Excimer lamp

Abstract

The technology described herein relates to an excimer lamp, by way of example, that includes a dielectric forming at least one side of an enclosed cavity, an electrode array disposed on a surface of the dielectric and including a plurality of electrodes of alternating polarity spaced at respective positions across at least one dimension of the excimer lamp, and a gas within the enclosed cavity capable of emitting ultraviolet light in response to excitation of the electrode array.

Description

[Technical Field]

[0001] (CROSS-REFERENCE TO RELATED APPLICATIONS)

[0001] This specification claims priority under 35 U.S.C. §119(e) to U.S. Provisional Patent Application No. 63 / 387,410 entitled "EXCIMER LAMP," filed December 14, 2022, and U.S. Provisional Patent Application No. 63 / 505,754 entitled "EXCIMER LAMP ENVELOPE UV FILTER," filed June 2, 2023, each of which is incorporated by reference in its entirety.

[0002] TECHNICAL FIELD

[0002] The technology described herein relates generally to ultraviolet light emission, and more specifically to excimer lamps. [Background technology]

[0003]

[0003] Excimer lamps emit ultraviolet (UV) light based on the excitation of gases containing diatomic or polyatomic molecules (excimers). UV light in the UV-C (or UVC) band (100-280 nanometers (nm)) can sterilize viruses and other pathogens. Excimer lamps emitting UV light in this wavelength range may be used to sterilize areas exposed to the excimer lamp. Summary of the Invention

[0004] In accordance with the disclosed subject matter, apparatus, systems, and methods related to excimer lamps are provided.

[0005] Some embodiments relate to an excimer lamp comprising: a dielectric forming at least one side of an enclosed cavity; an electrode array disposed on a surface of the dielectric and including a plurality of electrodes of alternating polarity spaced at respective positions across at least one dimension of the excimer lamp; and a gas within the enclosed cavity capable of emitting ultraviolet light in response to excitation of the electrode array.

[0006] Some embodiments relate to an excimer lamp system that includes a lamp having a dielectric forming at least one side of an enclosed cavity, an electrode array disposed on a surface of the dielectric and including a plurality of electrodes of alternating polarity spaced at respective positions across at least one dimension of the lamp, a window, and a gas within the enclosed cavity capable of emitting ultraviolet light through the window in response to excitation of the electrode array.

[0007] Some embodiments relate to a method of operating an excimer lamp comprising a dielectric forming at least one side of a sealed cavity, an electrode array disposed on a surface of the dielectric and comprising a plurality of electrodes positioned at respective locations across at least one dimension of the excimer lamp, and further comprising a gas within the sealed cavity capable of emitting ultraviolet light in response to excitation of the electrode array, the method including driving adjacent ones of the plurality of electrodes with voltages of alternating polarity.

[0008]

[0008] The foregoing summary is not intended to be limiting, and various aspects of the disclosure may be implemented alone or in combination with other aspects. [Brief explanation of the drawings]

[0009]

[0009] In the drawings, each identical or nearly identical component shown in various figures is represented by a like reference numeral. For clarity, not every component may be labeled in every drawing. The drawings are not necessarily to scale, with emphasis instead being placed on illustrating various aspects of the techniques and apparatus described herein.

[0010] [Figure 1]

[0010] FIG. 1 illustrates a top view of an electrode configuration in an example excimer lamp in some embodiments, where the polarity of the electrodes of the electrode configuration alternates only along a first dimension. [Figure 2]

[0011] 10 shows a top view of another example electrode configuration for an excimer lamp in which the polarity of the electrodes alternates along both the first and second dimensions according to some embodiments. [Figure 3]

[0012] 1 illustrates a cross-sectional view of a two-dimensional excimer lamp according to some embodiments. [Figure 4A]

[0013] 1 illustrates an example of an excimer lamp having two sealed gas-filled tubes according to some embodiments. [Figure 4B]

[0014] 4B illustrates a cross-sectional view of one of the two sealed tubes of FIG. 4A according to some embodiments. [Figure 5]

[0015] 1 illustrates an exploded view of an example excimer lamp system according to some embodiments. [Figure 6]

[0016] 1 shows a plot of transmittance versus wavelength for a specimen of cerium oxide-doped quartz without titanium oxide, according to some embodiments. [Figure 7]

[0017] A flowchart representing an example process that may be performed and / or implemented to manufacture, calibrate, test, and / or operate an excimer lamp, such as any of the exemplary excimer lamps shown in Figures 1, 2, 3, 4A, and / or 4B, and / or an excimer lamp system, such as the excimer lamp system shown in Figure 5, in some embodiments. DETAILED DESCRIPTION OF THE INVENTION

[0011]

[0018] As mentioned above, excimer lamps emit ultraviolet (UV) light in response to the excitation of gases containing excimers. Light in the UV-C band (e.g., wavelengths between 100 and 280 nanometers (nm)) is sometimes used for disinfection purposes, but some wavelengths in the UV-C band are less harmful to humans than other wavelengths. In particular, wavelengths below 230 nm are known to be less harmful to humans than longer UV-C wavelengths.

[0012]

[0019] In some applications, excimer lamps may be used to sterilize areas, and it may be particularly desirable to sterilize large areas. The inventors have recognized and understood that an existing solution for sterilizing such areas (e.g., large areas) is to use multiple small tubular lamps capable of emitting UV light. The inventors have recognized a problem when sterilizing large areas: either more small tubular lamps are required to expose the area to sufficient UV light, or, if fewer small tubular lamps are used, additional time is required to expose the entire area (e.g., additional time to move a few tubular lamps around the large area). The inventors have recognized that miniature tubular lamps can be expensive to manufacture and / or unreliable. A further problem with miniature tubular lamps is that conventional tubular lamps have electrodes on both ends of the tube. The inventors have recognized that such lamps are limited in size, contributing to the aforementioned problem of sterilizing large areas.

[0013]

[0020] The inventors have developed technology for excimer lamps that overcome the above-mentioned challenges. Described herein is an excimer lamp that can be fabricated in relatively large sizes and avoids the disadvantages of conventional excimer lamp designs used for sterilizing large areas. In some embodiments, instead of or in addition to locating electrodes at the ends of the sealed cavity, an array of electrodes of alternating polarity can be located on the surface of the sealed cavity. In some embodiments, the electrodes can be spaced apart by 8 to 12 millimeters (mm) or less. Advantageously, by locating an array of electrodes on the surface of the sealed cavity, excimer lamps of various sizes can be fabricated, including excimer lamps that are larger than conventional excimer lamp designs.

[0014]

[0021] In some embodiments, an excimer lamp including an electrode array may be formed in a two-dimensional shape (e.g., a planar or planar shape). In such lamps, a gas containing excimer molecules is confined between upper and lower substrates that extend in two dimensions in a suitable shape, such as a square, rectangular, triangular, and / or spiral shape. The substrates may be planar or curved and are not limited to being strictly flat. An electrode array on at least one of the substrates may excite the excimer gas, and the substrate opposite the electrode array may provide a transparent window through which UV light can exit the lamp. In some embodiments, illumination may be provided across the transparent window. In some such embodiments, the transparent window may be a two-dimensional window having an area of, for example, any area of ​​about 1-4 square feet or greater.

[0015]

[0022] In some embodiments, an excimer lamp may include an array of electrodes spaced apart along a first dimension. For example, a tube formed of a dielectric (e.g., a dielectric material) may form a sealed cavity containing a suitable gas, with an array of electrodes of alternating polarity disposed along the length of the tube. Advantageously, the tube may be formed to any length, and a greater number of electrodes may result in a longer lamp, and thus a longer arc length.

[0016]

[0023] By forming tubes of any length to form long lamps, the inventors' developed technology overcomes the challenges of conventional lamps for wide-area disinfection. Furthermore, by forming long lamps, the inventors' developed technology reduces the number of individual lamp assemblies, thereby improving reliability and / or reducing manufacturing costs. In some embodiments, an excimer lamp may include multiple tubes, each with an array of alternating polarity voltages.

[0017]

[0024] Further advantages of the excimer lamps described herein include the absence of a reflector and the need for UV light to pass through a mesh that, in standard designs, can block some of the UV light and reduce its efficiency. Non-limiting examples of possible applications for the excimer lamps described herein include air disinfection, air purification, surface area disinfection, and water disinfection.

[0018]

[0025] As described above, UV light passing through the mesh can be eliminated by configuring the lamp envelope itself to block UV light in a desired manner, without the need for a separate spectral filter. For example, some conventional excimer lamps produce secondary UV light at wavelengths that are harmful to humans. For example, krypton chloride (KrCl) excimer lamps have most of their output near 222 nm, but also have secondary output at 257 nm. Similarly, krypton bromide (KrBr) excimer lamps have most of their output near 208 nm, followed by outputs at 228 nm and 291 nm. These secondary outputs at wavelengths longer than 230 nm may be undesirable because they limit the amount of "good UV" that an excimer lamp can produce based on regulatory maximum exposure limits (e.g., threshold limit values ​​(TLVs)) for "harmful UV."

[0019]

[0026] The standard industry solution for attenuating wavelengths longer than 230 nm is to utilize filters to remove the unwanted wavelengths. These filters can be either absorptive filters for the unwanted wavelengths, or reflective filters for the unwanted wavelengths, the latter directing harmful radiation away from the human body.

[0020]

[0027] This unwanted wavelength filter can take the form of a single or multi-layer dielectric coating applied to a quartz or sapphire substrate located at the exit window of the instrument containing the excimer lamp, or the dielectric filter can be applied or deposited on one or both of the surface or envelope of the excimer lamp bulb.

