing leakage into or out of the pump chamber depending on whether the scroll pump seal is relatively fixed to either the first or the second scroll.

[0014] In some embodiments, the second seal element includes a second additional annular protrusion. In this way, the seal created by the second seal element can be strengthened. Therefore, leakage into and out of the pump chamber can be further reduced.

[0015] In some embodiments, the additional annular protrusion and the second additional annular protrusion together define a V-shape. In this way, one of the first additional annular protrusion and the second additional annular protrusion is particularly excellent in preventing leakage from the pump chamber, and the other is particularly excellent in preventing leakage into the pump chamber. Thereby, the total leakage can be reduced.

[0016] In some embodiments, the scroll pump seal includes a biasing member configured to bias the first seal element against the other of the orbiting scroll and the fixed scroll to which the annular body is not relatively fixed. In this way, seal contact can be strengthened, thereby reducing leakage.

[0017] In some embodiments, the biasing member comprises a spring.

[0018] In some embodiments, the biasing member is integral with the annular body. In this way, the biasing member can be manufactured or formed together with the scroll pump seal. In some embodiments, the biasing member is made of the same material as the annular body.

[0019] In some embodiments, the first seal element comprises an intermediate annular protrusion (or lip) extending from the axial end face of the annular body between the inner annular protrusion and the outer annular protrusion. In this way, an additional seal can be provided to improve the seal formed by the scroll pump seal. This embodiment can be particularly effective in combination with a biasing member that helps all three protrusions (or seal members or lips) to sufficiently contact the other of the first scroll and the second scroll with which the annular body is not relatively fixed.

[0020] In some embodiments, the annular body and the first seal member are integral with each other. In some embodiments, the annular body and the first seal element are made of the same material. In some embodiments, the annular body and the second seal element are integral with each other. In some embodiments, the annular body and the second seal element are made of the same material.

[0021] In some embodiments, the annular body is fixed to one of the first scroll and the second scroll by a friction fit.

[0022] In some embodiments, the annular body comprises an annular groove for receiving an O-ring that fixes the annular body to one of the first scroll and the second scroll and blocks the flow of fluid between the annular body and one of the first scroll and the second scroll. In this way, the scroll pump seal can be fixed to the appropriate scroll and the flow of fluid between the scroll pump seal and the scroll can be blocked or prevented.

[0023] In some embodiments, the scroll pump seal is made of at least one polymer, and optionally, at least one polymer is Teflon filled polyamide.

[0024] In some embodiments, the scroll pump seal includes grease disposed between an inner annular protrusion and an outer annular protrusion. In this way, the first seal element can be supported to strengthen the seal. As a result, leakage is reduced and pump performance is improved. Similarly, if the scroll pump seal includes a second seal element including a further annular protrusion and a second further annular protrusion, grease can be disposed between these protrusions to increase the seal strength.

[0025] A further aspect provides a scroll pump comprising a first scroll and a second scroll configured to perform a relative orbiting motion, a shaft configured to impart a relative orbiting motion of the first scroll and the second scroll when driven, and a scroll pump seal according to the first aspect, the scroll pump seal being mounted around the shaft and fixed to one of the first scroll and the second scroll.

[0026] In some embodiments, the scroll pump seal is made of the same material as the tip seals of the first and second scrolls.

[0027] Yet another aspect provides a method of positioning a scroll pump seal, the method comprising mounting a scroll pump seal according to the first aspect around a shaft and fixing the scroll pump seal to one of the first scroll and the second scroll, wherein the first seal element contacts the other of the first scroll and the second scroll in which the annular seal is not relatively fixed, and the first scroll and the second scroll are configured to perform a relative orbiting motion.

[0028] In some embodiments, the method includes positioning an O-ring within an annular groove defined in an annular body of a scroll pump seal. This can be performed before fixing the scroll pump seal to one of the first and second scrolls. However, the steps of yet another aspect can be performed in any order.

[0029] Further specific preferred aspects are set forth in the appended independent and dependent claims. The features of the dependent claims can be combined with the features of the independent claims in combinations other than those explicitly set forth in the claims, as appropriate.

[0030] When a feature of a device is described as being operable to provide a certain function, it is to be understood that this includes a feature of the device that provides the function or is adapted or configured to provide the function.

[0031] Here, embodiments of the present invention will be further described with reference to the accompanying drawings.

