Separation distance adjusting means and method for manufacturing separation distance adjusting means

Abstract

To provide a clearance adjusting means capable of easily adjusting a clearance at an installation support point for installing a manufacturing apparatus on a base in a unit of 0. 01mm, and a method for manufacturing the clearance adjusting means.SOLUTION: A clearance adjusting means 1 composed of a top plate part 10, a base part 20, an oil tank part 30 and a pressure adjusting means 40 is interposed between the base and the work, and the pressure adjusting oil filled in the oil tank part is pressurized by the pressure adjusting means, and the top plate part is expanded in an elastic range, and the clearance between the base and the work can be adjusted by the unit of 0. 01mm. Further, the top plate part is provided with a stripe-like groove 11 functioning as a sticking preventing means, and even if the top plate part is smoothly polished with high accuracy, sticking is prevented from occurring between the top plate part and the work.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present invention relates to a distance adjusting device that adjusts the distance between a manufacturing device that requires high installation accuracy and a base when the manufacturing device is installed on the base, and a method for manufacturing the distance adjusting device. More specifically, the present invention relates to a distance adjusting device that can easily adjust the distance at an installation support point where the manufacturing device is installed on the base in 0.01 mm increments and a method for manufacturing the distance adjusting device. [Background technology]

[0002] In order to manufacture products with high precision using manufacturing equipment (hereinafter referred to as workpieces), it is necessary to install the workpieces in a stable installation state so that distortion does not occur in the workpieces. In recent years, it has become necessary to install workpieces with high installation precision not only for heavy objects such as molds, but also for manufacturing equipment that requires high product precision, such as electronic components, for example, silicon wafers, or manufacturing equipment through which fluids flow.

[0003] Specifically, the workpiece needs to be placed in contact with the base at multiple installation support points, and the distance between the workpiece and the base needs to be adjusted at each installation support point. Conventionally, the workpiece has been lifted using a screw jack to adjust the distance between the workpiece and the base at the installation support points. However, when lifting the workpiece using a screw jack, play occurs in the helical thread, making it difficult to adjust the distance with high precision.

[0004] In order to install a workpiece on a base with high horizontal installation accuracy, the workpiece is positioned on the base and made to be approximately horizontal. In the case of a heavy workpiece, it is lifted with a crane and the horizontal adjustment is performed by inserting a thin metal plate (hereinafter referred to as a shim plate) into the gap at the installation support point where the workpiece contacts the base.

[0005] When the workpiece is heavy, such as a mold, it is necessary to insert shims at each of a plurality of installation support points to adjust the distance between the mold and the base, which is time-consuming and labor-intensive. Specifically, a crane operator and a shim inserter must work together to raise and lower the workpiece at each installation support point using a crane, and then insert shims into the gap between the mold and the base to adjust the distance between the mold and the base.

[0006] In order to install the workpiece horizontally without distorting it, it was necessary to adjust the thickness and number of shim plates at all installation support points, and it was sometimes necessary to replace shim plates at installation support points that had already been installed, which took time and effort to install the workpiece horizontally.

[0007] In particular, when high accuracy is required for the horizontal installation of the workpiece, it may be necessary to adjust the distance between the workpiece and the base in increments of 0.01 mm.If the workpiece is heavy, it is temporarily placed horizontally by lifting it with a crane so that the top surface of the workpiece is roughly horizontal, and then inserting shims into the gaps between the workpiece and the base at each installation support point where the workpiece and the base come into contact.

[0008] The temporary horizontal state of the workpiece's top surface had to be adjusted by lifting the workpiece again with a crane and changing the thickness or number of shim plates at the installation support points. Also, when lifting the workpiece and lowering it onto the base, horizontal positioning was likely to shift, making it extremely difficult to adjust the distance between each installation support point with high precision, for example, in increments of 0.01 mm.

[0009] The adjustment work of inserting shim plates requires a long time for the crane to be occupied, which is a problem as it is time-consuming and labor-intensive. Given this background, there was a need for a means of adjusting the distance between workpieces that can be easily adjusted with high precision without adjusting the height with shim plates.

[0010] Patent Document 1 discloses a technology for a flat jack that can be made lower than a cylindrical hydraulic jack. According to the technology described in this document, by supplying pressurized oil from a hydraulic unit to an airtight flat bladder that constitutes the flat jack, it is possible to lift an object even in a low installation space that supports a bridge or the like.

[0011] However, according to the technology described in Patent Document 1, an airtight flat bag body having a bulge in the front-to-rear direction is formed by welding an upper thin plate and a lower thin plate, each bent into a predetermined shape, to a side plate, which makes manufacturing time-consuming and, depending on the shape of the bottom surface of the heavy object being supported, the bulge in the front-to-rear direction may bulge unevenly, making it difficult to adjust the installation with high precision.

[0012] Patent Document 2 discloses technology for a jack device that can accurately raise and lower heavy objects in foundation construction, bridge construction, etc. According to the technology described in this document, the claws that are inserted under the heavy object are molded integrally with the lifting frame, and the lifting frame and the claws are raised and lowered together by a piston rod that is raised and lowered by a hydraulic cylinder, thereby raising and lowering the heavy object placed on the claws.

