Apparatus, system and method for automated material delivery to a dispensing machine

Abstract

In some aspects, a material delivery device includes a plurality of side walls, a top wall, a floor, an interior space, and a rear wall, and further includes a machine-readable code device, at least one power connector configured to provide power to components of the material delivery device, at least one sensor configured to sense a physical characteristic associated with the material delivery device and / or a service element to generate, in part, equipment-related information, a transceiver configured to transmit the equipment-related information to a controller, and a retention mechanism disposed within the interior space and configured to receive and / or securely retain the service element.

Description

[Technical Field]

[0001] [CROSS-REFERENCE TO RELATED APPLICATIONS] This application claims the benefit of U.S. Provisional Patent Application No. 63 / 416,654, filed October 17, 2022, which is incorporated by reference in its entirety and for all purposes as if fully set forth herein.

[0002] [Technical field] FIELD OF THE DISCLOSURE The present disclosure relates to an apparatus for automated material delivery to a dispensing machine. The present disclosure also relates to a system for automated material delivery to a dispensing machine. Furthermore, the present disclosure also relates to a method for automated material delivery to a dispensing machine. [Background technology]

[0003] Device manufacturing, particularly semiconductor manufacturing and electronic device manufacturing, typically occurs in clean rooms. In this regard, the use of clean rooms can be a central part of the manufacturing process. More specifically, the manufacturing can be performed in a hermetically sealed environment to improve yield, and automated material handling systems (AMHS) are responsible for transporting wafers from machine to machine.

[0004] In this regard, front-opening unified pods (FOUPs) are typically used to transport silicon wafers between various process tools within a facility (fab) using an automated material handling system (AMHS). However, additional supplies (material feeds) are required for certain manufacturing machines, such as dispensing machines. In this regard, personnel must enter the cleanroom to provide additional supplies to these specific manufacturing machines. This can result in potential contamination of the cleanroom and potentially adversely affect the quality of the resulting equipment.

[0005] Therefore, there is a need for an apparatus, system, and method for automated material delivery to a machine that reduces cleanroom contamination and limits adverse effects on the quality of the resulting electronic device. Further, there is a need for an apparatus, system, and method for automated material delivery to a machine that provides data, information, etc. for operation, analysis, etc. of the various systems associated with the machine. Summary of the Invention

[0006] The aforementioned needs are met to a large extent by the present disclosure, which in one aspect is an apparatus, system, and method for automated material delivery to machines that reduces cleanroom contamination and limits the impact on the quality of the resulting electronic devices.

[0007] In one general aspect, a material delivery device includes a plurality of side walls, a top wall, a floor, an interior space, and a rear wall. The material delivery device further includes a machine-readable code device. The material delivery device further includes at least one power connector configured to provide power to components of the material delivery device. The material delivery device also includes at least one sensor configured to sense a physical characteristic associated with the material delivery device and / or the service element to generate, in part, device-related information. The material delivery device further includes a transceiver configured to transmit the device-related information to a controller. The material delivery device further includes a retention mechanism disposed within the interior space and configured to receive and / or securely retain the service element.

[0008] In one general aspect, a material delivery process includes packaging a material delivery device. The material delivery process further includes configuring the material delivery device with a plurality of side walls, a top wall, a floor, an interior space, and a rear wall. The material delivery process further includes configuring the material delivery device with a machine-readable code device. The material delivery process also includes configuring the material delivery device with at least one power connector configured to provide power to components of the material delivery device. The material delivery process further includes configuring the material delivery device with at least one sensor for sensing a physical characteristic associated with the material delivery device and / or the service element to partially generate equipment-related information. The material delivery process further includes configuring the material delivery device with a transceiver for transmitting the equipment-related information to a controller. The material delivery process further includes configuring the material delivery device with a retention mechanism disposed within the interior space to receive and / or securely retain the service element.

[0009] There have therefore been outlined, rather broadly, certain aspects of the disclosure in order that the detailed description thereof may be better understood, and in order that the present contribution to the art may be better appreciated. Of course, there are additional aspects of the disclosure. These will be described below and will form the subject matter of the claims appended hereto.

[0010] In this regard, before describing at least one aspect of the present disclosure in detail, it is to be understood that the present disclosure is not limited in its application to the details of construction and the arrangement of components set forth in the following description or illustrated in the drawings. The disclosure is capable of being practiced and carried out in various ways in addition to those described. Also, it is to be understood that the phraseology and terminology used herein, as well as the abstract, are for the purpose of description and should not be regarded as limiting.

[0011] As such, those skilled in the art will appreciate that the conception upon which this disclosure is based may readily be utilized as a basis for the designing of other structures, methods and systems for carrying out the several purposes of the present disclosure. It is important, therefore, that the claims be regarded as including such equivalent constructions insofar as they do not depart from the spirit and scope of the present disclosure. [Brief explanation of the drawings]

[0012] [Figure 1] FIG. 1 illustrates an exemplary implementation of a system for automated material delivery according to some aspects of the present disclosure.

[0013] [Figure 2] FIG. 2 shows a partial view of the system according to FIG.

[0014] [Figure 3] FIG. 3 shows another partial view of the system according to FIG.

[0015] [Figure 4] FIG. 4 shows a front perspective view of a material delivery device according to some embodiments of the present disclosure.

[0016] [Figure 5] FIG. 5 shows a side view of the material delivery device according to FIG.

[0017] [Figure 6] FIG. 6 illustrates a side view of a material delivery device and service element according to some aspects of the present disclosure.

[0018] [Figure 7] FIG. 7 shows a cross-sectional plan view of a material delivery device according to some embodiments of the present disclosure.

[0019] [Figure 8] FIG. 8 shows a cross-sectional side view of a material delivery device according to some embodiments of the present disclosure.

[0020] [Figure 9] FIG. 9 illustrates an exemplary implementation of a transport system according to some aspects of the present disclosure.

[0021] [Figure 10] FIG. 10 illustrates another exemplary implementation of a transport system according to some aspects of the present disclosure.

[0022] [Figure 11] FIG. 11 illustrates an exemplary implementation of a modular apparatus and dispensing machine according to some aspects of the present disclosure.

[0023] [Figure 12] FIG. 12 shows an example implementation of a robot implemented by several different components of the present disclosure.

[0024] [Figure 13] FIG. 13 illustrates a side view of an example implementation of a service element according to some aspects of the present disclosure.

[0025] [Figure 14] FIG. 14 shows a floor plan of an exemplary implementation of a service element according to FIG.

[0026] [Figure 15] FIG. 15 shows a partial side view of a dispensing machine according to some embodiments of the present disclosure.

[0027] [Figure 16A] FIG. 16A shows a cross-sectional plan view of a material delivery device and service element according to some aspects of the present disclosure.

[0028] [Figure 16B] FIG. 16B shows a cross-sectional side view of the material delivery device and service element according to FIG. 16A.

[0029] [Figure 16C]FIG. 16C shows a cross-sectional plan view of a material delivery device and service element according to some embodiments of the present disclosure.

[0030] [Figure 16D] FIG. 16D shows a cross-sectional side view of a material delivery device and service element according to some embodiments of the present disclosure.

[0031] [Figure 17] FIG. 17 illustrates an exemplary exchange operation according to some aspects of the present disclosure.

[0032] [Figure 18] FIG. 18 illustrates a further exemplary exchange operation according to some aspects of the present disclosure.

[0033] [Figure 19] FIG. 19 illustrates a further exemplary exchange operation according to some aspects of the present disclosure.

[0034] [Figure 20] FIG. 20 illustrates a further exemplary exchange operation according to some aspects of the present disclosure.

[0035] [Figure 21] FIG. 21 illustrates another implementation of a modular apparatus and / or dispensing machine according to some aspects of the present disclosure.

[0036] [Figure 22] FIG. 22 illustrates a data collection system in accordance with the principles of the present disclosure.

[0037] [Figure 23] FIG. 23 illustrates a process for implementing a system for automated material delivery and / or a data collection system in accordance with the principles of the present disclosure. DETAILED DESCRIPTION OF THE INVENTION

[0038] The present disclosure will now be described with reference to the drawings, wherein like reference numerals refer to like parts throughout. Several aspects of the present disclosure advantageously provide apparatus, systems, and methods for automated material delivery to dispensing machines that reduce cleanroom contamination and limit adverse effects on the quality of the resulting electronic devices.

[0039] In semiconductor manufacturing, front-opening unified pods (FOUPs) are used to transport silicon wafers between various process tools within a facility (factory) using an automated material handling system (AMHS). This disclosure describes apparatus, systems, and methods for implementing FOUPs configured to transport manufacturing supplies (a type of material) between different locations within a facility (factory) using existing AMHS infrastructure. In some aspects, the manufacturing supplies may include one or more material dispensing supplies. In some aspects, the manufacturing supplies may include one or more service components, maintenance components, consumable components (consumables), service items, maintenance items, consumable items (consumable items), service elements, maintenance elements, consumable elements (consumable elements), and / or the like (hereinafter referred to as “service elements” for brevity of disclosure). In some aspects, the material dispensing supplies or service elements may include one or more valves, fluid syringes, cleaning strips, reference tiles, purge cups, scale cups, cleaning strips, and / or other service elements. The physical interaction between a FOUP and an AMHS is governed by several existing SEMI standards, and therefore, apparatus, systems, and methods for packaging a FOUP may be configured with packaging to the FOUP largely limited to the internal features of the FOUP.

[0040] In some aspects, the present disclosure describes apparatus, systems, and methods for populating a FOUP that can be configured to carry several different types of service elements, including different combinations of valves, fluid syringes, cups, cleaning strips, reference tiles, purge cups, scale cups, cleaning strips, and / or other service elements, depending on the needs of the customer and / or the needs of the particular machine.

[0041] FIG. 1 illustrates an exemplary implementation of a system for automated material delivery according to some aspects of the present disclosure.

[0042] FIG. 2 shows a partial view of the system according to FIG.

[0043] FIG. 3 shows another partial view of the system according to FIG.

[0044] In particular, FIG. 1 illustrates an exemplary implementation of a system 100 for automated material delivery configured to provide delivery of service elements 200 to a dispensing machine 300 using a material delivery device 400 within an equipment manufacturing facility 500. In this regard, service elements 200 as contemplated by the present disclosure are distinct from components manufactured within the equipment manufacturing facility 500. For example, silicon wafers are not consumed during manufacturing but are instead altered (modified). Furthermore, a service element 200 may include a single service element, but may also include multiple service elements, multiple service elements of the same type, and / or multiple service elements of different types. Furthermore, in some aspects, a service element 200 may include multiple service elements of different types combined into one unit to form a service package or service station. As shown in FIG. 1, the service element 200 may initially be located at a supply station 101, and the material delivery device 400 may initially be located at a load station 102. The material delivery device 400 may be configured, as described further below, to receive the service element 200 at the load station 102. The material delivery device 400, together with the service element 200, may then be transported within the equipment manufacturing facility 500 utilizing the conveyance system 600 along the transport path 103 within the equipment manufacturing facility 500.

[0045] Thereafter, transport system 600 (shown in FIG. 1 but not in detail) may be configured to move material delivery device 400 along with service element 200 to delivery station 104. Thereafter, service element 200, with or without material delivery device 400, may be moved along transport path 105 and / or transport path 106 to dispensing machine 300 and placed thereon. System for automated material delivery 100 may then be configured to provide and / or deliver service element 200 to dispensing machine 300. As described further below, some embodiments may include additional intermediate devices.

[0046] Additionally, the material delivery device 400, or another implementation of the material delivery device 400, may be configured to receive the consumed portion of the service element 200 from the dispensing machine 300. In particular, the system for automated material delivery 100 may be configured to transport the consumed portion of the service element 200 along the transport path 105 and / or the transport path 106 to the station 107. The consumed portion of the service element 200 may then be loaded into the material delivery device 400 at the station 107. Once the consumed portion of the service element 200 is loaded into the material delivery device 400, the material delivery device 400, along the transport path 108, may be transported by the transport system 600 to deliver the consumed portion of the service element 200 from the dispensing machine 300 to the unload station 109. The consumed portion of the service element 200 may then be removed from the material delivery device 400 and placed in the disposal station 110.

[0047] In some aspects, operation, control, monitoring, etc. of the system for automated material delivery 100, the service elements 200, the material delivery devices 400, the transport system 600, etc. may be provided by a controller 502. The controller 502 may be responsive to a human worker, a remote human worker 112, another system, etc.

[0048] 2 , personnel may load service elements 200 onto material delivery equipment 400. Specifically, personnel may be located at load station 102 outside of equipment manufacturing facility 500. Thus, personnel outside of equipment manufacturing facility 500 may interact with material delivery equipment 400 and / or service elements 200, reducing the likelihood of contaminating equipment manufacturing facility 500. More specifically, at load station 102, personnel may load service elements 200 from supply station 101 into material delivery equipment 400 at load station 102. Thereafter, material delivery equipment 400 may be transported into equipment manufacturing facility 500 along transport path 103 within equipment manufacturing facility 500 utilizing transport system 600, as described above.

