Conveying apparatus, processing system, and manufacturing method

Abstract

To provide a linear conveying device capable of reducing leakage magnetic flux generated from a magnet and a coil.SOLUTION: A conveyance device includes a stator in which a coil array having a plurality of coils is provided in a conveyance direction, and a movable element in which a magnet array having a plurality of magnets is provided in the conveyance direction and which is movable in the conveyance direction along the coil array by electromagnetic force received by the magnet array from the coil array. The coil array includes a first coil array and a second coil array along the transport direction, the magnet array includes a first magnet array facing the first coil array and a second magnet array facing the second coil array, and in a cross section viewed from the transport direction, a magnet included in the first magnet array and a magnet included in the second magnet array are provided such that polarities of magnetic poles are different from each other.SELECTED DRAWING: Figure 3

Description

[Technical Field]

[0001] The present disclosure relates to a conveying device, a processing system, and a manufacturing method. [Background technology]

[0002] In factory automated production lines for assembling industrial products, conveying devices are used to transport workpieces, parts, etc. Conventionally, there have been production lines in which a large number of parts with complex shapes and structures, such as those for cameras and printer cartridges, are assembled in an assembly line. Adjacent assembly machines are connected to each other by conveying sections, and the workpieces to be assembled are processed continuously by being presented to each machine in turn. Workpieces transferred from the conveying section are positioned by a positioning device, and the assembly machines employ a production method in which they assemble the precisely positioned workpieces.

[0003] For devices that require such positioning accuracy, linear motor conveyance devices with high positioning accuracy and no backlash are used. In particular, moving magnet linear motors place power-requiring components such as the drive coil and position detection encoder head on the stator side, eliminating the need for power supply wiring on the mover side. A ball-circulating slider and guide rails are used for the travel track, allowing the mover to move linearly with high accuracy. In environments with a lot of dust and dirt, magnetic linear encoders are often used as the encoder head for position detection.

[0004] Patent Document 1 discloses a configuration in which a magnetic shield using a soft magnetic material is provided to prevent the magnetism generated by the motor from affecting the encoder. Patent Document 2 discloses a configuration in which a noise cancellation coil is provided and a magnetic flux that is in the opposite phase to the leakage magnetic flux from the motor coil is generated from the noise cancellation coil to cancel the leakage magnetic flux from the motor coil. [Prior art documents] [Patent documents]

[0005] [Patent Document 1] Japanese Patent Application Laid-Open No. 2008-11583 [Patent Document 2] Japanese Patent Application Laid-Open No. 2002-58230 Summary of the Invention [Problem to be solved by the invention]

[0006] However, the technology disclosed in Patent Document 1 requires a shield to block magnetism between the coil or magnet and the encoder, which requires space for the shield, potentially increasing the size of the device. Also, the technology disclosed in Patent Document 2 requires a separate noise cancellation coil and a circuit to control the noise cancellation coil, potentially increasing the size of the device and complicating control. [Means for solving the problem]

[0007] The conveying device disclosed herein comprises a stator having a coil array having a plurality of coils arranged in the conveying direction, and a magnet array having a plurality of magnets arranged in the conveying direction, and a mover that is movable in the conveying direction along the coil array by the electromagnetic force received by the coil array, wherein the coil array has a first coil array and a second coil array along the conveying direction, and the magnet array has a first magnet array facing the first coil array and a second magnet array facing the second coil array, and in a cross section viewed from the conveying direction, the magnets of the first magnet array and the magnets of the second magnet array are arranged so that their magnetic poles are different from each other. [Effects of the Invention]

[0008] According to at least one embodiment of the present disclosure, a conveying device capable of reducing leakage magnetic flux generated from a magnet or a coil is provided. [Brief explanation of the drawings]