[0013] However, according to the technology described in Patent Document 2, a heavy object is raised and lowered by using a hydraulic cylinder to raise and lower a claw that is raised and lowered integrally with the lifting frame. The tilt of the lifting frame, which is integral with the claw, causes the workpiece to tilt, which not only makes it difficult to achieve high accuracy but also increases the height of the jack device, making it unsuitable for use when the gap between the workpiece and the base is narrow. [Prior art documents] [Patent documents]

[0014] Patent Document 1: Japanese Patent Application Laid-Open No. 2003-285995 Patent Document 2: Japanese Patent Application Laid-Open No. 2003-2590 Summary of the Invention [Problem to be solved by the invention]

[0015] The problem to be solved by the present invention is to provide a distance adjusting means and a method for manufacturing the distance adjusting means that can easily adjust the distance between the workpiece to be placed and the base in increments of 0.01 mm. More specifically, the problem to be solved by the present invention is to provide a distance adjusting means that can easily adjust the placement state of the workpiece with high precision without the need for height adjustment using a shim plate. [Means for solving the problem]

[0016] A first aspect of the present invention provides a separation distance adjusting means for adjusting the separation distance between a base and a workpiece, the separation distance adjusting means comprising a base, a top plate, an oil tank, and a pressure adjusting means, the top plate being made of a bendable flat plate and having strip-like grooves with open ends that divide the top surface into a plurality of sections, the oil tank being sandwiched between the base and the top plate to form an oil tank and being filled with pressure adjusting oil, the pressure adjusting means comprising a cylindrical path from the side of the base to the oil tank, and a pressure adjusting lid inserted into the cylindrical path from the side of the base, and the pressure adjusting lid being adapted to adjust the pressure by threading a male screw that forms the pressure adjusting lid back and forth. The piston arranged in the cylindrical path portion is moved back and forth via bearing balls in contact with the adjustment lid and the piston, thereby adjusting the pressure of the pressure adjustment oil sealed in the cylindrical path portion and the oil tank portion and adjusting the bulging height of the top plate portion, the striated grooves function as a means for preventing adhesion between the top plate portion and the workpiece, the bearing balls make it easy for the piston to follow the retreat of the pressure adjustment lid when the pressure in the oil tank portion is released, and the pressure of the pressure adjustment oil is adjusted by the threaded advance and retreat, and even when the bulging height is adjusted, the piston follows the retreat of the male screw, so that the top plate portion and the workpiece do not stick to each other.

[0017] According to the first invention, the top plate of the distance adjustment means interposed between the base and the workpiece is deformed by hydraulic pressure, causing it to bulge upward in a convex shape, thereby adjusting the distance between the workpiece and the base. Therefore, even when installing a workpiece with high precision, it is not necessary to use a crane to separate the workpiece from the base and insert a shim plate into the gap between the workpiece and the base to adjust the distance between the workpiece. The top plate of the distance adjustment means is a flat, bendable plate, preventing uneven bulging. A circular shape is preferable to allow the top plate to bulge smoothly, but a donut or horseshoe shape is also acceptable, and is not limited thereto.

[0018] In the present invention, after lifting the workpiece with a crane and positioning it in a predetermined horizontal position, the distance between the workpiece and the base is checked, and the pressure of the pressure adjusting oil is adjusted using the pressure adjusting means to cause the top plate portion, which constitutes the distance adjusting means, to expand within its elastic range.This makes it easy to adjust the distance, even when high precision adjustment is required in 0.01 mm increments.

[0019] Depending on the workpiece, the surface that comes into contact with the top plate of the workpiece may be polished smooth to adjust the separation distance with high precision. However, when two surfaces that have been smoothly finished with high precision are brought into close contact, a sticking force that makes them difficult to separate can occur. Therefore, the top plate is equipped with strip-like grooves as a means to prevent sticking, preventing sticking to the workpiece.

[0020] The striated grooves constituting the adhesion prevention means need only be arranged so as to divide the top plate portion of the separation distance adjustment means into multiple sections, and the number and shape of the striated grooves are not limited. Even if the top plate portion of the separation distance adjustment means is machined with high flatness precision, the striated grooves allow air to circulate between the top plate portion and the workpiece, preventing adhesion between the separation distance adjustment means and the workpiece. According to the first invention, the separation distance between the base and the workpiece can be adjusted with high precision in 0.01 mm increments, and the separation distance adjustment means will not adhere to the workpiece even if the workpiece is heavy, which is an unprecedented effect.

[0021] In addition, the pressure in the oil tank connected to the cylindrical path is adjusted by moving the pressure adjustment lid that closes the cylindrical path forward and backward. Because the pressure adjustment lid is screwed onto the cylindrical path, the pressure of the pressure adjustment oil sealed in the cylindrical path and the oil tank can be adjusted and the height of the bulge in the top plate can be determined simply by adjusting the screw angle of the pressure adjustment lid. This allows the height of the bulge in the top plate, in other words, the distance between the workpiece and the base, to be determined simply by moving the pressure adjustment lid forward and backward, resulting in the effect of easily adjusting the distance.

[0022] Furthermore, the piston disposed in the cylindrical passage is advanced and retreated by the threaded engagement of the male screw constituting the pressure regulating lid, via bearing balls in contact with the pressure regulating lid and the piston. This provides an advantageous effect not available in the prior art, in that when the pressure regulating lid is threaded and retreated to release the pressure in the oil tank, the piston can easily retreat into the pressure regulating lid.

[0023] The second invention of the present invention is a distance adjustment means of the first invention, characterized in that the oil tank portion is cut to form a flat cavity inside the base, and the top plate portion is formed by laser sintering metal powder and is integrally formed around the base.

