Temperature control device

Abstract

To effectively adjust the temperature of a fluid.SOLUTION: The temperature control device includes a circulation flow path 10 through which a fluid flows, a plurality of heating and cooling units 4 arranged in series in the circulation flow path 10 and configured to heat or cool the fluid flowing through the circulation flow path 10, a tank 2 configured to store the fluid to be supplied to an external processing apparatus 100, a tank supply port 19 configured to add the fluid to the tank 2 from the outside of the circulation flow path 10, and a controller 20 configured to control the heating and cooling units 4.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present invention relates to a temperature control device. [Background technology]

[0002] Patent Documents 1 and 2 disclose techniques for maintaining a fluid flowing through a circulation flow path including a heating device at an appropriate temperature. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Publication No. 2018-119756 [Patent Document 2] Japanese Patent Application Publication No. 2019-153617 Summary of the Invention [Problem to be solved by the invention]

[0004] In a heating device for circulating fluids, when a room-temperature fluid is supplied to the tank while an external process device is operating, the temperature of the fluid in the tank drops, which can cause large fluctuations in the inlet temperature to the heating device.If the response of the heating unit is slow, it may be difficult to fully compensate for fluctuations in the inlet temperature using feedforward control that uses the inlet temperature of each heating unit as an input, and this will appear as fluctuations in the outlet temperature.

[0005] Aspects of the present invention are directed to being able to effectively adjust the temperature of a fluid. [Means for solving the problem]

[0006] According to one aspect of the present invention, there is provided a temperature control device comprising: a circulation flow path through which a fluid flows; a plurality of heating and cooling units arranged in series in the circulation flow path for heating or cooling the fluid flowing through the circulation flow path; a tank for storing the fluid to be supplied to an external process; a tank supply port for adding fluid to the tank from outside the circulation flow path; and a controller for controlling the heating and cooling unit, wherein the controller causes the heating and cooling unit to start external disturbance compensation when it detects a trigger signal that triggers adding fluid to the tank from outside the circulation flow path after operation has started. [Effects of the Invention]

[0007] According to aspects of the present invention, the temperature of the fluid can be effectively adjusted. [Brief explanation of the drawings]

[0008] [Figure 1] FIG. 1 is a schematic diagram showing an example of a temperature control device according to an embodiment. [Figure 2] FIG. 2 is a diagram illustrating an example of a controller according to the embodiment. [Figure 3] FIG. 3 is a diagram showing an example of operation of the temperature control device. [Figure 4] FIG. 4 is a diagram showing the behavior of the trigger signal and the inlet temperature. [Figure 5] FIG. 5 is a diagram comparing the actual inlet temperature with respect to the trigger signal and the fluctuation pattern of the inlet temperature (inlet temperature pattern). [Figure 6] FIG. 6 is a diagram showing the results of comparison of outlet temperature fluctuations. [Figure 7] FIG. 7 is a flowchart showing a temperature control method of the temperature control device according to the embodiment. [Figure 8] FIG. 8 is a schematic diagram showing another example of the temperature control device according to the embodiment. [Figure 9] FIG. 9 is a block diagram illustrating a computer system according to an embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0009] Hereinafter, embodiments of the present invention will be described with reference to the drawings, but the present invention is not limited thereto. The components of the embodiments described below can be combined as appropriate. In addition, some components may not be used.

[0010] [Embodiment] <Temperature control device> 1 is a schematic diagram showing an example of a temperature control device according to an embodiment. The temperature control device 1 controls the temperature of a fluid supplied to an external process device 100.

[0011] The temperature control device 1 includes a tank 2, a pump 3, a heating and cooling unit 4, a circulation flow path 10, a flow rate sensor 11, an inlet temperature sensor 12, an outlet temperature sensor 13, a supply port 17, a return port 18, a tank supply port 19, a controller 20, and a liquid level controller 30.

[0012] Tank 2 stores the fluid to be supplied to external process device 100. Pump 3 is connected downstream of tank 2. Pump 3 is connected upstream of heating and cooling unit 4. The fluid stored in tank 2 is pumped by pump 3 and passes through heating and cooling unit 4. The supply amount of fluid supplied from tank 2 to heating and cooling unit 4 via pump 3 is denoted as Q.