Brief Description of the Drawings

[0032]

Figure 1

Figure 2

Figure 3

Figure 4

Mode for Carrying Out the Invention

[0033] Before describing the embodiments in more detail, an overview will first be described.

[0034] Some embodiments provide a scroll pump seal for preventing the inflow of fluid into the pump chamber and the outflow (leakage) of fluid from the pump chamber. The pump chamber is defined between a first scroll and a second scroll of the scroll pump. The first and second scrolls are configured to revolve relative to each other. The scroll pump seal is attached around the shaft of the scroll pump and includes an annular body fixed to one of the first scroll and the second scroll; and a first seal element including an inner annular protrusion and an outer annular protrusion extending from an axial end face of the annular body, wherein the inner annular protrusion and the outer annular protrusion are configured to contact the other of the first scroll and the second scroll to which the annular body is not fixed.

[0035] There are small flow paths between the components of the scroll pump. The seal can be arranged radially within the pump chamber or the innermost wrap of the scroll mechanism and can help prevent leakage into or from the innermost wrap. Existing seals are fixed to one of the revolving scroll and the stationary stator scroll and have a single lip that forms a seal against the non-fixed scroll. The single lip is angled towards the shaft to help prevent leakage into the pump chamber. However, existing seals do not seal against leakage of the medium being pumped from inside the pump chamber to outside the pump chamber. Further, being a single seal lip, there is a limit to the strength of known seals.

[0036] By providing two seal protrusions, the effective seal strength can be increased. As a result, leakage in one or both directions into and out of the pump chamber can be reduced.

[0037] The inner annular protrusion can be angled towards the shaft, and the outer annular protrusion can be angled towards the pump chamber. The protrusions can form a V - shape. By angling each seal protrusion in the opposite direction, an effective seal can be created to prevent the inflow of fluid into the pump chamber and the outflow of fluid from the pump chamber.

[0038] An additional seal element can be used to seal between the seal body and the scroll pump shaft to further limit fluid flow and leakage. This second seal element can have one or more protrusions. In the case of two, they can be angled to form a V - shape.

[0039] To further strengthen the seal, a third protrusion can be added to either the first or second seal element. The third protrusion can be added between the already angled protrusions or V - shaped protrusions.

[0040] An urging member can be provided to urge the seal protrusions of the first seal element to create an effective seal. The urging member can be a separate feature or integral with the seal body. In the integral case, the force of the urging member can be created by the shape and / or structure of the seal.

[0041] Another way to increase the strength of the seal is to confine grease between the protrusions to resist disintegration.

[0042] Scroll pump Similar to a known scroll pump, a motor drives a shaft. The shaft causes a relative revolution motion with respect to a set of scrolls. The relative revolution motion pumps fluid along a flow path that leads from an inlet, through a pump chamber composed of a plurality of pockets, to an outlet. The flow path generally extends in an involute path between the scrolls. More specifically, the walls of the scrolls define wraps, and the fluid moves through them and is compressed towards the center of the scrolls. As a result, a pressure difference occurs between adjacent wraps. The wraps are sealed using tip seals as is conventionally known. However, additional seals may be required to prevent leakage to and from the innermost wrap.

[0043] The relatively high pressure of the inner wrap during pump operation means that the compressed gas tries to escape. The path of least resistance is to exit from the pump outlet, but the fluid may leak from the scroll mechanism around the shaft and the front shaft bearing. Therefore, fluid may leak from the pump chamber.

[0044] When the pump stops and the pressure within the scroll mechanism immediately drops, the opposite problem occurs. While the pump chamber equalizes, fluid from the outside of the pump chamber in a higher ambient pressure state may be drawn into the scroll mechanism, potentially drawing in other contaminants such as oil from the pump bearings. Therefore, fluid leakage into the pump chamber may occur.

[0045] Scroll pump seal FIG. 1 shows an embodiment of a scroll pump seal 10 used in a scroll pump to prevent the inflow of fluid into and the outflow of fluid from a pump chamber 30 defined between a first scroll 12 and a second scroll 14 of the scroll pump. The first scroll 12 and the second scroll 14 are configured to revolve relative to each other. One of the first scroll 12 and the second scroll 14 can be a fixed scroll or a stator scroll, and the other can be a revolving scroll. Alternatively, both can be revolving scrolls. The relative revolving motion is imparted to the scrolls by a motor-driven shaft 16.