[0024] According to the second aspect of the present invention, the oil reservoir is formed in the base by cutting, and then the top plate that covers the base is formed by laser sintering metal powder, thereby manufacturing the separation distance adjustment means. This allows the oil reservoir and top plate to be formed in a variety of shapes. Furthermore, because only the top plate needs to be formed by laser sintering, the overall processing time for the separation distance adjustment means can be shortened, allowing for highly efficient manufacturing.

[0025] The third invention of the present invention is a distance adjustment means of the first or second invention, characterized in that the top plate portion, the oil tank portion, and the base portion overlap to form a donut shape with a central through hole, and the distance adjustment means is engaged through the central through hole with an engaging portion protruding horizontally from either the workpiece or the base wall portion, thereby adjusting the horizontal distance between the workpiece and the base wall portion.

[0026] According to the third aspect of the present invention, the distance adjustment means is formed in a doughnut shape with a central through-hole. A locking portion protruding horizontally from either the base wall or the workpiece can be passed through the central through-hole to lock the distance adjustment means. This has the effect of enabling the workpiece to be placed at a predetermined position with high horizontal accuracy.

[0027] A fourth invention of the present invention is a distance adjustment means of the first or second invention, characterized in that the top plate portion, the oil tank portion, and the base portion overlap to form a horseshoe shape with an open end, and the distance adjustment means is inserted from the open end into a claw portion protruding horizontally from either the workpiece or the base wall portion, and is detachably hooked onto it, thereby adjusting the horizontal distance between the workpiece and the base wall portion.

[0028] According to a fourth aspect of the present invention, the separation distance adjustment means is formed in a horseshoe shape with an open end. The separation distance adjustment means is inserted from the open end into a claw portion that protrudes horizontally from either the base wall portion or the workpiece, and is removably hooked. After adjusting the horizontal position, the separation distance adjustment means can be removed by removing the pressure from the pressure adjustment means, returning the top plate portion to a flat position, and pulling the open end out of the claw portion. This has the effect of allowing the separation distance adjustment means to be reused.

[0029] A fifth aspect of the present invention is a method for manufacturing a separation distance adjusting means for adjusting the separation distance between a base and a workpiece, the separation distance adjusting means comprising a base, a top plate portion made of a bendable flat plate body and having streaky grooves with open ends that divide the top surface into a plurality of sections, an oil tank portion sandwiched between the base and the top plate portion to form an oil tank and filled with pressure adjusting oil, a cylindrical path portion extending from a side surface of the base to the oil tank portion, and a pressure adjusting means including a pressure adjusting lid inserted into the cylindrical path portion from a side surface of the base, The piston disposed in the cylindrical passage portion is advanced and retreated by the threaded advance and retreat of the male screw constituting the pressure adjustment lid via a bearing ball in contact with the pressure adjustment lid and the piston, thereby adjusting the pressure of the pressure adjustment oil sealed in the cylindrical passage portion and the oil tank portion and adjusting the bulging height of the top plate portion, the streak-like groove functions as a means for preventing adhesion between the top plate portion and the workpiece, and the bearing ball serves as a separation distance adjusting means for facilitating the retreating follow of the piston to the pressure adjustment lid when the pressure in the oil tank portion is released. The method includes a first step of cutting the base, a second step of forming the top plate, and a third step of filling the oil tank with pressure-adjusting oil, wherein in the first step, the oil tank, a cylindrical path from the oil tank to a side surface of the base, and an air vent hole from the oil tank to a bottom surface of the base are cut, and in the second step, the top plate is formed integrally with the base by laser sintering metal powder from the outer periphery of the top portion of the outer peripheral wall of the oil tank to the inside, and in the third step, the cylindrical path or The pressure regulating oil is injected into the oil tank portion through the air vent hole, and then the piston and the bearing ball are placed in that order into the cylindrical path portion. The pressure regulating lid is brought into contact with the bearing ball and temporarily screwed on, and at the same time, an air vent hole closing lid is temporarily screwed on to the air vent hole. First, while the pressure regulating lid is finally screwed on, all air is released from the pressure regulating oil sealed in the cylindrical path portion through a gap between the air vent hole and the air vent hole closing lid, and then the air vent hole closing lid is finally screwed on.

[0030] According to the fifth invention, in the first step, a base including an oil tank and a cylindrical path is formed by cutting, and in the second step, the top plate is formed by laser sintering. This allows the base to be formed in any shape, and a thin top plate that can be expanded hydraulically can be formed integrally on the base with high manufacturing efficiency. In addition, in the third step, after pressure regulating oil is filled in the oil tank, a piston and a bearing ball are placed in that order into the cylindrical path, and the pressure regulating lid is brought into contact with the bearing ball. Then, the pressure regulating lid and the air vent hole closing lid are temporarily tightened, and the pressure regulating lid is further tightened and finally tightened, while the air remaining in the oil tank is completely vented through the temporarily tightened air vent hole closing lid, and the air vent hole closing lid is then finally tightened.

[0031] Therefore, even if the oil tank is filled with grease, which has a higher viscosity than oil and is less likely to leak, no gas remains in the oil tank. This makes it easy to adjust the separation distance by screwing the pressure adjustment lid back and forth, and also makes it possible to manufacture separation distance adjustment means of any desired planar shape with high manufacturing efficiency. [Effects of the Invention]

[0032] The first aspect of the present invention provides the unprecedented advantage that the separation distance between the base and the workpiece can be adjusted with high precision in 0.01 mm increments, and that the separation distance adjustment means will not adhere to the workpiece, even if the workpiece is heavy. Furthermore, the separation distance between the workpiece and the base can be determined simply by screwing the pressure adjustment lid forward and backward, making it easy to adjust the separation distance. Furthermore, when the pressure adjustment lid is screwed back and forth to release the pressure in the oil tank, the piston can easily follow the pressure adjustment lid backward, providing an advantageous effect not available in the prior art. According to the second aspect of the present invention, the oil tank portion and the top plate portion can be formed in a variety of shapes, and the separation distance adjusting means can be manufactured with high manufacturing efficiency.