[0009] [Figure 1] FIG. 1 is a schematic view illustrating an example of a conveying device according to a first embodiment. [Figure 2] FIG. 1 is a schematic view illustrating an example of a conveying device according to a first embodiment. [Figure 3] FIG. 1 is a schematic view illustrating an example of a conveying device according to a first embodiment. [Figure 4] 4 is an example of a waveform of a current flowing through a coil according to the first embodiment. [Figure 5] FIG. 2 is a schematic diagram of magnetic flux in an example of a conveying device. [Figure 6] 3 is a schematic diagram of magnetic flux in the transport device according to the first embodiment. FIG. [Figure 7] FIG. 2 is an analytical diagram of the transport device according to the first embodiment. [Figure 8] FIG. 10 is a connection diagram of a transport device according to a second embodiment. [Figure 9] FIG. 10 is a schematic view showing an example of a transport device according to a third embodiment. [Figure 10] FIG. 10 is a schematic view showing an example of a manufacturing apparatus according to a fourth embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0010] First Embodiment A first embodiment of the present invention will be described below with reference to the drawings. First, coordinate axes and directions are defined. The X-axis is taken along the horizontal direction, which is the transport direction of the mover 1, and the transport direction of the mover 1 is the X-direction. The Z-axis is taken along the vertical direction, which is perpendicular to the X-direction, and the vertical direction is the Z-direction. The Y-axis is taken along the direction perpendicular to the X and Z directions, and the direction perpendicular to the X and Z directions is the Y-direction.

[0011] FIG. 1 is a perspective view of the mover 1 and the stator 11 as seen from below in the Z direction, and FIG. 2 is a cross-sectional view as seen from the X direction.

[0012] The conveying device is composed of a mover 1 and a stator 11. The mover 1 has magnets 3a, 3b, yokes 7a, 7b, a scale 4, and rollers 8. The stator 11 has coils 16a, 16b, multiple encoders 18, and a conveying path 21. The coils 16a and 16b have windings 14a and 14b and cores 15a and 15b, respectively. The coils 16a and 16b are controlled in units of three, U-phase, V-phase, and W-phase, and these units are called coil units 17a and 17b. The conveying path 21 has an upper conveying path 19 and a lower conveying path 20.

[0013] As shown in FIGS. 1 and 2, magnet 3a and coil 16a, and magnet 3b and coil 16b are arranged to face each other. Magnet 3a and magnet 3b are attached to yoke 7a and yoke 7b, respectively. Yoke 7a and yoke 7b are made of a material with high magnetic permeability, such as iron. Magnets 3a and 3b are magnetized in the Z direction and are arranged consecutively on mover 1 so that the polarities of the magnetic poles facing coils 16a and 16b alternate in the conveyance direction. Coil unit 17a and coil unit 17b are arranged adjacent to each other in the Y direction. A plurality of coil units 17a and 17b are arranged in the conveyance direction of mover 1, forming a conveyance path.

[0014] That is, the magnets 3a and the magnets 3b are each arranged in a row in the conveyance direction as a magnet row. A magnet row consisting of multiple magnets 3a is referred to as the first magnet row, and a magnet row consisting of multiple magnets 3b is referred to as the second magnet row. In each of the first and second magnet rows, the polarities of the magnetic poles facing the coils 16a and 16b are alternately arranged, and the polarities of adjacent magnets in the Y direction between rows are different.

[0015] Furthermore, coil units 17a and 17b are each arranged in a row in the conveyance direction as a coil array. A coil array formed by multiple coil units 17a is referred to as a first coil array, and a coil array formed by multiple coil units 17b is referred to as a second coil array. That is, the first magnet array and the first coil array face each other, and the second magnet array and the second coil array face each other.

[0016] By passing a predetermined current through coils 16a and 16b, an electromagnetic force is generated between magnets 3a and 3b, allowing mover 1 to move in the conveyance direction. In a typical three-phase motor, when U-phase is used as the reference, current flows through V-phase with a phase shift of 120°, and through W-phase with a phase shift of another 120°.

[0017] Rollers 8 are arranged on the mover 1, and the mover 1 travels on a transport path 21 arranged on a stator 11. There may also be a roller (not shown) that limits the position in the Y direction.

[0018] The mover 1 is transported with the workpiece 2 attached above or below the mover 1. In this embodiment, the workpiece 2 is attached below the mover 1. The method for fixing the workpiece 2 may be realized by known techniques such as a mechanical or electrical hook or an electrostatic chuck.

[0019] The encoder 18 reads the scale 4 attached to the mover 1 and detects the relative position of the mover 1 with respect to the encoder 18. A plurality of encoders are attached to the stator 11 in a row at intervals shorter than the length of the scale 4 on the mover 1 in the conveyance direction.

[0020] FIG. 3 shows a cross section seen from the direction of the mover 1 and the stator 11Y, and FIG. 3(a) and FIG. 3(b) show cross sections of adjacent coil arrays.

[0021] In this embodiment, magnets 3a and 3b are arranged so that adjacent magnets in the Y direction have opposite magnetic poles. In Figures 3(a) and 3(b), the arrangement of magnets 3a in the transport direction will be described as magnets 3aa, 3ab, 3ac, 3ad, and 3ae3b, and the arrangement of magnets 3b in the transport direction will be described as magnets 3ba, 3bb, 3bc, 3bd, and 3be.