[0046] The scroll pump seal 10 includes an annular body 18 that defines an annular groove 28 for receiving an O-ring 26, and a first seal element 20 having an inner annular protrusion 22 and an outer annular protrusion 24.

[0047] The seal 10 is disposed in an opening defined between the first scroll 12, the second scroll 14, and the shaft 16 at a position radially inward of the pump chamber 30 (shown in FIG. 2). The annular body 18 is attached around the shaft 16 and fixed relative to the first scroll 12.

[0048] The body 18 is fixed using a friction fit. More specifically, the seal 10 includes an O-ring 26 disposed in the annular groove 28 defined by the body 18. The O-ring 26 is configured to fix the seal 10 relative to the first scroll 12 and prevent the flow of fluid between the seal 10 and the first scroll 12.

[0049] The first sealing element 20 is integral with the annular body 18 and is made of the same material as the body 18. The first sealing element 20 includes an inner annular protrusion 22 and an outer annular protrusion 24. The protrusions 22, 24 extend away from the annular body 18 at angles in opposite directions so as to form a V - shape, and the inner annular protrusion 22 is radially inner of the outer annular protrusion 24. The ends of the protrusions 22, 24 contact the second scroll 14, and a seal is formed between the first scroll 12 and the second scroll 14. The seal is formed both when the scrolls 12, 14 are stationary and when they are in motion (relative orbiting motion).

[0050] In use, the seal 10 acts to prevent the flow of fluid between the first scroll 12 and the second scroll 14, thereby preventing the flow of fluid into or out of the pump chamber 30. The first sealing element 20 is configured to contact the second scroll 14 before, during, and after operation of the scroll pump, and leakage is prevented between different operating states of the scroll pump. The inner annular protrusion 22 is angled away from the pump chamber 30 and is particularly good at preventing leakage into the pump chamber 30. This is particularly effective immediately after the pump stops, because this is when leakage into the pump chamber 30 is dominant as described above. The outer annular protrusion 24 is angled towards the pump chamber 30 and is particularly good at preventing leakage from the pump chamber 30. This is particularly useful during operation of the pump, because this is when leakage from the pump chamber 30 is dominant as described above.

[0051] Changes to the described embodiments will be apparent to those skilled in the art. For example, the annular body 18 can be fixed to the second scroll 14 instead of the first scroll 12. In this case, the first seal element 20 contacts the scroll to which the annular body 18 is not fixed. Further, although the seal 10 is fixed to the first scroll by a friction fit, any suitable attachment mechanism such as an adhesive can be used. The protrusions 22, 24 of the first seal element 20 may not be angled, i.e., may extend perpendicular to the axial end face of the annular body 18. The protrusions 22, 24 can form a combination of linear and angled ones. The protrusions may extend at the same angle or different angles so as not to be symmetric. These configurations can provide an improved seal for reducing leakage into and out of the pump chamber 30.

[0052] Figure 2 shows a second embodiment of a scroll pump seal. The scroll pump seal 100 is similar to the seal 10, but has an additional second seal element 36. The second seal element 36 includes at least one protrusion extending from the radially inner surface of the annular body 18. The second seal element 36 is integral with the annular body 18 and is made of the same material as the body 18. The protrusion is angled toward the axial end face of the body 18, and the protrusion is particularly excellent in preventing the flow of fluid flowing out from the pump chamber 30 through the shaft bearing to the peripheral environment.

[0053] In use, the scroll pump seal 100 is similar to the seal 10, except that the second seal element 36 provides a seal between the annular body 18 and the shaft 16, preventing leakage between these components before, during, and after operation of the scroll pump, i.e., when the shaft 16 is rotated by a motor and a relative orbiting motion between the scrolls 12, 14 is brought about.

[0054] Modifications to the described embodiments will be apparent to those skilled in the art. For example, at least one protrusion of the second seal element 36 can be angled towards or away from the pump chamber 30 to prevent leakage from or into the pump chamber 30. At least one protrusion of the second seal element 36 may comprise two protrusions. At least one protrusion of the second seal element 36 may not be angled, i.e., it can be perpendicular to the radially inner surface of the body 18. When there are two protrusions, the protrusions can form a V-shape. Alternatively, they can be at different angles. The protrusions of the first seal element 20 and the second seal element 36 may not be the same. The second seal element 36 can comprise intermediate protrusions similar to those described later. These configurations can provide an improved seal to reduce leakage into and out of the pump chamber 30.