[0013] The fluid supplied to the external process device 100 that is not used and is discharged is recovered in the tank 2 via the return port 18. The flow rate of the fluid used in the process 101 of the external process device 100 is designated as Qp. The flow rate of the fluid recovered to the tank 2 via the return port 18 is designated as Qr.

[0014] A liquid level sensor 2s is disposed in the tank 2 to detect the amount of fluid in the tank 2. The liquid level sensor 2s detects the liquid level of the fluid in the tank 2. The liquid level sensor 2s outputs the detection result to the controller 20.

[0015] When the fluid in the tank 2 falls below the lower limit threshold (liquid volume threshold) L2, the required amount of new fluid is supplied from the tank supply port 19. The flow rate of fluid added to the tank 2 from outside the temperature control device 1 via the tank supply port 19 and the supply valve 19v is defined as Qs.

[0016] The heating and cooling unit 4 is capable of at least one of heating and cooling the fluid supplied to the external process equipment 100. The heating and cooling unit 4 is a container having a certain volume and equipped with an inlet and an outlet for the fluid. For example, when the external process equipment 100 is a pure water heating device, the heating and cooling unit 4 is equipped with a halogen lamp heater in a quartz bottle in which the inlet and outlet are arranged, and heats the pure water by radiant heat.

[0017] The heating and cooling unit 4 is configured with two or more heating and cooling units 4 connected in series or in parallel, or a combination thereof. The heating and cooling units 4 are controlled by a controller 20 so that the outlet temperature PV3 of the fluid passing therethrough becomes the target temperature SV. In this embodiment, the heating and cooling units 4 are configured with three heating and cooling units 4a, 4b, and 4c connected in series. When there is no particular need to distinguish between the heating and cooling unit 4a, the heating and cooling unit 4b, and the heating and cooling unit 4c, they will be simply referred to as the heating and cooling unit 4.

[0018] The heating and cooling units 4 are equipped with at least an inlet temperature sensor 12 before the inlet of the most upstream heating and cooling unit 4, an outlet temperature sensor 13 after the outlet of the most downstream heating and cooling unit 4, and a flow meter. The heating and cooling units 4 may also be equipped with a temperature sensor or temperature estimation means that measures the outlet temperature of each heating and cooling unit 4.

[0019] The circulation flow path 10 is a flow path through which a fluid supplied to an external process device 100 circulates. The circulation flow path 10 is provided with a tank 2, a pump 3, a heating / cooling unit 4, a flow rate sensor 11, an inlet temperature sensor 12, an outlet temperature sensor 13, a supply port 17, a return port 18, and a process 101 of the external process device 100 via a valve 102.

[0020] The flow rate sensor 11 is disposed between the tank 2 and the heating and cooling unit 4. The flow rate sensor 11 is disposed between the pump 3 and the heating and cooling unit 4a, which is the most upstream of the heating and cooling units 4. The flow rate sensor 11 measures the amount Q of fluid supplied to the heating and cooling unit 4.

[0021] The inlet temperature sensor 12 is disposed between the tank 2 and the inlet of the heating and cooling unit 4. The inlet temperature sensor 12 is disposed between the pump 3 and the heating and cooling unit 4a, which is the most upstream of the heating and cooling units 4. The inlet temperature sensor 12 measures the inlet temperature Tin of the fluid, which is the temperature of the fluid flowing into the most upstream heating and cooling unit 4.

[0022] The outlet temperature sensor 13 is disposed between the outlet of the heating and cooling unit 4 and the supply port 17 to the external process device 100. The outlet temperature sensor 13 is disposed between the outlet of the heating and cooling unit 4c, which is the most downstream of the heating and cooling units 4, and the supply port 17 to the external process device 100. The outlet temperature sensor 13 measures the outlet temperature PV3 of the fluid.

[0023] The supply port 17 is a port for supplying a fluid to an external process device 100 provided downstream of the heating and cooling unit 4. The supply port 17 supplies the fluid whose temperature has been adjusted by the heating and cooling unit 4 to the external process device 100.

[0024] The return port 18 is a port that receives the return fluid from the external process device 100 into the tank 2. The return port 18 recovers excess fluid in the external process device 100 into the tank 2. The flow rate of the fluid recovered into the tank 2 via the return port 18 is Qr.

[0025] The tank supply port 19 is a port for adding new fluid to the tank 2 from outside the temperature control device 1. The flow rate of the new fluid added to the tank 2 via the tank supply port 19 and the supply valve 19v is Qs. The supply valve 19v arranged in the tank supply port 19 is opened when the fluid in the tank 2 falls below a lower threshold L2.