[0033] According to the third aspect of the present invention, it is possible to place the workpiece at a predetermined position with high horizontal accuracy. According to the fourth aspect of the present invention, the distance adjusting means can be reused. According to the fifth aspect of the present invention, the separation distance can be easily adjusted by screwing the pressure adjustment lid back and forth, and separation distance adjustment means of any planar shape can be manufactured with high manufacturing efficiency. [Brief explanation of the drawings]

[0034] [Figure 1] FIG. 2 is a perspective view of a separation distance adjusting means (first embodiment). [Figure 2] FIG. 10 is a cross-sectional view illustrating the bulging of the top plate portion (Example 1). [Figure 3] FIG. 1 is an explanatory diagram for adjusting the horizontal installation accuracy of a workpiece (Example 1). [Figure 4] FIG. 2 is an explanatory diagram of a first step of cutting the base (Example 1). [Figure 5] FIG. 10 is an explanatory diagram (Example 1) of a second step of laser sintering metal powder that forms the top plate portion. [Figure 6] 1 is an explanatory diagram of a polishing process for polishing a top plate portion (Example 1). [Figure 7] FIG. 10 is an explanatory diagram of the third step of filling with grease (Example 1). [Figure 8] 10 shows a specific example (Example 2) of a doughnut-shaped separation distance adjusting means. [Figure 9] 10 shows a specific example (Example 3) of a horseshoe-shaped separation distance adjusting means. DETAILED DESCRIPTION OF THE INVENTION

[0035] The distance adjustment means, which is interposed between the base and the workpiece and applies pressure using the pressure adjustment means to adjust the distance between the base and the workpiece in 0.01 mm increments, is composed of a top plate, a base, an oil tank, and the pressure adjustment means. Furthermore, the top plate is provided with striped grooves that function as adhesion prevention means, so that adhesion between the top plate and the workpiece will not occur even if the top plate is polished smoothly with high precision. [Example]

[0036] In Example 1, the separation distance adjustment means 1 having a short cylindrical shape will be described with reference to Figures 1 to 7. For ease of understanding, the pressure adjustment oil filled in the oil tank section is not shown in any figures except Figure 7. Figure 1(A) shows an exploded perspective view of the separation distance adjustment means, and Figure 1(B) shows a perspective view of the integrated separation distance adjustment means. Figure 2 shows a cross-sectional view illustrating the expansion of the top plate section, with Figure 2(A) showing the state before expansion and Figure 2(B) showing the state after expansion.

[0037] Fig. 3 is an explanatory diagram for adjusting the distance between the base and the workpiece to adjust the horizontal placement accuracy of the workpiece. Fig. 3(A) shows a temporary horizontal state, and Fig. 3(B) shows the state after adjustment. Figs. 4 to 7 show process diagrams for a manufacturing method of a distance adjustment means. Fig. 4 shows a process diagram for the first process of cutting the base, Fig. 5 shows a process diagram for the second process of forming the top plate by laser sintering metal powder, Fig. 6 shows a process diagram for polishing the top plate, and Fig. 7 shows a process diagram for the third process of filling with grease.

[0038] The distance adjustment means 1 is composed of a top plate portion 10, a base portion 20, an oil tank portion 30, and a pressure adjustment means 40. The external dimensions and shape of the distance adjustment means 1 are not limited, but Example 1 shows a specific example in which the diameter is approximately 70 mm, the height of the base is approximately 25 mm, and the thickness of the top plate portion is approximately 5 mm, which are suitable for die processing work and the like.

[0039] The metal material constituting the top plate 10 is preferably, but not limited to, SKD61, an alloy steel for hot work dies specified in JIS standard G4404 alloy tool steel. The metal material constituting the base 20 is preferably, but not limited to, SKD61 or S45C, a carbon steel specified in JIS standard G4051 carbon steel for machine structures.

[0040] The top plate 10 is made of a flat plate that is integral with the base 20, and has grid-like grooves 11 arranged at intervals of approximately 10 mm on the top surface to prevent adhesion. Ends 12 of the grooves extend to the side of the top plate 10. Air can circulate between the workpiece and the top plate from the ends 12 of the grooves, and the top surface of the top plate 10 is divided into multiple compartments by each groove.

[0041] The top surface of the top plate portion 10 is polished to form a plane parallel to the bottom surface of the base portion 20. There are no limitations on the polishing precision, but it is preferable that the arithmetic mean roughness Ra specified in JIS standard B0601:2013 be 0.03 μm or more and 0.15 μm or less, for example.

[0042] The base 20 is formed by cutting a short metal cylinder and machining the oil reservoir 30, the cylindrical passage 41 constituting the pressure adjustment means 40, and the air vent hole 31 inside. The oil reservoir 30, which is filled with pressure-adjusting oil, is a flat circular recess formed on the upper end surface of the base that contacts the top plate, and forms an oil reservoir sandwiched between the base 20 and the top plate 10. The diameter and depth of the oil reservoir are not limited and may be determined according to the diameter and height of the base and the diameter of the cylindrical passage. It is also preferable to provide a curved portion 33 at the corner between the bottom surface of the oil reservoir and the outer wall 32, as this facilitates air venting from the oil reservoir.