[0021]

[0028] Suitable single and multi-layer filter stacks can be fabricated by a variety of deposition techniques and include dielectric materials such as silicon oxide, hafnium oxide, aluminum oxide, etc. Of these materials, hafnium oxide and aluminum oxide have been preferred based on their ability to withstand UV radiation without significant degradation over the product's lifetime.

[0022]

[0029] Such spectral filters may include one or more dielectric layers. Such filters are designed to pass UV light near 222 nm and block longer, more harmful UV light. The inventors recognize and understand that such UV filters increase the cost of the system. Perhaps more importantly, such filters also significantly reduce the amount of "good" UV output.

[0023]

[0030] The inventors also recognize that filter performance changes over time or mechanical failure at the system level can increase the transmittance of UV light longer than 230 nm.Furthermore, flat dielectric filters can degrade off-axis response and cause uneven output from the device, significantly impacting virus sterilization performance in low-output areas and compromising the safety of people in the space.

[0024]

[0031] In some embodiments, excimer lamps can be configured so that the lamp envelope itself can block UV light in a desired manner without the need for a separate spectral filter. Such excimer lamps may include a lamp envelope containing a dielectric material that traps a gas. The dielectric material of the lamp envelope itself may be manufactured to block UV light in a desired manner. For example, the dielectric material of the lamp envelope may be manufactured to have a relatively high transmittance for UV light in the 190-230 nm band and a relatively low transmittance for UV light at longer wavelengths that may be harmful to humans. The lamp envelope may be formed from a suitable dielectric material, such as quartz or sapphire. The dielectric material may be doped to achieve appropriate optical properties, such as a relatively high transmittance for UV light in the 190-230 nm band and a relatively low transmittance for UV light at wavelengths longer than 250 nm. This technique may eliminate the need for a separate filter and potentially improve off-axis spectral filtering.

[0025]

[0032] We investigated the use of commercially available cerium-doped quartz (also called cerium-doped quartz) and titanium-doped quartz (also called titanium-doped quartz) for excimer lamps. However, both options completely blocked the "good UV" output (190-230 nm).

[0026]

[0033] The inventors discovered that commercially available cerium-doped quartz actually contains both cerium oxide and titanium oxide as dopants, a combination that blocks good UV transmission. Therefore, the inventors developed a quartz doping method that uses only cerium oxide as the dopant, resulting in no good UV blocking.

[0027]

[0034] Various concentrations and formulations of cerium oxide were used to develop doped dielectric quartz materials, each with different output values ​​at 222 nm and 257 nm. The formulations tested successfully increased the ratio of 222 nm to 257 nm to the point where the output at 257 nm was low enough that only the Threshold Limit Value (TLV) for 222 nm was a consideration. For undoped tubes, emissions at 257 nm could trigger TLV safety requirements even if 222 nm was within safe levels.

[0028]

[0035] The advantage of excimer lamps manufactured using this improved novel doped dielectric quartz material (or glass, or sapphire material) is that no external filters are required for practical disinfection applications to protect human health from harmful UV radiation.

[0029]

[0036] The lamp envelope may be of any suitable shape, such as, for example, tubular, coaxial tubular, or generally planar. The lamp envelope forms a sealed cavity containing a gas configured to emit UV light in response to excitation. The excitation may take any suitable form, such as electrical or optical (e.g., using a laser). If electrically excited, electrodes may be provided at any suitable location, such as at the ends of the cavity or by covering the surface of the lamp with a wire mesh electrode.

[0030]

[0037] The techniques described herein are not limited to specific embodiments and can be implemented in numerous ways. Details of the embodiments are provided herein for illustrative purposes only. Furthermore, the techniques disclosed herein are not limited to the use of any particular technique or combination of techniques, and the techniques disclosed as aspects of the techniques disclosed herein may be used individually or in any suitable combination.

[0031]

[0038] Referring to the drawings, FIG. 1 illustrates a top view of a first example excimer lamp 100 having a first example electrode configuration 102. The first electrode configuration 102 is an array of electrodes (e.g., an electrode array) including multiple electrodes 104, 106 that alternate in polarity only along a first dimension 108, which in this example is the X dimension. A different number of electrodes than that illustrated in FIG. 1 may be used. The first electrode configuration 102 has a pattern that may be considered a "striped" pattern. In an operational example, the first excimer lamp 100 emits UV light in response to excitation by any of the multiple electrodes 104, 106. For example, in response to excitation by any of the multiple electrodes 104, 106, an electric arc may be generated and traverse between any of the excited electrodes 104, 106.

[0032]

[0039] The first electrode configuration 102 includes a first set of electrodes 104, each electrode in the first set of electrodes 104 identified with an "A." Each electrode in the first set of electrodes 104 is configured to have a voltage (e.g., 5 kV) of a first polarity (e.g., a first voltage polarity, a positive voltage polarity such as +5 kV) applied to it. The first electrode configuration 102 includes a second set of electrodes 106, each electrode in the second set of electrodes 106 identified with a "B." Each electrode in the second set of electrodes 106 is configured to have a voltage (e.g., 5 kV) of a second polarity (e.g., a second voltage polarity, a negative voltage polarity such as -5 kV) applied to it, the second polarity being opposite and / or different from the first polarity. For example, adjacent pairs of electrodes may have alternating polarities that may be used to initiate an arc between adjacent pairs of electrodes, such as by applying a voltage of −5 kV to electrode 106a, a voltage of +5 kV to electrode 104a, a voltage of −5 kV to electrode 106b, and a voltage of +5 kV to electrode 104b, etc. In such an example, the arc length may extend the length of the electrodes 104, 106 along the first dimension 108.

[0033]

[0040] In the illustrated example, the same nominal voltage is applied to each of the plurality of electrodes 104, 106. Alternatively, different nominal voltages may be provided to any of the plurality of electrodes 104, 106. For example, a first electrode in the first set of electrodes 104 may be supplied with a first nominal voltage, and a second electrode in the first set of electrodes 104 may be supplied with a second nominal voltage that is different from the first nominal voltage. As another example, an electrode in the first set of electrodes 104 may be supplied with a first nominal voltage, and an electrode in the second set of electrodes 106 may be supplied with a second nominal voltage that is different from the first nominal voltage.

[0034]

[0041] 1, each of the plurality of electrodes 104, 106 is rectangular. Alternatively, one or more of the plurality of electrodes 104, 106 may have a different shape, such as a square, a triangle, a spiral, etc. In the illustrated example, each of the plurality of electrodes 104, 106 has the same length along a second dimension 110, which in this example is the Y dimension. Alternatively, one or more of the plurality of electrodes 104, 106 may have different lengths.

[0035]

[0042] In the illustrated example, a first electrode of the first set of electrodes 104 closest to a first side 112 of the first excimer lamp 100 and a second electrode of the second set of electrodes 106 closest to a second side 114 of the first excimer lamp 100 opposite the first side 112 each have a first width 116 (denoted W1) in a first dimension 108. Other electrodes of the plurality of electrodes 104, 106 have a second width 118 (denoted W2) that is wider than the first width 116 in the first dimension 108. In this example, narrower electrodes at the ends and / or other closer portions of the first excimer lamp 100 can aid and / or assist in equalizing electrode capacitance across the electrode array to enable more uniform plasma distribution. For example, the surfaces (e.g., surface areas) of the electrodes 104, 106 can be utilized to equalize capacitance between lamp segments. At the ends of the cavity of the first excimer lamp 100, the two narrow electrodes shown are approximately half the size (area) of the wider electrodes at the non-ends of the excimer lamp 100. Advantageously, by processing the surfaces of the electrodes 104, 106, the capacitance between the electrodes 104, 106 can be equalized, thereby equalizing the operating voltage of each lamp segment and thus the plasma distribution across the lamp segments.

[0036]

[0043] Further, as shown in this example, each of the plurality of electrodes 104, 106 may have the same length in the second dimension 110, although in other embodiments, any of the plurality of electrodes 104, 106 may have a different length than any of the other plurality of electrodes 104, 106. Also, as shown in this example, a first spacing 120 (denoted as D1) between adjacent electrodes near the ends of the first excimer lamp 100 (e.g., electrodes designated as 104a, 106a) is smaller (e.g., shorter) than a second spacing 122 (denoted as D2) between adjacent electrodes away from the ends of the first excimer lamp 100 (e.g., electrodes designated as 104b, 106b).

[0037]

[0044] FIG. 2 illustrates a top view of a second example excimer lamp 200 having a second example electrode configuration 202. The second electrode configuration 202 is an electrode array including multiple electrodes 204, 206 that alternate in polarity along both a first dimension 208 and a second dimension 210, which in this example are the X and Y dimensions, respectively. A different number of electrodes than that shown in FIG. 2 may be used. The second electrode configuration 202 has a pattern that can be considered a "checkerboard" pattern, with spaces or dielectric material between adjacent electrodes. In an operational example, the second excimer lamp 200 emits UV light in response to excitation by any of the multiple electrodes 204, 206. For example, in response to excitation by any of the multiple electrodes 204, 206, an electric arc can be generated and traverse between the excited electrodes 204, 206.