[0026] The supply valve 19v is controlled to open and close by a control signal from a liquid level controller 30, which will be described later.

[0027] In the temperature control device 1 configured as described above, fluid stored in the tank 2 is pumped by the pump 3 and passes through the heating and cooling unit 4. The temperature of the passing fluid is controlled by a controller 20 (described later) so that the temperature PV3 observed by the outlet temperature sensor 13 becomes the target temperature SV, and the fluid is supplied to the external process device 100 through the supply port 17. After the fluid circulating through the circulation flow path 10 reaches the target temperature SV, the fluid whose temperature has been adjusted by the heating and cooling unit 4 is supplied to the external process device 100 through the supply port 17. In the external process device 100, a portion of the supplied fluid is used to perform, for example, a semiconductor wafer cleaning process. Excess fluid not used in the external process device 100 is returned to the tank 2 through the return port 18. When the level of the fluid in the tank 2 decreases due to the supply of fluid to the external process device 100, the temperature control device 1 adds new fluid at room temperature to the tank 2 through the tank supply port 19 and the supply valve 19v.

[0028] The external process equipment 100 is, for example, a semiconductor wafer cleaning equipment. The semiconductor wafer cleaning equipment cleans semiconductor wafers one by one at predetermined time intervals. The cleaning cycle and the amount of fluid (pure water) used in the semiconductor wafer cleaning equipment are patterned, and therefore the temperature fluctuations of the fluid are also patterned.

[0029] <controller> The controller 20 calculates the manipulated variable MV of each heating and cooling unit 4 relative to the target temperature SV of the fluid based on the measurement results of the flow rate sensor 11, the inlet temperature sensor 12, and the outlet temperature sensor 13. The controller 20 calculates the manipulated variable MV1 of the heating and cooling unit 4a, the manipulated variable MV2 of the heating and cooling unit 4b, and the manipulated variable MV3 of the heating and cooling unit 4c relative to the target temperature SV of the fluid based on the supply rate Q measured by the flow rate sensor 11, the inlet temperature Tin measured by the inlet temperature sensor 12, a fluctuation pattern Tin' of the inlet temperature described below, and the outlet temperature PV3 measured by the outlet temperature sensor 13. The controller 20 operates each heating and cooling unit 4 in accordance with the calculated manipulated variables to control the outlet temperature PV3 to a desired temperature.

[0030] The control of the outlet temperature PV3 using the heating and cooling unit 4 by the controller 20 will be described. To compensate for the delay in response of the heating and cooling unit 4, compensation is performed using feedforward control. If compensation using feedforward control is started after detecting a fluctuation in the inlet temperature Tin of the heating and cooling unit 4, there is a risk that the delay in response cannot be compensated for. Therefore, in this embodiment, the controller 20 starts disturbance compensation using feedforward control at a timing earlier than the actual fluctuation in the inlet temperature Tin. In this embodiment, after starting operation, when the controller 20 detects that a trigger signal that triggers the addition of fluid from outside the circulation flow path 10 to the tank 2 is ON, the controller 20 causes the heating and cooling unit 4 to start disturbance compensation, which is compensation for the fluctuation in the inlet temperature Tin.

[0031] The trigger signal is, for example, a signal indicating that the liquid volume in the tank 2, in other words, the liquid level in the tank 2, is below the lower limit threshold L2. The trigger signal is, for example, a signal indicating that the detection result of the liquid level sensor 2s indicates that the liquid volume in the tank 2 is below the lower limit threshold L2. When the liquid volume in the tank 2 decreases and room temperature fluid is added to the tank 2 from outside, the inlet temperature Tin fluctuates. Therefore, by starting disturbance compensation based on the trigger signal indicating the liquid volume in the tank 2, disturbance compensation is started at an earlier timing than the actual fluctuation of the inlet temperature Tin.