[0022] Specifically, in Figure 3(a), magnets 3aa, 3ab, 3ac, 3ad, and 3ae / 3b are arranged at equal intervals in the conveyance direction, and their magnetic poles have alternating polarities. The same is true for magnets 3ba, 3bb, 3bc, 3bd, and 3be in Figure 3(b). Magnet 3aa and magnet 3ba are arranged adjacent to each other in the Y direction on mover 1. The same is true for magnets 3ab and 3bb, magnets 3ac and 3bc, magnets 3ad and 3bd, and magnets 3ae and 3be. For ease of explanation, an example of five magnets will be used, but the number of magnets is not limited as long as they are arranged at equal intervals in the conveyance direction and have alternating magnetic pole polarities.

[0023] The U-phase, V-phase, and W-phase coils 16a and 16b are located at the same position in the Y direction, and control is performed so that the sign of the current flows is reversed at adjacent positions in the Y direction. Specific examples of current waveforms are shown in Figures 4(a) and 4(b). Figure 4(a) is an example of a current waveform flowing through the U-phase, V-phase, and W-phase coil 16a. Figure 4(b) is a current waveform flowing through coil 16b, where the sign of the current in coil 16a is reversed.

[0024] Specific magnetic flux and leakage flux states are shown in Figures 5(a) and 5(b). To make the effect easier to understand, Figures 5(a) and 5(b) will be used to explain the case where the coils 16a, 16b and the magnets 3a, 3b on the mover 1 have the same configuration.

[0025] When the same current is passed through coils 16a and 16b, an attractive or repulsive force is generated by the magnetic flux generated by coils 16a and 16b and the magnetic flux Φa and Φb generated by magnets 3a and 3b. This attractive and repulsive force is controlled to generate force in mover 1, thereby carrying the object. The magnetic fluxes Φa and Φb required to generate the force flow mainly in the X direction of yokes 7a and 7b and cores 15a and 15b. Meanwhile, leakage magnetic flux Φm is generated around magnets 3a and 3b and coils 16a and 16b. The wider the gap G1, the greater the leakage magnetic flux Φm. The leakage magnetic flux Φm affects objects placed nearby, such as encoder 18, if it is a magnetic encoder.

[0026] A specific state of leakage magnetic flux in the configuration of this embodiment is shown in Figure 6. As mentioned above, in this embodiment, coils 16a and 16b are arranged side by side in the Y direction. By passing currents with reversed signs through magnets 3a and 3b and coils 16a and 16b, which are arranged with their magnetic poles opposite in the Y direction, the leakage magnetic flux is absorbed by the adjacent magnets 3a and 3b and coils 16a and 16b, as shown in Figure 6.

[0027] With such current control and arrangement, there is no change in the force generated in the mover 1 by each coil array when comparing the configuration of Figure 5(b) with the configuration of Figure 6. While the force acting on the mover 1 remains unchanged, the leakage magnetic flux φm generated from the magnets 3a, 3b and coils 16a, 16b is absorbed by the adjacent magnets 3a, 3b and coils 16a, 16b in the cross section in the transport direction and is reduced.

[0028] Generally, yokes 7a and 7b are used to reduce the magnetic resistance of the magnetic paths formed by coil 16a and magnet 3a, and coil 16b and magnet 3b. To efficiently transmit force and move mover 1, it is necessary to control the flow of magnetic fluxes Φa and Φb in the X direction. If yokes 7a and 7b are large enough to cover or contact both magnets 3a and 3b, magnetic fluxes Φa and Φb will also flow between adjacent coils in the Y direction. If magnetic fluxes Φa and Φb flow in both the X and Y directions, magnetic fluxes Φa and Φb cannot be controlled as intended, and force cannot be transmitted to mover 1 efficiently.

[0029] In this embodiment, as shown in FIG. 6, a yoke 7a is disposed on the magnet 3a, and a yoke 7b is disposed on the magnet 3b, with a gap G2 provided between the yoke 7a and the yoke 7b. By providing a magnetic gap between the yokes 7a and 7b, the magnetic resistance between the coils 16a and 16b can be increased. By increasing the magnetic resistance in the Y direction, the magnetic fluxes Φa and Φb flow in the X direction, allowing for efficient transmission of force to the mover 1 as intended. Similarly, a gap G3 is provided between the cores 15a and 15b disposed within the coils 16a and 16b. This also increases the magnetic resistance between the coils 16a and 16b adjacent to each other in the Y direction, achieving the same effect as above.