[0043] The pressure adjustment means 40 comprises a cylindrical path 41 extending from the oil tank 30 to the side surface of the base 20, and a pressure adjustment lid 42 inserted into the cylindrical path from the side opening. The pressure adjustment lid 42 may comprise a male screw 43 that threads back and forth within the cylindrical path 41, and a piston 44 that slides within the cylindrical path. Here, a bearing ball 45 is interposed between the male screw and the piston, which makes it easier for the piston to follow the threaded retraction of the male screw when the pressure in the oil tank is released.

[0044] One end of the cylindrical path 41 opens to the oil tank 30, and the other end opens to the side surface of the base. The cylindrical path 41 has a large-diameter female thread 47 that threads the male screw 43 forward and backward from a side opening 46 to a desired depth, and a small-diameter portion 48 that slides the piston 44 further back than the female thread 47 (see FIG. 1). The male screw 43 gets caught on a step 49 formed by the female thread 47 and the small-diameter portion 48 and cannot thread further forward, so the oil tank 30 is only pressurized within the elastic range of the top plate.

[0045] The male screw 43 has a hexagonal hole 50 at its end on the side opening 46 side that can be rotated by inserting a hexagonal wrench, and a recess 51 (see Figure 2) at its end on the oil tank side that comes into surface contact with the bearing ball 45. The piston 44 has a first groove 54 on the oil tank side for fitting an O-ring 52 and an auxiliary ring 53, and a second groove 56 on the side opening side for fitting a second O-ring 55. The auxiliary ring 53 is an auxiliary part that improves the pressure resistance of the O-ring 52 and prevents the O-ring 52 from falling off the first groove 54 when pressurized.

[0046] Well-known fluororubber, which has excellent oil resistance, is suitable as the material for the O-rings 52 and 55. Well-known polytetrafluoroethylene, which has excellent sliding properties, is suitable as the material for the auxiliary ring 53. A bearing ball 45 is interposed between the male thread 43 and the piston 44 so as to make point contact with the center of the rear end of the piston. In addition, a recess 58 is provided near the side opening 46 on the inner surface of the cylindrical path portion 41, into which a retaining shaft 57 of the pressure adjusting lid 40 is inserted and fixed.

[0047] One end of the air vent hole 31 opens to the oil tank 30, and the other end opens to the bottom surface of the base 20. The air vent hole 31 has a second female screw portion 34 that extends from the bottom opening to a desired depth (see FIG. 2). The air vent hole 31 opens near a corner of the bottom surface of the oil tank 30 to make it easier to release air from the oil tank 30 when filling it with grease. After filling it with grease, an air vent hole closing cover 35, which has a male screw on its outer periphery, is screwed onto the second female screw portion 34 to close the air vent hole 31.

[0048] The grease 36 that serves as the pressure adjusting oil is also filled into the cylindrical path 41 and the air vent hole 31 to prevent gas from entering the oil tank 30 (see FIG. 7). The type of grease is not limited and may be either soap-based or non-soap-based grease. In Example 1, lithium soap grease is used.

[0049] A specific example of the adjustment work for horizontal placement accuracy will now be described with reference to Fig. 3. A workpiece processing device 101 is equipped with a horizontal measuring machine 102 that measures the horizontal placement accuracy of a workpiece 100. The horizontal measuring machine can be moved in three axial directions by a moving device 103.

[0050] Once the workpiece 100 has been fixed in a temporary horizontal state, the probe 104 of the level measuring device is moved horizontally while in contact with the top surface of the workpiece to measure the horizontal installation accuracy of the workpiece (see FIG. 3(A)). If the top surface of the workpiece is not installed horizontally, the level measuring device is stopped at the installation support point position where the height of the workpiece top surface is lowest, based on the value displayed on the display panel of the level measuring device 102. For example, if the installation support point on the left side of the workpiece is lower than the installation support point on the right side, the level measuring device is stopped at the installation support point 105 on the left side of the workpiece.

[0051] Next, the pressure adjustment lid of the separation distance adjustment means 1 at the left installation support point 105 is tightened with a hex wrench or the like to pressurize the oil tank and expand the top plate. At this time, the screw angle of the pressure adjustment lid can be adjusted while checking the numerical value on the display panel of the level measuring device 102, making it easy to adjust the separation distance between the workpiece 100 and the base 200 with high precision (see Figure 3(B)).

[0052] Next, a manufacturing method of the separation distance adjustment means 1 will be described with reference to the process diagrams shown in Fig. 4 to Fig. 7. Fig. 4 shows the first process of cutting the base, Fig. 5 shows the second process of laser sintering the top plate, Fig. 6 shows the polishing process, and Fig. 7 shows the third process of filling with grease. To make it easier to understand, in Fig. 5, only Fig. 5(A) shows the metal powder spread evenly on the base, and Fig. 5(B) and subsequent figures show only the laser-sintered metal powder.

[0053] In the first step, a cylinder that forms the base 20 is cut out to a height of approximately 25 mm. A flat cavity with a circular cross section that forms the oil reservoir 30 is cut into the upper end surface of the cut-out base, aligned with the central axis of the base 20 (see Figure 4(A)). The corners of the bottom surface of the oil reservoir are curved 33 to prevent sharp corners.