[0032] The trigger signal is, for example, a signal indicating the flow rate of fluid flowing through the flow path from the tank supply port 19 to the tank 2. The trigger signal is detected when the detection result of the liquid volume sensor 19s indicates that the flow rate of new fluid supplied from the outside to the tank 2 is equal to or greater than the flow rate threshold. In this case, as shown in FIG. 8, the liquid volume sensor 19s is disposed in the fluid flow path between the tank supply port 19 and the tank 2. FIG. 8 is a schematic diagram showing another example of a temperature control device according to an embodiment. When fluid flows through the flow path from the tank supply port 19 to the tank 2, the inlet temperature Tin fluctuates due to the addition of room temperature fluid to the tank 2 from the outside. Therefore, by starting disturbance compensation based on the trigger signal indicating the flow rate of fluid flowing through the flow path from the tank supply port 19 to the tank 2, disturbance compensation is started earlier than the actual fluctuation of the inlet temperature Tin.

[0033] The trigger signal is, for example, an open signal to supply valve 19v of tank supply port 19. When the supply of fluid to external process device 100 starts, the amount of liquid in tank 2 subsequently decreases, and room temperature fluid is added to tank 2 from outside, causing the inlet temperature Tin to fluctuate. Therefore, by starting disturbance compensation based on the trigger signal, which is an open signal to supply valve 19v, disturbance compensation is started at an earlier timing than the actual fluctuation of inlet temperature Tin.

[0034] The trigger signal may be, for example, a process start signal when a process is performed periodically in external process device 100. By starting disturbance compensation based on the trigger signal, which is a process start signal, disturbance compensation is started at an earlier timing than the fluctuation of the actual inlet temperature Tin.

[0035] By starting disturbance compensation based on the trigger signal as described above, disturbance compensation is started at a timing earlier than the fluctuation of the inlet temperature Tin, thereby compensating for the delay in the response of the heating and cooling unit 4.

[0036] The disturbance compensation is designed taking into consideration the dynamic characteristics of the tank 2 and the area from the tank 2 to the inlet temperature sensor 12 .

[0037] After the process starts, if the controller 20 detects that the trigger signal is ON, it starts disturbance compensation based on the inlet temperature fluctuation pattern Tin' stored in the pattern learning / output device 25. In this operation mode, the controller 20 executes feedforward control based on the inlet temperature fluctuation pattern Tin' stored in the pattern learning / output device 25 at a timing earlier than the detection of fluctuations in the actual inlet temperature Tin.

[0038] The basic configuration of the feedback control unit 22 and the feedforward control unit 23 in the controller 20 will be described using Fig. 2. Fig. 2 is a diagram schematically illustrating an example of a controller according to an embodiment. The controller 20 controls the heating and cooling unit 4 to adjust the outlet temperature PV3 to a desired temperature.

[0039] The controller 20 includes an SV distributor 21, a first feedback control unit 22a, a second feedback control unit 22b, a third feedback control unit 22c, a first feedforward control unit 23a, a second feedforward control unit 23b, a third feedforward control unit 23c, and a pattern learning / output unit 25.

[0040] The first feedback control unit 22a, the second feedback control unit 22b, and the third feedback control unit 22c use, for example, a PID (Proportional Integral Differential) controller. The first feedback control unit 22a calculates a feedback amount FB1 for the heating and cooling unit 4a by taking as its input the target temperature SV1 distributed to the heating and cooling unit 4a from the SV distributor 21, which receives as its input the target temperature SV and the inlet temperature fluctuation pattern Tin', and calculating the deviation e1 between the outlet temperature PV1 of the heating and cooling unit 4a. The second feedback control unit 22b calculates a feedback amount FB2 for the heating and cooling unit 4b by taking as its input the target temperature SV2 distributed to the heating and cooling unit 4b from the SV distributor 21, which receives as its input the target temperature SV and the inlet temperature fluctuation pattern Tin', and calculating the deviation e2 between the outlet temperature PV2 of the heating and cooling unit 4b. The third feedback control unit 22c calculates the feedback amount FB3 for the heating and cooling unit 4c by taking the deviation e3 between the target temperature SV3 distributed to the heating and cooling unit 4c by the SV distributor 21, which receives the target temperature SV and the inlet temperature fluctuation pattern Tin' as input, and the outlet temperature PV3 of the heating and cooling unit 4c. Here, the outlet temperature PV1 of the heating and cooling unit 4a and the outlet temperature PV2 of the heating and cooling unit 4b are estimated as estimated temperatures PV1h and PV2h by an estimator. A commonly known calculation method such as an observer is used as the estimator.