[0030] Fig. 7 is a graph showing the results of an analysis of the effects of this embodiment using electromagnetic field analysis software. The horizontal axis represents position in the Y direction, and the vertical axis represents magnetic flux density. The analyzed models are one in which the magnets 3a and 3b shown in Fig. 5(b) have the same magnetic polarity (dotted lines), and one in which the magnets 3a and 3b shown in Fig. 6 have opposite magnetic polarities (solid lines).

[0031] The magnetic flux density shown in the graph is represented by the straight line in the Y direction (shown by the dashed line) around magnets 3a and 3b and their vicinity. The position of the magnets in the analysis diagram and graph is also shown by the dashed line. It can be seen that the magnetic flux density is reduced in the air outside the dashed line.

[0032] <Second embodiment> In this embodiment, the coils 16a and 16b adjacent to each other in the Y direction are connected in series to the coil controller 32. Note that a description of the same parts as in the first embodiment will be omitted.

[0033] Fig. 8(a) is a schematic diagram showing the control system, and Fig. 8(b) is a schematic enlarged view of the coil connection part. A coil controller 32 is connected to a system controller 31 and performs communication. The communication may be realized by known technology such as CAN, EtherNET, or EtherCAT.

[0034] 8(a), a coil unit 17a is configured with a set of three coils 16a for the U, V, and W phases, and similarly, coil 16b is configured as coil unit 17b. An example is shown in which each of the coils 16a and 16b for each phase is connected to a coil controller 32. Position information from the encoder 18 is input to the system controller 31 via the coil controller 32. The system controller 31 calculates the position of the mover 1 on the conveyance path and transmits a target position command value to the coil controller 32.

[0035] The connection between the coil controller 32 and the coils 16a, 16b will be described using Figure 8(b). The coil controller 32 detects and controls the current input to the coils 16a, 16b using a current detection unit 33. The coil controller 32 detects the magnitude of the current input to each of the connected coils 16a, 16b using the detection unit 33, calculates a target current command value using a calculation unit 35, and controls the current so that it approaches the current command value using a control unit 34.

[0036] If the currents flowing through the U phase, V phase, and W phase are Iu, Iv, and Iu, Iv, and Iw, respectively, the currents Iu, Iv, and Iw are controlled so that the relationship Iu + Iv + Iw = 0 holds. Although a full-bridge configuration in which coils 16a and 16b are individually connected is described in Figures 8(a) and (b), a three-phase motor configuration using a general star connection or the like may also be used.

[0037] Coils 16a and 16b are of the same specification. Coils 16a and 16b adjacent to each other in the Y direction are oriented in the same direction, and when currents in the same direction are passed through the same terminals, magnetic fluxes are generated in the same direction.

[0038] Specifically, in FIG. 8(b), the coil controller 32 is connected to the beginning of the winding of coil 16a (the side indicated by the black circle), and the end of coil 16a (the side without the black circle in the figure) is connected to the end of coil 16b. The beginning of coil 16b is also connected to the coil controller 32. In other words, by changing the coil connections and passing currents in the same direction through different terminals, the currents flowing through adjacent coils 16a and 16b in the Y direction are reversed, and the directions of the generated magnetic fluxes are also reversed. The specific current waveforms for each of the UVW phases are the same as those shown in FIG. 4.

[0039] As shown in Figure 2, magnets 3a and 3b are arranged with opposite polarities on the mover 1. By connecting the coils and arranging the magnets as described above, it is possible to pass currents with the same direction but opposite signs through adjacent coils 16a and 16b from one coil controller 32. In this way, there is no time lag between adjacent coil rows, and force can be transmitted to the mover 1 efficiently.

[0040] <Third embodiment> As described in the first embodiment, by passing a current through the coil 16a, a force is generated between the coil 16a and the magnet 3a, which moves the mover 1. In this embodiment, a magnetic flux collecting magnet 3c having an opposite magnetic polarity is placed on the mover 1 adjacent to the magnet 3a in the Y direction.

[0041] A specific state of leakage magnetic flux is shown in Figure 9. The magnetic flux collecting magnet 3c and yoke 7c form a magnetic circuit between the magnet 3a and yoke 7a in the Y-direction cross section. By forming a magnetic circuit in the Y-direction cross section, the leakage magnetic flux φm from the magnet 3c can be absorbed, and for example, the leakage magnetic flux φm that jumps to the magnetic encoder can be reduced.