[0038]

[0045] The second electrode configuration 202 includes a first set of electrodes 204, where each electrode in the first set of electrodes 204 is identified with an "A." Each electrode in the first set of electrodes 204 is configured to have a voltage of a first polarity (e.g., a first voltage polarity) applied to it. The second electrode configuration 202 includes a second set of electrodes 206, where each electrode in the second set of electrodes 206 is identified with a "B." Each electrode in the second set of electrodes 206 is configured to have a voltage of a second polarity (e.g., a second voltage polarity) applied to it, where the second polarity is opposite and / or different from the first polarity. For example, adjacent pairs of electrodes may have alternating polarities that may be used to initiate an arc between adjacent pairs of electrodes, such as by applying a voltage of −10 kV to electrode 206a, a voltage of +10 kV to electrode 204a, a voltage of −10 kV to electrode 206b, and a voltage of +10 kV to electrode 204b, etc. In such an example, the arc length may extend the length of the electrodes 204, 206 along the first dimension 208 and / or the second dimension 210.

[0039]

[0046] In the illustrated example, the same nominal voltage is applied to each of the plurality of electrodes 204, 206. Alternatively, different nominal voltages may be provided to any of the plurality of electrodes 204, 206. For example, a first electrode in a first set of electrodes 204 may be supplied with a first nominal voltage, and a second electrode in the first set of electrodes 204 may be supplied with a second nominal voltage that is different from the first nominal voltage. As an example, an electrode in the first set of electrodes 204 may be supplied with a first nominal voltage, and an electrode in the second set of electrodes 206 may be supplied with a second nominal voltage that is different from the first nominal voltage.

[0040]

[0047] Although the plurality of electrodes 204, 206 are shown as having a square or rectangular shape in top view, any of the plurality of electrodes 204, 206 may have any shape in top view. For example, any of the plurality of electrodes 204, 206 may have a circular shape (e.g., a dot shape) or other shapes with curved (e.g., a cylindrical or crescent shape) and / or straight edges (e.g., a triangular, pentagonal, hexagonal, etc.). As shown in FIG. 2, any of the plurality of electrodes 204, 206 may be configured to be narrower at and / or near the ends of the excimer lamp 200, and other embodiments may have narrower electrodes at and / or near the ends. For example, narrower electrodes near the ends of the excimer lamp 200 can help equalize the electrode capacitance across the electrode array, enabling more uniform plasma distribution.

[0041]

[0048] In the illustrated example, the electrodes of the plurality of electrodes 204, 206 closest to and / or adjacent to the second excimer lamp 200 each have a first width 212 (denoted W1) along a first dimension 218. Other electrodes of the plurality of electrodes 204, 206 have a second width 214 (denoted W2) that is wider than the first width 212 along the first dimension 218. For example, narrower electrodes near the ends of the second excimer lamp 200 can aid and / or assist in equalizing electrode capacitance across the electrode array, enabling more uniform plasma distribution. Also, as shown in this example, a first spacing 216 (denoted D1) between adjacent electrodes near the ends of the second excimer lamp 200 is smaller (e.g., shorter) than a second spacing 218 (denoted D2) between adjacent electrodes away from the ends of the second excimer lamp 200.

[0042]

[0049] FIG. 3 shows a cross-sectional view of a third example excimer lamp 300. Note that the third excimer lamp 300 is shown as a two-dimensional excimer lamp. In some embodiments, the third excimer lamp 300 can implement the first excimer lamp 100 of FIG. 1. For example, the third excimer lamp 300 can have a striped electrode configuration. In some embodiments, the third excimer lamp 300 can implement the second excimer lamp 200 of FIG. 2. For example, the third excimer lamp 300 can have a checkerboard electrode configuration. Alternatively, the third excimer lamp 300 can have other electrode configurations.

[0043]

[0050] The third excimer lamp 300 includes an electrode array 302 including alternating electrodes 304, 306 to which different voltages are applied. For example, the electrode array 302 includes multiple electrodes 304, 306 with appropriate spacing and opposite polarities. One skilled in the art would understand how to select an appropriate spacing between adjacent electrodes of the multiple electrodes 304, 306. For example, adjacent electrodes of the multiple electrodes 304, 306 can be spaced apart by no more than a distance in the range of 8 to 12 millimeters (mm). As such, the electrode array 302 in this example can be arranged and / or configured in one of the various electrode configurations described herein.

[0044]

[0051] In the illustrated example, electrode array 302 includes a first set of electrodes 304, where each electrode in the first set of electrodes 304 is identified with an "A." Each electrode in the first set of electrodes 304 is configured to have a voltage applied to it of a first polarity (e.g., a first voltage polarity). Electrode array 302 includes a second set of electrodes 306, where each electrode in the second set of electrodes 306 is identified with a "B." Each electrode in the second set of electrodes 306 is configured to have a voltage applied to it of a second polarity (e.g., a second voltage polarity), where the second polarity is opposite and / or different from the first polarity.

[0045]

[0052] The electrode array 302 is disposed on or above a dielectric 308. The dielectric 308 in this example is a material (e.g., a dielectric material) that is depicted as a first two-dimensional substrate. The dielectric 308 may be formed from any of a variety of dielectric materials. Non-limiting examples of dielectric materials include glass, quartz, sapphire, and ceramic materials. In some embodiments, the dielectric 308 is opaque to UV light. In some embodiments, the dielectric 308 is transparent to UV light.

[0046]

[0053] A gas 310 is trapped, sealed, and / or contained within a cavity 312 between the dielectric 308 and a window 314. The window 314 in this example is a transparent window, shown as a second two-dimensional substrate. The gas 310 is excited by the electrode array 302 to emit UV light, which is emitted from a third excimer lamp 300 through the transparent window 314.

[0047]

[0054] The window 314 may be constructed and / or formed from any of a variety of materials that allow UV light of the desired wavelengths to pass through. Non-limiting examples of window materials include glass, quartz, and sapphire. In some embodiments, the window 314 may be coated and / or doped to absorb and / or attenuate unwanted wavelengths so that desired wavelengths can be transmitted through the window 314. For example, the window 314 may be coated and / or doped to absorb and / or prevent UV light with a wavelength (e.g., peak wavelength) of 257 nanometers (nm) from passing through the window 314. By way of example, the window 314 may be doped or otherwise fabricated to have a relatively high transmittance for UV light in the 190-230 nm range and a relatively low transmittance for UV light with wavelengths longer than 230 nm. In some embodiments, the window 314 may be doped with cerium oxide to block unwanted long-wavelength UV light. To avoid excessive attenuation of wavelengths between 190 nm and 230 nm, window 314 may not be doped with titanium oxide. By not being doped with titanium oxide, window 314 may be free of titanium oxide or substantially free of titanium oxide. In some embodiments, window 314 may be a monolithic structure (e.g., glass, quartz, or sapphire). In some embodiments, window 314 itself may provide spectral filtering to remove UV wavelengths above 230 nm, thereby eliminating the need for a separate spectral filter. As used herein, the term "transparent" refers to the ability of a window, such as window 314, to transmit light of a desired wavelength, and includes any degree of transparency, from partially transparent to completely transparent.

[0048]

[0055] The dielectric 308 may be bonded to the electrode array 302 and / or the transparent window 314 by any suitable technique. For example, the dielectric 308 may be attached and / or bonded to the electrode array 302 by brazing, adhesive, soldering, and / or welding. In another example, the dielectric 308 may be attached and / or bonded to the window 314 by brazing, adhesive, soldering, and / or welding.

[0049]

[0056] The dielectric 308 can be rigid or flexible. The window 314 can be rigid or flexible. For example, a rigid structure can be useful in various applications for mounting to a ceiling, wall, or floor. In another example, a flexible structure can allow a lamp, such as the third excimer lamp 300, to bend and / or curve to accommodate installation on a non-flat or irregular surface.

[0050]

[0057] The gas 310 in this example fills the sealed cavity 312 between the dielectric 308 and the window 314. In some embodiments, the gas 310 can have a pressure less than atmospheric pressure. Alternatively, the gas 310 can be at atmospheric pressure or greater than atmospheric pressure.

[0051]

[0058] The gas 310 contained within the cavity 312 can be any suitable gas, diatomic or polyatomic, that emits UV radiation in response to excitation by one of the electrodes 304, 306. The gas 310 can be a single gas or a mixture of gases. Non-limiting examples of the gas 310 include a krypton chloride (KrCl) gas mixture and a krypton bromide (KrBr) gas mixture. For example, the third excimer lamp 300 can emit UV light with a peak wavelength of 222 nm when the gas 310 is a KrCl gas mixture. In another example, the third excimer lamp 300 can emit UV light with a peak wavelength of 207 nm when the gas 310 is a KrBr gas mixture.

[0052]

[0059] When excited by one of the electrodes 304, 306, the gas 310 can emit light having a peak wavelength in the range of 100 to 230 nm or 200 to 230 nm, for example. For example, the gas 310 can emit light having a peak wavelength in the range of 100 nm to 230 nm or 200 nm to 230 nm. Other peak wavelength ranges are also possible. In another example, when excited by one of the electrodes 304, 306, the gas 310 can emit light having a peak wavelength of 208 nm. In yet another example, when excited by one of the electrodes 304, 306, the gas 310 can emit light having a peak wavelength of 222 nm.

[0053]

[0060] In the illustrated example, the third excimer lamp 300 further includes a drive circuit 316 for driving the plurality of electrodes 304, 306. The drive circuit 316 is configured to generate and / or output a drive waveform for exciting any of the plurality of electrodes 304, 306. Non-limiting examples of drive waveforms include sinusoidal waves and pulse waveforms (e.g., pulse-width modulated (PWM) waveforms). Any other type of drive waveform is also contemplated. For example, one skilled in the art would understand how to select an appropriate drive waveform, appropriate voltage, current, and / or power level based on the lamp's geometry, material, gas type, and / or other criteria to emit UV light having a desired peak wavelength.