[0041] The first feedforward control unit 23a receives as input the target temperature SV1 distributed to the heating and cooling unit 4a by the SV distributor 21, which receives as input the target temperature SV and the inlet temperature fluctuation pattern Tin', the inlet temperature fluctuation pattern Tin', and the supply rate Q, and calculates a feedforward amount FF1 for the heating and cooling unit 4a. The second feedforward control unit 23b receives as input the target temperature SV2 distributed to the heating and cooling unit 4b by the SV distributor 21, which receives as input the target temperature SV and the inlet temperature fluctuation pattern Tin', the outlet temperature PV1 of the heating and cooling unit 4a, and the supply rate Q, and calculates a feedforward amount FF2 for the heating and cooling unit 4b. The third feedforward control unit 23c receives as input the target temperature SV3 distributed to the heating and cooling unit 4c by the SV distributor 21, which receives as input the target temperature SV and the inlet temperature fluctuation pattern Tin', the outlet temperature PV2 of the heating and cooling unit 4b, and the supply rate Q, and calculates a feedforward amount FF3.

[0042] The feedforward control unit 23 can more effectively suppress fluctuations in the inlet temperature Tin and the flow rate of each heating and cooling unit 4.

[0043] The final manipulated variable MV of each heating / cooling unit 4 is obtained by adding the calculated feedforward variable to each feedback variable. The final manipulated variable MV of heating / cooling unit 4a is obtained by adding feedforward variable FF1 to feedback variable FB1. The final manipulated variable MV of heating / cooling unit 4b is obtained by adding feedforward variable FF2 to feedback variable FB2. The final manipulated variable MV of heating / cooling unit 4c is obtained by adding feedforward variable FF3 to feedback variable FB3.

[0044] The feedforward amount FFi is calculated, for example, by the following formula: FFi (S) indicates the dynamic characteristic part, and K indicates the coefficient.

[0045]

number

[0046] In a preliminary operation mode for pattern learning before starting actual operation, the pattern learning / output device 25 stores the timing of the trigger signal, which is the timing at which fluid is supplied from the supply valve 19v to the tank 2, and the fluctuation pattern Tin′ of the inlet temperature after the trigger signal, when the external process device 100 is operated under the same operating conditions, such as the same temperature and the same supply pattern of fluid to the process, as those in the actual operation mode.

[0047] The fluctuation pattern Tin' of the inlet temperature is data based on the temperature signal observed by the inlet temperature sensor 12 in the preparatory operation mode.

[0048] The fluctuation pattern Tin' of the inlet temperature may be created from operational data during the past process.

[0049] An example of operation of the temperature control device 1 will be described using Figure 3. Figure 3 is a diagram showing an example of operation of the temperature control device. Figure 3 shows temperatures in a typical operation example from the start of operation to the process, cycles during the process, and a supply trigger signal for adding a fluid, which is an example of a fluid. In this example, a process is performed at predetermined time intervals in the external process device 100. In this example, the target temperature SV of the fluid supplied to the external process device 100 is 60°C. After the temperature control device 1 starts operation, the fluid is heated by the heating and cooling unit 4, and the outlet temperature PV3 of the fluid reaches the target temperature SV of 60°C.

[0050] Before the process of the external process device 100 starts, the fluid supplied to the external process device 100 is not used and is returned to the tank 2 via the return port 18. As a result, the temperature of the fluid in the tank 2 gradually increases, and the inlet temperature Tin of the fluid, which is the temperature of the fluid supplied to the heating and cooling unit 4, also gradually increases.

[0051] After the fluid outlet temperature PV3 reaches the target temperature SV, a process start signal is output in the external process device 100, and the process begins. During the process in the external process device 100, a certain amount of fluid is periodically used within the external process device 100. Because some of the fluid supplied to the external process device 100 is not recovered, the fluid in the tank 2 decreases. When the fluid in the tank 2 falls below the lower threshold L2, room temperature fluid is supplied to the tank 2 from the tank supply port 19 and supply valve 19v based on the supply trigger signal. This reduces the temperature of the fluid in the tank 2, and the fluid inlet temperature Tin, which is the temperature of the fluid supplied to the heating and cooling unit 4, also decreases. This inlet temperature fluctuation pattern Tin' is repeated until the process is stopped.

[0052] When the fluid at room temperature is supplied to the tank 2 and the fluid in the tank 2 reaches or exceeds the upper limit threshold L1, a close signal is output to the supply valve 19v, and the supply of the fluid at room temperature is stopped.