[0049] Alternatively or additionally, an automated system may also load the service element 200 onto the material delivery device 400 at the load station 102. More specifically, at the load station 102, the automated system may load the service element 200 from the supply station 101 onto the material delivery device 400 at the load station 102. The material delivery device 400 may then be transported into the device manufacturing facility 500 utilizing the transport system 600 along the transport path 103 within the device manufacturing facility 500, as previously described. In some aspects, the automated system may include a robot 180 as shown in FIG. 12 .

[0050] As described further below, the material delivery device 400 and / or the service element 200, etc., may be configured with a machine-readable code device. Additionally, the system 100 for automated material delivery may include multiple implementations of a machine code reading device 190 configured to read machine-readable code devices of the material delivery device 400 and / or the service element 200, etc. As shown in FIG. 2 , the system 100 for automated material delivery may include an implementation of the machine code reading device 190 located at the load station 102. Once the service element 200 is loaded into the material delivery device 400, the machine code reading device 190 may read a machine-readable code associated with the service element 200 and / or the material delivery device 400.

[0051] 3 , the material delivery device 400 may be transported by a transport system 600 to the dispensing machine 300 along a transport path 103 within the equipment manufacturing facility 500. In some aspects, the material delivery device 400 may be delivered by the transport system 600 to a stocker apparatus 506 and / or a module apparatus 504 before the material delivery device 400 and / or service elements 200 are delivered to the dispensing machine 300. However, in other aspects, the material delivery device 400 and / or service elements 200 may be delivered by the transport system 600 to the dispensing machine 300 without being delivered to the stocker apparatus 506.

[0052] The modular apparatus 504 may be configured to receive the material delivery apparatus 400 at the delivery station 104. The modular apparatus 504 may then remove the service element 200 from the material delivery apparatus 400. In some aspects, the service element 200 may be delivered from the modular apparatus 504 to the dispensing machine 300 along the transport path 105 and / or the transport path 106. In some aspects, the service element 200 may traverse the transport path 105 and / or the transport path 106 and then be placed in the dispensing machine 300.

[0053] 3 , the system 100 for automated material delivery may include an implementation of a machine code reading device 190 located at the delivery station 104 and / or the station 107. Once the service element 200 and / or the material delivery device 400 is located at the station 107 and / or the delivery station 104, the machine code reading device 190 may read a machine-readable code associated with the service element 200 and / or the material delivery device 400.

[0054] 3, automated material delivery system 100 may include implementations of machine code reading devices 190 located on transport path 105, transport path 106, and / or dispensing machine 300. Once service element 200 and / or material delivery device 400 are located on transport path 105, transport path 106, and / or dispensing machine 300, machine code reading device 190 may read a machine-readable code associated with service element 200 and / or material delivery device 400.

[0055] FIG. 4 shows a front perspective view of a material delivery device according to some embodiments of the present disclosure.

[0056] FIG. 5 shows a side view of the material delivery device according to FIG.

[0057] In particular, FIG. 4 illustrates an exemplary implementation of a material delivery apparatus 400 that may be used in combination with the system for automated material delivery 100, service element 200, dispensing machine 300, device manufacturing facility 500, and / or transport system 600, etc., described herein. In some aspects, the material delivery apparatus 400 may have the form of a front-opening unified pod (FOUP). A FOUP is a specialized enclosure, which may be made of plastic, designed to securely and safely hold silicon wafers in a controlled environment and allow the wafers to be transferred between machines for processing or measurement. In this regard, the material delivery apparatus 400 of the present disclosure may be configured to be implemented with the service element 200. In some aspects, the material delivery apparatus 400 of the present disclosure may be configured to receive, securely hold, and / or perform the like, the service element 200 at the load station 102, the station 107, and / or the like. In certain aspects, material delivery device 400 may be configured to securely hold service element 200 while being moved by transport system 600, such as along transport path 103 and / or transport path 108. In certain aspects, material delivery device 400 may be configured to provide service element 200 at delivery station 104, transport path 105, transport path 106, dispensing machine 300, and / or unload station 109, etc.

[0058] In this regard, the material delivery apparatus 400 may include a plurality of sidewalls 402, a top wall 404, a floor 406, and an interior space 408. The material delivery apparatus 400 may include two implementations of the sidewalls 402 on either side of the top wall 404 and the interior space 408. The sidewalls 402 may be disposed in a plane parallel to the Y axis within the X axis. Both of the sidewalls 402 may extend along the Y axis from the floor 406 to the top wall 404. Furthermore, the top wall 404 and the floor 406 may extend in a plane parallel to the Z axis and the X axis between two adjacent implementations of the sidewalls 402.

[0059] A connection assembly 410 may be disposed on the top wall 404 of the material delivery device 400. The connection assembly 410 may be configured to connect to a component of a transport system 600 to allow the material delivery device 400 to be transported by the transport system 600 throughout the device manufacturing facility 500. Additionally, the material delivery device 400 may include a handle 412. The handles 412 may be disposed on each of the side walls 402 and may be utilized by personnel to move the material delivery device 400, for example, when the material delivery device 400 is at a load station 102 outside the device manufacturing facility 500.

[0060] Further, the material delivery apparatus 400 may include an opening 414. The opening 414 may be disposed in a plane parallel to the Y-axis and the Z-axis. The opening 414 may be defined by a frame 416 attached to and connected to the top wall 404 and / or each side wall 402, etc. The opening 414 may provide access to the interior space 408. Furthermore, the opening 414 may be covered by a door 420, as shown in FIG. 7 . In this regard, the material delivery apparatus 400 may further include structure for supporting the door 420 and / or allowing the door 420 to open, etc. In some aspects, the material delivery apparatus 400 may be configured to allow the door 420 to slide open along the Y-axis, the X-axis, and / or the Z-axis. In this aspect, the material delivery apparatus 400 may include structure configured to allow the door 420 to slide open. Alternatively or additionally, the material delivery device 400 may be configured to allow the door 420 to rotate open about a Y-axis, an X-axis, and / or a Z-axis. In this regard, the material delivery device 400 may include structure configured to allow the door 420 to rotate, such as a hinge. Further, the opening 414 may be configured to receive the service element 200.

[0061] 5 , the material delivery apparatus 400 may have a rear wall 426. The rear wall 426 may extend from the floor 406 to the top wall 404, or the rear wall 426 may extend from a side wall 402 on one side of the material delivery apparatus 400 to a side wall 402 on the other side of the material delivery apparatus 400. The rear wall 426 may be disposed on the opposite side of the frame 416. Thus, the material delivery apparatus 400 may provide an enclosed space between the top wall 404, the side walls 402, the rear wall 426, the floor 406, and / or the door 420, etc.

[0062] Additionally, material delivery device 400 may further include a machine-readable code 422. Machine-readable code 422 may be implemented as one or more of a radio frequency identification (RFID) device, a barcode, a QR code, and / or a Data Matrix (DM) code, etc. In one aspect, machine-readable code 422 may be a machine-readable code that may be configured to be readable by machine code reader 190. In one aspect, machine-readable code 422 may be an alphanumeric code that may be manually entered into a tracking device.

[0063] 5 , the material delivery device 400 may include at least one sensor 490 for sensing a physical property within and / or associated with the material delivery device 400 and / or the service element 200. The at least one sensor 490 may include one or more of an accelerometer, a temperature sensor, an IR sensor (infrared sensor), a pressure sensor, a light sensor, an ultrasonic sensor, a humidity sensor, a tilt sensor, a level sensor, and / or a motion sensor, etc. The material delivery device 400 may further include an analog-to-digital converter, a filter, etc. for processing signals associated with any sensor. In one aspect, the temperature sensor may be a thermocouple, a thermistor, etc. In response to the machine code reader 190, the machine readable code 422 may provide one or more of the aforementioned physical quantities sensed by the sensor as part of the device-related information 560 to the controller 502, the data collection system 590 shown in FIG. 22, and / or another computer system, etc.

[0064] Additionally, the material delivery apparatus 400 may include at least one power connector 492 configured to provide power to various aspects of the material delivery apparatus 400. The at least one power connector 492 may be connected to a power source to receive power. Additionally, the at least one power connector 492 may provide power to a battery to charge the battery. The battery may be housed within the material delivery apparatus 400 and may provide power to various components of the material delivery apparatus 400. In some aspects, the at least one power connector 492 may be connected to the transport system 600.

[0065] Additionally, the material delivery device 400 may be configured for wireless communication. In this regard, the material delivery device 400 may include a transceiver 494, etc. The transceiver 494 of the material delivery device 400 may provide wireless signal processing as needed to access a network for services, etc., via a communication channel as defined herein. Additionally, the material delivery device 400 may include a processor, and the transceiver 494 may be configured to process command functions, handle data transfers, provide other services, transmit device-related information 560 to the controller 502, the data collection system 590 shown in FIG. 22 and / or another computer system, etc. In some aspects, the material delivery device 400 may implement all of the components described herein, or the material delivery device 400 may implement a subset of the components described herein.

[0066] FIG. 6 illustrates a side view of a material delivery device and service element according to some aspects of the present disclosure.

[0067] 6 illustrates a scenario for loading and / or unloading a service element 200 onto a material delivery apparatus 400. In some aspects, the material delivery apparatus 400 may be configured to accept the service element 200 at the load station 102, the station 107, and / or similar locations, as indicated by arrow 460. Additionally, the material delivery apparatus 400 may be configured to deliver the service element 200 at the delivery station 104, the unload station 109, and / or similar locations, as indicated by arrow 462. In particular, movement of the service element 200 into and out of the material delivery apparatus 400 may occur along the X-axis, although movement of the service element 200 may additionally include movement in other axes.

[0068] 6, service element 200 may further include machine-readable code 222. Machine-readable code 222 may be implemented as one or more of a radio frequency identification (RFID) device, a barcode, a QR code, and / or a Data Matrix (DM) code, etc. In one aspect, machine-readable code 222 may be a machine-readable code that may be configured to be readable by machine code reader 190. In one aspect, machine-readable code 222 may be an alphanumeric code that may be manually entered into a tracking device.

[0069] In some aspects, the machine code reading device 190 may read the machine readable code 422 of the material delivery device 400 and the machine readable code 222 of the service element 200 at the load station 102, and / or the machine code reading device 190 may read the machine readable code 422 of the material delivery device 400 and the machine readable code 222 of the service element 200 at the delivery station 104, and / or the machine code reading device 190 may read the machine readable code 422 of the material delivery device 400 and the machine readable code 222 of the service element 200 at the transport path 105, and / Or, the machine code reading device 190 may read the machine readable code 422 of the material delivery device 400 and the machine readable code 222 of the service element 200 at the conveying path 106, and / or the machine code reading device 190 may read the machine readable code 422 of the material delivery device 400 and the machine readable code 222 of the service element 200 at the station 107, and / or the machine code reading device 190 may read the machine readable code 422 of the material delivery device 400 and the machine readable code 222 of the service element 200 at the unload station 109, etc.

[0070] In some aspects, the machine code reading device 190 may read the machine-readable code 422 of the material delivery device 400 and the machine-readable code 222 of the service element 200 and provide data from the machine-readable code 422 and / or the machine-readable code 222 to the controller 502. In this regard, the controller 502 may verify that the machine-readable code 422 properly identifies the particular implementation of the material delivery device 400. If the controller 502 determines that the material delivery device 400 is incorrect, the controller 502 may provide an error indication, a shutdown of operation, or the like. Similarly, the controller 502 may verify that the machine-readable code 222 properly identifies the particular implementation of the service element 200. If the controller 502 determines that the service element 200 is incorrect, the controller 502 may provide an error indication, a shutdown of operation, or the like.

[0071] In one aspect, the machine code reading device 190 may be implemented as an RFID reader configured to generate interrogating radio waves. The interrogating radio waves from the RFID reader may be received by the machine-readable code 422 and / or the machine-readable code 222 implemented as an RFID device. In this aspect, the RFID device may automatically identify the machine-readable code 422 of the material delivery device 400 and / or the machine-readable code 222 of the service element 200 in response to the interrogating radio waves from the RFID reader. The machine-readable code 422 and / or the machine-readable code 222 may contain and transmit electronically stored information, including product-related information. In one aspect, the machine-readable code 422 and / or the machine-readable code 222 may collect energy from the RFID reader that transmits the interrogating radio waves. In one aspect, the RFID device may have a local power source (e.g., a battery) and may operate hundreds of meters away from the RFID reader.