[0054]

[0061] In some embodiments, the drive circuit 316 includes one or more switches configured to drive the plurality of electrodes 304, 306 at a controlled frequency. Non-limiting examples of switches include microelectromechanical (MEMS) switches and transistors. Other types of switches are also contemplated. Non-limiting examples of transistors include field-effect transistors (FETs), bipolar junction transistors (BJTs) (e.g., NPN BJTs, PNP BJTs), and insulated gate bipolar transistors (IGBTs). Non-limiting examples of FETs include power FETs and metal-oxide-semiconductor interface field-effect transistors (MOSFETs) (e.g., p-channel MOSFETs, n-channel MOSFETs, etc.). Other types of transistors are also contemplated.

[0055]

[0062] In some embodiments, the drive circuitry 316 includes one or more power supplies and / or is configured to be coupled to one or more power supplies. The one or more power supplies can be configured to output current, voltage, and / or power levels appropriate for driving the plurality of electrodes 304, 306. For example, the one or more power supplies can be an alternating current (AC) power supply (e.g., an electrical wall outlet capable of supplying AC power) configured to output a voltage up to 20 kilovolts (kV) (e.g., 20 kV peak-to-peak, 20 kVAC peak-to-peak). Other output voltages are contemplated, including voltages up to 5 kV (e.g., 5 kV peak-to-peak, 5 kVAC peak-to-peak), up to 10 kV (e.g., 10 kV peak-to-peak, 10 kVAC peak-to-peak), and the like. As another example, the one or more power supplies can be a direct current (DC) power supply (e.g., a 24 volt direct current (VDC) power supply, a 48 VDC power supply), where the DC voltage can be converted to AC voltage via a DC-to-AC power converter.

[0056]

[0063] In the illustrated example, the same nominal voltage is applied to each of the plurality of electrodes 304, 306. Alternatively, different nominal voltages may be provided to any of the plurality of electrodes 304, 306. For example, a first electrode in a first set of electrodes 304 may be supplied with a first nominal voltage from a first power supply, and a second electrode in the first set of electrodes 304 may be supplied with a second nominal voltage, different from the first nominal voltage, from a second power supply (or the first power supply). As another example, a first electrode in a first set of electrodes 304 may be supplied with a first nominal voltage from a first power supply, and a second electrode in a second set of electrodes 306 may be supplied with a second nominal voltage, different from the first nominal voltage, from a second power supply (or the first power supply).

[0057]

[0064] The inventors have recognized and understood that the apparatus and techniques described herein can be applied to lamps (e.g., excimer lamps) having one or more sealed tubes, such as those shown in Figure 4A. For example, the inventors have recognized and understood that lamps having one or more sealed tubes are easier to construct, fabricate, and / or manufacture than lamps having one or more non-cylindrical structures.

[0058]

[0065] FIG. 4A shows an example of a fourth excimer lamp 400 having two exemplary enclosed tubes 402a, 402b (collectively 402). The tubes 402 in this example are circular tubes (e.g., cylindrical tubes) having a cylindrical shape. Alternatively, the tubes 402 may have different shapes. For example, any of the tubes 402 may be triangular (e.g., V-shaped), rectangular, pentagonal, hexagonal, etc. The tubes 402 in this example may be constructed to any length. For example, by adding additional electrodes of alternating polarity along the length of the tubes 402, each tube 402 may have a length of 600 mm (e.g., about 2 feet), a length of 1200 mm (e.g., about 4 feet), etc.

[0059]

[0066] The tube 402 in this example is a tube of a dielectric material, such as the dielectric 308 described in FIG. 3 , and may be filled with one or more gases 404, such as the gas 310 described in FIG. 3 . However, a lamp may be formed with any number of tubes 402, such as one, two, four, eight, or any other number of tubes. The tubes 402 may be formed of a transparent material, such as glass. Alternatively, the tubes 402 may be formed of a different transparent material, such as quartz or sapphire. In some embodiments, the material of the envelope (e.g., the outer surface) of the tube 402 may be doped with cerium oxide to block unwanted long-wavelength UV light. To avoid excessive attenuation of wavelengths between 190 nm and 230 nm, the material of the envelope of the tube 402 may not be doped with titanium oxide. By not doping with titanium oxide, the envelope of the tube 402 may be free of titanium oxide or substantially free of titanium oxide.

[0060]

[0067] Each tube 402 in this example has a plurality of electrodes 406, 408 arranged on the curved side of the tube 402 to transmit UV light along the end of the tube 402. The plurality of electrodes 406, 408 includes a first set of electrodes 406 (each electrode identified with an "A") and a second set of electrodes 408 (each electrode identified with a "B"). Each electrode in the first set of electrodes 406 can have a first polarity (e.g., a first voltage polarity). Each electrode in the second set of electrodes 408 can have a second polarity (e.g., a second voltage polarity), which in some embodiments is opposite to the second polarity.

[0061]

[0068] The electrodes 406, 408 can be formed of any suitable conductive material, such as metal. Non-limiting examples of conductive materials include aluminum, copper, nickel, stainless steel, and chrome-plated materials. For example, forming the electrodes 406, 408 from a reflective conductor, such as aluminum, can reflect UV light to the opposite side of the fourth excimer lamp 400, thereby increasing light transmission efficiency. In some embodiments, the electrodes 406, 408 can each be formed from the same conductive material. Alternatively, each of the electrodes 406, 408 can be formed from a different conductive material. For example, any of the electrodes 406 in the first set can be formed from a first conductive material, such as aluminum, and any of the electrodes 408 in the second set can be formed from a second conductive material, such as stainless steel. As another example, the first electrode in the first set of electrodes 406 can be formed from a first conductive material, such as aluminum, and the second electrode in the first set of electrodes 406 can be formed from a second conductive material, such as stainless steel.

[0062]

[0069] The electrodes 406, 408 may contact the tube 402 as shown in FIG. 4B, which shows a cross-section of one of the tubes 402 along dashed line 410 in FIG. 4A. As shown in FIG. 4B, the electrodes 406, 408 may extend approximately 180 degrees around the circumference of the tube 402 (e.g., extending 180 degrees, extending between 179 and 181 degrees, etc.). However, this is just one example; in other cases, the electrodes may extend a greater (e.g., 185 degrees, 200 degrees, etc.) or less (e.g., 175 degrees, 160 degrees, etc.) circumference of the tube 402. In this example, the electrodes 406, 408 are arc-shaped to match the shape of the tube 402. Alternatively, any of the electrodes 406, 408 may have a different shape, such as a V-shape. In the illustrated example, the shape of the tube 402 may enable UV light to be emitted in the direction indicated by arrow 412.

[0063]

[0070] As described for the other excimer lamps 100, 200, 300 described herein, the fourth excimer lamp 400 includes electrodes A and B that alternate in polarity along the length of the tube 402. In some embodiments, there may be a single power supply or a single instance of the driver circuit 316 of Figure 3 for all tube electrodes of the fourth excimer lamp 400. In other embodiments, such as for long lamps, there may be separate power supplies or separate instances of the driver circuit 316 to drive each tube electrode of the fourth excimer lamp 400.

[0064]

[0071] 5 shows an exploded view of one example of an excimer lamp system 500. In some embodiments, the excimer lamp system 500 can implement the first excimer lamp 100 of FIG. 1, the second excimer lamp 200 of FIG. 2, the third excimer lamp 300 of FIG. 3, and the fourth excimer lamp 400 of FIGS. 4A and 4B.

[0065]

[0072] The excimer lamp system 500 in the illustrated example includes a plurality of lamps 502. In this example, the plurality of lamps 502 is a set of four excimer lamps configured in a tubular configuration. Alternatively, the excimer lamp system 500 may include a different number of excimer lamps. While each of the illustrated plurality of lamps 502 is configured as a cylindrical and / or cylindrical tube, other shapes are possible. For example, any of the plurality of lamps 502 may be configured as a V-shaped tube, a rectangular tube, etc. In some embodiments, each of the plurality of lamps 502 may be implemented by one of the tubes 402a, 402b in FIG. 4A and / or the tube 402 in FIG. 4B. For example, each of the plurality of lamps 502 may have one or more dielectric surfaces extending longitudinally along the lamp 502.

[0066]

[0073] In the illustrated example, lamp 502 is attached to a plurality of electrodes 504, 506. The plurality of electrodes 504, 506 in this example includes a first set of electrodes 504 and a second set of electrodes 506. In this example, the first set of electrodes 504 are energized by a voltage of a first polarity, and the second set of electrodes 506 are energized by a voltage of a second polarity opposite the first polarity.

[0067]

[0074] In the illustrated example, the first set of electrodes 504 includes four electrodes 504a, 504b, 504c, and 504d, two electrodes at each tip of the excimer lamp system 500 (e.g., electrodes 504a and 504b at the first tip and electrodes 504c and 504d at the second tip). In the illustrated example, the second set of electrodes 506 includes four electrodes 506a, 506b, 506c, and 506d, two electrodes toward the first tip (e.g., electrodes 506a and 506b) and two electrodes toward the second tip (e.g., electrodes 506c and 506d). Alternatively, a different number of electrodes may be used in the first set of electrodes 504 and / or the second set of electrodes 506.