[0053] Fluctuations in the inlet temperature Tin of the fluid lead to fluctuations in the outlet temperature PV3. Therefore, the feedback control unit 22 and the feedforward control unit 23 calculate the operation amount of each heating / cooling unit 4 so as to suppress fluctuations in the outlet temperature PV3. Furthermore, as described above, to compensate for the delay in the response of the heating / cooling unit 4, disturbance compensation is started based on the trigger signal at a timing earlier than the fluctuations in the inlet temperature Tin.

[0054] Figure 4 shows the behavior of the trigger signal and the inlet temperature. In Figure 4, the trigger signal is turned ON and fluid is supplied to tank 2 for approximately 27 seconds. Six seconds after the trigger signal is turned ON, the inlet temperature Tin begins to drop. In other words, the trigger signal can be detected six seconds earlier than the start of fluctuations in the inlet temperature Tin.

[0055] Figure 5 is a diagram comparing the actual inlet temperature in response to the trigger signal with the inlet temperature fluctuation pattern (inlet temperature pattern). In this operation mode, when the trigger signal turns ON, the inlet temperature fluctuation pattern Tin' stored in the pattern learning / output device 25 is input to the feedforward controller up to 6 seconds earlier than the temperature fluctuation of the actual inlet temperature Tin. This allows disturbance compensation for fluctuations in the inlet temperature Tin to be performed more quickly.

[0056] <Liquid level controller> The liquid level controller 30 monitors and controls the liquid level in the tank 2. The liquid level controller 30 outputs an open / close signal to the supply valve 19v based on the detection result of the liquid level sensor 2s.

[0057] When the fluid in the tank 2 decreases to a certain amount and the liquid level sensor 2s detects that the amount is below a predetermined lower threshold L2 of the tank level, the liquid level controller 30 outputs a valve open command to the supply valve 19v. As a result, room temperature fluid is supplied from the tank supply port 19. When the liquid level sensor 2s detects that the room temperature fluid is above a predetermined upper threshold L1 of the tank level as a result of the supply of room temperature fluid to the tank 2, the liquid level controller 30 outputs a valve close command to the supply valve 19v.

[0058] <Computer System> FIG. 9 is a block diagram showing a computer system 1000 according to an embodiment. The controller 20 and the liquid level controller 30 described above are included in the computer system 1000. The computer system 1000 includes a processor 1001 such as a CPU (Central Processing Unit), a main memory 1002 including a nonvolatile memory such as a ROM (Read Only Memory) and a volatile memory such as a RAM (Random Access Memory), a storage 1003, and an interface 1004 including an input / output circuit. The functions of the controller 20 and the liquid level controller 30 described above are stored as a program in the storage 1003. The processor 1001 reads the program from the storage 1003, loads it into the main memory 1002, and executes the above-described processing according to the program. The program may be distributed to the computer system 1000 via a network.

[0059] <Temperature control method> An example of a temperature control method of a temperature control device will be described with reference to Fig. 7. Fig. 7 is a flowchart showing the temperature control method of a temperature control device according to an embodiment. When the temperature control device 1 is started, the process of the flowchart shown in Fig. 7 is executed at predetermined time intervals.

[0060] The controller 20 receives the target temperature SV, the inlet temperature fluctuation pattern Tin', the outlet temperature PV3, the supply amount Q, the manipulated variable MV1, the manipulated variable MV2, and the manipulated variable MV3 (step ST11). The target temperature SV is stored, for example, in a memory unit (not shown) of the temperature control device 1. The inlet temperature fluctuation pattern Tin' is acquired from the pattern learning / output device 25. The outlet temperature PV3 is acquired from the outlet temperature sensor 13. The supply amount Q is acquired from the flow rate sensor 11. The manipulated variables MV1, MV2, and MV3 are current manipulated variables acquired from the heating / cooling unit 4a, the heating / cooling unit 4b, and the heating / cooling unit 4c.

[0061] The controller 20 uses the estimator to calculate the estimated temperatures PV1h and PV2h from the various values ​​acquired in step ST11 (step ST12).

[0062] The controller 20 calculates a target temperature SV1 for the heating and cooling unit 4a, a target temperature SV2 for the heating and cooling unit 4b, and a target temperature SV3 for the heating and cooling unit 4c using the SV distributor 21. The controller 20 distributes the target temperatures SV for the heating and cooling units 4a, 4b, and 4c as the target temperatures SV1 for the heating and cooling unit 4a, SV2 for the heating and cooling unit 4b, and SV3 for the heating and cooling unit 4c using the SV distributor 21.