[0054] Next, a non-through hole 59 forming a cylindrical path and a through hole 37 forming an air vent are cut from the oil tank portion 30 toward the bottom surface of the base 20 (see FIG. 4(B)). The non-through hole and the through hole are arranged side by side on the center line of the base 20. Then, a horizontal hole 60 is cut along the center line of the base so as to connect to the non-through hole 59 from the side surface of the base (see FIG. 4(C)).

[0055] The cylindrical path portion 41 further has a female screw portion 47, which is thicker than the horizontal hole, threaded to a desired depth, aligned with the axis of the horizontal hole 60 (see FIG. 4(D)). After the female screw portion 47 is formed, a recessed hole 58 is machined to insert and fix a retaining shaft 57 (see FIG. 1) of the pressure adjusting lid. The vent hole 31 further has a second female screw portion 34 threaded to a desired depth, aligned with the axis of the through hole 37.

[0056] In the second step, a specific example will be described in which 100 sintered metal layers 70 are stacked to form a top plate portion 10 having an outer peripheral thickness of approximately 5 mm, an inner thickness of approximately 4.5 mm, and a depth of approximately 0.5 mm for the grid-like grooves 11. The average particle size of the metal powder is not limited, but here SKD61 metal powder with an average particle size of approximately 50 μm is used so that a sintered metal layer of approximately 0.05 mm is formed per layer.

[0057] In the second step, first, a first layer of metal powder 71 forming the top plate is spread evenly on the oil bath 30 forming the base 20 and the outer circumferential wall 32 (see FIG. 5(A)). In the oil bath 30, metal powder 72 that is not to be sintered is spread below the first layer of metal powder to be flush with the outer circumferential wall 31. Then, while moving the laser nozzle 300 horizontally, a laser 301 is irradiated onto the metal powder 71 spread evenly in the top layer, sintering the metal powder layer by layer.

[0058] The metal powders in the first to tenth layers are laser sintered so that the thickness of the top plate 10 gradually decreases from the periphery toward the center of the oil tank (see Fig. 5(B) and Fig. 5(C)). Specifically, the laser is not irradiated to the metal powders spread evenly toward the center of the oil tank 30 so that each sintered metal layer 70 has a circular ring shape (see Fig. 5(B)).

[0059] Furthermore, the non-irradiation range of the laser 301 is narrowed as the sintered metal layer 70 is stacked. Specifically, the non-irradiation range of the laser is narrowed so that the sintered metal layer extends from the periphery toward the center by approximately 2 mm to 3 mm per layer depending on the diameter of the oil tank portion. Because the extension portion 73 of each layer is short, deformation is unlikely to occur even if the extension portion 73 of each layer, which is cantilevered, is thin, and it is easy to form the top plate portion into a substantially flat plate shape.

[0060] Furthermore, the angle at which the extension portion 73 extends diagonally upward is approximately 1.8 degrees relative to the horizontal, and since it extends almost horizontally, the bottom side of the top plate portion 10 can be formed almost flat, and when the oil tank portion 30 is pressurized, the top plate portion 10 can bulge smoothly.

[0061] For the metal powders in the 11th to 90th layers, the laser is irradiated in a circular pattern to form circular sintered metal layers. For the metal powders in the 90th to 100th layers, portions that are not irradiated with the laser are provided in a lattice pattern to form lattice-like grooves 11, completing the second step (see Figure 1 and Figure 5(D)).

[0062] In the polishing step after the second step, a cloth buff coated with an abrasive is pressed against the top plate portion 10 while rotating at high speed, and the top surface is polished to a smooth surface so that the arithmetic mean roughness Ra of the top surface is 0.03 μm or more and 0.15 μm or less (see FIG. 6). For the abrasive, for example, well-known precision polishing powders of #240 to #3000 grit may be used, and the top surface may be polished to a smooth surface by gradually changing to precision polishing powders of finer grain size.

[0063] In the third step, first, with the cylindrical path 41 and the vent hole 31 left open, the oil tank 30 is filled with grease 36 through the cylindrical path 41 or the vent hole 31. Next, the piston 44, bearing ball 45, and male screw 43 constituting the pressure adjusting lid 42 are inserted into the cylindrical path 41 in this order, and the male screw 43 is screwed into the female screw portion 47 of the cylindrical path. Furthermore, the retaining shaft 57 is inserted and fixed into the recess 58 (see FIG. 7(A)).

[0064] Next, the air vent hole closing cover 35 is temporarily screwed onto the air vent hole 31 (see FIG. 7(B)). At this point, there is a possibility that air bubbles 500 may remain inside the separation distance adjustment means 1. Therefore, the pressure adjustment cover 42 is screwed forward to pressurize the oil tank section 30, and the air bubbles 500 are released from the gap between the second female screw section 34 that forms the air vent hole 31 and the air vent hole closing cover 35 (see FIG. 7(C)).

[0065] Once it has been confirmed that the air bubbles 500 have stopped overflowing from the air vent hole 31, the pressure adjustment lid 42 is screwed back to its initial position, the pressure in the oil tank section 30 is released, and the air vent hole closing lid 35 is then further tightened and screwed on (see FIG. 7(D)). Note that if air is not sufficiently removed and the force required to tighten the pressure adjustment lid 42 has not increased, loosen the air vent hole closing lid 35 and return it to the partially tightened state (see FIG. 7(B)), and remove air again. [Example]

[0066] In Example 2, a separation distance adjusting means 2 having a central through-hole 80 for adjusting the horizontal separation distance between the workpiece 100 and the base wall 201 will be described with reference to FIG. 8. FIG. 8(A) shows a front view seen from the top plate side. FIG. 8(B) and FIG. 8(C) show vertical cross-sectional views illustrating the adjustment of the horizontal separation distance. For ease of understanding, FIG. 8(A) shows only the oil tank 30, the cylindrical path 41, and the pressure adjusting lid 42 with dashed lines. In Example 2 and subsequent examples, the same components as those in Example 1 are designated by the same reference numerals, and their description will be omitted.