[0068]

[0075] Adjacent electrodes 504a, 504b, 504c, 504d, 506a, 506b, 506c, 506d have alternating polarities. For example, electrode 504a may have a positive voltage polarity, electrode 506a may have a negative voltage polarity, electrode 506c may have a positive voltage polarity, and electrode 504c may have a negative voltage polarity, thereby implementing a positive-negative-positive-negative polarity configuration along the length of lamp 502 and increasing the arc length along the length of lamp 502. In such an example, the arch length may be tripled using this polarity configuration because a first arc may be formed between the positive-negative voltage polarity of electrodes 504a and 506a, a second arc may be formed between the negative-positive voltage polarity of electrodes 506a and 506c, and a third arc may be formed between the positive-negative voltage polarity of electrodes 506c and 504c.

[0069]

[0076] The electrodes in the first set of electrodes 504 each have a width that is shorter than the widths of the electrodes in the second set of electrodes 506, ensuring that each electrode system is balanced with respect to the capacitance supplied to the excimer lamp system 500. For example, the electrodes in the first set of electrodes 504 can have a width that is half the width of each of the electrodes in the second set of electrodes 506, and the widths of the electrodes in the first set of electrodes 504 can be set to provide half the capacitance of the electrodes in the second set of electrodes 506.

[0070]

[0077] In this example, the multiple electrodes 504, 506 are configured as W-shaped channels. For example, the electrode 504a is made of a conductive material such as a metal (e.g., aluminum, copper, nickel, stainless steel, or chrome-plated material) and is formed as two channels. Each channel may be configured as a U-shape (two adjacent U-shaped channels form a W-shaped electrode) to detachably receive one of the lamps 502. For example, the first channel 508a of the electrode 504a may be configured to be detachably attached to a first one of the lamps 502, and the second channel 508b of the electrode 504a may be configured to be detachably attached to a second one of the lamps 502.

[0071]

[0078] In some embodiments, the plurality of electrodes 504, 506 can be of unitary construction. For example, the first channel 508a and the second channel 508b of the electrode 504a can be configured as a single component. Alternatively, the plurality of electrodes 504, 506 can be of multi-body construction. For example, the first channel 508a and the second channel 508b of the electrode 504a can be configured as separate components that are attached together by a suitable technique, such as soldering or welding.

[0072]

[0079] Advantageously, the placement of multiple electrodes 504, 506 along the length of the lamp 502 allows for longer lamps and longer arc lengths (e.g., electric arc lengths) to be fabricated with higher power output than single-tube planar systems. For example, each of the lamps 502 shown in FIG. 5 can have a length ranging from 500 to 600 mm. Advantageously, by increasing the number of electrodes and increasing the tube length, the excimer lamp system 500 shown in FIG. 5 can implement a longer discharge and higher photon UV output overall. Advantageously, the excimer lamp system 500 of FIG. 5 can reduce manufacturing costs by fabricating a long tube (e.g., the lamp 502 shown in FIG. 5) instead of multiple short tubes. Advantageously, the excimer lamp system 500 of FIG. 5 is more reliable than lamp systems with shorter lamps due to the fewer tubes.

[0073]

[0080] 5 illustrates the components used to assemble an excimer lamp system 500. These components include lamp supports 510, 512, a gasket 514, a window 516, a cover 518, side supports 520, 522, an insulator 524, a plate 526, and a fastener 528. Two lamp supports 510, 512 are shown configured with openings for removably mounting the lamps 502. For example, the openings in the lamp supports 510, 512 can be configured to maintain spacing between adjacent lamps 502. The lamp supports 510, 512 are configured to mount to the side supports 520, 522 and the insulator 524. While two lamp supports 510, 512 are used in this example, a different number of lamp supports 510, 512 may be used.

[0074]

[0081] The excimer lamp system 500 includes a gasket 514 to provide a hermetic seal that prevents one or more gases, such as ozone, from escaping the excimer lamp system 500. The gasket 514 can be constructed of an ozone- and / or UV-resistant material. The window 516 is disposed between the gasket and a cover 518, which can be used to press the gasket 514 against the window 516 and the lamp support 510. The cover 518 in this example is a rectangular cover with an opening (e.g., a rectangular opening) that allows UV light emitted through the window 516 to pass through.

[0075]

[0082] In this example, the window 516 is a transparent window (or may be an opaque window) configured to allow UV light to be emitted from the excimer lamp system 500. In some embodiments, the window 516 may be constructed of quartz or sapphire. Other materials, such as glass, may also be used. In some embodiments, the material of the window 516 is coated and / or doped to block unwanted UV wavelengths (e.g., UV light with a wavelength of 257 nm). For example, the material of the window 516 may be doped with cerium oxide to block unwanted longer wavelength UV light. To avoid excessive attenuation of wavelengths between 190 nm and 230 nm, the material of the window 516 may not be doped with titanium oxide. By not being doped with titanium oxide, the window 516 may be free of titanium oxide or substantially free of titanium oxide.

[0076]

[0083] In some embodiments, the excimer lamp system 500 can be configured such that the window 516 is optional. For example, the lamp 502 can be constructed of a coated and / or doped material to prevent emission of unwanted UV wavelengths (e.g., UV light with a wavelength of 257 nm). Additionally or alternatively, the excimer lamp system 500 can include a coated and / or doped window 516 and a coated and / or doped lamp 502. For example, the window 516 can be coated and / or doped to prevent emission of a first range of UV wavelengths, and the lamp 502 can be coated and / or doped to prevent emission of a second range of UV wavelengths. In such embodiments, the material of the envelope (e.g., the outer surface) of the lamp 502 can be doped with cerium oxide to block unwanted longer wavelength UV light. To avoid excessive attenuation of wavelengths between 190 nm and 230 nm, the material of the envelope of the lamp 502 need not be doped with titanium oxide. By not being doped with titanium oxide, the envelope of lamp 502 may be free of titanium oxide or substantially free of titanium oxide.

[0077]

[0084] The side supports 520, 522 are attached to and extend upward from the insulator 524, facilitating assembly of the excimer lamp system 500. The side supports 520, 522 can be attached to the cover 518. In this example, the side supports 520, 522 can be constructed from an insulating material. In this example, the insulator 524 is a plate that can be attached to the plate 526. The insulator 524 also includes a body 530 that has the same or a substantially similar shape as the plurality of electrodes 504, 506. For example, the body 530 is constructed from an insulating material and has a W-shaped structure that includes one or more channels. In this example, the body 530 is positioned between the set of electrodes 504, 506 to maintain a desired spacing between the set of electrodes 504, 506. For example, the body 530 can have a width that, when positioned between the set of electrodes 504, 506, maintains a spacing between the set of electrodes 504, 506 within a range of 8 to 12 mm. Other distances are also contemplated and can be implemented by varying the width of each body 530 .

[0078]

[0085] To further facilitate assembly of the excimer lamp system 500, the plate 526 (identified as the lower plate) can be attached to other components of the excimer lamp system 500. For example, the plate 526 can include a number of holes (e.g., pre-drilled holes) through which any of the fasteners 528 can be inserted (for attachment to any of the other components). The fasteners 528 in this example can also be other types of fasteners, such as bolts. In the illustrated example, the components of the excimer lamp system 500 can be assembled such that the lamp 502 and electrodes 504, 506 are disposed within a housing. For example, the cover 518 and the plate 526, along with the other components shown in FIG. 5, can be combined to form a housing containing the lamp 502 and electrodes 504, 506.

[0079]

[0086] In the illustrated example, the lamp supports 510, 512, the side supports 520, 522, the insulator 524, and the plate 526 are constructed from an insulator, such as a highly insulating material, to avoid and / or reduce electrical losses. Non-limiting examples of highly insulating materials include Teflon, plastic, and ceramics (e.g., ceramic materials). Other types of highly insulating materials are also contemplated.

[0080]

[0087] An electrical connection system 532 is provided to facilitate electrical connection to the excimer lamp system 500. The electrical connection system 532 includes an electrical connector 534 and a plurality of wires 536. The electrical connector 534 and the plurality of wires 536 are adapted for high-voltage electrical connection. For example, the electrical connector 534 is a high-voltage electrical connector that can be coupled to a voltage source of 5 kV, 10 kV, etc. In a further example, the plurality of wires 536 can be high-voltage wires that are adapted to be coupled to a voltage source of 5 kV, 10 kV, etc. In this example, the electrical connector 534 is an electrical plug with electrical terminals (e.g., pins), but in other embodiments, it may be an electrical receptacle with an electrical socket.

[0081]

[0088] In this example, the electrical connector 534 can be configured to be coupled to one or more power supplies such that voltage and current can be output from the power supplies to the lamp 502 via the electrodes 504, 506 and the wires 536. For example, two of the wires 536 can be coupled to one or more power supplies via the electrical connector 534. The remaining four wires 536 can be coupled to the electrodes 504, 506 in a push-pull configuration. For example, two of the four wires 536 can be coupled to a first set of electrodes 504 and two of the four wires 536 can be coupled to a second set of electrodes 506, respectively. In the illustrated example, the wires 536 can be attached to the electrodes 504, 506, and / or to the excimer lamp system 500 more generally, via one of the fasteners 528. Alternatively, any of the wires 536 can be soldered or welded to the corresponding electrodes 504, 506.

[0082]

[0089] FIG. 6 shows a plot 600 of transmittance versus wavelength for a cerium oxide-doped test specimen that does not contain titanium oxide. For example, plot 600 may represent the transmittance of UV light versus wavelength for tube 402 of FIGS. 4A and / or 4B where a portion of the envelope of tube 402 is made of cerium oxide-doped quartz without titanium oxide. As another example, plot 600 may represent the transmittance of UV light versus wavelength for lamp 502 of FIG. 5 where a portion of the envelope of lamp 502 is made of cerium oxide-doped quartz. Plot 600 has an x-axis 602 that represents the wavelength of the UV light in nm. Plot 600 has a y-axis 604 that represents transmittance in %. As noted above, it can be seen that transmittance drops significantly at longer wavelengths.