[0042] Since the effects of this embodiment can be obtained as long as there is a magnetic circuit in the Y-direction cross section, the magnetic flux collecting magnet 3c can be small in size and have a small magnetic force compared to the magnet 3a. Furthermore, because of its small size and small magnetic force, the magnetic flux collecting magnet 3c has a sufficiently small effect on the thrust force even when it is placed. Furthermore, by providing a magnetic gap G4 between the yoke 7a and the yoke 7c, the effect on the magnetic flux Φa used to transport the mover 1 can be further reduced.

[0043] The configuration of this embodiment makes it possible to prevent magnetic leakage with a simple configuration that saves space and is low cost.

[0044] <Fourth embodiment> In this embodiment, a processing system using the first to third embodiments will be described. FIG. 10 shows a case where a mover 1 and a stator 11 are incorporated in a chamber of a vapor deposition apparatus 701, which is an example of a processing apparatus that performs processing on a workpiece 2. The vapor deposition apparatus 701 has a vapor deposition source 702 that performs vapor deposition on the workpiece 2 attached to the mover 1. The vapor deposition source 702 is installed at the bottom of the chamber of the vapor deposition apparatus 701 so as to be able to face the workpiece 2 attached to the bottom of the mover 1. A thin film of metal, oxide, or the like is formed on a substrate, which is the workpiece 2 attached to the bottom of the mover 1, by vapor deposition using the vapor deposition source 702, which has been transported to the installation location of the vapor deposition source 702. In this way, the workpiece 2 is transported together with the mover 1, and the transported workpiece 2 is processed by the processing apparatus to manufacture an article.

[0045] <Other embodiments> The above configuration can be modified as described below and is not limited to the configurations described in each embodiment. For example, the number of rows of magnets and coils may be an even number of rows (two or more). Although the configuration in which one mover 1 is transported by the stator 11 has been described, multiple movers 1 may be used. Although the configuration in which the mover 1 is transported by rollers 8 on the transport path 21 has been described, linear guides, ball guides, or levitation transport may also be used. Furthermore, although the configuration in which magnet 3aa is aligned next to magnet 3ba in the Y direction has been described, the effect of reducing magnetic flux leakage can be achieved even if magnet 3aa approaches magnet 3bb. In this case, the rows of magnets 3a may be arranged at equal intervals in the X direction relative to magnet 3aa.

[0046] Furthermore, the conveying system according to the present invention can be used as a conveying system in a manufacturing system for manufacturing articles such as electronic devices, which conveys a workpiece together with a mover to the working area of ​​each process device, such as a machine tool, that performs each work process on the workpiece. The process device that performs the work process may be any device, such as a device that assembles parts on the workpiece or a device that paints it. Furthermore, the articles to be manufactured are not limited to specific ones, and may be any parts.

[0047] In this way, the conveyance system according to the present invention can be used to convey a workpiece to a working area, and a work process can be carried out on the workpiece conveyed to the working area to manufacture an article.

[0048] The disclosure of this embodiment includes the following configuration.

[0049] (Item 1) a stator having a coil array having a plurality of coils arranged in a conveying direction; a magnet row having a plurality of magnets is provided in the conveying direction, and a mover is movable in the conveying direction along the coil row by an electromagnetic force applied to the magnet row by the coil row, The coil array includes a first coil array and a second coil array along the transport direction, the magnet row includes a first magnet row facing the first coil row and a second magnet row facing the second coil row, In a cross section seen from the conveying direction, the magnets of the first magnet row and the magnets of the second magnet row are arranged so that their magnetic poles have different polarities. A conveying device characterized by:

[0050] (Item 2) Each magnet in the magnet row has a yoke, In a cross section seen from the conveying direction, a yoke included in the magnet of the first magnet row and a yoke included in the magnet of the second magnet row are provided with a magnetic gap therebetween. 2. The conveying device according to item 1,

[0051] (Item 3) Each coil in the coil array has a core, In a cross section seen from the conveying direction, a core included in a coil of the first coil group and a core included in a coil of the second coil group are provided with a magnetic gap therebetween. 3. The conveying device according to item 1 or 2.

[0052] (Item 4) In a cross section seen from the conveyance direction, currents having opposite signs are input to the coils of the first coil group and the coils of the second coil group. 4. The conveying device according to any one of items 1 to 3.