[0063] The controller 20 calculates the feedback amounts FB1, FB2, and FB3 (step ST14). The controller 20 determines deviations from the target temperatures SV1, SV2, SV3, outlet temperature PV3, estimated temperatures PV1h, and PV2h, and calculates the feedback amounts FB1, FB2, and FB3 using the first feedback control unit 22a, the second feedback control unit 22b, and the third feedback control unit 22c. The algorithm for calculating the feedback amounts FB1, FB2, and FB3 is as described above.

[0064] The controller 20 calculates the feedforward amounts FF1, FF2, and FF3 (step ST15). The controller 20 calculates the feedforward amounts FF1, FF2, and FF3 using the first feedforward control unit 23a, the second feedforward control unit 23b, and the third feedforward control unit 23c from the fluctuation pattern Tin' of the inlet temperature, the estimated temperature PV1h, the estimated temperature PV2h, the target temperature SV1, the target temperature SV2, and the target temperature SV3. The algorithm for calculating the feedforward amounts FF1, FF2, and FF3 is as described above.

[0065] The controller 20 calculates the manipulated variable MV1 by adding the feedback variable FB1 and the feedforward variable FF1, calculates the manipulated variable MV2 by adding the feedback variable FB2 and the feedforward variable FF2, and calculates the manipulated variable MV3 by adding the feedback variable FB3 and the feedforward variable FF3 (step ST16).

[0066] <Effects> As described above, in the embodiment, when it is detected that the trigger signal that triggers the addition of fluid from outside the circulation flow path 10 to the tank 2 is ON after the start of operation, the heating and cooling unit 4 is caused to start disturbance compensation. The embodiment can cause the heating and cooling unit 4 to start disturbance compensation before the actual inlet temperature Tin fluctuates. The embodiment can compensate for delays in the responsiveness of the heating and cooling unit 4. In this way, the embodiment can make it possible to effectively adjust the temperature of the fluid.

[0067] In this embodiment, disturbance compensation can be started using a signal indicating that the liquid level in the tank 2 is less than the lower threshold L2 as a trigger signal. This embodiment can cause the heating and cooling unit 4 to start disturbance compensation before the actual inlet temperature Tin fluctuates.

[0068] In this embodiment, disturbance compensation can be started using an open signal to the supply valve 19v of the tank supply port 19 as a trigger signal. This embodiment can cause the heating and cooling unit 4 to start disturbance compensation before the actual inlet temperature Tin fluctuates.

[0069] In the embodiment, the disturbance compensation can be started using a process start signal in the external process device 100 as a trigger signal. In the embodiment, the heating and cooling unit 4 can start the disturbance compensation before the actual inlet temperature Tin fluctuates.

[0070] In an embodiment, the disturbance compensation can be set based on the dynamic characteristics of the tank 2 and from the tank 2 to the inlet temperature sensor 12 .

[0071] In this embodiment, the timing at which an open signal is sent to supply valve 19v of tank supply port 19 when fluid is supplied to external process device 100 and the inlet temperature fluctuation pattern Tin' are stored before the process starts, and when a trigger signal is detected after the process starts, disturbance compensation can be started based on the stored inlet temperature fluctuation pattern Tin'. This embodiment makes it possible to effectively adjust the temperature of the fluid.

[0072] In this embodiment, disturbance compensation can be started using as a trigger signal a signal indicating that the detection result of the liquid volume sensor 19s indicates that the liquid volume in the tank 2 is less than the lower threshold L2. In this embodiment, the heating and cooling unit 4 can start disturbance compensation before the actual inlet temperature Tin fluctuates.

[0073] In this embodiment, disturbance compensation can be started using as a trigger signal a signal indicating that the detection result of the liquid level sensor 2s indicates that the liquid volume in the tank 2 is less than the lower threshold L2. This embodiment can cause the heating and cooling unit 4 to start disturbance compensation before the actual inlet temperature Tin fluctuates.

[0074] FIG. 6 shows the comparison results of outlet temperature fluctuations. FIG. 6 shows the comparison results of outlet temperature fluctuations between the conventional method and the embodiment by simulation. The conventional method is a method in which feedforward control is started after detecting fluctuations in the actual inlet temperature Tin. The embodiment has an improved fluctuation range of the outlet temperature PV3 compared to the conventional method.