[0067] The separation distance adjustment means 2 is formed such that the top plate 10, base 20, and oil tank 30 are each formed along a doughnut shape with a central through-hole 80 (see FIG. 8). The central through-hole 80, which forms the locking means, is sized to allow the locking portion 202 protruding from the base wall 201 to pass through (see FIG. 8(B)). The outer peripheral walls 32, 32 of the oil tank 30 stand upright along the inner and outer circles of the base 20, respectively.

[0068] The top plate 10 is formed by laser sintering so as to be integral with the top portions of the respective outer peripheral walls 32, 32. The bottom surface of the top plate 10 is thinner from the periphery toward the inside of the top plate 10, and the thickness is made thinner toward the midpoint between the inner and outer circles of the top plate 10, so that laser sintering is easier (see FIG. 8(B)).

[0069] The cylindrical path portion 41 is formed at a position shifted laterally from the center line of the top plate portion 10 (see FIG. 8(A)). The streak grooves consist of first streak grooves 13 formed concentrically and second streak grooves 14 formed radially. The ends of the second streak grooves 14 are open to the side surfaces of the top plate portion.

[0070] In adjusting the separation distance between the workpiece 100 and the base wall 201, first, the separation distance adjustment means 2 is engaged with the engaging portion 202 protruding horizontally from the base wall 201 through the central through-hole 80 that forms the engaging means (see FIG. 8(B)). The workpiece 100 is temporarily placed in contact with the top plate 10 of the engaged separation distance adjustment means 2 (see FIG. 8(C)). A known three-dimensional measuring machine or the like is used to measure the deviation between the installation reference position (see the dashed line in FIG. 8(C)) and the temporarily placed position of the workpiece 100.

[0071] When the workpiece 100 does not match the installation reference position, the top plate 10 of the distance adjustment means 2 is expanded to push out the workpiece so as to eliminate positional deviation and tilt of the workpiece, thereby adjusting the horizontal distance between the base wall 201 and the workpiece 100. Note that the workpiece may be provided with a through-hole, and the length of the locking portion extending from the base wall may be set to a length that protrudes from the central through-hole, so that both the distance adjustment means 2 and the workpiece are locked to the locking portion.

[0072] Alternatively, the locking portion may be protruded horizontally from the workpiece. In this case, the central through-hole of the distance adjustment means 2 is inserted into the locking portion provided on the workpiece in advance, and then the workpiece is temporarily placed so that the distance adjustment means 2 is in contact with the base wall. [Example]

[0073] In the third embodiment, a horseshoe-shaped distance adjusting means 3 for adjusting the horizontal distance between the workpiece and the base wall will be described with reference to Fig. 9. Fig. 9(A) shows a front view seen from the top plate side. Fig. 9(B) shows a vertical cross-sectional view illustrating the adjustment of the horizontal distance.

[0074] Fig. 9(C) shows the state in which the separation distance adjustment means is detached. In Fig. 9(A), only the oil tank section 30, the cylindrical path section 41, and the pressure adjustment cover 42 are shown by dashed lines. In Fig. 9(B), the horizontal installation reference position of the workpiece is shown by a dashed line.

[0075] In Example 3, a specific example will be described in which a base wall 201 is provided with claws 203 protruding in the horizontal direction, and the separation distance adjustment means 3 is detachably attached to the claws. The separation distance adjustment means 3 has a top plate 10, a base 20, and an oil tank 30 each formed in a horseshoe shape, and is provided with an open end 90 that functions as an attachment / detachment means (see FIG. 9(A)). The cylindrical path 41 extends from the side of the base 20 to the position of the left-right axis of symmetry of the oil tank 30 (see the dashed line in FIG. 9(A)) so that the oil tank 30 can be pressurized equally on the left and right.

[0076] Next, with reference to Figures 9(B) and 9(C), the attachment and detachment of the separation distance adjustment means 3 and the adjustment of the separation distance will be described. First, the open end 90 is hooked onto the claw portion 203, and the separation distance adjustment means 3 is attached to the base wall portion 201 (see Figure 9(B)). As in Example 2, the side of the workpiece 100 is abutted against the top surface of the separation distance adjustment means 3 to temporarily install it, and the deviation from the installation reference position of the workpiece (see the dashed dotted line in Figure 9(B)) is measured.

[0077] If the position where the workpiece is temporarily placed is deviated from the reference placement position, the top plate 10 of the distance adjustment means 3 is expanded to adjust the horizontal distance between the workpiece 100 and the base wall 201 so as to eliminate the positional deviation of the workpiece. When reusing the distance adjustment means 3, the pressure adjustment cover 42 is loosened by unscrewing it to release the pressure, the top plate 10 is returned to a flat state, and the open end 90 is pulled out from the claws 203 (see FIG. 9(C)). It goes without saying that the claws 203 may be provided on the workpiece side.