[0053] (Item 5) a controller; In a cross section seen from the conveying direction, the coils of the first coil group and the coils of the second coil group are connected to the controller so that the directions of magnetic fluxes generated by a current input from the controller are opposite to each other. 5. The conveying device according to item 4,

[0054] (Item 6) the stator has an encoder; The mover has a scale, The encoder reads the scale and detects the position of the mover. 6. The conveying device according to any one of items 1 to 5,

[0055] (Item 7) 7. The conveying device according to item 6, wherein the encoder is a magnetic encoder.

[0056] (Item 8) a stator having a coil array having a plurality of coils arranged in a conveying direction; a magnet row having a plurality of magnets is provided in the conveying direction, and a mover is movable in the conveying direction along the coil row by an electromagnetic force applied to the magnet row by the coil row, the magnet row includes a first magnet row that receives an electromagnetic force from the coil row for moving the mover in the transport direction, and a second magnet row that collects magnetic flux from the first magnet row, the coil array is arranged along the transport direction, the first magnet row is disposed opposite the coil row, the second magnet row is provided adjacent to the first magnet row along the transport direction, In a cross section seen from the conveying direction, the first magnet row and the second magnet row are provided so that the polarities of the magnetic poles are different from each other. A conveying device characterized by:

[0057] (Item 9) A conveying device according to any one of items 1 to 8, a process device that processes the workpiece transported by the mover; A processing system comprising:

[0058] (Item 10) Item 9. A method for manufacturing an article using the processing system according to item 9, a step of transporting the workpiece by the mover; performing the processing on the workpiece transported by the mover by the processing device; A method for manufacturing an article, comprising: [Explanation of symbols]

[0059] 1 mover 2 Work 3a, 3b Magnets 7a, 7b York 11 Stator 16a, 16b coils

Claims

1. a stator having a coil array having a plurality of coils arranged in a conveying direction; a magnet row having a plurality of magnets is provided in the transport direction, and a mover is movable in the transport direction along the coil row by an electromagnetic force applied to the magnet row by the coil row, The coil array includes a first coil array and a second coil array arranged along the transport direction, the magnet row includes a first magnet row facing the first coil row and a second magnet row facing the second coil row, the magnets of the first magnet row and the magnets of the second magnet row are arranged so that their magnetic poles have different polarities in a cross section seen from the conveying direction; A conveying device characterized by:

2. Each magnet in the magnet row has a yoke, In a cross section seen from the conveying direction, a yoke included in the magnet of the first magnet row and a yoke included in the magnet of the second magnet row are provided with a magnetic gap therebetween.

2. The conveying device according to claim 1.

3. Each coil in the coil array has a core, In a cross section seen from the conveying direction, a core included in a coil of the first coil group and a core included in a coil of the second coil group are provided with a magnetic gap therebetween.

2. The conveying device according to claim 1.

4. In a cross section seen from the transport direction, currents having opposite signs to each other are input to the coils of the first coil group and the coils of the second coil group.

2. The conveying device according to claim 1.

5. a controller; In a cross section seen from the conveying direction, the coils of the first coil group and the coils of the second coil group are connected to the controller such that the directions of magnetic fluxes generated by a current input from the controller are opposite to each other.

5. The transport device according to claim 4.

6. the stator has an encoder; The mover has a scale, The encoder reads the scale and detects the position of the mover.

2. The conveying device according to claim 1, wherein:

7. 7. The conveying device according to claim 6, wherein the encoder is a magnetic encoder.

8. a stator having a coil array having a plurality of coils arranged in a conveying direction; a magnet row having a plurality of magnets is provided in the transport direction, and a mover is movable in the transport direction along the coil row by an electromagnetic force applied to the magnet row by the coil row, the magnet row includes a first magnet row that receives an electromagnetic force from the coil row for moving the mover in the transport direction, and a second magnet row that collects magnetic flux from the first magnet row, the coil array is arranged along the transport direction, the first magnet row is disposed opposite the coil row, the second magnet row is provided adjacent to the first magnet row along the transport direction, the first magnet row and the second magnet row are provided so that the polarities of the magnetic poles are different from each other in a cross section seen from the conveyance direction; A conveying device characterized by:

9. A conveying device according to any one of claims 1 to 8; a process device that processes the workpiece transported by the mover; A processing system comprising:

10. A method for manufacturing an article using the processing system according to claim 9, a step of transporting the workpiece by the mover; The workpiece transported by the mover is subjected to the processing by the process device. Process and A method for manufacturing an article, comprising:

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