[0072] In one embodiment, the machine-readable code 422 and / or the machine-readable code 222 may be implemented as a QR code. In certain embodiments, a camera device may function as a barcode reader or a QR code reader. A QR code (Quick Response Code) is a type of matrix barcode (two-dimensional barcode). A barcode is a machine-readable optical label that contains information about the material delivery device 400 and / or service element 200 to which it is attached. QR codes use a number of standardized encoding modes, including numeric, alphanumeric, byte / binary, etc., to efficiently store product-related information. QR codes may include black modules arranged in a square grid on a white background, can be read by a camera device or other imaging device, and can be processed using Reed-Solomon error correction until the image is properly interpreted. Product-related information can then be extracted from patterns present in both the horizontal and vertical components of the image.

[0073] In one aspect, machine-readable code 422 and / or machine-readable code 222 may be implemented as a Data Matrix (DM) code. In certain aspects, a camera device may function as a Data Matrix code reader. A Data Matrix code is a two-dimensional matrix barcode containing black and white "cells" or modules arranged in a square or rectangular pattern. A Data Matrix code may be implemented with an ECC-200 version of Data Matrix and may include Reed-Solomon coding for error and erasure recovery. Other protocols and / or versions of Data Matrix are also contemplated.

[0074] FIG. 7 shows a cross-sectional plan view of a material delivery device according to some embodiments of the present disclosure.

[0075] FIG. 8 shows a cross-sectional side view of a material delivery device according to some embodiments of the present disclosure.

[0076] In particular, FIG. 7 illustrates a cross-sectional view of the material delivery device 400 with the service element 200 loaded therein. As shown in FIG. 7 , the material delivery device 400 may further include a retention mechanism 424. In certain aspects, the retention mechanism 424 may be configured to receive, securely hold, and / or the like, the service element 200 at the load station 102, the station 107, and / or a similar location. In certain aspects, the retention mechanism 424 may be configured to securely hold the service element 200 while it is moved by the transport system 600, such as along the transport path 103 and / or the transport path 108. In certain aspects, the retention mechanism 424 may be configured to service the service element 200 at the delivery station 104, the transport path 105, the transport path 106, the dispensing machine 300, and / or the unload station 109, etc.

[0077] In some aspects, the retention feature 424 may be implemented as a resilient component, a gripper component, a material component, a friction fit component, a holder component, etc. In some aspects, the retention feature 424 may engage a surface of the service element 200, may surround the service element 200, and / or may perform the same function.

[0078] In some aspects, the retention feature 424 may engage with the service element 200 at a rear surface of the service element 200 adjacent the rear wall 426, as shown in FIG. 7, and / or in some aspects, the retention feature 424 may engage with the service element 200 at a side surface of the service element 200 adjacent the side wall 402, as shown in FIG. 7, and / or in some aspects, the retention feature 424 may engage with the service element 200 at a bottom surface of the service element 200 adjacent the floor 406, and / or in some aspects, the retention feature 424 may engage with the service element 200 at a top surface of the service element 200 adjacent the top wall 404, and / or in some aspects, the retention feature 424 may engage with the service element 200 at a front surface of the service element 200 adjacent the door 420, etc.

[0079] In some aspects, the retention mechanism 424 may be rigidly attached to the material delivery device 400, the interior space 408 of the material delivery device 400, the rear wall 426 of the material delivery device 400, the side wall 402 of the material delivery device 400, the floor 406 of the material delivery device 400, and / or the top wall 404 of the material delivery device 400, etc. Attachment of the retention mechanism 424 to the material delivery device 400 may include mechanical fasteners, adhesives, etc.

[0080] FIG. 9 illustrates an exemplary implementation of a transport system according to some aspects of the present disclosure.

[0081] In particular, FIG. 9 illustrates a transport system 600 implemented as an AMHS 602, which may be employed to automatically store and transport service elements 200 and / or material delivery equipment 400 within the equipment manufacturing facility 500. As shown in FIG. 9, the AMHS 602 may include an overhead hoist transport subsystem, which may include a suspended track 608 and multiple overhead hoist transport vehicles 606, which may be configured to travel on the suspended track 608 between, for example, the load station 102, the delivery station 104, the station 107, and / or the unload station 109 within the equipment manufacturing facility 500. Further, multiple overhead hoist transport vehicles 606 may be configured to travel along the transport path 108 and / or the transport path 103. In a typical mode of operation, the service elements 200 may be transported within the material delivery equipment 400. The overhead hoist transport vehicle 606 may travel along a suspended track 608 and may stop at suitable locations to load and unload the service element 200 from the material delivery apparatus 400, such as at the load station 102, the delivery station 104, the station 107, and / or the unload station 109. In the AMHS 602 implementation of the transport system 600, the material delivery apparatus 400 may be loaded and / or unloaded from the overhead hoist, such as at the load station 102, the delivery station 104, the station 107, and / or the unload station 109, by an unloading / loading system 607, which may be configured to engage a connection assembly 410 of the material delivery apparatus 400. In some aspects, the unloading / loading system 607 may include movement components, such as wires, pulleys, and / or a robot, that may provide up to three or more axes of movement. In some aspects, the robot may be implemented as the robot 180 shown in FIG. 12 . The AMHS 602 may have a vision system configured to help identify and locate objects, such as the material delivery device 400, and provide guidance to the AMHS 602 and / or a robot.

[0082] FIG. 10 illustrates another exemplary implementation of a transport system according to some aspects of the present disclosure.

[0083] In some aspects, the transport system 600 may be implemented as an automated guided vehicle (AGV) 650. The automated guided vehicle (AGV) 650 may be configured to load and / or unload the material delivery device 400. The automated guided vehicle (AGV) 650 may include a drive system 652 having omnidirectional wheels 658 and one or more navigation sensors 654 that aid in the navigation of the automated guided vehicle (AGV) 650 and assist in obstacle avoidance. In one aspect, the navigation sensors 654 may include a laser-type sensing system such that the automated guided vehicle (AGV) 650 is laser guided. The automated guided vehicle (AGV) 650 may include a loading table or platform 656. The platform 656 may include a vertical transport mechanism, or lift mechanism, that allows the platform 656 to be raised or lowered relative to the drive system 652. The lift mechanism may include a hydraulic, pneumatic, and / or electric lift. The platform 656 may include a conveyor, which may be in the form of a belt-type conveyor, for moving the material delivery device 400, such as for loading, unloading, and / or relocation. The automated guided vehicle (AGV) 650 may include a robot. In some aspects, the robot may be implemented as the robot 180 shown in FIG. 12. The automated guided vehicle (AGV) 650 may have a vision system configured to identify and locate objects, such as the material delivery device 400, to help provide guidance to the automated guided vehicle (AGV) 650 and / or the robot. Furthermore, the robot may include a controller configured to control the operation of various components of the robot. Furthermore, the robot may be responsive to the controller 502. In some aspects, the automated guided vehicle (AGV) 650 may be configured to load and unload service elements 200 from the material delivery device 400 at the load station 102, the delivery station 104, the station 107, the unload station 109, and / or similar locations. In some aspects, an automated guided vehicle (AGV) 650 can be configured to engage with the connection assembly 410 of the material delivery device 400 .

[0084] FIG. 11 illustrates an exemplary implementation of a modular apparatus and dispensing machine according to some aspects of the present disclosure.

[0085] In particular, FIG. 11 illustrates an exemplary implementation of a modular apparatus 504 that may be implemented as a front-end equipment module (EFEM). The modular apparatus 504 may include a delivery station 104 and a station 107. As shown in FIG. 11, the delivery station 104 includes a material delivery device 400 disposed thereon, and the station 107 also includes a material delivery device 400 disposed thereon. Additionally, the modular apparatus 504 may include a transport chamber 522 that defines a box-shaped housing. Additionally, the modular apparatus 504 may include an implementation of a machine code reader 190 that operates as described herein. Additionally, the modular apparatus 504 may include a refrigerated compartment for holding the material delivery device 400 and / or the service element 200.

[0086] In some aspects, the modular apparatus 504 may be configured to receive the material delivery device 400 from the delivery station 104. The modular apparatus 504 may then transport the material delivery device 400 and / or the service element 200 along the transport path 105 to the dispensing machine 300. In some aspects, the modular apparatus 504 may remove the service element 200 from the material delivery device 400 before and / or while transporting the service element 200 along the transport path 105 to the dispensing machine 300. In this regard, the modular apparatus 504 may include a transport system 508, which may be implemented as a conveyor, an automated removal system, a robot, or the like, for moving the material delivery device 400 and / or the service element 200 and removing the service element 200 from the material delivery device 400. In some aspects, the robot may be implemented as the robot 180 shown in FIG. 12 .

[0087] In some aspects, the modular apparatus 504 may be configured to receive a consumed portion of the material delivery device 400 and / or service element 200 from the dispensing machine 300. The modular apparatus 504 may then transport (the consumed portion of) the material delivery device 400 and / or service element 200 along the transport path 105 from the dispensing machine 300 toward the station 107. In some aspects, the modular apparatus 504 may insert the consumed portion of the service element 200 into the material delivery device 400 before and / or while transporting the service element 200 from the dispensing machine 300 along the transport path 105. In this regard, the transport system 508 may further include a conveyor, an automated insertion system, a robot, and / or the like to move the material delivery device 400 and / or service element 200 to insert the service element 200 into the material delivery device 400, and / or the like. In some aspects, the robot may be implemented as robot 180 shown in FIG.

[0088] 11 further illustrates the dispensing machine 300. In particular, the dispensing machine 300 may be configured to receive a material delivery device 400 and / or a service element 200 from a modular apparatus 504. The dispensing machine 300 may then transport the material delivery device 400 and / or the service element 200 along the transport path 106 to an operational portion of the dispensing machine 300 that will use the service element 200. In some aspects, the service element 200 may be (previously) removed from the material delivery device 400 by the modular apparatus 504, and the dispensing machine 300 may move the service element 200 along the transport path 106 to the operational portion of the dispensing machine 300. In other aspects, the dispensing machine 300 may remove the service element 200 from the material delivery device 400 before and / or while transporting the service element 200 along the transport path 106 to the operational portion of the dispensing machine 300. In this regard, the dispensing machine 300 may have a transport system 302, which may include a conveyor, an automated removal system, and / or a robot, etc., to move the material delivery device 400 and / or the service element 200, remove the service element 200 from the material delivery device 400, and / or move the service element 200 to an operating portion of the dispensing machine 300, etc. In some aspects, the robot may be implemented as the robot 180 shown in FIG.

[0089] In some aspects, the dispensing machine 300 may further utilize the transport system 302 to remove the consumed portion of the service element 200 from the operating portion of the dispensing machine 300 and transport the consumed portion of the service element 200 along the transport path 106 to the modular apparatus 504. In other aspects, the dispensing machine 300 may insert the consumed portion of the service element 200 into the material delivery device 400 before and / or while transporting the service element 200 along the transport path 106 to the modular apparatus 504.

[0090] FIG. 12 shows an example implementation of a robot implemented by several different components of the present disclosure.

[0091] In particular, FIG. 12 illustrates a robot 180 that may be implemented by several different components, such as the system for automated material delivery 100, the dispensing machine 300, the modular device 504, and / or the transport system 600. In some aspects, the robot 180 may include one or more arms 182 and one or more motors for moving the one or more arms 182, providing up to three or more axes of motion. Furthermore, the one or more arms 182 may include one or more suction cups and / or manipulators 184, such as for grasping and / or moving the service element 200 and / or the material delivery device 400. Furthermore, the robot 180 may include a controller configured to control the operation of the various components of the robot. Furthermore, the robot may be responsive to the controller 502. The robot 180 may include a vision system configured to aid in identifying and locating objects, such as the material delivery device 400.

[0092] FIG. 13 illustrates a side view of an example implementation of a service element according to some aspects of the present disclosure.

[0093] FIG. 14 shows a floor plan of an exemplary implementation of a service element according to FIG.

[0094] In particular, FIG. 13 illustrates an implementation of a service element 200 that may include a material syringe 202, a dispenser valve 204, and a dispenser cartridge 206. The dispenser valve 204 may include connections 218 operable to provide and / or receive electrical signals, power, data, and / or air for pneumatic operation, etc. In some aspects, the service element 200 may include all, some, or one of the material syringe 202, the dispenser valve 204, and the dispenser cartridge 206. In further aspects, the service element 200 may include a dispenser cup 208, as shown in FIG. 18. In further aspects, the dispenser valve 204 may include a mounting bracket 232, as shown in FIG. 14. The mounting bracket 232 may be configured to be attached to an operating portion of a dispensing machine 300. In this regard, the dispensing machine 300 may consume a variety of materials, including service elements 200, such as syringes 202 of material, dispenser valves 204, dispenser cartridges 206, and / or dispenser cups 208. In some aspects, the service elements 200 may include one or more of the syringes 202 of material, dispenser valves 204, dispenser cartridges 206, and / or dispenser cups 208, etc., combined into one unit to form a service package or service station for the dispensing machine 300.