[0055] Figure 3 shows a third embodiment of a scroll pump seal. The scroll pump seal 1000 is similar to seal 10, but an urging mechanism 40 and a first seal element 20 with an intermediate protrusion 38 are added.

[0056] The intermediate protrusion 38 extends perpendicular to the axial end face of the annular body 18 between the inner annular protrusion 22 and the outer annular protrusion 24. Similar to the inner and outer annular protrusions 22, 24, the intermediate protrusion 38 is integral with the annular body 18 and made of the same material as the annular body 18. The intermediate protrusion 38 provides an additional seal that further blocks the flow of fluid between the first scroll 12 and the second scroll 14, thereby reducing leakage.

[0057] The urging mechanism 40 is composed of a spring disposed at the axial end of the annular body 18 on the side opposite to where the first seal element 20 is disposed. Thus, the urging mechanism 40 is configured to push the first scroll 12, and the inner and outer annular protrusions 22, 24, and the intermediate protrusion 36 are urged towards the second scroll 14 to enhance the strength of the seal.

[0058] In use, the scroll pump seal 1000 is similar to the seal 10, except that the biasing member 40 biases the inner and outer annular protrusions 22, 24 and the intermediate protrusion 38 towards the second scroll 14, helping to maintain the seal especially during the relative orbiting motion between the first and second scrolls 12, 14.

[0059] Modifications to the described embodiments will be apparent to those skilled in the art. For example, the intermediate protrusion 38 can be angled. Further, the biasing member 40 does not necessarily have to be a spring and can be any suitable mechanism. The biasing mechanism 40 can be integral with the annular body such that the structure of the annular body inherently provides the biasing force. These arrangements can provide an improved seal for reducing leakage into and out of the pump chamber 30.

[0060] FIG. 4 shows a flowchart of a method of positioning a scroll pump seal, such as one of the scroll pump seals 10, 100, 1000. In step 1010, the scroll pump seal is mounted around a shaft of the scroll pump, such as shaft 16. In step 1020, the scroll pump seal is fixed to one of the first and second scrolls of the scroll pump, such as scroll 12 and scroll 14, and the first seal element of the scroll pump seal contacts the other of the first and second scrolls where the annular seal is not relatively fixed. The first and second scrolls are configured to perform a relative orbiting motion.

[0061] In other words, the embodiment provides a seal (scroll pump seal) for sealing a revolution or rotation movement. One seal in some embodiments comprises four lips (two pairs) and can prevent internal and external leakage. The first pair contacts the orbiting scroll and the second pair contacts the shaft. This is fitted into the perforation (opening) of the fixed scroll and is sealed with an O-ring by a piston O-ring in a groove. Sealing can also be performed on a plane perpendicular to the shaft and on the shaft. Effective sealing can be achieved even with a light pressure difference up to 1 bar. By using lips facing in opposite directions, bed-in is accelerated and the sealing function is improved.

[0062] This sealing solution improves UK Patent No. 2503723 and adds sealing against unwanted loss of the medium pumped from the pump. This is expandable and sealing can also be added on the shaft.

[0063] The seal is made of the same material as the tip seal which can be EKL HS11041 (PA, PTFE filled) or any polymer material with good sealing properties and sufficient wear resistance. This is based on the idea that there is always a slight overpressure (1, 2 bar(a)) at the center of the fixed scroll, and most of the gas tries to escape through the exhaust port with the least resistance. However, the gas may escape from the mechanism around the front shaft bearing to the motor stator. When the pump stops and the pressure inside the mechanism equalizes to be lower than the ambient atmospheric pressure, the reverse problem occurs. The embodiments are intended to prevent the sudden influx of ambient air into the pump mechanism. The solutions to both of these problems can be found in the form of providing a plurality of lips (protrusions) facing opposite directions on the seal surface facing perpendicular to the shaft, and another set of lips (protrusions) facing opposite directions in contact with the shaft. The quality of the seal surface is important for the leak tightness and lifespan of the seal. In some embodiments, grease can be filled between the lip pairs to improve the sealing effect. Compared with conventional seals, this can provide additional gas retention force, provide an opportunity to seal the shaft surface, and achieve a higher surface quality. Substantially, since any lip becomes some kind of obstacle to the gas, a configuration with a plurality of lips can improve the seal.