[0083]

[0090] As shown by plot 600 as one example, a portion of the envelope of the tube 402 of Figures 4A and / or 4B can have a transmittance of at least 50% for light having a wavelength of 222 nm. As shown by plot 600 as another example, a portion of the envelope of the tube 402 of Figures 4A and / or 4B can have a transmittance of at least 70% for light having a wavelength of 222 nm. As shown by plot 600 as yet another example, a portion of the envelope of the tube 402 of Figures 4A and / or 4B can have a transmittance of 20% or less for light having a wavelength of 250 nm to 280 nm. As shown by plot 600 as yet another example, a portion of the envelope of the tube 402 of Figures 4A and / or 4B can have a transmittance of 10% or less for light having a wavelength of 250 nm to 280 nm.

[0084]

[0091] FIG. 7 is a flowchart 700 illustrating an example process that may be performed and / or implemented to manufacture, calibrate, test, and / or operate an excimer lamp, such as any of the excimer lamps 100, 200, 300, 400 shown in FIGS. 1, 2, 3, 4A, and / or 4B, and / or an excimer lamp system, such as the excimer lamp system 500 shown in FIG. 5. In the flowchart 700 of FIG. 7, at block 702, an electrode array including a plurality of electrodes is placed within a housing of the excimer lamp system. For example, one or more users (e.g., an excimer lamp manufacturer, a technician, an assembler, an assembly robot, a collaborative robot, etc.) may place and / or install the plurality of electrodes 504, 506 of FIG. 5 on an insulator 524 so that they are ultimately enclosed within a housing formed by at least components such as the plate 526 and the cover 518 of the excimer lamp system 500 of FIG. 5.

[0085]

[0092] One or more lamps are placed within the housing proximate to the electrode array in block 704. For example, one or more users may attach lamp 502 of Figure 5 to electrodes 504, 506, ultimately enclosed within the housing.

[0086]

[0093] In block 706, an electrical connection system is positioned within the housing proximate to the plurality of electrodes. For example, one or more users may position the electrical connection system 532, or a portion thereof, such as any of the wires 536, for attachment to the electrodes 504, 506, for eventual containment by the housing.

[0087]

[0094] In block 708, an electrical connection system is coupled to the plurality of electrodes to provide voltages of alternating polarity to adjacent electrodes. For example, one or more users may establish an electrical connection between a wire 536 and a corresponding one of the electrodes 504, 506 such that, when one or more power devices coupled to the wire 536 are turned on, voltages of alternating polarity are provided to the adjacent electrodes 504, 506.

[0088]

[0095] In block 710, a determination is made as to whether to operate the excimer lamp system. For example, one or more users may determine to calibrate the excimer lamp system 500, such as by supplying power to the excimer lamp system 500, measuring electrical and / or thermal characteristics of the excimer lamp system 500, and / or adjusting components of the excimer lamp system 500 in response to the measurements. In another example, one or more users may determine to test the excimer lamp system 500 to determine that operation of the excimer lamp system 500 is within a desired and / or expected operating range (e.g., current, voltage, and / or power consumption, ambient temperature rise, UV light radiant efficiency, TLV, etc.). In yet another example, one or more users may determine to operate the excimer lamp system 500 to sterilize an area. In another example, one or more users may determine to operate the excimer lamp system 500 for air purification, air disinfection, and / or water disinfection.

[0089]

[0096] If, in block 710, it is determined that the excimer lamp system is not to be operated, then flowchart 700 ends. For example, excimer lamp system 500 may be packaged for shipment and / or delivery to a customer, prepared for sale, etc., and / or any combination(s). If, in block 710, it is determined that the excimer lamp system is to be operated, then control passes to block 712.

[0090]

[0097] In block 712, one or more users drive adjacent electrodes of the plurality of electrodes with voltages of alternating polarity. For example, electrical connector 534 may be coupled to a power source, such as one or more power supplies or an AC power source such as an electrical wall outlet. After electrical connector 534 is coupled to the power source, one or more users may turn on and / or otherwise enable the power source, thereby providing power to excimer lamp system 500 and driving adjacent electrodes of the plurality of electrodes 504, 506 with voltages of alternating polarity. After driving the electrodes in block 712, flowchart 700 of FIG. 7 ends.

[0091]

[0098] Techniques operating according to the principles described herein may be implemented in any suitable manner. For example, flowchart 700 of Figure 7 illustrates functional information and / or operations that one skilled in the art would use to fabricate, manufacture, calibrate, test, and / or operate an excimer lamp.

[0092]

[0099] It should be noted that some embodiments may take the form of a method, at least one example of which is provided. The acts performed as part of the method may be ordered in any suitable manner. Thus, embodiments may be configured to perform acts in an order different from that shown, which may include performing some acts simultaneously although shown as sequential acts in the exemplary embodiments.

[0093]

[0100] Various aspects of the above-described embodiments may be used alone, in combination, or in various arrangements not described in the foregoing embodiments, and are therefore not limited to the details and arrangements of components shown or illustrated in the foregoing description. For example, aspects described in one embodiment may be combined in any manner with aspects described in other embodiments.

[0094]

[0101] The term "and / or," as used in the specification and claims, should be understood to mean "one or both" of the elements so conjoined, e.g., elements that are sometimes conjunctively present and sometimes disjunctively present. Multiple elements listed with "and / or" should be interpreted similarly, e.g., to mean "one or more" of the elements so conjoined. Other elements may optionally be present other than the elements specifically identified by the "and / or" clause, whether related to those specifically identified elements or not. Thus, as a non-limiting example, a reference to "A and / or B," when used in conjunction with open-ended language such as "comprising," may refer, in one embodiment, to A only (optionally including elements other than B); in another embodiment, to B only (optionally including elements other than A); in yet another embodiment, to both A and B (optionally including other elements), etc.

[0095]

[0102] In this specification and claims, the indefinite articles "a" and "an" should be understood to mean "at least one," unless clearly indicated to the contrary.

[0096]

[0103] In this specification and claims, "at least one," when used in connection with a list of one or more elements, should be understood to mean at least one element selected from any one or more of the listed elements, and does not necessarily imply the inclusion of at least one of each of the listed elements, nor does it exclude any combinations within the list. This definition also allows for elements not specified in the list of elements to which "at least one" refers to be included in the list, i.e., other elements may optionally be present, whether related or unrelated to the elements specified in the list. Thus, as a non-limiting example, the phrase "at least one of A and B" (or, equivalently, "at least one of A or B," or "at least one of A and / or B") can mean, in one embodiment, including at least one (optionally more) A, and no B (optionally including elements other than B); in another embodiment, including at least one (optionally more) B, and no A (optionally including elements other than A); in yet another embodiment, including at least one (optionally more) A and at least one (optionally more) B (optionally including other elements); etc.

[0097]

[0104] The use of ordinal terms such as "first," "second," "third," etc. in the claims to modify claim elements does not, by itself, indicate a priority, precedence, or order of the claim elements or the chronological order in which acts of a method are performed, but is merely used as a label to distinguish one claim element having a particular name from other elements having the same name (but because of the use of ordinal terms) to distinguish between claim elements.

[0098]

[0105] Also, the phraseology and terminology used herein are for the purpose of description and should not be regarded as limiting. As used herein, the use of "including," "comprising," "having," "containing," "involving," and variations thereof, is meant to encompass the items listed thereafter and equivalents thereof, as well as additional items. The terms "coupled" or "connected" mean that circuit elements or signals are linked together, either directly or through intermediate components.

[0099]

[0106] It should be understood that all definitions used herein supersede dictionary definitions, definitions set forth in reference literature, and / or ordinary meanings of the terms.

[0100]

[0107] As used herein, the term "exemplary" means describing as an example, instance, or illustration. Accordingly, any embodiments, examples, processes, features, etc. described herein are illustrative and, unless expressly stated otherwise, are not to be construed as preferred or advantageous.

[0101]

[0108] The terms "approximately," "substantially," and "about" can, in some embodiments, mean within ±20%, ±10%, ±5%, or ±2% of a target value. Note that "approximately" and "about" may include the target value.

[0102]

[0109] Having thus described several aspects of at least one embodiment, it should be understood that various alterations, modifications, and improvements will readily occur to those skilled in the art. Such alterations, modifications, and improvements are intended to be part of this disclosure, and are intended to be within the scope of the principles described herein. Accordingly, the foregoing description and drawings are by way of example only.

[0103]

[0110] This disclosure describes various aspects, including but not limited to the following.

[0111] 1. A dielectric forming at least one side of a sealed cavity; an electrode array comprising a plurality of electrodes of alternating polarity disposed on a surface of a dielectric material and spaced at respective positions across at least one dimension of the excimer lamp; a gas within the sealed cavity capable of emitting ultraviolet light in response to excitation of the electrode array; An excimer lamp comprising:

[0112] 2. The excimer lamp of aspect 1, wherein the dielectric is glass, quartz, sapphire, or a ceramic material.

[0113] 3. The excimer lamp according to any one of aspects 1 to 2, wherein the dielectric has a flat or curved surface.

[0114] 4. The excimer lamp of any one of aspects 1 to 3, wherein the dielectric has a planar surface.

[0115] 5. The excimer lamp according to any one of aspects 1 to 4, further comprising a drive circuit for driving the plurality of electrodes.

[0116] 6. The excimer lamp of any one of aspects 1 to 5, wherein the drive circuit is configured to apply a voltage in the range of up to 10 kilovolts to the plurality of electrodes.