[0095] FIG. 15 shows a partial side view of a dispensing machine according to some embodiments of the present disclosure.

[0096] In particular, Figure 15 shows a partial side view of dispensing machine 300 with service element 200 disposed on operational portion 310 of dispensing machine 300. In this regard, Figure 15 shows two implementations of operational portion 310, each holding two different implementations of service element 200. However, dispensing machine 300 may include any number of operational portions 310, any number of service elements 200, etc.

[0097] The dispensing machine 300 may be configured to dispense fluid from the syringe of material 202 through the dispenser cartridge 206 by controlled actuation of the dispenser valve 204. In this regard, the dispensing machine 300 may hold the syringe of material 202, the dispenser valve 204, and / or the dispenser cartridge 206, etc., in an operating portion 310. Additionally, a connection 218 may be connected to the operating portion 310 to provide actuation of the dispenser valve 204. The dispensing machine 300 may be configured to dispense fluid from the syringe of material 202 onto a substrate. Additionally, in some cases, the dispensing machine 300 may be configured to dispense fluid from the syringe of material 202 into a dispenser cup 208. However, the service element 200 is a consumable item, and after a certain period of time, the service element 200 needs to be replaced within the dispensing machine 300. Additionally, from time to time, one or more components of the service element 200 may fail and need to be replaced within the dispensing machine 300 as well.

[0098] FIG. 16A shows a cross-sectional plan view of a material delivery device and service element according to some aspects of the present disclosure.

[0099] FIG. 16B shows a cross-sectional side view of the material delivery device and service element according to FIG. 16A.

[0100] 16A and 16B illustrate the material delivery apparatus 400 with the servicing element 200 of FIG. 14 loaded therein. As shown in FIG. 16A, the material delivery apparatus 400 may further include a retention mechanism 424 for retaining the servicing element 200. In particular, the retention mechanism 424 may be attached to the mounting bracket 232 of the servicing element 200. The attachment of the mounting bracket 232 of the servicing element 200 to the retention mechanism 424 may be via mechanical fasteners, clips, brackets, and / or the like.

[0101] FIG. 16C shows a cross-sectional plan view of a material delivery device and service element according to some embodiments of the present disclosure.

[0102] In particular, Figure 16C illustrates the material delivery device 400 with the servicing element 200 of Figure 14 loaded therein. As shown in Figure 16C, the material delivery device 400 may further include a retention mechanism 424 that retains the servicing element 200. In particular, the retention mechanism 424 may surround a portion of the servicing element 200. In this regard, the retention mechanism 424 may be configured as a deformable material.

[0103] FIG. 16D shows a cross-sectional side view of a material delivery device and service element according to some embodiments of the present disclosure.

[0104] In particular, Figure 16D illustrates the material delivery device 400 with the servicing element 200 of Figure 14 loaded therein. As shown in Figure 16D, the material delivery device 400 may further include a retention mechanism 424 that retains the servicing element 200. In particular, the retention mechanism 424 may surround a portion of the servicing element 200. In this regard, the retention mechanism 424 may be configured as one or more brackets that engage the sides of the servicing element 200 and / or the bottom of the servicing element 200.

[0105] FIG. 17 illustrates an exemplary exchange operation according to some aspects of the present disclosure.

[0106] 17 illustrates the process of the material delivery device 400 delivering the service element 200 to the dispensing machine 300. More specifically, the material delivery device 400 may deliver the service element 200 to the dispensing machine 300 and / or the modular apparatus 504, as described above. Thereafter, in some aspects, the transport system 508 and / or the robot 180 of the modular apparatus 504 may remove the service element 200 from the material delivery device 400, as indicated by arrow 312. In other aspects, the transport system 302 and / or the robot 180 of the dispensing machine 300 may remove the service element 200 from the material delivery device 400, as indicated by arrow 312. Once the service element 200 is removed from the material delivery device 400, the service element 200 may be transported to the operating portion 310 of the dispensing machine 300, as indicated by arrow 314. The transport system 302 and / or robot 180 of the dispensing machine 300 may then place the service element 200 onto the operating portion 310 of the dispensing machine 300, as further indicated by arrow 314. In some aspects, the transport system 302 and / or robot 180 of the dispensing machine 300 may be further configured to couple the service element 200 to the operating portion 310 of the dispensing machine 300.

[0107] FIG. 18 illustrates a further exemplary exchange operation according to some aspects of the present disclosure.

[0108] In particular, FIG. 18 illustrates the process of delivering a service element 200 to a dispensing machine 300. In this regard, the service element 200 may include a material syringe 202, a dispenser cartridge 206, and a dispenser cup 208. Accordingly, the dispenser valve 204 may remain connected to an operational portion 310 of the dispensing machine 300. More specifically, FIG. 18 illustrates that the transport system 302 and / or robot 180 of the dispensing machine 300 may remove a consumed (used) implementation, such as the material syringe 202 or the dispenser cartridge 206, from the operational portion 310 of the dispensing machine 300, as indicated by arrow 316. Additionally, the transport system 302 and / or robot 180 of the dispensing machine 300 may remove a consumed (used) implementation of the dispenser cup 208 from the dispensing machine 300. In this regard, the syringe of material 202 is now empty and can no longer be used by the dispensing machine 300, and the dispenser cup 208 is now full and can no longer be used by the dispensing machine 300. Additionally, the transport system 302 and / or robot 180 may disconnect the connection 218 of the service element 200 from the operating portion 310.

[0109] 18 , the transport system 302 and / or robot 180 may load full loads of material syringes 202 and new loads of dispenser cartridges 206 into the dispensing machine 300 by attachment to the operating portion 310. Additionally, the transport system 302 and / or robot 180 may load empty loads of dispenser cups 208 into the dispensing machine 300. Additionally, the transport system 302 and / or robot 180 may connect the connection 218 of the service element 200 to the operating portion 310 of the dispensing machine 300.

[0110] FIG. 19 illustrates a further exemplary exchange operation according to some aspects of the present disclosure.

[0111] 19 illustrates the process of delivering the service element 200 to the dispensing machine 300. In this regard, the service element 200 may further include a mounting plate 240. The various components of the service element 200 (including the material syringe 202, the dispenser valve 204, the dispenser cartridge 206, and the connections 218) may be mounted to the mounting plate 240. The mounting plate 240 may include connections from the connections 218 to corresponding connections on the operating portion 310 of the dispensing machine 300.

[0112] In some aspects, the transport system 302 and / or robot 180 of the dispensing machine 300 may remove empty mounts of material syringes 202, spent mounts of dispenser valves 204, and spent mounts of dispenser cartridges 206 from the dispensing machine 300 by removing the mounting plate 240 of the service element 200 from the operating portion 310 of the dispensing machine 300. Additionally, the transport system 302 and / or robot 180 of the dispensing machine 300 may load full mounts of material syringes 202, new mounts of dispense valves 204, and new mounts of dispense cartridges 206 into the dispensing machine 300 by attaching the mounting plate 240 to the operating portion 310 of the dispensing machine 300.

[0113] FIG. 20 illustrates a further exemplary exchange operation according to some aspects of the present disclosure.

[0114] In particular, Figure 20 illustrates the process of delivering a service element 200 to a dispensing machine 300. In this regard, the service element 200 may include a material syringe 202, a dispenser cartridge 206, a dispenser valve 204, and a dispenser cup 208. More specifically, Figure 20 illustrates that the transport system 302 and / or robot 180 of the dispensing machine 300 may remove a consumed (used) implementation, such as the material syringe 202, the dispenser cartridge 206, or the dispenser valve 204, from the operating portion 310 of the dispensing machine 300, as indicated by arrow 316. Additionally, the transport system 302 and / or robot 180 of the dispensing machine 300 may remove a consumed (used) implementation, such as the material syringe 202, the dispenser cartridge 206, or the dispenser valve 204, from the operating portion 310 of the dispensing machine 300. Additionally, the transport system 302 and / or robot 180 of the dispensing machine 300 may remove a consumed (used) implementation, such as the dispenser cup 208, from the dispensing machine 300. In this regard, the syringe of material 202 is now empty and can no longer be used by the dispensing machine 300, and the dispenser cup 208 is now full and can no longer be used by the dispensing machine 300. Additionally, the dispenser valve 204 and dispenser cartridge 206 may also require replacement. Further, the transport system 302 and / or robot 180 may disconnect the connection 218 of the service element 200 from the operating portion 310. In this regard, the connection 218 may be implemented as a twist-on connection, a push-on connection, or the like.

[0115] 20 , the transport system 302 and / or robot 180 may load full loads of material syringes 202 and new loads of dispenser cartridges 206 and dispenser valves 204 into the dispensing machine 300 by attachment to the operating portion 310. Additionally, the transport system 302 and / or robot 180 may load empty loads of dispenser cups 208 into the dispensing machine 300. Additionally, the transport system 302 and / or robot 180 may connect the connection 218 of the service element 200 to the operating portion 310 of the dispensing machine 300.

[0116] FIG. 21 illustrates another implementation of a modular apparatus and / or dispensing machine according to some aspects of the present disclosure.

[0117] In particular, FIG. 21 illustrates another implementation of a modular apparatus 504 and / or dispensing machine 300 that may include a turret-based tool changer 380. The turret-based tool changer 380 may be disposed within the modular apparatus 504 and / or dispensing machine 300. The turret-based tool changer 380 may be configured to exchange quick-disconnect implementations of material syringes 202. The material syringes 202 may be delivered by a material delivery apparatus 400 described herein. The turret-based tool changer 380 may be configured to hold multiple implementations of a service element 200, such as the material syringes 202 shown in FIG. 21 . In this regard, the turret-based tool changer 380 may include multiple mounting portions 382 configured to engage and hold one or more components of the service element 200. As shown in FIG. 21 , the multiple mounting portions 382 hold multiple material syringes 202. The turret tool changer 380 may be configured with a motor that rotates in response to the controller 502 and may present a desired one of the multiple mounting portions 382 to accept a consumed portion of the service element 200 and / or may present a desired one of the multiple mounting portions 382 to deliver (provide) a new (unused) portion of the service element 200. In some aspects, the transport system 508 and / or robot 180 of the modular apparatus 504 may transport the service element 200 to the dispensing machine 300. In some aspects, the transport system 302 and / or robot 180 of the dispensing machine 300 may transport the service element 200 received from the turret tool changer 380 to the operating portion 310 of the dispensing machine 300. In this regard, the turret tool changer 380 may store and / or provide multiple service elements 200 locally to the modular apparatus 504 and / or dispensing machine 300. In some aspects, the turret tool changer 380 may be located within a refrigerated compartment of the modular apparatus 504.

[0118] FIG. 22 illustrates a data collection system in accordance with the principles of the present disclosure.

[0119] In some aspects, the system 100 for automated material delivery may be configured to provide automated material delivery, automated material changeover, automated setup & calibration, etc., as described above. Additionally, the system 100 for automated material delivery may be configured to provide automated process control, automated error prediction & recovery, etc., for one or more components of the equipment manufacturing facility 500, including the service elements 200, dispensing machines 300, material delivery equipment 400, etc. In some aspects, the system 100 for automated material delivery may be configured to provide “Data Analytics and Traceability” to facilitate improved data traceability and analysis for one or more components of the equipment manufacturing facility 500, including the service elements 200, dispensing machines 300, material delivery equipment 400, etc. In some aspects, the system 100 for automated material delivery may implement an application programming interface (API) that is used to enable communication and independent operation of one or more components of the equipment manufacturing facility 500, including the service elements 200, dispensing machines 300, material delivery equipment 400, etc. The system 100 for automated material delivery, in conjunction with the controller 502, may provide remote access, reporting, and centralized control of equipment on the production floor of the device manufacturing facility 500 from a remote office to one or more components of the device manufacturing facility 500, including service elements 200, dispensing machines 300, material delivery devices 400, etc.