[0075] <Modification> In the above description, the inlet temperature sensor 12 and the outlet temperature sensor 13 are provided as temperature sensors, but a temperature sensor or temperature estimation means for measuring the outlet temperature PV of each heating and cooling unit 4 may also be provided.

[0076] Although the above description has been made on the case where the heating / cooling unit 4 heats a fluid, it is also applicable to the case where the heating / cooling unit 4 cools a fluid.

[0077] Although an example of three heating and cooling units has been shown above, four or more heating and cooling units may be provided.

[0078] In the above description, the pump 3 is arranged upstream of the heating / cooling unit 4, but it may also be arranged downstream of the heating / cooling unit 4.

[0079] In the above, when it is determined that the difference between the fluctuation pattern Tin' of the inlet temperature and the actual inlet temperature Tin is equal to or greater than the difference threshold, the controller 20 may correct the fluctuation pattern Tin' of the inlet temperature. [Explanation of symbols]

[0080] 1...temperature control device, 2...tank, 2s...liquid level sensor, 3...pump, 4...heating / cooling unit, 4a...heating / cooling unit, 4b...heating / cooling unit, 4c...heating / cooling unit, 10...circulation flow path, 11...flow rate sensor, 12...inlet temperature sensor, 13...outlet temperature sensor, 17...supply port, 18...return port, 19...tank supply port, 19s...flow rate sensor, 19v...supply valve, 20...controller, 21...SV distributor, 22a...first feedback control section, 22b...second feedback control section, 22c...third feedback control section, 23a...first feedforward control section, 23b...second feedforward control section, 23c...third feedforward control section, 25...pump Turn learning output device, 30...liquid level controller, 100...external process device, 101...process, 102...valve, FB1...feedback amount, FB2...feedback amount, FB3...feedback amount, FF1...feedforward amount, FF2...feedforward amount, FF3...feedforward amount, L1...upper threshold, L2...lower threshold (liquid volume threshold), MV1...manipulated amount, MV2...manipulated amount, MV3...manipulated amount, PV1...outlet temperature, PV2...outlet temperature, PV3...outlet temperature, PV1h...estimated temperature, PV2h...estimated temperature, Q...supply amount, Qp...flow rate, Qr...flow rate, Qs...flow rate, SV...target temperature, SV1...target temperature, SV2...target temperature, SV3...target temperature, Tin...inlet temperature.

Claims

1. a circulation flow path through which a fluid flows; a plurality of heating and cooling units arranged in series in the circulation flow path, for heating or cooling the fluid flowing through the circulation flow path; a tank for storing the fluid to be supplied to an external process; a tank supply port for adding fluid to the tank from outside the circulation channel; a controller for controlling the heating and cooling unit; Equipped with the controller causes the heating / cooling unit to start external disturbance compensation when detecting a trigger signal that triggers adding fluid from outside the circulation flow path to the tank after the start of operation; Temperature control device.

2. the trigger signal is a signal indicating that the liquid level in the tank is less than a liquid level threshold; The temperature control device according to claim 1 .

3. the trigger signal is an open signal to a supply valve of the tank supply port; The temperature control device according to claim 1 .

4. the trigger signal is a process start signal for the external process; The temperature control device according to claim 1 .

5. an inlet temperature sensor that measures the inlet temperature of the heating and cooling unit; Equipped with The disturbance compensation is set based on dynamic characteristics of the tank and a section from the tank to the inlet temperature sensor. The temperature control device according to claim 1 .

6. the controller stores, before the start of the process, the timing at which an open signal was sent to the tank supply port and a fluctuation pattern of the inlet temperature of the heating and cooling unit when the fluid is supplied to the external process, and, after the start of the process, when the trigger signal is detected, starts disturbance compensation based on the stored fluctuation pattern of the inlet temperature. The temperature control device according to claim 1 .

7. a liquid level sensor for detecting the liquid level of the tank; Equipped with the trigger signal is a signal indicating that the detection result of the liquid level sensor is that the liquid level in the tank is less than a liquid level threshold value; The temperature control device according to claim 2 .

8. a liquid level sensor for detecting the liquid level of the tank; Equipped with the trigger signal is a signal indicating that the detection result of the liquid level sensor is that the liquid level in the tank is less than a liquid level threshold value; The temperature control device according to claim 1 .

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