[0117] 7. The excimer lamp of any one of aspects 1 to 6, further comprising a connector configured to apply a voltage from a power supply to the plurality of electrodes in a range of up to 10 kilovolts.

[0118] 8. The excimer lamp of any of aspects 1 to 7, wherein the electrode array is a two-dimensional array of electrodes.

[0119] 9. An excimer lamp according to any one of aspects 1 to 8, wherein at least one dimension comprises a first dimension and a second dimension, and the polarity of the electrodes alternates along both the first dimension and the second dimension.

[0120] 10. The excimer lamp of any one of aspects 1 to 9, wherein the electrode array has a striped pattern.

[0121] 11. The excimer lamp of any one of aspects 1 to 10, wherein the electrode array has a checkerboard pattern.

[0122] 12. The excimer lamp of any one of aspects 1 to 11, wherein the tube with the dielectric forms a sealed cavity.

[0123] 13. The excimer lamp of any one of aspects 1 to 12, wherein the tube is a cylindrical tube, a spiral tube, or a square tube.

[0124] 14. The excimer lamp of any one of aspects 1 to 13, wherein the tube is a cylindrical tube.

[0125] 15. The excimer lamp of any one of aspects 1 to 14, wherein at least a portion of the plurality of electrodes are disposed on the curved side of the tube.

[0126] 16. The excimer lamp of any of aspects 1 to 15, wherein each of the plurality of electrodes extends along a portion of the circumference of the tube.

[0127] 17. A second tube with a second dielectric forming a second sealed cavity; a second electrode array disposed on a surface of the second dielectric and including a second plurality of electrodes having alternating polarities spaced at respective positions across at least one dimension of the excimer lamp; a gas within the second sealed cavity capable of emitting ultraviolet light in response to excitation of the second electrode array; 17. The excimer lamp of any one of aspects 1 to 16, comprising:

[0128] 18. The excimer lamp of any one of aspects 1 to 17, wherein adjacent electrodes of the plurality of electrodes are spaced apart by no more than a distance in the range of 8 to 12 millimeters.

[0129] 19. The excimer lamp of any one of aspects 1 to 18, wherein the ultraviolet light has a peak wavelength of 200 to 230 nanometers.

[0130] 20. The excimer lamp of any one of aspects 1 to 19, having a rigid structure.

[0131] 21. The excimer lamp of any one of aspects 1 to 20, having a flexible structure.

[0132] 22. The excimer lamp of any one of aspects 1 to 21, further comprising a window through which ultraviolet light is emitted.

[0133] 23. The excimer lamp of any one of aspects 1 to 22, wherein the window is a quartz or sapphire material.

[0134] 24. The excimer lamp of any one of aspects 1 to 23, wherein the window is a doped material configured to prevent ultraviolet light having a peak wavelength greater than 230 nanometers from being emitted.

[0135] 25. The excimer lamp of any one of aspects 1 to 24, wherein the sealed cavity comprises a doped surface configured to prevent ultraviolet light having a peak wavelength greater than 230 nanometers from being emitted.

[0136] 26. The excimer lamp of any one of aspects 1 to 25, wherein the excimer lamp does not include a window.

[0137] 27. An excimer lamp according to any one of aspects 1 to 26, wherein the electrode array comprises a first electrode and a second electrode, the first electrode being closer to the end of the sealed cavity than the second electrode and narrower than the second electrode in a direction perpendicular to the end.

[0138] 28. An excimer lamp according to any one of aspects 1 to 27, wherein at least one side comprises a first side and a second side opposite the first side, and the electrode array comprises a first electrode disposed on the first side and a second electrode disposed on the second side.

[0139] 29. The excimer lamp of any one of aspects 1 to 28, wherein the ultraviolet light is emitted through a portion of the sealed cavity between the first side and the second side.

[0140] 30. The excimer lamp of any one of aspects 1 to 29, wherein the ultraviolet light is emitted through a plurality of excimer plasma discharges.

[0141] 31. The excimer lamp of any one of aspects 1 to 30, wherein each of the plurality of electrodes comprises at least one channel that removably receives the sealed cavity.

[0142] 32. A lamp comprising a dielectric forming at least one side of a sealed cavity; an electrode array comprising a plurality of electrodes of alternating polarity disposed on a surface of a dielectric material and spaced at respective positions across at least one dimension of the lamp; Windows and a gas within the sealed cavity capable of emitting ultraviolet light through a window in response to excitation of the electrode array; An excimer lamp system comprising:

[0143] 33. The excimer lamp system of embodiment 32, further comprising a cover attached to the window and forming a housing for the excimer lamp system.

[0144] 34. The excimer lamp system of any one of aspects 32-33, further comprising a lamp support structure mounted in the sealed cavity.

[0145] 35. The excimer lamp system of any of aspects 32 to 34, further comprising a gasket attached to the window and the lamp support structure.

[0146] 36. An excimer lamp system according to any one of aspects 32 to 35, wherein the gasket is resistant to ultraviolet light.

[0147] 37. The excimer lamp system of any of aspects 32 to 36, further comprising one or more second lamps, each comprising a dielectric forming at least one side of a sealed cavity.

[0148] 38. An excimer lamp system according to any one of aspects 32 to 37, wherein the window is a doped material configured to prevent ultraviolet light having a peak wavelength greater than 230 nanometers from being emitted.

[0149] 39. The excimer lamp system of any of aspects 32 to 38, wherein the sealed cavity comprises a doped surface configured to prevent ultraviolet light having a peak wavelength greater than 230 nanometers from being emitted.

[0150] 40. A method of operating an excimer lamp comprising: a dielectric forming at least one side of an enclosed cavity; and an electrode array disposed on a surface of the dielectric and comprising a plurality of electrodes disposed at respective positions across at least one dimension of the excimer lamp; and further comprising a gas within the enclosed cavity capable of emitting ultraviolet light in response to excitation of the electrode array, comprising: driving adjacent electrodes of the plurality of electrodes with voltages of alternating polarity; A method comprising:

[0151] 41. The method of aspect 40, wherein exciting the electrode array comprises driving adjacent electrodes with voltages of alternating polarity.

[0152] 42. The method of any of aspects 40-41, further comprising controlling one or more power supplies to apply voltages of alternating polarity.

[0153] 43. A dielectric forming at least one side of a sealed cavity; an electrode array comprising a plurality of electrodes of alternating polarity disposed on a surface of a dielectric material and spaced at respective positions across at least one dimension of the lamp; a gas within the sealed cavity capable of emitting ultraviolet light in response to excitation of the electrode array; An excimer lamp comprising:

[0154] 44. The excimer lamp of embodiment 43, further comprising a drive circuit for driving the electrode array.

[0155] 45. An excimer lamp according to any one of aspects 43 to 44, wherein the dielectric has a flat or curved surface.

[0156] 46. ​​An excimer lamp according to any one of aspects 43 to 45, wherein the dielectric has a planar surface.

[0157] 47. An excimer lamp according to any one of aspects 43 to 46, wherein the plurality of electrodes is a two-dimensional array of electrodes.

[0158] 48. The excimer lamp of any of aspects 43 to 47, wherein the polarity of the electrodes alternates along both the first dimension and the second dimension.

[0159] 49. An excimer lamp according to any one of aspects 43 to 48, wherein the plurality of electrodes has a checkerboard pattern.

[0160] 50. An excimer lamp according to any one of aspects 43 to 49, wherein the plurality of electrodes has a striped pattern.

[0161] 51. An excimer lamp according to any one of aspects 43 to 50, wherein the tube with the dielectric forms a sealed cavity.

[0162] 52. An excimer lamp according to any one of aspects 43 to 51, wherein the plurality of electrodes are disposed on the curved side of the tube.

[0163] 53. An excimer lamp according to any one of aspects 43 to 52, wherein each of the plurality of electrodes extends along a portion of the circumference of the tube.

[0164] 54. A second tube with a second dielectric forming a second sealed cavity; a second electrode array comprising a second plurality of electrodes having alternating polarities disposed on the surface of the dielectric and spaced apart across at least one dimension of the excimer lamp; a gas within the second sealed cavity capable of emitting ultraviolet light in response to excitation of the second electrode array; 54. The excimer lamp of any one of embodiments 43 to 53, comprising:

[0165] 55. An excimer lamp according to any one of aspects 43 to 54, wherein adjacent electrodes among the plurality of electrodes are spaced apart by a distance not exceeding 8 to 12 mm.

[0166] 56. An excimer lamp according to any one of aspects 43 to 55, wherein the ultraviolet light has a peak wavelength of 200 to 230 nm.

[0167] 57. The excimer lamp of any one of aspects 43 to 56, having a rigid structure.

[0168] 58. The excimer lamp of any one of aspects 43 to 57, having a flexible structure.

[0169] 59. An excimer lamp described in any of aspects 43 to 58, wherein the plurality of electrodes comprises a first electrode and a second electrode, the first electrode being closer to the end of the sealed cavity than the second electrode and narrower than the second electrode in a direction perpendicular to the end.

[0170] 60. A method of operating an excimer lamp comprising: a dielectric forming at least one side of an enclosed cavity; and an electrode array disposed on a surface of the dielectric and comprising a plurality of electrodes disposed at respective positions across at least one dimension of the lamp; and further comprising a gas within the enclosed cavity capable of emitting ultraviolet light in response to excitation of the electrode array, comprising: driving adjacent electrodes of the plurality of electrodes with voltages of alternating polarity; A method comprising:

Claims

1. a dielectric forming at least one side of a sealed cavity; an electrode array disposed on a surface of the dielectric body, the electrode array comprising a plurality of electrodes of alternating polarity disposed at respective positions across at least one dimension of the excimer lamp; a gas within the sealed cavity capable of emitting ultraviolet light in response to excitation of the electrode array; An excimer lamp comprising:

2. 2. The excimer lamp of claim 1, wherein the dielectric is glass, quartz, sapphire, or a ceramic material.