[0120] Additionally, the system 100 for automated material delivery may be configured to obtain all process information currently available from the various machines implemented by the system 100 (e.g., sensor data, alarm conditions, commanded actions, and / or any new sources of dispensing metrics, etc.), determine which are relevant to the health of production, and use them to create automated process control routines to keep production running as smoothly and for as long as possible. This process may include standard control routines that modify settings to meet performance specifications and utilize machine learning applications to classify normal and abnormal dispensing conditions. Process control algorithms may be included to adjust settings as needed. Additionally, the system 100 for automated material delivery may implement automated process control that examines recorded sensor data and focuses on predicting, recognizing, and recovering from common alarm and error conditions with minimal operator intervention. Additionally, the system 100 for automated material delivery may be configured so that, if an automated solution is not possible, an “expert system” or flow-chart interface may be deployed to assist a remote operator or field service technician in identifying the root cause and the best known method for bringing the process tools of the system 100 back online as quickly as possible. Furthermore, the system 100 for automated material delivery may be configured so that control of the various machines of the system 100 and data collected during production can be easily and effectively shared with remote operators via a data infrastructure. Furthermore, the system 100 for automated material delivery may be configured to allow machine learning or digital twin applications to exist, and data may be streamed from production for training, testing, and analysis. Furthermore, the operation of the system 100 for automated material delivery may be configured so that all operator interaction with the various machines of the system 100 and data from the automated material delivery system 100 may be performed via this remote connection.

[0121] 22 , one or more of the aforementioned aspects may be implemented with a data collection system 590. In some aspects, the data collection system 590 may be implemented as part of the controller 502. In some aspects, the data collection system 590 may be implemented separately from the controller 502. The data collection system 590 may be implemented by one or more servers, a processor 576, a database 592, a network interface 510, an input / output device 566, a memory 588, etc.

[0122] In some aspects, data collection system 590 can receive, analyze, store, and provide equipment-related information 560 related to system for automated material delivery 100, service elements 200, dispensing machines 300, equipment manufacturing facility 500, controller 502, modular equipment 504, transport system 600, and components thereof, etc. Equipment-related information 560 can include the date and time of a particular operation, the date and time of a dispense operation, machine serial number, pressure, temperature, scripted offset data, dispense settings, dispense metrics, valve serial numbers, cycles, calibration data, encoder traces, cartridge serial numbers, cycles, consumable life, fluid lot numbers, pot life, syringe levels, and / or wafer serial numbers, etc.

[0123] In one aspect, data collection system 590 may be configured as a centralized computer. In one aspect, data collection system 590 may be configured as a server. In one aspect, data collection system 590 may be configured as a distributed server. In one aspect, data collection system 590 may be configured as a distributed computer. In one aspect, data collection system 590 may be configured to communicate over a network using encryption, and data collection system 590 may be configured to decrypt data received over the network. Processor 576 and / or network interface 510 may provide the encryption and decryption functionality.

[0124] Additionally, various components of the system 100 for automated material delivery described herein may similarly be configured for and provide the encryption and decryption functions described herein. In one aspect, encryption may include the process of encoding a message, information, product-related information, etc., in a manner that is accessible only to authorized personnel and not to unauthorized personnel. In one aspect, encryption may include an encryption scheme in which the intended information or message (referred to as plaintext) is encrypted (or ciphered) using an encryption algorithm to produce ciphertext that can only be read when decrypted. In one aspect, the encryption scheme may use a pseudorandom encryption key generated by an algorithm. In a symmetric key scheme, the encryption key and decryption key may be the same. To achieve secure communication, the communicating parties must possess the same key. In one aspect, the encryption scheme may be a public key encryption scheme in which the encryption key is made public so that anyone can use it to encrypt a message, although only the recipient has access to the decryption key that makes the message readable.

[0125] In one aspect, data collection system 590 may be configured as a cloud-based system. In one aspect, data collection system 590 may be configured as a non-cloud-based system. In one aspect, data collection system 590 may be configured as a transformation service layer, microservices, and / or the like.

[0126] In one aspect, data collection system 590 may be configured to store all of the aforementioned equipment-related information 560 from system for automated material delivery 100, service elements 200, dispensing machines 300, equipment manufacturing facility 500, controller 502, modular equipment 504, transport system 600, and their components, etc., in database 592. In this regard, data collection system 590 may be configured to connect directly to computer 580 or connect to computer 580 via a network to provide stored equipment-related information 560 from database 592.

[0127] In certain aspects, data collection system 590 may be configured to respond to queries from computer 580 to permit retrieval of any of the aforementioned captured information, including equipment-related information 560 obtained from various components, such as system for automated material delivery 100, service elements 200, dispensing machines 300, equipment manufacturing facility 500, controller 502, modular equipment 504, transport system 600, and components thereof. In this regard, a query to data collection system 590 may include a query for a particular device of system for automated material delivery 100, and data collection system 590, in conjunction with database 592, may obtain and transmit a response to computer 580. In particular, the query may be based on a particular device of system for automated material delivery 100, a particular device of equipment manufacturing facility 500, a particular aspect of equipment-related information 560, etc.

[0128] In certain aspects, data collection system 590 may be configured to respond to queries from computer 580 and provide equipment-related information 560 and information related to inventory decisions, replacement decisions, supply chain decisions, consumption metrics, inventory counts, total inventory, projected inventory, etc. based on the aforementioned captured information, including equipment-related information 560 obtained from various components of system 100 for automated material delivery described herein. In this regard, queries to data collection system 590 may include queries for inventory-related information, and data collection system 590, in conjunction with database 592, may obtain and transmit responses to computer 580.

[0129] In some aspects, the data collection system 590 may be configured with artificial intelligence to assist in analyzing the device-related information 560. The artificial intelligence may utilize any number of approaches to assist in inventory analysis, including one or more of cybernetics and brain simulation, symbolic, cognitive simulation, logic-based, anti-logic, knowledge-based, sub-symbolic, embodied intelligence, computational intelligence and soft computing, machine learning and statistics, etc.

[0130] In certain aspects, data collection system 590 may be configured to provide traceability functionality in response to queries from computer 580 based on the aforementioned captured information, including equipment-related information 560 obtained from system for automated material delivery 100 and / or controller 502, etc. In this regard, queries to data collection system 590 may include queries to track a particular device or devices of system for automated material delivery 100, and data collection system 590, in conjunction with database 592, may obtain and transmit a response to computer 580. In particular, traceability functionality queries may be based on equipment-related information 560, a particular device of system for automated material delivery 100, a case number, a lot number, a batch number, an item number, etc.

[0131] In certain aspects, data collection system 590 may be configured to provide tracking functionality in response to queries from computer 580 based on the aforementioned captured information, including equipment-related information 560 obtained from system for automated material delivery 100 and / or controller 502, etc. In this regard, queries to data collection system 590 may include queries to track particular aspects of equipment-related information 500, and data collection system 590, in conjunction with database 592, may obtain and transmit responses to computer 580. In particular, tracking functionality queries may be based on particular aspects of equipment-related information 560, particular equipment of system for automated material delivery 100, particular equipment of equipment manufacturing facility 500, case number, lot number, batch number, item number, serial number, etc.

[0132] In some aspects, the data collection system 590 and / or various components of the system 100 for automated material delivery described herein, etc., may be configured with artificial intelligence to assist in the determination of pathogens, diseases, etc. The artificial intelligence may utilize any number of approaches, including one or more of cybernetics and brain simulation, symbolic, cognitive simulation, logic-based, anti-logic, knowledge-based, sub-symbolic, embodied intelligence, computational intelligence and soft computing, machine learning and statistics, etc., to assist in the determination of pathogens, diseases, etc.

[0133] In certain aspects, the data collection system 590 and / or the database 592 may utilize and implement blockchain 512 technology. In this regard, the data collection system 590 and / or the database 592 may obtain the received device-related information 560 as a list of records, which may be defined as blocks. In particular, each block of device-related information 560 may be linked using cryptography. Each block may include a cryptographic hash of the previous block, a timestamp, and the device-related information 560. The blockchain 512 may be managed by the data collection system 590 in accordance with a protocol for inter-node communication and validation of new blocks. In some aspects, the resulting blockchain 512 of the device-related information 560 may form a blockchain ledger that cannot be easily modified, altered, etc., to ensure a higher level of security and data reliability. In one aspect, the blockchain 512 may be implemented as a public blockchain, a private blockchain, a consortium blockchain, etc.

[0134] In one aspect, data collection system 590 may include a functional application programming interface (API) system 550. In one aspect, data collection system 590 may include an administrative application programming interface (API) system 552. In one aspect, data collection system 590 may include an administrative application programming interface (API) system 552 and a functional application programming interface (API) system 550.

[0135] In some aspects, the APIs of functional application programming interface (API) system 550 and management application programming interface (API) system 552 may include sets of subroutine definitions, protocols, tools, etc. These may include well-defined sets of methods of communication between various software components, including data collection system 590. APIs may be for web-based systems, operating systems, database systems, computer hardware, software libraries, etc. In some aspects, APIs may include any specifications that can take many forms, but may include specifications for routines, data structures, object classes, variables, remote calls, etc. APIs may be implemented via POSIX, Windows API, ASPI, etc.

[0136] The functional application programming interface (API) system 550 may implement or connect to an on-demand cloud computing platform. The functional application programming interface (API) system 550 may allow subscribers to freely access a full-fledged virtual computer cluster at any time via the Internet. The functional application programming interface (API) system 550 may implement a virtual computer that may include several attributes of a real computer, including a central processing unit (CPU), a graphics processing unit (GPU), random access memory (RAM), hard disk storage, solid-state drive (SSD) storage, etc. The functional application programming interface (API) system 550 may include an operating system and network selection. The functional application programming interface (API) system 550 may be pre-loaded with application software such as a web server, database, etc. The functional application programming interface (API) system 550 may virtualize its console I / O (keyboard, display, mouse) and allow users to connect to the data collection system 590 using a browser, etc. The browser may act as a window into a virtual computer, allowing the subscriber to log in, configure, etc.

[0137] In some aspects of the present disclosure, one or more of the management application programming interface (API) system 552 and / or the data collection system 590 may include an information portal and / or a query portal, etc., which may be implemented as a web portal. The information portal may be a specially designed portal that obtains information from various sources, including the system for automated material delivery 100 and / or the data collection system 590, etc. In some aspects, each information source may receive a dedicated area on a page (portlet) for displaying the information. In some aspects, the portal may include mashups and intranet "dashboards." The portal may use an application programming interface (API). The portal may provide a business or organization with a method for access control, changes, procedures, etc., for the data collection system 590, etc. Available features may be restricted to authorized and authenticated users (employees, members).

[0138] In one or more aspects, the management application programming interface (API) system 552 and / or the functional application programming interface (API) system 550 can be configured to execute commands to the various components of the system for automated material delivery 100 described herein and / or the data collection system 590, etc., on Windows, macOS, Linux, etc. These commands can allow for the creation and management of the various components of the system for automated material delivery 100 described herein, the data collection system 590, certificates, rules, and policies. In one or more aspects, the management application programming interface (API) system 552 and / or the functional application programming interface (API) system 550 can be configured to build IoT applications for the system for automated material delivery 100 using HTTP or HTTPS requests. These API actions can allow for the programming and management of the system for automated material delivery 100, certificates, rules, and policies. In one or more aspects, the management application programming interface (API) system 552 and / or the functional application programming interface (API) system 550 can be configured to build IoT applications using language-specific APIs. The associated SDKs can wrap the HTTP / HTTPS APIs and allow programming in any of the supported languages.In one or more aspects, the management application programming interface (API) system 552 and / or the functional application programming interface (API) system 550 may be configured to build applications that execute on various components of the system for automated material delivery 100 described herein and / or the data collection system 590, etc., and the applications may send and receive messages to the management application programming interface (API) system 552, the functional application programming interface (API) system 550, and / or the various components of the system for automated material delivery 100 described herein.

[0139] FIG. 23 illustrates a process for implementing a system for automated material delivery and / or a data collection system in accordance with the principles of the present disclosure.

[0140] 23 illustrates a process 700 for implementing a system for automated material delivery and / or a data collection system, including a process for implementing a system for automated material delivery 100 and / or a data collection system 590 described herein. The process 700 for implementing a system for automated material delivery and / or a data collection system may include step 720 of identifying a component of the system for automated material delivery using a machine code reading device. In particular, step 702 of identifying a component of the system for automated material delivery using a machine code reading device may include identifying a component of the system for automated material delivery 100 described herein, such as a component of a service element 200, a dispensing machine 300, and / or a material delivery apparatus 400, using machine code reading device 190. In this regard, the identification may include reading machine readable code 422 and / or machine readable code 222 using machine code reading device 190.

[0141] Additionally, process 700 for implementing a system for automated material delivery and / or a data collection system may include receiving device-related information for components of the system for automated material delivery 704. In this regard, receiving device-related information for components of the system for automated material delivery 704 may include receiving device-related information for components of the system for automated material delivery 100 560 described herein.

[0142] Additionally, process 700 for implementing a system for automated material delivery and / or a data collection system may include transmitting equipment-related information to the data collection system 706. In this regard, transmitting equipment-related information to the data collection system 706 may include transmitting equipment-related information 560, as described herein, to data collection system 590.

[0143] Additionally, process 700 for implementing a system for automated material delivery and / or a data collection system may include analyzing equipment-related information with a data collection system 708. In this regard, analyzing equipment-related information with a data collection system 708 may include analyzing equipment-related information 560 with a data collection system 590 described herein.