[0078] (others) In this example, only the top plate portion is formed by laser sintering metal powder, but the base portion may also be formed by laser sintering metal powder. Furthermore, the top plate portion may be formed by cutting, and then the base portion and the top plate portion may be joined by diffusion bonding, as specified in JIS standard Z3001-2, by heating the base portion and the top plate portion at a temperature below the melting point of the base material and applying a pressure that does not cause plastic deformation. In the case of diffusion bonding, it is preferable to flatten the bottom surface of the top plate. In this embodiment, the pressure adjusting oil is grease, but the pressure adjusting oil is not limited to grease and may of course be hydraulic oil. The embodiments disclosed herein are illustrative in all respects and should not be considered limiting. The technical scope of the present invention is not limited to the above description, but is defined by the claims, and is intended to include all modifications within the meaning and scope of the claims. [Explanation of symbols]

[0079] 1,2,3...Separation distance adjustment means, 10...top plate portion, 20...base portion, 30...oil tank portion, 40...pressure adjustment means, 11...Lattice-like striped groove, 12...End part, 13...First striped groove, 14...Second striped groove, 31...vent hole, 32...outer wall, 33...curved portion, 34... second female screw portion, 35... vent hole blocking cover, 36... grease, 37... through hole, 41... Cylindrical path portion, 42... Pressure adjustment cover, 43... Male screw, 44...piston, 45...bearing ball, 46...side opening, 47...female thread portion, 48...thin diameter portion, 49...step, 50...hexagonal hole, 51...recess, 52...O-ring, 53...Auxiliary ring, 54...First groove portion, 55...O-ring, 56...Second groove portion, 57... retaining shaft, 58... recessed hole, 59... non-through hole, 60... horizontal hole, 70...metal sintered layer, 71...metal powder, 72...metal powder that is not sintered, 73...extension portion, 80...Central through hole, 90...Open end, 100... workpiece, 101... processing device, 102... horizontal measuring machine, 103... moving device, 104...probe, 105...left side installation support point, 200... base, 201... base wall portion, 202... locking portion, 203... claw portion, 300...Laser nozzle, 301...Laser, 400...Cloth buff, 500...Air bubble

Claims

1. A distance adjusting means for adjusting the distance between the base and the workpiece, The separation distance adjusting means comprises a top plate portion, an oil tank portion, a base portion, and a pressure adjusting means, The oil tank portion is sandwiched between the top plate portion and the base portion to form an oil tank, and is filled with pressure adjusting oil, the top plate portion is made of a bendable flat plate body and has a strip-like groove on its top surface, The streak-like grooves divide the top plate portion into a plurality of sections, and the ends are open to the sides, The pressure adjusting means pressurizes the pressure adjusting oil in the oil tank to bulge the top plate portion, pressurizing the top plate portion against the workpiece and adjusting the separation distance. The streak-like groove functions as a means for preventing adhesion with the workpiece, and prevents the top plate portion and the workpiece from being adhered together. A separation distance adjusting means.

2. the pressure adjusting means comprises a cylindrical path portion and a pressure adjusting lid, The cylindrical path portion extends from a side surface of the base portion to the oil tank portion, the pressure adjustment lid is threadedly engaged with the cylindrical path portion so as to be able to advance and retreat along the cylindrical path portion; By moving the pressure adjusting lid back and forth, the pressure of the pressure adjusting oil in the cylindrical path portion and the oil tank portion is adjusted, and the height of the bulge of the top plate portion is adjusted.

2. The distance adjusting means according to claim 1.

3. The oil reservoir is formed by cutting a flat cavity inside the base, The top plate portion is formed by laser sintering metal powder and is integrally formed around the base portion.

2. The distance adjusting means according to claim 1.

4. The top plate portion, the oil tank portion, and the base portion are overlapped to form a doughnut shape having a central through hole, the separation distance adjusting means is engaged with a locking portion protruding horizontally from either the workpiece or the base wall portion through the central through-hole, and adjusts the horizontal separation distance between the workpiece and the base wall portion; 4. The distance adjusting means according to claim 1, wherein the distance adjusting means is a distance adjusting means.

5. The top plate portion, the oil tank portion, and the base portion are overlapped to form a horseshoe shape having an open end, The separation distance adjusting means is inserted from the open end into a claw portion that protrudes horizontally from either the workpiece or the base wall portion, and is detachably hooked onto the claw portion, thereby adjusting the horizontal separation distance between the workpiece and the base wall portion.

4. The distance adjusting means according to claim 1, wherein the distance adjusting means is a distance adjusting means.

6. A method for manufacturing a distance adjusting means for adjusting a distance between a base and a workpiece, the method comprising: The method includes a first step of cutting the base portion, a second step of forming the top plate portion, and a third step of filling the oil tank portion with pressure adjusting oil, In a first step, the oil tank portion, a cylindrical path portion extending from the oil tank portion to the side surface of the base portion, and an air vent hole extending from the oil tank portion to the bottom surface of the base portion are machined, In a second step, the top plate portion is formed integrally with the base portion from the outer periphery of the top portion of the outer peripheral wall of the oil tank portion toward the inside by laser sintering metal powder; In a third step, the pressure regulating oil is injected into the oil tank portion from the cylindrical path portion or the air vent hole, and then a pressure regulating lid is temporarily fastened and screwed onto the cylindrical path portion, and an air vent hole closing lid is temporarily fastened and screwed onto the air vent hole; first, while the pressure regulating lid is finally fastened and screwed, all air is released from the pressure regulating oil in the cylindrical path portion through a gap between the air vent hole and the air vent hole closing lid, and then the air vent hole closing lid is finally fastened and screwed. A method for manufacturing a separation distance adjusting means.

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