3. 3. The excimer lamp according to claim 1, wherein the dielectric has a flat or curved surface.

4. 4. The excimer lamp according to claim 1, wherein the dielectric has a flat surface.

5. 5. The excimer lamp according to claim 1, further comprising a drive circuit for driving the plurality of electrodes.

6. 6. The excimer lamp of claim 5, wherein the drive circuit is configured to apply a voltage to the plurality of electrodes in the range of up to 10 kilovolts.

7. 7. The excimer lamp of claim 6, further comprising a connector configured to apply the voltage in the range of up to 10 kilovolts from a power supply to the plurality of electrodes.

8. 8. An excimer lamp according to claim 1, wherein the electrode array is a two-dimensional array of electrodes.

9. the at least one dimension comprises a first dimension and a second dimension; 9. The excimer lamp of claim 8, wherein the polarity of the electrodes alternates along both the first dimension and the second dimension.

10. 10. The excimer lamp of claim 1, wherein the electrode array has a striped pattern.

11. 11. An excimer lamp as claimed in any preceding claim, wherein the electrode array has a checkerboard pattern.

12. 12. An excimer lamp according to claim 1, wherein a tube comprising the dielectric forms the sealed cavity.

13. 13. The excimer lamp of claim 12, wherein the tube is a cylindrical tube, a spiral tube, or a square tube.

14. 13. The excimer lamp of claim 12, wherein the tube is a cylindrical tube.

15. 13. The excimer lamp of claim 12, wherein at least some of the electrodes are disposed on a curved side of the tube.

16. 16. The excimer lamp of claim 15, wherein each of the plurality of electrodes extends along a portion of the circumference of the tube.

17. a second tube comprising a second dielectric forming a second sealed cavity; a second electrode array disposed on a surface of the second dielectric material, the second electrode array comprising a second plurality of electrodes having alternating polarities spaced at respective positions across at least one dimension of the excimer lamp; a gas within the second sealed cavity capable of emitting ultraviolet light in response to excitation of the second electrode array; 17. The excimer lamp according to claim 12, comprising:

18. 18. The excimer lamp of claim 1, wherein adjacent ones of the plurality of electrodes are spaced apart by no more than a distance in the range of 8 to 12 millimeters.

19. 19. An excimer lamp according to claim 1, wherein the ultraviolet light has a peak wavelength of 200 to 230 nanometers.

20. 20. An excimer lamp according to any one of claims 1 to 19, having a rigid structure.

21. 21. An excimer lamp according to any one of claims 1 to 20, having a flexible structure.

22. 22. An excimer lamp according to any preceding claim, further comprising a window through which the ultraviolet light is emitted.

23. 23. The excimer lamp of claim 22, wherein the window is a quartz or sapphire material.

24. 23. The excimer lamp of claim 22, wherein the window is a doped material configured to prevent the ultraviolet light having a peak wavelength greater than 230 nanometers from being emitted.

25. 25. An excimer lamp according to any preceding claim, wherein the sealed cavity comprises a doped surface configured to prevent the ultraviolet light having a peak wavelength greater than 230 nanometers from being emitted.

26. 26. The excimer lamp of claim 25, wherein the lamp is windowless.

27. the electrode array comprises a first electrode and a second electrode; 27. An excimer lamp according to claim 1, wherein the first electrode is closer to an end of the sealed cavity than the second electrode and is narrower than the second electrode in a direction perpendicular to the end.

28. the at least one side comprises a first side and a second side opposite the first side; 27. An excimer lamp according to any preceding claim, wherein the electrode array comprises a first electrode disposed on the first side and a second electrode disposed on the second side.

29. 30. The excimer lamp of claim 28, wherein the ultraviolet light is emitted through a portion of the sealed cavity between the first side and the second side.

30. 30. An excimer lamp according to any one of claims 1 to 29, wherein the ultraviolet light is emitted through a plurality of excimer plasma discharges.

31. 31. The excimer lamp of claim 1, wherein each of the plurality of electrodes comprises at least one channel that removably receives the sealed cavity.

32. a lamp comprising a dielectric forming at least one side of a sealed cavity; an electrode array disposed on a surface of the dielectric material, the electrode array comprising a plurality of electrodes of alternating polarity disposed at respective positions across at least one dimension of the lamp; Windows and a gas within the sealed cavity capable of emitting ultraviolet light through the window in response to excitation of the electrode array; An excimer lamp system comprising:

33. 33. The excimer lamp system of claim 32, further comprising a cover attached to the window and forming a housing for the excimer lamp system.

34. 34. An excimer lamp system as claimed in any one of claims 32 to 33, further comprising a lamp support structure mounted in the sealed cavity.

35. 35. The excimer lamp system of claim 34, further comprising a gasket attached to the window and the lamp support structure.

36. 36. The excimer lamp system of claim 35, wherein the gasket is resistant to ultraviolet light.

37. 37. An excimer lamp system according to any of claims 32 to 36, further comprising one or more second lamps, each comprising a dielectric forming at least one side of a sealed cavity.

38. 38. An excimer lamp system as claimed in any one of claims 32 to 37, wherein the window is a doped material configured to prevent the ultraviolet light having a peak wavelength greater than 230 nanometers from being emitted.

39. 39. An excimer lamp system as claimed in any one of claims 32 to 38, wherein the sealed cavity comprises a doped surface configured to prevent the ultraviolet light having a peak wavelength greater than 230 nanometers from being emitted.

40. 1. A method of operating an excimer lamp comprising: a dielectric body forming at least one side of an enclosed cavity; and an electrode array disposed on a surface of the dielectric body and comprising a plurality of electrodes spaced at respective positions across at least one dimension of the excimer lamp; and further comprising a gas within the enclosed cavity capable of emitting ultraviolet light in response to excitation of the electrode array, the method comprising: driving adjacent ones of the plurality of electrodes with voltages of alternating polarity.

41. 41. The method of claim 40, wherein exciting the electrode array comprises driving the adjacent electrodes with voltages of the alternating polarity.

42. 42. The method of claim 41, further comprising controlling one or more power supplies to apply the alternating polarity voltages.

43. a dielectric forming at least one side of a sealed cavity; an electrode array disposed on a surface of the dielectric body, the electrode array comprising a plurality of electrodes of alternating polarity spaced at respective positions across at least one dimension of the lamp; a gas within the sealed cavity capable of emitting ultraviolet light in response to excitation of the electrode array; An excimer lamp comprising:

44. 44. The excimer lamp of claim 43, further comprising a drive circuit for driving the electrode array.

45. 45. An excimer lamp according to any one of claims 43 to 44, wherein the dielectric has a flat or curved surface.

46. 46. ​​An excimer lamp as claimed in any one of claims 43 to 45, wherein the dielectric has a planar surface.

47. 47. An excimer lamp as claimed in any one of claims 43 to 46, wherein the plurality of electrodes is a two-dimensional array of electrodes.

48. 48. The excimer lamp of claim 47, wherein the polarity of the electrodes alternates along both the first dimension and the second dimension.

49. 49. The excimer lamp of any of claims 43 to 48, wherein the plurality of electrodes have a checkerboard pattern.

50. 48. The excimer lamp of any of claims 43 to 47, wherein the plurality of electrodes have a striped pattern.

51. 48. An excimer lamp as claimed in any one of claims 43 to 47, wherein a tube comprising the dielectric forms the sealed cavity.

52. 52. The excimer lamp of claim 51, wherein the plurality of electrodes are disposed on a curved side of the tube.

53. 53. The excimer lamp of claim 52, wherein each of the plurality of electrodes extends along a portion of the circumference of the tube.

54. a second tube comprising a second dielectric forming a second sealed cavity; a second electrode array disposed on a surface of the dielectric body, the second electrode array comprising a second plurality of electrodes having alternating polarities spaced at respective positions across at least one dimension of the excimer lamp; a gas within the second sealed cavity capable of emitting ultraviolet light in response to excitation of the second electrode array; 54. An excimer lamp as claimed in any one of claims 51 to 53, comprising:

55. 55. An excimer lamp according to claim 43, wherein adjacent electrodes of the plurality of electrodes are spaced apart at intervals not exceeding 8 to 12 mm.

56. An excimer lamp according to any one of claims 43 to 55, wherein the ultraviolet light has a peak wavelength of 200 to 230 nm.

57. 57. An excimer lamp according to any one of claims 43 to 56, having a rigid structure.

58. 58. An excimer lamp according to any one of claims 43 to 57, having a flexible structure.

59. the plurality of electrodes includes a first electrode and a second electrode; 59. An excimer lamp as described in any one of claims 43 to 58, wherein the first electrode is closer to an end of the sealed cavity than the second electrode and is narrower than the second electrode in a direction perpendicular to the end.

60. 1. A method of operating an excimer lamp comprising: a dielectric forming at least one side of an enclosed cavity; and an electrode array disposed on a surface of the dielectric and comprising a plurality of electrodes spaced at respective positions across at least one dimension of the lamp; and further comprising a gas within the enclosed cavity capable of emitting ultraviolet light in response to excitation of the electrode array, the method comprising: driving adjacent ones of the plurality of electrodes with voltages of alternating polarity.

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