[0144] In some aspects, analyzing 708 the equipment-related information by the data collection system may include analysis, determination, and / or processing for one or more components of the equipment manufacturing facility 500, including service elements 200, dispensing machines 300, and / or material delivery devices 400, related to automated process control, automated error prediction and recovery, data analysis and traceability, sensor data, alarm conditions, commanded actions, dispense metrics, production health, automated process control routines, settings to meet performance specifications, classification of normal and abnormal dispensing conditions, process control algorithms to adjust settings as needed, recorded sensor data to predict, recognize, and recover from common alarm and error conditions with minimal operator intervention, and / or control of various machines in system 100 for automated material delivery.

[0145] Accordingly, the present disclosure describes apparatus, systems, and methods for automated material delivery to a dispensing machine that reduces cleanroom contamination and limits adverse effects on the quality of the resulting electronic devices. Further, the present disclosure describes apparatus, systems, and methods for automated material delivery to a dispensing machine that provides data, information, etc. for operation, analysis, etc. of various systems associated with the dispensing machine.

[0146] Below are some non-limiting examples of aspects of the present disclosure.

[0147] One embodiment includes a material delivery device including a plurality of side walls, a top wall, a floor, an interior space, and a rear wall. The material delivery device further includes a machine-readable code device. The material delivery device further includes at least one power connector configured to provide power to components of the material delivery device. The material delivery device further includes at least one sensor configured to sense a physical characteristic associated with the material delivery device and / or the service element to generate, in part, device-related information. The material delivery device further includes a transceiver configured to transmit the device-related information to a controller. The material delivery device further includes a retention mechanism disposed within the interior space and configured to receive and / or securely retain the service element.

[0148] The aforementioned embodiment may further include any one of the following embodiments or a combination of two or more of the following embodiments. In the material delivery device of the aforementioned embodiment, the at least one sensor may include a temperature sensor. In the material delivery device of the aforementioned embodiment, the material delivery device may be in the form of a Front Opening Unified Pod (FOUP) configured to hold the service element. In the material delivery device of the aforementioned embodiment, the material delivery device may further include a connection assembly configured to connect to a component of a transport system. In the material delivery device of the aforementioned embodiment, the service element may include a machine-readable code. In the material delivery device of the aforementioned embodiment, the retention mechanism may be configured to engage a surface of the service element. In the material delivery device of the aforementioned embodiment, the retention mechanism may include a resilient component, a gripper component, a material component, a friction-fit component, and / or a holder component. In the material delivery device of the aforementioned embodiment, the service element may include at least one of a material syringe, a dispenser valve, a dispenser cartridge, and / or a dispenser cup. In the material delivery device embodiments described above, the machine may include a dispensing machine. A system for automated material delivery may include a machine configured to use a service element; a controller configured to provide operation, control, and / or monitoring of the service element, the material delivery device, and / or the machine; and at least one machine code reader configured to read the machine-readable code device of the material delivery device and / or the machine-readable code device of the service element. In the system of the aforementioned example, the controller may be configured to provide an error indication and / or a shutdown action when determining, based on the device-related information, that the material delivery device and / or the service element is incorrect. In the system of the aforementioned example, the machine may have a transport system configured to remove the service element from the material delivery device. In the system of the aforementioned example, the machine may be configured to move the service element onto an operating portion of the machine. In the system of the aforementioned example, the service element may include at least one of a material syringe, a dispenser valve, a dispenser cartridge, and / or a dispenser cup. In the system of the aforementioned embodiment, the service element may have a connection configured to connect to an operating portion to provide actuation of the dispenser valve. In the system of the aforementioned embodiment, the machine may be configured to dispense fluid from the syringe of material through the dispenser cartridge by controlled actuation of the dispenser valve. In the system of the aforementioned embodiment, the service element may further have a mounting plate, and a portion of the service element may be configured to be mounted to the mounting plate, the mounting plate may have a connection configured to connect to a corresponding connection of an operating portion of the machine. In the system of the aforementioned embodiment, the system may further include a modular device configured as a front-end equipment module (EFEM). In the system of the aforementioned embodiment, the modular device may have a refrigerated compartment for holding the material delivery device and / or the service element.In the system of the aforementioned embodiment, the modular apparatus may be configured to transport the material delivery device and / or the service element to and from the machine along a transport path. In the system of the aforementioned embodiment, the modular apparatus may have a transport system configured to remove the service element from the material delivery device. In the system of the aforementioned embodiment, the system may further include a turret-type tool changer configured to be disposed within the modular apparatus and / or the machine. In the system of the aforementioned embodiment, the turret-type tool changer may have a plurality of mounting portions configured to engage and hold one or more components of the service element. In the system of the aforementioned embodiment, the system may further include a transport system configured to move the material delivery device together with the service element to the machine. In the system of the aforementioned embodiment, the transport system may be configured to move to the machine along a transport path within the equipment manufacturing facility. In the system of the aforementioned embodiment, the transport system may include an automated material handling system (AMHS) and / or an automated guided vehicle (AGV). The system of the aforementioned embodiment may further include a data collection system configured to receive, analyze, store, and provide the equipment-related information related to the system for automated material delivery, the service element, the machine, the equipment manufacturing facility, modular equipment, and / or transport system. In the system of the aforementioned embodiment, the data collection system may include at least one processor, at least one database, at least one network interface, at least one input / output device, and at least one memory. In the system of the aforementioned embodiment, the equipment-related information may include at least one of the following: date and time of a specific operation, date and time of a dispense operation, machine serial number, pressure, temperature, scripted offset data, dispense settings, dispense metrics, valve serial number, period, calibration data, encoder trace, cartridge serial number, period, consumable life, fluid lot number, pot life, syringe level, and / or wafer serial number.In the system of the above embodiment, the data collection system and the machine code reader may be configured to identify components of the system for automated material delivery. In the system of the above embodiment, the data collection system may be configured to receive equipment-related information for the components of the system for automated material delivery. In the system of the above embodiment, the data collection system may be configured to transmit the equipment-related information. In the system of the above embodiment, the data collection system may be configured to perform analysis of the equipment-related information by the data collection system. In the system of the above embodiment, the analysis of the equipment-related information by the data collection system may include analysis, determination, and / or action for one or more components of the equipment manufacturing facility, including the service element, the machine, and / or the material delivery device. In the example systems described above, the analysis may relate to automated process control, automated error prediction and recovery, data analysis and traceability, sensor data, alarm conditions, commanded actions, dispense metrics, production health, automated process control routines, settings to meet performance specifications, classification of normal and abnormal dispense conditions, process control algorithms to adjust settings as needed, recorded sensor data to predict, recognize and recover from common alarm and error conditions with minimal operator intervention, and / or control of various machines in the system for automated material delivery.

[0149] One embodiment includes a material delivery process comprising packaging a material delivery device. The material delivery process further comprises configuring the material delivery device with a plurality of side walls, a top wall, a floor, an interior space, and a rear wall. The material delivery process further comprises configuring the material delivery device with a machine-readable code device. The material delivery process further comprises configuring the material delivery device with at least one power connector configured to provide power to components of the material delivery device. The material delivery process further comprises configuring the material delivery device with at least one sensor for sensing a physical characteristic associated with the material delivery device and / or the service element to partially generate equipment-related information. The material delivery process further comprises configuring the material delivery device with a transceiver for transmitting the equipment-related information to a controller. The material delivery process further comprises configuring the material delivery device with a retention mechanism disposed within the interior space to receive and / or securely retain the service element.

[0150] The aforementioned embodiment may further include any one of the following embodiments or a combination of two or more of the following embodiments. In the material delivery process of the aforementioned embodiment, the at least one sensor may include a temperature sensor. In the material delivery process of the aforementioned embodiment, the material delivery device may be in the form of a Front Opening Unified Pod (FOUP) configured to hold the service element. In the material delivery process of the aforementioned embodiment, the material delivery process may further include configuring the material delivery device with a connection assembly configured to connect to a component of a transport system. In the material delivery process of the aforementioned embodiment, the service element may include a machine-readable code. In the material delivery process of the aforementioned embodiment, the retention mechanism may be configured to engage a surface of the service element. In the material delivery process of the aforementioned embodiment, the retention mechanism may include a resilient component, a gripper component, a material component, a friction fit component, and / or a holder component. In the material delivery process of the aforementioned embodiment, the service element may include at least one of a material syringe, a dispenser valve, a dispenser cartridge, and / or a dispenser cup. In the material delivery process of the aforementioned embodiment, the machine may include a dispensing machine. The material delivery process of the aforementioned embodiment may further include implementing a machine configured to use a service element; implementing a controller for providing operation, control, and / or monitoring of the service element, the material delivery device, and / or the machine; and implementing at least one machine code reading device for reading the machine-readable code device of the material delivery device and / or the machine-readable code device of the service element. In the material delivery process of the aforementioned embodiment, the controller may be configured to provide an error indication and / or a shutdown action when determining, based on the device-related information, that the material delivery device and / or the service element is incorrect. In the material delivery process of the aforementioned embodiment, the machine may have a transport system configured to remove the service element from the material delivery device.In the material delivery process of the aforementioned embodiment, the machine may be configured to move the service element onto an operating portion of the machine. In the material delivery process of the aforementioned embodiment, the service element may include at least one of a material syringe, a dispenser valve, a dispenser cartridge, and / or a dispenser cup. In the material delivery process of the aforementioned embodiment, the service element may include a connection configured to connect to an operating portion to provide actuation of the dispenser valve. In the material delivery process of the aforementioned embodiment, the machine may be configured to dispense fluid from the material syringe through the dispenser cartridge by controlled actuation of the dispenser valve. In the material delivery process of the aforementioned embodiment, the service element may further include a mounting plate, and a portion of the service element may be configured to mount to the mounting plate, and the mounting plate may have a connection configured to connect to a corresponding connection of an operating portion of the machine. The material delivery process of the aforementioned embodiment may further include implementing a modular device configured as a front-end equipment module (EFEM). In the material delivery process of the aforementioned embodiment, the modular apparatus may have a refrigerated compartment for holding the material delivery device and / or the service element. In the material delivery process of the aforementioned embodiment, the modular apparatus may be configured to transport the material delivery device and / or the service element to and from the machine along a transport path. In the material delivery process of the aforementioned embodiment, the modular apparatus may have a transport system configured to remove the service element from the material delivery device. In the material delivery process of the aforementioned embodiment, the material delivery process may further include installing a turret-type tool changer configured to be disposed within the modular apparatus and / or the machine. In the material delivery process of the aforementioned embodiment, the turret-type tool changer may have a plurality of mounting portions configured to engage and hold one or more components of the service element.The material delivery process of the aforementioned embodiment may further include implementing a transport system configured to move the material delivery device together with the service element to the machine. In the material delivery process of the aforementioned embodiment, the transport system may be configured to move to the machine along a transport path within the equipment manufacturing facility. In the material delivery process of the aforementioned embodiment, the transport system may include an automated material handling system (AMHS) and / or an automated guided vehicle (AGV). The material delivery process of the aforementioned embodiment may further include implementing a data collection system configured to receive, analyze, store, and provide the equipment-related information for the service element, the machine, the equipment manufacturing facility, modular equipment, and / or the transport system. In the material delivery process of the aforementioned embodiment, the data collection system may include at least one processor, at least one database, at least one network interface, at least one input / output device, and at least one memory. In the material delivery process of the aforementioned embodiment, the equipment-related information may include at least one of the following: date and time of a specific operation, date and time of a dispensing operation, machine serial number, pressure, temperature, scripted offset data, dispense settings, dispense metrics, valve serial number, period, calibration data, encoder trace, cartridge serial number, period, consumable life, fluid lot number, pot life, syringe level, and / or wafer serial number. The material delivery process of the aforementioned embodiment may further include identifying components for automated material delivery in the data collection system. The material delivery process of the aforementioned embodiment may further include receiving equipment-related information for components in the data collection system. The material delivery process of the aforementioned embodiment may further include transmitting the equipment-related information in the data collection system. The material delivery process of the aforementioned embodiment may further include performing an analysis of the equipment-related information in the data collection system.In the material delivery process of the foregoing example, analysis of the equipment-related information by the data collection system may include analysis, determination, and / or action for one or more components of the equipment manufacturing facility, including the service element, the machine, and / or the material delivery equipment. In the material delivery process of the foregoing example, the analysis may relate to automated process control, automated error prediction and recovery, data analysis and traceability, sensor data, alarm conditions, commanded actions, dispensing metrics, production health, automated process control routines, settings to meet performance specifications, classification of normal and abnormal dispensing conditions, process control algorithms to adjust settings as needed, recorded sensor data to predict, recognize, and recover from common alarm and error conditions with minimal operator intervention, and / or control of various machines for automated material delivery.