[0064] The embodiments provide a sealing solution where a crown-shaped seal element is actuated by a spring and further sealed around by an O-ring. A leak tightness value of at least 10E-3 mbar*l / s can be achieved. The spring can be incorporated into the seal by carefully designing it with respect to the required rigidity and flexibility.

[0065] In this specification, exemplary embodiments of the present invention have been disclosed in detail with reference to the accompanying drawings. However, the present invention is not limited to the exact embodiments, and it is understood that various changes and modifications can be made by those skilled in the art without departing from the scope of the present invention as defined by the appended claims and their equivalents.

Description of Symbols

[0066] 10, 100, 1000 seals 12, 14 scrolls 16 shaft 18 body 20 first seal element 22, 24 protrusions 26 O-ring 28 groove 30 pump chamber 32 tip seal 34 wrap 36 second seal element 38 intermediate protrusion 40 biasing member

Claims

1. A scroll pump seal for preventing the inflow of fluid into a pump chamber defined between a first scroll and a second scroll of a scroll pump and the outflow of fluid from the pump chamber, wherein the first scroll and the second scroll are configured to revolve relative to each other, an annular body attached around a shaft of the scroll pump and adapted to be fixed to one of the first scroll and the second scroll, a first seal element having an inner annular protrusion and an outer annular protrusion extending from an axial end face of the annular body, comprising, wherein the inner annular protrusion and the outer annular protrusion are configured to contact the other of the first scroll and the second scroll relative to which the annular body is not fixed, the scroll pump seal.

2. The scroll pump seal according to claim 1, wherein the inner annular protrusion and the outer annular protrusion extend at a predetermined angle such that the inner annular protrusion is angled toward the shaft and the outer annular protrusion is angled toward the pump chamber.

3. The scroll pump seal according to claim 1 or 2, wherein the inner annular protrusion and the outer annular protrusion together define a V-shape.

4. The scroll pump seal according to any one of claims 1 to 3, further comprising a second seal element for preventing the flow of fluid between the annular body and the shaft of the scroll pump, the second seal element having a further annular protrusion extending from a radially inner surface of the annular body.

5. The scroll pump seal according to claim 4, wherein the further annular protrusion is angled toward the axial end face having the first seal element.

6. The scroll pump seal according to claim 4 or 5, wherein the second seal element has a second further annular protrusion.

7. The scroll pump seal according to claim 6, wherein the further annular protrusion and the second further annular protrusion together define a V-shape.

8. The scroll pump seal according to any one of claims 1 to 7, wherein the scroll pump seal includes a biasing member configured to bias the first seal element toward the other one of the orbiting scroll and the fixed scroll.

9. The scroll pump seal according to claim 8, wherein the biasing member includes a spring.

10. The scroll pump seal according to claim 8 or 9, wherein the biasing member is integral with the annular body.

11. The scroll pump seal according to any one of claims 1 to 10, wherein the first seal element includes an intermediate annular protrusion extending from the axial end surface of the annular body between the inner annular protrusion and the outer annular protrusion.

12. The scroll pump seal according to any one of claims 1 to 11, wherein the annular body includes an annular groove for accommodating an O-ring for fixing the annular body to one of the first scroll and the second scroll and blocking the flow of fluid between the annular body and the one of the first scroll and the second scroll.

13. The scroll pump seal according to any one of claims 1 to 12, wherein the scroll pump seal is made of at least one polymer, and optionally, the at least one polymer is a Teflon-filled polyamide.

14. A first scroll and a second scroll configured to perform a relative orbiting motion; A shaft configured to provide a relative orbiting motion between the first scroll and the second scroll when driven; A scroll pump seal according to any one of claims 1 to 13; Comprising: The scroll pump seal is attached around the shaft and fixed to one of the first scroll and the second scroll.

15. The scroll pump according to claim 14, wherein the scroll pump seal is made of the same material as the tip seals of the first scroll and the second scroll.

16. A method for positioning a scroll pump seal, comprising: Attaching the scroll pump seal according to any one of claims 1 to 13 around the shaft. A step of fixing the scroll pump seal to one of the first scroll and the second scroll, wherein the first seal element contacts the other of the first scroll and the second scroll to which the annular seal is not relatively fixed, and the first scroll and the second scroll are configured to revolve relative to each other, the step; A method including.

Citation Information

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