[0151] As will be appreciated by those skilled in the art, the illustrated structures are logical structures, not physical structures. Thus, the illustrated modules may be implemented by employing various hardware and software components. Furthermore, two or more of the logical components may be implemented as a single module that provides the functionality of both components. In one aspect, the components are implemented as software program modules.

[0152] It will be understood that although terms such as "first," "second," etc. may be used herein to describe various elements, these elements should not be limited by such terms. These terms are used only to distinguish one element from another. For example, a first element could be referred to as a second element, and similarly, a second element could be referred to as a first element, without departing from the scope of the present disclosure. As used herein, the term "and / or" includes any and all combinations of one or more of the associated listed items.

[0153] When an element, such as a layer, region, substrate, etc., is described as being "on" or extending "on" another element, it will be understood that the element may be directly on or extending directly onto the other element, or that intervening elements may be present. In contrast, when an element is described as being "directly on" or extending "directly onto" another element, there are no intervening elements. Similarly, when an element, such as a layer, region, substrate, etc., is described as being "over" or extending "over" another element, it will be understood that the element may be directly over or extending directly onto the other element, or that intervening elements may be present. In contrast, when an element is described as being "directly over" or extending "directly over" another element, there are no intervening elements. Additionally, when an element is described as being "connected" or "coupled" to another element, it will be understood that the element may be directly connected or coupled to the other element, or there may be intervening elements. In contrast, when an element is described as being "directly connected" or "directly coupled" to another element, there are no intervening elements present.

[0154] Relative terms such as "lower," "upper," "top," "lower," "horizontal," or "vertical" may be used herein to describe the relationship of one element, layer, or region to another element, layer, or region as shown in the figures. It will be understood that these and other terms are intended to encompass various orientations of the device in addition to the orientation shown in the figures.

[0155] The terminology used herein is for the purpose of describing particular embodiments and is not intended to be limiting of the disclosure. As used herein, the singular forms "a," "an," and "the" are intended to include the plural forms as well, unless the context clearly indicates otherwise. Furthermore, as used herein, it will be understood that the terms "comprises," "comprising," "includes," and / or "including" specify the presence of stated features, integers, steps, operations, elements, and / or components, but do not exclude the presence or addition of one or more other features, integers, steps, operations, elements, components, and / or groups thereof.

[0156] Unless otherwise defined, all terms (including technical and scientific terms) used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this disclosure belongs. Furthermore, it will be understood that terms used herein should be interpreted as having a meaning consistent with their meaning in the context of the present specification and related art, and should not be interpreted in an idealized or overly formal sense unless so expressly defined herein.

[0157] Some aspects of the present disclosure may be implemented using a variety of technologies, such as wired / wireless local area networks (LANs), wired / wireless personal area networks (PANs), wired / wireless home area networks (HANs), wired / wireless wide area networks (WANs), campus networks, metropolitan networks, enterprise private networks, virtual private networks (VPNs), internetworks, backbone networks (BBNs), global area networks (GANs), the Internet, intranets, extranets, overlay networks, near field communications (NFC), cellular networks, personal communications services (PCS), known protocols (e.g., Global System for Mobile Communications (GSM), CDMA (Code Division Multiple Access), GSM / EDGE and UMTS / HSPA network technologies, Long Term Evolution (LTE), 5G (fifth generation mobile networks or fifth generation wireless systems), WiMAX, HSPA+, W-CDMA (Wideband Code Division Multiple Access), CDMA2000 (also known as C2K or IMT Multi-Carrier (IMT-MC)), Wireless The NFC standard covers communication protocols and data exchange formats and is based on existing radio frequency identification (RFID) standards, including ISO / IEC 14443 and FeliCa. These standards include ISO / IEC 18092[3] and standards defined by the NFC Forum.

[0158] The present disclosure may be implemented in any type of computing device with wired / wireless communication capabilities over a communication channel, such as, for example, a desktop computer, a personal computer, a laptop / mobile computer, a personal data assistant (PDA), a mobile phone, a tablet computer, a cloud computing device, etc.

[0159] Furthermore, in accordance with various aspects of the present disclosure, the methods described herein are intended to operate in dedicated hardware implementations, including, but not limited to, PCs, PDAs, semiconductors, application specific integrated circuits (ASICs), programmable logic arrays, cloud computing devices, and other hardware devices configured to implement the methods described herein.

[0160] It should also be noted that the software implementation of the present disclosure described herein is optionally stored on a tangible storage medium, such as a magnetic medium such as a disk or tape, a magneto-optical or optical medium such as a disk, or a solid-state medium such as a memory card or other package containing one or more read-only (non-volatile) memories, random access memories, or other re-writable (volatile) memories. A digital file attachment to an email or other self-contained information archive or set of archives is considered a distribution medium equivalent to a tangible storage medium. Accordingly, the present disclosure is considered to include tangible storage or distribution media as enumerated herein, as well as art-recognized equivalents and successor media on which the software implementation of the present disclosure may be stored.

[0161] Moreover, various aspects of the present disclosure may be implemented in non-general-purpose computer implementations. Moreover, various aspects of the present disclosure described herein improve the functionality of systems, as will be apparent from the disclosure herein. Furthermore, various aspects of the present disclosure include computer hardware specially programmed to solve the complex problems addressed by the present disclosure. Thus, various aspects of the present disclosure improve the functionality of the overall system in its particular implementation for performing the processes set forth by the present disclosure and defined by the claims.

[0162] Some aspects of the present disclosure may be implemented on any type of computing device with wired / wireless communication capabilities over a communication channel, such as, for example, a desktop computer, a personal computer, a laptop / mobile computer, a personal data assistant (PDA), a mobile phone, a tablet computer, a cloud computing device, etc.

[0163] Artificial intelligence and / or machine learning may utilize any number of approaches, including one or more of cybernetics and brain simulation, symbolic, cognitive simulation, logic-based, anti-logic, knowledge-based, sub-symbolic, embodied intelligence, computational intelligence and soft computing, machine learning and statistics, etc.

[0164] Some aspects of the present disclosure may include a server running an application or software instance configured to accept requests from clients and return responses accordingly. The server may run on any computer, including a special-purpose computer. The computer may include at least one processing element (typically a central processing unit (CPU)) and some form of memory. The processing element may perform arithmetic and logical operations, and a sequencing and control unit may change the order of operations in response to stored information. The server may include peripheral devices that may allow information to be obtained from external sources and may allow results of operations to be stored and retrieved. The server may operate within a client-server architecture. The server may perform several tasks on behalf of clients. The clients may connect to the server via a network over a communication channel defined herein. The server may use memory with error detection and correction capabilities, redundant disks, redundant power supplies, etc.

[0165] The many features and advantages of the present disclosure are apparent from the detailed description. Accordingly, it is intended by the appended claims to cover all such features and advantages of the present disclosure, which fall within the true spirit and scope of the present disclosure. Further, since numerous modifications and variations will readily occur to those skilled in the art, it is not desired to limit the disclosure to the exact construction and operation illustrated and described. Accordingly, all suitable modifications and equivalents may be resorted to, within the scope of the present disclosure.

Claims

1. 1. A material delivery device configured to provide delivery of service elements to machines in an equipment manufacturing facility, comprising: a plurality of side walls, a top wall, a floor, an interior space, and a rear wall; a machine-readable code device; at least one power connector configured to provide power to components of the material delivery device; at least one sensor configured to sense a physical characteristic associated with the material delivery device and / or the service element to generate, in part, the device-related information; a transceiver configured to transmit the device-related information to a controller; a retention mechanism disposed within the interior space and configured to receive and / or securely retain the service element; A material delivery device comprising:

2. The at least one sensor includes a temperature sensor.

10. The material delivery device of claim 1.

3. The material delivery device is in the form of a Front Opening Unified Pod (FOUP) configured to hold the service element.

10. The material delivery device of claim 1.

4. A connection assembly configured to connect to a component of a transport system 10. The material delivery device of claim 1, further comprising:

5. The service element includes machine-readable code.

10. The material delivery device of claim 1.

6. The retention mechanism is configured to engage a surface of the service element.

10. The material delivery device of claim 1.

7. The retention mechanism may include a resilient component, a gripper component, a material component, a friction fit component, and / or a holder component.

10. The material delivery device of claim 1.

8. The service element comprises at least one of a material syringe, a dispenser valve, a dispenser cartridge, a cleaning strip, a reference tile, a purge cup, a scale cup, a cleaning strip, and / or a dispenser cup.

10. The material delivery device of claim 1.

9. The machine comprises a dispensing machine.

10. The material delivery device of claim 1.

10. 1. A system for automated material delivery configured to provide delivery of service elements to a machine, comprising: The material delivery device of claim 1 ; a machine configured to use the service element; a controller configured to provide operation, control, and / or monitoring of the service element, the material delivery device, and / or the machine; at least one machine code reading device configured to read the machine readable code device of the material delivery device and / or the machine readable code device of the service element; 1. A system for automated material delivery comprising:

11. The controller is configured to provide an error indication and / or a shutdown action when it determines, based on the device-related information, that the material delivery device and / or the service element is incorrect.

11. The system for automated material delivery of claim 10.

12. The machine has a transport system configured to remove the service element from the material delivery device.

11. The system for automated material delivery of claim 10.

13. The machine is configured to move the service element onto a working portion of the machine.

11. The system for automated material delivery of claim 10.

14. The machine has a transport system configured to insert the service element into the material delivery device.

11. The system for automated material delivery of claim 10.

15. The machine is configured to remove the service element from a working portion of the machine.

11. The system for automated material delivery of claim 10.

16. The service element comprises at least one of a material syringe, a dispenser valve, a dispenser cartridge, a cleaning strip, a reference tile, a purge cup, a scale cup, a cleaning strip, and / or a dispenser cup.

11. The system for automated material delivery of claim 10.

17. The service element has a connection configured to connect to an operating portion to provide actuation of the dispenser valve.

17. The system for automated material delivery of claim 16.

18. The machine is configured to dispense fluid from the material syringe through the dispenser cartridge by controlled operation of the dispenser valve.

17. The system for automated material delivery of claim 16.

19. the service element further comprises a mounting plate; a portion of the service element configured to be attached to the mounting plate; The mounting plate has connection portions configured to connect to corresponding connection portions of a working part of the machine.

11. The system for automated material delivery of claim 10.

20. Modular device configured as an equipment front-end module (EFEM) 11. The system for automated material delivery of claim 10, further comprising:

21. The modular device has a refrigerated compartment for holding the material delivery device and / or the service element.

21. The system for automated material delivery of claim 20.

22. The modular device is configured to transport the material delivery device and / or the service element to and from the machine along a transport path.

21. The system for automated material delivery of claim 20.

23. The modular apparatus includes a transport system configured to remove the service element from the material delivery apparatus.

21. The system for automated material delivery of claim 20.

24. The modular device has a transport system configured to insert the service element into the material delivery device.

21. The system for automated material delivery of claim 20.

25. a turret-type tool changer configured to be disposed within the modular device and / or the machine; 21. The system for automated material delivery of claim 20, further comprising:

26. The turret-style tool changer has a plurality of mounting portions configured to engage and retain one or more components of the service element.

26. The system for automated material delivery of claim 25.

27. a transport system configured to move the material delivery device together with the service element to the machine; 11. The system for automated material delivery of claim 10, further comprising:

28. The conveying system is configured to travel to the machine along a transport path within the device manufacturing facility.

28. The system for automated material delivery of claim 27.

29. The transport system comprises an automated material handling system (AMHS) and / or an automated guided vehicle (AGV).

28. The system for automated material delivery of claim 27.

30. a data collection system configured to receive, analyze, store, and provide the equipment-related information relating to the system for automated material delivery, the service element, the machine, the equipment manufacturing facility, modular equipment, and / or a transport system; 11. The system for automated material delivery of claim 10, further comprising:

31. The data collection system includes at least one processor, at least one database, at least one network interface, at least one input / output device, and at least one memory.

31. The system for automated material delivery of claim 30.

32. The equipment-related information includes at least one of the following: date and time of a particular operation, date and time of a dispense operation, machine serial number, pressure, temperature, scripted offset data, dispense settings, dispense metrics, valve serial number, period, calibration data, encoder trace, cartridge serial number, period, consumable life, fluid lot number, pot life, syringe level, and / or wafer serial number.

31. The system for automated material delivery of claim 30.

33. The data collection system and the machine code reader are configured to identify components of the system for automated material delivery.

31. The system for automated material delivery of claim 30.

34. The data collection system is configured to receive device-related information of components of the system for automated material delivery.

31. The system for automated material delivery of claim 30.

35. The data collection system is configured to transmit the device-related information.

31. The system for automated material delivery of claim 30.

36. The data collection system is configured to perform an analysis of the device-related information by the data collection system.

31. The system for automated material delivery of claim 30.

37. Analysis of the equipment-related information by the data collection system may include analysis, determination, and / or action for one or more components of the equipment manufacturing facility, including the service elements, the machines, and / or the material delivery equipment.

37. The system for automated material delivery of claim 36.

38. The analysis relates to automated process control, automated error prediction and recovery, data analysis and traceability, sensor data, alarm conditions, commanded actions, dispensing metrics, production health, automated process control routines, settings to meet performance specifications, classification of normal and abnormal dispensing conditions, process control algorithms to adjust settings as needed, recorded sensor data to predict, recognize and recover from common alarm and error conditions with minimal operator intervention, and / or control of various machines in the system for automated material delivery.

37. A system for automated material delivery as recited in claim 36.

39. 1. A material delivery process for providing delivery of service elements to machines in an equipment manufacturing facility, comprising: Implementing a material delivery device; configuring the material delivery device with a plurality of side walls, a top wall, a floor, an interior space, and a rear wall; configuring the material delivery device with a machine readable code device; configuring the material delivery device with at least one power connector configured to provide power to components of the material delivery device; configuring the material delivery device with at least one sensor for sensing a physical characteristic associated with the material delivery device and / or the service element to generate, in part, the device-related information; configuring the material delivery device with a transceiver for transmitting the device-related information to a controller; configuring the material delivery device with a retention mechanism disposed within the interior space for receiving and / or securely retaining the service element; A material delivery process comprising:

40. The at least one sensor includes a temperature sensor.

40. The material delivery process of claim 39.

41. The material delivery device is in the form of a Front Opening Unified Pod (FOUP) configured to hold the service element.

40. The material delivery process of claim 39.

42. Configuring the material delivery device with a connection assembly configured to connect to a component of a transport system.

40. The material delivery process of claim 39, further comprising:

43. The service element includes machine-readable code.

40. The material delivery process of claim 39.

44. The retention mechanism is configured to engage a surface of the service element.

40. The material delivery process of claim 39.

45. The retention mechanism may include a resilient component, a gripper component, a material component, a friction fit component, and / or a holder component.

40. The material delivery process of claim 39.

46. The service element comprises at least one of a material syringe, a dispenser valve, a dispenser cartridge, a cleaning strip, a reference tile, a purge cup, a scale cup, a cleaning strip, and / or a dispenser cup.

40. The material delivery process of claim 39.

47. The machine comprises a dispensing machine.

40. The material delivery process of claim 39.

48. Implementing a machine configured to use the service element; implementing a controller to provide operation, control, and / or monitoring of the service element, the material delivery device, and / or the machine; implementing at least one machine code reading device for reading the machine readable code device of the material delivery device and / or the machine readable code device of the service element; 40. The material delivery process of claim 39, further comprising:

49. The controller is configured to provide an error indication and / or a shutdown action when it determines, based on the device-related information, that the material delivery device and / or the service element is incorrect.

49. The material delivery process of claim 48.

50. The machine has a transport system configured to remove the service element from the material delivery device.

49. The material delivery process of claim 48.

51. The machine is configured to move the service element onto a working portion of the machine.

49. The material delivery process of claim 48.

52. The machine has a transport system configured to insert the service element into the material delivery device.

49. The material delivery process of claim 48.

53. The machine is configured to remove the service element from a working portion of the machine.

49. The material delivery process of claim 48.

54. The service element comprises at least one of a material syringe, a dispenser valve, a dispenser cartridge, a cleaning strip, a reference tile, a purge cup, a scale cup, a cleaning strip, and / or a dispenser cup.

49. The material delivery process of claim 48.

55. The service element has a connection configured to connect to an operating portion to provide actuation of the dispenser valve.

55. The material delivery process of claim 54.

56. The machine is configured to dispense fluid from the material syringe through the dispenser cartridge by controlled operation of the dispenser valve.

55. The material delivery process of claim 54.

57. the service element further comprises a mounting plate; a portion of the service element configured to be attached to the mounting plate; The mounting plate has connection portions configured to connect to corresponding connection portions of a working part of the machine.

49. The material delivery process of claim 48.

58. Packaging a modular device configured as an Equipment Front End Module (EFEM) 49. The material delivery process of claim 48, further comprising:

59. The modular device has a refrigerated compartment for holding the material delivery device and / or the service element.

60. The material delivery process of claim 58.

60. The modular device is configured to transport the material delivery device and / or the service element to and from the machine along a transport path.

60. The material delivery process of claim 58.

61. The modular apparatus includes a transport system configured to remove the service element from the material delivery apparatus.

60. The material delivery process of claim 58.

62. The modular device has a transport system configured to insert the service element into the material delivery device.

60. The material delivery process of claim 58.

63. Installing a turret-style tool changer configured to be disposed within the modular apparatus and / or the machine.

60. The material delivery process of claim 58, further comprising:

64. The turret-style tool changer has a plurality of mounting portions configured to engage and retain one or more components of the service element.

64. The material delivery process of claim 63.

65. Implementing a transport system configured to move the material delivery device together with the service element to the machine.

49. The material delivery process of claim 48, further comprising:

66. The conveying system is configured to travel to the machine along a transport path within the device manufacturing facility.

66. The material delivery process of claim 65.

67. The transport system comprises an automated material handling system (AMHS) and / or an automated guided vehicle (AGV).

66. The material delivery process of claim 65.

68. Implementing a data collection system configured to receive, analyze, store, and provide the equipment-related information for the service elements, the machines, the equipment manufacturing facilities, modular equipment, and / or transport systems.

49. The material delivery process of claim 48, further comprising:

69. The data collection system includes at least one processor, at least one database, at least one network interface, at least one input / output device, and at least one memory.

69. The material delivery process of claim 68.

70. The equipment-related information includes at least one of the following: date and time of a particular operation, date and time of a dispense operation, machine serial number, pressure, temperature, scripted offset data, dispense settings, dispense metrics, valve serial number, period, calibration data, encoder trace, cartridge serial number, period, consumable life, fluid lot number, pot life, syringe level, and / or wafer serial number.

69. The material delivery process of claim 68.

71. identifying components for automated material delivery in the data collection system; 69. The material delivery process of claim 68, further comprising:

72. receiving, at said data collection system, component device-related information; 69. The material delivery process of claim 68, further comprising:

73. transmitting the device-related information in the data collection system.

69. The material delivery process of claim 68, further comprising:

74. performing an analysis of the device-related information in the data collection system.

69. The material delivery process of claim 68, further comprising:

75. Analysis of the equipment-related information by the data collection system may include analysis, determination, and / or action for one or more components of the equipment manufacturing facility, including the service elements, the machines, and / or the material delivery equipment.

75. The material delivery process of claim 74.

76. The analysis relates to automated process control, automated error prediction and recovery, data analysis and traceability, sensor data, alarm conditions, commanded actions, dispense metrics, production health, automated process control routines, settings to meet performance specifications, classification of normal and abnormal dispense conditions, process control algorithms to adjust settings as needed, recorded sensor data to predict, recognize and recover from common alarm and error conditions with minimal operator intervention, and / or control of various machines for automated material delivery.

75. The material delivery process of claim 74.

77. 1. A material delivery device configured to provide delivery of service elements to machines in an equipment manufacturing facility, comprising: a plurality of side walls, a top wall, a floor, an interior space, and a rear wall; a machine-readable code device; a retention mechanism disposed within the interior space and configured to receive and / or securely retain the service element; Equipped with the material delivery device is in the form of a Front Opening Unified Pod (FOUP) configured to hold the service element; The retention mechanism is configured to engage a surface of the service element.

1. A material delivery device comprising:

78. A connection assembly configured to connect to a component of a transport system 78. The material delivery device of claim 77, further comprising:

79. The service element includes machine-readable code.

78. The material delivery device of claim 77.

80. The retention mechanism may include a resilient component, a gripper component, a material component, a friction fit component, and / or a holder component.

78. The material delivery device of claim 77.

81. The service element comprises at least one of a material syringe, a dispenser valve, a dispenser cartridge, a cleaning strip, a reference tile, a purge cup, a scale cup, a cleaning strip, and / or a dispenser cup.

78. The material delivery device of claim 77.

82. The machine comprises a dispensing machine.

78. The material delivery device of claim 77.

83. 1. A system for automated material delivery configured to provide delivery of service elements to a machine, comprising:

78. The material delivery device of claim 77; a machine configured to use the service element; a controller configured to provide operation, control, and / or monitoring of the service element, the material delivery device, and / or the machine; at least one machine code reading device configured to read the machine readable code device of the material delivery device and / or the machine readable code device of the service element; 1. A system for automated material delivery comprising:

84. The machine has a transport system configured to remove the service element from the material delivery device.

84. The system for automated material delivery of claim 83.

85. The machine is configured to move the service element onto a working portion of the machine.

84. The system for automated material delivery of claim 83.

86. The machine has a transport system configured to insert the service element into the material delivery device.

84. The system for automated material delivery of claim 83.

87. The machine is configured to remove the service element from a working portion of the machine.

84. The system for automated material delivery of claim 83.

88. The service element comprises at least one of a material syringe, a dispenser valve, a dispenser cartridge, a cleaning strip, a reference tile, a purge cup, a scale cup, a cleaning strip, and / or a dispenser cup.

84. The system for automated material delivery of claim 83.

89. The service element has a connection configured to connect to an operating portion to provide actuation of the dispenser valve.

89. A system for automated material delivery as recited in claim 88.

90. The machine is configured to dispense fluid from the material syringe through the dispenser cartridge by controlled operation of the dispenser valve.

89. A system for automated material delivery as recited in claim 88.

91. the service element further comprises a mounting plate; a portion of the service element configured to be attached to the mounting plate; The mounting plate has connection portions configured to connect to corresponding connection portions of a working part of the machine.

84. The system for automated material delivery of claim 83.

92. Modular device configured as an equipment front-end module (EFEM) 84. The system for automated material delivery of claim 83, further comprising:

93. The modular device has a refrigerated compartment for holding the material delivery device and / or the service element.

93. A system for automated material delivery as recited in claim 92.

94. The modular device is configured to transport the material delivery device and / or the service element to and from the machine along a transport path.

93. A system for automated material delivery as recited in claim 92.

95. The modular apparatus includes a transport system configured to remove the service element from the material delivery apparatus.

93. A system for automated material delivery as recited in claim 92.

96. The modular device has a transport system configured to insert the service element into the material delivery device.

93. A system for automated material delivery as recited in claim 92.

97. a turret-type tool changer configured to be disposed within the modular device and / or the machine; 93. The system for automated material delivery of claim 92, further comprising:

98. The turret-style tool changer has a plurality of mounting portions configured to engage and retain one or more components of the service element.

98. A system for automated material delivery as recited in claim 97.

99. a transport system configured to move the material delivery device together with the service element to the machine; 84. The system for automated material delivery of claim 83, further comprising:

100. The conveying system is configured to travel to the machine along a transport path within the device manufacturing facility.

100. A system for automated material delivery as recited in claim 99.

101. The transport system comprises an automated material handling system (AMHS) and / or an automated guided vehicle (AGV).

100. A system for automated material delivery as recited in claim 99.

102. 1. A material delivery process for providing delivery of service elements to machines in an equipment manufacturing facility, comprising: Implementing a material delivery device; configuring the material delivery device with a plurality of side walls, a top wall, a floor, an interior space, and a rear wall; configuring the material delivery device with a machine readable code device; configuring the material delivery device with a retention mechanism disposed within the interior space for receiving and / or securely retaining the service element; Equipped with the material delivery device is in the form of a Front Opening Unified Pod (FOUP) configured to hold the service element; The retention mechanism is configured to engage a surface of the service element.

10. A material delivery process comprising:

103. Configuring the material delivery device with a connection assembly configured to connect to a component of a transport system.

103. The material delivery process of claim 102, further comprising:

104. The service element includes machine-readable code.

103. The material delivery process of claim 102.

105. The retention mechanism may include a resilient component, a gripper component, a material component, a friction fit component, and / or a holder component.

103. The material delivery process of claim 102.

106. The service element comprises at least one of a material syringe, a dispenser valve, a dispenser cartridge, a cleaning strip, a reference tile, a purge cup, a scale cup, a cleaning strip, and / or a dispenser cup.

103. The material delivery process of claim 102.

107. The machine comprises a dispensing machine.

103. The material delivery process of claim 102.

108. Implementing a machine configured to use the service element; implementing a controller to provide operation, control, and / or monitoring of the service element, the material delivery device, and / or the machine; implementing at least one machine code reading device for reading the machine readable code device of the material delivery device and / or the machine readable code device of the service element; 103. The material delivery process of claim 102, further comprising:

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